KR20240007170A - 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램, 및 유체 제어 방법 - Google Patents

유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램, 및 유체 제어 방법 Download PDF

Info

Publication number
KR20240007170A
KR20240007170A KR1020237039839A KR20237039839A KR20240007170A KR 20240007170 A KR20240007170 A KR 20240007170A KR 1020237039839 A KR1020237039839 A KR 1020237039839A KR 20237039839 A KR20237039839 A KR 20237039839A KR 20240007170 A KR20240007170 A KR 20240007170A
Authority
KR
South Korea
Prior art keywords
flow rate
fluid control
calculated
reference value
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237039839A
Other languages
English (en)
Korean (ko)
Inventor
가즈히로 마츠우라
겐타로 나가이
소타 마츠모토
Original Assignee
가부시키가이샤 호리바 에스텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 호리바 에스텍 filed Critical 가부시키가이샤 호리바 에스텍
Publication of KR20240007170A publication Critical patent/KR20240007170A/ko
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/028—Controlling a pressure difference
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
KR1020237039839A 2021-05-13 2022-03-11 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램, 및 유체 제어 방법 Pending KR20240007170A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2021-081562 2021-05-13
JP2021081562 2021-05-13
PCT/JP2022/010980 WO2022239447A1 (ja) 2021-05-13 2022-03-11 流体制御装置、流体制御システム、流体制御装置用プログラム、及び流体制御方法

Publications (1)

Publication Number Publication Date
KR20240007170A true KR20240007170A (ko) 2024-01-16

Family

ID=84028155

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237039839A Pending KR20240007170A (ko) 2021-05-13 2022-03-11 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램, 및 유체 제어 방법

Country Status (6)

Country Link
US (1) US20240248496A1 (https=)
JP (1) JP7853965B2 (https=)
KR (1) KR20240007170A (https=)
CN (1) CN117222957A (https=)
TW (1) TWI910345B (https=)
WO (1) WO2022239447A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160102807A (ko) 2015-02-23 2016-08-31 주식회사 엘지화학 금속 실리콘 입자 분산액 및 이를 이용한 클로로실란의 제조방법

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200523532A (en) * 2004-01-06 2005-07-16 Boc Group Inc Device, method, and system for controlling fluid flow
US7349745B2 (en) * 2004-10-20 2008-03-25 Fisher Controls International Llc. Lead-lag input filter arrangement with adjustable initial conditions for electro-pneumatic control loops
US7536865B2 (en) * 2005-02-09 2009-05-26 Honeywell International Inc. Method and system for balancing bleed flows from gas turbine engines
CN102713533B (zh) * 2009-08-12 2016-12-28 微动公司 用于确定振动流量计中的零点偏移的方法和装置
JP5454603B2 (ja) * 2011-05-18 2014-03-26 株式会社デンソー 流量測定装置
JP6289997B2 (ja) * 2014-05-14 2018-03-07 株式会社堀場エステック 流量センサの検査方法、検査システム、及び、検査システム用プログラム
JP2017200318A (ja) * 2016-04-27 2017-11-02 オリンパス株式会社 駆動装置および駆動方法
JP6804874B2 (ja) * 2016-05-31 2020-12-23 株式会社堀場エステック 流量制御装置、流量制御装置に用いられるプログラム、及び、流量制御方法
JP6628754B2 (ja) * 2017-03-01 2020-01-15 株式会社デンソー 流量測定システム
JP7107648B2 (ja) * 2017-07-11 2022-07-27 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
US12259739B2 (en) * 2019-04-30 2025-03-25 Illinois Tool Works Inc. Advanced pressure based mass flow controllers and diagnostics
TWI755704B (zh) * 2019-05-14 2022-02-21 日商富士金股份有限公司 流量控制裝置、流量控制方法、流量控制裝置的控制程式

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160102807A (ko) 2015-02-23 2016-08-31 주식회사 엘지화학 금속 실리콘 입자 분산액 및 이를 이용한 클로로실란의 제조방법

Also Published As

Publication number Publication date
CN117222957A (zh) 2023-12-12
WO2022239447A1 (ja) 2022-11-17
US20240248496A1 (en) 2024-07-25
TWI910345B (zh) 2026-01-01
JP7853965B2 (ja) 2026-04-30
JPWO2022239447A1 (https=) 2022-11-17
TW202244468A (zh) 2022-11-16

Similar Documents

Publication Publication Date Title
US9353899B2 (en) Water hammer recognizing and energy saving water hammer prevention system and method for controlling the same
KR910006578A (ko) 변기의 세정수 공급 장치
JP7345370B2 (ja) ガス器具流量推定装置及びガス器具流量推定方法
JP7243140B2 (ja) 水素燃料貯蔵システム
KR20240007170A (ko) 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램, 및 유체 제어 방법
KR101323065B1 (ko) 가압된 파이핑 및 라인 시스템을 영구적으로 모니터링하기 위한 방법
KR20230000975A (ko) 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램 및 유체 제어 방법
JP2018059667A (ja) 内部循環型給湯システム
KR20230159243A (ko) 유체 제어 장치, 제로점 조정 방법, 및 제로점 조정용 프로그램
KR20080078489A (ko) 비례적분미분 제어기의 출력값 제어 방법
KR20230110179A (ko) 유체 제어 장치, 유체 제어 방법, 및 유체 제어 프로그램
JP2631125B2 (ja) 負荷圧補償ポンプ吐出流量制御回路
JP2574779B2 (ja) 給水加熱器の水位制御装置
JP6585997B2 (ja) 蒸気システム
JP4782435B2 (ja) ガス供給装置
JP4550381B2 (ja) ガスメータ
US12098940B2 (en) Pressure control system, pressure control method, and pressure control program
CN111022730B (zh) 一种处理调节阀门结晶堵塞的系统、方法和存储介质
JP4488945B2 (ja) 整圧装置
JP2000163101A (ja) Ｐｉｄ制御方法
JPS63311005A (ja) 脱気器の水位制御装置
JP3810897B2 (ja) ガスタービン用燃料ガス圧縮機の待機運転方法
KR20220069621A (ko) 수트 침착을 방지하는 절탄기 및 절탄기에서 수트 침착을 방지하는 방법
JPH08211944A (ja) リターンガスブロアのサージ防止制御装置
JPH06173902A (ja) 油圧再生回路

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20231120

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20241226

Comment text: Request for Examination of Application