WO2016199696A1 - Unité de revêtement et dispositif de revêtement la mettant en œuvre - Google Patents

Unité de revêtement et dispositif de revêtement la mettant en œuvre Download PDF

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Publication number
WO2016199696A1
WO2016199696A1 PCT/JP2016/066597 JP2016066597W WO2016199696A1 WO 2016199696 A1 WO2016199696 A1 WO 2016199696A1 JP 2016066597 W JP2016066597 W JP 2016066597W WO 2016199696 A1 WO2016199696 A1 WO 2016199696A1
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WIPO (PCT)
Prior art keywords
container
tip
hole
liquid material
application
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Application number
PCT/JP2016/066597
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English (en)
Japanese (ja)
Inventor
山中　昭浩
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Ntn株式会社
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Filing date
Publication date
Application filed by Ntn株式会社 filed Critical Ntn株式会社
Publication of WO2016199696A1 publication Critical patent/WO2016199696A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/02—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles

Definitions

  • the present invention relates to a coating unit and a coating apparatus using the coating unit, and more particularly to a coating unit that applies a liquid material to an object using a coating needle and a coating apparatus using the coating unit. More specifically, the present invention relates to an application unit that draws a conductive pattern on the surface of a substrate using an application needle, corrects an open defect in the conductive pattern, and applies a conductive adhesive. It is related with the coating device using.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2007-268353
  • Patent Document 1 has a container in which a through hole is opened at the bottom thereof and a liquid material is injected, and a tip portion thereof has an outer diameter substantially equal to the diameter of the through hole,
  • An application unit is disclosed that includes a drive unit that protrudes the tip of an application needle from a hole and attaches a liquid material to the tip.
  • a main object of the present invention is to provide a coating unit capable of stably coating a liquid material many times and a coating apparatus using the coating unit.
  • An application unit includes an application needle for applying a liquid material to an object, and a container into which a liquid material is injected by opening a through-hole through which the tip of the application needle can be penetrated.
  • a seal member provided at the bottom of the container for closing the through-hole, a linear guide member for supporting the application needle and the container so as to be relatively movable up and down, and moving the application needle and the container relatively up and down.
  • a drive unit for making a hole in the seal member by the tip of the application needle, projecting the tip of the application needle from the hole, and attaching the liquid material injected into the container to the tip of the application needle It is.
  • the seal member prevents the excess liquid material from adhering to the outer periphery of the application needle and coming out of the container. . Therefore, it is possible to prevent the liquid material pool from being generated under the through hole of the container, and the liquid material can be stably applied many times.
  • FIG. 4 is another cross-sectional view showing a coating method using the coating unit shown in FIG. 3. It is a figure which shows the whole structure of the application
  • FIGS. 1A to 1C are cross-sectional views showing a main part of a coating unit and a coating method using the same.
  • the application unit includes a container 1, a lid 2, and an application needle 3.
  • the liquid material 4 is injected into the hole 1 a in the container 1.
  • a through hole 1b is formed at the center of the bottom of the hole 1a.
  • the hole 1a has a tapered shape in which the cross-sectional area decreases as it approaches the through hole 1b. Therefore, even when the amount of the liquid material 4 is small, the tip 3a of the application needle 3 can be immersed in the liquid material 4, which is economical. Further, since the through hole 1b is very small, there is almost no leakage of the liquid material 4 from the through hole 1b due to the surface tension of the liquid material 4 and the water repellency and oil repellency of the container 1. On the side surface of the container 1, a protrusion 1 c for supporting the container 1 is provided.
  • a through hole 2 a is formed in the center of the lid 2.
  • the lid 2 seals the inside of the container 1 by closing the opening at the upper end of the container 1.
  • the tip portion 3a of the application needle 3 has a tapered shape that becomes gradually narrower toward the tip.
  • a circular flat surface is formed at the tip of the application needle 3.
  • the application needle 3 includes a thin shaft portion 3b on the distal end side (lower side) and a thick shaft portion 3c on the proximal end side (upper side).
  • the outer diameter of the thin shaft portion 3 b is set to be approximately the same as or slightly smaller than the diameter of the through hole 1 b at the bottom of the container 1.
  • the outer diameter of the thick shaft portion 3 c is set to be approximately the same as or slightly smaller than the diameter of the through hole 2 a of the lid 2.
  • the container 1, the lid 2, and the application needle 3 are arranged so that the central axis of the through hole 1b, the central axis of the through hole 2a, and the central axis of the application needle 3 coincide.
  • the tip of the application needle 3 is positioned at a predetermined position above a desired position on the surface of the substrate 5.
  • the thick shaft portion 3 c of the application needle 3 passes through the through hole 2 a of the lid 2, and the tip portion 3 a of the application needle 3 is immersed in the liquid material 4 in the container 1.
  • the application needle 3 is lowered, the tip 3 a of the application needle 3 is projected from the through hole 1 b below the bottom of the container 1, and the tip of the application needle 3 is placed on the surface of the substrate 5.
  • the tip 3 a of the application needle 3 protrudes from the through hole 1 b to the bottom of the container 1, the liquid material 4 adheres to the tip 3 a of the application needle 3.
  • the application needle 3 is raised, the front-end
  • FIG. 2 (c) As shown, a liquid material pool 4a may be generated below the through hole 1b of the container 1. Since the liquid material 4 containing metal powder has a large specific gravity, the liquid material pool 4a tends to be easily generated. When the liquid material pool 4a is generated, the amount of the liquid material 4 adhering to the tip 3a of the application needle 3 changes every time the application operation is performed, and the amount of the liquid material 4 applied to the substrate 5 varies.
  • 3 (a) and 3 (b) are cross-sectional views showing the main part of the coating unit according to one embodiment of the present invention and a coating method using the same.
  • 3A and 3B show an unused coating unit and a coating method using the same.
  • A2 and B2 are enlarged views of A1 and B1, respectively.
  • a seal member 6 is attached to the lower end surface of the container 1.
  • the seal member 6 has a size larger than the opening on the lower side of the through hole 1 b, and the through hole 1 b is closed by the seal member 6.
  • the seal member 6 is formed of a synthetic resin film having a thickness of 100 ⁇ m or less.
  • the outer peripheral part of the sealing member 6 is stuck around the opening part below the through-hole 1b in the lower end surface of the container 1 using, for example, an adhesive.
  • a recess having a depth similar to the thickness of the seal member 6 may be formed in a region of the lower end portion of the container 1 where the seal member 6 is attached.
  • the application needle When applying using an unused application unit, the application needle is placed at a predetermined position above a desired position on the surface of the substrate 5 with the sealing member 6 attached as shown in FIG. 3. Position the tip of 3. At this time, the thick shaft portion 3 c of the application needle 3 passes through the through hole 2 a of the lid 2, and the tip portion 3 a of the application needle 3 is immersed in the liquid material 4 in the container 1.
  • the application needle 3 is lowered and a hole 6a is formed in the seal member 6 by the tip 3a of the application needle 3, and the tip of the application needle 3 is projected from the through hole 1b and the hole 6a.
  • the diameter of the hole 6a of the seal member 6 is substantially the same as the outer diameter of the thin shaft portion 3b of the application needle 3 (that is, the outer diameter of the thickest portion of the tip portion 3a).
  • the hole 6a of the seal member 6 can suppress the excess liquid material 4 from adhering to the distal end portion 3a and the thin shaft portion 3b of the application needle 3 and being drawn out under the through hole 1b. It is possible to prevent the liquid material reservoir 4a from being generated below.
  • 4 (a) to 4 (c) are cross-sectional views showing a main part of the coating unit used at least once and a coating method using the same.
  • 4 (a) to 4 (c) C2, D2, and E2 are enlarged views of C1, D1, and E1, respectively.
  • a hole 6a is opened in the seal member 6 attached to the lower end surface of the container 1.
  • the hole 6a is opened by the application needle 3 as described above.
  • the diameter of the hole 6a of the seal member 6 is substantially the same as the outer diameter of the thin shaft portion 3b of the application needle 3 (that is, the outer diameter of the thickest portion of the tip portion 3a).
  • the tip of the application needle 3 is positioned at a predetermined position above a desired position on the surface of the substrate 5.
  • the thick shaft portion 3 c of the application needle 3 passes through the through hole 2 a of the lid 2, and the tip portion 3 a of the application needle 3 is immersed in the liquid material 4 in the container 1.
  • the application needle 3 is lowered, and the tip of the application needle 3 is protruded from the bottom of the container 1 through the through hole 1b and the hole 6a to come into contact with the surface of the substrate 5.
  • excess liquid material 4 adheres to the distal end portion 3a and the thin shaft portion 3b of the application needle 3 and passes through the through hole 1b. Pulling down is suppressed, and generation of the liquid material pool 4a under the through hole 1b is prevented.
  • FIG. 5 (a) is a front view showing the entire configuration of the coating unit 10, and FIG. 5 (b) is a side view thereof.
  • the coating unit 10 includes a servo motor 11 and an arm 12.
  • the rotation shaft of the servo motor 11 is arranged in the vertical direction with the tip facing downward.
  • a columnar rotating portion 13 is fixed to the rotating shaft.
  • a slope is formed at the lower end of the rotating portion 13.
  • the arm 12 is arranged in the vertical direction along the back surface of the lower end portion of the servo motor 11, and the upper portion thereof is fixed to the lower end portion of the servo motor 11 by the support portion 14.
  • the side surface of the movable portion 16 is fixed to the cam 24 via the cam connecting plate 22 and the bearing 23.
  • a slope is formed at the upper end of the cam 24.
  • the slope of the upper end of the cam 24 is in contact with the slope of the lower end of the rotating unit 13. For example, when the rotation shaft of the servo motor 11 is rotated from 0 degree to 180 degrees, the bearing 23 is lowered, and when the rotation shaft of the servo motor 11 is rotated from 180 degrees to 360 degrees, the bearing 23 is raised.
  • the bearing 23 moves up and down, the movable portion 16 and the application needle holder fixing portion 17 move up and down along the rail portion of the linear guide 15.
  • the servo motor 11, the rotating unit 13, and the cam 24 constitute a driving unit.
  • the application needle holder storage part 25 is fixed to the lower end of the application needle holder fixing part 17.
  • a concave portion (not shown) is formed at the lower end of the application needle holder storage portion 25.
  • the upper end of the application needle 3 is fixed perpendicularly to the center of the lower end of the application needle holder 26.
  • a convex part (not shown) is formed on the upper part of the application needle holder 26. The convex portion of the application needle holder 26 is inserted into the concave portion of the application needle holder storage portion 25, and the application needle holder 26 is fixed to the application needle holder storage portion 25 with a screw.
  • the lid 2 is attached to the container 1 into which the liquid material 4 has been injected, the application needle 3 is inserted into the hole 2 a of the lid 2, and the metal pin 1 d on the protrusion 1 c on the side surface of the container 1 is the magnet at the lower end of the arm 12. (Not shown).
  • the container 1 is fixed to the lower end of the arm 12 by the application needle 3 and the metal pin 1d.
  • an origin sensor 27 is provided on the side surface of the lower end portion of the servo motor 11.
  • the origin sensor 27 detects an origin mark formed on the side surface of the cam 24 and outputs an origin position signal of the servo motor 11. Based on the output signal of the origin sensor 27, the servo motor 11 is initialized.
  • the tip 3a of the application needle 3 is a liquid material in the container 1. 4 is immersed.
  • the rotation shaft of the servo motor 11 is rotated from 0 degree to 180 degrees, the tip 3a of the application needle 3 is inserted into the through-hole at the bottom of the container 1 as shown in FIGS. 3 (b) and 4 (b). It projects below the bottom of the container 1 through 1b and the hole 6a of the seal member 6.
  • the liquid material 4 adheres to the tip 3 a of the application needle 3, and the liquid material 4 is applied to the surface of the substrate 5.
  • the rotation shaft of the servo motor 11 is rotated from 180 degrees to 360 degrees, the tip 3a of the application needle 3 is returned into the container 1 and immersed in the liquid material 4 as shown in FIG. And enters a standby state.
  • FIG. 6 is a perspective view showing the overall configuration of the liquid material coating apparatus 30 including the coating unit 10.
  • the liquid material coating apparatus 30 includes an observation optical system 31, a CCD camera 32, and a coating unit 10.
  • the observation optical system 31 includes a light source for illumination, an objective lens, and the like, and is used for observing the surface state of the substrate 5 and the state of the liquid material 4 applied by the application unit 10.
  • An image observed by the observation optical system 31 is converted into an electric signal by the CCD camera 32.
  • the coating unit 10 corrects the conductive liquid material 4 by applying the conductive liquid material 4 to the disconnection portion generated in the wiring pattern formed on the substrate 5.
  • the observation optical system 31, the CCD camera 32, and the coating unit 10 constitute a correction head unit.
  • This apparatus configuration is an example.
  • a gantry that mounts a Z stage 33 on which an observation optical system 31 and the like are mounted on an X stage, further mounts an X stage on a Y stage, and moves the Z stage 33 in the XY direction.
  • a configuration called a system may be used, and any configuration may be used as long as the Z stage 33 on which the observation optical system 31 or the like is mounted can be moved relative to the substrate 5 to be coated in the XY direction. .
  • the liquid material application device 30 Next, the operation of the liquid material application device 30 will be described. It is assumed that a desired application needle 3 and a container 1 filled with a desired liquid material 4 are set in advance in the application unit 10.
  • the substrate 5 to be applied is set on the Y stage 35.
  • the liquid material 4 is applied to the broken portion generated in the wiring pattern formed on the substrate 5.
  • the liquid material 4 is a conductive metal paste.
  • the surface of the substrate 5 is displayed on the screen of the monitor 37.
  • the user of the liquid material application device 30 operates the buttons on the operation panel 38 while looking at the screen of the monitor 37, and an image of the center of the disconnected portion is displayed at a predetermined position (for example, the center) of the screen of the monitor 37.
  • the stages 33 to 35 are controlled.
  • the center portion of the disconnection portion is arranged at a predetermined position, the coordinates of the stages 33 to 35 at that time are stored. Based on the coordinates, the distance between the optical axis of the observation optical system 31 stored in advance and the center axis of the application needle 3, and the distance between the focal position of the observation optical system 31 and the tip of the application needle 3.
  • the stages 33 to 35 are controlled, and as shown in FIGS. 3A and 4A, the tip of the application needle 3 is disposed at a predetermined position above the disconnection portion.
  • the rotation shaft of the servo motor 11 is rotated.
  • the application needle 3 is lowered and the tip 3a of the application needle 3 is moved.
  • the liquid material 4 that protrudes under the bottom of the container 1 through the through-hole 1b of the container 1 and the hole 6a of the seal member 6 and adheres to the tip 3a of the application needle 3 is applied to the disconnected portion of the surface of the substrate 5.
  • the rotation shaft of the servo motor 11 is rotated from 180 degrees to 360 degrees, as shown in FIG. 4C, the application needle 3 is raised, and the tip 3a of the application needle 3 is the liquid material in the container 1. 4 is immersed in a standby state.
  • liquid material 4 even when a high-viscosity and high-mass metal paste is used as the liquid material 4, it is possible to prevent the liquid material pool 4a from being generated below the through-hole 1b of the container 1, and the liquid material 4 can be used many times. It can be applied stably.
  • liquid material 4 can be applied to an arbitrary position on the surface of the substrate 5 by controlling the X stage 34, the Y stage 35, and the Z stage 33.
  • the present invention is not limited to this, and the application position is moved continuously.
  • a circuit such as an RFID tag can be drawn on the surface of the substrate 5, a conductive pattern can be drawn, or a conductive adhesive can be applied.

Abstract

L'invention concerne une unité de revêtement (10) qui est pourvue : d'une aiguille de revêtement (3) destinée à revêtir d'une matière liquide (4) la surface d'un substrat (5) ; d'un récipient (1) dans lequel la matière liquide (4) est injectée, le fond de ce récipient (1) présentant un trou traversant (1b) à travers lequel il est possible d'insérer la pointe (3a) de l'aiguille de revêtement (3) ; d'un élément d'étanchéité (6) qui est agencé sur le fond du récipient (1) et qui obture le trou traversant (1b) ; d'un guide linéaire (15) supportant l'aiguille de revêtement (3) et le récipient (1) de sorte qu'il est possible de déplacer ladite aiguille de revêtement (3) et ledit récipient (1) l'un par rapport à l'autre dans le sens vertical ; ainsi que d'un servomoteur (11) et d'une came (24) qui abaissent l'aiguille de revêtement (3), ouvrent un trou (6a) dans l'élément d'étanchéité (6) à l'aide de la pointe (3a) de l'aiguille de revêtement (3), amènent la pointe (3a) de l'aiguille de revêtement (3) à faire saillie à partir du trou (6a), et appliquent la matière liquide (4) injectée dans le récipient (1) vers la pointe (3a) de l'aiguille de revêtement (3). L'élément d'étanchéité (6) empêche qu'un excès de matière liquide (4) ne soit appliqué à la pointe (3a) de l'aiguille de revêtement (3) et ne sorte du récipient (1).
PCT/JP2016/066597 2015-06-09 2016-06-03 Unité de revêtement et dispositif de revêtement la mettant en œuvre WO2016199696A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-116606 2015-06-09
JP2015116606A JP6514047B2 (ja) 2015-06-09 2015-06-09 塗布ユニットおよびそれを用いた塗布装置

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WO2016199696A1 true WO2016199696A1 (fr) 2016-12-15

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JP (1) JP6514047B2 (fr)
TW (1) TW201711757A (fr)
WO (1) WO2016199696A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018235528A1 (fr) * 2017-06-20 2018-12-27 Ntn株式会社 Unité et dispositif d'application
JP2019005739A (ja) * 2017-06-20 2019-01-17 Ntn株式会社 塗布ユニットおよび塗布装置
WO2020162381A1 (fr) * 2019-02-08 2020-08-13 Ntn株式会社 Unité de revêtement liquide et dispositif de revêtement liquide
WO2021182613A1 (fr) * 2020-03-13 2021-09-16 Ntn株式会社 Unité d'application de matériau liquide, dispositif d'application de matériau liquide et procédé d'application de matériau liquide

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7362556B2 (ja) * 2020-07-15 2023-10-17 Ntn株式会社 塗布機構及び塗布装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003164783A (ja) * 2001-11-29 2003-06-10 Hitachi Industries Co Ltd 液体吐出用ディスペンサ
JP2005251908A (ja) * 2004-03-03 2005-09-15 Tokyo Electron Ltd 現像処理装置
JP2007268353A (ja) * 2006-03-30 2007-10-18 Ntn Corp パターン修正装置およびその塗布ユニット
WO2016093007A1 (fr) * 2014-12-09 2016-06-16 Ntn株式会社 Mécanisme et dispositif d'application

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003164783A (ja) * 2001-11-29 2003-06-10 Hitachi Industries Co Ltd 液体吐出用ディスペンサ
JP2005251908A (ja) * 2004-03-03 2005-09-15 Tokyo Electron Ltd 現像処理装置
JP2007268353A (ja) * 2006-03-30 2007-10-18 Ntn Corp パターン修正装置およびその塗布ユニット
WO2016093007A1 (fr) * 2014-12-09 2016-06-16 Ntn株式会社 Mécanisme et dispositif d'application

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018235528A1 (fr) * 2017-06-20 2018-12-27 Ntn株式会社 Unité et dispositif d'application
JP2019005739A (ja) * 2017-06-20 2019-01-17 Ntn株式会社 塗布ユニットおよび塗布装置
WO2020162381A1 (fr) * 2019-02-08 2020-08-13 Ntn株式会社 Unité de revêtement liquide et dispositif de revêtement liquide
JP2020127920A (ja) * 2019-02-08 2020-08-27 Ntn株式会社 液体塗布ユニットおよび液体塗布装置
CN113474088A (zh) * 2019-02-08 2021-10-01 Ntn株式会社 液体涂布单元和液体涂布装置
JP7164458B2 (ja) 2019-02-08 2022-11-01 Ntn株式会社 液体塗布ユニットおよび液体塗布装置
CN113474088B (zh) * 2019-02-08 2023-03-07 Ntn株式会社 液体涂布单元和液体涂布装置
US11897264B2 (en) 2019-02-08 2024-02-13 Ntn Corporation Liquid application unit and liquid application apparatus
WO2021182613A1 (fr) * 2020-03-13 2021-09-16 Ntn株式会社 Unité d'application de matériau liquide, dispositif d'application de matériau liquide et procédé d'application de matériau liquide

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JP2017000947A (ja) 2017-01-05
JP6514047B2 (ja) 2019-05-15
TW201711757A (zh) 2017-04-01

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