WO2017030007A1 - 固体撮像装置、固体撮像装置の駆動方法、及び、電子機器 - Google Patents
固体撮像装置、固体撮像装置の駆動方法、及び、電子機器 Download PDFInfo
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/67—Noise processing, e.g. detecting, correcting, reducing or removing noise applied to fixed-pattern noise, e.g. non-uniformity of response
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/60—Noise processing, e.g. detecting, correcting, reducing or removing noise
- H04N25/616—Noise processing, e.g. detecting, correcting, reducing or removing noise involving a correlated sampling function, e.g. correlated double sampling [CDS] or triple sampling
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/709—Circuitry for control of the power supply
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
- H04N25/75—Circuitry for providing, modifying or processing image signals from the pixel array
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
Definitions
- the present technology relates to a solid-state imaging device, a driving method of the solid-state imaging device, and an electronic device, and more particularly, to a solid-state imaging device, a driving method of the solid-state imaging device, and an electronic device that can reduce power supply noise of pixel signals. .
- the pixel portion including the photoelectric conversion element is configured to easily propagate power supply noise, and the power supply noise in the pixel circuit is dominant in the power supply noise of the entire CMOS image sensor.
- Patent Document 1 it has been proposed to input a pixel signal including power supply noise and a signal obtained by mirroring the power supply noise to a differential input amplifier to remove the power supply noise from the pixel signal.
- Patent Document 1 requires a differential input amplifier for each CDS (Correlated Double Sampling) circuit.
- CDS Correlated Double Sampling
- power consumption and circuit Scale increases.
- the present technology makes it possible to reduce power supply noise of pixel signals by a single-ended circuit configuration.
- a solid-state imaging device detects a noise component of a pixel unit in which a plurality of unit pixels that perform photoelectric conversion are arranged, and a power source used to drive the unit pixel, and cancels the noise component
- a power supply noise detector that outputs a single-ended cancellation signal including a component; and a single-ended pixel signal output from the unit pixel; and based on the cancellation signal, the noise component is extracted from the sampled pixel signal.
- a sample and hold unit that holds and outputs the removed pixel signal and an A / D conversion unit that performs A / D (Analog / Digital) conversion of the held pixel signal.
- the power supply noise detection unit has a first charge accumulation unit that accumulates charges based on the pixel signal, and a second reference electrode that shares a reference potential with the first charge accumulation unit and accumulates charges based on the cancel signal.
- Charge storage portions can be provided.
- the second charge storage unit has substantially the same amount of charge as noise charge that is stored in the first charge storage unit due to the noise component of the pixel signal during the sampling period of the pixel signal. Cancellation charge can be accumulated by the cancellation component of the cancellation signal.
- the sample-and-hold unit includes the noise charge accumulated in the first charge accumulation unit and the cancel charge accumulated in the second charge accumulation unit during the sample period in the pixel signal hold period. Can be offset.
- the cancellation component is a component obtained by amplifying the noise component with a predetermined gain, and the capacity of the second charge storage unit is made smaller than the capacity of the first charge storage unit by an amount corresponding to the gain. it can.
- the phase of the cancel component can be a phase obtained by inverting the phase of the noise component.
- the power supply noise detection unit can be provided with an adjustment mechanism that adjusts the phase of the gain and the cancellation component.
- One end different from the one set to the reference potential of the second charge storage unit is connected to the output of the power supply noise detection unit via a first switch that is turned on during the sampling period of the pixel signal
- the second charge switch can be connected to one end different from the one set to the reference potential of the first charge storage section via a second switch that is turned on during the hold period of the pixel signal.
- the power supply noise detector is provided with a first output for outputting the cancel signal and a second output for outputting a single-ended reference signal indicating a bias voltage of the cancel signal, and the second charge storage unit
- One end different from the one set to the reference potential is connected to the first output via a first switch that is turned on during the sampling period of the pixel signal, and is turned on during the hold period of the pixel signal. Can be connected to the second output via the switch.
- a driving method of a solid-state imaging device detects a noise component of a power source used for driving a plurality of unit pixels that perform photoelectric conversion, and outputs a single-ended cancellation signal including a cancellation component that cancels the noise component.
- a power supply noise detection step to output, a single-ended pixel signal output from the unit pixel is sampled, and the pixel signal obtained by removing the noise component from the sampled pixel signal is held based on the cancellation signal.
- An electronic apparatus detects a noise component of a pixel unit in which a plurality of unit pixels that perform photoelectric conversion are arranged, and a power source used to drive the unit pixel, and cancels the noise component
- a power supply noise detection unit that outputs a single-ended cancellation signal including a single-ended pixel signal output from the unit pixel, and removes the noise component from the sampled pixel signal based on the cancellation signal
- a solid-state imaging device including a sample-and-hold unit that holds and outputs the pixel signal, and an A / D conversion unit that performs A / D (Analog / Digital) conversion of the held pixel signal.
- a noise component of a power source used for driving a plurality of unit pixels that perform photoelectric conversion is detected, and a single-ended cancellation signal including a cancellation component that cancels the noise component is output, and the unit pixel
- the single-ended pixel signal output from is sampled, and based on the cancellation signal, the pixel signal obtained by removing the noise component from the sampled pixel signal is held and output, and the A of the held pixel signal / D (Analog / Digital) conversion is performed.
- the semiconductor device and the electronic device may be independent components or devices, or may be a module incorporated in another device.
- power supply noise of pixel signals can be reduced.
- FIG. 1 is a system configuration diagram showing an outline of the configuration of a solid-state imaging device to which the present technology is applied, for example, a CMOS image sensor which is a kind of XY address type solid-state imaging device.
- the CMOS image sensor is an image sensor created by applying or partially using a CMOS process.
- the CMOS image sensor 10 includes a pixel unit 11, a timing control circuit 12, a vertical scanning circuit 13, a power supply noise detection unit 14, a sample and hold unit 15, an A / D (Analog / Digital) conversion unit 16, and a horizontal scanning circuit 17. It is comprised so that it may contain. Further, the power supply noise detection unit 14 and the sample and hold unit 15 constitute a power supply noise cancellation unit 31.
- the pixel unit 11 includes unit pixels (hereinafter sometimes simply referred to as “pixels”) each having a photoelectric conversion unit 61 that generates and accumulates charges according to the received light amount in the row direction and the column direction, that is, The configuration is two-dimensionally arranged in a matrix.
- the row direction refers to the pixel arrangement direction (that is, the horizontal direction) of the pixel row
- the column direction refers to the pixel arrangement direction (that is, the vertical direction) of the pixel column.
- the pixel drive lines 18 are wired along the row direction for each pixel row and the vertical signal lines 19 are wired along the column direction for each pixel column in the matrix pixel arrangement.
- the pixel drive line 18 transmits a drive signal for performing driving when reading a signal from the unit pixel 51.
- the pixel driving line 18 is shown as one wiring for each row, but the number is not limited to one.
- the power supply voltage Vdd_pix used for driving each unit pixel 51 is supplied to each unit pixel 51 of the pixel unit 11 from a power source (not shown).
- the timing control circuit 12 supplies a clock signal, a control signal, and the like to the vertical scanning circuit 13, the power supply noise detection unit 14, the sample and hold unit 15, the A / D conversion unit 16, and the horizontal scanning circuit 17, and the operation of each unit To control.
- the vertical scanning circuit 13 transmits a driving signal for driving when reading a pixel signal from the unit pixel 51 of the pixel unit 11 via the pixel driving line 18 and selects a reading row. Then, the vertical scanning circuit 13 outputs a pixel signal from the unit pixel 51 of the selected row to the vertical signal line 19.
- the power supply noise detection unit 14 detects a noise component of the power supply voltage Vdd_pix supplied to the pixel unit 11 and supplies a single-end cancel signal including a cancel component for canceling the detected noise component to the sample and hold unit 15.
- the sample and hold unit 15 is provided with a sample and hold circuit 71 for each vertical signal line 19.
- Each sample and hold circuit 71 samples and holds (holds) a single-ended pixel signal supplied from each unit pixel 51 via the vertical signal line 19.
- the A / D converter 16 A / D converts the analog pixel signal held by the sample and hold circuit 71 into a digital signal.
- the horizontal scanning circuit 17 transfers the digital pixel signal output from the A / D converter 16 in the horizontal direction. As a result, imaging data composed of digital pixel signals is output.
- the unit pixel 51 is configured to include a photodiode 61, a transfer transistor 62, a reset transistor 63, an FD (floating diffusion) unit 64, an amplification transistor 65, a selection transistor 66, and a current source 67.
- a transfer signal TRG is supplied to the transfer transistor 62 from the vertical scanning circuit 13 via the pixel drive line 18.
- a reset signal RST is supplied from the vertical scanning circuit 13 to the reset transistor 63 via the pixel drive line 18.
- a selection signal SEL is supplied from the vertical scanning circuit 13 to the selection transistor 66 via the pixel drive line 18.
- the unit pixel 51 in FIG. 1 has a general circuit configuration, and a detailed description thereof is omitted here.
- the unit pixel 51 is not limited to this example, and can be a unit pixel having an arbitrary circuit configuration. Furthermore, the unit pixel 51 may have a shared pixel structure.
- the unit pixel 51 having the shared pixel structure includes, for example, a plurality of photodiodes 61, a plurality of transfer transistors 62, one shared FD portion 64, and one other shared transistor.
- FIG. 2 shows a configuration example of the power supply noise canceling unit 31a which is the first embodiment of the power supply noise canceling unit 31 of FIG.
- the power supply noise cancellation unit 31a is a power supply noise detection unit 14a that is the first embodiment of the power supply noise detection unit 14 in FIG. 1 and a sample that is the first embodiment of the sample and hold unit 15 in FIG. It is comprised by the and hold part 15a (not shown).
- the sample and hold unit 15a includes a plurality of sample and hold circuits 71a that are the first embodiment of the sample and hold circuit 71 of FIG.
- FIG. 2 only one unit pixel 51, power supply noise detector 14a, and one sample-and-hold circuit 71a are illustrated for easy understanding of the drawing. For ease of viewing the drawing, some of the reference numerals are omitted.
- the sample and hold circuit 71a is configured to include switches 101 to 105, transistors 106 to 112, and sampling capacitors Cvsl and Cpsr.
- the transistors 106, 107, and 110 to 112 are p-type MOSFETs, and the transistors 108 and 109 are n-type MOSFETs.
- the sampling capacitors Cvsl and Cpsr are composed of capacitors, for example.
- the sampling capacitor Cvsl accumulates charges based on a single-ended pixel signal supplied from the unit pixel 51 through the vertical signal line 19.
- One end of the sampling capacitor Cvsl is connected to the vertical signal line 19 via the switch 101, and is connected to the drain of the transistor 111 and the source of the transistor 112 via the switch 104.
- the other end of the sampling capacitor Cvsl is connected to the gate of the transistor 109, and is connected to the drain of the transistor 107, the drain of the transistor 108, and the gate of the transistor 112 via the switch 105.
- the sampling capacitor Cpsr accumulates charges based on a single-ended cancel signal supplied from the power supply noise detector 14a.
- One end of the sampling capacitor Cpsr is connected to the output of the power supply noise detector 14a via the switch 102, and one end of the sampling capacitor Cpsr connected to the vertical signal line 19 via the switch 101 is connected to the switch 103. Connected through.
- the other end of the sampling capacitor Cpsr is connected to the other end of the sampling capacitor Cvsl. Accordingly, the sampling capacitor Cvsl and the sampling capacitor Cpsr are set to a common sampling reference potential (for example, the potential of the virtual ground point VG).
- sampling capacity Cvsl is Cvsl
- sampling capacity Cpsr is Cpsr
- the source of the transistor 106 is connected to a power source (not shown), and the drain is connected to the source of the transistor 107.
- a gate signal Vbias_p ⁇ b> 1 is applied to the gate of the transistor 106.
- the gate signal Vbias_p2 is applied to the gate of the transistor 107.
- the source of the transistor 108 is connected to the drain of the transistor 109.
- a gate signal Vbias_n1 is applied to the gate of the transistor.
- the source of the transistor 109 is grounded.
- the source of the transistor 110 is connected to a power source (not shown), and the drain is connected to the source of the transistor 111.
- a gate signal Vbias_p3 is applied to the gate of the transistor 110.
- the gate signal Vbias_p4 is applied to the gate of the transistor 111.
- the drain of the transistor 112 is grounded.
- the switches 101 and 102 are turned on when the sample signal ph_s supplied from the timing control circuit 12 is on (high level) and turned off when the sample signal ph_s is off (low level).
- the switches 103 and 104 are turned on when the hold signal ph_h supplied from the timing control circuit 12 is turned on, and turned off when the hold signal ph_h is turned off.
- the switch 105 is turned on when the sample signal ph_sa supplied from the timing control circuit 12 is turned on, and turned off when the sample signal ph_sa is turned off.
- an analog pixel signal indicating the source potential VoutA of the transistor 112 is output from the sample and hold circuit 71a.
- FIG. 3 shows a timing chart of the sample signal ph_s, the sample signal ph_sa, and the hold signal ph_h.
- the sample period starts when the sample signal Ph_s and the sample signal Ph_sa are turned on and the switches 101, 102, and 105 are turned on.
- the fluctuation range of the power supply fluctuation (AC component) which is a noise component of the power supply voltage Vdd_pix is ⁇ Vpix
- the rate at which the power supply fluctuation of the pixel unit 11 appears on the vertical signal line 19 is Kvsl
- the signal component of the pixel signal of the unit pixel 51 is Assuming Vsig, the average waveform of the pixel signal is a waveform that oscillates with a width of ⁇ Vpix ⁇ Kvsl with reference to the signal voltage Vsig, as shown in FIG.
- the charge Qvsl accumulated in the sampling capacitor Cvsl during the sample period is expressed by the following equation (1).
- ⁇ Vpix ⁇ Kvsl ⁇ Cvsl in the second term of the equation (1) is a charge accumulated in the sampling capacitor Cvsl due to the power supply noise component ( ⁇ Vpix ⁇ Kvsl) of the pixel signal, and is hereinafter referred to as a noise charge ⁇ Qvsl.
- the cancel signal output from the power supply noise detector 14a is a signal obtained by adding a voltage obtained by multiplying the power supply fluctuation ⁇ Vpix by Kpsr to a predetermined bias voltage Vpsr
- the average waveform of the cancel signal is as shown in FIG.
- the waveform oscillates with a width of ⁇ Vpix ⁇ Kpsr with reference to the bias voltage Vpsr.
- the charge Qpsr accumulated in the sampling capacitor Cpsr during the sample period is expressed by the following equation (2).
- ⁇ Vpix ⁇ Kpsr ⁇ Cpsr in the second term of the equation (2) is a charge accumulated in the sampling capacitor Cpsr by a cancel component ( ⁇ Vpix ⁇ Kpsr) which is an AC component of the cancel signal. It is called ⁇ Qpsr.
- the cancel component is a component obtained by amplifying the power supply fluctuation ⁇ Vpix with a gain Kpsr.
- the hold signal ph_h is turned on, the switches 103 and 104 are turned on, and the hold period starts.
- the switch 103 is turned on and both ends of the sampling capacitor Cvsl and the sampling capacitor Cpsr are connected to redistribute the charge Qvsl and the charge Qpsr accumulated in the sampling capacitors Cvsl and Cpsr during the sample period.
- the voltage VoutA of the pixel signal output from the sample and hold circuit 71a is expressed by the following equation (3).
- the noise charge ⁇ Qvsl ⁇ cancel charge ⁇ Qpsr.
- Kpsr -Kvsl ⁇ Cvsl / Cpsr (4)
- the charge Qvsl and the charge Qpsr accumulated in the sampling capacitors Cvsl and Cpsr are redistributed to cancel the noise charge ⁇ Qvsl and the cancel charge ⁇ Qpsr. Further, by substituting the gain Kpsr of the equation (4) into the equation (3), the voltage VoutA of the pixel signal output from the sample and hold circuit 71a is expressed by the following equation (5).
- VoutA (Vsig ⁇ Cvsl + Vpsr ⁇ Cpsr) / (Cvsl + Cpsr) (5)
- the power supply fluctuation ⁇ Vpix disappears in the equation (5), and the power supply noise component is removed from the voltage VoutA of the pixel signal output from the sample and hold circuit 71a.
- the hold signal ph_h is turned off, the switches 103 and 104 are turned off, and the hold period ends.
- FIG. 4 shows a configuration example of the power supply noise detector 14a of FIG.
- the power supply noise detection unit 14a is configured to include a power supply noise detection circuit 151a and a buffer amplifier 152.
- the power supply noise detection circuit 151a includes transistors mp1 to mp7, transistors mn1 to mn4, switches SW1 and SW2, variable capacitors Cadv and Cdly, variable capacitance array Cdiv, capacitors Ccpl and Cbias, variable resistance elements Rdet1 and Rdif, and a bias current source Is configured to include a current source 161.
- the transistors mp1 to mp7 are p-type MOSFETs.
- the transistor mp7 has a variable channel width (W).
- the transistors mn1 to mn4 and the switches SW1 and SW2 are n-type MOSFETs.
- the source of the transistor mp1 is connected to a power supply (not shown) that supplies a power supply voltage Vdd_pix, the source of the transistor mp2, the source of the transistor mp5, and the source of the transistor mp7.
- the source of the transistor mp1 is connected to the drain of the transistor mn1 and the gates of the transistors mn1 to mn4 via the current source 161. Further, the source of the transistor mp1 is connected to the gate of the transistor mp1, the drain of the transistor mp3, the gate of the transistor mp7, and the drain of the transistor mn2 through the variable capacitor Cdly.
- the source of the transistor mp1 is connected to the drain of the transistor mp1 and the source of the transistor mp3 via the variable capacitor Cadv.
- the source of the transistor mp1 is connected to the gate of the transistor mp4 and the drain of the switch SW2 via the capacitor Ccp1.
- the drain of the transistor mp1 is connected to the drain of the transistor mp2 and the source of the transistor mp4 via the variable resistance element Rdif.
- the gate of the transistor mp2 is connected to the drain of the transistor mp4 and the drain of the transistor mn3.
- the gate of the transistor mp3 is connected to the drain of the switch SW1.
- the gate of the transistor mp3 is connected to the sources of the transistors mn1 to mn4 via the capacitor Cbias.
- the back gate of the transistor mp3 is connected to the source of the transistor mp3.
- the gate of the transistor mp4 is connected to the sources of the transistors mn1 to mn4 via the variable capacitance array Cdiv.
- the back gate of the transistor mp4 is connected to the source of the transistor mp4.
- the gate of the transistor mp5 is connected to the gate and drain of the transistor mp6, the drain of the transistor mn4, the source of the switch SW1, and the source of the switch SW2.
- the drain of the transistor mp5 is connected to the source of the transistor mp6.
- the back gate of the transistor mp6 is connected to the source of the transistor mp6.
- the drain of the transistor mp7 is connected to the input of the buffer amplifier 152.
- the drain of the transistor mp7 is connected to the sources of the transistors mn1 to mn4 via the variable resistance element Rdet1.
- the sources of the transistors mn1 to mn4 are set to the ground potential.
- the clock signal CK is input to the gates of the switches SW1 and SW2.
- a differential amplifier is configured by the transistors mp1 and mp2.
- the differential amplifier input bias source 162 is configured by the transistors mp5, mp6, and mn4.
- the capacitor Cbias which is a bias voltage source is charged by a current supplied from the differential amplifier input bias source 162 via the switch SW1.
- the variable capacitance array Cdiv which is a bias voltage source, is charged by a current supplied from the differential amplifier input bias source 162 via the switch SW2.
- the clock signal CK is periodically input to the switches SW1 and SW2 (for example, every horizontal synchronization signal period), and the capacitor Cbias and the variable capacitance array Cdiv are charged, thereby forming the differential amplifier including the transistors mp1 and mp2. Can be operated at the optimum operating point.
- the component of the power supply fluctuation ⁇ Vpix included in the power supply voltage Vdd_pix input from the power supply passes through the capacitor Ccp1. Then, a power supply noise voltage obtained by adding a bias potential provided by the variable capacitance array Cdiv to a voltage based on the power supply fluctuation ⁇ Vpix is input to the gate of the transistor mp4 which is one input of the differential amplifier.
- the gate potential of the transistor mp3 which is the other input of the differential amplifier is set to a predetermined DC bias potential by the capacitor Cbias.
- This DC bias potential is set to substantially the same potential as that of the variable capacitance array Cdiv.
- the DC bias potential is not affected by the power supply fluctuation ⁇ Vpix.
- a voltage based on the difference between the power supply noise voltage input to the differential amplifier and the DC bias potential that is, a voltage based on the power supply fluctuation ⁇ Vpix included in the power supply voltage Vdd_pix is applied to both ends of the variable resistance element Rdif to generate a current. Converted.
- variable resistance element Rdif if the resistance value of the variable resistance element Rdif is increased, the variable resistance element Rdif becomes a thermal noise source, and therefore cannot be set to a very large resistance value.
- the resistance value of the variable resistance element Rdif is reduced, the steady current flowing through the variable resistance element Rdif increases.
- variable resistance element Rdif the voltage applied to both ends of the variable resistance element Rdif is reduced by inserting the variable resistance element Rdif between the source of the transistor mp3 and the source of the transistor mp4 which are the differential input pair of the differential amplifier. be able to. Thereby, the resistance value of the variable resistance element Rdif can be reduced without increasing the steady current of the variable resistance element Rdif.
- the gates of the transistors mp1 and mp2 serving as the PMOS current source of the differential amplifier are respectively connected to the drains of the transistors mp3 and mp4 serving as the differential input pair.
- the transconductance Gm of the transistors mp3 and mp4 can be increased, and as a result, the amount of attenuation when the power supply fluctuation ⁇ Vpix is converted into a current at both ends of the variable resistance element Rdif can be suppressed.
- the current flowing through the transistor mp1 is copied by the transistor mp1 and the transistor mp7 that forms a current mirror. Further, the current flowing through the transistor mp 7 is converted into the voltage VdetA by the variable resistance element Rdet 1, and the voltage VdetA is input to the buffer amplifier 152.
- the buffer amplifier 152 converts the input voltage VdetA into a cancel voltage Vcncl, and outputs a cancel signal indicating the cancel voltage Vcncl.
- the cancel voltage Vcncl is a voltage obtained by adding the cancel component voltage obtained by inverting the phase of the power supply fluctuation ⁇ Vpix and multiplying it by Kpsr to the bias voltage Vpsr.
- the bias voltage Vpsr is defined by the operating point of the buffer amplifier 152 based on the voltage VdetA.
- the buffer amplifier 152 is necessary when a large capacitive load or a resistive load is connected to the subsequent stage of the power supply noise detection unit 14a, but can be deleted in other cases.
- the circuit configuration and the circuit scale are different between the path where the power supply fluctuation ⁇ Vpix of the power supply voltage Vdd_pix reaches the sample and hold unit 15a via the pixel unit 11 and the path which reaches the sample and hold unit 15a via the power supply noise detection unit 14a.
- the transfer characteristic in the former path hereinafter referred to as pixel path transfer characteristic
- the transfer characteristic in the latter path hereinafter referred to as detection path transfer characteristic
- detection path transfer characteristic a mechanism for adjusting the gain and phase of the detection path transfer characteristic is provided in the power supply noise detection unit 14 so that the gain Kpsr of the power supply noise detection unit 14a can be set to the above-described equation (4).
- the gain of the detection path transfer characteristic can be adjusted by adjusting Rdet1 / Rdif which is the ratio of the resistance value of the variable resistance element Rdif and the resistance value of the variable resistance element Rdet1.
- the gain of the detection path transfer characteristic can be adjusted by adjusting the ratio of the current mirror composed of the transistors mp1 and mp7.
- the ratio of components based on the power supply fluctuation ⁇ Vpix in the power supply noise voltage input to the gate of the transistor mp4 is determined by the voltage division ratio represented by Ccp1 / (Ccp1 + Cdiv + Cg). Therefore, the gain of the detection path transfer characteristic can be adjusted by adjusting the capacitance Cdiv of the variable capacitance array Cdiv and adjusting the voltage dividing ratio.
- the third adjustment method does not change the direct current value or the resistance value as compared with the first and second adjustment methods, and therefore, gain adjustment is possible without changing the thermal noise characteristics appearing in the output.
- the third adjustment method can attenuate the gain, but cannot amplify it. Therefore, it is necessary to use another adjustment method according to the application.
- the phase of the detection path transfer characteristic can be adjusted in the advance direction by adjusting the capacitance of the variable capacitor Cadv.
- the phase of the detection path transfer characteristic can be adjusted in the delay direction.
- the gain Kpsr can be set to the above-described equation (4) by adjusting the gain and phase of the detection path transfer characteristic.
- the power supply noise component of the pixel signal output from the pixel unit 11 can be reduced by the single-ended circuit configuration.
- the power consumption and the circuit scale can be reduced as compared with the case of using a differential input circuit as in the above-mentioned cited document 1.
- the required capacity Cpsr of the sampling capacity Cpsr becomes Kvsl / Kpsr of the capacity Cvsl of the sampling capacity Cvsl. Therefore, by increasing the gain Kpsr of the power supply noise detector 14a, the capacity Cpsr of the sampling capacity Cpsr can be made smaller than the capacity Cvsl of the sampling capacity Cvsl by an amount corresponding to the gain Kpsr.
- the sample and hold circuit 71a can be realized by adding a small amount of elements to the conventional sample and hold circuit.
- CMOS image sensor 10 is provided with a plurality of circuits having the same configuration in parallel, the effect of reducing power consumption and circuit scale is further increased.
- FIG. 5 shows a configuration example of a power supply noise canceling unit 31b which is a second embodiment of the power supply noise canceling unit 31 of FIG.
- the power supply noise canceling unit 31b replaces the power supply noise detection unit 14a and the sample and hold unit 15a with a power supply noise detection unit 14b and a sample and hold unit 15b (not shown). Is different.
- the sample and hold unit 15b includes a plurality of sample and hold circuits 71b that are the second embodiment of the sample and hold circuit 71 of FIG.
- FIG. 5 only one unit pixel 51, power supply noise detector 14b, and one sample-and-hold circuit 71b are shown for easy viewing of the drawing. For ease of viewing the drawing, some of the reference numerals are omitted.
- the sample and hold circuit 71b is different from the sample and hold circuit 71a of FIG. 2 in that a switch 201 is provided instead of the switch 103.
- sampling capacitor Cpsr One end of the sampling capacitor Cpsr, which is connected to the power supply noise detector 14b via the switch 102, is connected to the power supply noise detector 14b via the switch 201. Then, a reference signal (described later) output from the power supply noise detection unit 14b is input to the sampling capacitor Cpsr via the switch 201.
- the switch 201 is turned on when the hold signal ph_h supplied from the timing control circuit 12 is turned on, and turned off when the hold signal ph_h is turned off.
- FIG. 6 shows a configuration example of the power supply noise detector 14b of FIG.
- symbol is attached
- the power supply noise detection unit 14b is different from the power supply noise detection unit 14a of FIG. 4 in that a power supply noise detection circuit 151b is provided instead of the power supply noise detection circuit 151a and a buffer amplifier 251 is added.
- the power supply noise detection circuit 151b is different from the power supply noise detection circuit 151a of FIG. 4 in that transistors mp8, mp9, and mn5 and a variable resistance element Rdet2 are added.
- the transistors mp8 and mp9 are p-type MOSFETs, and the transistor mn5 is an n-type MOSFET.
- the transistor mp8 has a variable channel width (W).
- the source of the transistor mp8 is connected to the source of the transistor mp1 and the source of the transistor mp9.
- the gate of the transistor mp8 is connected to the gate and drain of the transistor mp9 and the drain of the transistor mn5.
- the drain of the transistor mp8 is connected to the input of the buffer amplifier 251.
- the drain of the transistor mp8 is connected to the source of the transistor mn1 and the source of the transistor mn5 via the variable resistance element Rdet2.
- the sources of the transistors mn1 to mn5 are set to the ground potential.
- the gate of the transistor mn5 is connected to the gates of the transistors mn1 to mn4.
- the resistance value of the variable resistance element Rdet2 is adjusted to be the same as the resistance value of the variable resistance element Rdet1. Then, due to the circuit composed of the added transistors mp8, mp9 and mn5, a current substantially the same as the bias current flowing through the transistor mn2 flows through the transistor mp8.
- the current flowing through the transistor mp8 does not include an AC component due to the power supply fluctuation ⁇ Vpix flowing through the variable resistance element Rdif.
- the current flowing through the transistor mp8 is converted to the voltage VdetB by the variable resistance element Rdet2, and the voltage VdetB is input to the buffer amplifier 251.
- the buffer amplifier 251 converts the input voltage VdetB into a reference voltage Vref, and outputs a reference signal indicating the reference voltage Vref.
- the operating point of the buffer amplifier 251 is adjusted so that the reference voltage Vref is substantially equal to the bias voltage Vpsr.
- the sample and hold circuit 71b operates according to the timing chart shown in FIG.
- the sample signal Ph_s and the sample signal Ph_sa are turned on, the switches 101, 102, and 105 are turned on, and the sample period starts.
- the charge Qvsl represented by the above-described equation (1) is accumulated in the sampling capacitor Cvsl.
- the charge Qpsr represented by the above-described equation (2) is accumulated in the sampling capacitor Cpsr.
- the charge Qvg_samp of the virtual ground point VG in the sample period when the sample signals ph_s and ph_sa are turned on is the charge injection, feedthrough, gate of the switch.
- the parasitic capacitance is ignored, the following equation (6) is obtained.
- Qvg_samp ⁇ Vshg- (Vsig + ⁇ Vpix ⁇ Kvsl) ⁇ ⁇ Cvsl + ⁇ Vshg- (Vpsr + ⁇ pix ⁇ Kpsr) ⁇ ⁇ Cpsr ... (6)
- the hold signal ph_h is turned on, the switches 104 and 201 are turned on, and the hold period starts.
- the charge Qvg_hold of the virtual ground point VG in the hold period is expressed by the following equation (7), where the output voltage of the sample and hold circuit is VoutB.
- the output voltage VoutB of the sample and hold circuit 71b is expressed by the following expression (8) according to the above expressions (6) and (7).
- VoutB Vsig + ⁇ Vpix (Kvsl + Kpsr ⁇ Cpsr / Cvsl) (8)
- the power supply fluctuation ⁇ Vpix disappears in the equation (9), the power supply noise component is removed from the output voltage VoutB of the sample and hold circuit 71b, and becomes equal to the signal component Vsig of the pixel signal.
- the power supply noise component of the pixel signal output from the pixel unit 11 can be reduced by the single-ended circuit configuration as in the first embodiment.
- the capacitance Cvsl of the sampling capacitor Cvsl can be reduced by increasing the gain Kpsr of the power supply noise detector 14b. Accordingly, the sample and hold circuit 71b can be realized by adding a small amount of elements to the conventional sample and hold circuit.
- N sample and hold circuits 71 a are connected in parallel to one vertical signal line 19. Sample and hold processing of pixel signals of the plurality of unit pixels 51 connected to one vertical signal line 19 is performed by N sample and hold circuits 71a.
- FIG. 7 shows a configuration example of a power supply noise canceling unit 31c which is the third embodiment of the power supply noise canceling unit 31 of FIG.
- portions corresponding to those in FIGS. 2 and 4 are denoted by the same reference numerals.
- FIG. 7 for easy understanding of the drawing, one unit pixel 51, sample and hold circuits 71a-1 to 71a-N included in the sample and hold unit 15c (not shown), and the power supply noise detection unit 14c. Only shown.
- some reference numerals are omitted.
- the power source noise canceling unit 31c is a power source noise detecting unit 14c that is the third embodiment of the power source noise detecting unit 14 of FIG. 1 and a sample that is the third embodiment of the sample and hold unit 15 of FIG. It is comprised by the and hold part 15c (not shown).
- the sample and hold unit 15c includes a plurality of sample and hold circuits 71a (FIG. 2).
- the power supply noise detection unit 14c is provided with switches 301-1 to 301-N, buffer amplifiers 302-1 to 302-N, and capacitors Cs1 to CsN. The difference is that the amplifier 152 is not provided.
- the inputs of the buffer amplifiers 302-1 to 302-N are connected to the output of the power supply noise detection circuit 151a via the switches 301-1 to 301-N, respectively.
- the outputs of the buffer amplifiers 302-1 to 302-N are connected to the switches 102-1 to 102-N of the sample and hold circuits 71a-1 to 71a-N, respectively.
- the vertical signal line 19 is connected to the switches 101-1 to 101-N of the sample and hold circuits 71a-1 to 71a-N.
- sample and hold circuits 71a-1 to 71a-N are simply referred to as a sample and hold circuit 71a.
- FIG. 8 shows a timing chart of the sample signals ph_s1 to ph_sN, the sample signals ph_sa1 to ph_saN, and the hold signals ph_h1 to ph_hN.
- the sample signal Ph_s1 and the sample signal ph_sa1 are turned on, the switches 101-1, 102-1 and 105-1 and the switch 301-1 of the sample and hold circuit 71a-1 are turned on, and the sample period 1 is started.
- the pixel signal of the unit pixel 51 in the first row is supplied to the sampling capacitor Cvsl1 of the sample and hold circuit 71a-1 via the switch 101-1, and the sampling capacitor Cvsl1 is charged.
- the cancel signal of the power supply noise detection circuit 151a is supplied to the sampling capacitor Cpsr1 of the sample and hold circuit 71a-1 via the switch 301-1, the buffer amplifier 302-1 and the switch 102-1, and the sampling capacitor Cpsr1 is charged.
- the hold signal ph_h1 is turned on, the switches 103-1 and 104-1 of the sample and hold circuit 71a-1 are turned on, and the hold period 1 starts.
- the voltage VoutA1 obtained by removing the power supply noise component from the pixel signal of the unit pixel 51 in the first row is output from the sample and hold circuit 71a-1.
- the sample signal Ph_s2 and the sample signal ph_sa2 are turned on, and the switches 101-2, 102-2, and 105-2 of the sample and hold circuit 71a-2 and the switch 301-2 are turned on. Turns on and sample period 2 begins. Accordingly, the pixel signal of the unit pixel 51 in the second row is supplied to the sampling capacitor Cvsl2 of the sample and hold circuit 71a-2 via the switch 101-2, and the sampling capacitor Cvsl2 is charged.
- the cancel signal of the power supply noise detection circuit 151a is supplied to the sampling capacitor Cpsr2 of the sample and hold circuit 71a-2 via the switch 301-2, the buffer amplifier 302-2, and the switch 102-2, and the sampling capacitor Cpsr2 is charged.
- the pixel signal hold processing of the unit pixels 51 in the first row and the sample processing of the unit pixels 51 in the second row are executed in parallel.
- the hold signal ph_h1 is turned off, the switches 103-1 and 104-1 are turned off, and the hold period 1 ends. Further, after the sample signal Ph_sa2 is turned off and the switch 105-2 is turned off, the sample signal Ph_s2 is turned off, the switches 101-2, 102-2, and 301-2 are turned off, and the sample period 2 ends.
- the hold signal ph_h2 is turned on, the switches 103-2 and 104-2 of the sample and hold circuit 71a-2 are turned on, and the hold period 2 starts. Accordingly, as described above, the voltage VoutA2 obtained by removing the power supply noise component from the pixel signal of the unit pixel 51 in the second row is output from the sample and hold circuit 71a-2.
- the sample signal Ph_s3 and the sample signal ph_sa3 are turned on, and the switches 101-3, 102-3, and 105-3 of the sample and hold circuit 71a-3 and the switch 301-3 are turned on. Turns on and sample period 3 begins.
- the pixel signal of the unit pixel 51 in the third row is supplied to the sampling capacitor Cvsl3 of the sample and hold circuit 71a-3 via the switch 101-3, and the sampling capacitor Cvsl3 is charged.
- the cancel signal of the power supply noise detection circuit 151a is supplied to the sampling capacitor Cpsr3 of the sample and hold circuit 71a-3 via the switch 301-3, the buffer amplifier 302-3, and the switch 102-3, and the sampling capacitor Cpsr3 is charged.
- the pixel signal hold processing of the unit pixels 51 in the second row and the sample processing of the unit pixels 51 in the third row are executed in parallel.
- the hold signal ph_h2 is turned off, the switches 103-2 and 104-2 are turned off, and the hold period 2 ends. Further, after the sample signal Ph_sa3 is turned off and the switch 105-3 is turned off, the sample signal Ph_s3 is turned off, the switches 101-3, 102-3, and 301-3 are turned off, and the sample period 3 ends.
- the sample and hold process can be speeded up by executing the sample period and the hold period in parallel.
- the buffer amplifiers 302-1 to 302-N the isolation between the power supply noise detection circuit 151a and each sample and hold circuit 71a is ensured. Further, by providing the capacitors Cs1 to CsN, the buffer amplifiers 302-1 to 302-N are prevented from being in a floating state when the switches 301-1 to 301-N are turned off.
- buffer amplifiers 302-1 to 302-N and the capacitors Cs1 to CsN can be deleted. Whether or not to provide the buffer amplifiers 302-1 to 302-N and the capacitors Cs1 to CsN is determined by, for example, the accuracy of the required pixel signal.
- FIG. 9 shows a configuration example of a power supply noise canceling unit 31d which is the fourth embodiment of the power supply noise canceling unit 31 of FIG.
- parts corresponding to those in FIG. Further, in FIG. 9, for easy understanding of the drawing, one unit pixel 51, sample and hold circuits 71c-1 to 71c-N included in the sample and hold unit 15d (not shown), and the power supply noise detection unit 14d. Only shown. For ease of viewing the drawing, some of the reference numerals are omitted.
- the power supply noise canceling unit 31d is different from the power supply noise canceling unit 31c of FIG. 7 in place of the power supply noise detecting unit 14c and the sample and hold unit 15c, and the power supply noise detecting unit 14d and the sample and hold unit 15d (not shown). Is different.
- the sample and hold unit 15d includes a plurality of sample and hold circuits 71c.
- the power supply noise detection unit 14d is provided with the power supply noise detection circuit 151b of FIG. 6 instead of the power supply noise detection circuit 151a, and switches 401-1 to 401-N are added. Is different.
- the output portion of the cancel signal of the power supply noise detection circuit 151b is connected to the inputs of the buffer amplifiers 302-1 to 302-n via the switches 301-1 to 301-N.
- the output portion of the reference signal of the power supply noise detection circuit 151b is connected between the capacitors Cs1 to CsN and the inputs of the buffer amplifiers 302-1 to 302-n via the switches 401-1 to 401-N. Yes.
- the sample and hold circuits 71c-1 to 71c-N have a configuration in which the switch 102 and the switch 201 are deleted from the sample and hold circuit 71b of FIG.
- the outputs of the buffer amplifiers 302-1 to 302-N of the power supply noise detector 14d are connected to one ends of capacitors Cpsr1 to CpsrN of the sample and hold circuits 71c-1 to 71c-N, respectively.
- the vertical signal line 19 is connected to the switches 101-1 to 101-N of the sample and hold circuits 71a-1 to 71a-N.
- sample and hold circuit 71c when it is not necessary to individually distinguish the sample and hold circuits 71c-1 to 71c-N, they are simply referred to as the sample and hold circuit 71c.
- the power supply noise canceling unit 31d operates according to the timing chart shown in FIG.
- the sample signal Ph_s1 and the sample signal ph_sa1 are turned on, the switches 101-1 and 105-1 and the switch 301-1 of the sample and hold circuit 71c-1 are turned on, and the sample period 1 starts. Accordingly, the pixel signal of the unit pixel 51 in the first row is supplied to the sampling capacitor Cvsl1 of the sample and hold circuit 71c-1 via the switch 101-1, and the sampling capacitor Cvsl1 is charged. Further, the cancel signal of the power supply noise detection circuit 151b is supplied to the sampling capacitor Cpsr1 of the sample and hold circuit 71c-1 via the switch 301-1 and the buffer amplifier 302-1 and the sampling capacitor Cpsr1 is charged. .
- the hold signal ph_h1 is turned on, the switch 104-1 and the switch 401-1 of the sample and hold circuit 71c-1 are turned on, and the hold period 1 starts. Accordingly, as described above, the voltage VoutB1 obtained by removing the power supply noise component from the pixel signal of the unit pixel 51 in the first row is output from the sample and hold circuit 71c-1.
- Sample period 2 begins. Accordingly, the pixel signal of the unit pixel 51 in the second row is supplied to the sampling capacitor Cvsl2 of the sample and hold circuit 71c-2 via the switch 101-2, and the sampling capacitor Cvsl2 is charged.
- the cancel signal of the power supply noise detection circuit 151b is supplied to the sampling capacitor Cpsr2 of the sample and hold circuit 71c-2 via the switch 301-2 and the buffer amplifier 302-2, and the sampling capacitor Cpsr2 is charged. .
- the pixel signal hold processing of the unit pixels 51 in the first row and the sample processing of the unit pixels 51 in the second row are executed in parallel.
- the hold signal ph_h1 is turned off, the switches 104-1 and 401-1 are turned off, and the hold period 1 ends. Further, after the sample signal Ph_sa2 is turned off and the switch 105-2 is turned off, the sample signal Ph_s2 is turned off, the switches 101-2 and 301-2 are turned off, and the sample period 2 ends.
- the hold signal ph_h2 is turned on, the switch 104-2 and the switch 401-2 of the sample and hold circuit 71c-2 are turned on, and the hold period 2 starts.
- the voltage VoutB2 obtained by removing the power supply noise component from the pixel signal of the unit pixel 51 in the second row is output from the sample and hold circuit 71c-2.
- Sample period 3 begins. Accordingly, the pixel signal of the unit pixel 51 in the third row is supplied to the sampling capacitor Cvsl3 of the sample and hold circuit 71c-3 via the switch 101-3, and the sampling capacitor Cvsl3 is charged.
- the cancel signal of the power supply noise detection circuit 151b is supplied to the sampling capacitor Cpsr3 of the sample and hold circuit 71c-3 via the switch 301-3 and the buffer amplifier 302-3, and the sampling capacitor Cpsr3 is charged. .
- the pixel signal hold processing of the unit pixels 51 in the second row and the sample processing of the unit pixels 51 in the third row are executed in parallel.
- the hold signal ph_h2 is turned off, the switches 104-2 and 401-2 are turned off, and the hold period 2 ends. Further, after the sample signal Ph_sa3 is turned off and the switch 105-3 is turned off, the sample signal Ph_s3 is turned off, the switches 101-3 and 301-3 are turned off, and the sample period 3 ends.
- the sample and hold process can be speeded up by executing the sample period and the hold period in parallel.
- the buffer amplifiers 302-1 to 302-N the isolation between the power supply noise detection circuit 151b and each sample and hold circuit 71c is ensured. Further, by providing the capacitors Cs1 to CsN, the buffer amplifiers 302-1 to 302-N are prevented from being in a floating state when the switches 301-1 to 301-N and the switches 401-1 to 401-N are turned off.
- buffer amplifiers 302-1 to 302-N and the capacitors Cs1 to CsN can be deleted. Whether or not to provide the buffer amplifiers 302-1 to 302-N and the capacitors Cs1 to CsN is determined by, for example, the accuracy of the required pixel signal.
- FIG. 10 shows a configuration example of a power supply noise canceling unit 31e which is the fifth embodiment of the power supply noise canceling unit 31 of FIG.
- portions corresponding to those in FIGS. 2 and 4 are denoted by the same reference numerals.
- FIG. 10 in order to make the drawing easy to see, one unit pixel 51, sample and hold circuits 71a-1 and 71a-2 included in the sample and hold unit 15e (not shown), and the power supply noise detection unit 14e. Only shown. In addition, in order to make the figure easy to see, some reference numerals are omitted.
- the power source noise canceling unit 31e is a power source noise detecting unit 14e that is the fifth embodiment of the power source noise detecting unit 14 in FIG. 1 and a sample that is the fifth embodiment of the sample and hold unit 15 in FIG. It is comprised by the and hold part 15e (not shown).
- the sample and hold unit 15e includes a plurality of sample and hold circuits 71a (FIG. 2).
- the power supply noise detection unit 14e is different from the power supply noise detection unit 14a of FIG. 4 in that a switch 501, a buffer amplifier 502-1 and a capacitor Csd are added and the buffer amplifier 152 is not provided.
- the input of the buffer amplifier 502 is connected to the output of the power supply noise detection circuit 151a via the switch 501.
- One end of the capacitor Csd is connected between the switch 501 and the buffer amplifier 502, and the other end of the capacitor Csd is grounded.
- the output of the buffer amplifier 502 is connected to the switches 102-1 and 102-2 of the sample and hold circuits 71a-1 and 71a-2.
- the vertical signal line 19 is connected to the switches 101-1 and 101-2 of the sample and hold circuits 71a-1 and 71a-2.
- the switch 501 is turned on when the sample signal ph_sd supplied from the timing control circuit 12 is turned on, and turned off when the sample signal ph_sd is turned off.
- FIG. 11 shows a timing chart of the sample signals ph_s1 and ph_s2, the sample signals ph_sa1 and ph_sa2, the hold signals ph_h1 and ph_h2, and the sample signal ph_sd.
- the sample signal Ph_s1 and the sample signal ph_sa1 are turned on, and the switches 101-1, 102-1 and 105-1 of the sample and hold circuit 71a-1 are turned on. Further, the sample signal ph_sd is turned on and the switch 501 is turned on. Thereby, a sampling period of a pixel signal of reset potential (hereinafter referred to as a reset signal) is started.
- a reset signal a sampling period of a pixel signal of reset potential
- the reset signal of the unit pixel 51 is supplied to the sampling capacitor Cvsl1 of the sample and hold circuit 71a-1 via the switch 101-1, and the sampling capacitor Cvsl1 is charged.
- the cancel signal of the power supply noise detection circuit 151a is supplied to the sampling capacitor Cpsr1 of the sample and hold circuit 71a-1 via the switch 501, the buffer amplifier 502, and the switch 102-1, and the sampling capacitor Cpsr1 is charged.
- the sample signal Ph_s2 and the sample signal ph_sa2 are turned on, and the switches 101-2, 102-2, and 105-2 of the sample and hold circuit 71a-2 are turned on. To do.
- a sampling period of a pixel signal having an image signal potential (hereinafter referred to as an image signal) starts.
- the image signal of the unit pixel 51 is supplied to the sampling capacitor Cvsl2 of the sample and hold circuit 71a-2 via the switch 101-2, and the sampling capacitor Cvsl2 is charged.
- the cancel signal of the power supply noise detection circuit 151a is supplied to the sampling capacitor Cpsr2 of the sample and hold circuit 71a-2 through the switch 501, the buffer amplifier 502, and the switch 102-2, and the sampling capacitor Cpsr2 is charged.
- the hold signal ph_h1 is turned on, the switches 103-1 and 104-1 of the sample and hold circuit 71a-1 are turned on, and the reset signal hold period starts. To do. Thereby, as described above, the voltage Vout_rst obtained by removing the power supply noise component from the reset signal of the unit pixel 51 is output from the sample and hold circuit 71a-1.
- the sample signal ph_s2 is turned off
- the sample signal ph_sd is turned off and the switch 501 is turned off.
- the hold signal ph_h2 is turned on, the switches 103-2 and 104-2 of the sample and hold circuit 71a-2 are turned on, and the image signal hold period starts.
- the voltage Vout_sig obtained by removing the power supply noise component from the image signal of the unit pixel 51 is output from the sample and hold circuit 71a-2.
- the hold signals ph1 and ph2 are turned off, the switches 103-1, 103-2, 104-1 and 104-2 are turned off, and the hold period of the reset signal and the image signal ends.
- the sample signal ph_sd needs to be turned off at the same time when the sample signal ph_s2 is turned off, or before the hold signal ph_h2 is turned on after the sample signal ph_s2 is turned off. This is because the hold signals ph_h1 and ph_h2 are both turned on and the power supply noise detection circuit 151a outputs a parasitic signal while the power supply noise component is removed from the sample and hold circuits 71a-1 and 71a-2. This is to prevent the cancel signal from leaking through the capacity or the like. If this leakage is not a concern, the sample signal ph_sd may remain on.
- FIG. 12 shows a configuration example of a power supply noise canceling unit 31f that is the sixth embodiment of the power supply noise canceling unit 31 of FIG.
- parts corresponding to those in FIG. in order to make the drawing easier to see, one unit pixel 51, sample and hold circuits 71c-1 and 71c-2 included in the sample and hold unit 15f (not shown), and the power supply noise detection unit 14f. Only shown. In addition, in order to make the figure easy to see, some reference numerals are omitted.
- the reference numerals of the respective parts of the sample-and-hold circuit 71c-i 1 or 2) are “i” or “-i” at the end of the reference numerals of the corresponding parts of the sample-and-hold circuit 71b of FIG. It shall be attached.
- the power supply noise canceling unit 31f is a power supply noise detecting unit 14f that is the sixth embodiment of the power supply noise detecting unit 14 in FIG. 1 and a sample that is the sixth embodiment of the sample and hold unit 15 in FIG. It is comprised by the and hold part 15f (not shown).
- the sample and hold unit 15f includes a plurality of sample and hold circuits 71c (FIG. 9).
- the power supply noise detection unit 14f is provided with a switch 601 and is provided with a power supply noise detection circuit 151b of FIG. 6 instead of the power supply noise detection circuit 151a. Different.
- the output portion of the cancel signal of the power supply noise detection circuit 151b is connected to the input of the buffer amplifier 502 via the switch 501. Also, the bias voltage output section of the power supply noise detection circuit 151 b is connected between the capacitor Csd and the input of the buffer amplifier 502 via the switch 601.
- the output of the buffer amplifier 502 is connected to the sampling capacitors Cpsr1 and Cpsr2 of the sample and hold circuits 71c-1 and 71c-2.
- the vertical signal line 19 is connected to the switches 101-1 and 101-2 of the sample and hold circuits 71c-1 and 71c-2.
- the switch 501 is turned on when the sample signal ph_sd supplied from the timing control circuit 12 is turned on, and turned off when the sample signal ph_sd is turned off.
- the switch 601 is turned on when the hold signal ph_hd supplied from the timing control circuit 12 is turned on, and turned off when the hold signal ph_hd is turned off.
- FIG. 13 shows a timing chart of the sample signals ph_s1 and ph_s2, the sample signals ph_sa1 and ph_sa2, the hold signals ph_h1 and ph_h2, the sample signal ph_sd, and the hold signal ph_hd.
- the sample signal Ph_s1 and the sample signal ph_sa1 are turned on, and the switches 101-1 and 105-1 of the sample and hold circuit 71c-1 are turned on. Further, the sample signal ph_sd is turned on and the switch 501 is turned on. Thereby, the sampling period of the reset signal starts.
- the reset signal of the unit pixel 51 is supplied to the sampling capacitor Cvsl1 of the sample and hold circuit 71c-1 via the switch 101-1, and the sampling capacitor Cvsl1 is charged.
- the cancel signal of the power supply noise detection circuit 151b is supplied to the sampling capacitor Cpsr1 of the sample and hold circuit 71c-1 via the switch 501 and the buffer amplifier 502, and the sampling capacitor Cpsr1 is charged.
- the sample signal Ph_s2 and the sample signal ph_sa2 are turned on, and the switches 101-2 and 105-2 of the sample and hold circuit 71c-2 are turned on. This starts the sample period of the image signal.
- the image signal of the unit pixel 51 is supplied to the sampling capacitor Cvsl1 of the sample and hold circuit 71c-2 via the switch 101-2, and the sampling capacitor Cvsl2 is charged.
- the cancel signal of the power supply noise detection circuit 151b is supplied to the sampling capacitor Cpsr2 of the sample and hold circuit 71c-2 via the switch 501 and the buffer amplifier 502, and the sampling capacitor Cpsr2 is charged.
- the hold signal ph_h1 is turned on, the switch 104-1 of the sample and hold circuit 71c-1 is turned on, and the reset signal hold period starts.
- the sample signal ph_s2 is turned off
- the sample signal ph_sd is turned off and the switch 501 is turned off.
- the hold signal ph_h2 is turned on, the switch 104-2 of the sample and hold circuit 71c-2 is turned on, and the image signal hold period starts.
- the hold signal ph_h2 is turned on and the switch 601 is turned on.
- the voltage Vout_rst obtained by removing the power supply noise component from the reset signal of the unit pixel 51 is output from the sample and hold circuit 71c-1.
- the voltage Vout_sig obtained by removing the power supply noise component from the image signal of the unit pixel 51 is output from the sample and hold circuit 71c-2.
- the hold signals ph1, ph2, and ph_hd are turned off, the switches 103-1, 103-2, 104-1, 104-2, and the switch 601 are turned off, and the reset signal and image signal hold period ends.
- the sample signal ph_sd needs to be turned off at the same time when the sample signal ph_s2 is turned off, or before the hold signal ph_h2 is turned on after the sample signal ph_s2 is turned off.
- This is a signal in which power supply noise is canceled from the sample-and-hold circuits 71c-1 and 71c-2 only when both the hold signals ph_h1 and ph_h2 are turned on, the sample signal ph_sd is turned off, and the hold signal ph_hd is turned on. Is output.
- the solid-state imaging device may be formed as a single chip, or may be in a modular form having an imaging function in which an imaging unit and a signal processing unit or an optical system are packaged together. Good.
- the scope of application of the present technology is not limited to a solid-state imaging device or a circuit that performs A / D conversion. Can be applied.
- the above-described solid-state imaging device is an imaging device such as an imaging device such as a digital still camera or a video camera, a portable terminal device having an imaging function, or a copying machine using a solid-state imaging device for an image reading unit. It can be used in the form of being incorporated in an electronic device that uses a solid-state imaging device in the take-in part (photoelectric conversion part).
- FIG. 14 is a block diagram illustrating a configuration example of an imaging apparatus as an electronic apparatus to which the present technology is applied.
- the 14 includes a camera module 802 and a DSP (Digital Signal Processor) circuit 803 which is a camera signal processing circuit.
- the imaging apparatus 800 also includes a frame memory 804, a display unit 805, a recording unit 806, an operation unit 807, and a power supply unit 808.
- the DSP circuit 803, the frame memory 804, the display unit 805, the recording unit 806, the operation unit 807 and the power supply unit 808 are connected to each other via a bus line 809.
- the image sensor 801 in the camera module 802 takes in incident light (image light) from a subject, converts the amount of incident light imaged on the imaging surface into an electric signal in units of pixels, and outputs it as a pixel signal.
- incident light image light
- the above-described solid-state imaging device can be employed for the image sensor 801.
- the display unit 805 includes a panel type display device such as a liquid crystal panel or an organic EL (Electro Luminescence) panel, and displays a moving image or a still image captured by the image sensor 801.
- the recording unit 806 records a moving image or a still image captured by the image sensor 801 on a recording medium such as a hard disk or a semiconductor memory.
- the operation unit 807 issues operation commands for various functions of the imaging apparatus 800 under operation by the user.
- the power supply unit 808 appropriately supplies various power sources serving as operation power sources for the DSP circuit 803, the frame memory 804, the display unit 805, the recording unit 806, and the operation unit 807 to these supply targets.
- FIG. 15 is a diagram illustrating a usage example in which the above-described solid-state imaging device is used.
- the solid-state imaging device described above can be used in various cases for sensing light such as visible light, infrared light, ultraviolet light, and X-ray as follows.
- Devices for taking images for viewing such as digital cameras and mobile devices with camera functions
- Devices used for traffic such as in-vehicle sensors that capture the back, surroundings, and interiors of vehicles, surveillance cameras that monitor traveling vehicles and roads, and ranging sensors that measure distances between vehicles, etc.
- Equipment used for home appliances such as TVs, refrigerators, air conditioners, etc. to take pictures and operate the equipment according to the gestures ⁇ Endoscopes, equipment that performs blood vessel photography by receiving infrared light, etc.
- Equipment used for medical and health care ⁇ Security equipment such as security surveillance cameras and personal authentication cameras ⁇ Skin measuring instrument for photographing skin and scalp photography Such as a microscope to do beauty Equipment used for sports-Equipment used for sports such as action cameras and wearable cameras for sports applications-Used for agriculture such as cameras for monitoring the condition of fields and crops apparatus
- Embodiments of the present technology are not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the present technology.
- the present technology is not limited to application to a solid-state imaging device that senses the distribution of the amount of incident light of visible light and captures it as an image.
- solid-state imaging devices physical quantity distribution detection devices
- fingerprint detection sensors that detect the distribution of other physical quantities, such as pressure and capacitance, and take images as images.
- this technology can also take the following structures.
- a power source noise detection unit that detects a noise component of a power source used for driving the unit pixel and outputs a single-ended cancel signal including a cancel component that cancels the noise component;
- a sample-and-hold unit that samples a single-ended pixel signal output from the unit pixel and holds and outputs the pixel signal obtained by removing the noise component from the sampled pixel signal based on the cancellation signal;
- a solid-state imaging device comprising: an A / D converter that performs A / D (Analog / Digital) conversion of the held pixel signal.
- the power noise detector is A first charge storage section for storing charges based on the pixel signal;
- the solid-state imaging device according to (1) further comprising: a second charge accumulation unit that has a common reference potential with the first charge accumulation unit and accumulates charges based on the cancel signal.
- the second charge accumulating unit cancels the same amount of noise charge as that accumulated in the first charge accumulating unit by the noise component of the pixel signal during the sampling period of the pixel signal.
- the solid-state imaging device according to (2) wherein electric charge is accumulated by the cancel component of the cancel signal.
- the sample-and-hold unit cancels the noise charge accumulated in the first charge accumulation unit and the cancel charge accumulated in the second charge accumulation unit during the sample period in a hold period of the pixel signal.
- the solid-state imaging device is a component obtained by amplifying the noise component with a predetermined gain, The solid-state imaging device according to any one of (2) to (4), wherein a capacity of the second charge storage unit is smaller than a capacity of the first charge storage unit by an amount corresponding to the gain.
- the phase of the cancellation component is a phase obtained by inverting the phase of the noise component.
- the solid-state imaging device according to (5).
- the power supply noise detection unit includes an adjustment mechanism that adjusts a phase of the gain and the cancellation component.
- One end of the second charge accumulation unit different from the one set to the reference potential is connected to the output of the power supply noise detection unit via a first switch that is turned on during the sampling period of the pixel signal. And (2) to (7) connected to one end different from one end set to the reference potential of the first charge storage section through a second switch which is turned on during the hold period of the pixel signal.
- the power noise detector is A first output for outputting the cancellation signal; A second output for outputting a single-ended reference signal indicating a bias voltage of the cancellation signal, One end of the second charge storage unit different from the one set to the reference potential is connected to the first output via a first switch that is turned on during the sampling period of the pixel signal, and
- the solid-state imaging device according to any one of (2) to (7), which is connected to the second output via a second switch that is turned on during a hold period.
- a power supply noise detection step for detecting a noise component of a power supply used for driving a plurality of unit pixels that perform photoelectric conversion, and outputting a single-ended cancellation signal including a cancellation component for canceling the noise component;
- a sample-and-hold step of sampling a single-ended pixel signal output from the unit pixel, and holding and outputting the pixel signal obtained by removing the noise component from the sampled pixel signal based on the cancellation signal;
- a solid-state imaging device driving method comprising: an A / D conversion step of performing A / D (Analog / Digital) conversion of the held pixel signal.
- a power source noise detection unit that detects a noise component of a power source used for driving the unit pixel and outputs a single-ended cancel signal including a cancel component that cancels the noise component;
- a sample-and-hold unit that samples a single-ended pixel signal output from the unit pixel and holds and outputs the pixel signal obtained by removing the noise component from the sampled pixel signal based on the cancellation signal;
- An electronic apparatus comprising: a solid-state imaging device comprising: an A / D converter that performs A / D (Analog / Digital) conversion of the held pixel signal.
- CMOS image sensor 11 pixel unit, 12 timing control circuit, 13 vertical scanning circuit, 14 power supply noise detection unit, 15 sample and hold unit, 16 A / D conversion unit, 17 horizontal scanning circuit, 18 pixel drive line, 19 vertical Signal line, 31 power supply noise cancellation unit, 51 unit pixel, 71 sample and hold circuit, 101 to 105 switch, 106 to 112 transistor, 151 power supply noise detection circuit, 201 switch, 800 image sensor, Cvsl, Cpsr sampling capacity, Cadv, Cdly variable capacitor, Cdiv variable capacitance array, Ccp1, Cbias capacitor, Rdet1, Rdet2, Rdif variable resistance element, mp Or mp9, mn1 or mn5 transistor
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Abstract
Description
1.本技術が適用される固体撮像装置
2.第1の実施の形態
3.第2の実施の形態(第1の実施の形態の変形例)
4.第3の実施の形態(複数のサンプルアンドホールド回路を並列に動作させる例1)
5.第4の実施の形態(複数のサンプルアンドホールド回路を並列に動作させる例2)
6.第5の実施の形態(CDSに適用する例1)
7.第6の実施の形態(CDSに適用する例2)
8.変形例
9.電子機器への適用例
10.固体撮像装置の使用例
{1-1.基本的なシステム構成}
図1は、本技術が適用される固体撮像装置、例えばX-Yアドレス方式固体撮像装置の一種であるCMOSイメージセンサの構成の概略を示すシステム構成図である。ここで、CMOSイメージセンサとは、CMOSプロセスを応用して、または、部分的に使用して作成されたイメージセンサである。
次に、図2乃至図4を参照して、本技術の第1の実施の形態について説明する。
図2は、図1の電源ノイズキャンセル部31の第1の実施の形態である電源ノイズキャンセル部31aの構成例を示している。電源ノイズキャンセル部31aは、図1の電源ノイズ検出部14の第1の実施の形態である電源ノイズ検出部14a、及び、図1のサンプルアンドホールド部15の第1の実施の形態であるサンプルアンドホールド部15a(不図示)により構成される。サンプルアンドホールド部15aは、図1のサンプルアンドホールド回路71の第1の実施の形態である複数のサンプルアンドホールド回路71aにより構成される。
次に、図3のタイミングチャートを参照して、サンプルアンドホールド回路71aの動作について説明する。図3は、サンプル信号ph_s、サンプル信号ph_sa、及び、ホールド信号ph_hのタイミングチャートを示している。
=Vsig・Cvsl+ΔVpix・Kvsl・Cvsl ・・・(1)
=Vpsr・Cpsr+ΔVpix・Kpsr・Cpsr ・・・(2)
={(Vsig+ΔVpix・Kvsl)Cvsl+(Vpsr+ΔVpix・Kpsr)Cpsr}/(Cvsl+Cpsr)
・・・(3)
図4は、図2の電源ノイズ検出部14aの構成例を示している。
次に、電源ノイズ検出部14aの動作について簡単に説明する。
次に、図5及び図6を参照して、本技術の第2の実施の形態について説明する。
図5は、図1の電源ノイズキャンセル部31の第2の実施の形態である電源ノイズキャンセル部31bの構成例を示している。
図6は、図5の電源ノイズ検出部14bの構成例を示している。なお、図中、図4と対応する部分には同じ符号を付している。
次に、サンプルアンドホールド回路71bの動作について説明する。サンプルアンドホールド回路71bは、先に示した図3のタイミングチャートに従って動作する。
・・・(6)
次に、図7及び図8を参照して、本技術の第3の実施の形態について説明する。この第3の実施の形態では、1本の垂直信号線19にN個のサンプルアンドホールド回路71aが並列に接続されている。そして、1本の垂直信号線19に接続されている複数の単位画素51の画素信号のサンプルアンドホールド処理をN個のサンプルアンドホールド回路71aにより行う。
図7は、図1の電源ノイズキャンセル部31の第3の実施の形態である電源ノイズキャンセル部31cの構成例を示している。なお、図中、図2及び図4と対応する部分には同じ符号を付してある。また、図7では、図を見やすくするために、1つの単位画素51、サンプルアンドホールド部15c(不図示)に含まれるサンプルアンドホールド回路71a-1乃至71a-N、並びに、電源ノイズ検出部14cのみを図示している。また、図を見やすくするために、一部の符号の図示を省略している。なお、以下、サンプルアンドホールド回路71a-i(i=1乃至N)の各部の符号は、図2のサンプルアンドホールド回路71aの各部の符号の末尾に”i”又は”-i”(i=1乃至N)を付したものとする。
次に、図8のタイミングチャートを参照して、電源ノイズキャンセル部31cの動作について説明する。図8は、サンプル信号ph_s1乃至ph_sN、サンプル信号ph_sa1乃至ph_saN、及び、ホールド信号ph_h1乃至ph_hNのタイミングチャートを示している。
次に、図9を参照して、本技術の第4の実施の形態について説明する。
図9は、図1の電源ノイズキャンセル部31の第4の実施の形態である電源ノイズキャンセル部31dの構成例を示している。なお、図中、図7と対応する部分には同じ符号を付してある。また、図9では、図を見やすくするために、1つの単位画素51、サンプルアンドホールド部15d(不図示)に含まれるサンプルアンドホールド回路71c-1乃至71c-N、並びに、電源ノイズ検出部14dのみを図示している。また、図を見やすくために、一部の符号の図示を省略している。なお、以下、サンプルアンドホールド回路71c-i(i=1乃至N)の各部の符号は、図4のサンプルアンドホールド回路71bの対応する各部の符号の末尾に”i”又は”-i”(i=1乃至N)を付したものとする。
次に、電源ノイズキャンセル部31dの動作について説明する。電源ノイズキャンセル部31dは、先に示した図8のタイミングチャートに従って動作する。
次に、図10及び図11を参照して、本技術の第5の実施の形態について説明する。第5の実施の形態では、画素信号のリセット電位とイメージ信号電位に対して、それぞれ図2のサンプルアンドホールド回路71aが適用され、CDS(Correlated Double Sampling:相関二重サンプリング)が行われる。
図10は、図1の電源ノイズキャンセル部31の第5の実施の形態である電源ノイズキャンセル部31eの構成例を示している。なお、図中、図2及び図4と対応する部分には同じ符号を付してある。また、図10では、図を見やすくするために、1つの単位画素51、サンプルアンドホールド部15e(不図示)に含まれるサンプルアンドホールド回路71a-1及び71a-2、並びに、電源ノイズ検出部14eのみを図示している。また、図を見やすくするために、一部の符号の図示を省略している。なお、以下、サンプルアンドホールド回路71a-i(i=1又は2)の各部の符号は、図2のサンプルアンドホールド回路71aの各部の符号の末尾に”i”又は”-i”を付したものとする。
次に、図11のタイミングチャートを参照して、電源ノイズキャンセル部31eの動作について説明する。図11は、サンプル信号ph_s1及びph_s2、サンプル信号ph_sa1及びph_sa2、ホールド信号ph_h1及びph_h2、並びに、サンプル信号ph_sdのタイミングチャートを示している。
次に、図12及び図13を参照して、本技術の第6の実施の形態について説明する。第6の実施の形態では、画素信号のリセット電位とイメージ信号電位に対して、それぞれ図9のサンプルアンドホールド回路71cが適用され、CDS(Correlated Double Sampling:相関二重サンプリング)が行われる。
図12は、図1の電源ノイズキャンセル部31の第6の実施の形態である電源ノイズキャンセル部31fの構成例を示している。なお、図中、図10と対応する部分には同じ符号を付してある。また、図12では、図を見やすくするために、1つの単位画素51、サンプルアンドホールド部15f(不図示)に含まれるサンプルアンドホールド回路71c-1及び71c-2、並びに、電源ノイズ検出部14fのみを図示している。また、図を見やすくするために、一部の符号の図示を省略している。なお、以下、サンプルアンドホールド回路71c-i(i=1又は2)の各部の符号は、図5のサンプルアンドホールド回路71bの対応する各部の符号の末尾に”i”又は”-i”を付したものとする。
次に、図13のタイミングチャートを参照して、電源ノイズキャンセル部31fの動作について説明する。図13は、サンプル信号ph_s1及びph_s2、サンプル信号ph_sa1及びph_sa2、ホールド信号ph_h1及びph_h2、サンプル信号ph_sd、並びに、ホールド信号ph_hdのタイミングチャートを示している。
上記実施形態では、単位画素が行列状に配置されてなるCMOSイメージセンサに適用した場合を例に挙げて説明したが、本技術はCMOSイメージセンサへの適用に限られるものではない。すなわち、本技術は、単位画素が行列状に2次元配置されてなるX-Yアドレス方式の固体撮像装置全般に対して適用可能である。
上述した固体撮像装置(例えば、CMOSイメージセンサ10)は、デジタルスチルカメラやビデオカメラ等の撮像装置や、撮像機能を有する携帯端末装置や、画像読取部に固体撮像装置を用いる複写機など、画像取込部(光電変換部)に固体撮像装置を用いる電子機器に組み込んだ形で使用することが可能である。
図15は、上述した固体撮像装置を使用する使用例を示す図である。
・自動停止等の安全運転や、運転者の状態の認識等のために、自動車の前方や後方、周囲、車内等を撮影する車載用センサ、走行車両や道路を監視する監視カメラ、車両間等の測距を行う測距センサ等の、交通の用に供される装置
・ユーザのジェスチャを撮影して、そのジェスチャに従った機器操作を行うために、TVや、冷蔵庫、エアーコンディショナ等の家電に供される装置
・内視鏡や、赤外光の受光による血管撮影を行う装置等の、医療やヘルスケアの用に供される装置
・防犯用途の監視カメラや、人物認証用途のカメラ等の、セキュリティの用に供される装置
・肌を撮影する肌測定器や、頭皮を撮影するマイクロスコープ等の、美容の用に供される装置
・スポーツ用途等向けのアクションカメラやウェアラブルカメラ等の、スポーツの用に供される装置
・畑や作物の状態を監視するためのカメラ等の、農業の用に供される装置
光電変換を行う複数の単位画素が配置されている画素部と、
前記単位画素の駆動に用いる電源のノイズ成分を検出し、前記ノイズ成分をキャンセルするキャンセル成分を含むシングルエンドのキャンセル信号を出力する電源ノイズ検出部と、
前記単位画素から出力されるシングルエンドの画素信号をサンプリングし、前記キャンセル信号に基づいて、サンプリングした前記画素信号から前記ノイズ成分を除去した前記画素信号をホールドして出力するサンプルアンドホールド部と、
ホールドされた前記画素信号のA/D(Analog/Digital)変換を行うA/D変換部と
を備える固体撮像装置。
(2)
前記電源ノイズ検出部は、
前記画素信号に基づく電荷を蓄積する第1の電荷蓄積部と、
前記第1の電荷蓄積部と基準電位が共通であり、前記キャンセル信号に基づく電荷を蓄積する第2の電荷蓄積部と
を備える前記(1)に記載の固体撮像装置。
(3)
前記第2の電荷蓄積部は、前記画素信号のサンプル期間に、前記画素信号の前記ノイズ成分により前記第1の電荷蓄積部に蓄積される電荷であるノイズ電荷とほぼ同量の電荷であるキャンセル電荷を前記キャンセル信号の前記キャンセル成分により蓄積する
前記(2)に記載の固体撮像装置。
(4)
前記サンプルアンドホールド部は、前記サンプル期間に前記第1の電荷蓄積部に蓄積された前記ノイズ電荷と前記第2の電荷蓄積部に蓄積された前記キャンセル電荷を、前記画素信号のホールド期間に相殺する
前記(3)に記載の固体撮像装置。
(5)
前記キャンセル成分は、前記ノイズ成分を所定のゲインで増幅した成分であり、
前記第2の電荷蓄積部の容量が、前記ゲインに相当する分だけ前記第1の電荷蓄積部の容量より小さい
前記(2)乃至(4)のいずれかに記載の固体撮像装置。
(6)
前記キャンセル成分の位相は、前記ノイズ成分の位相を反転した位相である
前記(5)に記載の固体撮像装置。
(7)
前記電源ノイズ検出部は、前記ゲイン及び前記キャンセル成分の位相を調整する調整機構を
備える前記(6)に記載の固体撮像装置。
(8)
前記第2の電荷蓄積部の前記基準電位に設定される一端と異なる一端は、前記画素信号のサンプル期間にオンする第1のスイッチを介して、前記電源ノイズ検出部の出力に接続されるとともに、前記画素信号のホールド期間にオンする第2のスイッチを介して、前記第1の電荷蓄積部の前記基準電位に設定される一端と異なる一端に接続されている
前記(2)乃至(7)のいずれかに記載の固体撮像装置。
(9)
前記電源ノイズ検出部は、
前記キャンセル信号を出力する第1の出力と、
前記キャンセル信号のバイアス電圧を示すシングルエンドの参照信号を出力する第2の出力と
を備え、
前記第2の電荷蓄積部の前記基準電位に設定される一端と異なる一端は、前記画素信号のサンプル期間にオンする第1のスイッチを介して前記第1の出力に接続され、前記画素信号のホールド期間にオンする第2のスイッチを介して前記第2の出力に接続されている
前記(2)乃至(7)のいずれかに記載の固体撮像装置。
(10)
光電変換を行う複数の単位画素の駆動に用いる電源のノイズ成分を検出し、前記ノイズ成分をキャンセルするキャンセル成分を含むシングルエンドのキャンセル信号を出力する電源ノイズ検出ステップと、
前記単位画素から出力されるシングルエンドの画素信号をサンプリングし、前記キャンセル信号に基づいて、サンプリングした前記画素信号から前記ノイズ成分を除去した前記画素信号をホールドして出力するサンプルアンドホールドステップと、
ホールドされた前記画素信号のA/D(Analog/Digital)変換を行うA/D変換ステップと
を含む固体撮像装置の駆動方法。
(11)
光電変換を行う複数の単位画素が配置されている画素部と、
前記単位画素の駆動に用いる電源のノイズ成分を検出し、前記ノイズ成分をキャンセルするキャンセル成分を含むシングルエンドのキャンセル信号を出力する電源ノイズ検出部と、
前記単位画素から出力されるシングルエンドの画素信号をサンプリングし、前記キャンセル信号に基づいて、サンプリングした前記画素信号から前記ノイズ成分を除去した前記画素信号をホールドして出力するサンプルアンドホールド部と、
ホールドされた前記画素信号のA/D(Analog/Digital)変換を行うA/D変換部と
を備える固体撮像装置を
含む電子機器。
Claims (11)
- 光電変換を行う複数の単位画素が配置されている画素部と、
前記単位画素の駆動に用いる電源のノイズ成分を検出し、前記ノイズ成分をキャンセルするキャンセル成分を含むシングルエンドのキャンセル信号を出力する電源ノイズ検出部と、
前記単位画素から出力されるシングルエンドの画素信号をサンプリングし、前記キャンセル信号に基づいて、サンプリングした前記画素信号から前記ノイズ成分を除去した前記画素信号をホールドして出力するサンプルアンドホールド部と、
ホールドされた前記画素信号のA/D(Analog/Digital)変換を行うA/D変換部と
を備える固体撮像装置。 - 前記電源ノイズ検出部は、
前記画素信号に基づく電荷を蓄積する第1の電荷蓄積部と、
前記第1の電荷蓄積部と基準電位が共通であり、前記キャンセル信号に基づく電荷を蓄積する第2の電荷蓄積部と
を備える請求項1に記載の固体撮像装置。 - 前記第2の電荷蓄積部は、前記画素信号のサンプル期間に、前記画素信号の前記ノイズ成分により前記第1の電荷蓄積部に蓄積される電荷であるノイズ電荷とほぼ同量の電荷であるキャンセル電荷を前記キャンセル信号の前記キャンセル成分により蓄積する
請求項2に記載の固体撮像装置。 - 前記サンプルアンドホールド部は、前記サンプル期間に前記第1の電荷蓄積部に蓄積された前記ノイズ電荷と前記第2の電荷蓄積部に蓄積された前記キャンセル電荷を、前記画素信号のホールド期間に相殺する
請求項3に記載の固体撮像装置。 - 前記キャンセル成分は、前記ノイズ成分を所定のゲインで増幅した成分であり、
前記第2の電荷蓄積部の容量が、前記ゲインに相当する分だけ前記第1の電荷蓄積部の容量より小さい
請求項2に記載の固体撮像装置。 - 前記キャンセル成分の位相は、前記ノイズ成分の位相を反転した位相である
請求項5に記載の固体撮像装置。 - 前記電源ノイズ検出部は、前記ゲイン及び前記キャンセル成分の位相を調整する調整機構を
備える請求項6に記載の固体撮像装置。 - 前記第2の電荷蓄積部の前記基準電位に設定される一端と異なる一端は、前記画素信号のサンプル期間にオンする第1のスイッチを介して、前記電源ノイズ検出部の出力に接続されるとともに、前記画素信号のホールド期間にオンする第2のスイッチを介して、前記第1の電荷蓄積部の前記基準電位に設定される一端と異なる一端に接続されている
請求項2に記載の固体撮像装置。 - 前記電源ノイズ検出部は、
前記キャンセル信号を出力する第1の出力と、
前記キャンセル信号のバイアス電圧を示すシングルエンドの参照信号を出力する第2の出力と
を備え、
前記第2の電荷蓄積部の前記基準電位に設定される一端と異なる一端は、前記画素信号のサンプル期間にオンする第1のスイッチを介して前記第1の出力に接続され、前記画素信号のホールド期間にオンする第2のスイッチを介して前記第2の出力に接続されている
請求項2に記載の固体撮像装置。 - 光電変換を行う複数の単位画素の駆動に用いる電源のノイズ成分を検出し、前記ノイズ成分をキャンセルするキャンセル成分を含むシングルエンドのキャンセル信号を出力する電源ノイズ検出ステップと、
前記単位画素から出力されるシングルエンドの画素信号をサンプリングし、前記キャンセル信号に基づいて、サンプリングした前記画素信号から前記ノイズ成分を除去した前記画素信号をホールドして出力するサンプルアンドホールドステップと、
ホールドされた前記画素信号のA/D(Analog/Digital)変換を行うA/D変換ステップと
を含む固体撮像装置の駆動方法。 - 光電変換を行う複数の単位画素が配置されている画素部と、
前記単位画素の駆動に用いる電源のノイズ成分を検出し、前記ノイズ成分をキャンセルするキャンセル成分を含むシングルエンドのキャンセル信号を出力する電源ノイズ検出部と、
前記単位画素から出力されるシングルエンドの画素信号をサンプリングし、前記キャンセル信号に基づいて、サンプリングした前記画素信号から前記ノイズ成分を除去した前記画素信号をホールドして出力するサンプルアンドホールド部と、
ホールドされた前記画素信号のA/D(Analog/Digital)変換を行うA/D変換部と
を備える固体撮像装置を
含む電子機器。
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