WO2022133737A1 - 掩膜板及其制备方法、显示面板、显示装置 - Google Patents

掩膜板及其制备方法、显示面板、显示装置 Download PDF

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Publication number
WO2022133737A1
WO2022133737A1 PCT/CN2020/138368 CN2020138368W WO2022133737A1 WO 2022133737 A1 WO2022133737 A1 WO 2022133737A1 CN 2020138368 W CN2020138368 W CN 2020138368W WO 2022133737 A1 WO2022133737 A1 WO 2022133737A1
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WIPO (PCT)
Prior art keywords
frame
alignment
alignment bar
edge
bar
Prior art date
Application number
PCT/CN2020/138368
Other languages
English (en)
French (fr)
Inventor
李剑波
吴建鹏
黄琰
牛彤
丁文彪
Original Assignee
京东方科技集团股份有限公司
成都京东方光电科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 京东方科技集团股份有限公司, 成都京东方光电科技有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US17/598,895 priority Critical patent/US20220396867A1/en
Priority to PCT/CN2020/138368 priority patent/WO2022133737A1/zh
Priority to CN202080003511.2A priority patent/CN115135799B/zh
Publication of WO2022133737A1 publication Critical patent/WO2022133737A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Definitions

  • the present disclosure relates to, but is not limited to, the field of display technology, and more particularly, to a mask plate and a manufacturing method thereof, a display panel, and a display device.
  • OLED Organic Light Emitting Diode
  • OLED Organic Light Emitting Diode
  • evaporation is the link that most affects its yield.
  • a mask is generally used to control the evaporation pixels.
  • An embodiment of the present disclosure discloses a mask plate, including a frame and a first alignment bar
  • the frame includes two first frame edges extending along a first direction and spaced along a second direction, and extending along a second direction and extending along the second direction.
  • the first frame edge and the second frame edge include a first surface and a second surface arranged oppositely, and the four sides of the quadrilateral
  • a first alignment bar is provided on the first surface of at least three of the corners, and a first alignment mark is provided on the first alignment bar, wherein the first direction intersects the second direction.
  • the first alignment bar includes a first side and a second side spaced along a first direction, and a third side and a fourth side spaced along the second direction, the first alignment mark At least two sides of the first side, the second side, the third side and the fourth side are fixedly connected to the frame within the area enclosed by the first side, the second side, the third side and the fourth side.
  • the length of the first alignment bar in the first direction is 9 mm to 20 mm
  • the length of the first alignment bar in the second direction is 9 mm to 20 mm.
  • it further includes a support frame, the support frame includes a support frame, and the support frame includes two first side bars extending along the first direction and spaced along the second direction and extending along the second direction and extending along the second direction.
  • Two second edge strips arranged at intervals in one direction, the ends of the first edge strip and the second edge strip are connected, the first edge strip and the second edge strip define the evaporation area, and the inner side of the first surface of the first frame edge
  • the edge is provided with a first installation groove
  • the inner edge of the first surface of the second frame edge is provided with a second installation groove
  • the first edge strip is overlapped in the first installation groove
  • the second edge strip is overlapped in the second installation groove Inside.
  • the distance between the surface of the first edge strip away from the frame and the second surface is approximately equal to the distance between the first surface and the second surface, and the distance between the surface of the second edge strip away from the frame and the second surface approximately equal to the distance between the first surface and the second surface.
  • the first edge is provided with a plurality of test holes spaced along the first direction, and/or the second edge is provided with a plurality of test holes spaced along the second direction;
  • the orthographic projection of the test hole on the plane where the first surface is located does not overlap with the first surface.
  • a second alignment bar is further included, the second alignment bar is disposed on the first frame edge or the second frame edge, and the second alignment bar is provided with a second alignment mark.
  • the second alignment bar is disposed on the first frame edge, and the second alignment bar is located in the middle of the first frame edge; or,
  • the second alignment bar is arranged on the second frame edge, and the second alignment bar is located in the middle of the second frame edge.
  • the second alignment bar is disposed on the edge of the first frame, and the centers of the first alignment mark and the second alignment mark located on the same first frame side are at the first alignment mark parallel to the first direction. in a straight line; or,
  • the second alignment bar is arranged on the second frame side, and the centers of the first alignment mark and the second alignment mark on the same second frame side are on a second straight line parallel to the second direction.
  • the second alignment bar includes fifth and sixth sides spaced along the first direction, and seventh and eighth sides spaced along the second direction, the second alignment mark At least two of the fifth, sixth, seventh and eighth sides are fixedly connected to the frame within the area enclosed by the fifth, sixth, seventh and eighth sides.
  • the length of the second alignment bar in the first direction is 9 mm to 20 mm
  • the length of the second alignment bar in the second direction is 9 mm to 20 mm.
  • the second alignment bar is connected to the second side bar, the second frame edge is provided with an alignment bar mounting groove that communicates with the second mounting groove and corresponds to the position of the second alignment bar, the first Two alignment bars are embedded in the alignment bar mounting slots; or,
  • the first alignment bar is connected to the first side bar, the first frame edge is provided with an alignment bar mounting groove that communicates with the first mounting groove and corresponds to the position of the second alignment bar, and the second alignment bar is embedded in the alignment bar. in the mounting slot.
  • Embodiments of the present disclosure also provide a display panel, which is prepared by using the mask plate described in the above embodiments.
  • Embodiments of the present disclosure further provide a display device, including the display panel provided by the above embodiments.
  • Embodiments of the present disclosure also provide a method for preparing a mask, including:
  • a fixed frame the frame includes two first frame edges extending along the first direction and spaced along the second direction and two second frame edges extending along the second direction and spaced along the first direction, the first frame edges and The second frame side intersects to form a quadrilateral, and the first frame side and the second frame side comprise a first surface and a second surface arranged oppositely;
  • a first alignment bar is formed on the first surface of the frame, the first alignment bar is formed on at least three corners of the four corners of the quadrilateral, and the first alignment bar is provided with a first alignment mark,
  • first direction and the second direction intersect.
  • forming the first alignment bar on the first surface of the frame includes:
  • the alignment bar is fixed on the first frame edge or the second frame edge by the netting process, and the alignment bar is provided with a first alignment mark. Alignment bar.
  • the alignment bar is provided with a second alignment mark
  • the preparation method further includes:
  • the alignment bar is cut, and the peripheral area of the second alignment mark is reserved to form the second alignment bar.
  • first alignment bar on the first surface of the frame before forming the first alignment bar on the first surface of the frame, further comprising:
  • a support frame is fixed on the frame.
  • the support frame includes a support frame and a second alignment bar arranged on the support frame.
  • the frame is provided with an alignment bar installation groove at a position corresponding to the second alignment bar, and the second alignment bar is embedded in Alignment bar installation slot.
  • FIG. 1 is a schematic structural diagram of a mask plate
  • Fig. 2 is a partial structural diagram of the mask plate shown in Fig. 1;
  • Fig. 3 is a kind of structural representation of alignment bar
  • Fig. 4a is a positional diagram of the mask plate and the substrate during the evaporation process
  • Figure 4b is a schematic diagram of the residual solute between the para-bar and the framework
  • FIG. 5 is a structural diagram of a mask plate according to an exemplary embodiment of the present disclosure.
  • Fig. 6 is the enlarged view of A position among Fig. 5;
  • FIG. 7 is a schematic diagram of a frame structure of an exemplary embodiment of the present disclosure.
  • Fig. 8 is an enlarged view of position B in Fig. 5;
  • FIG. 9 is a structural diagram of another mask according to an exemplary embodiment of the present disclosure.
  • 200-support frame 201-evaporation area; 202-sub-evaporation area;
  • 210-support frame 211-first side strip; 212-second side strip;
  • the terms “installed”, “connected” and “connected” should be construed in a broad sense. For example, it may be a fixed connection, or a detachable connection, or an integral connection; it may be a mechanical connection, or an electrical connection; it may be a direct connection, or an indirect connection through an intermediate piece, or an internal communication between two elements.
  • installed should be construed in a broad sense. For example, it may be a fixed connection, or a detachable connection, or an integral connection; it may be a mechanical connection, or an electrical connection; it may be a direct connection, or an indirect connection through an intermediate piece, or an internal communication between two elements.
  • FIG. 1 is a schematic structural diagram of a mask plate
  • FIG. 2 is a partial structural diagram of the mask plate shown in FIG. 1
  • FIG. 3 is a structural schematic diagram of an alignment strip.
  • a mask is generally used to control the vapor deposition pixels of the organic light-emitting layer.
  • the mask plate 1 mainly includes a frame (Fram) 100, a support frame (Mask sheet) 200 and an alignment strip (Align Mask) disposed on the frame 100. 300 and Fine Film Mask 400.
  • the support frame 200 includes a support frame 210, the support frame 210 defines an evaporation area 201, and the support frame 210 is provided with a plurality of first support bars 220 extending along the first direction X and spaced along the second direction Y, and a plurality of edges.
  • the second support bars 230 extending in the second direction Y and arranged at intervals along the first direction X, the first support bars 220 and the second support bars 230 are at least located in the vapor deposition area 201 , and between the first support bars 220 and the second support bars 230
  • a plurality of sub-evaporation areas 202 are defined in between, and the support frame 210 is fixed on the frame 100 through a meshing process.
  • the alignment bars 300 include at least two alignment bars, and the two alignment bars 300 extend along the second direction Y and are arranged along the first direction X at intervals.
  • the support frame 200 is located between the two alignment bars 300 and overlaps with the alignment bars 300 .
  • the alignment bar 300 is provided with alignment holes 301 adjacent to the ends.
  • the alignment holes 301 are provided for precise alignment between the substrate and the mask plate 1 .
  • the alignment bars 300 are provided with alignment holes 301 and alignment holes 301 . In the welding area 302 between the adjacent ends of the hole 301 , the alignment bar 300 is welded and fixed to the frame 100 at the position of the welding area 302 .
  • the alignment bar 300 may also be provided with a plurality of test holes 303 spaced along the second direction Y, and there is a gap 500 between the frame edge of the support frame 210 overlapping the alignment bar 300 and the frame 100 .
  • the positions of the intervals 500 correspond, and the test holes 303 are used to form a plurality of test sites on the substrate (for measuring the thickness of the film layer and the light-emitting performance, etc.).
  • the fine metal mask 400 is fixed on the frame 100 through a netting process.
  • the fine metal mask 400 may include a plurality of fine metal masks, and the plurality of fine metal masks 400 may extend along the second direction Y and be spaced along the first direction X Setting, the fine metal mask 400 includes a mask pattern area 410 and a mask blocking area 420 disposed on the periphery of the mask pattern area 410, the mask pattern area 410 corresponds to the sub-evaporation area 202, and the mask blocking area 420 overlaps On the first support bar 220 and the second support bar 230 , a plurality of through holes are provided in the mask pattern area 410 .
  • the through holes in the mask pattern area 410 and The positions where the organic material needs to be evaporated on the substrate are completely coincident, and the evaporation material of the evaporation source can be evaporated onto the substrate through the through hole to form a thin film with a preset pattern, so as to achieve precise control of the evaporated pixels.
  • FIG. 4a is a position diagram of the mask plate and the substrate during the evaporation process
  • FIG. 4b is a schematic diagram of the residual solute between the alignment strip and the frame.
  • the side of the frame 100 provided with the alignment bars 300 is opposite to the substrate 2. Since the alignment bars 300 and the frame 100 are only fixedly connected in the welding area, the alignment bars 300 and the frame 100 are overlapped and supported. There is a gap where the frame 200 and the alignment bar 300 overlap, and the organic material tends to evaporate into the gap.
  • the mask is cleaned, it is difficult for the liquid medicine to flow out of the gap due to the influence of surface tension, and the solute 3 is in the mask. After the board is dried, it becomes a solid powder.
  • the mask board is used for the second time, it is easy to float in the evaporation chamber. If it falls on the display area of the display substrate, it will cause bad dark spots, or break the packaging layer and cause packaging. invalid.
  • An embodiment of the present disclosure provides a mask, including a frame and a first alignment bar
  • the frame includes two first frame edges extending along a first direction and spaced along a second direction, and extending along a second direction and extending along the second direction.
  • the first frame edge and the second frame edge include a first surface and a second surface arranged oppositely, and the four sides of the quadrilateral
  • a first alignment bar is provided on the first surface of at least three of the corners, and a first alignment mark is provided on the first alignment bar, wherein the first direction intersects the second direction.
  • FIG. 5 is a structural diagram of a mask according to an exemplary embodiment of the present disclosure.
  • the mask 1 includes a frame 100 and a first alignment bar 310 .
  • the frame 100 is used to support and fix the first alignment bar 310 and the fine metal mask and the like.
  • the frame 100 includes two first frame edges 110 extending along the first direction X and spaced along the second direction Y, and two second frame edges 120 extending along the second direction Y and spaced along the first direction X.
  • a direction X and a second direction Y intersect.
  • the first direction X is perpendicular to the second direction Y.
  • the vertical here can be understood as being approximately vertical, and approximately vertical may include the first direction X and the second direction Y.
  • the included angle of the direction Y is between 85° and 95°.
  • the first frame edge 110 and the second frame edge 120 intersect to form a quadrilateral.
  • the first frame edge 110 and the second frame edge 120 include a first surface 102 and a second surface 103 that are disposed opposite to each other.
  • the first surface 102 is set during the evaporation process. surface opposite to the substrate.
  • a first alignment bar 310 is provided on the first surface 102 of at least three corners 101 of the four corners 101 of the quadrilateral, and a first alignment mark 311 is provided on the first alignment bar 310.
  • the first alignment mark 311 may be For the first alignment hole.
  • the CCD can identify the position coordinates of the first alignment mark 311 through the light and shade changes inside and outside the first alignment hole.
  • the four corners 101 may be provided with the first alignment bars 310 at all.
  • the first alignment bars 310 by disposing the first alignment bars 310 on the first surfaces 102 of at least three corners 101 of the four corners 101 of the frame 100, only the peripheral area of the first alignment marks 311 is retained, and the first pair of There is no gap between the bit bar 310 and the frame 100, which avoids the problem that the residual cleaning solution in the gap is not easy to remove, and further prevents the solute in the gap from being solid after the mask 1 is dried. Powder floating in the display area of the display substrate, The product yield of the display substrate is improved.
  • FIG. 6 is an enlarged view of the position A in FIG. 5 .
  • the first alignment bar 310 includes a first side 312 and a second side 313 spaced apart along the first direction X, and a third side 314 and a fourth side spaced along the second direction Y 315, the first alignment mark 311 is located in the area enclosed by the first side 312, the second side 313, the third side 314 and the fourth side 315, the first side 312, the second side 313, the third side 314 and the third side At least two of the four sides 315 are fixedly connected to the frame 100 .
  • first side 312 and second side 313 are fixedly connected to frame 100
  • third side 314 and fourth side 315 are fixedly connected to frame 100
  • one of the third side 314 and the fourth side 315 is fixedly connected to the frame 100
  • the first side 312 , the second side 313 , the third side 314 and the fourth side 315 are all fixedly connected to the frame 100 .
  • the fixed connection may employ welding. At least two sides of the first side 312 , the second side 313 , the third side 314 and the fourth side 315 are fixedly connected to the frame 100 , which can further reduce the generation of gaps between the first alignment bar 310 and the frame 100 .
  • the alignment bar 300 is affected by magnetic force and electrostatic adsorption when it is separated from the substrate, and the alignment bar 300 and the frame 100 shown in FIG. The welding area with the frame 100 is small. With the increase of the number of evaporations, the alignment bars 300 become slack or even fall off, causing the alignment holes 301 to shift, so that the alignment time between the mask 1 and the substrate is increasing.
  • the position accuracy is getting lower and lower
  • at least two sides of the first side 312, the second side 313, the third side 314 and the fourth side 315 are fixedly connected with the frame 100, which improves the first alignment
  • the stability of the connection between the strips 310 and the frame 100 prevents the first alignment marks 311 from being displaced due to loosening or falling off of the first alignment strips 310 .
  • the length L1 of the first alignment bar 310 in the first direction X is about 9 mm to 20 mm
  • the length L1 of the first alignment bar 310 in the second direction Y is about 9 mm to 20 mm.
  • the length L2 is about 9 mm to 20 mm.
  • the orthographic projection of the first alignment bar 310 on the first surface 102 may be a rectangle.
  • the first alignment mark 311 is a first alignment hole, and the diameter of the first alignment hole is about 0.15 mm to 0.5 mm, for example, 0.2 mm.
  • the thickness of the first alignment bar 310 may be about 30 micrometers to 100 micrometers.
  • the first alignment bar 310 may be made of Invar alloy
  • the frame 100 may be made of Invar alloy.
  • Invar Alloy is an iron-based low thermal expansion alloy with a nickel content of 36%, and the average linear expansion coefficient in the range of -50°C to 100°C is lower than 1.5 ⁇ 10 -6 /°C.
  • the use of Invar alloy can improve the control precision of the vapor deposition pixels of the mask plate 1 .
  • FIG. 7 is a schematic diagram of a frame structure of an exemplary embodiment of the present disclosure.
  • the mask plate 1 further includes a support frame 200
  • the support frame 200 includes a support frame 210
  • the support frame 210 includes a support frame extending along the first direction X and extending along the second direction
  • Two first side bars 211 arranged at intervals in Y and two second side bars 212 extending along the second direction Y and arranged at intervals along the first direction X, the ends of the first side bars 211 and the second side bars 212 are connected
  • the first edge strip 211 and the second edge strip 212 define the vapor deposition area 201
  • the inner edge of the first surface 102 of the first frame edge 110 is provided with a first installation groove 111
  • the first surface 102 of the second frame edge 120 The inner edge is provided with a second installation groove 121
  • the first side strip 211 is overlapped in the first installation groove 111
  • the second side strip 121 is provided.
  • the space 500 shown in FIG. 2 is not formed between the support frame 210 and the frame 100 .
  • the distance between the surface of the first side bar 211 away from the frame 100 and the second surface 103 is equal to the distance between the first surface 102 and the second surface 103
  • the distance between the surface of the second side bar 212 away from the frame 100 and the second surface 103 is equal to
  • the distance between the first surface 102 and the second surface 103 that is, the surface of the first side bar 211 away from the frame 100 is flush with the first surface 102
  • the surface of the second side bar 212 away from the frame 100 is flush with the first surface 102
  • the equality here can be understood as being approximately equal, and the ratio of the distance between the surface of the first edge strip 211 away from the frame 100 and the second surface 103 and the distance between the first surface 102 and the second surface 103 may be 0.95-1.05 , the ratio of the distance between the surface of the second side bar 212 away from the frame 100 and the second surface 103 and the distance between the first
  • the support frame 200 further includes a plurality of first support bars 220 extending along the first direction X and spaced along the second direction Y, and extending along the second direction Y and extending along the second direction Y.
  • the second support bars 230 are arranged at intervals in the first direction X, the ends of the first support bars 220 are connected with the corresponding second side bars 212 , and the ends of the second support bars 230 are connected with the corresponding first side bars 211 .
  • a support bar 220 and a second support bar 230 divide the evaporation area 201 into a plurality of sub-evaporation areas 202 .
  • the support frame 200 may be made of Invar. In a direction perpendicular to the first surface 102, the thickness of the support frame 200 may be about 30 micrometers to 100 micrometers.
  • the first side bar 211 is provided with a plurality of test holes 303 spaced along the first direction X, or the second side bar 212 is provided with a plurality of test holes 303 along the second direction Y
  • a plurality of test holes 303 are arranged at intervals, and the orthographic projection of the test holes 303 on the plane where the first surface 102 is located does not overlap with the first surface 102 .
  • the test hole 303 is used to form a test site on the substrate to detect the properties of the film, and the properties of the film may include film thickness and luminescence properties.
  • the test hole 303 may be provided on at least one of the two first side bars 211, or may be provided on at least one of the two second side bars 212, or may be provided on at least one of the two first side bars 211 and both. At least one of the second side bars 212 is on. Whether the test hole 303 is disposed on the first side bar 211 or the second side bar 212 is determined according to the setting direction of the fine metal mask, and the test hole 303 is generally located on both sides of the extending direction of the fine metal mask. That is to say, as shown in FIG. 1 on both sides of the second direction, the fine metal mask can prevent the test hole 303 from being blocked. In other exemplary embodiments, the test hole 303 can also be arranged on the adjacent fine mask. space between plates.
  • the plurality of test holes 303 may include a first test hole 303a and a second test hole 303b.
  • the first test hole 303a is used to detect the luminescence property of the film layer
  • the second test hole 303b is used to detect the thickness of the film layer.
  • the size of the first test hole 303a and the second test hole 303b may be the same, or may be different.
  • the orthographic projections of the first test hole 303a and the second test hole 303b on the first surface 102 may both be rectangular, for example, the first test hole 303a is a square, and the second test hole 303b is a rectangle.
  • the number of the first test holes 303a may be 2, 3, 4 or more
  • the number of the second test holes 303b may be 2, 3, 4 or more, which is not limited herein.
  • the length of the test hole 303 in the first direction X may be about 0.15 mm to 2 mm
  • the length of the test hole 303 in the second direction Y may be about 0.15 mm to 2 mm.
  • the support frame 200 further includes a plurality of first fixing protrusions 213 disposed on the first side strips 211 and extending in a direction away from the evaporation area 201 and disposed
  • a plurality of second fixing protrusions 214 extending in the direction away from the vapor deposition area 201 on the second side strip 212 are provided on the first surface 102 of the first frame side 110 to communicate with the first installation groove 111 and connect with the first mounting groove 111 .
  • the third installation groove 112 corresponding to the position of the fixing protrusion 213 is provided on the first surface 102 of the second frame edge 120 .
  • the first fixing protrusion 213 is embedded in the third installation groove 112
  • the second fixing protrusion 214 is embedded in the fourth installation groove 122 .
  • the distance between the surface of the first fixing protrusion 213 away from the frame 100 and the second surface 103 is equal to the distance between the first surface 102 and the second surface 103
  • the distance between the surface of the second fixing protrusion 214 away from the frame 100 and the second surface 103 The distance is equal to the distance between the first surface 102 and the second surface 103, that is, the surface of the first fixing protrusion 213 away from the frame 100 is flush with the first surface 102
  • the surface of the second fixing protrusion 214 away from the frame 100 is flush with the first surface 102.
  • a surface 102 is flush, the equality here can be understood as roughly equal, the ratio of the distance between the surface of the first fixing protrusion 213 away from the frame 100 and the second surface 103 and the distance between the first surface 102 and the second surface 103 It may be 0.95-1.05, and the ratio of the distance between the surface of the second fixing protrusion 214 away from the frame 100 and the second surface 103 and the distance between the first surface 102 and the second surface 103 may be 0.95-1.05.
  • the first fixing protrusions 213 correspond to the positions of the second support bars 230
  • the second fixing protrusions 214 correspond to the positions of the first support bars 220 .
  • the orthographic projection of the first alignment bar 310 on the plane where the first surface 102 is located overlaps with the orthographic projection of the support frame 200 on the surface where the first surface 102 is located.
  • the mask plate 1 further includes a second alignment bar 320 , and the second alignment bar 320 is disposed on the first frame edge 110 and/or the second frame edge 120 ,
  • the second alignment bars 320 are disposed on the two first frame sides 110
  • the second alignment bars 320 are disposed on the two second frame sides 120 .
  • the second alignment bar 320 is provided with a second alignment mark 321 .
  • the second alignment mark 321 may be a second alignment hole.
  • the first alignment mark 311 is set for precise alignment of the mask 1 and the substrate.
  • the second alignment mark 321 is set to perform rough alignment between the mask 1 and the substrate. In other exemplary embodiments, the second alignment mark 321 may also be used for precise alignment of the mask 1 and the substrate.
  • the second alignment bar 320 is disposed on the second frame edge 120 , the second alignment bar 320 is located in the middle of the second frame edge 120 , and the second frame edge 120
  • the middle position of the second frame edge 120 can be understood as the position of one quarter to three quarters of the length of the second frame edge 120 along the first direction, for example, the position of one half.
  • the second alignment bar 320 is disposed on the first frame edge 110 , the second alignment bar 320 is located in the middle of the first frame edge 110 , and the middle position of the first frame edge 110 can be understood It is a position from one quarter to three quarters of the length of the first frame edge 110 along the first direction, for example, a half position.
  • the second alignment bar 320 is disposed on the first frame edge 110 , and the centers of the first alignment mark 311 and the second alignment mark 321 located on the same first frame side 110 are at the same point as the first alignment mark 321 . on a first straight line parallel to the direction X.
  • the second alignment bar 320 is disposed on the second frame edge 120 , and the first alignment mark 311 and the second alignment mark are located on the same second frame side 120 .
  • the center of 321 is on the second line parallel to the second direction Y
  • FIG. 8 is an enlarged view of the position B in FIG. 5 .
  • the second alignment bar 320 includes a fifth side 322 and a sixth side 323 spaced along the first direction X, and a seventh side spaced along the second direction Y side 324 and the eighth side 325, the second alignment mark 321 is located in the area enclosed by the fifth side 322, the sixth side 323, the seventh side 324 and the eighth side 325, the fifth side 322, the sixth side 323, At least two of the seventh side 324 and the eighth side 325 are fixedly connected to the frame 100 .
  • the fifth side 322 and the sixth side 323 are fixedly connected to the frame 100 , or the seventh side 324 and the eighth side 325 are fixedly connected to the frame 100 , or one of the fifth side 322 and the sixth side 323 And one of the seventh side 324 and the eighth side 325 is fixedly connected to the frame 100 .
  • the fifth side 322 , the sixth side 323 , the seventh side 324 and the eighth side 325 are all fixedly connected to the frame 100 .
  • the fixed connection may employ welding.
  • At least two sides of the fifth side 322 , the sixth side 323 , the seventh side 324 and the eighth side 325 are fixedly connected to the frame 100 , which can further reduce the generation of gaps between the second alignment bar 320 and the frame 100 , preventing The second alignment mark 321 is displaced due to loosening or falling off of the second alignment bar 320 .
  • the length L3 of the second alignment bar 320 in the first direction X is about 9 mm to 20 mm
  • the length L3 of the second alignment bar 320 in the second direction Y is about 9 mm to 20 mm.
  • the length L4 is about 9 mm to 20 mm.
  • the orthographic projection of the second alignment bar 320 on the first surface 102 may be a rectangle.
  • the second alignment mark 321 is a second alignment hole, and the diameter of the second alignment hole is about 0.15 mm to 0.5 mm, for example, 0.2 mm.
  • the thickness of the second alignment bar 320 may be about 30 micrometers to 100 micrometers.
  • the second alignment bar 320 may be made of Invar.
  • first alignment mark 311 and the second alignment mark 321 on the first straight line may be formed in the same web process, or the first alignment mark 311 on the second straight line may be formed and the second alignment mark 321 may be formed in the same web process.
  • FIG. 9 is a structural diagram of another mask according to an exemplary embodiment of the present disclosure.
  • the second alignment bar 320 is connected with the second side bar 212 , and the second frame side 120 is provided with a connection with the second installation groove 121 and with the second alignment bar
  • the fifth installation slot 123 corresponding to the 320 position.
  • the second alignment bar 320 can be embedded in the fifth installation groove 123 .
  • the distance between the surface of the second alignment bar 320 away from the frame 100 and the second surface 103 is approximately equal to the distance between the first surface 102 and the second surface 103 .
  • the first alignment bar 310 is connected to the first side bar 211 , and the first frame side 110 is provided with a second alignment bar 320 that communicates with the first installation groove 111 and corresponds to the position of the second alignment bar 320 .
  • the fifth installation slot is used to install the alignment bar, so it can also be called the alignment bar installation slot.
  • the test holes are arranged on the first edge strips
  • the mask plate further includes a plurality of fine metal masks fixed on the frame, the fine metal masks extending along the first direction and along the first direction.
  • the two directions are spaced apart
  • the fine metal mask includes a mask pattern area and a mask blocking area arranged on the periphery of the mask pattern area, and the mask pattern area corresponds to the position of the sub-evaporation area.
  • the test holes are disposed on the second edge strip
  • the mask plate further includes a plurality of fine metal masks fixed on the frame, the fine metal masks extending along the second direction and along the first Arranged at intervals in one direction, the fine metal mask includes a mask pattern area and a mask blocking area arranged on the periphery of the mask pattern area, and the mask pattern area corresponds to the position of the sub-evaporation area.
  • Embodiments of the present disclosure also provide a method for preparing a mask, including:
  • a fixed frame the frame includes two first frame edges extending along the first direction and spaced along the second direction and two second frame edges extending along the second direction and spaced along the first direction, the first frame edges and The second frame side intersects to form a quadrilateral, and the first frame side and the second frame side comprise a first surface and a second surface arranged oppositely;
  • a first alignment bar is formed on the first surface of the frame, the first alignment bar is formed on at least three corners of the four corners of the quadrilateral, and the first alignment bar is provided with a first alignment mark,
  • first direction and the second direction intersect.
  • forming the first alignment bar on the first surface of the frame includes:
  • the alignment bar is fixed on the first frame edge or the second frame edge by the netting process, and the alignment bar is provided with a first alignment mark.
  • Alignment bar In an example, an alignment bar is fixed on the first frame edge or the second frame edge by a netting process, the alignment bar is provided with a first alignment mark, the alignment bar is cut, and the periphery of the first alignment mark is retained. area to form the first alignment bar, which may include: welding the entire alignment bar on the first frame edge or the second frame edge of the frame, then welding the periphery of the first alignment mark to form a first welding area, and cutting it out The other redundant parts of the alignment bar except the first welding area.
  • only the first alignment mark is provided on the alignment bar, and no test holes are provided, so that the alignment bar is more generalized, and is not affected by the spacing between the support frame and the frame, thereby improving engineering drawing efficiency and reducing Risk of design error.
  • the alignment bar is provided with a second alignment mark
  • the preparation method further includes: cutting the alignment bar, retaining a peripheral area of the second alignment mark to form the second alignment bar.
  • cutting the alignment bar, retaining the peripheral area of the second alignment mark to form the second alignment bar may also include: welding the periphery of the second alignment mark to form a second welding area, and cutting off the alignment bar Excess portion other than the first welding area and the second welding area.
  • the method before forming the first alignment bar on the first surface of the frame, the method further includes: fixing a support frame on the frame, the support frame including a support frame and a second alignment bar disposed on the support frame
  • the frame is provided with an alignment bar installation groove at a position corresponding to the second alignment bar, and the second alignment bar is embedded in the alignment bar installation groove.
  • An embodiment of the present disclosure also provides a display panel, which is prepared by using the mask plate of the above-mentioned embodiment.
  • Embodiments of the present disclosure further provide a display device, including the display panel provided by the above embodiments.
  • the display device can be any product or component that has a display function, such as a mobile phone, a tablet computer, a TV, a monitor, a notebook computer, a digital photo frame, and a navigator.

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Abstract

一种掩膜板(1)，包括框架(100)和第一对位条(310)，框架(100)包括沿第一方向延伸并沿第二方向间隔设置的两个第一框边(110)和沿第二方向延伸并沿第一方向间隔设置的两个第二框边(120)，第一框边(110)和第二框边(120)相交形成四边形，第一框边(110)和第二框边(120)包括相对设置的第一表面(102)和第二表面(103)，四边形的四个角(101)中至少三个角(101)的第一表面(102)上设置有第一对位条(310)，第一对位条(310)上设置有第一对位标识(311)，其中，第一方向与第二方向相交；该掩膜板(1)防止缝隙内溶质(3)烘干后变成固体粉末飘散在显示区域，提升了器件的生产良品率。

Description

掩膜板及其制备方法、显示面板、显示装置 技术领域
本公开涉及但不限于显示技术领域，尤指一种掩膜板及其制备方法、显示面板、显示装置。
背景技术
有机发光二极管(Organic Light Emitting Diode，简称OLED)器件具备超薄、自发光、有机材质、平面结构、低温制造工序，并且能够与塑料基板相兼容等优良特征，可用作显示面板。在OLED生产制程中，蒸镀是最影响其良率的一个环节。当前蒸镀工艺中，普遍使用掩膜板进行蒸镀像素控制。
发明内容
以下是对本文详细描述的主题的概述。本概述并非是为了限制权利要求的保护范围。
一方面
本公开实施例公开了一种掩膜板，包括框架和第一对位条，框架包括沿第一方向延伸并沿第二方向间隔设置的两个第一框边和沿第二方向延伸并沿第一方向间隔设置的两个第二框边，第一框边和第二框边相交形成四边形，第一框边和第二框边包括相对设置的第一表面和第二表面，四边形的四个角中至少三个角的第一表面上设置有第一对位条，第一对位条上设置有第一对位标识，其中，第一方向与第二方向相交。
在一些示例性实施例中，第一对位条包括沿第一方向间隔设置的第一侧和第二侧，以及沿第二方向间隔设置的第三侧和第四侧，第一对位标识位于第一侧、第二侧、第三侧和第四侧围成的区域内，第一侧、第二侧、第三侧和第四侧中的至少两侧与框架固定连接。
在一些示例性实施例中，第一对位条在第一方向上的长度为9毫米到20毫米，第一对位条在第二方向上的长度为9毫米到20毫米。
在一些示例性实施例中，还包括支撑架，支撑架包括支撑框，支撑框包括沿第一方向延伸并沿第二方向间隔设置的两个第一边条和沿第二方向延伸并沿第一方向间隔设置的两个第二边条，第一边条和第二边条的端部连接，第一边条和第二边条限定蒸镀区域，第一框边的第一表面的内侧边缘设置有第一安装槽，第二框边的第一表面的内侧边缘设置有第二安装槽，第一边条搭接在第一安装槽内，第二边条搭接在第二安装槽内。
在一些示例性实施例中，第一边条远离框架的表面与第二表面的距离大致等于第一表面和第二表面之间的距离，第二边条远离框架的表面与第二表面的距离大致等于第一表面和第二表面之间的距离。
在一些示例性实施例中，第一边条上设置有沿第一方向间隔设置的多个测试孔，和/或第二边条上设置有沿第二方向间隔设置的多个测试孔；
测试孔在第一表面所在平面的正投影与第一表面不交叠。
在一些示例性实施例中，还包括第二对位条，第二对位条设置于第一框边或第二框边上，第二对位条上设置有第二对位标识。
在一些示例性实施例中，第二对位条设置于第一框边上，第二对位条位于第一框边的中部位置；或者，
第二对位条设置于第二框边上，第二对位条位于第二框边的中部位置。
在一些示例性实施例中，第二对位条设置于第一框边上，位于同一第一框边上的第一对位标识和第二对位标识的中心在与第一方向平行的第一直线上；或者，
第二对位条设置于第二框边上，位于同一第二框边上的第一对位标识和第二对位标识的中心在与第二方向平行的第二直线上。
在一些示例性实施例中，第二对位条包括沿第一方向间隔设置的第五侧和第六侧，以及沿第二方向间隔设置的第七侧和第八侧，第二对位标识位于第五侧、第六侧、第七侧和第八侧围成的区域内，第五侧、第六侧、第七侧和第八侧中的至少两侧与框架固定连接。
在一些示例性实施例中，第二对位条在第一方向上的长度为9毫米到20毫米，第二对位条在第二方向上的长度为9毫米到20毫米。
在一些示例性实施例中，第二对位条与第二边条连接，第二框边上设置有与第二安装槽连通并与第二对位条位置对应的对位条安装槽，第二对位条嵌入到对位条安装槽内；或，
第一对位条与第一边条连接，第一框边上设置有与第一安装槽连通并与第二对位条位置对应的对位条安装槽，第二对位条嵌入到对位条安装槽内。
另一方面
本公开实施例还提供了一种显示面板，采用上述实施例所述的掩膜板制备。
另一方面
本公开实施例还提供了一种显示装置，包括上述实施例提供的显示面板。
另一方面
本公开实施例还提供了一种掩膜板的制备方法，包括：
固定框架，框架包括沿第一方向延伸并沿第二方向间隔设置的两个第一框边和沿第二方向延伸并沿第一方向间隔设置的两个第二框边，第一框边和第二框边相交形成四边形，第一框边和第二框边包括相对设置的第一表面和第二表面；
在框架的第一表面上形成第一对位条，第一对位条形成在四边形的四个角中至少三个角上，第一对位条上设置有第一对位标识，
其中，第一方向和第二方向相交。
在一些示例性实施例中，在框架的第一表面上形成第一对位条包括：
通过张网工艺在第一框边或第二框边上固定对位条，对位条上设置有第一对位标识，裁切对位条，保留第一对位标识周边区域，形成第一对位条。
在一些示例性实施例中，对位条上设置有第二对位标识，制备方法还包括：
裁切对位条，保留第二对位标识周边区域，形成第二对位条。
在一些示例性实施例中，在框架的第一表面上形成第一对位条之前，还包括：
在框架上固定支撑架，支撑架包括支撑框和设置于支撑框上的第二对位条，框架在与第二对位条的对应位置设置有对位条安装槽，第二对位条嵌入对位条安装槽内。
在阅读理解了附图和详细描述后，可以明白其他方面。
附图说明
图1为一种掩膜板的结构示意图；
图2为图1所示掩膜板部分结构图；
图3为一种对位条的结构示意图；
图4a为蒸镀过程中掩膜板与基板位置图；
图4b为对位条与框架间残留溶质的示意图；
图5为本公开示例性实施例一种掩膜板的结构图；
图6为图5中A位置的放大图；
图7为本公开示例性实施例一种框架结构示意图；
图8为图5中B位置的放大图；
图9为本公开示例性实施例另一种掩膜板结构图。
附图标记说明
1-掩膜板；             100-框架；              101-角；
102-第一表面；         103-第二表面；          110-第一框边；
111-第一安装槽；       112-第三安装槽；        120-第二框边；
121-第二安装槽；       122-第四安装槽；        123-第五安装槽；
200-支撑架；           201-蒸镀区域；          202-子蒸镀区；
210-支撑框；           211-第一边条；          212-第二边条；
213-第一固定凸起；     214-第二固定凸起；      220-第一支撑条；
230-第二支撑条；       300-对位条；            301-对位孔；
302-焊接区；           303-测试孔；            303a-第一测试孔；
303b-第二测试孔；      310-第一对位条；        311-第一对位标识；
320-第二对位条；       321-第二对位标识；      322-第五侧；
323-第六侧；           324-第七侧；            325-第八侧；
400-精细金属掩膜版；   410-掩膜图案区；        420-掩膜遮挡区；
500-间隔；             2-基板；                3-溶质。
具体实施方式
下文中将结合附图对本公开的实施例进行详细说明。注意，实施方式可以以多个不同形式来实施。所属技术领域的普通技术人员可以很容易地理解一个事实，就是方式和内容可以在不脱离本公开的宗旨及其范围的条件下被变换为各种各样的形式。因此，本公开不应该被解释为仅限定在下面的实施方式所记载的内容中。在不冲突的情况下，本公开中的实施例及实施例中的特征可以相互任意组合。
在本说明书中，为了方便起见，使用“中部”、“上”、“下”、“前”、“后”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示方位或位置关系的词句以参照附图说明构成要素的位置关系，仅是为了便于描述本说明书和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本公开的限制。构成要素的位置关系根据描述各构成要素的方向适当地改变。因此，不局限于在说明书中说明的词句，根据情况可以适当地更换。
在本说明书中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解。例如，可以是固定连接，或可拆卸连接，或一体地连接；可以是机械连接，或电连接；可以是直接相连，或通过中间件间接相连，或两个元件内部的连通。对于本领域的普通技术人员而言，可以根据情况理解上述术语在本公开中的含义。
本公开中的“约”，是指不严格限定界限，允许工艺和测量误差范围内的数值。
图1为一种掩膜板的结构示意图，图2为图1所示掩膜板部分结构图， 图3为一种对位条的结构示意图。在OLED制备过程中，一般采用掩膜板对有机发光层进行蒸镀像素控制。在一些示例性实施例中，如图1到图3所示，掩膜板1主要包括框架(Fram)100和设置于框架100上的支撑架(Mask sheet)200、对位条(Align Mask)300以及精细金属掩膜版(Fine Film Mask)400。支撑架200包括支撑框210，支撑框210内限定蒸镀区域201，支撑框210上设置有多条沿第一方向X延伸并沿第二方向Y间隔设置的第一支撑条220和多条沿第二方向Y延伸并沿第一方向X间隔设置的第二支撑条230，第一支撑条220和第二支撑条230至少位于蒸镀区域201，第一支撑条220和第二支撑条230之间限定多个子蒸镀区202，支撑框210通过张网工艺固定于框架100上。对位条300至少包括两个，两个对位条300沿第二方向Y延伸并沿第一方向X间隔设置。支撑架200位于两个对位条300之间，并与对位条300存在交叠。对位条300邻近端部的位置设置有对位孔301，对位孔301设置为基板与掩膜板1之间精准对位，对位条300上设置有位于对位孔301和与对位孔301邻近的端部之间的焊接区302，对位条300在焊接区302位置与框架100焊接固定。对位条300上还可以设置有沿第二方向Y间隔设置的多个测试孔303，与对位条300交叠的支撑框210的框边与框架100之间具有间隔500，测试孔303与间隔500位置对应，测试孔303用于在基板上形成多个测试位点(用于测量膜层的厚度和发光性能等)。精细金属掩膜版400通过张网工艺固定于框架100上，精细金属掩膜版400可以包括多个，多个精细金属掩膜版400可以沿着第二方向Y延伸并沿第一方向X间隔设置，精细金属掩膜版400包括掩膜图案区410和设置于掩膜图案区410外围的掩膜遮挡区420，掩膜图案区410与子蒸镀区202对应，掩膜遮挡区420搭接在第一支撑条220和第二支撑条230上，掩膜图案区410设置多个通孔，掩膜板1通过对位孔301与基板精准对位后，掩膜图案区410的通孔和基板上需要蒸镀有机材料的位置完全重合，蒸发源的蒸发材料可以通过通孔蒸镀到基板上，形成预设图案的薄膜，实现蒸镀像素的精准控制。在蒸镀中对位精度越高越好，以减少基板和掩膜板1的错位而造成的产品混色。
图4a为蒸镀过程中掩膜板与基板位置图，图4b为对位条与框架间残留溶质的示意图。在蒸镀过程中，框架100设置有对位条300的一侧与基板2相对，由于对位条300与框架100仅在焊接区固定连接，所以对位条300和 框架100交叠位置和支撑架200与对位条300交叠位置存在缝隙，有机材料往往会蒸镀到缝隙中，而在掩膜板清洗时药液受表面张力的影响很难从缝隙中完全流出，溶质3在掩膜板烘干后变成固体的粉末，当掩膜板二次利用时就容易在蒸镀腔室中飘散，如果落在显示基板的显示区域就会造成暗点不良，或顶破封装层造成封装失效。
本公开实施例提供了一种掩膜板，包括框架和第一对位条，框架包括沿第一方向延伸并沿第二方向间隔设置的两个第一框边和沿第二方向延伸并沿第一方向间隔设置的两个第二框边，第一框边和第二框边相交形成四边形，第一框边和第二框边包括相对设置的第一表面和第二表面，四边形的四个角中至少三个角的第一表面上设置有第一对位条，第一对位条上设置有第一对位标识，其中，第一方向与第二方向相交。
下面结合附图示例性说明本公开示例性实施例掩膜板的技术方案。
图5为本公开示例性实施例一种掩膜板的结构图。在一些示例性实施例中，掩膜板1包括框架100和第一对位条310。框架100用于支撑和固定第一对位条310以及精细金属掩膜版等。框架100包括沿第一方向X延伸并沿第二方向Y间隔设置的两个第一框边110和沿第二方向Y延伸并沿第一方向X间隔设置的两个第二框边120，第一方向X和第二方向Y相交，在一些示例性实施例中，第一方向X与第二方向Y垂直，此处的垂直可以理解为大致垂直，大致垂直可以包括第一方向X和第二方向Y的夹角在85°到95°之间。第一框边110和第二框边120相交形成四边形，第一框边110和第二框边120包括相对设置的第一表面102和第二表面103，第一表面102设置为在蒸镀过程中与基板相对的表面。四边形的四个角101中至少三个角101的第一表面102上设置有第一对位条310，第一对位条310上设置有第一对位标识311，第一对位标识311可以为第一对位孔。CCD可以通过第一对位孔的孔内与孔外的明暗变化，识取第一对位标识311的位置坐标。在另一些示例性中，四个角101可以均设置有第一对位条310。
本示例性实施例通过将第一对位条310设置于框架100的四个角101中至少三个角101的第一表面102上，仅保留第一对位标识311的周边区域，第一对位条310与框架100间没有缝隙产生，避免了缝隙内残留清洗液不易 除去的问题，进而防止了缝隙内溶质在掩膜板1烘干后变成固体的粉末飘散在显示基板的显示区域，提升了显示基板的产品良率。
图6为图5中A位置的放大图。在一些示例性实施例中，第一对位条310包括沿第一方向X间隔设置的第一侧312和第二侧313，以及沿第二方向Y间隔设置的第三侧314和第四侧315，第一对位标识311位于第一侧312、第二侧313、第三侧314和第四侧315围成的区域内，第一侧312、第二侧313、第三侧314和第四侧315中的至少两侧与框架100固定连接。在一些示例中，第一侧312和第二侧313与框架100固定连接，或者第三侧314和第四侧315与框架100固定连接，或者第一侧312和第二侧313中的一侧以及第三侧314和第四侧315中的一侧与框架100固定连接。在另一些示例中，第一侧312、第二侧313、第三侧314和第四侧315均与框架100固定连接。在一些示例性实施例中，固定连接可以采用焊接。第一侧312、第二侧313、第三侧314和第四侧315中的至少两侧与框架100固定连接，可以进一步减少第一对位条310与框架100之间的缝隙产生。在实际蒸镀过程中，由于对位条300在与基板贴合后分离时受到磁力和静电吸附的影响，以及采用图1所示的对位条300与框架100的固定方式使得对位条300与框架100的焊接面积小，随着蒸镀次数的增多，对位条300变得松弛，甚至脱落，造成对位孔301偏移，以致于掩膜板1和基板的对位时间越来越长，位置精度越来越低，在本示例中，第一侧312、第二侧313、第三侧314和第四侧315中的至少两侧与框架100固定连接，提升了第一对位条310与框架100连接的稳定性，防止了第一对位条310松弛或脱落引起的第一对位标识311偏移。
在一些示例性实施例中，如图6所示，第一对位条310在第一方向X上的长度L1约为9毫米到20毫米，第一对位条310在第二方向Y上的长度L2约为9毫米到20毫米。第一对位条310在第一表面102的正投影的可以为矩形。第一对位标识311为第一对位孔，第一对位孔的直径约为0.15毫米到0.5毫米，例如0.2毫米。在垂直于第一表面102的方向上，第一对位条310的厚度可以约为30微米到100微米。
在一些示例性实施例中，第一对位条310可以采用因瓦合金制成，框架100可以采用因瓦合金制成。因瓦合金(Invar Alloy)是一种含镍36％的铁基 低热膨胀合金，在-50℃～100℃范围的平均线膨胀系数低于1.5×10 -6/℃。采用因瓦合金可以提升掩膜板1的蒸镀像素控制精度。
图7为本公开示例性实施例一种框架结构示意图。在一些示例性实施例中，如图5和图7所示，掩膜板1还包括支撑架200，支撑架200包括支撑框210，支撑框210包括沿第一方向X延伸并沿第二方向Y间隔设置的两个第一边条211和沿第二方向Y延伸并沿第一方向X间隔设置的两个第二边条212，第一边条211和第二边条212的端部连接，第一边条211和第二边条212限定蒸镀区域201，第一框边110的第一表面102的内侧边缘设置有第一安装槽111，第二框边120的第一表面102的内侧边缘设置有第二安装槽121，第一边条211搭接在第一安装槽111内，第二边条212搭接在第二安装槽121内。支撑框210与框架100之间没有形成如图2所示的间隔500。第一边条211远离框架100的表面与第二表面103的距离等于第一表面102和第二表面103之间的距离，第二边条212远离框架100的表面与第二表面103的距离等于第一表面102和第二表面103之间的距离，即，第一边条211远离框架100的表面与第一表面102平齐，第二边条212远离框架100的表面与第一表面102平齐，此处的相等可以理解为大致相等，第一边条211远离框架100的表面与第二表面103的距离和第一表面102和第二表面103之间的距离的比值可以为0.95-1.05，第二边条212远离框架100的表面与第二表面103的距离和第一表面102和第二表面103之间的距离的比值可以为0.95-1.05。
在一些示例性实施例中，如图5所示，支撑架200还包括沿第一方向X延伸并沿第二方向Y间隔设置的多个第一支撑条220和沿第二方向Y延伸并沿第一方向X间隔设置的第二支撑条230，第一支撑条220的端部与对应的第二边条212连接，第二支撑条230的端部与对应的第一边条211连接，第一支撑条220和第二支撑条230将蒸镀区域201分割成多个子蒸镀区202。
在一些示例性实施例中，支撑架200可以采用因瓦合金制成。在垂直于第一表面102的方向上，支撑架200的厚度可以约为30微米到100微米。
在一些示例性实施例中，如图5所示，第一边条211上设置有沿第一方向X间隔设置的多个测试孔303，或第二边条212上设置有沿第二方向Y间隔设置的多个测试孔303，测试孔303在第一表面102所在平面的正投影与 第一表面102不交叠。测试孔303用于在基板上形成检测膜层性质的测试位点，膜层性质可以包括膜层厚度和发光性质。测试孔303可以设置于两个第一边条211的至少一个上，或者可以设置于两个第二边条212的至少一个上，或者可以设置于两个第一边条211至少一个上和两个第二边条212至少一个上。测试孔303设置于第一边条211还是第二边条212，根据精细金属掩膜版的设置方向确定，测试孔303一般位于精细金属掩膜版延伸方向的两侧。也就说如图1所示的第二方向的两侧，防止精细金属掩膜版对测试孔303的遮挡，在其它示例性实施例中，测试孔303也可以设置于相邻的精细掩膜版之间的间隔区域。多个测试孔303可以包括第一测试孔303a和第二测试孔303b，第一测试孔303a用于检测膜层的发光性质，第二测试孔303b用于检测膜层的厚度。第一测试孔303a和第二测试孔303b的尺寸可以相同，或可以不同。第一测试孔303a和第二测试孔303b在第一表面102的正投影均可以为矩形，例如第一测试孔303a为正方形，第二测试孔303b为长方形。第一测试孔303a的数量可以为2个、3个、4个或更多，第二测试孔303b的数量可以为2个、3个、4个或更多，在此不做限定。
在一些示例性实施例中，测试孔303在第一方向X上的长度可以约为0.15毫米到2毫米，测试孔303在第二方向Y上的长度可以约为0.15毫米到2毫米。
在一些示例性实施例中，如图5和图7所示，支撑架200还包括设置于第一边条211上并沿远离蒸镀区域201方向延伸的多个第一固定凸起213和设置于第二边条212上并沿远离蒸镀区域201方向延伸的多个第二固定凸起214，第一框边110的第一表面102上设置有与第一安装槽111连通并与第一固定凸起213位置对应的第三安装槽112，第二框边120的第一表面102上设置有与第二安装槽121连通并与第二固定凸起214位置对应的第四安装槽122。第一固定凸起213嵌入到第三安装槽112内，第二固定凸起214嵌入到第四安装槽122内。第一固定凸起213远离框架100的表面与第二表面103的距离等于第一表面102和第二表面103之间的距离，第二固定凸起214远离框架100的表面与第二表面103的距离等于第一表面102和第二表面103之间的距离，即，第一固定凸起213远离框架100的表面与第一表面102平 齐，第二固定凸起214远离框架100的表面与第一表面102平齐，此处的相等可以理解为大致相等，第一固定凸起213远离框架100的表面与第二表面103的距离和第一表面102和第二表面103之间的距离的比值可以为0.95-1.05，第二固定凸起214远离框架100的表面与第二表面103的距离和第一表面102和第二表面103之间的距离的比值可以为0.95-1.05。在示例性实施例中，第一固定凸起213与第二支撑条230的位置对应，第二固定凸起214与第一支撑条220的位置对应。
在一些示例性实施例中，如图5所示，第一对位条310在第一表面102所在平面的正投影与支撑架200在第一表面102所在表面的正投影存在交叠。
在一些示例性实施例中，如图5所示，掩膜板1还包括第二对位条320，第二对位条320设置于第一框边110和/或第二框边120上，例如，在一示例中，第二对位条320设置于两个第一框边110上，在另一示例中，第二对位条320设置于两个第二框边120上。第二对位条320上设置有第二对位标识321。第二对位标识321可以为第二对位孔。第一对位标识311设置为掩膜板1与基板进行精准对位。第二对位标识321设置为掩膜板1与基板进行粗略对位。在其它示例性实施例中，第二对位标识321也可以用于掩膜板1与基板精准对位。
在一些示例性实施例中，如图5所示，第二对位条320设置于第二框边120上，第二对位条320位于第二框边120的中部位置，第二框边120的中部位置可以理解为第二框边120沿第一方向的长度的四分之一到四分之三的位置，例如二分之一位置。
在另一示例性实施例中，第二对位条320设置于第一框边110上，第二对位条320位于第一框边110的中部位置，第一框边110的中部位置可以理解为第一框边110沿第一方向的长度的四分之一到四分之三的位置，例如二分之一位置。
在一些示例性实施例中，第二对位条320设置于第一框边110上，位于同一第一框边110上的第一对位标识311和第二对位标识321的中心在与第一方向X平行的第一直线上。
在一些示例性实施例中，如图5所示，第二对位条320设置于第二框边 120上，位于同一第二框边120上的第一对位标识311和第二对位标识321的中心在与第二方向Y平行的第二直线上
图8为图5中B位置的放大图。在一些示例性实施例中，如图8所示，第二对位条320包括沿第一方向X间隔设置的第五侧322和第六侧323，以及沿第二方向Y间隔设置的第七侧324和第八侧325，第二对位标识321位于第五侧322、第六侧323、第七侧324和第八侧325围成的区域内，第五侧322、第六侧323、第七侧324和第八侧325中的至少两侧与框架100固定连接。在一些示例中，第五侧322和第六侧323与框架100固定连接，或者第七侧324和第八侧325与框架100固定连接，或第五侧322和第六侧323中的一侧以及第七侧324和第八侧325中的一侧与框架100固定连接。在另一些示例中，第五侧322、第六侧323、第七侧324和第八侧325均与框架100固定连接。在一些示例性实施例中，固定连接可以采用焊接。第五侧322、第六侧323、第七侧324和第八侧325中的至少两侧与框架100固定连接，可以进一步减少第二对位条320与框架100之间的缝隙产生，防止了第二对位条320松弛或脱落引起的第二对位标识321偏移。
在一些示例性实施例中，如图8所示，第二对位条320在第一方向X上的长度L3约为9毫米到20毫米，第二对位条320在第二方向Y上的长度L4约为9毫米到20毫米。第二对位条320在第一表面102的正投影的可以为矩形。第二对位标识321为第二对位孔，第二对位孔的直径约为0.15毫米到0.5毫米，例如0.2毫米。在垂直于第一表面102的方向上，第二对位条320的厚度可以约为30微米到100微米。
在一些示例性实施例中，第二对位条320可以采用因瓦合金制成。
在一些示例性实施例中，在第一直线上的第一对位标识311和第二对位标识321可以在同一张网过程中形成，或者在第二直线上的第一对位标识311和第二对位标识321可以在同一张网过程中形成。
图9为本公开示例性实施例另一种掩膜板结构图。在一些示例性实施例中，如图9所示，第二对位条320与第二边条212连接，第二框边120上设置有与第二安装槽121连通并与第二对位条320位置对应的第五安装槽123。第二对位条320可以嵌入到第五安装槽123内。第二对位条320远离框架100 的表面与第二表面103之间的距离大致等于第一表面102和第二表面103之间的距离。在另一示例性实施例中，第一对位条310与第一边条211连接，第一框边110上设置有与第一安装槽111连通并与第二对位条320位置对应的第五安装槽。在本示例中，第五安装槽用于安装对位条，因此也可以称为对位条安装槽。
在一些示例性实施例中，测试孔设置于第一边条上，掩膜板还包括固定于框架上的多个精细金属掩膜版，精细金属掩膜版沿着第一方向延伸并沿第二方向间隔设置，精细金属掩膜版包括掩膜图案区和设置于掩膜图案区外围的掩膜遮挡区，掩膜图案区与子蒸镀区位置对应。
在一些示例性实施例中，测试孔设置于第二边条上，掩膜板还包括固定于框架上的多个精细金属掩膜版，精细金属掩膜版沿着第二方向延伸并沿第一方向间隔设置，精细金属掩膜版包括掩膜图案区和设置于掩膜图案区外围的掩膜遮挡区，掩膜图案区与子蒸镀区位置对应。
本公开实施例还提供了一种掩膜板的制备方法，包括：
固定框架，框架包括沿第一方向延伸并沿第二方向间隔设置的两个第一框边和沿第二方向延伸并沿第一方向间隔设置的两个第二框边，第一框边和第二框边相交形成四边形，第一框边和第二框边包括相对设置的第一表面和第二表面；
在框架的第一表面上形成第一对位条，第一对位条形成在四边形的四个角中至少三个角上，第一对位条上设置有第一对位标识，
其中，第一方向和第二方向相交。
在一些示例性实施例中，在框架的第一表面形成第一对位条包括：
通过张网工艺在第一框边或第二框边上固定对位条，对位条上设置有第一对位标识，裁切对位条，保留第一对位标识周边区域，形成第一对位条。在一示例中，通过张网工艺在第一框边或第二框边上固定对位条，对位条上设置有第一对位标识，裁切对位条，保留第一对位标识周边区域，形成第一对位条，可以包括：将整条对位条焊接在框架的第一框边或者第二框边上，然后焊接第一对位标识的四周形成第一焊接区域，切割掉对位条除第一焊接 区域以外的其它多余部分。在本示例中，对位条上仅设置有第一对位标识，未设置测试孔，进而使对位条更加通用化，不受支撑框与框架产生的间隔位置影响，提高工程制图效率，减少设计失误风险。
在一些示例性实施例中，对位条上设置有第二对位标识，制备方法还包括：裁切对位条，保留第二对位标识周边区域，形成第二对位条。在一示例中，裁切对位条，保留第二对位标识周边区域，形成第二对位条，还可以包括：焊接第二对位标识的四周形成第二焊接区域，切割掉对位条除第一焊接区域和第二焊接区域以外的多余部分。
在一些示例性实施例中，在框架的第一表面上形成第一对位条之前，还包括：在框架上固定支撑架，支撑架包括支撑框和设置于支撑框上的第二对位条，框架在与第二对位条的对应位置设置有对位条安装槽，第二对位条嵌入到对位条安装槽内。
本公开实施例还提供了一种显示面板，采用上述实施例的掩膜板制备而成。
本公开实施例还提供了一种显示装置，包括上述实施例提供的显示面板。显示装置可以为：手机、平板电脑、电视机、显示器、笔记本电脑、数码相框、导航仪等任何具有显示功能的产品或部件。
本公开中的附图只涉及本公开涉及到的结构，其他结构可参考通常设计。在不冲突的情况下，本公开的实施例即实施例中的特征可以相互组合以得到新的实施例。
本领域的普通技术人员应当理解，可以对本公开的技术方案进行修改或者等同替换，而不脱离本公开技术方案的精神和范围，均应涵盖在本申请的权利要求的范围当中。

Claims (18)

  1. 一种掩膜板，包括框架和第一对位条，所述框架包括沿第一方向延伸并沿第二方向间隔设置的两个第一框边和沿第二方向延伸并沿第一方向间隔设置的两个第二框边，所述第一框边和所述第二框边相交形成四边形，所述第一框边和所述第二框边包括相对设置的第一表面和第二表面，所述四边形的四个角中至少三个角的第一表面上设置有所述第一对位条，所述第一对位条上设置有第一对位标识，其中，所述第一方向与所述第二方向相交。
  2. 根据权利要求1所述的掩膜板，其中，所述第一对位条包括沿所述第一方向间隔设置的第一侧和第二侧，以及沿所述第二方向间隔设置的第三侧和第四侧，所述第一对位标识位于所述第一侧、所述第二侧、所述第三侧和所述第四侧围成的区域内，所述第一侧、所述第二侧、所述第三侧和所述第四侧中的至少两侧与所述框架固定连接。
  3. 根据权利要求1所述的掩膜板，其中，所述第一对位条在所述第一方向上的长度为9毫米到20毫米，所述第一对位条在所述第二方向上的长度为9毫米到20毫米。
  4. 根据权利要求1-3任一项所述的掩膜板，还包括支撑架，所述支撑架包括支撑框，所述支撑框包括沿所述第一方向延伸并沿所述第二方向间隔设置的两个第一边条和沿所述第二方向延伸并沿所述第一方向间隔设置的两个第二边条，所述第一边条和所述第二边条的端部连接，所述第一边条和所述第二边条限定蒸镀区域，所述第一框边的所述第一表面的内侧边缘设置有第一安装槽，所述第二框边的所述第一表面的内侧边缘设置有第二安装槽，所述第一边条搭接在所述第一安装槽内，所述第二边条搭接在所述第二安装槽内。
  5. 根据权利要求4所述的掩膜板，所述第一边条远离所述框架的表面与所述第二表面的距离大致等于所述第一表面和所述第二表面之间的距离，所述第二边条远离所述框架的表面与所述第二表面的距离大致等于所述第一表面和所述第二表面之间的距离。
  6. 根据权利要求4所述的掩膜板，其中，所述第一边条上设置有沿所述第一方向间隔设置的多个测试孔，和/或所述第二边条上设置有沿所述第二方 向间隔设置的多个测试孔；
    所述测试孔在所述第一表面所在平面的正投影与所述第一表面不交叠。
  7. 根据权利要求4所述的掩膜板，还包括第二对位条，所述第二对位条设置于所述第一框边或所述第二框边上，所述第二对位条上设置有第二对位标识。
  8. 根据权利要求7所述的掩膜板，其中，所述第二对位条设置于所述第一框边上，所述第二对位条位于所述第一框边的中部位置；或者，
    所述第二对位条设置于所述第二框边上，所述第二对位条位于所述第二框边的中部位置。
  9. 根据权利要求7所述的掩膜板，其中，所述第二对位条设置于所述第一框边上，位于同一所述第一框边上的所述第一对位标识和所述第二对位标识的中心在与所述第一方向平行的第一直线上；或者，
    所述第二对位条设置于所述第二框边上，位于同一所述第二框边上的所述第一对位标识和所述第二对位标识的中心在与所述第二方向平行的第二直线上。
  10. 根据权利要求7所述的掩膜板，其中，所述第二对位条包括沿所述第一方向间隔设置的第五侧和第六侧，以及沿所述第二方向间隔设置的第七侧和第八侧，所述第二对位标识位于所述第五侧、所述第六侧、所述第七侧和所述第八侧围成的区域内，所述第五侧、所述第六侧、所述第七侧和所述第八侧中的至少两侧与所述框架固定连接。
  11. 根据权利要求7所述的掩膜板，其中，所述第二对位条在所述第一方向上的长度为9毫米到20毫米，所述第二对位条在所述第二方向上的长度为9毫米到20毫米。
  12. 根据权利要求7所述的掩膜板，其中，所述第二对位条与所述第二边条连接，所述第二框边上设置有与所述第二安装槽连通并与所述第二对位条位置对应的对位条安装槽，所述第二对位条嵌入到所述对位条安装槽内；或者，
    所述第一对位条与所述第一边条连接，所述第一框边上设置有与所述第 一安装槽连通并与所述第二对位条位置对应的对位条安装槽，所述第二对位条嵌入到所述对位条安装槽内。
  13. 一种显示面板，采用如权利要求1-12所述的掩膜板制备。
  14. 一种显示装置，包括如权利要求13所述的显示面板。
  15. 一种掩膜板的制备方法，包括：
    固定框架，所述框架包括沿第一方向延伸并沿第二方向间隔设置的两个第一框边和沿第二方向延伸并沿第一方向间隔设置的两个第二框边，所述第一框边和所述第二框边相交形成四边形，所述第一框边和所述第二框边包括相对设置的第一表面和第二表面；
    在所述框架的第一表面上形成第一对位条，所述第一对位条形成在所述四边形的四个角中至少三个角上，所述第一对位条上设置有第一对位标识，
    其中，所述第一方向和所述第二方向相交。
  16. 根据权利要求15所述的制备方法，在所述框架的第一表面上形成第一对位条包括：
    通过张网工艺在所述第一框边或所述第二框边上固定对位条，所述对位条上设置有第一对位标识，裁切所述对位条，保留所述第一对位标识周边区域，形成第一对位条。
  17. 根据权利要求16所述的制备方法，所述对位条上设置有第二对位标识，所述制备方法还包括：
    裁切所述对位条，保留所述第二对位标识周边区域，形成第二对位条。
  18. 根据权利要求15所述的制备方法，在所述框架的第一表面上形成第一对位条之前，还包括：
    在框架上固定支撑架，所述支撑架包括支撑框和设置于支撑框上的第二对位条，所述框架在与所述第二对位条的对应位置设置有对位条安装槽，所述第二对位条嵌入所述对位条安装槽内。
PCT/CN2020/138368 2020-12-22 2020-12-22 掩膜板及其制备方法、显示面板、显示装置 WO2022133737A1 (zh)

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