WO2018227923A1 - 一种光学检测装置及光学检测方法 - Google Patents

一种光学检测装置及光学检测方法 Download PDF

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WO2018227923A1
WO2018227923A1 PCT/CN2017/118253 CN2017118253W WO2018227923A1 WO 2018227923 A1 WO2018227923 A1 WO 2018227923A1 CN 2017118253 W CN2017118253 W CN 2017118253W WO 2018227923 A1 WO2018227923 A1 WO 2018227923A1
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Prior art keywords
display panel
panel
optical detecting
stage
detecting device
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PCT/CN2017/118253
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English (en)
French (fr)
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颜圣佑
朱志飞
郭连俊
许玉佩
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苏州精濑光电有限公司
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Publication of WO2018227923A1 publication Critical patent/WO2018227923A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • the present invention relates to the field of optical detection technology, and in particular to an optical detection device and an optical detection method.
  • AOI Automatic Optic Inspection
  • the AOI device can be used to detect the panel.
  • the display panel is first placed on the inspection machine stage for alignment.
  • the image capturing unit collects the image information along the X-axis or the Y-axis of the display panel, and the computer is original.
  • the image is image processed, and then the image is segmented by the processed image to separate the target.
  • the target is then compared to the Defect Spec (including Size, Length, Contrast, SEMU). Targets that meet the defect parameter requirements are detected by the AOI device and are considered defects.
  • the display panel of the prior art is generally a square structure, and the alignment of the display panel on the inspection machine platform is usually such that the two central axes in the longitudinal direction and the width direction of the display panel are arranged along the X axis or the Y axis, that is, the display
  • the two central axes of the panel are parallel or perpendicular to the direction of motion of the image capture unit.
  • the image information thus collected usually has some problems. Since the process abnormalities on the display panel are usually parallel or perpendicular to the central axis of the display panel, they are arranged in a row or a column, and the image capturing unit is During operation, the optical noise due to mechanical motion and the image capture unit itself is displayed on the final image information.
  • the direction of the axis of the display panel is consistent with the moving direction of the image capturing unit.
  • the process abnormality may coincide with the optical noise generated by the image capturing unit on the resulting image information, and the process abnormality and the optical noise are abnormally overlapped, and the worker cannot Distinguishing whether this part of the abnormality is an abnormality of the process or an abnormality caused by optical noise cannot provide a guiding effect on the subsequent remedial work.
  • the object of the present invention is to solve the problems that the prior art optical detection techniques mentioned in the above background may not distinguish between process anomalies and optical noise anomalies caused by false positives or missed detections, and provide an optical detecting device and an optical detecting method.
  • an optical detecting device comprising a panel loading platform (1) for carrying a display panel and an image capturing unit for collecting image information of the display panel; the image capturing unit is disposed on the panel loading platform (1) Upper, traveling in the first direction to scan the display panel, characterized in that: the panel stage (1) is provided with a rotation control unit that can drive the rotation of the panel stage (1); the rotation control The unit rotates the central axis of the display panel carried on the panel stage (1) to form a predetermined angle with the first direction.
  • the rotation control unit includes a rotation device that drives the panel stage to rotate the display panel to rotate a predetermined angle around a normal line of the vertical display panel.
  • said rotating device includes an electric motor mounted on a panel stage.
  • predetermined angle is 5 to 10 degrees.
  • An optical detecting method for detecting a display panel comprising the following steps:
  • the method of placing the display panel on the panel stage of the detecting device is: placing the display panel on the panel stage such that the central axis of the display panel is parallel to the first direction Or vertical.
  • the panel stage of the optical detecting device is provided with a rotation control unit for driving the panel stage to drive the display panel to rotate.
  • the optical detecting method further includes the step 4) analyzing the processed image information, and if there is an abnormality in the image information parallel or perpendicular to the central axis of the display panel, the panel production abnormality (5) is caused; The presence of an anomaly parallel to the first direction in the information is caused by an optical noise anomaly (6) of the optical detecting device.
  • the preset angle is 5 to 10 degrees.
  • the advantages of the invention are as follows: 1.
  • the detected information can quickly distinguish between process anomalies and optical noise anomalies, and can clarify the cause of the anomalies, and has good guiding significance for subsequent remedial measures;
  • the optical detection method of the invention is simple and accurate, and can quickly distinguish the abnormality of the process and the abnormality caused by the optical noise, and provides effective guidance for the subsequent work, and has great promotion value.
  • Figure 1 Schematic diagram of the structure of the inspection machine carrier when aligning
  • Figure 2 Schematic diagram of the detector stage after deflection
  • FIG. 1 Schematic diagram of image information processing
  • 1 panel carrier
  • 2 motor
  • 3 transverse central axis
  • 4 longitudinal center axis
  • 5 production abnormality
  • 6 optical noise anomaly
  • O transverse central axis intersects with longitudinal central axis.
  • FIG. 1 to FIG. 3 are schematic diagrams showing the structure of the detecting machine stage when the position is aligned.
  • the optical detecting device of the embodiment includes a panel loading platform 1 for carrying a display panel and an image capturing unit for collecting image information of the display panel; the image capturing unit is suspended above the panel loading platform and can travel along the first direction to the display panel Scanning, in particular, the first direction is parallel to the lateral central axis or the longitudinal central axis of the display panel, ie the image capturing unit is usually scanned in the direction of the transverse central axis or the longitudinal central axis of the parallel display panel, as indicated by the arrows in the figure
  • the panel stage 1 is provided with a rotation control unit that can drive the rotation of the panel stage, and the rotation control unit rotates the central axis of the display panel carried on the panel stage (1) to form a predetermined angle with the first direction.
  • the display panel rotates the preset angle ⁇ and then performs optical scanning in the first direction. If the optical noise is generated during the image capturing unit scanning, the direction of the optical noise abnormality 6 and the display panel are obtained in the image information obtained by the image capturing unit.
  • the central axis has an angle ⁇ ; if there is a manufacturing process defect in the display panel, the direction of the production abnormality 5 in the image information is parallel to the central axis of the display panel, so that the optical noise anomaly 6 and the production abnormality 5 can be quickly distinguished, which is followed.
  • the repair or production process provides a guiding basis.
  • the display panel is placed on the panel stage 1 of the optical detecting device, coincides with the central axis of the panel stage 1, including a central axis along the longitudinal direction thereof and a central axis along the lateral direction thereof, in the left-right direction of FIG.
  • the up and down direction is the longitudinal direction.
  • the central axis of the display panel along its length is the longitudinal central axis 4
  • the central axis along its width is the transverse central axis 3.
  • the invention rotates the position of the display panel on the panel stage 1 at a small angle, so that the scanning direction of the image capturing unit and the central axis of the display panel exhibit a small angle, and finally the optical noise abnormality in the image is detected 6 and Production anomalies 5 are distributed in different directions, achieving a rapid distinction between the two anomalies.
  • the rotation control unit includes a rotating device that drives the panel stage 1 to rotate and rotates the display panel about a normal angle of the vertical display panel; in a specific embodiment, the normal line vertically passes through the display panel.
  • the intersection O of the longitudinal central axis 4 and the lateral central axis 3, that is, the center of the display panel, enables the rotation of the panel stage 1 and the display panel with minimal space.
  • the rotating device includes an electric motor 2 mounted on the panel stage to effect free rotation of the panel stage 1 and the display panel.
  • the preset angle is 5-10°, but not limited thereto.
  • the preset angle can be set according to production requirements; the deflection angle is separately defined by the user. It is conducive to the subsequent analysis of results.
  • the present invention also provides an optical detecting method, comprising the following steps: 1. First, placing a display panel on the panel stage 1 of the optical detecting device;
  • the purpose of the alignment is to make the horizontal central axis 3 and the longitudinal central axis 4 of the display panel parallel or perpendicular to the moving direction of the set image capturing unit;
  • the driving motor 2 rotates the panel carrier 1 to rotate the display panel, so that the display panel rotates around the normal line passing through the midpoint thereof, and the rotation angle is 5-10°, which is defined by the user;
  • the image capturing unit moves in the lateral direction or the longitudinal direction, scans the display panel, obtains image information of the display panel, and then sends the information to the control system for data processing.
  • the optical detecting method further includes the step 4: analyzing the image information processed by the calculation, and if there is an abnormality in the image information parallel or perpendicular to the central axis of the display panel, the panel production abnormality 5 is caused; The presence of an abnormality in the image information parallel to the scanning direction of the image pickup unit is caused by the optical noise abnormality 6 of the optical detecting device, as shown in FIG.

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Abstract

一种光学检测装置及光学检测方法，包括用于承载显示面板的面板载台(1)和采集显示面板图像信息的图像摄取单元；所述的图像摄取单元设置于面板载台(1)上方，可沿第一方向行进以对显示面板进行扫描，所述的面板载台(1)上设置有可驱动面板载台(1)旋转的旋转控制单元；所述旋转控制单元使承载于面板载台(1)上的显示面板中轴线转动至与所述第一方向形成一预设角度。本方法简单、准确，能够快速区分制程异常和光学噪声造成的异常。

Description

一种光学检测装置及光学检测方法 技术领域
本发明涉及光学检测技术领域，具体地指一种光学检测装置及光学检测方法。
背景技术
AOI(Automatic Optic Inspection，自动光学检测)是基于光学原理来对制造业生产中遇到的常见缺陷进行检测的技术。在液晶面板制造业中，可利用AOI设备对Panel(面板)进行检测。在检测时，先将显示面板放置在检测机载台上进行对位，对位完成后然后图像摄取单元沿显示面板的X轴向或是Y轴向对显示面板进行图像信息采集，电脑对原始照片进行图像处理，然后对处理后的图像进行图像分割，分离出目标。再将目标与缺陷参数(Defect Spec)(包括Size(尺寸)、Length(长度)、Contrast(对比度)、SEMU(塞穆指标))等进行对比。符合缺陷参数要求的目标会被AOI设备检出，被认为是缺陷。
现有技术的显示面板通常为方形结构，显示面板在检测机载台上对位通常是使显示面板长度方向和宽度方向上的两条中轴线沿X轴向或是Y轴向布置，即显示面板的两条中轴线与图像摄取单元的运动方向平行或是垂直。这样采集到的图像信息通常情况下会出现一些问题，由于显示面板上的制程异常通常都是与显示面板的中轴线平行或是垂直，成一排排或是一列列的方式排列，图像摄取单元在运行过程中，由于机械运动和图像摄取单元本身的光学噪声会在最后的图像信息上显示出来。显示面板中轴线方向与图像摄取单元运动方向一致，实际上就可能出现制程异常与图像摄取单元产生的光学噪声在最后得到的图像信息上重合，制程异常和光学噪声异常重合在一起，工作人员无法区分这部分异常是制程异常还是由于光学噪声造成的异常，无法对后续的补救工作产生指导效应。
发明内容
本发明的目的就是要解决上述背景技术提到的现有的光学检测技术可能无法 区分制程异常和光学噪声异常造成误判或是漏检的问题，提供一种光学检测装置及光学检测方法。
本发明的技术方案为：一种光学检测装置，包括用于承载显示面板的面板载台(1)和采集显示面板图像信息的图像摄取单元；所述的图像摄取单元设置于面板载台(1)上方，可沿第一方向行进以对显示面板进行扫描，其特征在于：所述的面板载台(1)上设置有可驱动面板载台(1)旋转的旋转控制单元；所述旋转控制单元使承载于面板载台(1)上的显示面板中轴线转动至与所述第一方向形成一预设角度。
进一步的所述的旋转控制单元包括驱动面板载台旋转带动显示面板绕垂直显示面板的法线转动预设角度的旋转装置。
进一步的所述的法线垂直穿过显示面板的纵向中轴线和横向中轴线的交点。
进一步的所述的旋转装置包括安装在面板载台上的电动马达。
进一步的所述的预设角度为5～10°。
一种光学检测方法，用于检测显示面板，其特征在于：所述的检测方法包括以下步骤：
1)、提供一显示面板的光学检测装置，将显示面板放置在该检测装置的面板载台上；
2)、驱动该面板载台带动该显示面板旋转，使得该显示面板的中轴线与该检测装置的图像摄取单元的扫描方向呈一预设角度；
3)对显示面板进行扫描，获得显示面板的图像信息。
进一步的所述的步骤1)中，将显示面板放置在该检测装置的面板载台上的方法为：将显示面板放置于面板载台上，使显示面板的中轴线与所述第一方向平行或是垂直。
进一步的所述光学检测装置的面板载台上设置有旋转控制单元，所述旋转控制单元用于驱动所述面板载台带动所述显示面板旋转。
进一步的所述光学检测方法还包括步骤4)、分析经演算处理过的图像信息，若图像信息中存在与显示面板中轴线平行或垂直的异常，则为面板生产异常(5)造成；若图像信息中存在与第一方向平行的异常则为所述光学检测装置的光学噪 声异常(6)造成。
进一步的所述预设角度为5～10°。
本发明的优点有：1、检测出来的信息能够快速的将制程异常和光学噪声异常区分开来，能够明确异常的原因，对后续的补救措施具有良好的指导意义；
2、特别适用于对于某些有跟X轴或Y轴有因制程改善需求需调整些微角度的监测；
3、可为光学检测机提供大量监控及实时回馈问题，减少人员误判漏判风险。
本发明的光学检测方法简单、准确，能够快速的将制程异常和光学噪声造成的异常等区分开来，为后续工作提供了有效的指导，具有极大的推广价值。
附图说明
图1：对位时的检测机载台结构示意图；
图2：偏转后的检测机载台结构示意图；
图3：图像信息处理后的示意图；
图中：1—面板载台；2—马达；3—横向中轴线；4—纵向中轴线；5—生产异常；6—光学噪声异常；O—横向中轴线与纵向中轴线交点。
具体实施方式
下面结合附图和具体实施例对本发明作进一步的详细说明。
如图1至图3，为对位时的检测机载台结构示意图。本实施例的光学检测装置，包括用于承载显示面板的面板载台1和采集显示面板图像信息的图像摄取单元；图像摄取单元悬置于面板载台上方，可沿第一方向行进对显示面板进行扫描，具体地，第一方向平行于显示面板横向中轴线或纵向中轴线，即通常图像摄取单元是沿平行显示面板的横向中轴线或纵向中轴线的方向进行扫描，如图中箭头所示；面板载台1上设置有可驱动面板载台旋转的旋转控制单元，旋转控制单元使承载于面板载台(1)上的显示面板中轴线转动至与所述第一方向形成一预设角度θ。通过上述方法，显示面板旋转预设角度θ后再进行第一方向的光学扫描，若图像 摄取单元扫描过程中产生光学噪声，则在其获得的图像信息中，光学噪声异常6的方向与显示面板的中轴线具有一夹角θ；若显示面板存在生产制程缺陷，则图像信息中生产异常5的方向则与显示面板的中轴线平行，如此可以快速区分光学噪声异常6与生产异常5，为后续修复或生产制程提供指导性依据。
一般情况下，显示面板放置在光学检测装置的面板载台1上，与面板载台1的中轴线重合，包括沿其纵向的中轴线和沿其横向的中轴线，以图1的左右方向为横向方向，上下方向为纵向方向。显示面板沿其长度方向的中轴线为纵向中轴线4，沿其宽度方向的中轴线为横向中轴线3。
本发明对显示面板在面板载台1上的位置进行小角度的旋转，使得图像摄取单元的扫描方向与显示面板的中轴线呈现小角度的夹角，进而最终检测图像中的光学噪声异常6及生产异常5沿不同方向分布，实现了两种异常的快速区分。
于一实施例中，旋转控制单元包括驱动面板载台1旋转并带动显示面板绕垂直显示面板的法线转动预设角度的旋转装置；于一具体实施例中，法线垂直穿过显示面板的纵向中轴线4和横向中轴线3的交点O,即显示面板的中心，如此可以利用最小的空间实现面板载台1和显示面板的旋转。
于一具体实施例中，旋转装置包括安装在面板载台上的电动马达2，以实现面板载台1及显示面板的自由旋转。
于一较佳实施例中，上述的预设角度为5～10°，但不以此为限，实际操作中可根据生产需要对预设角度进行设置；通过使用者自己对偏转角度进行单独定义，有利于后续的结果分析。
本发明还提供一种光学检测方法，包括如下步骤，1、先将显示面板放置在光学检测装置的面板载台1上；
进一步地，需要对显示面板与面板载台1进行对位，对位的目的是使显示面板的横向中轴线3和纵向中轴线4与设定的图像摄取单元运动方向平行或是垂直；
2、驱动马达2使面板载台1旋转带动显示面板旋转，使显示面板绕穿过其中点的法线转动，转动角度为5～10°，根据使用者自行定义；
3、图像摄取单元沿横向方向或是纵向方向运动，扫描显示面板，获得显示面板的图像信息，然后将该信息发送到控制系统进行数据处理。
于一较佳实施例中，光学检测方法还包括步骤4、分析经演算处理过的图像信息，若图像信息中存在与显示面板中轴线平行或垂直的异常，则为面板生产异常5造成；若图像信息中存在与图像摄取单元扫描方向平行的异常则为该光学检测装置的光学噪声异常6造成，如图3所示。
以上显示和描述了本发明的基本原理、主要特征和本发明的优点。本行业的技术人员应该了解，本发明不受上述实施例的限制，上述实施例和说明书中描述的只是说明本发明的原理，在不脱离本发明精神和范围的前提下本发明还会有各种变化和改进，这些变化和改进都落入要求保护的本发明范围内。本发明要求保护范围由所附的权利要求书及其等同物界定。

Claims (10)

  1. 一种光学检测装置，包括用于承载显示面板的面板载台(1)和采集显示面板图像信息的图像摄取单元；所述的图像摄取单元设置于面板载台(1)上方，可沿第一方向行进以对显示面板进行扫描，其特征在于：所述的面板载台(1)上设置有可驱动面板载台(1)旋转的旋转控制单元；所述旋转控制单元使承载于面板载台(1)上的显示面板中轴线转动至与所述第一方向形成一预设角度。
  2. 如权利1所述的一种光学检测装置，其特征在于：所述的旋转控制单元包括驱动面板载台(1)旋转带动显示面板绕垂直显示面板的法线转动预设角度的旋转装置。
  3. 如权利2所述的一种光学检测装置，其特征在于：所述的法线垂直穿过显示面板的纵向中轴线(4)和横向中轴线(3)的交点(O)。
  4. 如权利2所述的一种光学检测装置，其特征在于：所述的旋转装置包括安装在面板载台(1)上的电动马达(2)。
  5. 如权利1所述的一种光学检测装置，其特征在于：所述的预设角度为5～10°。
  6. 一种光学检测方法，用于检测显示面板，其特征在于：所述的检测方法包括以下步骤：
    1)、提供一显示面板的光学检测装置，将显示面板放置在该检测装置的面板载台(1)上；
    2)、驱动该面板载台(1)带动该显示面板旋转，使得该显示面板的中轴线与该检测装置的图像摄取单元的扫描方向呈一预设角度；
    3)对显示面板进行扫描，获得显示面板的图像信息。
  7. 如权利要求6所述的光学检测方法，其特征在于：所述的步骤1)中，将显示面板放置在该检测装置的面板载台(1)上的方法为：将显示面板放置于面板载台(1)上，使显示面板的中轴线与所述第一方向平行或是垂直。
  8. 如权利要求6所述的光学检测方法，其特征在于：所述光学检测装置的面板载台(1)上设置有旋转控制单元，所述旋转控制单元用于驱动所述面板载台(1)带动所述显示面板旋转。
  9. 如权利要求6所述的光学检测方法，其特征在于：所述光学检测方法还包括步骤4)、分析经演算处理过的图像信息，若图像信息中存在与显示面板中轴线平行或垂直的异常，则为面板生产异常(5)造成；若图像信息中存在与第一方向平行的异常则为所述光学检测装置的光学噪声异常(6)造成。
  10. 如权利要求6所述的光学检测方法，其特征在于：所述预设角度为5～10°。
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