WO2020235254A1 - 発電素子、発電装置、電子機器、及び発電素子の製造方法 - Google Patents

発電素子、発電装置、電子機器、及び発電素子の製造方法 Download PDF

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Publication number
WO2020235254A1
WO2020235254A1 PCT/JP2020/016263 JP2020016263W WO2020235254A1 WO 2020235254 A1 WO2020235254 A1 WO 2020235254A1 JP 2020016263 W JP2020016263 W JP 2020016263W WO 2020235254 A1 WO2020235254 A1 WO 2020235254A1
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WIPO (PCT)
Prior art keywords
substrate
electrode
electrode portion
main surface
power generation
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PCT/JP2020/016263
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English (en)
French (fr)
Japanese (ja)
Inventor
後藤　博史
坂田　稔
Original Assignee
株式会社Ｇｃｅインスティチュート
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Application filed by 株式会社Ｇｃｅインスティチュート filed Critical 株式会社Ｇｃｅインスティチュート
Priority to EP20809597.6A priority Critical patent/EP3975414A1/en
Priority to JP2021520650A priority patent/JP7473222B2/ja
Priority to CN202080036847.9A priority patent/CN113853738A/zh
Priority to US17/606,858 priority patent/US20220328746A1/en
Publication of WO2020235254A1 publication Critical patent/WO2020235254A1/ja

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/80—Constructional details
    • H10N10/82—Connection of interconnections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J45/00—Discharge tubes functioning as thermionic generators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
    • H10N10/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E20/00—Combustion technologies with mitigation potential
    • Y02E20/14—Combined heat and power generation [CHP]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to a power generation element that converts thermal energy into electric energy, a power generation device, an electronic device, and a method for manufacturing the power generation element.
  • Patent Documents 1 and 2 disclose thermoelectric elements that utilize an electron emission phenomenon due to absolute temperature that occurs between electrodes having a work function difference. Such a thermoelectric element can generate electricity even when the temperature difference between the electrodes is small as compared with the thermoelectric element using the temperature difference between the electrodes (Seebeck effect). Therefore, it is expected to be used for various purposes.
  • thermoelectric element comprises the spherical nanobeads, the work function of the emitter electrode layer is smaller than the work function of the collector electrode layer, and the particle size of the spherical nanobeads is 100 nm or less.
  • Patent Document 2 includes a nanofluid having a high work function anode and a low work function cathode separated by nanometer-scale spaced electrode-to-electrode gaps, in which nanofluids are formed in the interelectrode gaps. Contact potential difference cells are disclosed.
  • thermoelectric element using the technology disclosed in Patent Documents 1 and 2 described above it is premised that a support member such as spherical nanobeads is used when forming the gap between the electrodes. Therefore, the variation in the gap between the electrodes due to the variation in the shape and thickness of the support member is exacerbated. As a result, there is a concern that the amount of electric energy generated will become unstable.
  • an object of the present invention is to provide a power generation element, a power generation device, an electronic device, and a method for manufacturing the power generation element, which can realize stabilization of the amount of electric energy generated. It is in.
  • the power generation element according to the first invention is a power generation element that converts thermal energy into electrical energy, and has a substrate having a first main surface and a second main surface facing each other, and the first main surface and the second main surface.
  • An electrode portion provided on the surface and having a first electrode portion and a second electrode portion having a work function different from that of the first electrode portion, a work function of the first electrode portion, and a second electrode portion of the second electrode portion.
  • a first substrate comprising an intermediate portion containing nanoparticles having a work function between the work function and the substrates overlapping each other when viewed from a first direction intersecting the first main surface and the second main surface.
  • the intermediate portion is on the first electrode portion provided on the first main surface of the first substrate portion and on the second main surface of the second substrate portion.
  • the first main surface of the first substrate portion is sandwiched between the second electrode portion and the first electrode portion provided on the first substrate portion, and is in contact with the first electrode portion provided on the first substrate portion.
  • a first joint provided continuously with the first separation surface and separated from the first electrode portion, separated from the first electrode portion, and in contact with the second substrate portion.
  • the second main surface of the second substrate portion has a surface, and the second main surface thereof is in contact with the second electrode portion provided on the second substrate portion and is separated from the first substrate portion. It is characterized by having a second joint surface which is continuously provided with the second separation surface, is separated from the second electrode portion provided on the second substrate portion, and is in contact with the first substrate portion.
  • the power generation element according to the second invention is provided with the first electrode portion on the first main surface of the first substrate portion and on the first main surface of the second substrate portion.
  • the second electrode portion is provided on the second main surface of the first substrate portion and on the second main surface of the second substrate portion.
  • the power generation element according to the third invention is provided with the first electrode portion on the first main surface and the second main surface of the first substrate portion, and the second electrode portion is ,
  • the second substrate portion is provided on the first main surface and on the second main surface.
  • the power generation element according to the fourth invention has the intermediate portion surrounded by the first joint surface and the second joint surface when viewed from the first direction. It is a feature.
  • the power generation element according to the fifth invention is provided on the side surface of the substrate and further includes a first connection wiring and a second connection wiring facing each other, and the first connection wiring. Is in contact with the first electrode portion provided on the first substrate portion and the first electrode portion provided on the second substrate portion, and the second connection wiring is provided on the first substrate portion. It is characterized in that it is in contact with the second electrode portion and the second electrode portion provided on the second substrate portion.
  • the power generation element according to the sixth invention has a plurality of the first substrate portion and the second substrate portion laminated in the first direction, and the first connection wiring extends in the first direction.
  • the first connection wiring extends in the first direction.
  • it is characterized in that it is in contact with a plurality of the first electrode portions, and the second connection wiring extends in the first direction and is in contact with the plurality of the second electrode portions.
  • the power generation element according to the seventh invention is the side surface of the first electrode portion provided on the first substrate portion and the second substrate portion provided on the second substrate portion.
  • the side surface of the two electrode portion is characterized in that it is in contact with the intermediate portion.
  • the power generation element according to the eighth invention has at least one of the first main surface of the first substrate portion and the second main surface of the second substrate portion. , It is characterized in that it is formed in a curved shape.
  • the power generation element according to the ninth invention has the first electrode portion provided on the first substrate portion as compared with the first main surface of the first substrate portion. Therefore, it is characterized by having high wettability with respect to the intermediate portion.
  • the power generation element according to the tenth invention is provided with the first bonding surface on the first substrate bonding surface in contact with the second bonding surface and the second substrate portion. It has a first electrode joint surface in contact with the second electrode portion, and the second joint surface is provided on the second substrate joint surface in contact with the first substrate joint surface and the first substrate portion. It is characterized by having a second electrode joint surface in contact with the first electrode portion.
  • the power generation element according to the eleventh invention has a contact surface in contact with the first electrode portion and a portion provided outside the contact surface. It has a first surface having a first surface and a second surface provided outside the first surface, and the first surface has a higher wettability to the intermediate portion than the second surface. It is a feature.
  • the power generation element according to the twelfth invention is the power generation element according to any one of the first to eleventh inventions, between the first electrode portion provided on the first substrate portion and the first joint surface, and the second substrate.
  • a sealing portion provided between the second electrode portion and the second joint surface provided on the portion and surrounding the intermediate portion is further provided.
  • the power generation element according to the thirteenth invention is further provided with a protective film that at least surrounds the side surface of the first substrate portion and the side surface of the second substrate portion. ..
  • the power generation device is a power generation device including a power generation element that converts heat energy into electric energy, and the power generation element includes a substrate having a first main surface and a second main surface facing each other. An electrode portion provided on the first main surface and the second main surface and having a first electrode portion and a second electrode portion having a work function different from that of the first electrode portion, and the first electrode portion.
  • the substrate comprises an intermediate portion containing nanoparticles having a work function between the work function of the second electrode portion and the work function of the second electrode portion, and the substrate intersects the first main surface and the second main surface.
  • the intermediate portion When viewed from one direction, it has a first substrate portion and a second substrate portion that overlap each other, and the intermediate portion includes the first electrode portion provided on the first main surface of the first substrate portion and the first electrode portion.
  • the first main surface of the first substrate portion is sandwiched between the second electrode portion and the second electrode portion provided on the second main surface of the second substrate portion, and the first main surface of the first substrate portion is provided on the first substrate portion.
  • a first separation surface that is in contact with the first electrode portion and is separated from the second substrate portion, and a first separation surface that is continuously provided with the first separation surface and is separated from the first electrode portion provided on the first substrate portion.
  • the second main surface of the second substrate portion has a first joint surface in contact with the second substrate portion, and the second main surface of the second substrate portion is in contact with the second electrode portion provided on the second substrate portion.
  • the electronic device is an electronic device including a power generation element that converts thermal energy into electric energy and an electronic device that can be driven by using the power generation element as a power source, and is the power generation.
  • the elements are provided on a substrate having a first main surface and a second main surface facing each other, and on the first main surface and the second main surface, and the first electrode portion and the first electrode portion are An electrode portion having a second electrode portion having a different work function, an intermediate portion containing nanoparticles having a work function between the work function of the first electrode portion and the work function of the second electrode portion, and the like.
  • the substrate has a first substrate portion and a second substrate portion that overlap each other when viewed from a first direction intersecting the first main surface and the second main surface, and the intermediate portion is the first substrate.
  • the first electrode portion is sandwiched between the first electrode portion provided on the first main surface of the portion and the second electrode portion provided on the second main surface of the second substrate portion.
  • the first main surface of the substrate portion is continuous with the first separation surface which is in contact with the first electrode portion provided on the first substrate portion and is separated from the second substrate portion, and the first separation surface. It has a first joint surface that is provided, is separated from the first electrode portion provided on the first substrate portion, and is in contact with the second substrate portion, and the second main surface of the second substrate portion is provided.
  • the method for manufacturing a power generation element according to the sixteenth invention is a method for manufacturing a power generation element that converts thermal energy into electrical energy, and is on a first main surface of a substrate and on a second main surface facing the first main surface.
  • the first electrode portion is formed on the first electrode portion formed on the first main surface of the first substrate portion included in the substrate and the second electrode portion forming step of forming the second electrode portion having the above.
  • a joining step of joining the second electrode portion so as to overlap is provided, and after the joining step, the first main surface of the first substrate portion is formed on the first substrate portion of the first electrode.
  • a first separating surface that is in contact with the portion and is separated from the second substrate portion and a first electrode portion that is formed continuously from the first separating surface and is formed on the first substrate portion and is separated from the first electrode portion. It has a first joint surface that is in contact with two substrate portions, and the second main surface of the second substrate portion is in contact with the second electrode portion formed on the second substrate portion and is in contact with the first substrate portion.
  • a second separation surface that is formed continuously from the second separation surface and is separated from the second electrode portion formed on the second substrate portion and is in contact with the first substrate portion. And, characterized by having.
  • the method for manufacturing a power generation element according to the seventeenth invention is described in the sixteenth invention, which is located around the first electrode portion formed on the first substrate portion before the intermediate portion forming step and the joining step.
  • the first main surface is further provided with a surface treatment step for performing surface treatment.
  • the joining step is carried out in a state where the pressure is reduced between the first substrate portion and the second substrate portion. It is a feature.
  • the first main surface of the first substrate portion is a first separation surface that is in contact with the first electrode portion provided on the first substrate portion and is separated from the second substrate portion. It has a first joint surface that is continuously provided with the first separation surface, is separated from the first electrode portion provided on the first substrate portion, and is in contact with the second substrate portion.
  • the second main surface of the second substrate portion is provided in contact with the second electrode portion provided on the second substrate portion and is continuously provided with the second separation surface and the second separation surface which are separated from the first substrate portion. It has a second joint surface that is separated from the second electrode portion provided on the second substrate portion and is in contact with the first substrate portion.
  • a gap between the electrodes is formed by interposing an intermediate portion that can be formed by joining each main surface on which each electrode portion is provided. Therefore, it is not necessary to separately provide a support member or the like, and it is possible to suppress variations in the gap between the electrodes. This makes it possible to stabilize the amount of electric energy generated.
  • the electrode portions are provided on the first main surface and the second main surface. That is, the substrate is sandwiched between the electrode portions. Therefore, when the power generation element having a laminated structure is provided, the thickness in the first direction can be suppressed. This makes it possible to reduce the size of the power generation element.
  • the first electrode portion is provided on the first main surface of the first substrate portion and the first main surface of the second substrate portion.
  • the second electrode portion is provided on the second main surface of the first substrate portion and the second main surface of the second substrate portion. That is, each substrate portion is provided with a first electrode portion and a second electrode portion with the substrate portion interposed therebetween. Therefore, when forming a power generation element having a laminated structure, it can be easily realized. This makes it possible to simplify the manufacturing process.
  • the first electrode portion is provided on the first main surface and the second main surface of the first substrate.
  • the second electrode portion is provided on the first main surface and the second main surface of the second substrate portion. That is, each substrate portion is provided with either a first electrode portion or a second electrode portion. Therefore, when forming one electrode portion, the possibility of forming the one electrode portion in contact with the other electrode portion can be suppressed. This makes it possible to improve the yield at the time of manufacturing the power generation element.
  • the intermediate portion is surrounded by the first joint surface and the second joint surface when viewed from the first direction. Therefore, a closed space surrounding the intermediate portion can be formed by the joint surface on each main surface provided with each electrode portion. As a result, it is possible to easily suppress leakage of the intermediate portion without forming another configuration on the substrate.
  • the first connection wiring and the second connection wiring are provided on the side surface of the substrate. Therefore, each connection wiring that is electrically connected to each electrode portion can be easily provided. This makes it possible to facilitate the manufacturing process. Further, even if each connection wiring is deteriorated due to the use of the power generation element, it can be easily repaired.
  • the first connection wiring extends in the first direction and comes into contact with a plurality of first electrode portions.
  • the second connection wiring extends in the first direction and is in contact with a plurality of second electrode portions. Therefore, even when a plurality of the substrate portions are laminated, it is possible to easily provide the connection wirings that are electrically connected to the electrode portions. This makes it possible to facilitate the manufacturing process.
  • the stress concentration portion of each connection wiring can be reduced, and disconnection of each connection wiring can be suppressed.
  • the side surface of the first electrode portion provided on the first substrate portion and the side surface of the second electrode portion provided on the second substrate portion are in contact with the intermediate portion. Therefore, in addition to the opposing surfaces of each electrode portion, electrons can be moved through the side surfaces of each electrode portion. This makes it possible to increase the amount of electric energy generated.
  • At least one of the first main surface of the first substrate portion and the second main surface of the second substrate portion is formed in a curved shape. Therefore, a portion where stress is locally concentrated such as a protrusion is not formed. This makes it possible to suppress damage due to an impact from the outside. Further, when a flexible film-like material is used as a substrate and formed in a curved shape, it is possible to easily realize bonding of each substrate portion.
  • the first electrode portion provided on the first substrate portion has higher wettability to the intermediate portion than the first main surface of the first substrate portion. Therefore, the nanoparticles dispersed in the solvent contained in the intermediate portion can be easily maintained between the electrode portions. This makes it possible to suppress a decrease in the amount of electric energy generated over time.
  • the first joint surface has a first substrate joint surface in contact with the second joint surface and a first electrode joint surface in contact with the second electrode portion provided on the second substrate portion.
  • the second bonding surface has a second substrate bonding surface in contact with the first substrate bonding surface and a second electrode bonding surface in contact with the first electrode portion provided on the first substrate portion. Therefore, the area where each electrode portion is provided on the substrate can be increased, and the facing area of each electrode portion can be increased. This makes it possible to increase the amount of electric energy generated.
  • the first surface has higher wettability to the intermediate portion than the second surface. Therefore, it is possible to suppress the seepage of the intermediate portion from each joint surface. This makes it possible to suppress a decrease in the amount of the intermediate portion with time.
  • the sealing portion is provided between the first electrode portion and the first joint surface provided on the first substrate portion, and the second electrode portion and the second electrode portion provided on the second substrate portion. It is provided between the two joint surfaces and surrounds the intermediate portion. Therefore, it is possible to suppress the seepage of the intermediate portion from each joint surface. This makes it possible to suppress a decrease in the amount of the intermediate portion with time.
  • the protective film at least surrounds the side surface of the first substrate portion and the side surface of the second substrate portion. Therefore, deterioration of the substrate due to external factors can be suppressed. This makes it possible to suppress deterioration of the power generation element over time.
  • the fourteenth invention it is possible to realize a power generation device equipped with a power generation element capable of stabilizing the amount of electric energy generated.
  • the first substrate portion and the second substrate portion are joined so as to overlap each other when viewed from the first direction.
  • the first main surface of the first substrate portion is continuous with the first separation surface which is in contact with the first electrode portion formed on the first substrate portion and is separated from the second substrate portion, and the first separation surface. It has a first joint surface that is formed and is separated from the first electrode portion formed on the first substrate portion and is in contact with the second substrate portion.
  • the second main surface of the second substrate portion is formed in contact with the second electrode portion formed on the second substrate portion, and is formed continuously with the second separation surface and the second separation surface which are separated from the first substrate portion.
  • It has a second joint surface that is separated from the second electrode portion formed on the second substrate portion and is in contact with the first substrate portion. That is, a gap between the electrodes is formed by interposing an intermediate portion that can be formed by joining on each main surface on which each electrode portion is formed. Therefore, it is not necessary to separately provide a support member or the like, and it is possible to suppress variations in the gap between the electrodes. This makes it possible to stabilize the amount of electric energy generated.
  • the first electrode portion is formed on the first main surface of the substrate, and the second electrode portion is formed on the second main surface. That is, the substrate is sandwiched between the electrode portions. Therefore, when the power generation element having a laminated structure is provided, the thickness in the first direction can be suppressed. This makes it possible to reduce the size of the power generation element.
  • the surface treatment step in the surface treatment step, the surface treatment is performed on the first main surface located around the first electrode portion formed on the first substrate portion. Therefore, when the intermediate portion forming step is carried out, the intermediate portion can be easily maintained on the first electrode portion. This makes it possible to easily form the intermediate portion.
  • the joining step is carried out in a state where the pressure is reduced between the first substrate portion and the second substrate portion. Therefore, air or the like can be removed from the gap portion where the gap between the electrodes is formed, and the gap portion can be easily filled with the intermediate portion. This makes it possible to facilitate the manufacturing process.
  • FIG. 1 (a) is a schematic cross-sectional view showing an example of a power generation device and a power generation element according to the first embodiment
  • FIG. 1 (b) is a schematic cross-sectional view showing an example of a substrate
  • FIG. 1 (c) Is a schematic cross-sectional view taken along the line 1C-1C of FIG. 1 (b).
  • 2 (a) is a schematic plan view along 2A-2A of FIG. 1 (a)
  • FIG. 2 (b) is a schematic plan view of FIG. 1 (a) along 2B-2B.
  • FIG. 3A is a schematic cross-sectional view showing an example of the intermediate portion
  • FIG. 3B is a schematic cross-sectional view showing another example of the intermediate portion.
  • FIG. 4 (a) and 4 (b) are flowcharts showing an example of a method of manufacturing a power generation element according to the first embodiment.
  • 5 (a) to 5 (d) are schematic cross-sectional views showing an example of a method for manufacturing a power generation element according to the first embodiment.
  • FIG. 6 is a schematic cross-sectional view showing an example of the joining process.
  • 7 (a) and 7 (b) are schematic views showing an example of an intermediate portion forming step.
  • 8 (a) and 8 (b) are schematic cross-sectional views showing another example of the method for manufacturing the power generation element according to the first embodiment.
  • 9 (a) and 9 (b) are schematic views showing a modified example of the substrate.
  • FIG. 10 (a) is a flowchart showing a modified example of the method for manufacturing the power generation element in the first embodiment
  • FIGS. 10 (b) to 10 (d) show the method for manufacturing the power generation element in the first embodiment.
  • It is a schematic diagram which shows the modification.
  • 11 (a) and 11 (b) are schematic views showing a first modification of the power generation element according to the first embodiment.
  • 12 (a) and 12 (b) are schematic views showing a second modification of the power generation element in the first embodiment.
  • FIG. 13 is a schematic cross-sectional view showing a third modification of the power generation element according to the first embodiment.
  • FIG. 14 is a schematic cross-sectional view showing another example of the power generation device and the power generation element according to the first embodiment.
  • FIG. 15 is a schematic cross-sectional view showing an example of a power generation device and a power generation element according to the second embodiment.
  • FIG. 16 is a schematic cross-sectional view showing another example of the power generation device and the power generation element according to the second embodiment.
  • 17 (a) to 17 (d) are schematic block diagrams showing an example of an electronic device provided with a power generation element, and FIGS. 17 (e) to 17 (h) show a power generation device including the power generation element. It is a schematic block diagram which shows the example of the electronic device provided.
  • the height direction in which the substrate portions are joined is defined as the first direction Z
  • the plane direction intersecting with the first direction Z, for example, one orthogonal plane direction is defined as the second direction X
  • the first direction Z and the first direction Z Let the third direction Y be another plane direction that intersects with each of the two directions X, for example, is orthogonal to each other.
  • the configurations in each figure are schematically described for the sake of explanation, and for example, the size of each configuration, the comparison of the sizes in each configuration, and the like may be different from those in the figure.
  • FIG. 1A is a schematic cross-sectional view showing an example of the power generation device 100 and the power generation element 1 in the first embodiment
  • FIG. 1B is a schematic cross-sectional view showing an example of the substrate 10.
  • 1 (c) is a schematic plan view along 1C-1C of FIG. 1 (b).
  • 2 (a) is a schematic plan view along 2A-2A of FIG. 1 (a)
  • FIG. 2 (b) is a schematic plan view of FIG. 1 (a) along 2B-2B.
  • the power generation device 100 includes a power generation element 1, a terminal 101, and a wiring 102.
  • the power generation element 1 converts thermal energy into electrical energy.
  • the power generation device 100 provided with such a power generation element 1 is mounted or installed on a heat source (not shown), and the electric energy generated by the power generation element 1 based on the heat energy of the heat source is used as the terminal 101 and the wiring 102. Is output to the load R via.
  • the wiring 102 has a first wiring 102a that is electrically connected to one end of the load R and a second wiring 102b that is electrically connected to the other end of the load R.
  • the load R indicates, for example, an electric device, and for example, the power generation element 1 can be used as a main power source or an auxiliary power source to drive the load R.
  • Examples of the heat source of the power generation element 1 include electronic devices or electronic components such as a CPU (Central Processing Unit), light emitting elements such as LEDs (Light Emitting Diodes), engines such as automobiles, factory production equipment, human bodies, sunlight, and the like. And the ambient temperature etc. can be used.
  • electronic devices, electronic components, light emitting elements, engines, production equipment, and the like are artificial heat sources.
  • the human body, sunlight, environmental temperature, etc. are natural heat sources.
  • the power generation device 100 provided with the power generation element 1 can be provided inside an electronic device such as an IoT (Internet of Things) device, a wearable device, or a self-supporting sensor terminal, and can be used as a substitute or an auxiliary for a battery. Further, the power generation principle of the power generation element 1 can be used for a temperature sensor or the like. Further, the power generation device 100 can also be applied to a larger power generation device such as solar power generation.
  • IoT Internet of Things
  • the power generation element 1 converts, for example, the heat energy generated by the artificial heat source or the heat energy of the natural heat source into electrical energy to generate an electric current.
  • the power generation element 1 may be provided inside the power generation device 100, or the power generation element 1 itself may be provided inside an electronic device such as the mobile device or the self-supporting sensor terminal. In this case, the power generation element 1 itself can be used as a substitute part or an auxiliary part of the battery for the electronic device.
  • the power generation element 1 includes a substrate 10, an electrode portion 13, and an intermediate portion 14.
  • the power generation element 1 may include, for example, a connection wiring 15.
  • the substrate 10 has a first main surface 11s and a second main surface 12s facing each other.
  • the main surfaces 11s and 12s intersect the first direction Z.
  • the substrate 10 has a first substrate portion 11 and a second substrate portion 12 that overlap each other when viewed from the first direction Z.
  • the substrate portions 11 and 12 have main surfaces 11s and 12s, respectively. At least a part of the first main surface 11s in the first substrate portion 11 is in contact with at least a part of the second main surface 12s in the second substrate portion 12, and is joined, for example.
  • the electrode portion 13 is provided on the first main surface 11s and the second main surface 12s. That is, the substrate 10 is sandwiched between the pair of electrode portions 13.
  • the electrode portion 13 has a first electrode portion 13a and a second electrode portion 13b.
  • the first electrode portion 13a is mounted on the first main surface 11s of the substrate 10 (on the first main surface 11s of the first substrate portion 11 and on the first main surface 11s of the second substrate portion 12). It is provided.
  • the second electrode portion 13b is provided on the second main surface 12s of the substrate 10 (on the second main surface 12s of the first substrate portion 11 and on the second main surface 12s of the second substrate portion 12). That is, the electrode portions 13a and 13b are provided on the substrate portions 11 and 12, and the substrate portions 11 and 12 are sandwiched between the electrode portions 13a and 13b.
  • the first electrode portion 13a provided on the first substrate portion 11 is separated from the second electrode portion 13b provided on the second substrate portion 12 and is in contact with a part of the second main surface 12s of the second substrate portion 12. , For example, are joined.
  • the second electrode portion 13b provided on the second substrate portion 12 is separated from the first electrode portion 13a provided on the first substrate portion 11 and is in contact with a part of the first main surface 11s of the first substrate portion 11. , For example, are joined.
  • the intermediate portion 14 is provided between the first substrate portion 11 and the second substrate portion 12.
  • the intermediate portion 14 is sandwiched between the first electrode portion 13a provided on the first substrate portion 11 and the second electrode portion 13b provided on the second substrate portion 12.
  • the intermediate portion 14 contains, for example, the nanoparticles 141 shown in FIG. 3, and may include, for example, the solvent 142 in which the nanoparticles 141 are dispersed.
  • connection wiring 15 is provided on the side surface of the substrate 10.
  • the connection wiring 15 has, for example, a first connection wiring 15a and a second connection wiring 15b.
  • the connection wirings 15a and 15b extend in the first direction Z, for example, and are provided so as to face each other.
  • the first connection wiring 15a is in contact with the first electrode portions 13a provided on the substrate portions 11 and 12, and is electrically connected to the first wiring 102a via, for example, the first terminal 101a.
  • the second connection wiring 15b is in contact with the second electrode portions 13b provided on the substrate portions 11 and 12, and is electrically connected to the second wiring 102b via, for example, the second terminal 101b.
  • the power generation element 1 includes a gap portion 14a.
  • the gap portion 14a mainly indicates a portion surrounded by the first substrate portion 11 and the second substrate portion 12, and includes a space isolated from the outside.
  • the gap portion 14a is provided with a first electrode portion 13a, a second electrode portion 13b, and an intermediate portion 14.
  • the electrode portions 13a and 13b provided in the gap portion 14a are provided in the substrate portions 11 and 12 which are different from each other.
  • the inner side of the power generation element 1 indicates a portion including the gap portion 14a, and the outer side of the power generation element 1 indicates a portion separated from the gap portion 14a.
  • the power generation element 1 may have a structure in which the above configurations are laminated. That is, a plurality of the first substrate portions 11 and the second substrate portion 12 are laminated in the first direction Z, and a plurality of intermediate portions 14 are provided between the substrate portions 11 and 12.
  • the first connection wiring 15a extends in the first direction Z along the side surfaces of the laminated substrate portions 11 and 12, and is in contact with the plurality of first electrode portions 13a.
  • the second connection wiring 15b faces the first connection wiring 15a, extends in the first direction Z along the side surfaces of the laminated substrate portions 11 and 12, and is in contact with the plurality of second electrode portions 13b. Therefore, the electrode portions 13a and 13b are connected via the connection wirings 15a and 15b.
  • the power generation device 100 may include a power generation element 1 having a laminated structure.
  • the first main surface 11s of the first substrate portion 11 has, for example, a first separation surface 11sa and a first joint surface 11sb, as shown in FIGS. 1B and 1C.
  • the first separation surface 11sa is in contact with the first electrode portion 13a provided on the first substrate portion 11 and is separated from the second substrate portion 12.
  • the first joint surface 11sb is separated from the first electrode portion 13a provided on the first substrate portion 11.
  • the second main surface 12s of the second substrate portion 12 has a second separation surface 12sa and a second joint surface 12sb.
  • the second separation surface 12sa is in contact with the second electrode portion 13b provided on the second substrate portion 12 and is separated from the first substrate portion 11.
  • the second joint surface 12sb is separated from the second electrode portion 13b provided on the second substrate portion 12.
  • the first substrate portion 11 when viewed from the first direction Z shown in FIG. 2A, the first substrate portion 11 may be formed in a quadrangular shape, for example, a polygon having a notch portion, a circular shape, or the like. A part of the first separation surface 11sa overlaps with the first electrode portion 13a provided on the first substrate portion 11. At least a part of the first joint surface 11sb is provided outside the first separation surface 11sa. The first electrode portion 13a and the first separation surface 11sa provided on the first substrate portion 11 are surrounded by the first joint surface 11sb and the first connection wiring 15a.
  • the second substrate portion 12 when viewed from the first direction Z shown in FIG. 2B, the second substrate portion 12 may be formed in a quadrangular shape, for example, a polygon having a notch portion or a circular shape.
  • a part of the second separation surface 12sa overlaps with the second electrode portion 13b provided on the second substrate portion 12.
  • At least a part of the second joint surface 12sb is provided outside the second separation surface 12sa.
  • the second electrode portion 13b and the second separation surface 12sa provided on the second substrate portion 12 are surrounded by the second joint surface 12sb and the second connection wiring 15b.
  • the substrate portions 11 and 12 are joined at the joining surfaces 11sb and 12sb, and are joined, for example, in the range shown by the broken lines in FIGS. 2 (a) and 2 (b). That is, when viewed from the first direction Z, the intermediate portion 14 is surrounded by the first joint surface 11sb and the second joint surface 12sb. Therefore, a closed space (gap portion 14a) surrounding the intermediate portion 14 can be easily formed by the joint surfaces 11sb and 12sb on the main surfaces 11s and 12s provided with the electrode portions 13a and 13b.
  • each of the above-mentioned substrate portions 11 and 12 has the respective separation surfaces 11sa and 12sa and the respective joint surfaces 11sb and 12sb, an inter-electrode gap is formed between the respective electrode portions 13a and 13b. That is, the gap between the electrodes can be formed without providing a support portion or the like that supports between the substrate portions 11 and 12. Therefore, it is possible to suppress variations in the gap between the electrodes.
  • the first joint surface 11sb is provided continuously with the first separation surface 11sa. Further, the second joint surface 12sb is provided continuously with the second separation surface 12sa. Therefore, for example, when an external force acts on a part of the joint surfaces 11sb and 12sb, it is possible to easily disperse the force over the entire substrate portions 11 and 12. This makes it possible to suppress early deterioration of the power generation element 1.
  • At least one of the first main surface 11s and the second main surface 12s can be formed in a curved shape, for example, as shown in FIGS. 1 (b) and 1 (c). Therefore, as compared with the case where a support portion or the like is provided on the main surface, for example, a portion where stress is locally concentrated such as a protrusion or the like is not formed. Further, when a flexible film-like material is used as the substrate 10 and formed in a curved shape, it is possible to easily realize joining of the substrate portions 11 and 12.
  • the joint surfaces 11sb and 12sb are adjacent to, for example, the side surface of the substrate 10.
  • the first bonding surface 11sb has, for example, a first substrate bonding surface 11sbs and a first electrode bonding surface 11sbm.
  • the second bonding surface 12sb has, for example, a second substrate bonding surface 12sbs and a second electrode bonding surface 12sbm.
  • the first substrate bonding surface 11sbs is in contact with the second substrate bonding surface 12sbs.
  • the first electrode joint surface 11sbm is in contact with the second electrode portion 13b provided on the second substrate portion 12.
  • the second electrode joint surface 12sbm is in contact with the first electrode portion 13a provided on the first substrate portion 11.
  • the substrate portions 11 and 12 include a first substrate bonding surface 11sbs and a second substrate bonding surface 12sbs, a first electrode bonding surface 11sbm, a second electrode portion 13b provided on the second substrate portion 12, and the like.
  • the first electrode portion 13a provided on the first substrate portion 11 and the second electrode bonding surface 12sbm are bonded to each other, and are bonded, for example, in the range shown by the broken line in FIG. That is, when viewed from the first direction Z, the intermediate portion 14 is surrounded by the first joint surface 11sb and the second joint surface 12sb. Therefore, a closed space (gap portion 14a) surrounding the intermediate portion 14 can be easily formed by the joint surfaces 11sb and 12sb.
  • the area where the electrode portions 13a and 13b are provided is increased as compared with the case where the electrode portions 13a and 13b are separated from the main surfaces 11s and 12s and provided in the gap portion 14a. Can be done. Therefore, the facing areas of the electrode portions 13a and 13b can be increased.
  • first electrode portion 13a and the second electrode joint surface 12sbm provided on the first substrate portion 11 and the second electrode portion 13b and the first electrode joint surface 11sbm provided on the second substrate portion 12 are respectively. By joining, electrical connection with each of the electrode portions 13a and 13b can be easily realized from the side surface of the substrate 10.
  • the thickness of the substrate portions 11 and 12 along the first direction Z is, for example, 10 ⁇ m or more and 1 mm or less.
  • the difference T1s between the height of the first separation surface 11sa and the height of the first joint surface 11sb along the first direction Z is the thickness of the first substrate portion 11.
  • the thickness T1a of the first substrate portion 11 starting from the first separation surface 11sa is equal to the thickness T1b of the first substrate portion 11 starting from the first joint surface 11sb.
  • the difference T2s between the height of the second separation surface 12sa and the height of the second joint surface 12sb along the first direction Z is extremely small compared to the thickness of the second substrate portion 12.
  • the thickness T2a of the second substrate portion 12 starting from the second separation surface 12sa is equal to the thickness T2b of the second substrate portion 12 starting from the second joint surface 12sb.
  • processing such as removing at least a part of each of the substrate portions 11 and 12 is not performed, and the reduction of the local proof stress of the substrate portions 11 and 12 can be suppressed.
  • it is not necessary to perform a process of removing at least a part of each of the substrate portions 11 and 12 or a process of laminating a new configuration on the substrate portions 11 and 12, and the manufacturing process is reduced. It becomes possible. Further, even when a plurality of the substrate portions 11 and 12 are laminated, the gap portion 14a can be provided between the substrate portions 11 and 12 without being affected by the differences T1s and T2s.
  • the width of each of the substrate portions 11 and 12 is about 1 mm to 500 mm along the second direction X or the third direction Y, and can be arbitrarily set according to the application.
  • a plate-shaped material having an insulating property can be selected.
  • the insulating material include silicon, quartz, glass such as Pyrex (registered trademark), and an insulating resin.
  • the substrate 10 may be in the form of a thin plate or, for example, a flexible film.
  • a film made of a polymer such as thin glass, PET (polyethylene terephthalate), PC (polycarbonate), or polyimide can be used.
  • PET polyethylene terephthalate
  • PC polycarbonate
  • polyimide polyimide
  • each electrode portion 13a and 13b is provided between the first substrate portion 11 and the second substrate portion 12 (inside of the power generation element 1), and the intermediate portion 14 is included. Therefore, by providing the first substrate portion 11 and the second substrate portion 12, deterioration and deformation of the first electrode portion 13a, the second electrode portion 13b, and the intermediate portion 14 due to external force and environmental changes can be prevented. It can also be suppressed. Therefore, it is possible to increase the durability of the power generation element 1.
  • the first electrode portion 13a is provided on the first main surface 11s, and has, for example, a portion exposed from the side surface of the substrate 10.
  • the second electrode portion 13b is provided on the second main surface 12s, and has, for example, a portion exposed from the side surface of the substrate 10.
  • the exposed portions of the electrode portions 13a and 13b are exposed from any of the pair of side surfaces facing each other on the substrate 10 and are separated from each other.
  • the first electrode portion 13a provided on the first substrate portion 11 extends from between the first separation surface 11sa and the second separation surface 12sa to between the first separation surface 11sa and the second electrode joint surface 12sbm.
  • the second electrode portion 13b provided on the second substrate portion 12 extends from between the second separation surface 12sa and the first separation surface 11sa to between the second separation surface 12sa and the first electrode joint surface 11sbm. To do.
  • the height of the surface of the first electrode portion 13a provided on the first substrate portion 11 along the first direction Z shown in FIG. 1A is, for example, the first separation surface 11sa and the first joint surface 11sb. It is provided at a height between and. Along the first direction Z, the height of the surface of the second electrode portion 13b is provided, for example, at the height between the second separation surface 12sa and the second joint surface 12sb.
  • the first electrode portion 13a may be formed in a quadrangular shape when viewed from the first direction Z shown in FIG. 2A, for example, or may be formed in a polygonal shape having a notch portion, a circular shape, or the like.
  • the second electrode portion 13b may be formed in a quadrangular shape when viewed from the first direction Z shown in FIG. 2B, for example, or may be formed in a polygonal shape having a notched portion, a circular shape, or the like.
  • the side surface of the first electrode portion 13a provided on the first substrate portion 11 and the side surface of the second electrode portion 13b provided on the second substrate portion 12 are, for example, as shown in FIG. 1A, the intermediate portion 14 In contact with. Therefore, in addition to the facing surfaces of the electrode portions 13a and 13b, the movement of the electron e can be realized via the side surfaces of the electrode portions 13a and 13b.
  • the first electrode portion 13a provided on the first substrate portion 11 has higher wettability to the solvent 142 of the intermediate portion 14 than, for example, the first main surface 11s of the first substrate portion 11. That is, the solvent 142 easily spreads on the first electrode portion 13a and hardly spreads on the outer peripheral side (joining surface 11sb) of the first main surface 11s. Therefore, the nanoparticles 141 dispersed in the solvent 142 can be easily maintained between the electrode portions 13a and 13b forming the gap between the electrodes.
  • the second electrode portion 13b provided on the second substrate portion 12 may have higher wettability to the solvent 142 than, for example, the second main surface 12s of the second substrate portion 12.
  • the electrode portions 13a and 13b for example, a material having a higher wettability than the main surfaces 11s and 12s may be used, and surface treatment of the electrode portions 13a and 13b may be performed so as to have a higher wettability. .. Further, the surface treatment of the substrate portions 11 and 12 may be performed so that the wettability of the main surfaces 11s and 12s is low.
  • the second electrode portion 13b provided on the first substrate portion 11 is provided outside the gap portion 14a.
  • the second electrode portion 13b provided on the first substrate portion 11 is electrically connected to the second electrode portion 13b provided on the second substrate portion 12 via the second connection wiring 15b. Therefore, for example, by using the second electrode portion 13b provided on the first substrate portion 11, it is possible to easily realize the electrical connection with the second electrode portion 13b provided in the gap portion 14a.
  • the first electrode portion 13a provided on the second substrate portion 12 is provided outside the gap portion 14a.
  • the first electrode portion 13a provided on the second substrate portion 12 is electrically connected to the first electrode portion 13a provided on the first substrate portion 11 via the first connection wiring 15a. Therefore, for example, by using the first electrode portion 13a provided on the second substrate portion 12, it is possible to easily realize the electrical connection with the first electrode portion 13a provided in the gap portion 14a.
  • the first electrode portion 13a contains, for example, platinum (work function: about 5.65 eV), and the second electrode portion 13b contains, for example, tungsten (work function: about 4.55 eV).
  • the electrode portion having a large work function functions as an anode (collector electrode), and the electrode portion having a small work function functions as a cathode (emitter electrode).
  • the first electrode portion 13a will be described as an anode and the second electrode portion 13b will be described as a cathode.
  • the first electrode portion 13a may be used as a cathode and the second electrode portion 13b may be used as an anode.
  • the power generation element 1 an electron emission phenomenon due to absolute temperature that occurs in the gap between the electrodes between the first electrode portion 13a and the second electrode portion 13b having a work function difference can be used. Therefore, the power generation element 1 can convert thermal energy into electrical energy even when the temperature difference between the first electrode portion 13a and the second electrode portion 13b is small. Further, the power generation element 1 converts heat energy into electrical energy even when there is no temperature difference between the first electrode portion 13a and the second electrode portion 13b, or even when a single heat source is used. Can be done.
  • each of the electrode portions 13a and 13b along the first direction Z is, for example, 10 nm or more and 10 ⁇ m or less, preferably 10 nm or more and 1 ⁇ m or less.
  • the thickness of each of the electrode portions 13a and 13b is 10 nm or more and 100 nm or less, the above-mentioned main surfaces 11s and 12s can be easily kept curved.
  • the width of each of the electrode portions 13a and 13b is about 100 ⁇ m to 500 mm along the second direction X or the third direction Y, and can be arbitrarily set according to the application.
  • the width of the electrode portions 13a and 13b is 1/10 or less of the width of the substrate portions 11 and 12, the above-mentioned main surfaces 11s and 12s can be easily kept curved.
  • the distance (gap between electrodes) along the first direction Z between the first electrode portion 13a and the second electrode portion 13b is, for example, a finite value of 1 ⁇ m or less. More preferably, it is 10 nm or more and 100 nm or less. By setting the gap between the electrodes to 10 nm or more and 100 nm or less, it is possible to increase the amount of electric energy generated. If, for example, the gap between the electrodes is set to less than 10 nm, there is a concern that the nanoparticles 141 cannot be maintained in a uniformly dispersed state.
  • the thickness of the power generation element 1 along the first direction Z can be reduced. ..
  • This is effective, for example, when a plurality of power generation elements 1 are laminated along the first direction Z as shown in FIG.
  • the electrode portions 13a and 13b are provided on the main surfaces 11s and 12s facing each other on the substrate portions 11 and 12, the electrodes need only be laminated by laminating only one of the substrate portions 11 and 12 when laminating. An interposition gap can be formed. Therefore, it is possible to reduce the number of laminated substrates 10 which is a main factor of the increase in thickness due to lamination.
  • the thickness of the electrode portions 13a and 13b along the first direction Z and the gap between the electrodes within the above range, it is possible to suppress the plane variation of the electrode portions 13a and 13b, and the electricity can be suppressed.
  • the stability of the amount of energy generated can be improved.
  • the electrons e can be efficiently emitted, and the electrons e can be emitted from the second electrode portion 13b (cathode) to the first electrode portion 13a ( It is also possible to move efficiently to the anode).
  • the material of the first electrode portion 13a and the material of the second electrode portion 13b can be selected from, for example, the metals shown below. Platinum (Pt) Tungsten (W) Aluminum (Al) Titanium (Ti) Niobium (Nb) Molybdenum (Mo) Tantalum (Ta) Rhenium (Re)
  • Pt Platinum
  • W Aluminum
  • Al Titanium
  • Niobium Niobium
  • Mo Molybdenum
  • Tantalum Ti
  • alloys, intermetallic compounds, and metal compounds can be selected as materials for the electrode portions 13a and 13b.
  • a metal compound is a combination of a metal element and a non-metal element. Examples of such metal compounds include, for example, lanthanum hexaboride (LaB 6 ).
  • non-metallic conductive material examples include silicon (Si: for example, p-type Si or n-type Si), carbon-based materials such as graphene, and the like.
  • each of the electrode portions 13a and 13b may be a single-layer structure including the above materials or a laminated structure including the above materials.
  • FIG. 3A is a schematic cross-sectional view showing an example of the intermediate portion 14.
  • the intermediate portion 14 contains, for example, a plurality of nanoparticles 141 and a solvent 142.
  • the plurality of nanoparticles 141 are dispersed in the solvent 142.
  • the intermediate portion 14 is obtained, for example, by filling the gap portion 14a with a solvent 142 in which nanoparticles 141 are dispersed.
  • Nanoparticle 141 contains, for example, a conductive material.
  • the value of the work function of the nanoparticles 141 is, for example, between the value of the work function of the first electrode portion 13a and the value of the work function of the second electrode portion 13b.
  • the plurality of nanoparticles 141 include work functions in the range of 3.0 eV or more and 5.5 eV or less.
  • the electrons e emitted between the first electrode portion 13a and the second electrode portion 13b are transferred from the second electrode portion 13b (cathode) to the first electrode portion 13a (anode) via the nanoparticles 141, for example. ) Can be moved to.
  • the material of the nanoparticles 141 at least one of gold and silver can be selected.
  • the intermediate portion 14 may include at least a part of nanoparticles 141 having a work function between the work function of the first electrode portion 13a and the work function of the second electrode portion 13b. Therefore, as the material of the nanoparticles 141, it is also possible to select a conductive material other than gold and silver.
  • the particle size of the nanoparticles 141 is, for example, 2 nm or more and 10 nm or less. Further, the nanoparticles 141 may have, for example, an average particle size (for example, D50) of 3 nm or more and 8 nm or less.
  • the average particle size can be measured, for example, by using a particle size distribution measuring instrument.
  • a particle size distribution measuring instrument using a laser diffraction / scattering method for example, Nanotrac Wave II-EX150 manufactured by Microtrac BEL may be used.
  • the nanoparticles 141 have, for example, an insulating film 141a on the surface thereof.
  • an insulating metal compound and an insulating organic compound can be selected.
  • the insulating metal compound include silicon oxide and alumina.
  • the insulating organic compound include alkanethiol (for example, dodecanethiol) and the like.
  • the thickness of the insulating film 141a is, for example, a finite value of 20 nm or less.
  • the electrons e are, for example, between the second electrode portion 13b (cathode) and the nanoparticles 141, and between the nanoparticles 141 and the first electrode portion 13a. It can be moved to and from (electrode) using the tunnel effect. Therefore, for example, improvement in the power generation efficiency of the power generation element 1 can be expected.
  • the movement of the electron e may be promoted by utilizing the movement of the nanoparticles 141.
  • the solvent 142 for example, a liquid having a boiling point of 60 ° C. or higher can be used. Therefore, the vaporization of the solvent 142 can be suppressed even when the power generation element 1 is used in an environment of room temperature (for example, 15 ° C. to 35 ° C.) or higher. As a result, deterioration of the power generation element 1 due to vaporization of the solvent 142 can be suppressed.
  • a liquid at least one of an organic solvent and water can be selected. Examples of the organic solvent include methanol, ethanol, toluene, xylene, tetradecane, alkanethiol and the like.
  • the solvent 142 is preferably a liquid having a high electrical resistance value and being insulating.
  • FIG. 3B is a schematic cross-sectional view showing another example of the intermediate portion 14. As shown in FIG. 3B, the intermediate portion 14 may not contain the solvent 142 and may contain only the nanoparticles 141.
  • the intermediate portion 14 contains only nanoparticles 141, for example, even when the power generation element 1 is used in a high temperature environment, it is not necessary to consider the vaporization of the solvent 142. This makes it possible to suppress deterioration of the power generation element 1 in a high temperature environment.
  • connection wiring 15a, 2nd connection wiring 15b ⁇ 1st connection wiring 15a, 2nd connection wiring 15b
  • a conductive material is used, for example, gold is used.
  • the first connection wiring 15a is provided outside the second electrode joint surface 12sbm and is in contact with the first electrode portion 13a.
  • the second connection wiring 15b is provided outside, for example, the first electrode joint surface 11sbm, and is in contact with the second electrode portion 13b. Therefore, the connection wirings 15a and 15b that are electrically connected to the electrode portions 13a and 13b can be easily provided, and for example, the manufacturing process in the power generation device 100 can be simplified.
  • connection wirings 15a and 15b are provided on the side surfaces of the board portions 11 and 12, for example.
  • the electrode portions 13a and 13b forming the gap between the electrodes are not exposed from the side surface of the substrate 10, and deterioration of the electrode portions 13a and 13b can be suppressed.
  • the connection wirings 15a and 15b are provided outside the portions where the electrode portions 13a and 13b and the electrode joint surfaces 11sbm and 12sbm are joined, leakage of the intermediate portion 14 from the joint portion and the like can be prevented. It becomes possible to prevent.
  • the first wiring 102a is electrically connected to the first electrode portion 13a provided on the first substrate portion 11 via the first terminal 101a and the first connection wiring 15a.
  • the second wiring 102b is electrically connected to the second electrode portion 13b provided on the second substrate portion 12 via the second terminal 101b and the second connection wiring 15b.
  • the first wiring 102a is electrically connected to the first electrode portion 13a provided on the first substrate portion 11 via the first electrode portion 13a provided on the second substrate portion 12.
  • the second wiring 102b is electrically connected to the second electrode portion 13b provided on the second substrate portion 12 via the second electrode portion 13b provided on the first substrate portion 11.
  • the wirings 102a and 102b are provided. And, electrical connection with each of the electrode portions 13a and 13b can be easily realized.
  • a conductive material is used for each of the wirings 102a and 102b, and for example, materials such as nickel, copper, silver, gold, tungsten, and titanium are used.
  • the structures of the wirings 102a and 102b can be arbitrarily designed as long as they can supply the current generated by the power generation element 1 to the load R.
  • the amount of emitted electrons e depends not only on the thermal energy but also on the difference between the work function of the first electrode portion 13a (anode) and the work function of the second electrode portion 13b (cathode). Further, the amount of emitted electrons e tends to increase as the work function of the second electrode portion 13b is smaller.
  • the amount of moving electrons e can be increased, for example, by increasing the work function difference between the first electrode portion 13a and the second electrode portion 13b, or by reducing the gap between the electrodes.
  • the amount of electrical energy generated by the power generation element 1 can be increased by considering at least one of increasing the work function difference and reducing the gap between the electrodes.
  • FIG. 4 is a flowchart showing an example of the manufacturing method of the power generation element 1 according to the first embodiment.
  • FIG. 5 is a schematic cross-sectional view showing an example of a method for manufacturing the power generation element 1 according to the first embodiment.
  • the method for manufacturing the power generation element 1 includes a first electrode portion forming step S110, a second electrode portion forming step S120, an intermediate portion forming step S130, and a joining step S140. ..
  • first electrode portion forming step S110 for example, as shown in FIG. 5A, the first electrode portion 13a is formed on the first main surface 11s of the substrate 10.
  • the first electrode portion 13a is formed in a quadrangular shape when viewed from the first direction Z, for example, as shown in FIG. 2A.
  • one first electrode portion 13a is formed on each of the first main surface 11s of the first substrate portion 11 and the second substrate portion 12 which are separated in advance, and for example, the first main electrode portion is formed.
  • a plurality of first electrode portions 13a may be formed on the surface 11s.
  • the second electrode portion 13b is formed on the second main surface 12s of the substrate 10.
  • the second electrode portion 13b is formed in a quadrangular shape when viewed from the first direction Z, like the first electrode portion 13a, for example.
  • one second electrode portion 13b is formed on each of the second main surface 12s of the first substrate portion 11 and the second substrate portion 12 which are separated in advance, and the second main surface is formed.
  • a plurality of second electrode portions 13b may be formed on the 12s.
  • the order in which the first electrode portion forming step S110 and the second electrode portion forming step S120 are carried out is arbitrary.
  • the electrode portions 13a and 13b are formed by using a screen printing method, and for example, a sputtering method, a vapor deposition method, an inkjet method, a spray coating method, etc. May be used to form the electrode portions 13a and 13b.
  • a sputtering method for example, platinum is used as the first electrode portion 13a
  • aluminum is used as the second electrode portion 13b, and the above-mentioned materials may be used respectively.
  • the wettability to the solvent 142 may be improved by performing plasma treatment or the like on the surface of at least one of the electrode portions 13a and 13b, for example. This surface treatment is carried out so that, for example, the wettability of the electrode portions 13a and 13b is higher than the wettability of the main surfaces 11s and 12s. As a result, in the intermediate portion forming step S130 described later, the intermediate portion 14 can be easily formed on the electrode portions 13a and 13b.
  • the intermediate portion 14 is formed on a part of the first electrode portion 13a (for example, the first electrode portion 13a formed on the first substrate portion 11). Form. At this time, for example, the intermediate portion 14 may be integrally formed from the top of the first electrode portion 13a to the top of the first main surface 11s. In the intermediate portion forming step S130, for example, the intermediate portion 14 may be formed on a part of the second electrode portion 13b (for example, the second electrode portion 13b formed on the second substrate portion 12).
  • the first electrode portion 13a has a higher wettability with respect to the solvent 142 possessed by the intermediate portion 14 than the first main surface 11s
  • the solvent 142 easily spreads on the first electrode portion 13a, while the first electrode portion 13a has the first electrode portion 13a. 1
  • the intermediate portion 14 it is difficult to spread to the outer peripheral side of the main surface 11s. Therefore, it is difficult for the intermediate portion 14 to flow out from the first main surface 11s, and in particular, it is possible to prevent the intermediate portion 14 from being formed on the joining surface 11sb to be joined in the joining step S140 described later.
  • the second electrode portion 13b may have higher wettability with respect to the solvent 142 than the second main surface 12s.
  • the intermediate portion 14 may be formed by using a screen printing method, or the intermediate portion 14 may be formed by using, for example, an inkjet method or a spray coating method.
  • a solvent 142 in which nanoparticles 141 are dispersed in advance is used.
  • the joining step S140 for example, as shown in FIG. 5D, the first electrode portion 13a formed on the first main surface 11s of the first substrate portion 11 and the second substrate are viewed from the first direction Z.
  • the second electrode portion 13b formed on the second main surface 12s of the portion 12 is joined so as to overlap.
  • the joining step S140 includes a first electrode portion 13a formed on the first main surface 11s of the first substrate portion 11 and a second electrode portion 13b formed on the second main surface 12s of the second substrate portion 12. Is separated in the first direction Z via the intermediate portion 14, and the first substrate portion 11 and the second substrate portion 12 are joined.
  • the substrate portions 11 and 12 are joined by using, for example, a direct joining method.
  • a direct joining method for example, surface cleaning using plasma treatment is performed on the portions (surfaces corresponding to the joining surfaces 11sb and 12sb) to which the substrate portions 11 and 12 are joined.
  • a force is uniformly applied to the second substrate portion 12 arranged on the first substrate portion 11 via the intermediate portion 14 (along the first direction Z in FIG. 6). Arrow).
  • the space between the substrate portions 11 and 12 is depressurized (arrows along the second direction X in FIG. 6) to form a gap.
  • Air or the like can be removed from the inside of the portion 14a, and the inside of the gap portion 14a can be easily filled with the intermediate portion 14. Further, by removing air or the like from the gap portion 14a, deterioration of the power generation element 1 due to air or the like can be suppressed.
  • the size of the gap between the electrodes can be controlled by adjusting the film thickness forming the intermediate portion 14.
  • the intermediate portion forming step S130 may be carried out after the joining step S140 is carried out.
  • the side surface sides of the main surfaces 11s and 12s are joined along one direction (the third direction Y in FIG. 7B).
  • joining of any of the main surfaces 11s and 12s with any of the electrode portions 13a and 13b may be included.
  • a space 14s that opens in the third direction Y is formed between the joint surfaces 11sb and 12sb.
  • FIG. 7A is a schematic cross-sectional view taken along the line 7A-7A in FIG. 7B, showing a space 14s formed between the substrate portions 11 and 12.
  • the intermediate portion 14 is formed on the electrode portions 13a and 13b via the space 14s.
  • the intermediate portion 14 is filled between the electrode portions 13a and 13b and between the separation surfaces 11sa and 12sa, for example, by a capillary phenomenon (capillary force).
  • the side surface sides of the main surfaces 11s and 12s are joined along the other directions (a pair of broken lines along the second direction X in FIG. 7B) so as to surround the electrode portions 13a and 13b. Then, for example, the structure shown in FIG. 5D can be obtained.
  • the power generation element 1 in the first embodiment is formed.
  • the joining step S140 for example, after joining the substrate portions 11 and 12, the first connecting wiring 15a and the second electrode portion 13b extending along the side surface of the substrate 10 and in contact with the first electrode portion 13a.
  • the power generation device 100 can be formed by connecting the terminal 101 and the wiring 102 to the connection wiring 15 and attaching the load R.
  • a plurality of first electrode portions 13a may be formed on the first main surface 11s of one substrate 10.
  • a plurality of second electrode portions 13b may be formed on the second main surface 12s of one substrate 10.
  • the substrate 10 is divided into pairs of electrode portions 13a and 13b, and for example, the joining step S140 and the like are performed. After this, the substrate 10 may be divided into a pair of electrode portions 13a and 13b.
  • the substrate 10 divided after forming the electrode portions 13a and 13b can be used for either the first substrate portion 11 or the second substrate portion 12.
  • the first main surface 11s of the first substrate portion 11 is in contact with the first electrode portion 13a provided on the first substrate portion 11 and is separated from the second substrate portion 12 by the first separation surface 11sa.
  • a first joint surface 11sb which is continuously provided with the first separation surface 11sa, is separated from the first electrode portion 13a provided in the first substrate portion 11, and is in contact with the second substrate portion 12.
  • the second main surface 12s of the second substrate portion 12 is in contact with the second electrode portion 13b provided on the second substrate portion 12, and is separated from the first substrate portion 11 by a second separation surface 12sa and a second separation surface 12sa.
  • It has a second joint surface 12sb that is continuously provided with the above, is separated from the second electrode portion 13b provided on the second substrate portion 12, and is in contact with the first substrate portion 11. That is, a gap between the electrodes is formed by interposing an intermediate portion 14 that can be formed by joining the main surfaces 11s and 12s provided with the electrode portions 13a and 13b. Therefore, it is not necessary to separately provide a support member or the like, and it is possible to suppress variations in the gap between the electrodes. This makes it possible to stabilize the amount of electric energy generated.
  • the electrode portion 13 is provided on the first main surface 11s and the second main surface 12s. That is, the substrate 10 is sandwiched between the electrode portions 13. Therefore, when the power generation element 1 having a laminated structure is provided, the thickness in the first direction Z can be suppressed. This makes it possible to reduce the size of the power generation element 1.
  • the first electrode portion 13a is provided on the first main surface 11s of the first substrate portion 11 and the first main surface 11s of the second substrate portion 12.
  • the second electrode portion 13b is provided on the second main surface 12s of the first substrate portion 11 and the second main surface 12s of the second substrate portion 12. That is, the first electrode portions 13a and the second electrode portions 13b are provided on the substrate portions 11 and 12 with the substrate portions 11 and 12 interposed therebetween. Therefore, when the power generation element 1 having a laminated structure is formed, it can be easily realized. This makes it possible to simplify the manufacturing process.
  • the intermediate portion 14 is surrounded by the first joint surface 11sb and the second joint surface 12sb when viewed from the first direction Z. Therefore, a closed space (gap portion 14a) surrounding the intermediate portion 14 can be formed by the joint surfaces 11sb and 12sb on the main surfaces 11s and 12s provided with the electrode portions 13a and 13b. As a result, it is possible to suppress leakage of the intermediate portion 14 and the like without forming another configuration on the substrate 10.
  • the first connection wiring 15a and the second connection wiring 15b are provided on the side surface of the substrate 10. Therefore, the connection wirings 15a and 15b that are electrically connected to the electrode portions 13a and 13b can be easily provided. This makes it possible to facilitate the manufacturing process. Further, even if the connection wirings 15a and 15b are deteriorated due to the use of the power generation element 1, it can be easily repaired.
  • the first connection wiring 15a extends in the first direction Z and comes into contact with the plurality of first electrode portions 13a.
  • the second connection wiring 15b extends in the first direction Z and comes into contact with the plurality of second electrode portions 13b. Therefore, even when a plurality of the substrate portions 11 and 12 are laminated, the connection wirings 15a and 15b for electrically connecting to the electrode portions 13a and 13b can be easily provided. This makes it possible to facilitate the manufacturing process. Further, the stress concentration portions of the connection wirings 15a and 15b can be reduced, and the disconnection of the connection wirings 15a and 15b can be suppressed.
  • the side surface of the first electrode portion 13a provided on the first substrate portion 11 and the side surface of the second electrode portion 13b provided on the second substrate portion 12 are in contact with the intermediate portion 14. .. Therefore, in addition to the facing surfaces of the electrode portions 13a and 13b, the electrons e can be moved via the side surfaces of the electrode portions 13a and 13b. This makes it possible to increase the amount of electric energy generated.
  • At least one of the first main surface 11s of the first substrate portion 11 and the second main surface 12s of the second substrate portion 12 is formed in a curved shape. Therefore, a portion where stress is locally concentrated such as a protrusion is not formed. This makes it possible to suppress damage due to an impact from the outside. Further, when a flexible film-like material is used as the substrate 10 and formed in a curved shape, it is possible to easily realize joining of the substrate portions 11 and 12.
  • the first electrode portion 13a provided on the first substrate portion 11 has higher wettability to the intermediate portion 14 than the first main surface 11s of the first substrate portion 11. Therefore, the nanoparticles 141 dispersed in the solvent 142 contained in the intermediate portion 14 can be easily maintained between the electrode portions 13a and 13b. This makes it possible to suppress a decrease in the amount of electric energy generated over time.
  • the first bonding surface 11sb is the first electrode in contact with the first substrate bonding surface 11sbs in contact with the second bonding surface 12sb and the second electrode portion 13b provided in the second substrate portion 12. It has a joint surface of 11 sbm.
  • the second bonding surface 12sb has a second substrate bonding surface 12sbs in contact with the first substrate bonding surface 11sbs and a second electrode bonding surface 12sbm in contact with the first electrode portion 13a provided on the first substrate portion 11. Therefore, the area where the electrode portions 13a and 13b are provided on the substrate 10 can be increased, and the facing areas of the electrode portions 13a and 13b can be increased. This makes it possible to increase the amount of electric energy generated.
  • the thickness T1a of the first substrate portion 11 starting from the first separation surface 11sa is the first substrate starting from the first joint surface 11sb. It is equal to the thickness T1b of the portion 11.
  • the thickness T2a of the second substrate portion 12 starting from the second separation surface 12sa is equal to the thickness T2b of the second substrate portion 12 starting from the second joint surface 12sb. .. Therefore, processing such as removing a part of the substrate portions 11 and 12 is not performed, and the local reduction in the proof stress of the substrate portions 11 and 12 can be suppressed. This makes it possible to suppress deterioration of the substrate portions 11 and 12. Further, it is not necessary to carry out a process of removing a part of each of the substrate portions 11 and 12 or a process of laminating a new configuration on the substrate 10, and it is possible to reduce the manufacturing process.
  • the first substrate portion 11 and the second substrate portion 12 are joined so as to overlap each other when viewed from the first direction Z.
  • the first main surface 11s of the first substrate portion 11 is in contact with the first electrode portion 13a formed on the first substrate portion 11, and is separated from the second substrate portion 12 by the first separation surface 11sa and the first.
  • It has a first joint surface 11sb that is continuously formed with the separation surface 11sa, is separated from the first electrode portion 13a formed on the first substrate portion 11, and is in contact with the second substrate portion 12.
  • the second main surface 12s of the second substrate portion 12 is in contact with the second electrode portion 13b formed on the second substrate portion 12, and is separated from the first substrate portion 11 by a second separation surface 12sa and a second separation surface 12sa. It has a second joint surface 12sb which is continuously formed with the above and is separated from the second electrode portion 13b formed on the second substrate portion 12 and is in contact with the first substrate portion 11. That is, a gap between the electrodes is formed by interposing an intermediate portion 14 that can be formed by joining the main surfaces 11s and 12s on which the electrode portions 13a and 13b are formed. Therefore, it is not necessary to separately provide a support member or the like, and it is possible to suppress variations in the gap between the electrodes. This makes it possible to stabilize the amount of electric energy generated.
  • the first electrode portion 13a is formed on the first main surface 11s of the substrate 10, and the second electrode portion 13b is formed on the second main surface 12s. That is, the substrate 10 is sandwiched between the electrode portions 13a and 13b. Therefore, when the power generation element 1 having a laminated structure is provided, the thickness in the first direction Z can be suppressed. This makes it possible to reduce the size of the power generation element 1.
  • the joining step S140 is carried out in a state where the pressure is reduced between the first substrate portion 11 and the second substrate portion 12. Therefore, air or the like can be removed from the gap portion 14a in which the gap between the electrodes is formed, and the inside of the gap portion 14a can be easily filled with the intermediate portion 14. This makes it possible to facilitate the manufacturing process.
  • FIG. 9 is a schematic view showing a modified example of the substrate 10 in the first embodiment.
  • FIG. 9A is a schematic cross-sectional view showing a modified example of the substrate 10 in the first embodiment
  • FIG. 9B is a schematic plan view of the power generation element 1 including a modified example of the substrate 10 in the first embodiment. It is a figure. 9 (a) corresponds to the schematic cross-sectional view of FIG. 1 (c), and FIG. 9 (b) corresponds to the schematic plan view of FIG. 2 (a).
  • the first separation surface 11sa has a contact surface 11sat, a first surface 11saf, and a second surface 11sas.
  • the description of the same configuration as described above will be omitted.
  • the contact surface 11sat is in contact with the first electrode portion 13a.
  • the contact surface 11sat indicates a portion of the first main surface 11s that completely overlaps with the first electrode portion 13a.
  • the first surface 11saf has a portion that is continuously provided with the contact surface 11sat and is provided outside the contact surface 11sat.
  • the first surface 11saf is provided between the contact surface 11sat and the second surface 11sat.
  • the second surface 11saf is provided continuously with the first surface 11saf and is provided outside the first surface 11saf.
  • the second surface 11sas is provided between the first surface 11saf and the joint surface 11sb.
  • the first surface 11saf has higher wettability to the solvent 142 than the second surface 11sas. Therefore, the solvent 142 spreads more easily on the first surface 11saf than on the second surface 11sab, and the exudation of the solvent 142 from the joint surfaces 11sb and 12sb can be suppressed.
  • the difference in wettability between the first surface 11saf and the second surface 11sas can be realized by changing the surface energy of at least one of the first surface 11saf and the second surface 11sas by using, for example, a plasma treatment method.
  • a moth-eye structure may be formed on at least one of the first surface 11saf and the second surface 11sas by, for example, a nanoimprint method.
  • the second separation surface 12sa has a contact surface 12sat, a first surface 12saf, and a second surface 12sas, similarly to the above-mentioned first separation surface 11sa. You may. Also in this case, the exudation of the solvent 142 from the joint surfaces 11sb and 12sb can be suppressed.
  • each of the separation surfaces 11sa and 12sa has contact surfaces 11sat and 12sat, first surfaces 11saf and 12saf, and second surfaces 11sas and 12sas, and the electrode portions 13a and 13b have first surfaces 11saf and 12saf.
  • FIG. 10A is a flowchart showing a modified example of the method for manufacturing the power generation element 1 in the first embodiment
  • FIGS. 10B to 10D are manufacturing of the power generation element 1 in the first embodiment. It is a schematic diagram which shows the modification of the method.
  • ⁇ Surface treatment step S150> In the surface treatment step S150, before the intermediate portion forming step S130 and the joining step S140, for example, the surface treatment is performed on the first main surface 11s located around the first electrode portion 13a formed on the first substrate portion 11. Do. In the surface treatment step S150, for example, as shown in FIGS. 10 (b) and 10 (c), the first surface 11saf that has been surface-treated and the second surface 11sas that has not been surface-treated are formed. At this time, the surface treatment is performed so that the first surface 11saf has higher wettability with respect to the solvent 142 than the second surface 11sas. In addition, for example, the surface treatment may be performed on the second surface 11s as so that the wettability of the second surface 11ss becomes low.
  • a plasma treatment method is used to perform surface treatment on the first main surface 11s.
  • the surface treatment may be performed on the second main surface 12s as in the case of the first main surface 11s, for example.
  • the above-mentioned steps S130 and S140 are carried out to form the power generation element 1 in the first embodiment.
  • the surface treatment step S150 for example, as shown in FIG. 10D, in the intermediate portion forming step S130, the intermediate portion 14 can be kept in a state in which it is difficult to spread on the second surface 11s as side, and the intermediate portion 14 can be maintained. Can be easily maintained on the first electrode portion 13a.
  • the surface treatment step S150 may be performed before, for example, the electrode portion forming steps S110 and S120.
  • the first surfaces 11saf and 12saf have higher wettability to the intermediate portion 14 (solvent 142) than the second surfaces 11sas and 12sas. Therefore, it is possible to suppress the seepage of the solvent 142 from the joint surfaces 11sb and 12sb. This makes it possible to suppress a decrease in the amount of the solvent 142 with time.
  • the surface treatment step S150 the surface treatment is performed on the first main surface 11s located around the first electrode portion 13a formed on the first substrate portion 11. Therefore, when the intermediate portion forming step S130 is carried out, the intermediate portion 14 can be easily maintained on the first electrode portion 13a. This makes it possible to easily form the intermediate portion 14.
  • FIG. 11 is a schematic view showing a first modification of the power generation element 1 in the first embodiment.
  • FIG. 11A is a schematic cross-sectional view showing a first modification of the power generation element 1 in the first embodiment
  • FIG. 11B shows a first modification of the power generation element 1 in the first embodiment. It is a schematic plan view.
  • FIG. 11B corresponds to the schematic plan view of FIG. 2A.
  • the sealing portion 17 is provided in the gap portion 14a, for example, as shown in FIG.
  • the sealing portion 17 is provided between the electrode portions 13a and 13b and the joint surfaces 11sb and 12sb in the gap portion 14a.
  • the sealing portion 17 surrounds, for example, the intermediate portion 14.
  • the sealing portion 17 is in contact with and surrounded by the joint surfaces 11sb and 12sb.
  • an insulating resin is used as the sealing portion 17, and an example of the insulating resin is a fluorine-based insulating resin.
  • a metal such as aluminum may be used as the sealing portion 17. By using a metal as the sealing portion 17, deterioration of the power generation element 1 due to a gas such as water vapor can be suppressed.
  • the sealing portion 17 is provided between the first electrode portion 13a provided on the first substrate portion 11 and the first joint surface 11sb, and the second substrate portion 12 is provided. It is provided between the electrode portion 13b and the second joint surface 12sb and surrounds the intermediate portion 14. Therefore, it is possible to suppress the seepage of the intermediate portion 14 (solvent 142) from the joint surfaces 11sb and 12sb. This makes it possible to suppress a decrease in the amount of the solvent 142 with time.
  • FIG. 12 is a schematic view showing a second modification of the power generation element 1 in the first embodiment.
  • FIG. 12A is a schematic perspective view showing a second modification of the power generation element 1 in the first embodiment
  • FIG. 12B shows a second modification of the power generation element 1 in the first embodiment. It is a schematic plan view.
  • FIG. 12B corresponds to the schematic plan view of FIG. 2A.
  • the protective film 18 surrounds at least the side surface of the first substrate portion 11 and the side surface of the second substrate portion 12.
  • the protective film 18 is in contact with and surrounds the connection wirings 15a and 15b provided on the side surfaces of the substrate portions 11 and 12, for example.
  • the protective film 18 may cover the entire substrate 10, for example.
  • an insulating resin is used as the protective film 18, and examples of the insulating resin include a fluorine-based insulating resin.
  • a metal such as aluminum may be used as the protective film 18. By using a metal as the protective film 18, deterioration of the power generation element 1 due to a gas such as water vapor can be suppressed.
  • the protective film 18 surrounds at least the side surface of the first substrate portion 11 and the side surface of the second substrate portion 12. Therefore, deterioration of the substrate 10 due to external factors can be suppressed. This makes it possible to suppress deterioration of the power generation element 1 with time.
  • the second modification it is possible to suppress the exudation of the solvent 142 from the joint surfaces 11sb and 12sb, respectively. This makes it possible to suppress a decrease in the amount of the solvent 142 with time.
  • FIG. 13 is a schematic cross-sectional view showing a third modification of the power generation element 1 in the first embodiment.
  • a gap portion 14a is formed between each layer of the substrate 10 wound in a roll shape, and each electrode portion 13a, 13b and an intermediate portion 14 are provided.
  • the electrode portions 13a and 13b are provided along the direction extending in a roll shape of the substrate 10.
  • the roll-shaped substrate 10 may be wound around a cylindrical or cylindrical shaft member (not shown), or may be fixed in shape by, for example, UV curing.
  • the tip portion on the outer winding side of the rolled substrate 10 may be joined in a wound state so that a gap portion 14a is formed, or may be fixed by, for example, an insulating sealing material.
  • the rolled substrate 10 may be covered with, for example, the protective film 18 described above.
  • the second substrate portion 12 is provided on the inner diameter side (two-dot chain line in FIG. 13) of the roll-shaped substrate 10, and the first substrate portion 11 is a roll-shaped substrate. It is provided on the outer diameter side of 10. Seen from the third direction Y, the cross sections of the substrate portions 11 and 12 are the same as the structure shown in FIG. 1 (a).
  • the substrate 10 and the electrode portions 13a and 13b are wound in a roll shape, and an intermediate portion 14 is provided between the electrode portions 13a and 13b. Therefore, the facing areas of the electrode portions 13a and 13b can be dramatically increased. This makes it possible to increase the amount of electric energy generated.
  • FIG. 15 is a schematic cross-sectional view showing an example of the power generation device 100 and the power generation element 1 according to the second embodiment.
  • the substrate portions 11 and 12 are provided with different electrode portions 13a and 13b, respectively.
  • the description of the same configuration as described above will be omitted.
  • the first electrode portion 13a is provided on the first main surface 11s and the second main surface 12s of the first substrate portion 11. That is, the first substrate portion 11 is sandwiched between the pair of first electrode portions 13a.
  • the pair of first electrode portions 13a are provided so as to overlap each other.
  • the pair of first electrode portions 13a extend to one side surface of the first substrate portion 11 and are electrically connected to each other via the first connection wiring 15a.
  • the second electrode portion 13b is provided on the first main surface 11s and the second main surface 12s of the second substrate portion 12. That is, the second substrate portion 12 is sandwiched between the pair of second electrode portions 13b. For example, when viewed from the first direction Z, the pair of second electrode portions 13b are provided so as to overlap each other. The pair of second electrode portions 13b extend to one side surface of the second substrate portion 12 and are electrically connected to each other via the second connection wiring 15b.
  • the power generation element 1 may have a structure in which the above configurations are laminated.
  • the first connection wiring 15a extends in the first direction Z along the side surfaces of the laminated substrate portions 11 and 12, and is in contact with the plurality of first electrode portions 13a.
  • the second connection wiring 15b faces the first connection wiring 15a, extends in the first direction Z along the side surfaces of the laminated substrate portions 11 and 12, and is in contact with the plurality of second electrode portions 13b.
  • the power generation device 100 may include a power generation element 1 having the above-mentioned structure.
  • the first main surface 11s of the first substrate portion 11 is in contact with the first electrode portion 13a provided on the first substrate portion 11, and the second substrate portion 12 A first joint provided continuously with the first separation surface 11sa and separated from the first separation surface 11sa, separated from the first electrode portion 13a provided on the first substrate portion 11, and in contact with the second substrate portion 12. It has a surface of 11 sb.
  • the second main surface 12s of the second substrate portion 12 is in contact with the second electrode portion 13b provided on the second substrate portion 12, and is separated from the first substrate portion 11 by a second separation surface 12sa and a second separation surface 12sa.
  • It has a second joint surface 12sb that is continuously provided with the above, is separated from the second electrode portion 13b provided on the second substrate portion 12, and is in contact with the first substrate portion 11. That is, a gap between the electrodes is formed by interposing an intermediate portion 14 that can be formed by joining the main surfaces 11s and 12s provided with the electrode portions 13a and 13b. Therefore, it is not necessary to separately provide a support member or the like, and it is possible to suppress variations in the gap between the electrodes. This makes it possible to stabilize the amount of electric energy generated.
  • the electrode portion 13 is provided on the first main surface 11s and the second main surface 12s, as in the above-described embodiment. That is, the substrate 10 is sandwiched between the electrode portions 13. Therefore, when the power generation element 1 having a laminated structure is provided, the thickness in the first direction Z can be suppressed. This makes it possible to reduce the size of the power generation element 1.
  • the first electrode portion 13a is provided on the first main surface 11s and the second main surface 12s of the first substrate portion 11.
  • the second electrode portion 13b is provided on the first main surface 11s and the second main surface 12s of the second substrate portion 12. That is, each of the substrate portions 11 and 12 is provided with either the first electrode portion 13a or the second electrode portion 13b. Therefore, when the one electrode portions 13a and 13b are formed, the possibility of forming the one electrode portions 13a and 13b in contact with the other electrode portions 13a and 13b can be suppressed. This makes it possible to improve the yield at the time of manufacturing the power generation element 1.
  • 17 (a) to 17 (d) are schematic block diagrams showing an example of an electronic device 500 provided with a power generation element 1.
  • 17 (e) to 17 (h) are schematic block diagrams showing an example of an electronic device 500 provided with a power generation device 100 including a power generation element 1.
  • the electronic device 500 (electric product) includes an electronic component 501 (electronic component), a main power supply 502, and an auxiliary power supply 503.
  • Each of the electronic device 500 and the electronic component 501 is an electrical device (electrical device).
  • the electronic component 501 is driven by using the main power supply 502 as a power source.
  • Examples of the electronic component 501 include a CPU, a motor, a sensor terminal, lighting, and the like.
  • the electronic device 500 includes an electronic device that can be controlled by a built-in master (CPU).
  • the electronic component 501 includes, for example, at least one of a motor, a sensor terminal, a lighting, and the like, the electronic device 500 includes an external master, or an electronic device that can be controlled by a person.
  • the main power source 502 is, for example, a battery. Batteries also include rechargeable batteries.
  • the positive terminal (+) of the main power supply 502 is electrically connected to the Vcc terminal (Vcc) of the electronic component 501.
  • the negative terminal (-) of the main power supply 502 is electrically connected to the GND terminal (GND) of the electronic component 501.
  • the auxiliary power supply 503 is a power generation element 1.
  • the power generation element 1 includes at least one of the power generation elements 1 described above.
  • the anode of the power generation element 1 (for example, the first electrode portion 13a) has a GND terminal (GND) of the electronic component 501, a negative terminal (-) of the main power supply 502, or a GND terminal (GND) and a negative terminal (-). It is electrically connected to the wiring to be connected.
  • the cathode of the power generation element 1 (for example, the second electrode portion 13b) has a Vcc terminal (Vcc) of the electronic component 501, a positive terminal (+) of the main power supply 502, or a Vcc terminal (Vcc) and a positive terminal (+).
  • the auxiliary power supply 503 is used in combination with the main power supply 502, for example, as a power source for assisting the main power supply 502 or as a power source for backing up the main power supply 502 when the capacity of the main power supply 502 is exhausted. be able to.
  • the main power source 502 is a rechargeable battery
  • the auxiliary power source 503 can also be used as a power source for charging the battery.
  • the main power source 502 may be the power generation element 1.
  • the anode of the power generation element 1 is electrically connected to the GND terminal (GND) of the electronic component 501.
  • the cathode of the power generation element 1 is electrically connected to the Vcc terminal (Vcc) of the electronic component 501.
  • the electronic device 500 shown in FIG. 17B includes a power generation element 1 used as a main power source 502 and an electronic component 501 that can be driven by the power generation element 1.
  • the power generation element 1 is an independent power source (for example, an off-grid power source). Therefore, the electronic device 500 can be made, for example, a self-supporting type (stand-alone type).
  • the power generation element 1 is an energy harvesting type (energy harvesting type). In the electronic device 500 shown in FIG. 17B, it is not necessary to replace the battery.
  • the electronic component 501 may include the power generation element 1.
  • the anode of the power generation element 1 is electrically connected to, for example, the GND wiring of a circuit board (not shown).
  • the cathode of the power generation element 1 is electrically connected to, for example, the Vcc wiring of a circuit board (not shown).
  • the power generation element 1 can be used as an electronic component 501, for example, an auxiliary power supply 503.
  • the power generation element 1 can be used as, for example, the main power supply 502 of the electronic component 501.
  • the electronic device 500 may include a power generation device 100.
  • the power generation device 100 includes a power generation element 1 as a source of electric energy.
  • the embodiment shown in FIG. 17D includes a power generation element 1 in which the electronic component 501 is used as the main power source 502.
  • the embodiment shown in FIG. 17 (h) includes a power generation device 100 in which the electronic component 501 is used as the main power source.
  • the electronic component 501 has an independent power source. Therefore, the electronic component 501 can be made, for example, a self-standing type.
  • the self-supporting electronic component 501 can be effectively used, for example, in an electronic device including a plurality of electronic components and in which at least one electronic component is separated from another electronic component.
  • An example of such an electronic device 500 is a sensor.
  • the sensor includes a sensor terminal (slave) and a controller (master) away from the sensor terminal.
  • Each of the sensor terminal and the controller is an electronic component 501. If the sensor terminal includes the power generation element 1 or the power generation device 100, it becomes a self-supporting sensor terminal, and there is no need to supply electric power by wire. Since the power generation element 1 or the power generation device 100 is an energy harvesting type, it is not necessary to replace the battery.
  • the sensor terminal can also be regarded as one of the electronic devices 500.
  • the sensor terminal regarded as the electronic device 500 further includes, for example, an IoT wireless tag and the like in addition to the sensor terminal of the sensor.
  • the electronic device 500 uses a power generation element 1 that converts thermal energy into electrical energy and a power generation element 1 as a power source. It includes an electronic component 501 that can be driven.
  • the electronic device 500 may be an autonomous type (autonomous type) having an independent power supply. Examples of autonomous electronic devices include robots and the like. Further, the electronic component 501 including the power generation element 1 or the power generation device 100 may be autonomous with an independent power source. Examples of autonomous electronic components include movable sensor terminals and the like.
  • Power generation element 10 Substrate 11: First substrate portion 11s: First main surface 11s: First separation surface 11saf: First surface 11sas: Second surface 11sat: Contact surface 11sb: First joint surface 11sbm: First electrode Joint surface 11sbs: First substrate joint surface 12: Second substrate portion 12s: Second main surface 12s: Second separation surface 12saf: First surface 12sas: Second surface 12sat: Contact surface 12sb: Second joint surface 12sbm: First 2-electrode joint surface 12sbs: 2nd substrate joint surface 13a: 1st electrode portion 13b: 2nd electrode portion 14: intermediate portion 14a: gap portion 14s: space 15: connection wiring 17: sealing portion 18: protective film 100: power generation Device 101: Terminal 102: Wiring 141: Nanoparticle 142: Solvent 500: Electronic device 501: Electronic component 502: Main power supply 503: Auxiliary power supply R: Load S110: First electrode portion forming step S120: Second electrode portion forming step S130 :

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PCT/JP2020/016263 2019-05-21 2020-04-13 発電素子、発電装置、電子機器、及び発電素子の製造方法 WO2020235254A1 (ja)

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CN202080036847.9A CN113853738A (zh) 2019-05-21 2020-04-13 发电元件、发电装置、电子设备以及发电元件的制造方法
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