KR102777792B1 - 세라믹 히터 및 그 제법 - Google Patents

세라믹 히터 및 그 제법 Download PDF

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Publication number
KR102777792B1
KR102777792B1 KR1020227027433A KR20227027433A KR102777792B1 KR 102777792 B1 KR102777792 B1 KR 102777792B1 KR 1020227027433 A KR1020227027433 A KR 1020227027433A KR 20227027433 A KR20227027433 A KR 20227027433A KR 102777792 B1 KR102777792 B1 KR 102777792B1
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South Korea
Prior art keywords
resistance heating
heating element
concave groove
section
ceramic
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English (en)
Korean (ko)
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KR20220124780A (ko
Inventor
다카요시 아카오
나츠키 히라타
Original Assignee
엔지케이 인슐레이터 엘티디
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Publication of KR20220124780A publication Critical patent/KR20220124780A/ko
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Publication of KR102777792B1 publication Critical patent/KR102777792B1/ko
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/023—Industrial applications
    • H05B1/0233—Industrial applications for semiconductors manufacturing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H05B3/06—Heater elements structurally combined with coupling elements or holders
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/18—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being embedded in an insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002—Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/003—Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/017—Manufacturing methods or apparatus for heaters

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
KR1020227027433A 2020-02-26 2021-02-22 세라믹 히터 및 그 제법 Active KR102777792B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020030725 2020-02-26
JPJP-P-2020-030725 2020-02-26
PCT/JP2021/006589 WO2021172262A1 (ja) 2020-02-26 2021-02-22 セラミックヒータ及びその製法

Publications (2)

Publication Number Publication Date
KR20220124780A KR20220124780A (ko) 2022-09-14
KR102777792B1 true KR102777792B1 (ko) 2025-03-10

Family

ID=77491124

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227027433A Active KR102777792B1 (ko) 2020-02-26 2021-02-22 세라믹 히터 및 그 제법

Country Status (6)

Country Link
US (1) US12557183B2 (https=)
JP (1) JP7284339B2 (https=)
KR (1) KR102777792B1 (https=)
CN (1) CN115152322B (https=)
TW (1) TWI768727B (https=)
WO (1) WO2021172262A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024119117A (ja) * 2023-02-22 2024-09-03 日本特殊陶業株式会社 保持部材および保持部材の製造方法
KR102731017B1 (ko) 2023-10-30 2024-11-19 주식회사 미코세라믹스 세라믹 서셉터

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU693152B2 (en) * 1994-01-31 1998-06-25 Nippon Tungsten Co., Ltd. Flat PTC heater and resistance value regulating method for the same
WO2001031978A1 (en) * 1999-10-22 2001-05-03 Ibiden Co., Ltd. Ceramic heater
JP2004296445A (ja) * 2000-07-06 2004-10-21 Ibiden Co Ltd セラミックヒータ、セラミックヒータの製造方法およびセラミックヒータの製造システム
JP2002190373A (ja) 2000-12-19 2002-07-05 Ibiden Co Ltd セラミックヒータの製造方法
KR100463434B1 (ko) * 2001-12-04 2004-12-23 삼성전기주식회사 매립된 레지스터를 갖는 인쇄회로기판 및 이의 제조방법
US7361865B2 (en) 2003-08-27 2008-04-22 Kyocera Corporation Heater for heating a wafer and method for fabricating the same
JP2006054125A (ja) * 2004-08-12 2006-02-23 Kyocera Corp ヒータとその製造方法、及びこれを用いたウェハ加熱装置
JP2006228633A (ja) 2005-02-18 2006-08-31 Ngk Insulators Ltd 基板加熱装置の製造方法及び基板加熱装置
JP5458050B2 (ja) * 2011-03-30 2014-04-02 日本碍子株式会社 静電チャックの製法
JP2013153129A (ja) * 2011-09-29 2013-08-08 Rohm Co Ltd チップ抵抗器および抵抗回路網を有する電子機器
JP6049509B2 (ja) * 2012-03-28 2016-12-21 日本碍子株式会社 セラミックヒーター、ヒーター電極及びセラミックヒーターの製法
JP6049510B2 (ja) * 2013-03-21 2016-12-21 日本碍子株式会社 セラミックヒータ及びその製法
JP6804828B2 (ja) * 2015-04-20 2020-12-23 日本特殊陶業株式会社 セラミックヒータ及び静電チャック
KR101771212B1 (ko) * 2015-09-02 2017-09-05 정권열 고데기
JP6584286B2 (ja) * 2015-10-26 2019-10-02 日本発條株式会社 ヒータユニット
US10681778B2 (en) * 2017-11-21 2020-06-09 Watlow Electric Manufacturing Company Integrated heater and method of manufacture

Also Published As

Publication number Publication date
JPWO2021172262A1 (https=) 2021-09-02
US12557183B2 (en) 2026-02-17
JP7284339B2 (ja) 2023-05-30
WO2021172262A1 (ja) 2021-09-02
TWI768727B (zh) 2022-06-21
CN115152322A (zh) 2022-10-04
CN115152322B (zh) 2026-02-17
US20220377850A1 (en) 2022-11-24
KR20220124780A (ko) 2022-09-14
TW202143362A (zh) 2021-11-16

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