WO2018147183A1 - 搬送装置、搬送方法及び記憶媒体 - Google Patents

搬送装置、搬送方法及び記憶媒体 Download PDF

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Publication number
WO2018147183A1
WO2018147183A1 PCT/JP2018/003583 JP2018003583W WO2018147183A1 WO 2018147183 A1 WO2018147183 A1 WO 2018147183A1 JP 2018003583 W JP2018003583 W JP 2018003583W WO 2018147183 A1 WO2018147183 A1 WO 2018147183A1
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WO
WIPO (PCT)
Prior art keywords
module
abnormality
motor
series data
transport
Prior art date
Application number
PCT/JP2018/003583
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
準之輔 牧
弘明 森
聡寛 寺本
Original Assignee
東京エレクトロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン株式会社 filed Critical 東京エレクトロン株式会社
Priority to JP2018567399A priority Critical patent/JP6766897B2/ja
Priority to CN201880011695.XA priority patent/CN110291624B/zh
Publication of WO2018147183A1 publication Critical patent/WO2018147183A1/ja

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P29/00—Arrangements for regulating or controlling electric motors, appropriate for both AC and DC motors
    • H02P29/02—Providing protection against overload without automatic interruption of supply
    • H02P29/024—Detecting a fault condition, e.g. short circuit, locked rotor, open circuit or loss of load
    • H02P29/0241—Detecting a fault condition, e.g. short circuit, locked rotor, open circuit or loss of load the fault being an overvoltage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • 1 is a plan view of a coating and developing apparatus according to an embodiment of the present invention. It is a side view of the said coating and developing apparatus.
  • the abnormality diagnosis operation at the time of idling is a diagnosis for detecting a deviation amount between a set position for each part of the unit block E3, an actual position detected by each sensor and the above-mentioned position information in one rotation, for example, Performed regularly.
  • This abnormality diagnosis operation is started by outputting a start signal (trigger) from the control unit 6 during non-production of a semiconductor product (step H1), and after obtaining the above-described deviation amount (step H2), the deviation By comparing the amount with a threshold value, it is determined whether there is an abnormality (step H3).
  • the above-described setting position is corrected if the degree of abnormality is small, and the setting position is not corrected if the degree of abnormality is large.
  • data on position information within one rotation for the sensors 51, 52 and 54A to 54D as position detection sensors, the heating module 12 (12A to 12F), the resist film forming module 13 (13A and 13B), and delivery Data relating to encoder values for the modules TRS3 and TRS31 are stored.
  • the data relating to the position information within one rotation of the sensor includes the diagnostic value of the position information within one rotation and the initial value of the position information within one rotation for each sensor.
  • the forward / backward moving body 24 of the transport mechanism F3 is detected by the sensors 51, 52, 54A to 54D, and the position information within one rotation when this detection is performed is the above diagnostic value. Get as.
  • the diagnostic value of each sensor is updated each time it is acquired. Since the diagnostic value is data indicating the position of each sensor 51, 52, 54A to 54D, the diagnostic value of each sensor may be described as the detection position of each sensor.
  • step K4 When it is determined that there is a difference that does not fall within the first allowable range, it is determined that the set position is abnormal (step K4). Then, it is determined whether or not the difference falls within a second allowable range wider than the first allowable range, that is, whether or not a predetermined threshold is exceeded. When it is determined that it falls within the second allowable range, it is determined that the degree of abnormality is small. Then, as a life extension process of the transport mechanism F3, a correction which will be described later is performed in order to align the set position of each module stored in the memory 71 with the actual position (step K5). Specifically, the correction of the setting position of the module is to set the correction amount in the data related to the encoder value of each module described in FIG. The correction of the set position is performed using the data acquired in step K1.
  • FIGS. 11 to FIG. 13 show examples of correction of the setting position for patterns 1 to 3 that are different from each other in the state of deviation between the setting position and the detection position.
  • the set positions of the sensors 54A, 54B, 54C and 54D after correction are shown as points Q′1, Q′2, Q′3 and Q′4, respectively.
  • the setting positions of the sensors 51 and 52 before correction are indicated by dotted lines, and the setting positions of the sensors 51 and 52 after correction are indicated by solid lines, respectively.
  • the tower T1 On the carrier block D1 side in the processing block D2, there are provided a tower T1 extending up and down across the unit blocks E1 to E6, and a transport mechanism 84 capable of moving up and down for transferring the wafer W to the tower T1. ing.
  • the tower T1 includes a plurality of modules stacked on each other, and includes a delivery module TRS on which the wafer W is placed.
  • the wafer W distributed to the transfer modules TRS3 and TRS4 is transferred and processed in the unit block E3 (E4) from the transfer module TRS3 (TRS4), and the transfer module TRS31 ( TRS 41). Thereafter, the wafer W is carried into the exposure apparatus D4 via the tower T3 by the transfer mechanisms 85 and 87, and the resist film is exposed.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
  • Control Of Electric Motors In General (AREA)
PCT/JP2018/003583 2017-02-13 2018-02-02 搬送装置、搬送方法及び記憶媒体 WO2018147183A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2018567399A JP6766897B2 (ja) 2017-02-13 2018-02-02 搬送装置、搬送装置の異常検出方法及び記憶媒体
CN201880011695.XA CN110291624B (zh) 2017-02-13 2018-02-02 搬送装置、搬送方法和存储介质

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-024197 2017-02-13
JP2017024197 2017-02-13

Publications (1)

Publication Number Publication Date
WO2018147183A1 true WO2018147183A1 (ja) 2018-08-16

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PCT/JP2018/003583 WO2018147183A1 (ja) 2017-02-13 2018-02-02 搬送装置、搬送方法及び記憶媒体

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JP (1) JP6766897B2 (zh)
CN (1) CN110291624B (zh)
TW (1) TW201839890A (zh)
WO (1) WO2018147183A1 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111199901A (zh) * 2018-11-20 2020-05-26 东京毅力科创株式会社 搬送单元的监视方法、监视装置、监视用模型及存储介质
WO2020196195A1 (ja) * 2019-03-26 2020-10-01 東京エレクトロン株式会社 状態判定装置、状態判定方法及びコンピュータ読み取り可能な記録媒体
CN112372636A (zh) * 2020-10-14 2021-02-19 北京烁科中科信电子装备有限公司 一种基于定向台定向结果调节机械手速度的方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113899446B (zh) * 2021-12-09 2022-03-22 北京京仪自动化装备技术股份有限公司 晶圆传送系统检测方法及晶圆传送系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0569951U (ja) * 1992-02-25 1993-09-21 株式会社島津製作所 駆動装置
JP2006240866A (ja) * 2005-03-07 2006-09-14 Hitachi Plant Technologies Ltd 搬送装置のモニタリングシステム
JP2011221687A (ja) * 2010-04-07 2011-11-04 Murata Mach Ltd 走行台車システムとその自己診断方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4824664B2 (ja) * 2007-03-09 2011-11-30 大日本スクリーン製造株式会社 基板処理装置
JP5664543B2 (ja) * 2011-12-26 2015-02-04 東京エレクトロン株式会社 搬送装置及び搬送方法
JP6411852B2 (ja) * 2014-10-07 2018-10-24 平田機工株式会社 搬送装置、搬送システム及び搬送方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0569951U (ja) * 1992-02-25 1993-09-21 株式会社島津製作所 駆動装置
JP2006240866A (ja) * 2005-03-07 2006-09-14 Hitachi Plant Technologies Ltd 搬送装置のモニタリングシステム
JP2011221687A (ja) * 2010-04-07 2011-11-04 Murata Mach Ltd 走行台車システムとその自己診断方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111199901A (zh) * 2018-11-20 2020-05-26 东京毅力科创株式会社 搬送单元的监视方法、监视装置、监视用模型及存储介质
JP2020086694A (ja) * 2018-11-20 2020-06-04 東京エレクトロン株式会社 搬送ユニットの監視方法及び監視装置並びに監視用モデル
JP7233201B2 (ja) 2018-11-20 2023-03-06 東京エレクトロン株式会社 搬送ユニットの監視方法及び監視装置並びに監視用モデル
WO2020196195A1 (ja) * 2019-03-26 2020-10-01 東京エレクトロン株式会社 状態判定装置、状態判定方法及びコンピュータ読み取り可能な記録媒体
JPWO2020196195A1 (zh) * 2019-03-26 2020-10-01
JP7179159B2 (ja) 2019-03-26 2022-11-28 東京エレクトロン株式会社 状態判定装置、状態判定方法、コンピュータ読み取り可能な記録媒体及びプログラム
CN112372636A (zh) * 2020-10-14 2021-02-19 北京烁科中科信电子装备有限公司 一种基于定向台定向结果调节机械手速度的方法

Also Published As

Publication number Publication date
JPWO2018147183A1 (ja) 2019-12-12
TW201839890A (zh) 2018-11-01
CN110291624B (zh) 2023-03-28
CN110291624A (zh) 2019-09-27
JP6766897B2 (ja) 2020-10-14

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