WO2016098905A1 - Feuille de capteur - Google Patents

Feuille de capteur Download PDF

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Publication number
WO2016098905A1
WO2016098905A1 PCT/JP2015/085592 JP2015085592W WO2016098905A1 WO 2016098905 A1 WO2016098905 A1 WO 2016098905A1 JP 2015085592 W JP2015085592 W JP 2015085592W WO 2016098905 A1 WO2016098905 A1 WO 2016098905A1
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WO
WIPO (PCT)
Prior art keywords
temperature
wiring electrode
pressure
sensor sheet
detection unit
Prior art date
Application number
PCT/JP2015/085592
Other languages
English (en)
Japanese (ja)
Inventor
山本　尚
雅弘 初田
光正 北野
智宏 阿賀谷
耕治 岩田
Original Assignee
ニッタ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2015203403A external-priority patent/JP6799908B2/ja
Application filed by ニッタ株式会社 filed Critical ニッタ株式会社
Priority to EP15870104.5A priority Critical patent/EP3236225A4/fr
Priority to CN201580069137.5A priority patent/CN107110716B/zh
Priority to US15/537,136 priority patent/US10718680B2/en
Priority claimed from JP2015247779A external-priority patent/JP5928859B1/ja
Publication of WO2016098905A1 publication Critical patent/WO2016098905A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • G01K1/026—Means for indicating or recording specially adapted for thermometers arrangements for monitoring a plurality of temperatures, e.g. by multiplexing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/26—Compensating for effects of pressure changes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00—Testing or calibrating of thermometers
    • G01K15/005—Calibration

Definitions

  • the present invention relates to a sensor sheet and a sensor system including the same.
  • Patent Document 1 discloses a temperature detection device including a flexible substrate, parallel electrode groups formed on the substrate, and a heat-sensitive material covering the electrode groups. . According to the technique described in Patent Document 1, it is possible to detect a change in the electrical resistance value of the heat-sensitive material according to the temperature near the intersection of the electrodes.
  • the temperature detection device of Patent Document 1 is manufactured by bonding a pair of sheet-like members each having an electrode group formed thereon, and there is a bonding surface (boundary surface) between the two. Since there are minute irregularities on the bonding surface, when pressure is applied to the bonding surface, the contact area between them changes. As a result, a change due to pressure occurs in the electromagnetic characteristics of the heat-sensitive material, which causes disturbance. Therefore, there is a problem that the temperature of the subject cannot be measured with high accuracy.
  • a first object of the present invention is to provide a sensor sheet that can accurately measure the temperature of a subject, and a sensor system including the sensor sheet. Furthermore, the second object of the present invention is to provide a temperature distribution sensor sheet capable of accurately measuring the temperature of a subject, and a sensor system provided with the temperature distribution sensor sheet.
  • the term “upper” or “lower” includes not only direct contact but also non-contact.
  • Item 1 A film substrate; A plurality of first wiring electrode pairs provided on the film substrate, each of the first wiring electrode pairs having a pair of wiring electrodes intersecting with each other.
  • a conductive temperature-sensitive material provided in a temperature detection unit that is a location where the pair of wiring electrodes intersect, and disposed between the pair of wiring electrodes;
  • Each of the plurality of temperature detection units is configured such that the electromagnetic characteristics change according to the level of temperature, A sensor sheet in which the pair of wiring electrodes and the conductive temperature-sensitive material are fixed.
  • the plurality of first wiring electrode pairs are: A first wiring electrode group provided on the film base material, wherein a plurality of linear first wiring electrodes are arranged in parallel in the first direction; A second wiring electrode group provided on the first wiring electrode group, wherein a plurality of linear second wiring electrodes are arranged in parallel in a second direction intersecting the first direction;
  • the conductive temperature sensitive material is: The first wiring electrode and the second wiring electrode are provided at the temperature detection unit that is a crossing point, and are disposed between the first wiring electrode and the second wiring electrode, Item 1 is formed so that the conductive temperature-sensitive material is fixed on the first wiring electrode, and is formed so that the second wiring electrode is fixed on the conductive temperature-sensitive material.
  • the sensor sheet according to 1.
  • Item 3 The sensor sheet according to Item 2, wherein the thickness from the first wiring electrode to the second wiring electrode is made uniform by providing an insulating material between the temperature detection parts.
  • Item 4. The sensor sheet according to Item 2 or 3, wherein the temperature detection unit is covered with an insulating material.
  • Item 5 A plurality of second wiring electrode pairs provided on the film substrate, each of the second wiring electrode pairs having a pair of wiring electrodes intersecting with each other. , In each of the second wiring electrode pairs, a conductive pressure-sensitive material provided in a pressure detection unit that is a location where the pair of wiring electrodes intersect, and disposed between the pair of wiring electrodes; Further comprising Each of the plurality of pressure detection units is configured such that in each of the second wiring electrode pairs, the electromagnetic characteristics change according to the pressure applied in the direction in which the pair of wiring electrodes are stacked.
  • Item 2. The sensor sheet according to Item 1.
  • the plurality of first wiring electrode pairs are: A first wiring electrode group provided on the film base material, wherein a plurality of linear first wiring electrodes are arranged in parallel in the first direction; A second wiring electrode group provided on the first wiring electrode group, wherein a plurality of linear second wiring electrodes are arranged in parallel in a second direction intersecting the first direction; With The conductive temperature-sensitive material is provided in the temperature detection unit, which is a location where the first wiring electrode and the second wiring electrode intersect, and the first wiring electrode and the second wiring electrode Between them, The plurality of second wiring electrode pairs are: The second wiring electrode group; A third wiring electrode group which is provided above or below the second wiring electrode group and in which a plurality of linear third wiring electrodes are arranged in parallel in a third direction intersecting the second direction; , With The conductive pressure-sensitive material is provided in the pressure detection unit where the second wiring electrode and the third wiring electrode intersect, and the second wiring electrode and the third wiring electrode Item 6.
  • the sensor sheet according to Item 5 which is disposed in between. Note that the
  • Item 7 The sensor sheet according to Item 6, wherein a region where the plurality of temperature detection units are arranged and a region where the plurality of pressure detection units are arranged overlap in a plan view.
  • the third wiring electrode group may be provided on the second wiring electrode group.
  • Item 8 The sensor sheet according to Item 6, wherein a region where the plurality of temperature detection units are arranged and a region where the plurality of pressure detection units are arranged do not overlap in plan view.
  • the third wiring electrode group may be provided under the second wiring electrode group.
  • the conductive pressure-sensitive material includes a first part and a second part, The first part is disposed along each of the second wiring electrodes, The second part is disposed along each of the third wiring electrodes, Item 7.
  • the plurality of first wiring electrode pairs are: A fourth wiring electrode group provided on the film base material, and a plurality of linear fourth wiring electrodes arranged in parallel in the first direction; A fifth wiring electrode group provided on the fourth wiring electrode group, wherein a plurality of linear fifth wiring electrodes are arranged in parallel in a second direction intersecting the first direction; With The conductive temperature-sensitive material is provided in the temperature detection portion where the fourth wiring electrode and the fifth wiring electrode intersect, and the fourth wiring electrode and the fifth wiring electrode Between them, The plurality of second wiring electrode pairs are: A sixth wiring electrode group provided on the film base material, wherein a plurality of linear sixth wiring electrodes are arranged in parallel in the first direction; A seventh wiring electrode group provided on the sixth wiring electrode group, wherein a plurality of linear seventh wiring electrodes are arranged in parallel in the second direction; With The conductive pressure-sensitive material is provided in the pressure detection unit, which is a location where the sixth wiring electrode and the seventh wiring electrode intersect, and the sixth wiring electrode and the seventh wiring electrode Between them, Item 6.
  • Item 11 The fourth wiring electrode and the sixth wiring electrode are alternately arranged along the second direction, Item 11.
  • a thickness from the first wiring electrode to the third wiring electrode is made uniform by providing an insulating material between the temperature detection parts and between the pressure detection parts.
  • Item 13 The sensor sheet according to any one of Items 5 to 12, An electric circuit for obtaining, as an output value, a change in electromagnetic characteristics in the temperature detection unit and the pressure detection unit; Calculating a temperature distribution from output values obtained by each of the plurality of temperature detection units, and calculating a pressure distribution from output values obtained by each of the plurality of pressure detection units; At least a control unit for controlling the operation of the sensor sheet; A sensor system.
  • Item 14 The sensor system according to Item 13, further comprising a correction unit that corrects an output value obtained on the other side based on an output value obtained on one side of the temperature detection unit and the pressure detection unit.
  • Item 15 The sensor system according to Item 13 or 14, further comprising a measuring instrument that measures at least one of temperature and humidity in the same atmosphere as the sensor sheet.
  • the controller is Based on output values from the one or more temperature detection units obtained when one or more of the temperature detection units of the sensor sheet is held at a predetermined temperature, the sensor sheet is added to the temperature detection unit Item 16.
  • the sensor system according to any one of Items 13 to 15, so as to derive a conversion coefficient for the output value from the temperature detection unit so as to obtain a temperature output value correlated with the temperature input value. .
  • the control unit performs the conversion based on output values from the one or more temperature detection units obtained when one or more of the temperature detection units of the sensor sheet are held at a plurality of different temperatures.
  • Item 17. The sensor system according to Item 16, wherein a coefficient is derived.
  • the controller is Item 18.
  • Item 19 It further has a measuring instrument for measuring at least one of temperature and humidity in the same atmosphere as the sensor sheet, Item 19.
  • the sensor system according to any one of Items 16 to 18, wherein the control unit uses the temperature value measured by the measuring instrument as the temperature input value.
  • the controller is Pressure input applied to the pressure detection unit based on an output value from the one or more pressure detection units obtained when a predetermined pressure is applied to one or more of the pressure detection units of the sensor sheet Item 20.
  • the sensor system according to any one of Items 16 to 19, wherein a conversion coefficient for an output value from the pressure detection unit for obtaining a pressure output value correlated with the value is derived.
  • the controller is The conversion coefficient is derived based on output values from the one or more pressure detection units obtained when a plurality of different pressures are applied to the one or more pressure detection units of the sensor sheet. 21.
  • the controller is Item 22.
  • the controller is Item 22.
  • the sensor system according to any one of Items 16 to 22, wherein the conversion coefficient is stored for each of the plurality of sensor sheets, and an optimum conversion coefficient is selected for the sensor sheet to be used.
  • Item 24 It further has a measuring instrument for measuring at least one of temperature and humidity in the same atmosphere as the sensor sheet, Item 24.
  • the sensor system according to any one of Items 16 to 23, wherein the control unit determines the conversion coefficient based on humidity measured by the measuring instrument.
  • the conductive temperature-sensitive material contains conductive particles and a resin, Item 13.
  • the sensor sheet according to any one of Items 1 to 12, wherein the electrical resistance value at 200 ° C is 1.2 times or more the electrical resistance value at 30 ° C.
  • Item 26 The sensor sheet according to Item 25, wherein the volume resistivity in the temperature range of 30 ° C. to 200 ° C. is in the range of 10 ⁇ ⁇ cm to 100 K ⁇ ⁇ cm.
  • Item 27 The sensor sheet according to Item 25 or 26, wherein the conductive temperature-sensitive material has a content of the conductive particles of less than 15% by mass.
  • Item 28 The sensor sheet according to any one of Items 25 to 27, wherein the thickness of the conductive temperature-sensitive material is 100 ⁇ m or less.
  • Item 29 The sensor sheet according to any one of Items 25 to 28, wherein an electrical resistance value at 100 ° C. is 5 times or less of an electrical resistance value at 30 ° C.
  • Item 30 The sensor sheet according to any one of Items 25 to 29, wherein the rate of change in electrical resistance value in the temperature range of 30.30 ° C to 200 ° C is in the range of 0.12 to 2.4% / ° C.
  • Another sensor sheet is a temperature distribution sensor sheet for measuring temperature distribution, and is provided on a film substrate, and a plurality of linear first wiring electrodes are arranged in parallel in the first direction.
  • each of the plurality of temperature detecting portions has an electromagnetic characteristic that changes according to a temperature level, and the conductive temperature sensitive material is disposed on the first wiring electrode. It is manufactured by forming a material and forming the second wiring electrode on the conductive temperature-sensitive material. It is intended.
  • the first wiring is manufactured by forming the conductive temperature-sensitive material on the first wiring electrode and forming the second wiring electrode on the conductive temperature-sensitive material.
  • an insulating material may be provided between the temperature detection units so that the thickness from the first wiring electrode to the second wiring electrode may be uniform.
  • the temperature detection unit may be covered with an insulating material.
  • the sensor system includes the temperature distribution sensor sheet, an electric circuit that acquires a change in electromagnetic characteristics in the temperature detection unit as an output value, and an output value obtained by each of the plurality of temperature detection units. Calculating means for calculating a temperature distribution from
  • the sensor system according to the present invention may further include a measuring instrument that measures at least one of temperature and humidity in the same atmosphere as the sensor sheet.
  • the calibration program according to the present invention is based on output values from the one or more temperature detection units obtained when one or more of the temperature detection units of the temperature distribution sensor sheet is held at a predetermined temperature.
  • the sensor system derives a conversion coefficient for the output value from the temperature detection unit so that a temperature output value correlated with the temperature input value applied to the temperature detection unit is obtained.
  • This program is as follows (hereinafter referred to as “Program Description”).
  • a semiconductor memory including a ROM (Read Only Memory) and a RAM (Random Access Memory), an optical disk including a DVD (Digital Versatile Disc) and a CD (Compact Disc), a hard disk (hard disk), and an FD (flexible) disk) including a magnetic disk.
  • the program code may be downloaded as a data signal from a remote computer or device via a communication link and stored in a computer storage device as a computer program product. Alternatively, the program code may be distributed while being stored in a recording medium as a computer program product.
  • the program code may be written in any one or more known program languages.
  • the computer is not limited to a general-purpose type such as a personal computer, and may be a device specialized for calibration of a temperature distribution sensor sheet including a plurality of temperature detection units.
  • the calibration program is an output value from the one or more temperature detection units obtained when one or more of the temperature detection units of the temperature distribution sensor sheet is held at a plurality of different temperatures.
  • the sensor system may be operated to derive the conversion factor.
  • the calibration program causes the sensor system to determine whether a temperature output value obtained by multiplying the output value of the temperature detection unit by the conversion coefficient matches a temperature input value applied to the temperature detection unit. It may be operated.
  • the sensor system has a measuring instrument that measures at least one of temperature and humidity in the same atmosphere as the sensor sheet, and the calibration program uses the temperature value measured by the measuring instrument as the temperature input value. Good.
  • the calibration program stores the conversion coefficient for each of the plurality of temperature distribution sensor sheets, and operates the sensor system so as to select an optimum conversion coefficient for the temperature distribution sensor sheet to be used. May be.
  • Still another sensor sheet is a sensor sheet for measuring a temperature distribution and a pressure distribution, and is provided on a film base, and a plurality of linear first wiring electrodes are arranged in the first direction.
  • a plurality of linear second wiring electrodes arranged in parallel in a second direction that intersects with the first direction and is provided on the first wiring electrode group.
  • the second wiring electrode group, and the first wiring electrode and the second wiring which are provided in a temperature detection unit that is a location where the first wiring electrode and the second wiring electrode intersect.
  • a plurality of linear third wiring electrodes provided on the second wiring electrode group and in a third direction intersecting the second direction, the conductive temperature-sensitive material disposed between the electrodes and the second wiring electrode group; A third wiring electrode group arranged in parallel, and the second wiring electrode and the third wiring electrode intersect each other.
  • a conductive pressure-sensitive material provided between the second wiring electrode and the third wiring electrode, and each of the plurality of temperature detection units has a temperature
  • the electromagnetic characteristics change according to the height of each of the plurality of pressure detectors, and each of the plurality of pressure detection units has a pressure applied in the direction in which the second wiring electrode group and the third wiring electrode group are stacked. Accordingly, the electromagnetic characteristics change, and the area where the plurality of temperature detection units are arranged overlaps the area where the plurality of pressure detection units are arranged in plan view.
  • the sensor sheet can be compactly formed by overlapping a region where a plurality of temperature detection units are arranged and a region where a plurality of pressure detection units are arranged in a plan view.
  • the conductive temperature-sensitive material may be formed on the first wiring electrode, and the second wiring electrode may be formed on the conductive temperature-sensitive material.
  • an insulating material is provided between the temperature detection units and between the pressure detection units, whereby the thickness from the first wiring electrode to the third wiring electrode is made uniform. It may be.
  • a sensor system is obtained by each of the sensor sheet, an electric circuit that acquires a change in electromagnetic characteristics of the temperature detection unit and the pressure detection unit as an output value, and each of the plurality of temperature detection units. And calculating a temperature distribution from the output value and calculating a pressure distribution from the output value obtained by each of the plurality of pressure detection units.
  • a correction unit that corrects an output value obtained on the other side based on an output value obtained on one side of the temperature detection unit and the pressure detection unit may be further included.
  • it may further include a measuring instrument for measuring at least one of temperature and humidity in the same atmosphere as the sensor sheet.
  • the calibration program according to the present invention is based on output values from the one or more temperature detection units obtained when one or more of the temperature detection units of the sensor sheet is held at a predetermined temperature. Operating the sensor system to derive a conversion coefficient for the output value from the temperature detection unit so that a temperature output value correlated with the temperature input value applied to the temperature detection unit is obtained.
  • the calibration program related to temperature detection is as described above.
  • the calibration program is based on output values from the one or more pressure detection units obtained when a predetermined pressure is applied to one or more of the pressure detection units of the sensor sheet. Operating the sensor system to derive a conversion coefficient for the output value from the pressure detection unit so that a pressure output value correlated with the pressure input value applied to the detection unit is obtained; Also good.
  • the calibration program is based on output values from the one or more pressure detection units obtained when applying a plurality of different pressures to the one or more pressure detection units of the sensor sheet,
  • the sensor system may be operated to derive the conversion factor.
  • the calibration program causes the sensor system to determine whether a pressure output value obtained by multiplying the output value of the pressure detection unit by the conversion coefficient matches a pressure input value applied to the pressure detection unit. It may be operated.
  • the calibration program may store the conversion coefficient for each of the plurality of sensor sheets, and operate the sensor system so as to select an optimal conversion coefficient for the sensor sheet to be used.
  • the present invention provides a temperature-sensitive element (or temperature detection unit) that can accurately measure the temperature of a subject over a wide temperature range.
  • the device includes a first electrode, a second electrode, and a temperature sensitive resistor (or a conductive temperature sensitive material) electrically connected to the first electrode and the second electrode.
  • a thermosensitive element whose body contains conductive particles and a resin and whose electric resistance value at 200 ° C. is 1.2 times or more of the electric resistance value at 30 ° C. is the temperature of the subject over a wide temperature range. It was found that can be measured with high accuracy. The present invention has been completed by further studies based on these findings.
  • the present invention provides the following aspects of the invention.
  • Item 1 At least one first electrode; At least one second electrode; At least one temperature-sensitive resistor electrically connected to each first electrode and each second electrode; With The temperature sensitive resistor includes conductive particles and a resin, A temperature-sensitive element having an electric resistance value at 200 ° C of 1.2 times or more of an electric resistance value at 30 ° C.
  • Item 2 The temperature-sensitive element according to Item 1, wherein the volume resistivity in the temperature range of 30 ° C. to 200 ° C. is in the range of 10 ⁇ ⁇ cm to 100 K ⁇ ⁇ cm.
  • Item 3. The temperature sensitive element according to Item 1 or 2, wherein the temperature sensitive resistor has a content of the conductive particles of less than 15% by mass.
  • Item 4. The temperature-sensitive element according to any one of Items 1 to 3, wherein the temperature-sensitive resistor has a thickness of 100 ⁇ m or less.
  • Item 5 The temperature-sensitive element according to any one of Items 1 to 4, wherein the electrical resistance value at 100 ° C is 5 times or less than the electrical resistance value at 30 ° C.
  • Item 6 The temperature-sensitive element according to any one of Items 1 to 5, wherein the rate of change in electrical resistance value in the temperature range of 30 ° C to 200 ° C is in the range of 0.12 to 2.4% / ° C.
  • Item 7. Further comprising a substrate, Item 7.
  • the first and second electrodes are formed in a linear shape, A plurality of the first electrodes and a plurality of the second electrodes are disposed on the base material, The plurality of first electrodes are arranged in parallel to extend in a first direction, The plurality of second electrodes are arranged in parallel to extend in a second direction intersecting the first direction, Item 8.
  • Item 9 The temperature-sensitive element according to item 8, wherein an insulating material is provided between the temperature detection parts, whereby the thickness from the first electrode to the second electrode is made uniform.
  • Item 10 The temperature sensitive element according to Item 8 or 9, wherein the temperature detection unit is covered with an insulating material.
  • Item 11 Including conductive particles, resin, and solvent, An ink for forming a temperature-sensitive resistor having an electric resistance value at 200 ° C. of 1.2 times or more of an electric resistance value at 30 ° C.
  • Item 12. A method for producing a temperature-sensitive element, comprising a step of applying the ink according to item 11 to the surface of an electrode.
  • FIG. 27 is a cross-sectional view taken along line AA in FIG. 26.
  • FIG. 27 is a sectional view taken along line BB in FIG. 26.
  • FIG. 30 is a sectional view taken along line CC of FIG. 29. It is a perspective view which shows the manufacturing method of the temperature pressure sensor sheet
  • FIG. 33 shows the other example of the temperature sensing element which concerns on the Example of this invention (what was used for the measurement of a resistance value and its change rate). It is a top view of FIG. 33 (what was used for the measurement of a resistance value and its change rate).
  • 3 is a graph showing the relationship between the electrical resistance value of the temperature sensing element obtained in Example 1 and the measured temperature. It is a graph showing the relationship between the electrical resistance value of the thermosensitive element obtained in Example 2, and measured temperature.
  • 6 is a graph showing the relationship between the electrical resistance value of the temperature sensing element obtained in Example 3 and the measured temperature. 6 is a graph showing the relationship between the electrical resistance value of the temperature sensing element obtained in Comparative Example 1 and the measured temperature.
  • Example 4 is a graph showing the relationship between the reciprocal of the electrical resistance value of the temperature sensitive element obtained in Example 1 and the measured temperature. It is a graph showing the relationship between the reciprocal number of the electrical resistance value of the temperature sensing element obtained in Example 2, and measurement temperature. It is a graph showing the relationship between the reciprocal number of the electrical resistance value of the temperature sensing element obtained in Example 3, and measurement temperature. 6 is a graph showing the relationship between the reciprocal of the electrical resistance value of the temperature sensitive element obtained in Comparative Example 1 and the measured temperature. It is a graph showing the relationship between the change rate of the electrical resistance value of the temperature sensing element obtained by the Example and the comparative example, and measurement temperature. It is sectional drawing which shows the other example of the temperature sensitive element which concerns on an Example (what was used for the measurement of volume resistivity). It is a top view of FIG. 43 (what was used for the measurement of volume resistivity).
  • the temperature distribution sensor sheet measures temperature distribution.
  • This temperature distribution sensor sheet is a two-dimensional array of a plurality of temperature sensors whose electromagnetic characteristics such as resistance value change according to the temperature.
  • Such a temperature distribution sensor sheet is used for heat processing in the manufacturing process of semiconductors, ceramic capacitors, liquid crystals, glass, printers, films, etc., and heat generating parts of electronic devices such as hot plates, personal computers, batteries, and the like. It can be used to measure the temperature distribution of anything such as the heat propagation or heat dissipation state of the metal or resin material that is in contact, the body temperature of a human body or an animal. Therefore, it can be used for material processing efficiency improvement, material design, machine design, improvement, product development, treatment, medical treatment analysis judgment and the like.
  • the temperature distribution sensor sheet 1 includes a film base 2, a first wiring electrode group 3 provided on the film base 2, and a first wiring electrode group. 2, and a conductive temperature sensitive material 5 provided between the first wiring electrode group 3 and the second wiring electrode group 4. .
  • the first wiring electrode group 3 includes a plurality of linear first wiring electrodes 3a arranged in parallel in the A direction (first direction).
  • the second wiring electrode group 4 includes a plurality of linear second wiring electrodes 4a arranged in parallel in the B direction (second direction).
  • the A direction and the B direction are orthogonal to each other, but may intersect at other angles.
  • the conductive temperature-sensitive material 5 is provided so as to cover each of the plurality of first wiring electrodes 3a as shown in FIG. 3 which is a cross-sectional view.
  • the conductive temperature-sensitive material 5 only needs to be provided at least in the temperature detection unit 21 to be described later and disposed between the first wiring electrode 3a and the second wiring electrode 4a.
  • the temperature detection part 21 is a location where the first wiring electrode 3a and the second wiring electrode 4a intersect.
  • the first wiring electrode group 3, the second wiring electrode group 4, and the conductive temperature-sensitive material 5 constitute a temperature distribution sensor.
  • FIG. 4 which is an enlarged view of the main part C of FIG. 2, each of the temperature detection units 21 where the first wiring electrode 3a and the second wiring electrode 4a intersect each other is a temperature sensor. Function as.
  • the electrical resistance of the conductive temperature-sensitive material 5 changes according to the temperature level.
  • the electrical resistance is transmitted from the temperature detector 21 to the power source through the first wiring electrode 3a and the second wiring electrode 4a. Thereby, the resistance value is measured.
  • the temperature at which the temperature detection unit 21 is held can be detected from the measured resistance value.
  • the resistance value of the temperature detection unit 21 increases as the held temperature increases. However, the resistance value may decrease as the held temperature increases. Further, the temperature detection unit 21 may change the electromagnetic characteristics other than the resistance value such as the charge amount or the induced current according to the temperature.
  • the film substrate 2 is made of a flexible material such as polyimide or PET.
  • the first wiring electrode 3a and the second wiring electrode 4a are made of a metal foil such as silver foil, copper foil, aluminum foil, or a conductive polymer, but are not limited thereto, and are made of a material having high conductivity. If it is.
  • the material which comprises a film base material and a wiring electrode it is the same also in the temperature and pressure sensor mentioned later.
  • the conductive temperature-sensitive material 5 will be described later, but is formed by adding a binder to conductive particles.
  • the conductive temperature sensitive material 5 is formed on the first wiring electrode 3a
  • the second wiring electrode 4a is formed on the conductive temperature sensitive material 5. It is manufactured by doing. Therefore, a bonding surface that can be formed between the first wiring electrode 3a and the conductive temperature-sensitive material 5 and between the conductive temperature-sensitive material 5 and the second wiring electrode 4a when it is bonded later. (Boundary surface) does not exist. That is, the first wiring electrode 3a and the conductive temperature sensitive material 5 and the conductive temperature sensitive material 5 and the second wiring electrode 4a are in close contact with each other and fixed. Usually, since minute unevenness exists on the bonding surface, when pressure is applied to the bonding surface, the contact area between the bonded surfaces changes.
  • the electromagnetic characteristics of the heat-sensitive material 5 change due to pressure, causing disturbance.
  • there is no bonding surface there is no bonding surface. Therefore, when detecting the temperature of the subject, the electromagnetic characteristics of the heat-sensitive material 5 do not change due to the pressure applied to the bonding surface, and therefore there is a disturbance in the resistance value that changes in the temperature detector 21. Does not occur. Thereby, the temperature of the subject can be accurately measured.
  • an insulating material 9 is provided between the temperature detectors 21. Thereby, the thickness from the 1st wiring electrode 3a to the 2nd wiring electrode 4a is made uniform.
  • the thickness from the first wiring electrode 3a to the second wiring electrode 4a uniform, it is possible to prevent the pressing force by the subject from being concentrated on the temperature detection unit 21 when measuring the temperature distribution. As a result, since no distortion occurs in the conductive temperature-sensitive material 5 provided in the temperature detection unit 21, the occurrence of temperature measurement errors can be prevented. Moreover, it is possible to prevent the uneven impression from being generated on the subject to which the temperature distribution sensor sheet 1 is pressed.
  • FIG. 5 which is a perspective view
  • a protective film substrate 8 made of an insulating material is provided on the second wiring electrode group 4.
  • the temperature detection unit 21 may be covered with an insulating resin material.
  • the electromagnetic characteristics of the temperature detection unit 21 change due to moisture absorption, or the conductive temperature-sensitive material 5 deteriorates due to hydrolysis. Can be prevented.
  • the conductive temperature-sensitive material 5 has a characteristic that the electric resistance value increases as the temperature increases. For example, in the range of at least 30 ° C. to 200 ° C., the electric resistance value increases as the temperature increases. It can be provided with such a characteristic that the electrical resistance value decreases as the temperature increases and the temperature decreases.
  • the conductive temperature-sensitive material 5 includes conductive particles and a resin.
  • the conductive particles contained in the conductive temperature-sensitive material 5 are not particularly limited as long as the particles have conductivity, and conductive particles contained in a known conductive temperature-sensitive material can be used.
  • conductive particles include carbon-based particles (including fibrous materials) such as carbon black, graphite, carbon nanotubes, carbon nanohorns, carbon nanofibers, and carbon nanocoils; iron, nickel, copper, aluminum, magnesium, Metal particles such as platinum, silver, gold, and alloys containing at least one of these metals; tin oxide, zinc oxide, silver iodide, copper iodide, barium titanate, indium tin oxide, strontium titanate, etc. Examples thereof include conductive inorganic material particles.
  • conductive carbon black is particularly preferable from the viewpoint of a temperature-sensitive element that can accurately measure the temperature of a subject over a wide temperature range.
  • One type of conductive particles may be used alone, or two or more types may be used in combination.
  • the particle diameter of the conductive particles is not particularly limited, but is preferably 1 ⁇ m or less, more preferably 100 nm or less, and even more preferably 50 nm or less.
  • the content of the conductive particles contained in the conductive temperature-sensitive material 5 is not particularly limited, and may be set so as to have a desired electric resistance value or volume resistance value. From the viewpoint of a thermosensitive element that can be measured with high accuracy, it is preferably less than 15% by mass, more preferably about 2 to 9% by mass. For example, when conductive carbon black produced by an oil furnace method is used as the conductive particles, from the same viewpoint, it is preferably less than 10% by mass, more preferably about 1 to 8% by mass, and further preferably 2 to 6%. About mass% is mentioned. In the case of using conductive carbon black produced by the acetylene decomposition method, from the same viewpoint, it is preferably less than 15% by mass, more preferably about 4 to 12% by mass, and further preferably 6 to 9% by mass. Degree.
  • the resin contained in the conductive temperature-sensitive material 5 is not particularly limited, and a resin contained in a known conductive temperature-sensitive material can be used.
  • the glass transition temperature of the resin can be appropriately selected according to the usage mode of the thermosensitive element. From the viewpoint of a thermosensitive element that can accurately measure the temperature of the subject over a wide temperature range, the glass transition temperature of the resin is preferably equal to or higher than the upper limit of the temperature measurement range of the temperature detector 21. That is, for example, when the upper limit value of the temperature measurement range of the temperature detection unit 21 is 200 ° C., the glass transition temperature of the resin is preferably 200 ° C.
  • the glass transition temperature of the resin is preferably 100 ° C. or higher.
  • the method for adjusting the glass transition temperature of the resin include a method of adjusting the molecular weight, molecular skeleton, and the like of the resin.
  • the glass transition temperature of the resin is preferably about 80 to 400 ° C.
  • the glass transition temperature of the resin means the glass transition temperature of the entire resin contained in the conductive temperature sensitive material.
  • the resin include thermosetting resins such as silicone resin, polyimide resin, and epoxy resin; polyamideimide resin, polyetherimide resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyamide resin, polyacetal resin, polyphenylene sulfide resin, Thermoplastic resins such as polyetheretherketone resin, fluororesin, and polyester resin are listed.
  • thermosetting resins such as silicone resin, polyimide resin, and epoxy resin
  • polyamideimide resin, polyetherimide resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyamide resin, polyacetal resin, polyphenylene sulfide resin are listed.
  • a silicone resin, a polyimide resin, an epoxy resin, a polyamideimide resin, a polyethylene terephthalate resin, and a polyetherimide resin are preferable.
  • a polyimide resin and an epoxy resin are particularly preferable.
  • the glass transition temperature (Tg (° C.)) of the resin is a value measured by differential scanning calorimetry (DSC).
  • the content of the resin contained in the conductive temperature-sensitive material can be set according to the type of conductive particles, etc., and is not particularly limited, but temperature detection that can accurately measure the temperature of the specimen over a wide temperature range From the viewpoint of the portion 21, the content is preferably 85% by mass or more, more preferably about 91 to 98% by mass.
  • the content is preferably 90% by mass or more, more preferably about 92 to 99% by mass, and still more preferably 94 to 98%.
  • about mass% is mentioned.
  • conductive carbon black produced by the acetylene decomposition method is preferably 85% by mass or more, more preferably about 88 to 96% by mass, and still more preferably 91 to 94% by mass. Degree.
  • the conductive temperature-sensitive material 5 may further contain an additive in addition to the above-described conductive particles and resin. It does not restrict
  • the electric resistance value at 200 ° C. is 1.2 times or more the electric resistance value at 30 ° C. That is, the electrical resistance value at 200 ° C. measured by arranging electrodes on the conductive temperature-sensitive material 5 is 1.2 times or more the electrical resistance value at 30 ° C., and the electrical resistance value of the conductive temperature-sensitive material 5 is The relationship with temperature is such a specific relationship.
  • the conductive temperature-sensitive material 5 contains conductive particles and resin, and the electrical resistance value and the temperature have such a specific relationship, so that a wide temperature range (for example, The temperature of the subject can be measured with high accuracy over a range of 30 ° C. to 200 ° C.
  • the value of the electrical resistance value of the electroconductive temperature sensitive material 5 is a value measured by the method as described in the Example mentioned later.
  • the electric resistance value of the conductive thermosensitive material 5 at 200 ° C. is 1.5 times the electric resistance value at 30 ° C. It is preferable that it is above, and it is more preferable that it is 1.7 times or more.
  • the electrical resistance value at 150 ° C. of each temperature detection unit (conductive temperature sensitive material) 21 is 30 ° C.
  • the electric resistance value is preferably 1.2 times or more, more preferably 1.5 or more, and even more preferably 1.7 times or more.
  • the electrical resistance value at 100 ° C. of each temperature detection unit (conductive temperature sensitive material) 21 is 30 ° C.
  • the electrical resistance value is preferably 1.2 times or more, more preferably 1.5 times or more, and still more preferably 1.7 times or more.
  • the electrical resistance value at the maximum temperature in the temperature measurement range of each temperature detection unit (conductive temperature-sensitive material) 21 is not more than 5 times the electrical resistance value of the minimum temperature, the temperature of the subject is more accurate. Highly measurable.
  • the electrical resistance value at 100 ° C. of each temperature detector (conductive temperature sensitive material) 21 is 30 ° C.
  • the electric resistance value is preferably 5 times or less, more preferably 3.5 times or less.
  • the resistance value of the temperature detection unit (conductive temperature sensitive material) 21 is The resistance value is preferably 5 times or less, more preferably 4.5 times or less.
  • the electrical resistance value at 200 ° C. of the temperature detector (conductive temperature sensitive material) 21 is The resistance value is preferably 5 times or less.
  • the change rate of the electrical resistance value in the temperature range of 30 ° C. to 200 ° C. is not particularly limited, but the temperature of the subject is measured with higher accuracy. From the viewpoint, it is preferably in the range of 0.12 to 2.4% / ° C, particularly preferably in the range of 0.5 to 1% / ° C.
  • the rate of change in electrical resistance value in the temperature range is 1 to 2.4% / ° C. By being in this range, the temperature of the subject can be measured with higher accuracy.
  • the change rate of the electrical resistance value in the temperature range of 30 ° C. to 150 ° C. is preferably in the above range. .
  • the rate of change of the electrical resistance value in the temperature range of 30 ° C. to 100 ° C. is in the above range. preferable.
  • the change rate of the electrical resistance value of the temperature detection unit (conductive temperature sensitive material) 21 is a value measured by the method described in the examples described later.
  • the volume resistivity in the temperature range of 30 ° C. to 200 ° C. of the temperature detection unit (conductive temperature sensitive material) 21 of the present embodiment is not particularly limited, but from the viewpoint of measuring the temperature of the subject with higher accuracy, Preferably 10 ⁇ ⁇ cm to 100 k ⁇ ⁇ cm, more preferably 100 ⁇ ⁇ cm to 50 k ⁇ ⁇ cm.
  • the value of the volume resistivity in the temperature range of 30 ° C. to 200 ° C. of the temperature detector (conductive temperature sensitive material) 21 is a value measured by the method described in the examples described later.
  • the conductive temperature-sensitive material is formed in a sheet shape (thin film shape), but the thickness is not particularly limited. However, from the viewpoint of measuring the temperature of the subject with higher accuracy, it is preferably 100 ⁇ m or less, more preferably about 10 to 50 ⁇ m, and still more preferably about 20 to 40 ⁇ m.
  • This ink includes a solvent in addition to the above-described conductive particles and the above-described resin, and has a form in which the conductive particles and the resin are dispersed in the solvent.
  • the sensor sheet of this embodiment can be easily manufactured, for example, by applying this ink to the surface of the electrode and drying the solvent.
  • the solvent used in the ink of the present embodiment is not particularly limited as long as the conductive particles and the resin can be dispersed and can be dried after being applied to the surface of the electrode.
  • Specific examples of the solvent include triethylene glycol dimethyl ether and N-methyl-2-pyrrolidone.
  • a solvent may be used individually by 1 type and may be used in combination of 2 or more types.
  • the ratio of the solvent in this ink is not particularly limited, and may be about 20 to 40% by mass, for example. Moreover, what is necessary is just to adjust the compounding quantity of electroconductive particle and resin, etc. so that it may become content in the above-mentioned electroconductive temperature sensitive material after a solvent dries.
  • a known component such as an antifoaming agent may be added to the ink.
  • the ink application method is not particularly limited, and can be performed using, for example, a known method.
  • application such as a cast method, a dip coat method, a die coater method, a roll coater method, a bar coater method, and a spin coat method.
  • Various printing methods such as a screen printing method, an ink jet method, a gravure printing method, a flexographic printing method, an offset printing method, and a micro contact printing method can be employed.
  • the temperature distribution sensor sheet 1 is manufactured as follows, for example. First, as shown in FIG. 6, the first wiring electrode group 3 is formed on the film base 2 by screen printing. Next, the conductive temperature sensitive material 5 is formed on the first wiring electrode 3a by screen printing. Next, the second wiring electrode group 4 is formed on the first wiring electrode group 3 by screen printing so as to sandwich the conductive temperature-sensitive material 5.
  • the first wiring electrode group 3, the second wiring electrode group 4, and the conductive temperature sensitive material 5 are formed by screen printing. However, the present invention is not limited to this, and is formed by ink jet printing or transfer method. Also good. Further, the first wiring electrode group 3 and the second wiring electrode group 4 may be wired by a substrate wiring technique (such as copper etching). Thereby, the temperature distribution sensor sheet
  • the manufacturing method of the temperature distribution sensor sheet 1 is not limited to the above, and the first wiring electrode group 3, the conductive temperature-sensitive material 5, and the second wiring electrode group 4 are attached to the film base 2. You may form in order.
  • the sensor system 101 includes a temperature distribution sensor sheet 1, a PC (Personal Computer) 31, and a connector (electric circuit) 32, as shown in FIG.
  • the connector 32 is electrically connected to the PC 31 by wire, but may be connected wirelessly.
  • the connector 32 supports the temperature distribution sensor sheet 1.
  • a plurality of terminals (not shown) are provided in the end region of the temperature distribution sensor sheet 1, and each terminal is electrically connected to one of a plurality of contacts provided on the connector 32.
  • Each of the plurality of temperature detection units 21 provided in the temperature distribution sensor sheet 1 is connected to a corresponding terminal via a wiring.
  • the connector 32 acquires a change in electromagnetic characteristics in the temperature detection unit 21 as an output value.
  • the connector 32 incorporates an electronic element called a multiplexer in order to apply voltage to the plurality of temperature detection units 21 in order.
  • the connector 32 obtains an output in order from each of the plurality of temperature detection units 21 by sequentially applying a voltage to the plurality of temperature detection units 21. Specifically, when one of the first wiring electrode 3a and the second wiring electrode 4a is a drive electrode and the other is a receive electrode, the connector 32 applies a voltage to the plurality of drive electrodes in order. In this state, the resistance values of the plurality of receive electrodes are measured in order to obtain the output of each temperature detection unit 21. The resistance value of the receive electrode is inverted and amplified by an operational amplifier and obtained as a voltage value. By setting the applied voltage and the output amplification factor, the output can be arbitrarily amplified.
  • the connector 32 converts an analog signal indicating a temperature value output from each temperature detection unit 21 of the temperature distribution sensor sheet 1 into a digital signal and outputs the digital signal to the PC 31.
  • the PC 31 is a CPU (Central Processing Unit) that is an arithmetic processing unit, a control program executed by the CPU, and a hard disk and ROM (Read Only Memory) in which data used for the control program are stored, and data when the program is executed.
  • RAM Random Access Memory
  • the sensor system 101 has a thermocouple (measuring instrument) (not shown) that measures the temperature of the same atmosphere as the temperature distribution sensor sheet 1.
  • a thermocouple (measuring instrument) (not shown) that measures the temperature of the same atmosphere as the temperature distribution sensor sheet 1.
  • the thermocouple is installed in the connector 32, it is not limited to this, You may install in the vicinity of the temperature distribution sensor sheet
  • FIG. The measurement signal output from the thermocouple is converted into a digital signal and input to the PC 31.
  • the means for measuring the temperature in the same atmosphere as the temperature distribution sensor sheet 1 is not limited to a thermocouple.
  • a measuring instrument that measures not only the temperature but also the humidity in the same atmosphere as the temperature distribution sensor sheet 1 can be provided, and this measuring instrument can be integrated with a device that measures the temperature.
  • the PC 31 functions as a calculation unit that calculates a temperature distribution from output values obtained from each of the plurality of temperature detection units 21.
  • the temperature distribution of the subject can be measured by calculating the temperature distribution from the output values obtained from each of the plurality of temperature detection units 21.
  • Fig. 8 shows the relationship between sensor output and temperature in a temperature distribution sensor.
  • the unit of sensor output is temperature (° C.). It can be seen that when the temperature is changed between 20 ° C. and 70 ° C., the sensor output changes following this.
  • FIG. 9 shows the output of the temperature distribution sensor when the temperature distribution sensor is pressurized stepwise to 100 kPa, 200 kPa, 300 kPa, and 400 kPa while being constant at room temperature (22 ° C.). It can be seen that the temperature sensor output does not depend on the pressure.
  • the program code relating to the calibration program according to the present embodiment is installed in the PC 31. Accordingly, the PC 31 functions as a control unit that performs an acquisition process and a calibration process to be described later.
  • the temperature distribution sensor sheet 1 includes a plurality of temperature detection units 21, it is expected that the output varies among the temperature detection units 21. Therefore, all the temperature detection units 21 are held at a constant temperature, and the correction coefficient for correcting the sensitivity difference between the temperature detection units 21 is calculated using the output value of each temperature detection unit 21 and its average value. By deriving, it becomes possible to correct the sensitivity difference between the plurality of temperature detection units 21 during actual measurement.
  • a thermostat can be used suitably.
  • the temperature distribution sensor sheet 1 is attached to the connector 32. And the temperature distribution sensor sheet
  • seat 1 is installed in an atmosphere with uniform temperature (step S1). And PC31 acquires the digital output of each temperature detection part 21 (step S2).
  • the PC 31 calculates the average value of the digital output of each temperature detection unit 21 (step S3). And PC31 calculates the correction coefficient of each temperature detection part 21 (step S4). Specifically, a quotient obtained by dividing the average value by each output value is obtained as a correction coefficient for each temperature detection unit 21. And PC31 memorize
  • a storage unit RAM, hard disk, etc.
  • FIG. 11A in the acquisition process of the virtual temperature distribution sensor sheet 1 configured by nine temperature measuring units (temperature sensors) 21 in three rows and three columns, The output value of each temperature detection part 21 obtained from the temperature detection part 21 is shown. Since the average value of these nine output values is 49.9, the average value / output value is calculated. The quotient obtained by these divisions is the correction coefficient of each temperature detection unit 21 shown in FIG.
  • the acquisition processing is performed using the output value obtained by holding the temperature detection unit 21 at one predetermined temperature.
  • the temperature detection unit 21 is changed to two or more different predetermined temperatures.
  • the acquisition processing may be performed using the output value obtained by holding the data.
  • the correction coefficient as shown in FIG. 11B is obtained for each temperature detection unit 21 at two or more different predetermined temperatures, and the average value is derived as a fixed correction coefficient of the temperature detection unit 21. May be.
  • the correction coefficient may be derived as a function of temperature from correction coefficients respectively obtained at two or more different predetermined temperatures.
  • the calibration program of the present embodiment is based on output values from one or more temperature detection units 21 obtained when one or more temperature detection units 21 of the temperature distribution sensor sheet 1 are held at a predetermined temperature.
  • a conversion coefficient for the output value from the temperature detection unit 21 for deriving a temperature output value having a correlation (linearity or non-linearity) with respect to the temperature input value applied to the temperature detection unit is derived.
  • the sensor system 101 is operated as described above. That is, the sensor system 101 is operated so as to perform the calibration process.
  • each temperature detector 21 is not expected to be an output proportional to the actual temperature. Therefore, the output value of each temperature detection unit 21 is acquired in a state where a known temperature is added as a temperature input value, and a relational expression (temperature conversion formula) between the output value and the temperature input value is obtained. From this temperature conversion formula, from the temperature detection unit 21 for obtaining a temperature output value having a correlation (linearity, non-linearity) with respect to the temperature input value applied to each temperature detection unit 21. The conversion coefficient for the output value of is derived. By multiplying the output value of the temperature detection unit 21 by this conversion coefficient, it is possible to obtain a temperature output value having a correlation (linearity or non-linearity) with respect to the temperature input value applied to the temperature detection unit 21. It becomes.
  • the temperature distribution sensor sheet 1 is attached to the connector 32. And the temperature distribution sensor sheet
  • seat 1 is installed in an atmosphere with uniform temperature (step S11).
  • the thermocouple is installed in the same atmosphere as the temperature distribution sensor sheet 1.
  • the temperature value x which the thermocouple measured is input into PC31 (step S12).
  • the PC 31 acquires the digital output y of each temperature detection unit 21 (step S13).
  • step S14 it is determined whether or not to correct by another temperature. As will be described later, when linear correction or curve correction is performed using two or more points, it is determined that correction by another temperature is performed (S14: YES), and the temperature of the atmosphere is changed (step S15). Then, steps S12 and S13 are repeated. That is, the calibration program is based on output values from one or more temperature detection units 21 obtained when one or more temperature detection units 21 of the temperature distribution sensor sheet 1 are held at a plurality of different temperatures. Then, the sensor system 101 is operated so as to derive the conversion coefficient.
  • step S16 the PC 31 calculates a conversion coefficient. Specifically, in the case of linear correction, the reciprocal of the slope of the temperature conversion formula is obtained as a conversion coefficient for the output value from the temperature detection unit 21. In the case of curve correction, a function of the sensor output value is obtained as a conversion coefficient for the output value from the temperature detection unit 21. Here, the sensor output value is the sum of output values from all the temperature detection units 21 in the temperature distribution sensor sheet 1. And PC31 memorize
  • a storage unit RAM, hard disk, etc.
  • the sensor output with respect to the temperature input value x1 (° C.).
  • the value y1 (arbitrary unit RAW representing the signal strength) is obtained.
  • the temperature input value x1 here is the sum of the temperature values added to all the temperature detection units 21 in the temperature distribution sensor sheet 1
  • the sensor output value y1 is from all the temperature detection units 21 in the temperature distribution sensor sheet 1. Means the sum of output values.
  • the known temperature change rate a is obtained in advance by experiments.
  • the sensor output value y1 (signal) with respect to the temperature input value x1 (° C.).
  • the sensor output value y2 is obtained with respect to the temperature input value x2 as an arbitrary unit (Raw) representing the intensity.
  • the temperature input values x1 and x2 here are the sum of the temperature values applied to all the temperature detection units 21 in the temperature distribution sensor sheet 1, and the sensor output values y1 and y2 are all the temperatures in the temperature distribution sensor sheet 1. This means the sum of output values from the detector 21.
  • the sensor output value y1 (signal) with respect to the temperature input value x1 (° C.).
  • RAW arbitrary unit representing the intensity
  • the sensor output value y2 is obtained for the temperature input value x2
  • the sensor output value y3 is obtained for the temperature input value x3.
  • the temperature input values x1, x2, and x3 here are the sum of the temperature values applied to all the temperature detection units 21 in the temperature distribution sensor sheet 1, and the sensor output values y1, y2, and y3 are in the temperature distribution sensor sheet 1. This means the sum of output values from all the temperature detection units 21.
  • PC31 calculates
  • the calibration process is performed using all the temperature detection units 21 in the temperature distribution sensor sheet 1, but a part of the temperature detection units 21 in the total temperature detection unit 21 (one may be used). ) May be used to perform the calibration process.
  • the PC 31 generates and stores a calibration file including a correction coefficient for each temperature detection unit 21 obtained by the acquisition process, a conversion coefficient obtained by the calibration process, and a temperature conversion formula.
  • the calibration file may include a correction coefficient and a conversion coefficient for each temperature detection unit 21, and a product obtained by multiplying the correction coefficient by the conversion coefficient is used as a calibration coefficient for each temperature detection unit 21. It may be included.
  • the calibration program operates the sensor system 101 so as to determine whether the temperature output value obtained by multiplying the output value of the temperature detection unit 21 by the conversion coefficient matches the temperature input value applied to the temperature detection unit 21. That is, the PC 31 determines whether the temperature output value corrected by multiplying the output value from the temperature detection unit 21 by the conversion coefficient matches the temperature value (temperature input value) measured by the thermocouple.
  • each output value is multiplied by a correction coefficient and a conversion coefficient to derive a temperature output value. Then, each temperature output value and the corresponding temperature input value are compared to check whether they are within a predetermined error range. Note that the temperature output value may be derived by multiplying each output value by only the conversion coefficient.
  • the calibration program stores the conversion coefficient for each of the plurality of temperature distribution sensor sheets 1 and operates the sensor system 101 so as to select the optimum conversion coefficient for the temperature distribution sensor sheet 1 to be used. That is, the PC 31 stores a calibration file for each of the plurality of temperature distribution sensor sheets 1 and selects an optimal calibration file for the temperature distribution sensor sheet 1 to be used.
  • the calibration file A1 acquired and stored from a specific temperature distribution sensor A is acquired from other temperature distribution sensors B and C (temperature distribution sensor sheets B and C).
  • the output values acquired from each temperature detection unit 21 of the temperature distribution sensor A at normal temperature or a specific temperature and each of the calibration files A1, B1 and C1. Calculate the precision. Reflecting (correcting) the optimal calibration file thus identified in the output value from the temperature detection unit 21 enables accurate measurement.
  • by generating a calibration file from output values acquired in multiple temperature ranges in advance it is possible to measure more accurately than using a calibration file generated from output values acquired in a single temperature range. Is possible.
  • the temperature detecting unit 21 may change its electromagnetic characteristics due to moisture absorption or may deteriorate and deteriorate the conductive temperature-sensitive material 5 due to hydrolysis.
  • the humidity of the same atmosphere as the temperature distribution sensor sheet 1 is measured by the measuring instrument described above, and the conversion coefficient described above can be determined based on the measured humidity. That is, it is possible to operate the sensor system 101 using a conversion coefficient corresponding to the measured humidity by performing calibration at an arbitrary humidity. Such a function can also be implemented in the calibration program.
  • the conductive temperature-sensitive material 5 is formed on the first wiring electrode 3a, and the second wiring is formed on the conductive temperature-sensitive material 5. Since it is manufactured by forming the electrode 4a, between the first wiring electrode 3a and the conductive temperature-sensitive material 5, and between the conductive temperature-sensitive material 5 and the second wiring electrode 4a, There is no bonding surface (boundary surface) that can be formed when bonded later. Accordingly, when detecting the temperature of the subject, the electromagnetic characteristics of the heat-sensitive material 5 do not change due to the pressure applied to the bonding surface, so that the electromagnetic characteristics that change in the temperature detector 21 are disturbed. Does not occur. Thereby, the temperature of the subject can be accurately measured.
  • the thickness from the first wiring electrode 3a to the second wiring electrode 4a uniform, it is possible to prevent the pressing force by the subject from being concentrated on the temperature detection unit 21 when measuring the temperature distribution. it can. As a result, since no distortion occurs in the conductive temperature-sensitive material 5 provided in the temperature detection unit 21, the occurrence of temperature measurement errors can be prevented. Moreover, it is possible to prevent the uneven impression from being generated on the subject to which the temperature distribution sensor sheet 1 is pressed.
  • the electromagnetic characteristics of the temperature detection unit 21 change due to moisture absorption, or the conductive temperature-sensitive material 5 deteriorates due to hydrolysis. Can be prevented.
  • the temperature distribution of the subject can be measured by calculating the temperature distribution from the output values obtained from each of the plurality of temperature detection units 21.
  • thermocouple by measuring the temperature in the same atmosphere as the temperature distribution sensor sheet 1 with a thermocouple, temperature input can be performed automatically.
  • temperature detection for obtaining a temperature output value having a correlation (linearity or non-linearity) with respect to the temperature input value applied to the temperature detection unit 21.
  • a conversion coefficient for the output value from the unit 21 is derived. It is expected that the output value of each temperature detector 21 will not be a value proportional to the actual temperature. Therefore, a temperature conversion formula representing the relationship between the output values from the one or more temperature detectors 21 and the temperature input values applied to the one or more temperature detectors 21 is derived. Then, a conversion coefficient is derived from the temperature conversion formula, and the output value of the temperature detector 21 is multiplied by the conversion coefficient. As a result, a temperature output value that is substantially the same as the temperature input value to the temperature detector 21 can be obtained. Therefore, an appropriate temperature can be obtained with respect to the output value of the temperature detector 21.
  • a conversion coefficient Is derived based on the output value from the one or several temperature detection part 21 obtained when the one or several temperature detection part 21 of the temperature distribution sensor sheet 1 is hold
  • the temperature output value obtained by multiplying the output value of the temperature detection unit 21 by the conversion coefficient matches the temperature input value applied to the temperature detection unit 21. For example, when the temperature distribution sensor sheet 1 is replaced or when sensitivity changes partially due to deterioration or wear of the temperature detector 21, an error occurs in the corrected temperature output value.
  • the degree of coincidence between the temperature output value and the temperature input value can be grasped by comparing the magnitude of this error with a threshold value that is arbitrarily set in advance. Therefore, it is possible to avoid measurement in a state where an error has occurred.
  • calibration can be performed at an arbitrary temperature by using the temperature value measured by the thermocouple of the sensor system 101 as the temperature input value.
  • a conversion coefficient is stored for each of the plurality of temperature distribution sensor sheets 1, and an optimum conversion coefficient is selected for the temperature distribution sensor sheet 1 to be used.
  • the optimum conversion coefficient is specified by calculating the matching ratio between the output value acquired from each temperature detection unit 21 at normal temperature or a specific temperature and each of the plurality of conversion coefficients. Reflecting this conversion coefficient in the output value from the temperature detection unit 21 enables accurate measurement.
  • the first wiring electrode group 3 and the second wiring electrode group 4 are provided on the same film substrate 2 so as to be separated from each other, and the end of the first wiring electrode group 3
  • the conductive temperature-sensitive material 5 may be provided on a region including the end of the second wiring electrode group 4. Even in this case, if the pressure applied to the conductive temperature-sensitive material 5 is not more than a predetermined value, the contact area between the first wiring electrode 3a and the conductive temperature-sensitive material 5, and the second wiring electrode 4a. By preventing the contact area between the conductive temperature sensitive material 5 and the conductive temperature sensitive material 5 from changing, it is possible to prevent disturbance in the electromagnetic characteristics that change in the conductive temperature sensitive material 5.
  • the insulating material 9 can be filled over the entire area between the protective film 8 and the film base 2.
  • the distance between the protective film 8 and the film base material 2 becomes the same over the whole sensor sheet, and can apply a pressure uniformly. That is, the location where the first and second wiring electrode groups 3 and 4 intersect, for example, as shown in FIG. 6 protrudes from the film substrate 2, so that the pressure tends to concentrate, but as shown in FIG. By doing so, it is possible to prevent the pressure from concentrating and acting on this portion, and to protect the wiring electrode group and the like.
  • a manufacturing method for example, in FIG. 6, after forming the second wiring electrode group 4 a, an insulating material is formed so as to cover the entire film base 2, and then the protective film 8 is disposed. .
  • the sensor sheet according to the embodiment of the present invention measures temperature distribution and pressure distribution.
  • This sensor sheet has a temperature distribution sensor that measures the temperature distribution and a pressure distribution sensor that measures the pressure distribution.
  • the temperature distribution sensor is a two-dimensional array of a plurality of temperature sensitive sensors whose electromagnetic characteristics such as a resistance value change according to the temperature level.
  • the pressure distribution sensor is a two-dimensional array of a plurality of pressure sensitive sensors whose electromagnetic characteristics such as a resistance value change according to the magnitude of pressure.
  • Such a sensor sheet can be used for the same application as the above-described temperature distribution sensor sheet.
  • the sensor sheet 1 is formed on the film base 2, the first wiring electrode group 3 provided on the film base 2, and the first wiring electrode group 3.
  • the second wiring electrode group 4 provided, and the conductive temperature-sensitive material 5 provided between the first wiring electrode group 3 and the second wiring electrode group 4 are provided.
  • the structure for measuring these temperature distributions is the same as the temperature distribution sensor sheet
  • the configuration for measuring the temperature distribution is the same as that of the temperature distribution sensor sheet.
  • the sensor sheet 1 includes a third wiring electrode group 6 provided on the second wiring electrode group 4, a second wiring electrode group 4, and a third wiring electrode group 4. And a conductive pressure-sensitive material 7 provided between the wiring electrode group 6.
  • the conductive pressure-sensitive material 7 includes a pair of conductive pressure-sensitive materials 7a and 7b (first portion and second portion), but is not limited thereto, and may be a single body. In this case, for example, the second wiring electrode group 4 and the conductive pressure-sensitive material 7 can be fixed so that the conductive pressure-sensitive material 7 and the third wiring electrode group 6 are in contact with each other in a separable manner.
  • the third wiring electrode group 6 and the conductive pressure-sensitive material 7 can be fixed so that the conductive pressure-sensitive material 7 and the second wiring electrode group 4 are in contact with each other in a separable manner.
  • the conductive pressure-sensitive material is divided into two parts, and these are fixed to each electrode.
  • the conductive pressure-sensitive material may be integrated, fixed to one of the electrodes, and in contact with the other electrode so as to be separable.
  • the third wiring electrode group 6 includes a plurality of linear third wiring electrodes 6a arranged in parallel in the A direction (third direction).
  • the direction in which the first wiring electrodes 3a of the first wiring electrode group 3 are arranged in parallel (first direction) and the third wiring electrodes 6a of the third wiring electrode group 6 are Although it is the same as the direction (3rd direction) arranged in parallel, it is not limited to this.
  • a direction (third direction) in which the third wiring electrodes 6a of the third wiring electrode group 6 are arranged in parallel is not particularly limited.
  • the conductive pressure-sensitive material 7a is provided so as to cover each of the plurality of second wiring electrodes 4a.
  • the conductive pressure-sensitive material 7b is provided so as to cover each of the plurality of third wiring electrodes 6a.
  • the conductive pressure-sensitive material 7a and the conductive pressure-sensitive material 7b may be provided at least in the pressure detection unit 22 described later and disposed between the second wiring electrode 4a and the third wiring electrode 6a.
  • the pressure detection part 22 is a location where the second wiring electrode 4a and the third wiring electrode 6a intersect.
  • the second wiring electrode group 4, the third wiring electrode group 6, and the conductive pressure-sensitive material 7 constitute a pressure distribution sensor. As shown in FIG. 18, each one of the pressure detectors 22 where the second wiring electrode 4a and the third wiring electrode 6a intersect each other functions as a pressure sensor.
  • the conductive pressure-sensitive material 7a and the conductive pressure-sensitive material 7b facing each other are formed.
  • the electrical resistance between the pair of conductive pressure-sensitive materials 7a and 7b changes due to contact and change in the contact area.
  • the electrical resistance is transmitted from the pressure detector 22 to the power source through the second wiring electrode 4a and the third wiring electrode 6a. Thereby, the resistance value is measured.
  • the pressure applied to the pressure detector 22 can be detected from the measured resistance value.
  • the resistance value of the pressure detection unit 22 decreases as the applied pressure increases. However, the resistance value may increase as the applied pressure increases. Further, the pressure detection unit 22 may change the electromagnetic characteristics other than the resistance value such as the charge amount or the induced current according to the magnitude of the pressure.
  • the third wiring electrode 6a is made of a metal foil such as a silver foil, a copper foil, or an aluminum foil, a conductive polymer, or the like, like the first wiring electrode 3a and the second wiring electrode 4a.
  • the conductive pressure-sensitive material 7 is formed by adding a binder to conductive particles, similarly to the conductive temperature-sensitive material 5.
  • the conductive temperature-sensitive material 5 and the conductive pressure-sensitive material 7 have the same composition, but may be different. By adjusting the respective compositions, it becomes possible to share the electronic circuit necessary for the measurement.
  • the second wiring electrode group 4 is used for the temperature distribution sensor and the pressure distribution sensor, but the present invention is not limited to this configuration.
  • a fourth wiring electrode group is provided between the second wiring electrode group 4 and the conductive pressure-sensitive material 7a, and the conductive feeling is covered so as to cover each of the fourth wiring electrodes constituting the fourth wiring electrode group.
  • a pressure material 7a may be provided.
  • the first wiring electrode group 3, the second wiring electrode group 4, and the conductive temperature-sensitive material 5 constitute a temperature distribution sensor
  • the fourth wiring electrode group and the third wiring electrode group. 6 and the conductive pressure-sensitive material 7 constitute a pressure distribution sensor. A specific configuration will be described later.
  • the sensor sheet 1 has a protective film base 8 provided on the third wiring electrode group 6 as shown in FIG.
  • the protective film substrate 8 is made of a flexible material such as polyimide or PET, like the film substrate 2.
  • the conductive temperature-sensitive material 5 is formed on the first wiring electrode 3 a
  • the second wiring electrode 4 a is formed on the conductive temperature-sensitive material 5. It is manufactured by doing. That is, the first wiring electrode 3a and the conductive temperature sensitive material 5 and the conductive temperature sensitive material 5 and the second wiring electrode 4a are in close contact with each other and fixed. Therefore, a bonding surface that can be formed between the first wiring electrode 3a and the conductive temperature-sensitive material 5 and between the conductive temperature-sensitive material 5 and the second wiring electrode 4a when it is bonded later. (Boundary surface) does not exist. This is the same as the temperature distribution sensor sheet described above.
  • the region in which the plurality of temperature detection units 21 are arranged and the region in which the plurality of pressure detection units 22 are arranged overlap in plan view.
  • the sensor sheet 1 can be compactly formed by overlapping the arrangement region of the plurality of temperature detection units 21 and the arrangement region of the plurality of pressure detection units 22.
  • the temperature detection part 21 and the pressure detection part 22 can each be arrange
  • each temperature detection part 21 and each pressure detection part 22 have overlapped in planar view, both do not need to overlap. This point will be described in a later-described modification.
  • an insulating material 9 is provided between the temperature detection units 21 and between the pressure detection units 22. Thereby, the thickness from the 1st wiring electrode 3a to the 3rd wiring electrode 6a is made uniform.
  • the pressing force by the subject concentrates on the temperature detection unit 21 and the pressure detection unit 22 when measuring the temperature distribution and the pressure distribution. Can be prevented.
  • the occurrence of temperature measurement errors can be prevented.
  • the height difference between the pressure detection unit 22 and the others can be eliminated, it is possible to prevent the occurrence of pressure measurement errors due to the height difference.
  • FIG. 19 which is a perspective view, a protective film substrate 8 made of an insulating material is provided on the third wiring electrode group 6. Thereby, the surface of the third wiring electrode 6a is protected and a short circuit between the third wiring electrodes 6a is prevented.
  • the electromagnetic characteristics of the pressure detection unit 22 change due to moisture absorption, or the conductive pressure-sensitive material 7 deteriorates due to hydrolysis. Can be prevented.
  • the sensor sheet 1 is manufactured as follows, for example. First, as shown in FIG. 20, the first wiring electrode group 3 is formed on the film substrate 2 by screen printing. Next, the conductive temperature sensitive material 5 is formed on the first wiring electrode 3a by screen printing. Subsequently, the second wiring electrode group 4 is formed on the first wiring electrode group 3 by screen printing so as to sandwich the conductive temperature-sensitive material 5. Subsequently, a conductive pressure sensitive material 7a is formed on the second wiring electrode 4a by screen printing.
  • a third wiring electrode group 6 is formed on the protective film substrate (second film substrate) 8 by screen printing.
  • the conductive pressure-sensitive material 7b is formed on the third wiring electrode 6a by screen printing.
  • the film substrate 2 and the protective film substrate 8 are bonded together so that the second wiring electrode group 4 and the third wiring electrode group 6 face each other.
  • the conductive pressure-sensitive material 7a is in contact with the second wiring electrode 4a and the conductive pressure-sensitive material 7b is in contact with the third wiring electrode 6a, but they are not necessarily fixed. That is, if the film base material and the protective film base material are separated from each other, these conductive pressure-sensitive materials 7a and 7b can also be separated.
  • the following manufacturing method can be applied.
  • the first wiring electrode group 3 is formed on the film substrate 2 by screen printing.
  • a plurality of strip-like conductive temperature-sensitive materials 5 are formed in parallel by screen printing so as to be orthogonal to the first wiring electrode group 3.
  • the second wiring electrode 4a is formed on each conductive temperature-sensitive material 5 by screen printing.
  • the second wiring electrode group 4 is formed.
  • a strip-shaped conductive pressure sensitive material 7a is formed on the second wiring electrode 4a by screen printing.
  • the subsequent steps are the same as those in FIG. 20, and the third wiring electrode group 6 and the conductive pressure-sensitive material 7b are sequentially formed on the protective film base material (second film base material) 8 by screen printing. To do. And the film base material 2 and the protective film base material 8 are bonded together so that the 1st wiring electrode group 3 and the 3rd wiring electrode group 6 may oppose.
  • the 1st wiring electrode group 3, the 2nd wiring electrode group 4, the 3rd wiring electrode group 6, the electroconductive temperature sensitive material 5, and the electroconductive pressure sensitive material 7 are formed by screen printing, It is not limited to this, You may form by inkjet printing or a transfer type.
  • the first wiring electrode group 3, the second wiring electrode group 4, and the third wiring electrode group 6 may be wired by a substrate wiring technique (such as copper etching). Thereby, the sensor sheet 1 which is very thin (for example, 0.1 mm) and is flexible can be molded.
  • the manufacturing method of the sensor sheet 1 is not limited to the above, and the first wiring electrode group 3, the conductive temperature-sensitive material 5, the second wiring electrode group 4, and the conductive pressure sensitive material with respect to the film substrate 2.
  • the material 7 and the third wiring electrode group 6 may be formed in this order.
  • the sensor system 101 can be the same as the temperature distribution sensor sheet system. That is, it has the sensor sheet 1, PC (Personal Computer) 31, and connector (electric circuit) 32 similarly to FIG.
  • the connector 32 is electrically connected to the PC 31 by wire, but may be connected wirelessly. Since these configurations are the same as the system of the temperature distribution sensor sheet except that the pressure distribution sensor is provided, the description thereof is omitted.
  • the connector 32 supports the sensor sheet 1.
  • a plurality of terminals (not shown) are provided in the end region of the sensor sheet 1, and each terminal is electrically connected to one of a plurality of contacts provided on the connector 32.
  • Each of the plurality of temperature detection units 21 and the plurality of pressure detection units 22 provided in the sensor sheet 1 is connected to a corresponding terminal via a wiring.
  • the connector 32 acquires changes in electromagnetic characteristics in the temperature detector 21 and the pressure detector 22 as output values.
  • the connector 32 incorporates an electronic element called a multiplexer in order to apply voltage to the plurality of temperature detection units 21 and the plurality of pressure detection units 22 in order.
  • the second wiring electrode group 4 is shared by the temperature detection unit 21 and the pressure detection unit 22, but the output value from the temperature detection unit 21 and the output value from the pressure detection unit 22 are obtained.
  • the output can be obtained individually by temporally separating the acquisition of.
  • the connector 32 obtains an output in order from each of the plurality of temperature detection units 21 by sequentially applying a voltage to the plurality of temperature detection units 21. This is the same as the temperature distribution sensor sheet system described above.
  • the connector 32 sequentially obtains an output from each of the plurality of pressure detection units 22 by sequentially applying voltages to the plurality of pressure detection units 22.
  • the connector 32 applies a voltage to the plurality of drive electrodes in order.
  • the resistance value of the receive electrode is inverted and amplified by an operational amplifier and obtained as a voltage value.
  • the connector 32 converts an analog signal indicating a temperature value output from each temperature detection unit 21 of the sensor sheet 1 into a digital signal and outputs the digital signal to the PC 31.
  • the connector 32 converts an analog signal indicating a pressure value output from each pressure detection unit 22 of the sensor sheet 1 into a digital signal and outputs the digital signal to the PC 31.
  • the configuration of the PC 31 is the same as the temperature sensor sheet system described above.
  • the sensor system 101 has the same thermocouple as the above-described temperature sensor sheet system. Moreover, it can also have a measuring device which measures humidity.
  • the sensor system 101 has a pressure sensor (not shown) that measures the pressure applied to the sensor sheet 1. This is the same as the temperature distribution sensor sheet system described above.
  • the PC 31 functions as a calculation unit that calculates the temperature distribution from the output values obtained from each of the plurality of temperature detection units 21 and calculates the pressure distribution from the output values obtained from each of the plurality of pressure detection units 22. .
  • the temperature distribution of the subject can be measured by calculating the temperature distribution from the output values obtained from each of the plurality of temperature detection units 21. Further, the pressure distribution of the subject can be measured by calculating the pressure distribution from the output values obtained from each of the plurality of pressure detection units 22.
  • the PC 31 functions as a correction unit that corrects the output value obtained on the other side based on the output value obtained on the one side of the temperature detection unit 21 and the pressure detection unit 22.
  • the temperature dependence of the pressure detection unit 22 can be eliminated.
  • the pressure dependence of the temperature detection unit 21 can be eliminated by correcting the output value obtained by the temperature detection unit 21 based on the output value obtained by the pressure detection unit 22.
  • the temperature dependence of the pressure distribution sensor can be specifically eliminated by the following method.
  • First, the temperature dependence of the pressure distribution sensor is obtained from the output curve when the temperature is changed in a constant pressure state. This may be performed at the time of factory shipment of the sensor sheet 1 or may be performed by each user. Further, it may be performed for all the pressure detection units 22, or a representative value may be applied to all the pressure detection units 22.
  • the temperature distribution sensor is calibrated by measuring outputs at a plurality of temperature points using the temperature distribution sensor. That is, an after-mentioned acquisition process and calibration process are performed. This may be performed at the time of factory shipment of the sensor sheet 1 or may be performed by each user. Moreover, you may implement with respect to all the temperature detection parts 21, and you may apply a representative value to all the temperature detection parts 21.
  • the pressure distribution when measuring the pressure distribution by the pressure distribution sensor, an accurate temperature value is acquired by the calibrated temperature distribution sensor, and the pressure distribution is corrected by using the temperature dependence curve of the pressure distribution sensor previously obtained. Thereby, the temperature dependence of the pressure distribution sensor can be eliminated. In this method, the pressure distribution can be corrected even if the temperature change rate does not match the change rate due to the temperature dependence of the pressure distribution sensor.
  • the pressure dependency of the temperature distribution sensor can be specifically eliminated by the following method.
  • First, the pressure dependence of the temperature distribution sensor is obtained from the output curve when the pressure is changed while maintaining a constant temperature. This may be performed at the time of factory shipment of the sensor sheet 1 or may be performed by each user. Moreover, you may implement with respect to all the temperature detection parts 21, and you may apply a representative value to all the temperature detection parts 21.
  • FIG. Next, the pressure distribution sensor is calibrated by measuring outputs at a plurality of pressure points using the pressure distribution sensor. That is, an after-mentioned acquisition process and calibration process are performed. This may be performed at the time of factory shipment of the sensor sheet 1 or may be performed by each user. Further, it may be performed for all the pressure detection units 22, or a representative value may be applied to all the pressure detection units 22.
  • the temperature distribution when measuring the temperature distribution by the temperature distribution sensor, an accurate pressure value is acquired by the calibrated pressure distribution sensor, and the temperature distribution is corrected by using the pressure dependence curve of the temperature distribution sensor previously obtained. Thereby, the pressure dependence of the temperature distribution sensor can be eliminated. In this method, the temperature distribution can be corrected even if the pressure change rate and the change rate due to the pressure dependence of the temperature distribution sensor do not match.
  • the program code relating to the calibration program according to the present embodiment is installed in the PC 31. Accordingly, the PC 31 functions as a control unit that performs an acquisition process and a calibration process to be described later.
  • the sensor sheet 1 includes a plurality of pressure detection units 22, it is expected that the output varies among the pressure detection units 22. Therefore, a constant pressure is applied to all the pressure detection units 22, and a correction coefficient for correcting the sensitivity difference between the pressure detection units 22 is derived using the output of each pressure detection unit 22 and its average value. By doing so, it becomes possible to correct the sensitivity difference between the plurality of pressure detectors 22 during actual measurement.
  • a bladder air bag
  • the sensor sheet 1 is attached to the connector 32. Then, a uniform pressure is applied to the sensor sheet 1 (step S21). And PC31 acquires the digital output of each pressure detection part 22 (Step S22).
  • the PC 31 calculates the average value of the digital output of each pressure detection unit 22 (step S23). And PC31 calculates the correction coefficient of each pressure detection part 22 (step S24). Specifically, the quotient obtained by dividing the average value by each output value is obtained as a correction coefficient for each pressure detection unit 22. And PC31 memorize
  • FIG. 23 (a) shows nine pressure-sensitivities in the acquisition process of the virtual sensor sheet 1 constituted by nine pressure measuring units (pressure-sensitive sensors) 22 in three rows and three columns.
  • the output value of each pressure sensor obtained from the sensor is shown. Since the average value of these nine output values is 49.9, the average value / output value is calculated. The quotient obtained by these divisions is the correction coefficient of each pressure sensor shown in FIG.
  • the equalization process is performed using the output value obtained by pressing the pressure detection unit 22 with one predetermined pressure.
  • the pressure detection unit 22 is changed to two or more different predetermined pressures.
  • the acquisition process may be performed using the output value obtained by pressing in step (1).
  • the correction coefficients as shown in FIG. 23B are obtained for each pressure detection unit 22 at two or more different predetermined pressures, and the average value is derived as a fixed correction coefficient of the pressure detection unit 22. May be.
  • the correction coefficient may be derived as a function of pressure from correction coefficients obtained at two or more different predetermined pressures.
  • the calibration program of the present embodiment is based on output values from one or a plurality of pressure detection units 22 obtained when a predetermined pressure is applied to one or a plurality of pressure detection units 22 of the sensor sheet. Sensor for deriving a conversion coefficient for the output value from the pressure detection unit 22 for obtaining a pressure output value having a correlation (linearity or non-linearity) with respect to the pressure input value applied to the pressure sensor 22
  • the system 101 is operated. That is, the sensor system 101 is operated so as to perform the calibration process.
  • each pressure detector 22 is not expected to be an output proportional to the actual pressure. Therefore, the output value of each pressure detection unit 22 is acquired in a state where a known pressure is applied as a pressure input value, and a relational expression (pressure conversion formula) between the output value and the pressure input value is obtained. From this pressure conversion formula, from the pressure detection unit 22 for obtaining a pressure output value having a correlation (linearity, non-linearity) with respect to the pressure input value applied to each pressure detection unit 22. The conversion coefficient for the output value of is derived. By multiplying the output value of the pressure detection unit 22 by this conversion coefficient, it is possible to obtain a pressure output value having a correlation (linearity or non-linearity) with respect to the pressure input value applied to the pressure detection unit 22. It becomes.
  • the sensor sheet 1 is attached to the connector 32. Then, a uniform pressure is applied to the sensor sheet 1 (step S31). Then, the pressure value x measured by the pressure sensor is input to the PC 31 (step S32). Thereafter, the PC 31 acquires the digital output y of each pressure detection unit 22 (step S33). In addition, after PC31 acquires the digital output y of each pressure detection part 22, you may input the pressure value x which the pressure sensor measured into PC31.
  • step S34 it is determined whether or not correction by another pressure is performed. As will be described later, when linear correction or curve correction is performed using two or more points, it is determined that correction by another pressure is performed (S34: YES), and the pressurization value is changed (step S35). Then, steps S32 and S33 are repeated. That is, the calibration program uses the conversion coefficient based on the output values from one or a plurality of pressure detection units 22 obtained when a plurality of different pressures are applied to one or a plurality of pressure detection units 22 of the sensor sheet 1. The sensor system 101 is operated so as to derive
  • step S34 If it is determined in step S34 that correction with another pressure is not performed (S34: NO), the PC 31 calculates a correction coefficient (step S36). Specifically, in the case of straight line correction, the reciprocal of the slope of the temperature conversion formula is obtained as a conversion coefficient for the output value from the pressure detection unit 22. In the case of curve correction, a function of the sensor output value is obtained as a conversion coefficient for the output value from the pressure detection unit 22. Here, the sensor output value is the sum of output values from all the pressure detection units 22 in the sensor seat 1. And PC31 memorize
  • a storage means RAM, hard disk, etc.
  • the sensor output value with respect to the pressure input value x1 (kPa).
  • y1 (arbitrary unit Raw representing the signal intensity) is obtained.
  • the pressure input value x1 here is the sum of the pressure values applied to all the pressure detection units 22 in the sensor sheet 1
  • the sensor output value y1 is the output value from all the pressure detection units 22 in the sensor sheet 1. Means the sum.
  • the calibration process is performed using all the pressure detection units 22 in the sensor sheet 1, but a part of the pressure detection units 22 (may be one) in the total pressure detection unit 22. May be used to perform the calibration process.
  • the PC 31 generates and stores a calibration file including a correction coefficient for each pressure detection unit 22 obtained by the acquisition process, a conversion coefficient obtained by the calibration process, and a pressure conversion formula.
  • the calibration file may include a correction coefficient for each pressure detection unit 22 and a conversion coefficient, and a product obtained by multiplying the correction coefficient by the conversion coefficient is used as a calibration coefficient for each pressure detection unit 22. It may be included.
  • the calibration program operates the sensor system 101 so as to determine whether the pressure output value obtained by multiplying the output value of the pressure detection unit 22 by the conversion coefficient matches the pressure input value applied to the pressure detection unit 22. That is, the PC 31 determines whether the pressure output value corrected by multiplying the output value from the pressure detection unit 22 by the conversion coefficient matches the pressure value (pressure input value) measured by the pressure sensor. Since the specific method is the same as that in the temperature distribution sensor, the description thereof is omitted.
  • the PC 31 stores a calibration file related to the pressure detection unit 22 for each of the plurality of sensor sheets 1 and selects an optimal calibration file for the sensor sheet 1 to be used. Since the specific method is the same as that in the temperature distribution sensor, the description thereof is omitted.
  • the sensor sheet 1 in a plan view, the region where the plurality of temperature detection units 21 are arranged and the region where the plurality of pressure detection units 22 are arranged are overlapped.
  • the sensor sheet 1 can be compactly formed.
  • the temperature detection part 21 and the pressure detection part 22 can each be arrange
  • the conductive temperature-sensitive material 5 is formed on the first wiring electrode 3 a and the second wiring electrode 4 a is formed on the conductive temperature-sensitive material 5.
  • the temperature of the subject can be measured with high accuracy.
  • the same effects as those shown in the temperature sensor sheet can be obtained.
  • the pressing force by the subject is applied to the temperature detection unit 21 and the pressure detection unit 22 when measuring the temperature distribution and the pressure distribution. Concentration can be prevented. As a result, since no distortion occurs in the conductive temperature-sensitive material 5 provided in the temperature detection unit 21, the occurrence of temperature measurement errors can be prevented. In addition, since the height difference between the pressure detection unit 22 and the others can be eliminated, it is possible to prevent the occurrence of pressure measurement errors due to the height difference. Moreover, it is possible to prevent the uneven impression from being generated on the subject to which the sensor sheet 1 is pressed.
  • the pressure detection unit 22 by covering the pressure detection unit 22 with an insulating material (such as the protective film substrate 8), the electromagnetic characteristics of the pressure detection unit 22 change due to moisture absorption, or the conductive pressure-sensitive material 7 deteriorates due to hydrolysis. Can be prevented.
  • an insulating material such as the protective film substrate 8
  • the temperature distribution of the subject can be measured by calculating the temperature distribution from the output values obtained from each of the plurality of temperature detection units 21. Further, the pressure distribution of the subject can be measured by calculating the pressure distribution from the output values obtained from each of the plurality of pressure detection units 22.
  • the temperature dependence of the pressure detection unit 22 can be eliminated by correcting the output value obtained by the pressure detection unit 22 based on the output value obtained by the temperature detection unit 21. Further, the pressure dependence of the temperature detection unit 21 can be eliminated by correcting the output value obtained by the temperature detection unit 21 based on the output value obtained by the pressure detection unit 22.
  • a conversion coefficient for the output value from the pressure detection unit 22 for obtaining a pressure output value having a correlation (linearity or non-linearity) with respect to the pressure input value applied to the pressure detection unit 22 is obtained.
  • a pressure conversion formula representing the relationship between the output values from the one or more pressure detectors 22 and the pressure input values applied to the one or more pressure detectors 22 is derived.
  • a conversion coefficient is derived from the pressure conversion formula, and the output value of the pressure detection unit 22 is multiplied by the conversion coefficient.
  • a pressure output value that is substantially the same as the pressure input value to the pressure detector 22 can be obtained. Therefore, an appropriate temperature can be obtained with respect to the output value of the pressure detector 22.
  • a conversion coefficient is derived based on output values from one or more pressure detection units 22 obtained when a plurality of different pressures are applied to one or more pressure detection units 22 of the sensor sheet 1.
  • the pressure output value obtained by multiplying the output value of the pressure detection unit 22 by the conversion coefficient matches the pressure input value applied to the pressure detection unit 22. For example, when the sensor sheet 1 is replaced or when sensitivity changes partially due to deterioration or wear of the pressure detector 22, an error occurs in the corrected pressure output value.
  • the degree of coincidence between the pressure output value and the pressure input value can be grasped by comparing the magnitude of the error with a threshold value that is arbitrarily set in advance. Therefore, it is possible to avoid measurement in a state where an error has occurred.
  • the conversion coefficient is stored for each of the plurality of sensor sheets 1 and the optimum conversion coefficient for the sensor sheet 1 to be used is selected.
  • the optimum conversion coefficient is specified by calculating the matching ratio between the output value acquired from each temperature detection unit 21 at normal temperature or a specific temperature and each of the plurality of conversion coefficients. Reflecting this conversion coefficient in the output value from the temperature detection unit 21 enables accurate measurement. This also applies to the pressure detection unit 22.
  • FIGS. 26 to 28 the temperature detectors 21 and the pressure detectors 22 can be prevented from overlapping each other.
  • 26 is a plan view showing this temperature / pressure sensor sheet (a plan view excluding the protective film substrate 8)
  • FIG. 27 is a cross-sectional view taken along line AA in FIG. 26
  • FIG. 28 is taken along line BB in FIG. It is sectional drawing.
  • the first wiring electrodes 3a and the third wiring electrodes 6a are alternately arranged on the film substrate.
  • the conductive temperature-sensitive material 5 is disposed on the first wiring electrode 3a
  • the conductive pressure-sensitive material 7a is disposed on the third wiring electrode 6a.
  • the second wiring electrodes 4 a and the fourth wiring electrodes 6 b are alternately arranged on the protective film substrate 8.
  • the fourth wiring electrode 6b is formed of the same material as the first to third wiring electrodes.
  • a conductive pressure sensitive material 7b is disposed on the fourth wiring electrode 6b.
  • the location where the first wiring electrode 3a and the second wiring electrode 4a intersect constitutes the temperature detection unit 21, and the third wiring electrode 6a and the fourth wiring electrode 6b. Where the conductive pressure-sensitive materials 7a and 7b contact each other constitutes the pressure detection unit 22.
  • each temperature detection unit 21 and each pressure detection unit 22 can be dispersed so as not to overlap each other.
  • the measurement of temperature and pressure is the same as described above.
  • the connector 32 applies a voltage to the plurality of drive electrodes in order. In this state, the resistance values of the plurality of receive electrodes are measured in order to obtain the output of each temperature detection unit 21.
  • an output is obtained in order from each of the plurality of pressure detection units 22 by sequentially applying a voltage to the plurality of pressure detection units 22.
  • the connector 32 applies a voltage to the plurality of drive electrodes in order. In this state, by measuring the resistance of the plurality of receive electrodes in order, the output of each pressure detection unit 22 is obtained.
  • the 4th wiring electrode 6b and the electroconductive pressure-sensitive material 7b can be arrange
  • the 2nd wiring electrode 4a can also be arrange
  • the first wiring electrode 3a, the second wiring electrode 4a, the third wiring electrode 6a, and the fourth wiring electrode 6b are the fourth wiring electrode and the fifth wiring according to the present invention. It corresponds to an electrode, a sixth wiring electrode, and a seventh wiring electrode.
  • FIG. 29 is a plan view showing this temperature / pressure sensor sheet (a plan view excluding the protective film substrate 8),
  • FIG. 30 is a cross-sectional view taken along the line CC of FIG. 29, and
  • FIG. It is a figure which shows a method.
  • the first wiring electrodes 3a and the third wiring electrodes 6a are alternately arranged on the film substrate 2 as in FIGS. is doing.
  • the conductive temperature-sensitive material 5 is disposed on the first wiring electrode 3a
  • the conductive pressure-sensitive material 7a is disposed on the third wiring electrode 6a.
  • a conductive adhesive 95 is disposed on the conductive temperature-sensitive material 5 at a predetermined interval.
  • the 2nd wiring electrode 4a is arrange
  • the electroconductive pressure sensitive material 7b is arrange
  • the fourth wiring electrode 6b is formed of the same material as the first to third wiring electrodes. Thereafter, the film substrate 1 and the protective film substrate 8 are bonded together so that the wiring electrodes face each other. Specifically, the second wiring electrode 4 a is fixed on the conductive temperature-sensitive material 5 by the conductive adhesive 95. Further, the conductive temperature-sensitive material 7b is arranged on the conductive temperature-sensitive material 7a, but these are only in contact and are not fixed. Thereby, as shown in FIG. 29, the location where the first wiring electrode 3a and the second wiring electrode 4a intersect constitutes the temperature detection unit 21, and the third wiring electrode 6a and the fourth wiring electrode 6b.
  • the pressure detection unit 22 Where the conductive pressure-sensitive materials 7a and 7b contact each other constitutes the pressure detection unit 22. Unlike FIG. 26, in the example of FIG. 29, all the intersections in the vertical columns (vertical columns in FIG. 29) constitute the temperature detection unit 21 or the pressure detection unit 22. And the row
  • first wiring electrode 3a, the second wiring electrode 4a, and the third wiring electrode 6a in the above example are the first wiring electrode, the second wiring electrode, and the third wiring electrode according to the present invention. It corresponds to.
  • the first wiring electrode and the third wiring electrode, and the second wiring electrode 4a and the fourth wiring electrode 6b are alternately arranged.
  • the position of the wiring electrode can also be changed as appropriate so that the temperature detection unit 21 and the pressure detection unit 22 are arranged at various locations.
  • seat is examined. That is, hereinafter, a temperature sensitive element in which the first electrode 2, the conductive temperature sensitive material 1, and the second electrode 3 are laminated in this order on the substrate 4 will be examined.
  • the temperature sensitive element is configured such that the first electrode 2 and the second electrode 3 are arranged on the base material 4 at a predetermined interval, and these It can also be set as the aspect which has arrange
  • the temperature sensitive element according to the present invention includes at least one first electrode (for example, corresponding to the first or fourth wiring electrode according to the present invention) and at least one second electrode (for example, the present invention). Corresponding to the second or fifth wiring electrode) and at least one conductive temperature-sensitive material electrically connected to each first electrode and each second electrode. .
  • Example 1 In order to form a conductive temperature-sensitive material by mixing the conductive particles, resin, filler, solvent, and antifoaming agent shown in Table 1 using a planetary stirring deaerator (Mazerustar KK-V1000 manufactured by Kurabo Industries). Ink was prepared. Details of each component are as described later.
  • a temperature sensitive element 10 having a configuration as shown in FIGS. 32 and 33 was manufactured.
  • the first electrode 2 polyimide silver filler dispersion, Sanwa Chemical Industry Co., Ltd.
  • the temperature sensitive resistor 1 having a low melting point is used, the temperature sensitive resistor 1 may flow if a temperature higher than the melting point is measured. Therefore, in the above embodiment, a flow prevention wall is provided around the temperature sensitive resistor 1.
  • the electrical resistance value and the change rate of the electrical resistance value at each temperature described in Table 1 were measured under the following conditions. That is, the temperature sensing element 10 is placed in a thermostatic chamber (DF612 manufactured by Yamato Scientific Co., Ltd.), and a thermocouple (covered thermocouple (Dg-K-5m-Y terminal) manufactured by As One Co., Ltd.) beside the temperature sensing element 10. Is installed. Then, while monitoring the temperature of the thermocouple with a temperature recorder (NR-1000 manufactured by Keyence Corporation), the electrical resistance value and electrical resistance value at each temperature were measured with a tester (Digital Hitester 3805-50 manufactured by Hioki Electric Co., Ltd.).
  • FIG. 41 is a graph showing the relationship between the measured temperature and the change rate of the electrical resistance value.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)

Abstract

Une feuille de capteur de la présente invention est fabriquée par formation d'un matériau conducteur sensible à la température (5) sur une première électrode de câblage (3a), puis formation d'une seconde électrode de câblage (4a) sur le matériau conducteur sensible à la température (5). En conséquence, une surface de liaison (interface), qui peut être formée lorsqu'une liaison est réalisée ensuite, n'existe pas entre la première électrode de câblage (3a) et le matériau conducteur sensible à la température (5), ni entre le matériau conducteur sensible à la température (5) et la seconde électrode de câblage (4a).
PCT/JP2015/085592 2014-12-18 2015-12-18 Feuille de capteur WO2016098905A1 (fr)

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EP15870104.5A EP3236225A4 (fr) 2014-12-18 2015-12-18 Feuille de capteur
CN201580069137.5A CN107110716B (zh) 2014-12-18 2015-12-18 传感器片
US15/537,136 US10718680B2 (en) 2014-12-18 2015-12-18 Sensor sheet

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JP2014-256534 2014-12-18
JP2014-256533 2014-12-18
JP2014256533 2014-12-18
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JP2015203403A JP6799908B2 (ja) 2015-10-15 2015-10-15 感温素子
JP2015-247779 2015-12-18
JP2015247779A JP5928859B1 (ja) 2014-12-18 2015-12-18 センサシート

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US10718680B2 (en) 2020-07-21
EP3236225A1 (fr) 2017-10-25
US20180266908A1 (en) 2018-09-20
EP3236225A4 (fr) 2018-07-18
CN107110716B (zh) 2020-07-28

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