JP7461045B2 - バルブ装置 - Google Patents
バルブ装置 Download PDFInfo
- Publication number
- JP7461045B2 JP7461045B2 JP2020155727A JP2020155727A JP7461045B2 JP 7461045 B2 JP7461045 B2 JP 7461045B2 JP 2020155727 A JP2020155727 A JP 2020155727A JP 2020155727 A JP2020155727 A JP 2020155727A JP 7461045 B2 JP7461045 B2 JP 7461045B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- piezoelectric element
- function module
- longitudinal direction
- valve device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
11 弁部
12 基部
121 取付部
122 取付穴
13 圧電素子
14 支持部材
15 作用部
16 連結部材
2 バルブ機能モジュール
21 弁座
22 第1面
23 第2面
24 排出口
3 ハウジング
31 供給口
32 排出口
321 第1排出口
322 第2排出口
33 保持部
331 締結部品
34 蓋取付部
35 蓋
4 空隙
5 空気圧力室
60 圧縮部材
61 伸縮部
62 固定部
70 駆動部
100 バルブ装置
Claims (8)
- 複数の弁部をそれぞれ個別に駆動する複数のアクチュエータと、
前記複数の弁部とそれぞれ個別に接離する弁座を複数有するバルブ機能モジュールと、
前記バルブ機能モジュールを収納するハウジングと、を備えるバルブ装置であって、
前記複数のアクチュエータのそれぞれは、
基盤となる基部と、
前記基部の取付け面に一端部が接続され、第1長手方向に延びる圧電素子と、
前記取付け面に前記圧電素子と並んで一端部が取付けられ、前記第1長手方向と交差する第2長手方向に延びる支持部材と、
前記圧電素子および前記支持部材それぞれにおける他端部と接続され、前記圧電素子の伸縮に伴って、前記第1長手方向および前記第2長手方向それぞれと異なる方向である変位方向に変位して前記弁部を駆動する作用部と、を備え、
前記ハウジングは、
流体が供給される供給口と、
前記複数の弁部とそれぞれ個別に接離する前記弁座との離間によって前記供給口から供給された流体をそれぞれ個別に排出する複数の排出口と、
前記バルブ機能モジュールと前記ハウジングとの空隙を確保して前記バルブ機能モジュールを保持する保持部と、を備え、
前記ハウジングに蓋が取り付けられて前記バルブ機能モジュールが前記ハウジング内に収納されている
ことを特徴とするバルブ装置。 - 前記保持部は、前記バルブ機能モジュールの第1面を保持することにより前記バルブ機能モジュールとの空隙を確保する、請求項1に記載のバルブ装置。
- 前記保持部は、締結部品によって前記バルブ機能モジュールを前記保持部に締結することにより前記バルブ機能モジュールを保持する、請求項1または2に記載のバルブ装置。
- それぞれの前記アクチュエータは、前記基部および前記作用部それぞれに連結され、前記圧電素子を前記第1長手方向に圧縮する圧縮部材をさらに備える、請求項1から3のいずれか一項に記載のバルブ装置。
- それぞれの前記アクチュエータが備える前記圧電素子に個別に電圧又は電流を供給して、前記圧電素子を個別に伸縮駆動させる駆動部をさらに備える、請求項1から4のいずれか一項に記載のバルブ装置。
- 前記圧電素子の一端部または他端部の少なくとも一方は、前記支持部材よりも熱膨張率の高い連結部材を介して接続されている、請求項1から5のいずれか一項に記載のバルブ装置。
- 前記連結部材は、前記基部と一体に形成されている、請求項6に記載のバルブ装置。
- 前記連結部材は、前記作用部と一体に形成されている、請求項6に記載のバルブ装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020155727A JP7461045B2 (ja) | 2020-02-27 | 2020-09-16 | バルブ装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020031577A JP6893710B1 (ja) | 2020-02-27 | 2020-02-27 | バルブ装置 |
JP2020155727A JP7461045B2 (ja) | 2020-02-27 | 2020-09-16 | バルブ装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020031577A Division JP6893710B1 (ja) | 2020-02-27 | 2020-02-27 | バルブ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021134916A JP2021134916A (ja) | 2021-09-13 |
JP7461045B2 true JP7461045B2 (ja) | 2024-04-03 |
Family
ID=76464622
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020031577A Active JP6893710B1 (ja) | 2020-02-27 | 2020-02-27 | バルブ装置 |
JP2020155727A Active JP7461045B2 (ja) | 2020-02-27 | 2020-09-16 | バルブ装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020031577A Active JP6893710B1 (ja) | 2020-02-27 | 2020-02-27 | バルブ装置 |
Country Status (5)
Country | Link |
---|---|
JP (2) | JP6893710B1 (ja) |
KR (1) | KR20220144795A (ja) |
CN (1) | CN115151748A (ja) |
TW (1) | TW202200922A (ja) |
WO (1) | WO2021172388A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7424560B2 (ja) * | 2020-09-15 | 2024-01-30 | 有限会社メカノトランスフォーマ | 圧電式バルブ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150221853A1 (en) | 2014-02-06 | 2015-08-06 | Marco Systemanalyse Und Entwicklung Gmbh | Piezoelectric adjustment apparatus |
WO2019009035A1 (ja) | 2017-07-07 | 2019-01-10 | 有限会社メカノトランスフォーマ | 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、及びエアバルブ |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6810328B2 (ja) | 2016-04-12 | 2021-01-06 | 有限会社メカノトランスフォーマ | 圧電アクチュエータおよび圧電式バルブ |
-
2020
- 2020-02-27 JP JP2020031577A patent/JP6893710B1/ja active Active
- 2020-09-16 JP JP2020155727A patent/JP7461045B2/ja active Active
-
2021
- 2021-02-24 WO PCT/JP2021/006953 patent/WO2021172388A1/ja active Application Filing
- 2021-02-24 KR KR1020227023248A patent/KR20220144795A/ko unknown
- 2021-02-24 CN CN202180016683.8A patent/CN115151748A/zh active Pending
- 2021-02-26 TW TW110106932A patent/TW202200922A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150221853A1 (en) | 2014-02-06 | 2015-08-06 | Marco Systemanalyse Und Entwicklung Gmbh | Piezoelectric adjustment apparatus |
WO2019009035A1 (ja) | 2017-07-07 | 2019-01-10 | 有限会社メカノトランスフォーマ | 変位拡大機構、研磨装置、アクチュエータ、ディスペンサ、及びエアバルブ |
Also Published As
Publication number | Publication date |
---|---|
TW202200922A (zh) | 2022-01-01 |
KR20220144795A (ko) | 2022-10-27 |
JP6893710B1 (ja) | 2021-06-23 |
JP2021134916A (ja) | 2021-09-13 |
CN115151748A (zh) | 2022-10-04 |
WO2021172388A1 (ja) | 2021-09-02 |
JP2021134855A (ja) | 2021-09-13 |
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