WO2017041098A1 - Embedded sige process for multi-threshold pmos transistors - Google Patents

Embedded sige process for multi-threshold pmos transistors Download PDF

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Publication number
WO2017041098A1
WO2017041098A1 PCT/US2016/050409 US2016050409W WO2017041098A1 WO 2017041098 A1 WO2017041098 A1 WO 2017041098A1 US 2016050409 W US2016050409 W US 2016050409W WO 2017041098 A1 WO2017041098 A1 WO 2017041098A1
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WO
WIPO (PCT)
Prior art keywords
pmos transistor
sige
gate
cavity
voltage
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Ceased
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PCT/US2016/050409
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English (en)
French (fr)
Inventor
Younsung Choi
Deborah J. Riley
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Texas Instruments Japan Ltd
Texas Instruments Inc
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Texas Instruments Japan Ltd
Texas Instruments Inc
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Priority to CN201680043865.3A priority Critical patent/CN107924915B/zh
Priority to JP2018512130A priority patent/JP6948099B2/ja
Priority to EP16843189.8A priority patent/EP3345219B1/en
Publication of WO2017041098A1 publication Critical patent/WO2017041098A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/791—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions
    • H10D30/797—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions being in source or drain regions, e.g. SiGe source or drain
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/022—Manufacture or treatment of FETs having insulated gates [IGFET] having lightly-doped source or drain extensions selectively formed at the sides of the gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/01—Manufacture or treatment
    • H10D62/021—Forming source or drain recesses by etching e.g. recessing by etching and then refilling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149—Source or drain regions of field-effect devices
    • H10D62/151—Source or drain regions of field-effect devices of IGFETs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0128—Manufacturing their channels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/013—Manufacturing their source or drain regions, e.g. silicided source or drain regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82—Heterojunctions
    • H10D62/822—Heterojunctions comprising only Group IV materials heterojunctions, e.g. Si/Ge heterojunctions

Definitions

  • This relates generally to integrated circuits, and more particularly to PMOS transistors with silicon germanium source and drain diffusions.
  • the first dry etch step is a first anisotropic dry etch used to etch through a deposited hardmask layer (e.g., silicon nitride) to begin etching of a cavity in the substrate (e.g., silicon), followed by an isotropic dry lateral etch (dry lateral etch) that expands the cavity including laterally toward the PMOS transistor channel, followed by a second anisotropic dry etch to define the bottom wall of the cavity.
  • a deposited hardmask layer e.g., silicon nitride
  • dry lateral etch dry lateral etch
  • the multi-step dry etch is generally followed by a wet crystallographic etch, which forms a "diamond-shaped" cavity.
  • the wet etchant for the crystallographic etch has crystal orientation selectivity to the substrate material, such as an etchant comprising tetramethyl ammonium hydroxide (TMAH), which is used to etch the substrate beginning with the U-shaped recesses provided by the multi-step dry etch processing.
  • TMAH tetramethyl ammonium hydroxide
  • the etch rate of the ⁇ 111> crystal orientation is less than that of other crystal orientations such as ⁇ 100>.
  • the U-shaped recess becomes a diamond-shaped recess.
  • FIG. 1 A is a depiction showing an in-process PMOS transistor just prior to the formation of SiGe (silicon germanium) source and drain diffusions.
  • the PMOS transistor is shown having a gate stack including a gate electrode 104 on a substrate 102 such as silicon, with a sidewall spacer 116 on the walls of the gate stack and a hard mask layer (e.g., silicon nitride) 106 on the gate electrode 104.
  • P-type source and drain extensions 110 and n-type halo or pockets 112 are formed self-aligned to an offset spacer 108 dielectric, such as silicon dioxide or silicon nitride.
  • the p-type extensions 110 electrically connect the PMOS transistor channel to the deep source drains to which contacts are formed.
  • the n-type pockets 1 2 increase the doping in the PMOS transistor channel 1 14 and set the PMOS transistor turn on voltage (vtp).
  • FIG. IB shows the PMOS transistor immediately after completing multi-step dry cavity etch processing.
  • the first dry etch step is a first anisotropic dry etch used to etch through a deposited hardmask layer (eg. silicon nitride) and to begin etching a cavity into the substrate 102. This is followed by an isotropic dry lateral etch step that expands the cavity laterally 1 18 toward the PMOS transistor channel 1 14. This etch is typically followed by a second anisotropic dry etch to define the bottom wall of the cavity 120.
  • a first anisotropic dry etch used to etch through a deposited hardmask layer (eg. silicon nitride) and to begin etching a cavity into the substrate 102.
  • an isotropic dry lateral etch step that expands the cavity laterally 1 18 toward the PMOS transistor channel 1 14.
  • This etch is typically followed by a second anisotropic dry etch to define the bottom wall of the cavity 120.
  • FIG. 1 C shows a depiction of an in-process PMOS transistor after the wet crystallographic cavity etch forms diamond-shaped recesses 122.
  • the C2G (cavity to gate space) is the distance from the edge of the cavity to the edge of the transistor gate.
  • boron doped SiGe is grown epitaxially in the diamond-shaped recesses to form the PMOS embedded SiGe source/drain regions.
  • the embedded SiGe regions are spaced close enough to the outer edge of the PMOS transistor channel, so that they impart a high amount of compressive stress to the channel.
  • the SiGe regions are not too close to the outer edge of the PMOS transistor channel, so that dopant diffusion from the in-situ doping in the SiGe runs into the PMOS channel and alters the PMOS threshold voltage (vtp).
  • Integrated circuits often require PMOS transistors with a low turn on voltage (LVPMOS) for high performance circuits in addition to the core PMOS transistors.
  • LVPMOS low turn on voltage
  • one pattern and implantation step is used to set the vt of the core PMOS transistors, and a second pattern and implantation step is used to set the lower vtp of the LVPMOS transistors.
  • an integrated circuit is formed with a first PMOS transistor with extension and pocket implants and with SiGe source and drains and with a second PMOS transistor without extension and without pocket implants and with SiGe source and drains.
  • the distance from the SiGe source and drains to the gate of the first PMOS transistor is greater than the distance from the SiGe source and drains to the gate of the second PMOS transistor.
  • the turn on voltage of the first PMOS transistor is higher than the turn on voltage of the second PMOS transistor.
  • Described examples include a method for forming an integrated circuit with a first PMDS transistor with extension and pocket implants and with SiGe source and drains and with a second PMOS transistor without extension and without pocket implants and with SiGe source and drains.
  • the distance from the SiGe source and drains to the gate of the first PMDS transistor is greater than the distance from the SiGe source and drains to the gate of the second PMOS transistor, and the turn on voltage of the first PMDS transistor is higher than the turn on voltage of the second PMOS transistor
  • FIG. 1A-1C are cross-sections of the formation of SiGe source and drains on a PMOS transistor
  • FIG. 2A through FIG. 2E are cross sections of an integrated circuit with an embodiment low voltage PMOS transistor depicted in successive stages of fabrication.
  • C2Gd refers to the SiGe cavity to gate space for a PMOS transistor with extension and pocket doping.
  • C2Gu refers to the SiGe cavity to gate space for a LVPMOS transistor without extension and pocket doping (undoped).
  • FIG. 2E shows a portion of an integrated circuit with a core PMOS 205 and low voltage PMOS (LVPMOS) 21 5 transistor with SiGe source and drains formed according to embodiments.
  • the LVPMOS transistor 215 with a lower vtp is formed with no additional lithography or implantation steps.
  • the core PMOS transistor 205 has source and drain extensions 210 and pockets 212.
  • the LVPMOS transistor 215 does not have source and drain extensions and does not have pockets.
  • the SiGe cavity to gate space (C2Gd) on the core PMOS transistor is greater than the SiGe cavity to gate space (C2Gu) of the LVPMOS transistor.
  • the lack of pocket doping and the smaller SiGe cavity to gate space on the LVPMOS transistor results in a transistor with a lower turn on voltage.
  • the smaller cavity SiGe to gate space on the LVPMOS transistor also enables the source and drain diffusions of the LVPMOS transistor to electrically connect to the transistor channel without increased series resistance.
  • a method for forming a core PMOS transistor and a LVPMOS transistor with SiGe source and drain diffusions using only one extension pattern and implantation step is illustrated in steps in an integrated circuit manufacturing flow depicted in FIGS. 2A through 2E.
  • FIG. 2A shows a cross section through PMOS transistor gates 204 in an integrated circuit.
  • PMOS transistor gates 204 with a dielectric capping layer 206 are formed on an n-type substrate 202.
  • the n-type substrate may be an nwell formed in a p-type substrate.
  • Shallow trench isolation (STI) 218 electrically isolates the core PMOS transistor 205 from the LVPMOS transistor 215.
  • a core PMOS extension photoresist pattern 224 is formed on the integrated circuit blocking the extension implant 226 and the pocket implant 228 from the LVPMOS transistor 215 and opening the core PMOS transistor 205 to the extension 226 and pocket 228 implants.
  • the p-type extension implant 226 may be self-aligned to an offset spacer 208 (dielectric such as Si02 or Si3N4) forming the core PMOS source and drain extensions 210.
  • the n-type halo or pocket implant 228 may be implanted self-aligned to an offset spacer 208 to adjust the doping of the core PMOS transistor channel 1 14 to set the turn on voltage (vtp). After performing the extension and halo implants, photoresist pattern 224 is removed.
  • FIG. 2B shows the integrated circuit after SiGe spacer sidewalls 216 are formed on the PMOS transistor gates 204,
  • the SiGe spacer sidewalls 216 and the dielectric capping layer 206 completely enclose the gate 204 to prevent epitaxial growth of SiGe on the gate 204 material.
  • the SiGe spacer sidewalls are about 20 nm of silicon nitride,
  • FIG. 2C shows the integrated circuit after a multi-step dry etch forms the U-shaped cavities 220A (for the core PMOS transistor 205) and 220B (for the LVPMOS transistor 215) in the substrate 202.
  • the first dry etch step may be a first anisotropic dry etch used to etch through a deposited hard mask layer (e.g., silicon nitride) and to begin etching the cavities 220A and 220B into the substrate 202. This may be followed by an isotropic dry lateral etch step that expands the cavity laterally toward the channel. This etch may be followed by a second anisotropic dry etch to define the bottom wall of the cavities 220A and 220B.
  • a first anisotropic dry etch used to etch through a deposited hard mask layer (e.g., silicon nitride) and to begin etching the cavities 220A and 220B into the substrate 202.
  • This may be followed by an isotropic dry lateral etch
  • U-shaped cavities 220A and 220B are both similarly aligned to the spacers 216.
  • a wet crystallographic etch is used to etch along crystallographic planes in the substrate 202 to produce "diamond-shaped" cavities 222A and 222B.
  • the wet etchant for the crystallographic etch has crystal orientation selectivity to the substrate material, such as an etchant comprising tetramethyl ammonium hydroxide (TMAH), which is used to etch the substrate beginning with the U-shaped recesses 220A and 220B (FIG. 2C) provided by the multi-step dry etch processing.
  • TMAH tetramethyl ammonium hydroxide
  • the etch rate of the ⁇ l l l>crystal orientation is less than that of other crystal orientations such as ⁇ 100>.
  • the U-shaped recesses 220A and 220B become diamond-shaped.
  • the lightly doped silicon (no extension and pocket implant) where the LVPMOS 215 transistor is being formed etches faster than the silicon by PMOS transistor 205 that is more heavily doped by the extension implant 226.
  • cavity 220B extends further under spacers 216 than cavity 220 A at the surface/top of the cavities.
  • the cavity to gate space (C2Gu) with the lightly doped substrate on the LVPMOS transistor 215 is about 5 nm compared to 15 nm for the cavity to gate space (C2Gd) with the boron doped extension on the core PMOS transistor 205.
  • the smaller C2Gu on the LVPMOS transistor enables the p-type SiGe to connect to the LVPMOS transistor 215 channel without an extension implant. Also, the stress is increased because the SiGe will be closer to the transistor channel on the LVPMOS transistor 215, additionally improving the performance of the LVPMOS transistor.
  • the combination of the SiGe being closer to the transistor channel plus the lack of a pocket implant lowers the turn on voltage of the LVPMOS transistor.
  • the turn on voltage of the LVPMOS transistor 215 is about 200 mV lower than the turn on voltage of the core PMOS transistor 205.
  • p-doped SiGe 230 is epitaxially grown to fill the diamond shaped cavities 222A and 222B on the core PMOS 205 and LVPMOS 215 transistors, respectively.
  • the p-doped SiGe is sufficiently close (C2Gu) to the channel of the LVPMOS transistor to electrically connect the p-type SiGe to the channel of the LVPMOS transistor 215 without a p-type extension implant, whereas the p-type doped SiGe is too far (C2Gd) from the channel of the core PMOS transistor to form an electrical connection. Additional processing to add deep source and drain diffusions, siiicide, contacts and interconnect levels may then be performed to complete the integrated circuit.
  • dopant may be implanted at low energy to fine tune the LVPMOS transistor 215 turn on voltage when the nweil dopant is implanted.
  • Core PMOS 205 and LVPMOS 215 transistors with SiGe source and drains are simultaneously formed using only one extension and pocket patterning and implantation step. This saves significant cost and cycle time over the conventional method that requires separate patterning and implantation steps for the core PMOS 205 and LVPMOS 21 5 transistors.

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  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
PCT/US2016/050409 2015-09-03 2016-09-06 Embedded sige process for multi-threshold pmos transistors Ceased WO2017041098A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201680043865.3A CN107924915B (zh) 2015-09-03 2016-09-06 用于多阈值PMOS晶体管的嵌入式SiGe工艺
JP2018512130A JP6948099B2 (ja) 2015-09-03 2016-09-06 マルチ閾値ＰＭＯＳトランジスタのための埋め込みＳｉＧｅプロセス
EP16843189.8A EP3345219B1 (en) 2015-09-03 2016-09-06 Embedded sige process for multi-threshold pmos transistors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/845,112 US10026837B2 (en) 2015-09-03 2015-09-03 Embedded SiGe process for multi-threshold PMOS transistors
US14/845,112 2015-09-03

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US (2) US10026837B2 (https=)
EP (1) EP3345219B1 (https=)
JP (1) JP6948099B2 (https=)
CN (1) CN107924915B (https=)
WO (1) WO2017041098A1 (https=)

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CN107924915B (zh) 2023-12-12
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US10026837B2 (en) 2018-07-17
US20170069755A1 (en) 2017-03-09
US20180308977A1 (en) 2018-10-25
JP6948099B2 (ja) 2021-10-13
EP3345219A4 (en) 2018-08-29
EP3345219A1 (en) 2018-07-11
JP2018526831A (ja) 2018-09-13
CN107924915A (zh) 2018-04-17

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