WO2017047411A1 - シンチレータパネル、及び、放射線検出器 - Google Patents
シンチレータパネル、及び、放射線検出器 Download PDFInfo
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- WO2017047411A1 WO2017047411A1 PCT/JP2016/075817 JP2016075817W WO2017047411A1 WO 2017047411 A1 WO2017047411 A1 WO 2017047411A1 JP 2016075817 W JP2016075817 W JP 2016075817W WO 2017047411 A1 WO2017047411 A1 WO 2017047411A1
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- WIPO (PCT)
- Prior art keywords
- layer
- scintillator
- main surface
- optical functional
- scintillator layer
- Prior art date
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2002—Optical details, e.g. reflecting or diffusing layers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
- G01T1/2023—Selection of materials
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K4/00—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K4/00—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens
- G21K2004/02—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens characterised by the external panel structure
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K4/00—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens
- G21K2004/10—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens with a protective film
Definitions
- One aspect of the present invention relates to a scintillator panel and a radiation detector.
- Patent Document 1 describes an X-ray detector.
- This X-ray detector includes a photoelectric conversion substrate, a fluorescence conversion film formed on the surface of the photoelectric conversion substrate, and a light reflection layer formed on the photoelectric conversion substrate and the fluorescence conversion film.
- the fluorescence conversion film is formed in a columnar crystal structure in which a plurality of columnar crystals are formed in the surface direction of the photoelectric conversion substrate.
- the light reflection layer has a peripheral portion in close contact with the photoelectric conversion substrate to seal the fluorescence conversion film.
- the light reflection layer is composed of a mixture of a pressure-sensitive adhesive substance and an inorganic substance powder having a refractive index higher than that of the adhesive substance.
- said X-ray detector is aiming at the improvement of X-ray resolution by suppressing the penetration
- the light reflecting layer is deformed so as to follow the tip portion by the flow of the adhesive substance, and fills the space between the tip portions of the columnar crystals adjacent to each other. Further, depending on the magnitude of the fluidity of the adhesive substance, it is assumed that the columnar crystals permeate between the columnar crystals adjacent to each other even on the base end side. In these cases, the visible light leaks from the columnar crystal to the light reflection layer, and thus the X-ray resolution and the light output may be reduced.
- An object of one aspect of the present invention is to provide a scintillator panel and a radiation detector capable of improving resolution and light output.
- a scintillator panel is a scintillator panel for converting radiation into scintillation light, and includes a substrate having a main surface and having transparency to the scintillation light, and the main surface.
- the height of the frame from the main surface is larger than the height of the scintillator layer from the main surface
- the scintillator layer includes a plurality of columnar crystals of scintillator material
- the optical functional layer is formed by the elastic force of the elastic member. It is pressed against the Nchire
- a scintillator layer including a plurality of columnar crystals is provided on the main surface of the substrate and sealed with a protective layer.
- a sheet-like optical functional layer is disposed between the scintillator layer and the protective layer, and an elastic member is disposed between the optical functional layer and the protective layer.
- the elastic member is elastically deformed by being sandwiched between the optical functional layer and the protective layer.
- the optical functional layer is pressed against the scintillator layer by the elastic force of the elastic member, and is in contact with the scintillator layer in a plurality of regions including the tips of the columnar crystals of the scintillator layer.
- a sheet-like optical functional layer is used. For this reason, it is avoided that the optical functional layer fills the gap between the tips of the columnar crystals adjacent to each other or penetrates between the columnar crystals. Further, since the optical functional layer is pressed against the scintillator layer by the elastic force of the elastic member, it is possible to avoid the optical functional layer being separated from the tip of the columnar crystal. For this reason, it is suppressed that scintillation light leaks from a columnar crystal. Therefore, resolution and light output are improved.
- the protective layer is fixed to a frame body that is higher (thicker) than the scintillator layer. For this reason, for example, by using a flat protective layer, a space corresponding to the height difference between the frame and the scintillator layer is formed between the scintillator layer and the protective layer. Therefore, by arranging the optical functional layer and the elastic member in the space, it is possible to easily and surely realize the above configuration and improve the resolution and light output.
- the elastic member may be in the form of a sheet extending along the main surface.
- the elastic member may include foamed plastic.
- the optical functional layer can be pressed uniformly along the main surface of the substrate by the elastic member.
- the elastic member may be integrated with the optical functional layer or the protective layer. In this case, it is easy to configure the optical functional layer to be pressed against the scintillator layer by the elastic member.
- the tip of the columnar crystal may be flattened.
- the optical functional layer can filling the gaps between the tips of the columnar crystals adjacent to each other or penetrating between the columnar crystals. , Resolution and light output can be improved.
- a radiation detector is provided on a photoelectric conversion element having a main surface and a plurality of photoelectric conversion elements formed on the main surface, and converts radiation into scintillation light.
- a protective layer fixed to the body, a sheet-like optical functional layer disposed between the scintillator layer and the protective layer, and an elastic member elastically deformed between the optical functional layer and the protective layer.
- the height of the frame body from the main surface is larger than the height of the scintillator layer from the main surface, the scintillator layer includes a plurality of columnar crystals of scintillator material, and the optical functional layer is formed by the elastic force of the elastic member. Pressed into the layer , In contact with the scintillator layer in a plurality of areas including the tips of the plurality of columnar crystals.
- a scintillator layer including a plurality of columnar crystals is provided on the main surface of a substrate having a plurality of photoelectric conversion elements and sealed with a protective layer.
- a sheet-like optical functional layer is disposed between the scintillator layer and the protective layer, and an elastic member is disposed between the optical functional layer and the protective layer.
- the elastic member is elastically deformed by being sandwiched between the optical functional layer and the protective layer.
- the optical functional layer is pressed against the scintillator layer by the elastic force of the elastic member, and is in contact with the scintillator layer in a plurality of regions including the tips of the columnar crystals of the scintillator layer.
- a sheet-like optical functional layer is used. For this reason, it is avoided that the optical functional layer fills the gap between the tips of the columnar crystals adjacent to each other or penetrates between the columnar crystals. Further, since the optical functional layer is pressed against the scintillator layer by the elastic force of the elastic member, it is possible to avoid the optical functional layer being separated from the tip of the columnar crystal. For this reason, it is suppressed that scintillation light leaks from a columnar crystal. Therefore, resolution and light output are improved.
- the protective layer is fixed to a frame body that is higher (thicker) than the scintillator layer. For this reason, for example, by using a flat protective layer, a space corresponding to the height difference between the frame and the scintillator layer is formed between the scintillator layer and the protective layer. Therefore, by arranging the optical functional layer and the elastic member in the space, it is possible to easily and surely realize the above configuration and improve the resolution and light output.
- the elastic member may be in the form of a sheet extending along the main surface.
- the elastic member may include foamed plastic.
- the optical functional layer can be pressed uniformly along the main surface of the substrate by the elastic member.
- the elastic member may be integrated with the optical functional layer or the protective layer. In this case, it is easy to configure the optical functional layer to be pressed against the scintillator layer by the elastic member.
- the tip of the columnar crystal may be flattened.
- the optical functional layer can filling the gaps between the tips of the columnar crystals adjacent to each other or penetrating between the columnar crystals. , Resolution and light output can be improved.
- a scintillator panel is a scintillator panel for converting radiation into scintillation light, and includes a substrate having a main surface and having transparency to the scintillation light, and the main surface.
- a hard optical functional layer integrally formed on a surface of the protective layer facing the scintillator layer, and the height of the frame body from the main surface is the scintillator from the main surface.
- the scintillator layer includes a plurality of columnar crystals of the scintillator material, and the optical functional layer is pressed against the scintillator layer in a state where the protective layer is fixed to the frame body. In contact with the scintillator layer in a plurality of regions including the tip of Jo crystals.
- a scintillator layer including a plurality of columnar crystals is provided on the main surface of the substrate and sealed with a protective layer.
- a hard optical functional layer is integrally formed on the surface of the protective layer facing the scintillator layer. The optical functional layer is pressed against the scintillator layer in a state where the protective layer is fixed to the frame. Thereby, the optical functional layer is in contact with the scintillator layer in a plurality of regions including the tips of the columnar crystals of the scintillator layer.
- a hard optical functional layer formed integrally with the protective layer is used. For this reason, it is avoided that the optical functional layer fills the gap between the tips of the columnar crystals adjacent to each other or penetrates between the columnar crystals. Further, since the optical functional layer is pressed against the scintillator layer according to the fixing of the protective layer, the optical functional layer can be prevented from being separated from the tip of the columnar crystal. For this reason, it is suppressed that scintillation light leaks from a columnar crystal. Therefore, resolution and light output are improved.
- the protective layer is fixed to a frame body that is higher (thicker) than the scintillator layer. For this reason, for example, by using a flat protective layer, a space corresponding to the height difference between the frame and the scintillator layer is formed between the scintillator layer and the protective layer. Therefore, by forming the optical functional layer according to the space, the above-described configuration can be realized easily and reliably, and the resolution and light output can be improved.
- the optical functional layer is hard means that, for example, the optical functional layer is formed by curing a resin-containing material, thereby having a hardness corresponding to the hardness of the cured resin.
- a radiation detector is provided on a photoelectric conversion element having a main surface and a plurality of photoelectric conversion elements formed on the main surface, and converts radiation into scintillation light.
- the scintillator layer includes a plurality of columnar crystals of the scintillator material, and the optical functional layer is pressed against the scintillator layer in a state where the protective layer is fixed to the frame body, and includes the tips of the plurality of columnar crystals.
- a scintillator layer including a plurality of columnar crystals is provided on the main surface of a substrate having a plurality of photoelectric conversion elements and sealed with a protective layer.
- a hard optical functional layer is integrally formed on the surface of the protective layer facing the scintillator layer. The optical functional layer is pressed against the scintillator layer in a state where the protective layer is fixed to the frame. Thereby, the optical functional layer is in contact with the scintillator layer in a plurality of regions including the tips of the columnar crystals of the scintillator layer.
- a hard optical functional layer formed integrally with the protective layer is used. For this reason, it is avoided that the optical functional layer fills the gap between the tips of the columnar crystals adjacent to each other or penetrates between the columnar crystals. Further, since the optical functional layer is pressed against the scintillator layer according to the fixing of the protective layer, the optical functional layer can be prevented from being separated from the tip of the columnar crystal. For this reason, it is suppressed that scintillation light leaks from a columnar crystal. Therefore, resolution and light output are improved.
- the protective layer is fixed to a frame body that is higher (thicker) than the scintillator layer. For this reason, for example, by using a flat protective layer, a space corresponding to the height difference between the frame and the scintillator layer is formed between the scintillator layer and the protective layer. Therefore, by forming the optical functional layer according to the space, the above-described configuration can be realized easily and reliably, and the resolution and light output can be improved.
- the scintillator panel according to this embodiment is for converting radiation such as X-rays into scintillation light such as visible light.
- the scintillator panel according to the following embodiments can be used as a device for radiation imaging in, for example, a mammography apparatus, a chest examination apparatus, a CT apparatus, a dental intraoral imaging apparatus, and a radiation camera.
- FIG. 1 is a cross-sectional view of a scintillator panel according to the present embodiment.
- FIG. 2 is a plan view of the scintillator panel shown in FIG.
- the scintillator panel 1 includes a substrate 2, a scintillator layer 3, a frame body 4, a protective layer 5, an optical functional layer 6, and an elastic member 7.
- the substrate 2 has a main surface 2s.
- the substrate 2 has, for example, a rectangular plate shape.
- the substrate 2 is transparent to scintillation light generated in the scintillator layer 3.
- the thickness of the substrate 2 is, for example, about 2.0 mm.
- the substrate 2 is composed of, for example, an FOP (fiber optic plate: an optical device configured by bundling a large number of optical fibers (for example, J5734 manufactured by Hamamatsu Photonics)).
- the scintillator layer 3 generates scintillation light such as visible light in response to incidence of radiation R such as X-rays.
- the scintillator layer 3 is provided on the main surface 2 s of the substrate 2.
- the scintillator layer 3 is formed, for example, in a rectangular area of the main surface 2s when viewed from the direction intersecting (for example, orthogonal to) the main surface 2s.
- the outer edge portion of the scintillator layer 3 is provided with an inclined portion so that the thickness of the scintillator layer 3 decreases in the direction from the center of the scintillator layer 3 toward the edge. Therefore, the overall cross-sectional shape of the scintillator layer 3 is, for example, a trapezoidal shape.
- the thickness of the scintillator layer 3 is, for example, about 600 ⁇ m.
- the scintillator layer 3 includes a plurality of columnar crystals 30 of a scintillator material (see FIG. 3B).
- the scintillator material is a material mainly composed of CsI such as CsI: Tl.
- the scintillator layer 3 is formed, for example, by growing a columnar crystal 30 on the main surface 2s of the substrate 2 by a vacuum deposition method or the like.
- the frame body 4 is provided on the main surface 2 s so as to surround the scintillator layer 3 when viewed from the direction intersecting the main surface 2 s of the substrate 2.
- the frame 4 is, for example, a rectangular ring.
- the height H4 of the frame 4 from the main surface 2s is larger than the height H3 (thickness) of the scintillator layer 3 from the main surface 2s.
- the frame 4 is interposed between the main surface 2s and the protective layer 5, and joins the main surface 2s and the protective layer 5 to each other.
- the main surface 2s, the frame body 4, and the protective layer 5 form a space in which the scintillator layer 3, the optical functional layer 6, and the elastic member 7 are arranged.
- the frame 4 is joined to the main surface 2s and the protective layer 5 so as to seal the space at least in a liquid-tight (or air-tight) manner.
- the frame 4 is a resin having a low moisture permeability, such as an epoxy resin.
- the protective layer 5 is disposed on the main surface 2s and the scintillator layer 3.
- the protective layer 5 is disposed so as to cover the scintillator layer 3 and the frame body 4 when viewed from the direction intersecting the main surface 2s.
- the protective layer 5 is, for example, a rectangular flat plate extending along the main surface 2s.
- the protective layer 5 transmits the radiation R.
- the thickness of the protective layer 5 is, for example, about 0.5 mm or more and 2.0 mm or less.
- the protective layer 5 is a glass plate such as chemically strengthened glass, for example.
- the protective layer 5 is fixed (bonded) to the frame body 4 so as to seal the scintillator layer 3 at least in a liquid-tight manner. With the above sealing structure, moisture resistance to the scintillator layer 3 is realized.
- the optical functional layer 6 is disposed between the scintillator layer 3 and the protective layer 5.
- the optical functional layer 6 has a sheet shape. That is, the optical functional layer 6 does not have fluidity.
- the optical functional layer 6 has a rectangular sheet shape extending along the main surface 2s.
- the optical functional layer 6 covers the scintillator layer 3 when viewed from the direction intersecting the main surface 2s.
- the optical functional layer 6 transmits the radiation R.
- the optical functional layer 6 is, for example, a light reflection layer that reflects scintillation light generated in the scintillator layer 3 or a light absorption layer that absorbs scintillation light.
- the thickness of the optical functional layer 6 is, for example, about 100 ⁇ m.
- the optical functional layer 6 can include a layer made of a pigment and a binder resin.
- the optical functional layer 6 is, for example, a PET film.
- the elastic member (elastic layer) 7 is disposed between the optical functional layer 6 and the protective layer 5.
- the elastic member 7 has, for example, a sheet shape extending along the main surface 2s.
- the elastic member 7 is disposed on the optical functional layer 6 so as to cover at least the scintillator layer 3 when viewed from the direction intersecting the main surface 2s.
- the elastic member 7 transmits the radiation R.
- the elastic member 7 is elastically deformed by being sandwiched between the optical functional layer 6 and the protective layer 5 (that is, compressed in a direction intersecting the main surface 2s). Thereby, the elastic member 7 presses the optical functional layer 6 against the scintillator layer 3 by an elastic force. That is, the elastic member 7 is a pressure applying layer that applies pressure to the optical functional layer 6.
- the thickness of the elastic member 7 is, for example, about 100 ⁇ m or more and 1000 ⁇ m or less.
- the material of the elastic member 7 include plastics such as polyethylene, urethane resin, and melamine resin, rubber, and silicone gel.
- the elastic member 7 is, for example, a foamed plastic sheet formed by foaming the above plastic, a urethane mat (urethane resin sheet), a silicon gel sheet, a melamine sponge sheet, a sheet-like bubble cushioning material, or the like. .
- FIG. 3 is an enlarged cross-sectional view showing a part of the scintillator panel shown in FIG. 3A shows the region Ra in FIG. 1, and FIG. 3B shows the region Rb in FIG.
- the elastic member 7 is bonded to the optical functional layer 6 by the adhesive layer 8 and integrated with the optical functional layer 6 here.
- the adhesive layer 8 is, for example, a resin having adhesiveness.
- the columnar crystal 30 of the scintillator layer 3 is bonded to the main surface 2s of the substrate 2 at the base end thereof.
- the columnar crystal 30 includes a columnar portion 31 and a tapered portion 32.
- the columnar part 31 includes a base end of the columnar crystal 30 on the main surface 2s side.
- the columnar portion 31 extends in a direction intersecting the main surface 2s from the main surface 2s.
- the taper portion 32 includes the tip 30 t of the columnar crystal 30.
- the tapered portion 32 is configured integrally with the columnar portion 31.
- the tapered portion 32 has a tapered shape that decreases as the distance from the main surface 2s increases.
- the cross-sectional shape of the taper portion 32 is, for example, a triangular shape.
- the columnar crystals 30 are separated from each other. That is, a gap is formed between the columnar crystals 30 adjacent to each other. More specifically, between the columnar crystals 30 adjacent to each other, a gap is formed between the side surfaces 31 s of the columnar portion 31 and between the side surfaces 32 s of the tapered portion 32.
- the elastic member 7 presses the optical functional layer 6 against the scintillator layer 3 by elastic force. That is, the optical functional layer 6 is pressed by the elastic force of the elastic member 7 and is in contact with the scintillator layer 3.
- the optical functional layer 6 is in contact with the tips 30 t of the plurality of columnar crystals 30.
- the tips 30t of the columnar crystals 30 are separated from each other and independent. Therefore, the optical functional layer 6 is in contact with the scintillator layer 3 (that is, in contact at multiple points) in a plurality of independent regions including the tips 30 t of the plurality of columnar crystals 30.
- the optical functional layer 6 does not fill the gap between the columnar crystals 30 adjacent to each other.
- the optical functional layer 6 is in contact with the scintillator layer 3 so as to maintain a gap between the columnar crystals 30 adjacent to each other.
- the sheet-like optical functional layer 6 is deformed so as to follow the shape of the tip 30 t of the columnar crystal 30, but contacts only a part of the side surface 32 s of the tapered portion 32 on the tip 30 t side.
- an optical functional layer is formed by applying a fluid material (liquid material) to the scintillator layer 3
- the optical functional layer fills a gap between the side surfaces 32s of the tapered portion 32. At the same time, it penetrates into the gap between the side surfaces 31 s of the columnar part 31. For this reason, contact with the optical functional layer having a refractive index higher than that of the air layer is formed on the entire side surface 32 s of the tapered portion 32 and at least part of the side surface 31 s of the columnar portion 31.
- the scintillator layer 3 including the plurality of columnar crystals 30 is provided on the main surface 2 s of the substrate 2 and is sealed by the protective layer 5 and the frame body 4.
- a sheet-like optical functional layer 6 is disposed between the scintillator layer 3 and the protective layer 5.
- An elastic member 7 is disposed between the optical functional layer 6 and the protective layer 5. The elastic member 7 is sandwiched between the optical functional layer 6 and the protective layer 5 and is elastically deformed (compressed). The optical functional layer 6 is pressed against the scintillator layer 3 by the elastic force of the elastic member 7. Thereby, the optical functional layer 6 is in contact with the scintillator layer 3 in a plurality of independent regions including the tip 30 t of the columnar crystal 30.
- the sheet-like optical functional layer 6 is used.
- the optical functional layer 6 can be prevented from filling a gap between the tapered portions 32 of the columnar crystals 30 adjacent to each other or penetrating between the columnar portions 31 of the columnar crystals 30.
- the optical functional layer 6 is pressed against the scintillator layer 3 by the elastic force of the elastic member 7, it is possible to avoid the optical functional layer 6 being separated from the tip 30 t of the columnar crystal 30. For this reason, it is suppressed that scintillation light leaks from the columnar crystal 30. Therefore, resolution and light output are improved.
- the protective layer 5 is fixed to the frame 4 that is higher (thicker) than the scintillator layer 3. For this reason, for example, by using the flat protective layer 5, a space corresponding to the height difference between the frame 4 and the scintillator layer 3 is formed between the scintillator layer 3 and the protective layer 5. Therefore, by disposing the optical functional layer 6 and the elastic member 7 in the space, it is possible to easily and surely realize the above configuration and improve the resolution and light output.
- the elastic member 7 can be formed in a sheet shape extending along the main surface 2 s of the substrate 2.
- the elastic member 7 can contain foamed plastic, for example.
- the optical functional layer 6 can be pressed uniformly by the elastic member 7 along the main surface 2s.
- the elastic member 7 is integrated with the optical functional layer 6. For this reason, it is easy to configure so that the optical functional layer 6 is pressed against the scintillator layer 3 by the elastic member 7.
- the thickness of the elastic member 7 can be, for example, about 100 ⁇ m or more and 1000 ⁇ m or less. If the thickness of the elastic member 7 is 100 ⁇ m or more, an elastic force sufficient to press the optical functional layer 6 against the scintillator layer 3 and contact the scintillator layer 3 can be obtained. If the thickness of the elastic member 7 is 1000 ⁇ m or less, the scintillator panel 1 can be prevented from becoming large (increased in thickness). That is, when the thickness of the elastic member 7 is set to 100 ⁇ m or more and 1000 ⁇ m or less, it is possible to achieve both downsizing of the scintillator panel 1 (suppression of increase in thickness) and improvement in resolution and light output.
- FIG. 4 is a cross-sectional view of a scintillator panel according to a modification.
- FIG. 5 is an enlarged cross-sectional view showing a part of the scintillator panel shown in FIG.
- FIG. 5A shows a region Ra in FIG.
- FIG. 5B shows a region Rb in FIG.
- the scintillator panel 1 ⁇ / b> A includes the scintillator layer 3 ⁇ / b> A instead of the scintillator layer 3, and the elastic member 7 is integrated with the protective layer 5. It is different.
- the scintillator layer 3A is different from the scintillator layer 3 in that it includes a columnar crystal 30A instead of the columnar crystal 30.
- the columnar crystal 30 ⁇ / b> A is different from the columnar crystal 30 in that it has a tapered portion 32 ⁇ / b> A instead of the tapered portion 32.
- the tapered portion 32A includes a tip 30t.
- the tapered portion 32 ⁇ / b> A is configured integrally with the columnar portion 31.
- the tapered portion 32A has a tapered shape that decreases as the distance from the main surface 2s increases.
- the cross-sectional shape of the tapered portion 32A is, for example, a trapezoidal shape.
- the tip 30t of the columnar crystal 30A is flattened by at least one of, for example, pressure treatment, heat treatment, energy beam irradiation treatment such as laser light, polishing treatment, and grinding treatment. That is, the tip 30t of the columnar crystal 30A is a flat surface defined by the edge of the side surface 32s of the tapered portion 32A.
- the elastic member 7 is bonded to the protective layer 5 by the adhesive layer 8 and integrated with the protective layer 5.
- the optical functional layer 6 is pressed by the elastic force of the elastic member 7 and is in contact with the scintillator layer 3A.
- the optical functional layer 6 is in contact with the tips 30t of the plurality of columnar crystals 30A. That is, the optical functional layer 6 is in contact with the scintillator layer 3A (that is, in contact at multiple points) in a plurality of independent flat regions including the tips 30t of the plurality of columnar crystals 30A.
- the optical functional layer 6 does not fill the gaps between the columnar crystals 30A adjacent to each other. That is, the optical functional layer 6 is in contact with the scintillator layer 3A so as to maintain a gap between the columnar crystals 30A adjacent to each other. More specifically, the optical functional layer 6 contacts only a flat surface (tip 30t) defined by the side surface 32s of the tapered portion 32A. For this reason, substantially the entire side surface 32s of the tapered portion 32A is not in contact with the optical function layer 6, and is maintained in contact with the air layer having a lower refractive index than the optical function layer 6 and the scintillator layer 3A. Further, the optical functional layer 6 does not penetrate into the gap between the side surfaces 31 s of the columnar part 31. Therefore, the entire side surface 31 s of the columnar part 31 is not in contact with the optical functional layer 6 and is kept in contact with the air layer.
- the sheet-like optical functional layer 6 is pressed against the scintillator layer 3A by the elastic force of the elastic member 7 and brought into contact with the scintillator layer 3A.
- the resolution and light output can be improved.
- the elastic member 7 is integrated with the protective layer 5. For this reason, it is easy to configure so that the optical functional layer 6 is pressed against the scintillator layer 3 ⁇ / b> A by the elastic member 7.
- the above embodiment exemplifies one embodiment of the scintillator panel according to one aspect of the present invention. Therefore, one aspect of the present invention is not limited to the above scintillator panels 1 and 1A.
- One aspect of the present invention can be obtained by arbitrarily modifying the above scintillator panels 1 and 1A or applying it to other ones without departing from the scope of the claims.
- a scintillator layer 3 ⁇ / b> B can be used in place of the scintillator layer 3.
- the scintillator layer 3B is different from the scintillator layer 3 in that it has a columnar crystal 30B instead of the columnar crystal 30.
- the columnar crystal 30B is different from the columnar crystal 30 in that the tip 30t is flattened.
- the columnar crystal 30B is configured by flattening the tip 30t so as to remove the entire tapered portion 32 of the columnar crystal 30. That is, the columnar crystal 30 ⁇ / b> B has only the columnar portion 31.
- the sheet-like optical functional layer 6 is pressed by the elastic force of the elastic member 7 and contacts only the flat surface (tip 30t) defined by the edge of the side surface 31s of the columnar portion 31. For this reason, as in the case of using the scintillator layer 3, the resolution and the light output can be improved.
- the elastic member 7 may be integrated with the protective layer 5 in the same manner as the scintillator panel 1A. Further, in the scintillator panel 1 ⁇ / b> A, the elastic member 7 may be integrated with the optical functional layer 6 as in the scintillator panel 1. Also in the scintillator panel 1A, the scintillator layer 3B can be used instead of the scintillator layer 3A.
- the scintillator panel according to one aspect of the present invention can be applied to the scintillator panel 1C shown in FIG.
- the scintillator panel 1 ⁇ / b> C is different from the scintillator panel 1 in that the scintillator panel 1 ⁇ / b> C is provided with the optical functional layer 9 instead of the optical functional layer 6 and the elastic member 7 is not provided.
- the optical functional layer 9 is disposed between the scintillator layer 3 and the protective layer 5.
- the optical functional layer 9 is formed on the surface 5 s of the protective layer 5 facing the scintillator layer 3.
- the optical functional layer 9 is, for example, arranged on the surface 5s of the protective layer 5 by arranging a resin layer made of a pigment having a light function such as reflection or absorption and a binder resin, and drying and curing the resin layer. Can be produced. Therefore, the optical functional layer 9 is hard. That is, the optical functional layer 9 does not have fluidity.
- the optical function layer 9 is formed integrally with the surface 5 s of the protective layer 5.
- that the optical functional layer 9 is hard means having the hardness according to the hardness of the hardened resin by hardening the material containing resin as mentioned above.
- Such an optical functional layer 9 is pressed against the scintillator layer 3 in a state where the protective layer 5 is fixed to the frame body 4 (by being fixed). Thereby, the optical functional layer 9 is in contact with the scintillator layer 3.
- the optical functional layer 9 is in contact with the scintillator layer 3 (that is, in contact at multiple points) in a plurality of independent regions including the tips 30 t of the plurality of columnar crystals 30.
- the hard optical functional layer 9 is integrally formed on the surface 5s of the protective layer 5 facing the scintillator layer 3.
- the optical functional layer 9 is sandwiched between the protective layer 5 and the scintillator layer 3 and pressed against the scintillator layer 3 in a state where the protective layer 5 is fixed to the frame body 4. Thereby, the optical functional layer 9 is in contact with the scintillator layer 3 in a plurality of regions including the tip 30t of the columnar crystal 30 of the scintillator layer 3.
- the hard optical functional layer 9 formed integrally with the protective layer 5 is used.
- the optical functional layer 9 can be prevented from filling a gap between the tips 30 t of the columnar crystals 30 adjacent to each other or penetrating between the columnar crystals 30.
- the optical functional layer 9 is pressed against the scintillator layer 3 according to the fixing of the protective layer 5, it is possible to avoid the optical functional layer 9 being separated from the tip 30 t of the columnar crystal 30. For this reason, it is suppressed that scintillation light leaks from the columnar crystal 30. Therefore, resolution and light output are improved. That is, the protective layer 5 and the optical functional layer 9 can obtain the same characteristics as the combination of the protective layer 5, the optical functional layer 6, and the elastic member 7 described above.
- a scintillator layer 3A or a scintillator layer 3B may be used instead of the scintillator layer 3.
- a radiation detector can be configured by using a sensor panel (for example, a TFT panel or a CMOS image sensor panel) having a photoelectric conversion element as a substrate. Subsequently, an embodiment of the radiation detector will be described.
- FIG. 8 is a cross-sectional view of the radiation detector according to the present embodiment.
- the radiation detector 1 ⁇ / b> D is different from the scintillator panel 1 in that it includes a substrate 2 ⁇ / b> D as a sensor panel instead of the substrate 2.
- the substrate (sensor panel) 2D has a main surface 2s and a plurality of photoelectric conversion elements 10 formed on the main surface 2s. More specifically, the substrate 2D has a plate-like base 2p including the main surface 2s.
- the photoelectric conversion elements 10 are two-dimensionally arranged along the main surface 2s.
- the scintillator layer 3 is provided on the main surface 2s and the photoelectric conversion element 10 by, for example, vapor deposition.
- a film portion 11 such as a passivation film or a planarizing film is formed on the main surface 2 s and the photoelectric conversion element 10.
- the scintillator layer 3 is provided on the main surface 2 s and the photoelectric conversion element 10 via the film part 11.
- the scintillator layer 3 is optically coupled to the photoelectric conversion element 10. Therefore, the photoelectric conversion element 10 receives the scintillation light generated in the scintillator layer 3 and outputs an electrical signal corresponding to the scintillation light.
- the electric signal is extracted to the outside through a wiring (not shown). Thereby, the radiation detector 1D detects the radiation R.
- the radiation detector 1D has at least the same effect as that of the scintillator panel 1 described above. More specifically, in the radiation detector 1D, the scintillator layer 3 including a plurality of columnar crystals 30 is provided on the main surface 2s of the substrate 2D having the plurality of photoelectric conversion elements 10, and is sealed by the protective layer 5. ing. A sheet-like optical functional layer 6 is disposed between the scintillator layer 3 and the protective layer 5, and an elastic member 7 is disposed between the optical functional layer 6 and the protective layer 5. The elastic member 7 is elastically deformed by being sandwiched between the optical functional layer 6 and the protective layer 5.
- the optical functional layer 6 is pressed against the scintillator layer 3 by the elastic force of the elastic member 7 and is in contact with the scintillator layer 3 in a plurality of regions including the tip 30 t of the columnar crystal 30 of the scintillator layer 3.
- the sheet-like optical functional layer 6 is used.
- the optical functional layer 6 can be prevented from filling a gap between the tapered portions 32 of the columnar crystals 30 adjacent to each other or penetrating between the columnar portions 31 of the columnar crystals 30.
- the optical functional layer 6 is pressed against the scintillator layer 3 by the elastic force of the elastic member 7, it is possible to avoid the optical functional layer 6 being separated from the tip 30 t of the columnar crystal 30. For this reason, it is suppressed that scintillation light leaks from the columnar crystal 30. Therefore, resolution and light output are improved.
- the protective layer 5 is fixed to the frame 4 that is higher (thicker) than the scintillator layer 3. For this reason, for example, by using the flat protective layer 5, a space corresponding to the height difference between the frame 4 and the scintillator layer 3 is formed between the scintillator layer 3 and the protective layer 5. Therefore, by disposing the optical functional layer 6 and the elastic member 7 in the space, it is possible to easily and surely realize the above configuration and improve the resolution and light output.
- the radiation detector 1D is configured by directly forming the scintillator layer 3 on the substrate 2D (and the film unit 11) as a sensor panel, for example, by vapor deposition or the like. For this reason, when configuring a radiation detector, there is no need to bond a sensor panel and a scintillator panel prepared separately.
- the radiation detector may be configured by separately providing a sensor panel on the back surface of the substrate 2 opposite to the main surface 2 s.
- the radiation detector 1D may include a scintillator layer 3A or a scintillator layer 3B instead of the scintillator layer 3.
- the elastic member 7 may be integrated with the optical functional layer 6 as in the scintillator panel 1, or integrated with the protective layer 5 as in the scintillator panel 1A. May be.
- the radiation detector may be configured by changing the substrate 2 of the scintillator panel 1C to the substrate 2D.
- the radiation detector in this case includes a hard optical functional layer 9 integrally formed on the surface 5s of the protective layer 5 facing the scintillator layer 3 in place of the optical functional layer 6, and an elastic member 7. There will be no.
Abstract
Description
Claims (12)
- 放射線をシンチレーション光に変換するためのシンチレータパネルであって、
主面を有し、前記シンチレーション光に対して透過性を有する基板と、
前記主面上に設けられたシンチレータ層と、
前記主面に交差する方向からみて前記シンチレータ層を囲うように前記主面上に設けられた枠体と、
前記主面及び前記シンチレータ層上に配置され、前記シンチレータ層を封止するように前記枠体に固定された保護層と、
前記シンチレータ層と前記保護層との間に配置されたシート状の光機能層と、
前記光機能層と前記保護層とに挟まれて弾性変形された弾性部材と、
を備え、
前記主面からの前記枠体の高さは、前記主面からの前記シンチレータ層の高さよりも大きく、
前記シンチレータ層は、シンチレータ材料の複数の柱状結晶を含み、
前記光機能層は、前記弾性部材の弾性力によって前記シンチレータ層に押圧され、複数の前記柱状結晶の先端を含む複数の領域において前記シンチレータ層に接触している、
シンチレータパネル。 - 前記弾性部材は、前記主面に沿って延びるシート状である、
請求項1に記載のシンチレータパネル。 - 前記弾性部材は、発泡プラスチックを含む、
請求項2に記載のシンチレータパネル。 - 前記弾性部材は、前記光機能層又は前記保護層と一体化されている、
請求項1~3のいずれか一項に記載のシンチレータパネル。 - 前記柱状結晶の前記先端は、平坦化されている、
請求項1~4のいずれか一項に記載のシンチレータパネル。 - 主面と、前記主面上に形成された複数の光電変換素子と、を有する基板と、
前記光電変換素子上に設けられ、放射線をシンチレーション光に変換するためのシンチレータ層と、
前記主面に交差する方向からみて前記シンチレータ層を囲うように前記主面上に設けられた枠体と、
前記主面及び前記シンチレータ層上に配置され、前記シンチレータ層を封止するように前記枠体に固定された保護層と、
前記シンチレータ層と前記保護層との間に配置されたシート状の光機能層と、
前記光機能層と前記保護層とに挟まれて弾性変形された弾性部材と、
を備え、
前記主面からの前記枠体の高さは、前記主面からの前記シンチレータ層の高さよりも大きく、
前記シンチレータ層は、シンチレータ材料の複数の柱状結晶を含み、
前記光機能層は、前記弾性部材の弾性力によって前記シンチレータ層に押圧され、複数の前記柱状結晶の先端を含む複数の領域において前記シンチレータ層に接触している、
放射線検出器。 - 前記弾性部材は、前記主面に沿って延びるシート状である、
請求項6に記載の放射線検出器。 - 前記弾性部材は、発泡プラスチックを含む、
請求項7に記載の放射線検出器。 - 前記弾性部材は、前記光機能層又は前記保護層と一体化されている、
請求項6~8のいずれか一項に記載の放射線検出器。 - 前記柱状結晶の前記先端は、平坦化されている、
請求項6~9のいずれか一項に記載の放射線検出器。 - 放射線をシンチレーション光に変換するためのシンチレータパネルであって、
主面を有し、前記シンチレーション光に対して透過性を有する基板と、
前記主面上に設けられたシンチレータ層と、
前記主面に交差する方向からみて前記シンチレータ層を囲うように前記主面上に設けられた枠体と、
前記主面及び前記シンチレータ層上に配置され、前記シンチレータ層を封止するように前記枠体に固定された保護層と、
前記保護層の前記シンチレータ層に対向する面に一体的に形成された硬質の光機能層と、
を備え、
前記主面からの前記枠体の高さは、前記主面からの前記シンチレータ層の高さよりも大きく、
前記シンチレータ層は、シンチレータ材料の複数の柱状結晶を含み、
前記光機能層は、前記保護層が前記枠体に固定された状態において前記シンチレータ層に押圧され、複数の前記柱状結晶の先端を含む複数の領域において前記シンチレータ層に接触している、
シンチレータパネル。 - 主面と、前記主面上に形成された複数の光電変換素子と、を有する基板と、
前記光電変換素子上に設けられ、放射線をシンチレーション光に変換するためのシンチレータ層と、
前記主面に交差する方向からみて前記シンチレータ層を囲うように前記主面上に設けられた枠体と、
前記主面及び前記シンチレータ層上に配置され、前記シンチレータ層を封止するように前記枠体に固定された保護層と、
前記保護層の前記シンチレータ層に対向する面に一体的に形成された硬質の光機能層と、
を備え、
前記主面からの前記枠体の高さは、前記主面からの前記シンチレータ層の高さよりも大きく、
前記シンチレータ層は、シンチレータ材料の複数の柱状結晶を含み、
前記光機能層は、前記保護層が前記枠体に固定された状態において前記シンチレータ層に押圧され、複数の前記柱状結晶の先端を含む複数の領域において前記シンチレータ層に接触している、
放射線検出器。
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