WO2021153267A1 - 回収機構、基板処理装置及び回収方法 - Google Patents
回収機構、基板処理装置及び回収方法 Download PDFInfo
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- WO2021153267A1 WO2021153267A1 PCT/JP2021/001216 JP2021001216W WO2021153267A1 WO 2021153267 A1 WO2021153267 A1 WO 2021153267A1 JP 2021001216 W JP2021001216 W JP 2021001216W WO 2021153267 A1 WO2021153267 A1 WO 2021153267A1
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- peripheral edge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0042—Devices for removing chips
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Definitions
- This disclosure relates to a recovery mechanism, a substrate processing device, and a recovery method.
- Patent Document 1 a disk-shaped grinding tool provided with abrasive grains on the outer peripheral portion is rotated, and at least the outer peripheral surface of the grinding tool is linearly contacted with the semiconductor wafer to omit the peripheral end portion of the semiconductor wafer. It is disclosed to grind in an L shape.
- a semiconductor wafer is manufactured by laminating two silicon wafers.
- the technology according to the present disclosure appropriately recovers the peripheral portion removed from the substrate.
- One aspect of the present disclosure is a recovery mechanism for the peripheral edge of the substrate removed by the peripheral edge removing mechanism, the discharging section connecting the recovery section for collecting the removed peripheral edge and the peripheral edge removing mechanism, and the said.
- a route switching unit configured to be able to switch the discharge path of the peripheral portion of the discharge unit is provided.
- the peripheral portion removed from the substrate can be appropriately recovered.
- first substrate a semiconductor substrate in which devices such as a plurality of electronic circuits are formed on the surface and a second substrate are bonded
- first substrate a semiconductor substrate
- second substrate a second substrate
- the back surface of the first substrate is ground to make it thinner.
- the peripheral edge of the first substrate is chamfered, but as disclosed in Patent Document 1, when the back surface of the first substrate is ground, the peripheral edge of the first substrate is formed.
- the part has a sharp and pointed shape (so-called knife edge shape). Then, chipping occurs at the peripheral edge of the first substrate, and the first substrate may be damaged. Therefore, so-called edge trimming is performed in which the peripheral edge of the first substrate is scraped in advance before the grinding process.
- the end face grinding device described in Patent Document 1 described above is a device that performs this edge trimming.
- the edge trim is performed by grinding in this end face grinding device, a large amount of dust (hereinafter referred to as "particles") is generated during the grinding process. Then, if such particles are scattered inside the apparatus, there is a risk of contaminating the substrate to be processed.
- the present disclosers form a modified layer by condensing laser light at the boundary between the peripheral portion and the central portion to be removed by the edge trim, and peel off the peripheral portion along the modified layer. Performed (laser trimming). According to such a laser trimming process, the peripheral portion can be removed without grinding as in Patent Document 1, so that the amount of particles generated in the edge trim can be reduced.
- the removed peripheral edge portion is temporarily collected and accumulated in, for example, a collection box, and then discarded from the collection box.
- the apparatus for performing the laser trimming process is temporarily stopped when the peripheral edge portion is discarded. I needed it.
- the technology according to the present disclosure appropriately recovers the peripheral portion removed from the substrate.
- the peripheral edge removing device as the substrate processing device according to the present embodiment and the recovery mechanism provided in the peripheral edge removing device will be described with reference to the drawings.
- elements having substantially the same functional configuration are designated by the same reference numerals, so that duplicate description will be omitted.
- the first wafer W as the first substrate and the second wafer S as the second substrate S.
- the processing is performed on the polymerization wafer T as the polymerization substrate to which the and is bonded.
- the peripheral edge removing device 70 removes the peripheral edge portion We of the first wafer W and collects the removed peripheral edge portion We.
- the surface on the side bonded to the second wafer S is referred to as a front surface Wa
- the surface opposite to the front surface Wa is referred to as a back surface Wb.
- the surface on the side joined to the first wafer W is referred to as the front surface Sa
- the surface opposite to the front surface Sa is referred to as the back surface Sb.
- the first wafer W is a semiconductor wafer such as a silicon substrate, and a device layer D including a plurality of devices is formed on the surface Wa.
- a surface film Fw is further formed on the device layer D, and is bonded to the second wafer S via the surface film Fw.
- Examples of the surface film Fw include an oxide film (SiO 2 film, TEOS film), a SiC film, a SiCN film, and an adhesive.
- the peripheral edge portion We of the first wafer W is chamfered, and the cross section of the peripheral edge portion We becomes thinner toward the tip thereof. Further, the peripheral edge portion We is a portion that is removed in the edge trim described later, and is, for example, in the range of 0.5 mm to 3 mm in the radial direction from the outer end portion of the first wafer W.
- the second wafer S is, for example, a wafer that supports the first wafer W.
- Surface films Fs are formed on the surface Sa of the second wafer S, and the peripheral edge is chamfered.
- the surface film Fs include an oxide film (SiO 2 film, TEOS film), a SiC film, a SiCN film, and an adhesive.
- the second wafer S functions as a protective material (support wafer) for protecting the device layer D of the first wafer W.
- the second wafer S does not have to be a support wafer, and may be a device wafer on which a device layer is formed as in the first wafer W. In such a case, the surface film Fs is formed on the surface Sa of the second wafer S via the device layer.
- the device layer D and the surface films Fw and Fs may be omitted in order to avoid the complexity of the illustration.
- the wafer processing system 1 has a configuration in which the loading / unloading station 2 and the processing station 3 are integrally connected.
- a cassette Ct capable of accommodating a plurality of polymerized wafers T is loaded / unloaded from the outside.
- the processing station 3 is provided with various processing devices that perform desired processing on the polymerized wafer T.
- the loading / unloading station 2 is provided with a cassette mounting stand 10.
- a cassette mounting stand 10 In the illustrated example, a plurality of, for example, three cassette Cts can be freely mounted in a row on the cassette mounting table 10 in the Y-axis direction.
- the number of cassettes Ct mounted on the cassette mounting table 10 is not limited to this embodiment and can be arbitrarily determined.
- the loading / unloading station 2 is provided with a wafer transfer device 20 adjacent to the cassette mounting table 10 on the X-axis negative direction side of the cassette mounting table 10.
- the wafer transfer device 20 is configured to be movable on a transfer path 21 extending in the Y-axis direction. Further, the wafer transfer device 20 has, for example, two transfer arms 22 and 22 that hold and transfer the polymerized wafer T.
- Each transport arm 22 is configured to be movable in the horizontal direction, the vertical direction, the horizontal axis, and the vertical axis.
- the configuration of the transport arm 22 is not limited to this embodiment, and any configuration can be adopted.
- the wafer transfer device 20 is configured to be able to transfer the polymerized wafer T to the cassette Ct of the cassette mounting table 10 and the transition device 30 described later.
- the loading / unloading station 2 is provided with a transition device 30 for delivering the polymerized wafer T adjacent to the wafer transfer device 20 on the X-axis negative direction side of the wafer transfer device 20.
- the processing station 3 is provided with, for example, three processing blocks B1 to B3.
- the first processing block B1, the second processing block B2, and the third processing block B3 are arranged side by side in this order from the positive direction side of the X axis (the loading / unloading station 2 side) to the negative direction side.
- the first processing block B1 includes an etching device 40 that etches the ground surface of the first wafer W ground by the processing device 90 described later, a cleaning device 41 that cleans the ground surface of the first wafer W, and the like.
- a wafer transfer device 50 is provided.
- the etching apparatus 40 and the cleaning apparatus 41 are arranged in a laminated manner. The number and arrangement of the etching apparatus 40 and the cleaning apparatus 41 are not limited to this. For example, the etching apparatus 40 and the cleaning apparatus 41 may be placed side by side in the X-axis direction, respectively. Further, the etching apparatus 40 and the cleaning apparatus 41 may be laminated respectively.
- the wafer transfer device 50 is arranged, for example, on the Y-axis negative direction side of the etching device 40 and the cleaning device 41.
- the wafer transfer device 50 has, for example, two transfer arms 51, 51 that hold and transfer the polymerized wafer T.
- Each transport arm 51 is configured to be movable in the horizontal direction, the vertical direction, the horizontal axis, and the vertical axis.
- the configuration of the transport arm 51 is not limited to this embodiment, and any configuration can be adopted.
- the wafer transfer device 50 is configured to be able to transfer the polymerized wafer T to the transition device 30, the etching device 40, the cleaning device 41, the reforming device 60 described later, and the peripheral edge removing device 70 described later.
- the second processing block B2 includes a reforming device 60 that forms a reforming layer inside the first wafer W, a peripheral edge removing device 70 as a substrate processing device that performs edge trimming of the first wafer W, and a wafer transfer.
- the device 80 is provided.
- the reformer 60 and the peripheral edge removing device 70 are arranged in a laminated manner.
- the number and arrangement of the reformer 60 and the peripheral edge removing device 70 are not limited to this.
- the reformer 60 and the peripheral edge removing device 70 may be placed side by side in the X-axis direction, respectively. Further, the reformer 60 and the peripheral edge removing device 70 may be laminated respectively.
- the detailed configuration of the peripheral edge removing device 70 will be described later.
- the wafer transfer device 80 is arranged, for example, on the Y-axis positive direction side of the reformer 60 and the peripheral edge removing device 70.
- the wafer transfer device 80 has, for example, two transfer arms 81 and 81 that attract and hold the polymerized wafer T by a suction holding surface (not shown) and transfer it.
- Each transport arm 81 is supported by an articulated arm member 82, and is configured to be movable in the horizontal direction, the vertical direction, the horizontal axis, and the vertical axis.
- the configuration of the transport arm 81 is not limited to this embodiment, and any configuration can be adopted.
- the wafer transfer device 80 is configured to be able to transfer the polymerized wafer T to the etching device 40, the cleaning device 41, the reforming device 60, the peripheral edge removing device 70, and the processing device 90 described later.
- the processing device 90 is provided in the third processing block B3.
- the processing device 90 has a rotary table 91.
- Four chucks 92 that attract and hold the polymerized wafer T are provided on the rotary table 91.
- the four chucks 92 can be moved to the delivery position A0 and the processing positions A1 to A3 by rotating the rotary table 91 around the rotation center line 93.
- each of the four chucks 92 is configured to be rotatable around a vertical axis by a rotation mechanism (not shown).
- the polymerized wafer T is delivered by the wafer transfer device 80.
- a rough grinding unit 94 is arranged at the processing position A1 to roughly grind the first wafer W.
- a medium grinding unit 95 is arranged at the processing position A2 to perform medium grinding of the first wafer W.
- a finish grinding unit 96 is arranged at the processing position A3 to finish grind the first wafer W.
- the back surface Wb of the first wafer W may be further washed.
- the above wafer processing system 1 is provided with a control device 100.
- the control device 100 is, for example, a computer and has a program storage unit (not shown).
- the program storage unit stores a program that controls the processing of the polymerized wafer T in the wafer processing system 1. Further, the program storage unit also stores a program for controlling the operation of the drive system of the above-mentioned various processing devices and transfer devices to realize the wafer processing described later in the wafer processing system 1.
- the program may be recorded on a computer-readable storage medium H and may be installed on the control device 100 from the storage medium H.
- the wafer processing performed by using the wafer processing system 1 configured as described above will be described.
- the first wafer W and the second wafer S are bonded by an external bonding device (not shown) of the wafer processing system 1, and a polymerized wafer T is formed in advance.
- the cassette Ct containing a plurality of the polymerization wafers T shown in FIG. 3A is placed on the cassette mounting table 10 of the loading / unloading station 2.
- the polymerized wafer T in the cassette Ct is taken out by the wafer transfer device 20 and transferred to the transition device 30.
- the wafer transfer device 50 takes out the polymerized wafer T of the transition device 30 and transfers it to the reformer 60.
- the inside of the first wafer W is irradiated with a laser beam (internal laser beam, for example, a YAG laser), and as shown in FIGS.
- the layer M2 is formed (step P1 and step P2 in FIG. 4).
- the peripheral edge modification layer M1 serves as a base point when removing the peripheral edge portion We in the edge trim described later.
- the split modified layer M2 serves as a base point when the peripheral edge portion We to be removed is fragmented.
- the polymerized wafer T is then transported from the reforming device 60 to the peripheral edge removing device 70 by the wafer transfer device 80.
- the peripheral edge removing device 70 As shown in FIG. 3C, the peripheral edge portion We of the first wafer W is removed from the peripheral edge modifying layer M1 and the crack C1 extending from the peripheral edge modifying layer M1 as a base point. (Step P3 in FIG. 4). At this time, the peripheral edge portion We is separated into small pieces with the split modified layer M2 and the crack C2 extending from the split modified layer M2 as base points. The detailed method of edge trimming in the peripheral edge removing device 70 will be described later.
- the polymerized wafer T from which the peripheral edge portion We of the first wafer W has been removed is then conveyed by the wafer transfer device 80 from the peripheral edge removing device 70 to the chuck 92 at the delivery position A0 of the processing device 90. Subsequently, the rotary table 91 is rotated to sequentially move the chuck 92 to the machining positions A1 to A3.
- the back surface Wb of the first wafer W is roughly ground by the rough grinding unit 94 (step P4 in FIG. 4).
- the back surface Wb of the first wafer W is medium-ground by the medium-grinding unit 95 (step P5 in FIG. 4).
- the back surface Wb of the first wafer W is finish-ground by the finish grinding unit 96 (step P6 in FIG. 4).
- the chuck 92 is then moved to the delivery position A0.
- the polymerized wafer T moved to the delivery position A0 is then transported to the cleaning device 41 by the wafer transfer device 80.
- the cleaning device 41 the ground surface (back surface Wb) of the first wafer W is scrubbed (step P7 in FIG. 4).
- the back surface Sb of the second wafer S may be further cleaned together with the ground surface of the first wafer W.
- the polymerized wafer T is transferred to the etching device 40 by the wafer transfer device 50.
- the ground surface (back surface Wb) of the first wafer W is wet-etched by the chemical solution (step P8 in FIG. 4).
- the polymerized wafer T that has been subjected to all the processing is transported to the transition device 30 by the wafer transfer device 50, and further transferred to the cassette Ct of the cassette mounting table 10 by the wafer transfer device 20. In this way, a series of wafer processing in the wafer processing system 1 is completed.
- the peripheral edge removing device 70 has a configuration in which the peripheral edge removing mechanism 110 and the recovery mechanism 120 are interconnected.
- the peripheral edge removing mechanism 110 removes the peripheral edge portion We of the first wafer W.
- the recovery mechanism 120 collects and accumulates the peripheral edge portion We of the first wafer W removed by the peripheral edge removing mechanism 110.
- the recovered peripheral edge We is discarded when the amount recovered to the recovery mechanism 120 exceeds a predetermined accumulable amount.
- the peripheral edge removing mechanism 110 has a chuck 111 that holds the polymerized wafer T on the upper surface.
- the chuck 111 holds the second wafer S in a state where the first wafer W is arranged on the upper side and the second wafer S is arranged on the lower side. Further, the chuck 111 is configured to be rotatable around a vertical axis by a rotation mechanism 112.
- An insertion member 113 is provided on the side of the chuck 111 to apply an impact to the peripheral edge portion We of the first wafer W to remove the peripheral edge portion We.
- the insertion member 113 is configured to be movable toward the polymerization wafer T held by the chuck 111 by a moving mechanism (not shown), and is also configured to be rotatable around a vertical axis by a rotating mechanism (not shown). ing.
- the insertion member 113 is inserted into the interface between the first wafer W and the second wafer S from the outer ends of the first wafer W and the second wafer S.
- the peripheral edge portion We is pushed up by the insertion member 113 inserted into the interface, and then the chuck 111 is rotated while the insertion member 113 is inserted into the interface, so that the first peripheral edge modification layer M1 is used as a base point. It is separated from the wafer W and removed. At this time, the peripheral portion We is fragmented with the split reforming layer M2 as a base point.
- a cup body 114 is provided on the side of the chuck 111 so as to surround the polymerized wafer T held by the chuck 111.
- the lower part of the cup body 114 is connected to the recovery mechanism 120 described later.
- the cup body 114 receives the peripheral edge portion We removed by the insertion member 113 and the particles generated when the peripheral edge portion We is removed, and discharges the particles to the recovery mechanism 120.
- the collection mechanism 120 has a discharge unit 130, a shutter unit 140, and a collection unit 150 in this order from above.
- the discharge unit 130 has a pipe 131 that connects the cup body 114 of the peripheral edge removing mechanism 110 and the recovery unit 150 described later, and when removing the peripheral edge portion We removed by the peripheral edge removing mechanism 110 and the peripheral edge portion We. It constitutes a discharge flow path for generated particles.
- the material of the pipe 131 is not particularly limited, but it is preferably made of a conductive member in order to prevent adhesion of peripheral portions We and particles due to the generation of static electricity.
- a mesh 131a (or punching) as a separation mechanism is formed on at least a part of the peripheral surface of the pipe 131 constituting the discharge flow path.
- a cover body 132 is provided on the outer side in the radial direction of the pipe 131 so as to cover at least the peripheral surface on which the mesh 131a is formed.
- the cover body 132 is connected to an exhaust mechanism 133 as an exhaust unit including a filter (not shown) for collecting particles. Then, in the discharge unit 130, the inside of the pipe 131 and the inside of the cup body 114 of the peripheral edge removing mechanism 110 communicating with each other are exhausted by activating the exhaust mechanism 133, and the particles are collected by the above-mentioned filter through the mesh 131a. can do.
- the peripheral edge portion We removed by the peripheral edge removing mechanism 110 is not sucked by the exhaust mechanism 133, passes through the inside of the pipe 131 by its own weight, and is collected by the recovery unit 150 described later.
- the aperture ratio in the mesh 131a and the exhaust amount in the exhaust mechanism 133 are determined so that the peripheral portion We can be appropriately dropped to the recovery portion 150 in this way.
- the configuration of the separation mechanism is not limited to the above-mentioned mesh 131a and cover body 132, as long as the peripheral portion We and particles can be appropriately separated.
- the separation mechanism may be composed of a labyrinth structure or a cyclone structure.
- a buffer space 134 for temporarily storing the peripheral edge portion We when the shutter portion 140, which will be described later, is closed is formed.
- the peripheral surface of the buffer space 134 is composed of a pipe 131 provided below the cover body 132. Further, the bottom surface of the buffer space 134 is composed of a plate-shaped member 141 described later of the shutter portion 140.
- a detection unit 135 for detecting the accumulated amount of the peripheral portion We in the buffer space 134 may be provided inside the buffer space 134.
- the detection unit 135 for example, a load cell, a photoelectric sensor, a camera, or the like can be adopted.
- the shutter unit 140 as the route switching unit has a plate-shaped member 141 provided at the boundary between the discharge unit 130 and the collection unit 150 described later.
- the plate-shaped member 141 can be moved along the linear guide 143 by a drive mechanism 142 such as a cylinder, whereby the shutter portion 140 is configured to be openable and closable. Then, in the recovery mechanism 120, the plate-shaped member 141 is moved to open the shutter section 140, so that the discharge section 130 and the recovery section 150 can communicate with each other.
- a gap G is formed between the plate-shaped member 141 of the shutter portion 140 and the pipe 131 forming the buffer space 134 in order to appropriately move the plate-shaped member 141. ..
- the shutter portion 140 is opened / closed, that is, the plate-shaped member 141 is moved in the state where the gap G is formed in this way, it is accumulated on the upper surface of the plate-shaped member 141 in the buffer space 134 as described above.
- the peripheral edge portion We may invade the gap G and hinder the movement of the plate-shaped member 141.
- a seal member 144 is provided to suppress the invasion of the peripheral portion We into the gap G.
- the upper end of the seal member 144 is connected to the lower end of the pipe 131 forming the buffer space 134. Further, the lower end portion of the seal member 144 comes into contact with the plate-shaped member 141 at least during the opening / closing operation of the shutter portion 140.
- a member capable of appropriately suppressing the invasion of the peripheral edge portion We into the gap G at the time of contact with the plate-shaped member 141 for example, a brush or rubber can be adopted.
- the collection unit 150 has a collection box 151, a box housing 152, a connection pipe 153, and a weight sensor 154.
- the collection box 151 collects the peripheral edge portion We removed by the peripheral edge removing mechanism 110 inside.
- An opening 151a is formed on the upper surface of the collection box 151 on a surface facing the shutter portion 140, and the peripheral edge portion We falling from the discharge portion 130 is internally collected through the opening 151a.
- the collection box 151 is detachably configured from the box accommodating body 152 (collection unit 150).
- the opening / closing operation of the shutter unit 140 described above is controlled according to the attachment / detachment state of the collection box 151 to the collection unit 150. Specifically, the shutter unit 140 is opened when the collection box 151 is attached to the collection unit 150, and the shutter unit 140 is closed when the collection box 151 is removed from the collection unit 150.
- the opening 151a is closed to suppress contamination in the clean room provided with the peripheral edge removing device 70 when the recovery box 151 is removed from the recovery section 150 when the peripheral edge portion We is discarded.
- a sliding door 151b is provided to seal the inside. The slide door 151b is opened when the collection box 151 is attached to the collection unit 150, and is closed when the collection box 151 is removed from the collection unit 150.
- the box accommodating body 152 is fixedly provided below the discharge unit 130 (shutter unit 140), and is configured to be able to accommodate the collection box 151 inside. Then, by removing the collection box 151 from the box accommodating body 152 in this way, the peripheral portion We collected inside the collection box 151 can be discarded.
- connection pipe 153 is provided between the collection box 151 in the collection unit 150 and the box accommodating body 152 in order to appropriately collect the peripheral portion We falling from the discharge unit 130 into the collection box.
- the opening at the upper end of the connecting pipe 153 is formed to be at least larger than the opening of the shutter portion 140 and the pipe 131. Further, the opening at the lower end of the connecting pipe 153 is formed to be at least smaller than the opening 151a of the collection box 151.
- the weight sensor 154 as a detection unit is provided at the bottom of the box accommodating body 152, and when the collection box 151 is attached to the box accommodating body 152, the collection box 151 is placed on the upper surface. Then, the weight sensor 154 detects the accumulated amount (weight) of the peripheral edge portion We collected inside the mounted collection box 151.
- the attachment / detachment of the collection box 151 is controlled according to the accumulated amount of the peripheral portion We detected by the weight sensor 154. Specifically, when the accumulated amount of the peripheral portion We exceeds the amount that can be accumulated by the collection box 151, the collection box 151 is removed from the collection unit 150. Then, after the peripheral portion We accumulated inside is discarded, it is attached to the recovery portion 150 again.
- the amount of recovery of the peripheral edge We on the recovery box 151 is detected by the detection sensor 155 as a detection unit instead of or in addition to the detection of the weight of the peripheral edge We by the weight sensor 154. It may be done.
- the detection sensor 155 for example, a photoelectric sensor, a camera, or the like can be adopted.
- the inside of the collection unit 150 has a closed structure in order to prevent contamination of the clean room in which the peripheral edge removing device 70 is installed.
- the polymerized wafer T is delivered to and held by the chuck 111 of the peripheral edge removing mechanism 110 by the wafer transfer device 80.
- a peripheral reforming layer M1 and a split reforming layer M2 are formed in advance in the reforming apparatus 60.
- the insertion member 113 is moved toward the polymerization wafer T and brought into contact with the interface between the first wafer W and the second wafer S. At this time, the insertion member 113 and the chuck 111 (polymerized wafer T) are rotated in opposite directions, respectively. At this time, it is desirable that the plate-shaped member 141 is moved by the drive mechanism 142 to open the shutter portion 140.
- the insertion member 113 is further moved toward the center of the polymerization wafer T and inserted into the interface between the first wafer W and the second wafer S.
- the peripheral edge portion We of the first wafer W is pushed up, and the peripheral edge portion We is separated from the first wafer W with the peripheral edge modification layer M1 as a base point.
- the peripheral portion We is fragmented and separated from the divided modified layer M2 as a base point.
- the peripheral edge portion We removed by the insertion member 113 falls to the recovery mechanism 120 connected to the lower part of the cup body 114 due to its own weight. Further, when removing the peripheral portion We, suction is performed by the exhaust mechanism 133 as described above. As a result, the inside of the cup body 114 is exhausted via the discharge portion 130, and the particles generated when the peripheral portion We are removed are appropriately sucked into the recovery mechanism 120.
- the peripheral portion We that has fallen to the recovery mechanism 120 passes through the pipe 131, the cover body 132, and the buffer space 134, respectively, by its own weight, and is recovered to the recovery section 150. Further, the particles sucked into the collection mechanism 120 pass through the pipe 131, the cover body 132, and the mesh 131a by suction by the exhaust mechanism 133, and are collected by the filter of the exhaust mechanism 133.
- the amount of peripheral edge We collected inside the recovery box 151 is detected by the weight sensor 154 and the detection sensor 155. Then, when the collected amount of the detected peripheral edge portion We exceeds the amount that can be accumulated in the collection box 151, the collection box 151 is removed from the collection unit 150, and the accumulated peripheral edge portion We is discarded.
- the plate-shaped member 141 is moved by the drive mechanism 142 to move the shutter portion 140 prior to the removal of the collection box 151. Block it.
- the peripheral edge portion We removed by the peripheral edge removal mechanism 110 is the upper surface of the plate-shaped member 141, that is, It is stored in the buffer space 134. That is, when the peripheral edge portion We is discarded from the collection box 151, it is not necessary to stop the operation of the peripheral edge removing device 70, and the peripheral edge portion We can be continuously removed by the peripheral edge removing mechanism 110.
- the collection box 151 is attached to the collection unit 150. After that, the plate-shaped member 141 is moved by the drive mechanism 142 to open the shutter portion 140, and as shown in FIG. 10, the peripheral portion We temporarily accumulated in the buffer space 134 is dropped into the recovery box 151. .. At this time, since the seal member 144 is provided in the gap G between the plate-shaped member 141 of the shutter portion 140 and the pipe 131 of the buffer space 134, the peripheral portion We does not invade the gap G and the collection box 151 is appropriately collected. Will be collected.
- the peripheral edge removing device 70 when the recovery box 151 is removed, the shutter portion 140 is closed and the peripheral edge portion We is temporarily accumulated in the buffer space 134, so that the edge removed by the peripheral edge removing mechanism 110. Continued trimming. However, for example, when the accumulated amount of the peripheral edge portion We detected by the detection unit 135 exceeds the accumulable amount in the buffer space 134, the edge trimming by the peripheral edge removing mechanism 110 may be interrupted. At this time, a warning may be issued prior to the interruption of the edge trim. In such a case, the recovery box 151 is attached to the recovery section 150, and the edge trim is restarted after the shutter section 140 is opened.
- the edge trim is interrupted. May be good.
- the recovery box 151 is removed, the peripheral edge We is discarded, the recovery box 151 is attached to the recovery section 150, and then the edge trim is restarted.
- the shutter unit 140 is temporarily used. May be controlled to block.
- the peripheral edge portion We can be accumulated in the buffer space 134, so that edge trimming can be continuously performed.
- the edge trim may be interrupted even in the buffer space 134 when the amount of the peripheral portion We that can be accumulated is exceeded. In such a case, the recovery box 151 is removed, the peripheral edge We is discarded, the recovery box 151 is attached to the recovery section 150, and then the edge trim is restarted.
- two collection units 150 may be connected to the discharge unit 130.
- two shutter portions 140 are provided, and when one of the collection boxes 151 is replaced, the peripheral edge is removed by switching the discharge path so as to collect the peripheral edge portion We in the other recovery box 151.
- the peripheral edge We accumulated in the collection box 151 can be discarded without interrupting the edge trim in the mechanism 110.
- the discharge unit 130 may be provided with two collection units 150 so that the discharge path of the peripheral portion We can be switched by one shutter unit 140.
- the peripheral edge portion We is temporarily placed in the buffer space 134 by closing the shutter portion 140 when the recovery box 151 for collecting the peripheral edge portion We is removed. Can be stored. As a result, it is not necessary to stop the operation of the peripheral edge removing device 70, and the peripheral edge portion We accumulated in the recovery box 151 can be discarded without interrupting the edge trim in the peripheral edge removing mechanism 110.
- the peripheral edge portion We temporarily accumulated in the buffer space 134 can be appropriately collected in the collection unit 150 by opening the shutter unit 140 after the collection box 151 is attached. At this time, since the seal member 144 is provided in the gap G between the plate-shaped member 141 and the buffer space 134, the peripheral edge portion We are swept more appropriately as the shutter portion 140 is opened. The unit We can be dropped onto the collection unit 150 and collected. Further, since the connecting pipe 153 having an opening larger than the opening of the shutter portion 140 is provided below the shutter portion 140, the peripheral portion We can be more appropriately recovered to the collecting portion 150. can.
- the exhaust mechanism 133 is connected to the cover body 132 of the discharge unit 130, whereby the inside of the recovery mechanism 120 and the cup body 114 can be sucked, so that the particles generated when the peripheral portion We are removed are appropriate. It can be collected in the exhaust mechanism 133. Furthermore, since the recovery mechanism 120 has a closed structure, the outflow of particles from the recovery mechanism 120 can be appropriately suppressed.
- the recovery unit 150 is configured to directly collect the peripheral edge portion We removed by the peripheral edge removal mechanism 110 inside the collection box 151.
- a collection bag for example, inside the collection box 151) (Not shown) may be configured to be mountable. In such a case, the recovered peripheral edge We can be disposed of from the collection box 151 only by exchanging the collection bag, so that the peripheral edge We can be more easily disposed of.
- the collection unit 150 may be configured so that a collection bag (not shown) can be installed instead of the collection box 151. That is, the collection bag may be directly attached to the connecting pipe 153. Even in such a case, the collection bag can be easily replaced by closing the shutter portion 140.
- the peripheral edge removing mechanism 110, the discharging section 130, and the collecting section 150 may be provided on different floors.
- the collecting unit may be a subfab (SUB-FAB). That is, the peripheral edge portion We removed by the peripheral edge removing mechanism 110 may be configured to be directly discarded in the subfab.
- the collection unit 250 includes a slide frame 251 corresponding to the collection box 151, a frame storage body 252 corresponding to the box storage body 152, and a collection bag attached to the inside of the slide frame 251. It has 253 and a weight sensor 254.
- the frame accommodating body 252 forms a closed area.
- the collection unit 250 detects the amount of peripheral We collected on the collection bag 253 by the weight sensor 254, and when the detected amount of collection exceeds the amount that can be collected by the collection bag 253, the slide frame 251 is framed. Remove from the housing 252 and discard the peripheral We. Disposal of the peripheral portion We is performed by replacing the collection bag 253.
- the collection unit 250 may be further provided with a detection mechanism (not shown) for detecting the collection amount of the peripheral portion We with respect to the collection bag 253.
- a detection mechanism for example, a photoelectric sensor, a camera, or the like can be adopted.
- the peripheral edge removing mechanism 110 removes the peripheral edge portion We by inserting the insertion member 113 into the interface between the first wafer W and the second wafer S, but the configuration of the peripheral edge removing mechanism 110 is this. It is not limited to.
- the shutter unit 140 is opened and closed by sliding movement by the drive mechanism 142, but the method of opening and closing the shutter unit 140 is not limited to this.
- the shutter unit 140 may be opened and closed by the aperture mechanism, or may be opened and closed on the collection unit 150 side.
Abstract
Description
120 回収機構
130 排出部
140 シャッタ部
150 回収部
W 第1のウェハ
We 周縁部
Claims (20)
- 周縁除去機構において除去された基板の周縁部の回収機構であって、
除去された前記周縁部を回収する回収部と前記周縁除去機構とを接続する排出部と、
前記排出部における前記周縁部の排出経路を切り替え可能に構成される経路切替部と、を備える回収機構。 - 前記排出部には、除去された前記周縁部の排出経路と、前記周縁除去機構において発生したパーティクルの排出経路を分離する分離機構が設けられ、
前記分離機構における前記パーティクルの排出経路には排気部が接続される、請求項1に記載の回収機構。 - 前記分離機構は、
前記排出部の少なくとも一部の周面に形成されたメッシュと、
前記メッシュを被うように設けられるカバー体と、を備える、請求項2に記載の回収機構。 - 前記経路切替部と前記排出部との間隙を閉塞するシール部材を備える、請求項1~3のいずれか一項に記載の回収機構。
- 前記シール部材は、一端部が前記排出部に接続され、他端部が前記経路切替部に対して接触して設けられるブラシである、請求項4に記載の回収機構。
- 前記経路切替部の閉塞時において前記経路切替部の上面に蓄積される前記周縁部を検知する検知部を備える、請求項1~5のいずれか一項に記載の回収機構。
- 前記回収部は、内部に前記周縁部を蓄積する回収ボックスを有し、
前記回収ボックスは、前記回収部に対して着脱自在に構成され、
前記経路切替部は、
前記回収部に対して前記回収ボックスが取り付けられている際に開放され、
前記回収部に対する前記回収ボックスの取り外し時に閉塞される、請求項1~6のいずれか一項に記載の回収機構。 - 前記経路切替部の下方に設けられ、前記回収ボックスと前記排出部とを接続する接続管を備え、
前記接続管は、
上端部に前記排出部よりも大きな開口を有し、
下端部に前記回収ボックスに形成された開口部よりも小さな開口を有する、請求項7に記載の回収機構。 - 前記回収ボックスの内部に蓄積される前記周縁部を検知する検知部を備える、請求項7または8に記載の回収機構。
- 基板を処理する基板処理装置であって、
除去対象の前記基板の周縁部を除去する周縁除去機構と、
請求項1~8のいずれか一項に記載の回収機構と、を備える基板処理装置。 - 前記周縁除去機構は、前記基板の外周を取り囲むように設けられるカップ体を有する、請求項10に記載の基板処理装置。
- 前記カップ体の下端部が前記排出部に接続される、請求項11に記載の基板処理装置。
- 周縁除去部において除去された基板の周縁部を回収する方法であって、
前記周縁部を回収する回収機構は、
除去された前記周縁部を回収する回収部と前記周縁除去部とを接続する排出部と、
前記排出部における前記周縁部の排出経路を切り替え可能に構成される経路切替部と、を備え、
除去対象の前記基板の前記周縁部を除去することと、
除去された前記周縁部を前記回収機構に回収することと、を含む回収方法。 - 前記排出部において、除去された前記周縁部と、前記周縁除去部において発生したパーティクルを分離することを含む、請求項13に記載の回収方法。
- 少なくとも前記回収機構の内部を排気することを含む、請求項13または14に記載の回収方法。
- 前記経路切替部の閉塞時において、
前記周縁部を前記経路切替部の上面に蓄積することを含む、請求項13~15のいずれか一項に記載の回収方法。 - 前記経路切替部の上面に蓄積された前記周縁部を検知することを含む、請求項16に記載の回収方法。
- 前記回収機構は、前記経路切替部と前記排出部との間隙を閉塞するシール部材を有し、
前記シール部材は、前記経路切替部の開放動作時において、前記経路切替部の上面に蓄積された前記周縁部を掃いて前記回収部へと落下させる、請求項16または17に記載の回収方法。 - 前記回収部は、当該回収部に対して着脱自在に構成され、内部に前記周縁部を蓄積する回収ボックスを有し、
前記経路切替部を、
前記回収部に対して前記回収ボックスが取り付けられている際に開放し、
前記回収部に対する前記回収ボックスの取り外し時に閉塞する、請求項13~18のいずれか一項に記載の回収方法。 - 前記回収ボックスの内部に蓄積された前記周縁部を検知することを含む、請求項19に記載の回収方法。
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JPH1041270A (ja) * | 1996-07-26 | 1998-02-13 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2006066643A (ja) * | 2004-08-26 | 2006-03-09 | Sumitomo Electric Ind Ltd | 半導体ウェハの劈開装置及び方法 |
JP2007319893A (ja) * | 2006-05-31 | 2007-12-13 | Sharp Corp | レーザー切断装置およびレーザー切断方法 |
JP2011121109A (ja) * | 2009-12-14 | 2011-06-23 | Mitsubishi Electric Corp | レーザー加工機 |
JP2012051081A (ja) * | 2010-09-02 | 2012-03-15 | Disco Corp | 切削装置 |
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JP2020013911A (ja) * | 2018-07-19 | 2020-01-23 | 東京エレクトロン株式会社 | 基板処理システム及び基板処理方法 |
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JPH09216152A (ja) | 1996-02-09 | 1997-08-19 | Okamoto Kosaku Kikai Seisakusho:Kk | 端面研削装置及び端面研削方法 |
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Patent Citations (7)
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JPH1041270A (ja) * | 1996-07-26 | 1998-02-13 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2006066643A (ja) * | 2004-08-26 | 2006-03-09 | Sumitomo Electric Ind Ltd | 半導体ウェハの劈開装置及び方法 |
JP2007319893A (ja) * | 2006-05-31 | 2007-12-13 | Sharp Corp | レーザー切断装置およびレーザー切断方法 |
JP2011121109A (ja) * | 2009-12-14 | 2011-06-23 | Mitsubishi Electric Corp | レーザー加工機 |
JP2012051081A (ja) * | 2010-09-02 | 2012-03-15 | Disco Corp | 切削装置 |
JP2014054694A (ja) * | 2012-09-12 | 2014-03-27 | Disco Abrasive Syst Ltd | 研削装置 |
JP2020013911A (ja) * | 2018-07-19 | 2020-01-23 | 東京エレクトロン株式会社 | 基板処理システム及び基板処理方法 |
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