WO2016008287A1 - 烤灯、沉积装置、提高光纤预制棒疏松体密度的方法 - Google Patents

烤灯、沉积装置、提高光纤预制棒疏松体密度的方法 Download PDF

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Publication number
WO2016008287A1
WO2016008287A1 PCT/CN2015/070557 CN2015070557W WO2016008287A1 WO 2016008287 A1 WO2016008287 A1 WO 2016008287A1 CN 2015070557 W CN2015070557 W CN 2015070557W WO 2016008287 A1 WO2016008287 A1 WO 2016008287A1
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Prior art keywords
deposition
optical fiber
fiber preform
loose body
torch
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PCT/CN2015/070557
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English (en)
French (fr)
Inventor
肖华
赵奉阔
田国才
王友兵
屠建宾
李晓东
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江苏亨通光电股份有限公司
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Priority to BR112015020124A priority Critical patent/BR112015020124A2/pt
Publication of WO2016008287A1 publication Critical patent/WO2016008287A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/0148—Means for heating preforms during or immediately prior to deposition
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C03B2207/54—Multiple burner arrangements combined with means for heating the deposit, e.g. non-deposition burner

Definitions

  • the invention relates to the field of optical fiber preform manufacturing, in particular to a baking lamp for improving the density of an optical fiber preform loose body, a method for improving the density of the optical fiber preform loose body by using the baking lamp, and a fiber preform preform loose body
  • a deposition apparatus a method of the deposition apparatus for increasing the density of an optical fiber preform.
  • the VAD process deposits the optical fiber preform preform fiber loose body, and the optical fiber preform loose body grows along the axial direction.
  • the surface temperature of the upper loose body gradually decreases. Due to the lower temperature, the soot density is smaller, and finally a loose layer of 5-30 mm density is deposited on the surface of the loose body. Due to the small density of the surface layer, a large density gradient is formed with the inner fiber preform preform loose body, which is likely to cause cracking of the optical fiber preform loose body during the sintering process.
  • the loose body is also highly susceptible to vibration and cracking.
  • Patent Document Publication No. 103241938A A Method for Manufacturing an Optical Fiber Preform and a Manufacturing Apparatus thereof, for controlling the surface temperature distribution of an optical fiber preform by using a thermal imager, and adjusting the gas flow rate to control the density of the optical fiber preform loose body, the method capable of The density between the two burners is well controlled, but the problem of the loose density of the surface fiber preforms is not solved.
  • the present invention provides a baking lamp for improving the density of the optical fiber preform loose body, and the method for improving the density of the optical fiber preform loose body by using the baking lamp, and the optical fiber A deposition apparatus for a preform loose body, a method of increasing the density of an optical fiber preform loose body.
  • the present invention is achieved by a baking lamp for increasing the density of an optical fiber preform loose body, the baking lamp comprising a first ventilation zone and coaxially disposed with the first ventilation zone as an axis a second ventilation zone, a third ventilation zone, a fourth ventilation zone, and a fifth ventilation zone disposed in sequence, wherein the first ventilation zone and the fifth ventilation zone are both provided with a combustion-supporting gas, the second ventilation zone and the fourth ventilation zone
  • the venting zone is provided with an insulating gas
  • the third venting zone is provided with gas.
  • the invention also provides a method for increasing the density of an optical fiber preform loose body, which adopts the above-mentioned baking lamp and a deposition device of an optical fiber preform loose body to achieve the purpose of increasing the density of the optical fiber preform loose body, the deposition device comprising the first deposition blowtorch a second deposition torch for depositing the optical fiber preform loose body during the rotating process using the first deposition torch and the second deposition torch, the method comprising the steps of:
  • the first deposition torch and the second deposition torch are located in a same vertical plane, the vertical plane being parallel to a central axis of rotation of the optical fiber preform loose body, the second deposition torch being located at the first deposition Above the burner, the baking lamp is not in the vertical plane and is installed obliquely above the second deposition burner along the rotation direction of the optical fiber preform loose body; the first deposition burner, the second deposition burner, the baking lamp satisfy The following relationship: 0 ⁇ (cb) ⁇ (ba), wherein a is the height of the deposition point of the first deposition torch away from the bottom end of the optical fiber preform, and b is the deposition point of the second deposition torch away from the fiber The height of the bottom end of the preform loose body, c is the height of the burning point of the baking lamp from the bottom end of the optical fiber preform loose body;
  • the first venting zone and the fifth venting zone are both provided with a combustion-supporting gas, and the second venting zone and the fourth venting zone are both provided with an isolation gas, and the third venting zone is provided with a gas ;
  • the first deposition torch and the second deposition torch are turned on, and a core layer and a cladding layer are respectively deposited on the optical fiber preform loose body.
  • the first ventilation zone is provided with a mixture of 5 slm O 2 and 10 slm of pure air
  • the second ventilation zone is connected with 5 slm Ar
  • the third ventilation zone is provided with 50 slm H 2
  • the fourth ventilation zone is open.
  • the fifth venting zone is connected with a mixture of 10slm O2 and 20slm of pure air, which refers to the gas obtained by removing the oil and removing solid impurities.
  • the present invention also provides a deposition apparatus comprising a first deposition torch, a second deposition torch, a baking lamp, the deposition device for applying the first deposition torch, the second deposition to the optical fiber preform loose body during rotation
  • the burner is deposited, the two deposition burners are located in the same vertical plane, the vertical plane is parallel to the central axis of rotation of the optical fiber preform loose body, and the second deposition burner is located above the first deposition burner, the baking light is not in the
  • the first deposition lamp, the second deposition torch, and the baking lamp satisfy the following relationship in a vertical plane and along a rotation direction of the optical fiber preform loose body; 0 ⁇ (cb) ⁇ (ba), where a is the height of the deposition point of the first deposition torch from the bottom end of the optical fiber preform loose body, and b is the height of the deposition point of the second deposition burner from the bottom end of the optical fiber preform loose body, c is the height of the burning point of the baking lamp from the
  • the baking lamp is the above-mentioned baking lamp, that is, the baking lamp comprises a first ventilation zone and a second ventilation arranged coaxially with the first ventilation zone as an axis and arranged from the inside to the outside. a third venting zone, a fourth venting zone, and a fifth venting zone, wherein the first venting zone and the fifth venting zone are both provided with a combustion-supporting gas, and the second venting zone and the fourth venting zone are each provided with an insulating gas
  • the third venting zone is connected to the gas.
  • the angle ⁇ formed by the baking lamp to the second deposition burner satisfies the relationship: 20° ⁇ ⁇ ⁇ 60°.
  • the angle ⁇ satisfies the relationship: 30° ⁇ ⁇ ⁇ 45.
  • the elevation angle ⁇ of the baking lamp satisfies the relationship: 15° ⁇ ⁇ ⁇ 60°.
  • the elevation angle ⁇ satisfies the relationship: 20° ⁇ ⁇ ⁇ 30°.
  • the present invention also provides a method for increasing the density of an optical fiber preform loose body, which is applied to any of the above deposition apparatuses, the method comprising the steps of:
  • the first deposition torch and the second deposition torch are turned on, and a core layer and a cladding layer are respectively deposited on the optical fiber preform loose body.
  • the burning position of the baking lamp is between the tapered surface and the stable section of the optical fiber preform loose body.
  • the invention improves the surface density of the optical fiber preform loose body by heating the surface of the optical fiber preform loose body by adding a baking lamp in the rotating direction of the optical fiber preform loose body and obliquely above the second deposition burner, and the method can avoid the baking lamp
  • the flame interferes with the deposition area of the second deposition torch, and at the same time heats each layer of the optical fiber preform loose body deposited above the second deposition burner to increase the density of the optical fiber preform loose body above the second deposition burner, which is better Controlling the surface density distribution of the optical fiber preform loose body solves the problem of cracking of the optical fiber preform loose body.
  • FIG. 1 is a schematic view showing the application of a deposition apparatus provided by a preferred embodiment of the present invention to realize the deposition of an optical fiber preform loose body.
  • Figure 2 is a schematic view showing the position of the deposition apparatus of Figure 1.
  • Figure 3 is a plan view of Figure 2.
  • Figure 4 is a cross-sectional view of Figure 3.
  • Figure 5 is a cross-sectional view showing the structure of a baking lamp according to a preferred embodiment of the present invention.
  • Fig. 6 is a comparison diagram of the density distribution curve of the optical fiber preform loose body.
  • FIG. 1 is a schematic diagram of an application of depositing an optical fiber preform loose body 104 by using a deposition apparatus provided by a preferred embodiment of the present invention.
  • the deposition apparatus includes a first deposition torch 101, a second deposition torch 102, and a baking lamp 103.
  • the deposition apparatus is used to deposit the optical fiber preform loose body 104 by using the first deposition torch 101 and the second deposition torch 102 during the rotation.
  • the first deposition torch 101 and the second deposition torch 102 are located in the same vertical plane, which is parallel to the central axis of rotation of the optical fiber preform loose body 104, and the second deposition burner 102 is located above the first deposition burner 101.
  • the baking lamp 103 is not in the vertical plane and is installed obliquely above the second deposition burner 102 in the rotational direction 105 of the optical fiber preform loose body 104; the first deposition burner 101, the second deposition burner 102, and the baking lamp 103 satisfy the following Relational formula: 0 ⁇ (cb) ⁇ (ba), where a is the height of the deposition point of the first deposition torch 101 from the bottom end of the optical fiber preform loose body 104, and b is the deposition point of the second deposition burner 102 from the optical fiber preform The height of the bottom end of the loose body 104, c is the height of the burning point of the baking lamp 103 from the bottom end of the optical fiber preform loose body 104.
  • the angle ⁇ formed by the baking lamp 103 to the second deposition burner 102 can satisfy the relationship: 20° ⁇ ⁇ ⁇ 60°.
  • the angle of the angle ⁇ is selected to avoid the interference of the baking lamp 103 on the second deposition torch 102.
  • the baking lamp 103 and the second deposition torch 102 are no longer in the same vertical plane, and the baking lamp 103 can be avoided from the second deposition burner 102.
  • the temperature at which the deposition position (i.e., deposition point) of the second deposition torch 102 is caused is too high to facilitate the adhesion of the soot.
  • the burning position of the grilling lamp 103 is between the tapered surface and the stabilizing section of the optical fiber preform loose body 104.
  • the angle ⁇ satisfies the relationship: 30° ⁇ ⁇ ⁇ 45.
  • the elevation angle ⁇ of the grilling lamp 103 can satisfy the relationship: 15° ⁇ ⁇ ⁇ 60°.
  • the angle of the elevation angle ⁇ is selected: the second deposition lamp 102 has a large soot attachment area, and the upward rotation of the baking lamp 103 helps to cauterize the area deposited by the second deposition burner 102.
  • the angle of the elevation angle ⁇ is too large, and the flame dispersion area is large. The temperature of the burning surface will naturally decrease, and the burning effect will be worse; the angle of the elevation angle ⁇ is too small, the burning area of the flame is small, the temperature of the burning surface is higher, and the high temperature is unfavorable for the adhesion of the second deposition burner 102 to the soot. of.
  • the elevation angle ⁇ satisfies the relationship: 20° ⁇ ⁇ ⁇ 30°.
  • the reason why the baking lamp 103 is installed downstream of the rotation of the optical fiber preform loose body 104 and at a certain angle with the vertical surface of the second deposition burner 102 is mainly as follows: the second deposition burner 102 is deposited on the optical fiber preform.
  • the temperature of the soot on the surface of the loose body 104 gradually decreases during the rotation until the flame of the second deposition torch 102 is again burned, during which the baking lamp 103 continuously heats the soot above the second deposition burner 102 to improve Fiber
  • the density of the preform loose body 104 if the baking light 103 is too close to the second deposition burner 102, the flame of the second deposition burner 102 is disturbed, if too far, the loose body above the second deposition burner 102 is heated
  • the time to cool again is shorter, resulting in a high surface temperature of the loose body which is not conducive to the adhesion of the soot.
  • the baking lamp 103 may include a first ventilation zone 103A and a second ventilation zone 103B and a third ventilation zone 103C which are coaxially disposed with the first ventilation zone 103A as an axis and are disposed in order from the inside out.
  • the first venting zone 103A and the fifth venting zone 103E are both provided with a combustion-supporting gas, and the combustion gas may use pure air, O2 or a mixed gas of pure air and O2, and the pure air refers to a gas obtained by removing the oil and removing solid impurities.
  • the second venting zone 103B and the fourth venting zone 103D are both provided with an insulating gas, and the insulating gas may be an inert gas such as nitrogen or fluorine.
  • the third venting zone 103C is connected to the gas, and the gas used in the baking lamp 103 can be the same as the gas used in any of the burners.
  • the first deposition torch 101 is provided with SiCl4 and GeCl4, H2, O2 and Ar.
  • the deposition forms a core layer;
  • the second deposition torch 102 is passed through SiCl4, and H2, O2 and Ar are deposited to form a cladding.
  • the structure design of the baking lamp 103 can realize a certain proportion of gas and combustion-supporting gas in the baking lamp 103, which can ensure full combustion of the gas, and the use of the isolation gas between the gas and the combustion-supporting gas can prevent the gas and the combustion gas of the burner 103 from being blown at the burner.
  • the mouth burns, causing the temperature to be too high and damaging the blowtorch 103.
  • the method for increasing the density of the optical fiber preform loose body 104 of the deposition apparatus comprises the following steps: 1. Turning on the baking lamp 103: a combustion gas is provided in both the first ventilation zone 103A and the fifth ventilation zone 103E, and the second ventilation zone 103B is The fourth venting zone 103D is provided with an isolating gas, and the third venting zone 103C is connected with the gas; 2. The first deposition blasting lamp 101 is opened, and the second depositional blasting lamp 102 is correspondingly deposited on the optical fiber preform loose body 104 to form a core layer and a package. Floor.
  • the first deposition torch 101 and the second deposition torch 102 respectively pass gas and raw materials (the first deposition torch 101 can pass through SiCl4 and GeCl4, and the second deposition torch 102 can pass through SiCl4) in the optical fiber preform loose body.
  • a core layer and a cladding layer are formed correspondingly on 104.
  • the first deposition burner 101, the second deposition burner 102, and the baking lamp 103 may be formed into a member by using a fixing frame.
  • the baking lamp 103 can also be simply added to the conventional deposition apparatus.
  • the corresponding method for increasing the density of the optical fiber preform loose body 104 includes the following steps:
  • the baking lamp 103 is not in the vertical plane (the vertical plane is the vertical plane formed by the first deposition torch 101 and the second deposition torch 102), and along the optical fiber preform loose body 104
  • the rotation direction 105 is installed obliquely above the second deposition torch 102; the first deposition torch 101, the second deposition torch 102, and the baking lamp 103 satisfy the above relationship: 0 ⁇ (cb) ⁇ (ba);
  • the first venting zone 103A and the fifth venting zone 103E are both provided with a combustion-supporting gas
  • the second venting zone 103B and the fourth venting zone 103D are both provided with an isolating gas
  • the third venting zone 103C is provided with a gas.
  • the first deposition torch 101 and the second deposition torch 102 are turned on, and a core layer and a cladding layer are formed on the optical fiber preform loose body 104, respectively.
  • a curve 1 is a density distribution curve of the optical fiber preform loose body 104 obtained by the method in which the deposition device does not turn on the baking lamp 103; and a curve 2 is an optical fiber preform prepared by the deposition device turning on the baking lamp 103.
  • the density distribution curve of the loose body 104 is a density distribution curve of the optical fiber preform loose body 104 obtained by the method in which the deposition device does not turn on the baking lamp 103; and a curve 2 is an optical fiber preform prepared by the deposition device turning on the baking lamp 103.
  • the first deposition torch 101 is filled with a raw material (SiCl4 and GeCl4), and the gas (H2, O2 and Ar) is deposited to form a core layer; the second deposition torch 102 is fed with a raw material (SiCl4), and gas (H2, O2 and Ar) The deposit forms a cladding, and the lamp 103 does not pass any gas.
  • the first deposition torch 101 and the second deposition torch 102 are both turned on, and the baking lamp 103 is not turned on.
  • Such a deposition device is also opposed to a conventional deposition device.
  • the deposition point height a of the first deposition torch 101 is 20 mm; the deposition point height b of the second deposition torch 102 is 120 mm, the burning point height c of the baking lamp 103 is 170 mm, and the horizontal position of the baking lamp 103 and the second deposition torch 102
  • the angle ⁇ is 30°, and the elevation angle ⁇ of the baking lamp 103 is 45°.
  • the first deposition torch 101 is filled with a raw material (SiCl4 and GeCl4), and the gas (H2, O2 and Ar) is deposited to form a core layer; the second deposition torch 102 is fed with a raw material (SiCl4), and gas (H2, O2 and Ar) Deposition forms a cladding.
  • the first venting zone 103A of the grilling lamp 103 is connected with 5slm O2 and 10slm of pure air to form a mixed gas
  • the second venting zone 103B is connected with 5slm Ar
  • the third venting zone 103C is connected with 50slmH2
  • the fourth venting zone 103D is connected by 8slmAr.
  • the fifth venting zone 103E is supplied with a mixture of 10 slm O2 and 20 slm of pure air.
  • the first deposition torch 101, the second deposition torch 102, and the baking lamp 103 are all turned on.
  • Pure air as defined above refers to a gas obtained by removing air from oil and removing solid impurities. Slm is an abbreviation for standard litre per minute, which means 1L/min flow under standard conditions.
  • the deposition point height a of the first deposition torch 101 is 20 mm; the height b of the deposition point of the second deposition torch 102 is 120 mm, the height c of the burning point of the baking lamp 103 is 170 mm, and the horizontal position of the baking lamp 103 and the second deposition torch 102
  • the angle ⁇ is 30°, and the elevation angle ⁇ of the baking lamp 103 is 45°.
  • the present invention passes through the rotational direction 105 of the optical fiber preform loose body 104 and at the second deposition burner 102.
  • the method can avoid the interference of the flame 103 of the flame to the deposition area of the second deposition burner 102, and at the same time
  • Each layer of the optical fiber preform loose body 104 deposited above the second deposition torch 102 can be heated to increase the density of the optical fiber preform loose body 104 above the second deposition burner 102.
  • This method can better control the optical fiber preform loose body 104.
  • the surface density distribution solves the problem of cracking of the optical fiber preform loose body 104.

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Abstract

一种烤灯、沉积装置以及提高光纤预制棒疏松体密度的方法。该沉积装置包括烤灯和两个沉积喷灯，两个沉积喷灯位于同一竖直平面内，第二沉积喷灯位于第一沉积喷灯上方，烤灯不在该竖直平面内且沿光纤预制棒疏松体的旋转方向安装在第二沉积喷灯的斜上方。烤灯和两个沉积喷灯满足0≤(c-b)≤(b-a)，a、b、c分别为第一沉积喷灯的沉积点、第二沉积喷灯的沉积点、烤灯的灼烧点距离光纤预制棒疏松体底端的高度。应用该沉积装置能够提高光纤预制棒疏松体密度。

Description

烤灯、沉积装置、提高光纤预制棒疏松体密度的方法 技术领域
本发明涉及光纤预制棒制造领域，尤其涉及用于提高光纤预制棒疏松体密度的一种烤灯、采用该烤灯实现一种提高光纤预制棒疏松体密度的方法、光纤预制棒疏松体的一种沉积装置、该沉积装置的一种提高光纤预制棒疏松体密度的方法。
背景技术
VAD工艺沉积光纤预制棒光纤预制棒疏松体，光纤预制棒疏松体沿轴向生长，在生长过程中，上部松散体表面温度逐渐下降。由于温度较低，烟灰密度较小，最终松散体表面沉积5～30mm密度较小的松软层。由于表层密度较小，与内层较大的光纤预制棒疏松体形成较大的密度梯度，在烧结过程中容易造成光纤预制棒疏松体的开裂。同时，在转运过程中，松散体也极易受到震动的影响而开裂。
专利文献公开号103241938A《一种光纤预制棒的制造方法及其制造设备》通过使用热成像仪监控光纤预制棒疏松体表面温度分布，调整气体流量来控制光纤预制棒疏松体的密度，该方法能够很好的控制两个喷灯之间的密度，但无法解决表层光纤预制棒疏松体密度较小的问题。
发明内容
为了解决表层光纤预制棒疏松体密度较小的问题，本发明提供用于提高光纤预制棒疏松体密度的一种烤灯、采用该烤灯实现一种提高光纤预制棒疏松体密度的方法、光纤预制棒疏松体的一种沉积装置、该沉积装置的一种提高光纤预制棒疏松体密度的方法。
本发明是这样实现的，一种烤灯，其用于提高光纤预制棒疏松体的密度，该烤灯包括第一通气区和以该第一通气区为轴心而同轴设置且由内而外依次设置的第二通气区、第三通气区、第四通气区、第五通气区，该第一通气区与该第五通气区均通有助燃气体，该第二通气区与该第四通气区均通有隔离气体，该第三通气区通有燃气。
本发明还提供一种提高光纤预制棒疏松体密度的方法，其采用上述烤灯配合一个光纤预制棒疏松体的沉积装置实现提高光纤预制棒疏松体密度的目的，该沉积装置包括第一沉积喷灯、第二沉积喷灯，该沉积装置用于对光纤预制棒疏松体在旋转过程中采用该第一沉积喷灯、该第二沉积喷灯进行沉积，该方法包括以下步骤：
安置该烤灯：该第一沉积喷灯、该第二沉积喷灯位于同一竖直平面内，该竖直平面平行于该光纤预制棒疏松体的旋转中心轴，该第二沉积喷灯位于该第一沉积喷灯上方，该烤灯不在该竖直平面内且沿该光纤预制棒疏松体的旋转方向安装在该第二沉积喷灯的斜上方；该第一沉积喷灯、该第二沉积喷灯、该烤灯满足以下关系式：0≤(c-b)≤(b-a)，其中，a为该第一沉积喷灯的沉积点距离该光纤预制棒疏松体底端的高度，b为该第二沉积喷灯的沉积点距离该光纤预制棒疏松体底端的高度，c为该烤灯的灼烧点距离该光纤预制棒疏松体底端的高度；
开启该烤灯：在该第一通气区与该第五通气区均通有助燃气体，在该第二通气区与该第四通气区均通有隔离气体，在该第三通气区通有燃气；
开启该第一沉积喷灯、该第二沉积喷灯，在该光纤预制棒疏松体上相应沉积形成芯层和包层。
作为上述方案的进一步改进，该第一通气区通有5slm O2和10slm纯净空气组成测混合气，该第二通气区通有5slm Ar，该第三通气区通有50slmH2，该第四通气区通有8slmAr，该第五通气区通有10slm O2和20slm纯净空气组成的混合气，该纯净空气是指空气经过除油污，除固体杂质而获得的气体。
本发明还提供一种沉积装置，其包括第一沉积喷灯、第二沉积喷灯、烤灯，该沉积装置用于对光纤预制棒疏松体在旋转过程中采用该第一沉积喷灯、该第二沉积喷灯进行沉积，两个沉积喷灯位于同一竖直平面内，该竖直平面平行于该光纤预制棒疏松体的旋转中心轴，该第二沉积喷灯位于该第一沉积喷灯上方，该烤灯不在该竖直平面内且沿该光纤预制棒疏松体的旋转方向安装在该第二沉积喷灯的斜上方；该第一沉积喷灯、该第二沉积喷灯、该烤灯满足以下关系式：0≤(c-b)≤(b-a)，其中，a为该第一沉积喷灯的沉积点距离该光纤预制棒疏松体底端的高度，b为该第二沉积喷灯的沉积点距离该光纤预制棒疏松体底端的高度，c为该烤灯的灼烧点距离该光纤预制棒疏松体底端的高度。
作为上述方案的进一步改进，该烤灯为上述烤灯，即：该烤灯包括第一通气区和以该第一通气区为轴心而同轴设置且由内而外依次设置的第二通气区、第三通气区、第四通气区、第五通气区，该第一通气区与该第五通气区均通有助燃气体，该第二通气区与该第四通气区均通有隔离气体，该第三通气区通有燃气。
作为上述方案的进一步改进，沿该光纤预制棒疏松体的旋转方向，该烤灯到该第二沉积喷灯构成的夹角θ满足关系式：20°≤θ≤60°。优选地，夹角θ满足关系式：30°≤ θ≤45。
作为上述方案的进一步改进，该烤灯的仰角ω满足关系式：15°≤ω≤60°。优选地，仰角ω满足关系式：20°≤ω≤30°。
本发明还提供一种提高光纤预制棒疏松体密度的方法，其应用于上述任意一种沉积装置，该方法包括以下步骤：
开启该烤灯；
开启该第一沉积喷灯、该第二沉积喷灯，在该光纤预制棒疏松体上相应沉积形成芯层和包层。
作为上述方案的进一步改进，该烤灯的灼烧位置在该光纤预制棒疏松体的锥面和稳定段之间。
本发明通过在光纤预制棒疏松体旋转方向并在第二沉积喷灯的斜上方增加烤灯，对光纤预制棒疏松体表面进行加热来提高光纤预制棒疏松体表面密度，此方法既可以避免烤灯火焰对第二沉积喷灯沉积区域干扰，同时又能对第二沉积喷灯上方沉积的每层光纤预制棒疏松体进行加热，提高第二沉积喷灯上方光纤预制棒疏松体的密度，此方法能够更好的控制光纤预制棒疏松体的表面密度分布，解决了光纤预制棒疏松体的开裂问题。
附图说明
图1为采用本发明较佳实施方式提供的沉积装置实现光纤预制棒疏松体沉积的应用示意图。
图2为图1中沉积装置的位置示意图。
图3为图2的俯视图。
图4为图3的剖面图。
图5为本发明较佳实施方式提供的烤灯的结构剖视图。
图6为光纤预制棒疏松体的密度分布曲线对照图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅用以解释本发明，并不 用于限定本发明。
请参阅图1，其为采用本发明较佳实施方式提供的沉积装置实现光纤预制棒疏松体104沉积的应用示意图。
请结合图2、图3、图4，该沉积装置包括第一沉积喷灯101、第二沉积喷灯102、烤灯103。该沉积装置用于对光纤预制棒疏松体104在旋转过程中采用第一沉积喷灯101、第二沉积喷灯102进行沉积。
第一沉积喷灯101、第二沉积喷灯102位于同一竖直平面内，该竖直平面平行于该光纤预制棒疏松体104的旋转中心轴，第二沉积喷灯102位于第一沉积喷灯101上方。
烤灯103不在该竖直平面内且沿该光纤预制棒疏松体104的旋转方向105安装在第二沉积喷灯102的斜上方；第一沉积喷灯101、第二沉积喷灯102、烤灯103满足以下关系式：0≤(c-b)≤(b-a)，其中，a为第一沉积喷灯101的沉积点距离光纤预制棒疏松体104底端的高度，b为第二沉积喷灯102的沉积点距离光纤预制棒疏松体104底端的高度，c为烤灯103的灼烧点距离光纤预制棒疏松体104底端的高度。
沿该光纤预制棒疏松体104的旋转方向，烤灯103到第二沉积喷灯102构成的夹角θ可满足关系式：20°≤θ≤60°。夹角θ的角度选择是为了避免烤灯103对第二沉积喷灯102的干扰，烤灯103和第二沉积喷灯102不再同一竖直平面，可以避免因烤灯103离第二沉积喷灯102太近，导致第二沉积喷灯102的沉积位置(即沉积点)温度过高而不利于烟灰的附着。如果离得太远，第二沉积喷灯102上方的密度小的松软层已经形成，烤灯103的灼烧只能提高松软层表层的密度，无法解决松软层密度低的问题。烤灯103的灼烧位置在光纤预制棒疏松体104的锥面和稳定段之间。优选，夹角θ满足关系式：30°≤θ≤45。
烤灯103的仰角ω可满足关系式：15°≤ω≤60°。仰角ω的角度选择：第二沉积喷灯102的烟灰附着面积较大，烤灯103上仰有助于对第二沉积喷灯102所沉积的区域进行烧灼，仰角ω的角度太大，火焰分散面积大，烧灼面的温度自然会下降，烧灼的效果就会越差；仰角ω的角度太小，火焰集中烧灼面积小，烧灼面温度就越高，温度高对第二沉积喷灯102的烟灰附着是不利的。优选，仰角ω满足关系式：20°≤ω≤30°。
烤灯103之所以安装在光纤预制棒疏松体104转动的下游，且与第二沉积喷灯102所在竖直面存在一定的角度，主要作用有以下几点：第二沉积喷灯102沉积在光纤预制棒疏松体104表面的烟灰在转动过程中温度逐渐降低，直至第二沉积喷灯102的火焰再次灼烧时，在此转动过程中，烤灯103对第二沉积喷灯102上方的烟灰进行持续加热可提高光纤 预制棒疏松体104的密度；如果烤灯103离第二沉积喷灯102太近，则干扰第二沉积喷灯102的火焰，如果，离得太远，第二沉积喷灯102上方的疏松体被加热后再次冷却的时间较短，导致疏松体表面温度高而不利于烟灰的附着。
请参阅图5，烤灯103可包括第一通气区103A和以该第一通气区103A为轴心而同轴设置且由内而外依次设置的第二通气区103B、第三通气区103C、第四通气区103D、第五通气区103E。
第一通气区103A与第五通气区103E均通有助燃气体，助燃气可以使用纯净空气、O2或者纯净空气和O2的混合气体，纯净空气是指空气经过除油污，除固体杂质而获得的气体。第二通气区103B与第四通气区103D均通有隔离气体，该隔离气体可为氮气或氟气等惰性气体。第三通气区103C通有燃气，烤灯103所使用的燃气可与任一喷灯所使用的燃气相同，在本实施方式中，第一沉积喷灯101中通入SiCl4和GeCl4，H2，O2和Ar沉积形成芯层；第二沉积喷灯102通入SiCl4，H2，O2和Ar沉积形成包层。
烤灯103的结构设计可以实现在烤灯103内通有一定比例的燃气和助燃气体，能保证燃气充分燃烧，燃气和助燃气体之间使用隔离气体，可以防止喷灯103的燃气和助燃气在喷灯口燃烧，导致温度过高而损坏喷灯103。
该沉积装置的提高光纤预制棒疏松体104密度的方法包括以下步骤：1、开启烤灯103：在第一通气区103A与第五通气区103E均通有助燃气体，在第二通气区103B与第四通气区103D均通有隔离气体，在第三通气区103C通有燃气；2、开启第一沉积喷灯101、第二沉积喷灯102在光纤预制棒疏松体104上相应沉积形成芯层和包层。具体地，往第一沉积喷灯101、第二沉积喷灯102分别通入燃气和原料(第一沉积喷灯101可通入SiCl4和GeCl4，第二沉积喷灯102可通入SiCl4)在光纤预制棒疏松体104上相应沉积形成芯层和包层。
为了便于推广该提高光纤预制棒疏松体104密度的方法，可以将第一沉积喷灯101、第二沉积喷灯102、烤灯103采用固定架做成一个构件。在其它实施方式中，也可以在传统的沉积装置上单纯增加烤灯103，此时，相应的提高光纤预制棒疏松体104密度的方法包括以下步骤：
安置烤灯103：烤灯103不在该竖直平面内(该竖直平面即为上述第一沉积喷灯101、第二沉积喷灯102形成的竖直平面)，且沿该光纤预制棒疏松体104的旋转方向105安装在第二沉积喷灯102的斜上方；第一沉积喷灯101、第二沉积喷灯102、烤灯103满足上述关系式：0≤(c-b)≤(b-a)；
开启烤灯103：在第一通气区103A与第五通气区103E均通有助燃气体，在第二通气区103B与第四通气区103D均通有隔离气体，在第三通气区103C通有燃气；
开启第一沉积喷灯101、第二沉积喷灯102，在光纤预制棒疏松体104上相应沉积形成芯层和包层。
请参阅图6，曲线1是该沉积装置没有开启烤灯103的方法制得的光纤预制棒疏松体104的密度分布曲线；曲线2是该沉积装置开启烤灯103的方法制得的光纤预制棒疏松体104的密度分布曲线。
1、曲线1获得方式
第一沉积喷灯101中通入原料(SiCl4和GeCl4)，和燃气(H2，O2和Ar)沉积形成芯层；第二沉积喷灯102通入原料(SiCl4)，和燃气(H2，O2和Ar)沉积形成包层，烤灯103不通入任何气体。第一沉积喷灯101、第二沉积喷灯102均开启了，烤灯103没有开启，这样的沉积装置也就相对于传统的沉积装置。
第一沉积喷灯101的沉积点高度a为20mm；第二沉积喷灯102的沉积点高度b为120mm，烤灯103的灼烧点高度c为170mm，烤灯103与第二沉积喷灯102的水平夹角θ为30°，烤灯103的仰角ω为45°。
2、曲线2获得方式
第一沉积喷灯101中通入原料(SiCl4和GeCl4)，和燃气(H2，O2和Ar)沉积形成芯层；第二沉积喷灯102通入原料(SiCl4)，和燃气(H2，O2和Ar)沉积形成包层。烤灯103的第一通气区103A通有5slm O2和10slm纯净空气组成测混合气，第二通气区103B通有5slm Ar，第三通气区103C通有50slmH2，第四通气区103D通有8slmAr，第五通气区103E通有10slm O2和20slm纯净空气组成的混合气。第一沉积喷灯101、第二沉积喷灯102、烤灯103均开启了。纯净空气如上述定义是指空气经过除油污，除固体杂质而获得的气体。slm是standard litre per minute的缩写，意思是标准状态下1L/min的流量。
第一沉积喷灯101的沉积点高度a为20mm；第二沉积喷灯102的沉积点高度b为120mm，烤灯103灼烧点的高度c为170mm，烤灯103与第二沉积喷灯102的水平夹角θ为30°，烤灯103的仰角ω为45°。
从图6中不难看出，采用本发明的沉积装置可以提高光纤预制棒疏松体104的密度。
综上所述，本发明通过在光纤预制棒疏松体104的旋转方向105并在第二沉积喷灯102 的斜上方增加烤灯103，对光纤预制棒疏松体104表面进行加热来提高光纤预制棒疏松体104表面密度，此方法既可以避免烤灯103火焰对第二沉积喷灯102沉积区域干扰，同时又能对第二沉积喷灯102上方沉积的每层光纤预制棒疏松体104进行加热，提高第二沉积喷灯102上方光纤预制棒疏松体104的密度，此方法能够更好的控制光纤预制棒疏松体104的表面密度分布，解决了光纤预制棒疏松体104的开裂问题。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。

Claims (10)

  1. 一种烤灯，其用于提高光纤预制棒疏松体的密度，其特征在于：该烤灯包括第一通气区和以该第一通气区为轴心而同轴设置且由内而外依次设置的第二通气区、第三通气区、第四通气区、第五通气区，该第一通气区与该第五通气区均通有助燃气体，该第二通气区与该第四通气区均通有隔离气体，该第三通气区通有燃气。
  2. 一种提高光纤预制棒疏松体密度的方法，其采用如权利要求1所述的烤灯配合一个光纤预制棒疏松体的沉积装置实现提高光纤预制棒疏松体密度的目的，该沉积装置包括第一沉积喷灯、第二沉积喷灯，该沉积装置用于对光纤预制棒疏松体在旋转过程中采用该第一沉积喷灯、该第二沉积喷灯进行沉积，其特征在于：该方法包括以下步骤：
    安置该烤灯：该第一沉积喷灯、该第二沉积喷灯位于同一竖直平面内，该竖直平面平行于该光纤预制棒疏松体的旋转中心轴，该第二沉积喷灯位于该第一沉积喷灯上方，该烤灯不在该竖直平面内且沿该光纤预制棒疏松体的旋转方向安装在该第二沉积喷灯的斜上方；该第一沉积喷灯、该第二沉积喷灯、该烤灯满足以下关系式：0≤(c-b)≤(b-a)，其中，a为该第一沉积喷灯的沉积点距离该光纤预制棒疏松体底端的高度，b为该第二沉积喷灯的沉积点距离该光纤预制棒疏松体底端的高度，c为该烤灯的灼烧点距离该光纤预制棒疏松体底端的高度；
    开启该烤灯：在该第一通气区与该第五通气区均通有助燃气体，在该第二通气区与该第四通气区均通有隔离气体，在该第三通气区通有燃气；
    开启该第一沉积喷灯、该第二沉积喷灯，在该光纤预制棒疏松体上相应沉积形成芯层和包层。
  3. 如权利要求2所述的提高光纤预制棒疏松体密度的方法，其特征在于：该第一通气区通有5slm O2和10slm纯净空气组成测混合气，该第二通气区通有5slm Ar，该第三通气区通有50slmH2，该第四通气区通有8slmAr，该第五通气区通有10slm O2和20slm纯净空气组成的混合气，该纯净空气是指空气经过除油污，除固体杂质而获得的气体。
  4. 一种沉积装置，其包括第一沉积喷灯、第二沉积喷灯，该沉积装置用于对光纤预制棒疏松体在旋转过程中采用该第一沉积喷灯、该第二沉积喷灯进行沉积，其特征在于：该沉积装置还包括烤灯，两个沉积喷灯位于同一竖直平面内，该竖直平面平行于该光纤预制棒疏松体的旋转中心轴，该第二沉积喷灯位于该第一沉积喷灯上方，该烤灯不在该竖直平面内且沿该光纤预制棒疏松体的旋转方向安装在该第二沉积喷灯的斜上方；该第一沉积喷灯、该第二沉积喷灯、该烤灯满足以下关系式：0≤(c-b)≤(b-a)，其中，a为该第一沉积喷灯的沉积点距离该光纤预制棒疏松体底端的高度，b为该第二沉积喷灯的沉积点距离该光纤预制棒疏松体底端的高度，c为该烤灯的灼烧点距离该光纤预制棒疏松体底端的高度。
  5. 如权利要求4所述的沉积装置，其特征在于：该烤灯为权利要求1所述的烤灯。
  6. 如权利要求4所述的沉积装置，其特征在于：沿该光纤预制棒疏松体的旋转方向，该烤灯到该第二沉积喷灯构成的夹角θ满足关系式：20°≤θ≤60°。
  7. 如权利要求6所述的沉积装置，其特征在于：夹角θ满足关系式：30°≤θ≤45。
  8. 如权利要求4所述的沉积装置，其特征在于：该烤灯的仰角ω满足关系式：15°≤ω≤60°。
  9. 如权利要求8所述的沉积装置，其特征在于：仰角ω满足关系式：20°≤ω≤30°。
  10. 一种提高光纤预制棒疏松体密度的方法，其应用于如权利要求4至9中任意一项所述的沉积装置，其特征在于：该方法包括以下步骤：
    开启该烤灯，该烤灯的灼烧位置在该光纤预制棒疏松体的锥面和稳定段之间；
    开启该第一沉积喷灯、该第二沉积喷灯，在该光纤预制棒疏松体上相应沉积形成芯层和包层。
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