WO2016072360A1 - Source de lumière multi-longueur d'onde et dispositif de source de lumière - Google Patents

Source de lumière multi-longueur d'onde et dispositif de source de lumière Download PDF

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Publication number
WO2016072360A1
WO2016072360A1 PCT/JP2015/080732 JP2015080732W WO2016072360A1 WO 2016072360 A1 WO2016072360 A1 WO 2016072360A1 JP 2015080732 W JP2015080732 W JP 2015080732W WO 2016072360 A1 WO2016072360 A1 WO 2016072360A1
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Prior art keywords
light
light source
wavelength
phosphor
condensing
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PCT/JP2015/080732
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English (en)
Japanese (ja)
Inventor
理 大澤
昌士 岡本
井上 正樹
和典 別所
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ウシオ電機株式会社
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Priority claimed from JP2015070871A external-priority patent/JP6428437B2/ja
Application filed by ウシオ電機株式会社 filed Critical ウシオ電機株式会社
Publication of WO2016072360A1 publication Critical patent/WO2016072360A1/fr

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00Reflectors for light sources
    • F21V7/22Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21SNON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V13/00Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00Reflectors for light sources
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details

Definitions

  • the present invention relates to a multiwavelength light source using a light emitting element such as a semiconductor laser, such as a white light source usable in an optical apparatus such as a projector, and a light source device including the multiwavelength light source.
  • a light emitting element such as a semiconductor laser
  • a white light source usable in an optical apparatus such as a projector
  • a light source device including the multiwavelength light source.
  • high-intensity discharge lamps such as xenon lamps and ultra-high pressure mercury lamps have been used in light source devices for image display such as DLP (TM) projectors and liquid crystal projectors, and photomask exposure apparatuses. It has been.
  • TM DLP
  • FIG. 11 is a diagram for explaining one form of a part of a conventional light source device related to the light source device of the present invention (reference: Japanese Patent Application Laid-Open No. 2004-252112, etc.) ).
  • a light condensing means (not shown) composed of a concave reflecting mirror, a lens, or the like.
  • FmA is input to the incident end (PmiA) and output from the exit end (PmoA).
  • a light guide can be used, which is also called a name such as a rod integrator or a light tunnel, and is a light transmissive material such as glass or resin.
  • the light homogenizing means (FmiA) repeats total reflection on the side surface of the light homogenizing means (FmA). By propagating through FmA), even if the distribution of light input to the incident end (PmiA) is uneven, the illuminance on the exit end (PmoA) is sufficiently uniformed. Function.
  • a hollow square tube the inner surface of which is a reflecting mirror
  • the illumination lens (Ej1A) is arranged so that a square image of the emission end (PmoA) is formed on the two-dimensional light amplitude modulation element (DmjA), and is output from the emission end (PmoA).
  • the two-dimensional light amplitude modulation element (DmjA) is illuminated with light.
  • a mirror (MjA) is disposed between the illumination lens (Ej1A) and the two-dimensional light amplitude modulation element (DmjA).
  • the two-dimensional light amplitude modulation element (DmjA) modulates the light so that it is directed to the direction of incidence on the projection lens (Ej2A) or not to the direction of incidence according to the video signal.
  • the image is displayed on the screen (Tj).
  • the two-dimensional light amplitude modulation element as described above is sometimes called a light valve.
  • the two-dimensional light amplitude modulation element (DmjA) is generally DMD (TM) (digital). ⁇ Micromirror devices are often used.
  • FIG. 12 is a diagram for explaining one form of a part of the apparatus (reference: JP-A-2001-142141, etc.).
  • a light source composed of a high-intensity discharge lamp or the like is converted into a substantially collimated light beam with the help of collimator means (not shown) composed of a concave reflecting mirror, lens, etc. It is input to the incident end (PmiB) of the eye integrator (FmB) and output from the exit end (PmoB).
  • the fly eye integrator (FmB) is composed of a combination of a front stage fly-eye lens (F1B) on the incident side, a rear stage fly-eye lens (F2B) on the exit side, and an illumination lens (Ej1B). Both the front fly-eye lens (F1B) and the rear fly-eye lens (F2B) are formed by arranging a large number of rectangular lenses having the same focal length and the same shape in the vertical and horizontal directions.
  • Each lens of the front-stage fly-eye lens (F1B) and the corresponding lens of the rear-stage fly-eye lens (F2B) in the subsequent stage constitute an optical system called Koehler illumination.
  • a large number of optical systems are arranged vertically and horizontally.
  • the Kohler illumination optical system is composed of two lenses.
  • the front lens collects light and illuminates the target surface, the front lens does not form a light source image on the target surface, but the center of the rear lens.
  • a light source image is formed on this surface, and the rear lens is arranged so as to form an image of the quadrangle of the outer shape of the front lens on the target surface (surface to be illuminated), thereby uniformly illuminating the target surface.
  • the function of the latter lens is to prevent the phenomenon that the illuminance around the square of the target surface falls depending on the size when the light source is not a perfect point light source but has a finite size if it is not
  • the rear lens can make the illuminance uniform to the periphery of the square of the target surface without depending on the size of the light source.
  • the fly-eye integrator (FmB) is basically input with a substantially parallel light beam, so the front fly-eye lens (F1B) and the rear fly-eye lens (F2B). ) Are arranged to be equal to their focal lengths, so that an image of the target surface of uniform illumination as the Kohler illumination optical system is generated at infinity.
  • the illumination lens (Ej1B) is disposed at the rear stage of the rear fly-eye lens (F2B), the target surface is drawn toward the focal plane of the illumination lens (Ej1B) from infinity.
  • the output light flux is also substantially axially symmetric. Because of the nature of the lens, that is, the Fourier transform action of the lens, all rays incident on the lens surface at the same angle are refracted toward the same point on the focal plane regardless of the incident position on the lens surface.
  • the output of the Koehler illumination optical system is imaged on the same target surface on the focal plane of the illumination lens (Ej1B).
  • a polarizing beam splitter (MjB) is disposed between the illumination lens (Ej1B) and the two-dimensional light amplitude modulation element (DmjB), so that light is transmitted to the two-dimensional light amplitude modulation element ( DmjB) is reflected.
  • the two-dimensional light amplitude modulation element (DmjB) rotates the polarization direction of light by 90 degrees for each pixel according to the video signal, or modulates and reflects the light so that only the rotated light is reflected. Then, the light passes through the polarizing beam splitter (MjB) and is incident on the projection lens (Ej3B) to display an image on the screen (Tj).
  • LCOS silicon liquid crystal device
  • DmjB two-dimensional light amplitude modulation element
  • a transmission type liquid crystal device (LCD) is also used with an optical arrangement suitable for the same (reference: No. 10-133303).
  • a dynamic color filter such as a color wheel is disposed after the light uniformizing means, and R, G, B (red, green, blue)
  • the two-dimensional light amplitude modulation element is illuminated as a color sequential light beam, and color display is realized by time division, or a dichroic mirror or dichroic prism is arranged at the subsequent stage of the light uniformizing means, and R, G, B
  • a dichroic mirror or dichroic prism to perform color synthesis of modulated light beams of the three primary colors R, G, and B
  • FIGS. 11 and 12 it is omitted in order to avoid complexity.
  • the high-intensity discharge lamp described above has drawbacks such as low conversion efficiency from input power to optical power, that is, a large heat loss or a short life.
  • solid light sources such as LEDs and semiconductor lasers have attracted attention as alternative light sources that have overcome these drawbacks.
  • the LED has a smaller heat loss and a longer life than the discharge lamp, but the emitted light has no directivity like the discharge lamp, so the light source device and the exposure device described above. In applications where only light in a specific direction can be used, there is a problem that the light use efficiency is low.
  • semiconductor lasers like LEDs, have low heat loss, long life, and high directivity, so that only light in a specific direction such as the above-described light source device and exposure device can be used. In use, there is an advantage that the utilization efficiency of light is high.
  • a semiconductor laser For example, what is currently readily available as a red semiconductor laser has a wavelength band of 635 to 640 nm and requires a large optical power due to low visibility, and for example, as a green semiconductor laser, What is available has a wavelength band of 522 to 526 nm, and from the viewpoint of image reproduction, there is a problem that it is too short from an ideal wavelength.
  • the wavelength band that directly uses the emitted light of the semiconductor laser is only blue, and red and green are obtained by converting the wavelength of the emitted light of the blue semiconductor laser using a phosphor that can easily adjust the emission wavelength by adjusting the components.
  • Technology has been developed to achieve this.
  • a solid-state light source such as a semiconductor laser emitting blue light is condensed as one excitation light at one point of a rotating disk, and the rotating disk has a blue complementary color.
  • a technology relating to a white light source that sequentially generates yellow and blue luminous fluxes by providing a segment provided with a yellow phosphor layer emitting yellow fluorescence and a segment provided with a blue scattering reflection layer is described.
  • a simple polarization dichroic mirror is used as an output light separation and extraction element for directing excitation light from a solid light source to a rotating disk and extracting light from the rotating disk as output light. Therefore, the ratio of the amount of light that returns to the solid light source out of the blue light coming out of the rotating disk is high, and there is a problem that the light use efficiency is not good.
  • a plurality of concave reflecting mirrors (spheroid ellipsoids) provided with excitation light from a plurality of solid light sources by a semiconductor laser emitting blue light corresponding to each of the solid light sources.
  • a technology relating to a white light source with high luminance that uses scattered excitation light and fluorescence by focusing light on one point of the phosphor or a plurality of adjacent points.
  • the number of concave reflecting mirrors equal to the number of solid light sources needs to be arranged three-dimensionally symmetrically, and each solid light source needs to be accurately arranged at a predetermined position relative to each concave reflecting mirror. Therefore, there is a problem that the structure becomes complicated. Further, the problem of how to improve the utilization efficiency of light emitted from the phosphor is not yet solved.
  • excitation light from a plurality of solid-state light sources such as a semiconductor laser emitting blue light is collected by a lens so as to pass through a small entrance opening provided in a mirror box.
  • the phosphor provided on the exit side in the mirror box is caused to emit light, and at the exit of the mirror box, a dichroic filter that reflects excitation light and returns to the mirror box and transmits fluorescence is provided.
  • a technique is described in which the use efficiency of excitation light and fluorescence is enhanced by reflecting the fluorescence toward the exit side.
  • the excitation light and fluorescence that reach the dichroic filter become scattered light, and the direction distribution of the light is large, so that the wavelength selectivity of reflection / transmission of the dichroic filter becomes very poor and efficiency is lowered.
  • the size of the specular box is not sufficiently large compared to the size of the excitation light entrance opening, the effect of providing the specular box does not appear. Since the area of the exit becomes large and the point light source property is lowered, there is a problem that it is difficult to obtain high light utilization efficiency.
  • excitation light from a plurality of solid light sources such as a semiconductor laser emitting blue light is combined with one light beam as a whole by a collimator lens provided corresponding to each of the solid light sources.
  • a technology related to a high-brightness white light source that uses fluorescence emitted from the phosphor, or scattered excitation light and fluorescence, by condensing on a small area of the phosphor with a common concave reflecting mirror. ing.
  • this technique the problem of how to increase the utilization efficiency of light emitted from the phosphor is not yet solved.
  • a problem to be solved by the present invention is to provide a multi-wavelength light source and a light source device that achieve high arrival efficiency of excitation light from a light emitting element to a phosphor and high extraction efficiency of light emitted from the phosphor to the outside. It is to provide.
  • the multi-wavelength light source converts the light emitting element (Y1) and the radiated light (Fa1) emitted from the light emitting element (Y1) into a light beam (Fbl) that forms a distant image.
  • An integrated light source (W) in which a plurality of element light sources (U1, U2,...) Are arranged side by side as a single element light source (U1).
  • Each of the luminous fluxes (P1, P2,%) Having spectral characteristics that selectively reflects light having a radiation wavelength of the light emitting elements (Y1, Y2,...) Is output from the integrated light source (W).
  • a dichroic reflection element (M) selectively provided at a position where Fb1, Fb2,.
  • a mixed divergent light beam (Fe) of fluorescence emitted from the light collection region (Aq) on the surface of the phosphor (N) and residual excitation light reflected from the light collection region (Aq) is generated.
  • the mixed divergent light beam (Fe) is converted by the light collecting element (Ef) into a light beam (Ff) that propagates in the opposite direction to the focused light beam (Fd) to form a distant image.
  • the luminous flux (Ff) is transmitted through the dichroic reflection element (M), whereby a mixed output luminous flux (Fg) is output to the outside.
  • the multi-wavelength light source is a light-emitting element (Y1) and a luminous flux (Fb1) that forms a distant image of radiated light (Fa1) emitted from the light-emitting element (Y1).
  • a dichroic reflection element (M) selectively provided at a position where Fb1, Fb2,.
  • a condensing element (Ef) for condensing the luminous flux (Fcl, Fc2,%) Generated by transmitting the luminous flux (Fbl, Fb2, etc Through the dichroic reflection element (M);
  • the converged light beam (Fd) generated by condensing the light beams (Fc1, Fc2,...) By the light collecting element (Ef) forms the light collection region (Aq), the light collection region (Aq).
  • the multi-wavelength light source when focusing on the principal rays (Lp1, Lp2,%) In the luminous flux (Fbl, Fb2,...), The fluorescence of the principal rays (Lp1, Lp2,).
  • the component regularly reflected on the surface of the body (N) is propagated by the condensing element (Ef) in the direction opposite to that at the time of condensing and reaches the dichroic reflecting element (M).
  • the regions (P1, P2,...) Are not formed.
  • the multiwavelength light source according to a third aspect of the present invention is characterized in that the condensing region (Aq) is an exit pupil formed by the condensing element (Ef) and an optical system in front thereof. Is.
  • the multi-wavelength light source according to a fourth aspect of the present invention is characterized in that the phosphor (N) is a normal line while keeping the normal of the surface of the phosphor (N) in the light collection region (Aq) unchanged. It is possible to move in a vertical direction.
  • the phosphor (N) is: The content ratio of the phosphor that emits fluorescence that belongs to the green wavelength band and the phosphor that emits fluorescence that belongs to the red wavelength band, Alternatively, the content ratio of the phosphor that emits fluorescence belonging to the green wavelength band, the phosphor that emits fluorescence belonging to the red wavelength band, and the reflector that reflects light in the blue wavelength band is, The phosphors (N) are distributed monotonically depending on the positions on the surface.
  • the light condensing element (Ef) is constituted by a lens, and the light from the phosphor (N) along the optical axis of the light condensing element (Ef).
  • the integrated light sources (Wi, Wj) are arranged on both the left side and the right side of the light collecting element (Ef), and the dichroic reflective element (M) is arranged between the left side and the right side.
  • the left and right integrated light sources (Wi, Wj) are configured such that the element light sources (U1, U2,...) Are arranged in a grid pattern.
  • the arrangement pattern of the regions (P1, P2,%) Projected on a plane perpendicular to the optical axis of the optical element (Ef) is based on an arrangement that is symmetric with respect to the optical axis of the condensing element (Ef).
  • the period of the arrangement pattern of the regions (P1, P2,...) In a direction parallel or perpendicular to the direction of the ridgeline of the roof in the roof type arrangement of the dichroic surfaces (Smi, Smj) described above. The arrangement is shifted.
  • a light source device comprising: the multi-wavelength light source according to the first aspect; and a fly eye integrator (FmB) to which a mixed output light beam (Fg) output from the multi-wavelength light source is input.
  • a light source device comprising: The direction of the arrangement pattern when the arrangement pattern of the regions (P1, P2,...) Provided in the dichroic reflection element (M) is projected onto the front fly-eye lens (F1B) of the fly-eye integrator (FmB);
  • the multi-wavelength light source and the fly eye integrator (FmB) are arranged so that the directions of the fly eye lenses of the fly eye integrator (FmB) do not coincide with each other.
  • the block diagram which simplifies and shows the multiwavelength light source of this invention is represented.
  • the block diagram which simplifies and shows the multiwavelength light source of this invention is represented.
  • the schematic diagram which simplifies and shows a part of multi-wavelength light source of this invention is represented.
  • the schematic diagram which simplifies and shows the multiwavelength light source of this invention is represented.
  • the schematic diagram which simplifies and shows a part of multi-wavelength light source of this invention is represented.
  • the conceptual diagram which simplifies and shows one form of a part of light source device of this invention is represented.
  • the figure which simplifies and shows one form of the one part of the Example of the multiwavelength light source of this invention is represented.
  • the figure which simplifies and shows one form of the one part of the Example of the multiwavelength light source of this invention is represented.
  • the figure which simplifies and shows one form of the Example of the multiwavelength light source of this invention is represented.
  • the figure which simplifies and shows one form of the Example of the multiwavelength light source of this invention is represented.
  • the figure explaining one form of one kind of conventional light source device concerning the light source device of this invention is represented.
  • the figure explaining one form of one kind of conventional light source device concerning the light source device of this invention is represented.
  • conjugate as a general term in the field of geometric optics, for example, when A and B are conjugate, it has an imaging function such as a lens based on at least paraxial theory. It means that A is imaged on B or B is imaged on A by the action of the optical element. At this time, A and B are images, and it is a matter of course that isolated point images are included as targets, and a set of a plurality of point images and a spread image in which point images are continuously distributed are also targets. include.
  • a point image or an image point is a general term in the field of geometric optics, in which light is actually radiated from that point, the light converges toward that point, and the screen is A bright spot appears when placed, the light seems to converge toward that point (but the point is inside the optical system and the screen cannot be placed), the light is emitted from that point (However, the point is inside the optical system and the screen cannot be placed), and no distinction is made.
  • blurring occurs due to aberrations or defocusing in imaging, Ignore the phenomenon of disappearing from an ideal point or diffraction limited image.
  • the input image of the optical system can be considered as just one point light source, and it is usually on the optical axis of the optical system.
  • the central beam of the diverging direction distribution of diverging light from the semiconductor laser may be arranged in a direction that coincides with the optical axis.
  • a design that takes into account the entrance pupil, exit pupil, and chief ray of the optical system is required. Describes this situation.
  • an aperture stop is usually present inside the lens, but when the lens is viewed from the side where the light enters, the image of the aperture stop that can be seen through the lens is the entrance pupil, the side from which the light exits.
  • a light beam (usually a meridian light beam) that is directed to the center of the exit pupil or entrance pupil or that emerges from the center of the exit pupil when the lens is viewed from the lens is called a principal ray.
  • rays other than the principal ray are called peripheral rays.
  • there is often no aperture stop because it is not necessary to cut out the light beam by the aperture stop, and in that case, depending on the form of light in the optical system. They are defined.
  • the central ray of the direction distribution of light in the luminous flux from the radiation point is the principal ray, and there is an entrance pupil at the position where the principal ray incident on the optical system or its extension intersects the optical axis, and exits from the optical system.
  • the exit pupil is considered to be at a position where the principal ray or its extension intersects the optical axis.
  • the chief ray and the optical axis defined in this way do not intersect due to, for example, an adjustment error and are only in a twisted position.
  • the optical axis of the optical system is referred to as the z-axis.
  • the optical axis is bent by the reflecting mirror, the direction in which the light beam along the original z-axis is reflected and travels is also determined. It is called the z axis and does not take a new coordinate axis.
  • the x axis and the y axis are expressed as axes perpendicular to the z axis for convenience.
  • FIG. 1 is a block diagram which simplifies and shows the multiwavelength light source of this invention.
  • the light emitting element (Yl) constituting the element light source (Ul) is driven by a driver circuit (not shown) configured based on a DC / DC converter, which is configured by a circuit of a system such as a subordinate chopper or a boost chopper, for example. And emits radiated light (Fa1).
  • a driver circuit not shown
  • a DC / DC converter which is configured by a circuit of a system such as a subordinate chopper or a boost chopper, for example.
  • radiated light Fa1
  • the emitted light (Fa1) is converted into a light beam (Fb1) that forms a distant image conjugate with the image of the light emitting area of the light emitting element (Y1) by a collimator element (E1) made of, for example, an aspheric lens. .
  • a collimator element (E1) made of, for example, an aspheric lens.
  • the light beam (Fb1) for example, it can be configured to be a parallel light beam, or can be configured to be a divergent light beam or a converged light beam that is nearly parallel.
  • an integrated light source (W) is formed, and light fluxes from each of the element light sources (U1, U2,).
  • the principal rays (Lpl, Lp2,%) Of the light beams (Fbl, Fb2,%) can be configured to be parallel to each other, for example. Also, it can be configured to be divergent or convergent near parallel.
  • the light beams (Fb1, Fb2,%) are made incident on the dichroic reflection element (M).
  • the dichroic reflective element (M) has a region (P1, P2,%) Having a spectral characteristic that selectively reflects light having the emission wavelength of the light emitting elements (Y1, Y2,%) With as high efficiency as possible.
  • Light having a wavelength other than the emission wavelength of the light emitting elements (Yl, Y2,...) Is formed so as to be transmitted with as high efficiency as possible.
  • the dichroic reflective element (M) is configured to transmit light of all related wavelength bands with as high efficiency as possible in the regions other than the regions (P1, P2,). Therefore, the light fluxes (Fbl, Fb2,...) Are reflected by the dichroic reflection element (M), and as the light fluxes (Fc1, Fc2,%),
  • a light collecting element (Ef) having a light collecting function such as a convex lens or a concave mirror. It is made to enter.
  • the luminous fluxes (Fc1, Fc2,...) Are collected by the condensing element (Ef) and are incident on the phosphor (N) as a focused luminous flux (Fd).
  • a condensing region (Aq) irradiated with the focused light beam (Fd) is formed on the surface of the phosphor (N).
  • the light having the emission wavelength of the light emitting element (Yl, Y2,...) Of the focused light beam (Fd) is absorbed as excitation light, and the wavelength is different from that. Emits fluorescence in the band.
  • the wavelength of the emitted fluorescence is usually longer than that of the excitation light, but fluorescence having a shorter wavelength than that of the excitation light may be emitted by multiphoton fluorescence.
  • a multi-wavelength light source that outputs a light beam in which light of a plurality of wavelengths is mixed, that is, fluorescence in which excitation light is wavelength-converted by the phosphor (N) and residual excitation light that has not been wavelength-converted, is realized. .
  • the region (P1, P2,%) Of the dichroic reflecting element (M) is formed so as to reflect the excitation light having the emission wavelength of the light emitting elements (Y1, Y2,%) As efficiently as possible. Therefore, high arrival efficiency of excitation light from the light emitting element to the phosphor can be realized.
  • the dichroic reflection element (M) is made to transmit as efficiently as possible in a region other than the region (P1, P2,%), And With respect to the fluorescence from the phosphor (N), both the region (P1, P2,%) And other regions are made to transmit with the highest possible efficiency. High extraction efficiency can be realized.
  • the regions (P1, P2,%) As narrow as possible as long as the light beams (Fbl, Fb2,%) Do not protrude. If the region (P1, P2,%) Is too narrow, the luminous flux (Fb1, Fb2,%) Protrudes and the component that does not reach the phosphor (N) increases. If the region (P1, P2,%) Is too wide, it is reflected in the direction of the integrated light source (W) among the residual excitation light reflected without wavelength conversion in the mixed divergent light beam (Fe). This is because the number of components increases, and in any case, the light utilization efficiency is lowered.
  • the luminous flux (Fbl, Fb2,%) Is S-polarized with respect to the dichroic reflecting element (M).
  • the region (P1, P2,%) Functions as a polarization beam splitter that reflects the luminous flux (Fb1, Fb2,%) As efficiently as possible.
  • a dichroic reflective element (M) can be devised. What happens is that when the luminous flux (Fbl, Fb2,%) Reaches the phosphor (N) and is reflected, rotation of the polarized light occurs, so that when the light beam returns to the dichroic reflecting element (M), it is polarized.
  • the ratio of components that can pass through the region (P1, P2,%) Increases. If the degree of polarization of the excitation light returning to the dichroic reflection element (M) is not sufficiently lowered, excitation light is interposed between the dichroic reflection element (M) and the condensing element (Ef). By inserting a quarter-wave plate relating to the wavelength and forcibly rotating the polarization of the excitation light returning to the dichroic reflection element (M) by 90 degrees, the region (P1, P2,...) It is possible to increase the proportion of the component that can pass through.
  • FIG. 2 is a simplified block diagram showing the multi-wavelength light source of the invention. The function of the multi-wavelength light source in this figure is to read the description of reflection and transmission at the dichroic reflection element (M), in the description of FIG. It can be understood by changing.
  • the dichroic reflective element (M) has a spectral characteristic (P1) that selectively transmits light having the emission wavelength of the light emitting elements (Yl, Y2,%) With as high efficiency as possible.
  • P2,... are selectively provided at locations where the luminous fluxes (Fb1, Fb2,%) Strike.
  • the dichroic reflection element (M) is configured to reflect light of all related wavelength bands with as high efficiency as possible in the regions other than the regions (P1, P2,).
  • the luminous fluxes (Fbl, Fb2,...) are transmitted through the dichroic reflection element (M) and are incident on the light collecting elements (Ef) as luminous fluxes (Fcl, Fc2,...), And the phosphor (N).
  • a condensing region (Aq) is formed on the surface.
  • the condensing element (Ef) functions as a collimator for the fluorescence emitted from the condensing region (Aq) and the residual excitation light that has not undergone wavelength conversion.
  • a light beam (Ff) that forms a distant image conjugate with the light region (Aq) is emitted, and the light beam (Ff) is reflected by the dichroic reflection element (M) to produce a mixed output light beam (Fg) in the z-axis direction. ) Is output to the outside.
  • a multi-wavelength light source that outputs a light beam in which light of a plurality of wavelengths is mixed, that is, fluorescence in which excitation light is wavelength-converted by the phosphor (N) and residual excitation light that has not been wavelength-converted, is realized. .
  • the surface of the phosphor (N) With respect to the surface of the phosphor (N), if it is flat, unless it is specially treated, it is not a perfect diffuse reflection surface, and its reflection characteristic shows a strong peak in the regular reflection component.
  • the residual excitation light that has not been wavelength-converted passes through the region other than the region (P1, P2,%) In the dichroic reflective element (M). Since it is outputted to the outside by using it, the region (P1, P2,%) Does not exist at the position where the specular reflection component of the residual pumping light of the dichroic reflecting element (M) passes. This is advantageous for increasing the utilization efficiency.
  • the light collecting element (Ef) has an axisymmetric structure with respect to the z axis, and the phosphor (N).
  • the principal rays (Lp1, Lp2, Lp4, Lp5) of Fb2, Fb4, Fb5) are rays existing on the paper surface of FIGS.
  • the most simplified / idealized condition is output from each of the element light sources (U1, U2,%) Constituting the integrated light source (W).
  • the light beams (Fbl, Fb2,%) Accurately form a parallel light beam (in other words, accurately form an output image point at infinity), and all of the light beams (Fb1, Fb2,%) Assume a condition in which the principal rays (Lpl, Lp2,%) Are exactly parallel to each other (in other words, the luminous fluxes (Fbl, Fb2,%) Form exactly the same infinite output image point).
  • the condensing region (Aq) formed on the surface of the phosphor (N) is the above-mentioned output image point at infinity formed by (the light beams (Fb1, Fb2,...)). It becomes one point-like region (conjugate).
  • the condensing region (Aq) will be a collection of light condensing regions having a finite size separated into a plurality, but it must be a small region where the optical power is concentrated. There is a problem that the phosphor (N) is rapidly deteriorated at a location.
  • the condensing region (Aq) is configured to be an exit pupil formed by the condensing element (Ef) and an optical system in front thereof. .
  • the position and size of the pupil are basic parameters of the optical system, and the size of the condensing region (Aq) required from the viewpoint of deterioration of the phosphor (N) is designed accurately. This is because it is possible to achieve this, and if such a design is used, it is not necessary to add an extra optical element that leads to a decrease in light utilization efficiency.
  • FIG. 3 is a schematic diagram showing a part of the multi-wavelength light source of the present invention in a simplified manner. This figure shows how each of the light beams (Fc1, Fc2,%) Is converted into a focused light beam (Fd1, Fd2,...) By the condensing element (Ef).
  • the fact that the condensing region (Aq) becomes an exit pupil means that the principal rays (Lpl, Lp2,%) Of the luminous flux (Fbl, Fb2, etc
  • Output from the integrated light source (W) as shown in FIG. )) Passes through the center of the light collection region (Aq), that is, the point (Q) that is the intersection of the phosphor (N) and the z-axis, and if the luminous flux (Fbl, If the divergence angles of Fb2,... Are all the same, for example, if the thicknesses of the light beams (Fbl, Fb2,...)
  • the integrated light source (W) are all the same, for example.
  • the luminous fluxes (Fbl, Fb2,%) Toward More luminous fluxes (Fd1, Fd2,%) After passing through the condensing element (Ef), and each centered on the common point (Q). A light irradiation region having approximately the same diameter is formed.
  • the diameter of the light irradiation region is represented by the distance between the tips of the arrows (A1, A2), and eventually the size of the light collection region (Aq) is defined. become.
  • the light beam (Fb1, Fb2,...) Is configured as a telecentric optical system that forms an image point on the same plane that has an exit pupil at infinity and is far (positive or negative distance) but not infinity. It is.
  • the second is that the luminous fluxes (Fbl, Fb2,%) That are the output from the integrated light source (W) are parallel luminous fluxes, that is, an infinite image point is formed.
  • the exit pupil is configured to come to a finite position.
  • there is an intermediate method between them i.e., the exit pupil is at a finite position and it is configured to form an image point on the same plane that is not infinity, but the complexity of the design and assembly adjustment of the optical system Increase.
  • the first method described above is considered to be the easiest to assemble and adjust the optical system.
  • the output of each of the element light sources (U1, U2,%) The element light sources (U1, U1,%) Such that the distance between the active region of the light emitting elements (Y1, Y2,%) And the collimator elements (E1, E2,%) Is a predetermined distance so that the image point can be a predetermined distance.
  • Assemble each of U2, .
  • the specifications of the light emitting elements (Y1, Y2,%) And the collimator elements (El, E2,...) Are all the same.
  • the integrated light source (W) In order for the integrated light source (W) to be a telecentric optical system, the principal rays (Lp1, Lp2,%) Of all the luminous fluxes (Fbl, Fb2,%) Of the element light sources (U1, U2,).
  • the element light sources (U1, U2,%) May be assembled so that.
  • the diameter of the light condensing region (Aq) can be easily obtained by the basic paraxial optical calculation from the design guideline of the telecentric optical system described above, but an explanation that is intuitively easy to understand is given below. Keep it.
  • the position of the pupil that is, the point (Q) is generated at the focal point of the condensing element (Ef).
  • the distance (zqj) of the output image point (Jl, J2,%) Conjugate with the active region of the light emitting element (Yl, Y2,...) From the point (Q) is the above-described collimator element (El, Y1,. If the focal distance of E2,...
  • the divergence angle of the focused light beam (Fdl, Fd2,%) That forms the output image point (Jl, J2,%) Is the radiated light (Fa1, Fa2,%) From the light emitting elements (Yl, Y2,. )) And the focal length of the collimator elements (El, E2,).
  • the diameter of the condensing region (Aq) is determined from the divergence angle of the focused light beam (Fd1, Fd2,%) And the distance (zqj), as is apparent from FIG.
  • collimator element it must be an element that converts light into a substantially collimated light beam, and parts that are commercially available as collimator elements for semiconductor laser radiation can also be used in this multi-wavelength light source. In this specification, it will be called a collimator element as it is.
  • the output image points (J1, J2,%) May be formed in front of the pupil position, contrary to this figure.
  • the output image point (Jl, J2,%) May be placed inside the optical system from the dichroic reflective element (M) to the condensing element (Ef).
  • the size of the region (P1, P2,%) Can be slightly reduced, and the light utilization efficiency can be improved accordingly. Benefits can be gained.
  • the irradiation power density of the excitation light becomes lower, which is advantageous from the viewpoint of deterioration of the phosphor (N). Since the size of the light source of the fluorescence from which the excitation light is wavelength-converted and the residual excitation light that has not been wavelength-converted emitted from Aq) is increased, the condensing region (Aq) generated by the condensing element (Ef) ) And a distant image are large, and the mixed output light beam (Fg) output to the outside is disadvantageous because the directional purity of the collimated light beam, that is, the light quality is lowered.
  • the phosphor (N) is placed in a direction perpendicular to the normal while keeping the normal of the surface of the phosphor (N) in the light collection region (Aq) unchanged. It is preferable to be configured to be movable.
  • the phosphor (N) is formed in a disk shape, and its central axis is arranged parallel to the z-axis and rotated, for example, the phosphor (N) is arranged on the side surface of the cylinder.
  • the phosphor (N) may be formed in a flat plate shape and translated in a direction perpendicular to the z-axis.
  • the movement may be performed continuously or stepwise, or may be performed continuously, or intermittently when the deterioration of the phosphor (N) is recognized. It may be executed automatically.
  • the movement mechanism may be provided with power such as a motor or a solenoid, or may be based manually.
  • the multi-wavelength light source of the present invention is particularly suitable for applications in which a white light source is realized by using a material that emits R, G, and B3 primary colors.
  • the white light source referred to here is not limited to the color (chromaticity) of the light beam emitted from the light source that can be regarded as strictly white, or R, G, B3 in an apparatus using the light beam emitted therefrom.
  • the primary color is taken out, and if the content ratio of R, G, B components deviates from the ideal white, it can be used as a white light source as a result by reducing the utilization efficiency of the extra components included Including things.
  • one type of phosphor may emit fluorescence belonging to the green wavelength band and fluorescence belonging to the red wavelength band, or emit at least fluorescence belonging to the green wavelength band.
  • a mixture of a phosphor and a phosphor that emits fluorescence belonging to the red wavelength band may be used.
  • the emission spectrum of the phosphor (N) when excited by the emission wavelength of the light emitting elements (Yl, Y2,...) Is composed of a large continuous spectrum including at least a green wavelength band and a red wavelength band. Alternatively, it may have at least a peak belonging to the green wavelength band and a peak belonging to the red wavelength band.
  • the white light source composed of a light emitting element that emits radiated light in each wavelength band of R, G, and B
  • the total luminous flux output it is possible to adjust the content ratios of the respective colors, that is, the components of the R, G, and B colors.
  • the emission wavelength band of the light emitting element (Yl, Y2,%) Is blue
  • the phosphor (N) is a mixture of a phosphor emitting green fluorescence and a phosphor emitting red fluorescence.
  • a phosphor that emits fluorescence belonging to the green wavelength band, and The content ratio with the phosphor that emits fluorescence belonging to the red wavelength band is distributed monotonously depending on the position on the surface of the phosphor (N), or the R, G, B colors of the output light
  • the phosphor (N) emits fluorescence belonging to the green wavelength band, and phosphor emits fluorescence belonging to the red wavelength band;
  • the phosphor (N) is configured so that the content ratio with respect to the reflector that reflects light in the blue wavelength band is monotonously distributed at positions on the surface of the phosphor (N). Position when the phosphor (N) is installed in a multi-wavelength light source By adjusting, it is possible to adjust the content ratio of the color components of the output light.
  • the normal of the phosphor surface is taken on the z axis, and the x axis and the y axis are taken on the phosphor surface.
  • the content of the reflector that reflects light in the blue wavelength band with respect to the phosphor content of the green phosphor and the red phosphor is monotonous only in the y coordinate without depending on the x coordinate.
  • the content ratio of the green phosphor out of the total phosphor content of the green phosphor and the red phosphor is monotonous only in the x coordinate without depending on the y coordinate.
  • the phosphor (N) may be configured to be distributed depending on.
  • “distributed monotonically depending on the x coordinate” means that the distribution amount increases or remains constant (or decreases or decreases) when the x coordinate increases when the distribution is viewed while changing the x coordinate. It means that it does not decrease after increase (increase after decrease).
  • the microscopic distribution smaller than the diameter of the condensing region (Aq) may be careless, and an average value over a region that is at least as large as the diameter of the condensing region (Aq). As long as the distribution amount is monotonous.
  • FIG. 4 (a) is a schematic diagram showing the multi-wavelength light source of the present invention in a simplified manner, as it is possible to achieve both the arrangement balance of the temperature rising elements and the compactness as the light source.
  • the condensing element (Ef) is constituted by a lens, and when viewed in the direction in which the fluorescence from the phosphor (N) comes along the optical axis of the condensing element (Ef), the integrated light source (Wi, Wj) ) Are arranged on both the left side and the right side of the condensing element (Ef) to constitute the multi-wavelength light source.
  • the dichroic reflecting element (M) is composed of two parts, the left side and the right side.
  • the left dichroic reflector (Mi) for reflecting the light beam (Fbil, Fbi2,...) From the integrated light source (Wi) and the light beam (Fbjl, Fbj2, etc From the right integrated light source (Wj) are reflected.
  • the dichroic surface (Smi, Smj) it is preferable to arrange the dichroic surface (Smi, Smj) in a roof shape.
  • the dichroic reflecting element (M) of the figure is illustrated as being configured by a dichroic prism, but by doing so, the joint portion of the dichroic surface (Smi, Smj), that is, the ridge line portion of the roof type arrangement It is possible to reduce the loss of the luminous flux from the condensing element (Ef) in comparison with the case where it is constituted by a dichroic mirror.
  • the integrated light source (Wi) and the integrated light source (Wj) are arranged so as to be shifted by one. Therefore, the regions (P1, P2,%) On the dichroic surfaces (Smi, Smj) for selectively reflecting the light beams (Fbi1, Fbi2, etc And the light beams (Fbj1, Fbj2,.
  • the arrangement is not symmetrical but is shifted in the x direction by a quarter of the period of the arrangement pattern of the regions (P1, P2,).
  • the region (P1, P2,%) Is shifted in the x direction, but it is also a schematic diagram showing a part of the multi-wavelength light source of the present invention in a simplified manner.
  • the use efficiency can be similarly increased by shifting in the y direction.
  • the principal ray (Lpjl) of the light beam (Fbi1) from the integrated light source (Wi) is reflected by the region (P1), it is specularly reflected from the phosphor (N).
  • the chief ray (Lpj1 ′) when it is returned passes through a portion where the region (P1, P2,...) Is not formed as shown in FIG.
  • each of the left and right integrated light sources (Wi, Wj) is configured by arranging the element light sources (U1, U2,%) In a lattice pattern, and is perpendicular to the optical axis of the light collecting element (Ef).
  • the arrangement pattern of the regions (P1, P2,%) Projected onto the plane is based on an arrangement that is symmetric with respect to the optical axis of the light condensing element (Ef), and the arrangement pattern of the dichroic surfaces (Smi, Smj).
  • the multi-wavelength light source of the present invention is formed into a light source device in combination with the above-described rod integrator or fly eye integrator, and can be suitably used, for example, to configure a projector, but particularly when combined with a fly eye integrator.
  • the residual excitation light that has not been wavelength-converted by the phosphor (N) cannot be output via the region (P1, P2,).
  • a shadow corresponding to the arrangement pattern of the regions (P1, P2,%) Described in (a) of FIG. 4 and (a), (b), and (c) of FIG. become.
  • the function as the light uniformizing means of the fly eye integrator is expressed by superimposing the illuminance distribution on each lens surface of the front fly eye lens (F1B).
  • the mixed output light beam (Fg) is input to the fly eye integrator (FmB), the shadow is also superimposed.
  • the fly eye integrator (FmB) may be superposed so as to strengthen the influence of the shadow.
  • Such inconvenient shadow superposition is performed by changing the arrangement pattern of the regions (P1, P2,%) Provided in two types of arrangement directions, that is, the dichroic reflection element (M), to the fly eye integrator (FmB). Occurs most significantly when the direction of the alignment pattern when projected onto the first fly-eye lens (F1B) matches the direction of alignment of the fly-eye lenses of the fly-eye integrator (FmB).
  • the arrangement pattern of the regions (P1, P2,...) Just described is projected onto the front fly-eye lens (F1B), the mixed output light beam (Fg) output from the multi-wavelength light source. Is projected in the direction of the central axis (z).
  • FIG. 6 is a conceptual diagram.
  • Po virtual plane perpendicular to the central axis (z) of the mixed output light beam (Fg) of the multi-wavelength light source shown in FIG.
  • a projection of the dichroic reflection element (M) and the condensing element (Ef) is drawn as a symbol of the multi-wavelength light source of the present invention, and the preceding fly-eye lens (F1B) is symbolized as the fly-eye integrator (FmB).
  • the x-axis and the y-axis are arranged so as to have an inclination with respect to the x′-axis and the y′-axis, which are the directions of the fly-eye lenses of the fly-eye integrator (FmB).
  • the angle of the inclination is not limited, and the fly eye integrator (FmB) needs to be set to an angle that can be overlapped so as to weaken the influence of the shadow. A reasonable value may be obtained experimentally.
  • FIG. 7 is a figure which simplifies and shows one form of the Example of the multi-wavelength light source of this invention.
  • (A) of this figure shows one structural example of the said element light source (U1), the assembly structure for mounting
  • (b) is a collimator.
  • the collimator elements (El, E2,...) So that a light beam is emitted, the collimator elements are first applied to the lens mount (Hzl ′, Hz2 ′,.
  • the collimator elements (El, E2,%) are fixed to the lens mount (Hz1 ′, Hz2 ′,.
  • the lens holders (Hz1, Hz2,%) Fixed to the elements (Yl, Y2,%) Are caused to emit light by passing current through the light emitting elements (Y1, Y2,%), And the collimator elements (El, Y1,.
  • each of the element light sources (U1, U2,%) Is configured, and these are integrated and mounted on the common heat sink (Hs), whereby one of the integrated light sources (W).
  • the heat sink (Hs) is made of a metal material such as aluminum
  • the lens holder (Hz1, Hz2,%) Interposed between the heat sink (Hs) and the metal case (Myl, My2,...)
  • it is made of a material such as ceramic having good thermal conductivity.
  • the light emitting element (Yl) and the collimator element (El) are assembled to constitute the element light source (Ul) as an entity, and a plurality of them are integrated to form the integrated light source (W).
  • An example of what is configured is shown.
  • a light emitting element assembly composed of a plurality of light emitting elements (Y1, Y2,...)
  • a collimator element assembly composed of a plurality of collimator elements (E1, E2,...)
  • the element light source (U1) composed of one light emitting element (Y1) and one collimator element (E1)
  • the integrated light source (W) formed may be regarded as an integrated unit.
  • FIG. 8 is a diagram showing a simplified form of a part of the embodiment of the multi-wavelength light source of the present invention.
  • (A) of this figure is the external appearance of the package (Py) containing the light emitting elements (Yl, Y2,...), (B) shows the internal structure of the package (Py), and (c) shows the package (Py).
  • Py is an integrated light source (W) configured by combining a collimator element array (Exy).
  • the heat sink (Hs) is made of a material having good thermal conductivity such as metal and forms the bottom surface of the package (Py).
  • the heat sink (Hs) is a larger heat sink through the fixing hole (Ph). It may be fixed and integrated to function as a heat sink.
  • the cover (Pc) made of metal, ceramic, or the like is provided with a window (Pw) for taking out a light beam emitted from the light emitting elements (Y1, Y2, etc And joined to the heat sink (Hs). And a hermetic seal structure.
  • the multi-wavelength light source of the present invention may be composed of a plurality of packages (Py).
  • the light emitting regions of the respective light emitting elements (Y1, Y2,...) are regarded as point image sets arranged vertically and horizontally independently in the same plane. Can do.
  • the collimator element array (Exy) is configured by arranging independent partial lenses (Eml, Em2,%) Corresponding to the collimator elements (E1, E2,). Then, by arranging it outside the window (Pw), the light flux from each point image is input to the dichroic reflection element (M) of the multi-wavelength light source corresponding to the light flux (Fbil, Fbi2,). It can be converted into a luminous flux suitable for what it does.
  • the collimator element array (Exy) in which the partial lenses (Em1, Em2,...) Are arranged in a two-dimensional array can be molded as a single unit by a technique similar to the fly eye lens manufacturing technique described above. Is preferred.
  • the package (Py) is configured so that the collimator element array (Exy) configured by arranging the partial lenses (Eml, Em2,%) In a two-dimensional array as an integral one also serves as the window (Pw). May be.
  • FIG. 9 is a diagram showing a simplified form of an embodiment of the multi-wavelength light source of the present invention.
  • the multi-wavelength light source of this figure is drawn as a more practical one based on the multi-wavelength light source shown in FIG. 4, (a) is a front view, and (b) is a side view.
  • the integrated light sources (Wi1, Wi2, Wj1, Wj2) and the phosphor (N) maintain good thermal contact with the common heat sink (Bh), which also serves as the base of the multi-wavelength light source. It is fixed.
  • the heat sink (Bh) is fixed to a cooling structure of an air cooling type, a water cooling type, or a Peltier element.
  • the dichroic reflecting element (M) in this figure is configured by combining dichroic reflecting portions (Mi, Mj) made of two thin flat plates.
  • the condensing element (Ef) includes a spherical or aspherical lens (Efl) for converting a parallel light beam into a focused light beam, and a two-stage for converting the focused light beam into a focused light beam having a larger divergence angle.
  • the aplanatic lens (Ef2, Ef3) (so-called luboschets lens) is drawn. Since the fluorescence whose excitation light has undergone wavelength conversion is diverged from the condensing region (Aq) without directivity, the condensing element (Ef) is capable of collimating divergent light with a solid angle as large as possible.
  • the condensing element (Ef) described in this figure is a configuration suitable for satisfying this necessity.
  • the light-collecting element ( Ef) is preferably corrected for chromatic aberration of two colors or three colors. In this way, it is divided into at least three lenses and is designed to correct aberrations using an appropriate glass material. It will be possible.
  • the arrangement pitch in the x direction is not small.
  • the step-like mirrors (Mil, Mi2,..., Mj1, Mj2,...) In which the 45-degree mirrors are arranged with the arrangement interval in the x direction different from the arrangement interval in the z direction are provided. In this way, the arrangement pitch in the z direction of the light beams incident on the dichroic reflection element (M) can be made sufficiently small, so the excitation light provided on the dichroic reflection element (M) is selected.
  • the regions (Pa, Pb,...) For reflective reflection can be merged as described above.
  • the arrangement intervals in the y direction of the light beams incident on the dichroic reflection element (M) are not uniform, and therefore the arrangement intervals in the y direction of the regions (Pa, Pb,...) Are not uniform.
  • the principal ray (Lpil) from the integrated light source (Wi) is reflected by the region (Pa)
  • the arrangement is shifted with respect to the arrangement symmetrical to the z axis,
  • the principal ray (Lpil ′) when it is reflected back from the phosphor (N) passes through a portion where the region (Pa, Pb,...) Is not formed, and thus the remaining excitation light is used. Efficiency is improved.
  • the integrated light sources (Wi1, Wi2) are in contact with each other and the integrated light sources (Wj1, Wj2) are in contact with each other with respect to the integrated light sources (Wi1, Wi2) and the integrated light sources (Wj1, Wj2). If the arrangement interval in the y direction of the light beams incident on the dichroic reflection element (M) cannot be made uniform even if it is adjusted until contact is made, it is made of parallel flat glass as shown by a two-dot chain line in the figure.
  • the beam shift element (Es) is arranged so that the surface thereof is parallel to the z-axis, and the angle is adjusted around the z-axis, whereby the light beam incident on the dichroic reflection element (M) in the y-direction.
  • the beam shift element (Es) is a beam from both the integrated light sources (Wi2, Wj2) or the integrated light sources (Wi1, Wi2,). j1, Wj2) is arranged on the light beam from all.).
  • the integrated light source (Wil, Wi2, Wjl, Wj2) is realized by a commercial product
  • NUBM05 product name “blue laser diode bank” manufactured by Nichia Corporation
  • the collimator lens for making each output beam become a light beam forming an infinite image point is assembled in each semiconductor laser as a standard.
  • the first method for realizing an optical system using the light collection region (Aq) as an exit pupil is performed, the output beam is converted into a light beam that forms an image point of a finite distance at a specified position.
  • a conversion lens may be inserted.
  • the conversion lens is manufactured as a lens array in which the conversion lenses are arranged in a two-dimensional array and integrally molded, similar to the collimator element array (Exy).
  • the left element light source set composed of the integrated light sources (Wi1, Wi2) and the right element light source set composed of the integrated light sources (Wj1, Wj2) are respectively represented by the x-axis and y-axis.
  • the stepped mirrors (Mil, Mi2,..., Mj1) are adjusted accordingly. , Mj2,).
  • the pitch of the step-like mirrors (Mil, Mi2,..., Mj1, Mj2,...) In the z-axis direction is the thickness of the light flux of each element light source (in FIG. 1, the light flux (Fbl, If there is no allowance for the thickness (ie, diameter) of Fb2, etc.
  • the focal length of the collimator elements (the collimator elements (El, E2,%) In FIG. 1) of each element light source may be shortened.
  • FIG. 10 is a diagram showing a simplified form of an embodiment of the multi-wavelength light source of the present invention.
  • beam compressor lenses (Gil, Gi2,..., Gj1, Gj2,...)
  • For reducing the beam thickness may be inserted into the output beams of the integrated light sources (Wi1 ′, Wj1 ′).
  • each of the beam compressor lenses (Gil, Gi2,..., Gj1, Gj2,...) Has a convex spherical surface on the incident side of the beam and a concave spherical surface on the exit side.
  • the lens is constituted by one meniscus lens having an infinite distance
  • two lenses of a convex lens and a concave lens may be arranged confocally.
  • the beam compressor lenses (Gil, Gi2,..., Gj1, Gj2 ,... Also serves as a conversion lens for converting into a light beam that forms an image point of a finite distance at the specified position as described above, the beam compressor lenses (Gil, Gi2,..., Gj1, Gj2,...) It is preferable to provide a finite focal length of an appropriate value, positive or negative, not infinite.
  • the beam compressor lens (Gil, Gi2,..., Gj1, Gj2,%) Is described as being provided for each output beam of the integrated light source (Wi1 ′, Wj1 ′).
  • the beam compressor lens (Gil, Gi2,..., Gj1, Gj2,...) Can be replaced with a cylindrical lens having a generatrix in the y-axis direction.
  • the step-like mirrors (Mil, Mi2,..., Mj1, Mj2,%) Extend in the y-axis direction, and a plurality of beams arranged in the y-axis direction are collectively displayed.
  • the cylindrical lens also has a structure in which the generatrix extends in the y-axis direction, whereby the thickness in the x-axis direction is collectively reduced with respect to a plurality of beams arranged in the y-axis direction. Can be. Even if this state is illustrated, since the beam compressor lens (Gil, Gi2,..., Gj1, Gj2,...) In FIG. To do.
  • the distances to the condensing element (Ef) are not uniform (however, the distance referred to here is, for example, from the output-side main plane of the collimator element of each element light source to the input-side main plane of the condensing element (Ef)) And the distance between them.) Therefore, if the focal length of the conversion lens that is inserted into the light beam from each element light source and converts to a light beam that forms an image point of a finite distance at the specified position is the same regardless of the element light source, The arrangement of the output image points (J1, J2,%) From the optical element (Ef) is perpendicular to the axis of the condensing element (Ef) as shown in FIG. There is a possibility of causing a phenomenon of falling off and tilting.
  • an image point of a finite distance at the specified position is formed according to the distance from each element light source in the integrated light source to the light collecting element (Ef). What is necessary is just to adjust the focal distance of the conversion lens for converting into the light beam which carries out.
  • the light condensing region (Aq) becomes a small region where the optical power is concentrated by a method other than realizing the optical system having the light condensing region (Aq) as the exit pupil described above.
  • a diffusion plate (Bi, Bj) it can be realized by inserting a diffusion plate (Bi, Bj) at the position shown in FIG.
  • the present invention can be used in industries that design and manufacture multi-wavelength light sources using light emitting elements such as semiconductor lasers, such as white light sources that can be used in optical devices such as projectors.

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  • Projection Apparatus (AREA)

Abstract

La présente invention a pour but d'obtenir une efficacité d'arrivée élevée pour exciter une lumière se propageant depuis un élément d'émission de lumière vers un corps fluorescent et une efficacité de couplage de sortie élevée pour une lumière émise vers l'extérieur depuis le corps fluorescent. Une source de lumière multi-longueur d'onde comporte : une source de lumière intégrée, dans laquelle de multiples sources de lumière élémentaires comprenant chacune un élément d'émission de lumière et un élément collimateur sont intégrées côte à côté ; un élément réfléchissant dichroïque, dans lequel des régions qui réfléchissent sélectivement la lumière ayant la même longueur d'onde d'émission que l'élément d'émission de lumière sont disposées de manière sélective aux points où des faisceaux lumineux émis par la source de lumière intégrée frappent ; un élément de condensation destiné à condenser un faisceau lumineux ; un corps fluorescent destiné à absorber la lumière ayant la même longueur d'onde d'émission que l'élément d'émission de lumière en tant que lumière d'excitation et émettant une lumière fluorescente dans une autre largeur de bande de longueur d'onde. L'élément de condensation convertit un faisceau lumineux divergent, mélangé avec la lumière fluorescente émise par une région de condensation sur la surface du corps fluorescent et la lumière d'excitation résiduelle réfléchie par la région de condensation, en un faisceau lumineux qui se propage dans la direction opposée à la direction d'un faisceau lumineux focalisé pour former une image distante. Le faisceau lumineux converti passe à travers l'élément réfléchissant dichroïque et est ainsi distribué vers l'extérieur en tant que faisceau lumineux de sortie mélangé.
PCT/JP2015/080732 2014-11-05 2015-10-30 Source de lumière multi-longueur d'onde et dispositif de source de lumière WO2016072360A1 (fr)

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JP2014-225305 2014-11-05
JP2014225305 2014-11-05
JP2015070871A JP6428437B2 (ja) 2014-11-05 2015-03-31 多波長光源および光源装置
JP2015-070871 2015-03-31

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WO2021084449A1 (fr) * 2019-11-01 2021-05-06 Ricoh Company, Ltd. Dispositif de source de lumière, appareil de projection d'image et système optique de source de lumière

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JP2012004009A (ja) * 2010-06-18 2012-01-05 Sony Corp 照明装置及び画像表示装置
WO2013047542A1 (fr) * 2011-09-26 2013-04-04 日立コンシューマエレクトロニクス株式会社 Dispositif de source de lumière
JP2013178290A (ja) * 2010-06-30 2013-09-09 Jvc Kenwood Corp 光源装置及び照明装置
JP2014075221A (ja) * 2012-10-03 2014-04-24 Mitsubishi Electric Corp 光源装置
WO2014174560A1 (fr) * 2013-04-22 2014-10-30 日立マクセル株式会社 Dispositif de source lumineuse et dispositif d'affichage d'image de type à projection
WO2014174559A1 (fr) * 2013-04-22 2014-10-30 日立マクセル株式会社 Appareil de source de lumière et appareil d'affichage d'image

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JP2011164151A (ja) * 2010-02-04 2011-08-25 Sony Corp 照明装置および投射型映像表示装置
JP2012004009A (ja) * 2010-06-18 2012-01-05 Sony Corp 照明装置及び画像表示装置
JP2013178290A (ja) * 2010-06-30 2013-09-09 Jvc Kenwood Corp 光源装置及び照明装置
WO2013047542A1 (fr) * 2011-09-26 2013-04-04 日立コンシューマエレクトロニクス株式会社 Dispositif de source de lumière
JP2014075221A (ja) * 2012-10-03 2014-04-24 Mitsubishi Electric Corp 光源装置
WO2014174560A1 (fr) * 2013-04-22 2014-10-30 日立マクセル株式会社 Dispositif de source lumineuse et dispositif d'affichage d'image de type à projection
WO2014174559A1 (fr) * 2013-04-22 2014-10-30 日立マクセル株式会社 Appareil de source de lumière et appareil d'affichage d'image

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WO2021084449A1 (fr) * 2019-11-01 2021-05-06 Ricoh Company, Ltd. Dispositif de source de lumière, appareil de projection d'image et système optique de source de lumière

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