CN115135799A - 掩膜板及其制备方法、显示面板、显示装置 - Google Patents

掩膜板及其制备方法、显示面板、显示装置 Download PDF

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CN115135799A
CN115135799A CN202080003511.2A CN202080003511A CN115135799A CN 115135799 A CN115135799 A CN 115135799A CN 202080003511 A CN202080003511 A CN 202080003511A CN 115135799 A CN115135799 A CN 115135799A
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alignment
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CN115135799B (zh
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李剑波
吴建鹏
黄琰
牛彤
丁文彪
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

一种掩膜板(1)，包括框架(100)和第一对位条(310)，框架(100)包括沿第一方向延伸并沿第二方向间隔设置的两个第一框边(110)和沿第二方向延伸并沿第一方向间隔设置的两个第二框边(120)，第一框边(110)和第二框边(120)相交形成四边形，第一框边(110)和第二框边(120)包括相对设置的第一表面(102)和第二表面(103)，四边形的四个角(101)中至少三个角(101)的第一表面(102)上设置有第一对位条(310)，第一对位条(310)上设置有第一对位标识(311)，其中，第一方向与第二方向相交；该掩膜板(1)防止缝隙内溶质(3)烘干后变成固体粉末飘散在显示区域，提升了器件的产品良率。

Description

PCT国内申请，说明书已公开。

Claims (18)

  1. PCT国内申请，权利要求书已公开。
CN202080003511.2A 2020-12-22 2020-12-22 掩膜板及其制备方法、显示面板、显示装置 Active CN115135799B (zh)

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PCT/CN2020/138368 WO2022133737A1 (zh) 2020-12-22 2020-12-22 掩膜板及其制备方法、显示面板、显示装置

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Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005163182A (ja) * 2003-12-02 2005-06-23 Samsung Oled Co Ltd マスクフレーム組合わせ体、それを利用した基板及びマスク整列方法
CN103160775A (zh) * 2011-12-14 2013-06-19 昆山工研院新型平板显示技术中心有限公司 蒸镀掩膜板对位系统
CN105589306A (zh) * 2016-02-26 2016-05-18 合肥欣奕华智能机器有限公司 一种掩膜板对位系统
CN105839052A (zh) * 2016-06-17 2016-08-10 京东方科技集团股份有限公司 掩膜板以及掩膜板的组装方法
CN106191769A (zh) * 2016-07-22 2016-12-07 京东方科技集团股份有限公司 一种掩膜版、基板、显示面板和显示装置
CN106702318A (zh) * 2016-12-12 2017-05-24 京东方科技集团股份有限公司 掩膜框架及制造方法和掩膜板
CN107557731A (zh) * 2017-08-01 2018-01-09 武汉华星光电半导体显示技术有限公司 一种掩膜板
CN107653436A (zh) * 2017-10-31 2018-02-02 京东方科技集团股份有限公司 掩膜板及其制作方法、蒸镀方法
CN108611600A (zh) * 2018-08-17 2018-10-02 京东方科技集团股份有限公司 掩膜结构
US20190386221A1 (en) * 2018-06-15 2019-12-19 Samsung Display Co., Ltd. Mask assembly, deposition apparatus having the same, and method of fabricating display device using the same
CN110629160A (zh) * 2019-10-31 2019-12-31 京东方科技集团股份有限公司 掩膜板组件
CN111286695A (zh) * 2020-02-28 2020-06-16 成都京东方光电科技有限公司 支撑架、固定架和掩膜板
CN111471960A (zh) * 2020-06-09 2020-07-31 京东方科技集团股份有限公司 掩膜板以及制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010106358A (ja) * 2008-09-30 2010-05-13 Canon Inc 成膜用マスク及びそれを用いた成膜方法
CN111108229A (zh) * 2017-09-28 2020-05-05 夏普株式会社 蒸镀掩模以及蒸镀掩模的制造方法
KR102236540B1 (ko) * 2018-08-07 2021-04-06 주식회사 오럼머티리얼 마스크의 이송 시스템 및 프레임 일체형 마스크의 제조 방법
CN111088474B (zh) * 2020-01-03 2022-07-05 京东方科技集团股份有限公司 一种掩膜板及其制作方法

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005163182A (ja) * 2003-12-02 2005-06-23 Samsung Oled Co Ltd マスクフレーム組合わせ体、それを利用した基板及びマスク整列方法
CN103160775A (zh) * 2011-12-14 2013-06-19 昆山工研院新型平板显示技术中心有限公司 蒸镀掩膜板对位系统
CN105589306A (zh) * 2016-02-26 2016-05-18 合肥欣奕华智能机器有限公司 一种掩膜板对位系统
CN105839052A (zh) * 2016-06-17 2016-08-10 京东方科技集团股份有限公司 掩膜板以及掩膜板的组装方法
CN106191769A (zh) * 2016-07-22 2016-12-07 京东方科技集团股份有限公司 一种掩膜版、基板、显示面板和显示装置
CN106702318A (zh) * 2016-12-12 2017-05-24 京东方科技集团股份有限公司 掩膜框架及制造方法和掩膜板
CN107557731A (zh) * 2017-08-01 2018-01-09 武汉华星光电半导体显示技术有限公司 一种掩膜板
CN107653436A (zh) * 2017-10-31 2018-02-02 京东方科技集团股份有限公司 掩膜板及其制作方法、蒸镀方法
US20190386221A1 (en) * 2018-06-15 2019-12-19 Samsung Display Co., Ltd. Mask assembly, deposition apparatus having the same, and method of fabricating display device using the same
CN108611600A (zh) * 2018-08-17 2018-10-02 京东方科技集团股份有限公司 掩膜结构
CN110629160A (zh) * 2019-10-31 2019-12-31 京东方科技集团股份有限公司 掩膜板组件
CN111286695A (zh) * 2020-02-28 2020-06-16 成都京东方光电科技有限公司 支撑架、固定架和掩膜板
CN111471960A (zh) * 2020-06-09 2020-07-31 京东方科技集团股份有限公司 掩膜板以及制备方法

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CN115135799B (zh) 2023-08-01
US20220396867A1 (en) 2022-12-15
WO2022133737A1 (zh) 2022-06-30

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