WO2019026737A1 - Feuille de capteur - Google Patents

Feuille de capteur Download PDF

Info

Publication number
WO2019026737A1
WO2019026737A1 PCT/JP2018/027971 JP2018027971W WO2019026737A1 WO 2019026737 A1 WO2019026737 A1 WO 2019026737A1 JP 2018027971 W JP2018027971 W JP 2018027971W WO 2019026737 A1 WO2019026737 A1 WO 2019026737A1
Authority
WO
WIPO (PCT)
Prior art keywords
temperature
humidity
detection unit
sensor sheet
electrode
Prior art date
Application number
PCT/JP2018/027971
Other languages
English (en)
Japanese (ja)
Inventor
耕治 岩田
雅弘 初田
Original Assignee
ニッタ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ニッタ株式会社 filed Critical ニッタ株式会社
Publication of WO2019026737A1 publication Critical patent/WO2019026737A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance

Definitions

  • the present invention relates to a sensor sheet.
  • Patent Document 1 discloses a sheet-like sensor for temperature detection, which is configured of a flexible base material, parallel electrode groups formed on the base material, and a heat-sensitive material covering the electrode groups. It is disclosed. According to the technology described in Patent Document 1, it is possible to detect a change in the electrical resistance value of the heat-sensitive material in accordance with the temperature in the vicinity of the intersection of the electrodes.
  • this invention is made in order to solve the said problem, and it aims at providing the sensor sheet which can measure temperature and humidity simultaneously.
  • Item 1 Film substrate, A plurality of linear first electrodes provided on the film substrate and extending in parallel; A plurality of linear second electrodes provided on the film substrate and extending in parallel with the plurality of first electrodes; It is a conductive detection material which is disposed between the first electrode and the second electrode at least at the intersection between the first electrode and the second electrode, and whose electromagnetic characteristics change according to the level of temperature or humidity.
  • Item 2 A plurality of openings are formed in the cover member, The sensor sheet according to item 1, wherein the humidity detection unit is configured to be exposed to the outside from each of the openings.
  • Item 4 The sensor sheet according to claim 3, wherein the temperature detection unit and the humidity detection unit are respectively disposed on the adjacent first electrode or the second electrode.
  • Item 5 The sensor sheet according to Item 3 or 4, wherein the humidity measured by each of the humidity detection units is corrected based on the temperature measured by the temperature detection unit adjacent to the humidity detection unit.
  • Item 6 The sensor sheet according to any one of Items 1 to 5, wherein the cover member is formed of a moisture-proof material.
  • FIG. 3 is a partial cross-sectional view of FIG. It is a figure which shows the manufacturing method of the sensor sheet
  • the sensor sheet according to the present embodiment is a sensor sheet in which a plurality of detection units whose electromagnetic characteristics such as resistance value change according to the level of temperature or humidity are two-dimensionally arranged in a grid. Specifically, it is configured as follows.
  • FIG. 1 is an exploded perspective view of a sensor sheet
  • FIG. 2 is a plan view of the sensor sheet
  • FIG. 3 is a sectional view taken along line AA of FIG.
  • the sensor sheet 100 includes a film substrate 1, a plurality of linear first electrodes 2 provided on the film substrate 1, and respective first electrodes.
  • a plurality of detection members 3 disposed, and a plurality of linear second electrodes 4 disposed on the detection member 3 and disposed orthogonal to the first electrode 2 are provided.
  • the sensor sheet 100 is provided with a cover member 5 which covers both the electrodes 2 and 4 and a part of the detection member 3.
  • cover member 5 which covers both the electrodes 2 and 4 and a part of the detection member 3.
  • the plurality of first electrodes 2 described above are formed in a linear shape, and these are disposed on the film substrate 1 in parallel to the X direction. Further, the plurality of detection members 3 described above are also formed in a linear shape, and these detection members 3 are disposed so as to cover the respective first electrodes 2. That is, as in the case of the first electrode 2, each detection member 3 is disposed in parallel to the X direction. Further, the plurality of second electrodes 4 are also formed in a linear shape, and these are disposed in parallel to the Y direction so as to be orthogonal to the first electrode 2 and the detection member 3.
  • the detection members 3 disposed between them constitute the temperature detection unit 31 or the humidity detection unit 32. That is, each one of the temperature detection unit 31 and the humidity detection unit 32 functions as a sensor that detects the temperature or the humidity.
  • the temperature detection units 31 and the humidity detection units 32 are alternately arranged on the first electrode 2 and the second electrode 4. Thus, the temperature detection units 31 and the humidity detection units 32 are alternately arranged in the X direction and the Y direction.
  • the cover member 5 described above is disposed so as to cover the entire film substrate 1. However, a plurality of openings 51 are formed in the cover member 5, and the openings 51 are formed in a portion corresponding to the humidity detection unit 32. Therefore, the humidity detection unit 32 is exposed to the outside from the opening 51 of the cover member 5, and the temperature detection unit 31 is sealed so as not to be exposed to the outside between the film substrate 1 and the cover member 5. .
  • the material for forming the film substrate 1 is not particularly limited, but can be formed of, for example, a flexible transparent or opaque material such as polyimide and PET. Furthermore, in order to reduce the influence of humidity, metal may be deposited on the film substrate 1.
  • metal foils such as silver foil, copper foil, aluminum foil, and a conductive polymer etc. can be used, for example, It is not limited to this but a material with high conductivity It can be adopted appropriately.
  • the detection member 3 includes conductive particles and a resin, and has a characteristic that the electric resistance value increases with an increase in temperature. That is, as the resin expands or contracts in accordance with the temperature, the distance between the conductive particles changes, and the resistance value changes. For example, at least in the range of 30 ° C. to 200 ° C., the electric resistance value may increase as the temperature increases, and the electric resistance value may decrease as the temperature decreases.
  • the detection member 3 has a specification that the electric resistance value is increased not only by the temperature but also by the change of the humidity. That is, depending on the humidity, the resin absorbs water and expands or contracts, whereby the distance between the conductive particles changes, and the resistance value changes. For example, in the range of approximately 30 to 90%, it can be provided with a characteristic that the electric resistance value increases when the humidity rises, and the electric resistance value decreases when the humidity decreases.
  • the conductive particles contained in the detection member 3 are not particularly limited as long as they are particles having conductivity, and conductive particles contained in known conductive temperature sensitive materials can be used.
  • Specific examples of the conductive particles include carbon-based particles such as carbon black, graphite, carbon nanotubes, carbon nanohorns, carbon nanofibers, carbon nanocoils (including fibrous materials); iron, nickel, copper, aluminum, magnesium, Metal particles such as platinum, silver, gold, and an alloy containing at least one of these metals; tin oxide, zinc oxide, silver iodide, copper iodide, barium titanate, indium tin oxide, strontium titanate, etc.
  • Conductive inorganic material particles and the like can be mentioned.
  • conductive carbon black is particularly preferable from the viewpoint of providing a thermosensitive element capable of measuring the temperature of the subject with high accuracy over a wide temperature range.
  • the conductive particles may be used alone or in combination of two or more. Such conductive particles can be used similarly for the measurement of humidity.
  • the particle diameter of the conductive particles is not particularly limited, but preferably 1 ⁇ m or less, more preferably 100 nm or less, and still more preferably 50 nm or less.
  • the content of the conductive particles contained in the detection member 3 is not particularly limited and may be set so as to achieve a desired electrical resistance value or volume resistance value, but the temperature of the subject over a wide temperature range or humidity range Alternatively, the amount is preferably less than 15% by mass, and more preferably about 2 to 9% by mass so that the humidity can be measured with high accuracy.
  • the amount is preferably less than 15% by mass, and more preferably about 2 to 9% by mass so that the humidity can be measured with high accuracy.
  • conductive carbon black produced by an oil furnace method as the conductive particles
  • about mass% is mentioned.
  • conductive carbon black produced by acetylene decomposition method from the same viewpoint, preferably less than 15% by mass, more preferably about 4 to 12% by mass, and still more preferably 6 to 9% by mass The degree is mentioned.
  • the resin contained in the detection member 3 is not particularly limited, and a resin contained in a known electrically conductive temperature sensitive material can be used.
  • the glass transition temperature of the resin can be appropriately selected according to the use mode of the detection member 3. It is preferable that the glass transition temperature of the resin is equal to or higher than the upper limit value of the temperature measurement range of the temperature detection unit 31 from the viewpoint of setting the temperature sensitive element capable of measuring the temperature of the subject with high accuracy over a wide temperature range. That is, for example, when the upper limit value of the temperature measurement range of the temperature detection unit 31 is 200 ° C., the glass transition temperature of the resin is preferably 200 ° C.
  • the glass transition temperature of the resin is preferably 100 ° C. or more.
  • the method of adjusting the glass transition temperature of the resin include a method of adjusting the molecular weight, molecular skeleton, and the like of the resin.
  • the glass transition temperature of the resin is preferably about 80 to 400 ° C.
  • the glass transition temperature of resin means the glass transition temperature as the whole resin contained in an electroconductive temperature-sensitive material. A resin having such a glass transition temperature can be used similarly, for example, to detect humidity in the above-mentioned range.
  • the resin include thermosetting resins such as silicone resin, polyimide resin and epoxy resin; polyamide imide resin, polyether imide resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyamide resin, polyacetal resin, polyphenylene sulfide resin, Thermoplastic resins such as polyetheretherketone resin, fluorine resin, and polyester resin can be mentioned.
  • thermosetting resins such as silicone resin, polyimide resin and epoxy resin
  • Thermoplastic resins such as polyetheretherketone resin, fluorine resin, and polyester resin can be mentioned.
  • silicone resin, polyimide resin, epoxy resin, polyamide imide resin, polyethylene terephthalate resin, and polyether imide resin are preferable from the viewpoint of making the temperature sensitive device capable of measuring the temperature of the subject
  • the glass transition temperature (Tg (° C.)) of the resin is a value measured by differential scanning calorimetry (DSC).
  • the content of the resin contained in the detection member 3 can be set according to the type of the conductive particles and the like, and is not particularly limited, but the temperature or humidity of the subject is accurately measured over a wide temperature range or humidity range In order to achieve this, the content is preferably 85% by mass or more, more preferably about 91 to 98% by mass.
  • the content is preferably 85% by mass or more, more preferably about 91 to 98% by mass.
  • conductive carbon black produced by an oil furnace method as the conductive particles, from the same viewpoint, preferably 90% by mass or more, more preferably about 92 to 99% by mass, and still more preferably 94 to 98.
  • About mass% is mentioned.
  • the detection member 3 may further contain an additive in addition to the above-described conductive particles and resin.
  • the additive is not particularly limited, and any known additive contained in a conductive temperature-sensitive material having PTC characteristics such as titanium oxide, alumina or mica can be used.
  • the cover member 5 is not particularly limited as long as it can seal the temperature detection unit 31 with the film substrate 1, and for example, a film may be attached with an adhesive. Moreover, the surface can also be coated with a moisture-proof material such as fluorine, acrylic, or urethane.
  • the sensor sheet 100 is manufactured, for example, as follows. First, as shown in FIG. 4A, a plurality of first electrodes 2 are formed on the film substrate 1 by screen printing. Next, as shown in FIG. 4B, the detection member 3 is formed on each of the first electrodes 2 by screen printing.
  • a plurality of second electrodes 4 are formed by screen printing so as to be orthogonal to the detection member 3.
  • the cover member 5 is formed on the film base 1 by screen printing. Thereafter, when the mask is removed, a cover member 5 having a plurality of openings 51 is formed. Then, the humidity detection unit 32 is exposed from each of the openings 51. Thus, the sensor sheet 100 is completed.
  • the sensor system 200 includes the above-described sensor sheet 100, a measuring device 300, a display 400, a connector 500 for connecting the sensor sheet 100 and the measuring device 300, and an input device 600.
  • the connector 50 is attached to the sensor sheet 100.
  • the end region of the sensor sheet 100 is provided with a plurality of terminals (not shown), and each terminal is electrically connected to any one of a plurality of contacts provided in the connector 50.
  • Each of the plurality of temperature detection units 31 and humidity detection units 32 provided in the sensor sheet 100 is connected to the corresponding terminal via the first and second electrodes 2 and 4.
  • the connector 50 acquires the change of the electromagnetic characteristic in the temperature detection unit 31 and the humidity detection unit 32 as an output value.
  • the connector 50 incorporates an electronic element called a multiplexer in order to apply a voltage to the plurality of temperature detection units 31 and humidity detection units 32 in order.
  • the connector 50 sequentially applies voltages to the plurality of temperature detection units 31 and humidity detection units 32 to obtain outputs from the plurality of temperature detection units 31 and humidity detection units 32 in order. Specifically, when one of the first electrode 2 and the second electrode 4 is a drive electrode and the other is a receive electrode, the connector 50 applies a voltage to the plurality of drive electrodes in order, and in the applied state Outputs of the temperature detection unit 31 and the humidity detection unit 32 are obtained by sequentially measuring the resistance values of the plurality of receive electrodes.
  • the resistance value of the receive electrode is inverted and amplified by an operational amplifier and acquired as a voltage value.
  • the output can be arbitrarily amplified by setting the amplification factor of the applied voltage or the output.
  • the connector 50 converts an analog signal indicating an output value (a temperature value or a humidity value) output from each of the temperature detection units 31 and the humidity detection unit 32 of the sensor sheet 100 into a digital signal and outputs the digital signal to the measuring device 300. .
  • FIG. 6 is a block diagram showing a measuring apparatus according to the present embodiment.
  • the measuring apparatus 300 according to the present embodiment is a computer to which a control unit 301, a storage unit 302, an external interface 303, and a drive 304 are electrically connected.
  • the external interfaces 303 are each described as "external I / F".
  • the control unit 301 includes a central processing unit (CPU), a random access memory (RAM), a read only memory (ROM), and the like, and controls each component according to information processing.
  • the storage unit 302 is, for example, an auxiliary storage device such as a hard disk drive or a solid state drive, and stores a measurement program 321 executed by the control unit 301, data 322 related to detected temperature, humidity, and the like.
  • the external interface 303 is a USB (Universal Serial Bus) port or the like, and is an interface for connecting to an external device.
  • the connector 500, the input device 600, and the display 400 described above are connected via the external interface 303.
  • the input device 600 is, for example, a device for performing input such as a mouse and a keyboard. Note that external devices other than the above, such as a printer and a speaker, can also be connected.
  • a communication interface can be provided to connect the measuring device 300 to the outside via a network.
  • the communication interface is, for example, a wired LAN (Local Area Network) module, a wireless LAN module, or the like, and is an interface for performing wired or wireless communication via a network.
  • LAN Local Area Network
  • the drive 304 is, for example, a CD (Compact Disk) drive, a DVD (Digital Versatile Disk) drive, or the like, and is a device for reading a program stored in the storage medium 341.
  • the type of drive 304 may be appropriately selected according to the type of storage medium 341.
  • the measurement program 321 may be stored in the storage medium 341.
  • a storage medium 341 stores information such as a computer, an apparatus, a machine, etc. by an electric, magnetic, optical, mechanical or chemical action so that the information such as a program recorded can be read.
  • Media stores information such as a computer, an apparatus, a machine, etc. by an electric, magnetic, optical, mechanical or chemical action so that the information such as a program recorded can be read.
  • the measuring device 300 a general-purpose desktop PC (Personal Computer), a tablet PC or the like may be used other than the information processing device designed specifically for the service to be provided.
  • a general-purpose desktop PC Personal Computer
  • a tablet PC or the like may be used other than the information processing device designed specifically for the service to be provided.
  • the sensor system 200 includes a not-shown thermocouple (measuring device) that measures the temperature of the same atmosphere as the sensor sheet 100.
  • the thermocouple is installed in the connector 500, but is not limited to this, and may be installed in the vicinity of the sensor sheet 100.
  • the measurement signal output from the thermocouple is converted into a digital signal and input to the measuring device 300.
  • the means for measuring the temperature of the same atmosphere as the sensor sheet 100 is not limited to the thermocouple. Further, not only the temperature but also a measuring instrument for measuring the humidity of the same atmosphere as the sensor sheet 100 can be provided, and this measuring instrument can be integrated with an apparatus for measuring the temperature.
  • the measuring device 300 calculates the temperature distribution from the output values obtained by each of the plurality of temperature detection units 31 and calculates the pressure distribution from the output values obtained by each of the plurality of humidity detection units 32. Act as a department.
  • the temperature distribution of the subject can be measured by calculating the temperature distribution from the output values obtained by each of the plurality of temperature detection units 21. Further, by calculating the humidity distribution from the output value obtained by each of the plurality of humidity detection units 32, it is possible to measure the humidity distribution of the subject.
  • the measuring apparatus 300 functions as a correction unit that corrects the output value obtained by the other based on the output value obtained by one of the temperature detection unit 31 and the humidity detection unit 32.
  • the temperature dependency of the humidity detection unit 32 can be eliminated.
  • the temperature detection part 31 is sealed between the film base 1 and the cover member 5, the humidity can be 0%, and the influence of the change of the humidity can be prevented. Therefore, the correction of the humidity detection unit 32 will be described below.
  • the temperature dependency of the humidity detection unit 32 can be eliminated by the following method.
  • the temperature dependency of the humidity detection unit 32 is obtained from an output curve when the temperature is changed at a constant humidity. This may be performed at the time of factory shipment of the sensor sheet 100, or may be performed by each user. Further, the present invention may be performed for all the humidity detection units 32, or a representative value may be applied to all the humidity detection units 32.
  • the temperature detection unit 31 is calibrated by measuring the output at each temperature point using the temperature detection unit 31. As the temperature at this time, the temperature of the temperature detection unit 31 adjacent to each humidity detection unit 32 is used. This may be performed at the time of factory shipment of the sensor sheet 100, or may be performed by each user. Further, it may be performed for all the temperature detection units 31 or a representative value may be applied to all the temperature detection units 31.
  • the humidity detection unit 32 can be corrected.
  • the distribution of temperature and humidity can be measured by a single sensor sheet.
  • the temperature detection and the humidity detection are performed by the detection member 3 which is the same material, a sensor sheet capable of measuring both the temperature and the humidity can be configured at low cost.
  • the temperature detection part 31 is sealed between the film base 1 and the cover member 5, the influence of the humidity at the time of temperature measurement can be suppressed.
  • the humidity detection unit 32 is exposed to the outside from the opening 51 of the cover member 5 in order to facilitate detection of the humidity.
  • the humidity detection unit 32 is adjacent to the temperature detection unit 31, the temperature dependency of the humidity detection unit 32 can be accurately eliminated using the temperature measured by the adjacent temperature detection unit 31.
  • the first electrode 2 and the second electrode 4 may not necessarily be orthogonal to each other, as long as they intersect at least 45 degrees or more.
  • the temperature detection unit 31 and the humidity detection unit 32 are alternately arranged on the first and second electrodes 1 and 4, the temperature detection unit 31 and the humidity detection unit 32 are arranged so as to be adjacent to each other. Just do it. Therefore, for example, as shown in FIG. 7, the temperature detection units 31 and the humidity detection units 32 can be alternately arranged on the adjacent first electrodes 1. And the opening 51 is formed in the cover member 5 so that the humidity detection part 32 may be exposed outside.
  • the temperature detection unit 31 and the humidity detection unit 32 may not necessarily be adjacent to each other, as long as the temperature detection unit 31 and the humidity detection unit 32 are disposed at any position on the sensor sheet 100. .
  • the opening 51 is formed at a position corresponding to the humidity detection unit 32 after being disposed over the entire film substrate 1 as in the above embodiment. Instead, it may be disposed so as to cover at least a portion where the temperature detection unit 31 is provided.
  • first electrode 3 detection member (detection material) 31 temperature detection unit 32 pressure detection unit 4 second electrode 5 cover member

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

Une feuille de capteur selon la présente invention comprend : un matériau de base de film ; une pluralité de premières électrodes qui sont disposées sur le matériau de base de film et ont des formes linéaires s'étendant en parallèle ; une pluralité de secondes électrodes qui sont disposées sur le matériau de base de film, croisent la pluralité de premières électrodes, et ont des formes linéaires s'étendant en parallèle ; un matériau de détection, qui est un matériau de détection conducteur qui est disposé entre la première électrode et la seconde électrode dans au moins une intersection de la première électrode et de la seconde électrode, et qui a des caractéristiques électromagnétiques variant avec la température ou l'humidité, l'intersection constituant une partie de détection de température pour détecter la température ou une partie de détection d'humidité pour détecter l'humidité ; et un élément de recouvrement qui scelle au moins la partie de détection de température conjointement avec le matériau de base de film.
PCT/JP2018/027971 2017-08-02 2018-07-25 Feuille de capteur WO2019026737A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-150304 2017-08-02
JP2017150304A JP6967390B2 (ja) 2017-08-02 2017-08-02 センサシート

Publications (1)

Publication Number Publication Date
WO2019026737A1 true WO2019026737A1 (fr) 2019-02-07

Family

ID=65233742

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2018/027971 WO2019026737A1 (fr) 2017-08-02 2018-07-25 Feuille de capteur

Country Status (2)

Country Link
JP (1) JP6967390B2 (fr)
WO (1) WO2019026737A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210102851A1 (en) * 2019-10-03 2021-04-08 Ricoh Company, Ltd. Sensor sheet, robot hand, and glove

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102629165B1 (ko) * 2021-09-29 2024-01-29 한국기술교육대학교 산학협력단 이온전도도 측정기 및 이를 이용한 이온전도도 측정방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591101A (en) * 1978-12-28 1980-07-10 Matsushita Electric Ind Co Ltd Temperature and humidity control element
JPS59173742A (ja) * 1983-03-22 1984-10-01 Sharp Corp 温湿度センサ−
JPS6126163U (ja) * 1984-07-23 1986-02-17 マルコン電子株式会社 温湿度感知素子
JPH0510826A (ja) * 1991-07-02 1993-01-19 Matsushita Electric Ind Co Ltd アレイセンサ
JP2016118552A (ja) * 2014-12-18 2016-06-30 ニッタ株式会社 センサシート

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591101A (en) * 1978-12-28 1980-07-10 Matsushita Electric Ind Co Ltd Temperature and humidity control element
JPS59173742A (ja) * 1983-03-22 1984-10-01 Sharp Corp 温湿度センサ−
JPS6126163U (ja) * 1984-07-23 1986-02-17 マルコン電子株式会社 温湿度感知素子
JPH0510826A (ja) * 1991-07-02 1993-01-19 Matsushita Electric Ind Co Ltd アレイセンサ
JP2016118552A (ja) * 2014-12-18 2016-06-30 ニッタ株式会社 センサシート

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210102851A1 (en) * 2019-10-03 2021-04-08 Ricoh Company, Ltd. Sensor sheet, robot hand, and glove
US11493392B2 (en) * 2019-10-03 2022-11-08 Ricoh Company, Ltd. Sensor sheet, robot hand, and glove

Also Published As

Publication number Publication date
JP6967390B2 (ja) 2021-11-17
JP2019028005A (ja) 2019-02-21

Similar Documents

Publication Publication Date Title
CN107110716B (zh) 传感器片
JP5928859B1 (ja) センサシート
US20150016487A1 (en) Flexible Temperature and Strain Sensors
CN105074407B (zh) 用于测量周围介质压力的电容式压力测量元件
US8079272B2 (en) Tactile sensor
WO2019026737A1 (fr) Feuille de capteur
JP2006071644A (ja) 容量型温度センサー
JPH10239264A (ja) 電気抵抗式湿度センサ
US9665199B2 (en) Touch button
Vu et al. Waterproof, thin, high-performance pressure sensors-hand drawing for underwater wearable applications
JP6799908B2 (ja) 感温素子
JP6748020B2 (ja) 判定システム及び判定プログラム
US20150059471A1 (en) Sensing
JP2010008122A (ja) ガスセンサ
US20230008926A1 (en) Sensor
Žlebič et al. Ink-jet printed strain sensor on polyimide substrate
Tintelott et al. Flexible printed pressure sensor integrated into inner wall of a 3D tube using additive manufacturing
JP6909709B2 (ja) センサシート
US20050022605A1 (en) Pressure sensor
JP6442577B2 (ja) 重量センサ及び重量センサユニット
US20240077370A1 (en) Sensor Device
JP2015121455A (ja) 重量センサ及び重量センサユニット
CN118112062A (zh) 气体传感器
KR20140090345A (ko) 투명한 스트레인 센서
JP2019128176A (ja) 温度センサ及び温度センサの製造方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18840758

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 18840758

Country of ref document: EP

Kind code of ref document: A1