WO2017104285A1 - ウェーハ研磨方法および研磨装置 - Google Patents
ウェーハ研磨方法および研磨装置 Download PDFInfo
- Publication number
- WO2017104285A1 WO2017104285A1 PCT/JP2016/082765 JP2016082765W WO2017104285A1 WO 2017104285 A1 WO2017104285 A1 WO 2017104285A1 JP 2016082765 W JP2016082765 W JP 2016082765W WO 2017104285 A1 WO2017104285 A1 WO 2017104285A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- polishing
- wafer
- value
- pressure
- pressure head
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
- B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/015—Temperature control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/14—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
Abstract
Description
10 回転定盤
11 回転定盤の回転機構
11a モータ
11b 電流測定回路
12 研磨パッド
13 加圧ヘッド
14 加圧ヘッドの加圧・回転機構
15 スラリー供給機構
16 放射温度計
17 制御部
F モータの負荷電流値
T 研磨パッドの表面温度
Claims (10)
- 研磨パッドが貼り付けられた回転定盤上にスラリーを供給し且つ前記研磨パッド上のウェーハを加圧ヘッドで加圧保持しながら前記回転定盤および前記加圧ヘッドを回転させて前記ウェーハの片面を研磨するウェーハ研磨方法であって、
前記回転定盤を回転駆動するモータの負荷電流値Fと前記ウェーハ研磨中における前記研磨パッドの表面温度TとをモニタリングしてF/T値を算出し、前記F/T値に基づいて前記回転定盤の回転速度および前記加圧ヘッドの研磨圧力の少なくとも一方を制御することを特徴とするウェーハ研磨方法。 - 前記F/T値の増加に合わせて前記回転定盤の回転速度を大きくする、請求項1に記載のウェーハ研磨方法。
- 前記F/T値の増加に合わせて前記加圧ヘッドの研磨圧力を小さくする、請求項1または2に記載のウェーハ研磨方法。
- 前記加圧ヘッドの研磨圧力よりも前記回転定盤の回転速度を優先的に制御する、請求項1ないし3のいずれか一項に記載のウェーハ研磨方法。
- 前バッチのウェーハ加工工程で測定した前記F/T値に基づいて次バッチ以降のウェーハ加工工程における前記回転定盤の回転速度または前記加圧ヘッドの研磨圧力を設定する、請求項1ないし4のいずれか一項に記載のウェーハ研磨方法。
- 研磨パッドが貼り付けられた回転定盤上にスラリーを供給し且つ前記研磨パッド上のウェーハを加圧ヘッドで加圧保持しながら前記回転定盤および前記加圧ヘッドを回転させて前記ウェーハの片面を研磨するウェーハ研磨装置であって、
前記回転定盤を回転駆動するモータの負荷電流値Fを測定する電流測定回路と、
前記研磨パッドの表面温度Tを測定する温度計と、
前記負荷電流値Fおよび前記表面温度TからF/T値を算出し、前記F/T値に基づいて前記回転定盤の回転速度および前記加圧ヘッドの研磨圧力の少なくとも一方を制御する制御部とを備えることを特徴とするウェーハ研磨装置。 - 前記制御部は、前記F/T値の増加に合わせて前記回転定盤の回転速度を大きくする、請求項6に記載のウェーハ研磨装置。
- 前記制御部は、前記F/T値の増加に合わせて前記加圧ヘッドの研磨圧力を小さくする、請求項6または7に記載のウェーハ研磨装置。
- 前記制御部は、前記加圧ヘッドの研磨圧力よりも前記回転定盤の回転速度を優先的に制御する、請求項6ないし8のいずれか一項に記載のウェーハ研磨装置。
- 前記制御部は、前バッチのウェーハ加工工程で測定した前記F/T値に基づいて次バッチ以降のウェーハ加工工程における前記回転定盤の回転速度または前記加圧ヘッドの研磨圧力を設定する、請求項6ないし9のいずれか一項に記載のウェーハ研磨装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020187016076A KR102075480B1 (ko) | 2015-12-18 | 2016-11-04 | 웨이퍼 연마 방법 및 연마 장치 |
CN201680074228.2A CN108369906B (zh) | 2015-12-18 | 2016-11-04 | 晶圆抛光方法及抛光装置 |
US16/062,433 US10744616B2 (en) | 2015-12-18 | 2016-11-04 | Wafer polishing method and apparatus |
DE112016005815.2T DE112016005815B4 (de) | 2015-12-18 | 2016-11-04 | Waferpolierverfahren und -vorrichtung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015247341A JP6406238B2 (ja) | 2015-12-18 | 2015-12-18 | ウェーハ研磨方法および研磨装置 |
JP2015-247341 | 2015-12-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2017104285A1 true WO2017104285A1 (ja) | 2017-06-22 |
Family
ID=59056040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2016/082765 WO2017104285A1 (ja) | 2015-12-18 | 2016-11-04 | ウェーハ研磨方法および研磨装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10744616B2 (ja) |
JP (1) | JP6406238B2 (ja) |
KR (1) | KR102075480B1 (ja) |
CN (1) | CN108369906B (ja) |
DE (1) | DE112016005815B4 (ja) |
TW (1) | TWI614802B (ja) |
WO (1) | WO2017104285A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7341223B2 (ja) | 2018-09-10 | 2023-09-08 | グローバルウェーハズ カンパニー リミテッド | パッド-パッド変動のために調整を行う半導体基板の研磨方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109904094B (zh) * | 2019-01-17 | 2021-02-19 | 安徽华顺半导体发展有限公司 | 一种多晶硅铸锭硅片清洗设备 |
JP7081544B2 (ja) * | 2019-03-22 | 2022-06-07 | 株式会社Sumco | ワークの両面研磨方法及びワークの両面研磨装置 |
JP7306234B2 (ja) * | 2019-11-19 | 2023-07-11 | 株式会社Sumco | ウェーハの研磨方法及びシリコンウェーハ |
JP7264039B2 (ja) * | 2019-12-19 | 2023-04-25 | 株式会社Sumco | 研磨ヘッド、化学的機械的研磨装置、および、化学的機械的研磨方法 |
CN111761419B (zh) * | 2020-06-11 | 2021-10-15 | 上海中欣晶圆半导体科技有限公司 | 用于修复晶圆边缘损伤的胶带研磨工艺 |
WO2023054562A1 (ja) | 2021-09-30 | 2023-04-06 | 三桜工業株式会社 | 研磨装置、研磨方法及びプログラム |
CN114290156B (zh) * | 2021-11-30 | 2023-05-09 | 浙江晶盛机电股份有限公司 | 硅片抛光过程中的测厚方法、系统及抛光装置 |
CN115741453B (zh) * | 2022-11-30 | 2024-02-27 | 大连理工大学 | 一种多传感器融合的智能双面研磨机 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004306173A (ja) * | 2003-04-03 | 2004-11-04 | Sharp Corp | 基板研磨装置 |
JP2005342841A (ja) * | 2004-06-03 | 2005-12-15 | Renesas Technology Corp | 研磨装置 |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4450652A (en) * | 1981-09-04 | 1984-05-29 | Monsanto Company | Temperature control for wafer polishing |
JPH07171759A (ja) | 1993-12-20 | 1995-07-11 | Toshiba Mach Co Ltd | ポリッシング定盤の温度制御方法 |
JPH07307317A (ja) | 1994-05-16 | 1995-11-21 | Nippon Steel Corp | 半導体ウェーハ研磨装置 |
JPH0970753A (ja) | 1995-06-28 | 1997-03-18 | Toshiba Corp | 研磨方法及び研磨装置 |
US6191037B1 (en) * | 1998-09-03 | 2001-02-20 | Micron Technology, Inc. | Methods, apparatuses and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes |
US6568989B1 (en) * | 1999-04-01 | 2003-05-27 | Beaver Creek Concepts Inc | Semiconductor wafer finishing control |
US6458013B1 (en) * | 2000-07-31 | 2002-10-01 | Asml Us, Inc. | Method of chemical mechanical polishing |
DE10314212B4 (de) * | 2002-03-29 | 2010-06-02 | Hoya Corp. | Verfahren zur Herstellung eines Maskenrohlings, Verfahren zur Herstellung einer Transfermaske |
JP2004106123A (ja) | 2002-09-19 | 2004-04-08 | Toshiba Corp | 研磨方法、cmp装置及び膜厚測定装置 |
KR101047933B1 (ko) * | 2002-11-27 | 2011-07-11 | 도요 고무 고교 가부시키가이샤 | 연마 패드 및 반도체 장치의 제조 방법 |
JP2005005317A (ja) * | 2003-06-09 | 2005-01-06 | Sumitomo Mitsubishi Silicon Corp | 半導体ウェーハの研磨方法およびその研磨装置 |
KR100506942B1 (ko) * | 2003-09-03 | 2005-08-05 | 삼성전자주식회사 | 화학적 기계적 연마장치 |
US20070205112A1 (en) * | 2004-08-27 | 2007-09-06 | Masako Kodera | Polishing apparatus and polishing method |
JP4597634B2 (ja) * | 2004-11-01 | 2010-12-15 | 株式会社荏原製作所 | トップリング、基板の研磨装置及び研磨方法 |
KR101011788B1 (ko) * | 2004-11-01 | 2011-02-07 | 가부시키가이샤 에바라 세이사꾸쇼 | 톱링, 폴리싱장치 및 폴리싱방법 |
US7371160B1 (en) * | 2006-12-21 | 2008-05-13 | Rohm And Haas Electronic Materials Cmp Holdings Inc. | Elastomer-modified chemical mechanical polishing pad |
JP5245319B2 (ja) * | 2007-08-09 | 2013-07-24 | 富士通株式会社 | 研磨装置及び研磨方法、基板及び電子機器の製造方法 |
US20090287340A1 (en) * | 2008-05-15 | 2009-11-19 | Confluense Llc | In-line effluent analysis method and apparatus for CMP process control |
US20100279435A1 (en) * | 2009-04-30 | 2010-11-04 | Applied Materials, Inc. | Temperature control of chemical mechanical polishing |
US8562849B2 (en) * | 2009-11-30 | 2013-10-22 | Corning Incorporated | Methods and apparatus for edge chamfering of semiconductor wafers using chemical mechanical polishing |
JP5527430B2 (ja) * | 2010-12-27 | 2014-06-18 | 株式会社Sumco | ワークの研磨方法 |
JP5621702B2 (ja) * | 2011-04-26 | 2014-11-12 | 信越半導体株式会社 | 半導体ウェーハ及びその製造方法 |
JP5695963B2 (ja) * | 2011-04-28 | 2015-04-08 | 株式会社荏原製作所 | 研磨方法 |
US10702972B2 (en) * | 2012-05-31 | 2020-07-07 | Ebara Corporation | Polishing apparatus |
CN102799793B (zh) * | 2012-07-27 | 2016-04-27 | 中国科学院微电子研究所 | 化学机械研磨去除率计算的方法及设备 |
JP2014124730A (ja) * | 2012-12-27 | 2014-07-07 | Ebara Corp | 基板研磨装置、熱伝達部材、および、研磨パッドの表面温度制御方法 |
WO2014149330A1 (en) * | 2013-03-15 | 2014-09-25 | Applied Materials, Inc. | Dynamic residue clearing control with in-situ profile control (ispc) |
CN104678897B (zh) * | 2015-01-27 | 2017-10-27 | 合肥京东方光电科技有限公司 | 监控装置及方法、显示基板切割及磨边装置 |
CN104742002B (zh) * | 2015-03-19 | 2017-03-08 | 华南理工大学 | 一种短脉冲电熔排屑冷却的智能磨削装置 |
-
2015
- 2015-12-18 JP JP2015247341A patent/JP6406238B2/ja active Active
-
2016
- 2016-11-04 WO PCT/JP2016/082765 patent/WO2017104285A1/ja active Application Filing
- 2016-11-04 CN CN201680074228.2A patent/CN108369906B/zh active Active
- 2016-11-04 KR KR1020187016076A patent/KR102075480B1/ko active IP Right Grant
- 2016-11-04 US US16/062,433 patent/US10744616B2/en active Active
- 2016-11-04 DE DE112016005815.2T patent/DE112016005815B4/de active Active
- 2016-11-07 TW TW105136098A patent/TWI614802B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004306173A (ja) * | 2003-04-03 | 2004-11-04 | Sharp Corp | 基板研磨装置 |
JP2005342841A (ja) * | 2004-06-03 | 2005-12-15 | Renesas Technology Corp | 研磨装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7341223B2 (ja) | 2018-09-10 | 2023-09-08 | グローバルウェーハズ カンパニー リミテッド | パッド-パッド変動のために調整を行う半導体基板の研磨方法 |
Also Published As
Publication number | Publication date |
---|---|
US10744616B2 (en) | 2020-08-18 |
JP6406238B2 (ja) | 2018-10-17 |
KR20180075669A (ko) | 2018-07-04 |
TW201730951A (zh) | 2017-09-01 |
DE112016005815T5 (de) | 2018-09-06 |
KR102075480B1 (ko) | 2020-02-10 |
CN108369906A (zh) | 2018-08-03 |
DE112016005815B4 (de) | 2023-11-30 |
JP2017112302A (ja) | 2017-06-22 |
CN108369906B (zh) | 2022-07-05 |
US20180369985A1 (en) | 2018-12-27 |
TWI614802B (zh) | 2018-02-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6406238B2 (ja) | ウェーハ研磨方法および研磨装置 | |
JP5983422B2 (ja) | ガラス基板の研磨方法及び製造方法 | |
JP4921430B2 (ja) | 半導体ウェハを研削する方法 | |
US20100203806A1 (en) | Semiconductor manufacturing apparatus | |
KR20180067657A (ko) | 웨이퍼 연마 방법 | |
JP2018012166A (ja) | 研磨装置 | |
KR20160103912A (ko) | 반도체 웨이퍼의 매엽식 편면 연마 방법 및 반도체 웨이퍼의 매엽식 편면 연마 장치 | |
JP5028354B2 (ja) | ウェーハの研磨方法 | |
JP6394569B2 (ja) | ウェーハの研磨方法及び研磨装置 | |
JP5716612B2 (ja) | シリコンウェーハの研磨方法及び研磨装置 | |
JP2019507027A (ja) | ポリッシング測定装置およびその研磨時間の制御方法、ならびにそれを含んだポリッシング制御システム | |
JP6575463B2 (ja) | ウェーハの研磨方法 | |
JP6743746B2 (ja) | ウェーハの両面研磨装置および両面研磨方法 | |
JP6432497B2 (ja) | 研磨方法 | |
JP5699783B2 (ja) | ワークの研磨方法及び研磨装置 | |
JP7159861B2 (ja) | 両頭研削方法 | |
JP5570065B2 (ja) | 半導体ウエハの研磨方法及び半導体ウエハ研磨装置 | |
JP2002222784A (ja) | 平面研磨方法及び平面研磨装置 | |
TWI467645B (zh) | 化學機械研磨方法與系統 | |
JP2021091054A (ja) | フェーシング装置及びフェーシング方法 | |
KR101259315B1 (ko) | 반도체 웨이퍼의 연마 방법 및 반도체 웨이퍼의 연마 장치 | |
KR101678992B1 (ko) | 멀티-헤드를 갖는 cmp 장비 | |
TWI568533B (zh) | 監控硏磨製程的方法及其硏磨系統 | |
JP2009255217A (ja) | 消耗材の評価方法 | |
JP2006312212A (ja) | 研削方法及び研削装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 16875270 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 20187016076 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 112016005815 Country of ref document: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 16875270 Country of ref document: EP Kind code of ref document: A1 |