WO2016107018A1 - 显示基板及显示装置 - Google Patents
显示基板及显示装置 Download PDFInfo
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- WO2016107018A1 WO2016107018A1 PCT/CN2015/076960 CN2015076960W WO2016107018A1 WO 2016107018 A1 WO2016107018 A1 WO 2016107018A1 CN 2015076960 W CN2015076960 W CN 2015076960W WO 2016107018 A1 WO2016107018 A1 WO 2016107018A1
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- 239000000758 substrate Substances 0.000 title claims abstract description 95
- 238000009413 insulation Methods 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 15
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 9
- 235000012239 silicon dioxide Nutrition 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 181
- 238000004519 manufacturing process Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 14
- 239000003990 capacitor Substances 0.000 description 8
- 239000004973 liquid crystal related substance Substances 0.000 description 8
- 238000000059 patterning Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000009432 framing Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133345—Insulating layers
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133784—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
- H01L27/1244—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits for preventing breakage, peeling or short circuiting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1262—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78636—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with supplementary region or layer for improving the flatness of the device
Definitions
- Embodiments of the present invention relate to a display substrate and a display device.
- a known display substrate 10 includes a substrate substrate 11 and is disposed on the substrate.
- such a display substrate 10 is known to have a defect in that the insulating lines formed on the base substrate 11 and the respective signal lines 12 are caused since the respective signal lines 12 are disposed on the upper surface of the base substrate 11.
- the layer 13 has protrusions; and when an external force acts on the insulating layer 13, the insulating layer 13 is liable to be damaged, so that the signal line 12 is easily corroded by the electrolyte or water vapor, resulting in poor signal lines.
- the position of the alignment film on the display substrate and the protrusion corresponding to the protrusion of the insulating layer 13 form a certain slope, resulting in a friction dead zone at the position during the rubbing orientation, which causes an abnormal arrangement of the liquid crystal molecules to cause a light leakage phenomenon of the liquid crystal panel.
- Embodiments of the present invention provide a display substrate and a display device to reduce the probability of occurrence of a signal line defect problem.
- a first insulating layer disposed on the base substrate, the first insulating layer is provided with at least one line groove;
- At least one signal line at least one of the signal lines being disposed in the line slot, and one of the line slots for accommodating one of the signal lines;
- a second insulating layer covering the first insulating layer and the signal line.
- the display substrate includes a peripheral routing area and a display area.
- the line slot is located in the peripheral routing area, and the signal line includes Grid or data line.
- the line slot is located in the peripheral routing area
- the signal line includes a data line and a gate line
- the data line and the gate line are disposed in the same layer.
- the line slot is located in the peripheral trace area
- the signal line includes a data line and a gate line
- the data line and the gate line are disposed in different layers.
- the data lines and the gate lines are arranged in different layers as follows:
- the first insulating layer includes a first sub-insulating layer and a second sub-insulating layer respectively provided with at least one receiving line groove, and the second sub-insulating layer is located above the first sub-insulating layer, wherein
- the data line is located in a capacitance groove of the first sub-insulation layer, and the gate line is located in a capacitance groove of the second sub-insulation layer;
- the data line is located in a capacitance groove of the second sub-insulation layer
- the gate line is located in a capacitance groove of the first sub-insulation layer.
- the line slot is located in the display area, and the signal line includes a data line or a gate line.
- the line slot is located in the display area, and the signal line includes a data line and a gate line.
- the line slot is located in the display area
- the signal line includes a data line and a gate line
- the data line and the gate line are disposed in different layers.
- the data lines and gate lines are arranged in different layers as follows:
- the first insulating layer includes a first sub-insulating layer and a second sub-insulating layer respectively provided with at least one receiving line groove, and the second sub-insulating layer is located above the first sub-insulating layer, wherein
- the data line is located in a capacitance groove of the first sub-insulation layer, and the gate line is located in a capacitance groove of the second sub-insulation layer;
- the data line is located in a capacitance groove of the second sub-insulation layer
- the gate line is located in a capacitance groove of the first sub-insulation layer.
- the first insulating layer is a silicon nitride layer or a silicon dioxide layer, or the first insulating layer is a combined layer including a silicon nitride layer and a silicon dioxide layer.
- an upper surface of the signal line is flush with an upper surface of the first insulating layer.
- At least one embodiment of the present invention also provides a display device including any of the above display substrates.
- 1 is a schematic structural view of a known display substrate
- FIG. 2 is a schematic structural view 1 of a display substrate according to an embodiment of the present invention.
- FIG. 3 is a second schematic structural view of a display substrate according to an embodiment of the present invention.
- FIG. 4 is a schematic structural view 3 of a display substrate according to an embodiment of the present invention.
- FIG. 5 is a schematic structural view 4 of a display substrate according to an embodiment of the present invention.
- FIG. 6 is a schematic structural view 5 of a display substrate according to an embodiment of the present invention.
- FIG. 7 is a schematic structural view 6 of a display substrate according to an embodiment of the present invention.
- FIG. 8 is a schematic diagram showing the arrangement of signal lines of a display area of a display substrate according to an embodiment of the present invention.
- FIG. 9 is a flowchart of a method of manufacturing a display substrate according to an embodiment of the present invention.
- 10a, 10b, 10c, 10d, and 10e are schematic views showing a manufacturing process of a display substrate according to an embodiment of the present invention.
- FIG. 11 is a flow chart of a method for manufacturing a display substrate according to another embodiment of the present invention.
- the display substrate 10 of the embodiment of the present invention includes: a substrate substrate 11 , a first insulating layer 131 disposed on the substrate substrate 11 , and a first insulating layer 131 disposed on the first insulating layer 131 . And at least one signal line 12 covering the second insulating layer 132 on the first insulating layer 131 and the signal line 12; wherein at least one of the signal lines 12 is disposed in the receiving line slot 14, and one of the receiving line slots 14 A signal line 12 is accommodated.
- the base substrate 11 may be a glass substrate or a plastic substrate; the first insulating layer 131 may be an insulating light transmissive material layer; the second insulating layer 132 may be a single layer structure or a double layer structure, such as: As shown in FIG. 3, the second insulating layer 132 has a two-layer structure, including a gate insulating layer 1321 located in the lower layer, and a protective layer (PVX layer) 1322 located in the upper layer; wherein the gate insulating layer 1321 can be, for example, silicon nitride. Floor.
- the number of the signal lines 12 is determined by the function and structure of the display substrate.
- the number of the signal lines 12 is plural, and the plurality of signal lines 12 may all be disposed in the respective line slots 14 or only a part of the signal lines. 12 is disposed in each of the line grooves 14, but it should be noted that in any case, one of the line grooves 14 is provided with only one signal line 12.
- the upper surface of the second insulating layer 132 formed on the first insulating layer 131 and the signal lines 12 tends to The flat surface is such that the upper surface of the display substrate 10 tends to be flat, reducing the probability of breakage of the second insulating layer 132 above the signal line 12, thereby reducing the probability of occurrence of a problem of the signal line 12.
- the alignment film of the display substrate 10 is rubbed, the friction dead zone caused by the convexity having the slope of the upper surface of the display substrate 10 is reduced, and the rubbing cloth and the alignment film can be more sufficiently contacted, so that the alignment film can be made normal. Orientation, the alignment of the liquid crystal molecules is normal, and the probability of light leakage of the display device is reduced.
- the display substrate may be divided into a peripheral routing area and a display area according to a display function, and the receiving line slot 14 is located in a peripheral routing area and/or a display area, and the signal line may specifically be Grid lines and/or data lines.
- the first insulating layer 131 is a buffer layer
- the position of the capacitance groove 14 corresponds to the peripheral wiring region on the base substrate 11
- the signal line 12 is the gate line and And/or a data line;
- a plurality of spaced-apart line slots 14 are disposed on the buffer layer, and each of the capacitor slots 14 is provided with a signal line, which may be a gate line or a data line.
- the buffer layer is made of an insulating light-transmitting material, the buffer layer can be used to isolate the respective signal lines from mutual signal interference.
- the first insulating layer may specifically be selected from a silicon nitride layer or a silicon dioxide layer, or a combined layer including a silicon nitride layer and a silicon dioxide layer.
- the upper surface of the signal line 12 may be flush with the upper surface of the first insulating layer 131, that is, the gate
- the upper surface of the wire or the upper surface of the data line is flush with the upper surface of the first insulating layer.
- the signal line 12 is a gate line
- the first insulating layer 131 is a buffer layer
- the upper surface of the gate line is flush with the upper surface of the buffer layer.
- the first insulating layer 131 may be a gate insulating layer, and the upper surface of the data line is flush with the upper surface of the gate insulating layer. Therefore, the upper surface of the second insulating layer 132 formed over the gate line or the data line and the first insulating layer 131 is flat, so that the upper surface of the display substrate 10 is also flat, avoiding being located above the gate line or the data line.
- the second insulating layer 132 is damaged, thereby reducing the probability of occurrence of defective gate lines or data lines; and the friction dead zone on the upper surface of the display substrate 10 can be reduced, thereby reducing the probability of light leakage of the display device.
- the signal line 12 provided in the peripheral wiring region is a gate line or a data line.
- the present invention is not limited thereto, and the signal line 12 disposed in the peripheral routing area may also be the gate line 15 and the data line 16, wherein the gate line 15 and the data line 16 may be disposed in the same layer as shown in FIG. It can be set as a different layer as shown in Fig. 6 or Fig. 7.
- the first insulating layer 131 includes a first sub-insulating layer 1311 and a second sub-insulating layer 1312 respectively provided with at least one line groove 14, and the second sub-insulating layer 1312 is located Above the first sub-insulating layer 1311, for example, referring to FIG. 6, the data line 16 is located in the receiving line groove 14 of the first sub-insulating layer 1311, and the gate line 15 is located in the receiving line groove 14 of the second sub-insulating layer 1312.
- the second insulating layer 132 covers the second sub-insulating layer 1312 and the gate line 15; or, referring to FIG.
- the data line 16 is located in the receiving line slot 14 of the second sub-insulating layer 1312, and the gate line 15 is located in the first sub-portion In the capacitor groove 14 of the insulating layer 1311, the second insulating layer 132 covers the second sub-insulating layer 1312 and the data line 16.
- the gate line 15 and the data line 16 are located in the line groove 14 of the corresponding sub-insulating layer, so that the second line is formed in the second
- the sub-insulating layer and the second insulating layer 132 on the signal line 12 tend to be flat, so that the upper surface of the display substrate 10 is relatively flat, and the second insulating layer 132 located above the gate line 15 and the data line 16 is prevented from being damaged, thereby reducing The probability of undesirable problems with gate lines 15 and data lines 16 occurs.
- the upper surface of the gate line 15 and the first sub-insulating layer The upper surface of the 1311 is flush, and the upper surface of the data line 16 is flush with the upper surface of the second sub-insulating layer 1312. Therefore, the upper surface of the second insulating layer 132 formed over the signal line 12 and the first insulating layer is flat, so that the upper surface of the display substrate 10 is also flat, avoiding the first portion above the gate line 15 and the data line 16.
- the two insulating layers 132 are damaged, thereby reducing the probability of occurrence of defective problems of the gate lines 15 and the data lines 16.
- the line slot 14 in the display substrate 10 provided by the above embodiment may also be located in the display area, and the signal line 12 includes the data line 16 or the gate line 15; or, as shown in FIG. 8, the signal line 12 includes data disposed in different layers.
- the line 16 and the gate line 15, the gate line 15 and the data line 16 are criss-crossed, and the angle between the gate line 15 and the projection of the data line 16 is 90°, and the first insulating layer 131 includes the first portion provided with at least one line groove 14 respectively.
- the gate line 15 is located in the capacitance groove 14 of the second sub-insulating layer 1312; or the data line 16 is located in the capacitance line 14 of the second sub-insulating layer 1312, and the gate line 15 is located in the capacitance line of the first sub-insulating layer 1311. In the slot 14.
- the display panel 10 in the above embodiment may be a substrate provided with signal lines such as an array substrate, a color filter substrate, and a touch substrate.
- the signal line may be a data line and/or a gate line as described above, and may also be a signal that can transmit signals such as a power line, a common electrode line, a touch scan line, or a touch sensing line.
- an embodiment of the present invention provides a manufacturing method for manufacturing the above display substrate 10 , including:
- Step 201 forming a first insulating layer 131 on the base substrate 11, and forming a pattern including at least one of the toner grooves 14 on the first insulating layer 131 by one patterning process.
- Step 201 For an exemplary fabrication process, please refer to FIG. 10a and FIG. 10b; as shown in FIG. 10a, a first insulating layer 131 is formed on the substrate substrate 11; then, as shown in FIG. 10b, a patterning process by development, etching, etc. A pattern including at least one of the toner grooves 14 is formed in the first insulating layer 131.
- the depth of the line groove may be the same as the thickness of the first insulating layer, or may be smaller than the thickness of the first insulating layer.
- the first insulating layer 131 may be selected from a silicon nitride layer or a silicon dioxide layer, or a combined layer composed of a silicon nitride layer and a silicon dioxide layer.
- Step 202 forming a conductive layer 17 on the first insulating layer 131 and each of the line grooves 14, and forming a pattern of signal lines 12 in each of the line grooves 14 by one patterning process.
- a conductive layer 17 is formed on the first insulating layer 131 and the capacitor line groove 14 remaining after the etching in step 201, wherein the conductive layer It may be a metal layer or a conductive glass layer or the like; then, as shown in FIG.
- a signal line 12 is formed in each of the capacitance grooves 14 by a patterning process such as development, etching, etc., and the signal line 12 is a conductive layer 17 The remaining part after etching.
- the upper surface of the signal line may be flush with the upper surface of the first insulating layer to further reduce the probability of breakage of the second insulating layer above the signal line, thereby reducing the probability of occurrence of signal line defects.
- Step 203 forming a second insulating layer 132 on the first insulating layer 131 and the plurality of signal lines 12.
- the capacitance groove 14 is disposed on the first insulating layer 131 corresponding to the signal line 12, at least one of the signal lines 12 is located in the capacitance groove 14.
- a capacitor line 14 accommodates a signal line 12 such that the upper surface of the second insulating layer 132 formed on the first insulating layer 131 and each of the signal lines 12 tends to be flat, so that the upper surface of the display substrate 10 tends to be flat.
- the second insulating layer 132 located above the signal line 12 is prevented from being damaged, thereby reducing the frequency of occurrence of the problem of the signal line 12.
- the display substrate 10 may be divided into a peripheral routing area and a display area according to a display function, wherein the manufacturing method of the peripheral routing area is similar to the manufacturing method of the display area, and the data line is used as the gate line and the data below.
- the line, the first insulating layer includes a first sub-insulating layer and a second sub-insulating layer, and the gate lines and the data lines are disposed on different layers, and the data lines are located above the gate lines.
- the example of the method of fabricating the substrate includes:
- Step 301 forming a first sub-insulating layer 1311 on the base substrate 11, and passing a patterning work Forming a pattern including at least one toner groove 14 on the first sub-insulating layer 1311;
- Step 302 forming a conductive layer 17 on the first sub-insulating layer 1311 and each of the capacitor lines 14 to form a pattern of gate lines 15 in each of the capacitor lines 14 by a patterning process;
- Step 303 forming a second sub-insulating layer 1312 on the first sub-insulating layer 1311 and each gate line 15 to form a pattern including at least one of the line grooves 14 on the second sub-insulating layer 1312 by one patterning process.
- Step 304 forming a conductive layer 17 on the second sub-insulating layer 1312 and each of the capacitor lines 14 to form a pattern of data lines 16 in each of the capacitor lines 14 by a patterning process;
- Step 305 forming a second insulating layer 132 on the second sub-insulating layer 1312 and the data line 16.
- a capacitance groove 14 is disposed on the first sub-insulating layer 1311 corresponding to the gate line 15, and one gate line 15 is located in one of the capacitance grooves 14.
- a capacitance groove 14 is disposed on the second sub-insulating layer 1312 corresponding to the data line 16, and one data line 16 is disposed in one of the capacitance grooves 14 so as to be formed on the first sub-insulating layer 1311, the gate line 15, and the second
- the sub-insulating layer 1312 and the second insulating layer 132 over the data line 16 tend to be flat, so that the upper surface of the display substrate 10 is relatively flat, and the second insulating layer 132 located above the gate line 15 and the data line 16 is prevented from being damaged, thereby reducing
- the probability of occurrence of defective problems of the gate lines 15 and the data lines 16 is reduced; at the same time, the probability of light leakage in the display area of the liquid crystal screen is also reduced because the friction dead zone caused by the bumps having the slope is reduced.
- the embodiment of the invention further provides a display device, which comprises the display substrate provided by any of the above embodiments.
- the display device may be any product or component having a display function such as a liquid crystal display panel, an electronic paper, a mobile phone, a tablet computer, a television, a liquid crystal display device, a notebook computer, a digital photo frame, a navigator, and the like.
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Abstract
Description
Claims (14)
- 一种显示基板,包括:衬底基板;设置在所述衬底基板上的第一绝缘层,所述第一绝缘层上设有至少一个容线槽;以及至少一条信号线,所述信号线中的至少一条设置在所述容线槽中,且一个所述容线槽配置以容纳一条所述信号线;以及第二绝缘层,覆盖在所述第一绝缘层和所述信号线上。
- 根据权利要求1所述的显示基板,其中,所述显示基板包括外围走线区域和显示区域。
- 根据权利要求2所述的显示基板,其中,所述容线槽位于所述外围走线区域,所述信号线包括栅线和数据线。
- 根据权利要求2所述的显示基板,其中,所述容线槽位于所述外围走线区域,所述信号线包括数据线或栅线。
- 根据权利要求3所述的显示基板,其中,所述数据线和所述栅线设置在同层。
- 根据权利要求3所述的显示基板,其中,所述数据线和所述栅线设置在不同层。
- 根据权利要求6所述的显示基板,其中,所述第一绝缘层包括分别设有至少一个容线槽的第一子绝缘层和第二子绝缘层,且所述第二子绝缘层位于所述第一子绝缘层的上方,其中,所述数据线位于所述第一子绝缘层的容线槽中,所述栅线位于所述第二子绝缘层的容线槽中;或者,所述数据线位于所述第二子绝缘层的容线槽中,所述栅线位于所述第一子绝缘层的容线槽中。
- 根据权利要求2所述的显示基板,其中,所述容线槽位于所述显示区域,所述信号线包括数据线或栅线。
- 根据权利要求2所述的显示基板,其中,所述容线槽位于所述显示区域,所述信号线包括数据线和栅线。
- 根据权利要求9所述的显示基板,其中,所述数据线和栅线设置 在不同层。
- 根据权利要求10所述的显示基板,其中,所述第一绝缘层包括分别设有至少一个容线槽的第一子绝缘层和第二子绝缘层,且所述第二子绝缘层位于所述第一子绝缘层的上方,其中,所述数据线位于所述第一子绝缘层的容线槽中,所述栅线位于所述第二子绝缘层的容线槽中;或者,所述数据线位于所述第二子绝缘层的容线槽中,所述栅线位于所述第一子绝缘层的容线槽中。
- 根据权利要求1-11中任一所述的显示基板,其中,所述第一绝缘层为氮化硅层或二氧化硅层,或为包括氮化硅层和二氧化硅层的组合层。
- 根据权利要求1-11中任一所述的显示基板,其中,所述信号线的上表面与所述第一绝缘层的上表面平齐。
- 一种显示装置,包括如权利要求1-13中任一所述的显示基板。
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CN105390509B (zh) * | 2015-12-15 | 2018-09-18 | 深圳市华星光电技术有限公司 | 一种阵列基板的制作方法、阵列基板及液晶面板 |
CN108549180A (zh) * | 2018-03-30 | 2018-09-18 | 厦门天马微电子有限公司 | 一种显示面板及显示装置 |
CN108461393B (zh) * | 2018-05-07 | 2021-03-16 | 京东方科技集团股份有限公司 | 显示基板的制备方法、显示基板及显示装置 |
CN109860207B (zh) * | 2019-02-27 | 2022-07-19 | 合肥鑫晟光电科技有限公司 | 一种阵列基板、其制作方法、显示面板及显示装置 |
CN115241238A (zh) * | 2019-06-21 | 2022-10-25 | 京东方科技集团股份有限公司 | 有机发光二极管面板以及oled发光装置 |
CN110676217B (zh) * | 2019-10-09 | 2021-12-10 | 京东方科技集团股份有限公司 | 显示面板及其制造方法、显示装置 |
CN111180470B (zh) * | 2020-02-24 | 2023-06-02 | 合肥鑫晟光电科技有限公司 | 显示基板及其制作方法、和显示装置 |
CN112436036B (zh) * | 2020-11-20 | 2023-06-30 | 合肥维信诺科技有限公司 | 显示基板、显示面板及显示装置 |
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