WO2022130870A1 - Procédé de fabrication d'un rotor - Google Patents

Procédé de fabrication d'un rotor Download PDF

Info

Publication number
WO2022130870A1
WO2022130870A1 PCT/JP2021/041890 JP2021041890W WO2022130870A1 WO 2022130870 A1 WO2022130870 A1 WO 2022130870A1 JP 2021041890 W JP2021041890 W JP 2021041890W WO 2022130870 A1 WO2022130870 A1 WO 2022130870A1
Authority
WO
WIPO (PCT)
Prior art keywords
shaft body
magnet
shaft
joined
armoring
Prior art date
Application number
PCT/JP2021/041890
Other languages
English (en)
Japanese (ja)
Inventor
晃司 迫田
秀海 大熊
Original Assignee
株式会社Ihi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社Ihi filed Critical 株式会社Ihi
Publication of WO2022130870A1 publication Critical patent/WO2022130870A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • H02K15/03—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies having permanent magnets

Definitions

  • This disclosure relates to a method for manufacturing a rotor.
  • a technique for manufacturing a rotor for an electric motor has been proposed.
  • a shaft body having a pre-finished shape is joined to the bottom surfaces of both columnar magnets.
  • the magnets and the two shafts joined to each other by shrink fitting so that the side surfaces of the magnets and the two shafts joined to each other are covered by the armoring while being in contact with the inner peripheral surface of the annular armoring. Armoring is fitted.
  • the accuracy with which the central axes of the magnet and the two shafts are aligned depends on the accuracy of the shape of the magnet and the two shafts and the accuracy of the jig for axis alignment. Further, in the above manufacturing method, the accuracy in which the side surfaces of the magnets joined to each other and the two shaft bodies are aligned is also low. Therefore, it is possible that the magnet and the armoring fitted to the two shafts do not have sufficient tightening allowance. As described above, in the above manufacturing method, the accuracy of the manufactured rotor is low.
  • this disclosure describes a method for manufacturing a rotor that can improve the accuracy of the rotor to be manufactured.
  • One aspect of the present disclosure is to join one bottom surface of a columnar first shaft body to one bottom surface of a columnar magnet, and to join one bottom surface of a columnar second shaft body to the other bottom surface of the magnet.
  • the side of the magnet on the side surface is covered with the armor ring while being in contact with the inner peripheral surface of the annular armor ring.
  • the accuracy of the manufactured rotor can be improved.
  • One aspect of the present disclosure is to join one bottom surface of a columnar first shaft body to one bottom surface of a columnar magnet, and to join one bottom surface of a columnar second shaft body to the other bottom surface of the magnet.
  • the side of the magnet on the side surface is covered with the armor ring while being in contact with the inner peripheral surface of the annular armor ring.
  • the magnets, the magnets already joined to each other in the joining step so that the side surfaces of the magnet, the first shaft body and the second shaft body form the same cylindrical side surface, the first.
  • Each side surface of the shaft body and the second shaft body is processed. Therefore, the accuracy with which the side surfaces of the magnet, the first shaft body, and the second shaft body match after the first processing step does not depend on the precision of the step before the joining step. Therefore, it is possible to improve the accuracy in which the side surfaces of the magnets, the first shaft body and the second shaft body joined to each other are aligned, and it is also possible to improve the accuracy of the tightening allowance of the armoring to be fitted in the subsequent fitting step.
  • the side surfaces of the magnets, the first shaft body and the second shaft body in the first shaft body and the second shaft body that have already been joined to each other in the joining step are based on the outer peripheral surface of the armoring. It will be processed. Therefore, the accuracy with which the magnet, the first axis, and the central axis of the second axis match after the second processing does not depend on the accuracy of the process before the joining process. Therefore, it is possible to improve the accuracy in which the central axes of the magnet, the first shaft body, and the second shaft body are aligned. As described above, according to this configuration, the accuracy of the manufactured rotor can be improved.
  • the other bottom surface of the first shaft body and the other bottom surface of the second shaft body are supported while supporting the side surface of any of the magnet, the first shaft body, and the second shaft body.
  • the side surfaces of the magnet, the first shaft body, and the second shaft body may be machined.
  • any side surface of the magnet, the first shaft body and the second shaft body is supported.
  • the other bottom surface of the first shaft body and the other bottom surface of the second shaft body are not supported, and the side surfaces of the magnet, the first shaft body, and the second shaft body are machined. Therefore, the supporting force required for processing is not applied to the joint portion between the magnet and the first shaft body and the joint portion between the magnet and the second shaft body. Therefore, it is possible to reduce the damage of the joint portion in the first processing step and improve the yield of rotor manufacturing.
  • unevenness provided on one bottom surface of the magnet and one bottom surface of the first axis body so as to limit mutual movement in the direction intersecting the central axis of the magnet and the first axis body.
  • the bottom surface of one of the magnets is joined to the bottom surface of one of the magnets while the portions are fitted to each other, so that the movement of the magnet in the direction intersecting the central axis of the magnet and the second axis is restricted.
  • One bottom surface of the second axis body may be joined to the other bottom surface of the magnet while the uneven portions provided on the other bottom surface and one bottom surface of the second axis body are fitted to each other.
  • the joining step on one bottom surface of the magnet and one bottom surface of the first shaft body so as to limit each other's movement in the direction intersecting the central axis of the magnet and the first shaft body, respectively.
  • the provided uneven portions are fitted to each other, and one bottom surface of the first shaft body is joined to one bottom surface of the magnet.
  • unevenness provided on each of the other bottom surface of the magnet and one bottom surface of the second axis body so as to limit mutual movement in the direction intersecting the central axis of the magnet and the second axis body.
  • the portions are fitted to each other and one bottom surface of the second shaft body is joined to the other bottom surface of the magnet.
  • one bottom surface of the first shaft body is joined to one bottom surface of the magnet using an adhesive
  • one bottom surface of the second shaft body is joined to the other bottom surface of the magnet using an adhesive. You may.
  • one bottom surface of the first shaft body is joined to one bottom surface of the magnet using an adhesive
  • one of the second shaft bodies is joined to the other bottom surface of the magnet using an adhesive.
  • the bottom of the magnet is joined. Therefore, the joining process can be executed by a simple method.
  • a magnet 1A is a columnar permanent magnet.
  • the magnet 1A has one bottom surface 2 and the other bottom surface 3.
  • the magnet 1A includes an uneven portion 4 on one bottom surface 2 and an uneven portion 5 on the other bottom surface 3.
  • the magnet 1A has a side surface 6 between the bottom surface 2 and the bottom surface 3.
  • the first shaft body 11A is a columnar metal member having substantially the same diameter as the magnet 1A.
  • the first shaft body 11A has one bottom surface 12 and the other bottom surface 13.
  • the first shaft body 11A includes an uneven portion 14 on one bottom surface 12.
  • the first shaft body 11A has a side surface 16 between the bottom surface 12 and the bottom surface 13.
  • the second shaft body 21A is a columnar metal member having substantially the same diameter as the magnet 1A, and has the same shape as the first shaft body 11A.
  • the second shaft body 21A has one bottom surface 22 and the other bottom surface 23.
  • the second shaft body 21A includes an uneven portion 24 on one bottom surface 22.
  • the second shaft body 21A has a side surface 26 between the bottom surface 22 and the bottom surface 23.
  • the uneven portion 4 of one bottom surface 2 of the magnet 1A and the uneven portion 14 of one bottom surface 12 of the first shaft body 11A have shapes corresponding to each other, and by fitting each other, the magnet 1A and the first shaft It limits each other's movement in the direction intersecting the central axis A of the body 11A.
  • the uneven portion 5 of the other bottom surface 3 of the magnet 1A and the uneven portion 24 of the other bottom surface 22 of the second shaft body 21A have shapes corresponding to each other, and by fitting each other, the magnet 1A and the second shaft It limits each other's movement in the direction intersecting the central axis A of the body 21A.
  • the shapes of the uneven portions 4, 5, 14, and 24 restrict the movement of the magnet 1A, the first shaft body 11A, and the second shaft body 21A in the direction intersecting the central axis A by fitting each other. Any shape may be used as long as it is used.
  • the uneven portions 4 and 5 of the magnet 1A project in a direction parallel to the central axis A at the central portions of the bottom surfaces 2 and 3, and the central shafts at the peripheral portions of the bottom surfaces 2 and 3. It has a concave shape in the direction parallel to A.
  • the uneven portion 14 of the bottom surface 12 of the first shaft body 11A and the uneven portion 24 of the bottom surface 22 of the second shaft body 21A are recessed in the central portions of the bottom surfaces 12 and 22 in the direction parallel to the central axis A.
  • Each of the peripheral edges of the bottom surfaces 12 and 22 has a shape protruding in a direction parallel to the central axis A.
  • the shapes of the uneven portions 4, 5, 14, and 24 move each other in the direction of rotation around the central axis A of the magnet 1A, the first shaft body 11A, and the second shaft body 21A by fitting each other. May be limited.
  • the joining step S1 is executed for the magnet 1A, the first shaft body 11A, and the second shaft body 21A.
  • one bottom surface 12 of the columnar first shaft body 11A is joined to one bottom surface 2 of the columnar magnet 1A, and the columnar second shaft body 21A is bonded to the other bottom surface 3 of the magnet 1A.
  • the magnet 1A, the first shaft body 11A, and the second shaft body 21A are joined to each other.
  • one bottom surface 2 of the magnet 1A and one bottom surface 12 of the first shaft body 11A are restricted from moving in a direction intersecting the central axis A of the magnet 1A and the first shaft body 11A.
  • One bottom surface 12 of the first shaft body 11A is joined to one bottom surface 2 of the magnet 1A while the uneven portions 4 and 14 provided on the respective surfaces are fitted to each other.
  • the other bottom surface 3 of the magnet 1A and the one bottom surface of the second axis body 21A are restricted so as to limit the mutual movement of the magnet 1A and the second axis body 21A in the direction intersecting the central axis A.
  • One bottom surface 22 of the second shaft body 21A is joined to the other bottom surface 3 of the magnet 1A while the uneven portions 5 and 24 provided on each of the 22 22 are fitted to each other.
  • one bottom surface 12 of the first shaft body 11A is joined to one bottom surface 2 of the magnet 1A using the adhesive 30, and the other bottom surface 3 of the magnet 1A is bonded using the adhesive 30.
  • One bottom surface 22 of the biaxial body 21A is joined.
  • a thermosetting epoxy-based adhesive can be applied to the adhesive 30.
  • the first processing step S2 is executed for the magnets 1A, the first shaft body 11A, and the second shaft body 21A joined to each other in the joining step S1.
  • the magnets joined to each other in the joining step S1 so that the side surfaces 6, 16 and 26 of the magnet 1A, the first shaft body 11A and the second shaft body 21A form the same cylindrical side surface.
  • the side surfaces 6, 16 and 26 of 1A, the first shaft body 11A and the second shaft body 21A are machined. Therefore, after the first processing step S2, the magnets 1A, the first shaft body 11A, and the second shaft body 21A joined to each other in the joining step S1 have the bottom surfaces 13, 23 and the side surfaces 6, 16, 26 that coincide with each other 1. Form two cylinders.
  • the first processing step S2 while the side surfaces 6, 16 and 26 of any of the magnet 1A, the first shaft body 11A and the second shaft body 21A are supported, the other bottom surface 13 and the second shaft of the first shaft body 11A are supported.
  • the side surfaces 6, 16 and 26 of the magnet 1A, the first shaft body 11A and the second shaft body 21A are machined without supporting the other bottom surface 23 of the body 21A. That is, the first processing step S2 is executed by centerless polishing. In centerless polishing, the magnets 1A, the first shaft body 11A, and the second shaft body 21A joined to each other are supported by the support blade 41 from below between the adjusting wheel 42 and the grinding wheel 43.
  • the rotations of the magnet 1A, the first shaft body 11A and the second shaft body 21A joined to each other are adjusted, and the magnet 1A, the first shaft body 11A and the second shaft are adjusted.
  • the sides 6, 16 and 26 of the body 21A are processed.
  • the fitting step S3 is executed for the magnet 1A, the first shaft body 11A, and the second shaft body 21A whose side surfaces 6, 16 and 26 are machined in the first processing step S2. ..
  • the side surface 6 of the magnet 1A, the side of the side surface 16 of the first shaft body 11A 16 and the side of the side surface 26 of the second shaft body 21A 26 are the inner peripheral surface 52 of the annular armoring 51.
  • the side of the side surface 16 of the first shaft body 11A opposite to the side of the magnet 1A and the side of the side surface 26 of the second shaft body 21A opposite to the side of the magnet 1A are exposed from the armoring 51.
  • the armoring 51 is fitted to the magnets 1A, the first shaft body 11A, and the second shaft body 21A whose side surfaces 6, 16 and 26 are machined in the first processing step S2.
  • the armoring 51 is an annular metal member having an inner peripheral surface 52 and an outer peripheral surface 53.
  • the fitting step S3 is executed, for example, by shrink fitting in which the heated and expanded armoring 51 is fitted to the magnet 1A, the first shaft body 11A, and the second shaft body 21A, and is cooled and shrunk after fitting. ..
  • the second processing step S4 is executed for the magnet 1A, the first shaft body 11A, and the second shaft body 21A to which the armoring 51 is fitted in the fitting step S3.
  • the magnet 1A, the first shaft body 11A, and the magnet 1A to which the armoring 51 is fitted in the fitting step S3 are used with the outer peripheral surface 53 of the armoring 51 as a reference (reference surface, datum).
  • the side surfaces 16 and 26 of the first shaft body 11A and the second shaft body 21A exposed from the armoring 51 of the second shaft body 21A are machined.
  • the outer peripheral surfaces 53 are the side surfaces 16 and 26 of the first shaft body 11A and the second shaft body 21A exposed from the armoring 51 with reference to the outer peripheral surface 53 of the armoring 51 by a reference device 60 or the like.
  • the sides 16 and 26 are processed so as to be separated from the surface by a certain distance.
  • each of the side surface 16 of the first shaft body 11A exposed from the armoring 51 and the side surface 26 of the second shaft body 21A form a side surface of a cylinder having a central axis A common to each other.
  • the rotor 100 of the electric motor is manufactured.
  • the joining step S1 has already been performed so that the side surfaces 6, 16 and 26 of the magnet 1A, the first shaft body 11A and the second shaft body 21A form the same cylindrical side surface.
  • the side surfaces 6, 16 and 26 of the magnets 1A, the first shaft body 11A and the second shaft body 21A joined to each other are machined. Therefore, the accuracy with which the magnets 1A, the first shaft body 11A, and the side surfaces 6, 16 and 26 of the second shaft body 21A match after the first processing step S2 does not depend on the accuracy of the steps before the joining step S1.
  • the accuracy of the tightening allowance of 51 can also be improved. That is, in the present embodiment, the tightening allowance can be easily controlled.
  • the side surfaces 6, 16 and 26 of any of the magnet 1A, the first shaft body 11A and the second shaft body 21A are supported.
  • the other bottom surface 13 of the first shaft body 11A and the other bottom surface 23 of the second shaft body 21A are not supported, and the side surfaces 6 and 6 of the magnet 1A, the first shaft body 11A and the second shaft body 21A, respectively. 16 and 26 are processed. Therefore, the joints between the magnet 1A and the first shaft body 11A (bottoms 2 and 12) and the joints between the magnet 1A and the second shaft 21A (bottoms 3 and 22) are for support necessary for processing. No force is applied. Therefore, it is possible to reduce the damage of the jointed portion joined by the adhesive 30 in the first processing step S2 and improve the manufacturing yield of the rotor 100.
  • the joining step S1 one of the bottom surfaces 2 and the first of the magnets 1A so as to limit the mutual movement of the magnet 1A and the first shaft body 11A in the direction intersecting the central axis A.
  • Concavo-convex portions 4, 14 provided on one bottom surface 12 of the shaft body 11A are fitted to each other, and one bottom surface 12 of the first shaft body 11A is joined to one bottom surface 2 of the magnet 1A.
  • the other bottom surface 3 of the magnet 1A and the one bottom surface of the second axis body 21A are restricted so as to limit the mutual movement of the magnet 1A and the second axis body 21A in the direction intersecting the central axis A.
  • each of the magnet 1A, the first shaft body 11A, and the second shaft body 21A is less likely to shift in the direction intersecting the central axis A.
  • the magnet 1A, the first shaft body 11A, and the second shaft body 21A are less likely to be displaced in the direction intersecting the central axis A due to the forces from the side surfaces 6, 16 and 26. Centerless polishing in 1 processing step S2 also becomes easy.
  • the joining step S1 one bottom surface 12 of the first shaft body 11A is joined to the one bottom surface 2 of the magnet 1A using the adhesive 30, and the magnet 1A is bonded using the adhesive 30.
  • One bottom surface 22 of the second shaft body 21A is joined to the other bottom surface 3. Therefore, the joining step S1 can be executed by a simple method.
  • the magnet 1B does not have the uneven portions 4 and 5 on the bottom surfaces 2 and 3, and the bottom surfaces 2 and 3 are uniform flat surfaces.
  • the first shaft body 11B does not have the uneven portion 14 on the bottom surface 12
  • the second shaft body 21B does not have the uneven portion 24 on the bottom surface 22, and the bottom surfaces 12 and 22 have a uniform flat surface.
  • the adhesive 30 is not used.
  • Each of the magnet 1B, the first shaft body 11B, and the second shaft body 21B has bolt holes 7, 17, and 27 extending along the central axis A.
  • the bolt 71 is inserted into each of the bolt holes 7, 17, and 27, and the nut 72 is screwed into one end of the bolt 71.
  • the first processing step S2, the fitting process S3, and the second processing step S4 after the joining step S1 are executed in the same manner as in the first embodiment. After the fitting step S3, the bolt 71 and the nut 72 may be removed from the bolt holes 7, 17, 27.
  • the bottom surfaces 2, 3, 12, and 22 of the magnet 1B, the first shaft body 11B, and the second shaft body 21B are not provided with the uneven portions 4, 5, 14, 24, and are bonded in the joining step S1. Even if the agent 30 is not used, the joining step S1, the first processing step S2, the fitting step S3, and the second processing step S4 can be executed. Further, also in this embodiment, after the joining step S1, the magnet 1B, the first shaft body 11B, and the second shaft body 21B are less likely to be displaced in the direction intersecting the central axis A. Therefore, centerless polishing in the first processing step S2 is also facilitated.
  • the embodiments are not limited to the above embodiments.
  • centerless polishing is performed in which the other bottom surface 13 of the first shaft body 11A and the other bottom surface 23 of the second shaft body 21A are not supported.
  • the other bottom surface 13 of the first shaft body 11A and the other bottom surface 23 of the second shaft body 21A may be supported.
  • the accuracy of the manufactured rotor can be improved.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Manufacture Of Motors, Generators (AREA)
  • Permanent Field Magnets Of Synchronous Machinery (AREA)

Abstract

Ce procédé de fabrication d'un rotor comprend : une étape d'assemblage dans laquelle un aimant, un premier arbre et un second arbre sont assemblés l'un à l'autre ; une première étape d'usinage dans laquelle les surfaces latérales de chacun de l'aimant, du premier arbre et du second arbre sont usinées de telle sorte que les surfaces latérales de l'aimant, du premier arbre et du second arbre forment la même surface latérale cylindrique ; une étape de montage dans laquelle un blindage est monté sur l'aimant, le premier arbre et le second arbre de telle sorte que la surface latérale de l'aimant, le côté aimant de la surface latérale du premier arbre et le côté aimant de la surface latérale du second arbre sont recouverts d'un blindage et le côté opposé de la surface latérale du premier arbre à partir du côté aimant et le côté opposé de la surface latérale du second arbre à partir du côté aimant sont exposés à partir du blindage ; et une seconde étape d'usinage dans laquelle les surfaces latérales du premier arbre et du second arbre exposées à partir du blindage sont usinées à l'aide de la surface circonférentielle externe du blindage en tant que référence.
PCT/JP2021/041890 2020-12-17 2021-11-15 Procédé de fabrication d'un rotor WO2022130870A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020209099A JP2024012730A (ja) 2020-12-17 2020-12-17 ロータの製造方法
JP2020-209099 2020-12-17

Publications (1)

Publication Number Publication Date
WO2022130870A1 true WO2022130870A1 (fr) 2022-06-23

Family

ID=82059743

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2021/041890 WO2022130870A1 (fr) 2020-12-17 2021-11-15 Procédé de fabrication d'un rotor

Country Status (2)

Country Link
JP (1) JP2024012730A (fr)
WO (1) WO2022130870A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11234975A (ja) * 1998-02-18 1999-08-27 Mitsubishi Motors Corp 発電機の回転子の組み付け方法
US7042118B2 (en) * 2003-11-10 2006-05-09 Calnetix Permanent magnet rotor construction wherein relative movement between components is prevented
JP2015070786A (ja) * 2013-09-26 2015-04-13 エスカエフ・マニュティック・メシャトロニク 永久磁石回転子軸組立体および方法
CN105226872A (zh) * 2015-11-16 2016-01-06 珠海格力节能环保制冷技术研究中心有限公司 电机转子轴、电机和电机转子轴的制造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11234975A (ja) * 1998-02-18 1999-08-27 Mitsubishi Motors Corp 発電機の回転子の組み付け方法
US7042118B2 (en) * 2003-11-10 2006-05-09 Calnetix Permanent magnet rotor construction wherein relative movement between components is prevented
JP2015070786A (ja) * 2013-09-26 2015-04-13 エスカエフ・マニュティック・メシャトロニク 永久磁石回転子軸組立体および方法
CN105226872A (zh) * 2015-11-16 2016-01-06 珠海格力节能环保制冷技术研究中心有限公司 电机转子轴、电机和电机转子轴的制造方法

Also Published As

Publication number Publication date
JP2024012730A (ja) 2024-01-31

Similar Documents

Publication Publication Date Title
KR100273663B1 (ko) 허브유닛용축의가공방법
CN104942549B (zh) 一种机器人rv减速器花键偏心轴的制造工艺
KR20180042261A (ko) 선회 베어링
WO2022130870A1 (fr) Procédé de fabrication d'un rotor
JP2010190324A (ja) 軌道部材および軌道部材の製造方法
JP2006194293A (ja) 車輪用軸受ユニットの製造方法
JP4200594B2 (ja) 筒軸加工方法ならびに筒軸
JP2007098566A (ja) 車輪支持用転がり軸受ユニット及びその製造方法
JP5747723B2 (ja) トロイダル型無段変速機のトラニオンおよびその加工方法
KR20180131265A (ko) 휠 허브 및 이를 포함하는 휠 베어링
JP7035040B2 (ja) 磁気軸受組立体のための薄型回転子
JP2007514914A (ja) 車輪軸受の外レース
CN202292418U (zh) 双端面立式磨床的砂轮传动机构
CN101387318A (zh) 轴-轮毂-连接装置的机械元件及该连接装置的制造方法
JPS62292919A (ja) クロスロ−ラ−ベアリング及びその製造法
JP5271109B2 (ja) 転がり軸受装置
CN105102184A (zh) 具有固定部件的夹紧套
TWI423384B (zh) 供半導體晶圓處理機器人使用之樞軸臂組件及其製造方法
JP2007143318A (ja) モータ軸調整用治具およびモータ軸調整方法
JPS62292920A (ja) 旋回ベアリング及びその製造法
CN203712525U (zh) 切割砂轮
JP7034049B2 (ja) 分割型摺動環の製造方法及び分割型摺動環用環体
JP2018113755A (ja) ロータの製造方法
JP2010185538A (ja) ボール型等速ジョイント
JPS5931367B2 (ja) ガス遠心分離機における回転胴の製造方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21906234

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 21906234

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP