JP2021050758A - マイクロバルブ - Google Patents
マイクロバルブ Download PDFInfo
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- JP2021050758A JP2021050758A JP2019172701A JP2019172701A JP2021050758A JP 2021050758 A JP2021050758 A JP 2021050758A JP 2019172701 A JP2019172701 A JP 2019172701A JP 2019172701 A JP2019172701 A JP 2019172701A JP 2021050758 A JP2021050758 A JP 2021050758A
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- microvalve
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- 239000012530 fluid Substances 0.000 claims abstract description 39
- 210000000746 body region Anatomy 0.000 claims description 52
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229920002530 polyetherether ketone Polymers 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 230000005489 elastic deformation Effects 0.000 abstract description 10
- 238000007789 sealing Methods 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 14
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/008—Multi-layer fabrications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0094—Micropumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Diaphragms And Bellows (AREA)
- Micromachines (AREA)
Abstract
Description
(マイクロバルブの構成)
図1〜図4を用いて、実施の形態に従うマイクロバルブ10の構成について説明する。図1はマイクロバルブ10の斜視図であり、図2は図1の斜視図の分解図である。なお、図1および図2においては、マイクロバルブ10の一部が切り欠かれた状態が示されている。また、図3はマイクロバルブ10の断面図であり、図4はダイヤフラム層30の平面図である。
次に、図5および図6を用いて、マイクロバルブ10の動作について説明する。図3および図5を参照して、マイクロバルブ10にニューマチック流体およびサンプルガスのいずれも供給されない状態(初期状態)においては、図3に示すように、ダイヤフラム層30の変形領域33および剛体領域34は、基台層20およびカバー層40と間隔を隔てた位置に配置されている。
(変形例1)
上述の実施の形態においては、複数の変形領域と複数の剛体領域とが交互に形成されたたダイヤフラム層の場合について説明したが、ダイヤフラム層の柔軟性を向上させることができれば、当該構成には限られない。
上述の実施の形態においては、ダイヤフラム層の変形領域および剛体領域が、平面視した場合に円形状である場合について説明したが、変形領域および剛体領域は必ずしも円形状でなくてもよい。たとえば、図12の変形例2のダイヤフラム層30Bのように変形領域33および剛体領域34の外形が四角形であってもよい。また、図示しないが、変形領域33および剛体領域34の外形は、楕円形状あるいは四角形以上の多角形であってもよい。なお、ダイヤフラム層の破損抑制の観点からは、面内での変形領域の変形が均一になり部分的な応力集中を抑制できる円形状がより好ましい。
上述した複数の例示的な実施形態は、以下の態様の具体例であることが当業者により理解される。
Claims (7)
- 積層構造を有するマイクロバルブであって、
前記マイクロバルブ内へガスを導入するための流入口、および、前記流入口から導入されたガスを外部へ流出させるための流出口が形成された基台層と、
前記基台層に対向して配置され、弾性変形することによって前記流入口から前記流出口へのガスの流通と遮断とを切換えるダイヤフラム層とを備え、
前記ダイヤフラム層は、前記マイクロバルブ内へのニューマチック流体の流入に伴って弾性変形することが可能な複数の変形領域と、複数の剛体領域とが交互に形成された構成を有しており、
前記ダイヤフラム層は、前記複数の変形領域の少なくとも一部が弾性変形することによって、前記流入口および前記流出口の少なくとも一方を閉止する、マイクロバルブ。 - 前記ダイヤフラム層は単一の材料で成形されており、前記複数の変形領域の積層方向の厚みは、前記複数の剛体領域の積層方向の厚みよりも薄い、請求項1に記載のマイクロバルブ。
- 前記ダイヤフラム層を積層方向から平面視した場合に、前記複数の剛体領域の一部および前記複数の変形領域は円環形状を有しており、前記複数の変形領域および前記複数の剛体領域は同心円状に交互に形成されている、請求項1または2に記載のマイクロバルブ。
- カバー層をさらに備え、
前記ダイヤフラム層は、前記カバー層と前記基台層との間に配置される、請求項1〜3のいずれか1項に記載のマイクロバルブ。 - 前記ダイヤフラム層と前記カバー層との間へニューマチック流体が流入し、前記ダイヤフラム層が前記基台層に押圧されることによって、前記流入口および前記流出口の少なくとも一方が閉止される、請求項4に記載のマイクロバルブ。
- 前記ダイヤフラム層は、シリコン、ガラス、またはPEEK(Poly Ether Ether Ketone)樹脂を用いて形成される、請求項1〜5のいずれか1項に記載のマイクロバルブ。
- 積層構造を有するマイクロバルブであって、
前記マイクロバルブ内へガスを導入するための流入口、および、前記流入口から導入されたガスを外部へ流出させるための流出口が形成された基台層と、
前記基台層に対向して配置され、弾性変形することによって前記流入口から前記流出口へのガスの流通と遮断とを切換えるダイヤフラム層とを備え、
前記ダイヤフラム層は、前記マイクロバルブ内へのニューマチック流体の流入に伴って弾性変形することが可能な変形領域と、前記変形領域の変形量を制限する剛体領域とを含み、
前記流入口および前記流出口の少なくとも一方は、弾性変形した前記変形領域により覆われることによって閉止される、マイクロバルブ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019172701A JP7226221B2 (ja) | 2019-09-24 | 2019-09-24 | マイクロバルブ |
US16/925,007 US11242943B2 (en) | 2019-09-24 | 2020-07-09 | Micro-valve |
CN202010789984.1A CN112628462B (zh) | 2019-09-24 | 2020-08-07 | 微型阀 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019172701A JP7226221B2 (ja) | 2019-09-24 | 2019-09-24 | マイクロバルブ |
Publications (2)
Publication Number | Publication Date |
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JP2021050758A true JP2021050758A (ja) | 2021-04-01 |
JP7226221B2 JP7226221B2 (ja) | 2023-02-21 |
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Family Applications (1)
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JP2019172701A Active JP7226221B2 (ja) | 2019-09-24 | 2019-09-24 | マイクロバルブ |
Country Status (3)
Country | Link |
---|---|
US (1) | US11242943B2 (ja) |
JP (1) | JP7226221B2 (ja) |
CN (1) | CN112628462B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11441702B1 (en) * | 2019-05-09 | 2022-09-13 | Facebook Technologies, Llc | Fluidic valve |
US11725749B2 (en) * | 2020-11-02 | 2023-08-15 | The Regents Of The University Of California | Passive microfluidic valves |
SE2150773A1 (en) * | 2021-06-16 | 2022-12-17 | Water Stuff & Sun Gmbh | Micro-electro-mechanical system fluid control |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6441776U (ja) * | 1987-09-09 | 1989-03-13 | ||
DE29613521U1 (de) * | 1996-08-05 | 1996-09-19 | Forschungszentrum Karlsruhe GmbH, 76133 Karlsruhe | Mikroventil |
JP2000266229A (ja) * | 1999-03-15 | 2000-09-26 | Matsushita Electric Works Ltd | 半導体マイクロバルブ |
US20120021529A1 (en) * | 2009-02-24 | 2012-01-26 | Schlumberger Technology Corporation | Micro-Valve and Micro-Fluidic Device Using Such |
WO2018235229A1 (ja) * | 2017-06-22 | 2018-12-27 | 株式会社島津製作所 | マイクロバルブ |
JP2019124625A (ja) * | 2018-01-18 | 2019-07-25 | 株式会社島津製作所 | バルブシステム |
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2019
- 2019-09-24 JP JP2019172701A patent/JP7226221B2/ja active Active
-
2020
- 2020-07-09 US US16/925,007 patent/US11242943B2/en active Active
- 2020-08-07 CN CN202010789984.1A patent/CN112628462B/zh active Active
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JPS6441776U (ja) * | 1987-09-09 | 1989-03-13 | ||
DE29613521U1 (de) * | 1996-08-05 | 1996-09-19 | Forschungszentrum Karlsruhe GmbH, 76133 Karlsruhe | Mikroventil |
JP2000266229A (ja) * | 1999-03-15 | 2000-09-26 | Matsushita Electric Works Ltd | 半導体マイクロバルブ |
US20120021529A1 (en) * | 2009-02-24 | 2012-01-26 | Schlumberger Technology Corporation | Micro-Valve and Micro-Fluidic Device Using Such |
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JP2019124625A (ja) * | 2018-01-18 | 2019-07-25 | 株式会社島津製作所 | バルブシステム |
Also Published As
Publication number | Publication date |
---|---|
US20210088155A1 (en) | 2021-03-25 |
US11242943B2 (en) | 2022-02-08 |
CN112628462B (zh) | 2022-11-25 |
CN112628462A (zh) | 2021-04-09 |
JP7226221B2 (ja) | 2023-02-21 |
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