WO2022197110A1 - 포지티브형 감광성 수지 조성물, 절연막 및 이를 포함하는 표시장치 - Google Patents
포지티브형 감광성 수지 조성물, 절연막 및 이를 포함하는 표시장치 Download PDFInfo
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/42—Nitriles
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1003—Preparatory processes
- C08G73/1007—Preparatory processes from tetracarboxylic acids or derivatives and diamines
- C08G73/101—Preparatory processes from tetracarboxylic acids or derivatives and diamines containing chain terminating or branching agents
- C08G73/1014—Preparatory processes from tetracarboxylic acids or derivatives and diamines containing chain terminating or branching agents in the form of (mono)anhydrid
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1039—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors comprising halogen-containing substituents
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- C—CHEMISTRY; METALLURGY
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C08G73/1046—Polyimides containing oxygen in the form of ether bonds in the main chain
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1067—Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
- C08G73/1071—Wholly aromatic polyimides containing oxygen in the form of ether bonds in the main chain
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- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L25/00—Compositions of, homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Compositions of derivatives of such polymers
- C08L25/02—Homopolymers or copolymers of hydrocarbons
- C08L25/04—Homopolymers or copolymers of styrene
- C08L25/06—Polystyrene
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- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L35/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical, and containing at least one other carboxyl radical in the molecule, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
- C08L35/04—Homopolymers or copolymers of nitriles
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
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- C08L35/06—Copolymers with vinyl aromatic monomers
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F222/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
- C08F222/36—Amides or imides
- C08F222/40—Imides, e.g. cyclic imides
- C08F222/404—Imides, e.g. cyclic imides substituted imides comprising oxygen other than the carboxy oxygen
Definitions
- the present invention relates to a positive photosensitive resin composition having excellent sensitivity, an insulating film, and a display device including the same.
- OLEDs organic light emitting diodes
- AMOLEDs active matrix OLEDs
- OLED devices include an organic insulating film, and a polyimide photosensitive resin composition is generally used to form the organic insulating film.
- a polyimide photosensitive resin composition is generally used to form the organic insulating film.
- the polyimide precursors used in the conventional polyimide photosensitive resin composition the technology of substituting alkyl for polyamic esters has been applied, but alkyl-substituted polyamic esters are difficult to control solubility and have low sensitivity, so improvement measures are urgently required. to be.
- Another object of the present invention is to provide an insulating film comprising a cured product of the positive photosensitive resin composition.
- Another object of the present invention is to provide a display device including the insulating film having excellent driving reliability.
- One embodiment of the present invention for achieving the above object is a first polymer comprising at least one structure selected from the group consisting of polyamic acid ester, polyamic acid and polyimide; a second polymer including at least one hydroxyl group among the repeating units; photosensitizer; and a solvent, wherein the hydroxyl group (OH group) equivalent of the second polymer to the hydroxyl group (OH group) equivalent of the first polymer is 1:0.04 to 1:74.
- the second polymer may include any one or more repeating units of Formula 1 or 2 below.
- R 1 is an organic group having 1 to 20 carbon atoms
- R 1 to R 4 are each independently hydrogen, an organic group having 1 to 30 carbon atoms, or a substituent of Formula 3 below.
- R 5 is an alkyl group having 1 to 3 carbon atoms, and m is an integer of 1 or 2.
- An insulating film according to another aspect of the present invention includes a cured product of the positive photosensitive resin composition.
- a display device includes the insulating layer.
- the positive photosensitive resin composition according to an embodiment of the present invention is excellent in sensitivity, residual film rate, adhesion, chemical resistance, and heat resistance, and the pattern film including the positive photosensitive resin composition has a slight change in thickness in a wet environment, ,
- the display device including the positive photosensitive resin composition has an effect that the time (T 97 ) for which the luminance decreases by 3% in the driving state is 1,000 hours or more.
- the positive photosensitive resin composition has an effect of improving productivity due to excellent sensitivity.
- ITO indium tin oxide
- EL electroluminescent lighting
- a positive photosensitive resin composition includes a first polymer including at least one structure selected from the group consisting of polyamic acid ester, polyamic acid, and polyimide; a second polymer including at least one hydroxyl group among the repeating units; photosensitizer; and a solvent, wherein the hydroxyl group (OH group) equivalent of the second polymer to the hydroxyl group (OH group) equivalent of the first polymer is in a ratio of 1:0.04 to 1:74.
- the hydroxyl equivalent of the second polymer to the equivalent of the hydroxyl group of the first polymer is 1:0.04 to 1:74, it is significantly compared to the conventional polyimide-based photosensitive resin composition
- a cured film having excellent hygroscopicity, adhesion, heat resistance, residual film rate and chemical resistance can be realized while exhibiting improved sensitivity characteristics.
- the hydroxyl equivalent ratio of the first polymer and the second polymer is less than the above range, there may be a problem that the sensitivity improvement effect is reduced, and if it is out of the above ratio, the heat resistance and hygroscopicity of the cured film, the reliability of the device, etc. are reduced there may be a problem with
- the positive photosensitive resin composition is excellent in sensitivity, film remaining rate, adhesive strength, chemical resistance, and heat resistance, and exhibits low hygroscopicity.
- the second polymer may include any one or more repeating units of Formula 1 or 2 below.
- R 1 is an organic group having 1 to 20 carbon atoms
- R 1 to R 4 are each independently hydrogen, an organic group having 1 to 30 carbon atoms, or a substituent of Formula 3 below.
- R 5 is an alkyl group having 1 to 3 carbon atoms
- n is an integer of 1 or 2.
- At least one of R 1 to R 4 of Formula 2 may include a substituent of Formula 3 above.
- the adhesion and chemical resistance of the cured film may be improved as compared to the case in which the substituent of Formula 3 is absent.
- the second polymer may include the repeating unit represented by Chemical Formula 1 and may not include the repeating unit represented by Chemical Formula 2.
- the repeating unit represented by Formula 1 is included but does not include the repeating unit represented by Formula 2, the photosensitive resin composition may have better heat resistance.
- the second polymer may specifically include only one type of repeating unit represented by Chemical Formula 1.
- the second polymer may include two or more repeating units represented by Chemical Formula 1 in which R 1 of Chemical Formula 1 has different structures. More specifically, in Formula 1, the second polymer may include at least one of a repeating unit in which R 1 includes an aromatic ring structure and a repeating unit in which R 1 does not include an aromatic ring structure. The second polymer may include only a repeating unit in which R 1 includes an aromatic ring structure, or may include only a repeating unit in which R 1 does not include an aromatic ring structure, or may include them together.
- the repeating unit in which R 1 includes an aromatic ring structure may be represented by, for example, Formula 4 below, and the repeating unit in which R 1 does not include an aromatic ring structure is, for example, as in Formula 5 below. can be displayed.
- R 1 is an aliphatic organic group having 1 to 20 carbon atoms.
- the repeating unit represented by Formula 4 and the repeating unit represented by Formula 5 may be used without limitation in the mixing ratio, and only the repeating unit represented by Formula 4 may be included, or the repeating unit represented by Formula 5 may only be included.
- a higher molar ratio of the repeating unit represented by Chemical Formula 5 than the repeating unit represented by Chemical Formula 4 may be more advantageous in terms of transmittance.
- the repeating unit represented by Formula 4 may be included in a ratio of 1 to 80 mol%, specifically 10 to 50 mol%, and more specifically 10 to 30 mol%, but is limited thereto It can be used by adjusting the molar ratio of an appropriate level.
- the second polymer may more specifically include a repeating unit represented by the following Chemical Formulas 6 to 7 in addition to the repeating unit represented by Chemical Formula 1 or the repeating unit represented by Chemical Formula 2 can
- the second polymer may be formed of only the repeating unit represented by Chemical Formula 4, and in this case, the effect of improving the sensitivity of the photosensitive resin composition may be excellent even if other repeating units are not included.
- the second polymer includes the repeating unit represented by Chemical Formula 5
- R 2 may be an aryl group or an alkyl group, and in the case of an aryl group, it may be more effective with respect to a trade-off, that is, a decrease in the residual film rate and adhesive strength, which occurs when the sensitivity of the photosensitive resin composition is improved.
- R 2 may be a substituted or unsubstituted aryl group having 6 to 30 carbon atoms or an alkyl group having 1 to 10 carbon atoms.
- the second polymer includes the repeating unit represented by Chemical Formulas 6 to 7, the sum of the repeating units represented by Chemical Formulas 6 to 7 is 30 mol% or less with respect to the total repeating units of the second polymer. it's good When the sum of the repeating units represented by Chemical Formulas 6 to 7 is included in the second polymer in an amount greater than 30 mol%, the effect of improving the sensitivity of the photosensitive resin composition may deteriorate.
- the weight average molecular weight (Mw) of the first and second polymers may each independently be 1,000 to 50,000 g/mol.
- Mw weight average molecular weight
- problems such as residual film ratio, poor adhesion, and heat resistance may occur. There may be a problem that residues are generated.
- the first polymer may specifically include a repeating unit represented by the following formula (8) and a repeating unit represented by the formula (9).
- R 3 is a divalent to octavalent organic group having two or more carbon atoms
- R 4 is a divalent to octavalent organic group having two or more carbon atoms
- R 5 and R 6 is each independently a hydrogen atom or an organic group having 1 to 20 carbon atoms
- a and b are each independently 0 to 4
- c and d are each independently 0 to 2
- a+b is 1 or more
- a, b, c or d is 0, the corresponding substituent is a hydrogen atom
- a weight ratio of the first polymer to the second polymer may be 50:50 to 95:5.
- the weight ratio of the first polymer and the second polymer is 50:50 to 95:5, the sensitivity, the remaining film ratio, the adhesive force, the chemical resistance, and the heat resistance may all be particularly excellent.
- the positive photosensitive resin composition is preferably included in an amount of 5 to 50 parts by weight of the photosensitive agent based on 100 parts by weight of the total of the first polymer and the second polymer.
- the photosensitive agent is included in an amount of less than 5 parts by weight, the photosensitivity of the photosensitive resin composition may cause a problem in that the sensitivity on the substrate is lowered. problems may arise.
- the photosensitizer may be, for example, a quinonediazide compound.
- the photosensitive agent is a quinonediazide compound
- the photosensitivity of the resin composition including the first polymer and the second polymer may be excellent, but the exemplary embodiment is not limited thereto.
- the positive photosensitive resin composition further includes a crosslinking compound containing a phenolic hydroxyl group, chemical resistance is further improved.
- the phenolic hydroxyl group-containing crosslinkable compound may include, for example, any one or more selected from the group consisting of compounds represented by the following Chemical Formulas 10 to 27.
- R' is each independently a hydrogen atom, an alkyl group having 1 to 3 carbon atoms, or one of the substituents of Formula 28 below, and at least one of R' is a substituent of Formula 28 below, and Formula 28 In , n is an integer of 1 to 6, and R 7 is an alkyl group having 1 to 3 carbon atoms.
- the solvent may be one generally used as a solvent of the photosensitive resin composition, for example, gamma-buturolactone (GBL), N-methylpyrrolidone (N-Methyl-2-Pyrrolidinone; NMP) , propylene glycol methyl ether acetate (PGMEA), ethyl lactate (EL), methyl-3-methoxypropionate (MMP), propylene glycol monomethyl ether ( propylene glycol monomethyl ether PGME), diethylene glycol methyl Ethyl Ether (MEDG), diethylene glycol butyl methyl ether (MBDG), diethylene glycol dimethyl ether ; DMDG), diethylene glycol diethyl ether (DEDG), and may include any one or more selected from the group consisting of mixtures thereof, but is not limited thereto.
- GBL gamma-buturolactone
- NMP N-methylpyrrolidone
- EL ethyl lactate
- MMP
- the positive photosensitive resin composition may further include one or more additives selected from the group consisting of a thermal acid generator and a UV absorber.
- the additive is further included, heat resistance, hygroscopicity, and the like of the resin composition may be improved, and thus it may have an effect of securing more excellent panel reliability.
- the insulating film according to another embodiment of the present invention includes the cured product of the positive photosensitive resin composition. More specifically, the insulating film may be a surface protective film or an interlayer insulating film of electronic components for semiconductors, but is not limited thereto.
- Another embodiment of the present invention may be a display device including the insulating film, and a specific example may be a display device for an organic electroluminescent device.
- the organic electroluminescent device display device includes: a first electrode formed on a substrate; It includes an insulating layer formed on the first electrode and a second electrode formed on the insulating layer, wherein the insulating layer includes the positive photosensitive resin composition according to an embodiment of the present invention.
- the insulating layer may be patterned while partially exposing an upper surface of the first electrode.
- the insulating layer may be formed to cover an edge portion of the first electrode.
- the insulating layer may be patterned while partially exposing an upper surface of the first electrode.
- the insulating layer may be formed to cover an edge portion of the first electrode.
- a polymer including a hydroxyl group was prepared in the same manner as in Synthesis Example 16, except that 100 mol of hydroxyethyl maleimide was used instead of 100 mol of hydroxyphenyl maleimide as a monomer. .
- Synthesis Example 16 in the same manner as in Synthesis Example 16, a hydroxyl group was formed in the same manner as in Synthesis Example 16, except that 80 mol of hydroxyphenyl maleimide and 20 mol of phenyl maleimide were used instead of 100 mol of hydroxyphenyl maleimide as a monomer.
- Synthesis Example 16 a hydroxyl group was included in the same manner as in Synthesis Example 16, except that 80 mol of hydroxyphenyl maleimide and 20 mol of styrene were used instead of 100 mol of hydroxyphenyl maleimide as a monomer A polymer was prepared.
- a polymer including a hydroxyl group was prepared in the same manner as in Synthesis Example 16, except that 100 mol of hydroxy styrene was used instead of 100 mol of hydroxyphenyl maleimide as a monomer.
- Synthesis Example 16 in the same manner as in Synthesis Example 16, except that 50 mol of hydroxystyrene and 50 mol of hydroxyphenyl maleimide were used instead of 100 mol of hydroxyphenyl maleimide as a monomer, a hydroxyl group A polymer comprising a was prepared.
- Synthesis Example 16 a hydroxyl group was included in the same manner as in Synthesis Example 16, except that 90 mol of hydroxy styrene and 10 mol of phenyl maleimide were used instead of 100 mol of hydroxyphenyl maleimide as a monomer. A polymer was prepared.
- Synthesis Example 16 in the same manner as in Synthesis Example 16, a hydroxyl group was formed in the same manner as in Synthesis Example 16, except that 69 mol of hydroxyphenyl maleimide and 31 mol of phenyl maleimide were used instead of 100 mol of hydroxyphenyl maleimide as a monomer.
- Synthesis Example 16 in the same manner as in Synthesis Example 16, a hydroxyl group was formed in the same manner as in Synthesis Example 16, except that 65 mol of hydroxyphenyl maleimide and 35 mol of phenyl maleimide were used instead of 100 mol of hydroxyphenyl maleimide as a monomer.
- Synthesis Example 16 in the same manner as in Synthesis Example 16, a hydroxyl group was formed in the same manner as in Synthesis Example 16, except that 50 mol of hydroxyphenyl maleimide and 50 mol of phenyl maleimide were used instead of 100 mol of hydroxyphenyl maleimide as a monomer.
- Synthesis Example 16 in the same manner as in Synthesis Example 16, a hydroxyl group was formed in the same manner as in Synthesis Example 16, except that 30 mol of hydroxyphenyl maleimide and 70 mol of phenyl maleimide were used instead of 100 mol of hydroxyphenyl maleimide as a monomer.
- Synthesis Example 16 a hydroxyl group was included in the same manner as in Synthesis Example 16, except that 60 mol of hydroxystyrene and 40 mol of phenyl maleimide were used instead of 100 mol of hydroxyphenyl maleimide as a monomer A polymer was prepared.
- a resin composition was prepared by mixing the compositions of Examples 1 to 48, Comparative Examples 1 to 4, and Reference Examples 1 to 14 according to the composition ratios of Tables 1 to 3 below.
- Formulas D to F which are crosslinkable compounds in Table 2, are compounds represented as follows.
- Residual film rate thickness after curing / thickness after prebaking, and the case where the remaining film rate is 60% or more is indicated by ⁇ , 50% or more to less than 60% is indicated by ⁇ , and the case where it is less than 50% is indicated by ⁇ .
- a pattern film was formed in the same manner as in the sensitivity measurement of A), but the adhesive strength was compared and evaluated based on the dot pattern minimum CD attached.
- a case in which adhesive strength was secured at a dot pattern minimum CD of 5 ⁇ m or more was denoted by ⁇
- a case in which adhesive strength was ensured at 10 ⁇ m or more was denoted by ⁇
- a case in which adhesive strength was ensured or not at 15 ⁇ m or more was denoted by X.
- the prepared substrate was immersed in methylpyrrolidone (NMP) for 60°C/120 seconds, and the rate of change in the thickness of the cured film before and after immersion was measured.
- NMP methylpyrrolidone
- a cured film thickness change rate of less than 150 ⁇ was denoted by ⁇
- 150 or more to less than 300 ⁇ was denoted by ⁇
- 300 or more to less than 600 ⁇ was denoted by ⁇
- 600 ⁇ or more was denoted by X.
- Heat resistance was measured using TGA. After sampling the pattern film formed during the sensitivity measurement in A), the temperature was raised from room temperature to 900 °C at a rate of 10 °C per minute using TGA. A case in which the 5 wt% loss temperature is greater than 300 °C is indicated by ⁇ , a case in which the 5 wt% loss temperature is 280 to 300 °C is indicated by ⁇ , and a case in which the 5 wt% loss temperature is less than 280 °C is indicated by ⁇ .
- the hygroscopicity was evaluated based on the change in the film thickness before and after the oven input.
- the thickness change rate was less than 250 ⁇ , ⁇ , greater than 250 ⁇ and less than 300 ⁇ were denoted by ⁇ , 300 or more to less than 600 ⁇ were denoted by ⁇ , and 600 ⁇ or more were denoted by X.
- FIG. 1 is a pattern (Pattern) film (2) is formed on a patterned ITO (Indium Tin oxide) substrate (1) according to an embodiment of the present invention, EL (Electroluminescent Lighting) and aluminum (3) are deposited shown briefly.
- a pattern film is formed on the patterned ITO substrate shown in FIG. 1 in the same manner as the sensitivity measurement method of A), and EL is deposited.
- Al is deposited as a cathode electrode on the upper part, and the encapsulation process is performed. Based on 85 °C, 85% RH, 3% luminance drop time (T 97 ) in the device on state was evaluated.
- the case of securing 1100 hours or more is indicated by ⁇
- the case of securing 1000 hours or more and less than 1100 hours is indicated by ⁇
- the case of 900 to 1000 hours is indicated by ⁇
- the case of less than 900 hours is indicated by X.
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Abstract
Description
| 제1폴리머 | 제2폴리머 | 감광제 | 가교성 화합물 | 제1폴리머와 제2폴리머의 수산기 당량 비율 |
|||||
| 구조 | 함량 | 구조 | 함량 | 구조 | 함량 | 구조 | 함량 | ||
| 실시예 49 | 합성예1 | 95 | 합성예16 | 5 | 합성예 31 |
15 | 화학식 F | 15 | 1:0.7 |
| 실시예 50 | 합성예2 | 90 | 합성예17 | 10 | 합성예 31 |
15 | 화학식 F | 15 | 1:1.5 |
| 실시예 51 | 합성예3 | 80 | 합성예18 | 20 | 합성예 31 |
15 | 화학식 F | 15 | 1:3.4 |
| 실시예 52 | 합성예4 | 70 | 합성예19 | 30 | 합성예 31 |
15 | 화학식 F | 15 | 1:5.8 |
| 실시예 53 | 합성예5 | 60 | 합성예20 | 40 | 합성예 31 |
15 | 화학식 F | 15 | 1:9 |
| 실시예 54 | 합성예6 | 50 | 합성예21 | 50 | 합성예 31 |
15 | 화학식 F | 15 | 1:13.5 |
| 비교예 5 | 비교 합성예1 |
80 | 합성예16 | 20 | 합성예 31 |
15 | 화학식 F | 15 | 0:57.5 |
| 비교예 6 | 합성예1 | 100 | 비교 합성예 2 |
0 | 합성예 31 |
15 | 화학식 F | 15 | 7:0 |
| 비교예 7 | 합성예1 | 42 | 비교 합성예 2 |
58 | 합성예 31 |
15 | 화학식 F | 15 | 1:74.6 |
| 비교예 8 | 합성예1 | 40 | 비교 합성예 2 |
60 | 합성예 31 |
15 | 화학식 F | 15 | 1:107.3 |
| 비교예 9 | 합성예1 | 30 | 비교 합성예 2 |
70 | 합성예 31 |
15 | 화학식 F | 15 | 1:166.8 |
| 비교예 10 | 합성예1 | 20 | 비교 합성예 2 |
80 | 합성예 31 |
15 | 화학식 F | 15 | 1:216.0 |
| 감도 | 잔막율 | 접착력 | 내화학성 | 내열성 | 흡습성 | 구동신뢰성 | |
| 실시예 49 | O | O | O | O | O | ◎ | ◎ |
| 실시예 50 | O | O | O | O | O | ◎ | ◎ |
| 실시예 51 | O | O | O | O | O | ◎ | ◎ |
| 실시예 52 | O | O | O | O | O | O | O |
| 실시예 53 | O | O | O | O | O | O | O |
| 실시예 54 | O | O | O | O | O | O | O |
| 비교예 5 | X | X | O | X | O | O | O |
| 비교예 6 | X | O | O | X | O | O | O |
| 비교예 7 | X | X | O | X | O | O | O |
| 비교예 8 | X | X | O | X | O | O | O |
| 비교예 9 | X | X | O | X | O | O | O |
| 비교예 10 | O | O | O | O | X | X | X |
Claims (20)
- 폴리아미드산 에스테르, 폴리아미드산 및 폴리이미드로 이루어진 군으로부터 선택되는 어느 하나 이상 구조를 포함하는 제1 폴리머;반복단위 중 수산기를 적어도 1 이상 포함하는 제2 폴리머;감광제; 및용매;를 포함하며상기 제1 폴리머의 수산기(OH기) 당량에 대한 상기 제2 폴리머의 수산기(OH기) 당량은 1:0.04 내지 1:74의 비율인, 포지티브형 감광성 수지 조성물.
- 제2항에 있어서, 상기 화학식 2의 R1 내지 R4 중 적어도 하나 이상은 상기 화학식 3의 치환기를 포함하는 포티지브형 감광성 수지 조성물.
- 제2항에 있어서,상기 제2 폴리머는 상기 화학식 1로 표시되는 반복단위를 포함하며, 상기 화학식 2로 표시되는 반복단위를 포함하지 않는 포지티브형 감광성 수지 조성물.
- 제2항에 있어서,상기 제2 폴리머는, 상기 R1이 서로 다른 구조를 가지는 2종 이상의 화학식 1로 표시되는 반복단위를 포함하는 포지티브형 감광성 수지 조성물.
- 제2항에 있어서,상기 제2 폴리머는,상기 R1이 방향족 고리 구조를 포함하는 화학식 1로 표시되는 반복단위; 및상기 R1이 방향족 고리 구조를 포함하지 않는 화학식 1로 표시되는 반복단위; 중 1종 이상을 포함하는 포지티브형 감광성 수지 조성물.
- 제8항에 있어서,상기 제2 폴리머의 전체 반복단위에 대하여, 상기 화학식 6 내지 화학식 7로 표시되는 반복단위의 합이 30 몰% 이하인 포지티브형 감광성 수지 조성물.
- 제1항에 있어서,상기 제1 및 제2 폴리머의 중량평균분자량(Mw)은 각각 독립적으로 1,000 내지 50,000 g/mol인 포지티브형 감광성 수지 조성물.
- 제1항에 있어서,상기 제1 폴리머는 하기 화학식 8로 표시되는 반복단위 및 화학식 9로 표시되는 반복단위를 포함하는 포지티브형 감광성 수지 조성물:[화학식 8][화학식 9]상기 화학식 8 및 화학식 9에서, R3는 2개 이상의 탄소 원자를 갖는 2가 내지 8가 유기기이고, R4는 2개 이상의 탄소 원자를 갖는 2가 내지 8가 유기기이며, R5 및 R6는 각각 독립적으로 수소 원자 또는 탄소수 1 내지 20의 유기기이고, a 및 b는 각각 독립적으로 0 내지 4이고, c 및 d는 각각 독립적으로 0 내지 2 이며, a+b는 1 이상이며,상기 a,b,c 또는 d가 0인 경우 해당 치환기는 수소원자이고,상기 m, n은 화학식 8로 표시되는 반복단위와 화학식 9로 표시되는 반복단위 각각의 몰비를 나타내며, m+n=100 이다.
- 제1항에 있어서,상기 제1 폴리머와 상기 제2 폴리머의 중량비는 50:50 내지 95:5인 포지티브형 감광성 수지 조성물.
- 제1항에 있어서,상기 제1 폴리머와 제2 폴리머 전체 100 중량부에 대하여, 상기 감광제는 5 내지 50 중량부로 포함되는 포지티브형 감광성 수지 조성물.
- 제1항에 있어서,상기 감광제는 퀴논디아지드 화합물인 감광성 수지 조성물.
- 제1항에 있어서,페놀성 수산기 함유 가교성 화합물을 더 포함하는 포지티브형 감광성 수지 조성물.
- 제1항에 있어서,상기 용매는 감마부티로락톤(gamma-buturolactone; GBL), N-메틸피롤리돈(N-Methyl-2-Pyrrolidinone; NMP), 프로필렌글리콜메틸에테르아세테이트(propylene glycol methyl ether acetate; PGMEA), 에틸락테이트(ethyl lactate; EL), 메틸-3-메톡시프로피오네이트(methyl 3-methoxypropionate; MMP), 프로필렌글리콜모노메틸에테르(propylene glycol monomethyl ether PGME), 다이에틸렌글리콜에틸메틸에테르(diethylene glycol methyl Ethyl Ether; MEDG), 다이에틸글리콜부틸메틸에테르(diethylene glycol butyl methyl ether; MBDG), 다이에틸렌글리콜다이메틸에테르(diethylene glycol dimethyl ether; DMDG), 다이에틸렌글리콜다이에틸에테르(diethylene glycol diethyl ether; DEDG) 및 이들의 혼합물로 이루어진 군으로부터 선택되는 어느 하나 이상을 포함하는 포지티브형 감광성 수지 조성물.
- 제1항에 있어서,상기 포지티브형 감광성 수지 조성물은 열산 발생제 및 UV 흡수제로 이루어진 군으로부터 선택되는 하나 이상의 첨가제를 더 포함하는 포지티브형 감광성 수지 조성물.
- 제1항 내지 제18항 중 어느 한 항의 포지티브형 감광성 수지 조성물의 경화체를 포함하는 절연막.
- 제19항의 절연막을 포함하는 표시장치.
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| WO2025263428A1 (ja) * | 2024-06-21 | 2025-12-26 | 東レ株式会社 | 樹脂組成物、硬化物、表示装置および半導体装置 |
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| CN108780275B (zh) * | 2016-03-28 | 2022-11-08 | 东丽株式会社 | 感光性膜 |
| WO2018159384A1 (ja) * | 2017-03-03 | 2018-09-07 | 東レ株式会社 | 樹脂組成物、樹脂シート、硬化パターンおよび半導体電子部品または半導体装置 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025165190A1 (ko) * | 2024-01-31 | 2025-08-07 | 주식회사 동진쎄미켐 | 포지티브형 감광성 수지 조성물, 전자 부품 및 표시 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116997859A (zh) | 2023-11-03 |
| KR20220130042A (ko) | 2022-09-26 |
| JP2024510332A (ja) | 2024-03-06 |
| TW202302752A (zh) | 2023-01-16 |
| US20240004292A1 (en) | 2024-01-04 |
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