WO2017161701A1 - 显示器件的对位检测设备及曝光工艺系统 - Google Patents

显示器件的对位检测设备及曝光工艺系统 Download PDF

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Publication number
WO2017161701A1
WO2017161701A1 PCT/CN2016/085253 CN2016085253W WO2017161701A1 WO 2017161701 A1 WO2017161701 A1 WO 2017161701A1 CN 2016085253 W CN2016085253 W CN 2016085253W WO 2017161701 A1 WO2017161701 A1 WO 2017161701A1
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WIPO (PCT)
Prior art keywords
display device
alignment
detecting device
image
display
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PCT/CN2016/085253
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English (en)
French (fr)
Inventor
张磊
代伍坤
陈磊
李嘉鹏
董宜萍
Original Assignee
京东方科技集团股份有限公司
北京京东方光电科技有限公司
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Application filed by 京东方科技集团股份有限公司, 北京京东方光电科技有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US15/509,484 priority Critical patent/US10466600B2/en
Publication of WO2017161701A1 publication Critical patent/WO2017161701A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7038—Alignment for proximity or contact printer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0266—Marks, test patterns or identification means
    • H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0008—Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board

Definitions

  • the present invention relates to the field of display device processing technology, and in particular to a display device for a display device and an exposure process system.
  • the film of each layer is required to be opposed to the first layer of the metal film (the first film layer deposited on the glass substrate)
  • the alignment is performed, and the overlay accuracy of each layer of the film reflects the matching of the alignment between the layers of the film.
  • a specific method for detecting the alignment accuracy of each layer of the film is: after the preparation of the first layer of the metal film, attaching a reference mark for aligning the layers of the film on the first layer of the metal film (for example, square).
  • a reference mark for aligning the layers of the film on the first layer of the metal film for example, square
  • the frame shape is then judged by the detection of the frame of each layer of the film formed after the detection and the alignment of the reference mark to determine whether the alignment accuracy of the layer of film is acceptable.
  • the present invention is directed to at least one of the technical problems existing in the prior art, and provides an alignment detecting device for a display device and an exposure processing system including the same, which can be used without measuring a critical size of the display device. Judging the alignment of the display device can improve the detection efficiency, thereby enabling detection of all display devices, thereby improving product quality.
  • a alignment detecting device for a display device comprising a carrier for carrying the display device, a control device, a detecting device and an analyzing device, wherein the control device is for When the carrier is in idle time between processes, transmitting a control instruction to the detecting device according to the reference point coordinate information of the alignment area of the display device stored in advance; the detecting device is configured to send according to the control device Controlling instructions move to an alignment area of the display device on the carrier, and acquiring an image of the area, and then transmitting the image to the analysis device; the analysis device is configured to transmit using the detection device Image analysis processes the alignment of the display device.
  • the analyzing device is configured to display the image for the human eye to judge the alignment of the display device.
  • the analyzing device is configured to compare the image with a registration standard image stored in the display device, and determine a alignment condition of the display device according to the comparison result.
  • the analyzing device is configured to compare the image with a registration standard image stored in the display device, and determine a alignment condition of the display device according to the comparison result; the alignment detecting device further The alarm device is configured to issue an alarm prompt when the analyzing device determines that the alignment of the display device is unsatisfactory.
  • the detecting device comprises a camera, a mechanical arm and a driving mechanism, wherein the camera is mounted on the mechanical arm for acquiring the image; the driving mechanism is configured to drive the mechanical arm to move The camera is moved above the carrier opposite the alignment area of the display device.
  • the camera includes an autofocus device for autofocusing based on ambient light and a distance between the camera and the display device.
  • the carrier comprises a plurality of trays spaced apart in a vertical direction, each layer tray for carrying a plurality of the display devices;
  • the drive mechanism comprises a vertical drive assembly and a horizontal drive assembly, wherein A vertical drive assembly for driving the horizontal drive assembly and the robot arm to move synchronously in a vertical direction; the horizontal drive assembly for driving the robot arm to move in a horizontal direction.
  • the water is driven when the vertical drive assembly drives the horizontal drive assembly and the robot arm moves to a height corresponding to a gap between any adjacent two-layer tray
  • the flat drive assembly drives the robot arm to move horizontally into the gap as opposed to the alignment area of the display device.
  • the horizontal drive assembly drives the mechanical arm to move in a screw-in or screw-out manner; or the horizontal drive assembly drives the mechanical arm to move in an extended or retracted manner.
  • the driving mechanism further includes a rotating mechanism mounted on the horizontal driving assembly for driving the mechanical arm to rotate in a horizontal plane.
  • the detecting device comprises two cameras, the two cameras being mounted on the robot arm at intervals, and the interval between the two cameras corresponds to the interval between two adjacent display devices on the tray .
  • the idle time between the processes is after the completion of the exposure process, and during the transportation of the carrier or during the waiting process, before the etching process is performed.
  • the present invention also provides an exposure process system including an exposure unit, a drying unit, and a display detecting device of the above display device provided by the present invention, wherein the exposure unit is used for exposing a display device a drying unit for drying the display device that has completed exposure; and the alignment detecting device is configured to detect a alignment condition of the display device that completes drying.
  • the alignment detecting device of the display device uses the control device to send a control command to the detecting device according to the reference point coordinate information of the alignment region of the display device when the carrier is in the idle time between processes; and the detecting device according to the control device
  • the sent control command moves to the alignment area of the display device on the carrier, collects the image of the area, and then sends the image to the analysis device; the analysis device determines the alignment of the display device, thus eliminating the need to measure the key of the display device
  • the size can thus improve the detection efficiency, realize the detection of all the display devices, and improve the monitoring strength, thereby improving the product quality.
  • the exposure process system provided by the invention can improve the detection efficiency by using the alignment detecting device of the display device provided by the invention, thereby enabling detection of all the display devices, improving the monitoring strength, and thereby improving the product quality.
  • FIG. 1 is a schematic structural diagram of a alignment detecting device of a display device according to an embodiment of the present invention
  • FIG. 2 is a schematic diagram of a alignment area of a display device in an embodiment of the present invention.
  • FIG. 3 is a schematic structural diagram of a display detecting device of a display device according to an embodiment of the present invention.
  • FIG. 4 is a schematic block diagram of an exposure process system according to an embodiment of the present invention.
  • FIG. 1 is a schematic structural diagram of a alignment detecting device of a display device according to an embodiment of the present invention.
  • the alignment detecting device of the display device is used for detecting the alignment accuracy of each layer of the film during the manufacturing process of the display device.
  • a fiducial mark for example, a square shape
  • the relative position of the frame of each layer of the film formed after the detection to the reference mark is detected to determine whether the alignment accuracy of the layer of the film is acceptable.
  • the alignment detecting device obtained by the embodiment of the present invention obtains an image (for example, a photograph or a camera screenshot) of the alignment area of each layer of the film, that is, the reference mark on the first layer of the metal film and the position of the frame of the film.
  • the image can visually determine the relative positional relationship between the frame of the film and the reference mark to determine whether the alignment accuracy of the film is qualified, without measuring the critical size of the display device, thereby improving the detection efficiency and realizing
  • the alignment detection of all the display devices improves the monitoring strength, thereby improving the product quality.
  • the alignment detecting apparatus may include a carrier 4 for carrying a display device, a control device 1, a detecting device 2, and an analyzing device 3.
  • the control device 1 is configured to send a control command to the detecting device 2 according to the reference point coordinate information of the alignment region of the display device stored in advance when the carrier 4 is in the idle time between processes.
  • the alignment area of the display device refers to the frame C and the reference mark B including the film at the same time.
  • a region of at least a portion of (for example, a frame of the first metal film), that is, a region capable of displaying at least a portion of the frame C of the film and the reference mark B in the same field of view, for example, the region A in FIG.
  • the reference point coordinate information of the alignment area means that a certain point is selected as a reference point in a region including the frame of the film and at least a part of the reference mark (ie, the alignment area), and the coordinate of the reference point on the carrier 4
  • the information is the reference point coordinate information of the alignment area.
  • the center point of the pattern of the reference mark B may be employed as a reference point
  • coordinate information of the reference point on the carrier 4 i.e., reference point coordinate information of the alignment area
  • the control device 1 performs calculation based on the reference point coordinate information to obtain a movement program of the detecting device 2, and transmits a control command to the detecting device 2 to control the movement of the detecting device 2.
  • the control device 1 may be a microprocessor such as a computer, PLC or the like.
  • the detecting device 2 is adapted to move to the alignment area of the display device on the carrier 4 according to the control command of the control device 1, and collect an image of the area, and then transmit the acquired image to the analyzing device 3.
  • the image here refers to a photo or a camera screenshot capable of displaying the position of the reference mark and the border of the film, so as to determine the relative position between the reference mark and the frame of the film according to the photo or the screenshot, and judge each Whether the alignment accuracy of the layer film is acceptable.
  • the area A is the alignment area of the display device, in which the two adjacent sides of the frame C are respectively parallel to the corresponding two adjacent sides of the reference mark B, and There is a certain spacing between them, namely the spacing H1 and the spacing H2.
  • the analyzing device 3 can be used to display an image captured by the detecting device 2 for the human eye to judge the alignment of the layers of the display device.
  • the analysis device 3 can be a device having a display function such as a computer, a display screen or the like.
  • the detection of the alignment of the layers of the film of the single display device is more efficient and time consuming, Therefore, the detection of all the display devices can be realized, the monitoring strength is improved, the adverse conditions related to the alignment accuracy are effectively controlled, and the product quality can be improved.
  • the above-described analyzing device 3 allows the human eye to judge the alignment of the display device by displaying an image, but the present invention is not limited thereto.
  • the analysis device 3 can also be a microprocessor such as a computer, PLC or the like that automatically receives the image and the alignment standard stored in the display device when receiving the image transmitted by the detection device 2. The images are compared, and the alignment of the display device is judged based on the comparison result.
  • the alignment standard image of the display device refers to an image in which the alignment accuracy of each layer of the film is acceptable, and the image can be stored in the analysis device 3 in advance.
  • the analyzing device 3 is for comparing the image acquired by the detecting device 2 with the alignment standard image stored in the display device, and judging the alignment of the display device based on the comparison result. For example, the analyzing device 3 performs coincidence matching by finding the center point of the image captured by the detecting device 2 and the alignment standard image, and judges the alignment of the display device based on the matching result.
  • the alignment detecting device of the embodiment of the present invention may further include an alarm device for issuing an alarm prompt when the analyzing device 3 determines that the alignment of the display device is unqualified.
  • the operator can rework the corresponding display device in time according to the prompt of the alarm device, so that the display device without the alarm prompt continues the subsequent process.
  • the detecting device 2 includes a camera 21, a robot arm 22, and a driving mechanism.
  • a camera 21 is mounted on the robot arm 22 for capturing images.
  • the camera 21 may include an autofocus device for automatically focusing in accordance with ambient light and the distance between the camera 21 and the display device.
  • the drive mechanism is used to drive the movement of the robot arm 22 to move the camera 21 above the carrier 4 opposite the alignment area of the display device.
  • the carrier 4 can typically carry a plurality of display devices.
  • FIG. 3 is a schematic structural diagram of a display detecting device of a display device according to an embodiment of the present invention.
  • the carrier 4 includes a plurality of multi-layer trays spaced apart in a vertical direction, each of which is used to carry a plurality of display devices.
  • the drive mechanism can include a vertical drive assembly 23 and a horizontal drive assembly 24.
  • the vertical drive assembly 23 is used to drive the horizontal drive assembly 24 and the robot arm 22 to move synchronously in the vertical direction.
  • the vertical drive assembly 23 can drive the horizontal drive assembly 24 and the robot arm 22 to move to a height corresponding to the gap 41 between any two adjacent trays.
  • the horizontal drive assembly 24 is used to drive the robot arm 22 to move in a horizontal direction. Specifically, when the horizontal drive assembly 24 and the robot arm 22 are at a height corresponding to the gap 41 between any two adjacent trays, the horizontal drive assembly 24 drives the robot arm 22 to move horizontally into the gap 41 and the display device.
  • the alignment area is opposite.
  • the horizontal drive assembly 24 drives the robot arm 22 to move in a screw-in or screw-out manner, i.e., the robot arm 22 moves horizontally in and out of the gap 41 in a rotational motion and horizontally within the gap 41.
  • the horizontal drive assembly 24 drives the robot arm 22 to move in an extended or retracted manner, i.e., the robot arm 22 moves horizontally in and out of the gap 41 in a linear translation and horizontally within the gap 41.
  • the vertical drive assembly 23 may specifically include a first motor and a lead screw for driving the screw rotation.
  • the lead screw is vertically disposed, and a sliding member for linearly moving along the lead screw when the lead screw is rotated is disposed on the lead screw.
  • the horizontal drive assembly 24 is coupled to the sliding member. Under the driving of the first motor, the lead screw and the sliding member cooperate to drive the horizontal drive assembly 24 to move linearly in the vertical direction.
  • the horizontal drive assembly 24 can specifically include a second motor and a transmission component.
  • the second motor may be a rotary electric machine that drives the robot arm 22 to rotate in a horizontal plane by the transmission member.
  • the second motor may be a linear motor that drives the robot arm 22 to horizontally extend or retract through the transmission member.
  • the detecting device 2 comprises two cameras 21, and two cameras 21 are mounted on the robot arm 22 at intervals, and the spacing between adjacent two cameras 21 is adjacent to the tray.
  • the interval between the two display devices corresponds to each other, so that the two cameras 21 can simultaneously acquire images of the alignment areas of the corresponding two display devices, thereby further improving the detection efficiency.
  • the drive mechanism may further include a rotation mechanism 25 mounted on the horizontal drive assembly 24 for The drive robot 22 rotates in a horizontal plane. By means of the rotation mechanism 25, after the two cameras 21 complete the image acquisition of the alignment areas of the current two display devices, the two cameras 21 can be rotated to the current position by driving the robot arm 22 to rotate in the horizontal plane.
  • Image acquisition is performed in the alignment area of two display devices adjacent to the two display devices. That is to say, by means of the rotating mechanism 25, the image capturing of the corresponding alignment regions of the four or more display devices can be performed while the horizontal driving assembly 24 remains stationary, thereby simplifying the movement process of the driving mechanism and further Improve detection efficiency.
  • the idle time between processes is after the completion of the exposure process, and before the etching process, during the transportation of the carrier or during the waiting process. Since the exposure process has a reversible feature, that is, the display device that completes the exposure process can be restored to the state before the exposure process is performed, and therefore, the pair of display devices can be performed after the completion of the exposure process and before the etching process is performed.
  • the bit condition is detected to restore the failed display device to the state before the exposure process, and then the corresponding film layer is realigned with the reference mark, and finally the alignment accuracy of each layer of the display device is qualified.
  • the alignment of the display device is detected during the transportation or waiting period of the carrier, so that the alignment condition detection can be realized without increasing the manufacturing time of the display panel.
  • an embodiment of the present invention further provides an exposure process system including an exposure unit 100 , a drying unit 200 , and a registration detecting device 300 .
  • the exposure unit 100 is used to perform an exposure process on the display device.
  • the drying unit 200 is for drying the display device that has completed exposure.
  • the alignment detecting device 300 adopts the above-mentioned alignment detecting device provided by the embodiment of the present invention for detecting the alignment of the display device that completes drying.
  • the exposure process is reversible, that is, the display device that completes the exposure process can be restored to the state before the exposure process is performed, and therefore, the alignment detecting device can be utilized after the exposure process is completed and before the etching process is performed. 300 pairs of display device detection conditions to restore the failed display device to the state before the exposure process, and then re-align the corresponding film layer with the reference mark, and finally make the display device layer The bit accuracy is qualified and the subsequent process is performed.
  • the transmission direction of the display device is as indicated by the arrow in FIG.
  • the exposure process system provided by the embodiment of the present invention can improve the detection efficiency by using the alignment detecting device of the display device provided by the above embodiments of the present invention, thereby enabling detection of all display devices, improving monitoring strength, and thereby improving product quality.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
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  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
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  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
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Abstract

一种显示器件的对位检测设备及曝光工艺系统。该对位检测设备包括用于承载显示器件的承载架（4）、控制装置（1）、检测装置（2）和分析装置（3）。控制装置（1）用于在承载架（4）处于工艺间的空闲时间时，根据预先存储的显示器件的对位区域的参考点坐标信息，向检测装置（2）发送控制指令。检测装置（2）用于根据控制装置（1）发送的控制指令移动至承载架（4）上显示器件的对位区域，并采集该位置的图像，然后将图像发送至分析装置（3），分析装置（3）用于利用检测装置（2）发送的图像判断显示器件的对位情况。所提供的显示器件的对位检测设备无需测量显示器件的关键尺寸就可以判断显示器件的对位情况，因而可以提高检测效率，从而可以实现对全部的显示器件进行检测，进而提高产品质量。

Description

显示器件的对位检测设备及曝光工艺系统 技术领域
本发明涉及显示器件加工技术领域，具体地，涉及显示器件的对位检测设备及曝光工艺系统。
背景技术
在显示器件的制作过程中，通常需要将多层膜材依次贴合在玻璃基板上，同时需要对各层膜材相对于第一层金属膜材(沉积在玻璃基板上的第一层膜层)进行对位，各层膜材的对位(Overlay)精度体现了各层膜材之间对位匹配的好坏。
检测各层膜材的对位精度的具体方法为：在第一层金属膜材制备完成后，在第一层金属膜材上贴附用于各层膜材对位的基准标记(例如，方框形)，然后通过检测之后形成的每一层膜材的边框和该基准标记对位的情况，来判断该层膜材的对位精度是否合格。
在进行上述对位精度检测的过程中，需要测量各层膜材和第一层金属膜材的关键尺寸来反馈各层膜材与第一层金属膜材上的基准标记的相对位置关系。由于测量该关键尺寸的耗时较长，因此在实际制作过程中无法对全部的显示器件的对位情况进行检测，通常只能采用抽测的方式进行检测，从而无法保证所有的显示器件的对位精度100％合格，进而对产品质量带来影响。
发明内容
本发明旨在至少解决现有技术中存在的技术问题之一，提出了一种显示器件的对位检测设备及包括该对位检测设备的曝光工艺系统，其无需测量显示器件的关键尺寸就可以判断显示器件的对位情况，可以提高检测效率，从而可以实现对全部的显示器件进行检测，进而可以提高产品质量。
为实现本发明的目的而提供一种显示器件的对位检测设备，包括用于承载所述显示器件的承载架、控制装置、检测装置和分析装置，其中，所述控制装置用于在所述承载架处于工艺间的空闲时间时，根据预先存储的所述显示器件的对位区域的参考点坐标信息，向所述检测装置发送控制指令；所述检测装置用于根据所述控制装置发送的控制指令移动至所述承载架上所述显示器件的对位区域，并采集该区域的图像，然后将所述图像发送至所述分析装置；所述分析装置用于利用所述检测装置发送的图像分析处理所述显示器件的对位情况。
优选的，所述分析装置用于显示所述图像，以供人肉眼判断所述显示器件的对位情况。
优选的，所述分析装置用于将所述图像与存储在所述显示器件中的对位标准图像进行比较，并根据比较结果判断所述显示器件的对位情况。
优选的，所述分析装置用于将所述图像与存储在所述显示器件中的对位标准图像进行比较，并根据比较结果判断所述显示器件的对位情况；所述对位检测设备还包括报警装置，用于在所述分析装置判断所述显示器件的对位情况不合格时，发出报警提示。
优选的，所述检测装置包括照相机、机械臂和驱动机构，其中，所述照相机安装在所述机械臂上，用于采集所述图像；所述驱动机构用于驱动所述机械臂运动，以使所述照相机移动至所述承载架上方与所述显示器件的对位区域相对。
优选的，所述照相机包括自动对焦装置，用于根据环境光线及所述照相机与所述显示器件之间的距离自动对焦。
优选的，所述承载架包括沿竖直方向间隔设置的多层托盘，每层托盘用于承载多个所述显示器件；所述驱动机构包括竖直驱动组件和水平驱动组件，其中，所述竖直驱动组件用于驱动所述水平驱动组件及所述机械臂在竖直方向同步移动；所述水平驱动组件用于驱动所述机械臂在水平方向运动。
优选的，在所述竖直驱动组件驱动所述水平驱动组件及所述机械臂移动至与任意相邻两层托盘之间的间隙相对应的高度时，所述水 平驱动组件驱动所述机械臂水平运动至该间隙中与所述显示器件的对位区域相对。
优选的，所述水平驱动组件驱动所述机械臂采用旋入或旋出的方式运动；或者，所述水平驱动组件驱动所述机械臂采用伸出或回缩的方式运动。
优选的，所述驱动机构还包括旋转机构，所述旋转机构安装在所述水平驱动组件上，用以驱动所述机械臂在水平面内旋转。
优选的，所述检测装置包括两个照相机，所述两个照相机间隔安装在所述机械臂上，并且所述两个照相机之间的间隔与托盘上相邻两个显示器件之间的间隔对应。
优选的，所述工艺间的空闲时间为在完成曝光工艺之后，且在进行刻蚀工艺之前，所述承载架的运输途中或者等待工艺期间。
作为另一个技术方案，本发明还提供一种曝光工艺系统，包括曝光单元、烘干单元和本发明提供的上述显示器件的对位检测设备，其中，所述曝光单元用于对显示器件进行曝光工艺；所述烘干单元用于对完成曝光的所述显示器件进行烘干；并且所述对位检测设备用于对完成烘干的所述显示器件的对位情况进行检测。
本发明具有以下有益效果：
本发明提供的显示器件的对位检测设备利用控制装置在承载架处于工艺间的空闲时间时，根据显示器件的对位区域的参考点坐标信息向检测装置发送控制指令；利用检测装置根据控制装置发送的控制指令移动至承载架上显示器件的对位区域，并采集该区域的图像，然后将图像发送至分析装置；通过分析装置判断显示器件的对位情况，这样，无需测量显示器件的关键尺寸，因而可以提高检测效率，实现对全部的显示器件进行检测，提高监控力度，从而可以提高产品质量。
本发明提供的曝光工艺系统通过采用本发明提供的显示器件的对位检测设备，可以提高检测效率，从而可以实现对全部的显示器件进行检测，提高监控力度，进而可以提高产品质量。
附图说明
图1为本发明实施例提供的显示器件的对位检测设备的结构示意图；
图2为本发明实施例中显示器件的对位区域的示意图；
图3为本发明实施例提供的显示器件的对位检测设备在工作时的结构示意图；以及
图4为本发明实施例提供的曝光工艺系统的原理框图。
具体实施方式
为使本领域的技术人员更好地理解本发明的技术方案，下面结合附图来对本发明提供的显示器件的对位检测设备及曝光工艺系统进行详细描述。
图1为本发明实施例提供的显示器件的对位检测设备的结构示意图。请参阅图1，该显示器件的对位检测设备用于在显示器件的制造过程中对各层膜材的对位精度进行检测。通常，在玻璃基板上完成第一层金属膜材的制备之后，在第一层金属膜材上设置基准标记(例如，方框形)。然后，检测之后形成的每一层膜材的边框与该基准标记的相对位置，以判断该层膜材的对位精度是否合格。本发明实施例提供的对位检测设备通过获得各层膜材的对位区域的图像(例如照片或者摄像截图)，即，第一层金属膜材上的基准标记与膜材的边框所在位置处的图像，可以直观地判断出膜材的边框与该基准标记的相对位置关系，以判断该层膜材的对位精度是否合格，而无需测量显示器件的关键尺寸，从而可以提高检测效率，实现对全部的显示器件的对位检测，提高监控力度，进而可以提高产品质量。
具体地，根据本发明实施例的对位检测设备可包括用于承载显示器件的承载架4、控制装置1、检测装置2和分析装置3。
控制装置1用于在承载架4处于工艺间的空闲时间时，根据预先存储的显示器件的对位区域的参考点坐标信息向检测装置2发送控制指令。
图2为本发明实施例中显示器件的对位区域的示意图。如图2所示，显示器件的对位区域是指同时包括膜材的边框C与基准标记B (例如，第一层金属膜材的边框)的至少一部分的区域，即，能够在同一视野中显示膜材的边框C与基准标记B的至少一部分的区域，例如，图2中的区域A。对位区域的参考点坐标信息是指在包括膜材的边框与基准标记的至少一部分的区域(即，对位区域)内选取某一点用作参考点，该参考点在承载架4上的坐标信息即为对位区域的参考点坐标信息。例如，可以采用基准标记B的图案的中心点作为参考点，该参考点在承载架4上的坐标信息(即，对位区域的参考点坐标信息)被预先存储在控制装置1中。控制装置1根据该参考点坐标信息进行计算，以获得检测装置2的移动程序，并向检测装置2发送控制指令，以控制检测装置2的移动。控制装置1可以是诸如计算机、PLC等的微处理器。
检测装置2用于根据控制装置1的控制指令移动至承载架4上的显示器件的对位区域，并采集该区域的图像，然后将采集的图像发送至分析装置3。这里的图像，是指能够显示基准标记与膜材的边框所在位置的照片或者摄像截图，以便根据照片或者摄像截图判断出基准标记与膜材的边框之间的相对位置情况，并以此判断各层膜材的对位精度是否合格。例如，如图2所示，区域A即为显示器件的对位区域，在该区域A中，边框C的两相邻侧边分别和基准标记B的对应的两相邻侧边相互平行，且其间存在一定的间距，即间距H1和间距H2。这两个间距越小，则膜材与第一层金属膜材的重合度越高；反之，这两个间距越大，则膜材与第一层金属膜材的重合度越低。基于此，可以通过分别判断间距H1和间距H2是否在预设阈值内，来判断膜材的对位精度是否合格。
在本发明的实施例中，分析装置3可以用于显示检测装置2所采集的图像，以供人肉眼判断显示器件的各层膜材的对位情况。该分析装置3可以为诸如计算机、显示屏等具有显示功能的设备。操作人员通过观察图像所显示的各层膜材的对位情况，可以直观地判断出该显示器件的各层膜材的对位精度是否合格，然后及时地将不合格的显示器件及时返工处理，使合格的显示器件继续进行后续工艺。由于上述检测单个显示器件的各层膜材的对位情况的效率较高，耗时较短， 因而可以实现对全部的显示器件的检测，提高了监控力度，有效地控制了与对位精度相关的不良情况发生，进而可以提高产品质量。
上述分析装置3通过显示图像来供人肉眼判断显示器件的对位情况，但是本发明并不局限于此。在实际应用中，分析装置3还可以为诸如计算机、PLC等的微处理器，其在接收到由检测装置2发送而来的图像时，自动将该图像与存储在显示器件中的对位标准图像进行比较，并根据比较结果判断显示器件的对位情况。所谓显示器件的对位标准图像，是指各层膜材的对位精度均合格的图像，该图像可被预先存储在分析装置3中。分析装置3用于将检测装置2所采集的图像与存储在显示器件中的对位标准图像进行比较，并根据比较结果判断显示器件的对位情况。例如，分析装置3通过寻找检测装置2所采集的图像与对位标准图像的中心点，来进行重合度匹配，并根据匹配结果判断显示器件的对位情况。
此外，本发明实施例的对位检测设备还可包括报警装置，用于在分析装置3判断显示器件的对位情况不合格时，发出报警提示。操作人员可以根据报警装置的提示及时地将相应的显示器件进行返工处理，而使未有报警提示的显示器件继续进行后续工艺。
下面对根据本发明实施例的检测装置2的具体结构进行详细描述。
具体地，如图1所示，检测装置2包括照相机21、机械臂22和驱动机构。
照相机21安装在机械臂22上，用于采集图像。例如，为了使采集的图像更清晰，照相机21可包括自动对焦装置，其用于根据环境光线及照相机21与显示器件之间的距离自动对焦。
驱动机构用于驱动机械臂22运动，以使照相机21移动至承载架4上方与显示器件的对位区域相对。
在本发明实施例中，承载架4通常可以承载有多个显示器件。图3为本发明实施例提供的显示器件的对位检测设备在工作时的结构示意图。请参阅图3，承载架4包括沿竖直方向间隔设置的多层托盘，每层托盘用于承载多个显示器件。
参照图3，驱动机构可包括竖直驱动组件23和水平驱动组件24。
竖直驱动组件23用于驱动水平驱动组件24及机械臂22在竖直方向同步运动。具体地，竖直驱动组件23可驱动水平驱动组件24及机械臂22移动至与任意相邻两层托盘之间的间隙41相对应的高度。
水平驱动组件24用于驱动机械臂22在水平方向运动。具体地，在水平驱动组件24及机械臂22位于与任意相邻两层托盘之间的间隙41相对应的高度时，水平驱动组件24驱动机械臂22水平运动至该间隙41中与显示器件的对位区域相对。例如，水平驱动组件24驱动机械臂22采用旋入或旋出的方式运动，即，机械臂22采用旋转运动的方式水平进出间隙41以及在间隙41内水平移动。可替代地，水平驱动组件24驱动机械臂22采用伸出或回缩的方式运动，即，机械臂22采用直线平移的方式水平进出间隙41以及在间隙41内水平移动。
根据本发明的一个或多个实施例，竖直驱动组件23具体可以包括第一电机和丝杠，第一电机用于驱动丝杠旋转。丝杠竖直设置，且在该丝杠上设置有滑动部件，该滑动部件用于在丝杠旋转时沿丝杠作直线运动。水平驱动组件24与上述滑动部件连接，在第一电机的驱动下，丝杠和滑动部件相互配合，以带动水平驱动组件24在竖直方向上作直线运动。水平驱动组件24具体可以包括第二电机和传动部件。在水平驱动组件24驱动机械臂22采用旋入或旋出的方式运动的情况下，第二电机可以为旋转电机，该旋转电机通过传动部件驱动机械臂22在水平面内旋转。在水平驱动组件24驱动机械臂22采用伸出或回缩的方式运动的情况下，第二电机可以为直线电机，该直线电机通过传动部件驱动机械臂22水平伸出或回缩。
在本发明的一个或多个实施例中，检测装置2包括两个照相机21，且两个照相机21间隔安装在机械臂22上，并且相邻两个照相机21之间的间隔与托盘上相邻两个显示器件之间的间隔对应，这样可以实现两个照相机21同时采集相应的两个显示器件的对位区域的图像，从而可以进一步提高检测效率。在这种情况下，驱动机构还可以包括旋转机构25，该旋转机构25安装在水平驱动组件24上，用以 驱动机械臂22在水平面内旋转。借助于旋转机构25，可以在两个照相机21完成对当前的两个显示器件的对位区域的图像采集之后，通过驱动机械臂22在水平面内旋转，而使两个照相机21旋转至与当前的两个显示器件相邻的两个显示器件的对位区域内，进行图像采集。也就是说，借助于旋转机构25，可以在水平驱动组件24保持不动的前提下，对相应的四个及以上显示器件的对位区域进行图像采集，从而可以简化驱动机构的运动流程，进一步提高检测效率。
在本发明实施例中，工艺间的空闲时间为在完成曝光工艺之后，且在进行刻蚀工艺之前，承载架的运输途中或者等待工艺期间。由于曝光工艺具有可撤销的特点，即，可使完成曝光工艺的显示器件恢复至进行曝光工艺之前的状态，因此，可以在完成曝光工艺之后，且在进行刻蚀工艺之前，对显示器件的对位情况进行检测，以将不合格的显示器件恢复至进行曝光工艺之前的状态，然后重新将相应的膜层与基准标记进行对位，最终使显示器件的各层膜材的对位精度合格。利用曝光工艺可撤销的特点，选择承载架的运输或等待期间对显示器件的对位情况进行检测，因此可以在不增加显示面板制造时间的情况下实现对位情况检测。
图4为本发明实施例提供的曝光工艺系统的原理框图。请参阅图4，本发明实施例还提供一种曝光工艺系统，其包括曝光单元100、烘干单元200和对位检测设备300。曝光单元100用于对显示器件进行曝光工艺。烘干单元200用于对完成曝光的显示器件进行烘干。对位检测设备300采用了本发明实施例提供的上述对位检测设备，用于对完成烘干的显示器件的对位情况进行检测。
由于曝光工艺具有可撤销的特点，即，可使完成曝光工艺的显示器件恢复至进行曝光工艺之前的状态，因此，可以在完成曝光工艺之后，且在进行刻蚀工艺之前，利用对位检测设备300对显示器件的对位情况进行检测，以将不合格的显示器件恢复至进行曝光工艺之前的状态，然后重新将相应的膜层与基准标记进行对位，最终使显示器件各膜层的对位精度合格，并进行后续工艺。显示器件的传输方向如图4中的箭头所示。
本发明实施例提供的曝光工艺系统，通过采用本发明上述实施例提供的显示器件的对位检测设备，可以提高检测效率，从而可以实现对全部的显示器件进行检测，提高监控力度，进而可以提高产品质量。
可以理解的是，以上实施方式仅仅是为了说明本发明的原理而采用的示例性实施方式，然而本发明并不局限于此。对于本领域内的普通技术人员而言，在不脱离本发明的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本发明的保护范围。

Claims (13)

  1. 一种显示器件的对位检测设备，包括用于承载所述显示器件的承载架、控制装置、检测装置和分析装置，其中，
    所述控制装置用于在所述承载架处于工艺间的空闲时间时，根据预先存储的所述显示器件的对位区域的参考点坐标信息，向所述检测装置发送控制指令；
    所述检测装置用于根据所述控制装置发送的控制指令移动至所述承载架上所述显示器件的对位区域，并采集该区域的图像，然后将所述图像发送至所述分析装置；并且
    所述分析装置用于利用所述检测装置发送的图像分析处理所述显示器件的对位情况。
  2. 根据权利要求1所述的显示器件的对位检测设备，其中，所述分析装置用于显示所述图像，以供人肉眼判断所述显示器件的对位情况。
  3. 根据权利要求1所述的显示器件的对位检测设备，其中，所述分析装置用于将所述图像与存储在所述显示器件中的对位标准图像进行比较，并根据比较结果判断所述显示器件的对位情况。
  4. 根据权利要求3所述的显示器件的对位检测设备，其中，所述分析装置用于将所述图像与存储在所述显示器件中的对位标准图像进行比较，并根据比较结果判断所述显示器件的对位情况；
    所述对位检测设备还包括报警装置，用于在所述分析装置判断所述显示器件的对位情况不合格时，发出报警提示。
  5. 根据权利要求1所述的显示器件的对位检测设备，其中，所述检测装置包括照相机、机械臂和驱动机构，
    所述照相机安装在所述机械臂上，用于采集所述图像；并且
    所述驱动机构用于驱动所述机械臂运动，以使所述照相机移动至所述承载架上方与所述显示器件的对位区域相对。
  6. 根据权利要求5所述的显示器件的对位检测设备，其中，所述照相机包括自动对焦装置，用于根据环境光线及所述照相机与所述显示器件之间的距离自动对焦。
  7. 根据权利要求5所述的显示器件的对位检测设备，其中，所述承载架包括沿竖直方向间隔设置的多层托盘，每层托盘用于承载多个所述显示器件；
    所述驱动机构包括竖直驱动组件和水平驱动组件，其中，
    所述竖直驱动组件用于驱动所述水平驱动组件及所述机械臂在竖直方向同步移动；并且
    所述水平驱动组件用于驱动所述机械臂在水平方向运动。
  8. 根据权利要求7所述的显示器件的对位检测设备，其中，在所述竖直驱动组件驱动所述水平驱动组件及所述机械臂移动至与任意相邻两层托盘之间的间隙相对应的高度时，所述水平驱动组件驱动所述机械臂水平运动至该间隙中与所述显示器件的对位区域相对。
  9. 根据权利要求8所述的显示器件的对位检测设备，其中，所述水平驱动组件驱动所述机械臂采用旋入或旋出的方式运动；或者，
    所述水平驱动组件驱动所述机械臂采用伸出或回缩的方式运动。
  10. 根据权利要求7所述的显示器件的对位检测设备，其中，所述驱动机构还包括旋转机构，所述旋转机构安装在所述水平驱动组件上，用以驱动所述机械臂在水平面内旋转。
  11. 根据权利要求10所述的显示器件的对位检测设备，其中， 所述检测装置包括两个照相机，所述两个照相机间隔安装在所述机械臂上，并且所述两个照相机之间的间隔与托盘上相邻两个显示器件之间的间隔对应。
  12. 根据权利要求1所述的显示器件的对位检测设备，其中，所述工艺间的空闲时间为在完成曝光工艺之后，且在进行刻蚀工艺之前，所述承载架的运输途中或者等待工艺期间。
  13. 一种曝光工艺系统，包括曝光单元、烘干单元和权利要求1-12中任意一项所述的对位检测设备，其中，
    所述曝光单元用于对所述显示器件进行曝光工艺；
    所述烘干单元用于对完成曝光的所述显示器件进行烘干；并且
    所述对位检测设备用于对完成烘干的所述显示器件的对位情况进行检测。
PCT/CN2016/085253 2016-03-23 2016-06-08 显示器件的对位检测设备及曝光工艺系统 WO2017161701A1 (zh)

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