WO2019009811A3 - 用於控制氣體汙染物分解氧化的裝置及系統 - Google Patents

用於控制氣體汙染物分解氧化的裝置及系統 Download PDF

Info

Publication number
WO2019009811A3
WO2019009811A3 PCT/SG2018/050332 SG2018050332W WO2019009811A3 WO 2019009811 A3 WO2019009811 A3 WO 2019009811A3 SG 2018050332 W SG2018050332 W SG 2018050332W WO 2019009811 A3 WO2019009811 A3 WO 2019009811A3
Authority
WO
WIPO (PCT)
Prior art keywords
gaseous pollutants
decomposition oxidation
controlling
controlling decomposition
reaction portion
Prior art date
Application number
PCT/SG2018/050332
Other languages
English (en)
French (fr)
Other versions
WO2019009811A9 (zh
WO2019009811A2 (zh
Inventor
田志偉
Original Assignee
鑑鋒國際股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to SG11202000101TA priority Critical patent/SG11202000101TA/en
Priority to MYPI2020000091A priority patent/MY194516A/en
Priority to MYPI2020000096A priority patent/MY195067A/en
Priority to CN202010115341.9A priority patent/CN111237786B/zh
Priority to CN201880045259.4A priority patent/CN111315971B/zh
Priority to KR1020207003134A priority patent/KR102295177B1/ko
Priority to KR1020207003872A priority patent/KR102318517B1/ko
Priority to KR1020207003869A priority patent/KR102308332B1/ko
Application filed by 鑑鋒國際股份有限公司 filed Critical 鑑鋒國際股份有限公司
Priority to MYPI2020000097A priority patent/MY194531A/en
Priority to JP2020522275A priority patent/JP6968274B2/ja
Publication of WO2019009811A2 publication Critical patent/WO2019009811A2/zh
Publication of WO2019009811A3 publication Critical patent/WO2019009811A3/zh
Priority to US16/736,612 priority patent/US10898853B2/en
Priority to US16/736,481 priority patent/US10814271B2/en
Priority to US16/736,669 priority patent/US10946334B2/en
Publication of WO2019009811A9 publication Critical patent/WO2019009811A9/zh
Priority to US17/140,756 priority patent/US11406934B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/346—Controlling the process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D21/00—Separation of suspended solid particles from liquids by sedimentation
    • B01D21/26—Separation of sediment aided by centrifugal force or centripetal force
    • B01D21/267—Separation of sediment aided by centrifugal force or centripetal force by using a cyclone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B01D47/022—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by using a liquid curtain
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B01D47/063—Spray cleaning with two or more jets impinging against each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/14—Packed scrubbers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/64—Heavy metals or compounds thereof, e.g. mercury
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/72—Organic compounds not provided for in groups B01D53/48 - B01D53/70, e.g. hydrocarbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/73—After-treatment of removed components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/76—Gas phase processes, e.g. by using aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/79—Injecting reactants
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
    • F01N3/10—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
    • F01N3/24—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by constructional aspects of converting apparatus
    • F01N3/26—Construction of thermal reactors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/08—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases using flares, e.g. in stacks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/10—Oxidants
    • B01D2251/102—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/10—Oxidants
    • B01D2251/104—Ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/10—Oxidants
    • B01D2251/11—Air
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/20—Reductants
    • B01D2251/202—Hydrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/20—Reductants
    • B01D2251/208—Hydrocarbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane

Abstract

本發明提供一種用於控制氣體汙染物分解氧化的裝置及系統，其新穎的反應部設計可降低流體在處理過程中顆粒形成的現象，進而改善顆粒在反應部中累積的缺陷；此外還提供一種包括上述裝置的系統，其模組化設計使得該系統具有容易保養維護的優點。
PCT/SG2018/050332 2017-07-07 2018-07-05 用於控制氣體汙染物分解氧化的裝置及系統 WO2019009811A2 (zh)

Priority Applications (14)

Application Number Priority Date Filing Date Title
MYPI2020000097A MY194531A (en) 2017-07-07 2018-07-05 Device and system for decomposing and oxidizing gaseous pollutant
MYPI2020000091A MY194516A (en) 2017-07-07 2018-07-05 Device and system for decomposing and oxidizing gaseous pollutant
JP2020522275A JP6968274B2 (ja) 2017-07-07 2018-07-05 ガス状汚染物の分解・酸化をコントロールする装置及びシステム
CN201880045259.4A CN111315971B (zh) 2017-07-07 2018-07-05 用于控制气体污染物分解氧化的装置
KR1020207003134A KR102295177B1 (ko) 2017-07-07 2018-07-05 가스 오염물의 분해 및 산화를 위한 장치 및 시스템
KR1020207003872A KR102318517B1 (ko) 2017-07-07 2018-07-05 가스 오염물의 분해 및 산화를 위한 장치 및 시스템
KR1020207003869A KR102308332B1 (ko) 2017-07-07 2018-07-05 가스 오염물의 분해 및 산화를 위한 장치 및 시스템
SG11202000101TA SG11202000101TA (en) 2017-07-07 2018-07-05 Device and system for controlling decomposition oxidation of gaseous pollutants
MYPI2020000096A MY195067A (en) 2017-07-07 2018-07-05 Device And System For Decomposing And Oxidizing Gaseous Pollutant
CN202010115341.9A CN111237786B (zh) 2017-07-07 2018-07-05 用于控制气体污染物分解氧化的装置及系统
US16/736,612 US10898853B2 (en) 2017-07-07 2020-01-07 Device and system for decomposing and oxidizing gaseous pollutant
US16/736,481 US10814271B2 (en) 2017-07-07 2020-01-07 Device and system for decomposing and oxidizing gaseous pollutant
US16/736,669 US10946334B2 (en) 2017-07-07 2020-01-07 Device and system for decomposing and oxidizing gaseous pollutant
US17/140,756 US11406934B2 (en) 2017-07-07 2021-01-04 Device and system for decomposing and oxidizing gaseous pollutant

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762529795P 2017-07-07 2017-07-07
US62/529,795 2017-07-07

Related Child Applications (3)

Application Number Title Priority Date Filing Date
US16/736,481 Continuation US10814271B2 (en) 2017-07-07 2020-01-07 Device and system for decomposing and oxidizing gaseous pollutant
US16/736,669 Continuation US10946334B2 (en) 2017-07-07 2020-01-07 Device and system for decomposing and oxidizing gaseous pollutant
US16/736,612 Continuation US10898853B2 (en) 2017-07-07 2020-01-07 Device and system for decomposing and oxidizing gaseous pollutant

Publications (3)

Publication Number Publication Date
WO2019009811A2 WO2019009811A2 (zh) 2019-01-10
WO2019009811A3 true WO2019009811A3 (zh) 2019-02-28
WO2019009811A9 WO2019009811A9 (zh) 2020-05-28

Family

ID=64950263

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SG2018/050332 WO2019009811A2 (zh) 2017-07-07 2018-07-05 用於控制氣體汙染物分解氧化的裝置及系統

Country Status (7)

Country Link
US (4) US10814271B2 (zh)
JP (3) JP6968274B2 (zh)
KR (3) KR102295177B1 (zh)
CN (5) CN111306559A (zh)
MY (3) MY195067A (zh)
SG (3) SG10202001081TA (zh)
WO (1) WO2019009811A2 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021101444A2 (zh) 2019-11-21 2021-05-27 益科斯有限公司 一种处理气体污染物的装置
CN112370917A (zh) * 2020-10-30 2021-02-19 张全连 一种VOCs工业废气处理系统
CN114923193B (zh) * 2022-06-07 2023-03-17 上海协微环境科技有限公司 一种有害气体燃烧反应器

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1580636A (zh) * 2003-08-04 2005-02-16 华懋科技股份有限公司 旋涡式反应腔毒性气体处理装置及方法
US20050135984A1 (en) * 2003-12-19 2005-06-23 Shawn Ferron Apparatus and method for controlled combustion of gaseous pollutants
US20070053803A1 (en) * 2005-09-02 2007-03-08 Clean Systems Korea Inc. Scrubber for processing semiconductor waste gas
US20100064891A1 (en) * 2008-09-17 2010-03-18 Airgard, Inc. Reactive gas control
US7985379B2 (en) * 2004-11-12 2011-07-26 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
KR20110124630A (ko) * 2010-05-11 2011-11-17 크린시스템스코리아(주) 하이브리드 플라즈마 스크러버 시스템
US20120128541A1 (en) * 2009-08-07 2012-05-24 Seiji Kashiwagi Combustion-type exhaust gas treatment apparatus

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52146083A (en) * 1976-05-27 1977-12-05 Toshiba Corp Burner for sealing sealed-beam type lamps
US5123836A (en) * 1988-07-29 1992-06-23 Chiyoda Corporation Method for the combustion treatment of toxic gas-containing waste gas
US5462429A (en) * 1993-10-20 1995-10-31 Praxair Technology, Inc. Mechanical wiper for waste gas incinerator
JP3486022B2 (ja) * 1995-10-16 2004-01-13 ジャパン・エア・ガシズ株式会社 排ガス処理装置
KR0172185B1 (ko) * 1996-01-23 1999-02-18 김경균 폐가스 유해성분 처리장치와 방법
JPH10137630A (ja) * 1996-11-11 1998-05-26 Nikuni:Kk 液体処理装置
JP4066107B2 (ja) * 1997-11-21 2008-03-26 株式会社荏原製作所 排ガス処理用燃焼器
US6153150A (en) * 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
JP4497726B2 (ja) * 1998-12-01 2010-07-07 株式会社荏原製作所 排ガス処理装置
JP3460122B2 (ja) * 1999-07-14 2003-10-27 日本酸素株式会社 燃焼式除害装置及び燃焼式除害装置用バーナー
KR100328632B1 (ko) * 1999-08-14 2002-03-23 조현기 복합 가스 스크러버 시스템
JP2001059613A (ja) * 1999-08-20 2001-03-06 Iwatani Internatl Corp 半導体製造工程からの排ガスの除害装置
JP3994605B2 (ja) * 1999-11-26 2007-10-24 株式会社日立製作所 Ｐｆｃガスの処理方法及び処理装置
JP2001165422A (ja) * 1999-12-10 2001-06-22 Iwatani Internatl Corp 半導体製造工程からの排ガスの除害装置
TW536604B (en) * 2000-10-02 2003-06-11 Ebara Corp Combustion type waste gas treatment system
JP4211227B2 (ja) 2001-03-16 2009-01-21 株式会社日立製作所 過弗化物の処理方法及びその処理装置
JP4009501B2 (ja) * 2002-06-25 2007-11-14 岩谷産業株式会社 燃焼式縦型除害装置
JP2004053219A (ja) 2002-07-24 2004-02-19 Nippon Sanso Corp 燃焼除害装置
JP2004068556A (ja) 2002-08-02 2004-03-04 Tomoji Kato 庭園用貯水槽
CN1253236C (zh) 2003-09-09 2006-04-26 华懋科技股份有限公司 全氟化物废气处理方法
JP4594065B2 (ja) 2004-12-21 2010-12-08 ローム株式会社 半導体製造プロセスからの排気ガスに含まれるフッ素化合物の処理装置及び処理方法
KR100623368B1 (ko) * 2005-09-02 2006-09-12 크린시스템스코리아(주) 반도체 제조 장비용 직접 연소식 스크러버
EP1954926A2 (en) * 2005-10-31 2008-08-13 Applied Materials, Inc. Process abatement reactor
US8591819B2 (en) * 2006-12-05 2013-11-26 Ebara Corporation Combustion-type exhaust gas treatment apparatus
JP4937886B2 (ja) * 2006-12-05 2012-05-23 株式会社荏原製作所 燃焼式排ガス処理装置
JP2009018290A (ja) * 2007-07-13 2009-01-29 Ebara Corp 排ガス洗浄装置
JP5568223B2 (ja) 2008-07-03 2014-08-06 岩谷瓦斯株式会社 排ガスの燃焼式除害装置
CN101995026B (zh) * 2009-08-27 2014-03-26 上海至纯洁净系统科技有限公司 硅烷燃烧筒
TWI398293B (zh) * 2010-11-08 2013-06-11 Orient Service Co Ltd Cyclone Oxygen Combustion Unit for Treatment of Emissions from Semiconductor Processes
WO2012161711A1 (en) * 2011-05-25 2012-11-29 Flexenergy, Inc. Gasifier power plant and management of wastes
KR101406065B1 (ko) * 2012-03-16 2014-07-01 주식회사 글로벌스탠다드테크놀로지 선회류 예혼합 저공해 연소장치
KR101519553B1 (ko) * 2013-04-03 2015-05-14 씨에스케이(주) 사이클론을 이용한 반도체 폐가스 처리용 스크러버
US9023303B2 (en) 2013-04-15 2015-05-05 Airgard, Inc. Extended or multiple reaction zones in scrubbing apparatus
CN105090999B (zh) * 2014-05-12 2018-11-20 日本派欧尼株式会社 废气的燃烧式净化装置
JP5977419B1 (ja) * 2015-03-12 2016-08-24 株式会社荏原製作所 排ガス処理装置
CN205925398U (zh) * 2016-07-26 2017-02-08 宝虹(新加坡)私人有限公司 一种废气处理装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1580636A (zh) * 2003-08-04 2005-02-16 华懋科技股份有限公司 旋涡式反应腔毒性气体处理装置及方法
US20050135984A1 (en) * 2003-12-19 2005-06-23 Shawn Ferron Apparatus and method for controlled combustion of gaseous pollutants
US7985379B2 (en) * 2004-11-12 2011-07-26 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US20070053803A1 (en) * 2005-09-02 2007-03-08 Clean Systems Korea Inc. Scrubber for processing semiconductor waste gas
US20100064891A1 (en) * 2008-09-17 2010-03-18 Airgard, Inc. Reactive gas control
US20120128541A1 (en) * 2009-08-07 2012-05-24 Seiji Kashiwagi Combustion-type exhaust gas treatment apparatus
KR20110124630A (ko) * 2010-05-11 2011-11-17 크린시스템스코리아(주) 하이브리드 플라즈마 스크러버 시스템

Also Published As

Publication number Publication date
MY194531A (en) 2022-11-30
MY194516A (en) 2022-11-30
KR102295177B1 (ko) 2021-08-27
CN111315971B (zh) 2021-12-10
US11406934B2 (en) 2022-08-09
CN111315971A (zh) 2020-06-19
US20200139297A1 (en) 2020-05-07
KR102318517B1 (ko) 2021-10-27
US10814271B2 (en) 2020-10-27
SG10202001081TA (en) 2020-03-30
CN111306558B (zh) 2022-03-04
CN111306560B (zh) 2022-03-04
CN111237786A (zh) 2020-06-05
WO2019009811A9 (zh) 2020-05-28
US10898853B2 (en) 2021-01-26
CN111306560A (zh) 2020-06-19
US10946334B2 (en) 2021-03-16
US20200164309A1 (en) 2020-05-28
CN111237786B (zh) 2022-04-29
JP7191056B2 (ja) 2022-12-16
JP6968274B2 (ja) 2021-11-17
JP6992100B2 (ja) 2022-01-13
KR102308332B1 (ko) 2021-10-01
MY195067A (en) 2023-01-06
KR20200027965A (ko) 2020-03-13
US20210121823A1 (en) 2021-04-29
JP2020201030A (ja) 2020-12-17
WO2019009811A2 (zh) 2019-01-10
JP2020527220A (ja) 2020-09-03
KR20200020953A (ko) 2020-02-26
SG10202001086WA (en) 2020-04-29
JP2020142233A (ja) 2020-09-10
KR20200020952A (ko) 2020-02-26
CN111306558A (zh) 2020-06-19
SG11202000101TA (en) 2020-02-27
US20200139300A1 (en) 2020-05-07
CN111306559A (zh) 2020-06-19

Similar Documents

Publication Publication Date Title
MX2019005273A (es) Metodos, sistemas y aparatos para controlar el movimiento de dispositivos de transporte.
MY192571A (en) Treatment installation and method for treating workpieces
PH12017501143A1 (en) Process for separation of gases with reduced maintenance costs
WO2019009811A3 (zh) 用於控制氣體汙染物分解氧化的裝置及系統
MX2019007435A (es) Hidrocraqueo de petroleo residual en multiples etapas.
IL230750B (en) Propulsion system of a terrestrial robot
MX2016009503A (es) Plasma no termico.
MY175457A (en) Flow reactor vessels and reactor systems
MX2022008800A (es) Sistemas y metodos de control adecuados para el uso con sistemas y metodos de produccion de energia.
MY179341A (en) Method for producing l-amino acids using an alkaliphilic bacteria
ZA202005557B (en) Systems and methods for power production using a carbon dioxide working fluid
MX2015006988A (es) Proceso para suministrar continuamente un fluido de fracturamiento.
MY177465A (en) A microorganism of the genus escherichia producing l-tryptophan and a method for producing l-tryptophan using the same
MX2018002555A (es) Vidrio de seguridad y procesamiento para su obtencion.
SA518391582B1 (ar) طريقة إنتاج ميثان من ثاني أوكسيد الكربون بواسطة الزراعة المشتركة
MX2019004006A (es) Agua carbonatada que contiene alulosa y metodo de preparacion para la misma.
UA115273C2 (uk) Спосіб очищення червоного шламу
GB2520213A (en) Odour controller
RU2013154981A (ru) Состав карбюризатора для цементации изделий из низкоуглеродистой стали
LT2013013A (lt) Nuotekų perpumpavimo stočių ozonavimo būdas ir sistema
EP3434813A4 (en) CHEMICAL CONVERSION PROCESSED STEEL PLATE AND PROCESS FOR PRODUCING CHEMICAL CONVERSION PROCESSED STEEL PLATE
IN2014MU00854A (zh)
WO2018047032A3 (en) Process for selective conversion of hydrocarbons to c2 fraction and syngas composition
WO2018056665A3 (ko) 액상 플라즈마를 포함하는 아토피 또는 건선 치료용 조성물
AU2017903943A0 (en) Process and catalyst for reducing carbon dioxide

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18827445

Country of ref document: EP

Kind code of ref document: A2

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
ENP Entry into the national phase

Ref document number: 2020522275

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20207003134

Country of ref document: KR

Kind code of ref document: A

122 Ep: pct application non-entry in european phase

Ref document number: 18827445

Country of ref document: EP

Kind code of ref document: A2