WO2017124711A1 - 液晶涂覆装置及方法 - Google Patents
液晶涂覆装置及方法 Download PDFInfo
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- WO2017124711A1 WO2017124711A1 PCT/CN2016/090093 CN2016090093W WO2017124711A1 WO 2017124711 A1 WO2017124711 A1 WO 2017124711A1 CN 2016090093 W CN2016090093 W CN 2016090093W WO 2017124711 A1 WO2017124711 A1 WO 2017124711A1
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- liquid crystal
- gas
- coating apparatus
- head
- gas cooling
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/001—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work incorporating means for heating or cooling the liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
- B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
- B05C5/0216—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
- G02F1/13415—Drop filling process
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
- G02F1/3505—Coatings; Housings; Supports
Definitions
- Embodiments of the present invention relate to a liquid crystal coating apparatus and a method of performing liquid crystal coating using the same.
- TFT-LCDs thin-film transistor liquid crystal displays
- the liquid crystal panel includes an array substrate and an opposite substrate disposed opposite to each other and a liquid crystal layer disposed between the array substrate and the opposite substrate.
- the filling of the liquid crystal is a very important process, which includes the following steps: first filling the liquid crystal between the array substrate and the opposite substrate through a filling device such as an inkjet printing device, and then A sealant is applied between the array substrate and the opposite substrate under vacuum to sandwich the array substrate and the opposite substrate and seal the liquid crystal layer between the array substrate and the opposite substrate.
- the liquid crystal and the sealant are coated separately on different substrates.
- the sealant is a translucent gel at room temperature.
- the liquid crystal coated on the substrate diffuses toward the periphery, especially in the direction of the alignment rubbing, and is in contact with the sealant before it is completely cured; in this case, the dissolution of the small molecular components of the sealant can contaminate the liquid crystal, thereby causing There are problems such as uneven brightness of the display and residual images around the liquid crystal panel, which reduces the quality and yield of the liquid crystal panel.
- a liquid crystal coating apparatus includes a liquid crystal head and a gas cooling device, the gas cooling device is located behind the liquid crystal head along a movement track of the liquid crystal head, and the gas cooling device moves along a movement track of the liquid crystal head .
- the gas cooling device includes a pneumatic system and a jet chamber, and the jet chamber passes The pneumatic system is in communication with a gas storage device.
- the pneumatic system is provided with a flow valve that controls the flow of gas.
- the bottom of the jet chamber is provided with a slit-shaped air outlet.
- the jet chamber is used to spray a low temperature drying gas.
- the low temperature drying gas is nitrogen or carbon dioxide.
- the liquid crystal coating apparatus further includes a mouth-shaped frame, the frame drives the liquid crystal head and the gas cooling device to move synchronously, and the liquid crystal head and the gas cooling device are fixed to the frame along a moving direction thereof. Both ends.
- the liquid crystal coating apparatus further includes a heat insulating baffle disposed between the liquid crystal head and the gas cooling, the heat insulating baffle being disposed in a direction perpendicular to a movement trajectory of the liquid crystal head and the gas cooling device.
- the cooling device is disposed closer to the heat insulating baffle than the liquid crystal shower head.
- the bottom of the liquid crystal head is provided with a nozzle, and a bottom edge of the heat insulating baffle is higher than a nozzle of the liquid crystal head.
- a liquid crystal coating method includes: S1: spraying a liquid crystal of a set pattern on a substrate through a liquid crystal head; and S2, while spraying the liquid crystal, the gas cooling device cools the liquid crystal along a trajectory of the liquid crystal head, and reduces the liquid crystal. fluidity.
- a sealant is disposed in a peripheral region of the substrate, and the method includes: thermally curing the sealant while simultaneously heating the liquid crystal to restore fluidity.
- the gas cooling device ejects a low-temperature drying gas to the substrate through a slit-type gas outlet.
- the low temperature drying gas is nitrogen or carbon dioxide.
- FIG. 1 is a schematic structural view of a liquid crystal coating apparatus according to an embodiment of the present invention.
- FIG. 2 is a schematic view showing the application of a liquid crystal coating apparatus according to an embodiment of the present invention.
- an embodiment of the present invention provides a liquid crystal coating apparatus including a liquid crystal head 3 for performing liquid crystal 2 coating and a gas cooling device 6 for cooling the coated liquid crystal 2.
- the gas cooling device 6 is located behind the liquid crystal head 3, the gas cooling device 6 moves along the movement path of the liquid crystal head 3, and the liquid crystal head 3 ejects liquid crystal, for example, through its nozzle 4, while the gas cooling device 6 The liquid crystal 2 is rapidly cooled.
- the gas cooling device 6 includes a gas path system 63 and a gas injection chamber 61.
- the gas injection chamber 61 communicates with the gas storage device 9 via a gas path system 63.
- the gas path system 63 is provided with a flow valve for controlling the flow of the gas through the gas path system 63.
- the flow valve can adjust the magnitude of the gas flow rate and the temperature of the low temperature gas to achieve a good cooling effect by gently applying a low temperature gas to the liquid crystal 2 on the surface of the substrate 1.
- the bottom of the jet chamber 61 is provided with a slit-type air outlet 62.
- the slit-type air outlet 62 is used for spraying a low-temperature drying gas, and when the slit-type air outlet 62 is used for jetting, the gas discharge direction can be concentrated, which is advantageous for The liquid crystal 2 is rapidly cooled.
- the low temperature drying gas 7 is stored in the gas storage device 9.
- the low-temperature drying gas 7 is, for example, nitrogen or carbon dioxide. The cost of nitrogen and carbon dioxide is lower, the cooling effect is better, and the temperature of the low-temperature drying gas 7 can be selected to be selected in a wide range.
- the liquid crystal head 3 and the gas cooling device 6 are fixed together on the mouth-shaped frame 5, the frame 5 drives the liquid crystal head 3 and the gas cooling device 6 to move synchronously, and the liquid crystal head 3 and the gas cooling device 6 are along the liquid crystal.
- the moving direction of the head and the gas cooling device itself is fixed to both ends of the frame 5, ensuring that the gas cooling device 6 cools the liquid crystal 2 in a timely manner.
- a heat insulating baffle 8 is disposed between the liquid crystal head 3 and the gas cooling device 6.
- the heat insulating baffle 8 is disposed in a direction perpendicular to the movement track of the liquid crystal head 3 and the gas cooling device 6, and can block low temperature drying.
- the action of the gas 7 avoids the influence of the low-temperature drying gas 7 on the temperature of the liquid crystal 2 in the liquid crystal head 3, and ensures the coating property of the liquid crystal 2.
- the heat shield baffle 8 is fixed to the frame 5 in a direction perpendicular to the movement of the frame 5.
- the cooling device 6 is disposed closer to the heat insulating baffle than the liquid crystal head 3 8;
- the heat insulating baffle 8 is disposed adjacent to the gas cooling device 6.
- the function of blocking the low-temperature drying gas 7 can be better.
- the bottom edge of the heat insulating baffle 8 is higher than the nozzle 4 of the liquid crystal head 3, preventing the heat insulating baffle 8 from contacting the liquid crystal 2 on the surface of the substrate 1.
- the working principle of the liquid crystal coating apparatus of the embodiment of the present invention is that the liquid crystal head 3 ejects liquid crystal to apply the liquid crystal 2 on the substrate 1, and the gas cooling device 6 moves along the movement track of the liquid crystal head 3 and passes through the slit type.
- the gas port 62 ejects a high-purity low-temperature drying gas 7 (such as nitrogen or carbon dioxide) onto the liquid crystal 2 coated on the substrate 1, causing the temperature of the liquid crystal 2 to rapidly decrease, and the fluidity of the liquid crystal 2 is rapidly lowered and viscous at a low temperature.
- the coefficient is significantly increased to effectively prevent its diffusion from contact with the sealant.
- the embodiment of the present invention further provides a liquid crystal coating method using the liquid crystal coating device as described above, and the schematic diagram of the liquid crystal coating device in use is as shown in FIG. 2 .
- the liquid crystal coating method provided by the embodiment of the present invention includes:
- the liquid crystal head 3 is uniformly sprayed onto the substrate 1 to set a pattern and a quantity of liquid crystal 2;
- the gas cooling device 6 cools the liquid crystal 2 on the substrate 1 with a high-purity low-temperature drying gas 7 to cool the liquid crystal 2, thereby reducing the fluidity of the liquid crystal 2 and improving the viscosity.
- the lag coefficient reduces the diffusion speed of the liquid crystal 2;
- a frame sealant is disposed in a peripheral region of the substrate 1, and the sealant is thermally cured to gradually increase the liquidity of the liquid crystal 2 to restore fluidity, fill the entire substrate 1, improve the quality of the liquid crystal 2 coating, and achieve a uniform cell thickness.
- step S2 the gas cooling device 6 discharges the low-temperature drying gas 7 to the substrate 1 through the slit type gas outlet 62, and cools the liquid crystal 2 by the low-temperature drying gas 7, thereby avoiding contamination of the liquid crystal 2.
- the low-temperature drying gas 7 is nitrogen or carbon dioxide, and the cost of nitrogen and carbon dioxide is low, and the cooling effect is good.
- the liquid crystal coating method provided by the embodiment of the invention can effectively solve the pollution problem caused by the excessive diffusion of the liquid crystal without changing the design of the product, is easy to realize and does not affect the process progress, can improve the productivity, and has the coating method. It is not limited by the size of the product and can be widely applied.
Abstract
Description
Claims (14)
- 一种液晶涂覆装置,包括液晶喷头和气体冷却装置,沿着所述液晶喷头的运动轨迹所述气体冷却装置位于所述液晶喷头的后方,并且所述气体冷却装置沿所述液晶喷头的运动轨迹运动。
- 如权利要求1所述的液晶涂覆装置,其中,所述气体冷却装置包括气路系统和喷气腔体,所述喷气腔体通过所述气路系统与储气装置连通。
- 如权利要求2所述的液晶涂覆装置,其中,所述气路系统上设有控制气体流量的流量阀。
- 如权利要求2所述的液晶涂覆装置,其中,所述喷气腔体的底部设有狭缝式出气口。
- 如权利要求2所述的液晶涂覆装置,其中,所述喷气腔体用于喷射低温干燥气体。
- 如权利要求5所述的液晶涂覆装置,其中,所述低温干燥气体为氮气或者二氧化碳。
- 如权利要求1所述的液晶涂覆装置,还包括口字型机架,所述机架带动所述液晶喷头和气体冷却装置同步运动,所述液晶喷头和气体冷却装置沿其运动方向固定于所述机架的两端。
- 如权利要求1所述的液晶涂覆装置,还包括设置在所述液晶喷头和气体冷却之间的隔热挡板,所述隔热挡板沿垂直于液晶喷头和气体冷却装置运动轨迹的方向设置。
- 如权利要求8所述的液晶涂覆装置,其中,与所述液晶喷头相比,所述冷却装置设置为更靠近所述隔热挡板。
- 如权利要求8所述的液晶涂覆装置,其中,所述液晶喷头的底部设置有喷嘴,所述隔热挡板的底边高于所述液晶喷头的喷嘴。
- 一种液晶涂覆方法,包括:S1、通过液晶喷头向基板上喷涂设定图案的液晶;以及S2、喷涂所述液晶的同时,气体冷却装置沿着所述液晶喷头的轨迹对液晶进行降温,降低所述液晶的流动性。
- 根据权利要求11所述的液晶涂覆方法,其中,在所述基板的周边区域设置有封框胶,并且所述方法包括:对封框胶进行热固化处理,同时使液晶逐渐升温恢复流动性。
- 如权利要求11所述的液晶涂覆方法,其中,在所述步骤S2中,所述气体冷却装置通过狭缝式出气口向所述基板喷出低温干燥气体。
- 如权利要求13所述的液晶涂覆方法,其中,所述低温干燥气体为氮气或者二氧化碳。
Priority Applications (1)
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US15/513,182 US10268085B2 (en) | 2016-01-19 | 2016-07-15 | Liquid crystal coating apparatus and liquid crystal coating method |
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CN201610034957.7A CN105487302B (zh) | 2016-01-19 | 2016-01-19 | 一种液晶涂覆装置及方法 |
CN201610034957.7 | 2016-01-19 |
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CN105487302B (zh) | 2016-01-19 | 2017-11-24 | 京东方科技集团股份有限公司 | 一种液晶涂覆装置及方法 |
CN106707631A (zh) * | 2017-01-23 | 2017-05-24 | 京东方科技集团股份有限公司 | 一种封框胶涂覆装置及涂覆方法 |
CN110262103B (zh) * | 2019-05-06 | 2021-10-01 | 惠科股份有限公司 | 显示模组的制作方法和装置 |
JP7312603B2 (ja) * | 2019-05-10 | 2023-07-21 | 東京エレクトロン株式会社 | 塗布膜形成方法及び塗布膜形成装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002365650A (ja) * | 2001-06-05 | 2002-12-18 | Fujitsu Ltd | 液晶表示パネルの製造方法 |
CN1572379A (zh) * | 2003-06-18 | 2005-02-02 | 精工爱普生株式会社 | 液状体的涂布装置和方法、液晶装置及其制造方法、电子设备 |
CN1699058A (zh) * | 2004-05-21 | 2005-11-23 | 株式会社半导体能源研究所 | 半导体装置的制造设备以及图案成形方法 |
CN201429756Y (zh) * | 2009-07-09 | 2010-03-24 | 北京京东方光电科技有限公司 | 液晶显示面板组装设备 |
CN102253539A (zh) * | 2011-06-08 | 2011-11-23 | 友达光电股份有限公司 | 液晶填充装置 |
CN103529582A (zh) * | 2013-10-21 | 2014-01-22 | 合肥京东方光电科技有限公司 | 一种控制液晶扩散速度的方法、系统及压盒设备 |
US20150020852A1 (en) * | 2013-07-16 | 2015-01-22 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus and substrate processing method |
CN105487302A (zh) * | 2016-01-19 | 2016-04-13 | 京东方科技集团股份有限公司 | 一种液晶涂覆装置及方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100560094B1 (ko) * | 2002-11-11 | 2006-03-10 | 시바우라 메카트로닉스 가부시키가이샤 | 기판의 조립 방법, 기판의 조립 장치, 액상 물질의 적하방법 및 액상 물질의 적하 장치 |
TW200739710A (en) * | 2006-04-11 | 2007-10-16 | Dainippon Screen Mfg | Substrate processing method and substrate processing apparatus |
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2016
- 2016-01-19 CN CN201610034957.7A patent/CN105487302B/zh active Active
- 2016-07-15 US US15/513,182 patent/US10268085B2/en active Active
- 2016-07-15 WO PCT/CN2016/090093 patent/WO2017124711A1/zh active Application Filing
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002365650A (ja) * | 2001-06-05 | 2002-12-18 | Fujitsu Ltd | 液晶表示パネルの製造方法 |
CN1572379A (zh) * | 2003-06-18 | 2005-02-02 | 精工爱普生株式会社 | 液状体的涂布装置和方法、液晶装置及其制造方法、电子设备 |
CN1699058A (zh) * | 2004-05-21 | 2005-11-23 | 株式会社半导体能源研究所 | 半导体装置的制造设备以及图案成形方法 |
CN201429756Y (zh) * | 2009-07-09 | 2010-03-24 | 北京京东方光电科技有限公司 | 液晶显示面板组装设备 |
CN102253539A (zh) * | 2011-06-08 | 2011-11-23 | 友达光电股份有限公司 | 液晶填充装置 |
US20150020852A1 (en) * | 2013-07-16 | 2015-01-22 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus and substrate processing method |
CN103529582A (zh) * | 2013-10-21 | 2014-01-22 | 合肥京东方光电科技有限公司 | 一种控制液晶扩散速度的方法、系统及压盒设备 |
CN105487302A (zh) * | 2016-01-19 | 2016-04-13 | 京东方科技集团股份有限公司 | 一种液晶涂覆装置及方法 |
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CN105487302A (zh) | 2016-04-13 |
CN105487302B (zh) | 2017-11-24 |
US20180039112A1 (en) | 2018-02-08 |
US10268085B2 (en) | 2019-04-23 |
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