WO2021082549A1 - 一种掩膜版 - Google Patents

一种掩膜版 Download PDF

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Publication number
WO2021082549A1
WO2021082549A1 PCT/CN2020/104350 CN2020104350W WO2021082549A1 WO 2021082549 A1 WO2021082549 A1 WO 2021082549A1 CN 2020104350 W CN2020104350 W CN 2020104350W WO 2021082549 A1 WO2021082549 A1 WO 2021082549A1
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WO
WIPO (PCT)
Prior art keywords
mask
connecting portion
substrate
shielding portion
groove
Prior art date
Application number
PCT/CN2020/104350
Other languages
English (en)
French (fr)
Inventor
张志远
Original Assignee
昆山国显光电有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 昆山国显光电有限公司 filed Critical 昆山国显光电有限公司
Priority to KR1020217039359A priority Critical patent/KR20220002638A/ko
Priority to JP2021572512A priority patent/JP7297944B2/ja
Priority to EP20883530.6A priority patent/EP3967787A4/en
Publication of WO2021082549A1 publication Critical patent/WO2021082549A1/zh
Priority to US17/503,734 priority patent/US20220033953A1/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks

Definitions

  • the embodiments of the present application relate to mask technology, for example, to a mask.
  • the display area of the display panel has different display effects, such as hole-cut screens, etc. Direction.
  • the perforated screen is more likely to damage the overall display panel, resulting in poor overall display effect of the display panel.
  • the present application provides a mask, which can simply and efficiently prepare display panels with different display effects in the display area.
  • the embodiment of the present application provides a mask, including: a frame and an opening surrounded by the frame; a shielding portion and at least one connecting portion connecting the shielding portion and the frame, the shielding portion being disposed in the opening In; along the direction perpendicular to the mask, the connecting portion includes a first part arranged close to the substrate to be evaporated and a second part arranged away from the substrate to be evaporated, the vertical of the second part
  • the projection covers the vertical projection of the first part, and the area of the first part parallel to the cross section of the mask gradually decreases in a direction away from the second part.
  • the mask used in the present invention includes a frame and an opening surrounded by the frame; a shielding part and at least one connecting part connecting the shielding part and the frame, the shielding part is arranged in the opening; along the direction perpendicular to the mask, the connecting part includes The first part of the vapor deposition substrate and the second part far away from the substrate to be vaporized, the vertical projection of the second part covers the vertical projection of the first part, and the cross-sectional area of the first part parallel to the mask is gradually approaching the substrate to be vaporized Decrease.
  • connection part When using the mask to evaporate the film layer of the display panel, the connection part is used to effectively realize the stable support of the shielding part of the offshore design, and the position on the display panel corresponding to the connection part can be formed by oblique evaporation
  • the corresponding film structure avoids the problem that the material is not deposited on the position corresponding to the connection part on the display panel, which affects the display effect of the display panel, and facilitates the simple and efficient preparation of display panels with different display effects in the display area.
  • FIG. 1 is a schematic diagram of the structure of a mask provided by an embodiment of the application.
  • Figure 2 is a cross-sectional view of Figure 1 along the A1-A2 direction;
  • FIG. 3 is a schematic diagram of an evaporation process provided by an embodiment of the application.
  • FIG. 4 is another cross-sectional view along the A1-A2 direction of FIG. 1, wherein the connecting portion has a different cross-sectional shape from the connecting portion in FIG. 2;
  • FIG. 5 is a schematic diagram of another evaporation process provided by an embodiment of the application.
  • FIG. 6 is another cross-sectional view along the A1-A2 direction of FIG. 1, wherein the connecting portion has a different cross-sectional shape from the connecting portion in FIG. 2;
  • Figure 7 is a cross-sectional view of Figure 1 along the A3-A4 direction;
  • FIG. 8 is another cross-sectional view along the A1-A2 direction of FIG. 1, wherein the connecting portion has a different cross-sectional shape from the connecting portion in FIG. 2;
  • FIG. 9 is another cross-sectional view along the A1-A2 direction of FIG. 1, wherein the connecting portion has a different cross-sectional shape from the connecting portion in FIG. 2;
  • Figure 10 is a cross-sectional view of Figure 1 along the A5-A6 direction;
  • Figure 11 is a schematic structural diagram of another mask provided by an embodiment of the application, where one shielding portion corresponds to three connecting portions, and the extension directions of two connecting portions of the three connecting portions are perpendicular to each other.
  • the extending direction is between two connecting parts that are perpendicular to each other;
  • FIG. 12 is a schematic structural diagram of another mask provided by an embodiment of the application, in which one shielding portion corresponds to four connecting portions, the extending direction of two connecting portions of the four connecting portions is parallel to the first direction, and the other two The extending direction of each connecting portion is parallel to the second direction, and the first direction is perpendicular to the second direction;
  • Figure 13 is a schematic structural diagram of another mask provided by an embodiment of the application, where one shielding portion corresponds to three connecting portions, and two of the three connecting portions extend in the same direction and are located on the same straight line.
  • the extending direction of a connecting portion is perpendicular to the straight line.
  • the hole-digging screen mentioned in the background art has the problem that the display panel is easily damaged as a whole, after careful study, it is found that the reason for this technical problem is: in the related technology, in the case of making the hole-digging screen, the mask is first used. A whole layer of the film structure is made, and then a hole-like structure is formed on the film structure by laser drilling. However, the laser drilling technology is more difficult, and it is easier to damage the film structure of the display panel.
  • FIG. 1 is a schematic structural diagram of a mask provided by an embodiment of the application
  • FIG. 2 is a cross-sectional view along the A1-A2 direction of FIG. 1, referring to FIG. 1 and FIG. 2,
  • the mask includes a frame 101 and a frame surrounded by the frame 101
  • the first part 1041 and the second part 1042 arranged far away from the substrate to be evaporated.
  • the vertical projection of the second part 1042 covers the vertical projection of the first part 1041.
  • the area of the first part 1041 parallel to the cross-section of the mask is along the distance away from the first part 1041.
  • the direction of the second part 1042 gradually decreases.
  • a mask in conjunction with FIGS. 1 and 2, can be used to make a display panel.
  • a mask includes a plurality of openings 102, each opening 102 corresponds to a display panel, and the shielding portion 103 in the opening 102 It is set to avoid the evaporation of the corresponding material to the area of the display panel that does not need to form the corresponding film layer of the material when the film layer of the display panel (such as the cathode layer or the encapsulation layer) is evaporated, for example, a designated area that is different from other display areas (such as Hole-digging area), avoiding the problem of film damage caused by first making a complete film layer and then performing laser drilling, which will affect the display quality of the display panel.
  • FIG. 2 exemplarily shows that the left and right sides of the connecting portion 104 have a symmetrical structure.
  • the connecting portion 104 may also be provided as an asymmetric structure.
  • FIG. 3 is a schematic diagram of an evaporation process provided by an embodiment of the application. In conjunction with FIG. 2 and FIG. 3, in the case of using a mask to evaporate the film layer of the display panel, the substrate 201 to be evaporated is disposed on the surface of the mask.
  • the first portion 1041 of the connecting portion 104 is close to the substrate 201 to be vaporized, and the second portion 1042 of the connecting portion 104 is far away from the substrate 201 to be vaporized.
  • the substrate 201 to be vaporized includes a shielding area 2011 hidden by the connecting portion 104 and unconnected The unoccluded area 2012 occluded by the part 104.
  • the cathode material is formed in this area, and the cathode material is required to be formed in the remaining areas, that is, the corresponding film structure needs to be vapor-deposited on the shielded area 2011 and the unshielded area 2012, and the material is vaporized from bottom to top to the substrate 201 to be vaporized during vapor deposition.
  • the unshielded area 2012 can be vapor-deposited with the upper film structure in the vertical direction, and since the area of the first part 1041 parallel to the cross-section of the mask is gradually reduced in the direction close to the substrate 201 to be vaporized,
  • the shielding area 2011 is obliquely vapor-deposited on the film structure, thereby avoiding the problem that the position on the display panel corresponding to the connecting portion 104 is not vapor-deposited with material, which affects the display effect of the display panel.
  • the boundary between the first portion 1041 and the second portion 1042 of the connecting portion 104 along the direction perpendicular to the mask is not limited in the embodiment of the application. It is ensured that the area of the first portion 1041 parallel to the cross section of the mask is far away from the second portion 1041.
  • the direction of the portion 1042 can be gradually reduced.
  • the mask used in this embodiment includes a frame and an opening surrounded by the frame; a shielding portion and at least one connecting portion connecting the shielding portion and the frame, the shielding portion is arranged in the opening; along a direction perpendicular to the mask, the connecting portion includes In order to be close to the first part of the substrate to be evaporated and the second part away from the substrate to be evaporated, the vertical projection of the second part covers the vertical projection of the first part, and the area of the first part parallel to the cross section of the mask is far away The direction of the second part gradually decreases.
  • connection part effectively realizes the stable support of the shielding part, and can make the area on the display panel corresponding to the shielding part unable to evaporate the upper film structure and display
  • the position on the panel corresponding to the connection part is formed by oblique evaporation to form a corresponding film structure, so as to avoid the problem that the position on the display panel corresponding to the connection part is not vapor-deposited on the material, which affects the display effect of the display panel, and is conducive to simplicity and efficiency
  • the display panel with different display effects in the display area is prepared.
  • FIG. 4 is another cross-sectional view along the A1-A2 direction of FIG. 1.
  • the cross section of the second part 1042 is parallel to the cross section of the mask. The area gradually decreases in the direction away from the first portion 1041.
  • FIG. 5 is a schematic diagram of another vapor deposition process provided by an embodiment of the application.
  • the upper film structure needs to be vapor deposited on the shielded area 2011 and the unshielded area 2012.
  • the vapor deposition When the evaporation material is evaporated from bottom to top onto the substrate 201 to be evaporated, the area on the unshielded area 2012 far away from the shielded area 2011 can not only evaporate the upper film structure in the vertical direction, but also can evaporate a part of the film in the oblique direction.
  • the film structure can only be vapor-deposited in the vertical direction, that is, the film thickness of the unshielded area 2012 near the shielded area 2011 may be smaller than that far away from the shielded area
  • the thickness of the film layer in the 2011 area causes uneven film thickness of the display panel, which affects the display effect.
  • the second part 1042 By setting the area of the second part 1042 parallel to the cross-section of the mask to gradually decrease in the direction away from the first part 1041, the second part 1042 vaporizes the vapor deposition material obliquely from the area corresponding to the connection portion 104 to the unshielded area
  • the area near the shielded area 2011 in 2012 is less shielded, so that the area near the shielded area 2011 in the unshielded area 2012 can be vapor-deposited with a certain film structure in an oblique manner, reducing the film structure of the area away from the shielding area 2011
  • the difference in thickness improves the uniformity of the film thickness on the display panel, improves the uniformity of the display, and further improves the display effect.
  • FIGS. 2 and 4 are only an example, and in other embodiments, other shapes may also be used.
  • the area of the first part 1041 parallel to the cross-section of the mask may decrease non-linearly along the direction away from the second part 1042, and the area of the second part parallel to the cross-section of the mask is far away from the first part 1042.
  • the direction of a portion 1041 may decrease non-linearly.
  • FIG. 6 is another cross-sectional view along the A1-A2 direction of FIG. 1.
  • the sides of the first portion 1041 and the second portion 1042 can be arc-shaped structures, thereby reducing the production of the connecting portion Difficulty, saving production costs.
  • FIG. 7 is a cross-sectional view of FIG. 1 along the A3-A4 direction.
  • the shielding portion 103 is arranged close to the surface of the substrate to be vaporized and is provided with at least one first groove.
  • at least one first groove is provided on the surface of the shielding portion 103 that is away from the substrate to be vapor-deposited.
  • FIG. 7 exemplarily provides that the shielding portion 103 is provided with a first groove 1031 close to the surface of the substrate to be evaporated, that is, the upper surface of the shielding portion 103 is provided with a first groove 1031.
  • the embodiment of the present application does not limit the number of first grooves 1031 provided on one surface of the shielding portion 103 and the number of surfaces provided with the first grooves 1031 of the shielding portion 103.
  • the shielding portion 103 corresponds to the area on the display panel that needs to be dug, and the area on the display panel that needs to be dug does not need to be evaporated to form a corresponding film structure (such as a cathode layer and a thin film encapsulation layer).
  • the weight of the part 103 is too heavy, and the gravity of the shielding part 103 causes the shielding part 103 to be easily deformed, so that a part of the area on the display panel corresponding to the shielding part 103 may be vapor-deposited on the film structure, which affects the film on the display panel corresponding to the shielding part 103 area.
  • the layer structure reduces the yield of the display panel.
  • the shielding portion 103 is provided with at least one first groove on the surface close to the substrate to be vaporized, and/or the shielding portion 103 is provided with at least one first groove on the surface away from the substrate to be vaporized.
  • a groove reduces the weight of the shielding portion 103, reduces the probability of deformation of the shielding portion 103 and the connecting portion 104, and improves the evaporation effect of the area corresponding to the shielding portion 103 and the connecting portion 104 on the display panel, thereby enhancing the display panel The display effect.
  • the shielding portion 103 includes a middle area 1032 and an edge area 1033 surrounding the middle area 1032, and the first groove 1031 is located in the middle area 1032.
  • the shape of the shielding portion 103 may be circular, and the edge region 1033 may be annular. If the thickness of the edge region 1033 is too thin, too much vapor deposition material will pass through the diagonal during vapor deposition. The method reaches the position on the display panel corresponding to the shielding portion, so that the corresponding film material is formed in the area of the display panel corresponding to the shielding portion 103 on the display panel that does not need to form a corresponding film layer, and the yield rate of the display panel is reduced.
  • the first groove 1031 is disposed in the middle region 1032, so that the thickness of the edge region 1033 is higher than the thickness of the middle region 1032, and the thickness of the edge region 1033 is not too thin, which reduces the passage of the vapor deposition material during vapor deposition.
  • the probability of vapor deposition on the display panel in an oblique manner to the area corresponding to the shielding portion further improves the yield of the display panel.
  • FIG. 8 is another cross-sectional view along the A1-A2 direction of FIG. 1.
  • the connecting portion 104 is arranged to be close to the surface of the substrate to be vaporized with at least one second groove, and /Or, at least one second groove is provided on the surface of the connecting portion 104 that is away from the substrate to be vapor-deposited.
  • 8 exemplarily provides that the connecting portion 104 is provided with a second groove 1043 close to the surface of the substrate to be evaporated, that is, the upper surface of the connecting portion 104 is provided with a second groove 1043.
  • the embodiment of the present application does not limit the number of second grooves 1043 provided on one surface of the connecting portion 104 and the number of surfaces provided with the second grooves 1043 of the connecting portion 104.
  • the gravity of the connecting portion 104 may cause the connecting portion 104 to be easily deformed, affecting the film structure of the area corresponding to the connecting portion 104 on the display panel, and reducing the yield of the display panel.
  • the connecting portion 104 plays a role of fixing and supporting the shielding portion 103.
  • the deformation of the connecting portion 104 reduces the ability of the connecting portion 104 to support the shielding portion 103, and the deformation of the connecting portion 104 may cause the position of the shielding portion 103 to change, affecting the display The vapor deposition effect of the area corresponding to the shielding portion 103 on the panel.
  • the connecting portion 104 is provided with at least one second groove on the surface close to the substrate to be vaporized, and/or the connecting portion 104 is provided with at least one first groove on the surface away from the substrate to be vaporized.
  • the two grooves reduce the weight of the connecting portion 104, reduce the probability of deformation of the connecting portion 104, and prevent the connecting portion 104 from sagging due to the excessive weight of the connecting portion 104, thereby causing the shielding portion 103 to sag too much, and further It is ensured that the area corresponding to the shielding portion 103 on the display panel will not be vapor-deposited with the film structure, which improves the vapor deposition effect of the area corresponding to the shielding portion 103 and the connecting portion 104 on the display panel, thereby improving the display effect of the display panel.
  • FIG. 9 is another cross-sectional view along the A1-A2 direction of FIG. 1.
  • the connecting portion 104 is arranged such that at least one second groove 1043 is provided close to the surface of the substrate to be evaporated.
  • a plurality of protruding structures 1044 are provided in the second groove 1043.
  • a magnetic material needs to be arranged on the side of the substrate to be vapor-deposited away from the mask to absorb the mask to avoid sagging of the mask.
  • the magnetic material may affect The mask is adsorbed to the substrate to be vaporized, so that there is no gap between the connection portion 104 and the substrate to be vaporized, and the vapor deposition material cannot be vapor-deposited to the position on the display panel corresponding to the connection portion 104 during vapor deposition. As a result, the film thickness is uneven, which affects the display effect.
  • the raised structure 1044 can support the connecting portion 104 to prevent the connecting portion 104 from being completely attached to the surface to be vaporized.
  • the area of the display panel corresponding to the gaps of the plurality of raised structures 1044 can be vapor-deposited with a film structure to prevent the area of the display panel corresponding to the connection portion 104 from being unable to vapor-deposit the film structure and causing uneven display. Phenomenon, improve the display effect.
  • the plurality of protruding structures 1044 may be arranged along a direction perpendicular to the extending direction of the connecting portion 103, or as shown in FIG. 10, which is the direction along A5-A6 in FIG. A kind of cross-sectional view.
  • FIG. 10 shows a view of a plurality of protruding structures 1044 arranged along the extending direction of the connecting portion 103.
  • the plurality of protruding structures 1044 may be arranged along the extending direction of the connecting portion 103, or a plurality of protruding structures 1044 may be arranged both along the direction perpendicular to the extending direction of the connecting portion 103 and along the extending direction of the connecting portion 103.
  • the extending direction of 103 is arranged.
  • some of the convex structures 1044 of the plurality of convex structures 1044 are arranged in a direction perpendicular to the extending direction of the connecting portion 103, and the remaining convex structures 1044 are arranged along the extending direction of the connecting portion 103.
  • a plurality of raised structures 1044 can be arranged in a lattice, that is, each raised structure 1044 is an isolated island-shaped structure.
  • the raised structure 1044 can be set as a trapezoidal mesa structure, that is, it can be set
  • the shape of the upper surface and the lower surface of the protruding structure 1044 are both circular.
  • the side of the protruding structure 1044 arranged close to the substrate to be vaporized can be parallel to the substrate to be vaporized.
  • the protruding structure 1044 can support the connecting portion 104 to prevent the connecting portion 104 from being completely attached to the surface of the substrate to be evaporated.
  • FIG. 10 only exemplarily sets the cross section of the convex structure 1044 to be a regular trapezoid, and it may also set the cross section of the convex structure 1044 to be a rectangle or an inverted trapezoid.
  • the embodiment of the present application does not limit the shape of the cross-section of the convex structure 1044, and it is sufficient to ensure that the side of the convex structure 1044 facing the substrate to be evaporated has a supporting platform.
  • the height of the plurality of raised structures 1044 is the same along the direction perpendicular to the mask; and/or the plurality of raised structures 1044 are evenly distributed.
  • the heights of the plurality of raised structures 1044 are the same, so that when the mask is attached to the substrate to be evaporated, the plurality of raised structures 1044 support the mask, and the height of the support In the same way, ensure that the extension direction of the connecting portion 104 is parallel to the substrate to be vaporized, and then ensure that the shielding portion 103 is also parallel to the substrate to be vaporized, so as to prevent the shielding portion 103 from tilting so that the area on the display panel corresponding to the shielding portion 103 is vapor-deposited. Film structure.
  • a plurality of protruding structures 1044 can be arranged to be evenly distributed, and the plurality of protruding structures 1044 can be evenly arranged in the second groove, which can make the weight distribution of the connecting portion 104 more even, and prevent a part of the connecting portion 104 from being too heavy As a result, the amount of sagging of this part is too large, which in turn leads to the phenomenon that the shielding portion 103 is inclined, and further avoiding the vapor deposition of the film structure on the area corresponding to the shielding portion 103 on the display panel.
  • the connecting portion 104 may be arranged to be linear.
  • the connecting portion 104 is arranged in a linear structure, and while the linear connecting portion 104 is used to provide support for the shielding portion 103, the structure of the mask is simpler, which is beneficial to reduce the difficulty of the manufacturing process of the mask.
  • the connecting portion 104 is set to be linear, and the shortest structure of the connecting portion is used to realize the connection between the shielding portion 103 and the mask frame 101, which is beneficial to reduce the weight of the connecting portion 104 and the area of the connecting portion 104. Therefore, the area of the area corresponding to the connecting portion 104 on the display panel is reduced, which helps to ensure that the area on the display panel corresponding to the connecting portion 104 can be vapor-deposited with the film structure.
  • the shielding portion 103 is connected to the frame 101 through a plurality of connecting portions 104, and the extension directions of at least two connecting portions 104 are different.
  • FIG. 1 exemplarily provides that the shielding portion 103 is connected to the frame 101 through two connecting portions 104, and the extending directions of the two connecting portions 104 are perpendicular to each other.
  • the shielding portion 103 may also be connected to the frame 101 through more connecting portions 104, and the extending directions of the plurality of connecting portions 104 may be different.
  • the shielding part 103 and the frame 101 are fixedly connected by using a plurality of connecting parts 104 to better support the shielding part 103; at the same time, the extension directions of at least two connecting parts 104 are different, so that the connecting parts 104 extend along more
  • the three directions provide support for the shielding portion 103, which is beneficial to reduce the stress on each connecting portion 104, reduce the deformation of the connecting portion 104 and cause the probability of the shielding portion 103 to tilt, which is beneficial to improve the corresponding shielding portion 103 and the corresponding connecting portion on the display panel 104 Set the evaporation effect of the area.
  • FIG. 11 is another mask plate provided by an embodiment of the application. Structure diagram, one shielding portion 103 can correspond to three connecting portions 104, the positional relationship of the three connecting portions 104 is shown in FIG. 11, the extension directions of two connecting portions 104 of the three connecting portions 104 are perpendicular to each other, and the other one is connected The extending direction of the portion 104 is between two connecting portions that are perpendicular to each other; or, as shown in FIG. 12, FIG.
  • FIG. 12 is a schematic structural diagram of another mask provided by an embodiment of the application, and one shielding portion 103 may correspond to The positional relationship between the four connecting portions 104 and the four connecting portions 104 is shown in Fig. 12, the extending direction of two connecting portions 104 of the four connecting portions 104 is parallel to the first direction, and the extending direction of the other two connecting portions 104 is parallel to the first direction. Two directions, and the first direction is perpendicular to the second direction; or, as shown in FIG. 13, FIG. 13 is a schematic structural diagram of another mask provided by an embodiment of the application, and one shielding portion 103 can correspond to three connecting portions 104.
  • the positional relationship of the three connecting portions 104 is as shown in FIG. 13, the extension directions of two connecting portions 104 of the three connecting portions 104 are the same and are located on the same straight line, and the extending direction of the other connecting portion 104 is perpendicular to the straight line.
  • the maximum width d of the connecting portion 104 is greater than or equal to 150 ⁇ m and less than or equal to 300 ⁇ m.
  • the shielding portion 103 cannot be provided with sufficient supporting force, and the shielding portion 104 will droop severely, causing a large amount of vapor deposition material to be vaporized on the display panel.
  • the area of the shielding portion thereby seriously reducing the yield of the display panel; and if the width of the connecting portion 104 is too large, the area shielded by the connecting portion 104 will also be too large, and the vapor deposition material cannot be vaporized to the display in an oblique manner.
  • the entire area on the panel corresponding to the connecting portion 104 makes the film thickness of multiple parts of the display panel uneven, which affects the display effect.
  • the maximum width of the connecting portion 104 By setting the maximum width of the connecting portion 104 to be greater than or equal to 150 microns and less than or equal to 300 microns, it is possible to ensure that the connecting portion 104 provides sufficient support for the shielding portion 103, and it is ensured that the area on the display panel corresponding to the shielding portion 103 will not
  • the vapor deposition of the upper film structure can ensure that the position on the display panel corresponding to the connection portion 104 can be vapor deposited with the upper film structure, thereby improving the display uniformity of the display panel.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

一种掩膜版，包括：边框（101）及边框（101）环绕的开口（102）；遮挡部（103）以及连接遮挡部（103）与边框（101）的至少一个连接部（104），遮挡部（103）设置于开口（102）内；沿垂直于掩膜版的方向，连接部（104）包括设置为靠近待蒸镀基板（201）的第一部分（1041）和设置为远离待蒸镀基板（201）的第二部分（1042），第二部分（1042）的垂直投影覆盖第一部分（1041）的垂直投影，第一部分（1041）的平行于掩膜版的横截面的面积沿远离第二部分（1042）的方向逐渐减小。

Description

一种掩膜版
本申请要求在2019年10月31日提交中国专利局、申请号为201911053494.9的中国专利申请的优先权，该申请的全部内容通过引用结合在本申请中。
技术领域
本申请实施例涉及掩膜版技术，例如涉及一种掩膜版。
背景技术
随着显示技术的进步以及生活水平的提高，显示面板所起到的作用也越来越大，种类也越来越多，显示面板的显示区存在不同的显示效果，如挖孔屏等成为新的方向。
然而，挖孔屏较易损伤整体显示面板，从而造成显示面板的整体显示效果不佳。
发明内容
本申请提供一种掩膜版，可以简单高效地制备出显示区存在不同显示效果的显示面板。
本申请实施例提供了一种掩膜版，包括：边框及所述边框环绕的开口；遮挡部以及连接所述遮挡部与所述边框的至少一个连接部，所述遮挡部设置于所述开口内；沿垂直于所述掩膜版的方向，所述连接部包括设置为靠近待蒸镀基板的第一部分和设置为远离所述待蒸镀基板的第二部分，所述第二部分的垂直投影覆盖所述第一部分的垂直投影，所述第一部分的平行于所述掩膜版的横截面的面积沿远离所述第二部分的方向逐渐减小。
本发明采用的掩膜版包括边框以及边框环绕的开口；遮挡部以及连接遮挡 部与边框的至少一个连接部，遮挡部设置于开口内；沿垂直于掩膜版的方向，连接部包括靠近待蒸镀基板的第一部分和远离待蒸镀基板的第二部分，第二部分的垂直投影覆盖第一部分的垂直投影，第一部分平行于掩膜版的横截面积沿靠近待蒸镀基板的方向逐渐减小。在利用掩膜版蒸镀显示面板的膜层时，利用连接部有效实现了对离岸设计的遮挡部的稳固支撑，且可使得显示面板上对应于连接部的位置可通过斜向蒸镀形成相应的膜层结构，从而避免显示面板上与连接部对应的位置处未蒸镀上材料，影响显示面板显示效果的问题，有利于简单高效地制备出显示区存在不同显示效果的显示面板。
附图说明
图1为本申请实施例提供的一种掩膜版的结构示意图；
图2为图1沿A1-A2方向的剖面图；
图3为本申请实施例提供的一种蒸镀过程示意图；
图4为图1沿A1-A2方向的又一种剖面图，其中连接部具有与图2中的连接部不同的横截面形状；
图5为本申请实施例提供的又一种蒸镀过程示意图；
图6为图1沿A1-A2方向的又一种剖面图，其中连接部具有与图2中的连接部不同的横截面形状；
图7为图1沿A3-A4方向的一种剖面图；
图8为图1沿A1-A2方向的又一种剖面图，其中连接部具有与图2中的连接部不同的横截面形状；
图9为图1沿A1-A2方向的又一种剖面图，其中连接部具有与图2中的连接部不同的横截面形状；
图10为图1沿A5-A6方向的一种剖面图；
图11为本申请实施例提供的又一种掩膜版的结构示意图，其中一个遮挡部对应三个连接部，三个连接部中的两个连接部的延伸方向相互垂直，另外一个连接部的延伸方向介于相互垂直的两个连接部之间；
图12为本申请实施例提供的又一种掩膜版的结构示意图，其中，一个遮挡部对应四个连接部，四个连接部中两个连接部的延伸方向平行于第一方向，另外两个连接部的延伸方向平行于第二方向，且第一方向与第二方向垂直；
图13为本申请实施例提供的又一种掩膜版的结构示意图，其中一个遮挡部对应三个连接部，三个连接部中两个连接部的延伸方向一致，且位于同一直线上，另一连接部的延伸方向与该直线垂直。
具体实施方式
下面结合附图和实施例对本申请进行说明。此处所描述的实施例仅仅用于解释本申请，而非对本申请的限定。另外，为了便于描述，附图中仅示出了与本申请相关的部分而非全部结构。
正如背景技术中提到的挖孔屏存在显示面板整体易损坏的问题，经过仔细研究发现，产生此技术问题的原因在于：相关技术中，在制作挖孔屏的情况下，先利用掩膜版制作一整层的膜层结构，然后，再在该膜层结构上通过激光打孔形成孔状结构，然而，激光打孔技术难点较大，且较易损伤显示面板的膜层结构。
图1为本申请实施例提供的一种掩膜版的结构示意图，图2为图1沿A1-A2方向的剖面图，参考图1和图2，掩膜版包括边框101和边框101环绕的开口102；遮挡部103以及连接遮挡部103与边框101的至少一个连接部104，遮挡 部103设置于开口102内；沿垂直于掩膜版的方向，连接部104包括设置为靠近待蒸镀基板的第一部分1041和设置为远离待蒸镀基板的第二部分1042，第二部分1042的垂直投影覆盖第一部分1041的垂直投影，第一部分1041的平行于掩膜版的横截面的面积沿远离第二部分1042的方向逐渐减小。
在一实施例中，结合图1和图2，掩膜版可用来制作显示面板，一张掩膜版上包括多个开口102，每个开口102对应一个显示面板，开口102内的遮挡部103设置为在蒸镀显示面板的膜层(如阴极层或封装层)时，避免相应的材料蒸镀到显示面板无需形成该材料相应膜层的区域，例如区别于其它显示区域的指定区域(如挖孔区域)，避免了先制作一整层完整的膜层，再进行激光打孔导致的膜层损坏，进而影响显示面板的显示质量的问题。
本实施例中，第一部分1041的平行于掩膜版的横截面的面积沿远离第二部分1042的方向逐渐减小可以为第一部分1041剖面的宽度逐渐减小。图2示例性地示出了连接部104的左右侧呈对称结构。在一实施方式中，也可设置连接部104为非对称结构。图3为本申请实施例提供的一种蒸镀过程示意图，结合图2和图3，在利用掩膜版蒸镀显示面板的膜层的情况下，待蒸镀基板201设置于掩膜版的上方，连接部104的第一部分1041靠近待蒸镀基板201，连接部104的第二部分1042远离待蒸镀基板201，待蒸镀基板201包括被连接部104遮挡的遮挡区2011和未被连接部104遮挡的未遮挡区2012。例如，在利用本申请实施例提供的掩模版进行显示面板中阴极层的蒸镀的情况下，仅挖孔区，即待蒸镀基板上对应遮挡部103的区域需利用遮挡部103遮挡以避免该区域形成阴极材料，其余区域均需形成阴极材料，即遮挡区2011和未遮挡区2012上均需要蒸镀上相应的膜层结构，蒸镀时由下至上蒸镀材料至待蒸镀基板201上，可使得未遮挡区2012通过垂直方向蒸镀上膜层结构，且由于第一部分1041的平行 于掩膜版的横截面的面积沿靠近待蒸镀基板201的方向逐渐减小，还可使得遮挡区2011通过斜向蒸镀上膜层结构，从而避免显示面板上与连接部104对应的位置未蒸镀上材料，影响显示面板显示效果的问题。
上述连接部104的第一部分1041和第二部分1042沿垂直于掩模版的方向之间的界限本申请实施例没有限定，确保第一部分1041的平行于掩膜版的横截面的面积沿远离第二部分1042的方向逐渐减小即可。
本实施例采用的掩膜版包括边框以及边框环绕的开口；遮挡部以及连接遮挡部与边框的至少一个连接部，遮挡部设置于开口内；沿垂直于掩膜版的方向，连接部包括设置为靠近待蒸镀基板的第一部分和设置为远离待蒸镀基板的第二部分，第二部分的垂直投影覆盖第一部分的垂直投影，第一部分的平行于掩膜版的横截面的面积沿远离第二部分的方向逐渐减小。在利用掩膜版蒸镀显示面板的膜层的情况下，利用连接部有效实现了对遮挡部的稳固支撑，且可使得显示面板上对应于遮挡部的区域无法蒸镀上膜层结构以及显示面板上对应于连接部的位置通过斜向蒸镀形成相应的膜层结构，从而避免显示面板上与连接部对应的位置未蒸镀上材料，影响显示面板的显示效果的问题，有利于简单高效地制备出显示区存在不同显示效果的显示面板。
在一实施例中，图4为图1沿A1-A2方向的又一种剖面图，参考图4，沿垂直于掩膜版的方向，第二部分1042的平行于掩膜版的横截面的面积沿远离第一部分1041的方向逐渐减小。
在一实施例中，图5为本申请实施例提供的又一种蒸镀过程示意图，结合图4和图5，遮挡区2011和未遮挡区2012上均需要蒸镀上膜层结构，蒸镀时蒸镀材料由下至上蒸镀至待蒸镀基板201上，未遮挡区2012上远离遮挡区2011的区域既能够通过垂直方向蒸镀上膜层结构，还能够通过斜向蒸镀上一部分膜 层结构，而靠近遮挡区2011的区域由于受到连接部104的遮挡，只能通过垂直方向蒸镀上膜层结构，即未遮挡区2012靠近遮挡区2011区域的膜层厚度可能会小于远离遮挡区2011区域的膜层厚度，进而造成显示面板膜层厚度不均，影响显示效果。通过设置第二部分1042平行于掩膜版的横截面的面积沿远离第一部分1041的方向逐渐减小，第二部分1042对蒸镀材料从连接部104对应的区域斜向蒸镀到未遮挡区2012靠近遮挡区2011的区域的遮挡较少，可使得未遮挡区2012靠近遮挡区2011的区域通过斜向的方式蒸镀上一定的膜层结构，减小与远离遮挡区2011的区域膜层结构厚度的差异，从而提高显示面板上膜层厚度的均一性，提高显示的均一性，进一步提高显示效果。
在一实施例中，图2和图4所示的剖面图只是一种示例，在其他实施方式中，也可为其它形状。可选的，第一部分1041的平行于掩膜版的横截面的面积沿远离第二部分1042的方向可呈非线性减小，第二部分的平行于掩膜版的横截面的面积沿远离第一部分1041的方向可呈非线性减小。示例性地，图6为图1沿A1-A2方向的又一种剖面图，如图6所示，第一部分1041和第二部分1042的侧面均可为弧形结构，从而降低连接部的制作难度，节约制作成本。
在一实施例中，图7为图1沿A3-A4方向的一种剖面图，结合图1和图7，遮挡部103的设置为靠近待蒸镀基板的表面设置有至少一个第一凹槽，和/或，遮挡部103的设置为远离待蒸镀基板的表面设置有至少一个第一凹槽。图7示例性地设置遮挡部103的设置为靠近待蒸镀基板的表面设置有一个第一凹槽1031，即遮挡部103的上表面设置有一个第一凹槽1031。本申请实施例对遮挡部103的一个表面上设置的第一凹槽1031的数量以及遮挡部103设置有第一凹槽1031的表面的数量不作限定。
在一实施例中，遮挡部103对应于显示面板上需要挖孔的区域，显示面板 上需要挖孔的区域不需要蒸镀形成对应的膜层结构(如阴极层和薄膜封装层)，若遮挡部103重量太重，遮挡部103自身的重力导致遮挡部103容易形变，使得显示面板上对应于遮挡部103的部分区域可能蒸镀上膜层结构，影响显示面板上对应遮挡部103区域的膜层结构，降低显示面板的良率。另外，遮挡部103重量过大容易导致支撑遮挡部103的连接部104发生形变，影响显示面板上对应连接部104区域的蒸镀效果。本申请实施例通过设置遮挡部103的设置为靠近待蒸镀基板的表面设置有至少一个第一凹槽，和/或，遮挡部103的设置为远离待蒸镀基板的表面设置有至少一个第一凹槽，降低了遮挡部103的重量，降低了遮挡部103以及连接部104发生形变的概率，提升了显示面板上对应遮挡部103和连接部104区域的蒸镀效果，进而提升了显示面板的显示效果。
在一实施例中，继续参考图7，遮挡部103包括中间区1032和环绕中间区1032的边缘区1033，第一凹槽1031位于中间区1032。一实施例中，遮挡部103的形状可为圆形，边缘区1033可为圆环状，若边缘区1033的厚度过薄，在蒸镀时将会有过多的蒸镀材料通过斜向的方式到达显示面板上对应于遮挡部的位置，使得无需形成相应膜层的显示面板上对应遮挡部103设置的区域形成相应的膜层材料，降低了显示面板的良率。本申请实施例将第一凹槽1031设置于中间区1032内，使得边缘区1033的厚度高于中间区1032的厚度，边缘区1033的厚度不会太薄，降低了蒸镀时蒸镀材料通过斜向的方式蒸镀到显示面板上对应于遮挡部的区域的概率，进一步提高显示面板的良率。
在一实施例中，图8为图1沿A1-A2方向的又一种剖面图，参考图8，连接部104的设置为靠近待蒸镀基板的表面设置有至少一个第二凹槽，和/或，连接部104的设置为远离待蒸镀基板的表面设置有至少一个第二凹槽。图8示例性地设置连接部104设置为靠近待蒸镀基板的表面设置有一个第二凹槽1043， 即连接部104的上表面设置有一个第二凹槽1043。本申请实施例对连接部104的一个表面上设置第二凹槽1043的数量以及连接部104设置有第二凹槽1043的表面的数量不作限定。
在一实施例中，若连接部104重量太重，连接部104自身的重力导致连接部104容易形变，影响显示面板上对应连接部104区域的膜层结构，降低显示面板的良率。另外，连接部104起到对遮挡部103固定支撑的作用，连接部104形变使得连接部104对遮挡部103的支撑能力下降，且连接部104的形变可能导致遮挡部103位置的变化，影响显示面板上对应遮挡部103区域的蒸镀效果。本申请实施例通过设置连接部104的设置为靠近待蒸镀基板的表面设置有至少一个第二凹槽，和/或，连接部104的设置为远离待蒸镀基板的表面设置有至少一个第二凹槽，降低了连接部104的重量，降低了连接部104发生形变的概率，避免了由于连接部104重量过大而导致连接部104下垂，进而导致遮挡部103下垂过多的现象，进一步保证显示面板上对应于遮挡部103的区域不会蒸镀上膜层结构，提升了显示面板上对应遮挡部103和连接部104区域的蒸镀效果，进而提升了显示面板的显示效果。
在一实施例中，图9为图1沿A1-A2方向的又一种剖面图，参考图9，连接部104的设置为靠近待蒸镀基板的表面设置有至少一个第二凹槽1043，第二凹槽1043内设置有多个凸起结构1044。
在一实施例中，在蒸镀显示面板的情况下，需要在待蒸镀基板远离掩膜版的一侧设置磁性材料，以吸附掩膜版避免掩膜版下垂，然而，磁性材料可能会将掩膜版吸附到待蒸镀基板上，从而使得连接部104与待蒸镀基板之间不存在间隙，在蒸镀时无法将蒸镀材料蒸镀到显示面板上对应于连接部104的位置，从而造成膜层厚度不均匀，影响显示效果。通过设置多个凸起结构1044，当连 接部104因为受到吸引而贴附在待蒸镀基板的表面上时，凸起结构1044可支撑连接部104，避免连接部104完全贴附在待蒸镀基板的表面，多个凸起结构1044的缝隙对应的显示面板的区域内可蒸镀上膜层结构，避免显示面板对应于连接部104的区域无法蒸镀上膜层结构而导致显示不均的现象，提升显示效果。
在一实施例中，如图9所示，多个凸起结构1044可沿垂直于连接部103的延伸方向的方向排列，也可如图10所示，图10为图1沿A5-A6方向的一种剖面图。图10示出了多个凸起结构1044沿连接部103的延伸方向排列的一种视图。在一实施例中，多个凸起结构1044可沿连接部103的延伸方向排列，或者也可以设置多个凸起结构1044既沿垂直于连接部103的延伸方向的方向排列，又沿连接部103的延伸方向排列，例如，多个凸起结构1044中的部分凸起结构1044沿垂直于连接部103的延伸方向的方向排列，剩余的凸起结构1044沿连接部103的延伸方向排列。示例性地，多个凸起结构1044可以点阵式排列，即每个凸起结构1044均为孤立的岛状结构，例如图10中可以设置凸起结构1044为梯形台状结构，即可以设置凸起结构1044的上表面和下表面的形状均为圆形，凸起结构1044的设置为靠近待蒸镀基板的一面可与待蒸镀基板平行，当连接部104贴附在待蒸镀基板的表面上时，凸起结构1044可支撑连接部104，避免连接部104完全贴附在待蒸镀基板的表面。一实施例中，图10仅示例性地设置凸起结构1044的截面为正梯形，也可以设置凸起结构1044的截面为矩形或者倒梯形。本申请实施例对凸起结构1044的截面的形状不作限定，确保凸起结构1044面向待蒸镀基板的一侧具有支撑平台即可。
在一实施例中，继续参考图9和图10，可以设置沿垂直于掩膜版的方向，多个凸起结构1044的高度相同；和/或，多个凸起结构1044均匀分布。
在一实施例中，多个凸起结构1044的高度相同，可使得在掩膜版贴附于待 蒸镀基板上的情况下，多个凸起结构1044支撑住掩膜版，且支撑的高度相同，保证连接部104的延伸方向平行于待蒸镀基板，进而保证遮挡部103也平行于待蒸镀基板，避免遮挡部103发生倾斜而使得显示面板上对应于遮挡部103的区域蒸镀上膜层结构。同时，可设置多个凸起结构1044均匀分布，多个凸起结构1044均匀地布置于第二凹槽内，可使得连接部104重量分布更为均匀，避免连接部104的一部分重量过大而导致该部分下垂量过大，进而导致遮挡部103倾斜的现象，进一步避免显示面板上对应于遮挡部103的区域蒸镀上膜层结构。
在一实施例中，如图1所示，可以设置连接部104呈直线状。将连接部104设置为直线结构，在利用直线状的连接部104为遮挡部103提供支撑力的同时，使得掩膜版的结构较为简单，有利于降低掩膜版的制作过程难度。另外，设置连接部104为直线状，利用最短结构的连接部实现了遮挡部103与掩膜版边框101的连接，有利于减小连接部104的重量，也有利于减小连接部104的面积，进而减小了显示面板上对应连接部104设置区域的面积，有利于确保显示面板上对应于连接部104的区域能够蒸镀上膜层结构。
在一实施例中，继续参考图1，遮挡部103通过多个连接部104与边框101连接，至少两个连接部104的延伸方向不同。图1示例性地设置遮挡部103通过两个连接部104与边框101连接，两个连接部104的延伸方向相互垂直。在一实施例中，也可以设置遮挡部103通过更多的连接部104与边框101连接，设置多个连接部104的延伸方向均不相同。
在一实施例中，利用多个连接部104将遮挡部103与边框101固定连接，可更好地支撑遮挡部103；同时，至少两个连接部104的延伸方向不同，使得连接部104沿多个方向为遮挡部103提供支撑力，有利于降低每个连接部104所受应力，降低连接部104形变进而导致遮挡部103倾斜的概率，有利于提升显 示面板上对应遮挡部103和对应连接部104设置区域的蒸镀效果。
在一实施例中，图1中示出的连接部与遮挡部的位置关系仅是一种示例，也可如图11所示，图11为本申请实施例提供的又一种掩膜版的结构示意图，一个遮挡部103可对应三个连接部104，三个连接部104的位置关系如图11所示，三个连接部104中的两个连接部104的延伸方向相互垂直，另外一个连接部104的延伸方向介于相互垂直的两个连接部之间；或者，如图12所示，图12为本申请实施例提供的又一种掩膜版的结构示意图，一个遮挡部103可对应四个连接部104，四个连接部104的位置关系如图12，四个连接部104中两个连接部104的延伸方向平行于第一方向，另外两个连接部104的延伸方向平行于第二方向，且第一方向与第二方向垂直；或者，如图13所示，图13为本申请实施例提供的又一种掩膜版的结构示意图，一个遮挡部103可对应三个连接部104，三个连接部104的位置关系如图13，三个连接部104中两个连接部104的延伸方向一致，且位于同一直线上，另一连接部104的延伸方向与该直线垂直。
在一实施例中，如图9所示，沿垂直于连接部104的延伸方向的方向，连接部104的最大宽度d大于或等于150微米，且小于或等于300微米。
在一实施例中，若连接部104的最大宽度过小，则无法为遮挡部103提供足够的支撑力，遮挡部104将会发生严重的下垂，使得大量的蒸镀材料蒸镀到显示面板上对应遮挡部的区域，从而严重降低显示面板的良率；而若连接部104的宽度过大，则连接部104遮挡的区域也会过大，蒸镀材料无法通过斜向的方式蒸镀到显示面板上对应于连接部104的全部区域，进而使得显示面板多个部分的膜层厚度不均匀，影响显示效果。通过设置连接部104的最大宽度大于或等于150微米，且小于或等于300微米，既能够保证连接部104为遮挡部103提供足够的支撑力，保证显示面板上对应于遮挡部103的区域不会蒸镀上膜层 结构，又能够保证显示面板上对应于连接部104的位置能够蒸镀上膜层结构，提高显示面板的显示均一性。

Claims (20)

  1. 一种掩膜版，包括：
    边框及所述边框环绕的开口；
    遮挡部，所述遮挡部设置于所述开口内；以及
    连接所述遮挡部与所述边框的至少一个连接部；
    沿垂直于所述掩膜版的方向，所述连接部包括设置为靠近待蒸镀基板的第一部分和设置为远离所述待蒸镀基板的第二部分，所述第二部分的垂直投影覆盖所述第一部分的垂直投影，所述第一部分的平行于所述掩膜版的横截面的面积沿远离所述第二部分的方向逐渐减小。
  2. 根据权利要求1所述的掩膜版，其中，沿垂直于所述掩膜版的方向，所述第二部分的平行于所述掩膜版的横截面的面积沿远离所述第一部分的方向逐渐减小。
  3. 根据权利要求1所述的掩膜版，其中，所述遮挡部的靠近所述待蒸镀基板的表面设置有至少一个第一凹槽；
    或，所述遮挡部的远离所述待蒸镀基板的表面设置有至少一个第一凹槽；
    或，所述遮挡部的靠近所述待蒸镀基板的表面设置有至少一个第一凹槽，且所述遮挡部的远离所述待蒸镀基板的表面设置有至少一个第一凹槽。
  4. 根据权利要求3所述的掩膜版，其中，所述遮挡部包括中间区和环绕所述中间区的边缘区，所述第一凹槽位于所述中间区。
  5. 根据权利要求1所述的掩膜版，其中，所述连接部的靠近所述待蒸镀基板的表面设置有至少一个第二凹槽；
    或，所述连接部的远离所述待蒸镀基板的表面设置有至少一个第二凹槽；
    或，所述连接部的靠近所述待蒸镀基板的表面设置有至少一个第二凹槽，且所述连接部的远离所述待蒸镀基板的表面设置有至少一个第二凹槽。
  6. 根据权利要求5所述的掩膜版，其中，所述连接部的靠近所述待蒸镀基板的表面设置有至少一个第二凹槽，所述第二凹槽内设置有多个凸起结构。
  7. 根据权利要求6所述的掩膜版，其中，沿垂直于所述掩膜版的方向，所述多个凸起结构的高度相同；
    或，所述多个凸起结构均匀分布；
    或，沿垂直于所述掩膜版的方向，所述多个凸起结构的高度相同；且所述多个凸起结构均匀分布。
  8. 根据权利要求1所述的掩膜版，其中，所述连接部呈直线状。
  9. 根据权利要求8所述的掩膜版，其中，所述遮挡部通过多个连接部与所述边框连接，至少两个连接部的延伸方向不同。
  10. 根据权利要求8所述的掩膜版，其中，沿垂直于所述连接部延伸方向的方向，所述连接部的最大宽度大于或等于150微米，且小于或等于300微米。
  11. 根据权利要求6所述的掩膜版，其中，所述多个凸起结构沿垂直于所述连接部延伸方向的方向排列。
  12. 根据权利要求6所述的掩膜版，其中，所述多个凸起结构沿所述连接部延伸方向的方向排列。
  13. 根据权利要求6所述的掩膜版，其中，所述多个凸起结构中的部分凸起结构沿垂直于连接部的延伸方向的方向排列，剩余的凸起结构沿连接部的延伸方向排列。
  14. 根据权利要求6所述的掩膜版，其中，所述凸起结构为梯形台状结构。
  15. 根据权利要求6所述的掩膜版，其中，所述凸起结构的垂直于所述连接部延伸方向的方向上的截面的形状为正梯形、矩形或者倒梯形。
  16. 根据权利要求9所述的掩膜版，其中，所述遮挡部通过三个连接部与 所述边框连接。
  17. 根据权利要求16所述的掩膜版，其中，所述三个连接部中的两个连接部的延伸方向相互垂直，剩余的一个连接部位于所述两个连接部之间；
    或，所述三个连接部中的两个连接部的延伸方向一致，且所述两个连接部位于同一直线上，剩余的一个连接部的延伸方向垂直于所述直线。
  18. 根据权利要求9所述的掩膜版，其中，所述遮挡部通过四个连接部与所述边框连接。
  19. 根据权利要求13所述的掩膜版，其中，所述四个连接部中的两个连接部的延伸方向平行于第一方向，剩余的两个连接部的延伸方向平行于第二方向，且所述第一方向与所述第二方向垂直。
  20. 根据权利要求4所述的掩膜版，其中，所述遮挡部的形状为圆形，所述边缘区的形状为圆环状。
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