WO2018235229A1 - Micro-soupape - Google Patents

Micro-soupape Download PDF

Info

Publication number
WO2018235229A1
WO2018235229A1 PCT/JP2017/023035 JP2017023035W WO2018235229A1 WO 2018235229 A1 WO2018235229 A1 WO 2018235229A1 JP 2017023035 W JP2017023035 W JP 2017023035W WO 2018235229 A1 WO2018235229 A1 WO 2018235229A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
micro valve
diaphragm
base layer
diaphragm layer
Prior art date
Application number
PCT/JP2017/023035
Other languages
English (en)
Japanese (ja)
Inventor
文剣 盧
繁明 芝本
一法 ▲高▼橋
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to PCT/JP2017/023035 priority Critical patent/WO2018235229A1/fr
Publication of WO2018235229A1 publication Critical patent/WO2018235229A1/fr

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/16—Injection
    • G01N30/20—Injection using a sampling valve

Definitions

  • the present invention relates to a micro valve having a laminated structure in which a plurality of layers are laminated.
  • a valve device for switching a flow path in the device.
  • an analyzer such as a gas chromatograph
  • a multiport valve is used as a valve device.
  • Each port of the multiport valve in the analyzer is directed to the detector through a sample gas introduction pipe for introducing a sample gas, a sample loop for collecting the sample gas, a carrier gas introduction pipe for introducing a carrier gas, and a separation column. It communicates with a sample gas supply pipe or the like for supplying a sample gas (see, for example, Patent Document 1 below).
  • a sample gas is introduced from a sample introduction pipe.
  • the sample gas flows into the sample loop through the port of the multiport valve and is collected by the sample loop.
  • the flow path of the multiport valve is switched.
  • the carrier gas is introduced from the carrier gas inlet pipe.
  • Carrier gas flows into the sample loop through the port of the multiport valve.
  • Such a multiport valve has a mechanism for switching the flow path inside.
  • the multiport valve includes a disk-shaped rotor provided with a plurality of openings, and a disk-shaped stator provided with a plurality of grooves.
  • the rotor and the stator are provided in the multiport valve in a stacked state.
  • the openings of the rotor and the grooves of the stator constitute a flow path.
  • the flow path is switched by rotating the rotor with respect to the stator and changing the relative position of the opening of the rotor and the groove of the stator.
  • the rotor rotates in contact with the stator each time the flow path is switched. Therefore, there is a problem that the rotor and the stator are easily worn and the product life is shortened.
  • the contact portion (seal surface) in these mechanisms is generally made of fluorocarbon resin. Therefore, when the multiport valve is used in a high temperature state, there is a problem that the seal surface is plastically deformed and the contact becomes imperfect, and a leak occurs in the subsequent operation.
  • the multiport valve is relatively large in size, there is also a problem that it is not suitable for analysis of a small amount of gas.
  • the present invention has been made in view of the above-described circumstances, and an object thereof is to provide a micro valve capable of improving durability and achieving downsizing.
  • the micro valve according to the present invention is a micro valve having a laminated structure in which a plurality of layers are laminated.
  • the micro valve comprises a base layer and a diaphragm layer.
  • an inlet through which the gas flows into the micro valve, and an outlet through which the gas flowing from the inlet flows out of the micro valve are respectively formed as through holes.
  • the diaphragm layer is made of a silicon film opposed to the base layer, and opens and closes at least one of the inlet and the outlet by elastically deforming with the inflow of pneumatic fluid into the micro valve. .
  • the micro valve in the micro valve, at least one of the inlet and the outlet is opened and closed by elastically deforming the diaphragm layer with the inflow of the pneumatic fluid. Therefore, in the micro valve, at least one of the inlet and the outlet can be opened and closed without having a mechanism for rotating the member.
  • the microvalve can be miniaturized.
  • the micro valve may further include a cover layer.
  • the cover layer faces the diaphragm layer on the side opposite to the base layer side.
  • the diaphragm layer can be protected by the cover layer.
  • a pneumatic fluid may flow between the diaphragm layer and the cover layer to press the diaphragm layer toward the base layer.
  • the diaphragm layer can be elastically deformed to the base layer side.
  • the said cover layer may function as a stopper with respect to the said diaphragm layer, when the said diaphragm layer is pressed on the said cover layer side by the gas which flows in from the said inflow port.
  • the cover layer functions as a stopper for restricting the deformation of the diaphragm layer to a certain degree or more even when high pressure gas flows in from the inlet. Therefore, the cover layer can prevent the diaphragm layer from being broken.
  • At least one of the inlet and the outlet can be opened and closed without having a mechanism for rotating the member. Therefore, the member worn by rotation can be eliminated, and the durability can be improved.
  • the mechanism for opening and closing the inlet and the outlet can be simply configured. Therefore, it is possible to reduce the size.
  • FIG. 1 is a perspective view showing a configuration of a micro valve 1 according to an embodiment of the present invention, showing a state in which the micro valve 1 is viewed from the upper side.
  • FIG. 2 is an exploded perspective view of the micro valve 1 shown in FIG.
  • FIG. 3 is a perspective view showing the micro valve 1 as viewed from below.
  • FIG. 4 is an exploded perspective view of the micro valve 1 shown in FIG. 1 to 4 show a state in which a part of the micro valve 1 is cut away.
  • the upper side of the sheet is the upper side
  • the lower side of the sheet is the lower side
  • the vertical direction coincides with the axial direction of the micro valve 1. That is, the upper side is one in the axial direction, and the lower side is the other in the axial direction.
  • the micro valve 1 is a plate-like member having a predetermined thickness in the form of a square in plan view, and has a laminated structure in which a plurality of (three-layer) flat-plate-like members are laminated.
  • the micro valve 1 includes a base layer 2, a diaphragm layer 3, and a cover layer 4 as a layered structure.
  • the dimension in the width direction (left and right direction) of the micro valve 1 and the dimension in the orthogonal direction (front and back direction) orthogonal to the width direction are each about 1 cm.
  • Each layer 2, 3, 4, fine processing is given by the MEMS (Micro Electro Mechanical Systems) technology.
  • the base layer 2 is a layer located on the lowermost side in the micro valve 1.
  • the base layer 2 is formed in a flat plate shape having a square shape in plan view, and is made of, for example, silicon.
  • the base layer 2 is formed with a recess 21, an outer opening 22, a first inner opening 23 and a second inner opening 24.
  • Recess 21 is located in central base layer 2.
  • Recess 21 is a circular shape in plan view, is recessed from the upper surface of the base layer 2 downward.
  • the thickness of the recess 21 is, for example, 5 to 20 ⁇ m, and preferably about 10 ⁇ m.
  • the portion located below the recess 21 is the contact portion 26, and the portion located outside the recess 21 and the contact portion 26 is the contact portion 27.
  • the outer opening 22 is located at the outer edge (contact portion 27) of the base layer 2.
  • the outer opening 22 is circular in a plan view, and penetrates the adhesion portion 27 in the thickness direction.
  • the outer opening 22 is spaced apart from the recess 21.
  • the first inner opening 23 is formed as a through hole located in the center of the central portion of the base layer 2 (contact portion 26).
  • the first inner opening 23 is circular in plan view, and penetrates the contact portion 26 in the thickness direction.
  • the first inner opening 23 is communicated with the recess 21.
  • the first inner opening 23 is an example of an inlet.
  • the second inner opening 24 is formed as a through hole located in the center of the base layer 2 (contact portion 26). Specifically, the second inner opening 24 is positioned at a distance in the vicinity of the first inner opening 23. The second inner opening 24 is circular in plan view, and penetrates the contact portion 26 in the thickness direction. The second inner opening 24 is in communication with the recess 21.
  • the second inner opening 24 is an example of a flow outlet.
  • the diaphragm layer 3 is located above the base layer 2 and faces the base layer 2.
  • the diaphragm layer 3 is formed in a flat plate shape of a square in plan view, and is made of, for example, silicon. That is, the diaphragm layer 3 is formed as a silicon film.
  • the outer shape of the diaphragm layer 3 is formed substantially the same as the outer shape of the base layer 2.
  • the diaphragm layer 3 is formed with an annular recess 31 and an outer opening 32.
  • the thickness of the diaphragm layer 3 is 150 ⁇ m or less.
  • the annular recess 31 is located at the center of the diaphragm layer 3.
  • Annular recess 31 is a plan view annular recessed downward from the upper surface of the diaphragm layer 3.
  • the outer diameter of the annular recess 31 is substantially the same as the outer diameter of the recess 21 of the base layer 2.
  • a portion located below the annular recess 31 is the deformation portion 33, and a portion located inward of the annular recess 31 and the deformation portion 33 is the moving portion 34.
  • the annular recess 31 and the deformation portion part located outside the 33, a fixing portion 35.
  • Deformable portion 33 is a thin film in a plan view annular.
  • the thickness of the deformed portion 33 is, for example, 10 to 100 ⁇ m, and preferably about 50 ⁇ m. Since the deformation portion 33 is formed in a thin film shape, it has flexibility.
  • the inner end portion of the deformation portion 33 is continuous with the outer edge of the lower end portion of the moving portion 34 formed in a disk shape, and the outer end portion of the deformation portion 33 is a lower end portion of the fixed portion 35 formed annularly. It is continuous with the inner edge of
  • the outer opening 32 is located at the outer edge (fixed portion 35) of the diaphragm layer 3.
  • the outer opening 32 is circular in plan view, and penetrates the fixing portion 35 in the thickness direction.
  • the outer opening 32 is spaced apart from the annular recess 31.
  • the diameter of the outer opening 32 is substantially the same as the diameter of the outer opening 22 of the base layer 2.
  • the positional relationship between the outer opening 32 and the annular recess 31 corresponds to the positional relationship between the outer opening 22 and the recess 21 in the base layer 2.
  • the cover layer 4 is located above the diaphragm layer 3 and faces the diaphragm layer 3. That is, the cover layer 4 is opposed to the diaphragm layer 3 on the opposite side to the base layer 2.
  • the cover layer 4 is formed in a flat plate shape having a square shape in plan view, and is made of, for example, silicon.
  • the outer shape of the cover layer 4 is formed substantially the same as the outer shape of the diaphragm layer 3 and the outer shape of the base layer 2.
  • the cover layer 4 is formed with a first recess 41 and a second recess 42.
  • the first recess 41 is located at the center of the cover layer 4.
  • the first recess 41 is a circular shape in plan view, is recessed upward from the lower surface of the cover layer 4.
  • the thickness of the first recess 41 is substantially the same as the thickness of the recess 21 of the base layer 2.
  • the second recess 42 is located at the outer edge of the cover layer 4.
  • the second recess 42 linearly extends in the horizontal direction (radial direction), and is recessed upward from the lower surface of the cover layer 4.
  • An inner portion of the second recess 42 communicates with the first recess 41.
  • the width of the second recess 42 is substantially the same as the diameter of the outer opening 22 of the base layer 2 and the diameter of the outer opening 32 of the diaphragm layer 3.
  • the positional relationship between the outer portion 42 a of the second recess 42 and the first recess 41 is the positional relationship between the outer opening 32 and the annular recess 31 in the diaphragm layer 3, and the outer opening 22 and the recess 21 in the base layer 2. It corresponds to the positional relationship of.
  • a portion located above the first recess 41 is the regulating portion 43, and a portion located outside the first recess 41, the second recess 42 and the regulating portion 43 is the adhesion portion 44.
  • each layer is formed in each layer in advance by etching or blasting. Further, each layer is subjected to inactivation treatment in advance. Then, the layers after being subjected to these treatments are stacked to form the micro valve 1.
  • the adhesion portion 27 of the base layer 2 and the adhesion portion 44 of the cover layer 4 adhere to the fixing portion 35 of the diaphragm layer 3. doing.
  • the outer opening 22 of the base layer 2 communicates with the outer opening 32 of the diaphragm layer 3 and the second recess 42 (outer portion 42 a) of the cover layer 4.
  • the annular recess 31 of the diaphragm layer 3 communicates with the first recess 41 and the second recess 42 of the cover layer 4.
  • the moving portion 34 of the diaphragm layer 3 is disposed at a distance from each of the contact portion 26 of the base layer 2 and the regulating portion 43 of the diaphragm layer 3. As described above, by stacking and fixing each layer, the space located on the upper side and the space located on the lower side are separated and formed in the micro valve 1 with the diaphragm layer 3 interposed therebetween. There is.
  • FIGS. 5 to 7 are cross-sectional views showing the configuration of the micro valve 1.
  • FIG. 5 shows a state where the moving part 34 of the diaphragm layer 3 is located at the first position.
  • FIG. 6 shows a state where the moving part 34 of the diaphragm layer 3 is positioned at the second position by the introduction of the sample gas.
  • FIG. 7 shows a state in which the moving part 34 of the diaphragm layer 3 is positioned at the third position by the introduction of the pneumatic fluid.
  • the micro valve 1 is connected to the flow path member 50 and used.
  • the flow path member 50 is a member made of a metal material having a flat surface 51.
  • openings 52, 53, and 54 that penetrate the flat surface 51 are formed.
  • Each of the openings 52, 53 and 54 is formed to correspond to the outer opening 22, the first inner opening 23 and the second inner opening 24 of the micro valve 1.
  • the lower surface of the close contact portion 27 of the base layer 2 and the lower surface of the contact portion 26 are in close contact with the flat surface 51 of the flow path member 50.
  • the opening 52 of the flow path member 50 communicates with the outer opening 22 of the base layer 2
  • the opening 53 of the flow path member 50 communicates with the first inner opening 23 of the base layer 2
  • the opening 54 of the flow passage member 50 is in communication with the second inner opening 24 of the base layer 2.
  • the moving portion 34 of the diaphragm layer 3 is disposed at a distance from each of the contact portion 26 of the base layer 2 and the restricting portion 43 of the cover layer 4 as described above. Specifically, the mobile unit 34 to the contact portion 26, are spaced apart in the thickness of the recess 21. The mobile unit 34, to the regulating unit 43 are arranged at a distance corresponding to the thickness of the first recess 41. The position of the moving part 34 of the diaphragm layer 3 shown in FIG. 5 is the first position.
  • the sample gas is supplied toward the opening 53 of the channel member 50 to the microvalve 1.
  • Sample gas from the flow path member 50 is introduced into the micro-valve 1 through the first inner aperture 23 of the base layer 2.
  • the pneumatic fluid described later is not introduced.
  • the moving portion 34 of the diaphragm layer 3 When the sample gas is introduced into the micro valve 1, the moving portion 34 of the diaphragm layer 3 is pressed toward the upper side (the cover layer 4 side) by the pressure of the sample gas. Thereby, the deformation portion 33 of the diaphragm layer 3 is elastically deformed, and the moving portion 34 moves (displaces) to the upper side (the cover layer 4 side). Then, the moving portion 34 that abuts against the restriction portion 43 of the cover layer 4, further movement of the moving part 34 is restricted. Thus, restricting portion 43 of the cover layer 4 functions as a stopper for the moving part 34 of the diaphragm layer 3.
  • the position of the moving part 34 of the diaphragm layer 3 shown in FIG. 6 is the second position.
  • the distance between the moving portion 34 of the diaphragm layer 3 and the contact portion 26 of the base layer 2 is expanded, the flow path of the sample gas is secured, and the micro valve 1 is in the open state.
  • the gas that has flowed into the micro valve 1 from the first inner opening 23 passes through the space between the moving part 34 and the contact part 26, and then passes through the second inner opening 24. It flows out of the opening 54.
  • the pneumatic fluid is supplied.
  • Pneumatic fluid is, for example, a gas such as air.
  • the pneumatic fluid supplied from the flow path member 50 is introduced into the micro valve 1 via the outer opening 22 of the base layer 2 at a pressure higher than that of the sample gas.
  • the pneumatic fluid supplied into the micro valve 1 sequentially passes through the outer opening 22 of the base layer 2, the outer opening 32 of the diaphragm layer 3, and the second recess 42 of the cover layer 4 to form the diaphragm layer 3. Reaches the deformation portion 33 of the
  • the pressure of the pneumatic fluid applies a force toward the lower side (the base layer 2 side) with respect to the deformation portion 33 of the diaphragm layer 3.
  • the deformation portion 33 of the diaphragm layer 3 is elastically deformed, and a gap is generated between the moving portion 34 of the diaphragm layer 3 and the regulation portion 43 of the cover layer 4.
  • the pneumatic fluid flows into the gap, and the pressure of the pneumatic fluid pushes the moving portion 34 of the diaphragm layer 3 toward the lower side (the base layer 2 side).
  • the deformation portion 33 of the diaphragm layer 3 is further elastically deformed, and the moving portion 34 of the diaphragm layer 3 moves (displaces) to the lower side (base layer 2 side), and the contact portion of the base layer 2 Close contact with 26.
  • the position of the moving part 34 of the diaphragm layer 3 shown in FIG. 7 is the third position.
  • the introduction of the pneumatic fluid into the micro valve 1 causes the moving portion 34 of the diaphragm layer 3 to be in close contact with the contact portion 26 of the base layer 2 so that the micro valve 1 is closed. Further, the sample gas is supplied while the pneumatic fluid is not supplied to the micro valve 1, whereby the distance between the moving part 34 of the diaphragm layer 3 and the contact part 26 of the base layer 2 is expanded, and the micro valve 1 will be open.
  • micro valve 1 can be used as a valve provided in various devices. Also, by preparing a plurality of microvalves 1 and using each microvalve 1 as a port, it is possible to perform the same operation as a multiport valve. 3. Action effect
  • the first inner opening 23 and the second inner opening 24 can be opened and closed without having a mechanism for rotating the member.
  • the durability of the micro valve 1 can be improved.
  • the mechanism for opening and closing the first inner opening 23 and the second inner opening 24 can be simply configured. Therefore, the microvalve 1 can be miniaturized.
  • the base layer 2, the diaphragm layer 3 and the cover layer 4 of the micro valve 1 are each made of silicon. Therefore, the heat resistance of the micro valve 1 can be improved. As a result, it is possible to use the micro valve 1 even in a high temperature environment of, for example, 400 ° C. or higher.
  • the micro valve 1 includes the cover layer 4.
  • the cover layer 4 faces the diaphragm layer 3 on the side opposite to the base layer 2 side. Therefore, the diaphragm layer 3 can be protected by the cover layer 4.
  • the diaphragm layer 3 is a base by the pneumatic fluid flowing between the diaphragm layer 3 and the cover layer 4. It is pressed to the layer 2 side.
  • the diaphragm layer 3 (deformed portion 33) is elastically deformed to the base layer 2 side. Can.
  • the cover layer 4 is pressed to the cover layer 4 side by the sample gas flowing in from the first inner opening 23 of the base layer 2. Function as a stopper for the diaphragm layer 3.
  • the cover layer 4 functions as a stopper for restricting the deformation of the diaphragm layer 3 to a certain degree or more. Therefore, the cover layer 4 can prevent the diaphragm layer 3 from being broken.
  • the base layer 2, the diaphragm layer 3 and the cover layer 4 of the micro valve 1 are each described as being made of silicon. However, at least one of the base layer 2 and the cover layer 4 of the micro valve 1 may be formed of another material such as glass.
  • the moving portion 34 of the diaphragm layer 3 is described as being separated from the restricting portion 43 of the cover layer 4 in the state where the moving portion 34 of the diaphragm layer 3 is positioned at the first position.
  • the moving part 34 of the diaphragm layer 3 may be in close contact with the restricting part 43 of the cover layer 4 in the state where the moving part 34 of the diaphragm layer 3 is positioned at the first position.
  • the moving portion 34 of the diaphragm layer 3 may be in close contact with the contact portion 26 of the base layer 2.
  • the pneumatic fluid is described as a gas such as air.
  • pneumatic fluid may be a liquid.
  • the pneumatic fluid is described as being introduced into the micro valve 1 from the base layer 2 side.
  • the cover layer 4 may be provided with an opening, and the pneumatic fluid may be introduced into the micro valve 1 from the opening.

Abstract

Dans la présente invention, si un fluide pneumatique est fourni à une micro-soupape (1), une section à déformation (33) d'une couche de diaphragme (3) se déforme élastiquement et une section mobile (34) de la couche de diaphragme (3) adhère étroitement à une section de contact (26) d'une couche de base (2). Ensuite, une première ouverture interne (23) et une seconde ouverture interne (24) de la couche de base (2) sont fermées par la section mobile (34) de la couche de diaphragme (3), fermant un canal d'écoulement de gaz échantillon et plaçant la micro-soupape dans un état fermé. Si un échantillon de gaz est fourni quand un fluide pneumatique n'est pas fourni à la micro-soupape (1), l'espace entre la section mobile de la couche de diaphragme (3) et la section de contact (26) de la couche de base (2) s'élargit, établissant un canal d'écoulement de gaz d'échantillon et plaçant la micro-soupape (1) dans un état ouvert. Par conséquent, la première ouverture interne (23) et la seconde ouverture interne (24) peuvent être ouvertes et fermées sans mécanisme de rotation d'élément dans la micro-soupape (1). La configuration du mécanisme d'ouverture et de fermeture de la première ouverture interne (23) et de la seconde ouverture interne (24) peut également être simplifiée et la taille de la micro-soupape (1) peut être réduite.
PCT/JP2017/023035 2017-06-22 2017-06-22 Micro-soupape WO2018235229A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2017/023035 WO2018235229A1 (fr) 2017-06-22 2017-06-22 Micro-soupape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2017/023035 WO2018235229A1 (fr) 2017-06-22 2017-06-22 Micro-soupape

Publications (1)

Publication Number Publication Date
WO2018235229A1 true WO2018235229A1 (fr) 2018-12-27

Family

ID=64737010

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2017/023035 WO2018235229A1 (fr) 2017-06-22 2017-06-22 Micro-soupape

Country Status (1)

Country Link
WO (1) WO2018235229A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021050758A (ja) * 2019-09-24 2021-04-01 株式会社島津製作所 マイクロバルブ
JP2021050978A (ja) * 2019-09-24 2021-04-01 株式会社島津製作所 ガスサンプラ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004291187A (ja) * 2003-03-27 2004-10-21 Shimadzu Corp 静電マイクロバルブ及びマイクロポンプ
JP2006506239A (ja) * 2002-11-18 2006-02-23 レッドウッド マイクロシステムズ インコーポレイテッド シリコン・デバイスの耐食性チャネルの製造および試験の方法
JP2009014010A (ja) * 2007-06-29 2009-01-22 Ulvac Seimaku Kk マイクロバルブ及びその製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006506239A (ja) * 2002-11-18 2006-02-23 レッドウッド マイクロシステムズ インコーポレイテッド シリコン・デバイスの耐食性チャネルの製造および試験の方法
JP2004291187A (ja) * 2003-03-27 2004-10-21 Shimadzu Corp 静電マイクロバルブ及びマイクロポンプ
JP2009014010A (ja) * 2007-06-29 2009-01-22 Ulvac Seimaku Kk マイクロバルブ及びその製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021050758A (ja) * 2019-09-24 2021-04-01 株式会社島津製作所 マイクロバルブ
JP2021050978A (ja) * 2019-09-24 2021-04-01 株式会社島津製作所 ガスサンプラ
US11242943B2 (en) 2019-09-24 2022-02-08 Shimadzu Corporation Micro-valve
US11531008B2 (en) 2019-09-24 2022-12-20 Shimadzu Corporation Gas sampler
JP7226223B2 (ja) 2019-09-24 2023-02-21 株式会社島津製作所 ガスサンプラ
JP7226221B2 (ja) 2019-09-24 2023-02-21 株式会社島津製作所 マイクロバルブ

Similar Documents

Publication Publication Date Title
JP5774024B2 (ja) マイクロバルブ
JP6622724B2 (ja) 流体および蒸気用高コンダクタンスバルブ
JP5701864B2 (ja) 短ストローク式流れ制御バルブ
US9555410B2 (en) Valve plug
JP4879285B2 (ja) 反発性ダイヤフラムを備える弁
JP2020046076A (ja) 溶接されたダイヤフラム弁座担体を有するダイヤフラム弁
JP2013516582A5 (fr)
US8141585B2 (en) Rocker type diaphragm valve
WO2018235229A1 (fr) Micro-soupape
CN112628462B (zh) 微型阀
US11885420B2 (en) Control plate for a high conductance valve
WO2015119008A1 (fr) Dispositif de soupape
WO2015115271A1 (fr) Dispositif de régulation de fluide
JP2019124625A (ja) バルブシステム
WO2018167829A1 (fr) Micro-vanne
JP2009236284A (ja) マイクロバルブ及びマイクロポンプ
WO2020217961A1 (fr) Diaphragme, soupape et procédé de formation de film
JP7445314B2 (ja) ダイヤフラム、バルブ、およびダイヤフラムの製造方法
WO2022137693A1 (fr) Soupape de pression différentielle et dispositif de soupape la comprenant
US11541389B2 (en) Fluid handling device and fluid handling system
JP5476197B2 (ja) 微小変位出力装置
WO2020012876A1 (fr) Dispositif de manipulation de fluide et système de manipulation de fluide
CN107606252B (en) Passive one-way valve for microfluidic chip
JP2020116568A (ja) 流体取扱装置、流体取扱システムおよび移動基板
US20160319958A1 (en) Multiplexed valve for microfluidic devices

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17914512

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17914512

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP