JP6814028B2 - プリント配線基板の製造方法 - Google Patents
プリント配線基板の製造方法 Download PDFInfo
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- JP6814028B2 JP6814028B2 JP2016224208A JP2016224208A JP6814028B2 JP 6814028 B2 JP6814028 B2 JP 6814028B2 JP 2016224208 A JP2016224208 A JP 2016224208A JP 2016224208 A JP2016224208 A JP 2016224208A JP 6814028 B2 JP6814028 B2 JP 6814028B2
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- treatment
- treatment liquid
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- resin substrate
- adhesion
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- MGFYIUFZLHCRTH-UHFFFAOYSA-N nitrilotriacetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)=O MGFYIUFZLHCRTH-UHFFFAOYSA-N 0.000 description 1
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- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 1
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- PXLIDIMHPNPGMH-UHFFFAOYSA-N sodium chromate Chemical compound [Na+].[Na+].[O-][Cr]([O-])(=O)=O PXLIDIMHPNPGMH-UHFFFAOYSA-N 0.000 description 1
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 1
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- 239000001119 stannous chloride Substances 0.000 description 1
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- 238000005406 washing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1635—Composition of the substrate
- C23C18/1639—Substrates other than metallic, e.g. inorganic or organic or non-conductive
- C23C18/1641—Organic substrates, e.g. resin, plastic
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- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/2006—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
- C23C18/2046—Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by chemical pretreatment
- C23C18/2073—Multistep pretreatment
- C23C18/2086—Multistep pretreatment with use of organic or inorganic compounds other than metals, first
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/22—Roughening, e.g. by etching
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
- C23C18/30—Activating or accelerating or sensitising with palladium or other noble metal
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/002—Etching of the substrate by chemical or physical means by liquid chemical etching
-
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/022—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
- H05K3/184—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1655—Process features
- C23C18/166—Process features with two steps starting with addition of reducing agent followed by metal deposition
Description
フィラーを含有する絶縁樹脂基板を膨潤処理、粗化処理、還元処理し、無電解めっきを行なってプリント配線基板を製造する方法であって、前記還元処理の後、無電解めっきの前に、CmH(2m+1)−(OC2H4)n−OH(m=1〜4の整数、n=1〜4の整数)で表されるエチレン系グリコールエーテル、および/またはCxH(2x+1)−(OC3H6)y−OH(x=1〜4の整数、y=1〜3の整数)で表されるプロピレン系グリコールエーテルと、を含み、pHが7以上である第1の処理液で処理した後、アミン系シランカップリング剤を含み、pHが7.0以上である第2の処理液で処理することを特徴とするプリント配線基板の製造方法。
前記第2の処理液で処理した後、清浄化処理を行なってから、前記無電解めっきを行なうものである上記項1に記載の製造方法。
(1)第1の処理工程
CmH(2m+1)−(OC2H4)n−OH(m=1〜4の整数、n=1〜4の整数)で表されるエチレン系グリコールエーテル、および/またはCxH(2x+1)−(OC3H6)y−OH(x=1〜4の整数、y=1〜3の整数)で表されるプロピレン系グリコールエーテルと、を含み、pHが7以上である第1の処理液で処理する工程。
(2)第2の処理工程
上記第1の処理工程の後、アミン系シランカップリング剤を含み、pHが7.0以上である第2の処理液で処理する工程。
上記第1の処理工程では、CmH(2m+1)−(OC2H4)n−OH(m=1〜4の整数、n=1〜4の整数)で表されるエチレン系グリコールエーテル、および/またはCxH(2x+1)−(OC3H6)y−OH(x=1〜4の整数、y=1〜3の整数)で表されるプロピレン系グリコールエーテルを含み、pHが7以上である第1の処理液を用いる。
CmH(2m+1)−(OC2H4)n−OH(m=1〜4の整数、n=1〜4の整数)・・・(1)
CxH(2x+1)−(OC3H6)y−OH(x=1〜4の整数、y=1〜3の整数・・・(2)
上記第1の処理工程の後、アミン系シランカップリング剤を含み、pHが7.0以上である第2の処理液で処理する。ここで、第1の処理工程と、第2の処理工程との間隔は特に限定されない。例えば、第1の処理工程の後、直ちに第2の処理工程を行なっても良いし、或は、第1の処理工程の後、一定時間放置してから、第2の処理工程を行なっても良い。
Y−R−Si−(X)3
本実施例では、表1に記載の第1の処理液および第2の処理液を用いて、以下の試料を作製した。なお、表1中、第1の処理液はpH調整剤として2〜20g/LのNaOHを用いてpHを7以上に調整し、pHが7を下回るものはpH調整剤として硫酸を用いた。また、第2の処理液はpH調整剤としてジエチレントリアミンを用いてpHを7.0以上に調整し、pHが7.0を下回るものはpH調整剤として硫酸を用いた。
上記試料に1cm幅の切り込みを入れ、JIS−C5012「8.5 めっき密着性」に記載の方法に基づき、90°剥離試験を行ない、ピール強度を測定した。ピール強度は、島津製作所製AUTOGRAPH AGS−Xを用いて測定した。
Claims (2)
- フィラーを含有する絶縁樹脂基板を膨潤処理、粗化処理、還元処理し、無電解めっきを行なってプリント配線基板を製造する方法であって、
前記還元処理の後、無電解めっきの前に、
CmH(2m+1)−(OC2H4)n−OH(m=1〜4の整数、n=1〜4の整数)で表されるエチレン系グリコールエーテル、および/またはCxH(2x+1)−(OC3H6)y−OH(x=1〜4の整数、y=1〜3の整数)で表されるプロピレン系グリコールエーテルと、を含み、pHが7以上である第1の処理液で処理した後、
アミン系シランカップリング剤を含み、pHが7.0以上である第2の処理液で処理することを特徴とし、
前記第1の処理液におけるグリコールエーテルの濃度は100g/L以上、
前記第2の処理液におけるシランカップリング剤の濃度は10g/L以上であるプリント配線基板の製造方法。 - 前記第2の処理液で処理した後、清浄化処理を行なってから、前記無電解めっきを行なうものである請求項1に記載の製造方法。
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JP2016224208A JP6814028B2 (ja) | 2016-11-17 | 2016-11-17 | プリント配線基板の製造方法 |
US16/348,296 US20210289637A1 (en) | 2016-11-17 | 2017-09-20 | Method for producing printed wiring board |
KR1020197010926A KR102440121B1 (ko) | 2016-11-17 | 2017-09-20 | 프린트 배선 기판의 제조 방법 |
PCT/JP2017/033910 WO2018092410A1 (ja) | 2016-11-17 | 2017-09-20 | プリント配線基板の製造方法 |
CN201780070895.8A CN109983157B (zh) | 2016-11-17 | 2017-09-20 | 印刷电路板的制备方法 |
EP17872640.2A EP3543372A4 (en) | 2016-11-17 | 2017-09-20 | METHOD FOR MANUFACTURING PRINTED CIRCUIT BOARD |
TW106133266A TWI732045B (zh) | 2016-11-17 | 2017-09-28 | 印刷配線基板之製造方法 |
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JP7430990B2 (ja) * | 2019-06-26 | 2024-02-14 | 新光電気工業株式会社 | 配線基板の製造方法 |
JP7387326B2 (ja) * | 2019-08-02 | 2023-11-28 | 上村工業株式会社 | 無電解めっきの前処理方法及び無電解めっきの前処理液 |
CN112969304A (zh) * | 2021-02-04 | 2021-06-15 | 深圳中科利尔科技有限公司 | 一种溶胀剂及去除线路板孔内残渣的方法 |
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JPH01219169A (ja) * | 1988-02-25 | 1989-09-01 | Hitachi Chem Co Ltd | 無電解めっき前処理液 |
US5311660A (en) * | 1993-02-10 | 1994-05-17 | International Business Machines Corporation | Methyl chloroform-free desmear process in additive circuitization |
JP4658634B2 (ja) * | 2005-02-10 | 2011-03-23 | アルプス電気株式会社 | 無電解めっき用触媒液及びそれを用いた無電解めっき方法 |
JP5857386B2 (ja) * | 2011-09-02 | 2016-02-10 | 地方独立行政法人 大阪市立工業研究所 | 無電解めっきの前処理皮膜形成用組成物 |
JP5859838B2 (ja) | 2011-12-20 | 2016-02-16 | 株式会社Adeka | 無電解めっき前処理方法 |
EP2644744A1 (en) * | 2012-03-29 | 2013-10-02 | Atotech Deutschland GmbH | Method for promoting adhesion between dielectric substrates and metal layers |
EP2645830B1 (en) * | 2012-03-29 | 2014-10-08 | Atotech Deutschland GmbH | Method for manufacture of fine line circuitry |
JP6367606B2 (ja) * | 2013-09-09 | 2018-08-01 | 上村工業株式会社 | 無電解めっき用前処理剤、並びに前記無電解めっき用前処理剤を用いたプリント配線基板の前処理方法およびその製造方法 |
US9268223B2 (en) * | 2013-11-20 | 2016-02-23 | Eastman Kodak Company | Forming conductive metal pattern using reactive polymers |
JP6471392B2 (ja) * | 2015-02-12 | 2019-02-20 | 上村工業株式会社 | 無電解めっき用前処理剤、並びに前記無電解めっき用前処理剤を用いたプリント配線基板の前処理方法およびその製造方法 |
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JP2018080369A (ja) | 2018-05-24 |
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