WO2017185831A1 - 一种柔性显示基板及其制备方法、柔性显示器件 - Google Patents

一种柔性显示基板及其制备方法、柔性显示器件 Download PDF

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WO2017185831A1
WO2017185831A1 PCT/CN2017/070849 CN2017070849W WO2017185831A1 WO 2017185831 A1 WO2017185831 A1 WO 2017185831A1 CN 2017070849 W CN2017070849 W CN 2017070849W WO 2017185831 A1 WO2017185831 A1 WO 2017185831A1
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Prior art keywords
flexible display
cathode
display substrate
gap
layer
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PCT/CN2017/070849
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English (en)
French (fr)
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杜小波
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京东方科技集团股份有限公司
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Priority to EP17734970.1A priority Critical patent/EP3261145A4/en
Priority to US15/543,750 priority patent/US10505141B2/en
Publication of WO2017185831A1 publication Critical patent/WO2017185831A1/zh

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8052—Cathodes
    • H10K59/80521—Cathodes characterised by their shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/82—Cathodes
    • H10K50/822—Cathodes characterised by their shape
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133305—Flexible substrates, e.g. plastics, organic film
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates
    • H10K77/111—Flexible substrates
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301—Details of OLEDs
    • H10K2102/311—Flexible OLED
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present disclosure relates to the field of display technologies, and in particular, to a flexible display substrate, a method of fabricating the same, and a flexible display device.
  • flexible display devices such as flexible display OLED devices
  • a structure similar to conventional rigid display devices using a single layer of metal, such as aluminum, silver, magnesium, etc., to form a cathode layer on a flexible substrate.
  • the flexible display device needs to be repeatedly bent to adapt to different use requirements, and the bonding force between the cathode layer and the organic material layer is very weak. Therefore, after the flexible display device is repeatedly bent and used, The cathode layer is easily broken and easily peeled off from the organic material layer, thereby greatly affecting the life of the flexible display device.
  • An object of the present disclosure is to provide a flexible display substrate, a method for fabricating the same, and a flexible display device, which solve the problem that the cathode layer of the flexible display device in the related art is easily broken after repeated bending and use.
  • embodiments of the present disclosure provide a flexible display substrate including a flexible substrate and a cathode layer disposed on the flexible substrate, wherein the cathode layer is provided with at least one gap.
  • the extending direction of the gap is consistent with the bendable direction of the flexible display substrate.
  • the flexible display substrate comprises a curved portion and a non-curved portion, and the at least one gap is disposed on a cathode layer of the curved portion.
  • the cathode layer of the non-curved portion is a complete film layer on which no gap is disposed.
  • the cathode layer comprises at least two cathode units arranged at intervals, and the gap is disposed between the cathode units.
  • the flexible display substrate further includes a plurality of sub-pixels, a gap between the cathode units corresponding to a position of a gap between the sub-pixels, a width of the gap between the cathode units being less than or Equal to the width of the gap between the corresponding sub-pixels.
  • the cathode units are arranged in a column, and each of the cathode units corresponds to at least one column of the sub-pixels.
  • the cathode units are arranged in a row, and each of the cathode units corresponds to at least one row of the sub-pixels.
  • the cathode unit has a strip shape.
  • the ends of at least two of the cathode units are connected together.
  • an embodiment of the present disclosure further provides a method for preparing a flexible display substrate, wherein the preparation method includes:
  • a cathode layer provided with at least one gap is formed.
  • the preparation method forms the cathode layer by an evaporation process or a patterning process.
  • Embodiments of the present disclosure also provide a flexible display device including the above-described flexible display substrate.
  • the embodiment of the present disclosure further provides a flexible display substrate, including:
  • the cathode layer is interposed between the first organic material layer and the second organic material layer; the first organic material layer and the second organic material layer are in direct contact via the at least one gap .
  • the at least one gap has a strip shape.
  • the cathode layer has a plurality of spaced apart elongated gaps; the first organic material The material layer and the second organic material layer are in direct contact via the plurality of gaps.
  • the flexible display substrate further includes a plurality of sub-pixels; and for each elongated gap, a vertical between each two opposite sub-pixels on both sides in the width direction of the elongated gap The distance is greater than or equal to the width of the elongated strip gap.
  • the flexible display substrate of the embodiment of the present disclosure includes a cathode layer disposed on the flexible substrate and provided with at least one gap; since the cathode layer is provided with at least one gap, the stress generated by the bending deformation of the cathode layer is reduced.
  • the upper and lower layers of the cathode layer are generally organic material layers, and the bonding force between the organic material layer and the organic material layer is compared with the bonding force between the cathode layer and the organic material layer.
  • FIG. 1 is a schematic cross-sectional view of a flexible display substrate according to some embodiments of the present disclosure.
  • FIG. 2 is a schematic cross-sectional view of the flexible display substrate of FIG. 1 taken along the BB' direction.
  • FIG. 3 is a schematic cross-sectional view of the flexible display substrate of FIG. 1 taken along the line AA'.
  • FIG. 4 is a schematic structural view of a cathode layer in a flexible display substrate according to some embodiments of the present disclosure.
  • FIG. 5 is a schematic structural view of a cathode layer and an organic material light-emitting layer in a flexible display substrate according to some embodiments of the present disclosure.
  • FIG. 6 is a schematic structural view of a cathode layer in a flexible display substrate according to some embodiments of the present disclosure.
  • FIG. 7 is a schematic structural view of a cathode layer and an organic material light-emitting layer in a flexible display substrate according to some embodiments of the present disclosure.
  • FIG. 8 is a schematic diagram showing a relationship between a gap on a cathode layer and a bendable direction in a flexible display substrate according to some embodiments of the present disclosure.
  • FIG. 9 is a schematic structural view of a cathode layer in a flexible display substrate according to some embodiments of the present disclosure.
  • FIG. 10 is a schematic view showing the connection of a cathode unit in a flexible display substrate according to some embodiments of the present disclosure.
  • FIG. 11 is a flow chart of a method of fabricating a flexible display substrate in accordance with some embodiments of the present disclosure.
  • the embodiment of the present disclosure provides a flexible display substrate including a cathode layer disposed on the flexible substrate, and the cathode At least one gap is provided on the layer.
  • the stress generated by the bending deformation of the cathode layer may be reduced, and in practical applications, the upper and lower layers of the cathode layer are generally For the organic material layer, the bonding force between the organic material layer and the organic material layer is greater than the bonding force between the cathode layer and the organic material layer, so when at least one gap is provided on the cathode layer , increasing the contact area between the organic material layer and the organic material layer, increasing the bonding force, making the cathode layer more difficult to separate from the upper and lower organic material layers, thereby preventing the cathode layer from being broken after repeated bending or The phenomenon of peeling increases the life of the flexible display substrate.
  • a cathode layer is disposed on the organic material light-emitting layer, and after the flexible display substrate is packaged, an organic material encapsulation layer is disposed on the cathode layer, that is, the cathode layer is in the organic material. Between the layer and the organic material encapsulation layer.
  • the cathode layer is a complete film layer, the organic material light-emitting layer and the organic material encapsulation layer are not in direct contact; and when at least one gap is disposed on the cathode layer, the organic material light-emitting layer and the organic material The encapsulation layer will be partially in direct contact.
  • the bonding force between the organic material light-emitting layer and the organic material encapsulation layer is larger and the binding is tighter, making the cathode layer more difficult. It is peeled off from the organic material light-emitting layer or the organic material encapsulation layer and is damaged.
  • the extending direction of the gap on the cathode layer is consistent with the bendable direction of the flexible display substrate to further reduce the stress generated by the bending deformation of the cathode layer.
  • the cathode layer of the flexible display substrate may be prepared such that at least one gap is disposed on the cathode layer of the curved portion
  • the cathode layer of the non-curved portion is a complete film layer on which no gap is provided.
  • a gap is provided only on the curved portion of the cathode layer, which not only avoids the softness
  • the phenomenon that the cathode layer of the substrate shows cracking or peeling after repeated bending can also simplify the preparation process.
  • the cathode layer comprises at least two cathode units arranged at intervals, and the gap is disposed between the cathode units.
  • a plurality of sub-pixels are disposed on the flexible display substrate, a gap between the cathode units corresponds to a position of a gap between the sub-pixels, and a width of the gap between the cathode units is smaller than Or equal to the width of the gap between the corresponding sub-pixels.
  • the cathode units are arranged in a column, each of the cathode units corresponding to at least one column of the sub-pixels; or the cathode units are arranged in a row, and each of the cathode units corresponds to at least one row of the sub-pixels.
  • the cathode unit has a strip shape.
  • the ends of at least two of the cathode units are connected together.
  • FIG. 1 is a cross-sectional structural view of a flexible display substrate according to some embodiments of the present disclosure
  • FIG. 2 is a cross-sectional structural view of the flexible display substrate of FIG. 1 along a BB' direction
  • FIG. 3 is FIG. A schematic view of a cross-sectional structure of the flexible display substrate along the AA' direction.
  • the direction of AA' may be simply referred to as a row direction
  • the direction of BB' may be simply referred to as a column direction.
  • the flexible display substrate of the embodiment of the present disclosure includes: a substrate substrate 100 such as a flexible substrate, a thin film transistor array 200, a pixel defining layer 300, an organic material light emitting layer 400, a cathode layer 500, and a light extraction layer 600 (organic material layer).
  • a substrate substrate 100 such as a flexible substrate
  • a thin film transistor array 200 such as a thin film transistor array 200
  • a pixel defining layer 300 such as a a pixel defining layer 300
  • an organic material light emitting layer 400 such as a pixel defining layer 300
  • a cathode layer 500 organic material layer
  • a light extraction layer 600 organic material layer
  • the organic material light emitting layer 400 may be divided into a plurality of sub-pixels, for example, a red sub-pixel 410, a green sub-pixel 420, or a blue sub-pixel 430.
  • FIG. 4 is a schematic structural diagram of a cathode layer in a flexible display substrate according to some embodiments of the present disclosure.
  • the cathode layer 500 includes a plurality of spaced apart cathode units 501 with a gap 502 disposed therebetween.
  • the cathode unit 501 has a strip shape, but the disclosure is not limited thereto, and the cathode unit 501 may have other shapes according to actual needs.
  • the red sub-pixel 410, the green sub-pixel 420, and the blue sub-pixel 430 in the embodiment of the present disclosure are spaced apart along the row direction of the flexible display substrate, and each sub-pixel in each column of sub-pixels is shown in FIG. The interval is also set.
  • the cathode units 501 are spaced apart in the column direction, and each of the cathode units 501 corresponds to a row of the sub-pixels, and the width of each of the cathode units 501 in the column direction.
  • the width of the sub-pixels in the column direction is greater than the corresponding one row, so that the cathode unit 501 can completely cover the corresponding sub-pixels to ensure normal electron injection.
  • a gap between the cathode units corresponds to a position of a gap between the sub-pixels, and between the cathode units
  • the width of the gap is less than or equal to the width of the gap between the corresponding sub-pixels.
  • the cathode units may be arranged in a row, and each of the cathode units corresponds to at least one row of the sub-pixels.
  • the cathode units 501 are arranged in a row, and each of the cathode units 501 corresponds to one row of the sub-pixels.
  • the cathode units 501 are arranged in a row, and each of the cathode units 501 corresponds to two rows of the sub-pixels, that is, the width of each of the cathode units 501 in the column direction is equal to the corresponding two rows. The width of the sub-pixel in the column direction.
  • the number of rows of sub-pixels corresponding to each of the cathode units 501 may also be other numbers, such as three rows, four rows, and the like.
  • each of the cathode units corresponds to a plurality of rows of the sub-pixels
  • each of the cathode units corresponds to a plurality of rows of the sub-pixels to enlarge a vapor deposition region of the cathode layer, thereby reducing the difficulty of fabrication of the mask and simplifying Process process.
  • the cathode units may also be arranged in a column, and each of the cathode units corresponds to at least one column of the sub-pixels.
  • the cathode units 501 are arranged in columns, and each of the cathode units 501 corresponds to the sub-pixels in the row direction. Specifically, it can be seen from FIG. 7 that each of the cathode units 501 corresponds to three columns of the sub-pixels, that is, the width of each of the cathode units 501 in the row direction is equal to the corresponding three columns of the sub-pixels in the row. The width up.
  • each of the cathode units 501 may also be other numbers, such as four columns, five columns, and the like.
  • each of the cathode units corresponds to a plurality of columns of the sub-pixels, and each of the cathode units corresponding to the plurality of columns of the sub-pixels can enlarge a vapor deposition region of the cathode layer, thereby reducing the difficulty of fabrication of the mask and simplifying Process process.
  • the gap between sub-pixels in the column direction is larger than the gap between sub-pixels in the row direction, so in order to reduce the error in the process of preparing the cathode layer, optional
  • the cathode units are arranged in a row, and each of the cathode units corresponds to at least one row of the sub-pixels.
  • the direction of extension of the gap 502 on the cathode layer 500 coincides with the bendable direction of the flexible display substrate.
  • the extending direction of the gap 502 that is, the direction indicated by the arrow in FIG. 8, is the extending direction of the gap 502 based on the length.
  • the bendable direction of the flexible display substrate is also the direction indicated by the arrow in FIG. 8 , which is the length direction corresponding to the bend of the flexible display substrate when it is in the bent state.
  • the extending direction of the gap on the cathode layer may also be determined according to the bendable direction of the flexible display substrate.
  • the cathode layer 500 in the flexible display substrate of some embodiments of the present disclosure includes a curved portion BC and non-curved portions AB, CD, and a curved portion BC of the cathode layer 500 is provided with a plurality of gaps 502, the cathode The non-bent portions AB and CD of layer 500 are a complete film layer with no gaps disposed thereon.
  • the preparation process can be simplified.
  • the ends of at least two of the cathode units of the cathode layer may be first connected together and then connected to a driving circuit.
  • the ends of all of the cathode elements of the cathode layer are joined together.
  • Embodiments of the present disclosure also provide a flexible display device including any of the above flexible display substrates.
  • some embodiments of the present disclosure further provide a method for preparing a flexible display substrate, including the following steps:
  • Step 110 Forming a cathode layer provided with at least one gap.
  • the cathode layer may be formed by an evaporation process or a patterning process.
  • the cathode layer on the flexible display substrate in the embodiment of the present disclosure may be formed by placing the cathode film in an evaporation source in the vacuum chamber; and setting a mask on the side of the flexible substrate near the evaporation source. Purging the cathode film material by the evaporation source, the cathode film material evaporates and vaporizes from the evaporation source, reaches the surface of the plated flexible substrate, and condenses to form a cathode layer; The shape of the mask forms a cathode layer provided with at least one gap.

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Abstract

提供一种柔性显示基板及其制备方法、柔性显示器件。所述柔性显示基板包括柔性基板（100）和设置于柔性基板（100）上的设置有至少一个间隙（502）的阴极层（500）。

Description

一种柔性显示基板及其制备方法、柔性显示器件
相关申请的交叉引用
本申请主张在2016年4月29日在中国提交的中国专利申请号No.201610284422.5的优先权，其全部内容通过引用包含于此。
技术领域
本公开涉及显示技术领域，特别是涉及一种柔性显示基板及其制备方法、柔性显示器件。
背景技术
随着显示技术的发展，接近传统显示模式的柔性显示器件将很快进入人们的视野。具体的，由于柔性显示器件本身特有的可弯折的特点，会给用户提供特殊的用户体验。
目前，柔性显示器件例如柔性显示OLED器件，依然采用与传统刚性显示器件类似的结构，采用一整层的金属，如铝、银、镁等，形成柔性基板上的阴极层。
但是，相比于传统刚性显示器件，柔性显示器件需要反复弯折以适应不同的使用需求，阴极层与有机材料层的结合力又非常弱，所以，柔性显示器件在反复弯折使用后，其中的阴极层容易断裂，且容易与有机材料层剥离，从而极大影响柔性显示器件的寿命。
发明内容
本公开的目的在于提供一种柔性显示基板及其制备方法、柔性显示器件，以解决相关技术中的柔性显示器件在反复弯折使用后，其中的阴极层容易断裂的问题。
为了实现上述的目的，本公开实施例提供一种柔性显示基板，包括柔性基板和设置于柔性基板上的阴极层，其中，所述阴极层上设置有至少一个间隙。
可选的，所述间隙的延伸方向和所述柔性显示基板的可弯折方向一致。
可选的，所述柔性显示基板包括弯曲部分和非弯曲部分，所述至少一个间隙设置在位于所述弯曲部分的阴极层上。
可选的，所述非弯曲部分的阴极层是一个完整的膜层，其上未设置间隙。
可选的，所述阴极层包括至少两个间隔设置的阴极单元，所述阴极单元之间设置有所述间隙。
可选的，所述柔性显示基板还包括多个亚像素，所述阴极单元之间的间隙与所述亚像素之间的间隙的位置相对应，所述阴极单元之间的间隙的宽度小于或等于对应的所述亚像素之间的间隙的宽度。
可选的，所述阴极单元成列排列，每个所述阴极单元对应至少一列所述亚像素。
可选的，所述阴极单元成行排列，每个所述阴极单元对应至少一行所述亚像素。
可选的，所述阴极单元呈条形。
可选的，至少两个所述阴极单元的端部连接在一起。
此外，本公开实施例还提供一种柔性显示基板的制备方法，其中，所述制备方法包括：
形成设置有至少一个间隙的阴极层。
可选的，所述制备方法采用蒸镀工艺或构图工艺形成所述阴极层。
本公开实施例还提供一种柔性显示器件，包括上述的柔性显示基板。
本公开实施例还提供一种柔性显示基板，包括：
第一有机材料层；
具有至少一个间隙的阴极层；和
第二有机材料层；
其中，所述阴极层夹设在所述第一有机材料层和所述第二有机材料层之间；所述第一有机材料层和所述第二有机材料层经由所述至少一个间隙直接接触。
可选的，所述至少一个间隙呈条形。
可选的，所述阴极层具有多个间隔设置的长条形间隙；所述第一有机材 料层和所述第二有机材料层经由所述多个间隙直接接触。
可选的，所述柔性显示基板还包括多个亚像素；针对每个长条形间隙，在所述长条形间隙的宽度方向上的两侧的每两个相对的亚像素之间的垂直距离大于等于所述长条形间隙的宽度。
通过本公开的上述技术方案，本公开的有益效果在于：
本公开实施例的柔性显示基板，包括设置于柔性基板上的设置有至少一个间隙的阴极层；由于所述阴极层上设置有至少一个间隙，所述阴极层因弯折形变产生的应力会减小，且由于实际应用中，所述阴极层的上下两层一般均为有机材料层，相比于阴极层与有机材料层之间的结合力，有机材料层与有机材料层之间的结合力会更大，所以，当所述阴极层上设置有至少一个间隙时，会增加有机材料层与有机材料层之间的接触，增大结合力，使所述阴极层更难与其上下有机材料层分离，从而能够避免所述阴极层在反复弯折后出现断裂或剥离的现象，增加柔性显示基板的寿命。
附图说明
图1为本公开一些实施例的柔性显示基板的剖面结构示意图。
图2为图1中的柔性显示基板沿BB′方向的剖面结构示意图。
图3为图1中的柔性显示基板沿AA′方向的剖面结构示意图。
图4为本公开一些实施例的柔性显示基板中的阴极层的结构示意图。
图5为本公开一些实施例的柔性显示基板中的阴极层和有机材料发光层的结构示意图。
图6为本公开一些实施例的柔性显示基板中的阴极层的结构示意图。
图7为本公开一些实施例的柔性显示基板中的阴极层和有机材料发光层的结构示意图。
图8为本公开一些实施例的柔性显示基板中的阴极层上的间隙与可弯折方向的关系示意图。
图9为本公开一些实施例的柔性显示基板中的阴极层的结构示意图。
图10为本公开一些实施例的柔性显示基板中的阴极单元的连接示意图。
图11为本公开一些实施例的柔性显示基板的制备方法的流程图。
具体实施方式
下面将结合本公开实施例中的附图，对本公开实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本公开一部分实施例，而不是全部的实施例。基于本公开中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本公开保护的范围。
为解决相关技术中的柔性显示器件在反复弯折使用后，其中的阴极层容易断裂问题，本公开实施例提供了一种柔性显示基板，包括设置于柔性基板上的阴极层，且所述阴极层上设置有至少一个间隙。
本公开实施例中，当所述阴极层上设置有至少一个间隙时，所述阴极层因弯折形变产生的应力会减小，且由于实际应用中，所述阴极层的上下两层一般均为有机材料层，相比于阴极层与有机材料层之间的结合力，有机材料层与有机材料层之间的结合力会更大，所以，当所述阴极层上设置有至少一个间隙时，会增加有机材料层与有机材料层之间的接触面积，增大结合力，使所述阴极层更难与其上下有机材料层分离，从而能够避免所述阴极层在反复弯折后出现断裂或剥离的现象，增加柔性显示基板的寿命。
例如，在一柔性显示基板中，阴极层设置在有机材料发光层上，所述柔性显示基板被封装后，所述阴极层上设置有机材料封装层，即所述阴极层处于所述有机材料发光层和有机材料封装层之间。在所述阴极层为完整膜层时，所述有机材料发光层和有机材料封装层不会直接接触；而在所述阴极层上设置有至少一个间隙时，所述有机材料发光层和有机材料封装层会部分直接接触。相比于阴极层与有机材料发光层或有机材料封装层之间的结合力，有机材料发光层与有机材料封装层之间的结合力更大，结合得更紧密，使得所述阴极层更难与所述有机材料发光层或有机材料封装层剥离而损坏。
本公开实施例中，所述阴极层上的间隙的延伸方向和柔性显示基板的可弯折方向一致，以进一步减小所述阴极层因弯折形变产生的应力。
其中，当本公开实施例的柔性显示基板包括弯曲部分和非弯曲部分时，可选的，可将所述柔性显示基板的阴极层制备成：所述弯曲部分的阴极层上设置有至少一个间隙，所述非弯曲部分的阴极层是一个完整的膜层，其上未设置间隙。这样，仅在阴极层的弯曲部分上设置间隙，不仅能够避免所述柔 性显示基板的阴极层在反复弯折后出现断裂或剥离的现象，还能够简化制备工艺。
可选的，所述阴极层包括至少两个间隔设置的阴极单元，所述阴极单元之间设置有所述间隙。
可选的，所述柔性显示基板上设置有多个亚像素，所述阴极单元之间的间隙与所述亚像素之间的间隙的位置相对应，所述阴极单元之间的间隙的宽度小于或等于对应的所述亚像素之间的间隙的宽度。
可选的，所述阴极单元成列排列，每个所述阴极单元对应至少一列所述亚像素；或者，所述阴极单元成行排列，每个所述阴极单元对应至少一行所述亚像素。
可选的，所述阴极单元呈条形。
可选的，至少两个所述阴极单元的端部连接在一起。
下面，结合附图对本公开实施例的柔性显示基板进行详细说明。
参见图1～图3所示，图1为本公开一些实施例的柔性显示基板的剖面结构示意图，图2为图1中的柔性显示基板沿BB′方向的剖面结构示意图，图3为图1中的柔性显示基板沿AA′方向的剖面结构示意图。其中，AA′方向可简称为行方向，BB′方向可简称为列方向。
具体的，本公开实施例的柔性显示基板包括：衬底基板100如柔性基板、薄膜晶体管阵列200、像素界定层300、有机材料发光层400、阴极层500和光取出层600(有机材料层)。需要说明的是，因器件结构不同，所述光取出层为可选层即不是必须的，当不包括所述光取出层时，在封装后，所述阴极层500上一般有有机材料封装层。
其中，因发光颜色的不同，所述有机材料发光层400可划分为多个亚像素，所述亚像素例如为红色亚像素410、绿色亚像素420或蓝色亚像素430。
请同时参见图4所示，图4为本公开一些实施例的柔性显示基板中的阴极层的结构示意图。所述阴极层500包括多个间隔设置的阴极单元501，所述阴极单元501之间设置有间隙502。
具体的，所述阴极单元501呈条形，但本公开不以此为限，根据实际的需求，所述阴极单元501也可以为其他形状。
其中，参见图1所示，本公开实施例中的红色亚像素410、绿色亚像素420和蓝色亚像素430沿柔性显示基板的行方向间隔设置，且每一列亚像素中的每个亚像素之间也是间隔设置的。从图2和图3中可以得出，所述阴极单元501沿列方向间隔设置，且每个所述阴极单元501对应一行所述亚像素，每个所述阴极单元501在列方向上的宽度大于对应的一行所述亚像素在列方向上的宽度，从而使得所述阴极单元501可以完全覆盖对应的亚像素，以保证正常的电子注入。
也就是说，本公开实施例的柔性显示基板中，为保证正常的电子注入，所述阴极单元之间的间隙要与所述亚像素之间的间隙的位置相对应，所述阴极单元之间的间隙的宽度要小于或等于对应的所述亚像素之间的间隙的宽度。
本公开实施例中，所述阴极单元可成行排列，每个所述阴极单元对应至少一行所述亚像素。
举例来说，参见图2所示，所述阴极单元501成行排列，且每个所述阴极单元501对应一行所述亚像素。或者参见图5所示，所述阴极单元501成行排列，且每个所述阴极单元501对应两行所述亚像素，即每个所述阴极单元501在列方向上的宽度等于对应的两行所述亚像素在列方向上的宽度。
当然，在本公开的其他一些实施例中，每个所述阴极单元501对应的亚像素的行数也可为其他数目，如三行、四行等。
并且，相比于每个所述阴极单元对应一行所述亚像素，每个所述阴极单元对应多行所述亚像素能够扩大阴极层的蒸镀区域，减小掩膜板的制作难度，简化工艺制程。
本公开实施例中，所述阴极单元还可成列排列，每个所述阴极单元对应至少一列所述亚像素。
举例来说，参见图6和图7所示，所述阴极单元501为成列排列，且每个所述阴极单元501对应行方向上的所述亚像素。具体的，从图7中可以看出：每个所述阴极单元501对应三列所述亚像素，即每个所述阴极单元501在行方向上的宽度等于对应的三列所述亚像素在行方向上的宽度。
需要指出的是，在本公开的其他一些实施例中，每个所述阴极单元501 对应的亚像素的列数也可为其他数目，如四列、五列等。
并且，相比于每个所述阴极单元对应一列所述亚像素，每个所述阴极单元对应多列所述亚像素能够扩大阴极层的蒸镀区域，减小掩膜板的制作难度，简化工艺制程。
通常情况下，相比于行方向上的亚像素之间的间隙，列方向上的亚像素之间的间隙要更大，所以，为了在制备阴极层的过程中减小误差，可选的，所述阴极单元成行排列，每个所述阴极单元对应至少一行所述亚像素。
参见图8所示，在本公开一些实施例中，所述阴极层500上的间隙502的延伸方向和柔性显示基板的可弯折方向一致。其中，所述间隙502的延伸方向即图8中的箭头所指的方向，为所述间隙502基于长度的伸展方向。所述柔性显示基板的可弯折方向也是图8中的箭头所指的方向，为所述柔性显示基板在处于弯折状态时，其弯折痕对应的长度方向。
这样，能够大大减小阴极层因弯折形变产生的应力。在制备柔性显示基板的阴极层时，也可根据所述柔性显示基板的可弯折方向，确定所述阴极层上的间隙的延伸方向。
参见图9所示，为本公开一些实施例的柔性显示基板中的阴极层的结构示意图。具体的，本公开一些实施例的柔性显示基板中的阴极层500包括弯曲部分BC和非弯曲部分AB、CD，且所述阴极层500的弯曲部分BC上设置有多个间隙502，所述阴极层500的非弯曲部分AB和CD是一个完整的膜层，其上未设置间隙。这样，仅在所述阴极层的弯曲部分上设置间隙，不仅能够避免所述柔性显示基板的阴极层在反复弯折后出现断裂或剥离的现象，还能够简化制备工艺。
本公开一些实施例中，为了避免每个阴极单元都与驱动电路连接，可先将所述阴极层的至少两个所述阴极单元的端部连接在一起，然后与驱动电路连接。例如，参见图10所示，所述阴极层的全部阴极单元的端部连接在一起。
本公开实施例还提供一种柔性显示器件，包括上述任一种柔性显示基板。
参见图11所示，本公开一些实施例还提供一种柔性显示基板的制备方法，包括如下步骤：
步骤110：形成设置有至少一个间隙的阴极层。
具体的，在制备所述柔性显示基板时，可采用蒸镀工艺或构图工艺形成所述阴极层。
举例来说，本公开实施例中的柔性显示基板上的阴极层，可采用如下过程形成：将阴极膜材置于真空室内的蒸发源中；在柔性基板靠近蒸发源的一侧设置掩膜板；通过所述蒸发源对所述阴极膜材进行蒸发，所述阴极膜材蒸发气化后从所述蒸发源中逸出，到达被镀的柔性基板表面上，凝结形成阴极层；其中，借助所述掩膜板的形状，形成设置有至少一个间隙的阴极层。
以上所述仅是本公开的可选实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本公开原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本公开的保护范围。

Claims (17)

  1. 一种柔性显示基板，包括柔性基板和设置于所述柔性基板上的阴极层，其中，所述阴极层上设置有至少一个间隙。
  2. 根据权利要求1所述的柔性显示基板，其中，所述间隙的延伸方向和所述柔性显示基板的可弯折方向一致。
  3. 根据权利要求1所述的柔性显示基板，其中，所述柔性显示基板包括弯曲部分和非弯曲部分，所述至少一个间隙设置在位于所述弯曲部分的阴极层上。
  4. 根据权利要求3所述的柔性显示基板，其中，位于所述非弯曲部分的阴极层是一个完整的膜层，其上未设置间隙。
  5. 根据权利要求1所述的柔性显示基板，其中，所述阴极层包括至少两个间隔设置的阴极单元，所述阴极单元之间设置有所述间隙。
  6. 根据权利要求5所述的柔性显示基板，其中，所述柔性显示基板还包括多个亚像素，所述阴极单元之间的间隙与所述亚像素之间的间隙的位置相对应，所述阴极单元之间的间隙的宽度小于或等于对应的所述亚像素之间的间隙的宽度。
  7. 根据权利要求6所述的柔性显示基板，其中，所述阴极单元成列排列，每个所述阴极单元对应至少一列所述亚像素。
  8. 根据权利要求6所述的柔性显示基板，其中，所述阴极单元成行排列，每个所述阴极单元对应至少一行所述亚像素。
  9. 根据权利要求5所述的柔性显示基板，其中，所述阴极单元呈条形。
  10. 根据权利要求5-9中任一所述的柔性显示基板，其中，至少两个所述阴极单元的端部连接在一起。
  11. 一种柔性显示基板的制备方法，包括：
    形成设置有至少一个间隙的阴极层。
  12. 根据权利要求10所述的制备方法，其中，所述形成设置有至少一个间隙的阴极层包括采用蒸镀工艺或构图工艺形成所述阴极层。
  13. 一种柔性显示器件，包括上述权利要求1-10中任一所述的柔性显示 基板。
  14. 一种柔性显示基板，包括：
    第一有机材料层；
    具有至少一个间隙的阴极层；和
    第二有机材料层；
    其中，所述阴极层夹设在所述第一有机材料层和所述第二有机材料层之间；所述第一有机材料层和所述第二有机材料层经由所述至少一个间隙直接接触。
  15. 根据权利要求14所述的柔性显示基板，其中，所述至少一个间隙呈条形。
  16. 根据权利要求14所述的柔性显示基板，其中，所述阴极层具有多个间隔设置的长条形间隙；所述第一有机材料层和所述第二有机材料层经由所述多个间隙直接接触。
  17. 根据权利要求16所述的柔性显示基板，其中，所述柔性显示基板还包括多个亚像素；针对每个长条形间隙，在所述长条形间隙的宽度方向上的两侧的每两个相对的亚像素之间的垂直距离大于等于所述长条形间隙的宽度。
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KR101857868B1 (ko) 2016-08-26 2018-06-21 엘지디스플레이 주식회사 표시장치
JP2021503168A (ja) * 2017-11-17 2021-02-04 シェンジェン ロイオル テクノロジーズ カンパニー リミテッドＳｈｅｎｚｈｅｎ Ｒｏｙｏｌｅ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｃｏ．， Ｌｔｄ． 有機発光ダイオード表示モジュール及びその製造方法、電子装置
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WO2020191698A1 (zh) * 2019-03-28 2020-10-01 京东方科技集团股份有限公司 显示面板及其控制方法、控制装置
CN110071217B (zh) * 2019-03-29 2023-12-12 武汉华星光电半导体显示技术有限公司 掩膜板、显示面板的制作方法及显示装置
CN111883557A (zh) * 2019-08-02 2020-11-03 广东聚华印刷显示技术有限公司 柔性显示面板及显示装置
CN111142180A (zh) * 2019-12-30 2020-05-12 Oppo广东移动通信有限公司 偏光片及其制作方法、显示屏组件和电子装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6174613B1 (en) * 1999-07-29 2001-01-16 Agilent Technologies, Inc. Method and apparatus for fabricating polymer-based electroluminescent displays
CN102044558A (zh) * 2010-11-12 2011-05-04 深圳丹邦投资集团有限公司 有机发光显示装置的透明导电基板及其制备方法
US20130119352A1 (en) * 2011-11-14 2013-05-16 Deeder Mohammad Aurongzeb Multi-structure cathode for flexible organic light emitting diode (oled) device and method of making same
US9024336B2 (en) * 2013-05-28 2015-05-05 J Touch Corporation Display panel driven by electrode wires
CN104765188A (zh) * 2015-04-07 2015-07-08 深圳市华星光电技术有限公司 柔性液晶显示器
CN105789262A (zh) * 2016-04-29 2016-07-20 京东方科技集团股份有限公司 一种柔性显示基板及其制备方法、柔性显示器件

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5117016B2 (ja) * 2006-08-21 2013-01-09 富士フイルム株式会社 表示装置
US20120280229A1 (en) 2010-05-14 2012-11-08 Takeshi Suzuki Flexible semiconductor device, method for manufacturing the same and image display device
EP2664002B1 (en) * 2011-01-12 2021-08-04 Universal Display Corporation Oled lighting device with short tolerant structure
EP2684907B1 (en) * 2011-03-09 2020-02-26 Mitsui Chemicals, Inc. Resin, optical material, and optical device
KR20140052730A (ko) 2012-10-25 2014-05-07 삼성디스플레이 주식회사 유기 발광 표시 장치, 이를 이용한 인증 방법 및 유기 발광 표시 장치를 포함한 신분증
CN103456764B (zh) * 2013-09-09 2016-01-20 京东方科技集团股份有限公司 Oled阵列基板及其制造方法、显示装置
CN104134681B (zh) * 2014-06-17 2018-01-23 京东方科技集团股份有限公司 一种有机发光二极管显示面板及其制备方法、掩膜板
CN104538423B (zh) * 2014-12-22 2017-10-13 深圳市华星光电技术有限公司 Oled显示器件及其制造方法
CN104536187B (zh) * 2015-01-23 2018-01-23 京东方科技集团股份有限公司 柔性显示器

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6174613B1 (en) * 1999-07-29 2001-01-16 Agilent Technologies, Inc. Method and apparatus for fabricating polymer-based electroluminescent displays
CN102044558A (zh) * 2010-11-12 2011-05-04 深圳丹邦投资集团有限公司 有机发光显示装置的透明导电基板及其制备方法
US20130119352A1 (en) * 2011-11-14 2013-05-16 Deeder Mohammad Aurongzeb Multi-structure cathode for flexible organic light emitting diode (oled) device and method of making same
US9024336B2 (en) * 2013-05-28 2015-05-05 J Touch Corporation Display panel driven by electrode wires
CN104765188A (zh) * 2015-04-07 2015-07-08 深圳市华星光电技术有限公司 柔性液晶显示器
CN105789262A (zh) * 2016-04-29 2016-07-20 京东方科技集团股份有限公司 一种柔性显示基板及其制备方法、柔性显示器件

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3261145A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110534662A (zh) * 2019-09-04 2019-12-03 云谷（固安）科技有限公司 柔性屏体及其制备方法、显示装置
CN110534662B (zh) * 2019-09-04 2022-03-22 云谷（固安）科技有限公司 柔性屏体及其制备方法、显示装置

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