WO2020224430A1 - 阵列基板、显示面板和显示装置 - Google Patents
阵列基板、显示面板和显示装置 Download PDFInfo
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- WO2020224430A1 WO2020224430A1 PCT/CN2020/085977 CN2020085977W WO2020224430A1 WO 2020224430 A1 WO2020224430 A1 WO 2020224430A1 CN 2020085977 W CN2020085977 W CN 2020085977W WO 2020224430 A1 WO2020224430 A1 WO 2020224430A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
Abstract
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Claims (12)
- 一种阵列基板,其中,包括:衬底基板,包括:驱动晶体管;半导体层,位于所述衬底基板上,且所述半导体层包括所述驱动晶体管的有源层,所述驱动晶体管的有源层包括沟道区和导体化区;栅绝缘层,位于所述半导体层背离所述衬底基板的一侧;第一导电层,位于所述栅绝缘层背离所述衬底基板的一侧,且所述第一导电层包括:所述驱动晶体管的栅极,所述驱动晶体管的栅极在所述衬底基板上的正投影覆盖所述沟道区且与所述导体化区互不交叠;层间介质层,位于所述第一导电层背离所述衬底基板的一侧;第二导电层,位于所述层间介质层背离所述衬底基板的一侧,且所述第二导电层包括:电容电极;所述电容电极在所述衬底基板的正投影与所述导体化区在所述衬底基板的正投影存在交叠区且构成存储电容;所述电容电极在所述衬底基板上的正投影与所述驱动晶体管的栅极在所述衬底基板上的正投影存在交叠区且电连接,所述电容电极具有露出下方所述驱动晶体管的栅极的镂空结构,且所述镂空结构与所述电连接处互不重叠。
- 根据权利要求1所述的阵列基板,其中,所述镂空结构在所述衬底基板上的正投影位于所述驱动晶体管的栅极在所述衬底基板上的正投影所在范围内。
- 根据权利要求2所述的阵列基板,其中,所述镂空结构在所述衬底基板上的正投影边缘被所述驱动晶体管的栅极在所述衬底基板上的正投影所包围。
- 根据权利要求1所述的阵列基板,其中,所述镂空结构在所述衬底基板上的正投影与所述沟道区在所述衬底基板上的正投影存在交叠区。
- 根据权利要求1所述的阵列基板,其中,所述镂空结构延伸至所述电容电极的一侧边缘且形成开口。
- 根据权利要求5所述的阵列基板,其中,所述镂空结构的延伸方向与所述驱动晶体管的栅极延伸方向一致。
- 根据权利要求1所述的阵列基板,其中,所述驱动晶体管的有源层还包括:源极区和漏极区;所述源极区位于所述沟道区背离所述导体化区一侧,且所述漏极区位于所述导体化区背离所述沟道区一侧。
- 根据权利要求7所述的阵列基板,其中,还包括:开关晶体管;所述开关晶体管的栅极与第一栅线电连接,所述开关晶体管的第一极与数据线电连接,所述开关晶体管的第二极与所述电容电极电连接。
- 根据权利要求7所述的阵列基板,其中,还包括:感测晶体管;所述感测晶体管的栅极与第二栅线电连接,所述感测晶体管的第一极与所述驱动晶体管的漏极区电连接,所述感测晶体管的第二极与检测线电连接。
- 根据权利要求1-9任一项所述的阵列基板,其中,还包括:缓冲层,位于所述半导体层与所述衬底基板之间;遮光电极层,位于所述缓冲层与所述衬底基板之间,且所述遮光电极层包括遮光电极,所述遮光电极在所述衬底基板的正投影覆盖所述驱动晶体管的有源层在所述衬底基板的正投影。
- 一种显示面板,其中,包括根据权利要求1~10任一项的阵列基板。
- 一种显示装置,其中,包括根据权利要求11所述的显示面板。
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CN103278987A (zh) * | 2013-05-24 | 2013-09-04 | 京东方科技集团股份有限公司 | 阵列基板、该阵列基板断线修复方法及显示装置 |
CN205229635U (zh) * | 2015-12-18 | 2016-05-11 | 京东方科技集团股份有限公司 | 像素结构、阵列基板及显示装置 |
CN106935597A (zh) * | 2017-03-14 | 2017-07-07 | 京东方科技集团股份有限公司 | 一种阵列基板及其制备方法、显示面板 |
US20190122988A1 (en) * | 2016-10-05 | 2019-04-25 | Samsung Electronics Co., Ltd. | Semiconductor devices |
CN110047853A (zh) * | 2019-05-06 | 2019-07-23 | 合肥鑫晟光电科技有限公司 | 一种阵列基板、显示面板和显示装置 |
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CN202662608U (zh) * | 2012-05-31 | 2013-01-09 | 北京京东方光电科技有限公司 | 一种栅极结构、tft器件及显示装置 |
KR101991338B1 (ko) * | 2012-09-24 | 2019-06-20 | 엘지디스플레이 주식회사 | 박막트랜지스터 어레이 기판 및 그 제조방법 |
CN108598155A (zh) * | 2018-04-18 | 2018-09-28 | 昆山龙腾光电有限公司 | 薄膜晶体管、阵列基板及显示装置 |
CN108493199A (zh) * | 2018-04-19 | 2018-09-04 | 深圳市华星光电半导体显示技术有限公司 | 薄膜晶体管阵列基板及显示面板 |
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CN103278987A (zh) * | 2013-05-24 | 2013-09-04 | 京东方科技集团股份有限公司 | 阵列基板、该阵列基板断线修复方法及显示装置 |
CN205229635U (zh) * | 2015-12-18 | 2016-05-11 | 京东方科技集团股份有限公司 | 像素结构、阵列基板及显示装置 |
US20190122988A1 (en) * | 2016-10-05 | 2019-04-25 | Samsung Electronics Co., Ltd. | Semiconductor devices |
CN106935597A (zh) * | 2017-03-14 | 2017-07-07 | 京东方科技集团股份有限公司 | 一种阵列基板及其制备方法、显示面板 |
CN110047853A (zh) * | 2019-05-06 | 2019-07-23 | 合肥鑫晟光电科技有限公司 | 一种阵列基板、显示面板和显示装置 |
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