WO2019144595A1 - 壳体、移动终端及溅射镀膜装置 - Google Patents

壳体、移动终端及溅射镀膜装置 Download PDF

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Publication number
WO2019144595A1
WO2019144595A1 PCT/CN2018/099033 CN2018099033W WO2019144595A1 WO 2019144595 A1 WO2019144595 A1 WO 2019144595A1 CN 2018099033 W CN2018099033 W CN 2018099033W WO 2019144595 A1 WO2019144595 A1 WO 2019144595A1
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WO
WIPO (PCT)
Prior art keywords
film layer
thickness
substrate
bearing surface
housing
Prior art date
Application number
PCT/CN2018/099033
Other languages
English (en)
French (fr)
Inventor
林佩玲
原泽
伍国平
黎欣
李孟
戴小军
聂晶晶
Original Assignee
华为技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 华为技术有限公司 filed Critical 华为技术有限公司
Priority to AU2018405017A priority Critical patent/AU2018405017B2/en
Priority to EP18902388.0A priority patent/EP3722452B1/en
Priority to US16/965,190 priority patent/US20210072442A1/en
Priority to EP22192043.2A priority patent/EP4198161B1/en
Priority to CN201880087736.3A priority patent/CN111655897A/zh
Priority to ES18902388T priority patent/ES2932762T3/es
Publication of WO2019144595A1 publication Critical patent/WO2019144595A1/zh
Priority to AU2022201490A priority patent/AU2022201490B2/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C23C14/0652—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/44—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by a measurable physical property of the alternating layer or system, e.g. thickness, density, hardness
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32633—Baffles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3417—Arrangements
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04B—TRANSMISSION
    • H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
    • H04B1/38—Transceivers, i.e. devices in which transmitter and receiver form a structural unit and in which at least one part is used for functions of transmitting and receiving
    • H04B1/3827—Portable transceivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04M—TELEPHONIC COMMUNICATION
    • H04M1/00—Substation equipment, e.g. for use by subscribers
    • H04M1/02—Constructional features of telephone sets
    • H04M1/0202—Portable telephone sets, e.g. cordless phones, mobile phones or bar type handsets
    • H04M1/0279—Improving the user comfort or ergonomics
    • H04M1/0283—Improving the user comfort or ergonomics for providing a decorative aspect, e.g. customization of casings, exchangeable faceplate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y10T428/24364—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.] with transparent or protective coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness

Definitions

  • the present application relates to the field of electronic devices, and in particular, to a housing, a mobile terminal, and a sputter coating device.
  • the current back cover of the mobile phone usually has only one main body color on the product after the conventional coating, that is, only a single color tone, resulting in a monotonous appearance of the mobile phone.
  • Embodiments of the present application provide a housing and a mobile terminal having a gradation color, and a sputter coating apparatus for forming the housing.
  • an embodiment of the present application provides a housing.
  • the housing is applied to a mobile terminal.
  • the housing includes a substrate and a composite film layer plated on the substrate.
  • the composite film layer includes a multilayer film layer.
  • the thickness of the combined film layer decreases or increases in a first direction, and a difference in film thickness between any two of the combined film layers arranged in the first direction is less than or equal to 350 nanometers (nm) to
  • the housing is rendered to have a gradation of color having a wavelength in the range of 400 nanometers to 760 nanometers.
  • the casing can exhibit a gradation color, so that the appearance of the casing is richer, Diverse. And, since the difference in film thickness between any two of the combined film layers arranged in the first direction is less than or equal to 350 nm, the case can exhibit a wavelength in a range of 400 nm to 760 nm.
  • the color that is, the shell can exhibit an iridescent color such as red, orange, yellow, green, blue, enamel, purple, etc., and the rainbow color presented is gradual, so the appearance of the shell is more sensuous Well, to meet the customer's color experience needs.
  • the combined film layer has a thickness of 50 nm or more and 400 nm or less.
  • the thickness of the composite film layer along the first direction exhibits a gentle curve change to make the appearance change of the casing more natural and gentle.
  • the thickness of the combined film layer decreases or increases in a second direction, and the second direction intersects the first direction.
  • the thickness of the composite film layer is simultaneously decreasing or increasing in a plurality of directions, so that the housing can exhibit a more flexible gradient color.
  • the thickness of the composite film layer may also decrease or increase in other directions than the first direction and the second direction.
  • an angle between the second direction and the first direction is less than or equal to 90°.
  • the combined film layer has the same thickness variation tendency in the first direction and the second direction.
  • the same trend in thickness change means that the same is increasing or the same is decreasing.
  • the second direction is perpendicular to the first direction when the substrate is substantially rectangular, the first direction is a long side direction of the substrate, and the second direction is a short length of the substrate Side direction.
  • the composite film layer includes a first film layer and a second film layer that are stacked.
  • the refractive index of the coating material used in the first film layer is different from the refractive index of the plating material used in the second film layer.
  • the first film layer and the second film layer have the same thickness variation trend in the same direction. In other words, the thickness of the first film layer and the second film layer in the same direction are both increasing or decreasing.
  • the thickness of the first film layer and the second film layer in the same direction is increased or decreased by substantially the same degree.
  • the coating material used in the first film layer and the coating material used in the second film layer may be matched by a high refractive index coating material and a low refractive index coating material, so that the coating system formed by the two is A better coating effect is formed on the surface of the substrate, for example, such that the combined film layer can reflect a relatively large wavelength of light while maintaining a small thickness, thereby making the casing satisfy a higher experience.
  • Demand such as thin, bright colors, rich colors, etc.).
  • the number of the first film layers is a plurality of layers.
  • the number of the second film layers is a plurality of layers.
  • the plurality of the first film layers and the plurality of the second film layers are alternately stacked one on another.
  • the first film layer is made of a titanium oxide material
  • the second film layer is made of a silicon oxide material.
  • the combined film layer is located on an inner surface of the substrate, the inner surface facing an interior of the mobile terminal.
  • the flatness of the outer surface of the substrate opposite to the inner surface is high, so that when the user holds the mobile terminal The feel is better.
  • the film layer closest to the substrate among the combined film layers is the first film layer.
  • the combined film layer comprises two layers of the first film layer and two layers of the second film layer, and two layers of the first film layer and two layers of the second film layer are alternately stacked one on another.
  • the number of the first film layers and the number of the second film layers may also be other.
  • the first film layer is made of a silicon nitride material
  • the second film layer is made of a silicon oxide material.
  • the combined film layer is on an outer surface of the substrate, the outer surface facing an exterior of the mobile terminal.
  • the first film layer since the first film layer is made of a silicon nitride material, the first film layer has high wear resistance, and the combined film layer has high wear resistance, so the combined film The layer can be placed on the outer surface of the substrate and has a long life.
  • the combined film layer includes four layers of the first film layer and three layers of the second film layer, and four layers of the first film layer and three layers of the second film layer are alternately stacked one on another.
  • the number of the first film layers and the number of the second film layers may also be other.
  • the target material of high refractive index may be titanium oxide (TiO 2 ), silicon nitride (Si 3 N 4 ), zirconia, zinc oxide or the like.
  • the low refractive index target material may be silicon oxide (SiO 2 ), silicon fluoride or the like.
  • the composite film layer includes a first region, a second region, and a third region having the same area.
  • the first region, the second region, and the third region are sequentially arranged at equal intervals in the first direction.
  • a difference between an average film thickness of the first region and an average film thickness of the second region is a first value.
  • the difference between the average film thickness of the second region and the average film thickness of the third region is a second value.
  • the ratio of the first value to the second value is in the range of 0.5 to 2.0.
  • the first region, the second region, and the third region are sequentially arranged in the first direction, the first region, the second region, and the first The three regions are able to present a gradual change in color.
  • the ratio of the first value to the second value is in the range of 0.5 to 2.0, that is, the first value is similar to or the same as the second value, and the first region and the second region are
  • the third area has the same area, so the first area, the second area, and the third area that are equally spaced can present adjacent colors that are sequentially gradual, and each adjacent color has A larger presentation area, that is, each adjacent color can be more fully presented on the housing, and can avoid sensory discomfort caused by a sudden color change in a similar area due to a too short color.
  • the appearance of the housing is better, which improves the user experience.
  • the ratio of the first value to the second value is in the range of 0.8 to 1.2, the color change on the casing is more gentle, and the user experience is better.
  • the substrate is made of one or more of a glass material, a polycarbonate (PC), a polyethylene terephthalate (PET), a metal, and a ceramic material. The combination.
  • the gradation colors include adjacent purple, blue, and cyan colors.
  • cyan has a wavelength range of 492 nm to 480 nm.
  • the blue wavelength range is from 480 nm to 455 nm.
  • the wavelength of purple ranges from 455 nm to 350 nm.
  • the embodiment of the present application further provides a mobile terminal.
  • the mobile terminal includes a housing.
  • the mobile terminal can be any device with communication and storage functions, such as: tablet, mobile phone, e-reader, remote control, personal computer (PC), notebook computer, car device, network television, wearable device Such as smart devices with network capabilities.
  • an embodiment of the present application further provides a sputter coating apparatus.
  • the sputter coating apparatus can be used to fabricate the housing of any of the above embodiments.
  • the sputter coating apparatus includes a coating chamber, a susceptor, a plurality of targets, and a plurality of baffles.
  • the pedestal is disposed inside the coating chamber.
  • the outer side of the base has a bearing surface for fixing the substrate.
  • the bearing surface is opposite to and spaced from the inner wall of the coating chamber to form a coating space between the bearing surface and the inner wall.
  • the plurality of targets are housed in the coating space and are fixed to the inner wall at intervals.
  • the plurality of baffles are received in the coating space and are disposed opposite to the plurality of targets in a one-to-one correspondence.
  • the plurality of baffles are also facing the bearing surface.
  • Each of the baffles includes at least one blind unit.
  • the blocking unit includes at least two strip-shaped flaps arranged in a third direction.
  • the at least two strip-shaped flaps extend in a fourth direction perpendicular to the third direction.
  • the length of the at least two strip-shaped flaps in the fourth direction is increased or decreased in the third direction to unevenly block the plurality of targets to form a thickness on the substrate
  • the combined film layer is decremented or incremented.
  • the block of the baffle of the baffle since the baffle faces the plurality of targets to block the plurality of targets, the block of the baffle of the baffle has a longer length of the strip baffle
  • the occlusion area of the strip-shaped baffle having a large area and a short length is small, and the length of the at least two strip-shaped baffles in the occlusion unit is increased or decreased, so that the occlusion unit can
  • the plurality of targets are unevenly shielded such that the target atoms of the plurality of targets overflow and are transferred to the substrate in an amount that is non-uniform, the plurality of targets being capable of forming a thickness on the substrate
  • the combined film layer is decremented or incremented such that the housing is capable of exhibiting a gradation.
  • the length of the at least two strip-shaped flaps in the fourth direction is along the third direction (that is, the at least two strips)
  • the arrangement direction of the flaps is incremented or decremented, so that the thickness of the combined film layer formed on the substrate is decreased or increased in the third direction.
  • the same direction on the substrate as the third direction is the first direction.
  • the incremental or decreasing variation of the at least two strip-shaped flaps during the coating process will also affect the variation of the thickness of the composite film layer in the other directions.
  • the second direction that is at an angle of less than or equal to 90° with the first direction decreases or increases in thickness in the second direction.
  • the bearing surface is a cylindrical surface.
  • the bearing surface has at least one fixing area arranged in the circumferential direction of the bearing surface.
  • the sputter coating apparatus further includes a driving member for driving the susceptor to rotate at a preset rotational speed such that the bearing surface carries the substrate to rotate about an axis of the bearing surface.
  • more of the fixed area can be arranged such that the carrying surface can carry more of the substrate.
  • the driving member drives the susceptor to rotate, the target atoms sputtered by the plurality of targets are sequentially plated on the substrates of different fixed regions, thereby realizing batch coating.
  • the driving member controls the base to rotate at a preset rotation speed, the coating time and the coating thickness of the plurality of substrates fixed on the bearing surface can be relatively reliably controlled, thereby improving the shell. The yield of the body.
  • each of the fixed regions includes a plurality of fixed regions arranged in an axial direction of the bearing surface.
  • a single of the fixed areas is used to secure one of the substrates.
  • the shielding unit of the baffle is arranged in the axial direction of the bearing surface.
  • the number of the shutter units of a single of the baffles is the same as the number of the fixed zones of a single of the fixed areas.
  • each of the fixed regions includes a plurality of fixed regions, so that a plurality of the substrates can be simultaneously fixed.
  • the baffle includes a plurality of the shielding units corresponding to the plurality of the substrates, so that a plurality of the substrates can be simultaneously coated, so that the sputter coating device can be fabricated in a larger batch. Said housing.
  • the plurality of targets are fixed to the inner wall at equal intervals in the circumferential direction of the bearing surface. At this time, the plurality of targets can simultaneously sputter the target atoms, and the target atoms are transferred to different substrates to form a corresponding film layer, thereby improving the processing efficiency of the substrate. Moreover, the plurality of targets are disposed at intervals, and mutual influence can also be avoided, so that the yield of the casing is high. Since the plurality of baffles have the same structure, the gradual tendency of the plurality of targets to form different film layers on the substrate is substantially the same, so that the quality of the combined film layer is more controllable.
  • the plurality of targets comprise a first target and a second target, the first target and the second target having different refractive indices. Since the structures of the plurality of baffles are the same, a thickness variation tendency of the first film formed on the substrate by the first target and a second formation of the second target on the substrate The thickness of the different layers of the two layers is the same.
  • the materials of the first target and the second target may be matched with a high refractive index coating material and a low refractive index coating material, so that a coating system formed by the two forms on the surface of the substrate.
  • a better coating effect allows the composite film layer to reflect light of a relatively large wavelength while maintaining a small thickness, thereby enabling the housing to meet higher experience requirements.
  • the first target is made of a titanium oxide material and the second target is made of a silicon oxide material.
  • the first target is made of a silicon nitride material, and the second target is made of a silicon oxide material.
  • other high refractive index target materials and low refractive index target materials can also be used to achieve the coating effect.
  • the target material of high refractive index may be titanium oxide (TiO 2 ), silicon nitride (Si 3 N 4 ), zirconia, zinc oxide or the like.
  • the low refractive index target material may be silicon oxide (SiO 2 ), silicon fluoride or the like.
  • the number of the first film layer formed by the first target and the number of the second film layer formed by the second target may be controlled by the number of revolutions of the bearing surface.
  • the same ends of the at least two strips are aligned with each other. At this time, the same other end of the at least two strip-shaped flaps are sequentially protruded.
  • the shielding effect of the baffle is relatively controllable.
  • the baffle further includes a support member, and one of the aligned ends of the at least two strip-shaped flaps of the baffle is fixed to the support member. The support member is fixed to the coating chamber.
  • the at least two strips include a first flap, a second flap, and a third flap that are sequentially arranged.
  • a difference between the lengths of the third flap and the second flap in the fourth direction is a first difference.
  • a difference between a length of the second flap and the first flap in the fourth direction is a second difference.
  • the ratio of the second difference to the first difference is in the range of 0.5 to 2.0.
  • the ratio of the second difference value to the first difference value is in a range of 0.5 to 2.0, that is, the second difference value is close to or the same as the first difference value
  • the length of the at least two strip-shaped flaps is relatively flat, so that the film thickness of the different regions of the combined film layer is relatively gentle, so that each adjacent color can be more sufficiently presented to avoid A certain color is too short to cause sensory discomfort caused by a sudden color change in a similar area, so that the appearance of the casing is better, thereby improving the user experience.
  • the ratio of the second difference to the first difference is in the range of 0.8 to 1.2, the film thickness of the different regions of the combined film layer changes more gently, and the color change on the casing Relax and better user experience.
  • FIG. 1 is a schematic structural diagram of a mobile terminal according to an embodiment of the present disclosure
  • FIG. 2 is a schematic view of the housing of the mobile terminal shown in Figure 1;
  • Figure 3 is a schematic structural view of the housing of Figure 2 taken along line A-A;
  • Figure 4 is a schematic structural view of an embodiment of the housing shown in Figure 2;
  • Figure 5 is a schematic structural view of another embodiment of the housing of Figure 2;
  • FIG. 6 is a schematic structural view of a sputter coating apparatus provided by an embodiment of the present application.
  • Figure 7 is a schematic view showing the structure of another embodiment of the sputter coating apparatus shown in Figure 6;
  • Figure 8 is a partial structural view of the sputter coating device shown in Figure 6;
  • Fig. 9 is a view showing the structure of a shutter unit of the baffle plate of the sputter coating apparatus shown in Fig. 6.
  • the mobile terminal 100 can be any device having communication and storage functions, such as: tablet, mobile phone, e-reader, remote controller, personal computer (PC), notebook computer, car device, network television, wearable A smart device with network capabilities such as devices.
  • PC personal computer
  • the mobile terminal 100 includes a housing 200.
  • the housing 200 includes a substrate 1 and a composite film layer 2 plated on the substrate 1.
  • the composite film layer 2 comprises a multilayer film layer.
  • the thickness of the combined film layer 2 is decreased or increased along the first direction X, and the difference in film thickness between any two of the combined film layers 2 arranged along the first direction X is less than or equal to 350 nm ( Nm) such that the housing 200 exhibits a gradation of color having a wavelength in the range of 400 nanometers to 760 nanometers.
  • the housing 200 may be a back cover of the mobile terminal 100.
  • the housing 200 may also include a middle frame of the mobile terminal 100.
  • the casing 200 can exhibit a gradation color, so that the appearance of the casing 200 The color is richer and more diverse.
  • the housing 200 can exhibit a wavelength of 400 nm to 760 nm.
  • the color within the range, that is, the housing 200 can exhibit an iridescent color such as red, orange, yellow, green, blue, enamel, purple, etc., and the rainbow color presented is gradual, so the housing 200 The look and feel of the color is better, to meet the customer's color experience needs.
  • the combined film layer 2 utilizes the principle of multi-layer nano film optical interference to achieve a reflective effect of a plurality of colors.
  • the X direction in the drawings of the present application is an example of the first direction described in the application, and does not constitute a limitation on the first direction. In other embodiments, the first direction may also be other directions, such as a direction opposite to the X direction.
  • the increments or decrements referred to in this application include, but are not limited to, increasing or decreasing along a curve.
  • the combined film layer 2 has a thickness of 50 nm or more and 400 nm or less.
  • the thickness of the combined film layer 2 in the first direction X exhibits a gentle curve change to make the appearance change of the casing 200 more natural and gentle.
  • the difference in film thickness between any two regions refers to the difference in film thickness at the center point of each of the two regions.
  • the red wavelength ranges from 770 nm to 622 nm.
  • the orange wavelength range is from 622 nm to 597 nm.
  • the yellow wavelength ranges from 597 nm to 577 nm.
  • the green wavelength ranges from 577 nm to 492 nm.
  • Cyan ( ⁇ ) has a wavelength range of 492 nm to 480 nm, and blue has a wavelength range of 480 nm to 455 nm.
  • the wavelength of purple ranges from 455 nm to 350 nm.
  • the thickness of the composite film layer 2 decreases or increases in the second direction Y.
  • the second direction Y intersects the first direction X.
  • the thickness of the combined film layer 2 is simultaneously decreased or increased in a plurality of directions, so that the casing 200 can exhibit a more flexible gradation.
  • the thickness of the composite film layer 2 may also be decreased or increased in other directions than the first direction X and the second direction Y.
  • the angle between the first direction X and the second direction Y is less than or equal to 90°.
  • the thickness variation trend of the combined film layer 2 in the first direction X and the second direction Y is the same.
  • the same trend in thickness change means that the same is increasing or the same is decreasing.
  • the Y direction in the drawings of the present application is an example of the second direction described in the application, and does not constitute a limitation on the second direction.
  • the second direction may also be other directions, such as a direction opposite to the Y direction.
  • the composite film layer 2 includes a first film layer (211/221) and a second film layer (212/222) which are disposed in a stack.
  • the refractive index of the coating material used in the first film layer (211/221) is different from the refractive index of the plating material used in the second film layer (212/222).
  • the first film layer (211/221) and the second film layer (212/222) have the same thickness variation trend in the same direction. In other words, the thicknesses of the first film layer (211/221) and the second film layer (212/222) in the same direction are both increasing or decreasing.
  • the thickness of the first film layer (211/221) and the second film layer (212/222) in the same direction is increased or decreased by substantially the same degree.
  • the coating material used in the first film layer (211/221) and the coating material used in the second film layer (212/222) can be matched with a high refractive index coating material and a low refractive index coating material.
  • the coating system formed by the two forms a better coating effect on the surface of the substrate 1, for example, the combined film layer 2 can reflect a relatively large wavelength while maintaining a small thickness. So that the housing 200 meets higher experience requirements (such as thin, bright colors, rich colors, etc.).
  • the number of the first film layers (211/221) is a plurality of layers.
  • the number of the second film layers (212/222) is a plurality of layers.
  • the plurality of first film layers (211/221) and the plurality of second film layers (212/222) are alternately stacked one on another.
  • the first film layer 211 is made of a titanium oxide material
  • the second film layer 212 is made of a silicon oxide material.
  • the combined film layer 2 is located on the inner surface 11 of the substrate 1, which faces the interior of the mobile terminal 100.
  • the flatness of the outer surface 12 of the substrate 1 opposite to the inner surface 11 is high, so that the user holds The hand feeling when holding the mobile terminal 100 is better.
  • the film layer closest to the substrate 1 in the combined film layer 2 is the first film layer 211.
  • the combined film layer 2 includes two layers of the first film layer 211 and two layers of the second film layer 212, two layers of the first film layer 211 and two layers of the second film layer 212 alternately Cascading settings.
  • the number of the first film layer 211 and the number of the second film layer 212 may also be other.
  • the first film layer 221 is made of silicon nitride material
  • the second film layer 222 is made of silicon oxide material.
  • the combined film layer 2 is located on the outer surface 12 of the substrate 1, which faces the exterior of the mobile terminal 100.
  • the first film layer 221 is made of a silicon nitride material
  • the wear resistance of the first film layer 221 is high
  • the wear resistance of the composite film layer 2 is high, so The composite film layer 2 can be placed on the outer surface 12 of the substrate 1 and has a long service life.
  • the film layer closest to the substrate 1 in the combined film layer 2 is the first film layer 221.
  • the combined film layer 2 includes four layers of the first film layer 221 and three layers of the second film layer 222, four layers of the first film layer 221 and three layers of the second film layer 222 are alternately Cascading settings.
  • the number of the first film layer 221 and the number of the second film layer 222 may also be other.
  • the target material of high refractive index may be titanium oxide (TiO 2 ), silicon nitride (Si 3 N 4 ), zirconia, zinc oxide or the like.
  • the low refractive index target material may be silicon oxide (SiO 2 ), silicon fluoride or the like.
  • the composite film layer 2 comprises a film layer of 3 to 10 layers.
  • the composite film layer 2 includes a first region 23, a second region 24, and a third region 25 having the same area.
  • the first region 23, the second region 24, and the third region 25 are sequentially arranged at equal intervals in the first direction X.
  • the difference between the average film thickness of the first region 23 and the average film thickness of the second region 24 is a first value.
  • the difference between the average film thickness of the second region 24 and the average film thickness of the third region 25 is a second value.
  • the ratio of the first value to the second value is in the range of 0.5 to 2.0.
  • the first region 23 and the second region 24 and the third region 25 are sequentially arranged in the first direction X, the first region 23 and the second region are The region 24 and the third region 25 are capable of exhibiting successively graded colors. Since the ratio of the first value to the second value is in the range of 0.5 to 2.0, that is, the first value is similar to or the same as the second value, and the first region 23, the second The area 24 and the third area 25 have the same area, so the first area 23, the second area 24, and the third area 25, which are equally spaced, can present adjacent colors that are sequentially graded, and adjacent Each color has a larger presentation area, that is, each adjacent color can be more fully presented on the housing 200, and can avoid a color change in a similar area due to a too short color. The resulting sensory discomfort makes the appearance of the housing 200 better, thereby improving the user experience.
  • the above “average film thickness” refers to the average value of the film thickness of each point in the corresponding region (including at least 5 points as sampling points), so the average film thickness of the region can reflect the corresponding region Approximate color.
  • the first region 23, the second region 24, and the third region 25 may also be arranged along the second direction Y or other directions.
  • the ratio of the first value to the second value is in the range of 0.8 to 1.2, the color change on the casing is more gentle, and the user experience is better.
  • the housing 200 may also exhibit a relatively large transitional undulation, so that the appearance impact of the housing 200 is strong.
  • the substrate 1 is made of one or more of a glass material, a polycarbonate (PC), a polyethylene terephthalate (PET), a metal or a ceramic material. Combination of species.
  • the gradation colors include adjacent purple, blue, and cyan colors.
  • cyan has a wavelength range of 492 nm to 480 nm.
  • the blue wavelength range is from 480 nm to 455 nm.
  • the wavelength of purple ranges from 455 nm to 350 nm.
  • an embodiment of the present application further provides a sputter coating apparatus 300.
  • the sputter coating apparatus 300 can be used to fabricate the housing 200 of any of the above embodiments.
  • the sputter coating apparatus 300 includes a coating chamber 3, a susceptor 4, a plurality of targets (51/52), and a plurality of baffles 6.
  • the susceptor 4 is disposed inside the coating chamber 3.
  • the outer side of the base 4 has a bearing surface 41 for fixing the substrate 1.
  • the bearing surface 41 is opposed to and spaced apart from the inner wall 31 of the coating chamber 3 to form a coating space 30 between the bearing surface 41 and the inner wall 31.
  • the plurality of targets (51/52) are housed in the coating space 30 and are fixed to the inner wall 31 at intervals.
  • the plurality of baffles 6 are received in the coating space 30 and are disposed in a one-to-one correspondence with the plurality of targets (51/52).
  • the plurality of baffles 6 are also facing the bearing surface 41.
  • Each of the baffles 6 includes at least one shutter unit 60.
  • the shutter unit 60 includes at least two strip-shaped flaps 61 arranged in the third direction X'.
  • the at least two strip-shaped flaps 61 extend in a fourth direction Y' perpendicular to the third direction X'.
  • the length of the at least two strip-shaped flaps 61 in the fourth direction Y' is increased or decreased along the third direction X' to unevenly block the plurality of targets (51/52) Thereby, the combined film layer 2 having a decreasing or increasing thickness is formed on the substrate 1.
  • the sputter coating apparatus 300 bombards the surfaces of the plurality of targets (51/52) with a load of energy particles in a vacuum such that the plurality of targets (51/52) The target atoms of the surface escape from the original lattice and are transferred over the surface of the substrate 1 over the baffle 6 to form the composite film layer 2.
  • the coating principle employed in the sputter coating apparatus 300 is one of NCVM (Non-Conductive Vacuum Metalize) coating techniques.
  • the blocking unit 60 of the baffle 6 since the baffle 6 faces the plurality of targets (51/52) to block the plurality of targets (51/52), the blocking unit 60 of the baffle 6
  • the bar-shaped blocking piece 61 having a long middle length has a larger blocking area, and the blocking area of the strip-shaped blocking piece 61 having a shorter length is smaller, and the at least two strip-shaped blocks in the shielding unit 60
  • the length of the sheet 61 is increased or decreased, so that the blocking unit 60 can perform uneven shielding on the plurality of targets (51/52), so that the target atoms of the plurality of targets (51/52) overflow.
  • the amount transferred to the substrate 1 is not uniform, and the plurality of targets (51/52) are capable of forming the combined film layer 2 having a decreasing or increasing thickness on the substrate 1, thereby causing the
  • the housing 200 can assume a gradation.
  • the length of the at least two strip-shaped flaps 61 in the fourth direction Y' (that is, the extending direction of the strip-shaped flap 61) is along the third direction X' (ie, The arrangement direction of the at least two strip-shaped flaps 61 is incremented or decremented, so that the thickness of the combined film layer 2 formed on the substrate 1 is decreased or increased in the third direction X'.
  • the length of the at least two strip-shaped flaps 61 in the fourth direction Y' is increased along the third direction X', the combined film layer 2 formed on the substrate 1 The thickness decreases in the third direction X'.
  • the same direction on the substrate 1 as the third direction X' is the first direction X.
  • the incremental or decreasing variation of the at least two strip-shaped flaps 61 during the coating process also affects the variation of the thickness of the composite film layer 2 in the other directions.
  • the second direction Y which is at an angle of 90° or less with the first direction X, the thickness of the combined film layer 2 in the second direction Y is decreased or increased.
  • the baffle 6 can be made of stainless steel material, tin foil material or aluminum material.
  • the baffle 6 can be a thinner stainless steel sheet, tin foil paper or aluminum sheet.
  • the baffle 6 is easily cut and modified, so that the shape of the baffle 6 can better meet the demand for uneven occlusion.
  • the at least two strip-shaped flaps 61 are integrally formed.
  • the at least two strip-shaped flaps 61 can be obtained by trimming the same sheet of material.
  • the baffles 6 can also be assembled into a unitary structure by splicing.
  • the same direction on the substrate 1 as the third direction X' may be the second direction Y.
  • the bearing surface 41 is a cylindrical surface.
  • the bearing surface 41 has at least one fastening region 410 arranged in the circumferential direction of the bearing surface 41 which is perpendicular to the axis 411 of the bearing surface 41.
  • the sputter coating apparatus 300 further includes a driving member 7 for driving the susceptor 4 to rotate at a preset rotation speed, so that the bearing surface 41 carries the substrate 1 around the bearing surface The axis 411 of 41 rotates.
  • more of the fixed area 410 can be arranged such that the carrying surface 41 can carry more of the substrate 1.
  • the driving member 7 drives the susceptor 4 to rotate, the target atoms sputtered by the plurality of targets (51/52) are sequentially plated on the substrate 1 of the different fixing regions 410.
  • the driving member 7 controls the base 4 to rotate at a preset rotation speed, the coating time and the coating thickness of the plurality of the substrates 1 fixed on the bearing surface 41 can be relatively reliably controlled, thereby The yield of the casing 200 is increased.
  • the preset rotational speed may include a constant speed section and a shifting section.
  • the target atoms of the plurality of targets (51/52) are plated on the plurality of substrates 1 to have a relatively uniform film thickness.
  • the target atoms of the plurality of targets (51/52) may be unevenly plated on the substrate 1 such that the combined film layer 2 on the substrate 1 Thickness gradient.
  • the second direction Y of the substrate 1 coincides with the circumferential direction of the bearing surface 41.
  • the number of the fixed areas 410 may be greater than or equal to 2.
  • the shape of the bearing surface 41 on a plane perpendicular to the axis 411 of the bearing surface 41 is a polygon.
  • the same fixed area 410 is located on the same side of the polygon.
  • each of the fixing regions 410 is arranged on the upper side of the bearing surface 41 in the axial direction (the direction is parallel to the axis 411 of the bearing surface 41).
  • a plurality of fixed areas 412 of the cloth is used to fix one of said substrates 1.
  • the shielding unit 60 of the baffle 6 is arranged in the axial direction of the bearing surface 41.
  • the number of the shutter units 60 of a single of the baffles 6 is the same as the number of the fixed regions 412 of a single of the fixed regions 410.
  • each of the fixed regions 410 includes a plurality of fixed regions 412 so that a plurality of the substrates 1 can be simultaneously fixed.
  • the baffle 6 includes a plurality of the shielding units 60 corresponding to the plurality of the substrates 1 so that a plurality of the substrates 1 can be simultaneously coated, so that the sputter coating apparatus 300 can be further.
  • the housing 200 is fabricated in large quantities.
  • the plurality of targets (51/52) are fixed to the inner wall 31 at equal intervals in the circumferential direction of the bearing surface 41.
  • the plurality of targets (51/52) are capable of simultaneously sputtering target atoms, and the target atoms are transferred onto different substrates 1 to form corresponding film layers, and the substrate 1 is improved. Processing efficiency.
  • the plurality of targets (51/52) are spaced apart, and mutual influence can also be avoided, so that the yield of the casing 200 is high. Since the structures of the plurality of baffles 6 are the same, the gradation tendency of the different film layers formed on the substrate 1 by the plurality of targets (51/52) is substantially the same, so that the combined film layer 2 The quality is more controllable.
  • the plurality of targets (51/52) include a first target 51 and a second target 52, the first target 51 and the second target 52 having different refractive indices. Since the structures of the plurality of baffles 6 are the same, the thickness variation of the first film layer (211/221) formed on the substrate 1 by the first target 51 and the second target 52 are The thickness of the different film layers of the second film layer (212/222) formed on the substrate 1 has the same tendency.
  • the materials of the first target 51 and the second target 52 may be matched with a high refractive index coating material and a low refractive index coating material, so that the coating system formed by the two is on the substrate 1 A better coating effect is formed on the surface, for example, such that the composite film layer 2 can reflect light having a larger wavelength while maintaining a smaller thickness, thereby making the casing 200 satisfy a higher experience.
  • the first target 51 is made of a titanium oxide material
  • the second target 52 is made of a silicon oxide material.
  • the first target 51 is made of a silicon nitride material
  • the second target 52 is made of a silicon oxide material.
  • the target material of high refractive index may be titanium oxide (TiO 2 ), silicon nitride (Si 3 N 4 ), zirconia, zinc oxide or the like.
  • the low refractive index target material may be silicon oxide (SiO 2 ), silicon fluoride or the like.
  • the number of the first film layers (211/221) formed by the first target 51 and the formed by the second target 52 may be controlled by the number of rotations of the bearing surface 41.
  • the number of second film layers (212/222) may be controlled by the number of second film layers (212/222).
  • the same ends of the at least two strip-shaped flaps 61 are aligned with each other. At this time, the same other end of the at least two strip-shaped flaps 61 are sequentially projected.
  • the shielding effect of the baffle 6 is relatively controllable.
  • the baffle 6 further includes a support member 62, and one end of the at least two strip-shaped flaps 61 of the baffle 6 is fixed to the support member 62.
  • the support member 62 is fixed to the coating chamber 3.
  • the at least two strip blocking pieces 61 include a first blocking piece 611, a second blocking piece 612 and a third blocking piece 613 which are sequentially arranged.
  • the difference between the lengths of the third flap 613 and the second flap 612 in the fourth direction Y' is a first difference.
  • a difference between the length of the second flap 612 and the first flap 611 in the fourth direction Y' is a second difference.
  • the ratio of the second difference to the first difference is in the range of 0.5 to 2.0.
  • the ratio of the second difference value to the first difference value is in a range of 0.5 to 2.0, that is, the second difference value is close to or the same as the first difference value
  • the length of the at least two strip-shaped flaps 61 is relatively flat, so that the film thickness of the different regions of the combined film layer 2 is relatively gentle, and thus each adjacent color can be more sufficiently presented. Avoiding the sensory discomfort caused by a sudden change in color due to a certain color being too short, the appearance of the casing 200 is better, thereby improving the user experience.
  • the ratio of the second difference to the first difference is in the range of 0.8 to 1.2, the film thickness of the different regions of the combined film layer 2 changes more gently, on the housing 200 The color changes are moderated and the user experience is better.

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Abstract

一种壳体（200），壳体（200）包括衬底（1）及镀于衬底（1）上的组合膜层（2），组合膜层（2）的厚度沿第一方向（X）递减或递增，且组合膜层（2）的任意两个沿第一方向（X）排列的区域之间的膜厚差值小于等于350纳米，以使壳体（200）呈现波长处于400纳米至760纳米范围内的渐变色。还公开一种具有壳体（200）的移动终端（100）和一种溅射镀膜装置（300）。

Description

壳体、移动终端及溅射镀膜装置
本申请要求于2018年01月26日提交中国专利局、申请号为201820142185.3申请名称为“壳体、移动终端及溅射镀膜装置”的中国实用新型专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及电子设备领域，尤其涉及一种壳体、移动终端及溅射镀膜装置。
背景技术
由于多色镀膜工艺的难度较大且产品良品率较低，因此目前手机的后盖在常规镀膜后，通常只有一种主体颜色呈现在产品上，也即只有单一色调，导致手机外观较为单调。
发明内容
本申请实施方式提供一种具有渐变色的壳体和移动终端，以及一种用于制成所述壳体的溅射镀膜装置。
第一方面，本申请实施方式提供了一种壳体。所述壳体应用于移动终端。所述壳体包括衬底及镀于所述衬底上的组合膜层。所述组合膜层包括多层膜层。所述组合膜层的厚度沿第一方向递减或递增，且所述组合膜层的任意两个沿所述第一方向排列的区域之间的膜厚差值小于等于350纳米(nm)，以使所述壳体呈现波长处于400纳米至760纳米范围内的渐变色。
在本实施方式中，由于所述壳体的所述组合膜层的厚度沿第一方向递减或递增，因此所述壳体能够呈现出渐变色，使得所述壳体的外观色调更为丰富、多样。并且，由于所述组合膜层的任意两个沿所述第一方向排列的区域之间的膜厚差值小于等于350纳米，因此所述壳体能够呈现波长处于400纳米至760纳米范围内的色彩，也即所述壳体能够呈现如红、橙、黄、绿、蓝、靛、紫等颜色的彩虹色，且所呈现的彩虹色是渐变的，故而所述壳体的外观色调感官更好，能够满足客户的色彩体验需求。
其中，所述组合膜层的厚度大于等于50纳米且小于等于400纳米。所述组合膜层沿所述第一方向的厚度呈现平缓曲线变化，以使所述壳体的外观变化更为自然、平缓。
一种实施方式中，所述组合膜层的厚度沿第二方向递减或递增，第二方向与所述第一方向相交。换言之，所述组合膜层的厚度是同时沿多个方向递减或递增的，因此所述壳体能够呈现更为灵活的渐变色。在其他实施方式中，所述组合膜层的厚度还可以沿着不同于所述第一方向和所述第二方向的其他方向递减或递增。
一种实施方式中，所述第二方向与所述第一方向之间的角小于等于90°。所述组合膜层在所述第一方向上和所述第二方向上的厚度变化趋势相同。厚度变化趋势相同是指同样为递增或同样为递减。当所述衬底大致呈矩形时，所述第二方向垂直于所述第一方向，所述第一方向为所述衬底的长边方向，所述第二方向为所述衬底的短边方向。
一种实施方式中，所述组合膜层包括层叠设置的第一膜层和第二膜层。所述第一膜层所采用的镀膜材料的折射率与所述第二膜层所采用的镀膜材料的折射率不同。所述第一膜层和所述第二膜层在同一方向上的厚度变化趋势相同。换言之，所述第一膜层和所述第二膜层在同一方向上的厚度均为递增或递减。
其中，所述第一膜层和所述第二膜层在同一方向上的厚度递增或递减的程度大致相同。
其中，所述第一膜层所采用的镀膜材料和所述第二膜层所采用的镀膜材料可采用高折射率镀膜材料和低折射率镀膜材料相搭配，使两者所形成的镀膜体系在所述衬底的表面上形成更佳的镀膜效果，例如使得所述组合膜层在维持较小的厚度的同时，能够反射出波长较大的光线，从而使所述壳体满足更高的体验需求(如轻薄、色彩鲜亮、色彩丰富等)。
其中，所述第一膜层的数量为多层。所述第二膜层的数量为多层。多层所述第一膜层与多层所述第二膜层一一交替地层叠设置。
一种实施方式中，所述第一膜层采用氧化钛材料，所述第二膜层采用氧化硅材料。所述组合膜层位于所述衬底的内表面，所述内表面朝向所述移动终端的内部。在本实施方式中，由于所述组合膜层位于所述衬底的内表面，因此所述衬底的与所述内表面相对的外表面的平整度高，使得用户握持所述移动终端时的手感较佳。
其中，所述组合膜层中最靠近所述衬底的膜层为所述第一膜层。所述组合膜层包括两层所述第一膜层和两层所述第二膜层，两层所述第一膜层和两层所述第二膜层一一交替地层叠设置。当然，在其他实施方式中，所述第一膜层的数量和所述第二膜层的数量也可以为其他。
一种实施方式中，所述第一膜层采用氮化硅材料，所述第二膜层采用氧化硅材料。所述组合膜层位于所述衬底的外表面，所述外表面朝向所述移动终端的外部。在本实施方式中，由于所述第一膜层采用氮化硅材料，因此所述第一膜层的耐磨性较高，所述组合膜层的耐磨性较高，故而所述组合膜层能够置于所述衬底的外表面且使用寿命较长。
其中，所述组合膜层中最靠近所述衬底的膜层为所述第一膜层。所述组合膜层包括四层所述第一膜层和三层所述第二膜层，四层所述第一膜层和三层所述第二膜层一一交替地层叠设置。当然，在其他实施方式中，所述第一膜层的数量和所述第二膜层的数量也可以为其他。
当然，在其他实施方式中，也可用其他高折射率的靶材材料和低折射率的靶材材料实现其镀膜效果。例如高折射率的靶材材料可以为氧化钛(TiO 2)、氮化硅(Si 3N 4)、氧化锆、氧化锌等。低折射率的靶材材料可以为氧化硅(SiO 2)、氟化硅等。
一种实施方式中，所述组合膜层包括面积相同的第一区域、第二区域及第三区域。所述第一区域、所述第二区域及所述第三区域在所述第一方向上等间距依次排列。所述第一区域的平均膜厚与所述第二区域的平均膜厚的差为第一值。所述第二区域的平均膜厚与所述第三区域的平均膜厚的差为第二值。所述第一值与所述第二值的比处于0.5至2.0范围内。
在本实施方式中，由于所述第一区域、所述第二区域及所述第三区域在所述第一 方向上依次排列，因此所述第一区域、所述第二区域及所述第三区域能够呈现出依次渐变的颜色。由于所述第一值与所述第二值的比处于0.5至2.0范围内，也即所述第一值与所述第二值相近或相同，并且所述第一区域、所述第二区域及所述第三区域面积相同，因此等间距的所述第一区域、所述第二区域及所述第三区域能够呈现出依次渐变的相邻的颜色，且相邻的每个颜色均具有较大的呈现面积，也即相邻的每个颜色均能够较为充分地呈现在所述壳体上，能够避免因某个颜色过于短暂而导致相近区域出现颜色突变所造成的感官不适，使得所述壳体的外观质感更佳，从而提高用户体验。
其中，所述第一值与所述第二值的比处于0.8至1.2范围内时，所述壳体上的颜色变化更为平缓，用户体验更佳。
一种实施方式中，所述衬底采用玻璃材料、聚碳酸酯(Polycarbonate，PC)、聚对苯二甲酸乙二醇酯(polyethylene terephthalate，PET)、金属及陶瓷材料中的一种或多种的组合。
一种实施方式中，所述渐变色包括相邻的紫色、蓝色以及青色。其中，青色的波长范围为492纳米至480纳米。蓝色的波长范围为480纳米至455纳米。紫色的波长范围为455纳米至350纳米。
第二方面，本申请实施方式还提供一种移动终端。所述移动终端包括壳体。所述移动终端可以是任何具备通信和存储功能的设备，例如：平板电脑、手机、电子阅读器、遥控器、个人计算机(Personal Computer，PC)、笔记本电脑、车载设备、网络电视、可穿戴设备等具有网络功能的智能设备。
第三方面，本申请实施方式还提供一种溅射镀膜装置。所述溅射镀膜装置可用于制作上述任一实施方式所述的壳体。所述溅射镀膜装置包括镀膜室、基座、多个靶材以及多个挡板。所述基座设于所述镀膜室内部。所述基座外侧具有用于固定所述衬底的承载面。所述承载面与所述镀膜室的内壁相对且间隔设置，以在所述承载面与所述内壁之间形成镀膜空间。所述多个靶材收容于所述镀膜空间且间隔地固定在所述内壁上。所述多个挡板收容于所述镀膜空间且一一对应地正对所述多个靶材设置。所述多个挡板同样正对所述承载面。
每个所述挡板包括至少一个遮挡单元。所述遮挡单元包括沿第三方向排列的至少两个条形挡片。所述至少两个条形挡片沿垂直于所述第三方向的第四方向延伸。所述至少两个条形挡片在所述第四方向上的长度沿所述第三方向递增或递减，以对所述多个靶材进行不均匀遮挡，从而在所述衬底上形成厚度递减或递增的所述组合膜层。
在本实施方式中，由于所述挡板正对所述多个靶材以遮挡所述多个靶材，所述挡板的所述遮挡单元中长度较长的所述条形挡片的遮挡面积较大、长度较短的所述条形挡片的遮挡面积较小，所述遮挡单元中的所述至少两个条形挡片的长度递增或递减，因此所述遮挡单元能够对所述多个靶材进行不均匀遮挡，从而使得所述多个靶材的靶材原子溢出并转移到所述衬底上的数量不均匀，所述多个靶材能够在所述衬底上形成厚度递减或递增的所述组合膜层，从而使得所述壳体能够呈现渐变色。
其中，由于所述至少两个条形挡片在所述第四方向(也即所述条形挡片的延伸方向)上的长度沿所述第三方向(也即所述至少两个条形挡片的排列方向)递增或递减，因此形成在所述衬底上的所述组合膜层的厚度在所述第三方向上递减或递增。所述衬 底固定于所述承载面时，所述衬底上的与所述第三方向相同的方向为所述第一方向。可以理解的是，在镀膜过程中，所述至少两个条形挡片的递增或递减变化同样会影响到所述组合膜层的厚度在所述其他方向上的变化。例如，与所述第一方向成小于等于90°夹角的所述第二方向，所述组合膜层在所述第二方向上的厚度递减或递增。
一种实施方式中，所述承载面为柱面。所述承载面上具有在所述承载面的周向上排布的至少一个固定区域。所述溅射镀膜装置还包括驱动件，所述驱动件用于驱动所述基座以预设转速转动，以使所述承载面携带所述衬底绕所述承载面的轴线转动。
在本实施方式中，可以通过排布更多的所述固定区域，使得所述承载面能够承载更多的所述衬底。所述驱动件驱动所述基座转动时，所述多个靶材所溅射出的靶材原子依次镀设在不同的所述固定区域的所述衬底上，从而实现批量镀膜。所述驱动件控制所述基座以预设的转速转动时，固定于所述承载面上的多个所述衬底的镀膜时间、镀膜厚度都能够得到较为可靠地控制，从而提高所述壳体的良品率。
一种实施方式中，每个所述固定区域均包括在所述承载面的轴向上排布的多个固定区。单个所述固定区用于固定一个所述衬底。所述挡板的所述遮挡单元在所述承载面的轴向上排布。单个所述挡板的所述遮挡单元的数量与单个所述固定区域的所述固定区的数量相同。
在本实施方式中，每个所述固定区域均包括多个固定区，从而能够同时固定多个所述衬底。所述挡板包括与多个所述衬底相对应的多个所述遮挡单元，从而能够同时对多个所述衬底进行镀膜，使得所述溅射镀膜装置能够更为大批量地制作所述壳体。
一种实施方式中，所述多个靶材在所述承载面的周向上等间距地固定于所述内壁。此时，所述多个靶材能够同时溅射出靶材原子，靶材原子转移到不同的所述衬底上，从而形成对应的膜层，提高了所述衬底的加工效率。再者，所述多个靶材间隔设置，也能够避免相互影响，使得所述壳体的良品率较高。由于所述多个挡板的结构相同，因此所述多个靶材形成在所述衬底上的不同膜层的渐变趋势大致相同，使得所述组合膜层的质量更为可控。
一种实施方式中，所述多个靶材包括第一靶材和第二靶材，所述第一靶材和所述第二靶材的折射率不同。由于所述多个挡板的结构相同，因此所述第一靶材形成在所述衬底上的第一膜层的厚度变化趋势与所述第二靶材形成在所述衬底上的第二膜层不同膜层的厚度变化趋势相同。
其中，所述第一靶材和所述第二靶材的材料可采用高折射率镀膜材料和低折射率镀膜材料相搭配，使两者所形成的镀膜体系在所述衬底的表面上形成更佳的镀膜效果，例如使得所述组合膜层在维持较小的厚度的同时，能够反射出波长较大的光线，从而使所述壳体满足更高的体验需求。例如，所述第一靶材采用氧化钛材料，所述第二靶材采用氧化硅材料。或者所述第一靶材采用氮化硅材料，所述第二靶材采用氧化硅材料。当然，在其他实施方式中，也可用其他高折射率的靶材材料和低折射率的靶材材料实现其镀膜效果。例如高折射率的靶材材料可以为氧化钛(TiO 2)、氮化硅(Si 3N 4)、氧化锆、氧化锌等。低折射率的靶材材料可以为氧化硅(SiO 2)、氟化硅等。
其中，可通过所述承载面的转数，控制所述第一靶材所形成的所述第一膜层的数量和所述第二靶材所形成的所述第二膜层的数量。
一种实施方式中，在同一所述遮挡单元中，所述至少两个条形挡片的同一端彼此对齐。此时，所述至少两个条形挡片的相同的另一端依次凸出。所述挡板的遮挡效果较为可控。所述挡板还包括支撑件，所述挡板的所述至少两个条形挡片中对齐的一端固定于所述支撑件。所述支撑件固定于所述镀膜室。
一种实施方式中，所述至少两个条形挡片包括依次排列的第一挡片、第二挡片以及第三挡片。所述第三挡片与所述第二挡片在所述第四方向上的长度的差为第一差值。所述第二挡片与所述第一挡片在所述第四方向上的长度的差为第二差值。所述第二差值与所述第一差值的比处于0.5至2.0范围内。
在本实施方式中，由于所述第二差值与所述第一差值的比处于0.5至2.0范围内，也即所述第二差值与所述第一差值相近或相同，因此所述至少两个条形挡片的长度变化趋势较为平缓，从而使得所述组合膜层的不同区域的膜厚的变化较为平缓，进而能够较为充分地呈现出相邻的每个颜色，以避免因某个颜色过于短暂而导致相近区域出现颜色突变所造成的感官不适，使得所述壳体的外观质感更佳，从而提高用户体验。
其中，所述第二差值与所述第一差值的比处于0.8至1.2范围内时，所述组合膜层的不同区域的膜厚的变化更为平缓，所述壳体上的颜色变化缓和，用户体验更佳。
附图说明
图1是本申请实施方式提供的一种移动终端的结构示意图；
图2是图1所示移动终端的壳体的示意图；
图3是图2所示壳体沿A-A线处剖开的结构示意图；
图4是图2所示壳体的一种实施方式的结构示意图；
图5是图2所述壳体的另一种实施方式的结构示意图；
图6是本申请实施方式提供的一种溅射镀膜装置的结构示意图；
图7是图6所示溅射镀膜装置的另一角度的结构示意图；
图8是图6所示溅射镀膜装置的部分结构示意图；
图9是图6所示溅射镀膜装置的挡板的遮挡单元的结构示意图。
具体实施方式
下面结合本申请实施方式中的附图对本申请实施方式进行描述。
请参阅图1，本申请实施方式提供一种移动终端100。所述移动终端100可以是任何具备通信和存储功能的设备，例如：平板电脑、手机、电子阅读器、遥控器、个人计算机(Personal Computer，PC)、笔记本电脑、车载设备、网络电视、可穿戴设备等具有网络功能的智能设备。
请一并参阅图1至图3，所述移动终端100包括壳体200。所述壳体200包括衬底1及镀于所述衬底1上的组合膜层2。所述组合膜层2包括多层膜层。所述组合膜层2的厚度沿第一方向X递减或递增，且所述组合膜层2的任意两个沿所述第一方向X排列的区域之间的膜厚差值小于等于350纳米(nm)，以使所述壳体200呈现波长处于400纳米至760纳米范围内的渐变色。所述壳体200可以为所述移动终端100的后盖。所述壳体200还可包括所述移动终端100的中框。
在本实施方式中，由于所述壳体200的所述组合膜层2的厚度沿第一方向X递减或递增，因此所述壳体200能够呈现出渐变色，使得所述壳体200的外观色调更为丰富、多样。并且，由于所述组合膜层2的任意两个沿所述第一方向X排列的区域之间的膜厚差值小于等于350纳米，因此所述壳体200能够呈现波长处于400纳米至760纳米范围内的色彩，也即所述壳体200能够呈现如红、橙、黄、绿、蓝、靛、紫等颜色的彩虹色，且所呈现的彩虹色是渐变的，故而所述壳体200的外观色调感官更好，能够满足客户的色彩体验需求。
可以理解的是，所述组合膜层2利用多层纳米膜光学干涉原理，实现多种颜色的反光效果。本申请附图中X方向为本申请所述第一方向的一种示例，并不构成对所述第一方向的限定。在其他实施方式中，所述第一方向也可以为其他方向，例如与X方向相反的方向。本申请所提及的递增或递减包括但不限于沿曲线递增或递减。
其中，所述组合膜层2的厚度大于等于50纳米且小于等于400纳米。所述组合膜层2沿所述第一方向X的厚度呈现平缓曲线变化，以使所述壳体200的外观变化更为自然、平缓。任意两个区域的膜厚差值是指任意两个区域各自的中心点的膜厚的差值。
其中，红色的波长范围为770纳米至622纳米。橙色的波长范围为622纳米至597纳米。黄色的波长范围为597纳米至577纳米。绿色的波长范围为577纳米至492纳米。青色(靛色)的波长范围为492纳米至480纳米，蓝色的波长范围为480纳米至455纳米。紫色的波长范围为455纳米至350纳米。
一种实施方式中，所述组合膜层2的厚度沿第二方向Y递减或递增。第二方向Y与所述第一方向X相交。换言之，所述组合膜层2的厚度是同时沿多个方向递减或递增的，因此所述壳体200能够呈现更为灵活的渐变色。在其他实施方式中，所述组合膜层2的厚度还可以沿着不同于所述第一方向X和所述第二方向Y的其他方向递减或递增。
其中，所述第一方向X与所述第二方向Y之间的角小于等于90°。所述组合膜层2在所述第一方向X和所述第二方向Y上的厚度变化趋势相同。厚度变化趋势相同是指同样为递增或同样为递减。其中，当所述衬底1大致呈矩形时，所述第二方向Y垂直于所述第一方向X，所述第一方向X为所述衬底1的长边方向，所述第二方向Y为所述衬底1的短边方向。
本申请附图中Y方向为本申请所述第二方向的一种示例，并不构成对所述第二方向的限定。在其他实施方式中，所述第二方向也可以为其他方向，例如与Y方向相反的方向。
一种实施方式中，请一并参阅图4和图5，所述组合膜层2包括层叠设置的第一膜层(211/221)和第二膜层(212/222)。所述第一膜层(211/221)所采用的镀膜材料的折射率与所述第二膜层(212/222)所采用的镀膜材料的折射率不同。所述第一膜层(211/221)和所述第二膜层(212/222)在同一方向上的厚度变化趋势相同。换言之，所述第一膜层(211/221)和所述第二膜层(212/222)在同一方向上的厚度均为递增或递减。
其中，所述第一膜层(211/221)和所述第二膜层(212/222)在同一方向上的厚度递增或递减的程度大致相同。
其中，所述第一膜层(211/221)所采用的镀膜材料和所述第二膜层(212/222)所采用的镀膜材料可采用高折射率镀膜材料和低折射率镀膜材料相搭配，使两者所形成的镀膜体系在所述衬底1的表面上形成更佳的镀膜效果，例如使得所述组合膜层2在维持较小的厚度的同时，能够反射出波长较大的光线，从而使所述壳体200满足更高的体验需求(如轻薄、色彩鲜亮、色彩丰富等)。
其中，所述第一膜层(211/221)的数量为多层。所述第二膜层(212/222)的数量为多层。多层所述第一膜层(211/221)与多层所述第二膜层(212/222)一一交替地层叠设置。
一种实施方式中，如图4所示，所述第一膜层211采用氧化钛材料，所述第二膜层212采用氧化硅材料。所述组合膜层2位于所述衬底1的内表面11，所述内表面11朝向所述移动终端100的内部。在本实施方式中，由于所述组合膜层2位于所述衬底1的内表面11，因此所述衬底1的与所述内表面11相对的外表面12的平整度高，使得用户握持所述移动终端100时的手感较佳。
其中，所述组合膜层2中最靠近所述衬底1的膜层为所述第一膜层211。所述组合膜层2包括两层所述第一膜层211和两层所述第二膜层212，两层所述第一膜层211和两层所述第二膜层212一一交替地层叠设置。当然，在其他实施方式中，所述第一膜层211的数量和所述第二膜层212的数量也可以为其他。
一种实施方式中，如图5所示，所述第一膜层221采用氮化硅材料，所述第二膜层222采用氧化硅材料。所述组合膜层2位于所述衬底1的外表面12，所述外表面12朝向所述移动终端100的外部。在本实施方式中，由于所述第一膜层221采用氮化硅材料，因此所述第一膜层221的耐磨性较高，所述组合膜层2的耐磨性较高，故而所述组合膜层2能够置于所述衬底1的外表面12且使用寿命较长。
其中，所述组合膜层2中最靠近所述衬底1的膜层为所述第一膜层221。所述组合膜层2包括四层所述第一膜层221和三层所述第二膜层222，四层所述第一膜层221和三层所述第二膜层222一一交替地层叠设置。当然，在其他实施方式中，所述第一膜层221的数量和所述第二膜层222的数量也可以为其他。
当然，在其他实施方式中，也可用其他高折射率的靶材材料和低折射率的靶材材料实现其镀膜效果。例如高折射率的靶材材料可以为氧化钛(TiO 2)、氮化硅(Si 3N 4)、氧化锆、氧化锌等。低折射率的靶材材料可以为氧化硅(SiO 2)、氟化硅等。
一种实施方式中，所述组合膜层2包括3层至10层的膜层。
一种实施方式中，如图2所示，所述组合膜层2包括面积相同的第一区域23、第二区域24及第三区域25。所述第一区域23、所述第二区域24及所述第三区域25在所述第一方向X上等间距依次排列。所述第一区域23的平均膜厚与所述第二区域24的平均膜厚的差为第一值。所述第二区域24的平均膜厚与所述第三区域25的平均膜厚的差为第二值。所述第一值与所述第二值的比处于0.5至2.0范围内。
在本实施方式中，由于所述第一区域23、所述第二区域24及所述第三区域25在所述第一方向X上依次排列，因此所述第一区域23、所述第二区域24及所述第三区域25能够呈现出依次渐变的颜色。由于所述第一值与所述第二值的比处于0.5至2.0范围内，也即所述第一值与所述第二值相近或相同，并且所述第一区域23、所述第二 区域24及所述第三区域25面积相同，因此等间距的所述第一区域23、所述第二区域24及所述第三区域25能够呈现出依次渐变的相邻的颜色，且相邻的每个颜色均具有较大的呈现面积，也即相邻的每个颜色均能够较为充分地呈现在所述壳体200上，能够避免因某个颜色过于短暂而导致相近区域出现颜色突变所造成的感官不适，使得所述壳体200的外观质感更佳，从而提高用户体验。
可以理解的是，上述“平均膜厚”是指对应区域中的各个点(至少包括5个点作为采样点)的膜厚的平均值，因此区域的平均膜厚能够反映出对应区域所呈现的大致的颜色。在其他实施方式中，所述第一区域23、所述第二区域24及所述第三区域25也可以沿所述第二方向Y或其他方向排列。
其中，所述第一值与所述第二值的比处于0.8至1.2范围内时，所述壳体上的颜色变化更为平缓，用户体验更佳。
当然，在其他实施方式中，所述壳体200也可呈现出过渡起伏比较大的颜色，使得壳体200的外观冲击力较强。
一种实施方式中，所述衬底1采用玻璃材料、聚碳酸酯(Polycarbonate，PC)及聚对苯二甲酸乙二醇酯(polyethylene terephthalate，PET)、金属或陶瓷材料中的一种或多种的组合。
一种实施方式中，所述渐变色包括相邻的紫色、蓝色以及青色。其中，青色的波长范围为492纳米至480纳米。蓝色的波长范围为480纳米至455纳米。紫色的波长范围为455纳米至350纳米。
请一并参阅图1至图8，本申请实施方式还提供一种溅射镀膜装置300。所述溅射镀膜装置300可用于制作上述任一实施方式所述的壳体200。所述溅射镀膜装置300包括镀膜室3、基座4、多个靶材(51/52)以及多个挡板6。所述基座4设于所述镀膜室3内部。所述基座4外侧具有用于固定所述衬底1的承载面41。所述承载面41与所述镀膜室3的内壁31相对且间隔设置，以在所述承载面41与所述内壁31之间形成镀膜空间30。所述多个靶材(51/52)收容于所述镀膜空间30且间隔地固定在所述内壁31上。所述多个挡板6收容于所述镀膜空间30且一一对应地正对所述多个靶材(51/52)设置。所述多个挡板6同样正对所述承载面41。
每个所述挡板6包括至少一个遮挡单元60。所述遮挡单元60包括沿第三方向X’排列的至少两个条形挡片61。所述至少两个条形挡片61沿垂直于所述第三方向X’的第四方向Y’延伸。所述至少两个条形挡片61在所述第四方向Y’上的长度沿所述第三方向X’递增或递减，以对所述多个靶材(51/52)进行不均匀遮挡，从而在所述衬底1上形成厚度递减或递增的所述组合膜层2。
如图8中虚线箭头所示，所述溅射镀膜装置300在真空中利用荷能粒子轰击所述多个靶材(51/52)的表面，使得所述多个靶材(51/52)的表面的靶材原子脱离原晶格而逸出，进而越过所述挡板6转移到所述衬底1的表面上形成所述组合膜层2。所述溅射镀膜装置300所采用的镀膜原理是NCVM(Non-Conductive Vacuum Metalize，不导电真空金属化)镀膜技术中的一种。
在本实施方式中，由于所述挡板6正对所述多个靶材(51/52)以遮挡所述多个靶材(51/52)，所述挡板6的所述遮挡单元60中长度较长的所述条形挡片61的遮挡面积较 大、长度较短的所述条形挡片61的遮挡面积较小，所述遮挡单元60中的所述至少两个条形挡片61的长度递增或递减，因此所述遮挡单元60能够对所述多个靶材(51/52)进行不均匀遮挡，从而使得所述多个靶材(51/52)的靶材原子溢出并转移到所述衬底1上的数量不均匀，所述多个靶材(51/52)能够在所述衬底1上形成厚度递减或递增的所述组合膜层2，从而使得所述壳体200能够呈现渐变色。
其中，由于所述至少两个条形挡片61在所述第四方向Y’(也即所述条形挡片61的延伸方向)上的长度沿所述第三方向X’(也即所述至少两个条形挡片61的排列方向)递增或递减，因此形成在所述衬底1上的所述组合膜层2的厚度在所述第三方向X’上递减或递增。例如，所述至少两个条形挡片61在所述第四方向Y’上的长度沿所述第三方向X’递增时，形成在所述衬底1上的所述组合膜层2的厚度在所述第三方向X’上递减。所述衬底1固定于所述承载面41时，所述衬底1上的与所述第三方向X’相同的方向为所述第一方向X。可以理解的是，在镀膜过程中，所述至少两个条形挡片61的递增或递减变化同样会影响到所述组合膜层2的厚度在所述其他方向上的变化。例如，与所述第一方向X成小于等于90°夹角的所述第二方向Y，所述组合膜层2在所述第二方向Y上的厚度递减或递增。
其中，所述挡板6可采用不锈钢材料、锡箔材料或铝材料。例如，所述挡板6可为较薄的不锈钢片、锡箔纸或铝片。此时，所述挡板6容易被裁剪、修改，使得所述挡板6的形状能够更好地满足不均匀遮挡的需求。换言之，所述至少两个条形挡片61一体成型。所述至少两个条形挡片61可通过对同一片材料板材进行剪裁所获得。当然，在其他实施方式中，所述挡板6也可通过拼接方式组装成一体结构。
当然，在其他实施方式中，所述衬底1上的与所述第三方向X’相同的方向也可为所述第二方向Y。
一种实施方式中，如图6和图7所示，所述承载面41为柱面。所述承载面41上具有在所述承载面41的周向(该方向垂直于所述承载面41的轴线411)上排布的至少一个固定区域410。所述溅射镀膜装置300还包括驱动件7，所述驱动件7用于驱动所述基座4以预设转速转动，以使所述承载面41携带所述衬底1绕所述承载面41的轴线411转动。
在本实施方式中，可以通过排布更多的所述固定区域410，使得所述承载面41能够承载更多的所述衬底1。所述驱动件7驱动所述基座4转动时，所述多个靶材(51/52)所溅射出的靶材原子依次镀设在不同的所述固定区域410的所述衬底1上，从而实现批量镀膜。所述驱动件7控制所述基座4以预设的转速转动时，固定于所述承载面41上的多个所述衬底1的镀膜时间、镀膜厚度都能够得到较为可靠地控制，从而提高所述壳体200的良品率。
其中，预设的转速可包括匀速段和变速段。处于匀速段时，所述多个靶材(51/52)的靶材原子镀设在多个所述衬底1上的膜厚较为均匀。处于变速段时，所述多个靶材(51/52)的靶材原子可以不均匀地镀设在所述衬底1上，从而使得所述衬底1上的所述组合膜层2的厚度渐变。例如，所述衬底1固定于所述承载面41时，所述衬底1的所述第二方向Y与所述承载面41的周向一致。所述承载面41的转速递增时，可以使所述组合膜层2在所述第二方向Y上的厚度发生明显递减。
其中，所述固定区域410的数量可大于等于2。其中，所述承载面41在垂直于所述承载面41的轴线411的平面上的形状为多边形。同一个所述固定区域410位于所述多边形的同一个边上。
一种实施方式中，请一并参阅图6至图8，每个所述固定区域410均包括在所述承载面41的轴向(该方向平行于所述承载面41的轴线411)上排布的多个固定区412。单个所述固定区412用于固定一个所述衬底1。所述挡板6的所述遮挡单元60在所述承载面41的轴向上排布。单个所述挡板6的所述遮挡单元60的数量与单个所述固定区域410的所述固定区412的数量相同。
在本实施方式中，每个所述固定区域410均包括多个固定区412，从而能够同时固定多个所述衬底1。所述挡板6包括与多个所述衬底1相对应的多个所述遮挡单元60，从而能够同时对多个所述衬底1进行镀膜，使得所述溅射镀膜装置300能够更为大批量地制作所述壳体200。
一种实施方式中，如图6和图7所示，所述多个靶材(51/52)在所述承载面41的周向上等间距地固定于所述内壁31。此时，所述多个靶材(51/52)能够同时溅射出靶材原子，靶材原子转移到不同的所述衬底1上，从而形成对应的膜层，提高了所述衬底1的加工效率。再者，所述多个靶材(51/52)间隔设置，也能够避免相互影响，使得所述壳体200的良品率较高。由于所述多个挡板6的结构相同，因此所述多个靶材(51/52)形成在所述衬底1上的不同膜层的渐变趋势大致相同，使得所述组合膜层2的质量更为可控。
一种实施方式中，所述多个靶材(51/52)包括第一靶材51和第二靶材52，所述第一靶材51和所述第二靶材52的折射率不同。由于所述多个挡板6的结构相同，因此所述第一靶材51形成在所述衬底1上的第一膜层(211/221)的厚度变化趋势与所述第二靶材52形成在所述衬底1上的第二膜层(212/222)不同膜层的厚度变化趋势相同。
其中，所述第一靶材51和所述第二靶材52的材料可采用高折射率镀膜材料和低折射率镀膜材料相搭配，使两者所形成的镀膜体系在所述衬底1的表面上形成更佳的镀膜效果，例如使得所述组合膜层2在维持较小的厚度的同时，能够反射出波长较大的光线，从而使所述壳体200满足更高的体验需求。例如，所述第一靶材51采用氧化钛材料，所述第二靶材52采用氧化硅材料。或者所述第一靶材51采用氮化硅材料，所述第二靶材52采用氧化硅材料。当然，在其他实施方式中，也可用其他高折射率的靶材材料和低折射率的靶材材料实现其镀膜效果。例如高折射率的靶材材料可以为氧化钛(TiO 2)、氮化硅(Si 3N 4)、氧化锆、氧化锌等。低折射率的靶材材料可以为氧化硅(SiO 2)、氟化硅等。
其中，可通过所述承载面41的转数，控制所述第一靶材51所形成的所述第一膜层(211/221)的数量和所述第二靶材52所形成的所述第二膜层(212/222)的数量。
一种实施方式中，如图8所示，在同一所述遮挡单元60中，所述至少两个条形挡片61的同一端彼此对齐。此时，所述至少两个条形挡片61的相同的另一端依次凸出。所述挡板6的遮挡效果较为可控。所述挡板6还包括支撑件62，所述挡板6的所述至少两个条形挡片61中对齐的一端固定于所述支撑件62。所述支撑件62固定于所述镀 膜室3。
一种实施方式中，请一并参阅图8和图9，所述至少两个条形挡片61包括依次排列的第一挡片611、第二挡片612以及第三挡片613。所述第三挡片613与所述第二挡片612在所述第四方向Y’上的长度的差为第一差值。所述第二挡片612与所述第一挡片611在所述第四方向Y’上的长度的差为第二差值。所述第二差值与所述第一差值的比处于0.5至2.0范围内。
在本实施方式中，由于所述第二差值与所述第一差值的比处于0.5至2.0范围内，也即所述第二差值与所述第一差值相近或相同，因此所述至少两个条形挡片61的长度变化趋势较为平缓，从而使得所述组合膜层2的不同区域的膜厚的变化较为平缓，进而能够较为充分地呈现出相邻的每个颜色，以避免因某个颜色过于短暂而导致相近区域出现颜色突变所造成的感官不适，使得所述壳体200的外观质感更佳，从而提高用户体验。
其中，所述第二差值与所述第一差值的比处于0.8至1.2范围内时，所述组合膜层2的不同区域的膜厚的变化更为平缓，所述壳体200上的颜色变化缓和，用户体验更佳。
以上所述，仅为本申请的具体实施方式，但本申请的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本申请揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本申请的保护范围之内。因此，本申请的保护范围应以权利要求的保护范围为准。

Claims (15)

  1. 一种壳体，应用于移动终端，其特征在于，所述壳体包括衬底及镀于所述衬底上的组合膜层，所述组合膜层的厚度沿第一方向递减或递增，且所述组合膜层的任意两个沿所述第一方向排列的区域之间的膜厚差值小于等于350纳米，以使所述壳体呈现波长处于400纳米至760纳米范围内的渐变色。
  2. 如权利要求1所述的壳体，其特征在于，所述组合膜层的厚度沿第二方向递减或递增，第二方向与所述第一方向相交。
  3. 如权利要求2所述的壳体，其特征在于，所述第二方向与所述第一方向之间的角小于等于90°，所述组合膜层在所述第一方向上和所述第二方向上的厚度变化趋势相同。
  4. 如权利要求1至3任一项所述的壳体，其特征在于，所述组合膜层包括层叠设置的第一膜层和第二膜层，所述第一膜层所采用的镀膜材料的折射率与所述第二膜层所采用的镀膜材料的折射率不同，所述第一膜层和所述第二膜层在同一方向上的厚度变化趋势相同。
  5. 如权利要求4所述的壳体，其特征在于，所述第一膜层采用氧化钛材料，所述第二膜层采用氧化硅材料，所述组合膜层位于所述衬底的内表面，所述内表面朝向所述移动终端的内部；
    或，所述第一膜层采用氮化硅材料，所述第二膜层采用氧化硅材料，所述组合膜层位于所述衬底的外表面，所述外表面朝向所述移动终端的外部。
  6. 如权利要求1至3任一项所述的壳体，其特征在于，所述组合膜层包括面积相同的第一区域、第二区域及第三区域，所述第一区域、所述第二区域及所述第三区域在所述第一方向上等间距依次排列，所述第一区域的平均膜厚与所述第二区域的平均膜厚的差为第一值，所述第二区域的平均膜厚与所述第三区域的平均膜厚的差为第二值，所述第一值与所述第二值的比处于0.5至2.0范围内。
  7. 如权利要求1至3任一项所述的壳体，其特征在于，所述渐变色包括相邻的紫色、蓝色以及青色。
  8. 一种移动终端，其特征在于，包括权利要求1至7任一项所述的壳体。
  9. 一种溅射镀膜装置，其特征在于，用于制作权利要求1至7任一项所述的壳体，所述溅射镀膜装置包括镀膜室、基座、多个靶材以及多个挡板，所述基座设于所述镀膜室内部，所述基座外侧具有用于固定所述衬底的承载面，所述承载面与所述镀膜室的内壁相对且间隔设置，以在所述承载面与所述内壁之间形成镀膜空间，所述多个靶 材收容于所述镀膜空间且间隔地固定在所述内壁上，所述多个挡板收容于所述镀膜空间且一一对应地正对所述多个靶材设置；
    每个所述挡板包括至少一个遮挡单元，所述遮挡单元包括沿第三方向排列的至少两个条形挡片，所述至少两个条形挡片沿垂直于所述第三方向的第四方向延伸，所述至少两个条形挡片在所述第四方向上的长度沿所述第三方向递增或递减，以对所述多个靶材进行不均匀遮挡，从而在所述衬底上形成厚度递减或递增的所述组合膜层。
  10. 如权利要求9所述溅射镀膜装置，其特征在于，所述承载面为柱面，所述承载面上具有在所述承载面的周向上排布的至少一个固定区域，所述溅射镀膜装置还包括驱动件，所述驱动件用于驱动所述基座以预设转速转动，以使所述承载面携带所述衬底绕所述承载面的轴线转动。
  11. 如权利要求10所述溅射镀膜装置，其特征在于，每个所述固定区域均包括在所述承载面的轴向上排布的多个固定区，单个所述固定区用于固定一个所述衬底，所述挡板的所述遮挡单元在所述承载面的轴向上排布，单个所述挡板的所述遮挡单元的数量与单个所述固定区域的所述固定区的数量相同。
  12. 如权利要求10所述溅射镀膜装置，其特征在于，所述多个靶材在所述承载面的周向上等间距地固定于所述内壁。
  13. 如权利要求9至12任一项所述溅射镀膜装置，其特征在于，所述多个靶材包括第一靶材和第二靶材，所述第一靶材和所述第二靶材的折射率不同。
  14. 如权利要求9至12任一项所述溅射镀膜装置，其特征在于，在同一所述遮挡单元中，所述至少两个条形挡片的同一端彼此对齐。
  15. 如权利要求14所述溅射镀膜装置，其特征在于，所述至少两个条形挡片包括依次排列的第一挡片、第二挡片以及第三挡片，所述第三挡片与所述第二挡片在所述第四方向上的长度的差为第一差值，所述第二挡片与所述第一挡片在所述第四方向上的长度的差为第二差值，所述第二差值与所述第一差值的比处于0.5至2.0范围内。
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