WO2017061594A1 - Appareil d'inspection à rayons x - Google Patents

Appareil d'inspection à rayons x Download PDF

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Publication number
WO2017061594A1
WO2017061594A1 PCT/JP2016/079927 JP2016079927W WO2017061594A1 WO 2017061594 A1 WO2017061594 A1 WO 2017061594A1 JP 2016079927 W JP2016079927 W JP 2016079927W WO 2017061594 A1 WO2017061594 A1 WO 2017061594A1
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WIPO (PCT)
Prior art keywords
detection unit
ray
inspection apparatus
partition wall
ray inspection
Prior art date
Application number
PCT/JP2016/079927
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English (en)
Japanese (ja)
Inventor
慎吾 近藤
Original Assignee
株式会社イシダ
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Filing date
Publication date
Priority claimed from JP2016183163A external-priority patent/JP6755580B2/ja
Application filed by 株式会社イシダ filed Critical 株式会社イシダ
Publication of WO2017061594A1 publication Critical patent/WO2017061594A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter

Definitions

  • This disclosure relates to an X-ray inspection apparatus.
  • Patent Document 1 describes an X-ray inspection apparatus that inspects an article using X-ray transparency. This apparatus accommodates a belt conveyor that conveys articles into an inspection chamber of a casing. A position detection unit that detects whether or not a belt conveyor that shields X-rays is housed in the attachment position is provided in the examination room.
  • This disclosure is intended to provide an X-ray inspection apparatus that can maintain hygiene in the inspection room and can reduce the risk of breakage of the position detection unit.
  • An X-ray inspection apparatus is an X-ray inspection apparatus in which an X-ray generation unit that irradiates X-rays to an examination room is disposed in a housing, and is detachable from the examination room.
  • the second detector is provided in the housing.
  • the relative position between the first detection unit provided in the X-ray shield and the second detection unit provided in the housing is detected, and thus the X-ray shield Can be detected in a non-contact manner at the mounting position in the examination room.
  • the second detection unit of the position detection unit is provided in the housing (that is, outside the examination room)
  • the X-ray shield may be at least partly disposed in the examination room and may be a transport unit that transports articles. Further, the X-ray shield may be a shielding curtain provided on each of the entrance and exit sides of the examination room.
  • the housing may be formed of a non-magnetic material, the first detection unit may be a magnet, and the second detection unit may be a magnetic sensor. By comprising in this way, the position of a 1st detection part can be detected by non-contact.
  • the X-ray inspection apparatus may include a cover member that protects the first detection unit. In this case, since it is possible to avoid the foreign matter directly adhering to the first detection unit, it is possible to maintain hygiene in the examination room and to reduce the risk of breakage of the first detection unit.
  • the X-ray inspection apparatus further includes a support member that is provided on a partition wall that partitions the inspection room and the inside of the housing among the walls constituting the housing, and further supports a shielding curtain in the inspection room. It may be fixed to the support member through a hole formed in the. According to this, the second detection unit is accurately positioned with respect to the first detection unit provided on the shielding curtain. Therefore, it can be accurately detected whether or not the shielding curtain is in the mounting position in the examination room. Further, the positioning and fixing of the second detection unit can be easily performed.
  • the X-ray inspection apparatus may further include a fixing member that fixes the second detection unit and the support member to each other through a hole formed in the partition wall. According to this, a 2nd detection part and a supporting member can be easily fixed to the predetermined position of a partition wall.
  • the end of the support member on the side of the partition wall is provided with a tapered portion that becomes thicker as it approaches the partition wall, and the curtain holding member of the shielding curtain has a notch that fits into the tapered portion. May be. According to this, shakiness of the shielding curtain is suppressed. Accordingly, it is possible to suppress erroneous detection of whether or not the shielding curtain is in the mounting position in the examination room.
  • the support member may be a rod-shaped member having a columnar shape. According to this, for example, when the support member is fixed to the partition wall, the direction of the support member in the circumferential direction can be ignored. For example, when a bolt is used as the fixing member described above, a screw hole into which the bolt is screwed can be easily formed in the support member.
  • FIG. 1 is a perspective view showing an appearance of an X-ray inspection apparatus according to the embodiment.
  • FIG. 2 is a perspective view showing a configuration inside the shield box of the X-ray inspection apparatus according to the embodiment.
  • FIG. 3 is a front view in which the door 3c of the X-ray inspection apparatus shown in FIG. 1 is omitted.
  • FIG. 4 is a cross-sectional view taken along the line IV-IV shown in FIG.
  • FIG. 5 is a perspective view showing the first magnet holding structure of the shielding curtain.
  • FIG. 6 is a perspective view showing a holding structure for the second magnet of the conveyor.
  • FIG. 7 is a perspective view showing a mounting structure of the shielding curtain and the position detection unit.
  • FIG. 8 is a perspective view showing a mounting structure of the shielding curtain and the position detection unit.
  • FIG. 9 is a cross-sectional view showing a part of the mounting structure of the shielding curtain and the position detection unit.
  • FIG. 1 is a perspective view showing an external appearance of the X-ray inspection apparatus 1.
  • FIG. 2 is a perspective view showing a configuration in the shield box 3 of the X-ray inspection apparatus 1.
  • the X-ray inspection apparatus 1 includes a shield box 3, a shielding curtain (an example of an X-ray shielding object) 4, a conveyor (an example of an X-ray shielding object, a transport unit) 5, and an X-ray.
  • An irradiator (X-ray generator) 7, an X-ray line sensor 9 and a monitor 11 are provided.
  • the X-ray inspection apparatus 1 is installed in a production line for an article G such as food, and inspects for the presence of foreign matter contained in the article G.
  • Shield box 3 defines a space inside.
  • a conveyor 5, an X-ray irradiator 7, and an X-ray line sensor 9 are accommodated inside the shield box 3.
  • a pair of openings 3 a are provided on both side surfaces of the shield box 3.
  • a door 3c is provided at the lower front portion of the shield box 3, and the inside of the shield box 3 can be accessed by opening the door 3c.
  • the shield box 3 is made of stainless steel, for example.
  • the shielding curtain 4 is provided in each of the pair of openings 3a.
  • the shielding curtain 4 is made of rubber containing lead or tungsten, for example.
  • the shielding curtain 4 prevents X-rays from leaking out of the shield box 3 through the openings 3a.
  • the conveyor 5 is disposed in the shield box 3 so as to be spanned between the pair of openings 3a.
  • the conveyor 5 conveys the articles G placed on the belt 5a by rotating the endless belt 5a by a conveyor motor (not shown).
  • the article G is carried into the shield box 3 through the one opening 3a and carried out of the shield box 3 through the other opening 3a. That is, the pair of openings 3a serve as a carry-in port and a carry-out port for the article G.
  • the conveyor 5 by arranging the conveyor 5 so as to be spanned between the pair of openings 3 a, leakage of X-rays outside the shield box 3 is suppressed.
  • the X-ray irradiator 7 is disposed in the shield box 3 so as to be positioned above the belt 5a.
  • the X-ray irradiator 7 emits X-rays so as to cross the belt 5a along the width direction of the belt 5a. Thereby, the X-ray irradiator 7 irradiates the article G conveyed by the conveyor 5 with X-rays.
  • the X-ray line sensor 9 is disposed in the shield box 3 so as to be positioned below the belt 5a.
  • the X-ray line sensor 9 has a plurality of pixel sensors 9a arranged in a line along the width direction of the belt 5a. Thereby, the X-ray line sensor 9 detects X-rays that have passed through the article G conveyed by the conveyor 5.
  • the X-ray irradiator 7 and the X-ray line sensor 9 function as an X-ray inspection unit that inspects an article using the X-ray transparency.
  • the monitor 11 is a liquid crystal display, for example, and displays various information such as processed images.
  • the monitor 11 has a touch panel function and functions as an operation interface that receives input of various conditions by an operator.
  • the monitor 11 displays an operation screen and accepts operator instructions such as X-ray irradiation start, X-ray verification end, conveyor 5 drive start, conveyor 5 drive end, and inspection threshold setting.
  • FIG. 3 is a front view of the X-ray inspection apparatus 1 with the door 3c omitted.
  • FIG. 4 is a cross-sectional view taken along the line IV-IV shown in FIG.
  • the shield box 3 includes an examination room T ⁇ b> 1 therein.
  • the examination room T1 is a box-like space defined inside the shield box 3 and can be accessed by opening the door 3c shown in FIG.
  • the inspection room T1 is defined by the door 3c, both side portions and the bottom portion 3d of the shield box 3, and partition walls (first partition wall 3e and second partition wall 3f) provided inside the shield box 3.
  • the 1st partition wall 3e is a wall which comprises the back part of the examination room T1, and stands in the bottom part 3d of the shield box 3 facing the door 3c.
  • the first partition wall 3e is provided away from the back portion of the shield box 3. Thereby, a gap is provided between the first partition wall 3e and the back portion of the shield box 3.
  • the second partition wall 3f is a wall that constitutes the ceiling of the examination room T1, and is connected to the upper end of the first partition wall 3e and both side portions of the shield box 3.
  • the 1st partition wall 3e and the 2nd partition wall 3f are formed with the nonmagnetic material, for example, are formed with the nonmagnetic stainless steel.
  • the both side parts and bottom part 3d of the shield box 3, and the partition wall provided in the shield box 3 may be integrally formed.
  • a substrate storage chamber T2 is defined inside the shield box 3 and outside the inspection chamber T1. That is, the part that defines the substrate housing chamber T2 is a housing.
  • the substrate storage chamber T2 is a space including the gap described above.
  • a control substrate for controlling the components of the X-ray irradiator 7 and the X-ray inspection apparatus 1 is disposed.
  • the control unit 20 includes, for example, a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), and the like.
  • the shielding curtain 4 is arranged in the examination room T1.
  • the shielding curtain 4 is detachably provided on the second partition wall 3f on the opening 3a side. That is, the shielding curtain 4 is provided so as to be detachable from the examination room T1.
  • the shielding curtain 4 is not limited to a fixing method as long as it is removable.
  • the shielding curtain 4 may be fixed to the second partition wall 3f by bolts and nuts, or slidably connected to a guide member such as a rail provided on the second partition wall 3f and fixed at the mounting position. Also good.
  • FIG. 4 the attachment position of the shielding curtain 4 is illustrated.
  • a first magnet (first detection unit) 12a is provided at the end of the shielding curtain 4 on the back side of the X-ray inspection apparatus 1.
  • a first magnetic sensor 12b (second detection unit) that detects the position of the first magnet 12a in a non-contact manner is provided in the substrate storage chamber T2 that faces the mounting position of the shielding curtain 4.
  • the first magnetic sensor 12b is provided on the first partition wall 3e.
  • the relative position of the first magnet 12a with respect to the fixed position of the first magnetic sensor 12b is detected.
  • the 1st magnetic sensor 12b can detect that the shielding curtain 4 was settled in the attachment position.
  • the first magnetic sensor 12b and the first magnet 12a described above function as the position detection unit 12 of the shielding curtain 4.
  • the conveyor 5 is at least partially arranged in the inspection room T1.
  • the conveyor 5 is detachably provided on a support member 6 erected on the bottom 3d of the shield box 3. That is, the conveyor 5 is provided to be removable from the inspection room T1.
  • the conveyor 5 is not limited to a fixing method as long as it is removable.
  • the conveyor 5 may be fixed to the support member 6 by bolts and nuts, or may be slidably connected to a guide member such as a rail provided on the support member 6 and fixed at a predetermined position.
  • a second magnet (first detection unit) 13a is provided at the end of the conveyor 5 on the back side of the X-ray inspection apparatus 1.
  • a second magnetic sensor 13b (second detection unit) that detects the position of the second magnet 13a in a non-contact manner is provided in the substrate storage chamber T2 facing the mounting position of the conveyor 5.
  • the second magnetic sensor 13b is provided on the first partition wall 3e.
  • the relative position of the second magnet 13a with respect to the fixed position of the second magnetic sensor 13b is detected.
  • the 2nd magnetic sensor 13b can detect that the conveyor 5 was settled in the attachment position.
  • the second magnetic sensor 13b and the second magnet 13a described above function as the position detector 13 of the conveyor 5.
  • the first magnet 12a and the second magnet 13a are made of magnetized metal such as neodymium iron boron.
  • the first magnetic sensor 12b and the second magnetic sensor 13b those using Hall elements or coils can be adopted.
  • the first magnetic sensor 12b and the second magnetic sensor 13b are connected to the control board described above by a harness or the like.
  • FIG. 5 is a perspective view showing a holding structure of the first magnet 12 a of the shielding curtain 4.
  • the shielding curtain 4 includes a first curtain 4 a, a second curtain 4 b, and a third curtain 4 c that are arranged in parallel, and the upper ends thereof are fixed by a pair of curtain holding members 4 d. .
  • the pair of curtain holding members 4d are provided at both ends of the shielding curtain 4 in the longitudinal direction (front-rear direction of the X-ray inspection apparatus 1).
  • the curtain holding member 4d provided on the back side of the X-ray inspection apparatus 1 is provided with a first cover portion (cover member) 4e that houses the first magnet 12a.
  • the first cover portion 4e covers the lower surface of the first magnet 12a facing the belt 5a.
  • the first cover portion 4e covers the periphery other than the side surface of the first magnet 12a facing the first magnetic sensor 12b. By covering the periphery of the first magnet 12a with the first cover portion 4e, it is possible to prevent the first magnet 12a from being damaged during the attaching / detaching operation or during the cleaning of the examination room. Furthermore, since the back side of the X-ray inspection apparatus 1 of the first cover part 4e is opened, it is possible to prevent foreign matter and liquid from accumulating inside the first cover part 4e, so that hygiene can be maintained. .
  • FIG. 6 is a perspective view showing a holding structure of the second magnet 13 a of the conveyor 5.
  • the conveyor 5 is provided with a handle 5 b on the side on the front side of the X-ray inspection apparatus 1 and a second cover 5 c on the side on the back side of the X-ray inspection apparatus 1. It has been.
  • the second cover portion 5c covers the side surface of the second magnet 13a that faces the belt 5a.
  • the second cover portion 5c covers the periphery other than the side surface of the first magnet 12a facing the first magnetic sensor 12b.
  • the first magnetic sensor 12b and the second magnetic sensor 13b are provided in the housing (substrate housing chamber T2), and thus the first magnetic sensor 12b.
  • the second magnetic sensor 13b it is possible to prevent foreign matter from adhering to the second magnetic sensor 13b, and the first magnetism during the attaching / detaching operation of the shielding curtain 4 and the conveyor 5 which are X-ray shielding objects or the cleaning operation in the inspection room T1. It is possible to avoid damage to the sensor 12b and the second magnetic sensor 13b.
  • a member that transmits a detection signal such as a harness is connected to the first magnetic sensor 12b and the second magnetic sensor 13b, and foreign matter is likely to adhere to the first magnetic sensor 12b and the second magnetic sensor 13b.
  • providing the first magnetic sensor 12b and the second magnetic sensor 13b outside the examination room T1 is effective in maintaining hygiene.
  • the hygiene in the examination room T1 can be maintained, and the risk of damage to the first magnetic sensor 12b and the second magnetic sensor 13b can be reduced.
  • the X-ray inspection apparatus 1 since the X-ray inspection apparatus 1 according to the present embodiment includes the first cover portion 4e and the second cover portion 5c that protect the first magnet 12a and the second magnet 13a, the first magnet 12a and the second magnet 13a. Since it is possible to avoid the foreign matter directly adhering to the test chamber, hygiene in the examination room T1 can be maintained and the risk of damage to the first magnet 12a and the second magnet 13a can be reduced.
  • FIGS. 7 and 8 are perspective views showing a mounting structure of the shielding curtain 4 and the position detection unit 120.
  • FIG. FIG. 9 is a cross-sectional view showing a part of the mounting structure of the shielding curtain 4 and the position detection unit 120.
  • the first curtain 4a, the second curtain 4b, and the third curtain 4c are not shown.
  • a pair of support members 31 are arranged for one shielding curtain 4 in the examination room T1.
  • the pair of support members 31 are juxtaposed in the conveying direction of the article G by the conveyor 5 (hereinafter simply referred to as “conveying direction”), and supports one shielding curtain 4.
  • Each support member 31 is provided on the first partition wall (partition wall) 3e, and extends from the first partition wall 3e to the inspection chamber along the front-rear direction (horizontal direction perpendicular to the transport direction) of the X-ray inspection apparatus 1. It extends into T1.
  • the first partition wall 3e is a wall that partitions the inspection chamber T1 and the substrate storage chamber T2 among the walls constituting the shield box (housing) 3, and the back of the inspection chamber T1 It is the wall which comprises (refer FIG. 4).
  • the support member 31 is a rod-shaped member having a columnar shape.
  • a taper portion 32 is provided at an end portion 31 a on the first partition wall 3 e side of the support member 31.
  • the tapered portion 32 has a shape (for example, a truncated cone shape) that becomes thicker as it approaches the first partition wall 3e.
  • An end portion 32a on the first partition wall 31e side in the tapered portion 32 has a constant outer diameter.
  • one holding member 33 is disposed for the pair of support members 31.
  • Each holding member 33 is attached to the second partition wall 3f (see FIG. 4) that constitutes the ceiling of the examination room T1.
  • One holding member 33 holds an end 31b on the opposite side of the pair of support members 31 from the first partition wall 3e side.
  • Each holding member 33 is formed with a pair of slits 33a that open to the front side of the X-ray inspection apparatus 1 (that is, the side opposite to the first partition wall 3e side).
  • the shielding curtain 4 has a pair of curtain holding members 41 and 42 and a plurality of rod-shaped members 43.
  • the curtain holding member 41 corresponds to the curtain holding member 4d (see FIG. 5) disposed on the back side of the X-ray inspection apparatus 1 (that is, the first partition wall 3e side). Therefore, the curtain holding member 41 is attached with the first detection unit 121 configured by the first magnet 12a.
  • the curtain holding member 41 is formed with a pair of notches 41a that open to the outside. Each notch 41 a is fitted in the end portion 32 a of each tapered portion 32.
  • the curtain holding member 42 corresponds to the curtain holding member 4d (see FIG. 5) arranged on the front side of the X-ray inspection apparatus 1.
  • the curtain holding member 42 has a pair of protruding edge portions 42a that protrude outward. Each protruding edge portion 42 a is fitted in each slit 33 a of the holding member 33 from the front side of the X-ray inspection apparatus 1.
  • the plurality of rod-like members 43 are juxtaposed in the transport direction.
  • Each bar-shaped member 43 extends along the front-rear direction of the X-ray inspection apparatus 1 and is spanned between the pair of curtain holding members 41 and 42.
  • a first curtain 4a, a second curtain 4b, and a third curtain 4c are suspended from the plurality of rod-shaped members 43, respectively.
  • the curtain holding member 41 When attaching the shielding curtain 4 to the examination room T1, the curtain holding member 41 is slid along the pair of support members 31 from the front side of the X-ray examination apparatus 1. Then, each notch 41a of the curtain holding member 41 is fitted to the end portion 32a of each tapered portion 32 from the front side of the X-ray inspection apparatus 1, and each protruding edge portion 42a of the curtain holding member 42 is front side of the X-ray inspection apparatus 1. To the slits 33a of the holding member 33. When removing the shielding curtain 4 from the examination room T1, the curtain holding member 41 may be slid along the pair of support members 31 to the front side of the X-ray examination apparatus 1.
  • the second detection unit 122 configured by the first magnetic sensor 12 b and the bracket 12 c is disposed at a position facing the first detection unit 121 in the substrate housing chamber T ⁇ b> 2. Yes.
  • the second detection unit 122 is unitized with the first magnetic sensor 12b attached to the bracket 12c.
  • the bracket 12c has a pair of leg portions 12d. The pair of leg portions 12d are positioned on both sides of the first magnetic sensor 12b in the transport direction, and face the pair of tapered portions 32 via the first partition wall 3e.
  • a screw hole 31c is formed in the end 31a of the support member 31 to which the tapered portion 32 is fitted.
  • An insertion hole (hole) 3g corresponding to the screw hole 31c is formed in the first partition wall 3e, and an insertion hole 12e corresponding to the screw hole 31c is formed in the leg portion 12d.
  • the screw holes 31c, the insertion holes 3g, and the insertion holes 12e corresponding to each other are disposed on the same axis L that extends along the front-rear direction of the X-ray inspection apparatus 1.
  • the support member 31 and the leg portion 12d facing each other through the first partition wall 3e are fixed to each other by a bolt (fixing member) 36.
  • the bolt 36 is inserted into the insertion hole 12e and the insertion hole 3g from the substrate housing chamber T2 side through the washer 35, and is screwed into the screw hole 31c.
  • the 2nd detection part 122 and the supporting member 31 are being mutually fixed by the volt
  • the second detection unit 122 is accurately positioned with respect to the first detection unit 121 provided on the shielding curtain 4. Therefore, it is possible to accurately detect whether or not the shielding curtain 4 is in the mounting position in the examination room T1. In addition, positioning and fixing of the second detection unit 122 can be easily performed.
  • the second detection unit 122 and the support member 31 are fixed to each other by a bolt 36 through an insertion hole 3g formed in the first partition wall 3e. Thereby, the 2nd detection part 122 and the support member 131 can be easily fixed to the predetermined position of the 1st partition wall 3e.
  • the end portion 31a on the first partition wall 3e side of the support member 31 is provided with a tapered portion 32 that becomes thicker as it approaches the first partition wall 3e, and the curtain holding member 41 of the shielding curtain 4 has A notch 41a that fits into the tapered portion 32 is formed. Thereby, shakiness of the shielding curtain 4 is suppressed. Therefore, it is possible to suppress erroneous detection of whether or not the shielding curtain 4 is in the mounting position in the examination room T1.
  • the support member 31 is a rod-like member having a columnar shape. Therefore, when fixing the support member 31 to the 1st partition wall 3e, the direction of the support member 31 in the circumferential direction can be disregarded. In addition, the screw hole 31 c into which the bolt 36 is screwed can be easily formed in the support member 31.
  • an article inspection apparatus that inspects an article using an image obtained by using near infrared rays or other electromagnetic waves, and an article inspection apparatus that performs an inspection using an image captured by a camera
  • the present invention can also be applied to a metal detection device that performs inspection using a magnetic field.
  • one form of the present disclosure is not limited to the inspection of the presence or absence of foreign substances contained in the article G.
  • an article that contains and ships contents such as food in a package such as a film packaging material
  • the contents may be inspected for biting of the contents into the sealing portion of the package, damage to the contents in the package, mixing of foreign matters into the package, and the like.
  • first partition wall 3e and the second partition wall 3f are formed of a non-magnetic material.
  • first partition wall 3e the magnetic sensor and the magnet face each other. It is only necessary that the portion to be formed is made of a non-magnetic material.
  • the magnetic sensor that detects the position of the magnet using the magnetic field is shown as an example of the position detection unit.
  • the position detection unit may be another sensor.
  • the position detection unit may be a sensor that detects a position using light or radio waves.
  • a light or radio wave output device is employed as the second detection unit, and at least a part of the first partition wall 3e (a location where the magnetic sensor and the magnet face each other) is made of a material that is transparent to light or radio waves.
  • a member that is formed and reflects light or radio waves may be employed as the first detection unit.
  • the first cover portion 4e and the second cover portion 5c are shown to cover the periphery except at least one side surface of the first magnet 12a and the second magnet 13a.
  • the present invention is not limited to this.
  • the structure which covers all the 1st magnet 12a and the 2nd magnet 13a may be sufficient, and the structure which covers only the surface which opposes the belt 5a which is a conveyance path may be sufficient.
  • the magnetic sensor is provided in the substrate storage chamber T2, and the magnet is provided in the shielding curtain 4 and the conveyor 5.
  • the magnet is provided in the substrate storage chamber T2, and the magnetic sensor is provided. May be provided on the shielding curtain 4 and the conveyor 5.
  • the shielding curtain 4 does not have to be provided at each of the entrance and the exit of the examination room T1 so as to block each of the entrance and the exit of the examination room T1, but the inspection area in the examination room T1. On the other hand, it may be provided on the entrance side and the exit side of the examination room T1, respectively.
  • pair of support members 31 are not limited to those supporting one shielding curtain 4, and one or three or more supporting members 31 may support one shielding curtain 4.
  • the taper portion 32 may be provided separately from the end portion 31 a of the support member 31, or may be provided integrally with the end portion 31 a of the support member 31.

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Dans cet appareil d'inspection à rayons X, une unité de génération de rayons X qui émet des rayons X vers une chambre d'inspection est disposée à l'intérieur d'un boîtier. L'appareil d'inspection à rayons X comprend : un objet de protection contre les rayons X, qui peut être fixé amovible par rapport à la chambre d'inspection ; et une unité de détection de position qui a une première unité de détection et une seconde unité de détection, et qui détecte les positions relatives des première et seconde unités de détection. La première unité de détection est située sur l'objet de protection contre les rayons X, tandis que la seconde unité de détection est située à l'intérieur du boîtier.
PCT/JP2016/079927 2015-10-09 2016-10-07 Appareil d'inspection à rayons x WO2017061594A1 (fr)

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WO2021151434A1 (fr) * 2020-01-28 2021-08-05 Wipotec Gmbh Support pour élément de protection contre les rayons x

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