WO2022110857A1 - 一种楔块调幅探针卡及其主体 - Google Patents

一种楔块调幅探针卡及其主体 Download PDF

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Publication number
WO2022110857A1
WO2022110857A1 PCT/CN2021/108741 CN2021108741W WO2022110857A1 WO 2022110857 A1 WO2022110857 A1 WO 2022110857A1 CN 2021108741 W CN2021108741 W CN 2021108741W WO 2022110857 A1 WO2022110857 A1 WO 2022110857A1
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WO
WIPO (PCT)
Prior art keywords
wedge plate
main body
plate
upper wedge
wedge
Prior art date
Application number
PCT/CN2021/108741
Other languages
English (en)
French (fr)
Inventor
于海超
周明
Original Assignee
强一半导体（苏州）有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 强一半导体（苏州）有限公司 filed Critical 强一半导体（苏州）有限公司
Priority to US18/254,985 priority Critical patent/US20240053384A1/en
Publication of WO2022110857A1 publication Critical patent/WO2022110857A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G01R31/2603—Apparatus or methods therefor for curve tracing of semiconductor characteristics, e.g. on oscilloscope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester

Definitions

  • the invention belongs to the technical field of probe cards, and in particular relates to a wedge block amplitude modulation probe card and its main body.
  • the probe is contacted with the metal terminal on the semiconductor wafer to achieve temporary electrical connection.
  • the electrical signal of the tester is transmitted to the semiconductor device through the probe, and the tester detects the electronic device on the semiconductor wafer through the returned electrical signal.
  • the probe card is the link between the semiconductor wafer and the tester. By integrating multiple probes on the probe card, multiple probes can be in contact with multiple semiconductor devices on the semiconductor wafer at the same time, improving the detection efficiency. .
  • the probe card In the production process of semiconductor devices, it is necessary to access a large number of circuit contacts in one or more devices for many times, and move the probe card through the moving mechanism to make the probes contact the contacts. At the same time, in order to match the detection process There are multiple sets of contacts in the probe card, and the probe card needs to be set up.
  • the probe card is fixed by the holder.
  • the holder is a polyhedron that can be rotated. When switching the probe card, rotate the holder to rotate the corresponding probe card to the top of the semiconductor device for testing, or set up multiple movable platforms to move the probe card, so as to realize the connection between the probe card and different contact groups.
  • Matching in the prior art, in order to realize the detection of multiple groups of contacts, the exchange of probe cards is used to realize matching, and the matching is realized by switching different probe cards.
  • the driving structure of the needle card becomes complicated.
  • the invention overcomes the above-mentioned deficiencies of the prior art, and provides a wedge-block amplitude modulation probe card and its main body, which can adjust the detection range of the probe card, so that a single probe card can detect multiple groups of contacts with different widths. Universal.
  • a wedge block amplitude modulation probe card comprising: a probe card main body, an upper wedge plate and a lower wedge plate, the interior of the probe card main body is slidably provided with a plurality of upper wedge plates and a lower wedge plate, and a plurality of upper wedge plates and the lower wedge plate are alternately arranged at intervals;
  • the probe card main body includes: a main body frame, a probe slot and an upper wedge plate slot, the main body frame accommodates a number of upper wedge plates and a lower wedge plate along the length direction, and the bottom of the main body frame is provided with a lengthwise direction. a probe slot for the probe to pass through, and an upper wedge plate slot for partially exposing the upper wedge plate is also provided on the main frame;
  • the upper wedge plate includes: an upper wedge plate body, an upper wedge plate wedge head, an upper wedge plate probe and an upper wedge plate contact, the lower end of the upper wedge plate body is provided with an upper wedge plate wedge head, and an upper wedge plate wedge plate
  • the two sides of the head respectively extend to the two sides of the upper wedge plate body
  • the lower end of the upper wedge plate wedge head is provided with an upper wedge plate probe
  • one end of the upper wedge plate contact is connected with the upper wedge plate probe
  • the upper wedge plate probe is arranged at the lower end of the upper wedge plate wedge plate.
  • the other end of the wedge plate contact is exposed from one side of the upper wedge plate body;
  • the lower wedge plate comprises: a lower wedge plate body, a lower wedge plate wedge head, a lower wedge plate probe and a lower wedge plate contact, the upper end of the lower wedge plate body is provided with a lower wedge plate wedge head, and the lower wedge plate wedge plate
  • the two sides of the head are respectively extended to the two sides of the lower wedge body, the lower end of the lower wedge body is provided with a lower wedge plate probe, one end of the lower wedge plate contact is connected with the lower wedge plate probe, and the lower wedge plate probe is connected to the lower wedge plate probe.
  • the other end of the board contact is exposed from one side of the lower wedge body;
  • the probe spacing required for the contact to be detected is defined as the standard probe spacing, the thicknesses of the upper wedge body and the lower wedge body are the standard probe spacing, and the probe card body is in contact with the upper wedge plate.
  • a number of fixed contacts are arranged at intervals on the side corresponding to the point and the contact of the lower wedge plate, one end of the several fixed contacts is connected to the detection circuit board, and the other end of the fixed contacts extends to the inside of the main frame, and the adjacent The spacing of the fixed contacts is the standard probe spacing.
  • the main body of the probe card further includes: a main body fixed block, a main body movable block and a main body movable block spring, one side of the main body frame is provided with a main body fixed block, and the side surface of the main body fixed block is connected with the main body fixed block.
  • a plurality of upper wedge plates and lower wedge plates, which are staggered and arranged in sequence, are in contact with one side, and the other side of the main body frame is slidably provided with a main body movable stopper, and the side surface of the main body movable stopper is in contact with a number of staggered and staggered wedge plates.
  • the upper wedge plate and the other side of the lower wedge plate are in contact, and the main body movable stopper is connected to the probe card main body through the main body movable stopper spring.
  • the upper wedge plate further includes an upper wedge plate extension plate, the upper wedge plate extension plate is formed by extending upward from the upper end of the upper wedge plate body, and the upper wedge plate extension plate passes through the upper wedge plate groove and extends to the outside of the probe card body.
  • the upper wedge plate also includes an upper wedge plate slider, an upper wedge plate slider is respectively provided on both sides of the upper wedge plate body, and the upper wedge plate slider slides with the inner wall of the probe card body. connect.
  • the lower wedge plate further includes a lower wedge plate slider, a lower wedge plate slider is respectively provided on both sides of the lower wedge plate body, and the lower wedge plate slider slides with the inner wall of the probe card body. connect.
  • the top of the probe card body is also provided with an amplitude modulation structure, the amplitude modulation structure includes a pressure block, the pressure block is arranged above the exposed part of the upper wedge plate on the probe card body, and the pressure block can press down a single or The exposed parts of a plurality of upper wedges make the upper wedges move downward.
  • a wedge block amplitude modulation probe card main body the inside of the probe card main body is slidably provided with a plurality of upper wedge plates and a lower wedge plate, and the plurality of upper wedge plates and the lower wedge plates are arranged alternately at intervals; the probe card
  • the main body includes: a main body frame, a probe slot and an upper wedge plate slot, the main body frame accommodates several upper wedge plates and a lower wedge plate along the length direction, and the bottom of the main body frame is provided along the length direction for the probe to pass through.
  • the main body frame is also provided with an upper wedge plate groove for the part of the upper wedge plate to be exposed; one side of the main body frame is provided with several fixed contacts at intervals, and one end of the several fixed contacts is connected to the detection
  • the circuit board is connected, and the other end of the fixed contact extends to the inside of the main body frame.
  • the probe card main body also includes: a main body fixed stopper, a main body movable stopper and a main body movable stopper spring, and one side of the main body frame is provided with There is a main body fixed stopper, the side of the main body fixed stopper is in contact with one side of a plurality of upper wedge plates and a lower wedge plate arranged at intervals and staggered in sequence, and the other side of the main body frame is slidably provided with a main body movable stopper, the The side surface of the main body movable stop is in contact with the other sides of several upper wedge plates and lower wedge plates which are staggered in sequence, and the main body movable stop is connected to the probe card body through the main body movable stop spring.
  • a probe card wedge amplitude modulation method comprising the following steps:
  • Step a determine the amplitude modulation distance: before the amplitude modulation, several upper wedge plates are in contact with the sides, and several lower wedge plates are in contact with the sides, and the wedge head of the upper wedge plate at the lower end of the upper wedge plate is embedded in the lower part of the two adjacent lower wedge plates below it. Between the wedge heads of the wedge plates, the upper wedge plate probes of each upper wedge plate are located above the detection area, the lower wedge plate probes of each lower wedge plate are located in the detection area, and the upper wedge plate probes of each upper wedge plate are located in the detection area.
  • the board contacts are located above several fixed contacts, and the lower wedge plate contacts of each lower wedge plate are in contact with several fixed contacts in turn from left to right, and the probes in the detection area are spaced at m , the m is the unit distance corresponding to the distance between the contacts to be detected, the width of the lower wedge probe of each lower wedge located in the detection area is the basic amplitude n, and the width of the contacts to be detected in the detection area
  • the amplitude modulation distance which is an integer multiple of the probe interval m is obtained;
  • Step b move the wedge: through step a, determine the amplitude modulation distance obtained by the amplitude modulation distance, the amplitude modulation distance is a multiple of the probe interval m, as the number of moving upper wedge plates, according to the direction from right to left, the multiple corresponds to The number of upper wedges moves downward, the wedge head of the upper wedge at the lower end of the upper wedge is inserted between the two adjacent lower wedges below it, until the upper wedge probe at the lower end of the upper wedge enters the detection area, and is simultaneously detected.
  • the lower wedge on the right side of the moving upper wedge is pushed and moved to the right;
  • Step c contact connection: when moving the upper wedge plate, the upper wedge plate contact of the moving upper wedge plate moves downward from above to the level of several fixed contacts, and contacts with one of the fixed contacts, The lower wedge plate contact of the pushed lower wedge plate is separated from the original contact fixed contact and contacts with one of the right fixed contacts;
  • Step d probe detection connection refresh: the detection circuit board communicates with the lower wedge probe on the fixed lower wedge, the lower wedge probe on the pushed lower wedge, and the lower wedge probe on the fixed lower wedge through several fixed contacts.
  • the upper wedge probe at the lower end of the moved upper wedge is reconnected electrically.
  • the thicknesses of the upper wedge plate and the lower wedge plate are both set to the probe interval m.
  • the moved upper wedge is moved downward to an area where the side of the moved wedge overlaps with the lower wedge.
  • wedge AM probe card is used for amplitude modulation.
  • the wedge-block AM probe card includes: a probe card body, an upper wedge plate and a lower wedge plate, and a plurality of upper wedge plates and lower wedge plates are slidably arranged inside the probe card body, Several upper wedge plates and lower wedge plates are alternately arranged in sequence.
  • a wedge block amplitude modulation probe card amplitude modulation structure which is arranged above the probe card main body and includes a pressure block, the pressure block is arranged above the exposed part of the upper wedge plate on the probe card main body, and the pressure block can press down a single or the exposed part of the upper wedge plate to move the upper wedge plate downward;
  • the amplitude modulation structure further includes: a pressure block plate, a pressure block plate pin, a pressure block plate pin groove, a pressure block crossbar, a crossbar slider, a crossbar spring, a crossbar slider screw, a first helical gear, a second Two helical gears, transmission rods, sliding gears, sliding plates, housings, toothed rollers and sliding plate screw rods, a plurality of said pressure block plates are slid side by side on the pressure block cross bar to form a pressure block, and the lower end of each pressure block plate Each is provided with a pressure block plate pin, and the upper end of each upper wedge plate is provided with a pressure block plate pin groove, the pressure block cross bar on the left side of the pressure block is slidably provided with a cross bar slider, the pressure block right A cross-bar spring is sleeved on the lateral pressure block cross-bar, the cross-section of the pressure-block cross-bar is rectangular, the upper end of the cross-bar slider is sleeved on
  • the reset frame is sleeved on the outside of the probe card body, a reset frame spring is arranged between the lower end of the reset frame and the inner wall of the housing, and the upper wedge plate is The wedge plate slider is overlapped on the upper end of the reset frame.
  • the reset frame push rod also includes a reset frame push rod, the upper end of the reset frame push rod is fixedly connected to the sliding plate, and the lower end of the reset frame push rod is suspended above the reset frame.
  • the wedge block amplitude modulation probe card includes: a probe card body, an upper wedge plate and a lower wedge plate, and a plurality of upper wedge plates and lower wedge plates are slidably arranged inside the probe card body, and several The upper wedge plates and the lower wedge plates are alternately arranged in sequence;
  • the probe card main body includes: a main body frame, a probe slot and an upper wedge plate slot, the main body frame accommodates a number of upper wedge plates and a lower wedge plate along the length direction, and the bottom of the main body frame is provided with a lengthwise direction.
  • a probe groove for the probe to pass through, and an upper wedge plate groove for the upper wedge plate part to be exposed is also provided on the main body frame.
  • a docking structure for an amplitude modulation structure of a wedge amplitude modulation probe card comprising: a pressure block plate, a pressure block plate pin, a pressure block plate pin groove, a pressure block cross bar, a cross bar slider, a cross bar spring, and a cross bar slider wire
  • a rod, a first helical gear, a second helical gear, a transmission rod, a sliding gear, a sliding plate, a casing, a toothed roller and a sliding plate screw rod, and a plurality of said pressing block plates are arranged in parallel and slide on the pressing block cross bar to form a pressing block
  • the lower end of each pressure block plate is provided with a pressure block plate pin
  • the upper end of each upper wedge plate is provided with a pressure block plate pin groove
  • the pressure block cross bar on the left side of the pressure block is slidably provided with a horizontal
  • a transverse rod spring is sleeved on the transverse rod of the compression block on the right side of the compression block
  • a wedge-block amplitude-modulating probe card amplitude-modulating member is arranged above the probe card main body and includes a pressing block, the pressing block is arranged above the exposed part of the upper wedge plate on the probe card main body, and the pressing block can press down a single or the exposed part of the upper wedge plate to move the upper wedge plate downward;
  • the amplitude modulation piece also includes: a pressure block plate, a pressure block plate ring, a pressure block plate ring groove, a pressure block plate rod, a pressure block plate stopper, a sliding seat, a casing, a moving gear, a toothed roller shaft, and a sliding seat screw rod.
  • the fixing rod and the fixing rod pass through holes, a plurality of the pressing block discs are slid in parallel on the pressing block disc rod to form a pressing block, and several pressing block discs are eccentrically arranged on the pressing block disc rod.
  • a pressure block disc ring is fixedly sleeved on the outside of each upper wedge plate, a pressure block disc ring groove is set at the upper end of each upper wedge plate, and a pressure block disc stopper sleeve is sleeved on the pressure block disc rod on the left side of the pressure block.
  • the pressure block disk rod on the right side of the pressure block is sleeved with a disk rod spring
  • the side of the pressure block disk rod is provided with a guide strip along the axial direction
  • the left end of the pressure block disk blocking cylinder is fixedly connected to the sliding seat
  • the sliding seat is slidably arranged inside the outer casing, the outer casing is fixedly arranged on the main body of the probe card, the right end of the pressure block disk rod is rotatably connected to the sliding seat, and the left end of the pressure block disk rod passes through the pressure block disk blocking cylinder and the
  • the side wall of the sliding seat is fixedly connected with the movable gear, the movable gear is meshed with the toothed roller shaft, both ends of the toothed roller shaft are rotatably connected to the shell, the upper end of the sliding seat is sleeved on the sliding seat screw rod, and the sliding seat Both ends of the screw rod are rotatably connected to the casing, one end of the fixing rod is fixedly connected to
  • the outer frame is sleeved on the outside of the probe card body, an outer frame spring is arranged between the lower end of the outer frame and the inner wall of the shell, and the upper wedge of the upper wedge plate is provided with an outer frame spring.
  • the plate slider is overlapped on the upper end of the outer frame.
  • the wedge block amplitude modulation probe card includes: a probe card body, an upper wedge plate and a lower wedge plate, and a plurality of upper wedge plates and lower wedge plates are slidably arranged inside the probe card body, and several The upper wedge plates and the lower wedge plates are alternately arranged in sequence;
  • the probe card main body includes: a main body frame, a probe slot and an upper wedge plate slot, the main body frame accommodates a number of upper wedge plates and a lower wedge plate along the length direction, and the bottom of the main body frame is provided with a lengthwise direction.
  • a probe groove for the probe to pass through, and an upper wedge plate groove for the upper wedge plate part to be exposed is also provided on the main body frame.
  • a docking structure for an amplitude modulation piece of a wedge amplitude modulation probe card comprising: a pressure block disk, a pressure block disk ring, a pressure block disk ring groove, a pressure block disk rod, a pressure block disk stopper, a sliding seat and a shell, a plurality of The said briquetting discs are juxtaposed and slidingly arranged on the briquetting disc rod to form a briquetting block, and several briquetting discs are eccentrically arranged on the briquetting disc rod, and a briquetting disc ring is fixedly sleeved on the outside of each briquetting disc.
  • each upper wedge plate is provided with a pressure block disk ring groove
  • the pressure block disk rod on the left side of the pressure block is sleeved with a pressure block disk stop cylinder
  • the pressure block disk rod on the right side of the pressure block is on the A disk rod spring is sleeved
  • the side of the pressure block disk rod is provided with a guide bar along the axial direction
  • the left end of the pressure block disk blocking cylinder is fixedly connected to the sliding seat
  • the sliding seat is slidably arranged inside the outer casing
  • the outer casing is fixed Set on the probe card body.
  • the wedge AM probe card of the present invention includes a probe card main body, an upper wedge plate and a lower wedge plate.
  • Several upper wedge plates and lower wedge plates are slidably arranged inside the probe card main body.
  • the wedge plates and the lower wedge plates are alternately arranged in sequence, so that by inserting different numbers of the upper wedge plates between the lower wedge plates, the probes on the upper wedge plate can be inserted into or removed from the probe queue below, increasing or The number of probes used for detection is reduced, so that the detection range of a single probe card can be adjusted, making the probe card universal.
  • the amplitude modulation structure of the wedge block amplitude modulation probe card of the present invention includes: a pressure block plate, a pressure block plate pin, a pressure block plate pin groove, a pressure block cross bar, a cross bar slider and a cross bar spring.
  • the block plates are slid side by side on the pressure block cross bar to form a pressure block, the lower end of each pressure block plate is provided with a pressure block plate pin, and the upper end of each upper wedge plate is provided with a pressure block plate pin groove.
  • a cross-bar slider is slidably arranged on the cross-bar of the pressing block on the left side of the pressing block, and a cross-bar spring is sleeved on the pressing-block cross-bar on the right side of the pressing block.
  • the cross-section of the cross-bar of the pressing block is rectangular, which can realize , by moving the pressure block horizontally to align with the exposed end of single or multiple upper wedge plates, move the pressure block down to insert the upper wedge plate, and connect the upper wedge plate through the pressure block plate, during the process of moving the pressure block down In the middle, the pressure block plate slides horizontally with the upper wedge plate, and keeps docking during the sliding process, which can ensure the stable sliding of the upper wedge plate. It can adapt to different horizontal moving distances of multiple upper wedges.
  • the amplitude modulation piece of the wedge amplitude modulation probe card of the present invention includes: a pressure block plate, a pressure block plate ring, a pressure block plate ring groove, a pressure block plate rod, a pressure block plate stopper, a sliding seat and a casing.
  • the briquetting discs are slid in parallel on the briquetting disc rod to form a briquetting block, several briquetting discs are eccentrically arranged on the briquetting disc rod, and a briquetting disc ring is fixedly sleeved on the outside of each briquetting disc.
  • each upper wedge plate is provided with a pressure block disk ring groove, the pressure block disk rod on the left side of the pressure block is sleeved with a pressure block disk stop cylinder, and the pressure block disk rod on the right side of the pressure block is covered with a sleeve
  • a disc rod spring is provided, the side of the pressure block disc rod is provided with a guide strip along the axial direction, the left end of the pressure block disc blocking cylinder is fixedly connected to the sliding seat, the sliding seat is slidably arranged inside the casing, and the casing is fixedly set
  • the pressure block is moved down so that the upper wedge plate is inserted, and the pressure block plate can pass through after rotating.
  • the pressure block plate ring is butted with the upper wedge plate.
  • the pressure block plate slides horizontally with the upper wedge plate, and keeps the butt joint during the sliding process, which can ensure the stable sliding of the upper wedge plate, and multiple pressure block plates at the same time.
  • the sliding is arranged on the cross bar of the pressing block, and the plurality of pressing block discs can move independently, and can adapt to the different horizontal moving distances of the plurality of upper wedge plates.
  • the probe card wedge amplitude modulation method of the present invention includes the steps of: step a, determining the amplitude modulation distance, step b, moving the wedge, step c, contact connection and step d, detecting the connection refresh of the probe, which can be moved by moving the wedge. block, drive the probe to move, so that the probe card can adjust the number of probes involved in the detection according to the number of contacts to be detected, so as to realize the amplitude modulation of the probe card, so that the detection amplitude of a single probe card can be adjusted, so that the probe card can be adjusted.
  • Pin cards are universal.
  • FIG. 1 is a schematic diagram of the overall structure of a wedge AM probe card
  • Fig. 2 is a side structure schematic diagram of a wedge AM probe card
  • Fig. 3 is the structural schematic diagram of the upper wedge plate and the lower wedge plate
  • Figure 4 is a schematic diagram of the position of the wedge block before amplitude modulation
  • Figure 5 is a schematic diagram of the position of the wedge block after amplitude modulation
  • FIG. 6 is a schematic diagram of an AM structure before AM
  • FIG. 7 is a schematic diagram of the amplitude modulation structure after the amplitude modulation
  • FIG. 8 is a schematic diagram of an AM component before AM
  • Fig. 9 is the schematic diagram of the amplitude modulation piece after the amplitude modulation
  • This embodiment is an embodiment of a wedge AM probe card.
  • a wedge-block AM probe card includes: a probe card body 1 , an upper wedge plate 2 and a lower wedge plate 3 , and a plurality of upper wedge plates are slidably arranged inside the probe card body 1 2 and the lower wedge plate 3, several upper wedge plates 2 and lower wedge plates 3 are arranged alternately at intervals; after the upper wedge plate 2 is moved down, the upper wedge plate 2 will push the lower wedge plate 3 below to the right, so that The upper wedge plate 2 moved down is added to the queue of the lower wedge plate 3 .
  • the probe card main body 1 includes: a main body frame 1-1, a probe slot 1-2 and an upper wedge plate slot 1-3, and the main body frame 1-1 accommodates several There are an upper wedge plate 2 and a lower wedge plate 3, and the bottom of the main body frame 1-1 is provided with a probe groove 1-2 along the length direction for the probe to pass through, and the main body frame 1-1 is also provided with a probe slot 1-2 for the upper wedge plate 1-1
  • the upper wedge plate groove 1-3 partially exposed by the wedge plate 2; the probe groove 1-2 enables the probes of the upper wedge plate 2 and the lower wedge plate 3 to be exposed from the bottom of the main body frame 1-1, the upper wedge plate groove 1-2
  • the width of 3 is smaller than the width of the upper wedge plate 2, so that part of the upper wedge plate 2 is exposed, and the partially exposed upper wedge plate 2 is convenient for the operation of moving the upper wedge plate downward.
  • the upper wedge plate 2 includes: an upper wedge plate body 2-1, an upper wedge plate wedge head 2-2, an upper wedge plate probe 2-3 and an upper wedge plate contact 2-4.
  • the lower end of the upper wedge plate body 2-1 is provided with an upper wedge plate wedge head 2-2. Both sides of the upper wedge plate wedge head 2-2 extend to both sides of the upper wedge plate body 2-1 respectively.
  • the lower end of the wedge head 2-2 is provided with an upper wedge probe 2-3, one end of the upper wedge contact 2-4 is connected with the upper wedge probe 2-3, and the upper wedge contact 2-4 The other end is exposed from one side of the upper wedge plate body 2-1.
  • the lower wedge plate 3 includes: a lower wedge plate body 3-1, a lower wedge plate wedge head 3-2, a lower wedge plate probe 3-3 and a lower wedge plate contact 3-4, the lower wedge plate body 3-2
  • the upper end of the -1 is provided with a lower wedge plate wedge head 3-3. Both sides of the lower wedge plate wedge head 3-3 extend to both sides of the lower wedge plate body 3-1 respectively.
  • the lower end is provided with a lower wedge plate probe 3-3, one end of the lower wedge plate contact 3-4 is connected to the lower wedge plate probe 3-3, and the other end of the lower wedge plate contact 3-4 is connected from the lower wedge plate contact 3-4.
  • One side of the wedge body 3-1 is exposed.
  • the upper wedge plate probe 2-3 is located above the queue of the lower wedge plate probe 3-3 and does not participate in the detection, while the upper wedge plate probe 2-3 is in the lower wedge plate body 3- 1
  • the upper wedge contact 2-4 is located above the queue of the lower wedge contact 3-4, and is not connected to the circuit.
  • the lower wedge contacts 3-4 in the queue are not connected to the circuit.
  • the lower wedge contacts 3-4 are all in contact with the fixed contacts 1-4 and are connected to the circuit.
  • the upper wedge plate probe 2-3 is inserted into the lower wedge plate probe 3-3 queue to participate in the detection, the upper wedge plate contact 2-4 is inserted into the lower wedge plate contact 3-4 queue, Connect the circuit, as shown in Fig. 1, the lower wedge contacts 3-4 in the queue of the lower wedge contacts 3-4 and the upper wedge contacts 2-4 after moving down are both connected with the fixed contacts 1-4 contact, is connected to the circuit.
  • the probe spacing required for the contact to be detected is defined as the standard probe spacing, and the thicknesses of the upper wedge plate body 2-1 and the lower wedge plate body 3-1 are both standard probe probe distances. After moving to the queue of the lower wedge plate 3, the distance that the pushed lower wedge plate 3 moves horizontally to the right is a standard probe distance, that is, the contact point of the upper wedge plate of the lower wedge plate 2 is guaranteed.
  • the pitches of the probes involved in the detection are all standard probe pitches
  • the probe card main body 1 is provided with several fixed contacts 1-4, one end of the fixed contacts 1-4 is connected to the detection circuit board 200, the other end of the fixed contacts 1-4 extends to the inside of the main frame 1-1, and the adjacent fixed contacts 1-4 are The pitch of contacts 1-4 is the standard probe pitch.
  • the upper wedge plates 2 are all located above the queue formed by the lower wedge plates 3, and the upper wedge plate wedge heads 2-2 of each upper wedge plate 2 are embedded in the lower wedge plates of the two adjacent lower wedge plates 3 below it.
  • the upper wedge probes 2- 3 Add to the queue formed by the lower wedge probes 3-3, thereby increasing the number of probes involved in the detection and achieving the purpose of amplitude modulation.
  • Points 1-4 are set on the horizontal height of the lower wedge plate contact 3-4 of the lower wedge plate 3, so that the upper wedge plate contact 2-4 of the upper wedge plate 2 higher than the height is not connected before moving Detection circuit, the upper wedge plate contact 2-4 of the moved upper wedge plate 2 is in contact with one of the fixed contacts 1-4 in the queue formed by the fixed contacts 1-4, and is pushed due to the downward movement of the upper wedge plate 2 Squeeze, the lower wedge plate contact 3-4 of the lower wedge plate 3 that slides to the right is separated from the fixed contact 1-4 connected before, and after the upper wedge plate 2 is moved down, it is in contact with another fixed contact on the right side.
  • Points 1-4 are in contact, the unmoved upper wedge 2 remains unconnected to the detection circuit, the upper wedge contact 2-4 of the moving upper wedge 2 moves down and contacts with a fixed contact 1-4, Connected to the detection circuit, the lower wedge contact 3-4 of the lower wedge 3 that is not pushed remains in contact with the fixed contacts 1-4, and remains connected to the detection circuit, the pushed lower wedge
  • the lower wedge plate contact 3-4 of 3 is separated from the original fixed contact 1-4, and moves to the right to contact with another fixed contact 1-4 on the right, and reconnects to the detection circuit.
  • the probe card main body 1 further includes: a main body fixed stopper 1-5, a main body movable stopper 1-6 and a main body movable stopper spring 1-7, the main body frame 1-
  • a main body fixing block 1-5 One side of the 1 is provided with a main body fixing block 1-5, and the side surface of the main body fixing block 1-5 is in contact with one side of a plurality of upper wedge plates 2 and lower wedge plates 3 arranged at intervals and staggered in sequence
  • the other side of 1-1 is slidably provided with a main body movable stopper 1-6, and the side surface of the main body movable stopper 1-6 is in contact with the other sides of several upper wedge plates 2 and lower wedge plates 3 that are staggered in sequence.
  • the main body movable stopper 1-6 is connected with the probe card main body 1 through the main body movable stopper spring 1-7.
  • the fixed block 1-5 of the main body and the movable block 1-6 of the main body under the action of the movable block spring 1-7 of the main body, clamp the formation formed by the upper wedge plate 2 and the lower wedge plate 3 to ensure the upper wedge plate 2 Move down and insert, and the lower wedge plate 3 slides horizontally to stabilize.
  • the upper wedge plate 2 further includes an upper wedge plate extension plate 2-5, and the upper wedge plate extension plate 2-5 is formed by extending upward from the upper end of the upper wedge plate body 2-1, And the upper wedge plate extending plate 2 - 5 passes through the upper wedge plate slot 1 - 3 and extends to the outside of the probe card body 1 .
  • the upper wedge plate extension plate 2-5 extends to the outside of the probe card main body 1, during amplitude modulation, the upper wedge plate extension plate 2-5 can be pressed down, so that the upper wedge plate 2 can be moved down and inserted, and the lower wedge plate 3 can be inserted. in the formed queue.
  • the upper wedge plate 2 further includes an upper wedge plate slider 2-6, and an upper wedge plate slider 2-6 is respectively provided on both sides of the upper wedge plate body 2-1 , the upper wedge plate slider 2-6 is slidably connected with the inner wall of the probe card main body 1 .
  • the lower wedge plate 3 further includes a lower wedge plate slider 3-5, and a lower wedge plate slider 3-5 is respectively provided on both sides of the lower wedge plate body 3-1 , the lower wedge slider 3-5 is slidably connected with the inner wall of the probe card body 1 .
  • an amplitude modulation structure 4 is further arranged above the probe card body 1 , and the amplitude modulation structure 4 includes a pressure block, and the pressure block is arranged on the upper wedge plate 2 part of the probe card body 1 . Above the exposed portion, the pressing block can press down the exposed part of single or multiple upper wedge plates 2 to move the upper wedge plates 2 downward.
  • the amplitude modulation of different amplitudes can be realized by moving down different numbers of the upper wedge plates 2, and the pressing block is moved by the amplitude modulation structure 4, so that the pressing block covers different numbers of the upper wedge plates 2 along the direction from right to left, The pressing block is moved down by the amplitude modulation structure 4, and then the upper wedge plates 2 of different numbers are moved down to realize the amplitude modulation of different amplitudes.
  • This embodiment is an embodiment of a main body of a wedge AM probe card.
  • the main body of the wedge block AM probe card disclosed in this embodiment is applied to the wedge block AM probe card of the embodiment.
  • the probe card main body 1 includes: a main body frame 1-1, a probe slot 1-2 and an upper wedge plate slot 1-3, and the inside of the main body frame 1-1 is along the length direction Several upper wedge plates 2 and lower wedge plates 3 are accommodated, and the bottom of the main body frame 1-1 is provided with a probe groove 1-2 along the length direction for the probe to pass through, and the main body frame 1-1 is also provided with a probe groove 1-2 for the probe to pass through.
  • the upper wedge plate groove 1-3 partially exposed by the upper wedge plate 2; one side of the main body frame 1-1 is provided with several fixed contacts 1-4 at intervals, and one end of the several fixed contacts 1-4 is The detection circuit board 200 is connected, and the other end of the fixed contact 1-4 extends to the inside of the main body frame 1-1.
  • the probe card main body 1 further includes: a main body fixed block 1-5 and a main body movable block 1-6 and the main body movable stopper spring 1-7, the main body frame 1-1 is provided with a main body fixed stopper 1-5 on one side, and the side surface of the main body fixed stopper 1-5 is connected to a plurality of upper wedges arranged at intervals and staggered in sequence.
  • One side of the plate 2 is in contact with the lower wedge plate 3, and the other side of the main body frame 1-1 is slidably provided with a main body movable stopper 1-6, and the side surface of the main body movable stopper 1-6 is staggered with several
  • the provided upper wedge plate 2 is in contact with the other side of the lower wedge plate 3, and the main body movable block 1-6 is connected to the probe card main body 1 through the main body movable block spring 1-7.
  • the main body of the probe card needs to fix the upper wedge plate 2 and the lower wedge plate 3 to ensure that the upper wedge plate 2 can slide down and slide to the right, and the lower wedge plate 3 Ability to swipe to the right and re-engage the circuit after moving.
  • the formation of the upper wedge plate 2 and the lower wedge plate 3 is clamped to ensure the upper wedge plate. 2.
  • Move down and insert, and the lower wedge plate 3 is stably sliding horizontally.
  • the upper wedge plate groove 1-3 can partially expose the upper wedge plate 2, which is convenient for the downward movement of the upper wedge plate 2.
  • a number of fixed contacts 1-4 are arranged at intervals on one side. After the movement, the upper wedge plate contacts 2-4 of the moved upper wedge plate 2 and the fixed contacts 1-4 form a fixed contact in the queue.
  • This embodiment is an embodiment of a probe card wedge amplitude modulation method.
  • This embodiment discloses a probe card wedge amplitude modulation method, which is applied to the wedge amplitude modulation probe card disclosed in the first embodiment.
  • a probe card wedge amplitude modulation method includes the following steps:
  • Step a determine the amplitude modulation distance: before the amplitude modulation, several upper wedge plates 2 are in contact with the sides, several lower wedge plates 3 are in side contact, and the wedge head 2-2 of the upper wedge plate at the lower end of the upper wedge plate 2 is embedded in the adjacent two adjacent wedge plates below it.
  • the upper wedge probes 2-3 of each upper wedge 2 are located above the detection area 100, and the lower wedge of each lower wedge 3
  • the probes 3-3 are all located in the detection area 100
  • the upper wedge plate contacts 2-4 of each upper wedge plate 2 are located above several fixed contacts 1-4
  • the lower wedge plate of each lower wedge plate 3 is located above several fixed contacts 1-4.
  • the contacts 3-4 are all in contact with several fixed contacts 1-4 in turn from left to right, and the probes in the detection area 100 are spaced apart by m, where m is the unit distance corresponding to the distance between the contacts to be detected,
  • the width of the lower wedge probes 3-3 of each lower wedge 3 located in the detection area 100 is the basic amplitude n, and the width of the contact to be detected in the detection area 100 is the detection amplitude o.
  • the difference between the detection amplitude o and the basic amplitude n is obtained, and the amplitude modulation distance which is an integer multiple of the probe interval m is obtained;
  • Step b move the wedge: through step a, determine the amplitude modulation distance obtained by the amplitude modulation distance, the amplitude modulation distance is a multiple of the probe interval m, as the number of moving the upper wedge 2, according to the direction from right to left, this multiple is The corresponding number of upper wedge plates 2 move downward, and the upper wedge plate wedge head 2-2 at the lower end of the upper wedge plate 2 is inserted between the two adjacent lower wedge plates 3 below it until the upper wedge plate at the lower end of the upper wedge plate 2 is inserted.
  • the probe 2-3 enters the detection area 100, and at the same time, the lower wedge plate 3 on the right side of the moved upper wedge plate 2 is pushed and moved to the right;
  • Step c contact connection: when moving the upper wedge plate 2, the upper wedge plate contacts 2-4 of the moving upper wedge plate 2 move downward from above to the level of several fixed contacts 1-4, and In contact with one of the fixed contacts 1-4, the lower wedge plate contact 3-4 of the pushed lower wedge plate 3 is separated from the original contact fixed contact 1-4, and is connected to one of the fixed contacts on the right side 1-4 contacts;
  • Step d probe detection connection refresh: the detection circuit board 200 communicates with the lower wedge probe 3-3 on the fixed lower wedge 3 and the pushed lower wedge 3 through several fixed contacts 1-4
  • the upper lower wedge probe 3-3 and the upper wedge probe 2-3 at the lower end of the moved upper wedge 2 are electrically reconnected.
  • step a in determining the amplitude modulation distance, the thicknesses of the upper wedge plate 2 and the lower wedge plate 3 are both set to the probe interval m.
  • step b in moving the wedge block, the moved upper wedge plate 2 is moved downward to an area where the side surface thereof overlaps with the lower wedge plate 3 .
  • a wedge AM probe card is used for amplitude modulation.
  • the wedge-block AM probe card includes: a probe card body 1 , an upper wedge plate 2 and a lower wedge plate 3 , and a plurality of upper wedge plates 2 are slidably disposed inside the probe card body 1 and the lower wedge plate 3, a plurality of upper wedge plates 2 and lower wedge plates 3 are alternately arranged in sequence.
  • This embodiment is an embodiment of the AM structure of the wedge AM probe card.
  • An AM structure of a wedge-block AM probe card disclosed in this embodiment is applied to the wedge-block AM probe card disclosed in the first embodiment, and can move a single or multiple upper wedge plates 2 down during AM modulation. move and ensure stability during the movement.
  • a wedge block AM probe card AM structure is arranged above the probe card body 1 and includes a pressure block, which is arranged on the upper wedge plate on the probe card body 1 Above the exposed part of 2, the pressing block can press down a single or multiple exposed parts of the upper wedge plate 2, so that the upper wedge plate 2 moves downward; by moving the pressing block left and right, different numbers of upper wedge plates are covered under the pressing block. 2. The selection of the moving quantity of the upper wedge plate 2 is realized. By moving the pressing block downward, the upper wedge plate 2 of the same number can be moved downward.
  • the amplitude modulation structure further includes: a pressure block plate 4-1, a pressure block plate pin 4-2, a pressure block plate pin groove 4-3, a pressure block cross bar 4-4, a cross bar slider 4-5, a cross bar Spring 4-6, cross bar slider screw 4-7, first helical gear 4-8, second helical gear 4-9, transmission rod 4-10, sliding gear 4-11, slide plate 4-12, housing 4-13, toothed roller 4-14 and slide screw 4-15.
  • a plurality of said pressure block plates 4-1 are slid in parallel on the pressure block cross bar 4-4 to form a pressure block, and a pressure block formed by a plurality of pressure block plates 4-1 has the The number of upper wedge plates 2 corresponds.
  • each pressing plate 4-1 is provided with a pressing plate pin 4-2, and the upper end of each upper wedge plate 2 is provided with a pressing plate pin groove 4-3; After moving down, the pressing plate pin 4-2 can be inserted into the pressing plate pin groove 4-3, so that the pressing plate 4-1 and the pressing plate , the upper wedge plate 2 shakes.
  • the pressure block cross bar 4-4 on the left side of the pressure block is slidably provided with a cross bar slider 4-5, and the pressure block cross bar 4-4 on the right side of the pressure block is sleeved with a cross bar spring 4-6.
  • the cross-section of the cross-bar 4-4 of the pressing block is rectangular; by clamping the cross-bar slider 4-5 and the cross-bar spring 4-6, the pressing blocks formed by the plurality of pressing block plates 4-1 can follow the The cross bar slider 4-5 moves. By moving the cross bar slider 4-5, the pressing block can be moved left and right, so that the pressing block can cover different numbers of the upper wedge plates 2, and the selection of the moving number of the upper wedge plates 2 can be realized.
  • the upper end of the cross-bar slider 4-5 is sleeved on the cross-bar slider screw 4-7, and the cross-bar slider screw 4-7 is rotated to drive the cross-bar slider 4-5 to move, and press the block. position to adjust.
  • a first helical gear 4-8 is fixedly arranged on the cross-bar slider screw 4-7, the first helical gear 4-8 meshes with the second helical gear 4-9, and the second helical gear 4-9 and the transmission rod 4-
  • the lower end of the transmission rod 4-10 is fixedly connected, the upper end of the transmission rod 4-10 is fixedly connected with a sliding gear 4-11, and the middle of the transmission rod 4-10 is rotatably connected to the slide plate 4-12.
  • the sliding plate 4-12 is slidably arranged inside the casing 4-13, the casing 4-13 is fixedly connected to the probe card main body 1, and the two ends of the cross-bar slider screw 4-7 are respectively connected to the sliding plate in rotation
  • both ends of the pressing block cross bar 4-4 are fixedly connected to the sliding plate 4-12
  • the sliding gear 4-11 is meshed with the toothed roller 4-14
  • the toothed roller 4-14 is Both ends are rotatably connected to the housing 4-13
  • the middle of the sliding plate 4-12 is sleeved on the sliding plate screw 4-15, and both ends of the sliding plate screw 4-15 are rotatably connected to the housing 4-13 superior.
  • the sliding gear 4-11 is driven to rotate, so that the transmission rod 4-10 drives the cross-bar slider screw 4-7 to rotate through the first helical gear 4-8 and the second helical gear 4-9.
  • the cross-bar slider screw 4-7 drives the cross-bar slider 4-5 to move horizontally, and adjusts the number of upper wedge plates 2 covered by the pressing block.
  • the sliding gear 4-11 slides down on the surface of the toothed roller 4-14, and keeps the meshing state
  • the sliding plate 4-12 drives the pressure block plate 4-1 to move down, and the pressure block plate at the lower end of the pressure block plate 4-1
  • the pin 4-2 is inserted into the pin groove 4-3 of the pressure block plate, so that the pressure block plate 4-1 and the pressure block plate pin groove 4-3 establish a temporary connection relationship
  • the upper wedge plate 2 is inserted into the queue of the lower wedge plate 3, and the upper The wedge plate 2 slides to the right during the downward movement, and the pressure block plate 4-1 connected with the upper wedge plate 2 slides to the right on the pressure block cross bar 4-4 along with the upper wedge plate 2 during the downward movement.
  • FIG. 6 and FIG. 7 it also includes a reset frame 4-16 and a reset frame spring 4-17, the reset frame 4-16 is sleeved on the outside of the probe card body 1, and the reset frame 4-16 A reset frame spring 4-17 is provided between the lower end of the upper wedge plate 2 and the inner wall of the housing 4-13, and the upper wedge plate slider 2-6 of the upper wedge plate 2 overlaps the upper end of the reset frame 4-16.
  • the upper wedge plate slider 2-6 of the upper wedge plate 2 presses down the reset frame 4-16 to compress the reset frame spring 4-17, and the elastic potential energy accumulated by the reset frame spring 4-17, After the pressing block is moved up, the reset frame 4-16 can be pushed up, and the reset frame 4-16 can push the upper wedge plate 2 to move up and reset.
  • the reset frame push rod 4-18 also includes a reset frame push rod 4-18, the upper end of the reset frame push rod 4-18 is fixedly connected to the slide plate 4-12, and the lower end of the reset frame push rod 4-18 is suspended on the reset frame 4-16. above.
  • the reset frame 4-16 is pushed to move by the reset frame push rod 4-18, so as to avoid the reset frame 4-16 being pushed by the upper wedge plate slider 2-6 of the upper wedge plate 2.
  • the friction resistance is generated between the upper wedge slider 2-6 of the upper wedge 2 and the reset frame 4-16, so that the sliding of the upper wedge 2 is more stable.
  • the wedge AM probe card includes: a probe card body 1 , an upper wedge plate 2 and a lower wedge plate 3 , and a plurality of upper wedge plates 2 and 3 are slidably disposed inside the probe card body 1 .
  • the lower wedge plate 3, a plurality of upper wedge plates 2 and the lower wedge plate 3 are alternately arranged in sequence;
  • the probe card main body 1 includes: a main body frame 1-1, a probe slot 1-2 and an upper wedge plate slot 1-3.
  • the main body frame 1-1 accommodates several upper wedge plates 2 and 1-3 along the length direction.
  • the lower wedge plate 3, and the bottom of the main body frame 1-1 is provided with a probe groove 1-2 along the length direction for the probe to pass through, and the main body frame 1-1 is also provided with a part of the upper wedge plate 2 exposed.
  • Upper wedge slot 1-3 is also provided.
  • This embodiment is an embodiment of the docking structure of the AM structure of the wedge AM probe card.
  • This embodiment discloses a docking structure of the wedge block AM probe card AM structure, and the docking structure is applied to the wedge block AM probe card AM structure disclosed in the fourth embodiment.
  • a docking structure of the amplitude modulation structure of the wedge AM probe card includes: a pressure block plate 4-1, a pressure block plate pin 4-2, a pressure block plate pin groove 4-3, a pressure block plate 4-3, a pressure block plate Block crossbar 4-4, crossbar slider 4-5, crossbar spring 4-6, crossbar slider screw 4-7, first helical gear 4-8, second helical gear 4-9, transmission rod 4-10.
  • Sliding gear 4-11, sliding plate 4-12, housing 4-13, toothed roller 4-14 and sliding plate screw 4-15, a plurality of the pressing block plates 4-1 are arranged in parallel sliding on the pressing plate.
  • a pressure block is formed on the block cross bar 4-4, the lower end of each pressure block plate 4-1 is provided with a pressure block plate pin 4-2, and the upper end of each upper wedge plate 2 is provided with a pressure block plate pin groove 4-3, the pressure block cross bar 4-4 on the left side of the pressure block is slidably provided with a cross bar slider 4-5, and the pressure block cross bar 4-4 on the right side of the pressure block is sleeved with a cross bar spring 4-6, the cross section of the pressing block cross bar 4-4 is rectangular.
  • the pressure block composed of a plurality of slidingly arranged pressure block plates 4-1 can be connected to the upper wedge plate 2 through the pressure block plate 4-1 when the pressure block presses down the upper wedge plate 2, so as to ensure that the upper wedge plate 2 slides.
  • the pressure block plate 4-1 can slide down synchronously with the docked upper wedge plate 2 and remain connected during the sliding to the right, so that during the whole sliding process, the upper wedge plate 2 can pass the pressure The connection of the plate 4-1 to keep the sliding stable.
  • This embodiment is an embodiment of an AM component of a wedge AM probe card.
  • This embodiment discloses an AM component of a wedge AM probe card.
  • the AM component is applied to the wedge AM probe card disclosed in the first embodiment, and can move a single or multiple upper wedges 2 during amplitude modulation. Move down and ensure stability during the movement.
  • a wedge-block amplitude-modulating probe card amplitude-modulating component which is arranged above the probe card body 1 , includes a pressure block, and the pressure block is arranged on the upper wedge plate on the probe card body 1 .
  • the pressure block Above the exposed part of 2, the pressure block can press down the exposed part of single or multiple upper wedge plates 2, so that the upper wedge plate 2 moves downward; by moving the pressure block left and right, different numbers of upper wedge plates are covered under the pressure block. 2.
  • the selection of the moving quantity of the upper wedge plate 2 is realized. By moving the pressing block downward, the upper wedge plate 2 of the same number can be moved downward.
  • the amplitude modulation member further includes: a pressure block plate 5-1, a pressure block plate ring 5-2, a pressure block plate ring groove 5-3, a pressure block plate rod 5-4, a pressure block plate stopper 5-5, a sliding plate Seat 5-6, shell 5-7, movable gear 5-8, toothed roller shaft 5-9, sliding seat screw 5-10, fixed rod 5-11 and fixed rod through hole 5-12.
  • a plurality of the briquetting discs 5-1 are slid in parallel on the briquetting disc rod 5-4 to form a briquetting block.
  • the number of upper wedge plates 2 corresponds.
  • pressure block discs 5-1 are eccentrically arranged on the pressure block disc rod 5-4, and a pressure block disc ring 5-2 is fixedly sleeved on the outside of each pressure block disc 5-1, and each upper wedge plate is The upper end of 2 is provided with a pressure block disk ring groove 5-3.
  • the pressure block disk ring 5-2 can pass through. Insert the ring groove 5-3 of the pressure block plate to establish a temporary connection relationship between the pressure block plate 5-1 and the ring groove 5-3 of the pressure block plate, so as to prevent the upper wedge plate 2 from shaking during the downward movement.
  • the pressure block disc lever 5-4 on the left side of the pressure block is sleeved with a pressure block plate blocking cylinder 5-5, and the pressure block disc lever 5-4 on the right side of the pressure block is sleeved with a disc lever spring 5-6 , the side of the pressure block plate rod 5-4 is provided with a guide bar along the axial direction; the pressure block plate blocking cylinder 5-5 blocks the pressure block from the left side, and serves as the starting point for the pressure block to cover the area of the upper wedge plate 2.
  • the lever spring 5-6 blocks the pressure block from the right side, and can be reset after the pressure block plate 5-1 in the pressure block slides to the right.
  • the left end of the pressure block plate blocking cylinder 5-5 is fixedly connected to the sliding seat 5-6, and the sliding seat 5-6 is slidably arranged inside the casing 5-7, and the sliding seat 5-6 drives the pressure block to move left and right. Move, and then realize that the pressing blocks cover different numbers of the upper wedge plates 2, and realize the selection of the moving number of the upper wedge plates 2.
  • the housing 5-7 is fixedly arranged on the probe card body 1, the right end of the pressure block disc rod 5-4 is rotatably connected to the sliding seat 5-6, and the left end of the pressure block disc rod 5-4 passes through the pressure block disc in turn
  • the blocking cylinder 5-5 and the side wall of the sliding seat 5-6 are fixedly connected with the movable gear 5-8, the movable gear 5-8 is meshed with the toothed roller shaft 5-9, and both ends of the toothed roller shaft 5-9 are connected in rotation.
  • the toothed roller shaft 5-9 is coaxially connected with a press-down rotating shaft, and after passing through the casing 5-7, the press-down rotating shaft serves as an operation shaft for driving the pressing block to move down.
  • the upper end of the sliding seat 5-6 is sleeved on the sliding seat screw rod 5-10, and both ends of the sliding seat screw rod 5-10 are rotatably connected to the housing 5-7; the sliding seat screw rod 5-10 is the same as
  • the shaft is connected with an adjustment shaft, which is used as an operation shaft for driving the pressing block to move left and right after passing through the casing 5-7.
  • One end of the fixing rod 5-11 is fixedly connected to the left end of the sliding seat 5-6, the other end of the fixing rod 5-11 is suspended in the air, and the exposed part of the upper wedge plate 2 is provided with a corresponding fixing rod 5-11.
  • the plate 2 is fixed to prevent the uncovered upper wedge plate 2 from moving.
  • the sliding seat 5-6 By rotating the sliding seat screw 5-10, the sliding seat 5-6 is driven to move horizontally, and the sliding seat 5-6 drives the pressure block to move horizontally, and the horizontal position of the pressure block is adjusted to realize that the pressure block covers different numbers of upper wedge plates 2, and at the same time
  • the fixing rod 5-11 moves with the sliding seat 5-6, and passes through the fixing rod through holes 5-12 of the upper wedge plate 2 not covered by the pressing block
  • the upper wedge plate 2 is fixed, and the moving gear 5-8 slides on the surface of the toothed roller shaft 5-9 and keeps meshing; after the pressure block is adjusted to the horizontal position, the moving gear 5-8 is driven by rotating the toothed roller shaft 5-9 Rotate to make the pressure block disk rod 5-4 rotate, and the pressure block disk rod 5-4 drives the pressure block disk 5-1 to rotate.
  • the upper end of the wedge plate 2 is in contact, and at the same time, the pressure block plate ring 5-2 is embedded in the pressure block plate ring groove 5-3, so that the pressure block plate 5-1 and the upper wedge plate 2 are temporarily connected.
  • the pressing plate 5-1 pushes down the upper wedge plate 2, the upper wedge plate 2 slides down, slides to the right, and is inserted into the queue of the lower wedge plate 3 to realize amplitude modulation.
  • the outer frame 5-13 also includes an outer frame 5-13 and an outer frame spring 5-14, the outer frame 5-13 is sleeved on the outside of the probe card body 1, and the lower end of the outer frame 5-13 is connected to the inner wall of the housing 5-7.
  • An outer frame spring 5-14 is arranged therebetween, and the upper wedge plate slider 2-6 of the upper wedge plate 2 overlaps with the upper end of the outer frame 5-13.
  • the upper wedge plate 2 moves down, the upper wedge plate slider 2-6 of the upper wedge plate 2 presses down the outer frame 5-13 to compress the outer frame spring 5-14, and the elastic potential energy accumulated by the outer frame spring 5-14, After the pressing block is moved up, the outer frame 5-13 can be pushed up, and the outer frame 5-13 can push the upper wedge plate 2 up and reset.
  • the wedge AM probe card includes: a probe card body 1 , an upper wedge plate 2 and a lower wedge plate 3 , and a plurality of upper wedge plates 2 and 3 are slidably disposed inside the probe card body 1 .
  • the lower wedge plate 3, a plurality of upper wedge plates 2 and the lower wedge plate 3 are alternately arranged in sequence;
  • the probe card main body 1 includes: a main body frame 1-1, a probe slot 1-2 and an upper wedge plate slot 1-3.
  • the main body frame 1-1 accommodates several upper wedge plates 2 and 1-3 along the length direction.
  • the lower wedge plate 3, and the bottom of the main body frame 1-1 is provided with a probe groove 1-2 along the length direction for the probe to pass through, and the main body frame 1-1 is also provided with a part of the upper wedge plate 2 exposed.
  • Upper wedge slot 1-3 is also provided.
  • This embodiment is an embodiment of the docking structure of the AM piece of the wedge AM probe card.
  • the present embodiment discloses a docking structure of an AM piece of a wedge AM probe card, and the butt structure is applied to the AM piece of the wedge AM probe card disclosed in the sixth embodiment.
  • a docking structure of an AM piece of a wedge AM probe card includes: a pressure block disk 5-1, a pressure block disk ring 5-2, a pressure block disk ring groove 5-3, a pressure block disk ring 5-3, and a pressure block disk ring groove 5-3.
  • a block plate rod 5-4, a pressure block plate stopper 5-5, a sliding seat 5-6 and a housing 5-7, a plurality of the pressure block disks 5-1 are slid in parallel on the pressure block plate rod 5-4
  • several pressure block discs 5-1 are eccentrically arranged on the pressure block disc rod 5-4, and a pressure block disc ring 5-2 is fixedly sleeved on the outside of each pressure block disc 5-1.
  • each upper wedge plate 2 is provided with a pressure block disk ring groove 5-3, and the pressure block disk rod 5-4 on the left side of the pressure block is sleeved with a pressure block disk stop cylinder 5-5.
  • the right side of the pressure block disc rod 5-4 is sleeved with a disc rod spring 5-6, the side surface of the pressure block disc rod 5-4 is provided with a guide strip along the axial direction, and the pressure block disc blocking cylinder 5-
  • the left end of 5 is fixedly connected to the sliding seat 5-6, the sliding seat 5-6 is slidably arranged inside the casing 5-7, and the casing 5-7 is fixedly arranged on the probe card main body 1.
  • the pressure block composed of a plurality of slidingly arranged pressure block plates 5-1 can be connected to the upper wedge plate 2 through the pressure block plate 5-1 when the pressure block presses the upper wedge plate 2, so as to ensure that the upper wedge plate 2 slides.
  • the pressure block plate 5-1 can slide down synchronously with the docked upper wedge plate 2 and remain connected during the sliding to the right, so that during the whole sliding process, the upper wedge plate 2 can pass through the pressure plate 2.
  • the connection of the block plate 5-1 to maintain the sliding stability.

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Abstract

本发明属于探针卡技术领域，尤其涉及一种楔块调幅探针卡及其主体，探针卡包括探针卡主体、上楔板和下楔板，通过在探针卡主体的内部滑动设置有若干个上楔板和下楔板，若干个上楔板和下楔板依次间隔交错设置，能够实现，通过将不同数量的上楔板插入下楔板之间，使上楔板上的探针能够插入或移出下方的探针队列中，增加或减少用于检测的探针数量，进而使单个探针卡的检测幅度能够进行调整，使探针卡具有通用性。

Description

一种楔块调幅探针卡及其主体 技术领域
本发明属于探针卡技术领域，尤其涉及一种楔块调幅探针卡及其主体。
背景技术
随着半导体工业的发展，越来越多的电子装置被接入在半导体晶圆上，在半导体器件的制作过程中，将探针与半导体晶圆上的金属端接触，实现临时的电连接，使测试仪的电信号通过探针传输到半导体器件，测试仪通过返回的电信号对半导体晶圆上的电子装置进行检测。
探针卡是连接半导体晶圆与测试仪之间的纽带，通过将多个探针集成在探针卡上，使多个探针同时与半导体晶片上的多个半导体器件同时接触，提高检测效率。
在半导体器件的生产过程中，需要多次对一个或多个装置内的大量电路触点进行访问，通过移动机构对探针卡进行移动，使探针与触点接触，同时，为匹配检测过程中的多组触点，探针卡需要设置多个，由固持器对探针卡进行固定，固持器为能够旋转的多面体，通过在每个面上设置一个或多个探针卡，在需要切换探针卡时，通过转动固持器，将对应的探针卡转动至半导体器件上方进行检测，或者设置多个可移动的平台对探针卡进行移动，实现探针卡与不同触点组的匹配，现有技术中，为了实现多组触点的检测，采用了对探针卡的互换来实现匹配，通过切换不同的探针卡来实现匹配，由于单个探针卡无法通用，导致探针卡的驱动结构变得复杂。
发明内容
本发明克服了上述现有技术的不足，提供了一种楔块调幅探针卡及其主体，能够调整探针卡的检测幅度，使单个探针卡能够检测多组不同宽幅的触点，具有通用性。
本发明的技术方案：
一种楔块调幅探针卡，包括：探针卡主体、上楔板和下楔板，所述探针卡主体的内部滑动设置有若干个上楔板和下楔板，若干个上楔板和下楔板依次间隔交错设置；
所述探针卡主体包括：主体框架、探针槽和上楔板槽，所述主体框架内部沿长度方向容纳有若干个上楔板和下楔板，且主体框架的底部沿长度方向设置有供探针穿过的探针槽，主体框架上还设置有供所述上楔板部分露出的上楔板槽；
所述上楔板包括：上楔板体、上楔板楔头、上楔板探针和上楔板触点，所述上楔板体的下端设置有上楔板楔头，上楔板楔头的两侧分别延伸至所述上楔板体的两侧面，上楔板楔头的下端设置有上楔板探针，所述的上楔板触点一端与上楔板探针连接，上楔板触点的另一端从所述上楔板体的一侧露出；
所述下楔板包括：下楔板体、下楔板楔头、下楔板探针和下楔板触点，所述下楔板体 的上端设置有下楔板楔头，下楔板楔头的两侧分别延伸至所述下楔板体的两侧面，下楔板体的下端设置有下楔板探针，所述的下楔板触点一端与下楔板探针连接，下楔板触点的另一端从所述下楔板体的一侧露出；
定义待检测触点所需的探针间距为标准探针间距，所述上楔板体和下楔板体的厚度均为标准探针间距，所述探针卡主体与所述上楔板触点和下楔板触点对应的一侧间隔设置有若干个固定触点，若干个固定触点的一端与检测电路板连接，固定触点的另一端延伸至主体框架的内部，相邻的所述固定触点的间距为标准探针间距。
进一步地，所述探针卡主体还包括：主体固定挡块、主体活动挡块和主体活动挡块弹簧，所述主体框架的一侧设置有主体固定挡块，该主体固定挡块的侧面与若干个依次间隔交错设置的上楔板和下楔板的一侧接触，所述主体框架的另一侧滑动设置有主体活动挡块，该主体活动挡块的侧面与若干个依次间隔交错设置的上楔板和下楔板的另一侧接触，所述主体活动挡块通过主体活动挡块弹簧与探针卡主体连接。
进一步地，所述上楔板还包括上楔板延伸板，所述上楔板延伸板为上楔板体的上端向上延伸形成，且该上楔板延伸板从所述上楔板槽穿过并延伸至探针卡主体的外部。
进一步地，所述上楔板还包括上楔板滑块，所述上楔板体的两侧分别设置有一个上楔板滑块，上楔板滑块与所述探针卡主体的内壁滑动连接。
进一步地，所述下楔板还包括下楔板滑块，所述下楔板体的两侧分别设置有一个下楔板滑块，下楔板滑块与所述探针卡主体的内壁滑动连接。
进一步地，所述探针卡主体的上方还设置有调幅结构，调幅结构包括压块，所述压块设置在探针卡主体上的上楔板部分露出的上方，压块能够下压单个或多个上楔板露出的部分，使上楔板向下移动。
一种楔块调幅探针卡主体，所述探针卡主体的内部滑动设置有若干个上楔板和下楔板，若干个上楔板和下楔板依次间隔交错设置；所述探针卡主体包括：主体框架、探针槽和上楔板槽，所述主体框架内部沿长度方向容纳有若干个上楔板和下楔板，且主体框架的底部沿长度方向设置有供探针穿过的探针槽，主体框架上还设置有供所述上楔板部分露出的上楔板槽；所述主体框架的一侧间隔设置有若干个固定触点，若干个固定触点的一端与检测电路板连接，固定触点的另一端延伸至主体框架的内部，所述探针卡主体还包括：主体固定挡块、主体活动挡块和主体活动挡块弹簧，所述主体框架的一侧设置有主体固定挡块，该主体固定挡块的侧面与若干个依次间隔交错设置的上楔板和下楔板的一侧接触，所述主体框架的另一侧滑动设置有主体活动挡块，该主体活动挡块的侧面与若干个依次间隔交错设置的上楔板和下楔板的另一侧接触，所述主体活动挡块通过主体活动挡块弹簧与探针卡主体连接。
一种探针卡楔块调幅方法，包括以下步骤：
步骤a，确定调幅距离：在调幅前，若干个上楔板侧面接触，若干个下楔板侧面接触，上楔板下端的上楔板楔头嵌入其下方相邻的两个下楔板的下楔板楔头之间，每个上楔板的上楔板探针均位于检测区的上方，每个下楔板的下楔板探针均位于检测区内，每个上楔板的上楔板触点均位于若干个固定触点的上方，每个下楔板的下楔板触点均与若干个固定触点沿从左至右的方向依次接触，检测区内的探针间隔为m，该m为与待检测触点间距对应的单位距离，位于检测区内的每个下楔板的下楔板探针的宽幅为基本幅度n，检测区内的待检测触点的宽幅为待检测幅度o，通过将待检测幅度o与基本幅度n做差值，得到为探针间隔m整数倍的调幅距离；
步骤b，移动楔块：通过步骤a，确定调幅距离得到的调幅距离，该调幅距离是探针间隔m的倍数，作为移动上楔板的数量，按照从右向左的方向，将该倍数对应数量的上楔板向下移动，上楔板下端的上楔板楔头插入其下方相邻的两个下楔板之间，直至上楔板下端的上楔板探针进入检测区，同时被移动的上楔板右侧的下楔板被推挤而向右侧移动；
步骤c，触点连接：在移动上楔板时，移动的上楔板的上楔板触点从上方向下移动至若干个固定触点的水平高度上，并与其中一个固定触点接触，被推挤的下楔板的下楔板触点与原接触的固定触点分离，并与其中一个右侧的固定触点接触；
步骤d，探针检连接刷新：检测电路板通过若干个固定触点与固定不动的下楔板上的下楔板探针、被推挤的下楔板上的下楔板探针和被移动的上楔板下端的上楔板探针重新电连接。
进一步地，所述步骤a，确定调幅距离中，上楔板与下楔板的厚度均设置为探针间隔m。
进一步地，所述步骤b，移动楔块中，被移动的上楔板向下移动至其侧面与下楔板具有重叠的区域。
进一步地，使用一种楔块调幅探针卡进行调幅。
进一步地，所述一种楔块调幅探针卡，包括：探针卡主体、上楔板和下楔板，所述探针卡主体的内部滑动设置有若干个上楔板和下楔板，若干个上楔板和下楔板依次间隔交错设置。
一种楔块调幅探针卡调幅结构，设置在探针卡主体的上方，包括压块，所述压块设置在探针卡主体上的上楔板部分露出的上方，压块能够下压单个或多个上楔板露出的部分，使上楔板向下移动；
所述的调幅结构还包括：压块板、压块板销、压块板销槽、压块横杆、横杆滑块、横杆弹簧、横杆滑块丝杆、第一斜齿轮、第二斜齿轮、传动杆、滑动齿轮、滑板、壳体、齿辊和滑板丝杆，若干个所述的压块板并列滑动设置在压块横杆上形成压块，每个压块板的 下端均设置有一个压块板销，每个上楔板的上端均设置有一个压块板销槽，所述压块左侧的压块横杆上滑动设置有横杆滑块，该压块右侧的压块横杆上套设有横杆弹簧，所述的压块横杆的截面为矩形，所述的横杆滑块的上端套设在横杆滑块丝杆上，横杆滑块丝杆上固定设置有第一斜齿轮，第一斜齿轮与第二斜齿轮啮合，第二斜齿轮与传动杆的下端固定连接，传动杆的上端固定连接有滑动齿轮，传动杆的中间转动连接在滑板上，滑板滑动设置在壳体的内部，壳体固定连接在探针卡主体上，所述的横杆滑块丝杆的两端分别转动连接在滑板上，所述的压块横杆的两端均固定连接在滑板上，所述的滑动齿轮与齿辊啮合，齿辊的两端均转动连接在壳体上，所述滑板的中间套设在滑板丝杆上，滑板丝杆的两端均转动连接在壳体上。
进一步地，还包括复位框和复位框弹簧，所述复位框套设在探针卡主体的外侧，复位框的下端与壳体的内壁之间设置有复位框弹簧，所述上楔板的上楔板滑块搭接在复位框的上端。
进一步地，还包括复位框推杆，所述复位框推杆的上端固定连接在滑板上，复位框推杆的下端悬空设置在复位框的上方。
进一步地，应用在一种楔块调幅探针卡上。
进一步地，所述一种楔块调幅探针卡包括：探针卡主体、上楔板和下楔板，所述探针卡主体的内部滑动设置有若干个上楔板和下楔板，若干个上楔板和下楔板依次间隔交错设置；
所述探针卡主体包括：主体框架、探针槽和上楔板槽，所述主体框架内部沿长度方向容纳有若干个上楔板和下楔板，且主体框架的底部沿长度方向设置有供探针穿过的探针槽，主体框架上还设置有供所述上楔板部分露出的上楔板槽。
一种楔块调幅探针卡调幅结构的对接结构，包括：压块板、压块板销、压块板销槽、压块横杆、横杆滑块、横杆弹簧、横杆滑块丝杆、第一斜齿轮、第二斜齿轮、传动杆、滑动齿轮、滑板、壳体、齿辊和滑板丝杆，若干个所述的压块板并列滑动设置在压块横杆上形成压块，每个压块板的下端均设置有一个压块板销，每个上楔板的上端均设置有一个压块板销槽，所述压块左侧的压块横杆上滑动设置有横杆滑块，该压块右侧的压块横杆上套设有横杆弹簧，所述的压块横杆的截面为矩形。
一种楔块调幅探针卡调幅件，设置在探针卡主体的上方，包括压块，所述压块设置在探针卡主体上的上楔板部分露出的上方，压块能够下压单个或多个上楔板露出的部分，使上楔板向下移动；
所述的调幅件还包括：压块盘、压块盘环、压块盘环槽、压块盘杆、压块盘挡筒、滑座、外壳、动齿轮、齿辊轴、滑座丝杆、固定杆和固定杆过孔，若干个所述的压块盘并列 滑动设置在压块盘杆上形成压块，若干个压块盘均偏心设置在压块盘杆上，每个压块盘的外部均固定套设有一个压块盘环，每个上楔板的上端均设置有一个压块盘环槽，所述压块左侧的压块盘杆上套设有压块盘挡筒，该压块右侧的压块盘杆上套设有盘杆弹簧，所述的压块盘杆的侧面沿轴向设置有导向条，所述压块盘挡筒的左端固定连接在滑座上，滑座滑动设置在外壳内部，外壳固定设置在探针卡主体上，所述压块盘杆的右端转动连接在滑座上，压块盘杆的左端依次穿过压块盘挡筒和滑座侧壁后与动齿轮固定连接，动齿轮与齿辊轴啮合，齿辊轴的两端均转动连接在外壳上，所述的滑座的上端套接在滑座丝杆上，滑座丝杆的两端均转动连接在外壳上，所述固定杆的一端固定连接在滑座的左端，固定杆的另一端悬空设置，所述上楔板露出的部分上与固定杆对应设置有固定杆过孔。
进一步地，还包括外框和外框弹簧，所述外框套设在探针卡主体的外侧，外框的下端与外壳的内壁之间设置有外框弹簧，所述上楔板的上楔板滑块搭接在外框的上端。
进一步地，应用在一种楔块调幅探针卡上。
进一步地，所述一种楔块调幅探针卡包括：探针卡主体、上楔板和下楔板，所述探针卡主体的内部滑动设置有若干个上楔板和下楔板，若干个上楔板和下楔板依次间隔交错设置；
所述探针卡主体包括：主体框架、探针槽和上楔板槽，所述主体框架内部沿长度方向容纳有若干个上楔板和下楔板，且主体框架的底部沿长度方向设置有供探针穿过的探针槽，主体框架上还设置有供所述上楔板部分露出的上楔板槽。
一种楔块调幅探针卡调幅件的对接结构，包括：压块盘、压块盘环、压块盘环槽、压块盘杆、压块盘挡筒、滑座和外壳，若干个所述的压块盘并列滑动设置在压块盘杆上形成压块，若干个压块盘均偏心设置在压块盘杆上，每个压块盘的外部均固定套设有一个压块盘环，每个上楔板的上端均设置有一个压块盘环槽，所述压块左侧的压块盘杆上套设有压块盘挡筒，该压块右侧的压块盘杆上套设有盘杆弹簧，所述的压块盘杆的侧面沿轴向设置有导向条，所述压块盘挡筒的左端固定连接在滑座上，滑座滑动设置在外壳内部，外壳固定设置在探针卡主体上。
本发明的有益效果为：
1、本发明的楔块调幅探针卡，包括探针卡主体、上楔板和下楔板，通过在探针卡主体的内部滑动设置有若干个上楔板和下楔板，若干个上楔板和下楔板依次间隔交错设置，能够实现，通过将不同数量的上楔板插入下楔板之间，使上楔板上的探针能够插入或移出下方的探针队列中，增加或减少用于检测的探针数量，进而使单个探针卡的检测幅度能够进行调整，使探针卡具有通用性。
2、本发明楔块调幅探针卡调幅结构，包括：压块板、压块板销、压块板销槽、压块横 杆、横杆滑块和横杆弹簧，若干个所述的压块板并列滑动设置在压块横杆上形成压块，每个压块板的下端均设置有一个压块板销，每个上楔板的上端均设置有一个压块板销槽，所述压块左侧的压块横杆上滑动设置有横杆滑块，该压块右侧的压块横杆上套设有横杆弹簧，所述的压块横杆的截面为矩形，能够实现，通过将压块进行水平移动，与单个或多个上楔板的露出端对齐，将压块下移，使上楔板插入，通过压块板与上楔板对接，在压块下移过程中，压块板随着上楔板水平滑动，在滑动过程中保持对接，能够保证上楔板滑动稳定，同时多个压块板滑动设置在压块横杆上，多个压块板能够单独移动，能够适应多个上楔板的不同水平移动距离。
3、本发明楔块调幅探针卡调幅件，包括：压块盘、压块盘环、压块盘环槽、压块盘杆、压块盘挡筒、滑座和外壳，若干个所述的压块盘并列滑动设置在压块盘杆上形成压块，若干个压块盘均偏心设置在压块盘杆上，每个压块盘的外部均固定套设有一个压块盘环，每个上楔板的上端均设置有一个压块盘环槽，所述压块左侧的压块盘杆上套设有压块盘挡筒，该压块右侧的压块盘杆上套设有盘杆弹簧，所述的压块盘杆的侧面沿轴向设置有导向条，所述压块盘挡筒的左端固定连接在滑座上，滑座滑动设置在外壳内部，外壳固定设置在探针卡主体上，能够实现，通过将压块进行水平移动，与单个或多个上楔板的露出端对齐，将压块下移，使上楔板插入，压块盘转动后能够通过压块盘环与上楔板对接，在压块下移过程中，压块盘随着上楔板水平滑动，在滑动过程中保持对接，能够保证上楔板滑动稳定，同时多个压块盘滑动设置在压块横杆上，多个压块盘能够单独移动，能够适应多个上楔板的不同水平移动距离。
4、本发明的探针卡楔块调幅方法，包括步骤：步骤a，确定调幅距离、步骤b，移动楔块、步骤c，触点连接和步骤d，探针检连接刷新，能够通过移动楔块，带动探针进行移动，使探针卡根据待检测的触点数量，调整参与检测的探针数量，进而实现探针卡的调幅，使单个探针卡的检测幅度能够进行调整，使探针卡具有通用性。
附图说明
图1为一种楔块调幅探针卡的整体结构示意图；
图2为一种楔块调幅探针卡的侧面结构示意图；
图3为上楔板和下楔板的结构示意图；
图4为调幅前的楔块位置示意图；
图5为调幅后的楔块位置示意图；
图6为调幅前的调幅结构示意图；
图7为调幅后的调幅结构示意图；
图8为调幅前的调幅件示意图；
图9为调幅后的调幅件示意图；
图中：1探针卡主体；2上楔板；3下楔板；4调幅结构；1-1主体框架；1-2探针槽；1-3上楔板槽；1-4固定触点；1-5主体固定挡块；1-6主体活动挡块；1-7主体活动挡块弹簧；2-1上楔板体；2-2上楔板楔头；2-3上楔板探针；2-4上楔板触点；2-5上楔板延伸板；2-6上楔板滑块；3-1下楔板体；3-2下楔板楔头；3-3下楔板探针；3-4下楔板触点；3-5下楔板滑块；4-1压块板；4-2压块板销；4-3压块板销槽；4-4压块横杆；4-5横杆滑块；4-6横杆弹簧；4-7横杆滑块丝杆；4-8第一斜齿轮；4-9第二斜齿轮；4-10传动杆；4-11滑动齿轮；4-12滑板；4-13壳体；4-14齿辊；4-15滑板丝杆；4-16复位框；4-17复位框弹簧；4-18复位框推杆；5-1压块盘；5-2压块盘环；5-3压块盘环槽；5-4压块盘杆；5-5压块盘挡筒；5-6滑座；5-7外壳；5-8动齿轮；5-9齿辊轴；5-10滑座丝杆；5-11固定杆；5-12固定杆过孔；5-13外框；5-14外框弹簧；100检测区；200检测电路板。
具体实施方式
以下将结合附图，对本发明进行详细说明：
实施例一
本实施例是一种楔块调幅探针卡的实施例。
结合图1所示，一种楔块调幅探针卡，包括：探针卡主体1、上楔板2和下楔板3，所述探针卡主体1的内部滑动设置有若干个上楔板2和下楔板3，若干个上楔板2和下楔板3依次间隔交错设置；将上楔板2下移后，上楔板2会将下方的下楔板3向右推挤，使下移的上楔板2加入下楔板3的队列中。
结合图2所示，所述探针卡主体1包括：主体框架1-1、探针槽1-2和上楔板槽1-3，所述主体框架1-1内部沿长度方向容纳有若干个上楔板2和下楔板3，且主体框架1-1的底部沿长度方向设置有供探针穿过的探针槽1-2，主体框架1-1上还设置有供所述上楔板2部分露出的上楔板槽1-3；探针槽1-2使上楔板2和下楔板3的探针能够从主体框架1-1的下方露出，上楔板槽1-3的宽度小于上楔板2的宽度，使上楔板2的部分露出，部分露出的上楔板2便于下移上楔板的操作。
结合图3所示，所述上楔板2包括：上楔板体2-1、上楔板楔头2-2、上楔板探针2-3和上楔板触点2-4，所述上楔板体2-1的下端设置有上楔板楔头2-2，上楔板楔头2-2的两侧分别延伸至所述上楔板体2-1的两侧面，上楔板楔头2-2的下端设置有上楔板探针2-3，所述的上楔板触点2-4一端与上楔板探针2-3连接，上楔板触点2-4的另一端从所述上楔板体2-1的一侧露出。
所述下楔板3包括：下楔板体3-1、下楔板楔头3-2、下楔板探针3-3和下楔板触点3-4，所述下楔板体3-1的上端设置有下楔板楔头3-3，下楔板楔头3-3的两侧分别延伸至所述下 楔板体3-1的两侧面，下楔板体3-1的下端设置有下楔板探针3-3，所述的下楔板触点3-4一端与下楔板探针3-3连接，下楔板触点3-4的另一端从所述下楔板体3-1的一侧露出。
在上楔板2下移前，上楔板探针2-3位于下楔板探针3-3队列的上方，不参与检测，同时上楔板探针2-3处于下楔板体3-1侧面开设的槽体内，上楔板触点2-4位于下楔板触点3-4队列的上方，不接入电路，结合图1所示，下楔板触点3-4队列中的下楔板触点3-4均与固定触点1-4接触，被接入电路。
在上楔板2下移后，上楔板探针2-3插入下楔板探针3-3队列，参与检测，上楔板触点2-4插入下楔板触点3-4队列，接入电路，结合图1所示，下楔板触点3-4队列中的下楔板触点3-4和下移后的上楔板触点2-4均与固定触点1-4接触，被接入电路。
通过将不同数量的上楔板2插入下楔板3的队列中，能够实现，增加相应数量的上楔板探针2-3至下楔板探针3-3队列中，进而改变参与检测的探针数量，实现调幅，使单个探针卡具有调幅功能，避免检测过程中，切换探针卡的操作。
定义待检测触点所需的探针间距为标准探针间距，所述上楔板体2-1和下楔板体3-1的厚度均为标准探针间距，在将上楔板2下移到下楔板3的队列中后，能够保证被推挤的下楔板3向右水平移动的距离为一个标准探针间距，即保证了下移的上楔板2的上楔板触点2-4能够与固定触点1-4对接，被推挤的下楔板3的下楔板触点3-4能够与固定触点1-4对接，还能够保证上楔板2下移后，参与检测的探针的间距均为标准探针间距，所述探针卡主体1与所述上楔板触点2-4和下楔板触点3-4对应的一侧间隔设置有若干个固定触点1-4，若干个固定触点1-4的一端与检测电路板200连接，固定触点1-4的另一端延伸至主体框架1-1的内部，相邻的所述固定触点1-4的间距为标准探针间距。
在调幅前，上楔板2均位于下楔板3形成的队列上方，每个上楔板2的上楔板楔头2-2均嵌入其下方两个相邻的下楔板3的下楔板楔头3-2之间，通过将不同数量的上楔板2下移，插入下楔板3形成的队列中，使被下移的上楔板2所携带的上楔板探针2-3加入下楔板探针3-3形成的队列中，从而增加了参与检测的探针数量，达到调幅的目的。
结合图4和图5所示，在调幅过程中，存在一个探针重新接入电路的过程，与检测电路板200连接的固定触点1-4被固定在主体框架1-1的侧面，每个固定触点1-4伸入主体框架1-1内的一端形成了允许一个上楔板体2-1或下楔板体3-1接入检测电路的触点，通过将多个固定触点1-4间隔设置在下楔板3的下楔板触点3-4所在的水平高度上，使高于该高度的上楔板2的上楔板触点2-4在移动前不接入检测电路，被移动的上楔板2的上楔板触点2-4与固定触点1-4形成的队列中的一个固定触点1-4接触，由于下移上楔板2而被推挤，向右滑动的下楔板3的下楔板触点3-4与之前连接的固定触点1-4分离，并在上楔板2下移完成后，与右侧的另一个固定触点1-4接触，未移动的上楔板2保持未接入检测电路状态， 移动的上楔板2的上楔板触点2-4向下移动并与一个固定触点1-4接触，被接入检测电路，未被推挤的下楔板3的下楔板触点3-4保持与固定触点1-4的接触，保持接入检测电路的状态，被推挤的下楔板3的下楔板触点3-4与原接触的固定触点1-4分离，并向右移动与右侧的另一个固定触点1-4接触，重新接入检测电路。
具体地，结合图2所示，所述探针卡主体1还包括：主体固定挡块1-5、主体活动挡块1-6和主体活动挡块弹簧1-7，所述主体框架1-1的一侧设置有主体固定挡块1-5，该主体固定挡块1-5的侧面与若干个依次间隔交错设置的上楔板2和下楔板3的一侧接触，所述主体框架1-1的另一侧滑动设置有主体活动挡块1-6，该主体活动挡块1-6的侧面与若干个依次间隔交错设置的上楔板2和下楔板3的另一侧接触，所述主体活动挡块1-6通过主体活动挡块弹簧1-7与探针卡主体1连接。
主体固定挡块1-5和主体活动挡块1-6在主体活动挡块弹簧1-7的作用下，对上楔板2和下楔板3共同形成的队列夹紧，保障上楔板2下移插入，以及下楔板3水平滑动的稳定。
具体地，结合图3所示，所述上楔板2还包括上楔板延伸板2-5，所述上楔板延伸板2-5为上楔板体2-1的上端向上延伸形成，且该上楔板延伸板2-5从所述上楔板槽1-3穿过并延伸至探针卡主体1的外部。
由于上楔板延伸板2-5延伸至探针卡主体1的外部，使调幅时，能够通过向下按压上楔板延伸板2-5，使上楔板2下移插入，下楔板3形成的队列中。
具体地，结合图3所示，所述上楔板2还包括上楔板滑块2-6，所述上楔板体2-1的两侧分别设置有一个上楔板滑块2-6，上楔板滑块2-6与所述探针卡主体1的内壁滑动连接。
具体地，结合图3所示，所述下楔板3还包括下楔板滑块3-5，所述下楔板体3-1的两侧分别设置有一个下楔板滑块3-5，下楔板滑块3-5与所述探针卡主体1的内壁滑动连接。
具体地，结合图2所示，所述探针卡主体1的上方还设置有调幅结构4，调幅结构4包括压块，所述压块设置在探针卡主体1上的上楔板2部分露出的上方，压块能够下压单个或多个上楔板2露出的部分，使上楔板2向下移动。
在调幅时，通过下移不同数量的上楔板2能够实现不同幅度的调幅，通过调幅结构4移动压块，使压块沿着从右至左的方向，覆盖不同数量的上楔板2，通过调幅结构4使压块下移，进而使不同数量的上楔板2下移实现不同幅度的调幅。
实施例二
本实施例是一种楔块调幅探针卡主体的实施例。
本实施例公开的一种楔块调幅探针卡主体，应用在在实施例一种楔块调幅探针卡上。
结合图1至图3所示，一种楔块调幅探针卡主体，所述探针卡主体1的内部滑动设置有若干个上楔板2和下楔板3，若干个上楔板2和下楔板3依次间隔交错设置；所述探针卡 主体1包括：主体框架1-1、探针槽1-2和上楔板槽1-3，所述主体框架1-1内部沿长度方向容纳有若干个上楔板2和下楔板3，且主体框架1-1的底部沿长度方向设置有供探针穿过的探针槽1-2，主体框架1-1上还设置有供所述上楔板2部分露出的上楔板槽1-3；所述主体框架1-1的一侧间隔设置有若干个固定触点1-4，若干个固定触点1-4的一端与检测电路板200连接，固定触点1-4的另一端延伸至主体框架1-1的内部，所述探针卡主体1还包括：主体固定挡块1-5、主体活动挡块1-6和主体活动挡块弹簧1-7，所述主体框架1-1的一侧设置有主体固定挡块1-5，该主体固定挡块1-5的侧面与若干个依次间隔交错设置的上楔板2和下楔板3的一侧接触，所述主体框架1-1的另一侧滑动设置有主体活动挡块1-6，该主体活动挡块1-6的侧面与若干个依次间隔交错设置的上楔板2和下楔板3的另一侧接触，所述主体活动挡块1-6通过主体活动挡块弹簧1-7与探针卡主体1连接。
在采用楔块进行调幅的探针卡中，探针卡主体需要对上楔板2和下楔板3进行固定，保证上楔板2能够向下滑动的同时，向右滑动，下楔板3能够向右滑动，并且在移动后重新接入电路。
通过主体固定挡块1-5和主体活动挡块1-6在主体活动挡块弹簧1-7的作用下，对上楔板2和下楔板3共同形成的队列夹紧，保障上楔板2下移插入，以及下楔板3水平滑动的稳定，上楔板槽1-3能够使上楔板2部分露出，便于对上楔板2的下移操作，通过在主体框架1-1的一侧间隔设置有若干个固定触点1-4，在移动后，被移动的上楔板2的上楔板触点2-4与固定触点1-4形成的队列中的一个固定触点1-4接触，由于下移上楔板2而被推挤，向右滑动的下楔板3的下楔板触点3-4与之前连接的固定触点1-4分离，并在上楔板2下移完成后，与右侧的另一个固定触点1-4接触。
实施例三
本实施例是一种探针卡楔块调幅方法的实施例。
本实施例公开的一种探针卡楔块调幅方法，该方法应用在实施例一公开的一种楔块调幅探针卡上。
结合图4和图5所示，一种探针卡楔块调幅方法，包括以下步骤：
步骤a，确定调幅距离：在调幅前，若干个上楔板2侧面接触，若干个下楔板3侧面接触，上楔板2下端的上楔板楔头2-2嵌入其下方相邻的两个下楔板3的下楔板楔头3-2之间，每个上楔板2的上楔板探针2-3均位于检测区100的上方，每个下楔板3的下楔板探针3-3均位于检测区100内，每个上楔板2的上楔板触点2-4均位于若干个固定触点1-4的上方，每个下楔板3的下楔板触点3-4均与若干个固定触点1-4沿从左至右的方向依次接触，检测区100内的探针间隔为m，该m为与待检测触点间距对应的单位距离，位于检测区100内的每个下楔板3的下楔板探针3-3的宽幅为基本幅度n，检测区100内的待检测触点的宽幅 为待检测幅度o，通过将待检测幅度o与基本幅度n做差值，得到为探针间隔m整数倍的调幅距离；
步骤b，移动楔块：通过步骤a，确定调幅距离得到的调幅距离，该调幅距离是探针间隔m的倍数，作为移动上楔板2的数量，按照从右向左的方向，将该倍数对应数量的上楔板2向下移动，上楔板2下端的上楔板楔头2-2插入其下方相邻的两个下楔板3之间，直至上楔板2下端的上楔板探针2-3进入检测区100，同时被移动的上楔板2右侧的下楔板3被推挤而向右侧移动；
步骤c，触点连接：在移动上楔板2时，移动的上楔板2的上楔板触点2-4从上方向下移动至若干个固定触点1-4的水平高度上，并与其中一个固定触点1-4接触，被推挤的下楔板3的下楔板触点3-4与原接触的固定触点1-4分离，并与其中一个右侧的固定触点1-4接触；
步骤d，探针检连接刷新：检测电路板200通过若干个固定触点1-4与固定不动的下楔板3上的下楔板探针3-3、被推挤的下楔板3上的下楔板探针3-3和被移动的上楔板2下端的上楔板探针2-3重新电连接。
具体地，所述步骤a，确定调幅距离中，上楔板2与下楔板3的厚度均设置为探针间隔m。
具体地，所述步骤b，移动楔块中，被移动的上楔板2向下移动至其侧面与下楔板3具有重叠的区域。
具体地，使用一种楔块调幅探针卡进行调幅。
具体地，所述一种楔块调幅探针卡，包括：探针卡主体1、上楔板2和下楔板3，所述探针卡主体1的内部滑动设置有若干个上楔板2和下楔板3，若干个上楔板2和下楔板3依次间隔交错设置。
通过将不同数量的上楔板2插入下楔板3的队列中，能够实现，增加相应数量的上楔板探针2-3至下楔板探针3-3队列中，进而改变参与检测的探针数量，实现调幅，使单个探针卡具有调幅功能，避免检测过程中，切换探针卡的操作。
实施例四
本实施例是一种楔块调幅探针卡调幅结构的实施例。
本实施例公开的一种楔块调幅探针卡调幅结构，该结构应用在实施例一公开的一种楔块调幅探针卡上，能够在调幅时，移动单个或多个上楔板2下移，并保证移动过程中的稳定。
结合图6和图7所示，一种楔块调幅探针卡调幅结构，设置在探针卡主体1的上方，包括压块，所述压块设置在探针卡主体1上的上楔板2部分露出的上方，压块能够下压单 个或多个上楔板2露出的部分，使上楔板2向下移动；通过将压块左右移动，使压块下方覆盖不同数量的上楔板2，实现上楔板2移动数量的选择，通过将压块向下移动，实现该数量的上楔板2下移。
所述的调幅结构还包括：压块板4-1、压块板销4-2、压块板销槽4-3、压块横杆4-4、横杆滑块4-5、横杆弹簧4-6、横杆滑块丝杆4-7、第一斜齿轮4-8、第二斜齿轮4-9、传动杆4-10、滑动齿轮4-11、滑板4-12、壳体4-13、齿辊4-14和滑板丝杆4-15。
若干个所述的压块板4-1并列滑动设置在压块横杆4-4上形成压块，由多块压块板4-1形成的压块，压块板4-1的数量与上楔板2的数量对应。
每个压块板4-1的下端均设置有一个压块板销4-2，每个上楔板2的上端均设置有一个压块板销槽4-3；在压块板4-1下移后，能够通过压块板销4-2插入压块板销槽4-3，使压块板4-1与压块板销槽4-3建立临时的连接关系，避免下移过程中，上楔板2晃动。
所述压块左侧的压块横杆4-4上滑动设置有横杆滑块4-5，该压块右侧的压块横杆4-4上套设有横杆弹簧4-6，所述的压块横杆4-4的截面为矩形；通过横杆滑块4-5与横杆弹簧4-6的夹持，使多个压块板4-1形成的压块能够随着横杆滑块4-5移动，通过移动横杆滑块4-5能够带动压块左右移动，进而实现压块覆盖不同数量的上楔板2，实现上楔板2移动数量的选择。
所述的横杆滑块4-5的上端套设在横杆滑块丝杆4-7上，由横杆滑块丝杆4-7转动驱动横杆滑块4-5移动，对压块位置进行调整。
横杆滑块丝杆4-7上固定设置有第一斜齿轮4-8，第一斜齿轮4-8与第二斜齿轮4-9啮合，第二斜齿轮4-9与传动杆4-10的下端固定连接，传动杆4-10的上端固定连接有滑动齿轮4-11，传动杆4-10的中间转动连接在滑板4-12上，通过滑板4-12带动压块上下移动，实现压块的下移，通过将滑动齿轮4-11与齿辊4-14啮合，使滑板4-12在滑动中，滑动齿轮4-11与齿辊4-14保持啮合，能够使齿辊4-14同轴连接的，用于驱动压块水平移动的水平驱动轴，在压块沿竖直方向移动时，避免随着滑板4-12移动。
滑板4-12滑动设置在壳体4-13的内部，壳体4-13固定连接在探针卡主体1上，所述的横杆滑块丝杆4-7的两端分别转动连接在滑板4-12上，所述的压块横杆4-4的两端均固定连接在滑板4-12上，所述的滑动齿轮4-11与齿辊4-14啮合，齿辊4-14的两端均转动连接在壳体4-13上，所述滑板4-12的中间套设在滑板丝杆4-15上，滑板丝杆4-15的两端均转动连接在壳体4-13上。
通过转动齿辊4-14，带动滑动齿轮4-11转动，使传动杆4-10通过第一斜齿轮4-8与第二斜齿轮4-9带动横杆滑块丝杆4-7转动，横杆滑块丝杆4-7带动横杆滑块4-5水平移动，调整压块覆盖的上楔板2数量，在调整完成后，通过转动滑板丝杆4-15使滑板4-12向下滑 动，同时滑动齿轮4-11在齿辊4-14表面向下滑动，并保持啮合状态，滑板4-12带动压块板4-1下移，压块板4-1下端的压块板销4-2插入压块板销槽4-3，使压块板4-1与压块板销槽4-3建立临时的连接关系，上楔板2插入下楔板3的队列中，上楔板2在下移的过程中向右滑动，与上楔板2连接的压块板4-1在下移过程中，随着上楔板2向右在压块横杆4-4上滑动。
具体地，结合图6和图7所示，还包括复位框4-16和复位框弹簧4-17，所述复位框4-16套设在探针卡主体1的外侧，复位框4-16的下端与壳体4-13的内壁之间设置有复位框弹簧4-17，所述上楔板2的上楔板滑块2-6搭接在复位框4-16的上端。在上楔板2下移的同时，上楔板2的上楔板滑块2-6下压复位框4-16使复位框弹簧4-17压缩，复位框弹簧4-17积蓄的弹性势能，在压块上移后能够推动复位框4-16上移，复位框4-16推动上楔板2上移复位。
具体地，还包括复位框推杆4-18，所述复位框推杆4-18的上端固定连接在滑板4-12上，复位框推杆4-18的下端悬空设置在复位框4-16的上方。在滑板4-12下移时，通过复位框推杆4-18来推动复位框4-16移动，避免由上楔板2的上楔板滑块2-6来推动复位框4-16，避免了上楔板2的上楔板滑块2-6与复位框4-16之间产生摩擦阻力，使上楔板2滑动更稳定。
具体地，应用在一种楔块调幅探针卡上。
具体地，所述一种楔块调幅探针卡包括：探针卡主体1、上楔板2和下楔板3，所述探针卡主体1的内部滑动设置有若干个上楔板2和下楔板3，若干个上楔板2和下楔板3依次间隔交错设置；
所述探针卡主体1包括：主体框架1-1、探针槽1-2和上楔板槽1-3，所述主体框架1-1内部沿长度方向容纳有若干个上楔板2和下楔板3，且主体框架1-1的底部沿长度方向设置有供探针穿过的探针槽1-2，主体框架1-1上还设置有供所述上楔板2部分露出的上楔板槽1-3。
实施例五
本实施例是一种楔块调幅探针卡调幅结构的对接结构的实施例。
本实施例公开了一种楔块调幅探针卡调幅结构的对接结构，该对接结构应用在实施例四公开的一种楔块调幅探针卡调幅结构上。
结合图6和图7所示，一种楔块调幅探针卡调幅结构的对接结构，包括：压块板4-1、压块板销4-2、压块板销槽4-3、压块横杆4-4、横杆滑块4-5、横杆弹簧4-6、横杆滑块丝杆4-7、第一斜齿轮4-8、第二斜齿轮4-9、传动杆4-10、滑动齿轮4-11、滑板4-12、壳体4-13、齿辊4-14和滑板丝杆4-15，若干个所述的压块板4-1并列滑动设置在压块横杆4-4上形成压块，每个压块板4-1的下端均设置有一个压块板销4-2，每个上楔板2的上端均设 置有一个压块板销槽4-3，所述压块左侧的压块横杆4-4上滑动设置有横杆滑块4-5，该压块右侧的压块横杆4-4上套设有横杆弹簧4-6，所述的压块横杆4-4的截面为矩形。
通过多个滑动设置的压块板4-1组成的压块，在压块下压上楔板2时，能够通过压块板4-1与上楔板2对接，保证上楔板2滑动时的稳定，同时，压块板4-1能够与对接后的上楔板2同步向下滑动，并向右滑动的过程中保持连接，使整个滑动过程中，上楔板2均能够通过与压块板4-1的连接，来保持滑动稳定。
实施例六
本实施例是一种楔块调幅探针卡调幅件的实施例。
本实施例公开了一种楔块调幅探针卡调幅件，该调幅件应用在实施例一公开的一种楔块调幅探针卡上，能够在调幅时，移动单个或多个上楔板2下移，并保证移动过程中的稳定。
结合图8和图9所示，一种楔块调幅探针卡调幅件，设置在探针卡主体1的上方，包括压块，所述压块设置在探针卡主体1上的上楔板2部分露出的上方，压块能够下压单个或多个上楔板2露出的部分，使上楔板2向下移动；通过将压块左右移动，使压块下方覆盖不同数量的上楔板2，实现上楔板2移动数量的选择，通过将压块向下移动，实现该数量的上楔板2下移。
所述的调幅件还包括：压块盘5-1、压块盘环5-2、压块盘环槽5-3、压块盘杆5-4、压块盘挡筒5-5、滑座5-6、外壳5-7、动齿轮5-8、齿辊轴5-9、滑座丝杆5-10、固定杆5-11和固定杆过孔5-12。
若干个所述的压块盘5-1并列滑动设置在压块盘杆5-4上形成压块，由多块压块盘5-1形成的压块，压块盘5-1的数量与上楔板2的数量对应。
若干个压块盘5-1均偏心设置在压块盘杆5-4上，每个压块盘5-1的外部均固定套设有一个压块盘环5-2，每个上楔板2的上端均设置有一个压块盘环槽5-3，在压块盘5-1转动后，由于压块盘5-1的偏心设置，在转动后，能够通过压块盘环5-2插入压块盘环槽5-3，使压块盘5-1与压块盘环槽5-3建立临时的连接关系，避免下移过程中，上楔板2晃动。
所述压块左侧的压块盘杆5-4上套设有压块盘挡筒5-5，该压块右侧的压块盘杆5-4上套设有盘杆弹簧5-6，所述的压块盘杆5-4的侧面沿轴向设置有导向条；压块盘挡筒5-5从左侧挡住压块，并作为压块覆盖上楔板2面积的起点，盘杆弹簧5-6从右侧挡住压块，并能够在压块内的压块盘5-1向右滑动后，能够进行复位。
所述压块盘挡筒5-5的左端固定连接在滑座5-6上，滑座5-6滑动设置在外壳5-7内部，通过滑座5-6的滑动，带动压块进行左右移动，进而实现压块覆盖不同数量的上楔板2，实现上楔板2移动数量的选择。
外壳5-7固定设置在探针卡主体1上，所述压块盘杆5-4的右端转动连接在滑座5-6上，压块盘杆5-4的左端依次穿过压块盘挡筒5-5和滑座5-6侧壁后与动齿轮5-8固定连接，动齿轮5-8与齿辊轴5-9啮合，齿辊轴5-9的两端均转动连接在外壳5-7上，齿辊轴5-9同轴连接有一个下压转轴，该下压转轴穿过外壳5-7后，作为驱动压块下移的操作轴。
所述的滑座5-6的上端套接在滑座丝杆5-10上，滑座丝杆5-10的两端均转动连接在外壳5-7上；滑座丝杆5-10同轴连接有一个调整轴，该调整轴穿过外壳5-7后，作为驱动压块左右移动的操作轴。
所述固定杆5-11的一端固定连接在滑座5-6的左端，固定杆5-11的另一端悬空设置，所述上楔板2露出的部分上与固定杆5-11对应设置有固定杆过孔5-12；在压块左右移动时，固定杆5-11能够穿过未被压块覆盖的上楔板2的固定杆过孔5-12，从而将未被覆盖的上楔板2固定，避免未被覆盖的上楔板2移动。
通过转动滑座丝杆5-10带动滑座5-6水平移动，滑座5-6带动压块水平移动，调整压块的水平位置，实现压块覆盖不同数量的上楔板2，同时在压块水平移动的同时，固定杆5-11随着滑座5-6移动，并穿过未被压块覆盖的上楔板2的固定杆过孔5-12，将未被压块覆盖的上楔板2固定，同时动齿轮5-8在齿辊轴5-9表面滑动，并保持啮合；在压块调整好水平位置后，通过转动齿辊轴5-9，带动动齿轮5-8转动，使压块盘杆5-4转动，压块盘杆5-4带动压块盘5-1转动，由于压块盘5-1的偏心设置，压块盘5-1的下沿与上楔板2的上端接触，同时压块盘环5-2嵌入压块盘环槽5-3，使压块盘5-1与上楔板2建立临时连接，随着压块盘5-1的转动，压块盘5-1向下推动上楔板2，上楔板2向下，并向右滑动，插入下楔板3的队列中，实现调幅。
具体地，还包括外框5-13和外框弹簧5-14，所述外框5-13套设在探针卡主体1的外侧，外框5-13的下端与外壳5-7的内壁之间设置有外框弹簧5-14，所述上楔板2的上楔板滑块2-6搭接在外框5-13的上端。在上楔板2下移的同时，上楔板2的上楔板滑块2-6下压外框5-13使外框弹簧5-14压缩，外框弹簧5-14积蓄的弹性势能，在压块上移后能够推动外框5-13上移，外框5-13推动上楔板2上移复位。
具体地，应用在一种楔块调幅探针卡上。
具体地，所述一种楔块调幅探针卡包括：探针卡主体1、上楔板2和下楔板3，所述探针卡主体1的内部滑动设置有若干个上楔板2和下楔板3，若干个上楔板2和下楔板3依次间隔交错设置；
所述探针卡主体1包括：主体框架1-1、探针槽1-2和上楔板槽1-3，所述主体框架1-1内部沿长度方向容纳有若干个上楔板2和下楔板3，且主体框架1-1的底部沿长度方向设置有供探针穿过的探针槽1-2，主体框架1-1上还设置有供所述上楔板2部分露出的上楔板槽 1-3。
实施例七
本实施例是一种楔块调幅探针卡调幅件的对接结构的实施例。
本实施例公开了一种楔块调幅探针卡调幅件的对接结构，该对接结构应用在实施例六公开的一种楔块调幅探针卡调幅件上。
结合图8和图9所示，一种楔块调幅探针卡调幅件的对接结构，包括：压块盘5-1、压块盘环5-2、压块盘环槽5-3、压块盘杆5-4、压块盘挡筒5-5、滑座5-6和外壳5-7，若干个所述的压块盘5-1并列滑动设置在压块盘杆5-4上形成压块，若干个压块盘5-1均偏心设置在压块盘杆5-4上，每个压块盘5-1的外部均固定套设有一个压块盘环5-2，每个上楔板2的上端均设置有一个压块盘环槽5-3，所述压块左侧的压块盘杆5-4上套设有压块盘挡筒5-5，该压块右侧的压块盘杆5-4上套设有盘杆弹簧5-6，所述的压块盘杆5-4的侧面沿轴向设置有导向条，所述压块盘挡筒5-5的左端固定连接在滑座5-6上，滑座5-6滑动设置在外壳5-7内部，外壳5-7固定设置在探针卡主体1上。
通过多个滑动设置的压块盘5-1组成的压块，在压块下压上楔板2时，能够通过压块盘5-1与上楔板2对接，保证上楔板2滑动时的稳定，同时，压块盘5-1能够与对接后的上楔板2同步向下滑动，并向右滑动的过程中保持连接，使整个滑动过程中，上楔板2均能够通过与压块盘5-1的连接，来保持滑动稳定。
需要说明的是，在以上实施例中，只要不矛盾的技术方案，都能够进行排列组合，由于本领域的技术人员能够根据高中阶段所学习的排列组合数学知识，穷尽所有排列组合后的结果，因此这些结果在本申请中不再一一罗列，但应理解为每一种排列组合结果都被本申请所记载。
还需要说明的是，以上实施例只是对本专利的示例性说明，并不限定它的保护范围，本领域技术人员还可以对其局部进行改变，只要没有超出本专利的精神实质，都在本专利的保护范围内。

Claims (7)

  1. 一种楔块调幅探针卡，其特征在于，包括：探针卡主体(1)、上楔板(2)和下楔板(3)，所述探针卡主体(1)的内部滑动设置有若干个上楔板(2)和下楔板(3)，若干个上楔板(2)和下楔板(3)依次间隔交错设置；
    所述探针卡主体(1)包括：主体框架(1-1)、探针槽(1-2)和上楔板槽(1-3)，所述主体框架(1-1)内部沿长度方向容纳有若干个上楔板(2)和下楔板(3)，且主体框架(1-1)的底部沿长度方向设置有供探针穿过的探针槽(1-2)，主体框架(1-1)上还设置有供所述上楔板(2)部分露出的上楔板槽(1-3)；
    所述上楔板(2)包括：上楔板体(2-1)、上楔板楔头(2-2)、上楔板探针(2-3)和上楔板触点(2-4)，所述上楔板体(2-1)的下端设置有上楔板楔头(2-2)，上楔板楔头(2-2)的两侧分别延伸至所述上楔板体(2-1)的两侧面，上楔板楔头(2-2)的下端设置有上楔板探针(2-3)，所述的上楔板触点(2-4)一端与上楔板探针(2-3)连接，上楔板触点(2-4)的另一端从所述上楔板体(2-1)的一侧露出；
    所述下楔板(3)包括：下楔板体(3-1)、下楔板楔头(3-2)、下楔板探针(3-3)和下楔板触点(3-4)，所述下楔板体(3-1)的上端设置有下楔板楔头(3-3)，下楔板楔头(3-3)的两侧分别延伸至所述下楔板体(3-1)的两侧面，下楔板体(3-1)的下端设置有下楔板探针(3-3)，所述的下楔板触点(3-4)一端与下楔板探针(3-3)连接，下楔板触点(3-4)的另一端从所述下楔板体(3-1)的一侧露出；
    定义待检测触点所需的探针间距为标准探针间距，所述上楔板体(2-1)和下楔板体(3-1)的厚度均为标准探针间距，所述探针卡主体(1)与所述上楔板触点(2-4)和下楔板触点(3-4)对应的一侧间隔设置有若干个固定触点(1-4)，若干个固定触点(1-4)的一端与检测电路板(200)连接，固定触点(1-4)的另一端延伸至主体框架(1-1)的内部，相邻的所述固定触点(1-4)的间距为标准探针间距。
  2. 根据权利要求1所述的一种楔块调幅探针卡，其特征在于，所述探针卡主体(1)还包括：主体固定挡块(1-5)、主体活动挡块(1-6)和主体活动挡块弹簧(1-7)，所述主体框架(1-1)的一侧设置有主体固定挡块(1-5)，该主体固定挡块(1-5)的侧面与若干个依次间隔交错设置的上楔板(2)和下楔板(3)的一侧接触，所述主体框架(1-1)的另一侧滑动设置有主体活动挡块(1-6)，该主体活动挡块(1-6)的侧面与若干个依次间隔交错设置的上楔板(2)和下楔板(3)的另一侧接触，所述主体活动挡块(1-6)通过主体活动挡块弹簧(1-7)与探针卡主体(1)连接。
  3. 根据权利要求2所述的一种楔块调幅探针卡，其特征在于，所述上楔板(2)还包括上楔板延伸板(2-5)，所述上楔板延伸板(2-5)为上楔板体(2-1)的上端向上延伸形 成，且该上楔板延伸板(2-5)从所述上楔板槽(1-3)穿过并延伸至探针卡主体(1)的外部。
  4. 根据权利要求3所述的一种楔块调幅探针卡，其特征在于，所述上楔板(2)还包括上楔板滑块(2-6)，所述上楔板体(2-1)的两侧分别设置有一个上楔板滑块(2-6)，上楔板滑块(2-6)与所述探针卡主体(1)的内壁滑动连接。
  5. 根据权利要求4所述的一种楔块调幅探针卡，其特征在于，所述下楔板(3)还包括下楔板滑块(3-5)，所述下楔板体(3-1)的两侧分别设置有一个下楔板滑块(3-5)，下楔板滑块(3-5)与所述探针卡主体(1)的内壁滑动连接。
  6. 根据权利要求1、2、3、4或5任一项所述的一种楔块调幅探针卡，其特征在于，所述探针卡主体(1)的上方还设置有调幅结构(4)，调幅结构(4)包括压块，所述压块设置在探针卡主体(1)上的上楔板(2)部分露出的上方，压块能够下压单个或多个上楔板(2)露出的部分，使上楔板(2)向下移动。
  7. 一种楔块调幅探针卡主体，其特征在于，所述探针卡主体(1)的内部滑动设置有若干个上楔板(2)和下楔板(3)，若干个上楔板(2)和下楔板(3)依次间隔交错设置；所述探针卡主体(1)包括：主体框架(1-1)、探针槽(1-2)和上楔板槽(1-3)，所述主体框架(1-1)内部沿长度方向容纳有若干个上楔板(2)和下楔板(3)，且主体框架(1-1)的底部沿长度方向设置有供探针穿过的探针槽(1-2)，主体框架(1-1)上还设置有供所述上楔板(2)部分露出的上楔板槽(1-3)；所述主体框架(1-1)的一侧间隔设置有若干个固定触点(1-4)，若干个固定触点(1-4)的一端与检测电路板(200)连接，固定触点(1-4)的另一端延伸至主体框架(1-1)的内部，所述探针卡主体(1)还包括：主体固定挡块(1-5)、主体活动挡块(1-6)和主体活动挡块弹簧(1-7)，所述主体框架(1-1)的一侧设置有主体固定挡块(1-5)，该主体固定挡块(1-5)的侧面与若干个依次间隔交错设置的上楔板(2)和下楔板(3)的一侧接触，所述主体框架(1-1)的另一侧滑动设置有主体活动挡块(1-6)，该主体活动挡块(1-6)的侧面与若干个依次间隔交错设置的上楔板(2)和下楔板(3)的另一侧接触，所述主体活动挡块(1-6)通过主体活动挡块弹簧(1-7)与探针卡主体(1)连接。
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