WO2019237802A1 - 干燥箱及其控制方法、有机电致发光器件的制备方法 - Google Patents

干燥箱及其控制方法、有机电致发光器件的制备方法 Download PDF

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Publication number
WO2019237802A1
WO2019237802A1 PCT/CN2019/081305 CN2019081305W WO2019237802A1 WO 2019237802 A1 WO2019237802 A1 WO 2019237802A1 CN 2019081305 W CN2019081305 W CN 2019081305W WO 2019237802 A1 WO2019237802 A1 WO 2019237802A1
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Prior art keywords
dried
heating
substrate
drying box
hot plate
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PCT/CN2019/081305
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English (en)
French (fr)
Inventor
胡春静
侯文军
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京东方科技集团股份有限公司
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Priority to US16/651,567 priority Critical patent/US11530874B2/en
Publication of WO2019237802A1 publication Critical patent/WO2019237802A1/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
    • F26B9/06—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B23/00—Heating arrangements
    • F26B23/04—Heating arrangements using electric heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/18—Drying solid materials or objects by processes involving the application of heat by conduction, i.e. the heat is conveyed from the heat source, e.g. gas flame, to the materials or objects to be dried by direct contact
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition

Definitions

  • Embodiments of the present disclosure relate to a drying box, a method for controlling the same, and a method for preparing an organic electroluminescent device.
  • Organic light-emitting diode Organic Light-Emitting Diode
  • Organic Light-Emitting Diode have thin, light, wide viewing angles, active light emission, continuously adjustable light emission colors, low cost, high color gamut, high contrast, fast response speed, low energy consumption, and drive
  • the advantages of low voltage, wide operating temperature range, simple production process, high luminous efficiency, and flexible display have been listed as the next-generation display technology with development prospects.
  • Embodiments of the present disclosure provide a drying box, a method for controlling the same, and a method for preparing an organic electroluminescent device.
  • a drying box including a cavity and a hot plate provided in the cavity, the hot plate including a plurality of heating points, the plurality of heating points facing the heat plate Is configured to carry the surface settings of the device to be dried, and the plurality of heating points have different temperatures and are insulated from each other.
  • the hot plate includes a substrate and a plurality of mutually independent heating sources disposed on the substrate, and the substrate is a heat insulating material.
  • the hot spot is a top portion of the heating source on the hot plate, or the hot spot is a point or area corresponding to an orthographic projection of the heating source on the hot plate.
  • the shapes of the orthographic projections of a plurality of the heating sources on the substrate are different.
  • the drying box further includes a temperature controller configured to adjust the temperature of the heating source; each of the temperature controllers is connected to a corresponding heating source; or a shape of an orthographic projection on the substrate The same heating source is connected to the same temperature controller.
  • the drying box is configured to dry the organic electroluminescent device to be dried, and the plurality of the heating sources on the substrate are divided into multiple groups, and the plurality of the heating sources in each group are perpendicular to the thickness of the substrate.
  • the cross-sectional shape in the direction is respectively the same as the shape of the pattern to be dried in a plurality of sub-pixels in each pixel unit of the organic electroluminescent device to be dried.
  • the drying box further includes a temperature controller configured to adjust the temperature of the heating source, and the heating source configured to heat the sub-pixels emitting light of the same color is connected to the same temperature controller.
  • a groove is provided on the substrate, the heating source is disposed in the groove, and the drying box further includes a control structure configured to control the heating source along a thickness direction of the substrate. Moving up and down.
  • the temperature controller is an electric heating structure provided with a thermocouple, and the electric heating structure adjusts the output current in real time according to the temperature fed back by the thermocouple.
  • a method for controlling a drying box including a cavity and a hot plate provided in the cavity, the hot plate including a plurality of heating points, the plurality of A configuration in which the heating points are oriented toward the hot plate to carry a surface setting of the device to be dried, and the plurality of heating points have different temperatures and are insulated from each other
  • the control method includes: controlling the heating of each of the plurality of heating points The temperature is such that each pattern to be dried in the device to be dried has the same evaporation rate in the drying box.
  • the hot plate includes a base and a plurality of mutually independent heating sources disposed on the base, the base is a heat-insulating material, and the control method further includes controlling movement of the heating source so that the heat source The heating source moves in a direction away from the substrate.
  • the hot spot is a top portion of the heating source on the hot plate, or the hot spot is a point or area corresponding to an orthographic projection of the heating source on the hot plate.
  • a method for preparing an organic electroluminescent device comprising: forming a pattern to be dried of an organic electroluminescent device on a substrate; and aligning a substrate on which the pattern to be dried is formed at a right position.
  • the hot plate of the drying box is required to be dried.
  • the pattern for forming an organic electroluminescent device to be dried on the substrate includes: forming a hole injection layer to be dried, a hole transport layer to be dried, and an electroluminescent layer to be dried on the substrate by using a solution process.
  • FIG. 1 is a schematic structural diagram of a drying box according to an embodiment of the present disclosure
  • FIG. 2 is a schematic structural diagram of a hot plate according to an embodiment of the present disclosure
  • FIG. 3 is a schematic diagram of a correspondence relationship between a heating source and a temperature controller according to an embodiment of the present disclosure
  • FIG. 4 is a schematic diagram of a correspondence relationship between a shape of a heating source and a shape of a pattern to be dried according to an embodiment of the present disclosure
  • FIG. 5 is a schematic structural diagram of a device to be dried according to an embodiment of the present disclosure.
  • FIG. 6 is a schematic structural diagram of a hot plate and a temperature controller according to an embodiment of the present disclosure
  • FIG. 7 is a schematic structural diagram of a heating source and a substrate according to an embodiment of the present disclosure.
  • Fig. 8 is a sectional view taken along the A-A direction in Fig. 7.
  • Organic electroluminescence device thin film deposition methods mainly include evaporation and solution processes: the evaporation process is suitable for small organic molecules, its film formation is good, the technology is relatively mature, but the equipment investment is large, the material utilization rate is low, and the size is large Product Mask (mask) registration accuracy is low.
  • Solution processes including spin coating, inkjet printing, and nozzle coating methods, are suitable for polymer materials and soluble small molecules. They are characterized by low equipment costs and outstanding advantages in large-scale and large-scale production.
  • the three sub-pixel regions of red, green, and blue require different sizes.
  • the drying pressure is not consistent, and the volatilization rate is different under the same pressure, so three better organic films cannot be obtained under the same pressure.
  • the organic electroluminescent layer as an example, the three red, green, and blue sub-pixel regions have different sizes. Therefore, the vacuum drying conditions required for the three red, green, and blue light-emitting layers are different.
  • the three-color light-emitting layers are usually prepared in a liquid process and then dried in a drying box.
  • the present disclosure applies different temperatures to the three red, green, and blue sub-pixel regions. Due to the vacuum conditions, different temperatures between the three red, green, and blue sub-pixel regions do not cause crosstalk.
  • the temperature control process is related to the size of the pixel area, the specific surface area of the ink, the saturated vapor pressure, and the molecular weight of the organic solvent. The ultimate purpose of controlling the temperature is to make the organic thin films in the red, green, and blue sub-pixel areas at the same pressure.
  • an embodiment of the present disclosure provides a drying box, as shown in FIG. 1, including a cavity 10 and a hot plate 20 disposed in the cavity 10.
  • the hot plate 20 includes a plurality of heating points 21, and the heating points 21 face the heat.
  • the surface of the plate 20 for supporting the device 30 to be dried is provided.
  • the temperature portions of the plurality of heating points 21 are different from each other and are insulated from each other.
  • the heating point 21 is disposed toward the surface of the hot plate 20 for carrying the device 30 to be dried. In this way, when the device 30 to be dried is placed on the hot plate 20, the heating point 21 is directly connected to the to-be-dried The device 30 is in contact.
  • the hot plate 20 includes a plurality of independent heating points 21.
  • the temperatures of the plurality of heating points 21 may not be exactly the same, that is, they are partially the same and partially different.
  • the temperatures of the multiple heating points 21 can be controlled independently or synchronously, but the heating points 21 and the heating points 21 are insulated from each other, and the temperatures will not cross-talk with each other.
  • the arrangement of the heating points 21 can be set reasonably according to factors such as the use scene.
  • the principle of improving the uniformity of the device 30 to be dried in the embodiment of the present disclosure is that the factors affecting the evaporation rate of the liquid are: (1) the temperature applied to the liquid; (2) the specific surface area of the liquid (S / V); (3) the liquid Surface air velocity; (4) Saturated vapor pressure of the solvent. (5) The molecular weight M of the organic solvent.
  • the solvents used in the preparation of film layers with the same function by the solution process are the same, that is, the molecular weights M of the organic solvents are the same.
  • the saturated vapor pressure of the solvent is related to the applied temperature. Therefore, for the pattern to be dried in the drying box, the factors affecting the uniformity of drying are the temperature applied to the liquid and the specific surface area of the liquid. According to the specific surface area of the pattern to be dried, the temperature applied to the pattern to be dried is adjusted to improve the uniformity of the pattern to be dried.
  • the to-be-dried device 30 includes multiple to-be-dried patterns with different shapes and sizes.
  • the drying conditions in the drying box are fixed, and the same drying Under the conditions, the evaporation rates of the solvents in different patterns to be dried are different. Since the evaporation rate of the liquid is related to the temperature applied to the liquid, the embodiment of the present disclosure sets the temperature of the heating point 21 on the hot plate 20 to be not exactly the same, and the temperature of the heating point 21 on the hot plate 20 can be independently controlled.
  • the hot plate 20 includes a substrate 22 and a plurality of mutually independent heating sources 23 disposed on the substrate 22, and the substrate 22 is a heat insulating material.
  • the hot spot 21 is a top portion of the heating source 23 on the hot plate 20, or the hot spot 21 is a point or area corresponding to an orthographic projection of the heating source 23 on the hot plate 22.
  • the material of the substrate 22 is selected from existing materials with thermal insulation function, and the material of the substrate 22 should be suitable for use in a drying box.
  • the heating sources 23 are independent of each other, and the substrate 22 is a heat-insulating material. Therefore, the heating sources 23 should be insulated from each other without interfering with each other.
  • the patterns of the plurality of heating sources 23 on the substrate 22 may be the same or different.
  • the heating source 23 may be in direct contact with the device 30 to be dried.
  • the surface of the heating source 23 in contact with the device 30 to be dried should be a plane parallel to the substrate 22.
  • the heating source 23 is provided on the heat-insulating substrate 22, and the device 30 to be dried is heated by the heating source 23.
  • the heating source 23 and the device to be dried 30 can be carried by the substrate 22 to stabilize the entire drying process.
  • the aspect can prevent the problem that the pattern to be dried is deformed due to the instability caused by the instability of the device 30 to be dried.
  • the shapes of the orthographic projections of the multiple heating sources 23 on the substrate 22 may not be exactly the same, that is, the shapes of the orthographic projections of the multiple heating sources 23 on the substrate 22 are the same, Partly different.
  • the cross-sectional areas of the plurality of heating sources 23 may not be exactly the same, that is, the cross-sectional areas of the plurality of heating sources 23 are partially the same and partially different.
  • adjusting the temperature applied to the pattern to be dried in combination with the specific surface area of the pattern to be dried can improve the uniformity of the device 30 to be dried.
  • the present disclosure adjusts the cross-sectional shape of the heating source 23 so that each region of each pattern to be dried is simultaneously heated, thereby further improving the uniformity of the device 30 to be dried.
  • the drying box includes a plurality of temperature controllers 40, and each temperature controller 40 is connected to one or a group of heating sources 23 having the same shape or cross-sectional shape to achieve independent control of the temperature of each heating source 23 , Improve the scope of application of the drying box.
  • the drying box includes a plurality of temperature controllers 40, and the heating sources 23 having the same shape as the orthographic projections on the substrate 22 are connected to the same temperature controller 40.
  • the heating source 23 with the same orthographic shape on the substrate 22 usually heats the pattern to be dried in the same shape, and the required heating temperature is the same. Therefore, the same shape as the orthographic projection on the substrate 22 is heated.
  • the source 23 is controlled by the same temperature controller 40, which can save the number of the temperature controller 40 and simplify the layout of the drying box.
  • the drying box is used to dry the organic electroluminescent device.
  • the multiple heating sources 23 on the substrate 22 are divided into multiple groups, and the multiple heating sources 23 in each group are perpendicular to the substrate 22.
  • the cross-sectional shape in the thickness direction is the same as the shape of the pattern to be dried in a plurality of sub-pixels in each pixel unit of the organic electroluminescent device to be dried.
  • each pixel unit includes three red, green, and blue sub-pixels (three sub-pixels in a dotted frame).
  • the pattern to be dried is a red electroluminescent layer R
  • the pattern to be dried in a green subpixel is a green electroluminescent layer G
  • the pattern to be dried in a blue subpixel is a blue electroluminescent layer B.
  • the substrate 22 The three heating sources 23 on the top constitute a group (three heating sources 23 in the stippling wireframe), and the three heating sources 23 in each group are respectively used for the red electroluminescent layer R, the green electroluminescent layer G,
  • the blue electroluminescent layer B heats three patterns to be dried, and the cross-sectional shape of the heating source 23 for heating the red electroluminescent layer R is the same as that of the red electroluminescent layer R, and is used for green electroluminescence.
  • the cross-sectional shape of the heating source 23 heated by the layer G is the same as that of the green electroluminescent layer G, and the cross-sectional shape of the heating source 23 used for heating the blue electroluminescent layer B is the same as that of the blue electroluminescent layer B. The shape is the same.
  • a 60 ⁇ m ⁇ 150 ⁇ m red electroluminescent layer R, a 78 ⁇ m ⁇ 204 ⁇ m green electroluminescent layer G, and a 78 ⁇ m ⁇ 234 ⁇ m blue electroluminescence are formed by simultaneous inkjet printing.
  • the electroluminescent layer B correspondingly, puts the device after inkjet printing in a drying box to dry, the heating source 23 acts on the open area in the sub-pixel, and according to the mark on the hot plate 20,
  • the sub-pixels correspond to heating sources 23 of different temperatures, and the three sub-pixels of the red, green, and blue sub-pixels have different temperatures and cross-sectional areas.
  • the temperature of the heating source 23 is adjusted according to the solvent evaporation rate in the red electroluminescent layer R, the green electroluminescent layer G, and the blue electroluminescent layer B, and the horizontal direction of the heating source 23 for heating the red electroluminescent layer R is adjusted.
  • the cross-sectional area of the heating source 23 for heating the green electroluminescent layer G is 60 ⁇ m ⁇ 150 ⁇ m
  • the cross-sectional area of the heating source 23 for heating the blue electroluminescent layer G is 78 ⁇ m ⁇ 204 ⁇ m.
  • the area is 78 microns ⁇ 234 microns, that is, the contact area of the heating source 23 and the device to be dried 30 is the same as the opening size of the three red, green, and blue sub-pixels in the opening area (the opening area is used for inkjet printing organic thin films) . This ensures that the red electroluminescent layer R, the green electroluminescent layer G, and the blue electroluminescent layer B are simultaneously dried.
  • the heating source 23 directly acts on the opening area of the sub-pixel. Since the heating source 23 heats the device 30 to be dried in the vacuum cavity 10, there is no air as a transmission medium, and the temperature between each other does not cause crosstalk.
  • the heating source 23 is not in direct contact with the opening area of the pixel.
  • the heating source 23 may be at a distance of, for example, less than about 10 nm from the opening area, and heats the pixel using the principle of thermal radiation in a vacuum environment.
  • the factors that affect the uniformity of drying are the temperature applied to the liquid, the saturated vapor pressure of the solvent, and the specific surface area of the liquid.
  • S R / V R ⁇ S G / V G ⁇ S B / V B are the factors that affect the uniformity of drying.
  • the evaporation rate of the organic liquid Gs (5.38 + 4.1u) P v FM 1/2 , where Gs is the evaporation amount of the organic solvent and u is hollow drying Air flow rate in a box environment, Pv is the saturated vapor pressure of the organic solvent, F is the specific surface area (ie, surface area to volume ratio S / V) at which the organic solvent is volatile, and M is the molecular weight of the organic solvent. Therefore, the evaporation rate is related to the saturated vapor pressure, which in turn is related to the applied temperature.
  • Evaporation rate Gs (5.38 + 4.1u) e 9.3876-3826.36 / (T-45.47) FM 1/2
  • the electroluminescent layer B is simultaneously dried, that is, the evaporation rates of the three are made equal, that is, That is: which is, F is the specific surface area S / V of the pattern to be dried.
  • the commonly used solvent for inkjet printing is anisole. If the heating temperature of the red electroluminescent layer R is fixed at 20 ° C and the saturated vapor pressure corresponding to the anisole is 0.257, the red electroluminescent layers R, Specific surface areas of the green electroluminescent layer G and the blue electroluminescent layer B ink. According to the ratio of the temperature and specific surface area of the green electroluminescent layer G and the blue electroluminescent layer B, the heating temperature for the green electroluminescent layer G and the blue electroluminescent layer B can be calculated by the above formula.
  • Table 1 is the specific surface area corresponding to the droplet volume and droplet radius.
  • Table 2 is the saturation vapor pressure of some solvents often used in inkjet printing at different temperatures.
  • the drying box of the embodiment of the present disclosure further includes a temperature controller 40 for adjusting the temperature of the heating source 23.
  • a heating source 23 that heats sub-pixels that emit light of the same color is connected to the same temperature controller 40.
  • multiple heating sources 23 that heat the red electroluminescent layer R are connected to the same temperature controller 40
  • multiple heating sources 23 that heat the green electroluminescent layer G are connected to the same temperature controller 40
  • blue electroluminescence The plurality of heating sources 23 heated in the layer B are connected to the same temperature controller 40.
  • the temperature adjustment of the heating source 23 by the temperature controller 40 is based on the specific surface area of the pattern to be dried corresponding to the heating source 23, and referring to the principle described above, the temperature of each heating source 23 is determined.
  • the specific surface area of each pattern to be dried may be input to the temperature controller 40, the temperature controller 40 calculates the heating temperature, or other components may calculate the heating temperature, and the temperature controller 40 controls the heating temperature according to the calculation result.
  • the temperature controller 40 controls the heating temperature according to the calculation result.
  • a groove is provided on the substrate 22, the heating source 23 is disposed in the groove, and the drying box further includes Control structure 50.
  • the control structure 50 is used to control the heating source 23 to move up and down along the thickness direction of the substrate 22.
  • the shape of the groove allows the heating source to be placed therein, that is, the orthographic projection of the groove on the substrate 22 necessarily covers the orthographic projection of the heating source 23 corresponding to the groove on the substrate 22.
  • the depth of the groove is greater than the length of the heating source 23 in the thickness direction of the substrate 22.
  • control structure 50 is raised to control the heating source 23 to move away from the substrate 22 (as shown by the dotted line in FIG. 8), so that the heating source 23 supports the device 30 to be dried.
  • the control structure 50 controls the heating.
  • the source 23 moves in a direction close to the substrate 22 so that the heating source 23 is placed inside the substrate 22.
  • the temperature controller 40 in order to accurately control the temperature of the heating source 23 in real time, is, for example, an electric heating structure provided with a thermocouple, and the electric heating structure adjusts the output current in real time according to the temperature fed back by the thermocouple.
  • Heating source 23 temperature control principle The pixel unit is heated by applying an external current, and the closed-loop system is formed by the thermocouple feedback temperature to control the output current of the heating source 23 in real time, for example, using Proportion Integral Differential Coefficient to adjust The value of the temperature, so as to give different temperature control to different patterns to be heated.
  • the corresponding heating source group also includes a corresponding heating source 23 and a corresponding heating point.
  • An embodiment of the present disclosure further provides a method for controlling a drying box, including:
  • the heating temperature of each heating point 21 is controlled so that the patterns to be dried in the device 30 to be dried have the same evaporation rate in the drying box.
  • the method for controlling a drying box provided by the embodiment of the present disclosure, during the drying process, different temperatures are applied to different to-be-dried patterns of the same device 30 to be dried, so that the evaporation rates of the solvents in the different to-be-dried patterns are the same, so as to improve The uniformity of the pattern surface to be dried.
  • control method further includes:
  • the heating source 23 is controlled to move so that the heating source 23 moves in a direction away from the substrate 22.
  • the heating source 23 is controlled to be raised so that there is a certain distance between the device 30 to be dried and the substrate 22.
  • the heating source 23 may be raised after the device 30 to be dried is placed in a drying box, or the heating source 23 may be raised before the device 30 to be dried is placed in the drying box.
  • An embodiment of the present disclosure also provides a method for preparing an organic electroluminescent device, including:
  • a pattern to be dried of an organic electroluminescent device is formed on a substrate.
  • the pattern to be dried is formed from a solution obtained by dissolving an organic material in a solvent. At this time, the pattern to be dried is in a liquid state. Forming the pattern to be dried on the substrate may be forming a hole injection layer to be dried or a hole transporting layer to be dried or an electroluminescent layer to be dried on the substrate using a solution process.
  • an electroluminescent layer a red electroluminescent layer to be dried formed in a red sub-pixel, a green electroluminescent layer to be dried formed in a green sub-pixel, and a blue electro-luminescent layer to be dried formed
  • the pattern of the dried blue electroluminescent layer is not exactly the same.
  • the substrate on which the pattern to be dried is formed is aligned and placed on the hot plate 20 of the drying box for drying.
  • the drying box controls the temperature of each heating point 21 corresponding to the electroluminescent layer pattern of each color according to different heating temperatures required for the electroluminescent layer pattern of each color, so that each of the liquid organic film layers can be The area is relatively uniform and dry, thereby improving the yield of the organic electroluminescent device.
  • the embodiment of the present disclosure provides a drying box, a control method thereof, and a method for preparing an organic electroluminescent device. Since the evaporation rate of a liquid is related to the temperature applied to the liquid, the embodiment of the present disclosure The settings are not exactly the same, and the temperature of the heating point on the hot plate can be controlled independently. In this way, different temperatures are applied to different patterns to be dried of the same device to be dried, so that the evaporation rate of the solvent in the different patterns to be dried is the same. To improve the uniformity of the surface of different patterns to be dried.

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Abstract

一种干燥箱及其控制方法、有机电致发光器件的制备方法，干燥箱包括腔体（10）和设置在腔体（10）内的热板（20），热板（20）包括多个加热点（21），加热点（21）朝向热板（20）的用于承载待干燥器件(30)的表面设置，多个加热点（21）的温度可以独立控制，也可以是部分加热点（21）的温度同步控制，加热点（21）与加热点（21）之间是相互绝热的；控制方法包括控制多个加热点（21）的每个的加热温度，以使待干燥器件（30）中的各待干燥图案在干燥箱内具有相同的蒸发速率；有机电致发光器件的制备方法包括在基板上形成有机电致发光器件的待干燥图案，将形成有待干燥图案的基板对位放置在干燥箱的热板（20）上进行干燥。该干燥箱及其控制方法可以使得有机薄膜干燥均匀，该制备方法可以制得发光均匀的有机电致发光器件。

Description

干燥箱及其控制方法、有机电致发光器件的制备方法
相关申请的交叉引用
本申请要求于2018年06月14日向CNIPA提交的名称为“干燥箱及其控制方法、有机电致发光器件的制备方法”的中国专利申请No.201810613551.3的优先权，其全文通过引用合并于本文。
技术领域
本公开的实施例涉及干燥箱及其控制方法、有机电致发光器件的制备方法。
背景技术
有机电致发光二极管(Organic Light-Emitting Diode)器件由于具有薄、轻、宽视角、主动发光、发光颜色连续可调、成本低、高色域、高对比度、响应速度快、耗能小、驱动电压低、工作温度范围宽、生产工艺简单、发光效率高及可柔性显示等优点，已被列为具有发展前景的下一代显示技术。
发明内容
本公开的实施例提供一种干燥箱及其控制方法、有机电致发光器件的制备方法。
根据本公开的至少一个实施例，提供一种干燥箱，包括腔体和设置在所述腔体内的热板，所述热板包括多个加热点，所述多个加热点朝向所述热板的配置来承载待干燥器件的表面设置，以及所述多个加热点的温度不同且相互绝热。
例如，所述热板包括基底和设置在所述基底上的多个相互独立的加热源，所述基底为绝热材料。
例如，所述热点为所述加热源在所述热板上的顶端部分，或者所述热点为对应于所述加热源在所述热板上的正投影的点或区域。
例如，多个所述加热源在所述基底上的正投影的形状不同。
例如，所述的干燥箱还包括配置来调整所述加热源的温度的温度控制 器；每个所述温度控制器连接对应的所述加热源；或者，在所述基底上的正投影的形状相同的所述加热源连接同一所述温度控制器。
例如，所述干燥箱配置来干燥待干燥有机电致发光器件，所述基底上的多个所述加热源分为多组，每组中的多个所述加热源垂直于所述基底的厚度方向上的截面形状分别与待干燥有机电致发光器件的每个像素单元中的多个子像素内的待干燥图案的形状相同。
例如，所述干燥箱还包括配置来调整所述加热源的温度的温度控制器，以及配置来对发同种颜色光的子像素加热的所述加热源连接同一所述温度控制器。
例如，所述基底上设置有凹槽，所述加热源设置在所述凹槽内，所述干燥箱还包括控制结构，所述控制结构配置来控制所述加热源沿所述基底的厚度方向上下移动。
例如，所述温度控制器为设置有热电偶的电加热结构，所述电加热结构根据所述热电偶反馈的温度实时调整输出电流。
根据本公开的至少一个实施例，提供一种干燥箱的控制方法，所述干燥箱包括腔体和设置在所述腔体内的热板，所述热板包括多个加热点，所述多个加热点朝向所述热板的配置来承载待干燥器件的表面设置，以及所述多个加热点的温度不同且相互绝热，所述控制方法包括：控制所述多个加热点的每个的加热温度，以使待干燥器件中的各待干燥图案在所述干燥箱内具有相同的蒸发速率。
例如，所述热板包括基底和设置在所述基底上的多个相互独立的加热源，所述基底为绝热材料，所述控制方法还包括：控制所述加热源的移动，以使所述加热源向远离基底的方向移动。
例如，所述热点为所述加热源在所述热板上的顶端部分，或者所述热点为对应于所述加热源在所述热板上的正投影的点或区域。
根据本公开的至少一个实施例，提供一种有机电致发光器件的制备方法，包括：在基板上形成有机电致发光器件的待干燥图案；以及将形成有待干燥图案的基板对位放置在权利要求所述的干燥箱的热板上进行干燥。
例如，所述在基板上形成有机电致发光器件的待干燥图案包括：采用溶液工艺在基板上形成待干燥的空穴注入层、待干燥的空穴传输层、待干燥的电致发光层。
附图说明
以下将结合附图对本公开的实施例进行更详细的说明，以使本领域普通技术人员更加清楚地理解本公开的实施例，其中：
图1为本公开实施例提供的一种干燥箱的结构示意图；
图2为本公开实施例提供的一种热板的结构示意图；
图3为本公开实施例提供的一种加热源与温度控制器的对应关系示意图；
图4为本公开实施例提供的一种加热源的形状与待干燥图案的形状的对应关系示意图；
图5为本公开实施例提供的一种待干燥器件的结构示意图；
图6为本公开实施例提供的一种热板与温度控制器的结构示意图；
图7为本公开实施例提供的一种加热源与基底的结构示意图；以及
图8为图7中沿A-A向的截面图。
具体实施方式
下面将结合本公开实施例中的附图，对本公开实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本公开一部分实施例，而不是全部的实施例。基于本公开中的实施例，本领域普通技术人员在无需做出创造性劳动前提下所获得的所有其他实施例，都应该属于本公开保护的范围。
除非另外定义，本公开使用的技术术语或者科学术语应当为本公开所属领域内具有一般技能的人士所理解的通常意义。本公开中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性，而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同，而不排除其他元件或者物件。“上”、“下”、“内”、“外”等仅用于表示相对位置关系，当被描述对象的绝对位置改变后，则该相对位置关系也可能相应地改变。
有机电致发光器件薄膜沉积方法主要有蒸镀工艺和溶液工艺两种：蒸 镀工艺适用于有机小分子，其成膜均匀好、技术相对成熟、但是设备投资大、材料利用率低、大尺寸产品Mask(掩模板)对位精度低。溶液工艺，包括旋涂、喷墨打印、喷嘴涂覆法等，适用于聚合物材料和可溶性小分子，其特点为设备成本低，在大规模、大尺寸生产上优势突出。
发明人注意到，当采用溶液工艺形成液态有机薄膜后会先进行干燥，然后在进行烘烤，而干燥过程中，当形状不同的多个待干燥图案在完全相同的干燥条件下干燥时，会出现干燥不均匀的情况。
例如，在红、绿、蓝三种子像素区内喷墨打印形成的有机薄膜在同一个基板上被放在干燥箱中干燥时，由于红、绿、蓝三种子像素区的大小不同，所需要的干燥压强不一致，在同一个压强下挥发速率不同，不能在同一个压强下得到三个比较好的有机膜。以制备有机电致发光层为例，由于红、绿、蓝三种子像素区的大小不同，因此，红光发光层、绿光发光层、蓝光发光层三者所需的真空干燥条件不同。在量产过程中，通常是将三种颜色的发光层用液态制程制备好后，放入干燥箱中干燥，其中一种颜色的发光层的干燥效果较好时，其他两种颜色的发光层的干燥效果则不太理想。这样一来，当在同一真空干燥条件下干燥时，干燥效果必然不理想，导致在同一真空干燥条件下无法得到三种干燥均匀的发光层。针对如此问题，本公开分别对红、绿、蓝三种子像素区施加不同的温度，由于是真空条件，红、绿、蓝三种子像素区之间不同温度不会造成串扰(crosstalk)。温度控制过程和像素区大小、墨水的比表面积、饱和蒸汽压、有机溶剂的分子量等因素有关，而控制温度的最终目的就是使红、绿、蓝三种子像素区内的有机薄膜在同样的压强下，具有相同的蒸发速率(Gs)。即Gs R＝Gs G＝Gs B。
基于此，本公开实施例提供一种干燥箱，如图1所示，包括腔体10和设置在腔体10内的热板20，热板20包括多个加热点21，加热点21朝向热板20的用于承载待干燥器件30的表面设置。多个加热点21的温度部分相同部分不同且相互绝热。
需要说明的是，例如，加热点21朝向热板20的用于承载待干燥器件30的表面设置，这样一来，当待干燥器件30放置在热板20上时，加热点21直接与待干燥器件30接触。
例如，热板20包括独立的多个加热点21。
例如，多个加热点21的温度可以不完全相同，即，部分相同、部分不同。多个加热点21的温度可以独立控制，也可以是部分加热点21的温度同步控制，但加热点21与加热点21之间是相互绝热的，温度不会相互串扰。
例如，加热点21的排布方式可根据使用场景等因素合理设置。
本公开实施例提高待干燥器件30均匀性的原理为：影响液体的蒸发速度的因素有：(1)向液体施加的温度；(2)液体的比表面积(S/V)；(3)液体表面的空气流动速度；(4)溶剂的饱和蒸汽压。(5)有机溶剂的分子量M。通常情况下，采用溶液工艺制备具有相同功能的膜层时所用的溶剂是相同的，也就是有机溶剂的分子量M是相同的。待干燥器件30中待干燥图案(分别形成在红、绿、蓝三种子像素区中的有机图案)处于同一干燥箱中，腔体10内空气流动速度是相同的，但是由于待干燥图案的大小不同，也就是待干燥图案的比表面积是不同的S/V(V＝4/3πR 3，S＝4πR 2)。溶剂的饱和蒸汽压与施加的温度有关，因此，对于干燥箱中的待干燥图案来讲，影响干燥均匀性的因素即为向液体施加的温度和液体的比表面积。结合待干燥图案的比表面积，调整向待干燥图案施加的温度，以提高待干燥图案的均匀性。
在量产过程中，待干燥器件30中会包括多种形状大小不同的待干燥图案，当将待干燥器件30放入干燥箱中时，干燥箱中的干燥条件是固定的，而在同一干燥条件下，不同待干燥图案中溶剂的蒸发速率不同。由于液体的蒸发速率与向液体施加的温度有关，本公开实施例通过将热板20上的加热点21的温度设置为不完全相同，并且热板20上加热点21的温度可独立控制。这样一来，向同一待干燥器件30的不同待干燥图案施加不同的温度，从而使不同待干燥图案中溶剂的蒸发速率相同，以提高不同待干燥图案表面的均匀性。
在一些实施例中，如图2所示，例如，热板20包括基底22和设置在基底22上的多个相互独立的加热源23，基底22为绝热材料。
例如，热点21为加热源23在热板20上的顶端部分，或者热点21为对应于加热源23在热板22上的正投影的点或区域。
例如，基底22的材料选取已有的具有绝热功能的材料，基底22的材 料应适宜在干燥箱中使用。
此外，加热源23相互独立，基底22为绝热材料，因此，加热源23之间应绝热，互不干扰。例如，基底22上的多个加热源23的图案可以相同，也可以不同。本领域技术人员应该明白，加热源23可以直接与待干燥器件30接触。例如，为了进一步提高待干燥器件30放置的稳定性，加热源23与待干燥器件30接触的表面应为平行于基底22的平面。
现有技术中能够使加热源23产生热能的方式均适用于本公开。
本公开实施例通过在绝热的基底22上设置加热源23，通过加热源23对待干燥器件30加热，一方面可以通过基底22承载加热源23和待干燥器件30，使得整个干燥过程稳定，另一方面可以防止因待干燥器件30不稳定造成倾斜导致的待干燥图案变形的问题。
在一些实施例中，如图2所示，多个加热源23在基底22上的正投影的形状可以不完全相同，即，多个加热源23在基底22上的正投影的形状部分相同、部分不同。
例如，多个加热源23的横截面积可以不完全相同，即，多个加热源23的横截面积部分相同、部分不同。
例如，结合待干燥图案的比表面积，调整向待干燥图案施加的温度，可提高待干燥器件30的均匀性。而为了进一步提高待干燥图案受热的均匀性，本公开通过调整加热源23的横截面形状，以使每个待干燥图案各区域同时受热，从而进一步提升待干燥器件30的均匀性，下面即将进行详细说明。
在一些实施例中，干燥箱中包括多个温度控制器40，每个温度控制器40连接一个或一组形状或截面形状相同的加热源23，以实现对每个加热源23温度的独立控制，提高干燥箱的适用范围。
在一些实施例中，如图3所示，干燥箱中包括多个温度控制器40，在基底22上的正投影的形状相同的加热源23连接同一温度控制器40。
例如，在基底22上的正投影的形状相同的加热源23通常对同一形状的待干燥图案加热，所需输出的加热温度也相同，因此，将在基底22上的正投影的形状相同的加热源23由同一温度控制器40控制，可节省温度控制器40的数量，简化干燥箱的布局。
在一些实施例中，如图4所示，干燥箱用于干燥有机电致发光器件，基底22上的多个加热源23分为多组，每组中的多个加热源23垂直于基底22的厚度方向上的截面形状分别与待干燥有机电致发光器件每个像素单元中的多个子像素内的待干燥图案的形状相同。
示例性的，如图4所示，每个像素单元包括红、绿、蓝三个子像素(虚线框内的三个子像素)，对于待干燥的有机电致发光器件来讲，红色子像素中的待干燥图案为红色电致发光层R，绿色子像素中的待干燥图案为绿色电致发光层G，蓝色子像素中的待干燥图案为蓝色电致发光层B，对应的，基底22上的三个加热源23构成一组(点画线框内的三个加热源23)，每组中的三个加热源23分别用于对红色电致发光层R、绿色电致发光层G、蓝色电致发光层B三个待干燥图案加热，用于对红色电致发光层R加热的加热源23的横截面形状与红色电致发光层R的形状相同，用于对绿色电致发光层G加热的加热源23的横截面形状与绿色电致发光层G的形状相同，用于对蓝色电致发光层B加热的加热源23的横截面形状与蓝色电致发光层B的形状相同。
示例性的，如图5所示，同时喷墨打印形成60微米×150微米的红色电致发光层R、78微米×204微米的绿色电致发光层G、78微米×234微米的蓝色电致发光层B，对应的，将喷墨打印后的器件放入干燥箱中干燥，加热源23作用于子像素中开口区域，按照热板20上的对位标记(mark)，将不同颜色的子像素分别对应不同温度的加热源23，红、绿、蓝三种子像素分别对应的加热源23的温度和横截面积不同。例如，根据红色电致发光层R、绿色电致发光层G、蓝色电致发光层B内溶剂挥发速率调节加热源23的温度，用于加热红色电致发光层R的加热源23的横截面积为60微米×150微米，用于加热绿色电致发光层G的加热源23的横截面积为78微米×204微米，用于加热蓝色电致发光层B的加热源23的横截面积为78微米×234微米，即加热源23与待干燥器件30的接触面积分别和开口区内红、绿、蓝三个子像素的开孔大小相同(开孔区域用于喷墨打印有机薄膜)。从而保证红色电致发光层R、绿色电致发光层G、蓝色电致发光层B同时干燥。
加热源23直接作用于子像素的开口区域，由于加热源23是在真空腔体10中对待干燥器件30加热，没有空气作为传输介质，相互之间温度不会造成串扰(crosstalk)。
或者，加热源23与像素的开口区域不直接接触，例如，加热源23可以和开口区域有例如约10nm以下的距离，利用真空环境内热辐射的原理对像素进行加热。
对于干燥箱中的待干燥图案来讲，影响干燥均匀性的因素即为给液体施加的温度、溶剂的饱和蒸汽压和液体的比表面积。例如，对于图5中的结构来讲，S R/V R≠S G/V G≠S B/V B。
关于确定每个加热源23的加热温度：根据马扎克公式，有机液体的蒸发速率Gs＝(5.38+4.1u)P vFM 1/2，其中，Gs为有机溶剂蒸发量，u为中空干燥箱环境下空气流动速率，Pv为有机溶剂的饱和蒸汽压，F为有机溶剂挥发的比表面积(即，表面积与体积比S/V)，M为有机溶剂分子量。因此，蒸发速率与饱和蒸汽压有关，而饱和蒸汽压又与施加的温度有关。根据安托因(Antoine)公式，ln(Pv)＝9.3876-3826.36/(T-45.47)(T在290K～500K之间)，得出饱和蒸汽压和温度的关系，Pv＝e 9 . 3876-3826.36/(T-45.47)。
蒸发速率Gs＝(5.38+4.1u)e 9.3876-3826.36/(T-45.47)FM 1/2，在同一个干燥箱中，要使红色电致发光层R、绿色电致发光层G、蓝色电致发光层B同时干燥，也就是使得三者的蒸发速率相等，即，
Figure PCTCN2019081305-appb-000001
即为：
Figure PCTCN2019081305-appb-000002
即，
Figure PCTCN2019081305-appb-000003
F为待干燥图案的比表面积S/V。
例如，喷墨打印常用的溶剂为苯甲醚，若固定对红色电致发光层R的加热温度是20℃，苯甲醚对应的饱和蒸汽压是0.257，分别计算出红色电致发光层R、绿色电致发光层G、蓝色电致发光层B墨水的比表面积。就可以根据绿色电致发光层G、蓝色电致发光层B的温度和比表面积比例分配，通过上述公式计算出对绿色电致发光层G和蓝色电致发光层B的加热温度。
以下，表一是常用的液滴体积与液滴半径对应的比表面积，表二是喷墨打印中经常用到的一些溶剂在不同温度下对应的饱和蒸汽压。
表一液滴体积与液滴半径对应的比表面积
墨滴体积 墨滴半径 比表面积
V/pl R/um S/V mm -1
1 6.203504909 483597586.2
5 10.60784418 56561916.81
10 13.36504618 22446611.56
15 15.29915871 13072614.24
表二溶剂的温度与饱和蒸汽压的对应关系
  10℃ 15℃ 20℃ 23℃ 25℃ 30℃ 40℃ 50℃ 100℃
水 1.2281 1.7056 2.3388 2.8104 3.169 4.2455 7.3814 12.344 100
乙二醇     0.008 0.01 0.012 0.017 0.034 0.065 2.169
苯甲醚     0.257 0.312 0.354 0.483 0.873 1.52  
丙三醇     0.001 0.001 0.001 0.002 0.003    
二乙二醇丁醚     0.008 0.01 0.012 0.017 0.034 0.066 1.1
二乙二醇单甲醚   0.122 0.17 0.209 0.238 0.327 0.597    
正丁基苯   4.70E-02 0.067 0.082 0.094 0.131 0.247    
二苯醚     0.003 0.003 0.004 0.005 0.011 0.023  
苯基环己烷     0.006 0.007 0.008 0.012 0.024 0.047  
苯乙醚     0.131 0.16 0.182 0.252 0.464 0.824  
异丙醇     5.9 7 7.8 10.1 16.5 26.4  
在一些实施例中，由于发同种颜色光的子像素中待干燥图案的比表面积是相同的，因此，用于对发同种颜色光的子像素加热的加热源23的温度也是相同的。基于此，如图6所示，本公开实施例的干燥箱还包括用于调整加热源23的温度的温度控制器40。例如，对发同种颜色光的子像素加热的加热源23连接同一温度控制器40。
也就是对红色电致发光层R加热的多个加热源23连接同一温度控制器40、对绿色电致发光层G加热的多个加热源23连接同一温度控制器40、对蓝色电致发光层B加热的多个加热源23连接同一温度控制器40。
温度控制器40对加热源23的温度调节是依据与加热源23对应的待干燥图案的比表面积，参考上述的原理，确定每个加热源23的温度。此处，可以是将每个待干燥图案的比表面积输入至温度控制器40，温度控制器40计算出加热温度，也可以是其他部件计算出加热温度，温度控制器40依据计算结果控制加热温度，当然，也可以是其他方式。
在一些实施例中，为了进一步避免加热源23之间温度的串扰，例如，如图7和图8所示，基底22上设置有凹槽，加热源23设置在凹槽内，干燥箱还包括控制结构50。控制结构50用于控制加热源23沿基底22的厚度方向上下移动。
凹槽的形状可以使加热源放置在其内，也就是说，凹槽在基底22上的正投影必然覆盖与该凹槽对应的加热源23在基底22上的正投影。在一些实施例中，凹槽的深度大于加热源23沿基底22的厚度方向上的长度。
在干燥过程中，升起控制结构50以控制加热源23沿远离基底22的方向移动(如图8中的虚线)使加热源23撑起待干燥器件30，加热完成后，控制结构50控制加热源23沿靠近基底22的方向移动，使加热源23放置在基底22内。
例如，在一些实施例中，为了精准的实时控制加热源23的温度，温度控制器40例如为设置有热电偶的电加热结构，电加热结构根据热电偶反馈的温度实时调整输出电流。
加热源23温度控制原理：通过外加电流对像素单元进行加热，通过热电偶反馈温度形成闭环系统来实时调控加热源23的输出电流，例如，利用比例积分微分(PID，Proportion Integral Differential coefficient)来调整温度的数值，以此给不同待加热图案不同的温度控制。
上面虽然以像素单元包括红、绿、蓝三个子像素的情况进行了说明，但是，本公开的实施例不限于上述实施例的内容，例如，像素单元还可以包括其他颜色的子像素单元，这样，对应的加热源组也包括对应的加热源23以及相应的加热点。
本公开实施例还提供一种干燥箱的控制方法，包括：
控制各加热点21的加热温度，以使待干燥器件30中的各待干燥图案在干燥箱内具有相同的蒸发速率。
干燥箱中的其他干燥条件固定，加热点21的加热温度不完全相同，即，加热温度部分不同部分相同，而与各待干燥图案对应的加热点21的加热温度的获取方法如上述。
本公开实施例提供的干燥箱的控制方法，在干燥过程中，通过向同一待干燥器件30的不同待干燥图案施加不同的温度，从而使不同待干燥图案中溶剂的蒸发速率相同，以提高不同待干燥图案表面的均匀性。
在一些实施例中，该控制方法还包括：
控制加热源23移动，以使加热源23向远离基底22的方向移动。
也就是说，控制加热源23升起，使待干燥器件30与基底22之间具有一定的距离。例如，可以是在将待干燥器件30放置在干燥箱中后在升起加热源23，也可以是先升起加热源23再将待干燥器件30放入干燥箱中。
本公开实施例还提供一种有机电致发光器件的制备方法，包括：
S10、在基板上形成有机电致发光器件的待干燥图案。
待干燥图案是由有机材料溶解在溶剂中后获得的溶液形成的，此时待干燥图案呈液态。在基板上形成待干燥图案，可以是采用溶液工艺在基板上形成待干燥的空穴注入层或者待干燥的空穴传输层或者待干燥的电致发光层等。
以形成电致发光层为例，在红色子像素中形成的待干燥的红色电致发光层、在绿色子像素中形成的待干燥的绿色电致发光层和在蓝色子像素中形成的待干燥的蓝色电致发光层的图案不完全相同。
S20、将形成有待干燥图案的基板对位放置在上述干燥箱的热板20上进行干燥。
例如，由于在干燥过程中，干燥箱根据各色电致发光层图案需要的加热温度的不同来控制对应于所述各色电致发光层图案的各加热点21的温度，可使液态有机膜层各区域干燥的比较均匀，从而提高有机电致发光器 件的良率。
本公开实施例提供一种干燥箱及其控制方法、有机电致发光器件的制备方法，由于液体的蒸发速率与对液体施加的温度有关，本公开实施例通过将热板上的加热点的温度设置为不完全相同，并且对热板上加热点的温度可独立控制，这样一来，向同一待干燥器件的不同待干燥图案施加不同的温度，从而使不同待干燥图案中溶剂的蒸发速率相同，以提高不同待干燥图案表面的均匀性。
以下几点需要说明：
(1)本公开实施例附图中，只涉及到与本公开实施例涉及到的结构，其他结构可参考通常设计。
(2)在不冲突的情况下，本公开同一实施例及不同实施例中的特征可以相互组合。
以上所述，仅为本公开的示例实施方式，但本公开的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本公开揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本公开的保护范围之内。

Claims (14)

  1. 一种干燥箱，包括腔体和设置在所述腔体内的热板，
    所述热板包括多个加热点，所述多个加热点朝向所述热板的配置来承载待干燥器件的表面设置，以及所述多个加热点的温度部分不同，且相互绝热。
  2. 根据权利要求1所述的干燥箱，其中，所述热板包括基底和设置在所述基底上的多个相互独立的加热源，所述基底为绝热材料。
  3. 根据权利要求2所述的干燥箱，其中，所述热点为所述加热源在所述热板上的顶端部分，或者所述热点为对应于所述加热源在所述热板上的正投影的点或区域。
  4. 根据权利要求2或3所述的干燥箱，其中，多个所述加热源在所述基底上的正投影的形状部分不同。
  5. 根据权利要求2-4任一项所述的干燥箱，还包括配置来调整所述加热源的温度的温度控制器；
    每个所述温度控制器连接对应的所述加热源；
    或者，
    在所述基底上的正投影的形状相同的所述加热源连接同一所述温度控制器。
  6. 根据权利要求2-5任一项所述的干燥箱，其中，所述干燥箱配置来干燥待干燥有机电致发光器件，所述基底上的多个所述加热源分为多组，每组中的多个所述加热源垂直于所述基底的厚度方向上的截面形状分别与待干燥有机电致发光器件的每个像素单元中的多个子像素内的待干燥图案的形状相同。
  7. 根据权利要求6所述的干燥箱，还包括配置来调整所述加热源的温度的温度控制器，以及配置来对发同种颜色光的子像素加热的所述加热 源连接同一所述温度控制器。
  8. 根据权利要求2-7任一项所述的干燥箱，其中，所述基底上设置有凹槽，所述加热源设置在所述凹槽内，所述干燥箱还包括控制结构，所述控制结构配置来控制所述加热源沿所述基底的厚度方向上下移动。
  9. 根据权利要求5-8任一项所述的干燥箱，其中，所述温度控制器为设置有热电偶的电加热结构，所述电加热结构根据所述热电偶反馈的温度实时调整输出电流。
  10. 一种干燥箱的控制方法，所述干燥箱包括腔体和设置在所述腔体内的热板，所述热板包括多个加热点，所述多个加热点朝向所述热板的配置来承载待干燥器件的表面设置，以及所述多个加热点的温度不同且相互绝热，所述控制方法包括：
    控制所述多个加热点的每个的加热温度，以使待干燥器件中的各待干燥图案在所述干燥箱内具有相同的蒸发速率。
  11. 根据权利要求10所述的控制方法，其中，所述热板包括基底和设置在所述基底上的多个相互独立的加热源，所述基底为绝热材料，所述控制方法还包括：
    控制所述加热源的移动，以使所述加热源向远离基底的方向移动。
  12. 根据权利要求11所述的控制方法，其中，所述热点为所述加热源在所述热板上的顶端部分，或者所述热点为对应于所述加热源在所述热板上的正投影的点或区域。
  13. 一种有机电致发光器件的制备方法，包括：
    在基板上形成有机电致发光器件的待干燥图案；以及
    将形成有待干燥图案的基板对位放置在权利要求1-9任一项所述的干燥箱的热板上进行干燥。
  14. 根据权利要求13所述的制备方法，其中，所述在基板上形成有 机电致发光器件的待干燥图案包括：
    采用溶液工艺在基板上形成待干燥的空穴注入层、待干燥的空穴传输层、待干燥的电致发光层。
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