WO2018235229A1

WO2018235229A1 - Microvalve

Info

Publication number: WO2018235229A1
Application number: PCT/JP2017/023035
Authority: WO
Inventors: 文剣盧; 繁明芝本; 一法 ▲高▼橋
Original assignee: 株式会社島津製作所
Priority date: 2017-06-22
Filing date: 2017-06-22
Publication date: 2018-12-27

Abstract

In this invention, if a pneumatic fluid is supplied to a microvalve 1, a deforming section 33 of a diaphragm layer 3 deforms elastically and a moving section 34 of the diaphragm layer 3 adheres closely to a contact section 26 of a base layer 2. Then, a first internal opening 23 and a second internal opening 24 of the base layer 2 are closed by the moving section 34 of the diaphragm layer 3, closing a sample gas flow channel and putting the microvalve in a closed state. If a sample gas is supplied when a pneumatic fluid is not being supplied to the microvalve 1, the space between the moving section 34 of the diaphragm layer 3 and the contact section 26 of the base layer 2 widens, establishing a sample gas flow channel and putting the microvalve 1 in an open state. As a result, it is possible to open and close the first internal opening 23 and the second internal opening 24 without having a member-rotating mechanism in the microvalve 1. It is also possible to simplify the configuration of the mechanism for opening and closing the first internal opening 23 and the second internal opening 24 and to reduce the size of the microvalve 1.

Description

Micro valve

The present invention relates to a micro valve having a laminated structure in which a plurality of layers are laminated.

2. Description of the Related Art Conventionally, in various devices, a valve device for switching a flow path in the device is provided. For example, in an analyzer such as a gas chromatograph, a multiport valve is used as a valve device. Each port of the multiport valve in the analyzer is directed to the detector through a sample gas introduction pipe for introducing a sample gas, a sample loop for collecting the sample gas, a carrier gas introduction pipe for introducing a carrier gas, and a separation column. It communicates with a sample gas supply pipe or the like for supplying a sample gas (see, for example, Patent Document 1 below).

In this analyzer, first, a sample gas is introduced from a sample introduction pipe. The sample gas flows into the sample loop through the port of the multiport valve and is collected by the sample loop. After the inside of the sample loop is filled with the sample gas, the flow path of the multiport valve is switched. Then, the carrier gas is introduced from the carrier gas inlet pipe. Carrier gas flows into the sample loop through the port of the multiport valve. Thereby, the sample gas filling the inside of the sample loop is sent from the sample gas supply pipe to the detector through the separation column via the port of the multiport valve.

Such a multiport valve has a mechanism for switching the flow path inside. For example, the multiport valve includes a disk-shaped rotor provided with a plurality of openings, and a disk-shaped stator provided with a plurality of grooves. The rotor and the stator are provided in the multiport valve in a stacked state. The openings of the rotor and the grooves of the stator constitute a flow path. In the multiport valve, the flow path is switched by rotating the rotor with respect to the stator and changing the relative position of the opening of the rotor and the groove of the stator.

JP, 2015-190875, A

In the multiport valve as described above, the rotor rotates in contact with the stator each time the flow path is switched. Therefore, there is a problem that the rotor and the stator are easily worn and the product life is shortened. In addition, the contact portion (seal surface) in these mechanisms is generally made of fluorocarbon resin. Therefore, when the multiport valve is used in a high temperature state, there is a problem that the seal surface is plastically deformed and the contact becomes imperfect, and a leak occurs in the subsequent operation. In addition, since the multiport valve is relatively large in size, there is also a problem that it is not suitable for analysis of a small amount of gas.
The present invention has been made in view of the above-described circumstances, and an object thereof is to provide a micro valve capable of improving durability and achieving downsizing.

(1) The micro valve according to the present invention is a micro valve having a laminated structure in which a plurality of layers are laminated. The micro valve comprises a base layer and a diaphragm layer. In the base layer, an inlet through which the gas flows into the micro valve, and an outlet through which the gas flowing from the inlet flows out of the micro valve are respectively formed as through holes. The diaphragm layer is made of a silicon film opposed to the base layer, and opens and closes at least one of the inlet and the outlet by elastically deforming with the inflow of pneumatic fluid into the micro valve. .

According to such a configuration, in the micro valve, at least one of the inlet and the outlet is opened and closed by elastically deforming the diaphragm layer with the inflow of the pneumatic fluid.
Therefore, in the micro valve, at least one of the inlet and the outlet can be opened and closed without having a mechanism for rotating the member.

As a result, in the micro valve, it is possible to eliminate members that wear due to rotation. Therefore, the durability of the micro valve can be improved.
In addition, the mechanism for opening and closing the inlet and the outlet can be simply configured.
Therefore, the microvalve can be miniaturized.

(2) Further, the micro valve may further include a cover layer. The cover layer faces the diaphragm layer on the side opposite to the base layer side.

According to such a configuration, the diaphragm layer can be protected by the cover layer.

(3) Further, in the micro valve, a pneumatic fluid may flow between the diaphragm layer and the cover layer to press the diaphragm layer toward the base layer.

According to such a configuration, by utilizing the area between the diaphragm layer and the cover layer and flowing the pneumatic fluid into that area, the diaphragm layer can be elastically deformed to the base layer side.

(4) Moreover, the said cover layer may function as a stopper with respect to the said diaphragm layer, when the said diaphragm layer is pressed on the said cover layer side by the gas which flows in from the said inflow port.

According to such a configuration, the cover layer functions as a stopper for restricting the deformation of the diaphragm layer to a certain degree or more even when high pressure gas flows in from the inlet.
Therefore, the cover layer can prevent the diaphragm layer from being broken.

According to the present invention, at least one of the inlet and the outlet can be opened and closed without having a mechanism for rotating the member. Therefore, the member worn by rotation can be eliminated, and the durability can be improved. In addition, the mechanism for opening and closing the inlet and the outlet can be simply configured. Therefore, it is possible to reduce the size.

It is the perspective view which showed the structure of the micro valve which concerns on one Embodiment of this invention, Comprising: The state which looked at the micro valve from the upper side is shown. It is an exploded perspective view of a microvalve shown in FIG. It is the perspective view which showed the state which looked at the micro valve from the downward side. It is an exploded perspective view of a microvalve shown in FIG. A cross-sectional view showing a configuration of a microvalve, moving part of the base layer shows a state located in the first position. It is sectional drawing which showed the structure of a micro valve, Comprising: The state which the moving part of a base layer is located in a 2nd position is shown by introduce | transducing sample gas. It is sectional drawing which showed the structure of a micro valve, Comprising: The state which the moving part of a base layer is located in a 3rd position is shown by introduce | transducing pneumatic fluid.

1. Configuration of Micro Valve FIG. 1 is a perspective view showing a configuration of a micro valve 1 according to an embodiment of the present invention, showing a state in which the micro valve 1 is viewed from the upper side. FIG. 2 is an exploded perspective view of the micro valve 1 shown in FIG. FIG. 3 is a perspective view showing the micro valve 1 as viewed from below. FIG. 4 is an exploded perspective view of the micro valve 1 shown in FIG. 1 to 4 show a state in which a part of the micro valve 1 is cut away.

In the following description, when referring to the direction of the micro-valve 1, the state shown in FIGS. 1 to 4 and the upper and lower reference. That is, the upper side of the sheet is the upper side, and the lower side of the sheet is the lower side. Further, the vertical direction coincides with the axial direction of the micro valve 1. That is, the upper side is one in the axial direction, and the lower side is the other in the axial direction.

The micro valve 1 is a plate-like member having a predetermined thickness in the form of a square in plan view, and has a laminated structure in which a plurality of (three-layer) flat-plate-like members are laminated. Specifically, the micro valve 1 includes a base layer 2, a diaphragm layer 3, and a cover layer 4 as a layered structure. The dimension in the width direction (left and right direction) of the micro valve 1 and the dimension in the orthogonal direction (front and back direction) orthogonal to the width direction are each about 1 cm. Each

layer

2, 3, 4, fine processing is given by the MEMS (Micro Electro Mechanical Systems) technology.

As shown in FIG. 2, the base layer 2 is a layer located on the lowermost side in the micro valve 1. The base layer 2 is formed in a flat plate shape having a square shape in plan view, and is made of, for example, silicon. The base layer 2 is formed with a recess 21, an outer opening 22, a first inner opening 23 and a second inner opening 24.

Recess 21 is located in central base layer 2. Recess 21 is a circular shape in plan view, is recessed from the upper surface of the base layer 2 downward. The thickness of the recess 21 is, for example, 5 to 20 μm, and preferably about 10 μm. In the base layer 2, the portion located below the recess 21 is the contact portion 26, and the portion located outside the recess 21 and the contact portion 26 is the contact portion 27.

The outer opening 22 is located at the outer edge (contact portion 27) of the base layer 2. The outer opening 22 is circular in a plan view, and penetrates the adhesion portion 27 in the thickness direction. The outer opening 22 is spaced apart from the recess 21.

The first inner opening 23 is formed as a through hole located in the center of the central portion of the base layer 2 (contact portion 26). The first inner opening 23 is circular in plan view, and penetrates the contact portion 26 in the thickness direction. The first inner opening 23 is communicated with the recess 21. The first inner opening 23 is an example of an inlet.

The second inner opening 24 is formed as a through hole located in the center of the base layer 2 (contact portion 26). Specifically, the second inner opening 24 is positioned at a distance in the vicinity of the first inner opening 23. The second inner opening 24 is circular in plan view, and penetrates the contact portion 26 in the thickness direction. The second inner opening 24 is in communication with the recess 21. The second inner opening 24 is an example of a flow outlet.

The diaphragm layer 3 is located above the base layer 2 and faces the base layer 2. The diaphragm layer 3 is formed in a flat plate shape of a square in plan view, and is made of, for example, silicon. That is, the diaphragm layer 3 is formed as a silicon film. The outer shape of the diaphragm layer 3 is formed substantially the same as the outer shape of the base layer 2. The diaphragm layer 3 is formed with an annular recess 31 and an outer opening 32. The thickness of the diaphragm layer 3 is 150μm or less.

The annular recess 31 is located at the center of the diaphragm layer 3. Annular recess 31 is a plan view annular recessed downward from the upper surface of the diaphragm layer 3. The outer diameter of the annular recess 31 is substantially the same as the outer diameter of the recess 21 of the base layer 2. In the diaphragm layer 3, a portion located below the annular recess 31 is the deformation portion 33, and a portion located inward of the annular recess 31 and the deformation portion 33 is the moving portion 34. The annular recess 31 and the deformation portion part located outside the 33, a fixing portion 35.

Deformable portion 33 is a thin film in a plan view annular. The thickness of the deformed portion 33 is, for example, 10 to 100 μm, and preferably about 50 μm. Since the deformation portion 33 is formed in a thin film shape, it has flexibility. The inner end portion of the deformation portion 33 is continuous with the outer edge of the lower end portion of the moving portion 34 formed in a disk shape, and the outer end portion of the deformation portion 33 is a lower end portion of the fixed portion 35 formed annularly. It is continuous with the inner edge of

The outer opening 32 is located at the outer edge (fixed portion 35) of the diaphragm layer 3. The outer opening 32 is circular in plan view, and penetrates the fixing portion 35 in the thickness direction. The outer opening 32 is spaced apart from the annular recess 31. The diameter of the outer opening 32 is substantially the same as the diameter of the outer opening 22 of the base layer 2. The positional relationship between the outer opening 32 and the annular recess 31 corresponds to the positional relationship between the outer opening 22 and the recess 21 in the base layer 2.

As shown in FIG. 4, the cover layer 4 is located above the diaphragm layer 3 and faces the diaphragm layer 3. That is, the cover layer 4 is opposed to the diaphragm layer 3 on the opposite side to the base layer 2. The cover layer 4 is formed in a flat plate shape having a square shape in plan view, and is made of, for example, silicon. The outer shape of the cover layer 4 is formed substantially the same as the outer shape of the diaphragm layer 3 and the outer shape of the base layer 2. The cover layer 4 is formed with a first recess 41 and a second recess 42.

The first recess 41 is located at the center of the cover layer 4. The first recess 41 is a circular shape in plan view, is recessed upward from the lower surface of the cover layer 4. The thickness of the first recess 41 is substantially the same as the thickness of the recess 21 of the base layer 2.

The second recess 42 is located at the outer edge of the cover layer 4. The second recess 42 linearly extends in the horizontal direction (radial direction), and is recessed upward from the lower surface of the cover layer 4. An inner portion of the second recess 42 communicates with the first recess 41. The width of the second recess 42 is substantially the same as the diameter of the outer opening 22 of the base layer 2 and the diameter of the outer opening 32 of the diaphragm layer 3. The positional relationship between the outer portion 42 a of the second recess 42 and the first recess 41 is the positional relationship between the outer opening 32 and the annular recess 31 in the diaphragm layer 3, and the outer opening 22 and the recess 21 in the base layer 2. It corresponds to the positional relationship of. In the cover layer 4, a portion located above the first recess 41 is the regulating portion 43, and a portion located outside the first recess 41, the second recess 42 and the regulating portion 43 is the adhesion portion 44.

The openings and recesses in each layer are formed in each layer in advance by etching or blasting. Further, each layer is subjected to inactivation treatment in advance. Then, the layers after being subjected to these treatments are stacked to form the micro valve 1.

As shown in FIGS. 1 and 3, in the state in which each layer is laminated, the adhesion portion 27 of the base layer 2 and the adhesion portion 44 of the cover layer 4 adhere to the fixing portion 35 of the diaphragm layer 3. doing. The outer opening 22 of the base layer 2 communicates with the outer opening 32 of the diaphragm layer 3 and the second recess 42 (outer portion 42 a) of the cover layer 4. The annular recess 31 of the diaphragm layer 3 communicates with the first recess 41 and the second recess 42 of the cover layer 4. The moving portion 34 of the diaphragm layer 3 is disposed at a distance from each of the contact portion 26 of the base layer 2 and the regulating portion 43 of the diaphragm layer 3.
As described above, by stacking and fixing each layer, the space located on the upper side and the space located on the lower side are separated and formed in the micro valve 1 with the diaphragm layer 3 interposed therebetween. There is.

2. Operation of Micro Valve Hereinafter, the operation of the micro valve 1 will be described with reference to FIGS.
5 to 7 are cross-sectional views showing the configuration of the micro valve 1. Specifically, FIG. 5 shows a state where the moving part 34 of the diaphragm layer 3 is located at the first position. FIG. 6 shows a state where the moving part 34 of the diaphragm layer 3 is positioned at the second position by the introduction of the sample gas. FIG. 7 shows a state in which the moving part 34 of the diaphragm layer 3 is positioned at the third position by the introduction of the pneumatic fluid.

The micro valve 1 is connected to the flow path member 50 and used.
The flow path member 50 is a member made of a metal material having a flat surface 51. In the flow path member 50,

openings

52, 53, and 54 that penetrate the flat surface 51 are formed. Each of the

openings

52, 53 and 54 is formed to correspond to the outer opening 22, the first inner opening 23 and the second inner opening 24 of the micro valve 1.

In the state where the micro valve 1 is connected to the flow path member 50, the lower surface of the close contact portion 27 of the base layer 2 and the lower surface of the contact portion 26 are in close contact with the flat surface 51 of the flow path member 50. Further, the opening 52 of the flow path member 50 communicates with the outer opening 22 of the base layer 2, and the opening 53 of the flow path member 50 communicates with the first inner opening 23 of the base layer 2, The opening 54 of the flow passage member 50 is in communication with the second inner opening 24 of the base layer 2.

In the state shown in FIG. 5, no gas flows into the micro valve 1. In this state, the moving portion 34 of the diaphragm layer 3 is disposed at a distance from each of the contact portion 26 of the base layer 2 and the restricting portion 43 of the cover layer 4 as described above. Specifically, the mobile unit 34 to the contact portion 26, are spaced apart in the thickness of the recess 21. The mobile unit 34, to the regulating unit 43 are arranged at a distance corresponding to the thickness of the first recess 41. The position of the moving part 34 of the diaphragm layer 3 shown in FIG. 5 is the first position.

From this state, as shown in FIG. 6, the sample gas is supplied toward the opening 53 of the channel member 50 to the microvalve 1. Sample gas from the flow path member 50 is introduced into the micro-valve 1 through the first inner aperture 23 of the base layer 2. At this time, the pneumatic fluid described later is not introduced.

When the sample gas is introduced into the micro valve 1, the moving portion 34 of the diaphragm layer 3 is pressed toward the upper side (the cover layer 4 side) by the pressure of the sample gas. Thereby, the deformation portion 33 of the diaphragm layer 3 is elastically deformed, and the moving portion 34 moves (displaces) to the upper side (the cover layer 4 side). Then, the moving portion 34 that abuts against the restriction portion 43 of the cover layer 4, further movement of the moving part 34 is restricted. Thus, restricting portion 43 of the cover layer 4 functions as a stopper for the moving part 34 of the diaphragm layer 3. The position of the moving part 34 of the diaphragm layer 3 shown in FIG. 6 is the second position.

Thus, the distance between the moving portion 34 of the diaphragm layer 3 and the contact portion 26 of the base layer 2 is expanded, the flow path of the sample gas is secured, and the micro valve 1 is in the open state. The gas that has flowed into the micro valve 1 from the first inner opening 23 passes through the space between the moving part 34 and the contact part 26, and then passes through the second inner opening 24. It flows out of the opening 54.

On the other hand, when the flow path of the sample gas is closed in the micro valve 1, that is, when the micro valve 1 is in the closed state, as shown in FIG. The pneumatic fluid is supplied. Pneumatic fluid is, for example, a gas such as air. The pneumatic fluid supplied from the flow path member 50 is introduced into the micro valve 1 via the outer opening 22 of the base layer 2 at a pressure higher than that of the sample gas.

The pneumatic fluid supplied into the micro valve 1 sequentially passes through the outer opening 22 of the base layer 2, the outer opening 32 of the diaphragm layer 3, and the second recess 42 of the cover layer 4 to form the diaphragm layer 3. Reaches the deformation portion 33 of the

Then, the pressure of the pneumatic fluid applies a force toward the lower side (the base layer 2 side) with respect to the deformation portion 33 of the diaphragm layer 3. Thereby, the deformation portion 33 of the diaphragm layer 3 is elastically deformed, and a gap is generated between the moving portion 34 of the diaphragm layer 3 and the regulation portion 43 of the cover layer 4. The pneumatic fluid flows into the gap, and the pressure of the pneumatic fluid pushes the moving portion 34 of the diaphragm layer 3 toward the lower side (the base layer 2 side). Thereby, the deformation portion 33 of the diaphragm layer 3 is further elastically deformed, and the moving portion 34 of the diaphragm layer 3 moves (displaces) to the lower side (base layer 2 side), and the contact portion of the base layer 2 Close contact with 26.

Then, the first inner opening 23 and the second inner opening 24 of the base layer 2 are closed (blocked) by the moving portion 34 of the diaphragm layer 3, and the flow path of the sample gas is closed to close the micro valve. Become. The position of the moving part 34 of the diaphragm layer 3 shown in FIG. 7 is the third position.

Further, when the supply of the sample gas and the pneumatic fluid into the micro valve 1 is stopped, the moving portion 34 of the diaphragm layer 3 is moved to the third position as shown in FIG. Return to 1 position.

As described above, the introduction of the pneumatic fluid into the micro valve 1 causes the moving portion 34 of the diaphragm layer 3 to be in close contact with the contact portion 26 of the base layer 2 so that the micro valve 1 is closed. Further, the sample gas is supplied while the pneumatic fluid is not supplied to the micro valve 1, whereby the distance between the moving part 34 of the diaphragm layer 3 and the contact part 26 of the base layer 2 is expanded, and the micro valve 1 will be open.

The above-described micro valve 1 can be used as a valve provided in various devices. Also, by preparing a plurality of microvalves 1 and using each microvalve 1 as a port, it is possible to perform the same operation as a multiport valve.
3. Action effect

(1) According to the present embodiment, as shown in FIG. 7, when the pneumatic fluid is supplied to the micro valve 1, the deformation portion 33 of the diaphragm layer 3 is elastically deformed to move the movement portion 34 of the diaphragm layer 3. There is in close contact with the contact portion 26 of the base layer 2. Then, the first inner opening 23 and the second inner opening 24 of the base layer 2 are closed by the moving portion 34 of the diaphragm layer 3, the flow path of the sample gas is closed, and the micro valve is closed. Further, the sample gas is supplied while the pneumatic fluid is not supplied to the micro valve 1, whereby the distance between the moving part 34 of the diaphragm layer 3 and the contact part 26 of the base layer 2 is expanded, and the sample gas is supplied. The flow path is secured, and the micro valve 1 is opened.

Therefore, in the micro valve 1, the first inner opening 23 and the second inner opening 24 can be opened and closed without having a mechanism for rotating the member.
As a result, in the micro valve 1, it is possible to eliminate members that wear due to rotation. Therefore, the durability of the micro valve 1 can be improved.
Further, the mechanism for opening and closing the first inner opening 23 and the second inner opening 24 can be simply configured.
Therefore, the microvalve 1 can be miniaturized.

The base layer 2, the diaphragm layer 3 and the cover layer 4 of the micro valve 1 are each made of silicon.
Therefore, the heat resistance of the micro valve 1 can be improved.
As a result, it is possible to use the micro valve 1 even in a high temperature environment of, for example, 400 ° C. or higher.

(2) Further, according to the present embodiment, as shown in FIG. 1, the micro valve 1 includes the cover layer 4. The cover layer 4 faces the diaphragm layer 3 on the side opposite to the base layer 2 side.
Therefore, the diaphragm layer 3 can be protected by the cover layer 4.

(3) Further, according to the present embodiment, as shown in FIG. 7, in the micro valve 1, the diaphragm layer 3 is a base by the pneumatic fluid flowing between the diaphragm layer 3 and the cover layer 4. It is pressed to the layer 2 side.

Therefore, by utilizing the area between the diaphragm layer 3 and the cover layer 4 and flowing the pneumatic fluid into that area, the diaphragm layer 3 (deformed portion 33) is elastically deformed to the base layer 2 side. Can.

(4) Further, according to the present embodiment, as shown in FIG. 6, the cover layer 4 is pressed to the cover layer 4 side by the sample gas flowing in from the first inner opening 23 of the base layer 2. Function as a stopper for the diaphragm layer 3.

That is, even when a high pressure gas flows in from the first inner opening 23 of the base layer 2, the cover layer 4 functions as a stopper for restricting the deformation of the diaphragm layer 3 to a certain degree or more.
Therefore, the cover layer 4 can prevent the diaphragm layer 3 from being broken.

4. Modified Example In the above-described embodiment, the base layer 2, the diaphragm layer 3 and the cover layer 4 of the micro valve 1 are each described as being made of silicon. However, at least one of the base layer 2 and the cover layer 4 of the micro valve 1 may be formed of another material such as glass.

Further, in the embodiment described above, the moving portion 34 of the diaphragm layer 3 is described as being separated from the restricting portion 43 of the cover layer 4 in the state where the moving portion 34 of the diaphragm layer 3 is positioned at the first position. . However, the moving part 34 of the diaphragm layer 3 may be in close contact with the restricting part 43 of the cover layer 4 in the state where the moving part 34 of the diaphragm layer 3 is positioned at the first position. Similarly, in a state where the moving portion 34 of the diaphragm layer 3 is positioned at the first position, the moving portion 34 of the diaphragm layer 3 may be in close contact with the contact portion 26 of the base layer 2.

Further, in the above embodiment, when the pneumatic fluid is supplied to the micro valve 1, the moving portion 34 of the diaphragm layer 3 adheres to the contact portion 26 of the base layer 2, and the first inner opening of the base layer 2 The 23 and the second inner opening 24 have been described as being closed by the moving portion 34 of the diaphragm layer 3. However, when the micro valve 1 is supplied with the pneumatic fluid, one of the first inner opening 23 and the second inner opening 24 of the base layer 2 is closed by the moving portion 34 of the diaphragm layer 3. May be

In the above-described embodiment, the pneumatic fluid is described as a gas such as air. However, pneumatic fluid may be a liquid.

Further, in the above-described embodiment, the pneumatic fluid is described as being introduced into the micro valve 1 from the base layer 2 side. However, the cover layer 4 may be provided with an opening, and the pneumatic fluid may be introduced into the micro valve 1 from the opening.

Reference Signs List 1 micro valve 2 base layer 3 diaphragm layer 4 cover layer 23 first inner opening 24 second inner opening 33 deformed portion 34 moving portion 43 restricting portion

Claims

A micro valve having a laminated structure in which a plurality of layers are laminated,
An inlet through which gas flows into the micro valve, and a base layer in which an outlet through which the gas flowing from the inlet flows out of the micro valve is formed as a through hole.
It comprises a silicon film facing the base layer, and is provided with a diaphragm layer which opens and closes at least one of the inlet and the outlet by being elastically deformed with the inflow of pneumatic fluid into the micro valve. A micro valve characterized by
The micro valve according to claim 1, further comprising a cover layer facing the diaphragm layer on the side opposite to the base layer side.
The micro valve according to claim 2, wherein a pneumatic fluid flows between the diaphragm layer and the cover layer to press the diaphragm layer toward the base layer.
The micro valve according to claim 2, wherein the cover layer functions as a stopper for the diaphragm layer when the diaphragm layer is pressed toward the cover layer by gas flowing in from the inflow port.