WO2017131178A1 - ノズル部材、およびそれを用いた液体吐出ヘッド、ならびに記録装置 - Google Patents
ノズル部材、およびそれを用いた液体吐出ヘッド、ならびに記録装置 Download PDFInfo
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- WO2017131178A1 WO2017131178A1 PCT/JP2017/002987 JP2017002987W WO2017131178A1 WO 2017131178 A1 WO2017131178 A1 WO 2017131178A1 JP 2017002987 W JP2017002987 W JP 2017002987W WO 2017131178 A1 WO2017131178 A1 WO 2017131178A1
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- metal oxide
- oxide film
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- 239000007788 liquid Substances 0.000 title claims description 97
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 126
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 126
- 239000005871 repellent Substances 0.000 claims abstract description 90
- 239000000463 material Substances 0.000 claims abstract description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 106
- 230000002940 repellent Effects 0.000 claims description 83
- 229910052751 metal Inorganic materials 0.000 claims description 63
- 239000002184 metal Substances 0.000 claims description 61
- 239000000758 substrate Substances 0.000 claims description 59
- 230000032258 transport Effects 0.000 claims description 21
- 230000003746 surface roughness Effects 0.000 claims description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 34
- 238000007639 printing Methods 0.000 description 32
- 238000007747 plating Methods 0.000 description 25
- 239000000919 ceramic Substances 0.000 description 24
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 19
- 229910052759 nickel Inorganic materials 0.000 description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 14
- 229910052760 oxygen Inorganic materials 0.000 description 14
- 239000001301 oxygen Substances 0.000 description 14
- 238000006073 displacement reaction Methods 0.000 description 12
- 230000007423 decrease Effects 0.000 description 11
- 229910052763 palladium Inorganic materials 0.000 description 9
- 238000004891 communication Methods 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 7
- 239000000976 ink Substances 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 239000002131 composite material Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000009832 plasma treatment Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 239000013043 chemical agent Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000005323 electroforming Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- -1 for example Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- BSIDXUHWUKTRQL-UHFFFAOYSA-N nickel palladium Chemical compound [Ni].[Pd] BSIDXUHWUKTRQL-UHFFFAOYSA-N 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 125000005372 silanol group Chemical group 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
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- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000005621 ferroelectricity Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- 230000005499 meniscus Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Images
Classifications
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
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Definitions
- the nozzle member of the present disclosure has a base material, a metal oxide film, and a water repellent film.
- the substrate has a first surface, and a plurality of through holes serving as discharge holes are opened on the first surface.
- the metal oxide film is disposed on the first surface.
- the water repellent film is disposed on the metal oxide film.
- the common electrode 34 and the individual electrode 35 are arranged so as to sandwich only the uppermost piezoelectric ceramic layer 21b.
- a region sandwiched between the individual electrode 35 and the common electrode 34 in the piezoelectric ceramic layer 21b is called an active portion, and the piezoelectric ceramic in that portion is polarized in the thickness direction.
- the piezoelectric actuator substrate 21 of this specific example only the uppermost piezoelectric ceramic layer 21b includes an active portion, and the piezoelectric ceramic layer 21a does not include an active portion and functions as a diaphragm.
- the piezoelectric actuator substrate 21 has a so-called unimorph type configuration.
- the electroformed film contains, for example, nickel as a main component, and the nickel content is 95% by mass or more.
- Components other than nickel are basically impurities, and the nickel content is preferably 98% by mass or more, and more preferably 99% by mass or more.
- the thickness of the metal oxide film 63 is increased, bonding with the water repellent film 64 occurs in more places, and the bonding strength of the water repellent film 64 can be increased. For this reason, the progress of the decrease in water repellency is slower in the first region A1 than in the second region A2. Thereby, the period which can use the nozzle plate 31 can be lengthened.
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
2・・・液体吐出ヘッド
4・・・流路部材
4-1・・・吐出孔面
5・・・マニホールド
5a・・・副マニホールド
5b・・・マニホールドの開口
6・・・個別供給流路
8・・・吐出孔(ノズル)
8a・・・貫通孔
9・・・加圧室群
10・・・加圧室
11a、b、c、d・・・加圧室列
12・・・しぼり
13・・・ヘッド本体
15a、b、c、d・・・吐出孔列
21・・・圧電アクチュエータ基板
21a・・・圧電セラミック層(セラミック振動板)
21b・・・圧電セラミック層
22~30・・・プレート
31・・・プレート(ノズル部材)
32・・・個別流路
34・・・共通電極
35・・・個別電極
35a・・・個別電極本体
35b・・・引出電極
50・・・変位素子
60・・・(ノズルプレートの)基材
60a・・・第1面
60b・・・第2面
61・・・めっき膜
62・・・金属膜
63・・・金属酸化膜
64・・・撥水膜
68・・・複合膜
70・・・ヘッド搭載フレーム
72・・・ヘッド群
80A・・・給紙ローラ
80B・・・回収ローラ
82A・・・ガイドローラ
82B・・・搬送ローラ
88・・・制御部
P・・・印刷用紙
Claims (9)
- 吐出孔となる貫通孔が複数開口している第1面を有する基材と、
前記第1面の上に配置されている金属酸化膜と、
該金属酸化膜の上に配置されている撥水膜とを有しており、
前記吐出孔の周囲の領域を第1領域とし、隣り合う前記第1領域の間の領域を第2領域としたときに、前記第1領域における前記金属酸化膜の厚さが、前記第2領域における前記金属酸化膜の厚さよりも厚いことを特徴とするノズル部材。 - 前記第1領域における前記金属酸化膜の前記撥水膜側の面の粗さが、前記第2領域における前記金属酸化膜の前記撥水膜側の面の粗さよりも大きいことを特徴とする請求項1に記載のノズル部材。
- 吐出孔となる貫通孔が複数開口している第1面を有する基材と、
前記第1面の上に配置されている金属酸化膜と、
該金属酸化膜の上に配置されている撥水膜とを有しており、
前記吐出孔の周囲の領域を第1領域とし、隣り合う前記第1領域の間の領域を第2領域としたときに、前記第1領域における前記金属酸化膜の前記撥水膜側の面の粗さが、前記第2領域における前記金属酸化膜の前記撥水膜側の面の粗さよりも大きいことを特徴とするノズル部材。 - 前記金属酸化膜と前記基材との間に金属膜が配置されていることを特徴とする請求項1~3のいずれかに記載のノズル部材。
- 前記金属膜の主成分である金属と、前記金属酸化膜の主成分である金属とが同じであることを特徴とする請求項4に記載のノズル部材。
- 前記第1領域における前記金属膜の厚さが、前記第2領域における前記金属膜の厚さよりも薄いことを特徴とする請求項4または5に記載のノズル部材。
- 前記第1領域における前記撥水膜の撥水性が、前記第2領域における前記撥水膜の撥水性よりも高いことを特徴とする請求項1~6のいずれかに記載のノズル部材。
- 請求項1~7のいずれかに記載のノズル部材と、前記吐出孔に繋がっている加圧室と、該加圧室に圧力を加える加圧部とを有することを特徴とする液体吐出ヘッド。
- 請求項8に記載の液体吐出ヘッドと、記録媒体を前記液体吐出ヘッドに対して搬送する搬送部と、前記液体吐出ヘッドを制御する制御部とを有することを特徴とする記録装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP17744408.0A EP3395575B1 (en) | 2016-01-28 | 2017-01-27 | Nozzle member and liquid ejection head using same, and recording apparatus |
CN201780008195.6A CN108602350B (zh) | 2016-01-28 | 2017-01-27 | 喷嘴构件和使用该喷嘴构件的液体排出头以及记录装置 |
US16/072,894 US10562303B2 (en) | 2016-01-28 | 2017-01-27 | Nozzle member, liquid ejection head including nozzle member, and recording device |
JP2017563860A JP6603337B2 (ja) | 2016-01-28 | 2017-01-27 | ノズル部材、およびそれを用いた液体吐出ヘッド、ならびに記録装置 |
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EP3482956A1 (en) * | 2017-11-14 | 2019-05-15 | SII Printek Inc | Jet hole plate, liquid jet head, and liquid jet recording apparatus |
JP2019116653A (ja) * | 2017-12-26 | 2019-07-18 | 株式会社リコー | 金属部材、金属部材の製造方法、ヘッド構成部材、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置 |
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JP6603337B2 (ja) | 2019-11-06 |
JPWO2017131178A1 (ja) | 2018-11-22 |
EP3395575B1 (en) | 2020-07-15 |
CN108602350A (zh) | 2018-09-28 |
US10562303B2 (en) | 2020-02-18 |
CN108602350B (zh) | 2020-06-02 |
EP3395575A4 (en) | 2019-01-16 |
US20190039374A1 (en) | 2019-02-07 |
EP3395575A1 (en) | 2018-10-31 |
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