JP6514047B2 - 塗布ユニットおよびそれを用いた塗布装置 - Google Patents

塗布ユニットおよびそれを用いた塗布装置 Download PDF

Info

Publication number
JP6514047B2
JP6514047B2 JP2015116606A JP2015116606A JP6514047B2 JP 6514047 B2 JP6514047 B2 JP 6514047B2 JP 2015116606 A JP2015116606 A JP 2015116606A JP 2015116606 A JP2015116606 A JP 2015116606A JP 6514047 B2 JP6514047 B2 JP 6514047B2
Authority
JP
Japan
Prior art keywords
needle
container
coating
tip
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2015116606A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017000947A (ja
Inventor
山中　昭浩
昭浩 山中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
Original Assignee
NTN Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NTN Corp filed Critical NTN Corp
Priority to JP2015116606A priority Critical patent/JP6514047B2/ja
Priority to PCT/JP2016/066597 priority patent/WO2016199696A1/fr
Priority to TW105118106A priority patent/TW201711757A/zh
Publication of JP2017000947A publication Critical patent/JP2017000947A/ja
Application granted granted Critical
Publication of JP6514047B2 publication Critical patent/JP6514047B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/02—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to separate articles

Landscapes

  • Coating Apparatus (AREA)
JP2015116606A 2015-06-09 2015-06-09 塗布ユニットおよびそれを用いた塗布装置 Expired - Fee Related JP6514047B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015116606A JP6514047B2 (ja) 2015-06-09 2015-06-09 塗布ユニットおよびそれを用いた塗布装置
PCT/JP2016/066597 WO2016199696A1 (fr) 2015-06-09 2016-06-03 Unité de revêtement et dispositif de revêtement la mettant en œuvre
TW105118106A TW201711757A (zh) 2015-06-09 2016-06-08 塗佈單元及使用此單元之塗佈裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015116606A JP6514047B2 (ja) 2015-06-09 2015-06-09 塗布ユニットおよびそれを用いた塗布装置

Publications (2)

Publication Number Publication Date
JP2017000947A JP2017000947A (ja) 2017-01-05
JP6514047B2 true JP6514047B2 (ja) 2019-05-15

Family

ID=57503290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015116606A Expired - Fee Related JP6514047B2 (ja) 2015-06-09 2015-06-09 塗布ユニットおよびそれを用いた塗布装置

Country Status (3)

Country Link
JP (1) JP6514047B2 (fr)
TW (1) TW201711757A (fr)
WO (1) WO2016199696A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6971146B2 (ja) * 2017-06-20 2021-11-24 Ntn株式会社 塗布ユニットおよび塗布装置
WO2018235528A1 (fr) * 2017-06-20 2018-12-27 Ntn株式会社 Unité et dispositif d'application
JP7164458B2 (ja) * 2019-02-08 2022-11-01 Ntn株式会社 液体塗布ユニットおよび液体塗布装置
WO2021182613A1 (fr) * 2020-03-13 2021-09-16 Ntn株式会社 Unité d'application de matériau liquide, dispositif d'application de matériau liquide et procédé d'application de matériau liquide
JP7362556B2 (ja) * 2020-07-15 2023-10-17 Ntn株式会社 塗布機構及び塗布装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003164783A (ja) * 2001-11-29 2003-06-10 Hitachi Industries Co Ltd 液体吐出用ディスペンサ
JP4034280B2 (ja) * 2004-03-03 2008-01-16 東京エレクトロン株式会社 現像処理装置
JP4802027B2 (ja) * 2006-03-30 2011-10-26 Ｎｔｎ株式会社 パターン修正装置およびその塗布ユニット
JP2016107223A (ja) * 2014-12-09 2016-06-20 Ntn株式会社 塗布機構および塗布装置

Also Published As

Publication number Publication date
WO2016199696A1 (fr) 2016-12-15
JP2017000947A (ja) 2017-01-05
TW201711757A (zh) 2017-04-01

Similar Documents

Publication Publication Date Title
JP6514047B2 (ja) 塗布ユニットおよびそれを用いた塗布装置
WO2017090381A1 (fr) Unité de revêtement, dispositif de revêtement, procédé de production d'un objet à revêtir et procédé de production d'un substrat
JP6411735B2 (ja) 塗布部材、塗布装置および塗布方法
JP2007268354A (ja) パターン修正装置およびその塗布ユニット
WO2016199695A1 (fr) Unité de revêtement liquide et dispositif de revêtement liquide
JP2013055286A (ja) 液体塗布装置、パターン修正装置、微細パターン描画装置および液体塗布方法
WO2016093007A1 (fr) Mécanisme et dispositif d'application
JP6560108B2 (ja) 塗布ユニット、塗布装置、被塗布対象物の製造方法および基板の製造方法
JP2016049524A (ja) 液体塗布ユニットおよび液体塗布装置
JP6460694B2 (ja) 塗布方法および塗布装置
JP6491296B2 (ja) 塗布部材、塗布装置および塗布方法
JP2012101175A (ja) 塗布機構、塗布方法、および塗布装置
JP2017094287A (ja) 塗布ユニット、塗布装置、被塗布対象物の製造方法および基板の製造方法
WO2019026624A1 (fr) Mécanisme d'application de revêtement et dispositif d'application de revêtement
WO2016204152A1 (fr) Dispositif de revêtement
JP2017131826A (ja) 塗布機構、塗布装置、被塗布対象物の製造方法、および基板の製造方法
WO2018235528A1 (fr) Unité et dispositif d'application
JP6404695B2 (ja) 塗布機構および塗布装置
WO2018043537A1 (fr) Unité de revêtement liquide et dispositif de revêtement liquide
JP6716654B2 (ja) 塗布部材、塗布装置および塗布方法
JP6971207B2 (ja) 液体材料塗布機構および液体材料塗布装置
JP6971146B2 (ja) 塗布ユニットおよび塗布装置
JP2009206061A (ja) 塗布ユニットおよびそれを用いたパターン修正装置
WO2019054458A1 (fr) Procédé de revêtement de matériau liquide, mécanisme de revêtement de matériau liquide et appareil de revêtement de matériau liquide
JP2021073093A (ja) 液体塗布ユニットおよび液体塗布装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180528

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190319

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190411

R150 Certificate of patent or registration of utility model

Ref document number: 6514047

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees