WO2022059607A1 - 圧電式バルブ - Google Patents
圧電式バルブ Download PDFInfo
- Publication number
- WO2022059607A1 WO2022059607A1 PCT/JP2021/033258 JP2021033258W WO2022059607A1 WO 2022059607 A1 WO2022059607 A1 WO 2022059607A1 JP 2021033258 W JP2021033258 W JP 2021033258W WO 2022059607 A1 WO2022059607 A1 WO 2022059607A1
- Authority
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- WIPO (PCT)
- Prior art keywords
- valve seat
- valve
- seat plate
- piezoelectric
- longitudinal direction
- Prior art date
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 31
- 238000007599 discharging Methods 0.000 claims description 2
- 230000008602 contraction Effects 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 60
- 239000000463 material Substances 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 239000003562 lightweight material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
- F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
- F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K24/00—Devices, e.g. valves, for venting or aerating enclosures
- F16K24/04—Devices, e.g. valves, for venting or aerating enclosures for venting only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0263—Construction of housing; Use of materials therefor of lift valves multiple way valves
Definitions
- the present invention relates to a piezoelectric valve that opens and closes a valve by using the displacement of the piezoelectric element.
- the piezoelectric valve described in Patent Document 1 includes an actuator that utilizes the characteristics of a piezoelectric element having excellent high-speed response performance. Further, the piezoelectric valve described in Patent Document 1 is provided with an actuator provided with a displacement expanding mechanism that expands a small displacement of the piezoelectric element based on the principle of leverage.
- Piezoelectric valves have excellent responsiveness. Therefore, it is used as an ejector valve of an optical sorter for granular materials such as rice grains to remove defective products. In this case, it is rare that good products are entangled and removed, and the finding that the defective product mixing rate on the removed defective product side is higher than that of the electromagnetic valve is obtained from the test and from the rule of thumb. Has been done.
- the piezoelectric valve when used as an ejector valve of an optical sorter, for example, as described in Patent Document 2, it is directly continuous with a manifold having a space inside which compressed air is supplied from a compressed air source. It is attached to. In this case, a large number of nozzle holes are opened at the tip of the ejector.
- the valve seat plate to which the actuator is fixed is housed in the case of the valve body, and the displacement expanding mechanism having a complicated structure in which the actuator has an arm, a leaf spring, and the like. It is equipped with. Therefore, since the thickness and width of the actuator cannot be reduced, there is a problem that it is difficult to reduce the pitch of the air discharge ports when a plurality of air discharge ports are provided.
- an object of the present invention is to provide a piezoelectric valve capable of reducing the pitch of the gas discharge port.
- one embodiment of the present invention is: Multiple actuators that drive multiple valves individually in parallel planes, A valve seat plate that has a plurality of valve seats and discharge passages that are individually connected to and separated from a plurality of valve bodies and that fixes a plurality of actuators.
- Each of the multiple actuators The base fixed to the valve seat plate and A piezoelectric element whose one end is connected to the mounting surface of the base and extends in the first longitudinal direction, A support that is integrally molded with the base and extends in the second longitudinal direction that intersects the first longitudinal direction alongside the piezoelectric element.
- An action unit that is connected to the other end of the piezoelectric element and the tip of the support and is displaced in different displacement directions from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts. It is provided with a valve body provided on the side of the working part in the displacement direction and driven by the displacement of the working part.
- the body case is A gas supply port to which compressed gas is supplied into the main body case, Multiple gas discharge ports that individually discharge the compressed gas supplied from the gas supply port through each discharge path of the valve seat plate by separating the plurality of valve bodies and the plurality of valve seats. It is characterized by having.
- valve seat plate is fixed in the main body case so that the discharge path and the gas discharge port of the main body case communicate with each other.
- the acting portion is in a direction different from each of the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts, and is parallel to the plane including the first longitudinal direction and the second longitudinal direction. It is preferable to displace in the displacement direction in a plane.
- the valve seat plate has a valve seat and a valve seat portion on which a discharge path is formed, and a plurality of valve seats are provided on opposite side portions of the valve seat portion. It is preferable that the plurality of actuators are fixed to the valve seat plate so that each valve body faces each valve seat.
- the valve seat plate has a valve seat portion in which a valve seat and a discharge path are formed, and a plurality of valve seats are provided so as to be partially overlapped in the width direction on opposite side portions of the valve seat portion so as to be inconsistent with each other. , It is preferable that the plurality of actuators are fixed to the valve seat plate so that each valve body faces each valve seat.
- valve seats are arranged side by side in the width direction (direction of the thickness width of the valve seat plate) on each side of the valve seat portion.
- one embodiment of the present invention is: The actuator that drives the valve body and A valve seat plate that has a valve seat and a discharge path that are in contact with and detached from the valve body and that fixes the actuator.
- the actuator is The base fixed to the valve seat plate and A piezoelectric element whose one end is connected to the mounting surface of the base and extends in the first longitudinal direction, A support that is integrally molded with the base and extends in the second longitudinal direction that intersects the first longitudinal direction alongside the piezoelectric element.
- An action unit that is connected to the other end of the piezoelectric element and the tip of the support and is displaced in different directions from the first longitudinal direction and the second longitudinal direction as the piezoelectric element expands and contracts. It is provided with a valve body provided on the side of the working part in the displacement direction and driven by the displacement of the working part.
- the body case is A gas supply port to which compressed gas is supplied into the main body case, A gas discharge port that discharges the compressed gas supplied from the gas supply port through the discharge path of the valve seat plate by separating the valve body and the valve seat, It is characterized by having.
- valve seat plate is fixed in the main body case so that the discharge path and the gas discharge port of the main body case communicate with each other.
- the actuator is provided in a plane in which the acting portion is in a direction different from the first longitudinal direction and the second longitudinal direction, respectively, as the piezoelectric element expands and contracts, and is parallel to the plane including the first longitudinal direction and the second longitudinal direction. It is preferable to displace in the displacement direction.
- the support portion has a constricted portion in an intermediate portion extending in the second longitudinal direction.
- the valve seat has a valve seat surface in which a discharge path opens in a plurality of annular protrusions. It is preferable that the valve body is in contact with and separated from the plurality of annular protrusions on the valve seat surface.
- each of the plurality of actuators has a base fixed to the valve seat plate, a piezoelectric element having one end connected to the mounting surface of the base and extending in the first longitudinal direction.
- a support portion that is integrally molded with the base and extends in the second longitudinal direction that intersects the first longitudinal direction along with the piezoelectric element, and is connected to the other end of the piezoelectric element and the tip of the support portion, and accompanies expansion and contraction of the piezoelectric element.
- the actuator is equipped with a displacement expansion mechanism having a simple structure, and the thickness and width of the actuator can be made smaller than before. Therefore, according to the piezoelectric valve of one embodiment of the present invention, the pitch of the gas discharge port can be made smaller than that of the conventional piezoelectric valve.
- the piezoelectric valve according to the embodiment of the present invention includes a support portion in which the actuator is integrally molded with the base portion, the number of parts is reduced and the actuator can be easily assembled.
- the valve seat plate has a valve seat portion in which a valve seat and a discharge path are formed, and a plurality of valve seats are provided on opposite side portions of the valve seat portion. If the plurality of actuators are fixed to the valve seat plate so that each valve body faces each valve seat, the thickness width of the valve seat plate to which the plurality of actuators are fixed can be reduced. The pitch of the gas outlet can be made smaller than that of the piezoelectric valve.
- the valve seat plate has a valve seat portion in which the valve seat and the discharge path are formed, and the plurality of valve seats have the valve seat portion so that the valve seats partially overlap in the width direction. If each valve body is fixed to the valve seat plate so as to face each valve seat, a plurality of actuators are provided on the valve seat plates so as to be opposed to each other on both sides of the valve seat plate. On both sides of the portion, a plurality of actuators are fixed in a state of being partially overlapped in the direction of the thickness width of the valve seat plate, and the dimension of the thickness width of the valve seat plate to which the plurality of actuators are fixed can be further reduced. Therefore, the pitch of the gas discharge port can be further reduced as compared with the conventional piezoelectric valve.
- one valve seat plate is provided. Since at least four actuators can be fixed to the valve seat plate, the thickness and width of the valve seat plate can be reduced, and the pitch of the gas outlet can be made smaller than that of the conventional piezoelectric valve. Can be done.
- the actuator is integrally molded with the base portion fixed to the valve seat plate, the piezoelectric element having one end connected to the mounting surface of the base portion and extending in the first longitudinal direction, and the base portion.
- the support portion extending in the second longitudinal direction intersecting the first longitudinal direction along with the piezoelectric element is connected to the other end of the piezoelectric element and the tip of the support portion.
- the actuator is simple because it includes an action part that is displaced in different directions from the longitudinal direction and the second longitudinal direction, and a valve body that is provided on the side of the action part in the displacement direction and is driven by the displacement of the action part. Equipped with a structural displacement expansion mechanism, the thickness and width of the actuator can be made smaller than before. Therefore, according to the piezoelectric valve of the present invention, when a plurality of actuators are provided, the pitch of the gas discharge port can be made smaller than that of the conventional piezoelectric valve.
- the support portion has a constricted portion in the intermediate portion extending in the second longitudinal direction, the displacement of the working portion can be expanded.
- the valve seat has a valve seat surface in which a discharge path opens in a plurality of annular protrusions, and the valve body is in contact with and separated from the plurality of annular protrusions on the valve seat surface.
- FIG. 1 shows a perspective view of a piezoelectric valve.
- FIG. 2 is an explanatory view of the piezoelectric valve and shows a view seen from the side surface side.
- the piezoelectric valve 1 includes a valve body 2, an actuator 3 described later, and a valve seat plate 4 described later, which is arranged inside the valve body 2 with the actuator 3 fixed. ..
- the valve body 2 is a case in which the rear surface (lower surface in FIGS. 1 and 2) is open, and is provided inside with a gas pressure chamber that receives a compressed gas supply from an external compressed gas supply source (not shown). .. Further, on the front surface of the valve body 2 (upper surface in FIGS. 1 and 2), a connector portion 5 for mounting on a manifold (not shown) having a space inside to which the compressed gas is supplied from the compressed gas source is provided. Be done.
- a gas suction port 51 for sucking the compressed gas and a plurality of gas discharge ports 52 for discharging the compressed gas are opened in the valve main body 2. Further, on the front surface of the valve body 2, there is a gas supply port (not shown) communicating with the gas suction port 51 of the connector portion 5, and a plurality of gas discharge ports (not shown) communicating with each gas discharge port 52. Open. The rear surface of the valve body 2 is closed by the cover body 6. A wiring connector 61 for supplying power to the piezoelectric element is arranged on the cover body 6.
- FIG. 3 shows an explanatory diagram of the actuator.
- the actuator 3 has a base 31 fixed to a valve seat plate, a piezoelectric element 32 having one end connected to the mounting surface of the base 31 and extending in the first longitudinal direction, and a piezoelectric element 32 integrally molded with the base 31 so as to be aligned with the piezoelectric element 32.
- a support portion 33 extending in the second longitudinal direction intersecting the first longitudinal direction is provided.
- the actuator 3 is connected to the other end of the piezoelectric element 32 and the tip of the support portion 33, and is displaced in different directions from the first longitudinal direction and the second longitudinal direction as the piezoelectric element 32 expands and contracts.
- a unit 34 is provided.
- the actuator 3 includes a valve body 35 which is provided on one side surface of the acting portion 34 on the tip end side in the direction of displacement and is driven by the displacement of the acting portion 34.
- the actuator 3 has a displacement direction different from that of the first longitudinal direction and the second longitudinal direction in a plane substantially parallel to the plane including the first longitudinal direction and the second longitudinal direction. Displace to. Further, by providing the constricted portion 331 in the intermediate portion extending in the second longitudinal direction of the support portion 33, the displacement of the acting portion 34 due to the expansion and contraction of the piezoelectric element 32 can be expanded.
- the base portion 31 and the support portion 33 can be integrally molded by punching out a metal material such as a stainless steel material including an Invar material. If the base portion 31 and the support portion 33 are integrally molded by punching out a metal material, the number of parts is reduced and the actuator 3 can be easily assembled.
- a connecting member 311 made of, for example, an aluminum block can be mounted on the mounting surface of the base portion 31. If a connecting member 311 made of a material having a linear expansion coefficient larger than that of the support portion 33 is attached to the mounting surface of the base portion 31, and the piezoelectric element 32 is attached to the base portion 31 via the connecting member 311. The influence of thermal expansion or contraction of the element 32 can be reduced or eliminated.
- the connecting member 311 may be mounted between the piezoelectric element 32 and the acting portion 34 instead of the mounting surface of the base portion 31.
- the working portion 34 can be formed of a lightweight material such as an aluminum material. If the working portion 34 is formed of a lightweight material such as an aluminum material, it is preferable to displace the working portion 34. Further, the valve body 35 is made of rubber or the like, and can be preferably made of slippery rubber.
- the actuator 3 can be connected between the base portion 31 and the working portion 34 by a compression member 36. Piezoelectric elements are easily damaged by a load in the tensile direction. However, if the base portion 31 and the working portion 34 are connected by the compression member 36, the piezoelectric element 32 can be compressed in the first longitudinal direction. Therefore, damage to the piezoelectric element 32 can be prevented.
- FIG. 4 shows a perspective view of a state in which the actuator is fixed to the first valve seat plate.
- FIG. 5 is an explanatory view of a state in which the actuator is fixed to the first valve seat plate, and shows a view seen from the side surface side of the first valve seat plate.
- FIG. 6 is an explanatory view of a state in which the actuator is fixed to the first valve seat plate, and shows a view seen from the front side of the first valve seat plate.
- the first valve seat plate 4 to which the actuator 3 is fixed is housed inside the valve main body 2.
- the first valve seat plate 4 is an example of a valve seat plate to which two actuators can be attached.
- the first valve seat plate 4 has a valve seat portion 41 in a central portion.
- Valve seats 42 with which the valve body 35 of the actuator 3 abuts are provided on both side surfaces of the valve seat portions 41 facing each other.
- the mounting portion 43 of the actuator 3 is formed at a position facing one side surface of the valve seat portion 41. Further, on the other surface side of the first valve seat plate 4, the mounting portion 44 of the actuator 3 is formed at a position facing the other side surface of the valve seat portion 41.
- the two actuators 3 are arranged on the mounting portions 43 and 44 of the first valve seat plate 4 and fixed by screws so that the valve bodies 35 face each valve seat 42.
- the valve seat portion 41 is formed with a plurality of discharge passages 45 that open on the valve seat surface of each valve seat 42.
- Each discharge passage 45 opens to the front surface (upper surface in FIG. 5) of the first valve seat plate 4.
- the first valve seat plate 4 is arranged inside the valve body 2 with the two actuators 3 fixed. By fixing the front surface of the first valve seat plate 4 from the front surface side of the valve body 2 with screws, each discharge path 45 communicates with each gas discharge port that opens in the front surface of the valve body 2.
- the piezoelectric element 32 of the actuator 3 When the piezoelectric element 32 of the actuator 3 is energized in the closed state of the piezoelectric valve 1, the piezoelectric element 32 expands, the acting portion 34 is displaced, and the valve body 35 separates from the valve seat 42 and opens. As a result, the piezoelectric valve 1 brings the compressed gas supplied to the valve body 2 from the gas supply port to the front surface of the valve body 2 via the discharge path 45 formed in the valve seat portion 41 of the first valve seat plate 4. It is discharged from the gas discharge port that opens in.
- two first valve seat plates 4 are housed in the case of the valve body 2 side by side in the width direction, and four gases are stored on the front surface of the valve body 2.
- the outlet opens.
- the actuator 3 has a displacement expanding mechanism having a simple structure, and the thickness and width of the actuator 3 can be made smaller than before. Therefore, according to the piezoelectric valve 1 in the first embodiment of the present invention, the pitch of the gas discharge port opened on the front surface of the valve main body 2 can be made smaller than that of the conventional piezoelectric valve.
- the piezoelectric valve 1 in the first embodiment of the present invention includes the support portion 33 in which the actuator 3 is integrally molded with the base portion 31, the number of parts is reduced and the assembly of the actuator 3 becomes easy.
- the first valve seat plate 4 has a valve seat portion 41, valve seats 42 are provided on both side surfaces of the valve seat portion 41, and two actuators 3 are provided.
- the valve body 35 is fixed to the first valve seat plate 4 so as to face each valve seat 42. Therefore, the thickness and width of the first valve seat plate 4 to which the two actuators 3 are fixed can be reduced. Therefore, according to the piezoelectric valve 1 in the first embodiment of the present invention, the pitch of the gas discharge port opened on the front surface of the valve main body 2 can be made smaller than that of the conventional piezoelectric valve.
- the first valve seat plate 4 is provided so that the valve seats 42 are inconsistent with each other on both side surfaces of the valve seat portion 41 so that the valve seats 42 partially overlap in the width direction.
- the two actuators 3 are fixed to the first valve seat plate 4 so that each valve body 35 faces each valve seat 42.
- the first valve seat plate 4 has two actuators 3 on both side surfaces of the valve seat portion 41 in the direction of the thickness width of the first valve seat plate 4. It will be fixed in a partially polymerized state. Therefore, the dimension of the thickness width of the first valve seat plate 4 to which the two actuators 3 are fixed can be further reduced, so that the pitch of the gas discharge port opened on the front surface of the valve body 2 can be further increased as compared with the conventional piezoelectric valve. It can be made smaller.
- each discharge passage 45 opened in the front surface of the first valve seat plate 4 opens in a row in the direction of the thickness width of the first valve seat plate 4 (vertical direction in FIG. 6). is not it.
- an intermediate member that communicates with the opening of each discharge path 45 on one surface and has a plurality of flow paths that open in a row on the other surface a plurality of gas discharge ports that open on the front surface of the valve body 2 are used. Can be aligned horizontally.
- the plurality of gas discharge ports opened on the front surface of the valve body 2 do not open in a row in the direction of the thickness width of the valve body 2, they communicate with the openings of the gas discharge ports on one side and line up on the other side.
- a plurality of gas discharge ports 52 that open in the connector portion 5 can be arranged in a horizontal row.
- FIG. 7 is an explanatory view of the valve seat surface, and shows a view of the valve seat surface as viewed from the front side.
- the valve seat 42 provided in the valve seat portion 41 of the first valve seat plate 4 is provided with a plurality of annular convex portions 421.
- the valve seat 42 may have a valve seat surface in which the discharge path 45 opens in each annular convex portion 421.
- an example in which two annular convex portions 421 are provided on the valve seat surface is shown.
- each discharge passage 45 that opens in the annular convex portion 421 joins one discharge passage 45 inside the valve seat portion 41.
- the actuator 3 in order to stably displace the acting portion 34, it is preferable to shorten the lengths of the acting portion 34 and the valve body 35, but in that case, it is also necessary to shorten the length of the valve seat 42. Therefore, if the valve body 35 of the actuator 3 is brought into contact with and separated from the plurality of annular convex portions 421 of the valve seat surface, the entire peripheral length of the opening of the discharge path 45 from which the compressed gas is discharged from the inside of the valve body 2 Can be lengthened to secure the required circumference. As a result, when the valve body 35 and the valve seat 42 are separated from each other, the amount of compressed gas discharged from the discharge path 45 can be increased, and the required amount of compressed gas discharged can be secured.
- FIG. 8 shows a perspective view of a state in which the actuator is fixed to the second valve seat plate.
- FIG. 9 is an explanatory view of a state in which the actuator is fixed to the second valve seat plate, and shows a view seen from the side surface side of the second valve seat plate.
- FIG. 10 is an explanatory view of a state in which the actuator is fixed to the second valve seat plate, and shows a view seen from the front side of the second valve seat plate.
- the piezoelectric valve 1 in the second embodiment of the present invention accommodates the second valve seat plate 8 to which the actuator 3 is fixed inside the valve main body 2.
- the second valve seat plate 8 is an example of a valve seat plate to which four actuators can be attached.
- the second valve seat plate 8 has a valve seat portion 81 in the central portion, and a valve seat 82 with which the valve body 35 of the actuator 3 abuts is provided on both side surfaces of the valve seat portion 81 facing each other.
- mounting portions 83 of the actuator 3 are formed at positions facing both side surfaces of the valve seat portion 81. Further, on the other surface side of the second valve seat plate 8, the mounting portion 84 of the actuator 3 is formed at a position facing both side surfaces of the valve seat portion 81.
- the four actuators 3 are arranged on the mounting portions 83 and 84 of the second valve seat plate 8 and fixed by screws so that the valve bodies 35 face each valve seat 82.
- a plurality of discharge passages 85 that open to the valve seat surface of the valve seat 82 are formed in the valve seat portion 81.
- Each discharge passage 85 opens to the front surface (upper surface in FIG. 9) of the second valve seat plate 8.
- the second valve seat plate 8 is arranged inside the valve body 2 with the four actuators 3 fixed, and the front surface side to the front surface of the valve body 2 is fixed by screws. As a result, each discharge path 85 communicates with each gas discharge port that opens in the front surface of the valve body 2.
- one second valve seat plate 8 is housed in the case of the valve body 2, and four gas discharge ports are opened on the front surface of the valve body 2. ..
- the piezoelectric valve 1 according to the second embodiment of the present invention also includes an actuator 3, and gas exhaust that opens to the front surface of the valve body 2 as compared with the conventional piezoelectric valve.
- the exit pitch can be reduced.
- the piezoelectric valve 1 in the second embodiment of the present invention also facilitates the assembly of the actuator 3.
- the second valve seat plate 8 has a valve seat portion 81, valve seats 82 are provided on both side surfaces of the valve seat portion 81, and each of the four actuators 3 is provided.
- Two valve bodies 35 are fixed to both sides of the second valve seat plate 8 so as to face each valve seat 82. Therefore, the thickness and width of the second valve seat plate 8 to which the four actuators 3 are fixed can be reduced. Therefore, even with the piezoelectric valve 1 according to the second embodiment of the present invention, the pitch of the gas discharge port opened on the front surface of the valve main body 2 can be made smaller than that of the conventional piezoelectric valve.
- valve seats 82 are aligned with each other on both side surfaces of the valve seat portion 81 so as to partially overlap in the width direction.
- the four actuators 3 can be fixed to the second valve seat plate 8 so that each valve body 35 faces each valve seat 82.
- the second valve seat plate 8 has four actuators 3 on both side surfaces of the valve seat portion 81 in the direction of the thickness width of the second valve seat plate 8. It can be fixed in a partially polymerized state. Therefore, the thickness and width of the second valve seat plate 8 to which the four actuators 3 are fixed can be further reduced, and the pitch of the gas discharge port opened on the front surface of the valve body 2 is larger than that of the conventional piezoelectric valve. Can be made even smaller.
- each gas discharge port opened in the front surface of the valve body 2 or each gas discharge port 52 opened in the connector portion 5 is aligned in a horizontal row. be able to.
- the valve body in the piezoelectric valve, the valve body is seated on the valve seat in a state where no voltage is applied to the piezoelectric element.
- the valve body can be separated from the valve seat in a state where no voltage is applied to the piezoelectric element.
- the piezoelectric valve in the piezoelectric valve, four actuators are arranged in the case of the valve body, and four gas outlets are opened in the front surface of the valve body.
- the present invention is not limited to this, and one or more actuators can be arranged in the valve body.
- valve seat plates have been described as an example, but the valve seat plates are not limited to this, and for example, in the second valve seat plate 8, two actuators are provided only on one side. It is also possible to form a mounting portion.
- the piezoelectric valve according to the embodiment of the present invention can reduce the pitch of the gas discharge port provided in the main body case as compared with the conventional piezoelectric valve. It can be used for various purposes such as ejector valves.
- Piezoelectric valve 2 Valve body 3 Actuator 31 Base 311 Connector member 32 Piezoelectric element 33 Support part 331 Constriction part 34 Acting part 35 Valve body 36 Compression member 4 First valve seat plate 41 Valve seat part 42 Valve seat 421 Circular convex part 43 Mounting part 44 Mounting part 45 Discharge path 5 Connector part 51 Gas suction port 52 Gas discharge port 6 Cover body 61 Wiring connector 8 Second valve seat plate 81 Valve seat part 82 Valve seat 83 Mounting part 84 Mounting part 85 Discharge path
Abstract
Description
複数の弁体をそれぞれ個別に平行な面内で駆動する複数のアクチュエータと、
複数の弁体とそれぞれ個別に接離する弁座及び排出路を複数有し、複数のアクチュエータを固定する弁座プレートと、
弁座プレートを収納する本体ケースと、を備える圧電式バルブであって、
複数のアクチュエータのそれぞれは、
弁座プレートに固定される基部と、
基部の取付け面に一端部が接続され、第1長手方向に延びる圧電素子と、
基部と一体成形され、圧電素子と並んで第1長手方向と交差する第2長手方向に延びる支持部と、
圧電素子の他端部及び支持部の先端部と接続され、圧電素子の伸縮に伴って、第1長手方向及び第2長手方向それぞれと異なる変位方向に変位する作用部と、
作用部の変位する方向の側に設けられ、作用部の変位によって駆動される弁体と、を備え、
本体ケースは、
当該本体ケース内に圧縮気体が供給される気体供給口と、
気体供給口から供給された圧縮気体を複数の弁体と複数の弁座との離間によって弁座プレートの各排出路を介してそれぞれ個別に排出する複数の気体排出口と、
を備えることを特徴する。
弁座プレートが、排出路と本体ケースの気体排出口が連通するように本体ケース内に固定されることが好ましい。
複数のアクチュエータのそれぞれは、作用部が、圧電素子の伸縮に伴って、第1長手方向及び第2長手方向それぞれと異なる方向であって、第1長手方向及び第2長手方向を含む平面に平行な面内における変位方向に変位することが好ましい。
弁座プレートが、弁座及び排出路が形成される弁座部を有し、複数の弁座は弁座部の相対する両側部に設けられ、
複数のアクチュエータは、各弁体が各弁座にそれぞれ対峙すべく弁座プレートに固定されることが好ましい。
弁座プレートが、弁座及び排出路が形成される弁座部を有し、複数の弁座は幅方向が一部重合するように弁座部の相対する両側部に互いに齟齬して設けられ、
複数のアクチュエータは、各弁体が各弁座にそれぞれ対峙すべく弁座プレートに固定されることが好ましい。
複数の弁座が、弁座部の各側において幅方向(弁座プレートの厚み幅の方向)に並設されることが好ましい。
弁体を駆動するアクチュエータと、
弁体と接離する弁座及び排出路を有し、アクチュエータを固定する弁座プレートと、
弁座プレートを収納する本体ケースと、を備える圧電式バルブであって、
アクチュエータは、
弁座プレートに固定される基部と、
基部の取付け面に一端部が接続され、第1長手方向に延びる圧電素子と、
基部と一体成形され、圧電素子と並んで第1長手方向と交差する第2長手方向に延びる支持部と、
圧電素子の他端部及び支持部の先端部と接続され、圧電素子の伸縮に伴って、第1長手方向及び第2長手方向それぞれと異なる方向に変位する作用部と、
作用部の変位する方向の側に設けられ、作用部の変位によって駆動される弁体と、を備え、
本体ケースは、
当該本体ケース内に圧縮気体が供給される気体供給口と、
気体供給口から供給された圧縮気体を弁体と弁座との離間によって弁座プレートの排出路を介して排出する気体排出口と、
を備えることを特徴する。
弁座プレートが、排出路と本体ケースの気体排出口が連通するように本体ケース内に固定されることが好ましい。
アクチュエータは、作用部が、圧電素子の伸縮に伴って、第1長手方向及び第2長手方向それぞれと異なる方向であって、第1長手方向及び第2長手方向を含む平面に平行な面内における変位方向に変位することが好ましい。
支持部が、第2長手方向に延びる中間部分にくびれ部を有することが好ましい。
弁座が、複数の環状凸部内に排出路が開口する弁座面を有し、
弁体が、弁座面の複数の環状凸部と接離することが好ましい。
したがって、本発明の一実施形態の圧電式バルブによれば、従来の圧電式バルブに比べ、気体排出口のピッチを小さくすることができる。
したがって、本発明の圧電式バルブによれば、複数のアクチュエータを備えることとした場合、従来の圧電式バルブに比べ、気体排出口のピッチを小さくすることが可能となる。
<実施形態1>
図1は圧電式バルブの斜視図を示す。図2は圧電式バルブの説明図であって側面側から見た図を示す。
本発明の実施形態1において、圧電式バルブ1は、バルブ本体2、後述するアクチュエータ3、及びアクチュエータ3が固定された状態でバルブ本体2の内部に配設される後述する弁座プレート4を備える。
また、バルブ本体2の前面(図1及び図2では上面)には、圧縮気体源から圧縮気体が供給される空間を内部に有するマニホールド(図示せず)に装着するためのコネクタ部5が設けられる。
また、バルブ本体2の前面には、コネクタ部5の気体吸入口51と連通する気体供給口(図示せず)、及び各気体排出口52と連通する複数の気体排出口(図示せず)が開口する。
バルブ本体2の後面はカバー体6により閉鎖される。カバー体6には圧電素子に給電するための配線コネクタ61が配設される。
アクチュエータ3は、弁座プレートに固定される基部31と、基部31の取付け面に一端部が接続され、第1長手方向に延びる圧電素子32と、基部31と一体成形され、圧電素子32と並んで第1長手方向と交差する第2長手方向に延びる支持部33を備える。
また、支持部33の第2長手方向に延びる中間部分にくびれ部331を設けることで、圧電素子32の伸縮に伴う作用部34の変位を拡大することができる。
基部31及び支持部33を、金属材料を打ち抜いて一体成形すれば、部品点数が削減され、アクチュエータ3の組立てが容易となる。
基部31の取付け面に、支持部33よりも線膨張係数の大きな材料からなる連結部材311を取付け、圧電素子32を、連結部材311を介して基部31に取付けることとすれば、温度変化による圧電素子32の熱膨張又は熱収縮の影響を軽減し、又は無くすことができる。
なお、連結部材311は、基部31の取付け面でなく、圧電素子32と作用部34の間に取り付けることもできる。
また、弁体35は、ゴム製等であって、好ましくは滑性ゴムとすることができる。
圧電素子は引張方向の荷重に対し損傷しやすい。しかし、基部31と作用部34の間を圧縮部材36で連結することとすれば、圧電素子32を第1長手方向に圧縮することができる。そのため、圧電素子32の損傷を防止できる。
本発明の実施形態1における圧電式バルブ1は、アクチュエータ3を固定した第1弁座プレート4をバルブ本体2の内部に収納するものである。
第1弁座プレート4は、2つのアクチュエータを取り付けることが可能な弁座プレートの一例である。第1弁座プレート4は、中央部分に弁座部41を有する。弁座部41の相対する両側面にはそれぞれアクチュエータ3の弁体35が当接する弁座42が設けられる。
また、第1弁座プレート4の他面側には、弁座部41の他方の側面に対向する位置にアクチュエータ3の取り付け部44が形成される。
2つのアクチュエータ3は、各弁体35が各弁座42に対峙するよう、第1弁座プレート4の各取り付け部43,44に配設されネジにより固定される。
第1弁座プレート4は、2つのアクチュエータ3が固定された状態でバルブ本体2の内部に配設される。第1弁座プレート4は、バルブ本体2の前面側から前面がネジにより固定されることで、各排出路45がバルブ本体2の前面に開口する各気体排出口と連通する。
他方、圧電式バルブ1は、アクチュエータ3の圧電素子32への通電が解除されると、圧電素子32が収縮し、作用部34が反対方向へ変位して、弁体35が弁座42に着座して閉弁する。
したがって、本発明の実施形態1における圧電式バルブ1によれば、従来の圧電式バルブに比べ、バルブ本体2の前面に開口する気体排出口のピッチを小さくすることができる。
したがって、本発明の実施形態1における圧電式バルブ1によれば、従来の圧電式バルブに比べ、バルブ本体2の前面に開口する気体排出口のピッチを小さくすることができる。
第1弁座プレート4の弁座部41に設けられる弁座42には、複数の環状凸部421が設けられる。弁座42は、各環状凸部421内に排出路45が開口する弁座面を有するものとすることができる。ここでは、弁座面に2つの環状凸部421を設けた例を示す。また、環状凸部421内に開口する各排出路45は、弁座部41の内部において1つの排出路45に合流する。
そこで、アクチュエータ3の弁体35が、弁座面の複数の環状凸部421と接離することとすれば、バルブ本体2内から圧縮気体が排出される排出路45の開口の全体の周長を長くし、必要な周長を確保することができる。その結果、弁体35と弁座42の離間時に、排出路45からの圧縮気体の排出量を増加させ、必要な圧縮気体の排出量を確保することができる。
図8は第2弁座プレートにアクチュエータを固定した状態の斜視図を示す。図9は第2弁座プレートにアクチュエータを固定した状態の説明図であって、第2弁座プレートの側面側から見た図を示す。図10は第2弁座プレートにアクチュエータを固定した状態の説明図であって、第2弁座プレートの前面側から見た図を示す。
本発明の実施形態2における圧電式バルブ1は、アクチュエータ3を固定した第2弁座プレート8をバルブ本体2の内部に収納するものである。
第2弁座プレート8は、4つのアクチュエータを取り付けることが可能な弁座プレートの一例である。第2弁座プレート8は、中央部分に弁座部81を有し、弁座部81の相対する両側面にそれぞれアクチュエータ3の弁体35が当接する弁座82が設けられる。
また、第2弁座プレート8の他面側には、弁座部81の両方の側面に対向する位置にそれぞれアクチュエータ3の取り付け部84が形成される。
4つのアクチュエータ3は、各弁体35が各弁座82に対峙するよう、第2弁座プレート8の各取り付け部83,84に配設されネジにより固定される。
第2弁座プレート8は、4つのアクチュエータ3が固定された状態でバルブ本体2の内部に配設され、バルブ本体2の前面側から前面がネジにより固定される。これにより、各排出路85がバルブ本体2の前面に開口する各気体排出口と連通する。
したがって、本発明の実施形態2における圧電式バルブ1によっても、従来の圧電式バルブに比べ、バルブ本体2の前面に開口する気体排出口のピッチを小さくすることができる。
2 バルブ本体
3 アクチュエータ
31 基部
311 連結部材
32 圧電素子
33 支持部
331 くびれ部
34 作用部
35 弁体
36 圧縮部材
4 第1弁座プレート
41 弁座部
42 弁座
421 環状凸部
43 取り付け部
44 取り付け部
45 排出路
5 コネクタ部
51 気体吸入口
52 気体排出口
6 カバー体
61 配線コネクタ
8 第2弁座プレート
81 弁座部
82 弁座
83 取り付け部
84 取り付け部
85 排出路
Claims (6)
- 複数の弁体をそれぞれ個別に平行な面内で駆動する複数のアクチュエータと、
前記複数の弁体とそれぞれ個別に接離する弁座及び排出路を複数有し、前記複数のアクチュエータを固定する弁座プレートと、
前記弁座プレートを収納する本体ケースと、を備える圧電式バルブであって、
前記複数のアクチュエータのそれぞれは、
前記弁座プレートに固定される基部と、
前記基部の取付け面に一端部が接続され、第1長手方向に延びる圧電素子と、
前記基部と一体成形され、前記圧電素子と並んで前記第1長手方向と交差する第2長手方向に延びる支持部と、
前記圧電素子の他端部及び前記支持部の先端部と接続され、前記圧電素子の伸縮に伴って、前記第1長手方向及び前記第2長手方向それぞれと異なる変位方向に変位する作用部と、
前記作用部の前記変位する方向の側に設けられ、前記作用部の変位によって駆動される前記弁体と、を備え、
前記本体ケースは、
圧縮気体が供給される気体供給口と、
前記気体供給口から供給された圧縮気体を前記複数の弁体と前記複数の弁座との離間によって前記弁座プレートの前記各排出路を介してそれぞれ個別に排出する複数の気体排出口と、
を備えることを特徴する圧電式バルブ。 - 前記弁座プレートは、前記弁座及び前記排出路が形成される弁座部を有し、前記複数の弁座は前記弁座部の両側部に設けられ、
前記複数のアクチュエータは、前記各弁体が前記各弁座にそれぞれ対峙すべく前記弁座プレートに固定される請求項1に記載の圧電式バルブ。 - 前記弁座プレートは、前記弁座及び前記排出路が形成される弁座部を有し、前記複数の弁座は幅方向が一部重合するように前記弁座部の両側部に互いに齟齬して設けられ、
前記複数のアクチュエータは、前記各弁体が前記各弁座にそれぞれ対峙すべく前記弁座プレートに固定される請求項2に記載の圧電式バルブ。 - 弁体を駆動するアクチュエータと、
前記弁体と接離する弁座及び排出路を有し、前記アクチュエータを固定する弁座プレートと、
前記弁座プレートを収納する本体ケースと、を備える圧電式バルブであって、
前記アクチュエータは、
前記弁座プレートに固定される基部と、
前記基部の取付け面に一端部が接続され、第1長手方向に延びる圧電素子と、
前記基部と一体成形され、前記圧電素子と並んで前記第1長手方向と交差する第2長手方向に延びる支持部と、
前記圧電素子の他端部及び前記支持部の先端部と接続され、前記圧電素子の伸縮に伴って、前記第1長手方向及び前記第2長手方向それぞれと異なる方向に変位する作用部と、
前記作用部の前記変位する方向の側に設けられ、前記作用部の変位によって駆動される前記弁体と、を備え、
前記本体ケースは、
圧縮気体が供給される気体供給口と、
前記気体供給口から供給された圧縮気体を前記弁体と前記弁座との離間によって前記弁座プレートの前記排出路を介して排出する気体排出口と、
を備えることを特徴する圧電式バルブ。 - 前記支持部は、前記第2長手方向に延びる中間部分にくびれ部を有する請求項1乃至4のいずれかに記載の圧電式バルブ。
- 前記弁座は、複数の環状凸部内に前記排出路が開口する弁座面を有し、
前記弁体は、前記弁座面の前記複数の環状凸部と接離する請求項1乃至5のいずれかに記載の圧電式バルブ。
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GB202302679D0 (en) | 2023-04-12 |
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