TWI910345B - 流體控制裝置、流體控制系統、流體控制裝置用程式及流體控制方法 - Google Patents

流體控制裝置、流體控制系統、流體控制裝置用程式及流體控制方法

Info

Publication number
TWI910345B
TWI910345B TW111115914A TW111115914A TWI910345B TW I910345 B TWI910345 B TW I910345B TW 111115914 A TW111115914 A TW 111115914A TW 111115914 A TW111115914 A TW 111115914A TW I910345 B TWI910345 B TW I910345B
Authority
TW
Taiwan
Prior art keywords
flow rate
fluid control
calculated
reference value
flow
Prior art date
Application number
TW111115914A
Other languages
English (en)
Chinese (zh)
Other versions
TW202244468A (zh
Inventor
松浦和宏
長井健太郎
松本颯太
Original Assignee
日商堀場Ｓｔｅｃ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商堀場Ｓｔｅｃ股份有限公司 filed Critical 日商堀場Ｓｔｅｃ股份有限公司
Publication of TW202244468A publication Critical patent/TW202244468A/zh
Application granted granted Critical
Publication of TWI910345B publication Critical patent/TWI910345B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/028—Controlling a pressure difference
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
TW111115914A 2021-05-13 2022-04-27 流體控制裝置、流體控制系統、流體控制裝置用程式及流體控制方法 TWI910345B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-081562 2021-05-13
JP2021081562 2021-05-13

Publications (2)

Publication Number Publication Date
TW202244468A TW202244468A (zh) 2022-11-16
TWI910345B true TWI910345B (zh) 2026-01-01

Family

ID=84028155

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111115914A TWI910345B (zh) 2021-05-13 2022-04-27 流體控制裝置、流體控制系統、流體控制裝置用程式及流體控制方法

Country Status (6)

Country Link
US (1) US20240248496A1 (https=)
JP (1) JP7853965B2 (https=)
KR (1) KR20240007170A (https=)
CN (1) CN117222957A (https=)
TW (1) TWI910345B (https=)
WO (1) WO2022239447A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200523532A (en) * 2004-01-06 2005-07-16 Boc Group Inc Device, method, and system for controlling fluid flow
WO2006104535A1 (en) * 2005-02-09 2006-10-05 Honeywell International Inc. Method and system for balancing bleed flows from gas turbine engines
JP2017200318A (ja) * 2016-04-27 2017-11-02 オリンパス株式会社 駆動装置および駆動方法
JP2017215726A (ja) * 2016-05-31 2017-12-07 株式会社堀場エステック 流体制御装置
JP2019020781A (ja) * 2017-07-11 2019-02-07 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
TW202043710A (zh) * 2019-04-30 2020-12-01 美商伊利諾工具工程公司 具有高精確度感測器和先進診斷系統的質量流量控制器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7349745B2 (en) * 2004-10-20 2008-03-25 Fisher Controls International Llc. Lead-lag input filter arrangement with adjustable initial conditions for electro-pneumatic control loops
CN102713533B (zh) * 2009-08-12 2016-12-28 微动公司 用于确定振动流量计中的零点偏移的方法和装置
JP5454603B2 (ja) * 2011-05-18 2014-03-26 株式会社デンソー 流量測定装置
JP6289997B2 (ja) * 2014-05-14 2018-03-07 株式会社堀場エステック 流量センサの検査方法、検査システム、及び、検査システム用プログラム
KR20160102807A (ko) 2015-02-23 2016-08-31 주식회사 엘지화학 금속 실리콘 입자 분산액 및 이를 이용한 클로로실란의 제조방법
JP6628754B2 (ja) * 2017-03-01 2020-01-15 株式会社デンソー 流量測定システム
TWI755704B (zh) * 2019-05-14 2022-02-21 日商富士金股份有限公司 流量控制裝置、流量控制方法、流量控制裝置的控制程式

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200523532A (en) * 2004-01-06 2005-07-16 Boc Group Inc Device, method, and system for controlling fluid flow
WO2006104535A1 (en) * 2005-02-09 2006-10-05 Honeywell International Inc. Method and system for balancing bleed flows from gas turbine engines
JP2017200318A (ja) * 2016-04-27 2017-11-02 オリンパス株式会社 駆動装置および駆動方法
JP2017215726A (ja) * 2016-05-31 2017-12-07 株式会社堀場エステック 流体制御装置
JP2019020781A (ja) * 2017-07-11 2019-02-07 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
TW202043710A (zh) * 2019-04-30 2020-12-01 美商伊利諾工具工程公司 具有高精確度感測器和先進診斷系統的質量流量控制器

Also Published As

Publication number Publication date
CN117222957A (zh) 2023-12-12
WO2022239447A1 (ja) 2022-11-17
KR20240007170A (ko) 2024-01-16
US20240248496A1 (en) 2024-07-25
JP7853965B2 (ja) 2026-04-30
JPWO2022239447A1 (https=) 2022-11-17
TW202244468A (zh) 2022-11-16

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