WO2020130100A1 - 配線基板及びその製造方法 - Google Patents
配線基板及びその製造方法 Download PDFInfo
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- WO2020130100A1 WO2020130100A1 PCT/JP2019/049933 JP2019049933W WO2020130100A1 WO 2020130100 A1 WO2020130100 A1 WO 2020130100A1 JP 2019049933 W JP2019049933 W JP 2019049933W WO 2020130100 A1 WO2020130100 A1 WO 2020130100A1
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- insulating layer
- wiring board
- layer
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1605—Process or apparatus coating on selected surface areas by masking
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1608—Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/1612—Process or apparatus coating on selected surface areas by direct patterning through irradiation means
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1646—Characteristics of the product obtained
- C23C18/165—Multilayered product
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2026—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by radiant energy
- C23C18/204—Radiation, e.g. UV, laser
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/48—Coating with alloys
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/032—Organic insulating material consisting of one material
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0237—High frequency adaptations
- H05K1/0242—Structural details of individual signal conductors, e.g. related to the skin effect
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/06—Thermal details
- H05K2201/068—Thermal details wherein the coefficient of thermal expansion is important
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
Definitions
- the present disclosure relates to a wiring board and a manufacturing method thereof.
- a connection method called package-on-package is widely adopted in smartphones and tablet terminals.
- Package-on-package is a method of connecting different packages on a package by flip-chip mounting (see Non-Patent Documents 1 and 2).
- a packaging technique using an organic substrate having high-density wiring organic interposer
- a fan-out type packaging technique having a through mold via (TMV) FO-WLP
- silicon or A packaging technology using a glass interposer, a packaging technology using a through silicon via (TSV), and a packaging technology using a chip embedded in a substrate for inter-chip transmission have been proposed.
- TSV through silicon via
- TSV through silicon via
- a packaging technology using a chip embedded in a substrate for inter-chip transmission have been proposed.
- a fine wiring layer is required for high-density conduction (see Patent Document 2).
- TMV Through Mold Via
- ECTC Electronic Components and Technology Conference
- eWLB-PoP Embedded Wafer Level PoP
- the seed layer is formed by electroless plating after the treatment with the desmear treatment liquid.
- the seed layer is a metal layer formed in the manufacturing process of the wiring board and is also called a power feeding layer. That is, a conductive portion is formed on the surface of the seed layer by supplying power to the seed layer. A part of the seed layer constitutes a metal wiring together with the conductive portion.
- the surface of the insulating layer is roughened by performing wet desmear treatment. By making the surface of the insulating layer appropriately rough, the adhesion between the seed layer and the insulating layer is improved by the anchor effect.
- the present disclosure has been made in view of the above problems, and provides a wiring board having excellent adhesion between an insulating layer and a metal wiring and a low transmission loss at high frequencies, and a manufacturing method thereof.
- a method of manufacturing a wiring board (A) a step of irradiating an insulating layer made of a resin composition with an active energy ray, (B) a step of adsorbing a catalyst for electroless plating on the insulating layer, (C) a step of forming a metal layer on the surface of the insulating layer by electroless plating,
- the modified region having a thickness of 20 nm or more in the depth direction from the surface of the insulating layer by irradiation with an active energy ray and having pores communicating with the surface of the insulating layer.
- the catalyst by adsorbing a catalyst for electroless plating on the insulating layer in which the reformed region is formed by irradiation with active energy rays, the catalyst enters the pores of the reformed region. It becomes a state.
- the metal layer is formed by electroless plating in this state, the electroless plating formed in the pores of the modified region plays a role like the roots of plants and contributes to the improvement of the adhesion between the insulating layer and the metal layer. Then it is speculated.
- the irradiation with the active energy ray in the step (a) does not excessively roughen the surface of the insulating layer, unlike the roughening treatment with the desmear treatment liquid.
- the insulating layer is sufficiently flat (for example, the arithmetic average roughness Ra is 100 nm or less). .. Since the surface of the insulating layer is sufficiently flat, the transmission loss of high frequency can be sufficiently reduced.
- the modified region having the above configuration can be formed by irradiating the insulating layer with ultraviolet rays having a wavelength of 254 nm or less.
- the metal layer can be formed using an electroless copper plating solution or an electroless copper nickel phosphorus plating solution.
- the nickel content of the metal layer is preferably 0.25 to 20% by mass from the viewpoint of achieving a higher degree of adhesion between the insulating layer and the metal layer and reduction of high-frequency transmission loss.
- the metal layer containing a predetermined amount of nickel can be formed using, for example, an electroless copper nickel phosphorus plating solution or an electroless copper plating solution.
- a wiring board includes an insulating layer made of a resin composition and metal wiring provided on the surface of the insulating layer, and the insulating layer has a thickness of 20 nm or more in the depth direction from the surface.
- the modified region has copper contained in the metal wiring dispersed therein.
- the modified region of the insulating layer contains copper in a dispersed state. This state can be confirmed by elemental mapping.
- a catalyst for electroless plating for example, palladium is dispersed in the modified region. This can also be confirmed by elemental mapping.
- the average roughness Ra of the surface of the insulating layer is 100 nm or less, so that it is possible to further reduce the transmission loss of high frequencies.
- the resin composition constituting the insulating layer may be a cured product of a thermosetting resin composition or a cured product of a photosensitive resin composition.
- a wiring board having excellent adhesion between an insulating layer and a metal wiring and low transmission loss at high frequencies, and a manufacturing method thereof.
- FIG. 1A to 1D are cross-sectional views schematically showing a manufacturing process of a wiring board according to an embodiment of the present disclosure.
- 2A to 2C are cross-sectional views schematically showing the manufacturing process of the wiring board according to the embodiment of the present disclosure.
- 3(a) to 3(f) are images showing cross sections of the laminate according to Comparative Example 1 or Example 1.
- FIG. 4A is an image showing a sectional EDX line analysis result according to Comparative Example 1
- FIG. 4B is an image showing a sectional EDX line analysis result according to Example 1.
- FIG. 4 is a cross-sectional view schematically showing a wiring board provided with microstrip wiring produced for evaluating high-frequency transmission loss in Examples and Comparative Examples.
- the term “layer” includes not only the structure of the shape formed on the entire surface but also the structure of the shape partially formed when observed as a plan view.
- FIG. 2C are cross-sectional views schematically showing a manufacturing process of a wiring board.
- the wiring board 10 schematically shown in FIG. 2C is particularly suitable in a form in which miniaturization and multi-pinning are required, and particularly in a package form in which an interposer for mounting different types of chips together is required. It is suitable. More specifically, in the manufacturing method according to the present embodiment, the distance between the pins is 200 ⁇ m or less (for example, 30 to 100 ⁇ m in the case of finer), and the number of pins is 500 or more (in the case of finer, Is suitable in a package form of, for example, 1000 to 10000 pieces.
- the nickel content of the region (seed layer 2) on the side in contact with the first insulating layer 1 in the metal wiring 4 is 0.25 to 20% by mass, the surface roughness of the first insulating layer 1 by the desmear treatment liquid is increased.
- the metal wiring 4 has excellent adhesion to the first insulating layer 1 even if it is not treated. Therefore, it is possible to form fine wiring on the surface of the first insulating layer 1 and it is possible to sufficiently reduce high-frequency transmission loss.
- the wiring board 10 is roughly manufactured by the following steps. (1) A step of forming the first insulating layer 1 on the support substrate S. (2) A step of irradiating the surface of the first insulating layer 1 with an active energy ray. (3) A step of forming the seed layer 2 (metal layer) on the surface of the first insulating layer 1. (4) A step of forming the wiring portion 3 (conductive portion) on the seed layer 2. (5) A step of forming the second insulating layer 5 so as to cover the metal wiring 4.
- the first insulating layer 1 is formed on the support substrate S (FIG. 1A).
- the support substrate S is not particularly limited, but is a silicon plate, a glass plate, a SUS (stainless steel) plate, a glass cloth-containing substrate, a semiconductor element-containing sealing resin, or the like, and a substrate having high rigidity is preferable.
- a conductive layer Sa is formed on the surface where the first insulating layer 1 is formed.
- a substrate on which the conductive layer Sa is not formed, or a substrate having wirings and/or pads on the surface instead of the conductive layer Sa may be used.
- the thickness of the support substrate S is preferably in the range of 0.2 mm to 2.0 mm. When it is thinner than 0.2 mm, handling becomes difficult, while when it is thicker than 2.0 mm, the material cost tends to be high.
- the support substrate S may have a wafer shape or a panel shape. The size is not particularly limited, but a wafer having a diameter of 200 mm, a diameter of 300 mm or a diameter of 450 mm, or a rectangular panel having one side of 300 to 700 mm is preferably used.
- the material forming the first insulating layer 1 may be a photosensitive resin material or a thermosetting resin material.
- these insulating materials include liquid or film-shaped ones, and film-shaped insulating materials are preferable from the viewpoint of film thickness flatness and cost.
- the insulating material preferably contains a filler having an average particle diameter of 500 nm or less (more preferably 50 to 200 nm) from the viewpoint that fine wiring can be formed.
- the filler content of the insulating material is preferably 0 to 70 parts by mass and more preferably 10 to 50 parts by mass with respect to 100 parts by mass of the insulating material excluding the filler.
- the laminating step is preferably performed at a temperature as low as possible, and it is preferable to use an insulating film that can be laminated at 40 to 120°C.
- An insulating film that can be laminated at a temperature below 40°C has a strong tack at room temperature (about 25°C) and tends to have poor handleability.
- warpage occurs after lamination. Tends to be large.
- Thermal expansion coefficient after curing of the first insulating layer 1 is preferably from the viewpoint of the warp suppressing or less 80 ⁇ 10 -6 / K (Kelvin), in that the high reliability can be obtained 70 ⁇ 10 -6 / It is more preferably K or less. Further, it is preferably 20 ⁇ 10 ⁇ 6 /K or more in terms of stress relaxation of the insulating material and obtaining a high-definition pattern.
- the thickness of the first insulating layer 1 is preferably 10 ⁇ m or less, more preferably 5 ⁇ m or less, and further preferably 3 ⁇ m or less. Further, the thickness of the first insulating layer 1 is preferably 0.5 ⁇ m or more from the viewpoint of insulation reliability.
- an opening (not shown) reaching the conductive layer Sa may be provided in the first insulating layer 1.
- the opening may be provided by photolithography, for example.
- the opening may be provided by laser processing, for example.
- the surface of the first insulating layer 1 is preferably as flat as possible. That is, the arithmetic mean roughness Ra of the surface of the first insulating layer 1 is 100 nm or less, preferably 80 nm or less, and more preferably 55 nm or less.
- the lower limit of the arithmetic mean roughness Ra of the surface of the first insulating layer 1 is, for example, 5 nm, and may be 10 nm or 20 nm.
- the arithmetic mean roughness Ra can be measured using a laser microscope.
- the following method may be used to obtain the arithmetic average roughness Ra of the surface of the first insulating layer 1 from the cross section of the laminated body including the first insulating layer 1. That is, the difference (Rz value) between the convex portion and the concave portion is measured from the surfaces of a plurality of samples for which the value of the arithmetic average roughness Ra is known. A calibration curve is created based on the measured Rz value and the known Ra value. The difference (Rz value) between the convex portion and the concave portion of the cross section of the first insulating layer 1 for which the arithmetic mean roughness Ra should be obtained is measured, and the arithmetic mean roughness Ra can be obtained from the measured value and the calibration curve.
- Step of irradiating surface of first insulating layer with active energy ray> Prior to forming the seed layer 2 on the surface of the first insulating layer 1, the surface of the first insulating layer 1 is irradiated with an active energy ray to modify the surface of the first insulating layer 1 (FIG. 3(d)- (See FIG. 5F).
- the modified region has a thickness of 20 nm or more in the depth direction from the surface of the first insulating layer 1.
- the modified region has holes communicating with the surface of the first insulating layer 1.
- the active energy ray may be any one that does not excessively roughen the surface of the first insulating layer 1, and examples thereof include ultraviolet rays, electron rays, ⁇ rays, ⁇ rays and ⁇ rays.
- a modified region having a thickness of 20 nm or more can be formed and the arithmetic average roughness Ra of the surface of the first insulating layer 1 can be maintained at 100 nm or less.
- the thickness of the modified region is 20 nm or more, and may be 25 nm or more or 30 nm or more.
- the upper limit of the thickness of the modified region is, for example, 200 nm, and may be 180 nm or 150 nm.
- To make the modified region excessively thick it is necessary to irradiate an excessive amount of active energy rays, and as a result, the surface of the first insulating layer 1 becomes rough and the arithmetic average roughness Ra can exceed 100 nm. Since it is preferable that the surface of the first insulating layer 1 is as flat as possible, it is preferable that the surface of the first insulating layer 1 is not roughened with a desmear treatment liquid before the seed layer 2 is formed. Is good.
- a seed layer 2 is formed on the surface of the first insulating layer 1 by electroless plating containing at least copper (FIG. 1B).
- the seed layer 2 is formed through the following steps. First, the surface of the first insulating layer 1 is washed with a pretreatment liquid.
- the pretreatment liquid may be a commercially available alkaline pretreatment liquid containing sodium hydroxide or potassium hydroxide. The concentration of sodium hydroxide or potassium hydroxide is carried out between 1 and 30% by weight.
- the immersion time in the pretreatment liquid is carried out for 1 to 60 minutes.
- the immersion temperature in the pretreatment liquid is carried out between 25 and 80°C. After the pretreatment, in order to remove excess pretreatment liquid, you may wash with city water, pure water, ultrapure water or an organic solvent.
- immersion cleaning is performed with an acidic aqueous solution.
- the acidic aqueous solution may be an aqueous sulfuric acid solution, the concentration is 1 to 20% by mass, and the immersion time is 1 to 60 minutes.
- it may be washed with city water, pure water, ultrapure water or an organic solvent.
- palladium which serves as a catalyst for electroless plating
- Palladium may be a commercially available palladium-tin colloidal solution, an aqueous solution containing palladium ions, a palladium ion suspension or the like, but an aqueous solution containing palladium ions that is effectively adsorbed to the modified layer is preferable.
- the temperature of the aqueous solution containing palladium ions is 25 to 80° C., and the immersion time for adsorption is 1 to 60 minutes. After adsorbing the palladium ions, washing with city water, pure water, ultrapure water or an organic solvent may be performed in order to remove excess palladium ions.
- the reagent that activates the palladium ion may be a commercially available activator (activation treatment liquid).
- activator treatment liquid The temperature of the activator soaked for activating the palladium ions is 25 to 80° C., and the time for soaking is 1 to 60 minutes. After activating the palladium ions, in order to remove an excess activator, you may wash with city water, pure water, ultrapure water or an organic solvent.
- the seed layer 2 is formed by electroless plating on the surface of the first insulating layer 1.
- the seed layer 2 becomes a power supply layer for the electrolytic plating performed in the step (3).
- the thickness of the seed layer 2 is preferably 20 to 200 nm, more preferably 40 to 200 nm, further preferably 60 to 200 nm.
- the nickel content of the seed layer 2 is 0.25 to 20% by mass, and may be, for example, 3 to 20% by mass or 0.25 to 3% by mass.
- the nickel content of the seed layer 2 can be set, for example, by adjusting the nickel content of the electroless plating solution.
- the nickel content of the seed layer 2 is 0.25% by mass or more, sufficient adhesion can be ensured between the first insulating layer 1 and the seed layer 2, while it is 20% by mass or less.
- the transmission loss of high frequency can be sufficiently reduced.
- electroless plating examples include electroless pure copper plating (copper purity 99 mass% or more), electroless copper nickel phosphorus plating (nickel content: 1 to 10 mass%, phosphorus content: 1 to 13 mass%) and the like.
- the electroless copper nickel phosphorus plating solution may be a commercially available plating solution.
- an electroless copper-nickel-phosphorus plating solution manufactured by JCU, trade name “AISL-570” can be mentioned.
- the electroless copper nickel phosphorus plating is carried out in an electroless copper nickel phosphorus plating solution at 60 to 90°C.
- An electroless copper plating solution having a nickel content of 0.1 to 1 mass% may be used for forming the seed layer 2.
- Examples of commercially available products of such plating solutions include electroless copper plating solutions (manufactured by Atotech Japan Co., Ltd., product names "Copper Solution Print Gantt MV TP1", “Stabilizer Print Gantt MV TP1", “Basic Print Gantt MV TP1", “ Moderator Print Gantt MV TP1", “Reducer Cu”).
- Electroless copper plating is carried out in an electroless copper plating solution at 20°C to 50°C.
- heat curing (annealing: age hardening treatment by heating) may be performed in order to enhance the adhesion between the seed layer 2 and the first insulating layer 1.
- the heat curing temperature is preferably 80 to 200°C. In order to further accelerate the reactivity, 120 to 200° C. is more preferable, and heating at 120 to 180° C. is further preferable.
- the heat curing time is preferably 5 to 60 minutes, more preferably 10 to 60 minutes, still more preferably 20 to 60 minutes.
- a wiring forming resist R is patterned on the surface of the seed layer 2 (see FIG. 1C).
- a commercially available resist may be used, and for example, a negative film-shaped photosensitive resist (Photec RY-5107UT, manufactured by Hitachi Chemical Co., Ltd.) can be used.
- the resist pattern may be provided with an opening for wiring formation and other openings as required. That is, a resist film is formed by using a roll laminator, then a photo tool having a pattern formed thereon is brought into close contact, exposure is performed by using an exposure machine, and then spray development is performed with an aqueous sodium carbonate solution to form a resist pattern. Can be formed.
- a positive type photosensitive resist may be used instead of the negative type.
- Electrolytic copper plating is performed by supplying power to the seed layer 2 to form the wiring part 3 (see FIG. 1(d)).
- the thickness of the wiring portion 3 is preferably 1 to 10 ⁇ m, more preferably 3 to 10 ⁇ m, and further preferably 5 to 10 ⁇ m.
- the wiring forming resist R is peeled off (see FIG. 2(a)).
- the stripping of the wiring forming resist R may be performed using a commercially available stripping solution.
- the seed layer 2 exposed by the peeling of the wiring forming resist R is removed (see FIG. 2B).
- the metal wiring 4 configured by the seed layer 2 remaining on the surface of the first insulating layer 1 and the wiring portion 3 is formed.
- the paradigm remaining under the seed layer 2 may be removed.
- etching solution a commercially available removal solution
- specific examples thereof include acidic etching solutions (BB-20, PJ-10, SAC-700W3C manufactured by JCU Co., Ltd.). ..
- the second insulating layer 5 is formed so as to cover the metal wiring 4 (see FIG. 2C).
- the material forming the second insulating layer 5 may be the same as or different from that of the first insulating layer.
- the present invention is not necessarily limited to the above-described embodiments, and may be appropriately modified without departing from the spirit of the invention.
- the method of manufacturing a wiring board having one wiring layer has been illustrated, but a step of providing a seed layer on the surface of the wiring layer
- the wiring board having a plurality of wiring layers may be manufactured by repeating the series of steps (3) and (4).
- a photosensitive resin film for an insulating layer was produced as follows. First, a photosensitive resin composition was prepared using the following components. -Photoreactive resin containing carboxyl group and ethylenically unsaturated group: acid-modified cresol novolac type epoxy acrylate (CCR-1219H, manufactured by Nippon Kayaku Co., Ltd., trade name) 50 parts by mass-photopolymerization initiator component : 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide (Darocur TPO, BASF Japan Ltd., trade name) and ethanone, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazole -3-yl]-, 1-(o-acetyloxime) (IRGACURE OXE-02, manufactured by BASF Japan Ltd., trade name) 5 parts by mass Thermosetting agent component: Biphenol type epoxy resin (YX-4000,
- the inorganic filler component was blended in an amount of 10 parts by volume with respect to 100 parts by volume of the resin content.
- the particle size distribution was measured and it was confirmed that the maximum particle size was 1 ⁇ m or less.
- a solution of the above photosensitive resin composition was applied onto the surface of a polyethylene terephthalate film (manufactured by Teijin Ltd., trade name: G2-16, thickness: 16 ⁇ m).
- the coating film was dried at 100° C. for about 10 minutes using a hot air convection dryer. As a result, a photosensitive resin film having a thickness of 10 ⁇ m was obtained.
- a glass cloth-containing substrate (size: 200 mm square, thickness 1.5 mm) having a copper layer (thickness 20 ⁇ m) formed on its surface was prepared.
- the photosensitive resin film was laminated to form a first insulating layer on the surface of the copper layer of the supporting substrate. Specifically, first, a photosensitive resin film was placed on the surface of the copper layer of the supporting substrate. Then, pressing was performed using a press type vacuum laminator (MVLP-500, manufactured by Meiki Seisakusho Co., Ltd.). The pressing conditions were a hot plate temperature of 80° C., a vacuuming time of 20 seconds, a laminating pressing time of 60 seconds, an atmospheric pressure of 4 kPa or less, and a pressure bonding pressure of 0.4 MPa.
- MVLP-500 press type vacuum laminator
- the photosensitive resin film (first insulating layer) after pressing was subjected to an exposure treatment and a development treatment to provide an opening reaching the copper layer of the supporting substrate.
- the exposure was carried out in the state where a photo tool having a pattern formed was brought into close contact with the first insulating layer.
- An i-line stepper exposure machine product name: S6CK type exposure machine, lens: ASC3 (Ck), manufactured by Therma Precision Co., Ltd.
- spray development was performed for 45 seconds with a 1% by mass sodium carbonate aqueous solution at 30° C., and an opening was provided.
- the first insulating layer was irradiated with ultraviolet rays using an ultraviolet irradiation device (SSP-16, Sen Special Light Source Co., Ltd., ultraviolet main wavelength: 254 nm).
- the irradiation amount of ultraviolet rays was 185 mJ/cm 2 . This modified the surface of the first insulating layer.
- the distance from the ultraviolet lamp to the surface of the first insulating layer was 40 mm, and the ultraviolet irradiation time was 30 seconds.
- the arithmetic average roughness Ra of the surface of the insulating layer after ultraviolet irradiation was measured using a laser microscope (manufactured by Olympus Corporation). The results are shown in Table 1.
- a seed layer was formed on the surface of the first insulating layer by electroless copper plating. That is, first, as an alkaline cleaning, it was immersed in an aqueous solution of 110 mL/L of an alkaline cleaner (manufactured by JCU, trade name: EC-B) at 50° C. for 5 minutes, and then immersed in pure water for 1 minute. Next, as a conditioner, a mixture of a conditioning liquid (manufactured by JCU, trade name: PB-200) and EC-B (PB-200 concentration: 70 mL/L, EC-B concentration: 2 mL/L) was used. It was dipped at 50° C.
- an alkaline cleaner manufactured by JCU, trade name: EC-B
- a soft etching solution manufactured by JCU, trade name: PB-228, and 98% sulfuric acid in a mixed solution (PB-228 concentration: 100 g/L, sulfuric acid concentration: 50 mL/L) was used. It was dipped in the water at 2° C. for 2 minutes and then in pure water for 1 minute. Next, as a desmut, it was immersed in 10% sulfuric acid at room temperature for 1 minute.
- a mixed liquid of catalyzing reagent 1 (manufactured by JCU, trade name: PC-BA), catalyzing reagent 2 (manufactured by JCU, trade name: PB-333) and EC-B ( PC-BA concentration: 5 g/L, PB-333 concentration: 40 mL/L, EC-B concentration: 9 mL/L) were immersed at 60° C. for 5 minutes, and then immersed in pure water for 1 minute.
- a mixture of accelerator reagent manufactured by JCU, trade name: PC-66H
- PC-BA PC-66H concentration: 10 mL/L, PC-BA concentration: 5 g/L
- electroless copper plating a mixture of electroless copper-nickel-phosphorus plating solution (manufactured by JCU, trade name: AISL-570B, AISL-570C, AISL-570MU) and PC-BA (AISL-570B concentration) : 70 mL/L, AISL-570C concentration: 24 mL/L, AISL-570MU concentration: 50 mL/L, PC-BA concentration: 13 g/L) at 60° C. for 7 minutes, and then for 1 minute in pure water. Then, it was dried for 5 minutes on a hot plate at 85°C. Next, thermal annealing was performed in an oven at 180° C. for 1 hour. As a result, a laminated body including a support substrate, an insulating layer, and a seed layer (thickness: about 90 nm, nickel content: 6% by mass) in this order was obtained.
- Example 2 A laminated body was obtained in the same manner as in Example 1 except that the irradiation amount of ultraviolet rays (main wavelength: 254 nm) in the step (2) was set to 46 mJ/cm 2 instead of 185 mJ/cm 2 .
- Table 1 shows the measured values of the arithmetic average roughness Ra of the surface of the insulating layer after ultraviolet irradiation.
- Example 3 A laminated body was obtained in the same manner as in Example 1 except that the irradiation amount of ultraviolet rays (main wavelength: 254 nm) in the step (2) was 26 mJ/cm 2 instead of 185 mJ/cm 2 .
- Table 1 shows the measured values of the arithmetic average roughness Ra of the surface of the insulating layer after ultraviolet irradiation.
- Example 4 A laminated body was obtained in the same manner as in Example 1 except that the irradiation amount of ultraviolet rays (main wavelength: 254 nm) in the step (2) was set to 4 mJ/cm 2 instead of 185 mJ/cm 2 .
- Table 1 shows the measured values of the arithmetic average roughness Ra of the surface of the insulating layer after ultraviolet irradiation.
- Example 1 A laminate was obtained in the same manner as in Example 1 except that the step (2) was not performed, that is, the insulating layer was not irradiated with ultraviolet light.
- Table 1 shows measured values of the arithmetic average roughness Ra of the surface of the insulating layer which is not irradiated with ultraviolet rays.
- ⁇ Measurement of thickness of modified region> The cross sections of the laminates according to Examples 1 to 4 and Comparative Example 1 were enlarged and observed, and the thickness of the modified region was measured. The following two types of devices were used for this measurement. ⁇ Scanning transmission electron microscope (STEM): HD-2700 (manufactured by Hitachi High-Technologies Corporation) Energy dispersive X-ray fluorescence analyzer (EDX): Octane T Ultra W 100mm 2 SDD (manufactured by Hitachi High-Technologies Corporation)
- 3(a) to 3(f) are images showing cross sections of the laminate according to Comparative Example 1 or Example 1.
- 3B and 3E are elemental mappings of palladium (catalyst for electroless plating) obtained by EDX.
- FIGS. 3C and 3F are elemental mappings of copper (the main component of electroless plating) obtained by EDX.
- 4A is an image showing the cross-section EDX line analysis result according to Comparative Example 1
- FIG. 4B is an image showing the cross-section EDX line analysis result according to Example 1.
- the thickness of the modified area was visually identified from these images.
- the thickness of the modified region in Example 1 (thickness T shown in FIGS. 3E and 3F) was 45 nm. It was confirmed that the thickness of the modified region in Examples 2 to 4 was 20 nm or more. In Comparative Example 1, since the modification by ultraviolet irradiation was not performed, the modified region does not exist.
- the wiring board 20 is a wiring board having microstrip wiring. That is, the wiring substrate 20 includes the support substrate S having the conductive layer Sa (copper layer) on the surface, the insulating layer 11 provided on the surface of the support substrate S, and the seed layer provided on the surface of the insulating layer 11. 12, the ground layer 13 (conductor section) provided on the surface of the seed layer 12, the conductor section 15 and the insulating layer 16 provided on the surface of the ground layer 13, and the ground layer 13 (conductor section) provided on the surface of the insulating layer 16.
- the wiring substrate 20 includes the support substrate S having the conductive layer Sa (copper layer) on the surface, the insulating layer 11 provided on the surface of the support substrate S, and the seed layer provided on the surface of the insulating layer 11. 12, the ground layer 13 (conductor section) provided on the surface of the seed layer 12, the conductor section 15 and the insulating layer 16 provided on the surface of the ground layer 13, and the ground layer 13 (conductor section) provided on the surface of the insulating
- the seed layer 17 and the signal layer 18 (conductor portion).
- the seed layer 12 is used as a power feeding layer when forming the ground layer 13.
- the seed layer 17 is used as a power feeding layer when forming the signal layer 18.
- the insulating layer 11 was formed using the same photosensitive resin film as in Example 1.
- the signal layer 18 had a thickness of 4 ⁇ m, a width of 20 ⁇ m, and a length of 10 mm.
- a wiring board according to Example 5 was manufactured through the steps of forming the seed layers 12 and 17 in the same manner as in Example 1.
- Comparative example 2 A wiring board according to Comparative Example 2 was produced in the same manner as in Example 5 except that the seed layers 12 and 17 were respectively formed by the following method. That is, in the step (1c), the seed was prepared in the same manner as in Example 1 except that the surface of the insulating layer was modified (roughened) by using the chemical solution used for the desmear treatment instead of performing the ultraviolet irradiation. Layers 12 and 17 were formed.
- the treatment with the chemical solution used for the desmear treatment was carried out as follows. First, for swelling treatment, it was immersed in 40 mL/L of Swera (manufactured by Atotech, trade name: Cleaner Seculigant 902) at 70° C. for 5 minutes.
- Example 5 With respect to the microstrip wirings of Example 5 and Comparative Example 2, a high frequency (frequency of 50 GHz) transmission loss was measured using a vector network analyzer (manufactured by Hewlett Packard). The characteristic impedance was 50 ⁇ . In Example 5, the transmission loss was reduced by 22% with respect to the transmission loss of Comparative Example 2.
- a wiring board having excellent adhesion between an insulating layer and a metal wiring and low transmission loss at high frequencies, and a manufacturing method thereof.
- SYMBOLS 1... 1st insulating layer, 2... seed layer (metal layer), 3... wiring part (conductive part), 4... metal wiring, 5... 2nd insulating layer, 10, 20... wiring board, 11, 16... insulating layer , 12, 17... Seed layer, 13... Ground layer, 15... Conductor part, 18... Signal layer, S... Support substrate, Sa... Conductive layer
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Abstract
Description
(a)樹脂組成物からなる絶縁層に活性エネルギー線を照射する工程と、
(b)絶縁層に無電解めっき用の触媒を吸着させる工程と、
(c)絶縁層の表面上に無電解めっきによって金属層を形成する工程と、
をこの順序で含み、(a)工程において、活性エネルギー線の照射によって絶縁層の表面から深さ方向に20nm以上の厚さを有し且つ絶縁層の表面から連通する空孔を有する改質領域を形成する。
(1)支持基板S上に第1絶縁層1を形成する工程。
(2)第1絶縁層1の表面に活性エネルギー線を照射する工程。
(3)第1絶縁層1の表面にシード層2(金属層)を形成する工程。
(4)シード層2上に配線部3(導電部)を形成する工程。
(5)金属配線4を覆うように第2絶縁層5を形成する工程。
支持基板S上に第1絶縁層1を形成する(図1(a))。支持基板Sは、特に限定されないが、シリコン板、ガラス板、SUS(ステンレス鋼)板、ガラスクロス入り基板、半導体素子入り封止樹脂等であり、高剛性からなる基板が好適である。図1(a)に示す支持基板Sは、第1絶縁層1が形成される側の表面に導電層Saが形成されている。支持基板Sとして、導電層Saが形成されていないもの、あるいは、導電層Saの代わりに配線及び/又はパッドを表面に有するものを使用してもよい。
第1絶縁層1の表面にシード層2を形成するに先立ち、第1絶縁層1の表面に活性エネルギー線を照射し、第1絶縁層1の表面に改質領域(図3(d)~図(f)参照)を形成する。改質領域は、第1絶縁層1の表面から深さ方向に20nm以上の厚さを有する。改質領域は、第1絶縁層1の表面から連通する空孔を有する。
第1絶縁層1の表面に、少なくとも銅を含む無電解めっきによりシード層2を形成する(図1(b))。シード層2は以下のステップを経て形成される。まず、第1絶縁層1の表面を前処理液で洗浄する。前処理液は水酸化ナトリウム又は水酸化カリウムを含む市販のアルカリ性前処理液でよい。水酸化ナトリウム又は水酸化カリウムの濃度は1~30質量%の間で実施される。前処理液への浸漬時間は1~60分の間で実施される。前処理液への浸漬温度は25~80℃の間で実施される。前処理した後、余分な前処理液を除去するため、市水、純水、超純水又は有機溶剤で洗浄してもよい。
シード層2の表面上に配線形成用レジストRをパターニングする(図1(c)参照)。配線形成用レジストRとして、市販のレジストを使用すればよく、例えば、ネガ型フィルム状の感光性レジスト(日立化成株式会社製、Photec RY-5107UT)を用いることができる。レジストパターンは、配線形成用の開口部と、必要に応じてその他の開口部とが設けられたものであってもよい。すなわち、ロールラミネータを用いてレジストを成膜し、次いで、パターンを形成したフォトツールを密着させ、露光機を使用して露光を行い、次いで、炭酸ナトリウム水溶液で、スプレー現像を行うことによってレジストパターンを形成することができる。なお、ネガ型の代わりにポジ型の感光性レジストを用いてもよい。
金属配線4を覆うように第2絶縁層5を形成する(図2(c)参照)。第2絶縁層5を構成する材料として第1絶縁層と同じでもよいし、異なっていてもよい。
<感光性樹脂フィルムの作製>
絶縁層用の感光性樹脂フィルムを以下のようにして作製した。まず、以下の成分を使用して感光性樹脂組成物を調製した。
・カルボキシル基とエチレン性不飽和基とを含有する光反応性樹脂:酸変性したクレゾールノボラック型エポキシアクリレート(CCR-1219H、日本化薬株式会社製、商品名) 50質量部
・光重合開始剤成分:2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド(ダロキュアTPO、BASFジャパン株式会社製、商品名)及びエタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]-,1-(o-アセチルオキシム)(イルガキュアOXE-02、BASFジャパン株式会社製、商品名) 5質量部
・熱硬化剤成分:ビフェノール型エポキシ樹脂(YX-4000、三菱ケミカル株式会社製、商品名) 10質量部
・無機フィラー成分:平均粒径:50nm、ビニルシランでシランカップリング処理したもの。無機フィラー成分は、樹脂分100体積部に対し、10体積部になるように配合した。なお、動的光散乱式ナノトラック粒度分布計「UPA-EX150」(日機装株式会社製)及びレーザー回折散乱式マイクロトラック粒度分布計「MT-3100」(日機装株式会社製)を用いて無機フィラーの粒度分布を測定し、最大粒径が1μm以下であることを確認した。
支持基板として、表面に銅層(厚さ20μm)が形成されたガラスクロス入り基板(サイズ:200mm角、厚さ1.5mm)を準備した。
上記支持基板の銅層の表面に第1絶縁層を形成するため、上記感光性樹脂フィルムをラミネートした。詳細には、まず、支持基板の銅層の表面に感光性樹脂フィルムを載置した。次いで、プレス式真空ラミネータ(MVLP-500、株式会社名機製作所製)を用いてプレスした。プレス条件は、プレス熱板温度80℃、真空引き時間20秒、ラミネートプレス時間60秒、気圧4kPa以下、圧着圧力0.4MPaとした。
プレス後の感光性樹脂フィルム(第1絶縁層)に露光処理及び現像処理を施すことによって、支持基板の銅層にまで至る開口部を設けた。露光は、パターンを形成したフォトツールを第1絶縁層の上に密着させた状態で実施した。i線ステッパー露光機(製品名:S6CK型露光機、レンズ:ASC3(Ck)、株式会社サーマプレシジョン製)を使用して、30mJ/cm2のエネルギー量で露光した。次いで、30℃の1質量%炭酸ナトリウム水溶液で、45秒間スプレー現像を行い、開口部を設けた。次いで、現像後の第1絶縁層の表面にマスク露光機(EXM-1201型露光機、株式会社オーク製作所製、紫外線主波長:365nm)を使用して、2000mJ/cm2のエネルギー量でポストUV露光した。次いで、クリーンオーブンで170℃、1時間の熱硬化を行った。
紫外線照射装置(SSP-16、セン特殊光源株式会社製、紫外線主波長:254nm)を用いて第1絶縁層に紫外線を照射した。紫外線の照射量は、185mJ/cm2とした。これにより、第1絶縁層の表面を改質した。紫外線ランプから第1絶縁層の表面までの距離は40mm、紫外線照時間は30秒とした。紫外線照射後の絶縁層表面の算術平均粗さRaをレーザー顕微鏡(オリンパス株式会社製)を用いて測定した。表1に結果を示す。
無電解銅めっきにより、第1絶縁層の表面にシード層を形成した。すなわち、まず、アルカリクリーニングとして、アルカリクリーナー(株式会社JCU製、商品名:EC-B)の110mL/L水溶液に50℃で5分間浸漬し、その後純水に1分間浸漬した。次に、コンディショナとして、コンディショニング液(株式会社JCU製、商品名:PB-200)とEC-Bとの混合液(PB-200濃度:70mL/L、EC-B濃度:2mL/L)に50℃で5分間浸漬し、その後純水に1分間浸漬した。次に、ソフトエッチングとして、ソフトエッチング液(株式会社JCU製、商品名:PB-228)と98%硫酸との混合液(PB-228濃度:100g/L、硫酸濃度:50mL/L)に30℃で2分間浸漬し、その後純水に1分間浸漬した。次に、デスマットとして、10%硫酸に室温で1分間浸漬した。次に、キャタライザとして、キャタライズ用試薬1(株式会社JCU製、商品名:PC-BA)とキャタライズ用試薬2(株式会社JCU製、商品名:PB-333)とEC-Bとの混合液(PC-BA濃度:5g/L、PB-333濃度:40mL/L、EC-B濃度:9mL/L)に60℃で5分間浸漬し、その後純水に1分間浸漬した。次に、アクセラレータとして、アクセラレータ用試薬(株式会社JCU製、商品名:PC-66H)とPC-BAとの混合液(PC-66H濃度:10mL/L、PC-BA濃度:5g/L)に30℃で5分間浸漬し、その後純水に1分間浸漬した。
工程(2)における紫外線(主波長:254nm)の照射量を185mJ/cm2とする代わりに、46mJ/cm2としたことの他は、実施例1と同様にして積層体を得た。紫外線照射後の絶縁層表面の算術平均粗さRaの測定値を表1に示す。
工程(2)における紫外線(主波長:254nm)の照射量を185mJ/cm2とする代わりに、26mJ/cm2としたことの他は、実施例1と同様にして積層体を得た。紫外線照射後の絶縁層表面の算術平均粗さRaの測定値を表1に示す。
工程(2)における紫外線(主波長:254nm)の照射量を185mJ/cm2とする代わりに、4mJ/cm2としたことの他は、実施例1と同様にして積層体を得た。紫外線照射後の絶縁層表面の算術平均粗さRaの測定値を表1に示す。
工程(2)を実施しなかったこと、すなわち、絶縁層に対して紫外線を照射しなかったことの他は、実施例1と同様にして積層体を得た。紫外線が照射されていない絶縁層表面の算術平均粗さRaの測定値を表1に示す。
実施例1~4及び比較例1に係る積層体の断面を拡大して観察し、改質領域の厚さを測定した。この測定には以下の二種類の装置を使用した。
・走査型透過電子顕微鏡(STEM):HD-2700(株式会社日立ハイテクノロジーズ製)
・エネルギー分散型蛍光X線分析装置(EDX):Octane T Ultra W 100mm2 SDD(株式会社日立ハイテクノロジーズ製)
実施例1~4及び比較例1に係る積層体における絶縁層とシード層の密着性を90°ピール強度を測定することによって評価した。卓上ピール試験機EZ-SX(島津製作所製)を使用した。以下の条件で測定を行った。表1に結果を示す。
・試験片幅:10mm
・ピール速度:10mm/分
(実施例5)
高周波の伝送損失を評価するため、図5に示す配線基板20と同様の構成の配線基板を作製した。配線基板20は、マイクロストリップ配線を有する配線基板である。すなわち、配線基板20は、表面に導電層Sa(銅層)を有する支持基板Sと、支持基板Sの表面上に設けられた絶縁層11と、絶縁層11の表面上に設けられたシード層12と、シード層12の表面上に設けられたグランド層13(導体部)と、グランド層13の表面上に設けられた導体部15及び絶縁層16と、絶縁層16の表面上に設けられたシード層17及びシグナル層18(導体部)とによって構成されている。シード層12は、グランド層13を形成する際に給電層として使用される。シード層17は、シグナル層18を形成する際に給電層として使用される。配線基板を作製するにあたり、絶縁層11は実施例1と同じ感光性樹脂フィルムを用いて形成した。シグナル層18は、厚さ4μm、幅20μm、長さ10mmとした。シード層12,17を実施例1と同様の方法でそれぞれ形成する工程を経て実施例5に係る配線基板を作製した。
シード層12,17を以下の方法でそれぞれ形成したことの他は実施例5と同様にして比較例2に係る配線基板を作製した。すなわち、工程(1c)において、紫外線照射を実施する代わりに、デスミア処理に使用する薬液を用いて絶縁層の表面を改質(粗面化)したことの他は実施例1と同様にしてシード層12,17を形成した。デスミア処理に使用する薬液による処理は以下のように実施した。まず、膨潤処理のため、スウェラ(Atotech社製、商品名:クリーナーセキュリガント902)40mL/Lに70℃で5分間浸漬した。その後純水に1分間浸漬した。次いで、粗化処理のため、デスミア液(Atotech社製、商品名:コンパクトCP)40mL/Lに70℃で10分間浸漬した。その後純水に1分間浸漬した。その後、純水に25℃で5分間浸漬し、80℃のホットプレートで5分間乾燥させた。比較例2に係る絶縁層表面の算術平均粗さRaは411nmであった。
実施例5及び比較例2に係るマイクロストリップ配線について、ベクトルネットワークアナライザ(ヒューレットパッカード社製)を用いて、高周波(周波数50GHz)の伝送損失を測定した。特性インピーダンスは50Ωとした。比較例2の伝送損失に対して実施例5では伝送損失が22%低減された。
Claims (11)
- (a)樹脂組成物からなる絶縁層に活性エネルギー線を照射する工程と、
(b)前記絶縁層に無電解めっき用の触媒を吸着させる工程と、
(c)前記絶縁層の表面上に無電解めっきによって金属層を形成する工程と、
をこの順序で含み、
(a)工程において、前記活性エネルギー線の照射によって前記絶縁層の表面から深さ方向に20nm以上の厚さを有し且つ前記絶縁層の表面から連通する空孔を有する改質領域を形成する、配線基板の製造方法。 - (c)工程において、無電解銅めっき液を用いて前記金属層を形成する、請求項1に記載の配線基板の製造方法。
- (c)工程において、無電解銅ニッケルリンめっき液を用いて前記金属層を形成する、請求項1に記載の配線基板の製造方法。
- 前記活性エネルギー線が波長254nm以下の紫外線である、請求項1~3のいずれか一項に記載の配線基板の製造方法。
- (c)工程後における前記絶縁層の前記表面の算術平均粗さRaが100nm以下である、請求項1~4のいずれか一項に記載の配線基板の製造方法。
- 前記金属層のニッケル含有率が0.25~20質量%である、請求項1~5のいずれか一項に記載の配線基板の製造方法。
- 樹脂組成物からなる絶縁層と、
前記絶縁層の表面上に設けられた金属配線と、
を備え、
前記絶縁層が前記表面から深さ方向に厚さ20nm以上の改質領域を有し、
前記改質領域には前記金属配線に含まれる銅が分散している、配線基板。 - 前記金属配線の一部が無電解めっきによって形成されたものであり、
前記改質領域には、無電解めっき用の触媒が分散している、請求項7に記載の配線基板。 - 前記絶縁層の前記表面の平均粗さRaが100nm以下である、請求項7又は8に記載の配線基板。
- 前記樹脂組成物が熱硬化性樹脂組成物の硬化物である、請求項7~9のいずれか一項に記載の配線基板。
- 前記樹脂組成物が感光性樹脂組成物の硬化物である、請求項7~9のいずれか一項に記載の配線基板。
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