JP2020006347A - Fluid handling device and fluid handling system - Google Patents

Abstract

To provide a fluid handling device that can sufficiently move a pressing member by a piezo actuator so that a valve of a flow path chip can be appropriately pressed.SOLUTION: A fluid handling device according to the present invention includes a rotary member, a pressing member, a piezo actuator, and a transmission portion connected to the piezo actuator for transmitting the extension of the piezo actuator to the pressing member. The transmission portion has a first inclined surface, and the pressing member has a second inclined surface. An angle between the first inclined surface and a surface perpendicular to the rotation axis of the rotary member and an angle between the second inclined surface and a surface perpendicular to the rotation axis are each more than 45° and less than 90°. When the piezo actuator presses the second inclined surface of the pressing member through the first inclined surface, the pressing member is moved along a central axis.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a fluid handling device and a fluid handling system.

  2. Description of the Related Art In recent years, flow path chips have been used to analyze minute amounts of substances such as proteins and nucleic acids with high accuracy and high speed. The flow path chip has an advantage that the amounts of reagents and samples required for analysis may be small, and is expected to be used in various applications such as clinical tests, food tests, and environmental tests. For example, Patent Literature 1 discloses a microvalve unit including a flow path chip having a plurality of microvalves and a pressurizing unit for controlling opening and closing of the plurality of microvalves. In the channel chip, the plurality of microvalves are arranged on the same circumference. The pressing portion has a contact surface having an arc shape in plan view. By rotating the pressing unit, the contact surface of the pressing unit moves. As a result, the diaphragm of the microvalve is pressed or not pressed by the pressing unit. The microvalve is closed when pressed by the pressurizing section, and opens when not pressed by the pressurizing section.

JP 2007-85537 A

  As described above, in the device (micro valve unit) described in Patent Literature 1, a plurality of valves (micro valves) are formed by rotating a rotary member (pressing portion) having a convex portion (end surface) having an arc shape in plan view. ) Is controlled to open and close. In such a device, when the flow path chip has a large number of valves, the valves may not be able to be opened and closed in an intended order. This problem will be described with reference to FIGS. 1A to 2B.

  FIG. 1A is a plan view of a flow channel chip for explaining a problem of the conventional technique. FIG. 1B is a bottom view of a rotary member used in combination with the flow path chip shown in FIG. 1A. As shown in FIG. 1A, the flow channel chip includes a first inlet 10, a first inlet channel 11, a first valve 12, a second inlet 20, a second inlet channel 21, a second valve 22, It has a third inlet 30, a third inlet channel 31, a third valve 32, a common channel 40, and an outlet 41. The upstream end of the first introduction passage 11 is connected to the first introduction port 10, and the downstream end of the first introduction passage 11 is connected to the upstream end of the common passage 40. The upstream end of the second introduction passage 21 is connected to the second introduction port 20, and the downstream end of the second introduction passage 21 is connected to the upstream end of the common passage 40. The upstream end of the third introduction passage 31 is connected to the third introduction port 30, and the downstream end of the third introduction passage 31 is connected to the upstream end of the common passage 40. A first valve 12, a second valve 22, and a third valve 32 are provided in the first introduction channel 11, the second introduction channel 21, and the third introduction channel 31, respectively. The downstream end of the common flow path 40 is connected to the outlet 41.

  Further, as shown in FIG. 1B, the rotary member has the same shape as the convex portion 50 having a circular arc shape in plan view for pressing the first valve 12, the second valve 22, and the third valve 32. And a concave portion 51 arranged on the circumference. In FIG. 1B, the bottom surface of the protrusion 50 (the surface that contacts the flow path chip) is hatched. The first valve 12, the second valve 22, and the third valve 32 are closed when pressed by the projection 50, and are opened when not pressed by the projection 50.

  For example, as shown in FIG. 2A, the rotary member is rotated so that the concave portion 51 is located on the first valve 12 and the convex portion 50 is located on the second valve 22 and the third valve 32. In this case, the first valve 12 is opened, and the fluid in the first inlet 10 can flow to the outlet 41 through the first inlet channel 11 and the common channel 40. On the other hand, since the second valve 22 and the third valve 32 are closed, the liquid in the second inlet 20 and the fluid in the third inlet 30 cannot flow toward the outlet 41.

  Thereafter, when the fluid in the third inlet 30 is to flow toward the outlet 41, the concave portion 51 is located on the third valve 32, and the convex portion 50 is located on the first valve 12 and the second valve 22. To rotate the rotary member. However, as shown in FIG. 2B, while the rotary member is being rotated, the concave portion 51 is temporarily located on the second valve 22, and the convex portion 50 is located on the first valve 12 and the third valve 32. Will be located. Therefore, the fluid in the second inlet 20 may flow toward the outlet 41 without intention of flowing the fluid in the second inlet 20.

  As described above, the conventional apparatus has a problem that when the flow path chip has a large number of valves, the valves cannot be opened and closed in an intended order. In order to solve this problem, it is conceivable to further provide a pressing member 60 for pressing the first valve 12, the second valve 22, and the third valve 32 while rotating the rotary member. This device will be described with reference to FIGS. 3A to 3C.

  For example, as shown in FIG. 3A, the rotary member is rotated such that the concave portion 51 is located on the first valve 12 and the convex portion 50 is located on the second valve 22 and the third valve 32. At this time, the pressing member 60 (not visible in FIG. 3A) is disposed at a position where the first valve 12, the second valve 22, and the third valve 32 are not pressed. Therefore, the first valve 12 is opened, and the fluid in the first inlet 10 can flow to the outlet 41 through the first inlet channel 11 and the common channel 40. On the other hand, since the second valve 22 and the third valve 32 are closed, the liquid in the second inlet 20 and the fluid in the third inlet 30 cannot flow toward the outlet 41.

  Thereafter, when the fluid in the third inlet 30 is to flow toward the outlet 41, the concave portion 51 is located on the third valve 32, and the convex portion 50 is located on the first valve 12 and the second valve 22. To rotate the rotary member. At this time, as shown in FIG. 3B, the pressing member 60 is moved to a position where the first valve 12, the second valve 22, and the third valve 32 are pressed. Therefore, as shown in FIG. 2B, while the rotary member is being rotated, the second valve 22 remains closed even if the recess 51 is temporarily positioned on the second valve 22. Therefore, the fluid in the second inlet 20 does not flow toward the outlet 41.

  When the rotary member is rotated as it is, the concave portion 51 is located on the third valve 32 and the convex portion 50 is located on the first valve 12 and the second valve 22, as shown in FIG. 3C. After the rotation of the rotary member is completed, the pressing member 60 (not visible in FIG. 3C) is moved to a position where the first valve 12, the second valve 22, and the third valve 32 are not pressed. Therefore, the third valve 32 is opened, and the fluid in the third inlet 30 can flow to the outlet 41 through the third inlet channel 31 and the common channel 40.

  As described above, if the pressing member that is driven independently of the rotary member is further provided, the problem that the valve cannot be opened and closed in the intended order is solved, but an actuator for driving the pressing member is required. Examples of such an actuator include a pneumatic actuator, an electric actuator, and a piezo actuator. Of these, the pneumatic actuator requires a compressor, the electric actuator requires many parts, and both have the disadvantage that the device becomes large. On the other hand, the piezo actuator can be driven only by DC power supply, outputs a high pressing force, and is small in size, and thus is suitable as an actuator for driving the pressing member. However, the piezo actuator has a disadvantage that the obtained displacement amount is small.

  The present invention has been made in view of such a point, and provides a fluid handling device and a fluid handling system that can sufficiently move a pressing member by a piezo actuator so that a valve of a flow path chip can be appropriately pressed. The purpose is to do.

  A fluid handling device according to the present invention controls a fluid in a flow path chip having a first flow path, a second flow path, and a valve disposed between the first flow path and the second flow path. A first convex portion for pressing the diaphragm of the valve to close the valve, and a concave portion for opening the valve without pressing the diaphragm of the valve. A rotary member disposed on a circumference of a first circle around an axis, the rotary member being rotatable about the central axis, and a second convex portion for pressing a diaphragm of the valve to close the valve. Is disposed on the circumference of a second circle centered on the central axis, and is arranged to extend and contract in a direction different from the direction along the central axis, the pressing member being movable along the central axis. Piezo actuator and the piezo A transmission unit connected to the zo actuator and transmitting the extension of the piezo actuator to the pressing member, wherein the transmission unit is inclined with respect to a plane parallel to the central axis. And the pressing member has a second inclined surface inclined with respect to a plane parallel to the central axis, and an angle between the first inclined surface and a plane perpendicular to the central axis, and An angle formed between a second inclined surface and a surface perpendicular to the central axis is greater than 45 ° and less than 90 °, and the piezo actuator is configured such that the piezo actuator is configured to move the second inclined surface of the pressing member through the first inclined surface of the transmission unit. By pressing the two inclined surfaces, the pressing member is moved along the central axis.

  A fluid handling system according to the present invention relates to a flow path chip having a first flow path, a second flow path, and a valve disposed between the first flow path and the second flow path. A fluid handling device.

  According to the present invention, it is possible to provide a fluid handling device and a fluid handling system that can sufficiently move a pressing member by a piezo actuator so that a valve of a flow path chip can be appropriately pressed.

FIG. 1A is a plan view of a flow channel chip for explaining a problem of the conventional technique. FIG. 1B is a bottom view of a rotary member used in combination with the flow path chip shown in FIG. 1A. 2A and 2B are schematic views showing examples of using the flow path chip shown in FIG. 1A and the rotary member shown in FIG. 1B. 3A to 3C are schematic diagrams illustrating an example of use when a rotary member and a pressing member are combined. FIG. 4 is a cross-sectional view illustrating a configuration of the fluid handling device and the flow path chip according to the embodiment. FIG. 5 is a plan view showing the configuration of the flow channel chip according to the embodiment. FIG. 6 is a plan view of the rotary member and the pressing member according to the embodiment. FIG. 7 is a partially enlarged cross-sectional view of the fluid handling device around the transmission unit. FIG. 8 is a schematic diagram for explaining the operation of the fluid handling device according to the embodiment. FIG. 9 is a schematic diagram for explaining the operation of the fluid handling device according to the embodiment. FIG. 10 is a schematic diagram for explaining the operation of the fluid handling device according to the embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 4 is a cross-sectional view (a line AA in FIG. 5 and a line BB in FIG. 6) illustrating a configuration of a fluid handling system (fluid handling device 100 and flow path chip 200) according to an embodiment of the present invention. FIG. As shown in FIG. 4, the fluid handling device 100 has a rotary member 110 and a pressing member 120. The rotary member 110 is rotated about a central axis CA by an external drive mechanism (not shown). The pressing member 120 is moved along the central axis CA by the piezo actuator 130. The flow path chip 200 has a substrate 210 and a film 220, and is installed in the fluid handling device 100 such that the film 220 contacts the rotary member 110. In this specification, a combination of the fluid handling device 100 and the flow path chip 200 is also referred to as a “fluid handling system”. In FIG. 4, the fluid handling device 100 and the flow path chip 200 are illustrated separately for easy understanding.

(Configuration of flow path chip)
FIG. 5 is a plan view showing the configuration of the flow channel chip 200 according to the present embodiment. In FIG. 5, the grooves (flow paths) formed on the surface of the substrate 210 on the film 220 side and the diaphragm formed on the film 220 are indicated by broken lines.

  As described above, the flow path chip 200 has the substrate 210 and the film 220 (see FIG. 4). The substrate 210 is formed with a groove serving as a flow path and a through hole serving as an inlet or an outlet. The film 220 is joined to one surface of the substrate 210 so as to cover the concave portion formed in the substrate 210 and the opening of the through hole. Some regions of the film 220 function as a diaphragm. The groove of the substrate 210 closed by the film 220 becomes a flow path for flowing a fluid such as a reagent, a liquid sample, a gas, and a powder.

  The thickness of the substrate 210 is not particularly limited. For example, the thickness of substrate 210 is 1 mm or more and 10 mm or less. Further, the material of the substrate 210 is not particularly limited. For example, the material of the substrate 210 can be appropriately selected from known resins and glass. Examples of the material of the substrate 210 include polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polyvinyl chloride, polypropylene, polyether, polyethylene, polystyrene, silicone resin, and elastomer.

  The thickness of the film 220 is not particularly limited as long as it can function as a diaphragm. For example, the thickness of the film 220 is 30 μm or more and 300 μm or less. Further, the material of the film 220 is not particularly limited as long as it can function as a diaphragm. For example, the material of the film 220 can be appropriately selected from known resins. Examples of the material of the film 220 include polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polyvinyl chloride, polypropylene, polyether, polyethylene, polystyrene, silicone resin and elastomer. The film 220 is bonded to the substrate 210 by, for example, heat welding, laser welding, an adhesive, or the like.

  As shown in FIG. 5, the flow channel chip 200 according to the present embodiment includes a first inlet 230, a first inlet 231, a first valve 232, a second inlet 240, and a second inlet 241. , A second valve 242, a third inlet 250, a third inlet channel 251, a third valve 252, a common channel 260, and an outlet 270. The first introduction channel 231, the second introduction channel 241 and the third introduction channel 251 correspond to the first channel in the claims, and the common channel 260 is the second channel in the claims. Is equivalent to

  The first inlet 230, the second inlet 240, and the third inlet 250 are bottomed recesses for introducing a fluid. In the present embodiment, the first inlet 230, the second inlet 240, and the third inlet 250 close a through hole formed in the substrate 210 and one opening of the through hole, respectively. Film 220. The shape and size of these inlets are not particularly limited, and can be appropriately set as needed. The shape of these inlets is, for example, a substantially columnar shape. The width of these inlets is, for example, about 2 mm. The type of the fluid stored in these inlets can be appropriately selected according to the use of the flow path chip 200. The fluid is a fluid such as a reagent, a liquid sample, or a powder.

  The first introduction channel 231, the second introduction channel 241, and the third introduction channel 251 are channels through which a fluid can move. The upstream ends of the first introduction channel 231, the second introduction channel 241 and the third introduction channel 251 are connected to the first introduction port 230, the second introduction port 240 and the third introduction port 250, respectively. The downstream ends of the first introduction channel 231, the second introduction channel 241 and the third introduction channel 251 are connected to the common channel 260 at different positions. In the present embodiment, the first introduction flow path 231, the second introduction flow path 241 and the third introduction flow path 251 respectively close the groove formed in the substrate 210 and the opening of the groove. And a film 220. The cross-sectional area and cross-sectional shape of these channels are not particularly limited. In the present specification, the “cross section of the flow path” means a cross section of the flow path orthogonal to the direction in which the fluid flows. The cross-sectional shape of these flow paths is, for example, a substantially rectangular shape having a side length (width and depth) of about several tens of μm. The cross-sectional area of these flow paths may or may not be constant in the flow direction of the fluid. In the present embodiment, the cross-sectional areas of these flow paths are constant.

  The first valve 232, the second valve 242, and the third valve 252 are diaphragm valves that control the flow of fluid in the first introduction flow path 231, the second introduction flow path 241, and the third introduction flow path 251, respectively. . The first valve 232 is disposed in the first introduction channel 231 or at a junction of the first introduction channel 231 and the common channel 260. The second valve 242 is disposed in the second introduction channel 241 or at a junction of the second introduction channel 241 and the common channel 260. The third valve 252 is disposed in the third introduction channel 251 or at a junction of the third introduction channel 251 and the common channel 260. In the present embodiment, the first valve 232 is disposed at the junction of the first introduction channel 231 and the common channel 260, and the second valve 242 is located at the junction of the second introduction channel 241 and the common channel 260. , And the third valve 252 is disposed at the junction of the third introduction flow path 251 and the common flow path 260. Further, the first valve 232, the second valve 242, and the third valve 252 are arranged on the circumference of a circle centered on the central axis CA.

  The first valve 232 has a first partition 233 and a first diaphragm 234. Similarly, the second valve 242 has a second partition 243 and a second diaphragm 244, and the third valve 252 has a third partition 253 and a third diaphragm 254. In the present embodiment, the first partition 233 is disposed between the first introduction channel 231 and the common channel 260. Similarly, the second valve 242 is disposed between the second introduction flow path 241 and the common flow path 260, and the third valve 252 is disposed between the third introduction flow path 251 and the common flow path 260. Are located. Further, the first diaphragm 234 is arranged to face the first partition 233. Similarly, the second diaphragm 244 is arranged so as to face the second partition 243, and the third diaphragm 254 is arranged so as to face the third partition 253.

  The first partition 233 functions as a valve seat of a diaphragm valve for opening and closing between the first introduction channel 231 and the common channel 260. Similarly, the second partition 243 functions as a valve seat of a diaphragm valve for opening and closing between the second introduction channel 241 and the common channel 260, and the third partition 253 is connected to the third introduction channel 251. It functions as a valve seat of a diaphragm valve for opening and closing with the common flow channel 260. The shape and height of these partition walls are not particularly limited as long as the above functions can be exhibited. The shape of these partition walls is, for example, a quadrangular prism shape. The height of these partitions is the same as the depth of the introduction channel and the common channel 260, for example.

  The first diaphragm 234, the second diaphragm 244, and the third diaphragm 254 are a part of the flexible film 220 and have a substantially spherical crown shape (see FIG. 4). The film 220 is disposed on the substrate 210 such that each diaphragm is in non-contact and opposed to a corresponding partition. Each diaphragm bends toward a corresponding partition when pressed by a first convex portion 111 (described below) of the rotary member 110 or a second convex portion 121 (described below) of the pressing member 120. That is, the diaphragm functions as a valve body of the diaphragm valve. For example, when the first convex portion 111 and the second convex portion 121 do not press the first diaphragm 234, the first introduction channel 231 and the common channel 260 pass through the gap between the first diaphragm 234 and the first partition 233. To be in communication with each other. On the other hand, when the first convex portion 111 or the second convex portion 121 is pressing the first diaphragm 234 so that the first diaphragm 234 contacts the first partition 233, the first introduction channel 231 and the common channel 260 Are not in communication with each other.

  The common flow channel 260 is a flow channel through which a fluid can move. The common flow path 260 is connected to the first introduction flow path 231 via the first valve 232, is connected to the second introduction flow path 241 via the second valve 242, and is connected via the third valve 252. Connected to the third introduction channel 251. Therefore, the fluid introduced into the first introduction port 230, the fluid introduced into the second introduction port 240, and the fluid introduced into the third introduction port 250 flow through the common flow channel 260. The downstream end of the common flow channel 260 is connected to the outlet 270. In the present embodiment, the common flow channel 260 includes a groove formed in the substrate 210 and the film 220 closing the opening of the groove. The cross-sectional area and the cross-sectional shape of the common flow channel 260 are not particularly limited. The cross-sectional shape of the common flow channel 260 is, for example, a substantially rectangular shape having a side length (width and depth) of about several tens μm. The cross-sectional area of the common flow channel 260 may or may not be constant in the flow direction of the fluid. In the present embodiment, the cross-sectional area of common channel 260 is constant.

  The outlet 270 is a concave part with a bottom. The outlet 270 functions as an air hole or functions as an outlet for extracting the fluid in the common flow channel 260. In the present embodiment, the outlet 270 includes a through hole formed in the substrate 210 and a film 220 closing one opening of the through hole. The shape and size of the outlet 270 are not particularly limited, and can be appropriately set as needed. The shape of the outlet 270 is, for example, a substantially columnar shape. The width of the outlet 270 is, for example, about 2 mm.

(Configuration of fluid handling device)
As described above, FIG. 4 is a cross-sectional view illustrating the configuration of the fluid handling system (fluid handling device 100 and flow channel chip 200) according to the present embodiment. FIG. 6 is a plan view of the rotary member 110 and the pressing member 120 of the fluid handling device 100 according to the present embodiment. In FIG. 6, the top surface of the first protrusion 111 of the rotary member 110 and the top surface of the second protrusion 121 of the pressing portion 120 are hatched for easy viewing.

  As shown in FIG. 4, the fluid handling device 100 includes a rotary member 110, a pressing member 120, a piezo actuator 130, and a transmission unit 140.

  The rotary member 110 is rotatable about a rotation axis (center axis CA). In the present embodiment, the shape of rotary member 110 is substantially columnar. On the upper part of the rotary member 110, a first convex portion 111 for pressing a diaphragm of a valve (first valve 232, second valve 242 or third valve 252) to close the valve, and a valve (first valve 232). , The second valve 242 or the third valve 252) is provided without opening the valve without pressing the valve. The first convex portion 111 and the concave portion 112 are arranged on the circumference of a first circle centered on the central axis CA. In the present embodiment, the planar shape of the first projection 111 is an arc corresponding to a part of the first circle centered on the central axis CA. A region where the first convex portion 111 does not exist on the circumference of the first circle is the concave portion 112.

  Note that the first convex portion 111 only needs to protrude relatively to the concave portion 112, and the concave portion 112 only needs to be relatively concave with respect to the first convex portion 111. That is, the first convex portion 111 only has to function as a pressing portion, and the concave portion 112 has only to function as a non-pressing portion. For example, in the example shown in FIG. 4, the first convex portion 111 protrudes from the top surface (reference surface) of the rotary member 110, and the bottom surface of the concave portion 112 is the same as the top surface (reference surface) of the rotary member 110. It is a height plane. Conversely, the top surface of the first convex portion 111 may be a surface having the same height as the top surface (reference surface) of the rotary member 110, and in this case, the concave portion 112 It is recessed from the reference plane).

  The pressing member 120 is arranged so as to surround the rotary member 110, and is movable along the central axis CA. In the present embodiment, the shape of the pressing member 120 is substantially cylindrical. On the upper part of the pressing member 120, a second valve for closing the valve by pressing the diaphragm of the valve (first valve 232, second valve 242 or third valve 252) when the rotary member 110 is rotating. Protrusions 121 are provided. The second convex portion 121 is arranged on the circumference of a second circle centered on the central axis CA. In the present embodiment, the planar shape of the second convex portion 121 is a circular shape corresponding to the entire circumference of the second circle. The second convex portion 121 can switch between a state in which it can contact the diaphragm of each valve and a state in which it cannot contact the diaphragm.

  Note that the second convex portion 121 does not need to protrude from the top surface (reference surface) of the pressing member 120 as long as it can switch between a state in which it can contact the diaphragm of each valve and a state in which it cannot contact. That is, the second convex portion 121 only needs to be able to press the diaphragm of each valve. In the example illustrated in FIG. 4, the second protrusion 121 protrudes from the top surface (reference surface) of the pressing member 120, but the top surface of the second protrusion 121 is the top surface (reference surface) of the pressing member 120. ) May be the same height.

  As will be described later, the pressing member 120 further has a second inclined surface 122 pressed by the transmission unit 140.

  The piezo actuator 130 includes a stacked body of a plurality of piezo elements, and is a power source for moving the pressing member 120 that expands and contracts in a specific direction due to a change in applied voltage. The piezo actuator 130 is arranged to expand and contract in a direction different from the direction along the central axis CA. In the present embodiment, the piezo actuator 130 is arranged on the side of the pressing member 120, and expands and contracts in a direction perpendicular to the central axis CA. The displacement distance of the piezo actuator 130 is not particularly limited, but is, for example, about 10 to 100 μm.

  The transmission unit 140 is connected (fixed) to the piezo actuator 130, and transmits expansion and contraction of the piezo actuator 140 to the pressing member 120. As described above, the piezoelectric actuator 130 expands and contracts in a direction different from the direction along the central axis CA, while the pressing member 120 moves along the central axis CA. Therefore, the displacement direction needs to be changed between the transmission unit 140 and the pressing member 120.

  In order to change the displacement direction in this manner, the transmission unit 140 has a first inclined surface 141 inclined with respect to a plane parallel to the central axis CA. Corresponding to this, the pressing member 120 also has a second inclined surface 122 inclined with respect to a plane parallel to the central axis CA. As shown in FIG. 7, the angle θ between the first inclined surface 141 and the surface perpendicular to the central axis CA and the angle θ between the second inclined surface 122 and the surface perpendicular to the central axis CA are 45 °. Is greater than 90 °. Are usually the same as each other. By making the surfaces of the transmission unit 140 and the pressing member 120 that are in contact with each other an inclined surface, the displacement direction of the piezo actuator 130 and the transmission unit 140 and the displacement direction of the pressing unit 120 can be changed. By setting the inclination angle θ of these inclined surfaces to be more than 45 ° and less than 90 °, the displacement distance of the pressing member 120 with respect to the displacement distance of the piezo actuator 130 and the transmission unit 140 is more than one time (tan θ times). Can be. For example, by setting the inclination angle θ of these inclined surfaces to 72 °, the displacement distance of the pressing member 120 with respect to the displacement distance of the piezo actuator 130 and the transmission unit 140 can be approximately tripled. Therefore, when the displacement distance of the piezo actuator 130 is 100 μm, the displacement distance of the pressing member 120 is about 300 μm. From the viewpoint of increasing the displacement distance of the pressing member 120, the inclination angle of these inclined surfaces is preferably 70 ° or more. The upper limit of the inclination angle of the inclined surface is not particularly limited as long as it is less than 90 °, but is preferably 80 ° or less from the viewpoint of easily changing the displacement direction.

  In addition, from the viewpoint of reducing the friction between the first inclined surface 141 of the transmitting unit 140 and the second inclined surface 122 of the pressing member 120, the first inclined surface 141 (the surface of the transmitting unit 140 on the pressing member 120 side) or A rolling element may be arranged on the second inclined surface 122 (the surface of the pressing member 120 on the side of the transmission section 140). In the present embodiment, rolling elements 142 are arranged on first inclined surface 141 of transmission section 140. The shape of the rolling element 142 is not particularly limited as long as the friction between the first inclined surface 141 and the second inclined surface 122 can be reduced. The rolling element 142 is, for example, a ball (ball) or a roller (roller). Examples of the roller include a cylindrical roller, a conical roller, a needle-shaped roller, and the like. In the present embodiment, rolling elements 142 are bearing balls made of stainless steel.

  In the fluid handling apparatus 100 according to the present embodiment, when a voltage is applied to the stack of piezo elements constituting the piezo actuator 130, the piezo actuator 130 extends in a direction perpendicular to the central axis CA. Accordingly, the transmission unit 140 presses the pressing unit 120 in a direction perpendicular to the central axis CA in a state where the first inclined surface 141 of the transmission unit 140 and the second inclined surface 122 of the pressing member 120 are in contact with each other. Since the first inclined surface 141 and the second inclined surface 122 are inclined at a predetermined angle, the pressing member 120 is pushed up by the transmission unit 140 toward the flow path chip 200 along the central axis CA. . As described above, when the piezoelectric actuator 130 presses the second inclined surface 122 of the pressing member 120 via the first inclined surface 141 of the transmission section 140, the pressing member 120 is moved along the central axis CA. When the pressing member 120 rises in this way, the second convex portion 121 of the pressing member 120 presses the diaphragm of each valve (the first valve 232, the second valve 242, or the third valve 252) of the flow path chip 200, , Each valve is closed.

  Next, when the application of the voltage to the stacked body of the piezo elements constituting the piezo actuator 130 is released, the piezo actuator 130 contracts in a direction perpendicular to the central axis CA. As a result, the pressing of the piezo actuator 130 on the pressing member 120 is released, and the pressing member 120 moves in a direction away from the flow path chip 200 along the central axis CA by an attractive force or an elastic body. When the pressing member 120 descends in this way, the second convex portion 121 of the pressing member 120 separates from the diaphragm of each valve (the first valve 232, the second valve 242, or the third valve 252) of the flow path chip 200, Each valve is opened (unless pressed by the first convex portion 111 of the rotary member 110).

(Operation of fluid handling device)
Next, the operation of the fluid handling system (fluid handling device 100 and flow channel chip 200) will be described with reference to FIGS. For convenience of description, in FIGS. 8 to 10, when the first protrusion 111 and the second protrusion 121 are in contact with the film 220 of the flow path chip 200, the first protrusion 111 and the second protrusion 121 are hatched. Are not shown. The first inlet 230 contains the first liquid, the second inlet 240 contains the second liquid, and the third inlet 250 contains the third liquid. The first inlet 230, the second inlet 240, and the third inlet 250 are assumed to be pressurized.

  First, the rotary member 110 is rotated so that the concave portion 112 is located on the first valve 232 and the first convex portion 111 is located on the second valve 242 and the third valve 252. The pressing member 120 is moved so that does not contact the film 220 of the flow path chip 200. Thereby, as shown in FIG. 8, the first valve 232 is opened, and the second valve 242 and the third valve 252 are closed. As a result, the first liquid in the first inlet 230 moves to the outlet 270 through the first inlet channel 231, the first valve 232, and the common channel 260. At this time, since the second valve 242 and the third valve 252 are closed, the second liquid in the second inlet 240 and the third liquid in the third inlet 250 do not flow into the common flow channel 260.

  Next, it is assumed that the third liquid in the third inlet 250 is desired to flow to the common flow channel 260. In this case, it is necessary to rotate the rotary member 110 until the concave portion 112 is located on the third valve 252. At this time, the rotary member 110 is rotated after the pressing member 120 is moved so that the second convex portion 121 contacts the film 220 of the flow path chip 200. As shown in FIG. 9, the diaphragm of the second valve 242 is pressed by the second convex portion 121 even when the concave portion 112 is positioned on the second valve 242 during the rotation of the rotary member 110. ing. Therefore, even if the concave portion 112 passes over the second valve 242 while the rotary member 110 is being rotated, the second liquid in the second inlet 240 does not flow into the common flow channel 260.

  Then, when the concave portion 112 is located on the third valve 252 and the first convex portion 111 is located on the first valve 232 and the second valve 242, the rotation of the rotary member 110 is stopped. Further, the pressing member 120 is moved so that the second convex portion 121 does not contact the film 220 of the flow path chip 200. As a result, only the third valve 252 opens. Thereby, as shown in FIG. 10, the third liquid in the third inlet 250 moves to the outlet 270 through the third inlet channel 251, the third valve 252, and the common channel 260. At this time, since the first valve 232 and the second valve 242 are closed, the first liquid in the first inlet 230 and the second liquid in the second inlet 240 do not flow into the common flow channel 260.

  According to the above procedure, the opening and closing of a plurality of valves can be controlled by rotating the rotary member 110 without opening an unintended valve while the rotary member 110 is being rotated.

(effect)
As described above, in the fluid handling apparatus 100 according to the present embodiment, the piezo actuator 130 presses the second inclined surface 122 of the pressing member 120 via the first inclined surface 141 of the transmission unit 140, and thereby the pressing member 120 is moved along the central axis CA. Further, by setting the inclination angle θ of the first inclined surface 141 and the second inclined surface 122 to be more than 45 ° and less than 90 °, the displacement distance of the pressing member 120 with respect to the displacement distance of the piezo actuator 130 and the transmission unit 140 is one time. It can be more than (tan θ times). Therefore, in the fluid handling device 100 according to the present embodiment, the pressing member 120 can be sufficiently moved by the piezo actuator 130 so that each valve of the flow path chip 200 can be appropriately pressed. Further, the fluid handling device 100 according to the present embodiment uses the piezo actuator 130 as a power source of the pressing member 120, so that the size can be reduced.

(Modification)
In the above-described embodiment, the fluid handling device 100 in which the rotary member 110 is located inside and the pressing member 120 is located outside is described. However, the rotary member 110 may be located outside and the pressing member 120 is located inside.

  INDUSTRIAL APPLICABILITY The fluid handling device of the present invention is useful in various applications such as clinical tests, food tests, and environmental tests.

Reference Signs List 10 first introduction port 11 first introduction flow path 12 first valve 20 second introduction port 21 second introduction flow path 22 second valve 30 third introduction port 31 third introduction flow path 32 third valve 40 common flow path 41 Outlet 50 Convex part of rotary member 51 Concave part of rotary member 60 Press member 100 Fluid handling device 110 Rotary member 111 First convex part 112 Concave part 120 Press member 121 Second convex part 122 Second inclined surface 130 Piezo actuator 140 Transmitter 141 First inclined surface 142 Rolling element 200 Flow path chip 210 Substrate 220 Film 230 First inlet 231 First inlet 232 First valve 233 First partition 234 First diaphragm 240 Second inlet 241 Second inlet channel 242 Second valve 243 Second partition 244 Second diaphragm 250 Third inlet 51 third inlet flow path 252 third valve 253 third partition 254 Third diaphragm 260 common passage 270 outlet CA central axis

Claims (6)

A fluid handling device for controlling a fluid in a flow path chip having a first flow path, a second flow path, and a valve disposed between the first flow path and the second flow path,
A first convex portion for pressing the diaphragm of the valve to close the valve and a concave portion for opening the valve without pressing the diaphragm of the valve have a first circle centered on a central axis. A rotary member disposed on a circumference and rotatable about the central axis;
A second protrusion for pressing the diaphragm of the valve to close the valve is disposed on a circumference of a second circle centered on the center axis, and is movable along the center axis. Components,
A piezoelectric actuator arranged to expand and contract in a direction different from the direction along the central axis,
A transmission unit that is connected to the piezo actuator and transmits extension of the piezo actuator to the pressing member;
Has,
The transmission unit has a first inclined surface inclined with respect to a plane parallel to the central axis,
The pressing member has a second inclined surface inclined with respect to a plane parallel to the central axis,
The angle between the first inclined surface and the surface perpendicular to the central axis and the angle between the second inclined surface and the surface perpendicular to the central axis are more than 45 ° and less than 90 °,
The pressing member is moved along the central axis by the piezo actuator pressing the second inclined surface of the pressing member via the first inclined surface of the transmission unit.
Fluid handling device.   The fluid handling device according to claim 1, wherein the piezo actuator is disposed on a side of the pressing member.   The fluid handling device according to claim 1, wherein the piezo actuator expands and contracts in a direction perpendicular to the central axis.   The angle between the first inclined surface and a surface perpendicular to the central axis and the angle between the second inclined surface and a surface perpendicular to the central axis are 70 ° or more and 80 ° or less. 4. The fluid handling device according to any one of items 3.   The fluid handling device according to any one of claims 1 to 4, wherein a rolling element is disposed on a surface of the transmission unit on the pressing member side or on a surface of the pressing member on the transmission unit side. A flow path chip having a first flow path, a second flow path, and a valve disposed between the first flow path and the second flow path;
A fluid handling device according to any one of claims 1 to 5,
A fluid handling system comprising:

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