WO2017090215A1 - Procédé et appareil permettant d'éliminer l'humidité d'un composant à dépôt d'humidité - Google Patents

Procédé et appareil permettant d'éliminer l'humidité d'un composant à dépôt d'humidité Download PDF

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Publication number
WO2017090215A1
WO2017090215A1 PCT/JP2016/002106 JP2016002106W WO2017090215A1 WO 2017090215 A1 WO2017090215 A1 WO 2017090215A1 JP 2016002106 W JP2016002106 W JP 2016002106W WO 2017090215 A1 WO2017090215 A1 WO 2017090215A1
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Prior art keywords
moisture
medium liquid
adhering
heat medium
water
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PCT/JP2016/002106
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English (en)
Japanese (ja)
Inventor
正英 内野
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ジャパン・フィールド株式会社
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Publication of WO2017090215A1 publication Critical patent/WO2017090215A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/14—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects using gases or vapours other than air or steam, e.g. inert gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/02—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air
    • F26B3/04—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air the gas or vapour circulating over or surrounding the materials or objects to be dried

Definitions

  • the present invention relates to a moisture removal method and apparatus for removing moisture adhered to an object to be cleaned, a part after polishing, an object to be plated after plating, or the like.
  • Patent Documents 1 and 2 Conventionally, methods for removing moisture from moisture-adhering parts as shown in Patent Documents 1 and 2 have been known.
  • the inventions described in Patent Documents 1 and 2 are intended to evaporate the moisture adhering to the moisture-adhering component by immersing the moisture-adhering component in a high boiling point solvent heated to the boiling point of water or higher. It is.
  • the moisture-adhering component since the moisture-adhering component is immersed in the high boiling point solvent, the amount of the high boiling point solvent used is large. Therefore, the cost is high and the load on the environment is large. In addition, even if the water adhering to the surface of the moisture adhering component is evaporated with a high boiling point solvent of 100 ° C. or higher, the high boiling point solvent adhering to the surface of the moisture adhering component must be removed thereafter, and an apparatus therefor This requires a lot of work and cost. Further, since the high boiling point solvent is contaminated by the immersion of the moisture-adhering component, there is a concern that the dirt adheres again to the moisture-adhering component when the contamination becomes severe.
  • the present invention is intended to solve the above-described problems, and reduces the amount of heat medium liquid used to the minimum necessary to reduce the cost and environmental load. In addition to moisture adhering to the liquid, it is also possible to remove the heat medium liquid.
  • the present invention provides a first invention in which a moisture-adhering component having moisture adhering thereto is disposed on the surface of the moisture-adhering component by placing it in a steam atmosphere of a heating medium liquid having a boiling point of 100 ° C. or higher. To condense the vapor of the heat transfer medium. Then, the moisture adhering to the moisture adhering component is allowed to flow down together with the condensed heat medium liquid, and the moisture adhering component is continued in the steam atmosphere until the moisture adhering to the moisture adhering component evaporates due to the vapor temperature of the heat medium liquid. Deploy.
  • each part had a residual water content of less than 1.0 g, and the water adhering to the part was almost removed. From this result, it became clear that the moisture from the moisture-adhering component can be reliably removed by the method of the first invention of the present application.
  • the second invention is an apparatus that embodies the method of the first invention, wherein a steam generator for supplying steam of a heat medium liquid having a boiling point of 100 ° C. or higher, and a heat medium liquid on a water adhering part to which water has adhered.
  • the vapor of the heat medium liquid is condensed on the surface of the moisture adhering part by contacting the vapor, and the water adhering to the moisture adhering part flows down together with the condensed heat medium liquid, and the moisture adhering part depending on the vapor temperature of the heat medium liquid.
  • the heat medium liquid is a non-aqueous heat medium liquid having a boiling point of 100 ° C. or higher, and is any one of a fluorinated solvent, a chlorinated solvent, a terpene solvent, a petroleum solvent, a silicone solvent, a fully fluorinated liquid, or A mixed solution thereof may be used.
  • the heating medium liquid is a hydrophilic solvent having a boiling point of 100 ° C. or higher, and may be any one of higher alcohols, 3-methyl-3-methoxybutanol, and N-methyl-2-pyrrolidone.
  • the water and the heat medium liquid removed from the moisture adhering parts are separated by a specific gravity difference, a difference in boiling point, or a separation membrane, thereby removing the water and recovering the heat medium liquid and reusing the heat medium liquid. It may be.
  • the evaporation and condensation of the moisture and the heat medium liquid adhering to the moisture adhering component may be performed under atmospheric pressure or reduced pressure.
  • the moisture adhering to the moisture adhering component may be a mixture of impurities, and the impurities may be any of alcohols, surfactants, oils, or a mixture thereof.
  • the moisture adhering component with moisture adhering to it is placed in the vapor atmosphere of the heat transfer fluid having a boiling point of 100 ° C. or more, thereby condensing the vapor of the heat medium liquid on the surface of the moisture adhering component. Since the water adhering to the water adhering parts flows and evaporates together with the condensed heat medium liquid, the amount of heat medium liquid used can be minimized and the burden on the cost and the environment can be reduced. Even if a flammable heat medium liquid is used, the amount of fire is low because the amount is small.
  • the water adhering to the moisture adhering part and the heat medium liquid are evaporated to remove the moisture adhering part. Since it is self-heated drying, it is possible to remove the heat medium liquid at the same time as removing water adhering to the moisture adhering parts in a series of operations without requiring any other special equipment. it can. Therefore, it is possible to improve the working efficiency at the time of removing moisture and to reduce the cost.
  • Example 1 which shows the 1st, 2nd invention of this application.
  • FIG. 1 the conceptual diagram which shows the state which mounted the moisture adhesion components and the cylinder on the coating board.
  • Example 2 the conceptual diagram which shows the state which mounted the moisture adhesion components and the cylinder on the coating
  • Example 3 the conceptual diagram which shows the state which mounted the moisture adhesion components and the cylinder in the coating
  • Embodiments 1 and 2 of the present invention will be described with reference to FIGS. 1 and 2.
  • (1) is a treatment tank, the interior of which is divided vertically by a cover plate (2), and the bottom (3) side Is the steam generation section (4), and the upper (5) side is the moisture removal section (6) and the drying section (7).
  • the steam generating section (4) contains the heat medium liquid (8), and the heat medium liquid (8) is heated by the heater (10) provided in the steam generating section (4) to generate the steam (11). Can be generated.
  • the heating medium liquid (8) has a boiling point of 100 ° C.
  • the coating plate (2) has an outlet (8) for flowing the steam (11) of the heat medium liquid (8) generated in the steam generation unit (4) to the moisture removal unit (6) side of the coating plate (2) ( 12) is provided.
  • a cooling coil (13) is provided on the inner periphery of the upper part (5) of the treatment tank (1).
  • the cylindrical body (14) is arranged on the upper surface (17) of the cover plate (2) as shown in FIG.
  • the cylindrical body (14) is capable of covering the target moisture adhering part (15), and is disposed at a position communicating with the outlet (12) to allow the steam flowing out from the outlet (12).
  • the steam (11) is allowed to contact the entire surface of the moisture adhering component (15) disposed in the cylinder (14) by circulating (11).
  • this cylinder (14) is installed on the upper surface (17) of the cover plate (2) in a replaceable manner, but other different embodiments are not limited thereto,
  • the cylinder (14) may be fixedly installed on the upper surface (17) of the cover plate (2).
  • a water separator (16) is connected to the treatment tank (1), so that the condensate staying in the vicinity of the covering plate (2) can be introduced into the water separator (16).
  • a method for removing moisture from the moisture adhering part (15) in the above-described configuration will be described below.
  • the heating medium liquid (8) in the steam generating section (4) is heated to 100 ° C. or higher by the heater (10) to generate the steam (11).
  • the steam (11) flows out from the outlet (12) provided in the cover plate (2) to the moisture removing section (6).
  • the cylinder (14) by disposing the cylinder (14) on the outer periphery of the outlet (12), the vapor (11) of the heat medium liquid (8) is raised inside the cylinder (14) and stored inside. Steam (11) can be supplied to the moisture adhering part (15).
  • the vapor atmosphere can be made the minimum necessary volume corresponding to the moisture adhering component (15), so that wasteful vapor (11) discharge can be minimized. It becomes possible.
  • the moisture adhering component (15) is placed in the cylinder (14).
  • the moisture adhering part (15) in the cylinder (14) is the vapor of the heat medium liquid (8). It will be in the state arrange
  • the vapor (11) of the heat medium liquid (8) condenses on the surface of the moisture adhering component (15) lower than the temperature of the vapor (11), The moisture adhering to the moisture adhering component (15) flows down together with the condensed heat medium liquid (8).
  • the surface of the moisture adhering component (15) is heated by the vapor (11) of the heat medium liquid (8), the moisture adhering to the moisture adhering component (15) is heated by the heat of the surface of the moisture adhering component (15). Evaporate.
  • the present embodiment enables moisture to be removed by the steam (11) of the heat medium liquid (8), the amount of the heat medium liquid (8) is minimized and the cost and environment are reduced. In addition to reducing the load on the flammable material, the amount of fire can be kept low because the amount is small even when the flammable heat medium liquid (8) is used. In addition, since the moisture is removed only with the steam (11) of the heat transfer medium liquid (8), even when the heat transfer medium liquid (8) with a large amount of impurities is used, the water is removed with the high-purity steam (11). Work can be performed, and a high-quality finish can be achieved without reattachment of dirt.
  • the heat medium liquid (8) can be removed at the same time. Therefore, no special procedure or apparatus for removing the heat medium liquid (8) is required, so that it is possible to improve the work efficiency during the water removal work and to reduce the cost. it can.
  • the heat medium liquid (8) condensed on the surface of the moisture adhering part (15) and the moisture of the water adhering part (15) flowing down together with the heat medium liquid (8) are retained in the cover plate (2). And introduced into the water separator (16). Similarly, the moisture evaporated from the moisture adhering component (15) and the vapor (11) of the heat medium liquid (8) as described above are cooled and condensed by the cooling coil (13), and finally the coated plate (2). Is collected in the vicinity of the water and introduced into the water separator (16). The mixed liquid of the heat medium liquid (8) and moisture is separated into water and the heat medium liquid (8) by the specific gravity in the water separator (16).
  • the separated heat medium liquid (8) is again stored in the steam generation section (4) in the processing tank (1) and reused. As described above, since the heat medium liquid (8) can be reused, the load on the environment can be reduced and the cost for using the heat medium liquid (8) can be reduced.
  • the water separation is performed based on the difference in specific gravity.
  • the separation is not limited to this, and the separation may be performed using a boiling point difference or a separation membrane.
  • the moisture removal of the moisture adhering component (15) is performed under atmospheric pressure, but the present invention is not limited to this in other different embodiments, and may be performed under reduced pressure. good.
  • the moisture adhering to the moisture adhering component (15) may be one in which impurities such as alcohols, surfactants, oils, or mixtures thereof are mixed.
  • the condensate obtained by condensing the heat medium liquid (8) and the water vapor (11) generated during the water removal operation by the cooling coil (13) is separated from the treatment tank (1).
  • the heat separator liquid (8) and the water vapor (11) were supplied to the cooling tank (20) provided continuously to the processing tank (1). It can be introduced.
  • a cooling bath (20) is formed separately from the processing bath (1), and the cooling bath (20) communicates with the processing bath (1).
  • the cover plate (2) is connected to a communication port (21) continuously formed in the horizontal direction.
  • the cooling pipe (22) is provided in the inner periphery of the cooling tank (20), and the heat medium liquid (8) and moisture vapor (11) generated on the cover plate (2) of the processing tank (1). Is introduced into the cooling tank (20) through the communication port (21), cooled and condensed by the cooling pipe (22), and stored in the cooling tank (20).
  • the cooling coil (13) is disposed on the inner periphery of the processing tank (1) on the top plate (23) side.
  • a method for removing moisture from the moisture-adhering component (15) of the second embodiment will be described below in the configuration as described above.
  • the heating medium liquid (8) in the steam generating section (4) is heated to 100 ° C. or higher by the heater (10) to generate the steam (11).
  • the steam (11) flows out from the outlet (12) provided in the cover plate (2) to the moisture removing section (6).
  • the cylinder (14) by disposing the cylinder (14) on the outer periphery of the outlet (12), the vapor (11) of the heat medium liquid (8) is raised inside the cylinder (14) and stored inside. Steam (11) can be supplied to the moisture adhering part (15).
  • the arrangement of the cylindrical body (14) enables the minimum necessary volume corresponding to the moisture adhering component (15), so that it is possible to minimize the discharge of useless steam (11).
  • the moisture adhering component (15) is placed in the cylinder (14).
  • the moisture adhering part (15) in the cylinder (14) is the vapor of the heat medium liquid (8). It will be in the state arrange
  • the vapor (11) of the heat medium liquid (8) condenses on the surface of the moisture adhering component (15) and adheres to the moisture with the condensed heat medium liquid (8).
  • the water adhering to the component (15) flows downward.
  • the present embodiment enables moisture to be removed by the steam (11) of the heat medium liquid (8), the amount of the heat medium liquid (8) is minimized and the cost and environment are reduced. In addition to reducing the load on the flammable material, the amount of fire can be kept low because the amount is small even when the flammable heat medium liquid (8) is used. In addition, since the moisture is removed only with the steam (11) of the heat transfer medium liquid (8), even when the heat transfer medium liquid (8) with a large amount of impurities is used, the water is removed with the high-purity steam (11). Work can be performed, and a high-quality finish can be achieved without reattachment of dirt.
  • the heat medium liquid (8) can be removed at the same time. Therefore, it is possible to improve the working efficiency at the time of removing moisture and to reduce the cost.
  • the heat medium liquid (8) condensed on the surface of the moisture adhering component (15), the water flowing down together with the heat medium liquid (8), and the heat medium liquid cooled and condensed by the cooling coil (13) The condensate of (8) and moisture accumulates in the vicinity of the cover plate (2) and flows into the cooling tank (20) through the communication port (21), and from the outlet (12) of the cover plate (2). Reflux in the generator (4). Further, the vapor (11) generated on the upper surface (17) of the cover plate (2) is introduced into the cooling tank (20) through the communication port (21) and condensed by the cooling pipe (22), and the condensed liquid is It is stored in the cooling tank (20). And the condensate stored in this cooling tank (20) is recirculated in the said generating part of a processing tank (1) again.
  • the steam generation part (4) formed in the treatment tank (1) is provided, and the heating medium liquid (8) is stored in the steam generation part (4), and the heating medium liquid (8) Is heated by a heater (10) to generate steam (11).
  • the steam generating section (4) is provided in a steam generating tank (30) formed completely separate from the processing tank (1). Yes. A heat medium liquid (8) is accommodated in the steam generating section (4), and the heat medium liquid (8) is heated by the heater (10), thereby generating the steam (11).
  • a cooling tank (31) is connected to the upper part of the steam generation tank (30) via the steam generation tank (30) and a communication path (44), and the steam generation tank (30 ) Can be condensed. That is, a cooling pipe (32) is formed on the inner periphery of the cooling tank (31), and the condensate of the vapor (11) can be retained at the bottom (33) of the cooling tank (31). The condensate staying at the bottom (33) of the cooling tank (31) is recirculated and stored in the steam generation tank (30).
  • a coating plate (2) is provided on the bottom (36) side in the treatment tank (1) as in the first and second embodiments. Further, the bottom (36) side of the cover plate (2) is used as a steam storage unit (34), and the upper (5) side is used as a moisture removing unit (6) and a drying unit (7).
  • the steam storage section (34) communicates with the steam generation section (4) of the steam generation tank (30) through the first pipe (35), and the steam (11) generated in the steam generation section (4). Can be introduced into the steam storage section (34) through the first pipe (35).
  • the reservoir is in communication with the moisture removing unit (6) through the outlet (12) provided in the cover plate (2), the bottom (36) of the steam reservoir (34), and a steam generation tank (
  • the heat medium liquid storage part (37) located at the bottom part (53) in 30) is communicated with the second pipe (38).
  • Other configurations are the same as those of the first and second embodiments.
  • a method for removing moisture from the moisture-adhering component (15) of the third embodiment will be described below in the configuration as described above.
  • the heat medium liquid (8) in the steam generation tank (30) is heated to 100 ° C. or higher by the heater (10) to generate the steam (11).
  • This steam (11) is introduced into the steam storage part (34) of the processing tank (1) through the first pipe (35).
  • the cylindrical body (14) is disposed on the outer periphery of the outlet (12) of the cover plate (2) provided in the treatment tank (1).
  • the steam (11) of the heat medium liquid (8) is started up inside the cylindrical body (14), and the steam (11) can be supplied to the moisture adhering component (15) housed inside.
  • the arrangement of the cylindrical body (14) enables the minimum necessary volume corresponding to the moisture adhering component (15), so that it is possible to minimize the discharge of useless steam (11).
  • a moisture adhering part (15) is placed in the cylinder (14).
  • the moisture adhering part (15) in the cylinder (14) is the vapor of the heat medium liquid (8). It will be in the state arrange
  • the water adhering to the component (15) flows down to the cover plate (2).
  • the surface of the moisture adhering component (15) is heated by the vapor (11) of the heat medium liquid (8), the moisture adhering to the moisture adhering component (15) is heated by the heat of the surface of the moisture adhering component (15). Evaporate.
  • the steam storage part (4) from the steam generation part (4) is closed by closing the valve member (40) of the first pipe (35) communicating the steam generation tank (30) and the treatment tank (1). Stop supplying steam (11) to 34).
  • the vapor pressure of the heat medium liquid (8) in the water removal unit (6) is reduced, and the heat medium liquid (8) evaporates together with the remaining water adhering to the water adhering component (15). Moisture removal work from the part (15) is completed.
  • the present embodiment enables moisture to be removed by the steam (11) of the heat medium liquid (8), the amount of the heat medium liquid (8) is minimized and the cost and environment are reduced. In addition to reducing the load on the flammable material, the amount of fire can be kept low because the amount is small even when the flammable heat medium liquid (8) is used. In addition, since the moisture is removed only with the steam (11) of the heat transfer medium liquid (8), even when the heat transfer medium liquid (8) with a large amount of impurities is used, the water is removed with the high-purity steam (11). Work can be performed, and a high-quality finish can be achieved without reattachment of dirt.
  • the heat medium liquid (8) can be removed at the same time. Therefore, it is possible to improve the working efficiency at the time of removing moisture and to reduce the cost.
  • the heat medium liquid (8) condensed on the surface of the moisture adhering part (15), and the water flowing down to the covering plate (2) together with the heat medium liquid (8) accumulates in the covering plate (2) and flows out. It is introduced from (12) into the steam reservoir (34). Similarly, the moisture evaporated from the moisture adhering component (15) and the vapor (11) of the heat medium liquid (8) as described above are cooled and condensed by the cooling coil (13), and finally the coated plate (2). And is introduced into the steam reservoir (34) from the outlet (12). The mixed liquid of the heat medium liquid (8) and moisture is separated into water and the heat medium liquid (8) by the specific gravity in the water separator (16) provided in the second pipe (38). .
  • the separated heat medium liquid (8) is again stored in the heat medium liquid storage part (37) in the steam generation tank (30) and reused. As described above, since the heat medium liquid (8) can be reused, the load on the environment can be reduced and the cost for using the heat medium liquid (8) can be reduced.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microbiology (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

[Problème] L'invention a pour objet de réduire les coûts et l'impact environnemental en maintenant au minimum nécessaire la quantité d'utilisation de liquide caloporteur, et de permettre l'élimination non seulement de l'humidité déposée sur un composant à dépôt d'humidité mais également du liquide caloporteur en une seule opération. [Solution] Selon l'invention, un composant à dépôt d'humidité 15, sur lequel de l'humidité est déposée, est disposé dans une atmosphère de vapeur d'un liquide caloporteur 8 dont le point d'ébullition est de 100 °C ou plus afin d'amener la vapeur 11 du liquide caloporteur 8 à se condenser sur la surface du composant à dépôt d'humidité 15, et l'humidité déposée sur le composant à dépôt d'humidité 15 est autorisée à s'écouler vers le bas conjointement avec le liquide caloporteur condensé 8. Une fois que le composant à dépôt d'humidité 15 a été maintenu dans l'atmosphère de vapeur jusqu'à ce que l'humidité déposée sur le composant à dépôt d'humidité 15 se soit évaporée sous l'effet de la température de la vapeur du liquide caloporteur 8, en interrompant l'alimentation de vapeur du liquide caloporteur 8 au composant à dépôt d'humidité 15 ou en disposant le composant à dépôt d'humidité 15 à l'extérieur de l'atmosphère de vapeur, l'humidité et le liquide caloporteur 8 déposé sur le composant à dépôt d'humidité 15 sont évaporés pour permettre au composant à dépôt d'humidité 15 de sécher sous l'effet de sa propre chaleur.
PCT/JP2016/002106 2015-11-26 2016-04-20 Procédé et appareil permettant d'éliminer l'humidité d'un composant à dépôt d'humidité WO2017090215A1 (fr)

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JP2015-230195 2015-11-26
JP2015230195A JP5924850B1 (ja) 2015-11-26 2015-11-26 水分付着部品からの水分除去方法及びその装置

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JPS53141973A (en) * 1977-05-17 1978-12-11 Pagnozzi Vincenzo Wood vacuummdrying frunace and wood drying method
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JPH0669184A (ja) * 1992-08-12 1994-03-11 Hitachi Ltd ベーパ乾燥装置
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