WO2016185545A1 - 基板作業装置および基板作業装置における粘性流体残量測定方法 - Google Patents

基板作業装置および基板作業装置における粘性流体残量測定方法 Download PDF

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Publication number
WO2016185545A1
WO2016185545A1 PCT/JP2015/064226 JP2015064226W WO2016185545A1 WO 2016185545 A1 WO2016185545 A1 WO 2016185545A1 JP 2015064226 W JP2015064226 W JP 2015064226W WO 2016185545 A1 WO2016185545 A1 WO 2016185545A1
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WO
WIPO (PCT)
Prior art keywords
viscous fluid
substrate
unit
remaining amount
squeegee
Prior art date
Application number
PCT/JP2015/064226
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English (en)
French (fr)
Japanese (ja)
Inventor
太朗 川井
Original Assignee
ヤマハ発動機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by ヤマハ発動機株式会社 filed Critical ヤマハ発動機株式会社
Priority to JP2017518651A priority Critical patent/JP6385571B2/ja
Priority to PCT/JP2015/064226 priority patent/WO2016185545A1/ja
Priority to KR1020177026233A priority patent/KR101986096B1/ko
Priority to CN201580080023.0A priority patent/CN107535055B/zh
Priority to TW104125455A priority patent/TWI595815B/zh
Publication of WO2016185545A1 publication Critical patent/WO2016185545A1/ja

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/046—Surface mounting
    • H05K13/0465—Surface mounting by soldering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type

Definitions

  • the present invention relates to a substrate working device and a viscous fluid remaining amount measuring method in a substrate working device, and more particularly to a substrate working device having a squeegee unit and a viscous fluid remaining amount measuring method in the substrate working device.
  • a substrate working apparatus having a squeegee unit is known.
  • Such a substrate working apparatus is disclosed in, for example, Korean Patent No. 10-2013-0023603.
  • the above Korean Patent No. 10-2013-0023603 discloses a flux plate provided with a recognition mark on the upper surface, a flux tank (squeegee part) provided on the flux plate and storing the flux, and a flux tank from above.
  • a chip mounter (substrate working device) is disclosed that includes a flux state detection device including an imaging unit that images a recognition mark over the inner flux. This chip mounter is configured to recognize the remaining amount of flux in a stepwise manner based on the imaging result of the imaging unit.
  • the above-mentioned chip mounter disclosed in Korean Patent No. 10-2013-0023603 can accurately (quantitatively) measure the remaining amount of viscous fluid such as flux only by stepwise recognizing the remaining amount of flux. There is a problem that can not be. Further, in the chip mounter disclosed in the above Korean Patent No. 10-2013-0023603, it is difficult to measure the remaining amount with a colored flux (viscous fluid) because the recognition mark is imaged over the flux. There is also a problem.
  • the present invention has been made in order to solve the above-described problems, and one object of the present invention is to accurately measure the remaining amount of viscous fluid, and for a colored viscous fluid.
  • the present invention is to provide a substrate working apparatus capable of measuring the remaining amount even if there is a viscous fluid remaining amount measuring method in the substrate working apparatus.
  • a substrate working apparatus includes a squeegee unit that scrapes a viscous fluid transferred to an object to be transferred, a portion where a viscous fluid scraped by the squeegee unit and agglomerated is present.
  • An imaging unit that captures a predetermined region including a portion where the viscous fluid does not exist, and a size of a portion where the viscous fluid exists in a captured image of the predetermined region captured by the imaging unit, or a size of a portion where the viscous fluid does not exist
  • a control unit that acquires the remaining amount of viscous fluid based on at least one of the above.
  • a control unit that acquires the remaining amount of viscous fluid is provided based on at least one of the above. This makes it possible to accurately (quantitatively) determine the remaining amount of viscous fluid by utilizing the fact that the size of the part where the viscous fluid is agglomerated and the size of the part where the viscous fluid does not exist correlate with the remaining amount of viscous fluid. Measurement).
  • a predetermined area including a part where the viscous fluid is present in a lump and a part where the viscous fluid is not present is imaged, and the remaining amount is acquired based on the captured image of the predetermined area. Unlike the configuration for imaging the remaining amount, even if it is a colored viscous fluid, the remaining amount can be easily measured.
  • the control unit has at least the area of the portion where the viscous fluid is present or the area of the portion where the viscous fluid is not present in the predetermined region based on the captured image of the predetermined region. While acquiring one, it is comprised so that the residual amount of viscous fluid may be acquired based on at least one of the area of the part in which the acquired viscous fluid exists, or the area of the part in which no viscous fluid exists. According to this configuration, unlike the case where the remaining amount of viscous fluid is acquired based on, for example, the point measurement result by the optical sensor, the remaining amount of viscous fluid is acquired based on the area. Even if there is some variation in the shape of the viscous fluid that has become a lump for each taking operation, the remaining amount of the viscous fluid can be measured stably and accurately (quantitatively).
  • the control unit obtains a binarized image of the predetermined region by binarizing the captured image of the predetermined region, and based on the acquired binarized image, Of these, at least one of the area of the portion where the viscous fluid exists or the area of the portion where the viscous fluid does not exist is obtained. If comprised in this way, at least one of the area of the part in which a viscous fluid exists, or the area of the part in which a viscous fluid does not exist can be acquired easily.
  • the substrate working apparatus preferably further includes a viscous fluid supply unit that supplies the viscous fluid, and the control unit determines that the remaining amount of the viscous fluid acquired is equal to or less than a predetermined threshold value. In such a case, control is performed to supply the viscous fluid from the viscous fluid supply unit. If comprised in this way, since a viscous fluid can be supplied based on the residual amount of the viscous fluid measured correctly, an appropriate amount of viscous fluid can be supplied. As a result, it is possible to suppress an increase in the amount of viscous fluid used, unlike when a viscous fluid is supplied in excess of a necessary amount so that the viscous fluid does not run out. In addition, since the viscous fluid is automatically supplied, it is possible to suppress the disadvantage that the viscous fluid is insufficient and the viscous fluid is not sufficiently transferred to the transfer object.
  • the substrate working apparatus preferably further includes a mounting head that mounts components on the substrate and is movable relative to the squeegee unit, and the imaging unit includes the squeegee together with the mounting head. It is comprised so that it may move relatively with respect to a part. If comprised in this way, since a mounting head and an imaging part can be moved by a common moving mechanism, it can suppress that the apparatus structure for measuring the residual amount of viscous fluid becomes complicated.
  • the imaging unit preferably includes a substrate recognition imaging unit that images a substrate recognition mark for recognizing the substrate. If comprised in this way, since the board
  • the squeegee unit has a frame shape capable of storing viscous fluid
  • the imaging unit is an interior of the squeegee unit having a frame shape in which viscous fluid is stored.
  • 2 is configured to take an image of a predetermined area inside the squeegee portion including a portion where the viscous fluid in a lump is present and a portion where the viscous fluid is not present. If comprised in this way, a viscous fluid can be easily made into a lump shape with the squeegee part which has a frame shape. As a result, it is possible to easily form a portion where the viscous fluid is present in a lump and a portion where the viscous fluid does not exist, and take an image by the imaging unit.
  • the transfer object further includes a coating film forming plate on which a coating film of a viscous fluid transferred to the component is formed, including a component mounted on the substrate,
  • the squeegee unit moves relative to the coating film forming plate and scrapes the viscous fluid to form a viscous fluid coating film transferred to the part on the coating film forming plate.
  • the imaging unit is configured to image a predetermined area including a portion where the viscous fluid is agglomerated on the coating film forming plate and a portion where the viscous fluid is not present from above the coating film forming plate. Has been.
  • the residual amount of viscous fluid can be measured correctly (quantitatively) and reliably.
  • the transfer object includes a substrate on which a component is mounted, and further includes a mask having a printing pattern for transferring the viscous fluid to the substrate by printing, and a squeegee unit. Is configured to move on the mask and scrape off the viscous fluid, and to transfer the viscous fluid on the mask to the substrate via the print pattern.
  • a predetermined region including a portion where the viscous fluid that is agglomerated is present and a portion where the viscous fluid is not present is imaged.
  • the residual amount of viscous fluid, such as a solder is measured correctly (quantitatively) and reliably. be able to.
  • the substrate working apparatus preferably further includes an illuminating unit capable of irradiating light to the predetermined region, and the illuminating unit is an intensity of light irradiating the predetermined region according to the type of the viscous fluid.
  • the illuminating unit is an intensity of light irradiating the predetermined region according to the type of the viscous fluid.
  • at least one of the angle of light applied to the predetermined area and the wavelength of light applied to the predetermined area can be changed.
  • the predetermined area can be imaged with appropriate illumination according to the type of the viscous fluid, so that a portion where the viscous fluid is in a lump and a portion where the viscous fluid is not present can be easily distinguished. It is possible to take an image so that it can be recognized separately. As a result, the remaining amount of viscous fluid can be measured more accurately.
  • the method for measuring the remaining amount of viscous fluid in the substrate working apparatus includes a step of scraping the viscous fluid transferred to the transfer object while scraping it by the squeegee unit, A step of imaging a predetermined region including a portion where the viscous fluid is present and a portion where the viscous fluid is not present, and a portion of the portion where the viscous fluid is present in the captured image of the predetermined region captured by the imaging unit. Acquiring the remaining amount of viscous fluid by the control unit based on at least one of the size or the size of the portion where the viscous fluid does not exist.
  • the size of the portion where the viscous fluid exists in the captured image of the predetermined region captured by the imaging unit, or the viscosity A step of obtaining the remaining amount of the viscous fluid by the control unit based on at least one of the sizes of the portions where no fluid exists is provided.
  • the substrate working apparatus and the substrate capable of accurately measuring the remaining amount of the viscous fluid and capable of measuring the remaining amount even with a colored viscous fluid.
  • a viscous fluid remaining amount measuring method in a working device can be provided.
  • the substrate working apparatus 100 transports a substrate P from the X1 direction side to the X2 direction side by a pair of conveyors 2 and mounts a component 31 on the substrate P at a predetermined mounting work position M. It is.
  • the component 31 is an example of the “transfer object” in the claims.
  • the substrate working apparatus 100 includes a base 1, a pair of conveyors 2, a component supply unit 3, a head unit 4, a support unit 5, a pair of rail units 6, a component recognition camera 7, and a transfer unit 8. And a control unit 9.
  • the pair of conveyors 2 are installed on the base 1 and configured to transport the substrate P in the X direction. Further, the pair of conveyors 2 are configured to hold the substrate P being conveyed in a state where it is stopped at the mounting work position M.
  • the pair of conveyors 2 are arranged in parallel to each other at a predetermined distance in the Y direction, and are configured so that the distance in the Y direction can be adjusted according to the dimensions of the substrate P.
  • the component supply unit 3 is disposed at a plurality of locations on both outer sides (Y1 side and Y2 side) of the pair of conveyors 2.
  • a plurality of tape feeders 3 a are attached to the component supply unit 3.
  • the tape feeder 3a holds a reel (not shown) around which a tape holding a plurality of components 31 at a predetermined interval is wound.
  • the tape feeder 3a is configured to supply the component 31 from the tip of the tape feeder 3a by sending a tape that holds the component 31 by rotating the reel.
  • the component 31 is a concept indicating electronic components such as an IC, a transistor, a capacitor, and a resistor.
  • the head unit 4 is disposed above the pair of conveyors 2 and the component supply unit 3, and includes a plurality of mounting heads 42 including a nozzle 41 at the lower end and a substrate recognition camera 43.
  • the substrate recognition camera 43 is an example of the “imaging unit” and the “substrate recognition imaging unit” in the claims.
  • the nozzle 41 sucks and holds the component 31 supplied from the tape feeder 3a by the negative pressure generated at the tip of the nozzle 41 by a negative pressure generator (not shown), and is mounted (mounted) on the substrate P. Is configured to do.
  • the substrate recognition camera 43 is configured to image a fiducial mark F for recognizing the position of the substrate P. By imaging and recognizing the position of the fiducial mark F, it is possible to accurately acquire the mounting position of the component 31 on the board P.
  • the board recognition camera 43 is provided with a plurality of illumination units 43a (see FIG. 2).
  • the illumination unit 43a can irradiate the fiducial mark F and the predetermined area A with light when the substrate recognition camera 43 images the fiducial mark F and the predetermined area A (see FIG. 3) described later. It is configured.
  • the fiducial mark F is an example of the “substrate recognition mark” in the claims.
  • the support unit 5 includes a motor 51.
  • the support unit 5 is configured to move the head unit 4 in the X direction along the support unit 5 by driving a motor 51. Further, both ends of the support portion 5 are supported by a pair of rail portions 6.
  • the pair of rail portions 6 are fixed on the base 1.
  • the rail portion 6 on the X1 side includes a motor 61.
  • the rail portion 6 is configured to move the support portion 5 along the pair of rail portions 6 in the Y direction orthogonal to the X direction by driving the motor 61.
  • the head unit 4 can move in the X direction along the support portion 5, and the support portion 5 can move in the Y direction along the rail portion 6, whereby the head unit 4 can move in the XY direction. .
  • the component recognition camera 7 is fixed on the upper surface of the base 1.
  • the component recognition camera 7 images the component 31 sucked by the nozzle 41 of the mounting head 42 from the lower side (Z2 side) in order to recognize the suction state (suction posture) of the component 31 prior to mounting the component 31. It is configured as follows. Thereby, it is possible to acquire the suction state of the component 31 sucked by the nozzle 41 of the mounting head 42.
  • the transfer unit 8 is disposed on the Y2 side of the pair of conveyors 2 and is detachably attached to the substrate working apparatus 100.
  • the transfer unit 8 is configured to form a coating film La of a viscous fluid L, which will be described later, for transferring to the component 31.
  • the transfer unit 8 includes a viscous fluid supply unit 81, a viscous fluid tank 82, a coating film forming plate 83, and a plate driving mechanism 84.
  • the viscous fluid tank 82 is an example of the “squeegee section” in the claims. 2 and 8, both the mounting head 42 and the board recognition camera 43 are shown in one figure for easy understanding. Therefore, the positional relationship between the two in FIG. 2 and FIG. 8 does not necessarily correspond to the positional relationship between both in FIG.
  • the viscous fluid supply unit 81 is configured to supply the viscous fluid L to the viscous fluid tank 82. Moreover, the viscous fluid supply part 81 has the main-body part 81a, the piston part 81b, the cover part 81c, and the supply path 81d.
  • the main body 81a has a hollow, substantially cylindrical shape, and is configured to store therein a viscous fluid L (shown by hatching) such as flux or solder.
  • the piston part 81b is disposed inside the main body part 81a, and is fitted to the inner side surface of the main body part 81a so as to be slidable in the vertical direction (Z direction).
  • the viscous fluid L is filled (stored) in the internal space of the main body 81a defined by the main body 81a and the piston 81b.
  • the lid portion 81c is disposed at the upper end portion of the main body portion 81a and is configured to seal the main body portion 81a.
  • an air hose H is connected to the lid portion 81c in order to supply air (air) at a predetermined pressure into the main body portion 81a.
  • the other end of the air hose H is connected to the valve 91.
  • the valve 91 is connected to an air pressure source (not shown) and is configured to be switchable between an open state in which air of a predetermined pressure is supplied into the main body 81a and a closed state in which air is not supplied into the main body 81a.
  • the supply path 81 d is disposed at the lower end of the main body 81 a and is connected to the side surface of the viscous fluid tank 82.
  • the viscous fluid supply unit 81 supplies air of a predetermined pressure from the air hose H to the inside of the main body 81a through the lid portion 81c, and the piston 81b moves downward (Z2 direction). By being moved, the viscous fluid L filled in the main body 81a is pumped (supplied) to the viscous fluid tank 82 via the supply path 81d. In addition, when the valve 91 is in the “closed state”, the viscous fluid supply unit 81 does not move the piston 81b downward (Z2 direction), and thus the main body 81a with respect to the viscous fluid tank 82 via the supply path 81d. The viscous fluid L filled inside is not pumped (supplied).
  • the viscous fluid tank 82 has a hollow frame shape that is open at the top and bottom, and is arranged on the coating film forming plate 83 so that the viscous fluid L from the viscous fluid supply unit 81 can be stored therein. Yes.
  • the viscous fluid tank 82 is fixed by a fixing mechanism (not shown) and does not move.
  • the viscous fluid tank 82 is configured to be urged toward the coating film forming plate 83 by an urging mechanism (not shown). Since the upper part of the frame-shaped viscous fluid tank 82 is open, the substrate recognition camera 43 can image the internal space of the viscous fluid tank 82 from above.
  • the coating film forming plate 83 has a substantially rectangular shape in plan view (viewed from the Z direction), and is configured to be movable in the longitudinal direction (the driving direction in FIGS. 2 and 3) by the plate driving mechanism 84. Further, in order to form the coating film La of the viscous fluid L on the upper surface 83a of the coating film forming plate 83, a coating film forming portion 83b that is recessed downward from the upper surface 83a by the film thickness t of the coating film La is provided. It has been.
  • the viscous fluid tank 82 is moved relative to the coating film forming plate 83 by moving the coating film forming plate 83 in the driving direction by the plate driving mechanism 84 with the viscous fluid L stored therein. It is configured to smooth (squeeze) while scraping the viscous fluid L. Accordingly, the viscous fluid tank 82 is configured to form the coating film La of the viscous fluid L transferred to the component 31 on the coating film forming portion 83b of the coating film forming plate 83.
  • the plate drive mechanism 84 can be a drive mechanism including, for example, a ball screw, a ball nut, and a motor, and is configured to be able to move the coating film forming plate 83 in the drive direction.
  • the control unit 9 includes a CPU, and controls the overall operation of the substrate working apparatus 100 such as a mounting operation by the head unit 4, a squeezing operation of the transfer unit 8 described later, a block fluid imaging operation, and a viscous fluid transfer operation. It is configured as follows.
  • the viscous fluid L in the viscous fluid tank 82 rolls and turns into a lump (Lb) having a substantially cylindrical cross section.
  • the substrate recognition camera 43 (see FIG. 1) is configured to measure the remaining amount of the viscous fluid L stored in the viscous fluid tank 82.
  • the predetermined area A including the portion where the viscous fluid L (Lb) is scraped and present as a lump and the portion where the viscous fluid L (Lb) does not exist is imaged.
  • the substrate recognition camera 43 is formed in a lump shape inside the viscous fluid tank 82 having a frame shape in which the viscous fluid L is stored from above the coating film forming plate 83 and the viscous fluid L (Lb) that has become a lump.
  • the predetermined region A including a portion where the viscous fluid L (Lb) is present and a portion where the viscous fluid L (Lb) is not present is imaged.
  • the control unit 9 includes the viscous fluid L (Lb) in the captured image B ⁇ b> 1 of the predetermined area A captured by the board recognition camera 43.
  • the remaining amount of the viscous fluid L stored in the viscous fluid tank 82 is acquired based on the size of the portion C1 and the size of the portion C2 where the viscous fluid L (Lb) does not exist.
  • control unit 9 acquires the area of the portion C1 where the viscous fluid L exists and the area of the portion C2 where the viscous fluid L does not exist based on the captured image B1 of the predetermined region A. Is configured to do. And the control part 9 acquires the residual amount of the viscous fluid L based on the area of the part C1 in which the viscous fluid L exists among the acquired predetermined area
  • control unit 9 performs binarization processing on the captured image B1 of the predetermined area A, thereby acquiring the binarized image B2 of the predetermined area A and the acquired binarized image. Based on B2, the area of the portion C1 where the viscous fluid L exists in the predetermined region A and the area of the portion C2 where the viscous fluid L does not exist are obtained.
  • these points will be described in detail.
  • the control unit 9 acquires a captured image B1 (image before the binarization processing shown on the left side of FIG. 4) of the predetermined area A captured by the board recognition camera 43.
  • the captured image B1 of the predetermined area A in the portion C1 where the viscous fluid L (Lb) exists, the light is diffusely reflected by the viscous fluid L (Lb), so that a relatively dark image is obtained.
  • the portion C2 where the viscous fluid L (Lb) does not exist the light is regularly reflected by the upper surface 83a of the metal coating film forming plate 83, so that a relatively bright image is obtained.
  • the portion C1 in which the viscous fluid L (Lb) exists in the captured image and the portion C2 in which the viscous fluid L (Lb) does not exist in the captured image are distinguished and recognized. Is possible.
  • the control unit 9 performs a binarization process for converting the captured image B1 of the acquired predetermined area A into a two-tone image of white and black.
  • a portion C1 (a relatively dark image portion) where the viscous fluid L (Lb) exists in the predetermined area A is black, and the viscous fluid L (Lb in the predetermined area A is black).
  • Does not exist is converted into a captured image (image after binarization, binarized image shown on the right side of FIG. 4) B2 of the predetermined area A represented in white. .
  • the area of the portion C1 where the viscous fluid L (Lb) exists in the predetermined region A that is, the area of the black portion
  • the area of the portion C2 where L (Lb) does not exist that is, the area of the white portion
  • the area of the portion C1 where the viscous fluid L (Lb) exists in the predetermined region A is acquired, and the binarized image B2 Based on the number of pixels in the white portion, the area of the portion C2 in the predetermined region A where the viscous fluid L (Lb) does not exist is acquired.
  • the remaining amount of the viscous fluid L stored in the viscous fluid tank 82 may be acquired by acquiring the area ratio of the portion C2 where the viscous fluid L (Lb) does not exist in the region A.
  • control unit 9 correlates the area ratio of the portion where the viscous fluid L (Lb) exists in the predetermined area A set in advance and the remaining amount of the viscous fluid L stored in the viscous fluid tank 82. Based on the information, the remaining amount of the viscous fluid L stored in the viscous fluid tank 82 is acquired from the area ratio of the portion where the acquired viscous fluid L (Lb) exists.
  • control part 9 is below predetermined threshold value Th (refer FIG. 5) for determining whether the residual amount of the acquired viscous fluid L supplies the viscous fluid L or not. It is comprised so that it may be judged whether it is.
  • the predetermined threshold Th is preset by the user based on the graph shown in FIG.
  • the controller 9 determines that the remaining amount of the viscous fluid L is equal to or less than the predetermined threshold Th, the controller 9 supplies the viscous fluid L from the viscous fluid supply unit 81 to the viscous fluid tank 82 by a predetermined amount. It is configured to perform only the supply control.
  • control unit 9 does not supply the viscous fluid L from the viscous fluid supply unit 81 to the viscous fluid tank 82 when it is determined that the remaining amount of the viscous fluid L is larger than the predetermined threshold Th. It is configured to perform control.
  • the illumination unit 43a determines the intensity of light applied to the predetermined area A, the angle of light applied to the predetermined area A, and the predetermined area according to the type of the viscous fluid L.
  • the wavelength of the light applied to A can be changed.
  • the illumination unit 43a is arranged in a ring shape around the lens of the substrate recognition camera 43, and is arranged in a ring shape outside the inner ring illumination unit and capable of emitting visible light.
  • An outer ring illumination unit and an infrared illumination unit capable of emitting infrared light.
  • the illumination part 43a is comprised so that each of an inner ring illumination part, an outer ring illumination part, and an infrared illumination part can be light-emitted independently.
  • the inner ring illumination unit, the outer ring illumination unit, and the infrared illumination unit are configured to be able to irradiate light onto the predetermined region A at mutually different angles.
  • the illumination part 43a can change the intensity
  • the illumination unit 43a emits only visible light by emitting only the inner ring illumination unit and / or outer ring illumination unit, and emits infrared light by emitting only the infrared illumination unit.
  • the wavelength of the light irradiating the area A can be changed.
  • FIG. 6 a predetermined region in the case where there is illumination by the illumination unit 43a (when light is irradiated from three of the inner ring illumination unit, the outer ring illumination unit, and the infrared illumination unit) with respect to two types of viscous fluids of flux and solder.
  • a captured image of A is shown.
  • the portion where the viscous fluid L (Lb) exists is represented in black regardless of the remaining amount of the viscous fluid L, and the viscous fluid L ( Since the portion where Lb) does not exist is represented in white, it is possible to recognize both of them separately.
  • a captured image of the predetermined area A (after binarization processing) in the case of illumination change by the illumination unit 43a (when light is emitted from two of the inner ring illumination unit and the infrared illumination unit) Captured image).
  • the viscous fluid L (Lb) is not affected by the amount of remaining viscous fluid L, even when flux is used as the viscous fluid. Since the existing part is represented in black and the part in which the viscous fluid L (Lb) does not exist is represented in white, the two can be distinguished and recognized.
  • the illumination unit 43a changes the intensity of light applied to the predetermined area A, the angle of light applied to the predetermined area A, and the wavelength of light applied to the predetermined area A according to the type of the viscous fluid L. Is configured to do.
  • the coating film forming plate 83 is reciprocated in the driving direction by the plate driving mechanism 84 to thereby apply the coating film on the coating film forming plate 83.
  • the forming portion 83b is filled with the viscous fluid L stored in the viscous fluid tank 82.
  • the viscous fluid L is scraped off by the viscous fluid tank 82.
  • the coating film La of the viscous fluid L is formed on the coating film forming portion 83b of the coating film forming plate 83 with a thickness t suitable for the transfer of the viscous fluid L to the component 31.
  • the This squeezing operation is performed every time the viscous fluid L is transferred to the component 31.
  • the viscous fluid L phenomenon called rolling occurs inside the viscous fluid tank 82, so that the inside of the viscous fluid tank 82 after squeezing occurs. Is formed into a viscous fluid L (Lb). And while the viscous fluid L (Lb) which became the lump is formed, the predetermined including the part where the viscous fluid L (Lb) becomes a lump and the part where the viscous fluid L (Lb) does not exist
  • the area A (see FIG. 3) is imaged by the substrate recognition camera 43 of the head unit 4.
  • imaging by the substrate recognition camera 43 is performed before the shape of the viscous fluid L (Lb) that has been lumped is lost. Is preferred. Therefore, before the squeezing operation is finished, it is preferable that the substrate recognition camera 43 is kept at a predetermined position for imaging the predetermined area A.
  • the mounting head 42 of the head unit 4 moves up and down to form the coating film formed on the coating film forming plate 83 with respect to the component 31 adsorbed on the mounting head 42.
  • the viscous fluid L (La) is transferred.
  • FIG. 8 showed the example which performed the squeegeeing operation
  • a squeezing operation may be performed for imaging the viscous fluid L that has become a lump.
  • the squeezing operation of the viscous fluid L is performed by the viscous fluid tank 82 when the coating film forming plate 83 is moved by the plate driving mechanism 84 in step S ⁇ b> 1.
  • step S2 it is determined whether or not it is an imaging timing for imaging the predetermined area A by the substrate recognition camera 43.
  • the imaging timing for example, when a squeezing operation is performed a predetermined number of times from the previous block fluid imaging operation, or when a predetermined time has elapsed from the previous block fluid imaging operation, the viscous fluid supply operation in step S6 described later is performed. It is possible to be a case where it is broken.
  • step S2 If it is determined in step S2 that it is not the imaging timing, the process proceeds to step S5, and a viscous fluid transfer operation is performed. Note that after the viscous fluid transfer operation is performed, the component 31 sucked by the mounting head 42 is mounted on the substrate P.
  • step S2 If it is determined in step S2 that it is an imaging timing, the process proceeds to step S3.
  • step S3 the substrate recognition camera 43 captures an image of the predetermined area A including a portion where the viscous fluid L (Lb) that is agglomerated and a portion where the viscous fluid L (Lb) does not exist.
  • step S4 it is determined whether or not the remaining amount of the viscous fluid L is equal to or less than a predetermined threshold Th based on the image captured by the substrate recognition camera 43. If it is determined that the remaining amount of the viscous fluid L is not less than or equal to the predetermined threshold value Th, it is considered that supply (replenishment) of the viscous fluid L to the viscous fluid tank 82 is not necessary, so the process proceeds to step S5.
  • the viscous fluid transfer operation is performed without supplying the viscous fluid L to the viscous fluid tank 82.
  • step S4 when it is determined that the remaining amount of the viscous fluid L is equal to or less than the predetermined threshold Th, it is considered that the viscous fluid L needs to be supplied (supplemented) to the viscous fluid tank 82. Therefore, it progresses to step S6.
  • step S6 a viscous fluid supply operation for supplying a predetermined amount of the viscous fluid L from the viscous fluid supply unit 81 to the viscous fluid tank 82 is performed. Thereby, when the remaining amount of the viscous fluid L is equal to or less than the predetermined threshold Th, the viscous fluid L is automatically supplied (supplemented) to the viscous fluid tank 82.
  • the process returns to step S1 and the squeezing operation is performed again.
  • the above operation is sequentially executed for each component 31 sucked by the mounting head 42.
  • a control unit 9 that acquires the remaining amount of the viscous fluid L based on the size is provided.
  • the predetermined area A including the portion C1 where the viscous fluid L (Lb) is present and the portion C2 where the viscous fluid L does not exist is imaged, and the remaining amount is acquired based on the captured image B1 of the predetermined area A. Therefore, unlike the configuration in which the recognition mark is imaged through the viscous fluid L, the remaining amount can be easily measured even for the colored viscous fluid L.
  • the control unit 9 is configured to acquire the remaining amount of the viscous fluid L based on the acquired area of the portion C1 where the viscous fluid L exists and the area of the portion C2 where the viscous fluid L does not exist.
  • the remaining amount of the viscous fluid L is acquired based on the area. Even if there is some variation in the shape of the viscous fluid L that becomes a lump for each operation, the remaining amount of the viscous fluid L can be measured stably and accurately (quantitatively).
  • the control unit 9 is configured to acquire the area of the portion C1 where the viscous fluid L exists and the area of the portion C2 where the viscous fluid L does not exist. Thereby, the area of the part C1 where the viscous fluid L exists or the area of the part C2 where the viscous fluid L does not exist can be easily acquired.
  • control is performed to supply the viscous fluid L from the viscous fluid supply unit 81.
  • the control unit 9 is configured as described above.
  • the viscous fluid L can be supplied based on the accurately measured remaining amount of the viscous fluid L, so that an appropriate amount of the viscous fluid L can be supplied.
  • it is possible to suppress an increase in the usage amount of the viscous fluid L, unlike when the viscous fluid L is supplied in excess of the necessary amount so that the viscous fluid L is not insufficient.
  • the viscous fluid L is automatically supplied, it is possible to suppress the disadvantage that the viscous fluid L is insufficient and the viscous fluid L is not sufficiently transferred to the component 31 that is the transfer target.
  • the substrate recognition camera 43 is configured to move relative to the viscous fluid tank 82 together with the mounting head 42. Thereby, since the mounting head 42 and the board
  • the imaging unit for measuring the remaining amount of the viscous fluid L is the substrate recognition camera 43 that images the fiducial mark F for recognizing the substrate P.
  • substrate recognition camera 43 can be used also as an imaging part for the residual amount measurement of the viscous fluid L, it suppresses more that the apparatus structure for measuring the residual amount of the viscous fluid L becomes complicated. be able to.
  • the part C1 in which the viscous fluid L (Lb) aggregated in the inside of the viscous fluid tank 82 which has the frame shape where the viscous fluid L is stored exists, and the part C2 in which the viscous fluid L does not exist
  • the substrate recognition camera 43 is configured to image a predetermined area A inside the viscous fluid tank 82 including Thereby, the viscous fluid L can be easily agglomerated by the viscous fluid tank 82 having a frame shape.
  • a portion C1 where the viscous fluid L (Lb) in the form of a mass and a portion C2 where the viscous fluid L does not exist can be easily formed and imaged by the substrate recognition camera 43.
  • the viscous fluid L is moved relative to the coating film forming plate 83 to scrape the viscous fluid L, and the viscous fluid L transferred to the component 31 is transferred onto the coating film forming plate 83.
  • the viscous fluid tank 82 is configured to form the coating film La.
  • a predetermined area A including a portion C1 where the viscous fluid L (Lb) which is agglomerated on the coating film forming plate 83 exists and a portion C2 where the viscous fluid L does not exist is formed.
  • the substrate recognition camera 43 is configured to take an image.
  • the illumination unit 43a is configured so that the intensity of light applied to the predetermined area A can be changed according to the type of the viscous fluid L.
  • the predetermined area A can be imaged by appropriate illumination according to the type of the viscous fluid L, the portion C1 in which the viscous fluid L (Lb) is formed and the portion C2 in which the viscous fluid L is not present. Can be easily distinguished and recognized. As a result, the remaining amount of the viscous fluid L can be measured more accurately.
  • the substrate working apparatus 200 uses a viscous fluid L made of solder as a printing (transfer) material, and a mask M in which openings (not shown) are formed in a predetermined printing pattern. Is used to screen-print the viscous fluid L on the surface of the substrate P.
  • the substrate P is an example of the “transfer object” in the claims.
  • the substrate working apparatus 200 includes a base 101, a squeegee unit 102 including a squeegee unit 121, and a substrate table 103.
  • the squeegee unit 102 and the substrate table 103 are disposed on the base 101.
  • the squeegee unit 102 is configured to perform a printing operation by moving the squeegee unit 121 in the Y direction.
  • the substrate working apparatus 200 includes a viscous fluid recognition camera 104 that images the viscous fluid L, and a control unit 105 that controls the entire substrate working apparatus 200.
  • the viscous fluid recognition camera 104 is an example of the “imaging unit” in the claims.
  • the mask M has a rectangular shape in plan view, and the outer peripheral portion is attached to the frame 106.
  • the substrate working apparatus 200 holds the frame 106 by a mask holding unit (not shown).
  • the squeegee unit 102 is disposed above the mask M.
  • the squeegee unit 102 includes a squeegee unit 121, a squeegee Y-axis drive mechanism 122, a squeegee Z-axis drive mechanism 123, a squeegee R-axis drive mechanism 124, and a viscous fluid supply unit 125.
  • the squeegee unit 121 has a spatula shape and is configured to transfer (print) the viscous fluid L on the mask M onto the substrate P by moving in the Y direction and scraping the viscous fluid L. ing. At this time, the squeegee unit 121 rolls (rotates) the viscous fluid L by being moved in the printing direction (Y direction) while applying a predetermined printing pressure (load) to the mask M from the upper side (Z1 direction side). However, it is configured to perform transfer (printing).
  • the squeegee Y-axis drive mechanism 122 includes a Y-axis motor 122a.
  • the squeegee Y-axis drive mechanism 122 is configured to move the squeegee unit 102 (squeegee unit 121) in the Y direction along the Y-axis rail by driving the Y-axis motor 122a.
  • the squeegee Z-axis drive mechanism 123 is configured to raise and lower the squeegee R-axis drive mechanism 124 and the squeegee unit 121 in the Z direction.
  • the squeegee R-axis drive mechanism 124 is configured to rotate the squeegee unit 121 about the rotation axis.
  • the viscous fluid supply unit 125 is disposed above the mask M and has a function of supplying the viscous fluid L onto the upper surface of the mask M.
  • the substrate table 103 is disposed below the mask M (Z2 side position) and is configured to be reciprocally movable in the Y direction on the base 101.
  • the substrate table 103 performs an operation of transporting and holding the substrate P to a predetermined printing position and an operation of unloading the printed substrate P.
  • the substrate table 103 includes a pair of conveyors 131, a clamp member (clamp plate) 132, a Y-axis movement mechanism 133, a Z-axis movement mechanism 134, and an X-axis movement mechanism and an R-axis movement mechanism (not shown). .
  • the pair of conveyors 131 has a function of carrying an unprinted substrate P from an upstream device, transporting the substrate P to a predetermined printing position, and carrying the printed substrate P to a downstream device. .
  • the pair of conveyors 131 are arranged in parallel to each other at a predetermined distance in the Y direction.
  • the pair of conveyors 131 are provided so as to extend along the transport direction (X direction) of the substrate P.
  • the pair of conveyors 131 are configured so that the interval in the Y direction can be adjusted in accordance with the width (Y direction dimension) of the substrate P to be transported.
  • the clamp members 132 are provided in a pair so as to be adjacent to the upper sides of the pair of conveyors 131, and are configured to be fixed (held) by sandwiching (clamping) the side end surfaces of the substrate P from both sides.
  • the Y-axis moving mechanism 133 includes a Y-axis motor 133a.
  • the Y-axis moving mechanism 133 is configured to move the substrate table 103 in the Y direction along the Y-axis rail by driving the Y-axis motor 133a.
  • the Z-axis moving mechanism 134 includes a Z-axis table 134a.
  • the Z-axis moving mechanism 134 is configured to move (lift) the Z-axis table 134a in the Z direction by driving a Z-axis motor (not shown).
  • a substrate elevating part 135 and a pair of bracket members 103b are provided, and a conveyor 131 and a clamp member 132 are provided on each upper portion of the bracket member 103b.
  • the substrate elevating unit 135 is disposed at a position in the Y direction between the pair of conveyors 131, and is configured to move (elevate) the support plate 135a in the Z direction.
  • a backup pin (not shown) is disposed on the support plate 135a.
  • the substrate lifting / lowering unit 135 is configured to support the substrate P with backup pins.
  • an X-axis moving mechanism (not shown) has a function of moving the substrate P in the X direction
  • an R-axis moving mechanism (not shown) has a function of rotating the substrate P in the horizontal plane (in the XY plane).
  • the viscous fluid recognition camera 104 is configured to be movable relative to the mask M.
  • the viscous fluid recognition camera 104 may move relative to the mask M by a movement mechanism common to the movement mechanism of the squeegee unit 102, or may move relative to the mask M by a dedicated movement mechanism. You may move on.
  • the viscous fluid recognition camera 104 is scraped off by the squeegee unit 121 of the squeegee unit 102 in order to measure the remaining amount of the viscous fluid L on the mask M, and becomes a blocky viscosity.
  • a predetermined region including a portion where the fluid L exists and a portion where the viscous fluid L does not exist is imaged.
  • the viscous fluid recognition camera 104 is configured to take an image of a predetermined region including a portion where the viscous fluid L is agglomerated on the mask and a portion where the viscous fluid L is not present from the information of the mask M. Has been.
  • the control part 105 acquires the picked-up image of the predetermined area
  • control unit 105 determines whether or not the acquired remaining amount of the viscous fluid L is equal to or less than a predetermined threshold value for determining whether or not to supply the viscous fluid L, and the viscous fluid L When it is determined that the remaining amount of L is equal to or less than a predetermined threshold value, control is performed to supply a predetermined amount of the viscous fluid L from the viscous fluid supply unit 125 to the mask M. .
  • the squeegee unit 121 is configured to move on the mask M to scrape the viscous fluid L and transfer the viscous fluid L on the mask M to the substrate via the print pattern. .
  • the viscous fluid recognition camera 104 is configured so as to image a predetermined region including a portion where the viscous fluid L is agglomerated on the mask M and a portion where the viscous fluid L is not present from above the mask M. . Accordingly, in the configuration in which the viscous fluid L on the mask M such as solder is transferred to the substrate P via the printing pattern, the remaining amount of the viscous fluid L such as solder is accurately (quantitatively) measured reliably. be able to.
  • the example in which the respective areas are used as the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist has been described. Not limited. In the present invention, a size other than the area may be used as the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist. For example, the length in the direction orthogonal to the width direction (the direction in which the portion where the viscous fluid L exists) in the captured image shown in FIG. 4 may be used.
  • the remaining amount of the viscous fluid is acquired based on both the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist.
  • the present invention is not limited to this.
  • the remaining amount of viscous fluid may be acquired based on at least one of the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist.
  • the present invention is not limited to this.
  • the size of the portion where the viscous fluid exists and the size of the portion where the viscous fluid does not exist may be acquired without binarizing the captured image of the predetermined region.
  • the correlation information between the area ratio of the portion where the viscous fluid L (Lb) exists in the predetermined region A and the remaining amount of the viscous fluid L stored in the viscous fluid tank 82 is obtained.
  • this invention is not limited to this.
  • Correlation information between at least one of the areas where (Lb) does not exist and the remaining amount of the viscous fluid L stored in the viscous fluid tank 82 is acquired in advance, and based on this correlation information, The remaining amount of the viscous fluid L stored in the viscous fluid tank 82 may be acquired.
  • the substrate recognition camera 43 is used as the imaging unit of the present invention.
  • the present invention is not limited to this.
  • the imaging unit of the present invention may be provided separately from the board recognition camera 43.
  • the viscous fluid tank 82 having a frame shape is used as the squeegee portion of the present invention, but the present invention is not limited to this.
  • a squeegee portion having a spatula shape may be used similarly to the squeegee portion 121 of the second embodiment.
  • the viscous fluid tank 82 is fixed and the coating film forming plate 83 is moved, so that the viscous fluid tank 82 moves relative to the coating film forming plate 83 and the viscous fluid L
  • the present invention is not limited to this.
  • the viscous fluid tank 82 moves relative to the coating film forming plate 83 and scrapes the viscous fluid L. May be.
  • processing operation of a control part is referred to as an event.
  • the event drive type event driven type
  • processing operation of a control part is referred to as an event.
  • you may carry out by the event drive type (event driven type) process which performs a process in a unit. In this case, it may be performed by a complete event drive type or a combination of event drive and flow drive.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Operations Research (AREA)
  • Coating Apparatus (AREA)
  • Length Measuring Devices By Optical Means (AREA)
PCT/JP2015/064226 2015-05-18 2015-05-18 基板作業装置および基板作業装置における粘性流体残量測定方法 WO2016185545A1 (ja)

Priority Applications (5)

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JP2017518651A JP6385571B2 (ja) 2015-05-18 2015-05-18 基板作業装置および基板作業装置における粘性流体残量測定方法
PCT/JP2015/064226 WO2016185545A1 (ja) 2015-05-18 2015-05-18 基板作業装置および基板作業装置における粘性流体残量測定方法
KR1020177026233A KR101986096B1 (ko) 2015-05-18 2015-05-18 기판 작업장치 및 기판 작업장치에 있어서의 점성 유체 잔량 측정방법
CN201580080023.0A CN107535055B (zh) 2015-05-18 2015-05-18 基板作业装置及基板作业装置中的粘性流体剩余量测定方法
TW104125455A TWI595815B (zh) 2015-05-18 2015-08-05 Substrate working device and viscous fluid residue in substrate working device

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PCT/JP2015/064226 WO2016185545A1 (ja) 2015-05-18 2015-05-18 基板作業装置および基板作業装置における粘性流体残量測定方法

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CN107535055A (zh) 2018-01-02
KR20170119327A (ko) 2017-10-26
JP6385571B2 (ja) 2018-09-12
TW201642716A (zh) 2016-12-01
CN107535055B (zh) 2020-02-21
TWI595815B (zh) 2017-08-11
KR101986096B1 (ko) 2019-06-05

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