WO2017130587A1 - Élément de coulissement et son procédé de fabrication - Google Patents

Élément de coulissement et son procédé de fabrication Download PDF

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Publication number
WO2017130587A1
WO2017130587A1 PCT/JP2016/087104 JP2016087104W WO2017130587A1 WO 2017130587 A1 WO2017130587 A1 WO 2017130587A1 JP 2016087104 W JP2016087104 W JP 2016087104W WO 2017130587 A1 WO2017130587 A1 WO 2017130587A1
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Prior art keywords
hard carbon
carbon layer
hydrogen
layer
sliding member
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PCT/JP2016/087104
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English (en)
Japanese (ja)
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勝啓 辻
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株式会社リケン
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J9/00—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction
    • F16J9/26—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction characterised by the use of particular materials

Definitions

  • the present invention relates to a sliding member, particularly a sliding member that requires high reliability, such as an automobile part, and a manufacturing method thereof.
  • a hard carbon film that is known to have a low friction coefficient is generally formed on a sliding surface of a sliding member used in an internal combustion engine or the like.
  • amorphous carbon called diamond-like carbon (DLC) is used.
  • the structural essence of DLC is a combination of diamond bonds (SP3 bonds) and graphite bonds (SP2 bonds) as carbon bonds. Therefore, DLC has hardness, wear resistance, thermal conductivity and chemical stability similar to diamond, while it has solid lubricity similar to graphite, which protects sliding members such as automobile parts. Suitable as a membrane.
  • hydrogen-containing hard carbon layer As the hard carbon film formed on the surface of the sliding member, one containing hydrogen (hereinafter referred to as “hydrogen-containing hard carbon layer”) and one not containing hydrogen (hereinafter referred to as “hydrogen-free hard carbon layer”). ").
  • hydrogen-containing hard carbon layer has a low friction coefficient, since a part of carbon bonding hands is terminated with hydrogen, there is a tendency that adhesion with a base material is poor.
  • the hydrogen-free hard carbon layer has a high friction coefficient, but tends to be excellent in adhesion to the base material. There are the following conventional techniques combining these two.
  • a hydrogen-free hard carbon layer is formed on a substrate by a vacuum arc ion plating method using a filtered cathode method, and an uppermost layer is formed on the hydrogen-free hard carbon layer by a plasma CVD method. It is described that a hydrogen-containing hard carbon layer having a hydrogen content of 0.17 to 0.34 atomic% is formed.
  • This technique combines a low-wear property and excellent adhesion by combining a hydrogen-free hard carbon layer and a hydrogen-containing hard carbon layer. Since the hydrogen-free hard carbon layer is formed by a vacuum arc discharge method using a filtered cathode method, the surface thereof has high flatness.
  • a hydrogen-free hard carbon layer having a thickness of 0.5 to 200 nm is formed on a substrate by a vacuum arc ion plating method that does not use a filtered cathode method, and further, by a vacuum arc ion plating method. It describes that a hydrogen-containing hard carbon layer having a hydrogen content of 5 to 25 atomic% is formed on a hydrogen-free hard carbon layer.
  • the hydrogen-free hard carbon layer is formed by a vacuum arc ion plating method that does not use a filtered cathode method, but since the thickness is as thin as 200 nm or less, the surface has high flatness. It is characterized by having
  • Patent Documents 1 and 2 the adhesion between the entire hard carbon coating and the base material is improved by interposing a hydrogen-free hard carbon layer with high adhesion between the base material and the hydrogen-containing hard carbon layer. I was paying attention to. However, Patent Documents 1 and 2 do not consider any adhesion between the hydrogen-free hard carbon layer and the hydrogen-containing hard carbon layer thereon. According to the study of the present inventor, in the prior art, peeling occurs between the hydrogen-free hard carbon layer and the hydrogen-containing hard carbon layer under severe sliding conditions, and as a result, the service life of the sliding member is shortened. It turns out that there is a problem.
  • an object of the present invention is to provide a sliding member in which delamination hardly occurs even under severe sliding conditions and a method for manufacturing the same.
  • Patent Documents 1 and 2 when forming a hydrogen-containing hard carbon layer on a hydrogen-free hard carbon layer, it has been aimed to make the surface of the hydrogen-free hard carbon layer as flat as possible.
  • the present inventor has conceived of roughening the surface of the hydrogen-free hard carbon layer. That is, the present inventor aimed to suppress peeling between the two layers by an anchor effect due to the unevenness by forming a hydrogen-containing hard carbon layer on a hydrogen-free hard carbon layer having many unevenness on the surface. And not only simply roughening the surface of the hydrogen-free hard carbon layer, but also when the surface has a specific surface shape (uneven structure), it has been found that peeling between the two layers can be sufficiently suppressed.
  • the invention has been completed.
  • first hard carbon layer having a thickness substantially not containing hydrogen of 0.35 ⁇ m or more and 1.5 ⁇ m or less on the substrate by a vacuum arc ion plating method that does not use the filtered cathode method.
  • the first step Second step of forming a second hard carbon layer having a hydrogen content of 5 atomic% or more and 25 atomic% or less on the first hard carbon layer by a vacuum arc ion plating method that does not use a filtered cathode method
  • the first step is performed so that the surface shape of the first hard carbon layer satisfies the protruding peak height Rpk: 0.08 ⁇ m or more and 0.90 ⁇ m or less. Manufacturing method of sliding member used.
  • the sliding member of the present invention hardly causes delamination even under severe sliding conditions. Moreover, the manufacturing method of the sliding member of this invention can manufacture the sliding member which is hard to produce delamination under severe sliding conditions with high productivity.
  • a sliding member 100 is used under lubricating oil, and is formed on a base material 10 and a surface (sliding surface side) of the base material.
  • a second hard carbon layer 16 hydrogen-containing hard carbon layer having a hydrogen content of 5 atomic% to 25 atomic%.
  • the first hard carbon layer 14 and the second hard carbon layer 16 as well as any gradient layer described later are collectively referred to as a “hard carbon coating 18”.
  • the material of the base material 10 is not particularly limited as long as it has a strength necessary for the base material of the sliding member.
  • preferable materials for the substrate 10 include steel, martensitic stainless steel, austenitic stainless steel, high-grade cast iron, and the like.
  • the intermediate layer 12 has a function of relaxing the stress at the interface with the base material 10 and improving the adhesion of the hard carbon film 18 by being formed between the base material 10 and the hard carbon film 18.
  • the intermediate layer 12 is preferably made of one or more selected from Cr, Ti, Si and W, carbides, nitrides, and carbonitrides thereof.
  • the intermediate layer is not limited to a single layer made of a metal or a compound selected from the above, and may have a multilayer structure in which a plurality of layers are stacked.
  • the thickness of the intermediate layer 12 is preferably 0.02 ⁇ m or more and 0.6 ⁇ m or less. If the thickness is less than 0.02 ⁇ m, sufficient adhesion to the hard carbon coating 18 may not be obtained. If the thickness exceeds 0.6 ⁇ m, plastic flow tends to occur, and the intermediate layer 12 It is because it becomes easy to peel.
  • Examples of the method for forming the intermediate layer 12 include a sputtering method.
  • the substrate 10 after cleaning is placed in a vacuum chamber of a PVD film forming apparatus, and Ar gas is introduced, using a sputtering source 22 (see FIG. 2) having a Cr, Ti, or WC target.
  • Layer 12 can be deposited.
  • a hydrocarbon gas containing Si as a constituent element such as tetramethylsilane (TMS) is introduced, and the intermediate layer 12 can be formed by plasma CVD.
  • TMS tetramethylsilane
  • the sputtering source 22 is not used.
  • the thickness of the intermediate layer 12 can be adjusted by the discharge time.
  • the hard carbon coating 18 is in contact with the substrate 10 or preferably the first hard carbon layer 14 formed in contact with the intermediate layer 12 and the first hard carbon layer 14 formed in contact with the first hard carbon layer. Two hard carbon layers 16.
  • the first hard carbon layer 14 does not substantially contain hydrogen and consists of amorphous carbon (DLC) only. Amorphous carbon can be confirmed by Raman spectrum measurement using a Raman spectrophotometer (Ar laser).
  • “substantially does not contain hydrogen” means a gas that is inevitably generated during film formation, or gas that is adsorbed on the inner wall of the film formation chamber as it is released during film formation.
  • the first hard carbon layer 14 is formed without introducing a compound containing hydrogen, such as methane, diborane, and silane, from the outside, specifically, by HFS (Hydrogen-Forward-Scattering) analysis. It means that the hydrogen content in the hard carbon coating is 3 atomic% or less.
  • the first hard carbon layer 14 increases the adhesion between the base material 10 and the intermediate layer 12 and the hard carbon coating 18.
  • the second hard carbon layer 16 has a hydrogen content of 5 atomic% to 25 atomic%. Within this range, wear acceleration during sliding in an oil lubrication environment containing an organomolybdenum compound is small, and a high film formation rate can be achieved at the same time.
  • the hydrogen content is preferably more than 10 atomic% and not more than 20 atomic%. When the hydrogen content is less than 5 atomic%, the wear resistance is good, but the deposition rate is slow and the productivity is low. On the other hand, when the hydrogen content exceeds 25 atomic%, a high film formation speed can be obtained, but there is a large amount of wear and wear by organic molybdenum compounds may be promoted. Not suitable for use in
  • the surface shape of the first hard carbon layer 14 (that is, the shape of the interface between the first hard carbon layer 14 and the second hard carbon layer 16) is the protruding peak height Rpk: 0.08. It is important to satisfy the range of ⁇ m to 0.90 ⁇ m. When Rpk is less than 0.08 ⁇ m, peeling between the first hard carbon layer 14 and the second hard carbon layer 16 occurs, and as a result, the service life of the sliding member is shortened. On the other hand, if Rpk exceeds 0.90 ⁇ m, the surface roughness of the second hard carbon layer 16 formed on the first hard carbon layer 14 becomes too large, and post-processing is required. From the above viewpoint, Rpk is preferably 0.08 ⁇ m or more and 0.55 ⁇ m or less.
  • a cross-sectional sample in the film thickness direction of the hard carbon coating 18 is manufactured by focused ion beam (FIB) processing, and a transmission electron microscope image (TEM image) is observed.
  • FIB focused ion beam
  • TEM image transmission electron microscope image
  • the cross-sectional shape of the base material is the boundary between the base material and the intermediate layer
  • the cross-sectional shape of the intermediate layer is the boundary between the intermediate layer and the first hard carbon layer
  • the cross-sectional shape of the first hard carbon layer is the first hard
  • the change in luminance of the obtained TEM image is the boundary between the carbon layer and the second hard carbon layer
  • the cross-sectional shape of the second hard carbon layer is the surface of this layer or the boundary with the protective layer provided before FIB processing.
  • the calculation method of the thickness of each layer is as follows.
  • a regression line is obtained by the least square method for each measurement point constituting the cross-sectional shape of the substrate, and this straight line is taken as the x-axis and the normal direction as the y-axis.
  • middle layer, a 1st hard carbon layer, and a 2nd hard carbon layer is converted into xy coordinate defined here.
  • the height of the cross-sectional shape of each layer from the base material is the average value of the y-coordinates of the respective cross-sectional shapes.
  • the thickness of the intermediate layer is calculated from the average value of the y coordinates of the cross-sectional shape of the intermediate layer from the x axis.
  • the thickness of the first hard carbon layer is calculated by subtracting the thickness of the intermediate layer from the average value of the y coordinates of the cross-sectional shape of this layer, and the thickness of the second hard carbon layer is It is calculated by subtracting the average value of the y-coordinates of the cross-sectional shape of the first hard carbon layer from the average value of the y-coordinates of the cross-sectional shape.
  • the Rpk of the surface of the first hard carbon layer is calculated based on the cross-sectional shape of the obtained first hard carbon layer using surface roughness measurement software or the like according to JIS B0671-2: 2002.
  • an arc evaporation source 20 having a carbon cathode and a sputtering source 22 having a metal cathode for forming an intermediate layer are turned. It is often arranged in a positional relationship facing each other across the table. This is because, for example, when the arc evaporation source 20 having a carbon cathode is discharged and formed into a film, the turntable can be used as a screen to suppress the coating of the sputtering source Cr, such as Cr, with the carbon surface by carbon. It is.
  • FIG. 4 schematically shows the relationship between the thickness of the coating formed on the surface of the workpiece located in the region P at the start of introduction of the hydrocarbon-based gas and the flow rate of the hydrocarbon gas.
  • the plasma generated by the arc evaporation source is shielded by the work of the other rotation axis located near the arc evaporation source, so that almost no film is formed.
  • the conditions for forming the first hard carbon layer 14 are preferably as follows. That is, the bias voltage is preferably ⁇ 150 V or more and 0 V or less, the arc discharge current is preferably 40 A or more and 90 A or less, and the substrate temperature before the first hard carbon layer 14 is formed is preferably 110 ° C. or less. 80 ° C. or lower is more preferable.
  • the thickness of the first hard carbon layer 14 can be controlled by the film formation time, and is 0.35 ⁇ m or more and 1.5 ⁇ m or less. This is because if the thickness is less than 0.35 ⁇ m, it is difficult to roughen the surface of the first hard carbon layer 14, so that it is difficult to make Rpk within the range of the present invention. On the other hand, when the thickness exceeds 1.5 ⁇ m, the surface of the first hard carbon layer 14 becomes too rough due to the carbon microparticles emitted from the cathode along with the arc discharge, and the carbon microparticles are integrated with the surrounding coating. This is because the boundary and voids (voids) are generated, and delamination occurs.
  • the conditions for forming the second hard carbon layer 16 are not particularly limited, but are preferably as follows. That is, the bias voltage is preferably ⁇ 150 V to 0 V, the arc discharge current is preferably 40 A to 90 A, and the hydrocarbon gas flow rate is preferably 50 sccm to 250 sccm.
  • the total thickness of the first hard carbon layer 14 and the second hard carbon layer 16 is preferably 5 ⁇ m or more, and more preferably 7 ⁇ m or more.
  • the total thickness is preferably 30 ⁇ m or less. Even if it exceeds 30 ⁇ m, there is no functional problem, but the film thickness is excessive and the film formation cost increases.
  • a sliding member according to an embodiment of the present invention includes a piston ring, a piston, a piston pin, a tappet, a valve lifter, and the like used for a sliding part of an internal combustion engine in which a lubricating oil containing an organic molybdenum compound such as engine oil is interposed. It can be applied to shims, rocker arms, cams, camshafts, timing gears, and timing chains.
  • the sliding member of the present invention is preferably used in the presence of a lubricating oil containing an organomolybdenum compound. Since the outermost layer has a hydrogen content of 5 to 25 at%, the progress of wear due to the reaction with the Mo oxide can be relatively suppressed even under lubricating oil containing an organomolybdenum compound.
  • the organomolybdenum compound in the lubricating oil is preferably one or more organomolybdenum compounds selected from molybdenum dithiocarbamate (Mo-DTC) or molybdenum dithiophosphate (Mo-DTP).
  • Mo-DTC molybdenum dithiocarbamate
  • Mo-DTP molybdenum dithiophosphate
  • a SUJ2 cylinder having a diameter of 6 mm and a length of 12 mm was used as a base material, and an intermediate layer and a hard carbon film were formed on the curved surface as shown in the Examples and Comparative Examples described in Table 1 under the following conditions.
  • the base material was arrange
  • the film was formed not on the entire curved surface but on a part of the curved surface along the axial direction.
  • the base material was held on the work holder 28 for film formation using the part where the film was not formed.
  • the used turntable 26 has a plurality of work holders having rotation axes. C. D. Is 600 mm.
  • a film-forming jig holding a substrate was attached to one of the axes.
  • a dummy pole made of SUS304TPD of ⁇ 89 was disposed on the remaining rotation axis.
  • the SUJ2 cylinder Prior to the formation of the hard carbon film, the SUJ2 cylinder is cleaned, evacuated after being placed on one rotating shaft of the turntable, and heated using a heater 30 within a temperature range of 200 ° C. or less. Urged the release of adsorbed components. Then, discharge cleaning and formation of an intermediate layer were performed.
  • the first hard carbon layer was formed in the same chamber, and the second hard carbon layer was further formed.
  • a graphite carbon cathode (carbon: 99 atomic% or more) was attached to the arc evaporation source.
  • argon was mixed with acetylene as a hydrocarbon gas and introduced.
  • the first hard carbon layer of the example has a bias voltage of ⁇ 150 V or more and 0 V or less, an arc discharge current of 40 A or more and 90 A or less, and a substrate temperature before forming the first hard carbon layer: 110 ° C. or less for a predetermined time. It formed by performing film-forming.
  • the hydrogen content of the hard carbon film is measured by RBS (Rutherford Backscattering Spectrometry) / HFS (Hydrogen Forward Scattering Spectrometer) of a film formed in a region that is flat or has a sufficiently large radius of curvature and can be regarded as a flat surface for measurement.
  • the hydrogen content (unit: atomic%) in a film is measured by RBS / HFS on a plurality of reference samples on which a film with different hydrogen contents is formed on a plane.
  • the secondary ion intensity of each of hydrogen and carbon is measured for this reference sample by SIMS (Secondary Ion Mass Spectrometry: Secondary Ion-microprobe Mass Spectrometry).
  • carbon content is calculated
  • a carbon film was formed on a mirror-polished flat test piece (quenched SKH51 material disc, ⁇ 25 ⁇ thickness 5 (mm), hardness HRC60-63, surface roughness Ra 0.02 ⁇ m or less).
  • the film formation of the reference sample was performed using a reactive sputtering method and introducing acetylene, argon, and hydrogen as the atmospheric gas.
  • the amount of hydrogen contained in the coating film of the first reference sample was adjusted by changing the flow rate of introduced hydrogen and the overall pressure.
  • hard carbon films composed of only hydrogen and carbon and having different hydrogen contents were formed, and the carbon film compositions (all elements including hydrogen) of these reference samples were evaluated by RBS / HFS. Then, it was confirmed that the total of hydrogen and carbon was 98 atomic% or more among the components of the entire hard carbon film formed on the reference sample, and that carbon was 97 atomic% or more among the components excluding hydrogen.
  • the coating of the reference sample was analyzed by SIMS, and the secondary ion intensity of hydrogen and carbon was measured.
  • the SIMS analysis can be performed on a non-planar part such as a piston ring or a camshaft. Therefore, for the same coating of the reference sample, an empirical formula showing the relationship between the amount of hydrogen and carbon (unit: atomic%) obtained by RBS / HFS and the ratio of secondary ion intensity of hydrogen and carbon obtained by SIMS.
  • the amount of hydrogen and the amount of carbon can be calculated from the SIMS hydrogen and carbon secondary ion intensity measured for the actual sliding member.
  • the coating film formed on the actual sliding member was analyzed by SIMS, and the ratio between the hydrogen amount and the carbon amount was determined using the above empirical formula.
  • the value of the secondary ion intensity by SIMS adopted the average value of the secondary ion intensity of each element observed at least at a depth of 20 nm or more from the coating surface and in the range of 50 nm.
  • elements other than hydrogen including carbon were further measured by EDX (Energy Dispersive X-ray spectroscopy) and WDX (Wavelength-dispersive X-ray spectroscopy). From these results, the composition ratio of the coating film containing hydrogen can be evaluated.
  • the hydrogen content of the second hard carbon layer measured in this way is shown in Table 1.
  • the surface on which the hard carbon film of the test piece prepared in the example and the comparative example was formed was polished with a wrapping film (diamond # 4000) so as to have an arithmetic average roughness Ra of 0.03 ⁇ m or less. A reciprocating test was performed.
  • the amount of coating wear by such a reciprocating test was obtained by the following method. Using a confocal laser microscope (Olympus, model: LEXT OLS4000), the three-dimensional shape of the coating surface including the vicinity of the sliding portion after the reciprocating test was measured. First, the three-dimensional shape of the side surface of the cylinder on which the coating film before being subjected to the reciprocating test was formed was measured, and the surface shape in the vertical direction (sliding direction) with respect to the rotational symmetry axis of the cylinder was measured at 10 locations (FIG. 6 ( A)). And the average of the nth shape was calculated
  • the sliding surface (surface) of the test piece was observed visually or with an optical microscope (100 to 400 times), and the presence or absence of film damage was evaluated according to the following criteria.
  • the case where pits with a size of 100 ⁇ m or more are observed on the sliding surface of the test piece is “pit missing”, and the case where the first hard carbon layer and the second hard carbon layer are separated is called “delamination”. Indicated.
  • the sliding member of the present invention can reduce the coefficient of friction while maintaining high wear resistance during sliding under lubricating oil containing an organomolybdenum compound, and is less likely to cause delamination.
  • SYMBOLS 100 Sliding member 10 Base material 12 Intermediate layer 14 1st hard carbon layer (non-hydrogen containing hard carbon layer) 16 Second hard carbon layer (hydrogen-containing hard carbon layer) 18 Hard carbon coating 20 Arc type evaporation source with carbon cathode 22 Sputtering source with metal cathode 24 Vacuum vessel 26 Turntable 28 Rotating work holder 30 Heater 60 Test piece (SUS2 cylinder) 68 Sliding mating material (SUS2 disc)

Abstract

La présente invention concerne un élément de coulissement dans lequel un décollement entre couches est moins susceptible de se produire, même dans des conditions de coulissement dures. La présente invention consiste en un élément de coulissement (100) utilisé avec de l'huile de lubrification, l'élément étant caractérisé en ce qu'il comporte un matériau de base (10), une première couche de carbone dur (14) formée sur le matériau de base et ne contenant pas de quantités importantes d'hydrogène, et une seconde couche de carbone dur (16) formée en contact avec la première couche de carbone dur et présentant une teneur en hydrogène de 5 à 25 % atomiques.Le profil de surface de la première couche de carbone dur présente une hauteur de pic Rpk saillante de 0,08 à 0,90 µm et l'épaisseur de la première couche de carbone dur est de 0,35 à 1,5 µm.
PCT/JP2016/087104 2016-01-25 2016-12-13 Élément de coulissement et son procédé de fabrication WO2017130587A1 (fr)

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JP2019157156A (ja) * 2018-03-08 2019-09-19 日本アイ・ティ・エフ株式会社 複合被膜および複合被膜の形成方法
CN113698231A (zh) * 2020-05-22 2021-11-26 揖斐电株式会社 碳复合构件
EP3660180B1 (fr) 2017-10-20 2023-04-12 Kabushiki Kaisha Riken Élément coulissant et garniture de piston

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JP7061006B2 (ja) * 2018-04-20 2022-04-27 株式会社豊田中央研究所 摺動部材と摺動機械

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JP2003026414A (ja) * 2001-07-17 2003-01-29 Sumitomo Electric Ind Ltd 非晶質炭素被膜と非晶質炭素被膜の製造方法および非晶質炭素被膜の被覆部材
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JP2007131893A (ja) * 2005-11-09 2007-05-31 Osg Corp Ｄｌｃ被膜、およびｄｌｃ被膜被覆工具
WO2015163470A1 (fr) * 2014-04-24 2015-10-29 京セラ株式会社 Outil revêtu
WO2016042945A1 (fr) * 2014-09-16 2016-03-24 株式会社リケン Élément coulissant revêtu

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* Cited by examiner, † Cited by third party
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EP3660180B1 (fr) 2017-10-20 2023-04-12 Kabushiki Kaisha Riken Élément coulissant et garniture de piston
JP2019157156A (ja) * 2018-03-08 2019-09-19 日本アイ・ティ・エフ株式会社 複合被膜および複合被膜の形成方法
JP7162799B2 (ja) 2018-03-08 2022-10-31 日本アイ・ティ・エフ株式会社 複合被膜および複合被膜の形成方法
CN113698231A (zh) * 2020-05-22 2021-11-26 揖斐电株式会社 碳复合构件

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