JP6453826B2 - 摺動部材およびその製造方法 - Google Patents
摺動部材およびその製造方法 Download PDFInfo
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Description
1.摺動部材の製造方法について
図1は、本実施形態の摺動部材を製造(基材に被膜を成膜)するための模式的な装置構成図である。
上述した条件で成膜された非晶質炭素被膜12は、単結合により3つの炭素原子が配位された窒素原子(3配位の窒素原子)の個数をAとし、単結合および二重結合により2つの炭素原子が配位された窒素原子(2配位の窒素原子)の個数をBとしたときに、非晶質炭素被膜12に対してX線光電子分光分析により得られる非晶質炭素被膜12のA/Bの値が、10以上、18以下となる。
非晶質炭素被膜12に対してX線光電子分光分析で得られた非晶質炭素被膜のA/Bの値は、以下のように測定される。具体的には、X線光電子分光法(XPS)により、非晶質炭素被膜に軟X線を照射し、励起され表面から放出された光電子を分光する。この光電子は、電子の結合エネルギーに応じたエネルギー値を持つため、X線のエネルギーが一定であれば、電子の結合エネルギーを求めることができる。これにより、X線光電子分光分析では一般に、表面から数nmの範囲に存在する原子の電子状態や化学結合状態に関する情報を得ることができる。
(実施例1)
<摺動部材の製作>
窒素を含有した非晶質炭素被膜(CNx膜)の成膜に、図1の如き装置を用いた。まず、基材として、(100)方位を表面に有するシリコンウエアを準備した。この基材とカーボンターゲットを真空チャンバ内に配置し、チャンバ内を、2.0〜4.0×10−3Paの範囲内となるように、ターボ分子ポンプで、チャンバ内の空気を排気した。そして、基材が設置された設置台に、20℃の冷却水を循環させて、基材の温度を一定に保持した。
実施例1と同じように、基材に非晶質炭素被膜を形成した摺動部材を製作した。実施例2および3が、実施例1と相違する点は、ターゲットに照射する電子ビームの出力を、順次、40Wおよび50Wにした点である。
実施例1と同じように、基材に非晶質炭素被膜を形成した摺動部材を製作した。比較例1〜4が、実施例1と相違する点は、ターゲットに照射する電子ビームの出力を、順次、10W、20W、60W、および63Wにした点である。
水素を有していない非晶質炭素被膜(DLC被膜)が電子ビーム蒸着法により成膜された摺動部材を準備した。
基材の表面に、PVD法により、窒素を含有せず、水素を含有した非晶質炭素被膜(DLC被膜)が成膜された摺動部材を準備した。
窒素を含有していない非晶質炭素からなる被膜(DLC被膜)がアークイオンプレーティング法(AIP法)により成膜された摺動部材を準備した。
実施例1〜3および比較例1〜4に係る摺動部材の非晶質炭素被膜の膜硬度を測定した。具体的にはこれらの表面をHysitron社製AFMナノインデンターにより押し込み硬度を測定した場合の荷重変位曲線を求め、荷重変位曲線より、塑性変形による押し込み痕の投影面積を算出し、最大押し込み荷重を押し込み痕の投影面積で除することでこれらの膜硬度を算出した。この結果を表1に示す。
図6Aに示す試験機を用いてブロックオンリング摩擦摩耗試験を行った。具体的には、実施例1〜3および比較例1〜4に係る摺動部材となるブロック試験片61Aを準備した。図6Aに示すように、リング試験片(JIS規格:SUJ2)62Aを準備し、この上にブロック試験片61Aを配置した。レベラー63Aを介したウエイト64Aにより、鉛直方向に沿って、リング試験片62Aの周面とブロック試験片61Aの表面に垂直荷重を付与した。
実施例1〜3および比較例1〜4に係る摺動部材の非晶質炭素被膜に対して、図5Aおよび図5Bにおいて説明した方法で、非晶質炭素被膜のA/Bの値を測定した。この結果を表1に示す。また、図8に、実施例1〜3および比較例1〜4に係る摺動部材の非晶質炭素被膜を成膜する際の電子ビームパワー(出力)と、A/Bの値との関係を示す。
図6Bに示す、試験機を用いてボールオンディスク摩擦摩耗試験を行った。具体的には、実施例1〜3および比較例1〜7に係る摺動部材となるボール試験片61Bおよびディスク試験片62Bを準備した。具体的には、直径8mmの軸受鋼(SUJ2:JIS規格)からなる球体の表面と、これに摺動する軸受鋼(SUJ2:JIS規格)からなるディスクの表面とに、実施例1〜3および比較例1〜7に対応した非晶質炭素被膜を成膜した。
実施例1〜3および比較例1〜4に係る摺動部材の非晶質炭素被膜に含まれる窒素原子の含有量を、上述したX線光電子分光分析装置で測定した。この結果を表1に示す。
表1および図7に示すように、非晶質炭素被膜を成膜する際の電子ビームパワーが10W〜30Wの範囲では、電子ビームパワーの増加に伴い、成膜される非晶質炭素被膜の膜硬度が増加している。また、電子ビームパワーが30W以上では、膜硬度は、約13GPa程度になっていることがわかる。
表1および図8に示すように、電子ビームパワーの増加に伴い、非晶質炭素被膜のA/Bの値が減少している。これは、電子ビームパワーの増加に伴い、炭素のイオンエネルギーが高くなり、窒素原子と炭素原子との二重結合が増加したこと、すなわち、2配位の窒素原子が増加したことよると考えられる。
図9に示すように、実施例1、比較例3〜7に係る摺動部材の摩擦係数は、摺動時間の経過に伴い(摩擦繰り返し数の増加に伴い)、馴染み効果により、低減している。特に、実施例1に係る摺動部材の摩擦係数は、摩擦繰り返し数500サイクル目には、摩擦係数が0.01以下の超低摩擦を示している。しかしながら、電子ビームパワーが本発明の範囲から外れる比較例3、4および他の成膜方法で成膜した比較例5〜7は、実施例1に比べると摩擦係数が大きくなっていることがわかる。
図10に示すように、実施例1〜3の、成膜時の電子ビームパワーが、30〜50Wの範囲では、摺動部材の摩擦係数は、他のものに比べて小さい。これは、成膜時の電子ビームパワーが30W未満の比較例1(10W)および比較例2(20W)では、膜強度が低いため、非晶質炭素被膜の摩耗に伴い摩擦係数が増加したと考えられる。したがって、上述したように、成膜時の電子ビームパワーは30W以上であることが必要であり、この範囲で成膜された非晶質炭素被膜のA/Bの値は、18以下である(図11参照)。
Claims (2)
- 基材の表面に、窒素原子を含有した非晶質炭素被膜を有し、潤滑油中で摺動する摺動部材であって、
単結合により3つの炭素原子が配位された窒素原子の個数をAとし、単結合および二重結合により2つの炭素原子が配位された窒素原子の個数をBとしたときに、前記非晶質炭素被膜に対してX線光電子分光分析により得られる結合エネルギーと強度の波形から、前記個数Aに起因した値である波形waのピークの面積と、前記個数Bに起因した値である波形wbのピークの面積と、を算出し、前記波形wbのピークの面積に対する前記波形waのピークの面積の比から算出した前記非晶質炭素被膜のA/Bの値が、10以上、18以下であることを特徴とする摺動部材。 - 基材の表面に、窒素原子を含有した非晶質炭素被膜を有し、潤滑油中で摺動する摺動部材の製造方法であって、
前記基材の表面に向けて窒素イオンビームを照射すると共に、カーボンターゲットに電子ビームを照射することにより、前記カーボンターゲットの一部を前記基材の表面に蒸着させながら前記非晶質炭素被膜を前記基材の表面に成膜するものであり、
前記カーボンターゲットに照射する電子ビームの出力が、30W以上、50W以下であることを特徴とする摺動部材の製造方法。
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