WO2021063053A1 - 显示基板及其制作方法、显示装置 - Google Patents
显示基板及其制作方法、显示装置 Download PDFInfo
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- WO2021063053A1 WO2021063053A1 PCT/CN2020/099349 CN2020099349W WO2021063053A1 WO 2021063053 A1 WO2021063053 A1 WO 2021063053A1 CN 2020099349 W CN2020099349 W CN 2020099349W WO 2021063053 A1 WO2021063053 A1 WO 2021063053A1
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- 239000000758 substrate Substances 0.000 title claims abstract description 232
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- 239000010409 thin film Substances 0.000 claims description 9
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
- H10K59/353—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels characterised by the geometrical arrangement of the RGB subpixels
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/60—OLEDs integrated with inorganic light-sensitive elements, e.g. with inorganic solar cells or inorganic photodiodes
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/8791—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K59/8792—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. black layers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/126—Shielding, e.g. light-blocking means over the TFTs
Definitions
- the present disclosure relates to the field of display technology, and in particular to a display substrate, a manufacturing method thereof, and a display device.
- OLED display substrates are widely used in display fields such as mobile phones, tablet computers, and digital cameras due to their advantages of low energy consumption, low production cost, self-luminescence, wide viewing angle, and fast response speed.
- a first aspect of the present disclosure provides a display substrate including a substrate and a plurality of sub-pixels arrayed on the substrate. At least one of the sub-pixels includes: a light-emitting element, a sub-pixel drive circuit coupled to the light-emitting element, And a light-emitting detection circuit for detecting the light-emitting brightness of the light-emitting element, the light-emitting detection circuit comprising: a first control transistor and a PIN-type photodiode that are sequentially stacked in a direction away from the substrate, and a first control transistor of the first control transistor One pole is coupled to the cathode of the PIN-type photodiode, and the orthographic projection of the first control transistor on the substrate at least partially overlaps the orthographic projection of the PIN-type photodiode on the substrate.
- the PIN-type photodiode includes a cathode, a photoelectric conversion structure, and an anode that are sequentially stacked in a direction away from the substrate;
- the cathode adopts a light-shielding material, and the orthographic projection of the first control transistor on the substrate is located inside the orthographic projection of the cathode on the substrate.
- the plurality of sub-pixels are divided into a plurality of sub-pixel groups distributed in an array, each of the sub-pixel groups includes at least four sub-pixels distributed in an array, and the at least four sub-pixels are located in two adjacent rows, and the same
- the sub-pixels of the sub-pixel group multiplex the same luminescence detection circuit; the orthographic projection of the PIN-type photodiode in the luminescence detection circuit on the substrate is respectively corresponding to each of the sub-pixel groups.
- the orthographic projections of the light-emitting elements included in the sub-pixels on the substrate overlap.
- the display substrate further includes a reference signal line, a first sensing signal line, and a first control signal line, the reference signal line is coupled to the anode of the PIN photodiode, and the first sensing A signal line is coupled to the second electrode of the first control transistor, and the first control signal line is coupled to the gate of the first control transistor;
- the plurality of sub-pixels includes a plurality of sub-pixel rows and a plurality of sub-pixel columns; each of the sub-pixel rows includes a plurality of the sub-pixels sequentially arranged along a first direction, and each of the sub-pixel columns includes a plurality of sub-pixel rows along a first direction. A plurality of said sub-pixels arranged sequentially in two directions, said first direction intersects said second direction;
- the light emission detection circuits located in the same row multiplex the same first reference signal line and the same control signal line;
- the light emission detection circuits located in the same column multiplex the same first sensing signal line.
- the orthographic projection of the reference signal line on the substrate and the orthographic projection of each of the PIN-type photodiodes coupled to the reference signal line on the substrate overlap.
- the reference signal line and the PIN-type photodiode are sequentially stacked in a direction away from the substrate.
- the orthographic projection of the first control signal line on the substrate and the orthographic projection of the PIN photodiodes in each of the light-emitting detection circuits coupled to the first control signal line on the substrate overlap.
- the first control signal line and the PIN-type photodiode are sequentially stacked in a direction away from the substrate.
- the light emission detection circuit further includes a storage capacitor, the first plate of the storage capacitor is coupled to the anode of the PIN photodiode, and the second plate of the storage capacitor is connected to the anode of the PIN photodiode.
- the first electrode plate and the first electrode and the second electrode of the first control transistor are arranged in the same layer and the same material;
- the cathode of the PIN photodiode is multiplexed as the second plate of the storage capacitor coupled to it, and the orthographic projection of the first plate on the substrate is located on the second plate on the substrate. The interior of the orthographic projection.
- the display substrate further includes: a second sensing signal line and a second control signal line;
- the sub-pixel further includes an electrical detection circuit, the electrical detection circuit includes a second control transistor, the first electrode of the second control transistor is coupled to the anode of the light-emitting element, and the second control transistor The pole is coupled to the second sensing signal line, and the gate of the second control transistor is coupled to the second control signal line;
- the electrical detection circuits located in the same row multiplex the same second control signal line;
- the electrical detection circuits located in the same column multiplex the same second sensing signal line.
- At least two adjacent rows of the electrical detection circuits multiplex the same second sensing signal line.
- the first sensing signal lines and the second sensing signal lines are alternately arranged, and there are at least two rows between the adjacent first sensing signal lines and the second sensing signal lines The sub-pixel column.
- the display substrate further includes a data line corresponding to each of the sub-pixel columns one-to-one, and each of the data lines is respectively coupled to a sub-pixel drive circuit included in each sub-pixel in the corresponding sub-pixel column;
- At least one column of the sub-pixels is included between the data line and the first sensing signal line;
- At least one column of the sub-pixels is included between the data line and the second sensing signal line.
- the sub-pixels corresponding to the electrical detection circuits in the same row may form a pixel unit, and the light emitted by the pixel unit is white light.
- each of the sub-pixel groups includes eight sub-pixels distributed in an array, and the eight sub-pixels are respectively located in two adjacent rows, and four sub-pixels in the same row among the eight sub-pixels constitute a display substrate
- the light emitted by the pixel unit is white light.
- the first control transistor includes an oxide thin film transistor.
- the display substrate further includes a first flat layer, and the first flat layer is located between the first control transistor and the PIN photodiode.
- a second aspect of the present disclosure provides a display device including the above display substrate.
- a third aspect of the present disclosure provides a manufacturing method of a display substrate for manufacturing the above display substrate.
- the manufacturing method includes a step of manufacturing a plurality of sub-pixels distributed in an array on a substrate.
- the specific steps include:
- the PIN-type photodiode in each of the luminescence detection circuits is fabricated on the side of the first control transistor facing away from the substrate, and the first pole of the first control transistor is corresponding to the cathode of the PIN-type photodiode Coupled, the orthographic projection of the first control transistor on the substrate at least partially overlaps the orthographic projection of the corresponding PIN-type photodiode on the substrate;
- a light-emitting element included in each sub-pixel is fabricated on the side of the PIN-type photodiode facing away from the substrate, and the light-emitting element is coupled to the corresponding sub-pixel driving circuit.
- a first flat layer is formed between the first control transistor and the PIN photodiode.
- FIG. 1 is a first cross-sectional schematic diagram of a light-emitting detection element provided by an embodiment of the disclosure
- FIG. 2 is a schematic diagram of a second cross-section of a light-emitting detection element provided by an embodiment of the disclosure
- FIG. 3 is a schematic top view of a light-emitting detection element provided by an embodiment of the disclosure.
- FIG. 4 is a schematic diagram of the structure of a light-emitting detection element provided by an embodiment of the disclosure.
- FIG. 5 is a schematic top view of a display substrate provided by an embodiment of the disclosure.
- the OLED display substrate includes a plurality of sub-pixels distributed in an array.
- Each sub-pixel includes a sub-pixel driving circuit and a light-emitting element coupled to each other.
- the sub-pixel driving circuit provides a driving current for the corresponding light-emitting element to drive the light-emitting element to emit corresponding colors Light.
- the sub-pixel is generally set to detect the brightness of light emitted by the light-emitting element Detection circuit
- the light-emitting detection circuit mainly includes a detection switch transistor and a PIN-type photodiode.
- the PIN-type photodiode When the light-emitting detection circuit is used to detect the intensity of the light emitted by the light-emitting element, the PIN-type photodiode receives the light emitted by the light-emitting element and will receive The light is converted into an electrical signal, so that the converted electrical signal can compensate the light emission of the light-emitting element.
- the area of the PIN-type photodiode is generally larger.
- setting the PIN-type photodiode with a larger area will cause the overall area of the light-emitting detection circuit to be larger, which will lead to The aperture ratio of the display substrate decreases.
- an embodiment of the present disclosure provides a display substrate, including a substrate 10 and a plurality of sub-pixels arrayed on the substrate 10, each of the sub-pixels includes: a light-emitting element, and the light-emitting element A sub-pixel driving circuit coupled to the element, and a light-emitting detection circuit for detecting the light-emitting brightness of the light-emitting element.
- the light-emitting detection circuit includes: a first control transistor T1 and a PIN type that are sequentially stacked in a direction away from the substrate 10
- the photodiode 17, the first pole 151 of the first control transistor T1 is coupled to the cathode 170 of the PIN-type photodiode 17, the orthographic projection of the first control transistor T1 on the substrate 10, and the The orthographic projections of the PIN photodiodes 17 on the substrate 10 at least partially overlap.
- the base 10 in the display substrate may include a glass base 10, but is not limited thereto.
- the light-emitting color of the light-emitting elements included in each sub-pixel in the display substrate can be set according to actual needs.
- the light-emitting elements included in each sub-pixel in the display substrate can be set to emit white light.
- the display substrate further includes a color film structure, and the color film structure may include color resist patterns of at least three colors, such as a red color resist pattern, a green color resist pattern, and a blue color resist pattern. The pattern corresponds to the light-emitting element one-to-one, so that the light emitted by the light-emitting element can pass through its corresponding color resist pattern and then exit the display substrate, thereby realizing the display function of the display substrate.
- the sub-pixels in the same column can be set to correspond to the color resist patterns of the same color. As shown in Figure 5, the first column of sub-pixels from the left corresponds to the red color resist pattern, and the corresponding data line is DR.
- the light emitted by the pixel is red light; the second column of sub-pixels corresponds to the green color resist pattern, the corresponding data line is DG, and the second column of sub-pixels emit green light; the third column of sub-pixels corresponds to the blue color resist pattern, and the corresponding data line It is DB, the light emitted by the third column of sub-pixels is blue; the fourth column of sub-pixels corresponds to a white color resist pattern, the corresponding data line is DW, and the light from the fourth column of sub-pixels is white light.
- each sub-pixel further includes a sub-pixel drive circuit and a light-emission detection circuit.
- the position layout of the sub-pixel drive circuit and the light-emission detection circuit can be set according to actual needs, for example, as shown in FIG. 5
- the first layout area 20 of the sub-pixel driving circuit and the second layout area 22 of the light-emission detection circuit are arranged oppositely, and the opening area 21 of the sub-pixel is located in the sub-pixel. Between the first layout area 20 of the driving circuit and the second layout area 22 of the light emission detection circuit.
- the sub-pixel driving circuit may include at least one driving thin film transistor and a plurality of switching thin film transistors. These thin film transistors cooperate with each other so that the driving thin film transistor generates a driving signal and transmits it to the corresponding light-emitting element to drive the corresponding light-emitting element Realize the light-emitting function.
- the light emission detection circuit includes the first control transistor T1 and the PIN-type photodiode 17.
- the first pole 151 of the first control transistor T1 is coupled to the cathode 170 of the PIN-type photodiode 17.
- the first control transistor T1 and the PIN-type photodiode 17 are laminated and arranged, and the first control transistor T1 is arranged on the substrate 10 and the PIN-type photodiode 17.
- the orthographic projection of the first control transistor T1 on the substrate 10 at least partially overlaps the orthographic projection of the PIN-type photodiode 17 on the substrate 10, so that it is perpendicular to In the direction of the substrate 10, the PIN-type photodiode 17 can shield at least part of the first control transistor T1.
- the display substrate provided by the embodiment of the present disclosure can be selected as bottom emission, that is, light is emitted from the side where the base 10 of the display substrate is located.
- the display substrate is arranged on the first control transistor T1 and the PIN type photoelectric
- the first control transistor T1 is disposed between the substrate 10 and the PIN-type photodiode 17.
- the display substrate further includes a light-shielding layer 11, a buffer layer 120, a first insulating layer 121, a first passivation layer 122, a second passivation layer 123, a second planarization layer 125, and a gate.
- the PIN-type photodiode 17 receives the light emitted by its corresponding light-emitting element, converts it into an electrical signal, and transmits it to the chip of the display substrate via the first control transistor T1.
- the chip compensates the light-emitting brightness of the light-emitting element in the display substrate based on the electrical signal, so as to achieve the uniformity of the display brightness of the display substrate.
- the first control transistor T1 and the PIN photodiode 17 included in the light-emitting detection circuit in each sub-pixel are sequentially arranged in a direction away from the base 10 Stacked arrangement, and set the orthographic projection of the first control transistor T1 on the substrate 10 to at least partially overlap the orthographic projection of the PIN-type photodiode 17 on the substrate 10, so that the PIN-type photoelectric
- the diode 17 can shield at least part of the first control transistor T1, reducing the area occupied by the light-emitting detection circuit in a direction parallel to the substrate 10, thereby effectively increasing the aperture ratio of each sub-pixel.
- the first control transistor T1 is disposed between the base 10 and the PIN-type photodiode 17, and the light-emitting element is disposed on the PIN-type photodiode.
- the side of 17 facing away from the base 10 realizes that while increasing the aperture ratio of the display substrate, it also ensures the light sensing accuracy of the PIN-type photodiode 17 so as to be more conducive to improving the brightness of the display substrate. Uniformity.
- the PIN-type photodiode 17 includes a cathode 170, a photoelectric conversion structure 171, and an anode 172 that are sequentially stacked in a direction away from the substrate 10; the cathode 170 is made of light-shielding material, and the first control The orthographic projection of the transistor T1 on the substrate 10 is located inside the orthographic projection of the cathode 170 on the substrate 10.
- the cathode 170 of the PIN-type photodiode 17 is made of light-shielding material, and specifically, a metal material with light-shielding performance can be selected. But it is not limited to this.
- the photoelectric conversion structure 171 specifically includes: a PN junction and a layer of I-type semiconductor with a low concentration doped in the middle of the PN junction. Because the doped I-type semiconductor has a low concentration, it is almost an Intrinsic semiconductor. It can be called the I layer. On both sides of the I layer are P-type semiconductors and N-type semiconductors with high doping concentration, which are formed into P and N layers. The P and N layers are very thin, and the proportion of absorbing incident light is small. , So that most of the incident light is absorbed in the I layer and generate a large number of electron-hole pairs, and the I layer is thicker and almost occupies the entire depletion zone, which can be achieved by increasing the width of the depletion zone. Achieve the purpose of reducing the influence of the diffusion movement and improving the response speed of the photodiode.
- the PIN-type photodiode 17 can well receive the light emitted by the corresponding light-emitting element, thereby ensuring the detection accuracy of the light-emitting detection circuit.
- the cathode is provided with a light-shielding material, and the orthographic projection of the first control transistor T1 on the substrate 10 is located inside the orthographic projection of the cathode on the substrate 10.
- the first control transistor T1 is completely covered by the PIN-type photodiode 17, which not only minimizes the area occupied by the luminescence detection circuit in the direction parallel to the substrate 10, so that the luminescence detection
- the area occupied by the circuit in the direction parallel to the substrate 10 is only the area occupied by the PIN-type photodiode 17, and the first control transistor T1 is prevented from being affected by light, which ensures that the light-emitting detection circuit
- the smaller dark current that is, the current of the first control transistor T1 in the off state, thereby effectively improving the signal-to-noise ratio of the light-emitting detection circuit.
- the plurality of sub-pixels are divided into a plurality of sub-pixel groups distributed in an array, each of the sub-pixel groups includes at least four sub-pixels distributed in an array, and the at least four sub-pixels are located in In two adjacent rows, sub-pixels of the same sub-pixel group multiplex the same luminescence detection circuit; the orthographic projection of the PIN-type photodiode 17 in the luminescence detection circuit on the substrate 10 is different from The orthographic projections of the light-emitting elements included in the sub-pixels in the corresponding sub-pixel groups on the substrate 10 overlap.
- the plurality of sub-pixels may be divided into a plurality of sub-pixel groups, the plurality of sub-pixel groups are arranged in an array, and each of the sub-pixel groups includes an array distribution and is arranged adjacently
- the at least four sub-pixels may be located in two adjacent rows; for example, the sub-pixel group includes 8 sub-pixels, the 8 sub-pixels include 4 sub-pixels located in the same row, and the at least four sub-pixels may be located in two adjacent rows. 4 sub-pixels in the next adjacent row.
- the 4 sub-pixels located in the same row can correspond to the red color group unit, the green color group unit, the blue color group unit, and the white color group unit one by one, so that the 4 sub-pixels located in the same row constitute the whole A pixel unit in the display substrate.
- the 4 sub-pixels located in the next adjacent row can also correspond to the red color group unit, the green color group unit, the blue color group unit, and the white color group unit one by one, so that the four sub-pixels located in the next adjacent row
- the 4 sub-pixels also constitute a pixel unit in the display substrate.
- the PIN-type photodiode 17 in the luminescence detection circuit can be arranged on the substrate 10
- the orthographic projection on the corresponding sub-pixel group overlaps with the orthographic projection of the light-emitting element included in each sub-pixel in the sub-pixel group on the substrate 10, so that the luminescence detection circuit can receive its corresponding sub-pixel group
- the light emitted by the light-emitting element included in each sub-pixel in the sub-pixel so as to realize the light-emitting detection of the light-emitting element included in each sub-pixel in the corresponding sub-pixel group.
- sub-pixels in the same sub-pixel group multiplex the same luminescence detection circuit, so that the area occupied by the luminescence detection circuit in the display substrate is further reduced, thereby further reducing the area occupied by the luminescence detection circuit. It is beneficial to increase the aperture ratio of the display substrate.
- the sub-pixels of the same sub-pixel group are multiplexed with the same light-emission detection circuit, which also reduces the number of vertices of the PIN-type photodiode 17 in the light-emission detection circuit included in the display substrate. Thereby, the dark current of the luminescence detection circuit is further reduced.
- the display substrate provided by the above embodiment further includes a reference signal line REF, a first sensing signal line SL1, and a first control signal line G1, the reference signal line REF and the PIN-type photoelectric
- the anode 172 of the diode 17 is coupled through a via0, the first sensing signal line SL1 is coupled to the second pole 150 of the first control transistor T1, and the first control signal line G1 is coupled to the first electrode 150 of the first control transistor T1.
- the gate of the control transistor T1 is coupled; the first electrode 151 of the first control transistor T1 is coupled to the cathode 170 of the PIN photodiode 17 through the dashed frame pattern in FIG. 3.
- the plurality of sub-pixels includes a plurality of sub-pixel rows and a plurality of sub-pixel columns; each of the sub-pixel rows includes a plurality of the sub-pixels sequentially arranged along a first direction, and each of the sub-pixels
- Each pixel column includes a plurality of the sub-pixels arranged in sequence along a second direction, the first direction intersects the second direction; along the first direction, the light emission detection circuits located in the same row multiplex the same One reference signal line REF and the same first control signal line G1; along the second direction, the light emission detection circuits located in the same column multiplex the same first sensing signal line SL1.
- the plurality of sub-pixels included in the display substrate are distributed in an array, and the plurality of sub-pixels may be divided into a plurality of sub-pixel rows or a plurality of sub-pixel columns; wherein each of the sub-pixel rows includes A plurality of the sub-pixels sequentially arranged along a first direction, each of the sub-pixel columns includes a plurality of the sub-pixels sequentially arranged along a second direction, and the first direction may intersect the second direction Exemplarily, the first direction is perpendicular to the second direction.
- the display substrate further includes a plurality of reference signal lines REF, a plurality of first sensing signal lines SL1, and a plurality of first control signal lines G1.
- the The anode 172 of the PIN photodiode 17 is coupled to the reference signal line REF corresponding to the light emission detection circuit
- the second pole 150 of the first control transistor T1 is coupled to the first sensing signal line SL1 corresponding to the light emission detection circuit
- the gate of the first control transistor T1 is coupled to the first control signal line G1 corresponding to the light emission detection circuit.
- the specific layout of the plurality of reference signal lines REF, the plurality of first sensing signal lines SL1, and the plurality of first control signal lines G1 are various, for example, as shown in FIG. 5 It is shown that the luminescence detection circuits located in the same row along the first direction can be multiplexed with the same reference signal line REF and the same first control signal line G1; along the second direction, located in The luminescence detection circuits in the same column multiplex the same first sensing signal line SL1; in this arrangement, a driving method similar to the gate line and data line in the display substrate can be adopted, and the first control The signal line G1 controls the first control transistor T1 to turn on row by row, and when the first control transistor T1 is turned on in a certain row, the PIN-type photodiode 17 sensor of the row is transmitted through the plurality of first sensing signal lines SL1. Measured sensing signal.
- the luminescence detection circuits located in the same row along the first direction multiplex the same reference signal line REF and the same first control signal line G1, and The luminescence detection circuits located in the same column along the second direction multiplex the same first sensing signal line SL1, so that the reference signal line REF provided in the display substrate, the first The number of the sensing signal line SL1 and the first control signal line G1 is greatly reduced, thereby reducing the complexity of the layout of the display substrate and further improving the resolution of the display substrate.
- an orthographic projection of the reference signal line REF on the substrate 10 may be provided, and each of the PIN-type photodiodes 17 coupled to the reference signal line REF may be located on the substrate 10. And/or, the orthographic projection of the first control signal line G1 on the substrate 10, and the PIN-type photodiode 17 in each of the light-emitting detection circuits coupled with it is in the The orthographic projections on the substrate 10 all overlap.
- the luminescence detection circuits located in the same row multiplex the same reference signal line REF and the same first control signal line G1, and are located along the second direction
- the reference signal line REF and the first control signal line G1 both extend along the first direction
- the first A sensing signal line SL1 extends along the second direction.
- the specific layout of the reference signal line REF and the first control signal line G1 can be set according to actual needs, and only needs to satisfy that the reference signal line REF can correspond to each PIN in a row of light-emitting detection circuits respectively.
- the anode 172 of the type photodiode 17 is coupled, and the first control signal line G1 can be coupled to the gate of each first control transistor T1 in the corresponding row of light emission detection circuit;
- the orthographic projection of G1 on the substrate 10 and the orthographic projections of the PIN-type photodiodes 17 in each of the light-emitting detection circuits coupled with it on the substrate 10 overlap; this arrangement makes the reference signal The line REF and/or the first control signal line G1 can overlap the above-mentioned PIN-type photodiode 17 in a direction perpendicular to the substrate 10, while ensuring the normal operation of each of the light-emitting detection circuits, more It is beneficial to increase the aperture ratio of the display substrate.
- reference signal line REF and the first control signal line G1 may both be arranged between the substrate 10 and the PIN-type photodiode to avoid the reference signal line REF and the first control signal line G1.
- the control signal line G1 blocks the light-receiving surface of the PIN-type photodiode.
- the light emission detection circuit further includes a storage capacitor C1, the first plate 152 of the storage capacitor C1 and the anode of the PIN photodiode 17 172, the second plate of the storage capacitor C1 is coupled to the cathode 170 of the PIN-type photodiode 17; the first plate 152 is coupled to the first electrode 151 and the first electrode of the first control transistor T1
- the two poles 150 are arranged in the same layer and the same material; the cathode 170 of the PIN-type photodiode 17 is multiplexed as the second plate of the storage capacitor C1 coupled to it, and the first plate 152 is on the substrate 10
- the orthographic projection of is located inside the orthographic projection of the second plate on the substrate 10.
- each of the light-emitting detection circuits in the display substrate further includes a storage capacitor C1, which is coupled between the anode 172 and the cathode 170 of the PIN photodiode 17 for storing the PIN Type photodiode 17 converts the electrical signal.
- the specific layout of the storage capacitor C1 can be selected according to actual needs.
- the first electrode plate 152 of the storage capacitor C1 can be combined with the first electrode 151 and the second electrode 150 of the first control transistor T1.
- the same layer and the same material are set; the cathode 170 of the PIN-type photodiode 17 is multiplexed as the second plate of the storage capacitor C1 coupled to it;
- the process flow of the second electrode plate of the capacitor C1 also enables the first electrode plate 152 of the storage capacitor C1 to be formed in the same process as the first electrode 151 and the second electrode 150 of the first control transistor T1. Therefore, the manufacturing process flow of the storage capacitor C1 is well simplified, and the manufacturing cost of the display substrate is effectively saved.
- the orthographic projection of the first electrode plate 152 on the substrate 10 can also be set to be located inside the orthographic projection of the second electrode plate on the substrate 10, so that not only the storage capacitor C1 is
- the first electrode plate 152 and the second electrode plate can form a facing area in the direction perpendicular to the substrate 10, and also enable the storage capacitor C1 to be completely covered by the PIN photodiode 17, so that all
- the storage capacitor C1 does not increase the occupied area of the luminescence detection circuit in the direction parallel to the substrate 10, thereby ensuring that in the direction parallel to the substrate 10, the occupancy area of the luminescence detection circuit is It includes the light-receiving area of the PIN-type photodiode 17.
- the area of the cathode 170, the photoelectric conversion structure 171, and the anode 172 included in the PIN photodiode 17 in a direction parallel to the substrate 10 is approximately the same, and the cathode 170 is located on the substrate 10.
- the projection, the orthographic projection of the photoelectric conversion structure 171 on the substrate 10 and the orthographic projection of the anode 172 on the substrate 10 basically coincide.
- the light-receiving area of the PIN photodiode may be the area of the anode 172 in a direction parallel to the substrate 10 or the area of the photoelectric conversion structure 171 in a direction parallel to the substrate 10.
- the display substrate further includes: a second sensing signal line SL2 and a second control signal line; the sub-pixel further includes an electrical detection circuit, and the electrical detection circuit includes a first Two control transistors, the first electrode of the second control transistor is coupled to the anode 180 of the light-emitting element, the second electrode of the second control transistor is coupled to the second sensing signal line SL2, the The gate of the second control transistor is coupled to the second control signal line; along the first direction, the electrical detection circuits in the same row multiplex the same second control signal line; along the first direction In both directions, the electrical detection circuits located in the same column multiplex the same second sensing signal line SL2.
- the display substrate further includes a plurality of second sensing signal lines SL2 and a plurality of second control signal lines, each sub-pixel in the display substrate further includes an electrical detection circuit, and the electrical detection circuit may include multiple
- the electrical detection circuit includes a second control transistor, the gate of the second control transistor is coupled to the second control signal line corresponding to the electrical detection circuit, and the first control transistor of the second control transistor One pole is coupled to the anode 180 of the light-emitting element, and the second pole of the second control transistor is coupled to the second sensing signal line SL2 corresponding to the electrical detection circuit.
- the second sensing signal line SL2 writes a reset signal, and under the control of the second control signal input from the second control signal line, the second control transistor is turned on, and the reset signal is turned on. It is transmitted to the anode 180 of the light-emitting element to realize the reset of the light-emitting element.
- the second control transistor In the sensing period, under the control of the second control signal input from the second control signal line, the second control transistor is turned on to transmit the voltage signal of the anode 180 of the light-emitting element to the second sensor.
- the second sensing signal line SL2 transmits the voltage signal to the chip of the display substrate for subsequent electrical compensation.
- the plurality of second sensing signal lines SL2 and the plurality of second control signal lines there are various specific layouts of the plurality of second sensing signal lines SL2 and the plurality of second control signal lines.
- the electrical components located in the same row The detection circuit multiplexes the same second control signal line; along the second direction, the electrical detection circuits located in the same column multiplex the same second sensing signal line SL2; in this arrangement , A driving method similar to the gate line and data line in the display substrate can be adopted, the second control transistor is controlled row by row through the second control signal line to turn on, and when the second control transistor is turned on in a certain row, all
- the reset signals transmitted by the plurality of second sensing signal lines SL2 are resetting the anodes 180 of the row of light-emitting elements, or the voltage signals of the anodes 180 of the row of light-emitting elements are transmitted to all through the plurality of second sensing signal lines SL2.
- the chip of the display substrate is described.
- the electrical detection circuits located in the same row along the first direction multiplex the same second control signal line, and along the second direction, the electrical detection circuits are located in the same column.
- the electrical detection circuit multiplexes the same second sensing signal line SL2, so that the number of the second sensing signal line SL2 and the second control signal line provided in the display substrate is greatly reduced, Therefore, the complexity of the layout of the display substrate is reduced, and the resolution of the display substrate is further improved.
- At least two adjacent columns of the electrical detection circuits multiplex the same second sensing signal line SL2.
- the electrical detection circuits in four adjacent columns multiplex the same second sensing signal line SL2, and in the electrical detection circuits in the four adjacent columns, the electrical detection circuits located in the same row
- the sub-pixels corresponding to the circuit can correspond to the red color group unit, the green color group unit, the blue color group unit, and the white color group unit one by one, so that 4 sub-pixels located in the same row constitute one pixel unit in the display substrate.
- At least two adjacent rows of the electrical detection circuits are provided to multiplex the same second sensing signal line SL2, so that the number of the second sensing signal lines SL2 provided in the display substrate is further By reducing, the complexity of the layout of the display substrate is further reduced, and the resolution of the display substrate is improved.
- the first sensing signal line SL1 and the second sensing signal line SL2 are alternately arranged, and the adjacent first sensing signal line SL1 and the second sensing signal line SL1 are arranged alternately. At least two rows of the sub-pixel rows are included between the two sensing signal lines SL2.
- the first sensing signal line SL1 and the second sensing signal line SL2 both extend along the second direction, and the first sensing signal line is laid out.
- the first sensing signal line SL1 and the second sensing signal line SL2 can be alternately arranged, and adjacent first sensing signal lines can be arranged
- the display substrate further includes data lines (DR, DG, DB, and DW in FIG. 5) corresponding to each of the sub-pixel columns, each of which The data line and the sub-pixel driving circuit included in each sub-pixel in the corresponding sub-pixel column are respectively coupled; at least one column of the sub-pixels is included between the data line and the first sensing signal line SL1; the data line At least one column of the sub-pixels is included between the second sensing signal line SL2 and the second sensing signal line SL2.
- data lines DR, DG, DB, and DW in FIG. 5
- the display substrate further includes a data line corresponding to each sub-pixel column one-to-one, and the data line is used to provide a data signal to the sub-pixel driving circuit included in each sub-pixel in the corresponding sub-pixel column.
- the sub-pixel driving circuit generates a driving signal for driving the light-emitting element to emit light based on the data signal.
- At least one column of sub-pixels is included between the data line and the first sensing signal line SL1, and at least one column is included between the data line and the second sensing signal line SL2.
- the sub-pixels enable the data line to be far away from the first sensing signal line SL1 and the second sensing signal line SL2, thereby avoiding the adjacent data line and the second sensing signal line SL2.
- Crosstalk is generated between the first sensing signal line SL1, and crosstalk between the adjacent data line and the second sensing signal line SL2 is avoided, which effectively improves the working stability of the display substrate.
- the first control transistor T1 includes an oxide thin film transistor.
- the luminescence detection circuit has better detection performance. The performance is more conducive to improving the detection accuracy of the luminescence detection circuit.
- the display substrate further includes a first flat layer 124, and the first flat layer 124 is located between the first control transistor T1 and the PIN photodiode 17 between.
- the first control transistor T1 faces away from the surface of the substrate 10, there is a step difference. Therefore, in order to ensure the flatness of the PIN-type photodiode 17 produced subsequently, the first control transistor T1 and A first flat layer 124 is arranged between the PIN-type photodiodes 17, and the first flat layer 124 may be an organic insulating material SOG (Silicon On Glass, silicon-glass bonding structure material).
- SOG Silicon On Glass, silicon-glass bonding structure material
- the first flat layer 124 is fabricated on the side of the first control transistor T1 facing away from the substrate 10, and the PIN-type photodiode is fabricated on the side of the first flat layer 124 facing away from the substrate 10 17, so that the PIN-type photodiode 17 has a higher flatness, which is more conducive to the PIN-type photodiode 17 to achieve good working performance.
- the embodiments of the present disclosure also provide a display device, including the display substrate provided in the above-mentioned embodiments.
- the first control transistor T1 and the PIN photodiode 17 included in the light-emitting detection circuit in each sub-pixel are sequentially stacked in a direction away from the substrate 10, and the first control transistor is provided.
- the orthographic projection of the transistor T1 on the substrate 10 at least partially overlaps the orthographic projection of the PIN-type photodiode 17 on the substrate 10, so that the PIN-type photodiode 17 can control the first transistor
- At least part of T1 is shielded, which reduces the area occupied by the light-emitting detection circuit in a direction parallel to the substrate 10, thereby effectively increasing the aperture ratio of each sub-pixel.
- the first control transistor T1 is disposed between the base 10 and the PIN photodiode 17, and the light-emitting element is disposed on the PIN photodiode 17.
- the side facing away from the base 10 realizes that while increasing the aperture ratio of the display substrate, it ensures the light sensing accuracy of the PIN-type photodiode 17, which is more conducive to improving the uniformity of the brightness of the display substrate. Therefore, when the display device provided by the embodiment of the present disclosure includes the display substrate provided by the above-mentioned embodiment, it also has all the beneficial effects that the display substrate can achieve, and will not be repeated here.
- the display device may be any product or component with a display function, such as a TV, a monitor, a digital photo frame, a mobile phone, a tablet computer, and the like.
- the embodiments of the present disclosure also provide a manufacturing method of a display substrate for manufacturing the display substrate provided in the above-mentioned embodiments.
- the manufacturing method includes a step of manufacturing a plurality of sub-pixels distributed in an array on the substrate 10, and the step specifically includes:
- the PIN-type photodiodes 17 in each of the light-emitting detection circuits are fabricated on the side of the first control transistor T1 facing away from the substrate 10, and the first pole 151 of the first control transistor T1 corresponds to the PIN
- the cathode 170 of the type photodiode 17 is coupled, and the orthographic projection of the first control transistor T1 on the substrate 10 at least partially overlaps the orthographic projection of the corresponding PIN-type photodiode 17 on the substrate 10 ;
- a light-emitting element included in each sub-pixel is fabricated on the side of the PIN-type photodiode 17 facing away from the substrate 10, and the light-emitting element is coupled to the corresponding sub-pixel driving circuit.
- the first control transistor T1 and the PIN-type photodiode 17 included in the light-emitting detection circuit in each sub-pixel are sequentially stacked in a direction away from the substrate 10, and
- the orthographic projection of the first control transistor T1 on the substrate 10 is set to at least partially overlap with the orthographic projection of the PIN-type photodiode 17 on the substrate 10, so that the PIN-type photodiode 17 can be aligned with At least part of the first control transistor T1 is shielded, which reduces the area occupied by the light-emitting detection circuit in a direction parallel to the substrate 10, thereby effectively increasing the aperture ratio of each sub-pixel.
- the first control transistor T1 is disposed between the base 10 and the PIN-type photodiode 17, and the light-emitting element is disposed on the substrate.
- the PIN-type photodiode 17 faces away from the side of the substrate 10, which improves the aperture ratio of the display substrate while ensuring the accuracy of the PIN-type photodiode 17 for light sensing, which is more conducive to improving the The brightness uniformity of the display substrate is described.
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Abstract
Description
Claims (20)
- 一种显示基板,包括基底以及阵列分布在该基底上的多个子像素,至少一个所述子像素均包括:发光元件,与该发光元件耦接的子像素驱动电路,以及用于检测该发光元件发光亮度的发光检测电路,所述发光检测电路包括:沿远离所述基底的方向依次层叠设置的第一控制晶体管和PIN型光电二极管,所述第一控制晶体管的第一极与所述PIN型光电二极管的阴极耦接,所述第一控制晶体管在所述基底上的正投影,与所述PIN型光电二极管在所述基底上的正投影至少部分交叠。
- 根据权利要求1所述的显示基板,其中,所述PIN型光电二极管包括沿远离所述基底的方向依次层叠设置的阴极、光电转换结构和阳极;所述阴极采用遮光材料,所述第一控制晶体管在所述基底上的正投影,位于所述阴极在所述基底上的正投影的内部。
- 根据权利要求2所述的显示基板,其中,所述多个子像素分为阵列分布的多个子像素组,每个所述子像素组包括阵列分布的至少四个子像素,所述至少四个子像素位于相邻的两行,同一所述子像素组的子像素复用同一个所述发光检测电路;该发光检测电路中的所述PIN型光电二极管在所述基底上的正投影,分别与其对应的所述子像素组中各所述子像素包括的发光元件在所述基底上的正投影交叠。
- 根据权利要求3所述的显示基板,其中,所述显示基板还包括基准信号线、第一感测信号线和第一控制信号线,所述基准信号线与所述PIN型光电二极管的阳极耦接,所述第一感测信号线与所述第一控制晶体管的第二极耦接,所述第一控制信号线与所述第一控制晶体管的栅极耦接;所述多个子像素包括多个子像素行和多个子像素列;每个所述子像素行均包括沿第一方向依次排列的多个所述子像素,每个所述子像素列均包括沿第二方向依次排列的多个所述子像素,所述第一方向与所述第二方向相交;沿所述第一方向,位于同一行的所述发光检测电路复用同一条所述基准信号线和同一条所述第一控制信号线;沿所述第二方向,位于同一列的所述发光检测电路复用同一条所述第一感测信号线。
- 根据权利要求4所述的显示基板,其中,所述基准信号线在所述基底上的正投影,与其耦接的各所述PIN型光电二极管在所述基底上的正投影均交叠。
- 根据权利要求5所述的显示基板,其中,所述基准信号线和所述PIN型光电二极管沿远离所述基底的方向依次层叠设置。
- 根据权利要求4所述的显示基板,其中,所述第一控制信号线在所述基底上的正投影,与其耦接的各所述发光检测电路中的PIN型光电二极管在所述基底上的正投影均交叠。
- 根据权利要求7所述的显示基板,其中,所述第一控制信号线和所述PIN型光电二极管沿远离所述基底的方向依次层叠设置。
- 根据权利要求4所述的显示基板,其中,所述发光检测电路还包括存储电容,所述存储电容的第一极板与所述PIN光电二极管的阳极耦接,所述存储电容的第二极板与所述PIN光电二极管的阴极耦接;所述第一极板与所述第一控制晶体管的第一极和第二极同层同材料设置;所述PIN光电二极管的阴极复用为与其耦接的所述存储电容的第二极板,所述第一极板在所述基底上的正投影,位于所述第二极板在所述基底上的正投影的内部。
- 根据权利要求4所述的显示基板,其中,所述显示基板还包括:第二感测信号线和第二控制信号线;所述子像素还包括电学检测电路,所述电学检测电路包括第二控制晶体管,所述第二控制晶体管的第一极与所述发光元件的阳极耦接,所述第二控制晶体管的第二极与所述第二感测信号线耦接,所述第二控制晶体管的栅极与所述第二控制信号线耦接;沿所述第一方向,位于同一行的所述电学检测电路复用同一条所述第二控制信号线;沿所述第二方向,位于同一列的所述电学检测电路复用同一条所述第二感测信号线。
- 根据权利要求10所述的显示基板,其中,相邻的至少两列所述电学检测电路复用同一条所述第二感测信号线。
- 根据权利要求11所述的显示基板,其中,所述第一感测信号线和所述第二感测信号线交替设置,相邻的所述第一感测信号线和所述第二感测信号线之间包括至少两列所述子像素列。
- 根据权利要求12所述的显示基板,其中,所述显示基板还包括与各所述子像素列一一对应的数据线,每条所述数据线与其对应的子像素列中各子像素包括的子像素驱动电路分别耦接;所述数据线与所述第一感测信号线之间包括至少一列所述子像素;所述数据线与所述第二感测信号线之间包括至少一列所述子像素。
- 根据权利要求13所述的显示基板,其中,相邻的四列所述电学检测电路中,位于同一行的所述电学检测电路对应的子像素可组成像素单元,所述像素单元发出的光为白光。
- 根据权利要求3所述的显示基板,其中,每个所述子像素组包括阵列分布的八个子像素,所述八个子像素分别位于相邻的两行,所述八个子像素中位于同一行中的四个子像素组成显示基板中的一个像素单元,所述像素单元发出的光为白光。
- 根据权利要求1所述的显示基板,其中,所述第一控制晶体管包括氧化物薄膜晶体管。
- 根据权利要求1所述的显示基板,其中,所述显示基板还包括第一平坦层,所述第一平坦层位于所述第一控制晶体管和所述PIN型光电二极管之间。
- 一种显示装置,包括如权利要求1~17中任一项所述的显示基板。
- 一种显示基板的制作方法,用于制作如权利要求1~17中任一项所述的显示基板,所述制作方法包括在基底上制作阵列分布的多个子像素的步骤,该步骤具体包括:在基底上制作各子像素包括的子像素驱动电路和发光检测电路中的第一控制晶体管;在所述第一控制晶体管背向所述基底的一侧制作各所述发光检测电路中 的PIN型光电二极管,所述第一控制晶体管的第一极与对应的所述PIN型光电二极管的阴极耦接,所述第一控制晶体管在所述基底上的正投影,与对应的所述PIN型光电二极管在所述基底上的正投影至少部分交叠;在所述PIN型光电二极管背向所述基底的一侧制作各子像素包括的发光元件,所述发光元件与对应的所述子像素驱动电路耦接。
- 根据权利要求19所述的方法,其中,在所述第一控制晶体管和所述PIN型光电二极管之间形成第一平坦层。
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