WO2016006515A1 - 計測装置及び計測方法 - Google Patents
計測装置及び計測方法 Download PDFInfo
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- WO2016006515A1 WO2016006515A1 PCT/JP2015/069026 JP2015069026W WO2016006515A1 WO 2016006515 A1 WO2016006515 A1 WO 2016006515A1 JP 2015069026 W JP2015069026 W JP 2015069026W WO 2016006515 A1 WO2016006515 A1 WO 2016006515A1
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Definitions
- the present invention relates to a measuring device and a measuring method.
- spectroscopic measurement is the ratio between the intensity (physical quantity x1) of light interacting with a sample to be measured (typically light transmitted through the sample) and the intensity of light not interacting (physical quantity x0). And measuring the wavelength dependence of the optical properties of the sample.
- the voltage measurement is to measure a ratio between a reference voltage (physical quantity x0) and a measurement voltage (physical quantity x1).
- the measurement apparatus may have difficulty in improving the measurement accuracy due to the nonlinearity of the measuring apparatus, that is, the nonlinearity of the relationship between the measured quantity and the measurement result. That is, the measurement result includes a nonlinear error.
- the non-linear error is an error caused by the non-linearity of the measuring device.
- the photometric device described in Patent Document 1 performs multipoint calibration. That is, the photometric device includes an arithmetic control circuit, a light receiving sensor array, and a correction LED (Light Emitting Diode). The correction LED irradiates light to the light receiving sensor array. The arithmetic control circuit sequentially turns on the correction LEDs at a plurality of known illuminance levels, and calculates a correction value at each illuminance level based on the sensor output level expected at each illuminance level and the actual sensor output level. Ask.
- the arithmetic control circuit corrects the sensor output level with the corresponding correction value during actual photometry. As a result, the influence of nonlinearity of the photometric device is reduced.
- voltage measurement for example, multipoint calibration of voltage ratio is performed by a voltage source using a Josephson element.
- the present invention has been made in view of the above problems, and an object of the present invention is to provide a measuring apparatus and a measuring method that can easily reduce the influence of nonlinearity on the measurement result.
- the measurement device includes a first signal generation unit and a first removal unit.
- the first signal generation unit generates a first source signal including a fundamental wave and a plurality of harmonics based on the first physical quantity and the second physical quantity.
- the first removing unit removes some or all of the plurality of harmonics from the first source signal.
- the first source signal is a periodic signal.
- One cycle of the first source signal has a first time width, a first signal indicating the first physical quantity, a second signal having a second time width and indicating the second physical quantity, and a third signal. It is preferable to include a reference signal having a time width and indicating a reference physical quantity.
- the measurement device of the present invention further includes a measurement unit
- the first removal unit includes a first addition unit, a harmonic generation unit, a first Fourier transform unit, and a first control unit.
- a 1st addition part adds the harmonic signal which has the frequency of the harmonic of a removal object among these harmonics, and the said 1st source signal, and outputs a 1st addition signal.
- the measurement unit outputs the analog first addition signal as a digital first measurement signal.
- the harmonic generation unit generates the harmonic signal.
- the first Fourier transform unit calculates a plurality of harmonics included in the first measurement signal.
- the first control unit causes the harmonic generation unit to adjust the amplitude and / or phase of the harmonic signal so that a harmonic matching the harmonic to be removed is removed from the first measurement signal. .
- each of the first physical quantity and the second physical quantity is a voltage
- each of the first source signal and the harmonic signal is an electric signal.
- the measurement unit preferably includes an analog / digital conversion unit.
- the analog / digital conversion unit converts the first addition signal, which is an analog signal, into a digital signal, and outputs the digital signal as the first measurement signal.
- each of the first physical quantity and the second physical quantity is light intensity
- each of the first source signal and the harmonic signal is an optical signal.
- the measurement unit preferably includes a photoelectric conversion unit and an analog / digital conversion unit.
- the photoelectric conversion unit converts the first addition signal, which is an optical signal, into an electrical signal.
- the analog / digital conversion unit converts the electrical signal, which is an analog signal, into a digital signal, and outputs the digital signal as the first measurement signal.
- the measurement unit includes a phase calculation unit and a first ratio calculation unit.
- the phase calculation unit calculates the phase of the fundamental wave of the first measurement signal.
- the first ratio calculation unit calculates a value of a ratio of the second physical quantity to the first physical quantity based on the phase of the fundamental wave of the first measurement signal.
- the measurement unit further includes a delay calculation unit that calculates a delay time of the first measurement signal with respect to the first addition signal.
- the first ratio calculation unit preferably calculates the value of the ratio based on the formula (1).
- r value of the ratio p1: the first physical quantity p2: the second physical quantity pr: reference physical quantity ⁇ : phase of the fundamental wave of the first measurement signal f: frequency ⁇ of the fundamental wave of the first measurement signal: The delay time
- the measurement device of the present invention preferably has a nonlinear error measurement mode including a first mode and a second mode.
- the first signal generation unit may output the first source signal in which the first physical quantity is constant and the second physical quantity changes stepwise.
- the first addition unit adds the harmonic signal to the first source signal and outputs the first addition signal, and the measurement unit removes the harmonics. It is preferable to output the first measurement signal.
- the first ratio calculation unit calculates the value of the ratio based on the first measurement signal from which the harmonics have been removed for each second physical quantity.
- the first addition unit outputs the first source signal as the first addition signal without adding the harmonic signal to the first source signal, and the measurement unit It is preferable to output the first measurement signal from which harmonics are not removed.
- the first ratio calculation unit calculates the value of the ratio for each second physical quantity based on the first measurement signal from which the harmonics are not removed.
- the measurement unit further includes a first difference calculation unit and a storage unit. The first difference calculating unit calculates a difference between the ratio value calculated in the first mode and the ratio value calculated in the second mode for each second physical quantity.
- the storage unit stores the difference in association with the ratio value calculated in the second mode for each second physical quantity.
- the measurement apparatus of the present invention further includes a second signal generation unit and a second removal unit.
- the second signal generation unit generates a second source signal including a fundamental wave and a plurality of harmonics and having a waveform obtained by switching the first physical quantity and the second physical quantity of the first source signal.
- the second removing unit removes some or all of the plurality of harmonics from the second source signal.
- the measurement apparatus of the present invention further includes a second signal generation unit and a second removal unit.
- the second signal generation unit generates a second source signal including a fundamental wave and a plurality of harmonics and having a waveform obtained by switching the first physical quantity and the second physical quantity of the first source signal.
- the second removing unit removes some or all of the plurality of harmonics from the second source signal.
- the second removal unit preferably includes a second addition unit, a harmonic generation unit, a second Fourier transform unit, and a second control unit.
- a 2nd addition part adds the harmonic signal which has the frequency of the harmonic of a removal target among these harmonics of the said 2nd source signal, and the said 2nd source signal, and outputs a 2nd addition signal.
- the measurement unit outputs the analog second addition signal as a digital second measurement signal.
- the harmonic generation unit generates the harmonic signal to be added to the second source signal.
- the second Fourier transform unit calculates a plurality of harmonics included in the second measurement signal.
- the second control unit adds the second source signal to the harmonic generation unit so that a harmonic matching the harmonic to be removed of the second source signal is removed. Adjust amplitude and / or phase.
- the measurement unit includes a phase difference calculation unit and a second ratio calculation unit.
- the phase difference calculation unit calculates a phase difference between the fundamental wave of the first measurement signal and the fundamental wave of the second measurement signal.
- the second ratio calculation unit calculates a value of a ratio of the second physical quantity to the first physical quantity based on the phase difference.
- the measurement unit further includes a delay difference calculation unit.
- the delay difference calculation unit calculates a delay time difference between the first measurement signal and the second measurement signal.
- the second ratio calculation unit calculates the value of the ratio based on Expression (2).
- r value of the ratio p1: the first physical quantity p2: the second physical quantity pr: reference physical quantity ⁇ : the phase difference f: the frequency of the fundamental wave of the first measurement signal ⁇ : the delay time difference
- the measurement device of the present invention preferably has a nonlinear error measurement mode including a first mode and a second mode.
- the first signal generation unit In each of the first mode and the second mode, the first signal generation unit generates the first source signal in which the first physical quantity is held at a constant level and the second physical quantity changes stepwise. It is preferable.
- the second signal generation unit In each of the first mode and the second mode, the second signal generation unit generates the second source signal in which the first physical quantity is held at the constant level and the second physical quantity changes stepwise. It is preferable to do.
- the first addition unit adds the harmonic signal to the first source signal and outputs the first addition signal, and the measurement unit removes the harmonics. It is preferable to output the first measurement signal.
- the second addition unit adds the harmonic signal to the second source signal and outputs the second addition signal, and the measurement unit removes the harmonics. It is preferable to output the second measurement signal.
- the second ratio calculation unit calculates the value of the ratio for each second physical quantity based on the first measurement signal and the second measurement signal from which the harmonics have been removed. It is preferable.
- the first addition unit outputs the first source signal as the first addition signal without adding the harmonic signal to the first source signal, and the measurement unit It is preferable to output the first measurement signal from which harmonics are not removed.
- the second addition unit outputs the second source signal as the second addition signal without adding the harmonic signal to the second source signal, and the measurement unit It is preferable to output the second measurement signal from which harmonics are not removed.
- the second ratio calculation unit calculates the value of the ratio for each of the second physical quantities based on the first measurement signal and the second measurement signal from which the harmonics are not removed. It is preferable to do.
- the measurement unit further includes a second difference calculation unit and a storage unit.
- the second difference calculating unit calculates, for each second physical quantity, a difference between the ratio value calculated in the first mode and the ratio value calculated in the second mode.
- the storage unit stores the difference in association with the ratio value calculated in the second mode for each second physical quantity.
- the measurement unit further includes a third ratio calculation unit and a correction unit.
- the third ratio calculation unit calculates a value of the ratio of the fourth physical quantity to the third physical quantity.
- the correction unit corrects the value of the ratio calculated by the third ratio calculation unit based on the difference stored in the storage unit.
- the measurement method includes generating a first source signal including a fundamental wave and a plurality of harmonics based on the first physical quantity and the second physical quantity, and the first source signal. And removing a part or all of the plurality of harmonics.
- the present invention it is possible to easily reduce the influence of the non-linearity of the measuring apparatus on the measurement result by removing a part or all of a plurality of harmonics that is one of the causes causing the non-linear error.
- FIG. 15 is a waveform diagram for explaining removal of second harmonic to fifth harmonic by the first removal unit of FIG. It is a figure explaining reduction of the nonlinear error by the measuring device concerning Embodiment 3 of the present invention.
- It is a block diagram which shows the measuring device which concerns on Embodiment 4 of this invention.
- A It is a block diagram which shows the measuring device 1 which concerns on Embodiment 5 of this invention.
- B It is a block diagram which shows the measuring device 1 which concerns on the modification of Embodiment 5 of this invention. It is a functional block diagram which shows the measurement part of FIG.
- FIG. 1 It is a block diagram which shows the measuring device which concerns on Embodiment 6 of this invention.
- A It is a wave form diagram which shows the 1st source signal which the 1st signal generation part of Drawing 21 generated.
- B It is a wave form diagram which shows the 2nd source signal which the 2nd signal generation part of Drawing 21 generated.
- (B) It is a wave form diagram which shows the 2nd measurement signal which has not removed the harmonic.
- (C) It is a wave form diagram which shows clock clk1.
- (D) It is a wave form diagram which shows clock clk2.
- (E) It is a wave form diagram which shows clock clk3.
- (A) It is a wave form diagram which shows the 1st measurement signal after removing the harmonic in the Example of this invention.
- (B) It is a wave form diagram which shows the 2nd measurement signal after removing the harmonic in the Example of this invention. It is a figure which shows the nonlinear error in the Example of this invention.
- FIG. 1 is a block diagram showing a measuring apparatus 1 according to Embodiment 1 of the present invention.
- the measurement apparatus 1 includes a first signal generation unit 3 (first signal generation unit), a first removal unit 5 (first removal unit), and a measurement unit 7 (measurement unit).
- the first signal generation unit 3 generates a first source signal x1 (t) including a fundamental wave and a plurality of harmonics based on the first physical quantity p1 and the second physical quantity p2.
- t represents time.
- the first removal unit 5 removes some or all of the plurality of harmonics from the first source signal x1 (t).
- the influence of the nonlinearity of the measuring apparatus 1 (measurement unit 7) on the measurement result is removed by removing a part or all of a plurality of harmonics that is one of the causes of the nonlinear error. Can be easily reduced.
- the first removal unit 5 includes N (N is an integer equal to or greater than 1) harmonic generation unit 9 [1] (harmonic generation unit) to harmonic generation unit 9 [N] (harmonic generation unit), An adder 11 (first adder), a first Fourier transformer 13 (first Fourier transformer), and a first controller 15 (first controller) are included.
- the number N of the harmonic generation units 9 [1] to 9 [N] is the same as the number of harmonics to be removed by the first removal unit 5 in the first source signal x1 (t).
- the harmonic generation unit 9 [1] to the harmonic generation unit 9 [N] generate the harmonic signal h [1] to the harmonic signal h [N], respectively.
- harmonic generation unit 9 [1] to the harmonic generation unit 9 [N] are collectively referred to as a harmonic generation unit 9 [n] (n is an integer of 1 or more), and the harmonic signal h [1 ] To harmonic signal h [N] are collectively referred to as harmonic signal h [n].
- the harmonic signal h [n] has a frequency of a harmonic to be removed among a plurality of harmonics included in the first source signal x1 (t).
- the harmonic generation unit 9 [1] when the harmonic to be removed is a second harmonic, the harmonic generation unit 9 [1] generates a harmonic signal h [1] having a frequency of the second harmonic.
- the first addition unit 11 adds the harmonic signal h [n] and the first source signal x1 (t), and outputs a first addition signal y1 (t).
- the measurement unit 7 outputs an analog first addition signal y1 (t) as a digital first measurement signal z1 (t).
- the first Fourier transform unit 13 performs a Fourier transform on the first measurement signal z1 (t) to calculate a plurality of harmonics included in the first measurement signal z1 (t).
- the first control unit 15 sends the harmonic signal h [n] to the harmonic generation unit 9 [n] so that the harmonics matching the harmonics to be removed are removed from the first measurement signal z1 (t). To adjust the amplitude and / or phase. For example, when the harmonic to be removed is a second harmonic, the first control unit 15 causes the harmonic generation unit 9 [1 to remove the second harmonic from the first measurement signal z1 (t). ] Adjust the amplitude and / or phase of the harmonic signal h [1] having the frequency of the second harmonic.
- the first addition unit 11 adds the harmonic signal h [n] whose amplitude and / or phase is adjusted and the first source signal x1 (t), and outputs a first addition signal y1 (t).
- the first addition signal y1 (t) is converted into the first measurement signal z1 (t) by the measurement unit 7, and the first measurement signal z1 (t) is input to the first Fourier transform unit 13 again.
- FIG. 2 is a waveform diagram showing the first source signal x1 (t).
- the first signal generation unit 3 generates the first source signal x1 (t) based on the first physical quantity p1, the second physical quantity p2, and the reference physical quantity pr.
- the first source signal x1 (t) is a periodic signal having a period T and has a step shape.
- One cycle of the first source signal x1 (t) includes a first signal p1 indicating the first physical quantity p1, a reference signal pr indicating the reference physical quantity pr, and a second signal p2 indicating the second physical quantity p2.
- the first source signal x1 (t) has a plurality of frequency components. That is, the first source signal x1 (t) includes a fundamental wave and a plurality of harmonics.
- the frequencies of the plurality of harmonics are 2f, 3f, 5f,. That is, the harmonic frequency is k times the frequency f. k is an integer of 2 or more excluding multiples of 4.
- the fundamental wave of the first addition signal y1 (t) generated from the first source signal x1 (t) and the fundamental wave of the first measurement signal z1 (t) are fundamental waves of the first source signal x1 (t). And the same frequency f.
- the harmonic frequency of the first addition signal y1 (t) is k times the frequency f
- the harmonic frequency of the first measurement signal z1 (t) is k times the frequency f.
- k may be a multiple of four.
- FIG. 3 is a waveform diagram showing the first addition signal y1 (t) and the first measurement signal z1 (t).
- a first addition signal y1 (t) is generated by adding the harmonic signal h [n] to the first source signal x1 (t).
- harmonics remain in the first addition signal y1 (t).
- the measurement unit 7 measures the first addition signal y1 (t) and generates a first measurement signal z1 (t) as a measurement result.
- the first measurement signal z1 (t) is Fourier-transformed, and in the example of FIG. 3, the harmonic generation unit 9 [n] is feedback-controlled so that the harmonic becomes zero.
- a first measurement signal z1 (t) that does not include harmonics is obtained. That is, the first measurement signal z1 (t) is a sine wave and has only a fundamental wave.
- the first measurement signal z1 (t) shown in FIG. 3 is calculated using the nonlinear response function F (y1) shown in FIG.
- FIG. 4 is a diagram illustrating an example of input / output characteristics of the measurement unit 7.
- the measurement unit 7 has nonlinearity, and the nonlinearity of the measurement unit 7 is represented by a nonlinear response function F (y1).
- y1 represents an arbitrary input. Due to the non-linearity of the measurement unit 7, a non-linear error G (y1) occurs.
- the first measurement signal z1 (t) is represented by a non-linear response function F (y1 (t ⁇ )).
- ⁇ represents a delay time of the first measurement signal z1 (t) with respect to the first addition signal y1 (t). The delay time ⁇ is unique to the measurement unit 7 and does not depend on the frequency.
- FIG. 5A is a diagram illustrating an electrical configuration of the measurement unit 7.
- the measurement unit 7 includes a processor 17, a storage unit 18, a detector 19, and a display unit 20.
- the processor 17 is, for example, a CPU (Central Processing Unit), an MCU (Micro Controller Unit), or an FPGA (Field-Programmable Gate Array), and may include a DSP (Digital Signal Processor).
- the storage unit 18 is, for example, a semiconductor memory such as a RAM (Random Access Memory), a ROM (Read Only Memory), and a flash memory, and may include an auxiliary storage device such as a hard disk drive.
- the storage unit 18 is an example of a storage medium.
- the detector 19 detects the analog first addition signal y1 (t) and outputs it as a digital first measurement signal z1 (t).
- the detector 19 includes an analog / digital converter when performing voltage measurement, and includes a photoelectric conversion unit and an analog / digital converter when performing optical measurement.
- the display unit 20 displays a measurement result (for example, a ratio value r).
- the display unit 20 is, for example, a liquid crystal display.
- FIG. 5B is a functional block diagram of the measurement unit 7.
- the measurement unit 7 includes a phase calculation unit 21 (phase calculation unit), a delay calculation unit 23 (delay calculation unit), and a first ratio calculation unit 25 (first ratio calculation unit).
- the processor 17 functions as a phase calculation unit 21, a delay calculation unit 23, and a first ratio calculation unit 25 by executing a computer program stored in the storage unit 18.
- the first ratio calculation unit 25 calculates the value r of the ratio of the second physical quantity p2 to the first physical quantity p1 based on the phase ⁇ of the fundamental wave of the first measurement signal z1 (t). That is, the phase calculation unit 21 calculates the phase ⁇ of the fundamental wave.
- the delay calculation unit 23 calculates a delay time ⁇ of the first measurement signal z1 (t) with respect to the first addition signal y1 (t).
- the first ratio calculator 25 calculates a ratio value r based on the equation (1).
- pr represents a reference physical quantity
- harmonics remain in the first addition signal y1 (t).
- FIG. 6 is a waveform diagram for simplifying the description of Expression (1).
- FIG. 7 is a diagram illustrating vectors for simplifying the description of Expression (1).
- FIG. 6 shows a rectangular wave p1s based only on the first physical quantity p1, a rectangular wave p2s based only on the second physical quantity p2, the fundamental wave p1f of the rectangular wave p1s, the fundamental wave p2f of the rectangular wave p2s, and the synthesized wave A.
- the synthesized wave A is a synthesized wave of the fundamental wave p1f and the fundamental wave p2s.
- the fundamental wave p1f is a sine wave having a phase ⁇ of ⁇ 45 degrees and an amplitude of ( ⁇ 2 ⁇ (p1 / ⁇ )), and can be expressed by a vector p1f in a complex plane.
- the fundamental wave p2f is a sine wave having a phase ⁇ of 45 degrees and an amplitude of ( ⁇ 2 ⁇ (p2 / ⁇ )), and can be expressed by a vector p2f in a complex plane.
- the synthesized wave A can be expressed by a synthesized vector A. Using the phase ⁇ of the composite vector A, the angle ⁇ is 45 degrees + ⁇ . Therefore, the value r of the ratio is represented by the formula (1A).
- Each of the phase ⁇ , the phase ⁇ , and the phase ⁇ includes a positive or negative sign. In the example of FIG. 7, each of the phase ⁇ and the phase ⁇ is a negative value, and the phase ⁇ is a positive value.
- FIG. 8 is a waveform diagram showing the step signal SF.
- FIG. 9 is a diagram showing the frequency distribution of the step signal SF.
- the step signal SF includes a plurality of harmonics from a low order to a high order.
- the stepped signal SF when the stepped signal SF is measured with a non-linear measuring instrument, if the frequency dependence of the delay time of the measuring instrument can be ignored, the output signal becomes a stepped signal similar to the input signal, but the output signal Includes nonlinear errors.
- the height ratio r of the stepped signal SF can be calculated from the phase ⁇ of the fundamental wave having the frequency f as shown in the equation (1). Therefore, let's look at the influence of nonlinearity in the frequency space.
- FIG. 10 is a diagram for explaining the phase shift of the fundamental wave due to the mixing of harmonics.
- FIG. 11 is an enlarged view of the straight line v17 in FIG.
- the fundamental wave (original fundamental wave) corresponding to the true value is represented by a straight line v1 from the origin to the point a1.
- a fundamental wave (new fundamental wave) corresponding to a measurement value including all harmonics is represented by a straight line v2 from the origin to the point a2. It can be confirmed that the fundamental wave is out of phase.
- the straight line v01 from the point a1 to the point a3 corresponds to the mixture of the zeroth order term and the first order term.
- the first order term represents the original fundamental wave. It can be confirmed that the mixing of the zero-order term and the first-order term does not affect the phase of the original fundamental wave.
- the straight line v12 from the point a3 to the point a4 corresponds to the mixing of the first order term and the second harmonic
- the straight line v23 corresponds to the mixing of the second order harmonic and the third order harmonic
- the straight line v56 represents the fifth order harmonic.
- the line v67 corresponds to the mixing of the 6th harmonic and the 7th harmonic. There is no fourth-order harmonic.
- the ratio value r is represented by the phase ⁇ of the fundamental wave. Therefore, when the phase of the original fundamental wave is deviated, the ratio value r is deviated from the true value and nonlinear. Includes errors. Since the harmonics cause a phase shift of the original fundamental wave, the harmonics are considered to be the cause of nonlinear errors included in the ratio value r. The lower order harmonics cause the majority of non-linear errors because the lower order harmonics shift the phase of the original fundamental wave more greatly. In general, since the nonlinear error changes only slowly with respect to the measured value, a high-order harmonic having a small amplitude is considered to have little influence on the magnitude of the nonlinear error.
- the step signal SF includes higher harmonics than the seventh harmonic, but the amplitude of these harmonics is small. Therefore, as shown in FIG. 8, the staircase signal SF can be sufficiently reproduced by the signal S07 including the 0th-order to seventh-order harmonics.
- the measuring apparatus 1 measures the nonlinearity of the measuring apparatus 1 by removing some or all of the plurality of harmonics. Reduce the impact on results. For example, to what degree harmonics can be removed and to what extent the nonlinear error can be reduced can be reproduced by numerical simulation assuming the nonlinearity of the measurement unit 7.
- FIG. 12 is a flowchart showing the measurement method.
- the measuring device 1 executes the processes of steps S1 to S19.
- Step S3 includes steps S5 to S15.
- step S1 the first signal generation unit 3 generates a first source signal x1 (t) including a fundamental wave and a plurality of harmonics based on the first physical quantity p1, the second physical quantity p2, and the reference physical quantity pr. .
- step S3 the first removal unit 5 removes some or all of the plurality of harmonics from the first source signal x1 (t).
- step S5 the harmonic generation unit 9 [n] generates a harmonic signal h [n].
- step S7 the first addition unit 11 adds the first source signal x1 (t) and the harmonic signal h [n], and outputs a first addition signal y1 (t).
- step S9 the measurement unit 7 (detector 19) outputs the analog first addition signal y1 (t) as the digital first measurement signal z1 (t).
- step S11 the first Fourier transform unit 13 performs a Fourier transform on the first measurement signal z1 (t), and calculates a harmonic contained in the first measurement signal z1 (t).
- step S ⁇ b> 13 the first control unit 15 determines whether a harmonic that matches the harmonic to be removed exists in the first measurement signal z ⁇ b> 1 (t). If the first control unit 15 makes an affirmative determination (Yes in Step S13), the process proceeds to Step S15. If the negative determination (No in Step S13) is performed, the first control unit 15 proceeds the process to Step S17.
- step S15 the first control unit 15 sends the harmonic signal to the harmonic generation unit 9 [n] so that the harmonics matching the harmonics to be removed are removed from the first measurement signal z1 (t).
- the amplitude and / or phase of h [n] is adjusted.
- the process proceeds to step S5.
- the processing in steps S5 to S15 is repeated until harmonics that match the harmonics to be removed are removed from the first measurement signal z1 (t). By executing such feedback control, the harmonics to be removed can be reliably removed.
- step S17 the phase calculation unit 21 calculates the phase ⁇ of the fundamental wave of the first measurement signal z1 (t).
- the first ratio calculation unit 25 calculates a value r of the ratio of the second physical quantity p2 to the first physical quantity p1 based on the formula (1).
- the measurement unit 7 (detection) is performed by removing part or all of the harmonics from the first measurement signal z1 (t).
- the influence of the nonlinearity of the device 19) can be reduced.
- the nonlinear error included in the ratio value r can be reduced.
- the improvement of the measurement unit 7, for example, the detector 19, is not required. Therefore, even if the detector 19 is an existing product, the nonlinear error included in the ratio value r can be reduced.
- the ratio of the fundamental wave phase ⁇ of the first measurement signal z ⁇ b> 1 (t) from which part or all of the harmonics have been removed is changed.
- the value r is calculated. That is, the non-linearity of the measuring unit 7 is reduced simultaneously with the measurement. Therefore, in the first embodiment, the measuring device 1 is used for simultaneous calibration. Since the influence of non-linearity is reduced simultaneously with measurement, unlike general multi-point calibration, it is difficult to be affected by non-linear drift of the measuring unit 7. In general multi-point calibration, a time difference is generated between calibration and measurement, so that the nonlinearity of the measuring instrument may drift.
- the measuring apparatus 1 uses two standards (the reference physical quantity pr and the reference physical quantity pr and the same as when performing a general two-point calibration).
- the calibration is executed with the first physical quantity p1).
- the influence of the nonlinearity on the measurement result is reduced without reducing the nonlinearity of the measuring unit 7. It has the same effect as point calibration.
- correction can be performed only within the linearity range, and only offset and gain calibration can be performed.
- the first signal p1 having the first time width w1, the reference signal pr having the third time width w3, and the second time width w2 are set.
- a first source signal x1 (t) constituted by the second signal p2 having the same is generated.
- the ratio value r can be calculated by a simple calculation shown in Expression (1).
- each of the first physical quantity p1, the second physical quantity p2, and the reference physical quantity pr is a voltage.
- Each of the first source signal x1 (t), the first addition signal y1 (t), the first measurement signal z1 (t), and the harmonic signal h [n] is an electrical signal.
- the measuring device 1 is used for simultaneous calibration.
- FIG. 13 is a block diagram showing the measuring apparatus 1 according to the second embodiment.
- the measurement apparatus 1 includes a first signal generation unit 3 (first signal generation unit), a first removal unit 5 (first removal unit), and a measurement unit 7 (measurement unit).
- the electrical configuration of the measurement unit 7 is the same as the electrical configuration of the measurement unit 7 illustrated in FIG.
- the detector 19 includes an analog / digital converter 19a (hereinafter referred to as “ADC 19a”) (analog / digital conversion unit or analog / digital conversion means).
- ADC 19a analog / digital converter 19a
- the first signal generator 3 includes a switch 12, and the switch 12 includes contacts 4a to 4d.
- a voltage p1 as the first physical quantity p1 is applied to the contact 4a.
- a voltage p2 as the second physical quantity p2 is applied to the contact 4b.
- a voltage pr as a reference physical quantity pr is applied to the contact 4c. In the second embodiment, the voltage pr is 0V.
- the switch 12 generates a step-like first source signal x1 (t) by switching the contact connected to the contact 4d between the contact 4a to the contact 4c. That is, as shown in FIG. 2, the switch 12 connects the contact 4a and the contact 4d from time 0 to time T / 4, and from the time T / 4 to time 3T / 4, The contact point 4d is connected, and the contact point 4b and the contact point 4d are connected from time 3T / 4 to time T. The switch 12 repeats these operations to generate a periodic step-shaped first source signal x1 (t).
- the first removal unit 5 includes N oscillators 9a [1] (harmonic generation means) to oscillators 9a [N] (harmonic generation means), a first adder 11a (first Adding means), a first fast Fourier transformer 13a (hereinafter referred to as "first FFT 13a") (first Fourier transform unit or first Fourier transform means), and first control unit 15a (first control means). Including.
- the number N of the oscillators 9a [1] to 9a [N] is the same as the number of harmonics to be removed by the first removal unit 5 in the first source signal x1 (t).
- the oscillators 9a [1] to 9a [N] generate the harmonic electrical signals ha [1] to ha [N], respectively.
- the oscillators 9a [1] to 9a [N] are collectively referred to as an oscillator 9a [n] (n is an integer of 1 or more), and the harmonic electric signal ha [1] to the harmonic electric signal ha [ N] is collectively referred to as a harmonic electrical signal ha [n].
- the harmonic electrical signal ha [n] has a frequency of a harmonic to be removed among a plurality of harmonics included in the first source signal x1 (t).
- the first adder 11a adds the harmonic electrical signal ha [n] and the first source signal x1 (t) and outputs a first addition signal y1 (t).
- the ADC 19a converts the first addition signal y1 (t), which is an analog signal, into a digital signal, and outputs the digital signal as the first measurement signal z1 (t).
- the first FFT 13a performs a fast Fourier transform to calculate a plurality of harmonics included in the first measurement signal z1 (t).
- the first control unit 15a sends the amplitude of the harmonic electric signal ha [n] to the oscillator 9a [n] so that the harmonics matching the harmonics to be removed are removed from the first measurement signal z1 (t). And / or adjust the phase.
- the first controller 15a controls the oscillator 9a [n] and the oscillator 9a [n] until a harmonic that matches the harmonic to be removed is removed from the first measurement signal z1 (t). ].
- the adjustment by the first adder 11a, the analog / digital conversion by the detector 19, and the fast Fourier transform by the first FFT 13a are repeated.
- the measurement unit 7 includes a phase calculation unit 21, a delay calculation unit 23, and a first ratio calculation unit 25 as in the first embodiment. And the measurement part 7 calculates the value r of ratio based on Formula (1) similarly to Embodiment 1.
- FIG. 1 A diagrammatic representation of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an meter.
- the measurement apparatus 1 executes the measurement method shown in the flowchart of FIG. 12 as in the first embodiment.
- the harmonic generation unit 9 [n] is the oscillator 9a [n]
- the harmonic signal h [n] is the harmonic electrical signal ha [n]
- the first addition unit 11 is the first.
- the first adder 11a is replaced with the first Fourier transform unit 13 as the first FFT 13a, and the first control unit 15 as the first control unit 15a.
- the second embodiment in the voltage measurement, by removing a part or all of the harmonics from the first measurement signal z ⁇ b> 1 (t), the measurement unit 7 ( The influence of nonlinearity of the ADC 19a) can be reduced. As a result, the ratio value r, that is, the nonlinear error included in the voltage ratio can be reduced.
- the second embodiment has the same effects as the first embodiment.
- the measuring apparatus 1 according to Embodiment 2 can be applied to DC voltage measurement.
- DC voltage measurement simultaneous calibration of the measuring device 1 is effective.
- the measuring device 1 can be applied to a commercially available high-end digital voltmeter (digital multimeter) equipped with an analog / digital converter (AD converter) adopting a double integration method or a multiple integration method.
- digital multimeter digital multimeter
- AD converter analog / digital converter
- a digital voltmeter having a linearity of 10 ppb can be realized. Since measurement of the voltage ratio (ratio value r) is the basis of voltage measurement, linear voltage ratio measurement is a technique necessary for realizing a highly accurate digital voltmeter. For example, the linearity can be further improved by adopting a commercially available high-end digital voltmeter as the measuring unit 7. If a digital voltmeter having a linearity of 10 ppb is realized, it can be used for secondary calibration and can be used for highly accurate physical measurement. Moreover, the measuring apparatus 1 can be manufactured as a new digital voltmeter instead of applying the measuring apparatus 1 to an existing digital voltmeter.
- the measuring device 1 can be applied to a relatively inexpensive digital voltmeter equipped with a delta-sigma method or a SAR (Successive Application Register) method AD converter.
- a digital voltmeter having a linearity of 1 ppm may be realized.
- Delta-sigma and SAR digital voltmeters have a relatively high S / N ratio but are not sufficiently linear.
- a low-price 1 ppm digital voltmeter can be realized by adopting a delta-sigma type or SAR type digital voltmeter as the measuring unit 7.
- some analog band elimination filters in voltage measurement may employ a method of adding the output of the bandpass filter to the original signal in the opposite phase.
- the first FFT 13a, the first controller 15a, and the oscillator 9a [h] according to the second embodiment realize a multi-channel band elimination filter by phase detection using digital signal processing.
- each of the first physical quantity p1, the second physical quantity p2, and the reference physical quantity pr is the intensity of light.
- Each of the first source signal x1 (t), the harmonic signal h [n], and the first addition signal y1 (t) is an optical signal.
- the first measurement signal z1 (t) is an electric signal.
- the measuring device 1 is used for simultaneous calibration.
- FIG. 14 is a block diagram showing the measuring apparatus 1 according to the third embodiment.
- the measurement apparatus 1 includes a first signal generation unit 3 (first signal generation unit), a first removal unit 5 (first removal unit), and a measurement unit 7 (measurement unit).
- the electrical configuration of the measurement unit 7 is the same as the electrical configuration of the measurement unit 7 illustrated in FIG.
- the detector 19 includes a photoelectric conversion unit 19b (photoelectric conversion unit) and an analog / digital converter 19c (hereinafter referred to as “ADC 19c”) (analog / digital conversion unit or analog / digital conversion unit). including.
- the photoelectric conversion unit 19b converts the received optical signal into an electrical signal.
- the photoelectric conversion unit 19b is, for example, a photomultiplier tube or an image sensor (for example, a CCD image sensor or a CMOS image sensor).
- the ADC 19c converts an analog signal into a digital signal.
- the first signal generation unit 3 receives light having light intensity p1 as the first physical quantity p1, light having light intensity p2 as the second physical quantity p2, and light having light intensity pr as the reference physical quantity pr. .
- the light intensity pr is a level indicating a dark state.
- the first signal generator 3 generates a step-like first source signal x1 (t) by switching between light having the light intensity p1, light having the light intensity p2, and light having the light intensity pr. To the first adder 11b. That is, as shown in FIG. 2, the first signal generation unit 3 emits light having the light intensity p1 from time 0 to time T / 4, and from time T / 4 to time 3T / 4. The light having the light intensity p2 is emitted from the time 3T / 4 to the time T without emitting light. The first signal generation unit 3 repeats these operations to generate a periodic step-shaped first source signal x1 (t). In addition, the dark state is implement
- the first removal unit 5 includes N (N is an integer equal to or greater than 1) harmonic generation unit 9b [1] (harmonic generation unit) to harmonic generation unit 9b [N] (harmonic generation unit), An adder 11b, a first fast Fourier transformer 13b (hereinafter referred to as “first FFT 13b”) (first Fourier transform unit or first Fourier transform unit), and a first control unit 15b (first control unit). Including.
- the number N of the harmonic generation units 9b [1] to 9b [N] is the same as the number of harmonics to be removed by the first removal unit 5 in the first source signal x1 (t).
- the harmonic generation unit 9b [1] to the harmonic generation unit 9b [N] generate the harmonic optical signal hb [1] to the harmonic optical signal hb [N], respectively, and output them to the first adder 11b.
- harmonic generation unit 9b [1] to the harmonic generation unit 9b [N] are collectively referred to as a harmonic generation unit 9b [n] (n is an integer of 1 or more), and the harmonic optical signal hb [1] ] To harmonic optical signal hb [N] are collectively referred to as harmonic optical signal hb [n].
- the harmonic optical signal hb [n] has a frequency of a harmonic to be removed among a plurality of harmonics included in the first source signal x1 (t).
- the harmonic generation unit 9 b [n] includes a light source unit 45 and a current control circuit 47.
- the light source unit 45 is, for example, an LED.
- the current control circuit 47 is controlled by the first control unit 15 b and controls or chops the current supplied to the light source unit 45 to control the light emission amount of the light source unit 45. As a result, the current control circuit 47 can adjust the amplitude and / or phase of the harmonic optical signal hb [n].
- the light source unit 45 generates a rectangular optical signal according to the current control circuit 47 and emits it as a harmonic optical signal hb [n].
- the light source unit 45 may be a laser, for example.
- the harmonic generation unit 9 b [n] includes an optical system instead of the current control circuit 47. This optical system chops the optical signal having a constant intensity emitted from the light source unit 45 to generate a rectangular optical signal and emits it as a harmonic optical signal hb [n].
- the harmonic generation unit 9b [n] causes the harmonic optical signal hb [n] to have the same intensity distribution as the first source signal x1 (t) on the detection surface of the photoelectric conversion unit 19b. [N] is generated.
- the first adder 11b adds the harmonic light signal hb [n] and the first source signal x1 (t), and outputs a first addition signal y1 (t).
- the first adder 11b is, for example, a branched optical fiber.
- the branch optical fiber includes a plurality of input optical fibers, a single output optical fiber, and an optical coupler that connects the plurality of input optical fibers and the single output optical fiber.
- the first source signal x1 (t) is incident on one input optical fiber.
- the harmonic optical signal hb [n] is incident on the corresponding input optical fiber.
- the first source signal x1 (t) and the harmonic light signal hb [n] are added, and the first addition signal y1 (t) is emitted from the output optical fiber.
- the first adder 11b includes, for example, a plurality of half mirrors arranged in a straight line.
- the first source signal x1 (t) is incident on the first half mirror.
- the harmonic optical signal hb [n] is incident on the corresponding half mirror.
- the first source signal x1 (t) and the harmonic light signal hb [n] are added, and the first addition signal y1 (t) is emitted from the final half mirror.
- the first addition signal y1 (t) is incident on the photoelectric conversion unit 19b of the detector 19, and the photoelectric conversion unit 19b receives the first addition signal y1 (t).
- the photoelectric conversion unit 19b converts the first addition signal y1 (t), which is an optical signal, into an electrical signal, and inputs the electrical signal to the ADC 19c.
- the ADC 19c converts the input electrical signal, which is an analog signal, into a digital signal, and outputs the digital signal as the first measurement signal z1 (t).
- the first FFT 13b performs a fast Fourier transform and calculates a plurality of harmonics included in the first measurement signal z1 (t).
- the first control unit 15b sends the harmonic light signal hb [n] to the harmonic generation unit 9b [n] so that the harmonics matching the harmonics to be removed are removed from the first measurement signal z1 (t). To adjust the amplitude and / or phase. As in the first embodiment, until the harmonics that match the harmonics to be removed are removed from the first measurement signal z1 (t), the first control unit 15b controls the harmonic generation unit 9b [n] and the harmonics. Adjustment of the amplitude and / or phase by the wave generator 9b [n], addition by the first adder 11a, photoelectric conversion and analog / digital conversion by the detector 19, and Fourier transform by the first FFT 13b are repeated.
- the measurement unit 7 includes a phase calculation unit 21, a delay calculation unit 23, and a first ratio calculation unit 25 as in the first embodiment. And the measurement part 7 calculates the value r of ratio based on Formula (1) similarly to Embodiment 1.
- FIG. 1 A diagrammatic representation of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an exemplary embodiment of an meter.
- the measurement apparatus 1 executes the measurement method shown in the flowchart of FIG. 12 as in the first embodiment.
- the harmonic generation unit 9 [n] is converted into the harmonic generation unit 9b [n]
- the harmonic signal h [n] is converted into the harmonic optical signal hb [n]
- the first addition unit 11 is used.
- the first adder 11b the first Fourier transform unit 13 with the first FFT 13b
- the first control unit 15 with the first control unit 15b.
- FIG. 15 is a waveform diagram for explaining the removal of the second harmonic.
- FIG. 15 shows the first source signal x1 (t), the fundamental wave FW of the first source signal x1 (t), and the harmonic optical signal hb [1].
- the harmonic generation unit 9b [1] generates a harmonic optical signal hb [1] having a frequency of the second harmonic in order to remove the second harmonic contained in the first source signal x1 (t).
- the light is output to the first adder 11b.
- the harmonic optical signal hb [1] is indicated by hatching.
- FIG. 16 is a waveform diagram for explaining the removal of the second harmonic, the third harmonic, and the fifth harmonic. There is no fourth-order harmonic.
- FIG. 16 shows the first source signal x1 (t), the fundamental wave FW of the first source signal x1 (t), and the harmonic optical signal hb [1] to the harmonic optical signal hb [3].
- the harmonic generation unit 9b [1] generates a harmonic optical signal hb [1] having a frequency of the second harmonic in order to remove the second harmonic contained in the first source signal x1 (t). The light is output to the first adder 11b.
- the harmonic generation unit 9b [2] generates a harmonic optical signal hb [2] having a frequency of the third harmonic in order to remove the third harmonic and outputs the harmonic optical signal hb [2] to the first adder 11b.
- the harmonic generation unit 9b [3] generates a harmonic optical signal hb [3] having a frequency of the fifth harmonic in order to remove the fifth harmonic, and outputs the harmonic optical signal hb [3] to the first adder 11b.
- the harmonic optical signal hb [1] to the harmonic optical signal hb [3] are indicated by diagonal lines.
- FIG. 17 is a diagram for explaining reduction of nonlinear errors by removing harmonics.
- a curve NE1 shows the nonlinear error of the ratio value r when the harmonics are not removed.
- a curve NE2 shows a nonlinear error of the ratio value r when the second harmonic is removed by the harmonic optical signal hb [1] in FIG.
- a curve NE3 shows a nonlinear error of a ratio value r when the second harmonic, the third harmonic, and the fifth harmonic are removed by the harmonic optical signal hb [1] to the harmonic optical signal hb [3] in FIG. Indicates.
- the non-linear error is reduced compared to when the second harmonic is not removed.
- the nonlinear error is further reduced as compared with the case where only the second harmonic is removed.
- the nonlinear error is proportional to the sixth power of the light intensity
- the first physical quantity p1 is constant
- the second physical quantity p2 ( ⁇ p1) is changed.
- the ratio value r is calculated by the equation (1).
- the third embodiment in optical measurement, measurement is performed by removing a part or all of the harmonics from the first measurement signal z1 (t).
- the influence of nonlinearity of the unit 7 (the photoelectric conversion unit 19b and the ADC 19c) can be reduced.
- the non-linear error included in the ratio value r that is, the light intensity ratio, can be reduced.
- the third embodiment has the same effects as the first embodiment.
- the measuring device 1 can be applied to spectroscopic measurement (ultraviolet region, visible light region, or near infrared region).
- spectroscopic measurement the simultaneous calibration use of the measuring device 1 is effective.
- the linearity of double beam spectroscopic measurement can be improved.
- the measuring apparatus 1 and a double beam type spectrophotometer can be combined. That is, in the double beam method, the light having the first physical quantity p1 that is the intensity of light interacting with the sample to be measured and the light having the second physical quantity p2 that is not interacting with the sample to be measured Can be made incident on the first signal generator 3 to improve the linearity of the spectroscopic measurement.
- a spectrophotometer having a linearity of 10 ppm may be realized. If the linearity of the spectrophotometer is improved, the accuracy of quantitative analysis using the spectrophotometer is improved. Furthermore, since the multivariate analysis used when many signals overlap like the near infrared region assumes the linearity of the spectrum, the error of the multivariate analysis can be reduced.
- FIG. 18 is a block diagram showing the measuring apparatus 1.
- the measuring device 1 includes a first bandpass filter 4 (first removing unit) instead of the first removing unit 5 of the measuring device 1 according to the first embodiment.
- the measuring device 1 is used for simultaneous calibration.
- the first band pass filter 4 passes only the fundamental wave of the first source signal x1 (t), and as a harmonic removal signal y1 (t) (corresponding to the first addition signal y1 (t) of the first embodiment) Output to the measurement unit 7.
- the measurement unit 7 converts the analog harmonic removal signal y1 (t) into a digital first measurement signal z1 (t).
- the measurement unit 7 calculates the ratio value r using the equation (1).
- the first bandpass filter 4 is, for example, an analog filter, and does not affect the phase of the fundamental wave of the first source signal x1 (t), that is, the fundamental wave of the first source signal x1 (t).
- the phase shift between the harmonic elimination signal y1 (t) and the fundamental wave and the phase shift drift are not generated.
- the influence of nonlinearity of the measurement unit 7 can be reduced by removing part or all of the harmonics from the first measurement signal z1 (t).
- the nonlinear error included in the ratio value r can be reduced.
- the fourth embodiment has the same effects as the first embodiment.
- each of the first physical quantity p1, the second physical quantity p2, and the reference physical quantity pr is a voltage.
- Each of the first source signal x1 (t), the harmonic removal signal y1 (t), and the first measurement signal z1 (t) is an electrical signal.
- each of the first physical quantity p1, the second physical quantity p2, and the reference physical quantity pr is the intensity of light.
- Each of the first source signal x1 (t) and the harmonic removal signal y1 (t) is an optical signal.
- the first measurement signal z1 (t) is an electric signal.
- FIGS. 1, 5, 19, and 20 A measuring apparatus 1 according to Embodiment 5 of the present invention will be described with reference to FIGS. 1, 5, 19, and 20.
- the measuring apparatus 1 according to Embodiments 1 to 4 is used for simultaneous calibration.
- the measuring apparatus 1 according to the fifth embodiment is not only used for simultaneous calibration but also used for multipoint calibration. In multi-point calibration use, the measuring apparatus 1 prepares a nonlinear error table in advance, and corrects the measured value using the table.
- the measurement apparatus 1 according to the fifth embodiment includes the same configuration as the measurement apparatus 1 according to the first embodiment, and by removing harmonics, the influence of the nonlinear error can be reduced and the ratio value r can be measured. Therefore, the difference between the measured value measured without removing the harmonics and the measured value measured without removing the harmonics represents a nonlinear error. Therefore, a non-linear error table is created to realize multipoint calibration.
- the measurement apparatus 1 has a nonlinear error reduction mode and a nonlinear error measurement mode.
- the measuring device 1 operates in the same manner as the measuring device 1 according to the first embodiment, and is used for simultaneous calibration.
- the nonlinear error measurement mode of the measurement apparatus 1 includes a first mode and a second mode.
- FIG. 19 (a) is a block diagram showing the measuring apparatus 1 according to the fifth embodiment of the present invention.
- the measuring device 1 further includes a two-channel signal source 8 in addition to the configuration of the measuring device 1 according to the first embodiment.
- the configurations of the first signal generation unit 3, the first removal unit 5, and the measurement unit 7 are the same as those of the first signal generation unit 3, the first removal unit 5, and the measurement unit 7, respectively, of the measurement apparatus 1 according to the first embodiment.
- the configuration is the same.
- the electrical configuration of the measurement unit 7 according to the fifth embodiment is the same as the electrical configuration illustrated in FIG. However, the measurement unit 7 has a configuration different from the configuration shown in FIG.
- FIG. 20 is a functional block diagram showing the measurement unit 7.
- the measurement unit 7 includes a first difference calculation unit 53 (first difference calculation unit), a storage unit 18 (storage unit), and a third ratio calculation unit 55 ( 3rd ratio calculation means) and the correction
- the processor 17 executes a computer program stored in the storage unit 18 to thereby execute a phase calculation unit 21, a delay calculation unit 23, a first ratio calculation unit 25, a first difference calculation unit 53, a third ratio calculation unit 55, And it functions as the correction unit 57.
- the signal source 8 generates a first signal p1 indicating the first physical quantity p1, makes the first physical quantity p1 constant, and outputs the first signal p1 to the first signal generator 3.
- the first signal p1 is measured in advance, and an approximate value of the first physical quantity p1 is obtained.
- the obtained first physical quantity p1 includes not only nonlinear errors but also offset and gain errors.
- the obtained value of the first physical quantity p1 is set as the upper limit value of the second physical quantity p2.
- the signal source 8 generates the second signal p2 indicating the second physical quantity p2, changes the second physical quantity p2 stepwise, and outputs the second signal p2 to the first signal generation unit 3. That is, after changing the second physical quantity p2, the signal source 8 keeps the second physical quantity p2 constant, and after a certain period of time, changes the second physical quantity p2 to a different value and keeps it constant.
- the signal source 8 repeats the change and holding of the second physical quantity p2 up to the upper limit value of the second physical quantity p2 according to the preset number of stages of change of the second physical quantity p2.
- the first signal generation unit 3 receives a reference signal pr indicating the reference physical quantity pr.
- the ratio (p2 / p1) is stable and the drift within the measurement time can be ignored. High accuracy of the value of the first physical quantity p1 and the value of the second physical quantity p2 is not required. Further, the ratio (p2 / p1) does not need to be known in advance. The accuracy indicates how much the difference between a measured value and a standard (for example, an international standard or a national standard) falls. On the other hand, the accuracy indicates a variation in measured values when the same physical quantity is repeatedly measured.
- a standard for example, an international standard or a national standard
- the first signal generator 3 outputs the first source signal x1 (t) in which the first physical quantity p1 is made constant and the second physical quantity p2 changes stepwise.
- the first addition unit 11 of the first removal unit 5 adds the harmonic signal h [n] to the first source signal x1 (t) and outputs a first addition signal y1 (t). Since the harmonic signal h [n] is added, harmonics are removed from the first addition signal y1 (t).
- the measurement unit 7 receives the first addition signal y1 (t) and outputs the first measurement signal z1 (t) from which harmonics have been removed.
- the first measurement signal z1 (t) from which harmonics have been removed is referred to as a first measurement signal z1a (t).
- the first ratio calculation unit 25 calculates the value r of the ratio of the second physical quantity p2 to the first physical quantity p1 based on the first measurement signal z1a (t) for each second physical quantity p2. That is, the phase calculation unit 21 calculates the phase ⁇ of the fundamental wave of the first measurement signal z1a (t) for each second physical quantity p2. The delay calculation unit 23 calculates the delay time ⁇ of the first measurement signal z1a (t). The first ratio calculation unit 25 uses the phase ⁇ of the fundamental wave and the delay time ⁇ of the first measurement signal z1a (t) for each second physical quantity p2, and based on the formula (1), the ratio value r And the ratio value r is stored in the storage unit 18. These ratio values r are highly accurate values with reduced non-linear errors. The first mode has been described above.
- the operations of the signal source 8 and the first signal generation unit 3 are the same as the operations of the signal source 8 and the first signal generation unit 3 in the first mode.
- the harmonic generation unit 9 [n] of the first removal unit 5 does not generate the harmonic signal h [n]. Therefore, the first addition unit 11 outputs the first source signal x1 (t) as the first addition signal y1 (t) without adding the harmonic signal h [n] to the first source signal x1 (t). To do. Since the harmonic signal h [n] is not added, the harmonics are not removed from the first addition signal y1 (t).
- the measurement unit 7 receives the first addition signal y1 (t) and outputs the first measurement signal z1 (t) from which harmonics are not removed.
- the first measurement signal z1 (t) from which harmonics are not removed is referred to as a first measurement signal z1b (t).
- the first ratio calculation unit 25 calculates the value r of the ratio of the second physical quantity p2 to the first physical quantity p1 based on the first measurement signal z1b (t) for each second physical quantity p2. That is, the phase calculation unit 21 calculates the phase ⁇ of the fundamental wave of the first measurement signal z1b (t) for each second physical quantity p2. The delay calculation unit 23 calculates the delay time ⁇ of the first measurement signal z1b (t). The first ratio calculation unit 25 uses the phase ⁇ of the fundamental wave and the delay time ⁇ of the first measurement signal z1b (t) for each second physical quantity p2, and based on Equation (1), the ratio value r And the ratio value r is stored in the storage unit 18. These ratio values r are values in which nonlinear errors are not reduced. The second mode has been described above.
- the first difference calculation unit 53 acquires the ratio value r calculated in the first mode and the ratio value r calculated in the second mode from the storage unit 18 for each second physical quantity p2. Then, the first difference calculation unit 53 calculates, for each second physical quantity p2, a difference ⁇ r between the ratio value r calculated in the first mode and the ratio value r calculated in the second mode.
- the storage unit 18 stores the difference ⁇ r in association with the ratio value r calculated in the second mode for each second physical quantity p2.
- error table a table in which the ratio value r calculated in the second mode and the difference ⁇ r are associated. Since the difference ⁇ r represents a nonlinear error, the error table is a table in which the ratio value r calculated in the second mode is associated with the nonlinear error.
- the second physical quantity p2 is finely changed by sufficiently increasing the number of stages of change of the second physical quantity p2 so that the data is sufficiently continuous and has sufficient accuracy.
- the measurement unit 7 can input the analog signal p3 indicating the third physical quantity p3 and the analog signal p4 indicating the fourth physical quantity p4.
- the third physical quantity p3 corresponds to the first physical quantity p1
- the fourth physical quantity p4 corresponds to the second physical quantity p2.
- the analog signal p3 and the analog signal p4 are arbitrary inputs and are measurement targets.
- the third ratio calculation unit 55 calculates the ratio value R.
- the correction unit 57 corrects the ratio value R based on the error table, that is, the difference ⁇ r stored in the storage unit 18, and calculates the ratio value Rc.
- a nonlinear error is calculated by interpolation.
- an error table may be created before the measurement of the third physical quantity p3 and the fourth physical quantity p4, or the error table after the measurement of the third physical quantity p3 and the fourth physical quantity p4. You may create a table.
- FIG. 19B is a block diagram illustrating a measurement apparatus 1 according to a modification.
- the measuring device 1 includes a first signal source 8 instead of the signal source 8 of the measuring device 1 in FIG.
- the first signal source 8 is included in the first signal generation unit 3.
- the first signal source 8 receives the first source signal x1 (t) in which the first physical quantity p1 is constant and the second physical quantity p2 changes stepwise. Generate and output.
- the ratio value r in which the nonlinear error is reduced by removing the harmonics, and the nonlinearity It is possible to easily measure the ratio value r where the error is not reduced. Therefore, an error table for realizing multi-point calibration can be easily created.
- the ratio value R can be corrected by using the error table. Therefore, it is not necessary to generate the first source signal x1 (t), and it is not necessary to remove harmonics. As a result, the fluctuating third physical quantity p3 and fourth physical quantity p4 can be measured.
- the first signal generation unit 3, the first removal unit 5, and the measurement unit 7 are replaced with the first signal generation unit 3, the first removal unit 5, and the measurement unit 7 according to the second embodiment. be able to. That is, the measuring device 1 according to the fifth embodiment can be applied to voltage measurement. Therefore, for example, the measuring device 1 can form an AC voltage measuring device or a high-speed voltage measuring device, and improve the linearity of the AC voltage measuring device or the high-speed voltage measuring device.
- the first signal generation unit 3, the first removal unit 5, and the measurement unit 7 are replaced with the first signal generation unit 3, the first removal unit 5, and the measurement unit 7 according to the third embodiment. be able to. That is, the measuring apparatus 1 according to the fifth embodiment can be applied to optical measurement. Therefore, for example, the nonlinearity of the optical measurement device can be corrected by the error table.
- the optical measurement device is, for example, a multi-channel optical measurement device (including a camera) such as a double beam type spectrophotometer or a CCD image sensor and a CMOS image sensor. Non-linearity can be evaluated by comparing a light detection method with high linearity with a light detection method with low linearity. By preparing a plurality of light sources that are easy to switch, such as LEDs, multipoint calibration can be realized.
- FIGS. 6 A measuring apparatus 1 according to Embodiment 6 of the present invention will be described with reference to FIGS.
- a one-channel step signal (first source signal x1 (t)) is generated.
- a two-channel step signal (first source signal).
- a signal x1 (t) and a second source signal x2 (t)) are generated.
- the measuring device 1 is used for simultaneous calibration.
- differences between the sixth embodiment and the first embodiment will be mainly described.
- FIG. 21 is a block diagram showing the measuring apparatus 1 according to the sixth embodiment.
- the measurement apparatus 1 further includes a second signal generation unit 3B (second signal generation unit) and a second removal unit 5B (second removal unit).
- the second signal generation unit 3B generates a second source signal x2 (t) including a fundamental wave and a plurality of harmonics.
- FIG. 22A is a waveform diagram showing the first source signal x1 (t)
- FIG. 22B is a waveform diagram showing the second source signal x2 (t).
- the second source signal x2 (t) has a waveform obtained by switching the first physical quantity p1 and the second physical quantity p2 of the first source signal x1 (t).
- one cycle of the second source signal x2 (t) includes the second signal p2 indicating the second physical quantity p2, the reference signal pr indicating the reference physical quantity pr, and the first signal p1 indicating the first physical quantity p1.
- the frequency of the plurality of harmonics is the same as the frequency of the plurality of harmonics of the first source signal x1 (t).
- the second removal unit 5B removes some or all of the plurality of harmonics from the second source signal x2 (t).
- the second removal unit 5B includes N (N is an integer equal to or greater than 1) harmonic generation unit 9B [1] (harmonic generation unit) to harmonic generation unit 9B [N] (harmonic generation unit), It includes an adding unit 11B (second adding unit), a second Fourier transform unit 13B (second Fourier transform unit or second Fourier transform unit), and a second control unit 15B (second control unit).
- the configurations of the harmonic generation unit 9B [1] to the harmonic generation unit 9B [N], the second addition unit 11B, the second Fourier transform unit 13B, and the second control unit 15B are respectively the harmonic generation unit 9 [1 ] To the harmonic generation unit 9 [N], the first addition unit 11, the first Fourier transform unit 13, and the first control unit 15.
- the harmonic generation unit 9B [1] to the harmonic generation unit 9B [N] generate the harmonic signal hB [1] to the harmonic signal hB [N], respectively.
- harmonic generation unit 9B [1] to the harmonic generation unit 9B [N] are collectively referred to as a harmonic generation unit 9B [n] (n is an integer of 1 or more), and the harmonic signal hB [1 ] To harmonic signal hB [N] are collectively referred to as harmonic signal hB [n].
- the harmonic signal hB [n] has a harmonic frequency to be removed among a plurality of harmonics included in the second source signal x2 (t).
- the harmonics to be removed by the second removal unit 5B and the harmonics to be removed by the first removal unit 5 are the same.
- the second addition unit 11B adds the harmonic signal hB [n] and the second source signal x2 (t), and outputs a second addition signal y2 (t).
- the fundamental frequency and the harmonic frequency of the second addition signal y2 (t) are the same as the fundamental frequency and the harmonic frequency of the second source signal x2 (t), respectively.
- the measurement unit 7 outputs the analog first addition signal y1 (t) as the digital first measurement signal z1 (t), and outputs the analog second addition signal y2 (t) as the digital second measurement signal z2 ( t).
- the electrical configuration of the measuring unit 7 is the same as the electrical configuration shown in FIG. In the sixth embodiment, the detector 19 has two channels.
- the fundamental frequency and the harmonic frequency of the second measurement signal z2 (t) are the same as the fundamental frequency and the harmonic frequency of the second source signal x2 (t), respectively.
- the second Fourier transform unit 13B performs a Fourier transform on the second measurement signal z2 (t) and calculates a plurality of harmonics included in the second measurement signal z2 (t).
- the second control unit 15B sends the harmonic signal hB [n] to the harmonic generation unit 9B [n] so that the harmonics matching the harmonics to be removed are removed from the second measurement signal z2 (t). To adjust the amplitude and / or phase.
- the second addition unit 11B adds the harmonic signal hB [n] whose amplitude and / or phase are adjusted and the second source signal x2 (t), and outputs a second addition signal y2 (t).
- the second addition signal y2 (t) is converted into the second measurement signal z2 (t) by the measurement unit 7, and the second measurement signal z2 (t) is input to the second Fourier transform unit 13B again.
- FIG. 23 is a functional block diagram of the measurement unit 7.
- the measurement unit 7 includes a phase difference calculation unit 61 (phase difference calculation unit), a delay difference calculation unit 63 (delay difference calculation unit), and a second ratio calculation unit 65 (second ratio calculation unit).
- the processor 17 functions as a phase difference calculation unit 61, a delay difference calculation unit 63, and a second ratio calculation unit 65 by executing a computer program stored in the storage unit 18.
- the second ratio calculator 65 calculates the second physical quantity p2 relative to the first physical quantity p1.
- the ratio value r is calculated. That is, the phase difference calculation unit 61 calculates the phase difference ⁇ .
- the phase difference ⁇ indicates a phase shift of the fundamental wave of the second measurement signal z2 (t) with respect to the phase of the fundamental wave of the first measurement signal z1 (t).
- the delay difference calculation unit 63 calculates a delay time difference ⁇ between the first measurement signal z1 (t) and the second measurement signal z2 (t).
- the delay time difference ⁇ represents the difference between the delay time of the first measurement signal z1 (t) and the delay time of the second measurement signal z2 (t).
- the second ratio calculation unit 65 calculates the ratio value r based on the equation (2).
- pr represents a reference physical quantity
- f represents the frequency of the fundamental wave of the first measurement signal z1 (t).
- pr 0.
- FIG. 24 is a flowchart showing the measurement method.
- the measuring device 1 executes the processes of steps S31 to S53.
- the process of step S31 is the same as the process of step S1 of FIG.
- the processing in step S33 is the same as the processing in step S3 in FIG. 12, and includes the processing in steps S5 to S15 shown in FIG.
- step S31 the first signal generation unit 3 generates the first source signal x1 (t).
- step S33 the first removal unit 5 removes some or all of the plurality of harmonics from the first source signal x1 (t).
- step S41 the second signal generation unit 3B generates the second source signal x2 (t).
- step S43 the second removal unit 5B removes some or all of the plurality of harmonics from the second source signal x2 (t).
- the process of step S43 includes the processes of steps S5 to S15 shown in FIG.
- the harmonic signal h [n] is changed to the harmonic signal hB [n]
- the first source signal x1 (t) is changed to the second source signal x2 (t)
- the first The addition signal y1 (t) is the second addition signal y2 (t)
- the first measurement signal z1 (t) is the second measurement signal z2 (t)
- the harmonic generation unit 9 [n] is the harmonic generation unit 9B.
- the first addition unit 11 is replaced with the second addition unit 11B
- the first Fourier transform unit 13 is replaced with the second Fourier transform unit 13B
- the first control unit 15 is replaced with the second control unit 15B.
- step S51 the phase difference calculation unit 61 calculates the phase difference ⁇ between the fundamental wave of the first measurement signal z1 (t) and the fundamental wave of the second measurement signal z2 (t).
- measurement is performed by removing a part or all of a plurality of harmonics that is one of the causes of causing a nonlinear error.
- the influence of the non-linearity of the unit 7 (detector 19) on the measurement result can be easily reduced.
- the sixth embodiment has the same effects as the first embodiment.
- a reference point on the time axis for calculating the phase ⁇ of the fundamental wave of the first measurement signal z1 (t) is searched. Work can be omitted. Also, dead time is eliminated.
- the measuring apparatus 1 according to Embodiment 6 can be applied to voltage measurement and optical measurement. Accordingly, it is possible to reduce a non-linear error between the voltage ratio and the light intensity ratio.
- each of the first signal generation unit 3 and the second signal generation unit 3B has the same configuration as that of the first signal generation unit 3 of the second embodiment, and the first removal unit 5 and the first signal generation unit 3B.
- Each of the 2 removal units 5B has the same configuration as that of the first removal unit 5 of the second embodiment
- the configuration of the measurement unit 7 has the same configuration as that of the measurement unit 7 of the second embodiment.
- each of the first signal generation unit 3 and the second signal generation unit 3B has the same configuration as that of the first signal generation unit 3 of the third embodiment, and the first removal unit 5 and the first signal generation unit 3B.
- Each of the 2 removal units 5B has the same configuration as that of the first removal unit 5 of the third embodiment, and the configuration of the measurement unit 7 has the same configuration as that of the measurement unit 7 of the third embodiment.
- FIG. 25 is a block diagram illustrating the measurement apparatus 1 according to the seventh embodiment.
- the measuring apparatus 1 is replaced with the 1st removal part 5 and the 2nd removal part 5B of the measurement apparatus 1 which concerns on Embodiment 6, and the 1st band pass filter 4 (1st removal means) and the 2nd band pass filter 4B (1st). 2 removal means).
- the configuration of the first bandpass filter 4 is the same as the configuration of the first bandpass filter 4 in FIG.
- the second bandpass filter 4B has the same characteristics as the first bandpass filter 4, passes only the fundamental wave of the second source signal x2 (t), and outputs a harmonic removal signal y2 (t) (Embodiment 6). As the second addition signal y2 (t)).
- the measurement unit 7 converts the analog harmonic removal signal y1 (t) into a digital first measurement signal z1 (t), and converts the analog harmonic removal signal y2 (t) into a digital second measurement signal z2 ( t).
- the measuring unit 7 calculates the ratio value r by the equation (2).
- the nonlinearity of the measurement unit 7 (detector 19) can be reduced.
- the impact can be reduced.
- the nonlinear error included in the ratio value r can be reduced.
- the measuring apparatus 1 can also be applied to voltage measurement and optical measurement.
- each of the first physical quantity p1, the second physical quantity p2, and the reference physical quantity pr is a voltage.
- Each of t), second measurement signal z2 (t), and harmonic signal hB [n] is an electrical signal.
- the measuring device 1 is used for simultaneous calibration.
- FIG. 26 is a block diagram illustrating the measuring apparatus 1 according to the eighth embodiment.
- the measuring apparatus 1 includes a function generator 91 (hereinafter referred to as “FG91”), a function generator 92 (hereinafter referred to as “FG92”), a two-channel signal generator 93 (hereinafter referred to as “SG93”). ), FPGA 94, digital voltmeter 95 (hereinafter referred to as “DVM95”), switching board 96 (hereinafter referred to as “SB96”), 2-channel analog / digital converter 97 (hereinafter referred to as “ADC97”). And a personal computer 98 (hereinafter referred to as “PC98”).
- FG91 function generator 91
- FG92 function generator 92
- SG93 two-channel signal generator 93
- DVM95 digital voltmeter 95
- SB96 switching board 96
- ADC97 2-channel analog / digital converter
- PC98 personal computer 98
- the FG 91 supplies the base clock clk0 to the FPGA 94 and supplies the synchronous clock clks to the FG92.
- the FG 2 operates in synchronization with the synchronous clock clks, and generates a harmonic electrical signal h [1] and a harmonic electrical signal hB [1].
- Each of the harmonic electrical signal h [1] and the harmonic electrical signal hB [1] has the same frequency as the second harmonic.
- the FG 92 functions as a harmonic generation unit 9 [1] and a harmonic generation unit 9B [1].
- the SG93 generates a DC voltage p1 as the first physical quantity p1 and a DC voltage p2 as the second physical quantity p2.
- the FPGA 94 generates a clock clk1 to a clock clk3 and a sampling clock clk4 based on the base clock clk0.
- the DVM 95 is a voltmeter and measures the DC voltage p1 and the DC voltage p2.
- the SB 96 functions as the first signal generation unit 3, the second signal generation unit 3B, the first addition unit 11, and the second addition unit 11B.
- the SB 96 generates a first source signal x1 (t) and a second source signal x2 (t), and further generates a first addition signal y1 (t) and a second addition signal y2 (t).
- the ADC 97 converts the first addition signal y1 (t), which is an analog signal, into a digital signal, and outputs the digital signal to the PC 98 as the first measurement signal z1 (t).
- the ADC 97 converts the second addition signal y2 (t), which is an analog signal, into a digital signal, and outputs the digital signal to the PC 98 as the second measurement signal z2 (t).
- the ADC 97 functions as the detector 19 (FIG. 5A).
- the PC 98 functions as a part of the measurement unit 7 (phase difference calculation unit 61, delay difference calculation unit 63, and second ratio calculation unit 65), and the first measurement signal z1 (t) and the second measurement signal z2 (t ) And a ratio value r is calculated according to equation (2).
- the PC 98 functions as the first Fourier transform unit 13, the second Fourier transform unit 13B, the first control unit 15, and the second control unit 15B.
- FIG. 27 is a schematic diagram of the signal generation circuit 81 mounted on the SB 96 of FIG.
- the signal generation circuit 81 functions as the first signal generation unit 3 and the second signal generation unit 3B.
- the signal generation circuit 81 includes a switch unit 82, a switch 85, and a switch 86.
- the switch 85 is driven by the clock clk3 and includes contacts 89a to 89c.
- Switch 86 is driven by clock clk3 and includes contacts 90a to 90c.
- the contact 89c and the contact 90c are connected. 0V as the reference physical quantity pr is applied to each of the contact 89c and the contact 90c. That is, the contact 89c and the contact 90c are grounded.
- the switch unit 82 is driven by the clock clk and includes a switch 83 and a switch 84.
- the clock clk includes a clock clk1 and a clock clk2.
- the switch 83 includes contacts 87a to 87c.
- Switch 84 includes contacts 88a to 88c.
- the contact 87b, the contact 88c, and the contact 89b are connected, and the contact 87c, the contact 88b, and the contact 90b are connected.
- a DC voltage p1 is applied to the contact 87a
- a DC voltage p2 is applied to the contact 88a.
- Switch 83 and switch 84 operate in synchronization. Therefore, when the switch 83 connects the contact 87a and the contact 87b, the switch 84 connects the contact 88a and the contact 88b. On the other hand, when the switch 83 connects the contact 87a and the contact 87c, the switch 84 connects the contact 88a and the contact 88c.
- Switch 85 and switch 86 operate in synchronization. Therefore, when the switch 85 connects the contact 89a and the contact 89b, the switch 86 connects the contact 90a and the contact 90b. On the other hand, when the switch 85 connects the contact 89a and the contact 89c, the switch 86 connects the contact 90a and the contact 90c.
- the operation of the signal generation circuit 81 will be described with reference to FIGS. From time 0 to time T / 4, the contact 87a and the contact 87b are connected, the contact 89a and the contact 89b are connected, the contact 88a and the contact 88b are connected, and the contact 90a and the contact 90b are connected. . Therefore, the level of the first source signal x1 (t) is the level of the DC voltage p1, and the level of the second source signal x2 (t) is the level of the DC voltage p2.
- the contact 89a and the contact 89c are connected, and the contact 90a and the contact 90c are connected. Accordingly, the level of the first source signal x1 (t) and the level of the second source signal x2 (t) are each 0V.
- the level of the first source signal x1 (t) is the level of the DC voltage p2
- the level of the second source signal x2 (t) is the level of the DC voltage p1.
- the SB 96 includes a signal generation circuit 81, a first addition unit 11, and a second addition unit 11B. 27 is realized as the signal generation circuit 81 in FIG.
- the signal generation circuit 81 includes operational amplifiers A1a and A2a with drift 0, operational amplifier A3a with FET (Field Effect Transistor) input, operational amplifiers A1b and A2b with drift 0, operational amplifier A3b with FET input, switches 82a, 82b, 85, and 86, and resistive elements. R1a to R3a and resistance elements R1b to R3b are included.
- the operational amplifiers A1a, A2a, A1b, A2b function as non-inverting amplifiers.
- Each of the switches 82a, 82b, 85, 86 is an analog switch and has the same configuration as the switch unit 82.
- the DC voltage p2 is input to the input terminal of the operational amplifier A1a, and the DC voltage p1 is input to the input terminal of the operational amplifier A1b.
- the output terminals of the operational amplifiers A1a and A1b are connected to the input terminals j1 and j3 of the switch 82a.
- An operational amplifier A2a and a resistance element R1a are connected in series between the output terminal j2 of the switch 82a and the input terminal j1 of the switch 82b.
- An operational amplifier A2b and a resistance element R1b are connected in series between the output terminal j4 of the switch 82a and the input terminal j3 of the switch 82b.
- the output terminal j2 of the switch 82b and the resistance element R2a are connected to the input terminals j1 and j3 of the switch 85.
- the output terminal j2 of the switch 85 is connected to the negative terminal of the operational amplifier A3a, and the output terminal j4 is grounded.
- a resistance element R3a is connected between the output terminal and the negative terminal of the operational amplifier A3a.
- the output terminal j4 of the switch 82b and the resistance element R2b are connected to the input terminals j3 and j1 of the switch 86.
- the output terminal j2 of the switch 86 is connected to the negative terminal of the operational amplifier A3b, and the output terminal j4 is grounded.
- a resistance element R3b is connected between the output terminal and the negative terminal of the operational amplifier A3b.
- the first adder 11 is an adder that includes resistance elements R4 to R6 and an FET-input operational amplifier A4 and that uses an inverting amplifier.
- One terminals of the resistance elements R4, R5, and R6 are connected to the negative terminal of the operational amplifier A4.
- the other terminal of the resistor element R6 is connected to the output terminal of the operational amplifier A4.
- the positive terminal of the operational amplifier A4 is grounded.
- the signal generation circuit 81 generates the first source signal x1 (t) and the second source signal x2 (t) based on the DC voltage p1 and the DC voltage p2 while switching the switches 82a, 82b, 85, 86.
- the switching noise of the switch 82a also behaves nonlinearly with respect to the DC voltage p1 and the DC voltage p2 because the input capacitance of the operational amplifiers A2a and A2b depends on the input voltage, the noise of the operational amplifiers A2a and A2b
- Two-stage switches are provided so as not to overlap the first source signal x1 (t) and the second source signal x2 (t).
- the output terminal of the operational amplifier A3a is connected to the other terminal of the resistance element R4, and the harmonic electrical signal h [1] is input to the other terminal of the resistance element R5. Therefore, the first source signal x1 (t) generated by the signal generation circuit 81 and the harmonic electrical signal h [1] generated by the FG 92 are input to the first adder 11. As a result, the first addition unit 11 adds and inverts and amplifies the first source signal x1 (t) and the harmonic electrical signal h [1], and outputs the first addition signal y1 (t).
- the configuration of the second addition unit 11B is the same as the configuration of the first addition unit 11. However, the output terminal of the operational amplifier A3b is connected to the resistance element R4, and the harmonic electrical signal hB [1] is input to the resistance element R5. Accordingly, the second addition unit 11B adds and inverts and amplifies the second source signal x2 (t) and the harmonic electrical signal hB [1], and outputs the second addition signal y2 (t).
- the eighth embodiment in voltage measurement, a part of the harmonics from the first measurement signal z1 (t) and the second measurement signal z2 (t). Alternatively, by removing all, the influence of the nonlinearity of the ADC 97 can be reduced. As a result, the ratio value r, that is, the nonlinear error included in the voltage ratio can be reduced.
- the eighth embodiment has the same effects as the sixth embodiment.
- Embodiment 9 With reference to FIG. 19, FIG. 21, FIG. 29, and FIG. 30, the measuring apparatus 1 according to Embodiment 9 of the present invention will be described.
- the measurement apparatus 1 according to Embodiments 6 to 8 reduces the non-linearity of the measurement unit 7 simultaneously with measurement, and is used for simultaneous calibration.
- the measurement apparatus 1 according to the ninth embodiment is not only used for simultaneous calibration but also used for multipoint calibration.
- the measurement apparatus 1 according to Embodiment 9 has a nonlinear error reduction mode and a nonlinear error measurement mode.
- the measurement apparatus 1 operates in the same manner as the measurement apparatus 1 according to the sixth embodiment, and is used for simultaneous calibration.
- the nonlinear error measurement mode of the measurement apparatus 1 includes a first mode and a second mode.
- FIG. 29A is a block diagram illustrating the measuring apparatus 1 according to the ninth embodiment.
- the measuring device 1 further includes a two-channel signal source 8 in addition to the configuration of the measuring device 1 according to the sixth embodiment.
- the configuration of the signal source 8 is the same as the configuration of the signal source 8 shown in FIG. However, in the ninth embodiment, the signal source 8 outputs the first signal p1 indicating the first physical quantity p1 to the first signal generation unit 3 and the second signal generation unit 3B. Further, the signal source 8 outputs a second signal p2 indicating the second physical quantity p2 to the first signal generation unit 3 and the second signal generation unit 3B.
- the configurations of the first signal generation unit 3, the first removal unit 5, the second signal generation unit 3B, the second removal unit 5B, and the measurement unit 7 of the measurement device 1 according to the ninth embodiment are respectively related to the sixth embodiment.
- the configuration of the first signal generation unit 3, the first removal unit 5, the second signal generation unit 3B, the second removal unit 5B, and the measurement unit 7 of the measurement device 1 is the same.
- the electrical configuration of the measurement unit 7 according to the ninth embodiment is the same as the electrical configuration illustrated in FIG.
- the detector 19 has two channels.
- the measurement unit 7 has a configuration different from the configuration shown in FIG. The following mainly describes differences of the ninth embodiment from the sixth embodiment (FIGS. 21 to 24) and the fifth embodiment (FIGS. 19 and 20).
- FIG. 30 is a functional block diagram showing the measurement unit 7.
- the measurement unit 7 includes a second difference calculation unit 71 (second difference calculation unit), a storage unit 18 (storage unit), and a third ratio calculation unit 55 (third ratio). Calculation means) and a correction unit 57 (correction means).
- the processor 17 executes a computer program stored in the storage unit 18 to thereby execute a phase difference calculation unit 61, a delay difference calculation unit 63, a second ratio calculation unit 65, a second difference calculation unit 71, and a third ratio calculation unit. 55 and the correction unit 57.
- the operation of the measurement apparatus 1 in the first mode will be described with reference to FIG. 21, FIG. 29 (a), and FIG.
- the operations of the signal source 8, the first signal generation unit 3, and the first removal unit 5 are the operations of the signal source 8, the first signal generation unit 3, and the first removal unit 5 in the first mode according to the fifth embodiment. It is the same.
- the second signal generator 3B outputs a second source signal x2 (t) in which the first physical quantity p1 is made constant and the second physical quantity p2 changes stepwise.
- the second addition unit 11B of the second removal unit 5B adds the harmonic signal hB [n] to the second source signal x2 (t) and outputs a second addition signal y2 (t). Since the harmonic signal hB [n] is added, the harmonic is removed from the second addition signal y2 (t).
- the measurement unit 7 receives the second addition signal y2 (t) and outputs the second measurement signal z2 (t) from which harmonics have been removed.
- the second measurement signal z2 (t) from which harmonics are removed is referred to as a second measurement signal z2a (t).
- the first measurement signal z1 (t) from which harmonics have been removed is referred to as a first measurement signal z1a (t).
- the second ratio calculation unit 65 calculates, for each second physical quantity p2, the value r of the ratio of the second physical quantity p2 to the first physical quantity p1 based on the first measurement signal z1a (t) and the second measurement signal z2a (t). Is calculated. That is, the phase difference calculation unit 61 calculates the phase difference ⁇ between the fundamental wave of the first measurement signal z1a (t) and the fundamental wave of the second measurement signal z2a (t) for each second physical quantity p2.
- the delay difference calculation unit 63 calculates a delay time difference ⁇ between the first measurement signal z1a (t) and the second measurement signal z2a (t).
- the second ratio calculation unit 65 uses the phase difference ⁇ and the delay time difference ⁇ based on the first measurement signal z1a (t) and the second measurement signal z2a (t) for each second physical quantity p2, and uses Equation (2). Based on the above, the ratio value r is calculated, and the ratio value r is stored in the storage unit 18. These ratio values r are highly accurate values with reduced non-linear errors. The first mode has been described above.
- the operations of the signal source 8, the first signal generator 3, and the second signal generator 3B are the same as the operations of the signal source 8, the first signal generator 3, and the second signal generator 3B in the first mode. is there.
- the operation of the first removal unit 5 is the same as the operation of the first removal unit 5 in the second mode according to the fifth embodiment.
- the harmonic generation unit 9B [n] of the second removal unit 5B does not generate the harmonic signal hB [n]. Therefore, the second addition unit 11B outputs the second source signal x2 (t) as the second addition signal y2 (t) without adding the harmonic signal hB [n] to the second source signal x2 (t). To do. Since the harmonic signal hB [n] is not added, the harmonic is not removed from the second added signal y2 (t).
- the measurement unit 7 receives the second addition signal y2 (t) and outputs a second measurement signal z2 (t) from which harmonics are not removed.
- the second measurement signal z2 (t) from which harmonics are not removed is referred to as a second measurement signal z2b (t).
- the first measurement signal z1 (t) from which harmonics are not removed is referred to as a first measurement signal z1b (t).
- the second ratio calculation unit 65 calculates, for each second physical quantity p2, the value r of the ratio of the second physical quantity p2 to the first physical quantity p1 based on the first measurement signal z1b (t) and the second measurement signal z2b (t). Is calculated. That is, the phase difference calculation unit 61 calculates the phase difference ⁇ between the fundamental wave of the first measurement signal z1b (t) and the fundamental wave of the second measurement signal z2b (t) for each second physical quantity p2.
- the delay difference calculation unit 63 calculates a delay time difference ⁇ between the first measurement signal z1b (t) and the second measurement signal z2b (t).
- the second ratio calculation unit 65 uses the phase difference ⁇ and the delay time difference ⁇ based on the first measurement signal z1b (t) and the second measurement signal z2b (t) to obtain the equation (2). Based on the above, the ratio value r is calculated, and the ratio value r is stored in the storage unit 18. These ratio values r are values in which nonlinear errors are not reduced. The second mode has been described above.
- the second difference calculation unit 71 acquires, from the storage unit 18, the ratio value r calculated in the first mode and the ratio value r calculated in the second mode for each second physical quantity p2. Then, the second difference calculation unit 71 calculates a difference ⁇ r between the ratio value r calculated in the first mode and the ratio value r calculated in the second mode for each second physical quantity p2. The storage unit 18 stores the difference ⁇ r in association with the ratio value r calculated in the second mode for each second physical quantity p2.
- error table a table in which the ratio value r calculated in the second mode and the difference ⁇ r are associated. Since the difference ⁇ r represents a nonlinear error, the error table is a table in which the ratio value r calculated in the second mode is associated with the nonlinear error.
- the second physical quantity p2 is finely changed by sufficiently increasing the number of stages of change of the second physical quantity p2 so that the data is sufficiently continuous and has sufficient accuracy.
- the correction unit 57 corrects the ratio value R calculated by the third ratio calculation unit 55 based on the error table, that is, the difference ⁇ r stored in the storage unit 18, and the ratio value in which the nonlinear error is reduced. Rc is calculated.
- the error table creation timing may be arbitrary as in the fifth embodiment.
- FIG. 29B is a block diagram illustrating a measurement apparatus 1 according to a modification.
- the measuring device 1 includes a first signal source 8 and a second signal source 8B instead of the signal source 8 of the measuring device 1 in FIG.
- the first signal source 8 is included in the first signal generation unit 3, and the second signal source 8B is included in the second signal generation unit 3B.
- the first signal source 8 receives the first source signal x1 (t) in which the first physical quantity p1 is constant and the second physical quantity p2 changes stepwise.
- the second signal source 8B generates and outputs a second source signal x2 (t) in which the first physical quantity p1 is constant and the second physical quantity p2 changes stepwise.
- Embodiment 9 has the same effects as Embodiment 5.
- the measurement apparatus 1 according to the eighth embodiment described with reference to FIGS. 26 and 28 can also have a nonlinear error reduction mode and a nonlinear error measurement mode.
- the measuring apparatus 1 In the non-linear error reduction mode, the measuring apparatus 1 is used for simultaneous calibration as described with reference to FIGS.
- the measurement apparatus 1 In the nonlinear error measurement mode, the measurement apparatus 1 operates in the same manner as the measurement apparatus 1 according to the ninth embodiment, and is used for multipoint calibration.
- the measuring apparatus 1 which concerns on Embodiment 10 of this invention is demonstrated.
- the configuration of the measurement device 1 according to the tenth embodiment is the same as the configuration of the measurement device 1 according to the second embodiment.
- the measurement device 1 according to the tenth embodiment includes the measurement unit 7 illustrated in FIG. 31 instead of the measurement unit 7 of the measurement device 1 according to the second embodiment.
- the measurement apparatus 1 according to the tenth embodiment is used for simultaneous calibration.
- FIG. 31 is a block diagram illustrating the measurement unit 7 of the measurement apparatus 1 according to the tenth embodiment.
- the detector 19 of the measurement unit 7 includes an insulation amplifier 100 and an ADC 19a.
- the insulation amplifier 100 is an amplifier that insulates the input unit and the output unit of the insulation amplifier 100.
- the insulation amplifier 100 amplifies the first addition signal y1 (t) and outputs the amplified signal 110 to the ADC 19a.
- the ADC 19a converts the amplified signal 110, which is an analog signal, into a digital signal, and outputs the digital signal as the first measurement signal z1 (t).
- Other operations of the measurement apparatus 1 are the same as those in the second embodiment, and a description thereof is omitted.
- the measurement apparatus 1 according to the tenth embodiment can be applied to, for example, an insulation input type digital voltmeter in which an insulation amplifier is placed in front of an AD converter.
- the non-linearity of the insulation amplifier is larger than the non-linearity of the AD converter. Therefore, in general, it is difficult to measure with high linearity with an insulated input type digital voltmeter.
- the measurement apparatus 1 according to the tenth embodiment can realize, for example, an insulated input type digital voltmeter having a linearity of 10 ppm.
- the measurement device 1 according to the tenth embodiment has the same effects as the measurement device 1 according to the second embodiment.
- the measuring apparatus 1 which concerns on Embodiment 11 of this invention is demonstrated.
- the configuration of the measurement device 1 according to the eleventh embodiment is the same as the configuration of the measurement device 1 according to the second embodiment.
- the measurement device 1 according to the eleventh embodiment includes the measurement unit 7 illustrated in FIG. 32 instead of the measurement unit 7 of the measurement device 1 according to the second embodiment.
- the measurement apparatus 1 according to the eleventh embodiment is used for simultaneous calibration.
- FIG. 32 is a block diagram illustrating the measurement unit 7 of the measurement apparatus 1 according to the eleventh embodiment.
- the detector 19 of the measurement unit 7 includes a compressor 101, an ADC 19a, and an expander 102.
- the compressor 101 compresses the amplitude of the first addition signal y1 (t) and outputs the compressed signal as an amplitude compression signal 111 to the ADC 19a.
- the compressor 101 is an amplitude compression circuit such as a logarithmic amplifier, for example.
- the ADC 19a converts the amplitude compressed signal 111, which is an analog signal, into a digital signal, and outputs the digital signal to the expander 102 as the amplitude compressed signal 112.
- the expander 102 expands the amplitude of the amplitude compression signal 112 and outputs it as the first measurement signal z1 (t).
- the decompressor 102 is, for example, a digital decompression arithmetic device. Other operations of the measuring apparatus 1 are the same as those in the second embodiment, and a description thereof will be omitted.
- the measurement apparatus 1 can be applied to, for example, an amplitude compression input type digital voltmeter.
- an amplitude compression input type digital voltmeter an amplitude compression circuit is disposed in front of the AD converter, and a digital decompression arithmetic device is disposed in the subsequent stage of the AD converter.
- the compression function of the amplitude compression circuit drifts with temperature and elapsed time, it is difficult to accurately decompress a signal whose amplitude is compressed by the amplitude compression circuit. Therefore, it is general that the digital signal after decompression by the digital decompression arithmetic device exhibits nonlinearity greater than the digital signal output from the AD converter.
- an amplitude compression input type digital voltmeter is hardly used for quantitative voltage measurement. That is, the use of the digital voltmeter of the amplitude compression input method is limited, and for example, it is used in an ultrasonic diagnostic apparatus as an application for expanding the dynamic range.
- the measurement apparatus 1 according to the eleventh embodiment can realize, for example, an amplitude compression input type digital voltmeter having a linearity of 100 ppm. As a result, voltage measurement with a wide dynamic range is possible for wider applications that require quantitativeness.
- the measurement device 1 according to the eleventh embodiment has the same effects as the measurement device 1 according to the second embodiment.
- the measurement apparatus 1 according to the eighth embodiment described with reference to FIGS. 26 and 28 was used to realize simultaneous calibration.
- the fundamental frequency f of the first source signal x1 (t) and the second source signal x2 (t) was set to 307.2 Hz.
- the ADC 97 is a delta-sigma type ( ⁇ type) analog / digital converter, which has 24 bits (PEX-320724: Interface Co., Ltd.). In this example, it was confirmed that the nonlinear error of the ADC 97 was reduced.
- FG91 (WF1947: NF circuit design block) generated a 12.288 MHz square wave as the base clock clk0.
- the base clock clk0 was input to the FPGA 94 (DE0: Terasic).
- the clock clk1 was used to drive the switch 82a
- the clock clk2 was used to drive the switch 82b
- the clock clk3 was used to drive the switch 85 and the switch 86.
- the FPGA 94 divided the base clock clk0 by 20 to generate a sampling clock clk4 of 614.4 kHz.
- the sampling clock clk4 is common to both channels of the ADC 97.
- the nonlinear error and signal bandwidth of the ADC 97 are 24 ppm and 614.4 kHz, respectively, which are typical values.
- SG93 was composed of three nickel-hydrogen rechargeable batteries (Eenoop 1.3V: Sanyo Electric Co., Ltd.) and a 6-resistance voltage divider. SG93 kept the DC voltage p1 at about 3.9V. In addition, SG 93 switches the DC voltage p ⁇ b> 2 to 6 levels at the same interval between 0V and 3.6V. The reference voltage pr was 0V. The DC voltage p1 and the DC voltage p2 generated by SG93 were measured with a ratio meter provided in DVM95 (6581: ADC Corporation). The accuracy of DVM95 is 1 microvolt, which is equivalent to an error of about 0.3 ppm in the ratio measurement.
- the SB 96 adds the first source signal x1 (t) and the harmonic electrical signal h [1] by the first addition unit 11 to generate the first addition signal y1 (t).
- the SB 96 adds the second source signal x2 (t) and the harmonic electrical signal hB [1] by the second addition unit 11B to generate the second addition signal y2 (t).
- the resistance values of the resistance elements R1a, R1b, R2a, R2b, and R6 were 100 k ⁇ , and the resistance values of the resistance elements R3a and R3b were 10 k ⁇ .
- the ADC 97 measured the first addition signal y1 (t) and the second addition signal y2 (t). In the ADC 97, digital data was accumulated for 2.5 seconds, and average data was obtained to reduce random noise. Prior to the measurement, the two input terminals of the ADC 97 were grounded to obtain a reference signal including the operational amplifier offset and switching noise, and the operational amplifier offset and switching noise were removed by subtraction.
- FIG. 33A is a waveform diagram showing the first measurement signal z1 (t) from which harmonics are not removed.
- FIG. 33B is a waveform diagram showing the second measurement signal z2 (t) from which harmonics are not removed.
- the average value of the voltage was calculated in each of the regions V11 to V28 indicated by diagonal lines.
- the average value of the voltage in each of the regions V11 to V28 is assigned the same reference numeral as that of the region. For example, the average value of the voltage in the region V11 is described as V11.
- the voltage ratio rt was calculated by equation (3).
- the voltage ratio rt was recorded on the PC 98 and compared with the measured value of the DVM 95, and the nonlinear error of the ADC 97 was calculated.
- FIG. 34A is a waveform diagram showing the first measurement signal z1 (t) after removing the second harmonic.
- FIG. 34B is a waveform diagram showing the second measurement signal z2 (t) after removing the second harmonic.
- the PC 98 performs zero substitution and removes residual switching noise in each area m indicated by oblique lines, and then performs Fourier transform on each of the first measurement signal z1 (t) and the second measurement signal z2 (t), The fundamental wave (frequency f) and the second harmonic (frequency 2f) of each of the first measurement signal z1 (t) and the second measurement signal z2 (t) were calculated.
- PC98 calculated the phase and amplitude of the second harmonic of each of the first measurement signal z1 (t) and the second measurement signal z2 (t) and displayed them on the display.
- the operator manually controls the FG 92 while observing the phase and amplitude of the second harmonic, and the harmonic electric signal h [1] is set so that the amplitude of the second harmonic is less than 0.1. ] And the amplitude and phase of the harmonic electric signal hB [1] were adjusted.
- PC98 calculated voltage ratio r by Formula (2). The voltage ratio r was recorded in the PC 98, and compared with the measured value of the DVM 95, the nonlinear error of the ADC 97 was calculated. The effect of removing harmonics was evaluated by comparing the nonlinear error of the voltage ratio r and the nonlinear error of the voltage ratio rt.
- FIG. 35 is a diagram illustrating nonlinear errors.
- the horizontal axis represents the voltage ratio based on the measured value of DVM95, and the vertical axis represents the nonlinear error.
- a point Et indicates a non-linear error of the voltage ratio rt, and a point Ec indicates a non-linear error of the voltage ratio r. Comparing the point Et and the point Ec, it was confirmed that the nonlinear error was reduced by about 70% by removing the second harmonic. At the voltage ratio r, the nonlinear error is reduced to about 2 ppm or less.
- a curve NE10 shows a result obtained by approximating the nonlinearity of the ADC 97 before removing harmonics by a sixth-order polynomial function G (r).
- the curve NE10 agrees with the experimental result of the voltage ratio rt.
- a curve NE20 shows the result of simulating the nonlinear error when the nonlinearity of the ADC 97 is approximated by the curve NE10 and the second harmonic is removed. This agrees with the experimental result of the voltage ratio r.
- a curve NE30 is obtained by simulating the nonlinear error when the nonlinearity of the ADC 97 is approximated by the curve NE10 and the second harmonic, the third harmonic, and the fifth harmonic are removed. Nonlinear errors are suppressed to less than 1 ppm.
- the switch 82a will be described.
- the clock clk1 is at a high level
- the signal input to the terminal j1 is output from the terminal j2
- the signal input to the terminal j3 is output from the terminal j4.
- the clock clk1 is at a low level
- the signal input to the terminal j1 is output from the terminal j4
- the signal input to the terminal j3 is output from the terminal j2.
- the clock clk1 is replaced with the clock clk2 in the description of the switch 82a.
- the clock clk1 is replaced with the clock clk3 in the description of the switch 82a.
- Fig.33 (a) has shown the 1st measurement signal z1 (t) from which the harmonic is not removed
- the waveform of this 1st measurement signal z1 (t) is the 1st source signal x1 (t). It is the same as the waveform. Therefore, the waveform of the first measurement signal z1 (t) is described as the waveform of the first source signal x1 (t).
- the waveform of the second measurement signal z2 (t) in FIG. 33B will be described as the waveform of the second source signal x2 (t).
- FIG. 33C is a waveform diagram showing the clock clk1 supplied to the switch 82a
- FIG. 33D is a waveform diagram showing the clock clk2 supplied to the switch 82b
- FIG. FIG. 8 is a waveform diagram showing a clock clk3 supplied to the switches 85 and 86.
- the clock clk1 is high level
- the clock clk2 is low level
- the clock clk3 is low level. Accordingly, the first source signal x1 (t) has a level of the DC voltage p1, and the second source signal x2 (t) has a level of the DC voltage p2.
- the clock clk1 is high level
- the clock clk2 is low level
- the clock clk3 is high level. Accordingly, the first source signal x1 (t) and the second source signal x2 (t) have the level of the reference voltage pr.
- the clock clk1 is low level
- the clock clk2 is low level
- the clock clk3 is high level. Accordingly, the first source signal x1 (t) and the second source signal x2 (t) have the level of the reference voltage pr.
- the clock clk1 is low level
- the clock clk2 is low level
- the clock clk3 is low level. Accordingly, the first source signal x1 (t) has a level of the DC voltage p2, and the second source signal x2 (t) has a level of the DC voltage p1.
- the signal generation circuit 81 performs the switching operation to generate the step-like first source signal x1 (t) and the second source signal x2 (t).
- Embodiments 1 to 11 (FIGS. 1 to 32), the order of harmonics to be removed can be arbitrarily set, and the number N of harmonics to be removed can also be arbitrarily set.
- the nonlinear error can be reduced only by removing the lower-order harmonics, but the nonlinear error can be further reduced by removing even higher-order harmonics.
- the measuring device 1 can be manufactured as one product, or only the portion excluding the measuring unit 7 from the measuring device 1 is manufactured as one product. You can also In this case, the measurement unit 7 uses an existing or commercially available measurement device.
- the first adder 11a of one stage is provided.
- a plurality of stages of adders may be provided to add the first source signal x1 (t) and the harmonic electrical signal ha [n].
- the adder at the first stage adds the harmonic electrical signal ha [1] to the harmonic electrical signal ha [N] to obtain the harmonic electrical signal ha [1] to the harmonic electrical signal ha [N].
- An addition signal is generated, and the addition signal in the second stage is added to the first source signal x1 (t) to generate a first addition signal y1 (t).
- the oscillator 9a [n] generates the sine wave harmonic electric signal ha [n].
- the harmonic electrical signal ha [n] having another waveform may be generated.
- the oscillator 9a [n] may generate a rectangular harmonic electric signal ha [n] or a triangular harmonic electric signal ha [n].
- the harmonic generation unit 9b [n] generates the harmonic optical signal hb [n] having a rectangular wave, but generates the harmonic optical signal hb [n] having another waveform. May be.
- the harmonic generation unit 9b [n] may generate a triangular harmonic optical signal hb [n].
- the measuring apparatus 1 (FIG. 14) according to the third embodiment can be applied to a spectroscopic measuring instrument using an array detector called multichannel spectroscopic or polychromator.
- a spectroscopic measuring instrument using an array detector called multichannel spectroscopic or polychromator.
- quantification chemometrics
- the present invention can also be applied to spectroscopic measurement in this case.
- a low-pass filter may be provided instead of the first band-pass filter 4 or together with the first band-pass filter 4.
- a low pass filter may be provided instead of the second band pass filter 4B or together with the second band pass filter 4B.
- the low-pass filter is an analog filter that attenuates harmonics.
- a low-pass filter can be used together for the purpose of removing high harmonic components (for example, harmonics of 10 times or more).
- the low-pass filter is arranged in the preceding stage or the subsequent stage of the first adder 11, the preceding or the succeeding stage of the first adder 11a, the preceding or the succeeding stage of the first adder 11b, and the preceding or succeeding stage of the second adder 11B.
- the measurement apparatus 1 (FIGS. 18, 19, 21, 25, and 29) according to the fourth, fifth, sixth, seventh, or ninth embodiments is applied to voltage measurement.
- the configuration of the measurement unit 7 may be the same as that of the measurement unit 7 (FIG. 31) of the tenth embodiment or the measurement unit 7 (FIG. 32) of the eleventh embodiment.
- the insulation amplifier 100 shown in FIG. 31 can be arranged before the ADC 97.
- the compressor 101 illustrated in FIG. 32 may be disposed in front of the ADC 97 and the expander 102 illustrated in FIG. 32 may be disposed in the subsequent stage of the ADC 97.
- the measuring device 1 is applied to voltage measurement or optical measurement, but the scope of application of the present invention is not limited thereto.
- the measuring device 1 according to Embodiment 1, Embodiment 4, Embodiment 5, Embodiment 6, Embodiment 7, or Embodiment 9 (FIG. 1, FIG. 18, FIG. 19, FIG. 21, FIG. 25, FIG. 29) Can be applied to current measurement, acoustic measurement, or vibration measurement.
- each of the first physical quantity p1 to the fourth physical quantity p4 and the reference physical quantity pr is a current
- the first source signal x1 (t) and the second source signal x2 (t) Harmonic signal h [n], harmonic signal hB [n], first addition signal y1 (t), second addition signal y2 (t), first measurement signal z1 (t), and second measurement signal z2.
- Each of (t) is an electrical signal.
- each of the first physical quantity p1 to the fourth physical quantity p4 and the reference physical quantity pr is a sound pressure
- the first source signal x1 (t) and the second source signal x2 (t ) The harmonic signal h [n], the harmonic signal hB [n], the first addition signal y1 (t), and the second addition signal y2 (t) are sound waves.
- Each of the first measurement signal z1 (t) and the second measurement signal z2 (t) is an electric signal.
- each of the first physical quantity p1 to the fourth physical quantity p4 and the reference physical quantity pr is an elastic wave displacement
- the first source signal x1 (t) and the second source signal Each of x2 (t), harmonic signal h [n], harmonic signal hB [n], first addition signal y1 (t), and second addition signal y2 (t) is an elastic wave.
- Each of the first measurement signal z1 (t) and the second measurement signal z2 (t) is an electric signal.
- the present invention can be used in the field of measuring devices that measure physical quantities.
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Abstract
Description
p1:前記第1物理量
p2:前記第2物理量
pr:基準物理量
θ:前記第1計測信号の前記基本波の位相
f:前記第1計測信号の前記基本波の周波数
τ:前記遅延時間
p1:前記第1物理量
p2:前記第2物理量
pr:基準物理量
Δθ:前記位相差
f:前記第1計測信号の前記基本波の周波数
Δτ:前記遅延時間差
図1は、本発明の実施形態1に係る計測装置1を示すブロック図である。計測装置1は、第1信号生成部3(第1信号生成手段)、第1除去部5(第1除去手段)、及び計測部7(計測手段)を備える。第1信号生成部3は、第1物理量p1及び第2物理量p2に基づいて、基本波及び複数の高調波を含む第1ソース信号x1(t)を生成する。本明細書において、tは時間を示す。第1除去部5は、第1ソース信号x1(t)から複数の高調波の一部又は全部を除去する。
図1、図2、図5、及び図13を参照して、本発明の実施形態2に係る計測装置1について説明する。実施形態2に係る計測装置1は、実施形態1に係る計測装置1を電圧計測に適用する。従って、図1において、第1物理量p1、第2物理量p2、及び基準物理量prの各々は、電圧である。第1ソース信号x1(t)、第1加算信号y1(t)、第1計測信号z1(t)、及び高調波信号h[n]の各々は、電気信号である。また、計測装置1は、同時校正的利用に供される。
図1、図2、図5、及び図14を参照して、本発明の実施形態3に係る計測装置1について説明する。実施形態3に係る計測装置1は、実施形態1に係る計測装置1を分光計測のような光学計測に適用する。従って、図1において、第1物理量p1、第2物理量p2、及び基準物理量prの各々は、光の強度である。第1ソース信号x1(t)、高調波信号h[n]、及び第1加算信号y1(t)の各々は、光信号である。第1計測信号z1(t)は、電気信号である。また、計測装置1は、同時校正的利用に供される。
図1及び図18を参照して、本発明の実施形態4に係る計測装置1について説明する。図18は、計測装置1を示すブロック図である。計測装置1は、実施形態1に係る計測装置1の第1除去部5に代えて、第1バンドパスフィルター4(第1除去手段)を備える。計測装置1は、同時校正的利用に供される。
図1、図5、図19、及び図20を参照して、本発明の実施形態5に係る計測装置1について説明する。実施形態1~実施形態4に係る計測装置1は、同時校正的利用に供されている。これに対して、実施形態5に係る計測装置1は、同時校正的利用に供されるだけでなく、多点校正的利用に供される。多点校正的利用では、計測装置1は、非線形誤差のテーブルを予め用意して、そのテーブルを用いて、計測値を補正する。
図21~図24を参照して、本発明の実施形態6に係る計測装置1について説明する。実施形態1に係る計測装置では、1チャンネルの階段状信号(第1ソース信号x1(t))を生成したが、実施形態6に係る計測装置1では、2チャンネルの階段状信号(第1ソース信号x1(t)及び第2ソース信号x2(t))を生成する。計測装置1は同時校正的利用に供される。以下、主に実施形態6と実施形態1との相違点を説明する。
図21及び図25を参照して、本発明の実施形態7に係る計測装置1について説明する。図25は、実施形態7に係る計測装置1を示すブロック図である。計測装置1は、実施形態6に係る計測装置1の第1除去部5及び第2除去部5Bに代えて、第1バンドパスフィルター4(第1除去手段)及び第2バンドパスフィルター4B(第2除去手段)を備える。第1バンドパスフィルター4の構成は、図18の第1バンドパスフィルター4の構成と同様である。
図21及び図26~図28を参照して、本発明の実施形態8に係る計測装置1について説明する。実施形態8に係る計測装置1は、図21に示す実施形態6に係る計測装置1を電圧計測に適用する。従って、図21において、第1物理量p1、第2物理量p2、及び基準物理量prの各々は、電圧である。第1ソース信号x1(t)、第1加算信号y1(t)、第1計測信号z1(t)、高調波信号h[n]、第2ソース信号x2(t)、第2加算信号y2(t)、第2計測信号z2(t)、及び高調波信号hB[n]の各々は、電気信号である。また、実施形態8では、第1除去部5及び第2除去部5Bの各々は、2次高調波のみを除去する。従って、N=1である。また、計測装置1は、同時校正的利用に供される。
図19、図21、図29、及び図30を参照して、本発明の実施形態9に係る計測装置1について説明する。実施形態6~実施形態8に係る計測装置1は、計測と同時に計測部7の非線形性を低減し、同時校正的利用に供されている。これに対して、実施形態9に係る計測装置1は、同時校正的利用に供されるだけでなく、多点校正的利用に供される。
図13及び図31を参照して、本発明の実施形態10に係る計測装置1について説明する。図13に示すように、実施形態10に係る計測装置1の構成は、実施形態2に係る計測装置1の構成と同様である。ただし、実施形態10に係る計測装置1は、実施形態2に係る計測装置1の計測部7に代えて、図31に示す計測部7を備える。実施形態10に係る計測装置1は、同時校正的利用に供される。
図13及び図32を参照して、本発明の実施形態11に係る計測装置1について説明する。図13に示すように、実施形態11に係る計測装置1の構成は、実施形態2に係る計測装置1の構成と同様である。ただし、実施形態11に係る計測装置1は、実施形態2に係る計測装置1の計測部7に代えて、図32に示す計測部7を備える。実施形態11に係る計測装置1は、同時校正的利用に供される。
3 第1信号生成部
3B 第2信号生成部
5 第1除去部
5B 第2除去部
7 計測部
9[n] 高調波生成部
9B[n] 高調波生成部
11 第1加算部
11B 第2加算部
13 第1フーリエ変換部
13B 第2フーリエ変換部
15 第1制御部
15B 第2制御部
18 記憶部
19 検出器
21 位相算出部
23 遅延算出部
25 第1比算出部
53 第1差算出部
55 第3比算出部
57 補正部
61 位相差算出部
63 遅延差算出部
65 第2比算出部
71 第2差算出部
Claims (15)
- 第1物理量及び第2物理量に基づいて、基本波及び複数の高調波を含む第1ソース信号を生成する第1信号生成部と、
前記第1ソース信号から前記複数の高調波の一部又は全部を除去する第1除去部と
を備える、計測装置。 - 前記第1ソース信号は、周期信号であり、
前記第1ソース信号の1周期は、
第1時間幅を有し、前記第1物理量を示す第1信号と、
第2時間幅を有し、前記第2物理量を示す第2信号と、
第3時間幅を有し、基準物理量を示す基準信号と
を含む、請求項1に記載の計測装置。 - 計測部をさらに備え、
前記第1除去部は、
前記複数の高調波のうち除去対象の高調波の周波数を有する高調波信号と前記第1ソース信号とを加算し、第1加算信号を出力する第1加算部を含み、
前記計測部は、アナログの前記第1加算信号をデジタルの第1計測信号として出力し、
前記第1除去部は、
前記高調波信号を生成する高調波生成部と、
前記第1計測信号に含まれる複数の高調波を算出する第1フーリエ変換部と、
前記除去対象の高調波と一致する高調波が前記第1計測信号から除去されるように、前記高調波生成部に、前記高調波信号の振幅及び/又は位相を調整させる第1制御部と
をさらに含む、請求項1又は請求項2に記載の計測装置。 - 前記第1物理量及び前記第2物理量の各々は、電圧であり、
前記第1ソース信号及び前記高調波信号の各々は、電気信号であり、
前記計測部は、
アナログ信号である前記第1加算信号をデジタル信号に変換して、前記デジタル信号を前記第1計測信号として出力するアナログ/デジタル変換部を含む、請求項3に記載の計測装置。 - 前記第1物理量及び前記第2物理量の各々は、光の強度であり、
前記第1ソース信号及び前記高調波信号の各々は、光信号であり、
前記計測部は、
光信号である前記第1加算信号を電気信号に変換する光電変換部と、
アナログ信号である前記電気信号をデジタル信号に変換して、前記デジタル信号を前記第1計測信号として出力するアナログ/デジタル変換部と
を含む、請求項3に記載の計測装置。 - 前記計測部は、
前記第1計測信号の基本波の位相を算出する位相算出部と、
前記第1計測信号の前記基本波の位相に基づいて、前記第1物理量に対する前記第2物理量の比の値を算出する第1比算出部と
を含む、請求項3から請求項5のいずれか1項に記載の計測装置。 - 第1モード及び第2モードを含む非線形誤差計測モードを有し、
前記第1モード及び前記第2モードの各々において、前記第1信号生成部は、前記第1物理量が一定にされて前記第2物理量が段階的に変化する前記第1ソース信号を出力し、
前記第1モードにおいて、前記第1加算部は、前記高調波信号を前記第1ソース信号に加算して、前記第1加算信号を出力し、前記計測部は、前記高調波が除去された前記第1計測信号を出力し、
前記第1モードにおいて、前記第1比算出部は、前記第2物理量ごとに、前記高調波が除去された前記第1計測信号に基づいて、前記比の値を算出し、
前記第2モードにおいて、前記第1加算部は、前記高調波信号を前記第1ソース信号に加算することなく、前記第1ソース信号を前記第1加算信号として出力し、前記計測部は、前記高調波が除去されていない前記第1計測信号を出力し、
前記第2モードにおいて、前記第1比算出部は、前記第2物理量ごとに、前記高調波が除去されていない前記第1計測信号に基づいて、前記比の値を算出し、
前記計測部は、
前記第2物理量ごとに、前記第1モードで算出された前記比の値と前記第2モードで算出された前記比の値との差を算出する第1差算出部と、
前記第2物理量ごとに、前記第2モードで算出された前記比の値と関連付けて前記差を記憶する記憶部と
をさらに含む、請求項6又は請求項7に記載の計測装置。 - 基本波及び複数の高調波を含むと共に、前記第1ソース信号の前記第1物理量と前記第2物理量とを入れ替えた波形を有する第2ソース信号を生成する第2信号生成部と、
前記第2ソース信号から前記複数の高調波の一部又は全部を除去する第2除去部と
をさらに備える、請求項1から請求項5のいずれか1項に記載の計測装置。 - 基本波及び複数の高調波を含むと共に、前記第1ソース信号の前記第1物理量と前記第2物理量とを入れ替えた波形を有する第2ソース信号を生成する第2信号生成部と、
前記第2ソース信号から前記複数の高調波の一部又は全部を除去する第2除去部と
をさらに備え、
前記第2除去部は、
前記第2ソース信号の前記複数の高調波のうち除去対象の高調波の周波数を有する高調波信号と前記第2ソース信号とを加算し、第2加算信号を出力する第2加算部を含み、
前記計測部は、アナログの前記第2加算信号をデジタルの第2計測信号として出力し、
前記第2除去部は、
前記第2ソース信号と加算する前記高調波信号を生成する高調波生成部と、
前記第2計測信号に含まれる複数の高調波を算出する第2フーリエ変換部と、
前記第2ソース信号の前記除去対象の高調波と一致する高調波が除去されるように、前記高調波生成部に、前記第2ソース信号と加算する前記高調波信号の振幅及び/又は位相を調整させる第2制御部と
をさらに含む、請求項3から請求項5のいずれか1項に記載の計測装置。 - 前記計測部は、
前記第1計測信号の基本波と前記第2計測信号の基本波との位相差を算出する位相差算出部と、
前記位相差に基づいて、前記第1物理量に対する前記第2物理量の比の値を算出する第2比算出部と
を含む、請求項10に記載の計測装置。 - 第1モード及び第2モードを含む非線形誤差計測モードを有し、
前記第1モード及び前記第2モードの各々において、前記第1信号生成部は、前記第1物理量が一定レベルに保持されて前記第2物理量が段階的に変化する前記第1ソース信号を生成し、
前記第1モード及び前記第2モードの各々において、前記第2信号生成部は、前記第1物理量が前記一定レベルに保持されて前記第2物理量が段階的に変化する前記第2ソース信号を生成し、
前記第1モードにおいて、前記第1加算部は、前記高調波信号を前記第1ソース信号に加算して、前記第1加算信号を出力し、前記計測部は、前記高調波が除去された前記第1計測信号を出力し、
前記第1モードにおいて、前記第2加算部は、前記高調波信号を前記第2ソース信号に加算して、前記第2加算信号を出力し、前記計測部は、前記高調波が除去された前記第2計測信号を出力し、
前記第1モードにおいて、前記第2比算出部は、前記第2物理量ごとに、前記高調波が除去された前記第1計測信号及び前記第2計測信号に基づいて、前記比の値を算出し、
前記第2モードにおいて、前記第1加算部は、前記高調波信号を前記第1ソース信号に加算することなく、前記第1ソース信号を前記第1加算信号として出力し、前記計測部は、前記高調波が除去されていない前記第1計測信号を出力し、
前記第2モードにおいて、前記第2加算部は、前記高調波信号を前記第2ソース信号に加算することなく、前記第2ソース信号を前記第2加算信号として出力し、前記計測部は、前記高調波が除去されていない前記第2計測信号を出力し、
前記第2モードにおいて、前記第2比算出部は、前記第2物理量ごとに、前記高調波が除去されていない前記第1計測信号及び前記第2計測信号に基づいて、前記比の値を算出し、
前記計測部は、
前記第2物理量ごとに、前記第1モードで算出された前記比の値と前記第2モードで算出された前記比の値との差を算出する第2差算出部と、
前記第2物理量ごとに、前記第2モードで算出された前記比の値と関連付けて前記差を記憶する記憶部と
をさらに含む、請求項11又は請求項12に記載の計測装置。 - 前記計測部は、
第3物理量に対する第4物理量の比の値を算出する第3比算出部と、
前記記憶部が記憶している前記差に基づいて、前記第3比算出部が算出した前記比の値を補正する補正部と
をさらに含む、請求項8又は請求項13に記載の計測装置。 - 第1物理量及び第2物理量に基づいて、基本波及び複数の高調波を含む第1ソース信号を生成するステップと、
前記第1ソース信号から前記複数の高調波の一部又は全部を除去するステップと
を含む、計測方法。
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