WO2022110275A1 - 预防设备部件撞击的装置及其方法 - Google Patents

预防设备部件撞击的装置及其方法 Download PDF

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Publication number
WO2022110275A1
WO2022110275A1 PCT/CN2020/133834 CN2020133834W WO2022110275A1 WO 2022110275 A1 WO2022110275 A1 WO 2022110275A1 CN 2020133834 W CN2020133834 W CN 2020133834W WO 2022110275 A1 WO2022110275 A1 WO 2022110275A1
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array tester
sensing module
interlock circuit
entrance
sensing
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PCT/CN2020/133834
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English (en)
French (fr)
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吴瑞习
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深圳市华星光电半导体显示技术有限公司
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Publication of WO2022110275A1 publication Critical patent/WO2022110275A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Definitions

  • the present invention relates to the technical field of detection equipment, in particular, to a device and method for preventing the impact of components of detection equipment.
  • Array Tester is a device for testing the performance of Thin Film Transistor Liquid Crystal Display (TFT-LCD).
  • TFT-LCD Thin Film Transistor Liquid Crystal Display
  • each moving part in the array tester returns to its origin position.
  • the position of the probe rod of the array tester is not the same as the position of its origin when the glass is exchanged.
  • the array tester will not detect whether there is a robotic arm inside the array tester. If there is a robotic arm, the probe rod will collide with the robotic arm staying in the array tester, causing damage to the probe rod and the robotic arm.
  • the main purpose of the present invention is to provide a device and a method for preventing the collision of equipment components, which can prevent the components in the array tester from colliding with the mechanical arm, and achieve the purpose of effectively maintaining the equipment.
  • an embodiment of the present invention provides a device for preventing the impact of equipment components, the device includes: a sensing module, disposed on the outer frame at the entrance of the array tester, for sensing the entrance Whether there is a mechanical arm; an interlock circuit, set in the array tester, is used to generate an on or off state according to the sensing result of the induction module, and then control whether the initialization operation of the array tester is running; and a reminder
  • the device is arranged on the array tester, and displays the sensing result by the color of the light signal.
  • the interlock circuit when the sensing module senses the robotic arm, the interlock circuit is in the open-circuit state, so that the array tester stops running and generates an alarm; the sensing module does not sense When the manipulator is in operation, the interlock circuit is in the conducting state, so that the initialization operation of the array tester runs.
  • the interlock circuit further generates the on or off state according to the states of a plurality of gates of the array tester.
  • the interlock circuit includes a controller forming a loop, switches of the plurality of doors, and switches of the induction module, wherein the controller is used to control the initialization operation of the array tester.
  • the sensing module is disposed on the outer frame above or below the entrance.
  • the sensing module is a pair of laser sensors disposed on the outer frame on both sides of the entrance.
  • the number of the laser sensors is determined according to the moving distance of the mechanical arm in the vertical direction.
  • An embodiment of the present invention also provides a device for preventing the impact of equipment components, the device includes: a sensing module, disposed on the outer frame at the entrance of the array tester, for sensing whether there is a mechanical arm at the entrance; The lock circuit is arranged in the array tester, and is used for generating an on or off state according to the sensing result of the sensing module, and then controlling whether the initialization operation of the array tester is running.
  • the interlock circuit when the sensing module senses the robotic arm, the interlock circuit is in the open-circuit state, so that the array tester stops running and generates an alarm; the sensing module does not sense When the manipulator is in operation, the interlock circuit is in the conducting state, so that the initialization operation of the array tester runs.
  • the interlock circuit further generates the on or off state according to the states of a plurality of gates of the array tester.
  • the interlock circuit includes a controller forming a loop, switches of the plurality of doors, and switches of the induction module, wherein the controller is used to control the initialization operation of the array tester.
  • the sensing module is disposed on the outer frame above or below the entrance.
  • the sensing module is a pair of laser sensors disposed on the outer frame on both sides of the entrance.
  • the number of the laser sensors is determined according to the moving distance of the mechanical arm in the vertical direction.
  • another embodiment of the present invention provides a method for preventing component impact, the method comprising: sensing whether there is a robotic arm at the entrance of the array tester through a sensing module; and using an interlock circuit according to the sensing of the sensing module As a result, an on or off state is generated, which in turn controls whether the initialization operation of the array tester is running.
  • the interlock circuit when the sensing module senses the robotic arm, the interlock circuit is in the open-circuit state, so that the array tester stops running and generates an alarm; the sensing module does not sense When the manipulator is in operation, the interlock circuit is in the conducting state, so that the initialization operation of the array tester runs.
  • the device and method for preventing the impact of equipment components provided by the present invention can sense whether an external mechanical arm is in the equipment, and then determine whether to perform the equipment initialization operation normally so that the components in the equipment return to their original positions. When there is no robotic arm, the components in the equipment return to their original positions to avoid these components colliding with the robotic arm, thereby preventing damage to the equipment components and the robotic arm.
  • FIG. 1 is a schematic diagram of a device for preventing the impact of equipment components according to an embodiment of the present invention.
  • FIG. 2 is a schematic diagram of an interlock circuit according to an embodiment of the present invention.
  • FIG. 3 is a flowchart of a method for preventing equipment component impact according to an embodiment of the present invention.
  • FIG. 1 is a schematic diagram of a device for preventing the impact of equipment components according to an embodiment of the present invention.
  • An embodiment of the present invention provides an apparatus for preventing the impact of equipment components, including a sensing module 400 and an interlock circuit (not shown).
  • the array tester 100 of Orbotech is used as a device for testing products.
  • the array tester 100 has an inlet on one side.
  • the entrance is surrounded by the outer frame 140 of the array tester 100 .
  • the robot arm 200 sends the product to be tested, such as a glass substrate, into the array tester 100 through the entrance.
  • the sensing module 400 is disposed on the outer frame 140 at the entrance of the array tester 100 .
  • the sensing module 400 can detect whether the robot arm 200 exists at the entrance.
  • the sensing module 400 may be disposed on the outer frame above or below the entrance (ie, the upper part of the outer frame 140 or the lower part of the outer frame 140 ).
  • the sensing module 400 may be a pair of laser sensors, which are respectively disposed on the outer frame on both sides of the entrance (ie, the left part and the right part of the outer frame 140 ).
  • the number of laser sensors can be determined according to the vertical movement distance of the robot arm.
  • the interlock circuit is arranged in the array tester 100 , and is used to generate an on or off state according to the sensing result of the sensing module 400 , and then control whether the initialization operation of the array tester 100 is running.
  • the interlock circuit when the sensing module 400 senses the robotic arm 200, the interlock circuit is in an open state, so that the array tester 100 stops running and generates an alarm. When the sensing module 400 does not sense the robotic arm 200, the interlock circuit is in a conducting state, so that the initialization operation of the array tester 100 runs normally.
  • FIG. 2 is a schematic diagram of an interlock circuit according to an embodiment of the present invention.
  • the interlock circuit includes a controller 210 forming a loop, a plurality of door switches 221-226, and an inductive module switch 230.
  • the controller 210 is used to control whether the initialization operation of the array tester 100 is running.
  • the array tester 100 has six physical gates (not shown).
  • the six doors correspond to the six door switches 221-226, respectively. When one of the doors is opened, the corresponding door switch will present an open circuit (open) state. Conversely, when one of the doors is closed, the corresponding door switch will assume an on (closed) state.
  • the sensing module 400 has a sensing module switch 230 and is connected to a reminder device (not shown).
  • the sensing module switch 230 is in series with the six door switches 221-226 in the loop of the interlock circuit.
  • the reminder device can be arbitrarily arranged on the array tester 100 .
  • the reminder device uses the color of the light signal to display the sensing result.
  • the sensing module 400 senses the robotic arm 200
  • the sensing module switch 230 is in an open state and the light signal of the reminding device is red.
  • the sensing module switch 230 is in an on state and the light signal of the reminder device is green.
  • the interlock circuit when one of the doors on the array tester 100 is opened, or the sensing module 400 detects the robotic arm 200, the interlock circuit is in an open state, the controller 210 does not act, the array tester 100 issues an alarm and Stop running. When all the doors on the array tester 100 are closed and the sensing module 400 does not detect the robot arm 200, the interlock circuit is in a conducting state, and the controller 210 starts the initialization operation of the array tester 100, so that the The part returns to its original position.
  • FIG. 3 is a flowchart of a method for preventing collision of equipment components according to an embodiment of the present invention.
  • a method for preventing the impact of equipment components comprising the steps of: S10, sensing whether there is a robotic arm at the entrance through an induction module; and S20, generating a lead through an interlock circuit according to the sensing result of the sensing module; On or off state, and then control whether the initialization operation of the array tester is running.
  • the sensing module 400 can detect whether the robotic arm 200 exists at the entrance of the array tester 100 .
  • the sensing module 400 senses the robotic arm 200, the interlock circuit is in an open state, so that the array tester 100 stops running and generates an alarm.
  • the sensing module 400 does not sense the robotic arm 200, the interlock circuit is in a conducting state, so that the initialization operation of the array tester 100 runs normally.
  • the device and method for preventing the impact of equipment components provided by the present invention can sense whether an external mechanical arm is in the equipment, and then determine whether to perform the equipment initialization operation normally so that the components in the equipment return to their original positions. When there is no robotic arm, the components in the equipment return to their original positions to avoid these components colliding with the robotic arm, thereby preventing damage to the equipment components and the robotic arm.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Safety Devices In Control Systems (AREA)
  • Manipulator (AREA)

Abstract

一种预防部件撞击的装置和方法，该预防部件撞击的装置包括感应模块(400)与互锁电路，感应模块(400)设置于阵列测试仪(100)的入口处的外框(140)上，用于感应该入口处是否存在机械手臂(200)，互锁电路设置于阵列测试仪(100)内，用于依据感应模块(400)的感应结果产生导通或断路状态，进而控制阵列测试仪(100)的初始化操作是否运转，从而防止探针棒与机械手臂(200)碰撞受损。

Description

预防设备部件撞击的装置及其方法 技术领域
本发明是有关于一种检测设备的技术领域，特别是有关于一种预防检测设备部件撞击的装置及其方法。
 背景技术
阵列测试仪(ATS, Array Tester)是检测薄膜晶体管液晶显示器(TFT-LCD)的性能的一种设备。通常阵列测试仪存在一个问题：阵列测试仪初始化期间，阵列测试仪的探针棒(Probe bar)与机械手臂(Robot)可能有撞击的风险。
 技术问题
当阵列测试仪与机械手臂交换玻璃时，如果信号连接的问题造成机械手臂停在阵列测试仪中，则需要初始化阵列测试仪的主软件来修复信号连接的问题。初始化阵列测试仪期间，阵列测试仪中的各运动部件会回归原点位置。例如，阵列测试仪的探针棒在交换玻璃的位置与其原点位置是不一样的。在探针棒回归原点期间，阵列测试仪不会侦测阵列测试仪内部是否有机械手臂。如果有机械手臂，则探针棒就会与停留在阵列测试仪内的机械手臂撞击，造成探针棒与机械手臂的损坏。
故，有必要提供一种预防设备部件撞击的装置及其方法，以解决现有技术所存在的问题。
 技术解决方案
本发明的主要目的在于提供一种预防设备部件撞击的装置及其方法，其可以预防阵列测试仪内的部件与机械手臂互相撞击，达到有效维护设备的目的。
为达成本发明的前述目的，本发明一实施例提供一种预防设备部件撞击的装置，所述装置包括:感应模块，设置于阵列测试仪的入口处的外框上，用于感应所述入口是否存在机械手臂；互锁电路，设置于所述阵列测试仪内，用于依据所述感应模块的感应结果产生导通或断路状态，进而控制所述阵列测试仪的初始化操作是否运转；以及提醒装置，设置在所述阵列测试仪上，利用灯号颜色显示所述感应结果。
根据本发明一优选实施例，所述感应模块感应到所述机械手臂时，所述互锁电路呈所述断路状态，使得所述阵列测试仪停止运转并产生警报；所述感应模块未感应到所述机械手臂时，所述互锁电路呈所述导通状态，使得所述阵列测试仪的初始化操作运转。
根据本发明一优选实施例，所述互锁电路还依据所述阵列测试仪的多个门的状态产生所述导通或断路状态。
根据本发明一优选实施例，所述互锁电路包括形成回路的控制器、所述多个门的开关以及所述感应模块的开关，其中控制器用于控制所述阵列测试仪的初始化操作运转。
根据本发明一优选实施例，所述感应模块设置于所述入口处上方或下方的所述外框。
根据本发明一优选实施例，所述感应模块为一对激光传感器，设置于所述入口两侧的所述外框。
根据本发明一优选实施例，所述激光传感器的数量依据所述机械手臂在垂直方向上的移动距离决定。本发明一实施例还提供一种预防设备部件撞击的装置，所述装置包括: 感应模块，设置于阵列测试仪的入口处的外框上，用于感应所述入口是否存在机械手臂；以及互锁电路，设置于所述阵列测试仪内，用于依据所述感应模块的感应结果产生导通或断路状态，进而控制所述阵列测试仪的初始化操作是否运转。
根据本发明一优选实施例，所述感应模块感应到所述机械手臂时，所述互锁电路呈所述断路状态，使得所述阵列测试仪停止运转并产生警报；所述感应模块未感应到所述机械手臂时，所述互锁电路呈所述导通状态，使得所述阵列测试仪的初始化操作运转。
根据本发明一优选实施例，所述互锁电路还依据所述阵列测试仪的多个门的状态产生所述导通或断路状态。
根据本发明一优选实施例，所述互锁电路包括形成回路的控制器、所述多个门的开关以及所述感应模块的开关，其中控制器用于控制所述阵列测试仪的初始化操作运转。
根据本发明一优选实施例，所述感应模块设置于所述入口处上方或下方的所述外框。
根据本发明一优选实施例，所述感应模块为一对激光传感器，设置于所述入口两侧的所述外框。
根据本发明一优选实施例，所述激光传感器的数量依据所述机械手臂在垂直方向上的移动距离决定。
再者，本发明另一实施例提供一种预防部件撞击的方法，所述方法包括: 通过感应模块感应阵列测试仪的入口处是否存在机械手臂；以及通过互锁电路依据所述感应模块的感应结果产生导通或断路状态，进而控制所述阵列测试仪的初始化操作是否运转。
根据本发明一优选实施例，所述感应模块感应到所述机械手臂时，所述互锁电路呈所述断路状态，使得所述阵列测试仪停止运转并产生警报；所述感应模块未感应到所述机械手臂时，所述互锁电路呈所述导通状态，使得所述阵列测试仪的初始化操作运转。
 有益效果
与现有技术相比较，本发明提出的预防设备部件撞击的装置及其方法可以感应来自外部的机械手臂是否在设备内，然后决定是否正常进行设备初始化操作使得设备内的部件回归原始位置。在没有机械手臂时，设备内的部件才回归原始位置以避免该等部件碰撞到机械手臂，进而防止设备部件与机械手臂的损坏。
 附图说明
为让本发明的上述内容能更明显易懂，下文特举优选实施例，并配合所附图式，作详细说明如下：
图1是本发明实施例的预防设备部件撞击的装置的示意图。
图2是本发明实施例的互锁电路的示意图。
图3是本发明实施例的预防设备部件撞击的方法的流程图。
 本发明的实施方式
以下各实施例的说明是参考附加的图式，用以例示本发明可用以实施的特定实施例。再者，本发明所提到的方向用语，例如上、下、顶、底、前、后、左、右、内、外、侧面、周围、中央、水平、横向、垂直、纵向、轴向、径向、最上层或最下层等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。
请参照图1，图1是本发明实施例的预防设备部件撞击的装置的示意图。本发明实施例提供一种预防设备部件撞击的装置，包括感应模块400与互锁电路(未显示)。在本发明一实施例中，使用奥宝公司的阵列测试仪100作为检测产品的设备。阵列测试仪100一侧具有一个入口。入口被阵列测试仪100的外框140包围。机械手臂200透过此入口将待检测产品，例如玻璃基板，送入阵列测试仪100。感应模块400设置于阵列测试仪100的入口处的外框140上。感应模块400可以检测入口处是否存在机械手臂200。在本实施例中，感应模块400可以设置于入口处上方的外框或下方的外框(即外框140的上侧部分或外框140的下侧部分)。在另一实施例中，感应模块400可以是一对激光传感器，分别设置于入口两侧的外框(即外框140的左侧部分与右侧部分)。激光传感器的数量可以依据机械手臂在垂直方向上的移动距离决定。互锁电路设置于阵列测试仪100内，用于依据感应模块400的感应结果产生导通或断路状态，进而控制阵列测试仪100的初始化操作是否运转。举例来说，在本实施例中，感应模块400感应到机械手臂200时，互锁电路呈断路状态，使得阵列测试仪100停止运转并产生警报。感应模块400未感应到机械手臂200时，互锁电路呈导通状态，使得阵列测试仪100的初始化操作正常运转。
请参照图2，图2是本发明实施例的互锁电路的示意图。互锁电路包括形成回路的控制器210、多个门开关221-226以及感应模块开关230。控制器210用于控制阵列测试仪100的初始化操作是否运转。在本实施例中，阵列测试仪100具有六个实体的门(未显示)。六个门分别对应六个门开关221-226。当其中一个门打开时，对应的门开关会呈现断路(打开)状态。相反地，当其中一个门关闭时，对应的门开关会呈现导通(闭合)状态。在本实施例中，感应模块400具有一个感应模块开关230并且连接提醒装置(未显示)。感应模块开关230在互锁电路的回路中与六个门开关221-226串联。提醒装置可以任意设置在阵列测试仪100上。提醒装置利用灯号颜色显示感应结果。在感应模块400感应到机械手臂200时，感应模块开关230呈现断路状态并且提醒装置的灯号呈现红色。相反地，感应模块400没感应到机械手臂200时，感应模块开关230呈现导通状态并且提醒装置的灯号呈现绿色。在本实施例中，当阵列测试仪100上的其中一个门打开，或感应模块400侦测到机械手臂200时，互锁电路呈现断路状态，控制器210不动作，阵列测试仪100发出警报并且停止运转。当阵列测试仪100上的所有门都关闭且感应模块400未侦测到机械手臂200时，互锁电路呈导通状态，控制器210启动阵列测试仪100的初始化操作，使得阵列测试仪100的部件回归原始位置。
请参照图3，图3是本发明实施例的预防设备部件撞击的方法的流程图。在本发明的实施例中，提供一种预防设备部件撞击的方法，包括如下步骤:S10、通过感应模块感应入口处是否存在机械手臂; 以及S20、通过互锁电路依据感应模块的感应结果产生导通或断路状态，进而控制阵列测试仪的初始化操作是否运转。
在阵列测试仪100与机械手臂200交换基板玻璃期间，假如发生意外事件导致需要初始化阵列测试仪100，感应模块400可以检测阵列测试仪100的入口处是否存在机械手臂200。感应模块400感应到机械手臂200时，互锁电路呈断路状态，使得阵列测试仪100停止运转并产生警报。感应模块400未感应到机械手臂200时，互锁电路呈导通状态，使得阵列测试仪100的初始化操作正常运转。
与现有技术相比较，本发明提出的预防设备部件撞击的装置及其方法可以感应来自外部的机械手臂是否在设备内，然后决定是否正常进行设备初始化操作使得设备内的部件回归原始位置。在没有机械手臂时，设备内的部件才回归原始位置以避免该等部件碰撞到机械手臂，进而防止设备部件与机械手臂的损坏。
本发明已由上述相关实施例加以描述，然而上述实施例仅为实施本发明的范例。必需指出的是，已公开的实施例并未限制本发明的范围。相反地，包含于权利要求书的精神及范围的修改及均等设置均包括于本发明的范围内。

Claims (16)

  1.    一种预防部件撞击的装置，其包括:
    感应模块，设置于阵列测试仪的入口处的外框上，用于感应所述入口是否存在机械手臂；
    互锁电路，设置于所述阵列测试仪内，用于依据所述感应模块的感应结果产生导通或断路状态，进而控制所述阵列测试仪的初始化操作是否运转；以及
    提醒装置，设置在所述阵列测试仪上，利用灯号颜色显示所述感应结果。
  2.    如权利要求1所述的装置，其中所述感应模块感应到所述机械手臂时，所述互锁电路呈所述断路状态，使得所述阵列测试仪停止运转并产生警报；所述感应模块未感应到所述机械手臂时，所述互锁电路呈所述导通状态，使得所述阵列测试仪的初始化操作运转。
  3.    如权利要求1所述的装置，其中所述互锁电路还依据所述阵列测试仪的多个门的状态产生所述导通或断路状态。
  4.    如权利要求3所述的装置，其中所述互锁电路包括形成回路的控制器、所述多个门的开关以及所述感应模块的开关，其中控制器用于控制所述阵列测试仪的初始化操作运转。
  5.    如权利要求1所述的装置，其中所述感应模块设置于所述入口处上方的所述外框或下方的所述外框。
  6.    如权利要求1所述的装置，其中所述感应模块为一对激光传感器，设置于所述入口两侧的所述外框。
  7.    如权利要求6所述的装置，其中所述激光传感器的数量依据所述机械手臂在垂直方向上的移动距离决定。
  8.    一种预防部件撞击的装置，其包括:
    感应模块，设置于阵列测试仪的入口处的外框上，用于感应所述入口是否存在机械手臂；以及
    互锁电路，设置于所述阵列测试仪内，用于依据所述感应模块的感应结果产生导通或断路状态，进而控制所述阵列测试仪的初始化操作是否运转。
  9.    如权利要求8所述的装置，其中所述感应模块感应到所述机械手臂时，所述互锁电路呈所述断路状态，使得所述阵列测试仪停止运转并产生警报；所述感应模块未感应到所述机械手臂时，所述互锁电路呈所述导通状态，使得所述阵列测试仪的初始化操作运转。
  10. 如权利要求8所述的装置，其中所述互锁电路还依据所述阵列测试仪的多个门的状态产生所述导通或断路状态。
  11. 如权利要求10所述的装置，其中所述互锁电路包括形成回路的控制器、所述多个门的开关以及所述感应模块的开关，其中控制器用于控制所述阵列测试仪的初始化操作运转。
  12. 如权利要求8所述的装置，其中所述感应模块设置于所述入口处上方的所述外框或下方的所述外框。
  13. 如权利要求8所述的装置，其中所述感应模块为一对激光传感器，设置于所述入口两侧的所述外框。
  14. 如权利要求13所述的装置，其中所述激光传感器的数量依据所述机械手臂在垂直方向上的移动距离决定。
  15. 一种预防部件撞击的方法，其包括:
    通过感应模块感应阵列测试仪的入口处是否存在机械手臂；以及
    通过互锁电路依据所述感应模块的感应结果产生导通或断路状态，进而控制所述阵列测试仪的初始化操作是否运转。
  16. 如权利要求15所述的方法，其中所述感应模块感应到所述机械手臂时，所述互锁电路呈所述断路状态，使得所述阵列测试仪停止运转并产生警报；所述感应模块未感应到所述机械手臂时，所述互锁电路呈所述导通状态，使得所述阵列测试仪的初始化操作运转。
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