WO2016060274A1 - 基板どうしの接合方法、基板接合装置 - Google Patents
基板どうしの接合方法、基板接合装置 Download PDFInfo
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- WO2016060274A1 WO2016060274A1 PCT/JP2015/079446 JP2015079446W WO2016060274A1 WO 2016060274 A1 WO2016060274 A1 WO 2016060274A1 JP 2015079446 W JP2015079446 W JP 2015079446W WO 2016060274 A1 WO2016060274 A1 WO 2016060274A1
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/83053—Bonding environment
- H01L2224/8309—Vacuum
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/83894—Direct bonding, i.e. joining surfaces by means of intermolecular attracting interactions at their interfaces, e.g. covalent bonds, van der Waals forces
- H01L2224/83896—Direct bonding, i.e. joining surfaces by means of intermolecular attracting interactions at their interfaces, e.g. covalent bonds, van der Waals forces between electrically insulating surfaces, e.g. oxide or nitride layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/83908—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector involving monitoring, e.g. feedback loop
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
Definitions
- the present invention relates to a method for bonding substrates and a substrate bonding apparatus.
- mounting technology has been developed for joining electronic components and substrates to each other, and joining substrates provided with electronic circuits and wiring.
- An object to be bonded by such a mounting technique has an electrode electrically connected to an electronic circuit or the like on the bonding surface. The electrodes are joined together to establish an electrical connection between the objects to be joined.
- the wafer when flat wafers are bonded as objects to be bonded, the wafer has a larger bonding surface area than a chip or the like. For this reason, when flat joining surfaces of flat wafers are joined to each other and joined, air may enter between the joining surfaces, resulting in voids, resulting in product defects.
- a technique is used in which, after the wafers are aligned, the center part of the wafers is pressed and bent toward the mating wafer to be bonded.
- the central portion is pressed while holding the outer peripheral portion of the wafer, and the bonding surface of the wafer is bent against the counterpart wafer by bending the central portion so that the central portion is convex toward the counterpart wafer. .
- the bent central portion of the bent wafer hits the bonding surface of the mating wafer.
- the bent wafer is released.
- the bent wafer is restored to the original flat plate shape, and bonded to the mating wafer and the entire bonding surface.
- the bent wafer sequentially contacts the counterpart wafer from the convex central part toward the outer peripheral side. This prevents air from entering between the bonding surfaces of the wafers.
- the center portion of the wafer is pressed against the mating wafer to be bonded and bent, or the bent wafer is released and the wafer is released. While restoring the original flat shape, the wafer may be displaced.
- an object of the present invention is to provide a bonding method and a substrate bonding apparatus for substrates which can prevent the generation of voids between the substrates and bond the substrates with high positional accuracy when bonding the substrates. It is to be.
- a method for bonding a first substrate and a second substrate wherein water or an OH-containing substance is attached to the surfaces of the respective bonding surfaces of the first substrate and the second substrate.
- a step of performing a hydrophilization treatment and arranging the first substrate and the second substrate with the bonding surfaces facing each other, and the first substrate with respect to an outer peripheral portion of the bonding surface
- a step of bending the central portion so as to protrude toward the second substrate and a step of abutting the bonding surface of the first substrate and the bonding surface of the second substrate between the central portions.
- the first substrate is positioned below the second substrate.
- the step of bending the second substrate so that a central portion protrudes toward the first substrate with respect to an outer peripheral portion of the bonding surface is further provided.
- the bonding surface of the first substrate and the bonding surface of the second substrate are butted together,
- the distance between the outer peripheral portion of the first substrate and the outer peripheral portion of the second substrate is reduced in a state in which the distance from each bottom surface of the central portion and the central portion of the second substrate is maintained.
- the bonding surface of the substrate and the bonding surface of the second substrate are butted together and bonded.
- At least one of the first substrate and the second substrate or at least the outer peripheral portion of both are held.
- the first The method further includes a step of aligning the substrate and the second substrate.
- the step of aligning the first substrate and the second substrate includes the bonding surface of the first substrate and the second substrate.
- the positional deviation amount between the first substrate and the second substrate is measured, and the measured positional deviation amount exceeds an allowable error range.
- adjusting the relative position between the first substrate and the second substrate so that the positional deviation amount between the first substrate and the second substrate is small, and the positional deviation amount.
- the measurement of the positional deviation between the first substrate and the second substrate and the adjustment of the relative position between the first substrate and the second substrate are repeated. .
- the step of measuring a positional deviation amount between the first substrate and the second substrate includes the bonding surface of the first substrate and the second substrate.
- the substrate is bonded to the bonding surface at a pressure or time that maintains the non-bonded state between the central portions.
- the first substrate and At least one or both of the second substrates are flattened and abutted against the bonding surface of the opposing substrate.
- the bonding method further includes a bonding step after the butting step in which the bonding surface of the first substrate and the bonding surface of the second substrate are all butted.
- the bonding step the first substrate and the second substrate are pressurized and bonded.
- the first substrate and the second substrate are heated and bonded.
- particles having kinetic energy are added to the first substrate and the first substrate.
- a surface activation process is performed in which the second substrate collides with the surface of each bonding surface.
- the hydrophilization treatment is performed by attaching gaseous water to the bonding surface.
- the hydrophilization treatment is performed in a vacuum, and water or an OH-containing substance is adhered to the bonding surface without being exposed to the atmosphere.
- the second substrate before the step of aligning the first substrate and the second substrate, the second substrate is placed on the outer peripheral portion of the bonding surface. Is further provided with a step of bending the central portion so as to protrude toward the first substrate.
- the step of evacuating the atmosphere around the first substrate and the second substrate prior to releasing the bent first substrate Further prepare.
- the first substrate holding unit that holds the first substrate and the second substrate are held in a state where the bonding surface of the second substrate faces the bonding surface of the first substrate.
- a second substrate holding unit, a hydrophilization treatment means for adhering water or an OH-containing substance to each bonding surface of the first substrate and the second substrate, and the first substrate, the outer periphery of the bonding surface A first protrusion mechanism that bends the central portion to protrude toward the second substrate side with respect to the portion, and a control unit, wherein the control unit causes the first substrate to move the first substrate.
- a substrate bonding apparatus characterized in that the distance between the outer peripheral portion of the second substrate is reduced and the bonding surface of the first substrate and the bonding surface of the second substrate are all butted together.
- the first substrate holding portion is positioned below the second substrate holding portion.
- the second protrusion that bends the second substrate so that a central portion protrudes toward the first substrate with respect to an outer peripheral portion of the bonding surface.
- a mechanism is further provided, and the second substrate is bent so that a central portion protrudes toward the first substrate with respect to an outer peripheral portion of the bonding surface.
- the distance between the center portion of the first substrate and the bottom surface of the center portion of the second substrate is maintained.
- the distance between the outer peripheral portion and the outer peripheral portion of the second substrate is shortened, and the bonding surface of the first substrate and the bonding surface of the second substrate are butted together.
- one of the protrusion mechanisms is an pressure-controlled actuator, and the other of the protrusion mechanisms is an actuator whose protrusion distance is numerically controlled.
- the first substrate holding mechanism or the second substrate holding portion includes the first substrate holding mechanism that holds the first substrate and the second substrate. It further includes at least one or both of the second substrate holding mechanisms for holding.
- the first substrate holding mechanism or the second substrate holding mechanism holds only the outer peripheral portion of the substrate.
- the first substrate holding mechanism or the second substrate holding mechanism is an electrostatic chuck.
- the first substrate holding mechanism or the second substrate holding mechanism is a vacuum suction method, and holds the peripheral portion of the substrate of the substrate holding portion.
- the groove and the suction groove that holds the central portion of the substrate are separated.
- the bonding apparatus further includes an alignment unit that aligns the first substrate and the second substrate, and the bonding surface of the first substrate and the bonding surface The first substrate and the second substrate are aligned by the alignment portion before the bonding surface of the second substrate is abutted and bonded to the entire surface.
- a holding surface that holds the first substrate is formed on the first substrate holding portion, and a central portion is formed on the second substrate side by the protruding portion. And a pressing member that bends to protrude.
- the bonding apparatus further includes a chamber that evacuates an atmosphere around the first substrate and the second substrate.
- the alignment unit butt-joins the bonding surface of the first substrate and the bonding surface of the second substrate with each other between the central portions.
- the positional deviation amount between the first substrate and the second substrate is measured, and when the measured positional deviation amount exceeds an allowable error range, the first substrate and the second substrate Adjusting the relative position between the first substrate and the second substrate so that the positional deviation amount between the second substrate and the second substrate is small, and until the positional deviation amount falls within an allowable error range, the first substrate. And the measurement of the positional deviation between the second substrate and the adjustment of the relative position between the first substrate and the second substrate are repeated.
- the first substrate and the At least one or both of the second substrates are flattened and abutted against the joint surface of the opposing substrate.
- FIG. 2 is a schematic perspective view showing the vicinity of a stage and a head. It is a schematic front sectional view showing a configuration of a stage holding a substrate. It is a rough front sectional view showing a state where a substrate is bent by a protruding mechanism provided in the stage. It is a schematic front view which shows the structure of the holding mechanism provided in the stage. It is a schematic front sectional view showing a state in which both substrates are bent by a protruding mechanism provided in the stage. It is a schematic front sectional view showing another example of the protruding mechanism.
- FIG. 1 is a front view showing a schematic structure inside a substrate bonding apparatus 100 according to an embodiment of the present invention.
- FIG. 2 is a schematic perspective view showing the vicinity of the stage and the head.
- FIG. 3 is a front sectional view showing the configuration of the stage holding the substrate.
- FIG. 4 is a front sectional view showing a state where the substrate is bent by the protruding mechanism provided in the stage.
- FIG. 5 is a front sectional view showing another example of the protruding mechanism.
- directions and the like are shown using an XYZ orthogonal coordinate system for convenience.
- the substrate bonding apparatus 100 includes a chamber 200, a substrate (second substrate) 301 that is an object to be bonded, and a substrate support unit 400 that supports the substrate (first substrate) 302 so as to face each other. , A position measuring means (positioning unit) 500 for measuring the relative positional relationship between the substrates 301 and 302, and a hydrophilic treatment means 600 for performing a surface activation process on the surfaces of the substrates 301 and 302 that are supported to face each other. And a controller (control unit) 700 that controls the operation of each unit of the substrate bonding apparatus 100.
- the chamber 200 has a hollow box shape, and stages 401 and 402 of a substrate support means 400 described later are provided therein.
- the chamber 200 includes a vacuum pump 201 as a evacuation unit for evacuating the inside.
- the vacuum pump 201 is connected to the chamber 200 via the exhaust pipe 202.
- the exhaust pipe 202 is provided with an exhaust valve 203 that opens and closes the exhaust pipe 202.
- the exhaust pipe 202 is opened and the vacuum pump 201 is operated to discharge the gas in the chamber 200 to the outside through the exhaust pipe 202.
- the inside of the chamber 200 is depressurized and evacuated, and the atmosphere in the chamber 200 is brought into a vacuum or low pressure state.
- the exhaust valve 203 can adjust the exhaust flow rate in the exhaust pipe 202 by changing the opening / closing amount thereof, and can adjust the target vacuum degree in the chamber 200.
- the substrate support means 400 includes a stage (second substrate holding unit) 401, a stage (first substrate holding unit) 402 for supporting the substrates 301 and 302, stage driving mechanisms 403 and 404 for moving the respective stages, and a substrate.
- Substrate heating means 420 for heating.
- Stages 401 and 402 are provided to face each other in the vertical direction (Z direction).
- the upper surface of the lower stage 401 is a support surface of the substrate 301.
- the lower surface of the upper stage 402 is a support surface of the substrate 302.
- the support surfaces of these stages 401 and 402 are arranged in parallel to each other.
- the stages 401 and 402 may have a holding mechanism such as a mechanical chuck, an electrostatic chuck, or a vacuum chuck on each support surface.
- This holding mechanism can switch between a fixed state of the substrates 301 and 302 to the support surface and an open state from the fixed state of the substrates 301 and 302 to the support surface.
- the lower stage 401 includes a stage drive mechanism 403.
- the stage drive mechanism 403 moves the lower stage 401 in the XY ⁇ direction within a horizontal plane orthogonal to the vertical direction (Z direction) in which the stage 401 and the stage 402 face each other.
- the upper stage 402 includes a Z-direction lifting drive mechanism 406 and a Z-axis rotation drive mechanism 407 as the stage drive mechanism 404.
- the stage drive mechanism 404 can further include an XY direction drive mechanism 405.
- the Z-direction lifting / lowering drive mechanism 406 moves the stage 402 in the Z direction, thereby moving the stages 401 and 402 closer to or away from each other along the Z direction.
- the Z-direction lift drive mechanism 406 brings the two stages 401 and 402 close to each other, thereby bringing the joint surfaces facing each other of the held substrates 301 and 302 into contact with each other, and further pressurizing the substrates 301 and 302 that are in contact with each other. be able to.
- the Z direction elevating drive mechanism 406 is provided with a pressure sensor 408 for measuring a force related to the Z axis.
- the pressure sensor 408 detects the pressure acting on the bonding surfaces of the substrates 301 and 302 that are pressed against each other by the Z-direction lift drive mechanism 406.
- a load cell can be used as the pressure sensor 408.
- the central portions of the substrates 301 and 302 are brought into contact with each other by the pressure that maintains the non-bonded state by the Z-direction lifting drive mechanism 406 or the distance between the central portion of the substrate 301 and the central portion of the substrate 302 is maintained.
- the distance between the outer peripheral portion of the substrate 301 and the outer peripheral portion of the substrate 302 can be reduced, and the bonding surface of the substrate 301 and the bonding surface of the substrate 302 plate can be moved so as to abut on the entire bonding surface.
- the XY direction drive mechanism 405 can slide the stage 402 in the XY direction orthogonal to the Z direction where the stage 401 and the stage 402 face each other.
- a plurality of, for example, three projecting mechanisms 412 are provided in the vicinity of the outer periphery of the stage 402 at intervals in the circumferential direction. It has been.
- the protruding mechanisms 412 are independently extended and contracted in the Z direction. By these protrusion mechanisms 412, the distribution of force or pressure acting on the bonding surfaces of the substrates 301 and 302 is finely or accurately adjusted.
- a stage pressure sensor 411 is provided between each protrusion mechanism 412 and the XY drive mechanism 405.
- the operation of the protruding mechanism 412 is controlled by a control unit (not shown) according to the distribution of force or pressure acting on the bonding surfaces of the substrates 301 and 302 measured by the plurality of stage pressure sensors 411.
- the stage pressure sensor 411 and the protrusion mechanism 412 further finely adjust the distribution of pressure acting on the substrates 301 and 302 that are pressed against each other by the Z-direction lift drive mechanism 406, and extend over the joint surface. It can be a uniform or predetermined distribution.
- the Z axis rotation drive mechanism 407 can rotate the stage 402 around the Z axis.
- the rotational drive mechanism 407 can control the rotational position ⁇ around the Z axis with respect to the stage 401 with respect to the stage 401, thereby controlling the relative positions of both substrates 301 and 302 in the rotational direction.
- control unit Prior to releasing the bent first substrate, the control unit can evacuate the atmosphere around the first substrate and the second substrate in the chamber to bond them together without voids due to air entrapment. It becomes possible.
- the microelectrode portion made of Cu is subjected to CMP polishing in a dented state, and the insulating layer is first bonded at a low temperature of about 150 ° C. Then, there is a technique in which the Cu electrodes are expanded by heating up to about 350 ° C. to fill the gaps and diffusion bonding the Cu members.
- the gap between the Cu electrodes is filled with the atmosphere, and the surface of the Cu electrode is oxidized in the heating and expansion process, which is not preferable for joining.
- the air in the gap remains void as it has nowhere to go.
- the gap is vacuumed by bonding in vacuum, so that oxidation can be suppressed and generation of voids can also be suppressed.
- the timing of evacuation it is possible to correct misalignment because there are many water molecules in the contact part by securing the atmospheric environment in the state where the center part is in contact, but it is a short time within a few minutes.
- the degree of vacuum is about several hundred Pa, it is possible to leave water molecules at the interface to some extent even if vacuuming is performed from the beginning.
- the entire surface can be secured in a vacuum atmosphere while interposing water molecules. If position correction after contact is not required, a vacuum may be drawn from the beginning.
- the alignment process between the first substrate and the second substrate may be performed before releasing the bent substrate or after evacuation.
- the time required for alignment is several seconds to several tens of seconds, and does not affect the bonding of the substrates.
- a protruding mechanism 430 that can be projected and retracted toward the upper stage 402 side is built in the center of the support surface that supports the substrate 301.
- the protruding mechanism 430 can employ a cylinder structure or an electromagnetic mechanism. It is preferable that the protrusion mechanism 430 has at least a force to bend the substrate 301 and has a function of moving in the direction opposite to the protruding direction when receiving a force in a direction opposite to the protruding direction for a certain amount.
- the applied pressure can be changed by changing the air pressure supplied into the cylinder.
- the applied pressure can be changed by changing the current value.
- a voice coil motor as the actuator constituting the protruding mechanism.
- the voice coil motor is composed of a combination of a magnet and a coil, and can control the pressure by a current flowing through the coil, and can also control the position by placing a sensor that can read the position outside.
- pressure control and position control can be performed with a single actuator.For example, if the position deviates more than specified during pressurization control, switch to position control and within the specified range. It is also possible to combine pressure control and position control, such as regulating the position.
- the protrusion mechanism is pushed down by bringing the substrates closer to each other by the vertical movement axis between the substrates of the head or stage, for example, the Z axis in this embodiment, and the outer peripheral portion. , And the contact area can be increased from the center to the outer periphery, following the other flat substrate.
- the speed of wetting and spreading can be controlled by numerically controlling the distance between the substrates.
- the wetting speed is different, and the conventional method of inserting the claw between the wafers and pulling it out and dropping it naturally causes voids, so speed control is an effective method.
- the distance from the bottom surface of each substrate to the center portion can be expanded and contracted according to the Z-axis movement of the head.
- the contact area can be increased to the outer peripheral portion by moving the outer peripheral portion closer to the outer peripheral portion while keeping the same up and down.
- the alignment mark position of the substrate on one side is also shifted inward, resulting in poor alignment accuracy and distortion during bonding.
- the alignment mark position can be at the same position, and bonding can be done without causing distortion at the time of joining, which is an effective method compared to the conventional one-side protruding mechanism. .
- the amount of protrusion that required 20 ⁇ m on one side can be accommodated at 10 ⁇ m on both sides, resulting in less distortion.
- this method is particularly effective in the field of simultaneously bonding a microelectrode called a hybrid bonding that requires submicron accuracy and a peripheral insulating layer, for example, a CMOS image sensor, a memory, an arithmetic element, and a MEMS.
- both end marks of the substrate are read with an image processing device, and the amount of displacement is corrected and then moved for correction. If water molecules exist at the interface between the two substrates and the applied pressure is small, although the correction movement can be performed in the contact state, when the contact area is large, the protrusion mechanism may be pulled back once to provide a correction movement with a gap between both substrates. Further, it is possible to provide a gap by moving the Z-axis without changing the protruding mechanism. Moreover, a clearance gap can also be provided using both.
- the protrusion mechanism 430 when the protrusion mechanism 430 is protruded, the outer peripheral portion 301s of the substrate 301 receives a downward force due to its own weight, and bends so that the central portion 301c of the substrate 301 is convex upward.
- the pressing by the protruding mechanism 430 is released, or when the substrate 301 is abutted against the opposing substrate 302 and receives a certain force or more, the substrate 301 is restored to the original flat plate shape.
- the top portion 430a that contacts the substrate of the protruding mechanism 430 may have a curved shape as shown in FIG. Thereby, a board
- the stages 401 and 402 may have a holding mechanism 440 such as a mechanical chuck, an electrostatic chuck, or a vacuum chuck on each support surface.
- This holding mechanism can switch between a fixed state of the substrates 301 and 302 to the support surface and an open state from the fixed state of the substrates 301 and 302 to the support surface.
- the holding mechanism may be divided into a plurality of regions on the surfaces of the stages 401 and 402 as shown in FIG.
- two holding mechanisms an outer holding mechanism 440a and an inner holding mechanism 440b
- the outer holding mechanism 440a and the inner holding mechanism 440b can be controlled independently, and the inner holding mechanism 440b is opened while the outer holding mechanism 440a holds the outer peripheral portion of the substrate, and the Z-axis is formed in the central portion of the substrate. It is possible to avoid receiving force in the direction.
- holding mechanisms 440 When a plurality of holding mechanisms 440 are provided, for example, holding mechanisms having different principles and functions, such as an electrostatic chuck and a vacuum chuck, may be used in combination.
- electrostatic chuck electrodes and vacuum chuck suction grooves may be provided alternately in the radial direction of the stage.
- a mechanism similar to the protruding mechanism 430 may be provided on the upper stage 402 side. As shown in FIG. 6, by adopting a configuration in which the substrates 301 and 302 are bent by both the stages 401 and 402, the amount of bending of the substrate is reduced, and the substrate can be aligned with less error.
- the holding mechanism 440 When the upper substrate 302 is bent, it is preferable to hold only the outer peripheral portion 302 s of the substrate 302. In this case, it is preferable that only the outer peripheral portion 302 s of the substrate 302 is held by the holding mechanism 440 because the substrate is bent into a desired shape even if the force pressing the substrate by the protruding mechanism 430 is weak.
- the suction grooves provided on the stage may be separated by the location of the substrate.
- the suction groove for holding the peripheral portion of the substrate and the suction groove for holding the central portion of the substrate may be separated and each may operate separately. Thereby, only the outer peripheral part of a board
- the central part is first vacuum-adsorbed, and when it is bent, the vacuum is broken to atmospheric pressure.
- the substrate can be easily peeled off by releasing pressurized air for a few seconds.
- the substrate is difficult to peel off at the mirror surface, it is possible to make it easy to peel off while maintaining the height accuracy by intentionally roughening the holding portion contact surface.
- the holding mechanism 440 when the substrate holding mechanism 440 is of an electrostatic chuck type, the holding mechanism is divided into a plurality of areas on the surfaces of the stages 401 and 402 as shown in FIG. May be.
- two different patterns that can be individually controlled are provided, that is, the outer holding mechanism 440a and the inner holding mechanism 440b.
- the outer holding mechanism 440a and the inner holding mechanism 440b can be controlled independently, and the inner holding mechanism 440b is opened while the outer holding mechanism 440a holds the outer peripheral portion of the substrate, and the Z-axis is formed in the central portion of the substrate. It is possible to avoid receiving force in the direction.
- the vacuum suction groove in the central portion is used together to break the vacuum to atmospheric pressure.
- the substrate can be easily peeled off by releasing pressurized air for a few seconds.
- the holding mechanism may be divided into three and one or more grooves may be inserted between the central portion and the outer peripheral portion to provide an air release layer.
- both the leaks are absorbed by the air release layer between the central part and the central part even when the central part releases pressurized air while maintaining the vacuum at the outer peripheral part. Even if the holding is peeled off or air is released, it is possible to prevent the central portion from being bent due to being sucked by the outer peripheral portion, which is effective.
- the adsorbing part and the atmosphere releasing part are not limited to the grooves, and may be configured to support a plurality of points in the plane.
- a pressing plate 431 having a thin plate shape and flexibility may be provided on a support surface that supports the substrate 302.
- the pressing plate 431 may have a holding mechanism (not shown) such as a vacuum suction method, a mechanical chuck, or an electrostatic chuck on a support surface that supports the substrate 302.
- the pressing plate 431 is elastically deformed and bent so that the central portion 431 c is convex downward.
- the pressing plate 431 is bent so as to protrude downward, whereby the central portion 302c of the substrate 302 on which the outer peripheral portion 302s is held by the holding mechanism (not shown) is directed toward the lower stage 401. Pressed. Then, the substrate 302 is elastically deformed along the pressing plate 431, and is bent so that the central portion 302c is convex downward with respect to the outer peripheral portion 302s.
- the entire substrate 302 is pressed and bent, so that the substrate 302 can be prevented from being distorted.
- the pressing by the protruding mechanism 430 is released, the substrate 302 is restored to the original flat shape.
- the substrate heating means 420 includes heaters 421 and 422 built in stages 401 and 402.
- the heaters 421 and 422 are configured to generate Joule heat with, for example, an electric heater.
- the heaters 421 and 422 conduct heat through the stages 401 and 402 to heat the substrates 301 and 302 supported by the stages 401 and 402.
- Stages 401 and 402 and heaters 421 and 422 may be formed of separate members.
- the stages 401 and 402 including the holding mechanism 440 may be overlapped with the heaters 421 and 422 including the heater wiring. An example is shown in FIG.
- It can also be joined as it is by heating with a heater of the joining device, but it can also be taken out by bonding and removing it in a batch furnace or hot plate in a free state without pressure and annealing at 150 ° C. for several hours. it can.
- the position measuring unit 500 measures the relative positional relationship between the substrates 301 and 302.
- the position measuring means 500 includes a window 503 formed in the chamber 200, a light source (not shown), a plurality of cameras 501 and 502, and mirrors 504 and 505.
- Light emitted from a light source (not shown) passes through mirrors 504 and 505 and a window 503 and strikes portions (not shown) provided with marks on the substrates 301 and 302.
- the cameras 501 and 502 capture an image of reflected light from a portion (not shown) provided with marks on the substrates 301 and 302 through a window 503 and mirrors 504 and 505.
- the cameras 501 and 502 each have a coaxial illumination system.
- the light source may be provided on the upper side of the stage 401 or may be provided so as to emit light from the cameras 501 and 502 side so as to travel along the optical axis.
- a wavelength region for example, the substrate can be made of silicon that passes through portions where the marks are provided on the substrates 301 and 302 and portions where the light should pass such as both stages. If it is, infrared light) is used.
- the substrate bonding apparatus 100 can measure and align the relative positions of the substrates 301 and 302 using the position measuring means 500, the driving mechanisms 403 to 407, and the controller 700 connected thereto.
- the locations where light for measurement passes are defined on the substrates 301 and 302, and a mark is attached here to reflect, block or refract part of the passing light.
- the mark appears dark in the captured image that is a bright field image.
- the mark appears bright in a dark image.
- a plurality of marks are provided on the substrate, for example, at two opposite corners of the substrate. Thereby, the absolute position of the substrate 301 or 302 can be specified from the positions of the plurality of marks.
- corresponding marks are attached to corresponding portions of the substrates 301 and 302, for example, positions overlapping in the Z direction during bonding. Both of the marks on the substrates 301 and 302 are observed within the same field of view, and the relative shift amounts in the X direction and the Y direction are measured. By measuring the relative displacement amounts in the X direction and the Y direction at a plurality of locations, the relative displacements ( ⁇ X, ⁇ Y, ⁇ ) of the substrates 301 and 302 in the X direction, Y direction, and ⁇ direction are calculated. Can do.
- the position shift amount measuring operation in the position measuring means 500 can be executed when the substrates 301 and 302 are in a non-contact state or a contact state.
- FIG. 9 is a diagram showing two alignment marks attached to one substrate.
- FIG. 10 is a diagram showing two alignment marks attached to the other substrate.
- FIG. 11 is a diagram showing an alignment mark photographed image regarding both substrates.
- FIG. 12 is a diagram showing a state in which a set of marks are displaced from each other.
- alignment marks for alignment are attached to both the substrates 301 and 302, respectively.
- two alignment marks MK1a and MK1b (FIG. 9) are provided on one substrate 301
- two alignment marks MK2a and MK2b are provided on the other substrate 302.
- the position measuring means 500 uses a captured image (image data) GA related to transmitted light and reflected light of illumination light emitted from the respective coaxial illumination systems of the cameras 501 and 502 in a state where both the substrates 301 and 302 face each other.
- the positions of both substrates 301 and 302 can also be recognized.
- the positional deviation measurement for the alignment operation (fine alignment operation) of both the substrates 301 and 302 is performed by the cameras 501 and 502 with two sets of alignment marks (MK1a and MK2a) attached to both the substrates 301 and 302. ), (MK1b, MK2b).
- the position measuring means 500 acquires an image GAa including the marks MK1a and MK2a and an image GAb including the marks MK1b and MK2b (FIG. 11), and sets each of the sets attached to the substrates 301 and 302 based on the images GAa and GAb.
- the positions of the marks (MK1a, MK2a) and (MK1b, MK2b) are recognized.
- the controller 700 Based on the relative positions of the recognized marks (MK1a, MK2a) and (MK1b, MK2b), the controller 700 obtains positional deviation amounts ( ⁇ xa, ⁇ ya) between the marks (MK1a, MK2a) and (MK1b, MK2b). (FIG. 12).
- FIG. 11 shows a state in which each set of marks (MK1a, MK2a), (MK1b, MK2b) is in a substantially desired position with their centers overlapping each other
- FIG. 12 shows a set of marks (MK1a, MK2a). ) Shows a state of being deviated from the desired position.
- each image GAa, GAb (image GAa is shown in FIG. 12) is positioned for each set of marks based on the geometric relationship of the marks on the substrates 301, 302. Deviation amounts ( ⁇ xa, ⁇ ya) and ( ⁇ xb, ⁇ yb) are obtained.
- the controller 700 detects X from the desired positions of the substrates 301 and 302 based on the positional deviation amounts ( ⁇ xa, ⁇ ya) and ( ⁇ xb, ⁇ yb) of the two sets of marks (MK1a, MK2a) and (MK1b, MK2b).
- a relative deviation amount ⁇ D (specifically, ⁇ x, ⁇ y, ⁇ ) in the direction, the Y direction, and the ⁇ direction is calculated.
- the relative deviation amount ⁇ D corresponds to the correction movement amount by the subsequent correction movement.
- the controller 700 finally adjusts the substrates 301 and 302 by a correction amount ⁇ D ( ⁇ x, ⁇ y, ⁇ ) corresponding to the relative deviation amount ⁇ D ( ⁇ x, ⁇ y, ⁇ ) between the substrates 301 and 302.
- the path of the correction movement that moves is calculated.
- the controller 700 instructs the drive mechanisms 403 to 407 of the stages 401 and 402 to move both the substrates 301 and 302 according to the calculated correction path.
- the correction movement is performed so that the relative deviation amount ⁇ D is zero or reduced.
- the drive mechanism is such that the stage 402 that supports the substrate 302 finally moves by a correction amount ( ⁇ D) relative to the stage 401 that supports the substrate 301.
- 403 and 404 are controlled.
- the driving mechanisms 403 and 404 drive the two translational directions (X direction and Y direction), the rotational direction ( ⁇ direction), and the stage 402.
- the position shift amount ⁇ D is corrected.
- the correction movement is considered to be performed in a state where the bonding surfaces of the substrates are separated from each other and in a state where they are in contact with each other. Each correction movement will be described below.
- the positional deviation amount ⁇ D (specifically, ⁇ x, ⁇ y, ⁇ ) in the plane (horizontal plane) perpendicular to the vertical direction (Z direction) is measured, and an alignment operation (correction is performed for the positional deviation amount ⁇ D). Fine alignment operation) is executed.
- the present invention is not limited thereto.
- the captured images GAa and GAb may be sequentially captured and acquired by moving one camera in the X direction and / or the Y direction.
- each set of marks was imaged simultaneously on the same optical axis, the present invention is not limited to this.
- two sets (a total of four) cameras arranged for the respective substrate positions may be used. If the positional relationship of the optical axes of the cameras is known, each of the corresponding marks (MK1a, MK2a) is imaged by each camera and then combined to obtain a substantially joined position in the translation direction. It can be moved and positioned.
- the substrate bonding apparatus 100 includes hydrophilic treatment means 600.
- the hydrophilic treatment means 600 of the substrate bonding apparatus 100 shown in FIG. 1 includes an activation processing unit 610 that activates the bonding surfaces of the substrates 301 and 302, and a hydrophilic treatment that hydrophilizes the activated bonding surfaces of the substrates 301 and 302. And a processing unit 620.
- the activation processing unit 610 removes the surface layer by causing a phenomenon (sputtering phenomenon) in which particles having a predetermined kinetic energy collide with each other in a vacuum to physically blow off the material forming the bonding surface. be able to.
- a phenomenon sputtering phenomenon
- the surface activation treatment not only the surface layer is removed to expose the nascent surface of the substance to be bonded, but also the crystal structure near the exposed nascent surface is collided with particles having a predetermined kinetic energy. It is thought that there is also an effect of disturbing and amorphizing.
- the amorphized new surface has a higher surface area at the atomic level and a higher surface energy, it is considered that the number of hydroxyl groups (OH groups) per unit surface area to be bonded in the subsequent hydrophilization treatment is increased.
- OH groups hydroxyl groups
- the hydrophilization treatment following the surface activation treatment according to the bonding method of the invention is fundamentally different from the conventional hydrophilization treatment in this respect.
- atoms in the vicinity of the nascent new surface that are disordered due to the crystal structure are easily diffused with relatively low thermal energy during the heat treatment during the main bonding, realizing a main bonding process at a relatively low temperature. I think it can be done.
- a rare gas or an inert gas such as neon (Ne), argon (Ar), krypton (Kr), or xenon (Xe) can be used. Since these rare gases have a relatively large mass, it is considered that a sputtering phenomenon can be efficiently generated and the crystal structure of the nascent surface can be disturbed.
- oxygen ions As the particles used for the surface activation treatment, oxygen ions, atoms, molecules, and the like may be employed. By performing the surface activation treatment using oxygen ions or the like, it is possible to cover the nascent surface with an oxide thin film after removing the surface layer.
- the oxide thin film on the nascent surface is believed to enhance the efficiency of hydroxyl (OH) group bonding or water attachment in subsequent hydrophilization treatments.
- OH hydroxyl
- the oxide thin film formed on the nascent surface is relatively easily decomposed during the heat treatment in the main bonding.
- the kinetic energy of the particles colliding with the surface-activated joint surface is 1 eV (electron volts) to 2 keV. It is considered that the above kinetic energy efficiently causes a sputtering phenomenon in the surface layer.
- a desired value of kinetic energy can also be set from the above kinetic energy range according to the thickness of the surface layer to be removed, the properties such as the material, the material of the new surface, and the like.
- a predetermined kinetic energy can be given to the particles that collide with the surface-activated joint surface by accelerating the particles toward the joint surface.
- a predetermined kinetic energy can be given to the particles using a plasma generator.
- a plasma generator By applying an alternating voltage to the bonding surface of the substrate, a plasma containing particles is generated around the bonding surface, and the cations of the ionized particles in the plasma are accelerated toward the bonding surface by the voltage.
- given kinetic energy is given. Since the plasma can be generated in an atmosphere with a low degree of vacuum of about several pascals (Pa), the vacuum system can be simplified and the steps such as evacuation can be shortened.
- the particle beam source operates in a relatively high vacuum, such as 1 ⁇ 10 ⁇ 2 Pa (pascal) or 1 ⁇ 10 ⁇ 5 Pa or less, so unnecessary oxidation or renewal of the regenerated surface after the surface activation treatment is performed. Impurities can be prevented from adhering to the surface. Furthermore, since the particle beam source can apply a relatively high acceleration voltage, high kinetic energy can be imparted to the particles. Therefore, it is considered that the removal of the surface layer and the amorphization of the new surface can be performed efficiently.
- the plasma generator operates at 100 W and generates plasma of nitrogen (N 2 ), oxygen (O 2 ), and argon (Ar) as a hydrophilic treatment, and this plasma is applied to the bonding surface for about 30 seconds. If used to irradiate, treatment for hydrophilization can be performed.
- the plasma generator may be installed separately from the bonding apparatus so as to connect in the vacuum or handle the atmosphere once.
- Neutral atoms or ions can also be used for the particles used for surface activation.
- a predetermined kinetic energy can be given to the particles using a particle beam source such as a neutral atom beam source or an ion beam source (ion gun) disposed at a position separated from the bonding surface.
- the particles to which a predetermined kinetic energy is applied are emitted from the particle beam source toward the bonding surface of the substrate.
- nitrogen (N 2 ), oxygen (O 2 ), argon (Ar), or the like may be used as a reaction gas.
- a fast atom beam source As the neutral atom beam source, a fast atom beam source (FAB, Fast Atom Beam) can be used.
- FABs Fast atom beam sources
- FABs typically generate a plasma of gas, apply an electric field to the plasma, extract the cations of particles ionized from the plasma, and pass them through an electron cloud. It has the composition which becomes.
- the power supplied to the fast atom beam source (FAB) may be set to 1.5 kV (kilovolt), 15 mA (milliampere), or 0.1 W You may set to the value between (watt) and 500W (watt).
- a fast atom beam source FAB
- a fast atom beam source FAB
- 100 W watts
- 200 W watts
- a fast atom beam of argon (Ar) for about 2 minutes the oxide, contaminants, etc. (surface) Layer) can be removed to expose the nascent surface.
- the ion beam source (IG) may be used to operate at 110 V, 3 A, for example, to accelerate argon (Ar) and irradiate the bonding surface for about 600 seconds.
- the particles used for surface activation may be neutral atoms or ions, may be radical species, and may be a particle group in which these are mixed.
- the removal rate of the surface layer can vary. Therefore, it is necessary to adjust the treatment time required for the surface activation treatment. For example, the presence of oxygen and carbon contained in the surface layer is confirmed using surface analysis methods such as Auger Electron Spectroscopy (AES, Auger Electron Spectroscopy) and X-ray Photoelectron Spectroscopy (XPS, X-ray Photo Electron Spectroscopy). You may employ
- Auger Electron Spectroscopy Auger Electron Spectroscopy
- XPS X-ray Photoelectron Spectroscopy
- the irradiation time of the particles may be set longer than the time necessary for removing the surface layer and exposing the new surface.
- the lengthening time may be set to 10 to 15 minutes, or 5% or more of the time required for removing the surface layer and exposing the new surface.
- the time for making the bonding surface amorphous in the surface activation treatment may be appropriately set according to the type and nature of the material forming the bonding surface and the irradiation conditions of particles having a predetermined kinetic energy.
- the kinetic energy of the irradiated particles is set to be 10% or more higher than the kinetic energy necessary for removing the surface layer and exposing the new surface. Good.
- the kinetic energy of the particles for making the bonding surface amorphous in the surface activation treatment may be appropriately set depending on the type and property of the material forming the bonding surface and the irradiation conditions of the particles.
- the “amorphized surface” or “surface with disordered crystal structure” specifically includes an amorphous layer whose presence has been confirmed by measurement using a surface analysis technique or a layer with a disordered crystal structure, This is a conceptual term that expresses the state of the crystal surface assumed when the particle irradiation time is set to be relatively long or the particle kinetic energy is set to be relatively high. It includes a surface in which the presence of an amorphous layer or a surface having a disordered crystal structure is not confirmed by the measurement used. Also, “amorphize” or “disturb the crystal structure” conceptually represents the operation for forming the amorphized surface or the surface in which the crystal structure is disturbed.
- the Si particle beam can be emitted simultaneously with the Ar particle beam by interposing a material containing Si in the housing.
- the interface is doped with Si, an interface with more active Si is formed, and more OH groups are formed when the hydrophilic treatment is performed, thereby increasing the strength. This is particularly effective for increasing the bonding strength in a vacuum.
- the bonding strength of the Si wafer with oxide film in vacuum is 1.5 J / m 2 without the Si plate.
- the strength is increased to a bulk breakdown of 2.5 J / m 2 or more.
- the particle beam treatment by FAB or IG may be transported in the atmosphere or connected as a separate device in addition to being arranged in the joining device.
- the hydrophilic treatment unit 620 bonds a hydroxyl group (OH group) to the bonding surface of the substrates 301 and 302 cleaned or activated by the activation processing unit 610.
- the hydrophilic treatment by the hydrophilic treatment unit 620 is performed by supplying water (H 2 O) around the bonding surfaces of the surface activated substrates 301 and 302 in the chamber 200. Therefore, the hydrophilization processing unit 620 includes a water gas generator 621, a valve 622, and a water gas supply pipe 623.
- the supply of water is performed by introducing, for example, gaseous water (H 2 O) into the atmosphere around the surface activated bonding surface.
- Gaseous water is generated by bubbling the argon (Ar) carrier gas through the water gas generator 621 in the form of bubbles.
- Gaseous water is mixed with the carrier gas, controlled to a desired flow rate by the valve 622, and introduced into the chamber 200 through the water gas supply pipe 623.
- the carrier gas at this time is not limited to argon (Ar), and may be nitrogen (N 2 ), helium (He), oxygen (O 2 ), or the like.
- water may be water vapor, or may be introduced into the chamber 200 by spraying liquid water in a mist form.
- radicals, ionized OH groups, or the like may be attached.
- the substrate may be cooled in order to allow water to adhere to the bonding surface of the substrate, and the bonding apparatus of this embodiment may include a cooling device for this purpose. Even when the environmental humidity is about 50%, the humidity of the substrate surface can be raised to about 85 to 100% by cooling the substrate.
- water In the hydrophilization treatment, water, hydroxide, hydroxide ion (OH ⁇ ), hydroxyl radical ( ⁇ OH), or a substance represented by OH is formed on the bonding surface that has been subjected to the surface activation treatment.
- OH-containing substances such as ions and radicals (hereinafter also referred to as “water”) are attached to form a layer terminated with a hydroxyl group (OH group) (M—OH) on the bonding surface. Is done.
- water or OH-containing substance the substance to be attached to the bonding surface subjected to the surface activation treatment
- water etc. these are collectively called “water etc.”, or more simply “water”.
- water H 2 O
- the hydrophilization process can be controlled by controlling the humidity of the atmosphere around the bonding surfaces of the surface-activated substrates 301 and 302.
- the humidity may be calculated as relative humidity, may be calculated as absolute humidity, or other definitions may be employed.
- the introduction of water is preferably controlled so that the relative humidity in the atmosphere around at least one or both of the joint surfaces of both substrates is 10% to 90%.
- the total pressure in the chamber is 9.0 ⁇ 10 4 Pa (Pascal), that is, 0.89 atm (Atom )
- the amount of gaseous water in the chamber is 8.6 g / m 3 (gram / cubic meter) or 18.5 g / m 3 (gram / cubic meter) in absolute volume humidity, 23 ° C. (23 degrees Celsius)
- the relative humidity can be controlled to be 43% or 91%, respectively.
- the atmospheric concentration of oxygen (O 2 ) in the chamber may be 10%.
- air outside the chamber having a predetermined humidity may be introduced.
- air it is preferable that the air passes through a predetermined filter in order to prevent unwanted impurities from adhering to the bonding surface.
- water (H 2 O) molecules or clusters may be accelerated and radiated toward the bonding surface.
- the acceleration of the water (H 2 O) may be used, such as particle beam source used for the surface activation treatment.
- a mixed gas of carrier gas and water (H 2 O) generated by bubbling or the like is introduced into the particle beam source, thereby generating a water particle beam, and on the joint surface to be hydrophilized. It can be irradiated towards.
- the hydrophilization treatment may be performed by converting water molecules into plasma and bringing it into contact with the joint surface in an atmosphere near the joint surface.
- water washing may be performed as a hydrophilic treatment to remove particles (contaminated particles).
- water molecules may be forcibly attached to the bonding surface as part of the hydrophilic treatment or after the hydrophilic treatment. Thereby, the quantity of the water molecule on a joint surface can be increased or controlled. Furthermore, this makes it possible to adjust the critical pressure.
- the bonding surface that has been subjected to surface activation treatment and hydrophilization treatment is stretched with water molecules intervening as described above, but hydrogen bonds between OH groups by removing water molecules. By attracting each other, a relatively strong temporary joint is formed. Further, since a bonding interface including hydrogen and oxygen is formed, hydrogen and oxygen are released to the outside of the bonding interface by the heat treatment in the main bonding, and a clean bonding interface can be formed.
- the method of applying pressure and the method of heating were shown as the bonding method.
- pressure exceeding the critical pressure for example, by pressurizing at 10 MPa
- water molecules are pushed to join with OH groups. Change.
- water molecules are removed from the interface and changed to bonding with OH groups. After that, by continuing heating, the hydrogen bond is changed to a covalent bond, and a transition is made to a strong main junction state.
- a similar temporary bonding state can also be maintained by bonding after leaving water in a vacuum for a long time to release water molecules.
- Bonding can be performed by applying pressure from a bonding state in which water molecules intervene, or bonding in a vacuum. Thereafter, heating can be used in combination in order to make a transition to strong bonding. It is also possible to make a transition to strong bonding from the beginning by heating.
- heating involves thermal expansion of the substrate, it is effective to heat in a state where the substrate is temporarily bonded by pressurization or bonding in vacuum.
- Oxide may be formed on the joint surface by the hydrophilic treatment.
- a hydroxyl (OH) group directly on the new surface without adhesion of impurities by continuously adhering water, etc.
- water molecules adhere to the hydroxyl (OH) group.
- this oxide is relatively controlled (for example, a thickness of several nm or several atomic layers or less), it does not particularly deteriorate electrical characteristics.
- the heat treatment after the bonding it can be absorbed in the metal material, or can be eliminated or decreased by escaping from the bonding interface as water. Therefore, in this case, it is considered that there is almost no practical problem in the conductivity through the bonding interface with the substrate.
- FIG. 13 is a flowchart showing a substrate bonding method according to the present invention.
- a hydrophilic treatment step S101 As shown in FIG. 13, in order to join the substrates 301 and 302, a hydrophilic treatment step S101, a step S102 of bending the substrate 301, an alignment step S103 of the substrates 301 and 302, and a butting step S104 of the substrates 301 and 302 are performed. Then, the vacuuming step S105 and the bonding step S106 of the substrates 301 and 302 are sequentially performed.
- each said process is explained in full detail.
- the hydrophilic treatment step S101 the hydrophilic treatment is performed on the surfaces of the bonding surfaces of the substrate 301 and the substrate 302, respectively.
- the substrate 301 is held by the holding mechanism (not shown) of the stage 401 of the substrate bonding apparatus 100, and the outer peripheral portion 302s of the substrate 302 is held by the holding mechanism (not shown) of the stage 402. Hold.
- the substrate 301 and the substrate 302 are opposed to each other with their joint surfaces separated from each other.
- the chamber 200 is opened to the atmosphere, and the atmosphere is introduced into the atmosphere around the substrates 301 and 302 in the chamber 200.
- the bonding surfaces of the substrates 301 and 302 are activated by any of the activation treatment methods described above.
- plasma-processed argon (Ar) is caused to collide with the bonding surfaces of the substrates 301 and 302 to perform a sputtering process.
- the surface layer of the bonding surfaces of the substrates 301 and 302 is removed, and the nascent surface of the substance to be bonded is exposed, and the crystal structure in the vicinity of the exposed nascent surface is disturbed and becomes amorphous.
- the activated bonding surfaces of the substrates 301 and 302 are hydrophilized by any of the hydrophilization methods described above.
- the water gas generator 621 generates gaseous water, and the generated gaseous water is introduced into the chamber 200 through the water gas supply pipe 623 together with the carrier gas.
- a hydrophilic treatment is performed by attaching an OH-containing substance such as water to the bonding surfaces of the substrates 301 and 302 that have been subjected to the surface activation treatment, the bonding surfaces are terminated with hydroxyl groups (OH groups) (M-OH). ) Is formed.
- Step S102 of bending the substrate 301 In the step S102 of bending the substrate 301, as shown in FIG. 4, the substrate 301 and the substrate 302 are placed in a central portion 301c with respect to the outer peripheral portion 301s of the bonding surface with the bonding surfaces facing each other. Is bent so as to protrude toward the substrate 302 side. To this end, in the lower stage 401, the protruding mechanism 430 built in the center of the support surface that supports the substrate 301 is protruded toward the upper stage 402 side.
- alignment between the substrate 301 and the substrate 302 is performed. This is related to transmitted light and reflected light of illumination light emitted from the respective coaxial illumination systems of the cameras 501 and 502 in the position measuring means 500 in a state where the substrate 301 in a bent state and the substrate 302 face each other.
- the position measuring means 500 acquires an image GAa including the marks MK1a and MK2a and an image GAb including the marks MK1b and MK2b (FIG.
- the controller 700 determines the amount of positional deviation ( ⁇ xa, ⁇ ya) ( ⁇ xb) between the marks (MK1a, MK2a), (MK1b, MK2b). , ⁇ yb) is obtained (FIG. 12).
- the controller 700 detects X from the desired positions of the substrates 301 and 302 based on the positional deviation amounts ( ⁇ xa, ⁇ ya) and ( ⁇ xb, ⁇ yb) of the two sets of marks (MK1a, MK2a) and (MK1b, MK2b).
- a relative deviation amount ⁇ D (specifically, ⁇ x, ⁇ y, ⁇ ) in the direction, the Y direction, and the ⁇ direction is calculated.
- the controller 700 finally adjusts the substrates 301 and 302 to the correction amounts ⁇ D ( ⁇ x, ⁇ y, and ⁇ ) corresponding to the relative deviation amounts ⁇ D ( ⁇ x, ⁇ y, ⁇ ) between the substrates 301 and 302. )
- the controller 700 instructs the drive mechanisms 403 to 407 of the stages 401 and 402 to move both the substrates 301 and 302 according to the calculated correction path.
- the drive mechanisms 403 and 404 drive the stage 402 in two translation directions (X direction and Y direction) and a rotation direction ( ⁇ direction) in accordance with an instruction from the controller 700, whereby the substrates 301 and 302 are moved.
- the relative displacement is made, and the positional deviation amount ⁇ D is corrected.
- FIG. 14 is a front sectional view showing a state where the central portion of the bent substrate is abutted against the upper substrate.
- the bonding surface of the substrate 301 and the bonding surface of the substrate 302 are butted at the center.
- the stage 402 is moved to the lower stage 401 side along the Z direction in the Z direction elevating drive mechanism 406 of the stage drive mechanism 404. Then, the substrate 301 held on the stage 401 in a state where the central portion 301 c is bent so as to be convex upward is abutted against the substrate 302 held on the upper stage 402.
- the bonding surface of the substrate 301 and the bonding surface of the substrate 302 are abutted at the center.
- the bonding surface between the substrate 301 and the bonding surface of the substrate 302 is terminated with a hydroxyl group (OH group) on the bonding surface by hydrophilization treatment ( M-OH) layer is interposed.
- the stage 402 is lowered by driving the Z-direction raising / lowering drive mechanism 406, and at least one substrate A pressure equal to or lower than the critical pressure of the joint surfaces 301 and 302 is applied.
- the application of pressure may be started simultaneously with the contact, or may be started after a certain time has elapsed after the contact.
- the application of pressure may be performed over a part of time in the contact state, or may be performed over the whole.
- the application of pressure may be performed intermittently, and a constant pressure may be maintained during application, or may be changed with time.
- “Critical pressure at the joint surface” can be defined as a pressure at which a desired property of the joint surface changes or is lost when the joint surface is pressed at a pressure above it. For example, if too much pressure is applied to the bonding surface in the contact step (temporary bonding) before the step of finally forming the bonding interface (main bonding), the substrates 301 and 302 cannot be bonded and separated. Alternatively, it may be separated, and even if contact is made again and pressure is applied, desired bonding may not be possible.
- the substrates 301 and 302 that are in contact with each other can be separated while the substrates 301 and 302 remain in a non-bonded state without impairing surface characteristics for performing desired bonding. Can do.
- the lowest pressure at which the substrates 301 and 302 can be separated thereafter may be defined as the critical pressure.
- the separation can be performed.
- characteristics such as desired bonding strength cannot be obtained even if the joining process is performed thereafter.
- the substrates 301 and 302 may be separated with a relatively small force.
- surface properties deteriorate due to destruction of the strongly formed bonding interface due to the separation, and as a result, desired bonding characteristics cannot be finally obtained.
- the critical pressure may be defined as a pressure at which a desired bonding cannot be performed when a pressure higher than that is applied, and a pressure at which a desired bonding cannot be performed when a pressure exceeding the critical pressure is applied. Also good.
- the critical pressure can be determined according to various factors such as the material forming the joint surface, the presence or absence of a surface layer on the joint surface, the characteristics of the surface layer, and the surface energy. Therefore, the bonding method of the present application may include a step (not shown) of determining the critical pressure of the bonding surface of at least one of the substrates 301 and 302 before step S104-2.
- the pressure applied in step S104-2 is preferably equal to or lower than the critical pressure of the smaller critical pressure defined on both the joint surfaces of the substrates 301 and 302. Thereby, it is possible to ensure that an appropriate pressure is applied to any of the bonding surfaces of the substrates 301 and 302. In the case where the critical pressure is not defined on one joint surface, a pressure that is equal to or lower than the critical pressure of the other joint surface on which the critical pressure is defined may be applied.
- step S104-3 after the step S104-2, the relative positional relationship between the bonding surfaces of the substrates 301 and 302 in which the central portions are in contact with each other or the relative position between both bonding surfaces is measured.
- the position measuring means 500 uses the captured images (image data) GA relating to the transmitted light and reflected light of the illumination light emitted from the respective coaxial illumination systems of the cameras 501 and 502 to attach to both the substrates 301 and 302.
- the position of each set of marks (MK1a, MK2a), (MK1b, MK2b) is recognized.
- the controller 700 determines the amount of positional deviation ( ⁇ xa, ⁇ ya) ( ⁇ xb) between the marks (MK1a, MK2a), (MK1b, MK2b). , ⁇ yb).
- the relative position of the bonding surfaces of the substrates 301 and 302 is measured in a state under contact pressure
- the relative position of the bonding surfaces is the final bonding state in a state where contact and pressure are applied. Get closer to. For this reason, a more accurate and uniform contact state can be formed or maintained by pressurization.
- step S104-4 ⁇ Relative positional deviation amount determination step S104-4> Thereafter, when it is determined in step S104-4 that the amount of positional deviation is not within the allowable error range, the process proceeds to step S104-5. Whether or not the positional deviation amount is within a predetermined allowable error range satisfies the condition that all the three positional deviation amounts ( ⁇ x, ⁇ y, ⁇ ) are within the respective allowable error ranges. It may be determined based on whether or not.
- step S104-5 the correction movement amount of the substrates 301 and 302 is determined.
- the corrected movement amounts of the substrates 301 and 302 for moving from the relative position measured in step S104-3 to the desired relative position are obtained.
- the controller 700 selects desired values of both substrates 301 and 302 based on the positional deviation amounts ( ⁇ xa, ⁇ ya) and ( ⁇ xb, ⁇ yb) of the two sets of marks (MK1a, MK2a) and (MK1b, MK2b).
- a relative deviation amount ⁇ D (specifically ⁇ x, ⁇ y, ⁇ ) in the X direction, Y direction, and ⁇ direction from the position is calculated.
- the controller 700 finally adjusts the substrates 301 and 302 to the correction amounts ⁇ D ( ⁇ x, ⁇ y, and ⁇ ) corresponding to the relative deviation amounts ⁇ D ( ⁇ x, ⁇ y, ⁇ ) between the substrates 301 and 302. ) To calculate a correction movement path that only moves.
- the contact state of the bonding surface is temporarily released from the relative position measured in step S104-3, that is, the bonding surface is separated, and the substrates 301 and 302 are relatively moved in a direction substantially parallel to the bonding surface.
- the moving path may be formed so that the joint surfaces come into contact with each other again. That is, in the following step S104-3, the bonded surfaces that have been in contact with each other or the substrates 301 and 302 that have been in contact with each other are separated and contacted again after the correction movement amount is moved. Further, from the relative position measured in step S104-3, the pressure in the contact state of the bonding surface is once removed or reduced, and the substrates 301 and 302 remain in contact with each other at the center.
- the movement path may be formed by relatively moving the substrates 301 and 302 in a direction substantially parallel to the bonding surface and pressurizing again. The formation of the above movement path is an example, and the present invention is not limited to this.
- the corrected movement amount may be determined as a function of a predetermined parameter.
- the measured relative positions of the substrates 301 and 302 are preferably one parameter that is taken into account by the function.
- the parameters of the function may include parameters other than the relative positions of the measured substrates 301 and 302.
- the movement paths of the substrates 301 and 302 for correcting the relative position can take various shapes, and therefore, the habits and errors of the movement mechanism or measurement mechanism of the substrates 301 and 302 at that time are considered as parameters. May be.
- step S104-6 the substrates 301 and 302 are moved by the correction movement amount determined in step S104-5. Alternatively, the substrates 301 and 302 are moved according to the obtained movement route. Thereby, the measured misalignment is corrected or minimized.
- the controller 700 instructs the drive mechanisms 403 to 407 of the stages 401 and 402 to move both the substrates 301 and 302 according to the correction path calculated in step S104-5.
- the drive mechanisms 403 and 404 drive the stage 402 in two translation directions (X direction and Y direction) and a rotation direction ( ⁇ direction) in accordance with an instruction from the controller 700, whereby the substrates 301 and 302 are moved.
- the relative displacement amount ⁇ D is corrected by the relative movement.
- the movement of the substrates 301 and 302 includes a movement path in a state where the substrates 301 and 302 are separated from each other, the bonding surfaces are brought into contact with each other at the central portion and brought into contact again.
- the substrates 301 and 302 move while maintaining the contact state without separating the substrates 301 and 302 or the bonding surfaces, the substrates 301 and 302 are brought into contact with each other at the center when the movement is completed. A contact state is realized.
- the process After performing the position correction in the position correction step S104-6, the process returns to step S104-3. Then, the correction movement amount calculation S104-5 and the position correction step S104-6 are repeated until the measured positional deviation amounts of the substrates 301 and 302 fall within the allowable error range. Accordingly, it is possible to perform positioning between the substrates 301 and 302 with high accuracy and finally form a bonding interface or a bonding interface having high positioning accuracy between the substrates 301 and 302.
- ⁇ Evacuation step S105> the atmosphere around the substrate 302 and the substrate 301 that have been aligned is evacuated so that the amount of displacement is within the allowable error range.
- the exhaust pipe 202 is opened and the vacuum pump 201 is operated to discharge the gas in the chamber 200 to the outside through the exhaust pipe 202.
- the inside of the chamber 200 is depressurized and evacuated, and the atmosphere in the chamber 200 is brought into a vacuum or low pressure state.
- the degree of vacuum in the chamber 200 reaches a desired value, the state is maintained.
- FIG. 15 illustrates a state in which the central portions of the substrates 301 and 302 are brought into contact with each other with a pressure that maintains a non-bonded state, or the distance between the central portion of the substrate 301 and the central portion of the substrate 302 is maintained by the Z-direction lift drive mechanism 406 6 is a front sectional view showing a state in which the distance between the outer peripheral portion of the substrate 301 and the outer peripheral portion of the substrate 302 is reduced and the substrates are overlapped with each other.
- bonding step S106 as shown in FIG. 15, bonding is performed after the bonding surface of the substrate 301 and the bonding surface of the substrate 302 are abutted with each other.
- pressure may be applied to the bonding surface in which the bonding surfaces of the substrates 301 and 302 are in contact with each other.
- the pressure applied in a state where the joint surfaces of the substrates 301 and 302 are abutted on the entire surface is preferably a pressure equal to or higher than the critical pressure or a pressure exceeding the critical pressure.
- the pressurization in a state where the bonding surfaces of the substrates 301 and 302 are abutted on the entire surface is mechanically applied to the substrates 301 and 302 by using a mechanism such as the Z-direction lifting drive mechanism 406 of the substrate bonding apparatus 100, for example. Can be added.
- the pressurization in a state where the joint surfaces of the substrates 301 and 302 are abutted on the entire surface gives an opposite charge to the substrates 301 and 302, so that the electrostatic attraction due to this charge is used to electrically You may add with respect to the board
- the pressurization mode, method, pressure and the like in a state where the bonding surfaces of the substrates 301 and 302 are abutted on the entire surface are not limited to the above examples, and are appropriately adjusted according to various specific substrate bonding methods. May be.
- the bonding step S106 may include a step of applying heat to the bonding surface where the bonding surfaces of the substrates 301 and 302 are in contact with each other. By heating, a bonding interface having desired characteristics can be formed. You may form the joining interface which finally has a desired characteristic by heating. By promoting the diffusion of atoms in the vicinity of the bonding surface by heating, the unnecessary surface layer existing on the surface of the bonding surface is finally diffused and removed, forming a bonding interface where the new surface directly contacts. It is possible to reduce the microscopic surface irregularities and increase the area of the substantial bonding interface. Thereby, various characteristics such as mechanical characteristics, electrical characteristics, and chemical characteristics of the bonding interface can be improved. Heating can be performed simultaneously with the above pressurization.
- heating and pressurization so that heating time and pressurization time may overlap a part or all.
- the electrostatic attraction due to the charges is used to electrically
- the substrates 301 and 302 may be heated while being pressed. Thereby, what is called anodic bonding can be performed.
- Heating may be performed by conducting heat from the stages 401 and 402 that support the substrates 301 and 302, or by conducting heat from the gas by heating the gas in the atmosphere of the substrates 301 and 302. It may be performed by irradiating the joint surface with light or the like.
- the final bonding interface between the substrates 301 and 302 may be formed by heating the bonding surfaces of the substrates 301 and 302 together with pressure. In this way, both substrates 301 and 302 are well aligned and final bonding is achieved.
- a step of performing a hydrophilization treatment for attaching water or an OH-containing substance to the surfaces of the bonding surfaces of the substrate 301 and the substrate 302 The substrate 302 is disposed with the bonding surfaces facing each other, the substrate 301 is bent with respect to the outer peripheral portion 301s of the bonding surface so that the center portion 301c protrudes toward the substrate 302, and the bonding of the substrate 301 is performed.
- the outer peripheral portion 301s of the substrate 301 and the outer peripheral portion 302s of the substrate 302 in a state in which the surface and the joint surface of the substrate 302 are abutted with each other at a center portion, and in a state where the center portions are butted with a pressure that maintains the non-joined state. , And the bonding surface of the substrate 301 and the bonding surface of the substrate 302 are abutted and bonded to each other. Thereby, it is possible to prevent the generation of voids between the wafers and to bond with high positional accuracy.
- the atmosphere around the substrate 302 and the substrate 301 is evacuated before the substrates are joined to each other.
- the process of aligning the substrate 301 and the substrate 302 is performed in the atmosphere. Then, when the bonding surface of the substrate 301 and the bonding surface of the substrate 302 are brought into contact with each other at the center, a state in which water molecules are interposed between the bonding surface of the substrate 301 and the bonding surface of the substrate 302 is maintained. . In this state, since water molecules are sandwiched between the bonding surfaces, the OH groups are not bonded to each other, and the substrates can be peeled off without affecting the bonding surfaces.
- the bonding surface of the substrate 301 and the bonding surface of the substrate 302 are not bonded, and the alignment between the substrate 301 and the substrate 302 can be repeatedly performed.
- the surrounding atmosphere is evacuated, so that the intermediate surface is interposed between the bonding surface of the substrate 302 and the bonding surface of the substrate 301. It is possible to prevent air from being mixed into the water. Therefore, voids can be prevented from occurring at the joint between the substrate 302 and the substrate 301. As a result, it is possible to bond the substrates with high quality while aligning the substrates with high accuracy.
- the positional deviation amount between the substrate 302 and the substrate 301 is set in a state where the bonding surface of the substrate 302 and the bonding surface of the substrate 301 are abutted with each other at the center.
- the relative position between the substrate 301 and the substrate 302 is adjusted so that the positional deviation amount between the substrate 302 and the substrate 301 is reduced,
- the measurement of the positional deviation between the substrate 301 and the substrate 302 and the adjustment of the relative position between the substrate 301 and the substrate 302 were repeated until the deviation amount was within the allowable error range.
- the substrate 301 and the substrate 302 can be aligned with high accuracy by repeating until the positional deviation amount between the substrate 301 and the substrate 302 is within the allowable error range.
- the step of measuring the amount of misalignment between the substrate 301 and the substrate 302 is performed in a state where the bonding surface of the substrate 301 and the bonding surface of the substrate 302 are abutted with each other at a pressure or time that maintains the non-bonded state between the central portions. I made it.
- the substrate 301 and the substrate 302 are brought into contact with each other with excessive pressure or left for a long time, water intervening between the bonding surface of the substrate 301 and the bonding surface of the substrate 302 is expelled, and the substrate 301 and the substrate 302 are displaced. It may be joined.
- the pressure at which the substrate 301 and the substrate 302 are maintained in a non-bonded state in other words, maintaining a state in which water is interposed between the bonded surface of the substrate 301 and the bonded surface of the substrate 302,
- the alignment between the substrate 301 and the substrate 302 can be performed smoothly.
- the substrate 301 is formed into a flat plate shape so as to abut the bonding surface of the substrate 302.
- the bonding surface of the substrate 301 and the bonding surface of the substrate 302 can be easily butted together and bonded together.
- the substrates 301 and 302 can be reliably bonded by pressurizing and bonding the substrate 301 and the substrate 302. .
- the step of abutting the first substrate and the second substrate is performed in a state in which the first substrate and the second substrate are abutted at a pressure that maintains a non-bonded state.
- the distance between the outer periphery of the second substrate and the outer peripheral portion of the second substrate is reduced, and the bonding surface of the first substrate and the bonding surface of the second substrate are butted together and bonded.
- the lower stage 401 may be made of a transparent material, or the material constituting the lower stage 401 may be transparent. Thereby, light (including the transmitted light and the reflected light) emitted from the light source for position measurement can pass through the transparent material of the lower stage 401. Therefore, there is no restriction on the design of the substrate support means.
- the substrate heating unit 420 is made of a transparent material, or the material constituting the substrate heating unit 420 is transparent, and the heater 421 in the substrate heating unit 420 is disposed between the heater wires.
- a predetermined interval may be provided.
- the transparent material a glass material or a ceramic material is preferably used. Even if it does not look transparent when viewed with the naked eye, the lower stage 401 may be made of a material that transmits light emitted from the light source.
- At least a part of the lower stage 401 is made of a transparent material, or a material constituting the lower stage 401 is transparent, and at least a part of the substrate heating means 420 is made of a transparent material, Or the material which comprises the board
- the present invention is not limited to this, and two alignment marks are moved by moving one camera. You may make it image
- the stage 401 is moved in the X direction, but the present invention is not limited to this.
- the stage 401 may be fixed.
- the stage 402 is moved in the X direction, the Y direction, the Z direction, and the ⁇ direction, so that the stages 401 and 402 are relatively moved in these directions. It is not limited to this. For example, conversely, when the stage 402 is fixed and the stage 401 is moved in the X direction, the Y direction, the Z direction, and the ⁇ direction, the stages 401 and 402 are relatively moved in these directions. It may be.
- the substrate 301 or 302 having a predetermined shape or material has been described.
- the present invention is not limited to this.
- the present invention is not limited to this.
- the surface activation process may be performed outside the substrate bonding apparatus 100.
- the surface activation treatment can be performed only by opening the chamber 200 and exposing the inside of the chamber 200 to the atmosphere.
- the configuration described in the above embodiment can be selected or changed to another configuration as appropriate without departing from the gist of the present invention.
- the present invention including the embodiments described above has advantageous effects with respect to, for example, the manufacture of CMOS image sensors, memories, arithmetic elements, and MEMS.
- substrate bonding apparatus 100 substrate bonding apparatus 200 chamber 301 substrate (second substrate) 302 substrate (first substrate) 302c Central part 302s Outer part 304 Stage moving mechanism 400 Substrate support means 401 Stage (second substrate holding part) 402 stage (first substrate holder) 430 Protrusion mechanism 431 Press plate (press member) 431c Center part 431s Outer peripheral part 440 Holding mechanism 500 Position measuring means (positioning part) 600 Hydrophilization processing means 700 Controller
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Abstract
Description
チャンバ200は、中空箱状で、その内部に、後述する基板支持手段400のステージ401,402などが設けられている。
チャンバ200は、内部を真空引きするための真空引き手段として、真空ポンプ201を備えている。真空ポンプ201は、排気管202を介してチャンバ200に接続されている。排気管202には、排気管202を開閉する排気弁203が設けられている。
基板支持手段400は、基板301,302を支持するステージ(第二基板保持部)401,ステージ(第一基板保持部)402と、それぞれのステージを移動させるステージ駆動機構403,404と、基板を加熱する基板加熱手段420と、を備えている。
また、各突出機構412とXY駆動機構405との間には、それぞれステージ圧力センサ411が備えられている。
突出機構412は、図示しない制御部により、複数のステージ圧力センサ411で測定した、基板301,302の接合面に作用する力又は圧力の分布に応じてその作動が制御される。
これらステージ圧力センサ411及び突出機構412は、Z方向昇降駆動機構406によって、互いに加圧された接触した基板301,302に作用する圧力の分布を、さらに微細に調整し、その接合面に亘って均一又は所定の分布とすることができる。
また、接触後の位置補正を必要としない場合は最初から真空に引いておいてもよい。
図3に示すように、下側のステージ401において、基板301を支持する支持面の中央部には、上側のステージ402側に向けて出没可能な突出機構430が内蔵されている。
この突出機構430は、シリンダ構造、電磁式の機構を採用することができる。突出機構430は、少なくとも、基板301を撓ませる力を有し、突出する方向と逆向きの力を一定以上受けると、突出する方向と逆向きに移動可能な機能を備えるものが好ましい。
ステージ401,402は、それぞれの支持面に、機械式チャック、静電チャック、真空チャックなどの保持機構440を有していてもよい。この保持機構は、基板301,302の支持面への固定状態と、基板301,302の支持面への固定からの開放状態とを切り換えることができる。
例えば、基板の周辺部を保持する吸着溝と基板の中央部を保持する吸着溝とが分離され、それぞれが別個に作動してもよい。これにより、基板の外周部のみ保持することができる。
また、吸着部や大気解放部は溝に限定されず、面内において複数個所を点支持するような構成としてもよい。
押圧板431は、基板302を支持する支持面に、真空吸着方式、機械式チャック、静電チャックなどの保持機構(図示無し)を有していてもよい。
このとき、押圧板431が撓むことによって、基板302の全体が押圧されて撓むので、基板302に歪みが生じるのを抑えることができる。突出機構430による押圧を解除すると、基板302は元の平板状の形状に復元する。
図1に示したように、基板加熱手段420は、ステージ401,402に内蔵されたヒータ421,422を備えている。ヒータ421,422は、例えば電熱ヒータでジュール熱を発するように構成される。ヒータ421,422は、ステージ401,402を介して熱を伝導させ、ステージ401,402に支持されている基板301,302を加熱する。ヒータ421,422が発する熱量を制御することで、基板301,302やその接合面の温度を調節することができる。
ステージ401,402とヒータ421,422とは、別個の部材から構成してもよい。例えば、上記保持機構440を備えるステージ401,402とヒータ配線などを含むヒータ421,422とを重ね合わせてもよい。その一例を図8に示す。
位置測定手段500は、基板301,302の相対的位置関係を測定する。位置測定手段500は、チャンバ200に形成された窓503と、光源(図示せず)と、複数のカメラ501,502と、ミラー504,505と、を備えている。
光源(図示無し)から発せられた光は、ミラー504,505、窓503を経て、基板301,302のマークが設けられた部分(図示せず)に当たる。カメラ501,502は、基板301,302のマークが設けられた部分(図示せず)からの反射光を、窓503、ミラー504,505を経て撮像する。
基板接合装置100は、位置測定手段500と、各駆動機構403~407と、これらに接続されたコントローラ700とを用い、基板301,302の相対的位置を測定し、位置合わせすることができる。
図9は、一方の基板に付される2つのアライメントマークを示す図である。図10は、他方の基板に付される2つのアライメントマークを示す図である。図11は、両基板に関するアライメントマーク撮影画像を示す図である。図12は、1組のマークが互いにずれている状態を示す図である。
図9及び図10に示すように、両基板301,302には、それぞれ、位置合わせ用のアライメントマークが付されている。例えば、一方の基板301に2つのアライメントマークMK1a,MK1b(図9)が設けられ、他方の基板302に2つのアライメントマークMK2a,MK2b(図10)が設けられる。
コントローラ700は、2組のマーク(MK1a,MK2a),(MK1b,MK2b)の位置ずれ量(Δxa,Δya),(Δxb,Δyb)に基づいて、両基板301,302の所望の位置からのX方向、Y方向及びθ方向における相対的ずれ量ΔD(詳細にはΔx,Δy,Δθ)を算出する。相対的ずれ量ΔDが、その後の補正移動による補正移動量に対応するものである。
基板接合装置100は、親水化処理手段600を備えている。図1に示す基板接合装置100の親水化処理手段600は、基板301,302の接合面を活性化させる活性化処理部610と、活性化した基板301,302の接合面を親水化させる親水化処理部620と、を備えている。
活性化処理部610では、真空中で所定の運動エネルギーを有する粒子を衝突させて、接合面を形成する物質を物理的に弾き飛ばす現象(スパッタリング現象)を生じさせることで、表面層を除去することができる。表面活性化処理には、表面層を除去して接合すべき物質の新生表面を露出させるのみならず、所定の運動エネルギーを有する粒子を衝突させることで、露出された新生表面近傍の結晶構造を乱し、アモルファス化する作用もあると考えられている。アモルファス化した新生表面は、原子レベルの表面積が増え、より高い表面エネルギーを有するので、その後の親水化処理において結合される、単位表面積当たりの水酸基(OH基)の数が増加すると考えられる。これに対し、従来のウェット処理による表面の不純物の除去工程後に化学的に親水化処理する場合には、所定の運動エネルギーを有する粒子の衝突に起因する新生表面の物理的変化がないので、本願発明の接合方法に係る表面活性化処理に続く親水化処理は、この点で従来の親水化処理とは根本的に異なると考えられる。また、結晶構造が乱れ、アモルファス化した新生表面近傍の領域にある原子は、本接合時の加熱処理の際に、比較的低い熱エネルギーで拡散しやすく、比較的低温での本接合プロセスを実現することができると考えられる。
また、プラズマ発生装置は接合装置とは個別に設置して真空中を連結したり一旦、大気中をハンドリングしたりするように配置すればよい。
また、反応ガスとして窒素(N2)や酸素(O2)アルゴン(Ar)などを使用してもよい。
この方法によると界面にSiがドープされ、より活性なSiが多い界面が形成され、親水化処理した際により多くのOH基が形成され、強度アップできる。特に真空中での接合強度を増加させることに有効である。
また、FABやIGによる粒子ビーム処理は接合装置内に配置する以外に別装置として大気中を搬送したり、連結してもよい。
親水化処理部620は、上記活性化処理部610によって清浄又は活性化された基板301,302の接合表面に、水酸基(OH基)を結合させる。
また、加熱を加えることでも水分子は界面から除去されOH基同志での接合へと変わる。その後も加熱を続けることで水素結合から共有結合へと移り代わり強固な本接合状態へと遷移する。
但し、アライメント精度上は加熱は基板の熱膨張を伴うため、先に加圧や真空中での接合により仮接合した状態で加熱することが有効である。
次に、上記したような基板接合装置100における基板301,302の接合方法について説明する。
図13は、本願発明に係る基板接合方法を示すフローチャートである。
この図13に示すように、基板301,302を接合するには、親水化処理工程S101、基板301を撓ませる工程S102、基板301,302の位置合わせ工程S103、基板301,302の突き合わせ工程S104、真空引き工程S105、基板301,302の接合工程S106を順次実行する。
以下、上記の各工程について詳述する。
親水化処理工程S101では、基板301及び基板302のそれぞれの接合面の表面に親水化処理を行う。
これには、まず、図3に示すように、基板接合装置100のステージ401の保持機構(図示無し)で基板301を保持し、ステージ402の保持機構(図示無し)で基板302の外周部302sを保持する。この状態で、基板301と基板302とは、その接合面どうしを互いに離間させた状態で対向させる。
なお、このとき、チャンバ200は大気開放し、チャンバ200内の基板301,302の周囲雰囲気には大気を導入しておく。
基板301を撓ませる工程S102では、図4に示すように、基板301と基板302とを、接合面どうしを対向させた状態で、基板301を、接合面の外周部301sに対して中央部301cが基板302側に突出するように撓ませる。
これには、下側のステージ401において、基板301を支持する支持面の中央部に内蔵した突出機構430を、上側のステージ402側に向けて突出させる。
位置合わせ工程S103では、基板301と基板302との位置合わせを行う。
これには、位置測定手段500において、撓んだ状態の基板301と、基板302とが対向する状態において、カメラ501,502の各同軸照明系から出射された照明光の透過光及び反射光に関する撮影画像(画像データ)GAを用いて、両基板301,302の位置を認識する。位置測定手段500は、マークMK1a,MK2aを含む画像GAaとマークMK1b,MK2bを含む画像GAbとを取得し(図11)、画像GAa,GAbに基づいて両基板301,302に付された各組のマーク(MK1a,MK2a),(MK1b,MK2b)の位置を認識する。コントローラ700は、認識したマーク(MK1a,MK2a),(MK1b,MK2b)の相対位置に基づいて、マーク(MK1a,MK2a),(MK1b,MK2b)相互間の位置ずれ量(Δxa,Δya)(Δxb,Δyb)を求める(図12)。
次いで、コントローラ700は、基板301,302間の相対的ずれ量ΔD(Δx,Δy,Δθ)に対応して、基板301,302を最終的に補正量-ΔD(-Δx,-Δy,-Δθ)だけ移動させるような補正移動の経路を計算する。そして、コントローラ700は、算出された補正経路に従って両基板301,302を移動させるように、各ステージ401,402の駆動機構403~407に指示を出す。
図14は、撓ませた基板の中央部を上方の基板に突き当てた状態を示す正断面図である。
突き合わせ工程S104では、図14に示すように、基板301の接合面と基板302の接合面とを、中央部どうしで突き合わせる。
これには、ステージ駆動機構404のZ方向昇降駆動機構406において、ステージ402を、Z方向に沿って下方のステージ401側に移動させる。そして、中央部301cが上方に凸となるように撓んだ状態でステージ401に保持された基板301を、上方のステージ402に保持された基板302に突き当てる。これにより、基板301の接合面と基板302の接合面とが、中央部どうしで突き合わされる。
この状態で、チャンバ200内には大気が導入されているので、基板301の接合面と基板302の接合面の間には、親水化処理による接合表面上に水酸基(OH基)で終端化(M-OH)されている層が介在している。
次いで、突き合わせ工程S104で、基板301の接合面と基板302の接合面とを、中央部どうしで突き合わせた状態で、Z方向昇降駆動機構406を駆動してステージ402を下降させ、少なくとも一方の基板301,302の接合面の臨界圧力以下の圧力を掛ける。圧力の印加は、接触と同時に開始してもよく、また接触後、ある時間経過後に開始してもよい。また、圧力の印加は、接触状態にある時間の一部に亘って行われてもよく、全体に亘って行われてもよい。さらにまた、圧力の印加は、断続的に行われてもよく、印加中は、一定の圧力が保たれても、時間的に変化されてもよい。
例えば、最終的に接合界面を形成する工程(本接合)の前の、接触工程(仮接合)で接合面に圧力を掛けすぎると、両基板301,302が接合し離間させることができなくなる場合や、離間させることができ、再度接触し加圧しても、所望の接合ができなくなる場合がある。そこで、接触工程で接合面に印加する圧力を低くすると、所望の接合を行うための表面特性を損なわずに、基板301,302が非接合状態のまま、接触した基板301,302を離間させることができる。このように、その後に基板301,302が離間されうる最低の圧力を臨界圧力と定義してもよい。
このように、接触工程での接合面に掛かる圧力が実質的に高いことが原因である場合には、当該圧力を低くすることで、接触と離間を複数回繰り返しても、最終的に所望の接合強度を得ることが可能になる。このように離間可能で、かつ最終的に所望の接合強度が得られるための、接触工程での圧力を臨界圧力と定義してもよい。
工程S104-3では、上記工程S104-2の後に、中央部どうしが接触状態にある基板301,302の接合面の相対的な位置関係又は両接合面の相対位置を測定する。これには、位置測定手段500において、カメラ501,502の各同軸照明系から出射された照明光の透過光及び反射光に関する撮影画像(画像データ)GAを用いて、両基板301,302に付された各組のマーク(MK1a,MK2a),(MK1b,MK2b)の位置を認識する。コントローラ700は、認識したマーク(MK1a,MK2a),(MK1b,MK2b)の相対位置に基づいて、マーク(MK1a,MK2a),(MK1b,MK2b)相互間の位置ずれ量(Δxa,Δya)(Δxb,Δyb)を求める。
その後、工程S104-4において、当該位置ずれ量が許容誤差範囲内に収まっていないと判定されると、工程S104-5に進む。
なお、位置ずれ量が所定の許容誤差範囲内に収まっているか否かは、3つの位置ずれ量(Δx,Δy,Δθ)の全てがそれぞれの許容誤差範囲に収まっている旨の条件を充足するか否かに基づいて判定されてもよい。
工程S104-5では、基板301,302の補正移動量を決定する。工程S104-3で測定された相対位置から、所望の相対位置へと移動するための基板301,302の補正移動量を求める。
これには、コントローラ700は、2組のマーク(MK1a,MK2a),(MK1b,MK2b)の位置ずれ量(Δxa,Δya),(Δxb,Δyb)に基づいて、両基板301,302の所望の位置からのX方向、Y方向及びθ方向における相対的ずれ量ΔD(詳細にはΔx,Δy,Δθ)を算出する。
次いで、コントローラ700は、基板301,302間の相対的ずれ量ΔD(Δx,Δy,Δθ)に対応して、基板301,302を最終的に補正量-ΔD(-Δx,-Δy,-Δθ)だけ移動させるような補正移動の経路を計算する。
また、工程S104-3で測定が行われた相対位置から、一旦、接合面の接触状態での加圧を除去又は減圧させ、基板301,302が互いに中央部どうしでの接触状態を保ったままで、接合面にほぼ平行方向に基板301,302を相対的に移動させ、再び加圧することで、移動経路を形成してもよい。
上記の移動経路の形成は、例示であって、これに限定されない。
工程S104-6では、工程S104-5で決定された補正移動量だけ基板301,302を移動させる。あるいは、上記求められた移動経路に従って基板301,302を移動させる。これにより、測定された位置ずれが補正され、又は最小化される。
これには、コントローラ700は、工程S104-5で算出された補正経路に従って両基板301,302を移動させるように、各ステージ401,402の駆動機構403~407に指示を出す。
駆動機構403,404は、コントローラ700からの指示に応じ、2つの並進方向(X方向及びY方向)と回転方向(θ方向)とにステージ402を駆動し、これにより、両基板301,302が相対的に移動され、上記の位置ずれ量ΔDが補正される
真空引き工程S105では、位置ずれ量が許容誤差範囲内に収まるように、位置合わせがなされた基板302及び基板301の周囲の雰囲気を真空引きする。
これには、排気管202を開くとともに、真空ポンプ201を作動させることによって、排気管202を通してチャンバ200内の気体を外部に排出する。これによりチャンバ200内は減圧されて真空引きされ、チャンバ200内の雰囲気は真空又は低圧状態にされる。チャンバ200内の真空度が、所望の値に到達したら、その状態を維持する。
図15は、Z方向昇降駆動機構406により、基板301と302の中央部どうしが非接合状態を維持する圧力で突き合わせた状態、あるいは、基板301の中央部と基板302の中央部の距離を保った状態で、基板301の外周部と基板302の外周部との距離を縮め、基板どうしを重ね合わせた状態を示す正断面図である。
接合工程S106では、図15に示すように、基板301の接合面と基板302の接合面とを全面で突き合わせた後に接合する。
また、基板301,302の接合面どうしが全面で突き合わされた状態での加圧は、基板301,302に対して反対電荷を与えることで、この電荷による静電気の引力を用いて、電気的に基板301,302に対して加えてもよい。
基板301,302の接合面どうしが全面で突き合わされた状態での加圧の態様、方法、圧力などは、上記の例に限られず、種々の具体的な基板接合方法に応じて、適宜調節されてもよい。
加熱により、所望の特性を有する接合界面を形成させることができる。加熱により、最終的に所望の特性を有する接合界面を形成してもよい。加熱により、接合面近傍の原子の拡散を促進させることで、接合面の表面に存在する、最終的には不要な表面層を拡散させて除去し、新生表面が直接接触する接合界面を形成し、微視的な表面凹凸を減らして実質的な接合界面の面積を増大させることなどが可能になる。これにより、接合界面の機械的特性、電気特性、化学的特性など種々の特性を向上させることができる。
加熱は、上記の加圧と同時に行うことができる。又は、加熱時間と加圧時間とを一部又はすべてが重なるように、加熱と加圧とを行ってもよい。加熱と加圧とを同時に行うことにより、接合面近傍の原子の拡散を一層促進させて、得られる接合界面の特性を向上させ、また接合プロセスを一層効率化させることができる。
これにより、ウエハどうしの間でのボイドの発生を防ぐとともに、高い位置精度で接合することができる。
この状態では、水分子を接合面に挟んでいるため、OH基どうしが接合しておらず、接合面に影響を与えずに基板どうしを剥がすことができる。
このように、基板301と基板302との位置ズレ量が許容誤差範囲内となるまで繰り返すことで、基板301と基板302とを高精度に位置合わせすることができる。
基板301と基板302とを過大な圧力で突き合わせたり、長時間放置すると、基板301の接合面と基板302の接合面との間に介在する水が追い出されてしまい、基板301と基板302とが接合されてしまうことがある。そこで、基板301と基板302とが非接合状態を維持する圧力、言い換えると、基板301の接合面と基板302の接合面との間に水が介在した状態を維持させたままにすることで、基板301と基板302との位置合わせを円滑に行うことができる。
なお、本発明の基板どうしの接合方法、基板接合装置は、図面を参照して説明した上述の各実施形態に限定されるものではなく、その技術的範囲において様々な変形例が考えられる。
これにより、ヒータの配線が位置測定のために光源から発せられる光(上記の透過光と反射光を含む)に干渉することを避けることができる。また、初期設定の段階でヒータの配線が光源から発せられる光に干渉したとしても、ヒータ421を搭載する基板加熱手段420をZ軸周りに回転させることで、ヒータの配線を光路上から避けることができる。
さらに、チャンバ200を開いてその内部を大気暴露するだけでも、表面活性化処理を行うことができる。
これ以外にも、本発明の主旨を逸脱しない限り、上記実施の形態で挙げた構成を取捨選択したり、他の構成に適宜変更したりすることが可能である。
200 チャンバ
301 基板(第二の基板)
302 基板(第一の基板)
302c 中央部
302s 外周部
304 ステージ移動機構
400 基板支持手段
401 ステージ(第二基板保持部)
402 ステージ(第一基板保持部)
430 突出機構
431 押圧板(押圧部材)
431c 中央部
431s 外周部
440 保持機構
500 位置測定手段(位置合わせ部)
600 親水化処理手段
700 コントローラ
Claims (31)
- 第一の基板と第二の基板とを接合する方法であって、
前記第一の基板及び前記第二の基板のそれぞれの接合面の表面に水又はOH含有物質を付着させる親水化処理を行う工程と、
前記第一の基板と前記第二の基板とを、前記接合面どうしを対向させて配置するとともに、前記第一の基板を、前記接合面の外周部に対して中央部が前記第二の基板側に突出するように撓ませる工程と、
前記第一の基板の前記接合面と前記第二の基板の前記接合面とを、前記中央部どうしで突き合わせる工程と、
前記中央部どうしが非接合状態を維持する圧力で突き合わせた状態で、前記第一の基板の外周部と前記第二の基板の外周部との距離を縮め、前記第一の基板の前記接合面と前記第二の基板の前記接合面とを全面で突き合わせる突き合わせ工程と、
を備えることを特徴とする基板どうしの接合方法。 - 前記第一の基板が前記第二の基板よりも下方に位置することを特徴とする請求項1に記載の基板どうしの接合方法。
- 前記第二の基板を、前記接合面の外周部に対して中央部が前記第一の基板側に突出するように撓ませる工程をさらに備えることを特徴とする請求項1又は2に記載の基板どうしの接合方法。
- 前記第一の基板の前記接合面と前記第二の基板の前記接合面とを全面で突き合わせる突き合わせ工程では、
前記第一の基板の中央部と前記第二の基板の中央部の各底面からの距離を保った状態で、前記第一の基板の外周部と前記第二の基板の外周部との距離を縮め、前記第一の基板の前記接合面と前記第二の基板の前記接合面とを全面で突き合わせて接合することを特徴とする請求項1から3の何れか一項に記載の基板どうしの接合方法。 - 前記第一の基板及び前記第二の基板の少なくとも一方又は双方の少なくとも外周部のみを保持する請求項1から4の何れか一項に記載の基板どうしの接合方法。
- 前記第一の基板の前記接合面と前記第二の基板の前記接合面とを全面で突き合わせる突き合わせ工程の前に、
前記第一の基板と前記第二の基板との位置合わせを行う工程をさらに備えることを特徴とする請求項1から5の何れか一項に記載の基板どうしの接合方法。 - 前記第一の基板と前記第二の基板との位置合わせを行う工程は、
前記第一の基板の前記接合面と前記第二の基板の前記接合面とを、前記中央部どうしで突き合わせた状態で、前記第一の基板と前記第二の基板との位置ズレ量を測定し、
測定された前記位置ズレ量が許容誤差範囲を超えている場合には、前記第一の基板と前記第二の基板との位置ズレ量が小さくなるように前記第一の基板と前記第二の基板との相対位置を調整し、
前記位置ズレ量が許容誤差範囲内に収まるまで、前記第一の基板と前記第二の基板との前記位置ズレ量の測定と、前記第一の基板と前記第二の基板との相対位置の調整とを繰り返すことを特徴とする請求項6に記載の基板どうしの接合方法。 - 前記第一の基板と前記第二の基板との位置ズレ量を測定する工程は、
前記第一の基板の前記接合面と前記第二の基板の前記接合面とを、前記中央部どうしが非接合状態を維持する圧力又は時間で突き合わせた状態で行うことを特徴とする請求項7に記載の基板どうしの接合方法。 - 前記第一の基板の前記接合面と前記第二の基板の前記接合面とを全面で突き合わせる突き合わせ工程では、
前記第一の基板及び前記第二の基板の少なくとも一方又は双方を平板状として、対向する基板の前記接合面に突き合わせることを特徴とする請求項1から8のいずれか一項に記載の基板どうしの接合方法。 - 前記第一の基板の前記接合面と前記第二の基板の前記接合面とを全面で突き合わせる突き合わせ工程の後に、さらに接合工程を備え、接合工程では、
前記第一の基板と前記第二の基板とを加圧して接合することを特徴とする請求項9に記載の基板どうしの接合方法。 - 前記接合工程では、
前記第一の基板と前記第二の基板とを加熱して接合することを特徴とする請求項1から10のいずれか一項に記載の基板どうしの接合方法。 - 前記親水化処理で前記接合面に水又はOH含有物質を付着させるに先立ち、運動エネルギーを有した粒子を、前記第一の基板及び前記第二の基板のそれぞれの接合面の表面に衝突させる表面活性化処理を行うことを特徴とする請求項1から11のいずれか一項に記載の基板どうしの接合方法。
- 前記親水化処理で前記接合面に水又はOH含有物質を付着させるに先立ち、プラズマ処理、又は高速原子ビーム源、イオンビーム源の照射により、前記第一の基板及び前記第二の基板のそれぞれの接合面の表面活性化処理を行うことを特徴とする請求項1から12のいずれか一項に記載の基板どうしの接合方法。
- 前記親水化処理は、気体状の水を、前記接合面に付着させて行うことを特徴とする請求項1から13のいずれか一項に記載の基板どうしの接合方法。
- 前記親水化処理は、真空中で行われ、大気に暴露することなく前記接合面に水又はOH含有物質を付着させることを特徴とする請求項1から14のいずれか一項に記載の基板どうしの接合方法。
- 前記第一の基板と前記第二の基板との位置合わせを行う工程の前に、前記第二の基板を、前記接合面の外周部に対して中央部が前記第一の基板側に突出するように撓ませる工程をさらに備えることを特徴とする請求項6から15のいずれか一項に記載の基板どうしの接合方法。
- 撓ませた前記第一の基板を解放するに先立ち、前記第一の基板および前記第二の基板の周囲の雰囲気を真空引きする工程をさらに備えることを特徴とする請求項6から16のいずれか一項に記載の基板どうしの接合方法。
- 第一の基板を保持する第一基板保持部と、
第二の基板の接合面を前記第一の基板の接合面に対向させた状態で前記第二の基板を保持する第二基板保持部と、
前記第一の基板及び前記第二の基板のそれぞれの接合面に水又はOH含有物質を付着させる親水化処理手段と、
前記第一の基板を、前記接合面の外周部に対して中央部が前記第二の基板側に突出するように撓ませる第一突出機構と、
制御部と、を備え、
前記制御部は、前記第一突出機構によって前記第一の基板を前記接合面の外周面に対して中央部が突出するよう撓ませた状態で、撓ませた前記第一の基板の前記接合面を前記第二の基板の前記接合面に突き合わせて、前記中央部どうしが非接合状態を維持する圧力で突き合わせた状態で、前記第一の基板の外周部と前記第二の基板の外周部との距離を縮め、前記第一の基板の前記接合面と前記第二の基板の前記接合面とを全面で突き合わせることを特徴とする基板接合装置。 - 前記第一基板保持部が前記第二基板保持部よりも下方に位置することを特徴とする請求項18に記載の基板接合装置。
- 前記第二の基板を、前記接合面の外周部に対して中央部が前記第一の基板側に突出するように撓ませる第二突出機構をさらに備え、
前記第二の基板を、前記接合面の外周部に対して中央部が前記第一の基板側に突出するように撓ませることを特徴とする請求項18又は19に記載の基板接合装置。 - 前記第一の基板の中央部と前記第二の基板の中央部の各底面からの距離を保った状態で、前記第一の基板の外周部と前記第二の基板の外周部との距離を縮め、前記第一の基板の前記接合面と前記第二の基板の前記接合面とを全面で突き合わせることを特徴とする請求項18から20の何れか一項に記載の基板接合装置。
- 前記突出機構の一方が加圧制御され、前記突出機構の他方が突出距離が数値制御されたアクチュエータであることを特徴とする請求項19に記載の基板接合装置。
- 前記第一基板保持部又は前記第二基板保持部に、前記第一の基板を保持する第一基板保持機構及び前記第二の基板を保持する第二基板保持機構の少なくとも一方又は双方をさらに備えることを特徴とする請求項18から22の何れか一項に記載の基板接合装置。
- 前記第一基板保持機構又は前記第二基板保持機構が、基板の外周部のみ保持することを特徴とする請求項23に記載の基板接合装置。
- 前記第一基板保持機構又は前記第二基板保持機構が、静電チャックであることを特徴とする請求項23又は24に記載の基板接合装置。
- 前記第一基板保持機構又は前記第二基板保持機構が、真空吸着方式であり、前記基板保持部の前記基板の周辺部を保持する吸着溝と前記基板の中央部を保持する吸着溝とが分離したことを特徴とする請求項23又は25に記載の基板接合装置。
- 前記第一の基板と前記第二の基板との位置合わせを行う位置合わせ部をさらに備え、
前記第一の基板の前記接合面と前記第二の基板の前記接合面とを全面で突き合わせて接合する前に、前記位置合わせ部によって前記第一の基板と前記第二の基板との位置合わせを行うことを特徴とする請求項18から26の何れか一項に記載の基板接合装置。 - 前記第一基板保持部に、前記第一の基板を保持する保持面を形成し、前記突出機構により中央部が前記第二の基板側に突出するように撓む押圧部材をさらに備えることを特徴とする請求項18から27の何れか一項に記載の基板接合装置。
- 前記第一の基板及び前記第二の基板の周囲の雰囲気を真空引きするチャンバをさらに備えることを特徴とする請求項18から28の何れか一項に記載の基板接合装置。
- 前記位置合わせ部は、
前記第一の基板の前記接合面と前記第二の基板の前記接合面とを、前記中央部どうしで突き合わせた状態で、前記第一の基板と前記第二の基板との位置ズレ量を測定し、
測定された前記位置ズレ量が許容誤差範囲を超えている場合には、前記第一の基板と前記第二の基板との位置ズレ量が小さくなるように前記第一の基板と前記第二の基板との相対位置を調整し、
前記位置ズレ量が許容誤差範囲内に収まるまで、前記第一の基板と前記第二の基板との前記位置ズレ量の測定と、前記第一の基板と前記第二の基板との相対位置の調整とを繰り返すことを特徴とする請求項27から29のいずれか一項に記載の基板接合装置。 - 前記第一の基板の前記接合面と前記第二の基板の前記接合面とを全面で突き合わせるときに、
前記第一の基板及び前記第二の基板の少なくとも一方又は双方を平板状として、対向する基板の前記接合面に突き合わせることを特徴とする請求項18から30のいずれか一項に記載の基板接合装置。
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US15/519,542 US10580752B2 (en) | 2014-10-17 | 2015-10-19 | Method for bonding substrates together, and substrate bonding device |
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