WO2021172262A1 - セラミックヒータ及びその製法 - Google Patents

セラミックヒータ及びその製法 Download PDF

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Publication number
WO2021172262A1
WO2021172262A1 PCT/JP2021/006589 JP2021006589W WO2021172262A1 WO 2021172262 A1 WO2021172262 A1 WO 2021172262A1 JP 2021006589 W JP2021006589 W JP 2021006589W WO 2021172262 A1 WO2021172262 A1 WO 2021172262A1
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WO
WIPO (PCT)
Prior art keywords
heating element
resistance heating
concave groove
section
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/006589
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English (en)
French (fr)
Japanese (ja)
Inventor
赤尾　隆嘉
夏樹 平田
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NGK Insulators Ltd
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NGK Insulators Ltd
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Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to KR1020227027433A priority Critical patent/KR102777792B1/ko
Priority to JP2022503600A priority patent/JP7284339B2/ja
Priority to CN202180007507.8A priority patent/CN115152322B/zh
Publication of WO2021172262A1 publication Critical patent/WO2021172262A1/ja
Priority to US17/817,048 priority patent/US12557183B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/023—Industrial applications
    • H05B1/0233—Industrial applications for semiconductors manufacturing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/06—Heater elements structurally combined with coupling elements or holders
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/18—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being embedded in an insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/017—Manufacturing methods or apparatus for heaters

Definitions

  • the present invention relates to a ceramic heater and a method for producing the same.
  • Patent Document 1 discloses a ceramic heater provided with a resistance heating element on the surface of a ceramic substrate and a method for producing the same.
  • the resistance heating element is divided into a plurality of sections, a resistance value is measured for each section, and a laser is set in a section having a low resistance value based on the measured resistance value. It is also disclosed that the resistance value of the resistance heating element is adjusted by irradiating light to form a groove.
  • the connecting portion between the concave grooves may be partially deepened because the laser beam is repeatedly irradiated. .. At such a partially deepened portion, the resistance becomes too high, and the heat generated at that portion becomes larger than the others, which may impair the heat equalization of the surface of the ceramic heater.
  • the present invention has been made to solve such a problem, and an object of the present invention is to improve the heat equalization of the surface of a ceramic heater provided with a resistance heating element having a concave groove.
  • the ceramic heater of the present invention A ceramic heater equipped with a resistance heating element
  • the resistance heating element is divided into a plurality of sections from one end to the other end of the resistance heating element.
  • a concave groove is provided along the longitudinal direction of the resistance heating element on the surface of the resistance heating element for each section.
  • the connecting portion between the concave grooves provided in the adjacent sections is provided with a convex portion extending along the connecting portion. It is a thing.
  • the convex portion when the cross section of the convex portion cut along the longitudinal direction of the resistance heating element is viewed, the convex portion may appear as a mountain shape having a hem width of 95 ⁇ m or less. .. In this way, since the width of the hem of the convex portion is sufficiently small, the current flowing through the resistance heating element hardly enters the convex portion and flows.
  • the depth of the concave groove is set to the same value (tolerance and error are allowed) regardless of the section, and the width of the concave groove is set for each section. May be good. In this way, the resistance of each section of the resistance heating element can be adjusted by adjusting the width of the concave groove.
  • the center line of the concave groove may coincide with the center line of the resistance heating element (tolerance and error are allowed).
  • the temperature distribution in the width direction of the resistance heating element becomes substantially symmetrical with the center line in between, so that it is easy to maintain good heat uniformity on the surface of the ceramic heater.
  • the concave groove may not be provided in a portion of the resistance heating element having a low heat removing action. If a concave groove is provided in a portion of the resistance heating element where the heat removal action is low, the resistance at that portion increases and the amount of heat generated increases, but heat is difficult to escape, so that hot spots are likely to occur. Here, since the concave groove is not provided in the portion of the resistance heating element where the heat removal action is low, such a hot spot is unlikely to occur.
  • the portion having a low heat removal action include terminal portions provided at one end or the other end of the resistance heating element when the cooling plate is adhered or joined to the lower surface of the ceramic heater. A power supply terminal that penetrates the cooling plate is connected to the terminal portion, but since the power supply terminal has poor heat drawing as compared with the cooling plate, the terminal portion has a low heat removal action.
  • the longitudinal direction of the shape of the concave groove in plan view may be straight regardless of whether the shape of the section in plan view is straight or curved. In this way, when the concave groove is formed by the laser beam, the concave groove can be formed with high accuracy.
  • the width of the hem of the convex portion is the width direction of the concave groove of the connecting portion regardless of whether the longitudinal direction of the shape in plan view of the section is straight or curved. Except for both ends of the above, it may be constant (tolerances and errors are acceptable). In this way, the distribution of resistance in the width direction of the resistance heating element is hardly generated at the connecting portion between the concave grooves.
  • the method for producing a ceramic heater of the present invention is (A) A step of forming a resistance heating element or a precursor thereof having a predetermined pattern on the surface of the first ceramic fired layer or the unfired layer. (B) A laser beam is irradiated to each of the sections obtained by dividing the resistance heating element or its precursor into a plurality of sections along the longitudinal direction thereof to form a concave groove along the longitudinal direction of the resistance heating element or its precursor. The process of forming and (C) A step of arranging a second ceramic unfired layer on the surface of the first ceramic fired layer or the unfired layer so as to cover the resistance heating element or its precursor to obtain a laminated body.
  • step (D) A step of obtaining a ceramic heater provided with the resistance heating element inside a ceramic substrate by hot-press firing the laminate. Including In the step (b), a convex portion extending along the connecting portion remains in the connecting portion between the concave grooves provided in the adjacent sections. It is a thing.
  • a convex portion extending along the connecting portion remains at the connecting portion between the concave grooves provided in the adjacent sections.
  • the concave groove provided in one section of the adjacent sections is prevented from being exposed to the laser beam for forming the concave groove in the other section.
  • step (b) when the cross section of the convex portion cut along the longitudinal direction of the resistance heating element is viewed, the convex portion may appear as a mountain shape having a hem width of 95 ⁇ m or less. ..
  • the "ceramic fired layer” is a fired ceramic layer, and may be, for example, a layer of a ceramic fired body (sintered body) or a layer of a ceramic calcined body.
  • the "ceramic unfired layer” is a layer of ceramic that has not been fired, and may be, for example, a layer of ceramic powder, or a ceramic molded product (a dried molded product, a dried and degreased molded product, or the like. It may be a layer (including a ceramic green sheet or the like).
  • the "precursor of a resistance heating element” means a thing that becomes a resistance heating element by firing, for example, a thing printed with a resistance heating element paste.
  • the "laminated body” may have a second ceramic unfired layer arranged on the surface of the first ceramic fired layer or the unfired layer so as to cover the resistance heating element or its precursor, or the second ceramic not yet fired.
  • Another layer for example, a third ceramic fired layer or an unfired layer provided with an electrode or a precursor thereof on the second ceramic unfired layer side
  • FIG. 3 is a manufacturing process diagram of the electrostatic chuck heater 10.
  • FIG. 5 is an explanatory diagram of a step of forming a concave groove U in the resistance heating element precursor 66. Sectional drawing of wire groove 68. Sectional drawing of the groove U.
  • FIG. 3 is a cross-sectional view when the connecting portion between the concave grooves U is cut.
  • FIG. 3 is a cross-sectional view of a connecting portion between adjacent concave grooves R in a reference example.
  • FIG. 1 is a perspective view of the electrostatic chuck heater 10 of the present embodiment
  • FIG. 2 is a cross-sectional view taken along the line AA of FIG.
  • FIG. 4 is a perspective view of the portion shown in the rectangle of FIG. 3
  • FIG. 5 is a cross-sectional view taken along the line BB of FIG. 3
  • FIG. 6 is an explanatory view of how to obtain the inclination angle ⁇
  • FIG. 9 is a plan view of a curved portion of the resistance heating element 16.
  • the electrostatic chuck heater 10 has an electrostatic electrode 14 and a resistance heating element 16 embedded inside a ceramic substrate 12.
  • a cooling plate 22 is adhered to the back surface of the electrostatic chuck heater 10 via an adhesive layer 26.
  • the ceramic substrate 12 is a disk made of ceramics (for example, made of alumina or aluminum nitride).
  • a wafer mounting surface 12a on which the wafer W can be mounted is provided on the surface of the ceramic substrate 12.
  • the electrostatic electrode 14 is a circular conductive thin film substantially parallel to the wafer mounting surface 12a.
  • a rod-shaped terminal (not shown) is electrically connected to the electrostatic electrode 14.
  • the rod-shaped terminal extends downward from the lower surface of the electrostatic electrode 14 through the ceramic substrate 12 and then through the cooling plate 22.
  • the rod-shaped terminal is electrically insulated from the cooling plate 22.
  • the portion of the ceramic substrate 12 above the electrostatic electrode 14 functions as a dielectric layer.
  • Examples of the material of the electrostatic electrode 14 include tungsten carbide, metallic tungsten, molybdenum carbide, metallic molybdenum, and the like, and it is preferable to select one having a coefficient of thermal expansion close to that of the ceramic to be used.
  • the resistance heating element 16 is a strip-shaped conductive line provided on a surface substantially parallel to the wafer mounting surface 12a.
  • the strip-shaped conductive line is not particularly limited, but may be set to, for example, a width of 0.1 to 10 mm, a thickness of 0.001 to 0.1 mm, and a line-to-line distance of 0.1 to 5 mm.
  • the resistance heating element 16 is wired from one terminal portion 18 to the other terminal portion 20 in a one-stroke manner so as not to intersect the strip-shaped conductive lines over the entire ceramic substrate 12.
  • Power supply terminals (not shown) are individually electrically connected to the terminal portions 18 and 20 of the resistance heating element 16. These feeding terminals extend downward from the lower surface of the resistance heating element 16 through the ceramic substrate 12 and then through the cooling plate 22.
  • these power supply terminals are electrically insulated from the cooling plate 22.
  • the material of the resistance heating element 16 include tungsten carbide, metallic tungsten, molybdenum carbide, and metallic molybdenum, and it is preferable to select a material having a coefficient of thermal expansion close to that of the ceramic to be used.
  • one terminal portion 18 to the other terminal portion 20 are virtually divided into a plurality of sections S (see a partially enlarged view of FIG. 3).
  • the method of defining the section S in the present embodiment is as follows. That is, a division point for dividing the center line 16c of the resistance heating element 16 by a certain length is set, a division line orthogonal to the center line 16c is drawn at each division point, and adjacent division lines of the resistance heating element 16 are drawn. Let the section S be between them. In this case, the length of each section S is constant.
  • a concave groove R is provided on the surface of the resistance heating element 16 for each section S along the longitudinal direction of the resistance heating element 16.
  • the center line Rc when the concave groove R is viewed from above coincides with the center line 16c when the resistance heating element 16 is viewed from above. It should be noted that the center line Rc and the center line 16c are considered to be in agreement even if there is a deviation due to a tolerance or an error.
  • the width of the concave groove R is set for each section S. For example, in the partially enlarged view in the rectangle of FIG. 3 and FIG. 4, the width of the concave groove R (recessed groove R1, R2) provided in the two adjacent sections S (sections S1 and S2) is larger than that of the concave groove R1.
  • the concave groove R2 is wider.
  • the widths of the concave grooves R provided in the two adjacent sections S are set discretely.
  • the widths of the concave grooves R provided in the two adjacent sections S may be the same.
  • the width of the concave groove R has a correlation with the resistance and the amount of heat generated in the section S in which the concave groove R is provided. Therefore, the width of the concave groove R is set based on the resistance and the amount of heat generated in the section S of the resistance heating element 16.
  • the resistance heating element 16 may be divided into two sections S from one terminal portion 18 to the other terminal portion 20, or may be divided into three or more sections S.
  • the height of the mountain-shaped convex portion Rm is the same as the depth of the concave groove R, the length a of the upper side is 20 ⁇ m or more and 50 ⁇ m or less, and the length b of the lower side is 95 ⁇ m or less, which is larger than the length a of the upper side. Long is preferred.
  • the length b of the lower side is preferably 20 ⁇ m or more.
  • the inclination angle ⁇ of the side wall surface (inclined surface) of the convex portion Rm is not particularly limited, but is preferably 10 ° to 30 °, for example.
  • the depth of the concave groove R is set to the same value regardless of the section S.
  • the width of the concave groove R it is possible to adjust the resistance and the amount of heat generated in the section S in which the concave groove R is provided.
  • the bottom surface of the groove R is not a perfect horizontal surface and has small irregularities. Therefore, the depth of the concave groove R is an average depth.
  • the depth of the groove R is preferably less than half the thickness of the resistance heating element 16, and may be, for example, 10 ⁇ m or more and 30 ⁇ m or less.
  • a target range of 0.5 mm is set in the width direction of the hem so as to include one side surface (slope) of the convex portion Rm.
  • the bottom surface of the resistance heating element 16 is corrected so as to be substantially horizontal, and one end of the target range (the left end in FIG. 6) and the center of the convex portion Rm are substantially aligned. Make sure that the bottom surface of the resistance heating element 16 is horizontal.
  • the height of the resistance heating element 16 is acquired by image analysis of an SEM photograph at a pitch of 2.5 ⁇ m in the width direction over the entire target range. Then, a graph (histogram) is created in which the height of the resistance heating element 16 is on the horizontal axis and the frequency is on the vertical axis.
  • the height data interval is 1 ⁇ m.
  • An example of the histogram is shown in FIG.
  • a first group with a low height and a second group with a high height appear.
  • the first group is the height group of the bottom surface of the concave groove R
  • the second group is the height group of the top surface of the resistance heating element 16.
  • the highest frequency value (mode) in the first group is regarded as the bottom height HL of the concave groove R
  • the highest frequency value (mode) in the second group is the resistance heating element 16 It is regarded as the top height HU of.
  • the value obtained by subtracting HL from HU is defined as the depth D of the concave groove R.
  • the value obtained by adding 0.1D to HL is defined as the reference height, and the width of the convex portion Rm at this reference height is defined as the width of the hem of the convex portion Rm (length b of the lower side).
  • the upper limit value is a value obtained by subtracting 0.1D from the HU, and the height obtained at a pitch of 2.5 ⁇ m between the reference height and the upper limit value on one side surface of the convex portion Rm.
  • the regression line is obtained using the above, and the angle formed by the regression line with the horizon is defined as the inclination angle ⁇ .
  • the longitudinal direction of the shape of the concave groove R in plan view is straight.
  • the shape (rectangle) in a plan view of the adjacent sections S (S1, S2) is straight in the longitudinal direction, and the concave groove R (R1, R2).
  • the shape (rectangle) in a plan view is also straight in the longitudinal direction.
  • the longitudinal direction of the shape (fan shape) in which adjacent sections S (S11, S12, S13) are viewed in a plan view is a curve (arc), but the concave groove R (R11, R12, R13) is viewed in a plan view.
  • the shape (trapezoid) is straight in the longitudinal direction. Therefore, as will be described later, the concave groove R can be formed with high accuracy by the laser beam.
  • the width of the mountain-shaped hem of the convex portion Rm (the length b of the lower side in FIG. 5). Is preferably substantially constant except for the vicinity of both ends of the concave groove R in the width direction of the connecting portion. By doing so, the distribution of resistance hardly occurs in the width direction of the resistance heating element 16 at the connecting portion between the concave grooves R.
  • the terminal portions 18 and 20 of the resistance heating element 16 are not provided with the concave groove R. Power supply terminals inserted into the through holes of the cooling plate 22 are connected to the terminal portions 18 and 20, but the power supply terminals are poorly heated as compared with the cooling plate 22. Therefore, the terminal portions 18 and 20 are located where the heat removal action is low.
  • the cooling plate 22 is made of metal (for example, made of aluminum) and has a built-in refrigerant passage 24 through which a refrigerant (for example, water) can pass.
  • the refrigerant passage 24 is formed so that the refrigerant passes over the entire surface of the ceramic substrate 12.
  • the refrigerant passage 24 is provided with a refrigerant supply port and a refrigerant discharge port (neither is shown).
  • the wafer W is placed on the wafer mounting surface 12a of the electrostatic chuck heater 10, and a voltage is applied between the electrostatic electrode 14 and the wafer W to cause the wafer W to be placed on the wafer W by electrostatic force. Adsorbs to.
  • the wafer W is subjected to plasma CVD film formation or plasma etching.
  • the temperature of the wafer W is controlled to be constant by applying a voltage to the resistance heating element 16 to heat the wafer W or circulating the refrigerant through the refrigerant passage 24 of the cooling plate 22 to cool the wafer W. do.
  • a voltage is applied between one terminal portion 18 and the other terminal portion 20 of the resistance heating element 16. Then, a current flows through the resistance heating element 16, which causes the resistance heating element 16 to generate heat and heat the wafer W.
  • the resistance heating element 16 is divided into a plurality of sections S from one terminal portion 18 to the other terminal portion 20, and a concave groove R is provided on the surface of the resistance heating element 16 for each section S. ing.
  • the cross-sectional area of the resistance heating element 16 becomes small, so that the resistance becomes high and the amount of heat generated becomes large.
  • the cross-sectional area of the resistance heating element 16 is large, so that the resistance is low and the amount of heat generated is small. Therefore, by adjusting the width of the concave groove U in each section S, the calorific value of each section S of the resistance heating element 16 is made to match the target calorific value.
  • FIG. 10 is a manufacturing process diagram of the electrostatic chuck heater 10
  • FIG. 11 is an explanatory diagram of a process of forming a concave groove U in the resistance heating element precursor 66
  • FIGS. 12 and 13 show the width direction of the resistance heating element precursor 66.
  • FIG. 14 shows the resistance heating element 66 vertically on the surface including the longitudinal direction of the resistance heating element 66.
  • It is sectional drawing of the connection part of the concave groove U which is adjacent to each other when cut.
  • an alumina substrate is used as the ceramic substrate 12 will be described as an example.
  • molded product (see FIG. 10 (A))
  • Disk-shaped lower and upper molded bodies 51 and 53 are produced.
  • a slurry containing an alumina powder for example, an average particle size of 0.1 to 10 ⁇ m
  • a solvent for example, an average particle size of 0.1 to 10 ⁇ m
  • a dispersant for example, an average particle size of 0.1 to 10 ⁇ m
  • a gelling agent is put into a molding die, and gel is gelled in the molding die. It is prepared by chemically reacting an agent to gel a slurry and then releasing the slurry.
  • the molded bodies 51 and 53 thus obtained are referred to as mold cast molded bodies.
  • the solvent is not particularly limited as long as it dissolves the dispersant and the gelling agent, and is, for example, a hydrocarbon solvent (toluene, xylene, solvent naphtha, etc.), an ether solvent (ethylene glycol monoethyl ether, butyl).
  • a hydrocarbon solvent toluene, xylene, solvent naphtha, etc.
  • an ether solvent ethylene glycol monoethyl ether, butyl
  • a solvent having two or more ester bonds such as a polybasic acid ester (for example, dimethyl glutarate) and an acid ester for a polyhydric alcohol (for example, triacetin).
  • the dispersant is not particularly limited as long as it uniformly disperses the alumina powder in the solvent.
  • Examples include copolymers.
  • the gelling agent may contain, for example, isocyanates, polyols and a catalyst.
  • isocyanates are not particularly limited as long as they are substances having an isocyanate group as a functional group, and examples thereof include tolylene diisocyanate (TDI), diphenylmethane diisocyanate (MDI), and modified products thereof.
  • TDI tolylene diisocyanate
  • MDI diphenylmethane diisocyanate
  • modified products thereof modified products thereof.
  • TDI tolylene diisocyanate
  • MDI diphenylmethane diisocyanate
  • a reactive functional group other than the isocyanate group may be contained, and further, a large number of reactive functional groups such as polyisocyanate may be contained.
  • the polyols are not particularly limited as long as they are substances having two or more hydroxyl groups that can react with isocyanate groups, and for example, ethylene glycol (EG), polyethylene glycol (PEG), propylene glycol (PG), polypropylene glycol (PPG). , Polytetramethylene glycol (PTMG), polyhexamethylene glycol (PHMG), polyvinyl alcohol (PVA) and the like.
  • the catalyst is not particularly limited as long as it is a substance that promotes the urethane reaction between isocyanates and polyols, and examples thereof include triethylenediamine, hexanediamine, and 6-dimethylamino-1-hexanol.
  • a solvent and a dispersant are added to the alumina powder at a predetermined ratio, and these are mixed over a predetermined time to prepare a slurry precursor, and then gelation is performed on the slurry precursor. It is preferable to add an agent, mix and vacuum defoam to form a slurry.
  • the mixing method for preparing the slurry precursor and the slurry is not particularly limited, and for example, a ball mill, a self-revolution type stirring, a vibration type stirring, a propeller type stirring and the like can be used.
  • the chemical reaction (urethane reaction) of the gelling agent starts to proceed with the passage of time in the slurry in which the gelling agent is added to the slurry precursor, it is preferable to quickly pour it into the molding die.
  • the slurry poured into the molding mold is gelled by a chemical reaction of the gelling agent contained in the slurry.
  • the chemical reaction of the gelling agent is a reaction in which isocyanates and polyols undergo a urethane reaction to form a urethane resin (polyurethane).
  • the slurry gels due to the reaction of the gelling agent, and the urethane resin functions as an organic binder.
  • the degreasing temperature may be appropriately set according to the type of organic matter contained, but may be set to, for example, 400 to 600 ° C.
  • the atmosphere may be an atmospheric atmosphere, an inert atmosphere, or a vacuum atmosphere.
  • the calcined bodies 51 and 53 after degreasing are performed in order to increase the strength and facilitate handling.
  • the calcination temperature is not particularly limited, but may be set to, for example, 750 to 900 ° C.
  • the atmosphere may be an atmospheric atmosphere, an inert atmosphere, or a vacuum atmosphere.
  • the resistance heating element precursor 66 is formed by printing a paste for a resistance heating element on one side of the lower calcined body 61 so as to have the same pattern as the resistance heating element 16 and then drying the paste.
  • the electrostatic electrode precursor 64 is formed by printing an electrostatic electrode paste on one side of the upper calcined body 63 so as to have the same shape as the electrostatic electrode 14 and then drying the paste.
  • Both pastes contain an alumina powder, a conductive powder, a binder, and a solvent.
  • the alumina powder for example, the same ones used at the time of producing the molded bodies 51 and 53 can be used.
  • the conductive powder include tungsten carbide powder.
  • binder examples include a cellulose-based binder (ethyl cellulose and the like), an acrylic-based binder (polymethyl methacrylate and the like) and a vinyl-based binder (polyvinyl butyral and the like).
  • solvent examples include terpineol and the like.
  • printing method examples include a screen printing method. Printing is performed multiple times. Therefore, each of the precursors 66 and 64 has a multi-layer structure.
  • a concave groove U is formed in the resistance heating element precursor 66 provided on one side of the lower calcined body 61.
  • the portion from one end to the other end of the resistance heating element precursor 66 is virtually divided into a plurality of sections T as in the section S of the resistance heating element 16.
  • the recess U is formed on the surface of the resistance heating element precursor 66 for each section T.
  • the concave groove U is formed by the picosecond laser processing machine 30 shown in FIG.
  • the picosecond laser processing machine 30 forms the line groove 68 by irradiating the laser beam 32 along the longitudinal direction of the resistance heating element precursor 66 while driving the motor of the galvano mirror and the motor of the stage.
  • the width of the line groove 68 is not particularly limited, but is preferably 10 to 100 ⁇ m, more preferably 20 to 60 ⁇ m, for example.
  • the picosecond laser processing machine 30 forms a concave groove U by providing a plurality of such line grooves 68 so as to overlap each other in the width direction of the resistance heating element precursor 66.
  • the laser beam 32 has the highest energy at the center of the irradiation position, and the energy becomes lower toward the outside of the center. Therefore, the cross section of the line groove 68 has a shape close to that of Gaussian as shown in FIG.
  • the pitch of the line groove 68 is set to be half the width of the line groove 68
  • the cross section of the laser beam 32 when forming the next line groove 68 from the current line groove 68 is the dotted line in FIG.
  • the cross section of the laser beam 32 when forming the line groove 68 is as shown by the alternate long and short dash line in FIG. 12, and the cross section of the laser beam 32 when forming the next line groove 68 is as shown by the alternate long and short dash line in FIG. Therefore, when all of these line grooves 68 have been formed, a concave groove U having a substantially flat bottom surface can be obtained as shown in FIG.
  • the concave groove U is an aggregate of the wire grooves 68.
  • the side wall surface of the concave groove U is inclined with respect to the horizontal plane (the surface of the lower calcined body 61).
  • the inclination angle ⁇ (see FIG. 13) is preferably 45 ° or less. Further, considering the workability of the laser beam 32, the inclination angle ⁇ is preferably 18 ° or more.
  • the inclination angle ⁇ changes depending on the output of the laser beam 32 and the number of times the laser beam 32 is processed (the number of times the laser beam 32 irradiates the same portion).
  • the tilt angle ⁇ can be obtained in the same manner as the tilt angle ⁇ described above. In that case, instead of the SEM photograph, data obtained by measuring the height of the resistance heating element precursor 66 in the width direction of the resistance heating element precursor 66 at a pitch of 2.5 ⁇ m using a stylus type measuring device is used.
  • the moving area when the irradiated portion of the laser beam 32 is moved along the longitudinal direction of the section T includes an acceleration area from a stopped state to reach the target speed, a constant speed area moving at the target speed (constant speed), and a constant speed area. There is a deceleration area from the target speed to the stop.
  • the laser beam 32 is not irradiated in the acceleration area or the deceleration area but is irradiated in the constant speed area.
  • the shape of the line groove 68 is straight regardless of whether the shape of the section T is straight or curved. preferable.
  • the concave groove U When the concave groove U is formed by a plurality of straight-shaped line grooves 68 when the section T is a curve, the shape of the completed concave groove U in a plan view becomes a trapezoid or a parallelogram. Therefore, the length of each wire groove 68 may be different. In such a case, if the length of the acceleration area and the length of the deceleration area are constant regardless of the length of the line groove 68, and the length of the constant speed area is controlled to be changed according to the length of the line groove 68, Laser processing becomes easier.
  • the concave grooves U (U1, U2) in the adjacent sections T (T1, T2) are formed so as not to overlap each other.
  • FIG. 14 when the cross section of the resistance heating element precursor 66 cut vertically on the surface including the width direction of the resistance heating element precursor 66 is seen, it is provided in the adjacent sections T (T1, T2).
  • a mountain-shaped convex portion Um having a hem length of 95 ⁇ m or less is formed at the connecting portion between the formed concave grooves U (U1, U2).
  • the apex of the side wall surface (inclined surface, inclination angle ⁇ ) near the boundary between the section T1 and the section T2 is the resistance heating element precursor 66 before forming the U groove U1. It remains high.
  • the apex of the side wall surface (inclined surface) near the boundary between the section T1 and the section T2 remains at the height of the resistance heating element precursor 66 before forming the U groove U2. Is. That is, the height of the convex portion Um coincides with the depth of the concave grooves U1 and U2. In this way, the concave grooves U1 and U2 are formed so that the Gaussian-shaped laser beam 32 is not applied to the boundary between the section T1 and the section T2.
  • the thickness distribution of the resistance heating element precursor 66 before forming the concave groove U is measured using a laser displacement meter. This measurement is performed at a plurality of predetermined measurement points along the center line of the resistance heating element precursor 66. In the present embodiment, the measurement point is the intersection of the center line of the resistance heating element precursor 66 and the section line that divides the section T. At each measurement point, the difference (thickness difference) between the predetermined thickness target value and the thickness measurement value is obtained. The target value of the thickness is set based on the target value of the resistance when the resistance heating element precursor 66 is fired to obtain the resistance heating element 16.
  • the number of line grooves 68 formed in the section from the measurement point to the adjacent measurement point is determined.
  • the depth of the wire groove 68 is a predetermined value. Therefore, by changing the number of the wire grooves 68, the width of the concave groove U changes, and the cross-sectional area of the concave groove U and thus the resistance heating element precursor 66 changes. That is, the concave groove U is formed so that the cross-sectional areas of the resistance heating element precursor 66 at the plurality of measurement points are each predetermined target cross-sectional areas.
  • Alumina powder is laminated on the surface of the lower part of the calcined body 61 on which the resistance heating element precursor 66 is provided so as to cover the resistance heating element precursor 66, and the upper part of the calcined body 63 is electrostatically charged.
  • a laminated body 50 is obtained by laminating and molding so that the surface on which the electrode precursor 64 is provided is in contact with the alumina powder.
  • the laminated body 50 has a structure in which a disk-shaped alumina powder layer 62 having the same diameter as the calcined bodies 61 and 63 is sandwiched between the calcined bodies 61 and 63 at the upper and lower portions.
  • the alumina powder the same ones used at the time of producing the molded bodies 51 and 53 can be used.
  • Hot press firing (see FIG. 10 (F)
  • the obtained laminate 50 is hot-press fired while applying pressure in the thickness direction.
  • the laminated body 50 is compressed in the thickness direction because it is dammed by the mold so as not to spread in the radial direction.
  • the compressibility varies depending on the press pressure, but is, for example, 30 to 70%.
  • the resistance heating element 66 is fired to become the resistance heating element 16
  • the electrostatic electrode precursor 64 is fired to become the electrostatic electrode 14
  • the calcined bodies 61 and 63 and the alumina powder layer 62 are sintered. And integrated to form the ceramic substrate 12.
  • the section T, the concave groove U, and the convex portion Um become the section S, the concave groove R, and the convex portion Rm.
  • the electrostatic chuck heater 10 is obtained.
  • the press pressure is preferably 30 to 300 kgf / cm 2, and more preferably 50 to 250 kgf / cm 2 .
  • the maximum temperature may be appropriately set depending on the type and particle size of the ceramic powder, but is preferably set in the range of 1000 to 2000 ° C.
  • the atmosphere may be appropriately selected from the atmospheric atmosphere, the inert atmosphere, and the vacuum atmosphere.
  • the electrostatic chuck heater 10 of the present embodiment corresponds to the ceramic heater of the present invention.
  • the formation of the resistance heating element precursor of the present embodiment corresponds to the step (a) of the present invention, and the formation of the concave groove (see FIGS. 10 (D) and 11 to 14).
  • step (b) preparation of the laminate (see FIG. 10 (E)) corresponds to step (c)
  • hot press firing corresponds to step (d).
  • the calcined body 61 corresponds to the first ceramic fired layer
  • the alumina powder layer 62 corresponds to the second ceramic unfired layer.
  • a current flows in the longitudinal direction of the resistance heating element 16.
  • a mountain-shaped convex portion Rm extending along the connecting portion exists in the connecting portion between the concave grooves R (R1 and R2), but the current flowing through the resistance heating element 16 enters the convex portion Rm and flows. Not much. Therefore, the resistance of the current flowing through the adjacent sections S (S1, S2) is not so affected by the presence of the convex portion Rm. Further, when it is attempted to continuously form the concave grooves R (R1, R2) of the adjacent sections S (S1, S2) without a gap, as shown in FIG. 15, the connecting portions of the concave grooves R (R1, R2) are connected to each other.
  • the resistance of the connecting portion Rn of the resistance heating element 16 may become higher than the others, and the heat generated by the connecting portion Rn may become too large, but this is not the case in the present embodiment. Therefore, the heat equalizing property of the surface of the electrostatic chuck heater 10 can be improved.
  • the convex portion Rm when looking at a cross section obtained by vertically cutting the resistance heating element 16 along the longitudinal direction of the resistance heating element 16, the convex portion Rm appears as a mountain shape having a hem width of 95 ⁇ m or less. Since the width of the hem of the convex portion Rm is sufficiently small as described above, the current flowing through the resistance heating element 16 hardly enters the convex portion Rm and flows.
  • the width of the hem of the convex portion Rm and the difference in surface temperature before and after the connecting portion was investigated, if the width of the hem of the convex portion Rm was 95 ⁇ m or less, the difference in surface temperature before and after the connecting portion was 0.1 ° C.
  • the height of the mountain-shaped convex portion Rm is the same as the depth of the concave groove R, the upper side is 20 ⁇ m or more and 50 ⁇ m or less, and the lower side is longer than the upper side.
  • the depth of the concave groove R is set to the same value regardless of the section S, and the width of the concave groove R is set for each section S. Therefore, the resistance of each section S of the resistance heating element 16 can be adjusted by adjusting the width of the concave groove R.
  • the center line Rc of the concave groove R coincides with the center line 16c of the resistance heating element 16. Therefore, since the temperature distribution in the width direction of the resistance heating element 16 becomes substantially symmetrical with the center line 16c in between, it is easy to maintain good heat equalization on the surface of the electrostatic chuck heater 10.
  • the concave groove R is not provided in the terminal portions 18 and 20 having a low heat removal action among the resistance heating elements 16.
  • the concave grooves R are provided in the terminal portions 18 and 20, the resistance of the terminal portions 18 and 20 increases and the amount of heat generated increases, but the heat is hard to escape, so that hot spots are likely to occur.
  • the concave grooves R are not provided in the terminal portions 18 and 20, such hot spots are unlikely to occur.
  • the longitudinal direction of the shape of the section S in a plan view is straight or curved
  • the longitudinal direction of the shape of the concave groove R in a plan view is straight, so that the concave groove R is formed by the laser beam.
  • the concave groove R can be formed with high accuracy.
  • the width of the mountain-shaped hem of the convex portion Rm is substantially constant, so that the concave groove R is connected to each other. The distribution of resistance rarely occurs in the width direction of the resistance heating element 16.
  • the adjacent sections T (T1, T2).
  • a mountain-shaped convex portion Um is left at the connecting portion between the concave grooves U (U1, U2) provided in the above.
  • the electrostatic chuck heater 10 is exemplified as the ceramic heater, but a ceramic heater that does not have the electrostatic electrode 14 may be used.
  • the laminated body 50 may be prepared by using the upper calcined body 63 having no electrostatic electrode precursor 64 and the laminated body 50 may be hot-press fired, or the upper calcined body 63 may be omitted. The laminate 50 may be produced and the laminate 50 may be hot-press fired.
  • the alumina powder layer 62 is exemplified as the second ceramic unfired layer, but an alumina molded body layer or an alumina green sheet may be used instead of the alumina powder layer 62.
  • an alumina molded body layer or an alumina green sheet may be used instead of the alumina powder layer 62.
  • a dried one may be used, or a dried and degreased one may be used.
  • the calcined body 61 is exemplified as the first ceramic fired layer, but an alumina sintered body may be used instead of the calcined body 61.
  • a ceramic molded body layer or a ceramic green sheet may be used instead of the first ceramic fired layer.
  • a dried one may be used, or one which has been dried and then degreased may be used.
  • the resistance heating element precursor 66 forming the concave groove U a paste for a resistance heating element is printed and then dried, but a product that is printed and dried and then degreased, or a product that is printed and dried is used. After degreasing, it may be calcined (or fired).
  • the resistance heating element 16 is wired on the entire ceramic substrate 12 so as not to intersect the strip-shaped conductive lines in a one-stroke manner, but the present invention is not particularly limited to this.
  • the ceramic substrate 12 may be divided into a plurality of zones, and a resistance heating element may be provided in each zone so as not to intersect the strip-shaped conductive lines.
  • each resistance heating element may adopt the same structure as the above-mentioned resistance heating element 16.
  • the electrostatic chuck heater 10 has a structure in which the electrostatic electrode 14 and the resistance heating element 16 are embedded in the ceramic substrate 12, but the electrostatic electrode 14 is embedded in the ceramic substrate 12 to resist.
  • a structure in which the heating element 16 is provided on the surface of the ceramic substrate 12 may be adopted.
  • the plurality of sections S are set to a certain length, but the present invention is not particularly limited to this.
  • the length may be set differently for each section S.
  • the height of the convex portion Rm is the same as the depth of the concave groove R, but the height of the convex portion Rm may be a value smaller than the depth of the concave groove R.
  • the width of the hem of the convex portion Rm is 95 ⁇ m or less, but instead of or in addition to this, the width of the hem of the convex portion Rm is 1 or more and 20 or less with respect to the depth of the concave groove R. You may do so. Even in this case, since the width of the hem of the convex portion Rm is sufficiently small, the current flowing through the resistance heating element 16 hardly enters the convex portion Rm and flows.
  • the height of the convex portion Rm is the same as the depth of the concave groove R, the length a of the upper side is 20 ⁇ m or more and 50 ⁇ m or less, and the length b of the lower side (width of the hem) is longer than that of the upper side.
  • the length a of the upper side of the convex portion Rm may be 0 or more and 9 or less with respect to the depth of the concave groove R.
  • the height of the convex portion Rm may be 0.3 or more and 1 or less with respect to the depth of the concave groove R. Even in this way, when the concave groove R is formed by the laser beam, the convex portion Rm can be surely left in the connecting portion between the concave grooves R.
  • a part of the plurality of sections S of the resistance heating element 16 does not have to have the concave groove R.
  • the ceramic heater of the present invention is used, for example, in a semiconductor manufacturing apparatus.
  • electrostatic chuck heater 10 electrostatic chuck heater, 12 ceramic substrate, 12a wafer mounting surface, 14 electrostatic electrode, 16 resistance heating element, 16c center line, 18, 20 terminals, 22 cooling plate, 24 refrigerant passage, 26 adhesive layer, 30 pico Second laser processing machine, 32 laser light, 50 laminated body, 51, 53 molded body, 61, 63 calcined body, 62 alumina powder layer, 64 electrostatic electrode precursor, 66 resistance heating element precursor, 68 wire groove, R, R1, R2 concave groove, Rm convex part, U, U1, U2 concave groove, S, S1, S2 section, T, T1, T2 section.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
PCT/JP2021/006589 2020-02-26 2021-02-22 セラミックヒータ及びその製法 Ceased WO2021172262A1 (ja)

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CN202180007507.8A CN115152322B (zh) 2020-02-26 2021-02-22 陶瓷加热器及其制法
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002190373A (ja) * 2000-12-19 2002-07-05 Ibiden Co Ltd セラミックヒータの製造方法
JP2006054125A (ja) * 2004-08-12 2006-02-23 Kyocera Corp ヒータとその製造方法、及びこれを用いたウェハ加熱装置
JP2006228633A (ja) * 2005-02-18 2006-08-31 Ngk Insulators Ltd 基板加熱装置の製造方法及び基板加熱装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU693152B2 (en) * 1994-01-31 1998-06-25 Nippon Tungsten Co., Ltd. Flat PTC heater and resistance value regulating method for the same
WO2001031978A1 (en) * 1999-10-22 2001-05-03 Ibiden Co., Ltd. Ceramic heater
JP2004296445A (ja) * 2000-07-06 2004-10-21 Ibiden Co Ltd セラミックヒータ、セラミックヒータの製造方法およびセラミックヒータの製造システム
KR100463434B1 (ko) * 2001-12-04 2004-12-23 삼성전기주식회사 매립된 레지스터를 갖는 인쇄회로기판 및 이의 제조방법
US7361865B2 (en) 2003-08-27 2008-04-22 Kyocera Corporation Heater for heating a wafer and method for fabricating the same
JP5458050B2 (ja) * 2011-03-30 2014-04-02 日本碍子株式会社 静電チャックの製法
JP2013153129A (ja) * 2011-09-29 2013-08-08 Rohm Co Ltd チップ抵抗器および抵抗回路網を有する電子機器
JP6049509B2 (ja) * 2012-03-28 2016-12-21 日本碍子株式会社 セラミックヒーター、ヒーター電極及びセラミックヒーターの製法
JP6049510B2 (ja) * 2013-03-21 2016-12-21 日本碍子株式会社 セラミックヒータ及びその製法
JP6804828B2 (ja) * 2015-04-20 2020-12-23 日本特殊陶業株式会社 セラミックヒータ及び静電チャック
KR101771212B1 (ko) * 2015-09-02 2017-09-05 정권열 고데기
JP6584286B2 (ja) * 2015-10-26 2019-10-02 日本発條株式会社 ヒータユニット
US10681778B2 (en) * 2017-11-21 2020-06-09 Watlow Electric Manufacturing Company Integrated heater and method of manufacture

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002190373A (ja) * 2000-12-19 2002-07-05 Ibiden Co Ltd セラミックヒータの製造方法
JP2006054125A (ja) * 2004-08-12 2006-02-23 Kyocera Corp ヒータとその製造方法、及びこれを用いたウェハ加熱装置
JP2006228633A (ja) * 2005-02-18 2006-08-31 Ngk Insulators Ltd 基板加熱装置の製造方法及び基板加熱装置

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CN115152322A (zh) 2022-10-04
CN115152322B (zh) 2026-02-17
US20220377850A1 (en) 2022-11-24
KR20220124780A (ko) 2022-09-14
KR102777792B1 (ko) 2025-03-10
TW202143362A (zh) 2021-11-16

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